CN111739786B - Laser sputtering ion source capable of translating and rotating - Google Patents
Laser sputtering ion source capable of translating and rotating Download PDFInfo
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- CN111739786B CN111739786B CN202010633272.0A CN202010633272A CN111739786B CN 111739786 B CN111739786 B CN 111739786B CN 202010633272 A CN202010633272 A CN 202010633272A CN 111739786 B CN111739786 B CN 111739786B
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- target
- rotating
- fixing frame
- translation
- translating
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- 238000004544 sputter deposition Methods 0.000 title claims abstract description 9
- 102000004310 Ion Channels Human genes 0.000 claims abstract description 18
- 230000005540 biological transmission Effects 0.000 claims description 17
- 230000001133 acceleration Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 6
- 238000001816 cooling Methods 0.000 abstract description 3
- 239000002699 waste material Substances 0.000 abstract description 2
- 150000002500 ions Chemical class 0.000 description 26
- 239000012159 carrier gas Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000001819 mass spectrum Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
- H01J49/161—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The invention discloses a laser sputtering ion source capable of translating and rotating, which comprises a rotating mechanism, a translating mechanism, a target head and a reaction source, wherein the reaction source is arranged on a base, the target head is arranged on the rotating mechanism, the rotating mechanism is arranged on the translating mechanism, the translating mechanism is arranged on a fixing frame, the target head is provided with a target sheet, and the target sheet is contacted with an ion channel of the reaction source. The device has novel and compact structural design, realizes the rotation, rotation and translation of the target sheet, can fully utilize the target sheet material, avoids the waste of the target sheet material, reduces the cost input, increases the air inflow through the double air inlets, improves the ion cooling speed, and can generate ion clusters with more abundant types.
Description
Technical Field
The invention relates to the technical field of ion sources, in particular to a laser sputtering ion source capable of translating and rotating.
Background
Laser sputter ion sources are mass spectrometry ion sources commonly used today. In the prior art, a beam of laser irradiates the surface of a rotary target to generate plasma, and the plasma is cooled by a carrier gas to generate various ions, and then the ions are transmitted to a mass spectrum detection part. The defect of the mode is that the laser is fixed, the target rotates, only one annular pit of the target can be ablated, other parts of materials of the target are wasted, the target is penetrated for a period of time, stable ion supply cannot be provided for a long time, the target is frequently replaced, and inconvenience is brought to use; the cooling effect of the reaction source of one air inlet is limited by the amount of air taken in and the composition of the gas, and cannot generate more desired ions.
The existing device can realize the rotation and translation of the target, but the existing device is driven by double motors, so that the ion source generating device has a complex structure and occupies a large amount of ion source volume.
Disclosure of Invention
The invention aims to provide a laser sputtering ion source capable of translating and rotating, so as to solve the problems of the prior art, and ensure that an ion source generating device has a compact structure, high target sheet use efficiency and can generate richer ions.
In order to achieve the above object, the present invention provides the following solutions:
the invention provides a laser sputtering ion source capable of translating and rotating, which comprises a rotating mechanism, a translating mechanism, a target head and a reaction source, wherein the reaction source is arranged on a base, the target head is arranged on the rotating mechanism, the rotating mechanism is arranged on the translating mechanism, the translating mechanism is arranged on a fixing frame, the target head is provided with a target sheet, and the target sheet is contacted with an ion channel of the reaction source.
Preferably, the rotating mechanism comprises a stepping motor and a transmission rod, the stepping motor is connected with the transmission rod through a coupler, and the transmission rod penetrates through the fixing frame to be connected with the target head.
Preferably, a spring is arranged between the target head and the transmission rod, the stepping motor is electrically connected with a controller, and the controller can control the rotating speed and the acceleration of the stepping motor.
Preferably, the translation mechanism comprises a turbine, a worm, a stud and a translation block, wherein a groove is formed in the translation block, the turbine is located in the groove and arranged on the stud, the worm is arranged on the transmission rod, the turbine is matched with the worm, the stud penetrates through the translation block, and two ends of the stud are respectively in threaded connection with the fixing frame.
Preferably, four sliding rods are symmetrically arranged on the translation block, and the sliding rods are arranged on the fixing frame in a sliding manner.
