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CN111664943B - Fabrication method of split-focal plane polarization detector and orthogonal polarization image acquisition method - Google Patents

Fabrication method of split-focal plane polarization detector and orthogonal polarization image acquisition method Download PDF

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CN111664943B
CN111664943B CN202010358798.2A CN202010358798A CN111664943B CN 111664943 B CN111664943 B CN 111664943B CN 202010358798 A CN202010358798 A CN 202010358798A CN 111664943 B CN111664943 B CN 111664943B
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focal plane
polarization
detector
image
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CN111664943A (en
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冯斌
赵永强
李琳
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Northwestern Polytechnical University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00Measuring polarisation of light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/30Polarising elements
    • G02B5/3025Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • G02B5/3033Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state in the form of a thin sheet or foil, e.g. Polaroid
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00Measuring polarisation of light
    • G01J4/04Polarimeters using electric detection means

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Polarising Elements (AREA)

Abstract

本发明公开了一种分焦平面偏振探测器的制作方法及正交偏振图像获取方法,通过在基底上镀制呈梳状周期排布的单方向偏振膜形成微偏振片阵列、在焦平面探测器的焦平面上粘贴微偏振片阵列构成分焦平面偏振探测器、获取分焦平面偏振探测器直接输的强度图像和第一幅偏振图像、将强度图像和第一幅偏振图像沿垂直于单方向偏振膜延展方向分别进行两倍放大处理、在全尺寸的强度图像中去除全尺寸的第一幅偏振图像得到全尺寸的第二幅偏振图像,提出具有制造工艺简单、结构紧凑、集成度高、可快照式成像、成本低的分焦平面偏振探测器的制作方法和正交偏振图像获取方法。

Figure 202010358798

The invention discloses a method for manufacturing a split-focus plane polarization detector and a method for acquiring an orthogonal polarization image. A micro-polarizer array is formed by plating a unidirectional polarizing film in a comb-shaped periodic arrangement on a substrate, and the detection is performed on the focal plane. The micro-polarizer array is pasted on the focal plane of the detector to form a split focal plane polarization detector, the intensity image and the first polarization image directly output by the split focal plane polarization detector are obtained, and the intensity image and the first polarization image are aligned perpendicular to the single plane. The expansion direction of the polarizing film is doubled respectively, and the full-size first polarized image is removed from the full-size intensity image to obtain the full-size second polarized image. The proposed method has the advantages of simple manufacturing process, compact structure and high integration , a method for making a snap-shot imaging, low-cost split-focus plane polarization detector and a method for acquiring an orthogonal polarization image.

Figure 202010358798

Description

Manufacturing method of polarization detector with split focal plane and orthogonal polarization image acquisition method
Technical Field
The invention belongs to the technical field of photoelectric imaging, and particularly relates to a manufacturing method of a polarization detector of a focal plane and an orthogonal polarization image acquisition method.
Background
Light has four basic physical properties, intensity, wavelength, polarization, and phase. Many living beings in nature are capable of sensing the polarization properties of light, such as insects, sharks, and the like. The human eye cannot perceive the polarization information of the light, but the human can acquire the polarization information of the scene by means of polarization imaging technology. At present, the polarization imaging technology has potential application value in the aspects of haze-removing imaging, underwater target detection, industrial detection and the like.
Polarization imaging may obtain polarization information of a scene. Currently, international polarization imaging systems are mainly classified into four types: time-sharing type, amplitude-dividing type, aperture-dividing type and focal plane type. The time-sharing type polarization imaging system is only suitable for static scenes, and is characterized in that a rotatable polarizing film is additionally arranged in a light path, a plurality of polarization images of the polarizing film under different rotation angles are obtained at different moments, and polarization characteristic images are obtained after polarization analysis processing. The amplitude-splitting polarization imaging system utilizes the catadioptric principle of a beam splitter prism to split incident light into multiple paths, each path corresponds to one detector, and the defects of large size and poor stability exist, for example, a vibration-splitting polarization imaging system is disclosed in a document (CN 107392948A). Although the multiple paths of the aperture-splitting polarization imaging system share one detector, the optical system design is complex, different focal plane areas need to be registered at pixel level, and the system stability is poor, for example, a system and a method for aperture-splitting polarization imaging are disclosed in the literature (patent publication: CN 105352603B). Compared with other three types of polarization imaging systems, the polarization imaging system of the split focal plane is realized by integrating the micro-polarizer array on the focal plane of the detector, and has the advantages of compact structure, high integration level, snapshot imaging and the like, for example, a split focal plane infrared polarization imaging system is disclosed in the document (CN 108731821B).
The literature ("pixel polarizer array preparation and its application in polarization image enhancement", "physical bulletin", 4.2014, vol 63, 2 nd, zhang xiong, etc.) discloses a method for preparing a sample of a micro-polarizer array with four polarization directions of 0 °, 45 °, 90 ° and 135 ° and integrally packaging the sample to a focal plane of a detector to form a focal plane polarization camera. In the manufacturing scheme, the patterns of the micro-polarizer array sample wafer are complex, the micro-polarizers in four polarization directions are arranged in a staggered mode, the period of a grating is less than 200nm, and the manufacturing cost is high because the grating can only be completed by depending on high-precision and expensive electron beam exposure equipment to expose the photoresist; in the process of pasting the micro-polarizer array sample containing four polarization directions to the focal plane of the detector, the micro-polarizers of four different polarization directions are required to be strictly aligned, and the registration difficulty is high.
Disclosure of Invention
Aiming at the defects of the existing scheme, the invention provides a manufacturing method of a polarization detector of a focus splitting plane and an orthogonal polarization image acquisition method. The manufacturing method of the split-focus plane polarization detector and the orthogonal polarization image acquisition method have the advantages that the manufacturing method of the split-focus plane polarization detector is simple in manufacturing process, compact in structure, high in integration level, capable of achieving snapshot imaging and low in cost, and the orthogonal polarization image acquisition method is provided.
In order to achieve the purpose, the invention adopts the following technical scheme to realize the purpose:
the invention discloses a method for manufacturing a polarization detector with a split focal plane, which comprises the following steps:
s11: plating a unidirectional polarizing film which is arranged in a comb-shaped period on a substrate to form a micro-polarizer array;
s12: and pasting the micro-polaroid array to a focal plane of a focal plane detector to form a focal plane polarization detector, wherein the substrate and the working band of the focal plane detector have an intersection band I, and the working band of the unidirectional polarization film and the intersection band I have an intersection band II.
As a preferred embodiment of the present invention: the plurality of unidirectional polarizing films are arranged on the surface of the substrate in a comb-shaped period, wherein the width of a single unidirectional polarizing film is equal to 1/2 of the arrangement period.
As a preferred embodiment of the present invention: the thickness of the substrate is 0.1-2.0 mm.
As a preferred embodiment of the present invention: the focal plane detector is any one of a visible light focal plane detector (the working wave band is 0.4-0.7 mu m), a visible-near infrared focal plane detector (the working wave band is 0.4-1.0 mu m), a visible-short wave infrared focal plane detector (the working wave band is 0.4-1.7 mu m) and a short wave infrared focal plane detector (the working wave band is 0.9-1.7 mu m).
As a preferred embodiment of the present invention: and adhering the micro-polaroid array to the focal plane of the focal plane detector, wherein the adhering surface of the micro-polaroid array is any one of the surface with the unidirectional polarizing film and the surface without the unidirectional polarizing film.
As a preferred embodiment of the present invention: the micro-polaroid array is adhered to the focal plane detector, and the alignment direction of the micro-polaroid array and the focal plane detector is any one of the two directions of alignment along the horizontal direction of the focal plane detector and alignment along the vertical direction of the focal plane detector.
As a preferred embodiment of the present invention: the single polarization film is aligned along the horizontal direction of the focal plane detector, the extension direction of the single polarization film is consistent with the horizontal direction of the focal plane detector, and the single polarization film is aligned with the n of the focal plane detector1Line pixels aligned, n1Is a positive integer.
As a preferred embodiment of the present invention: the single polarization film is aligned along the vertical direction of the focal plane detector, the extension direction of the single polarization film is consistent with the vertical direction of the focal plane detector, and the single polarization film is aligned with the n of the focal plane detector2Column pixels aligned, n2Is a positive integer.