Preferably, the stud is a double-end threaded rod, and limit baffles are arranged at two ends of the double-end threaded rod.
Preferably, the fixing frame is provided with a waist-shaped hole, and limit switches are arranged at two ends of the waist-shaped hole and are electrically connected with the stepping motor.
Preferably, the reaction source is provided with an ion channel and two air inlet channels which are mutually communicated, one end of the ion channel is in contact with the target piece, the other end of the ion channel is provided with a conical nozzle which is used for being matched with a laser beam emitted by a laser, and the air inlet channels are connected with the air bottle through electromagnetic pulse valves.
Compared with the prior art, the invention has the following technical effects:
the device has novel and compact structural design, realizes the rotation and translation of the target sheet, can fully utilize the target sheet material, avoids the waste of the target sheet material, reduces the cost input, increases the air inflow through the double air inlets, improves the ion cooling speed, and can generate ion groups with more abundant types.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a translatable and rotatable laser sputter ion source according to the present invention;
FIG. 2 is a schematic diagram of a translatable and rotatable laser sputter ion source according to the present invention;
FIG. 3 is a schematic diagram III of a translatable and rotatable laser sputter ion source according to the present invention;
wherein: the device comprises a 1-fixing frame, a 2-base, a 3-worm, a 4-turbine, a 5-double-head threaded rod, a 6-limit baffle, a 7-sliding rod, an 8-coupler, a 9-stepping motor, a 10-transmission rod, an 11-limit switch, a 12-target piece, a 13-target head, a 14-reaction source, a 15-conical nozzle, a 16-ion channel, a 17-air inlet channel, a 18-electromagnetic pulse valve, a 19-spring and a 20-translation block.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by a person skilled in the art based on the embodiments of the invention without any inventive effort, are intended to fall within the scope of the invention.
The invention aims to provide a laser sputtering ion source capable of translating and rotating, so as to solve the problems in the prior art, and the ion source generating device has a compact structure, high target piece use efficiency and can generate richer ions.
In order that the above-recited objects, features and advantages of the present invention will become more readily apparent, a more particular description of the invention will be rendered by reference to the appended drawings and appended detailed description.
As shown in fig. 1 to 3: the embodiment provides a laser sputtering ion source capable of translating and rotating, which comprises a rotating mechanism, a translating mechanism, a target head 13 and a reaction source 14, wherein the reaction source 14 is arranged on a base 2, the base 2 is connected with a fixing frame 1, the target head 13 is arranged on the rotating mechanism, the rotating mechanism is arranged on the translating mechanism, the translating mechanism is arranged on the fixing frame 1, a target piece 12 is arranged on the target head 13, and the target piece 12 is contacted with an ion channel 16 of the reaction source 14. The target 12 is a cylinder, and the target 12 can be gold, silver, copper, or the like.
Specifically, the rotating mechanism comprises a stepping motor 9 and a transmission rod 10, the stepping motor 9 is connected with the transmission rod 10 through a coupler 8, and the transmission rod 10 passes through the fixing frame 1 to be connected with the target head 13. A spring 19 is arranged between the target head 13 and the transmission rod 10, wherein the target head 13 is connected with the transmission rod 10 through a positioning pin, two waist-shaped holes are symmetrically formed in two sides of the target head 13, the positioning pin penetrates through the transmission rod 10 and slides in the waist-shaped holes, and the popup window is in a compressed state, so that a pretightening force is conveniently applied to the target sheet 12, and the target sheet 12 is enabled to be more attached to the ion channel 16. The stepper motor 9 is electrically connected to a controller which is capable of controlling the rotational speed and acceleration of the stepper motor 9.