As a preferred embodiment of the present invention: the method for sticking the micro-polaroid array to the focal plane of the focal plane detector to form the focal plane polarization detector comprises the following steps:
s21: coating ultraviolet sensitive glue with the thickness of less than 100nm on a focal plane of the focal plane detector;
s22: the working light source is formed by adding a polaroid in front of the LED light source, wherein the transmission direction of the polaroid is different from that of the unidirectional polarizing film;
s23: under the irradiation of the working light source, adjusting the position and the angle of the micro-polaroid array to enable the micro-polaroid array to be aligned with a focal plane pixel of the focal plane detector;
s24: and curing the micro-polaroid array and the focal plane of the focal plane detector together by using an ultraviolet lamp for exposure.
Based on the polarization detector with the focal plane being divided, the invention discloses an orthogonal polarization image acquisition method, which comprises the following steps:
s31: in the polarization detector with the focus-splitting plane prepared by the method for manufacturing the polarization detector with the focus-splitting plane according to any one of the embodiments, the pixel which is not acted by the unidirectional polarizing film outputs the intensity image, and the pixel which is acted by the unidirectional polarizing film outputs the first polarization image, so that the intensity image and the first polarization image are obtained;
s32: respectively carrying out double-image amplification processing on the intensity image and the first polarized image along a direction perpendicular to the extending direction of the unidirectional polarizing film by using an image amplification processing method to correspondingly obtain a full-size intensity image and a full-size first polarized image;
s33: and removing the full-size first polarization image from the full-size intensity image to obtain a full-size second polarization image, so as to obtain two full-size orthogonal polarization images, wherein the removing method is to subtract the full-size first polarization image from a beta-time full-size intensity image to obtain the full-size second polarization image, the beta value is a ratio of an average value of the first polarization image output by the polarization detector of the focus splitting plane to an average value of the intensity image under the condition of irradiation of a linearly polarized light source in the same transmission direction of the unidirectional polarization film, and the average value of the images is an average value of all pixel values in the images.
As a preferred embodiment of the present invention: the image amplification processing method is any one of four methods, namely nearest neighbor interpolation, linear interpolation, cubic spline interpolation and deep learning.
The invention has the beneficial effects that:
the invention plates the unidirectional polarizing film which is arranged in a comb-shaped period on the substrate, sticks the micro-polarizer array on the focal plane of the focal plane detector, obtains the intensity image and the first polarized image which are directly output by the polarized detector of the focal plane, respectively amplifies the intensity image and the first polarized image by two times along the extending direction which is vertical to the unidirectional polarizing film, removes the first polarized image of the full size in the intensity image of the full size to obtain the second polarized image of the full size, and the manufacturing method of the polarized detector of the focal plane and the orthogonal polarized image obtaining method have the advantages of simple manufacturing process, compact structure, high integration level, snapshot type imaging and low cost.
In the manufacturing process of the polarization detector of the focal plane, if the patterns in four polarization directions in the micro-polarizer array are changed into the patterns in a single polarization direction, the manufacturing process of the micro-polarizer array can be completed by adopting the manufacturing process of the holographic photoetching micro-nano grating, so that the manufacturing difficulty and cost of the micro-polarizer and the manufacturing difficulty and cost of the integrated packaging of the micro-polarizer and the focal plane detector are reduced.
Drawings
FIG. 1 is a flow chart of a method for fabricating a polarization detector with a split focal plane and a method for obtaining orthogonal polarization images according to the present invention;
FIG. 2 is a schematic diagram of a configuration of an array of micro-polarizers according to the present invention for alignment along the horizontal direction of the focal plane;
FIG. 3 is a layered schematic diagram of a sub-focal plane polarization detector for horizontal alignment along the focal plane in accordance with the teachings of the present invention;
FIG. 4 is a schematic diagram of a sub-focal plane polarization detector for horizontal alignment along the focal plane in accordance with the teachings of the present invention;
FIG. 5 is a schematic diagram of a configuration of an array of micro-polarizers according to the present invention for alignment in a direction perpendicular to the focal plane;
FIG. 6 is a layered schematic diagram of a sub-focal plane polarization detector for alignment along a vertical direction of the focal plane in accordance with the teachings of the present invention;
fig. 7 is a schematic diagram of a sub-focal plane polarization detector for alignment along a direction perpendicular to the focal plane according to the present invention.
Description of reference numerals:
101-a substrate of transparent glass; 102-a unidirectional polarizing film for alignment along the focal plane horizontal direction; 103-an array of micro-polarizers for alignment along the focal plane horizontal direction; 104-visible light focal plane detector with working wave band of 0.4-0.7 μm; 105-picture element of visible light focal plane detector; 106-a partial focal plane polarization detector of the visible band aligned along the focal plane horizontal direction;
201-a substrate of short wave infrared material; 202-a unidirectional polarizing film for alignment in the direction perpendicular to the focal plane; 203-an array of micro-polarizers for alignment in the perpendicular direction of the focal plane; 204-short wave infrared focal plane detector with working wave band of 0.9-1.7 μm; 205-pixels of a short wave infrared focal plane detector; 206-short wave infrared band split focal plane polarization detector aligned perpendicular to the focal plane.
Detailed Description
The invention is further described with reference to the following figures and specific embodiments.
The technical solutions in the embodiments of the present invention are clearly and completely described below. The described embodiments are only some embodiments of the invention, not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example one
Referring to fig. 1, fig. 1 is a flowchart of a method for manufacturing a polarization detector with a focal plane and a method for acquiring an orthogonal polarization image according to the present invention. The embodiment of the invention provides a manufacturing method of a polarization detector with a split-focus plane, which is used for designing an embodiment of an orthogonal polarization imaging method of a visible light wave band, and comprises the following steps:
s11: the substrate is plated with unidirectional polarizing films which are arranged in a comb-shaped period to form a micro-polarizer array.
Specifically, as shown in fig. 2 and 3, a unidirectional polarizing film 102 having an operating wavelength band of 0.4 to 0.7 μm in a comb-like periodic arrangement is plated on a substrate 101 of transparent glass to form a micro-polarizer array 103.
S12: the micro-polarizer array is adhered to the focal plane of the focal plane detector to form a focal plane polarization detector 106, the working bands of the substrate and the focal plane detector have an intersection band I, and the working band of the unidirectional polarizing film and the intersection band I have an intersection band II.
Specifically, as shown in fig. 3 and 4, the micro-polarizer array 103 is attached to the focal plane of the visible light focal plane detector 104 with an operating wavelength band of 0.4-0.7 μm, and constitutes a sub-focal plane polarization detector 106 of the visible light wavelength band aligned along the horizontal direction of the focal plane of the visible light focal plane detector 104.
In the embodiment of the invention, the substrate 101 may be a glass substrate with a working waveband covering of 0.35-1.0, the substrate 101 is preferably made of K9 glass, and may also be made of K7 and F5 glass.
In the embodiment of the invention, the working waveband of the unidirectional polarizing film 102 is 0.4-0.7 μm, the working waveband of the K9 glass substrate is 0.35-2.0 μm, and the working waveband of the visible light focal plane detector 104 is 0.4-0.7 μm. The intersection of the working wavelength bands of the unidirectional polarizing film 102, the transparent glass substrate 101 and the visible light focal plane detector 104 is 0.4-0.7 μm.
In the embodiment of the present invention, the plurality of unidirectional polarizing films 102 are arranged on the surface of the transparent glass substrate 101 in a comb-shaped period, the arrangement period of the single unidirectional polarizing film 102 is 9.6 μm, the width of the single unidirectional polarizing film 102 is 4.8 μm, and the width of the single unidirectional polarizing film 102 is equal to 1/2 of the arrangement period.
In the present example, the thickness of the K9 glass substrate was 0.5 mm.
In the embodiment of the invention, the visible light focal plane detector 104 is a frame exposure CCD focal plane detector, the working waveband is 0.4-0.7 μm, the area array size of the frame exposure CCD focal plane detector is 1280 × 1024, and the pixel size is 4.8 μm × 4.8 μm.
In the embodiment of the present invention, the micro-polarizer array 103 is attached to the focal plane of the visible light focal plane detector 104, and the attached surface of the micro-polarizer array 103 is any one of the upper surface and the lower surface thereof.
In the embodiment of the present invention, the alignment direction of the micro-polarizer array 103 and the visible light focal plane detector 104 is aligned along the horizontal direction of the focal plane of the visible light focal plane detector 104, the extension direction of the unidirectional polarizing film 102 is consistent with the horizontal direction of the focal plane of the visible light focal plane detector 104, and a single unidirectional polarizing film 102 and the n-shaped polarizing film of the visible light focal plane detector 104 are aligned1Line pixels aligned, n1Is a positive integer.