The translation mechanism comprises a turbine 4, a worm 3, a stud and a translation block 20, wherein a groove is formed in the translation block 20, the turbine 4 is located in the groove and arranged on the stud, the worm 3 is arranged on a transmission rod 10, the turbine 4 is matched with the worm 3, the stud penetrates through the translation block 20, and two ends of the stud are respectively in threaded connection with the fixing frame 1. The combination of the worm and the worm gears with different types can realize the matching of different rotating speeds and translation speeds. Four sliding rods 7 are symmetrically arranged on the translation block 20, and the sliding rods 7 are arranged on the fixing frame 1 in a sliding manner. The double-end threaded rod 5 is used as the stud, and limit baffles 6 are arranged at the two ends of the double-end threaded rod 5 to prevent the double-end threaded rod 5 from being separated from the fixing frame 1 and the target head 13 and the reaction source 14 from interfering. Be provided with waist type hole on the mount 1, transfer line 10 passes waist type hole, the translation of transfer line 10 of being convenient for, and the both ends in waist type hole set up limit switch 11, and limit switch 11 is connected with the (driver) electricity of step motor 9, and after transfer line 10 touched limit switch 11, step motor 9 reversal carries out translational motion. The stepping motor 9 drives the target head 13 to rotate and simultaneously drives the turbine 4 and the worm 3 to rotate, so that the reciprocating translation of the target head 13 on the slide rod 7 is realized, and the materials of the target sheet 12 can be fully and uniformly utilized.
The reaction source 14 is provided with an ion channel 16 and two air inlet channels 17 which are mutually communicated, one end of the ion channel 16 is contacted with the target 12, the other end of the ion channel 16 is provided with a conical nozzle 15 in a collinear manner, the conical nozzle 15 is used for being matched with a laser beam emitted by a laser, and the air inlet channels 17 are connected with a gas cylinder through an electromagnetic pulse valve 18.
The conical nozzle 15 is fixed on the outlet of the ion channel 16 through a bolt, the laser beam emitted by the laser passes through the conical nozzle 15 after being focused by the focusing mirror, the ion channel 16 is beaten on the contact surface of the target 12, then the electromagnetic pulse valve 18 sprays carrier gas into the air inlet according to the time sequence, the carrier gas and ions are fully collided and cooled in the ion channel 16, and the carrier gas and the ions are sprayed out of the conical nozzle 15 and enter the mass spectrum detection area at the back.
The principles and embodiments of the present invention have been described in this specification with reference to specific examples, the description of which is only for the purpose of aiding in understanding the method of the present invention and its core ideas; also, it is within the scope of the present invention to be modified by those of ordinary skill in the art in light of the present teachings. In view of the foregoing, this description should not be construed as limiting the invention.
Claims (4)
1. A laser sputtering ion source capable of translating and rotating is characterized in that: the ion channel detector comprises a rotating mechanism, a translation mechanism, a target head and a reaction source, wherein the reaction source is arranged on a base, the target head is arranged on the rotating mechanism, the rotating mechanism is arranged on the translation mechanism, the translation mechanism is arranged on a fixing frame, a target sheet is arranged on the target head, and the target sheet is in contact with an ion channel of the reaction source; the rotating mechanism comprises a stepping motor and a transmission rod, the stepping motor is connected with the transmission rod through a coupler, the transmission rod penetrates through the fixing frame to be connected with the target head, the translation mechanism comprises a worm wheel, a worm, a stud and a translation block, a groove is formed in the translation block, the worm wheel is located in the groove and arranged on the stud, the worm is arranged on the transmission rod, the worm wheel is matched with the worm, the stud penetrates through the translation block, two ends of the stud are respectively in threaded connection with the fixing frame, a waist-shaped hole is formed in the fixing frame, limit switches are arranged at two ends of the waist-shaped hole, and the limit switches are electrically connected with the stepping motor; the double-end screw bolt is a double-end threaded rod, and limit baffles are arranged at two ends of the double-end threaded rod.
2. The translatable and rotatable laser sputter ion source of claim 1, wherein: the spring is arranged between the target head and the transmission rod, the stepping motor is electrically connected with a controller, and the controller can control the rotating speed and the acceleration of the stepping motor.
3. The translatable and rotatable laser sputter ion source of claim 1, wherein: four sliding rods are symmetrically arranged on the translation block, and the sliding rods are arranged on the fixing frame in a sliding manner.