As a preferred embodiment of the present invention: the micro-polarizer array 103 is adhered to the focal plane of the visible light focal plane detector 104 to form a sub-focal plane polarization detector 106 of a visible light wave band, and the adhering process comprises the following steps:
s21: coating ultraviolet sensitive glue with the thickness less than 100nm on the focal plane of the visible light focal plane detector 104;
s22: the working light source is formed by adding a polaroid in front of the LED light source, wherein the transmission direction of the polaroid is different from that of the unidirectional polarizing film 102;
s23: under the irradiation of a working light source, the position and the angle of the micro-polaroid array 103 are adjusted, so that the micro-polaroid array 103 is aligned with a focal plane pixel of the visible light focal plane detector 104;
s24: the micro-polarizer array 103 is cured with the focal plane of the visible focal plane detector 104 using an ultraviolet lamp exposure.
Referring to fig. 1 again, the present embodiment further provides an orthogonal polarization image obtaining method based on the manufacturing method of the polarization detector with a focus splitting plane described in the foregoing embodiment, where the orthogonal polarization image obtaining method includes the following steps:
s31: in the polarization detector with the focus-splitting plane prepared by the method for manufacturing the polarization detector with the focus-splitting plane, the pixel which is not acted by the unidirectional polarizing film outputs the intensity image, and the pixel which is acted by the unidirectional polarizing film outputs the first polarization image, so that the intensity image and the first polarization image are obtained;
s32: respectively carrying out double-image amplification processing on the intensity image and the first polarized image along the direction perpendicular to the extending direction of the unidirectional polarizing film by using an image amplification processing method to correspondingly obtain a full-size intensity image and a full-size first polarized image;
s33: and removing the full-size first polarization image from the full-size intensity image to obtain a full-size second polarization image, so as to obtain two full-size orthogonal polarization images, wherein the removing method is to subtract the full-size first polarization image from the full-size intensity image with beta times to obtain the full-size second polarization image, the beta value is the ratio of the average value of the first polarization image output by the polarization detector of the focus splitting plane to the average value of the intensity image under the condition of irradiation of a linearly polarized light source in the same transmission direction of the unidirectional polarization film, and the average value of the image is the average value of all pixel values in the image.
As a preferred embodiment of the present invention: the image amplification processing method is any one of four methods, namely nearest neighbor interpolation, linear interpolation, cubic spline interpolation and deep learning.
Example two
Referring to fig. 1, fig. 1 is a flowchart of a method for manufacturing a polarization detector with a focal plane according to the present invention. The embodiment of the invention provides a manufacturing method of a polarization detector with a split-focus plane, which is used for designing an embodiment of an orthogonal polarization imaging method of a short wave infrared band, and the manufacturing method of the polarization detector with the split-focus plane comprises the following steps:
s11: the substrate is plated with unidirectional polarizing films which are arranged in a comb-shaped period to form a micro-polarizer array.
Specifically, as shown in fig. 5 and 6, a substrate 201 of short-wave infrared material is plated with a unidirectional polarizing film 202 having a comb-shaped periodic arrangement with a working wavelength band of 0.9 to 1.7 μm to form a micro-polarizer array 203.
S12: the micro-polaroid array is adhered to a focal plane of the focal plane detector to form a focal plane polarization detector, the working wave bands of the substrate and the focal plane detector have an intersection wave band I, and the working wave band of the unidirectional polarization film and the intersection wave band I have an intersection wave band II.
Specifically, as shown in fig. 6 and 7, the micro-polarizer array 203 is attached to the focal plane of the short-wave infrared focal plane detector 204 having a working wavelength band of 0.9 to 1.7 μm, and constitutes a split-focal-plane polarization detector 206 of the short-wave infrared wavelength band aligned in the direction perpendicular to the focal plane of the short-wave infrared focal plane detector 204.
In the embodiment of the invention, the substrate 201 may be a substrate made of a short-wave infrared material with a working waveband covering 0.9-1.7 μm, preferably a magnesium fluoride material is used as the substrate, and may also be a calcium fluoride material or a barium fluoride material.
In the embodiment of the invention, the working waveband of the unidirectional polarizing film 202 is 0.9-1.7 μm, the working waveband of the magnesium fluoride material substrate 201 is 0.11-8.5 μm, and the working waveband of the short-wave infrared focal plane detector 204 is 0.9-1.7 μm. The intersection of the working wave bands of the unidirectional polarizing film 202, the substrate 201 of the short-wave infrared material and the short-wave infrared focal plane detector 204 is 0.9-1.7 mu m.