4. The translatable and rotatable laser sputter ion source of claim 1, wherein: the reaction source is provided with an ion channel and two air inlet channels which are mutually communicated, one end of the ion channel is in contact with the target piece, the other end of the ion channel is provided with a conical nozzle which is used for being matched with a laser beam emitted by a laser, and the air inlet channels are connected with the air bottle through electromagnetic pulse valves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010633272.0A CN111739786B (en) | 2020-07-02 | 2020-07-02 | Laser sputtering ion source capable of translating and rotating |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010633272.0A CN111739786B (en) | 2020-07-02 | 2020-07-02 | Laser sputtering ion source capable of translating and rotating |
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| Publication Number | Publication Date |
|---|---|
| CN111739786A CN111739786A (en) | 2020-10-02 |
| CN111739786B true CN111739786B (en) | 2024-02-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010633272.0A Active CN111739786B (en) | 2020-07-02 | 2020-07-02 | Laser sputtering ion source capable of translating and rotating |
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| Country | Link |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114967166B (en) * | 2022-06-17 | 2023-11-21 | 苏州铸正机器人有限公司 | Direction-adjustable indicating light unit and image corrector with same |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101872708A (en) * | 2010-02-05 | 2010-10-27 | 厦门大学 | An ion source extraction device suitable for direct ionization of solid samples |
| CN205462908U (en) * | 2016-04-11 | 2016-08-17 | 广东工业大学 | Automatic spraying mechanical arm |
| CN206819968U (en) * | 2017-07-04 | 2017-12-29 | 东华理工大学 | Generating device of laser sputtering ion source |
| CN107738369A (en) * | 2017-10-24 | 2018-02-27 | 庞锦钊 | A kind of two-wheel precision LED substrate wafer cutter device |
| CN108668651A (en) * | 2018-05-22 | 2018-10-19 | 福建省复新农业科技发展有限公司 | A reciprocating agricultural straw chopping device |
| CN108908227A (en) * | 2018-05-31 | 2018-11-30 | 河南欧文包装制品有限公司 | A kind of disposable lunch-box production and processing workbench |
| CN109173816A (en) * | 2018-10-12 | 2019-01-11 | 邢小云 | A kind of obstetrics and gynecology department thimerosal Preparation equipment |
| CN109433112A (en) * | 2018-12-26 | 2019-03-08 | 柳州申通汽车科技有限公司 | A kind of preparation facilities of ternary precursor |
| CN208736513U (en) * | 2018-08-14 | 2019-04-12 | 黄晓东 | A kind of hydraulic engineering water-level detecting device |
| CN210357016U (en) * | 2019-06-19 | 2020-04-21 | 徐州腾源化肥有限公司 | Agricultural fertilizer processingequipment |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2460567C (en) * | 2001-09-17 | 2010-11-02 | Mds Inc. | Method and apparatus for cooling and focusing ions |
| CA2493836A1 (en) * | 2004-01-22 | 2005-07-22 | Ionalytics Corporation | Method and apparatus for faims for in-line analysis of multiple samples |
-
2020
- 2020-07-02 CN CN202010633272.0A patent/CN111739786B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101872708A (en) * | 2010-02-05 | 2010-10-27 | 厦门大学 | An ion source extraction device suitable for direct ionization of solid samples |
| CN205462908U (en) * | 2016-04-11 | 2016-08-17 | 广东工业大学 | Automatic spraying mechanical arm |
| CN206819968U (en) * | 2017-07-04 | 2017-12-29 | 东华理工大学 | Generating device of laser sputtering ion source |
| CN107738369A (en) * | 2017-10-24 | 2018-02-27 | 庞锦钊 | A kind of two-wheel precision LED substrate wafer cutter device |
| CN108668651A (en) * | 2018-05-22 | 2018-10-19 | 福建省复新农业科技发展有限公司 | A reciprocating agricultural straw chopping device |
| CN108908227A (en) * | 2018-05-31 | 2018-11-30 | 河南欧文包装制品有限公司 | A kind of disposable lunch-box production and processing workbench |
| CN208736513U (en) * | 2018-08-14 | 2019-04-12 | 黄晓东 | A kind of hydraulic engineering water-level detecting device |
| CN109173816A (en) * | 2018-10-12 | 2019-01-11 | 邢小云 | A kind of obstetrics and gynecology department thimerosal Preparation equipment |
| CN109433112A (en) * | 2018-12-26 | 2019-03-08 | 柳州申通汽车科技有限公司 | A kind of preparation facilities of ternary precursor |
| CN210357016U (en) * | 2019-06-19 | 2020-04-21 | 徐州腾源化肥有限公司 | Agricultural fertilizer processingequipment |
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