In the embodiment of the present invention, the plurality of unidirectional polarizing films 202 are arranged in a comb-shaped period on the surface of the substrate 201 of the short wave infrared material, the arrangement period of the single unidirectional polarizing film 202 is 9.6 μm, the width of the single unidirectional polarizing film 202 is 4.8 μm, and the width of the single unidirectional polarizing film 202 is equal to 1/2 of the arrangement period.
In the embodiment of the invention, the thickness of the magnesium fluoride material substrate is 0.8 mm.
In the embodiment of the invention, the short-wave infrared focal plane detector 204 is an indium-gallium-arsenic focal plane detector, the working waveband is 0.9-1.7 mu m, the area array size of the indium-gallium-arsenic focal plane detector is 640 multiplied by 512, and the pixel size is 15 mu m multiplied by 15 mu m.
In the embodiment of the invention, the micro-polarizer array 203 is adhered to the focal plane of the short wave infrared focal plane detector 204, and the adhering surface of the micro-polarizer array 203 is any one of the upper surface and the lower surface of the short wave infrared focal plane detector 204.
In the embodiment of the invention, the alignment direction of the micro-polarizer array 203 and the short wave infrared focal plane detector 204 is aligned along the vertical direction of the focal plane of the short wave infrared focal plane detector 204, the extension direction of the unidirectional polarizing film 202 is consistent with the vertical direction of the focal plane of the short wave infrared focal plane detector 204, and the single unidirectional polarizing film 102 and the n-shaped polarizing film of the short wave infrared focal plane detector 204 are aligned2Column pixels aligned, n2Is a positive integer.
As a preferred embodiment of the present invention: the micro-polaroid array 203 is adhered to the focal plane of the short wave infrared focal plane detector 204 to form a sub-focal plane polarization detector 206 of the short wave infrared band, and the adhering process comprises the following steps:
s21: coating ultraviolet sensitive glue with the thickness of less than 100nm on the focal plane of the short wave infrared focal plane detector 204;
s22: the working light source is formed by adding a polarizing plate in front of the LED light source, wherein the polarizing plate has a transmission direction different from that of the unidirectional polarizing film 202;
s23: under the irradiation of a working light source, the position and the angle of the micro-polaroid array 203 are adjusted, so that the micro-polaroid array 203 is aligned with focal plane pixels of the short-wave infrared focal plane detector 204;
s24: the focal plane of the micro-polarizer array 203 and the short wave infrared focal plane detector 204 are cured together using an ultraviolet lamp exposure.
Referring to fig. 1 again, the present embodiment further provides an orthogonal polarization image obtaining method based on the manufacturing method of the polarization detector with a focus-splitting plane in the foregoing embodiment, where the orthogonal polarization image obtaining method includes the following steps:
s31: in the polarization detector with the focus-splitting plane prepared by the method for manufacturing the polarization detector with the focus-splitting plane, the pixel which is not acted by the unidirectional polarizing film outputs the intensity image, and the pixel which is acted by the unidirectional polarizing film outputs the first polarization image, so that the intensity image and the first polarization image are obtained;
s32: respectively carrying out double-image amplification processing on the intensity image and the first polarized image along the direction perpendicular to the extension direction of the unidirectional polarizing film by using an image amplification processing method to correspondingly obtain a full-size intensity image and a full-size first polarized image;
s33: and removing the full-size first polarization image from the full-size intensity image to obtain a full-size second polarization image, so as to obtain two full-size orthogonal polarization images, wherein the removing method is to subtract the full-size first polarization image from the full-size intensity image with beta times to obtain the full-size second polarization image, the beta value is the ratio of the average value of the first polarization image output by the polarization detector of the focus splitting plane to the average value of the intensity image under the condition of irradiation of a linearly polarized light source in the same transmission direction of the unidirectional polarization film, and the average value of the image is the average value of all pixel values in the image.
As a preferred embodiment of the present invention: the image amplification processing method is any one of four methods, namely nearest neighbor interpolation, linear interpolation, cubic spline interpolation and deep learning.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art. The present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
While the preferred embodiments of the present invention have been described in detail with reference to the accompanying drawings, the present invention is not limited to the above embodiments, and various changes, which relate to the related art known to those skilled in the art and fall within the scope of the present invention, can be made within the knowledge of those skilled in the art without departing from the gist of the present invention.
Many other changes and modifications can be made without departing from the spirit and scope of the invention. It is to be understood that the invention is not to be limited to the specific embodiments, but only by the scope of the appended claims.

Claims (8)

1. A method for manufacturing a polarization detector with a split focal plane is characterized by comprising the following steps:
s11: plating a unidirectional polarizing film which is arranged in a comb-shaped period on a substrate to form a micro-polarizer array;
s12: the micro-polaroid array is adhered to a focal plane of a focal plane detector to form a focal plane polarization detector, the working wave bands of the substrate and the focal plane detector are provided with an intersection wave band I, and the working wave band of the unidirectional polarization film and the intersection wave band I are provided with an intersection wave band II;
the plurality of unidirectional polarizing films are arranged on the surface of the substrate in a comb-shaped period, wherein the width of a single unidirectional polarizing film is equal to 1/2 of the arrangement period;
the micro-polaroid array is adhered to the focal plane detector, and the alignment direction of the micro-polaroid array and the focal plane detector is any one of the two directions of alignment along the horizontal direction of the focal plane detector and alignment along the vertical direction of the focal plane detector.
2. The method of claim 1, wherein the substrate has a thickness of 0.1-2.0 mm.
3. The method for manufacturing a polarization detector with split focal plane according to claim 1, wherein the focal plane detector is any one of a visible light focal plane detector, a visible-near infrared focal plane detector, a visible-short wave infrared focal plane detector and a short wave infrared focal plane detector.
4. The method of claim 1, wherein the micro-polarizer array is attached to the focal plane of the focal plane detector, and the attachment surface of the micro-polarizer array is any one of a surface with the unidirectional polarizer film and a surface without the unidirectional polarizer film.
5. The method according to claim 1, wherein the polarizing films are aligned in a horizontal direction of the focal plane detector, the extending direction of the one-directional polarizing film is aligned with the horizontal direction of the focal plane detector, and the one-directional polarizing film and the n-type polarizing film of the focal plane detector are aligned in a single direction1Line pixels aligned, n1Is a positive integer.
6. The method according to claim 1, wherein the polarizer is aligned in a vertical direction of the focal plane detector, the extending direction of the one-directional polarizer is aligned with the vertical direction of the focal plane detector, and the single one-directional polarizer and the n-type polarizer of the focal plane detector are aligned in a single direction2Column pixels aligned, n2Is a positive integer。
7. The method for manufacturing a polarization detector according to claim 1, wherein the step of adhering the micro-polarizer array to the focal plane of the polarization detector constitutes a polarization detector, comprises the following steps:
s21: coating ultraviolet sensitive glue with the thickness of less than 100nm on a focal plane of the focal plane detector;
s22: the working light source is formed by adding a polaroid in front of the LED light source, wherein the transmission direction of the polaroid is different from that of the unidirectional polarizing film;
s23: under the irradiation of the working light source, adjusting the position and the angle of the micro-polaroid array to enable the micro-polaroid array to be aligned with a focal plane pixel of the focal plane detector;
s24: and curing the micro-polaroid array and the focal plane of the focal plane detector together by using an ultraviolet lamp for exposure.
8. An orthogonal polarization image acquisition method is characterized by comprising the following steps:
s31: the method for manufacturing a polarization detector of a focal plane according to any one of claims 1 to 7, wherein the pixel which is not acted by the unidirectional polarizing film outputs an intensity image, and the pixel which is acted by the unidirectional polarizing film outputs a first polarization image, so that the intensity image and the first polarization image are obtained;
s32: respectively carrying out double-time image amplification processing on the intensity image and the first polarization image along the direction perpendicular to the extension direction of the unidirectional polarization film by using an image amplification processing method to correspondingly obtain a full-size intensity image and a full-size first polarization image, wherein the image amplification processing method is any one of four methods of nearest neighbor interpolation, linear interpolation, cubic spline interpolation and deep learning;
s33: and removing the full-size first polarization image from the full-size intensity image to obtain a full-size second polarization image, so as to obtain two full-size orthogonal polarization images, wherein the removing method is to subtract the full-size first polarization image from a beta-time full-size intensity image to obtain the full-size second polarization image, the beta value is a ratio of an average value of the first polarization image output by the polarization detector of the focus splitting plane to an average value of the intensity image under the condition of irradiation of a linearly polarized light source in the same transmission direction of the unidirectional polarization film, and the average value of the images is an average value of all pixel values in the images.
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