Disclosure of Invention
Aiming at the defects of the existing scheme, the invention provides a manufacturing method of a polarization detector of a focus splitting plane and an orthogonal polarization image acquisition method. The manufacturing method of the split-focus plane polarization detector and the orthogonal polarization image acquisition method have the advantages that the manufacturing method of the split-focus plane polarization detector is simple in manufacturing process, compact in structure, high in integration level, capable of achieving snapshot imaging and low in cost, and the orthogonal polarization image acquisition method is provided.
In order to achieve the purpose, the invention adopts the following technical scheme to realize the purpose:
the invention discloses a method for manufacturing a polarization detector with a split focal plane, which comprises the following steps:
s11: plating a unidirectional polarizing film which is arranged in a comb-shaped period on a substrate to form a micro-polarizer array;
s12: and pasting the micro-polaroid array to a focal plane of a focal plane detector to form a focal plane polarization detector, wherein the substrate and the working band of the focal plane detector have an intersection band I, and the working band of the unidirectional polarization film and the intersection band I have an intersection band II.
As a preferred embodiment of the present invention: the plurality of unidirectional polarizing films are arranged on the surface of the substrate in a comb-shaped period, wherein the width of a single unidirectional polarizing film is equal to 1/2 of the arrangement period.
As a preferred embodiment of the present invention: the thickness of the substrate is 0.1-2.0 mm.
As a preferred embodiment of the present invention: the focal plane detector is any one of a visible light focal plane detector (the working wave band is 0.4-0.7 mu m), a visible-near infrared focal plane detector (the working wave band is 0.4-1.0 mu m), a visible-short wave infrared focal plane detector (the working wave band is 0.4-1.7 mu m) and a short wave infrared focal plane detector (the working wave band is 0.9-1.7 mu m).
As a preferred embodiment of the present invention: and adhering the micro-polaroid array to the focal plane of the focal plane detector, wherein the adhering surface of the micro-polaroid array is any one of the surface with the unidirectional polarizing film and the surface without the unidirectional polarizing film.
As a preferred embodiment of the present invention: the micro-polaroid array is adhered to the focal plane detector, and the alignment direction of the micro-polaroid array and the focal plane detector is any one of the two directions of alignment along the horizontal direction of the focal plane detector and alignment along the vertical direction of the focal plane detector.
As a preferred embodiment of the present invention: the single polarization film is aligned along the horizontal direction of the focal plane detector, the extension direction of the single polarization film is consistent with the horizontal direction of the focal plane detector, and the single polarization film is aligned with the n of the focal plane detector1Line pixels aligned, n1Is a positive integer.
As a preferred embodiment of the present invention: the single polarization film is aligned along the vertical direction of the focal plane detector, the extension direction of the single polarization film is consistent with the vertical direction of the focal plane detector, and the single polarization film is aligned with the n of the focal plane detector2Column pixels aligned, n2Is a positive integer.
As a preferred embodiment of the present invention: the method for sticking the micro-polaroid array to the focal plane of the focal plane detector to form the focal plane polarization detector comprises the following steps:
s21: coating ultraviolet sensitive glue with the thickness of less than 100nm on a focal plane of the focal plane detector;
s22: the working light source is formed by adding a polaroid in front of the LED light source, wherein the transmission direction of the polaroid is different from that of the unidirectional polarizing film;
s23: under the irradiation of the working light source, adjusting the position and the angle of the micro-polaroid array to enable the micro-polaroid array to be aligned with a focal plane pixel of the focal plane detector;
s24: and curing the micro-polaroid array and the focal plane of the focal plane detector together by using an ultraviolet lamp for exposure.
Based on the polarization detector with the focal plane being divided, the invention discloses an orthogonal polarization image acquisition method, which comprises the following steps:
s31: in the polarization detector with the focus-splitting plane prepared by the method for manufacturing the polarization detector with the focus-splitting plane according to any one of the embodiments, the pixel which is not acted by the unidirectional polarizing film outputs the intensity image, and the pixel which is acted by the unidirectional polarizing film outputs the first polarization image, so that the intensity image and the first polarization image are obtained;
s32: respectively carrying out double-image amplification processing on the intensity image and the first polarized image along a direction perpendicular to the extending direction of the unidirectional polarizing film by using an image amplification processing method to correspondingly obtain a full-size intensity image and a full-size first polarized image;
s33: and removing the full-size first polarization image from the full-size intensity image to obtain a full-size second polarization image, so as to obtain two full-size orthogonal polarization images, wherein the removing method is to subtract the full-size first polarization image from a beta-time full-size intensity image to obtain the full-size second polarization image, the beta value is a ratio of an average value of the first polarization image output by the polarization detector of the focus splitting plane to an average value of the intensity image under the condition of irradiation of a linearly polarized light source in the same transmission direction of the unidirectional polarization film, and the average value of the images is an average value of all pixel values in the images.
As a preferred embodiment of the present invention: the image amplification processing method is any one of four methods, namely nearest neighbor interpolation, linear interpolation, cubic spline interpolation and deep learning.
The invention has the beneficial effects that:
the invention plates the unidirectional polarizing film which is arranged in a comb-shaped period on the substrate, sticks the micro-polarizer array on the focal plane of the focal plane detector, obtains the intensity image and the first polarized image which are directly output by the polarized detector of the focal plane, respectively amplifies the intensity image and the first polarized image by two times along the extending direction which is vertical to the unidirectional polarizing film, removes the first polarized image of the full size in the intensity image of the full size to obtain the second polarized image of the full size, and the manufacturing method of the polarized detector of the focal plane and the orthogonal polarized image obtaining method have the advantages of simple manufacturing process, compact structure, high integration level, snapshot type imaging and low cost.
In the manufacturing process of the polarization detector of the focal plane, if the patterns in four polarization directions in the micro-polarizer array are changed into the patterns in a single polarization direction, the manufacturing process of the micro-polarizer array can be completed by adopting the manufacturing process of the holographic photoetching micro-nano grating, so that the manufacturing difficulty and cost of the micro-polarizer and the manufacturing difficulty and cost of the integrated packaging of the micro-polarizer and the focal plane detector are reduced.
Detailed Description
The invention is further described with reference to the following figures and specific embodiments.
The technical solutions in the embodiments of the present invention are clearly and completely described below. The described embodiments are only some embodiments of the invention, not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example one
Referring to fig. 1, fig. 1 is a flowchart of a method for manufacturing a polarization detector with a focal plane and a method for acquiring an orthogonal polarization image according to the present invention. The embodiment of the invention provides a manufacturing method of a polarization detector with a split-focus plane, which is used for designing an embodiment of an orthogonal polarization imaging method of a visible light wave band, and comprises the following steps:
s11: the substrate is plated with unidirectional polarizing films which are arranged in a comb-shaped period to form a micro-polarizer array.
Specifically, as shown in fig. 2 and 3, a unidirectional polarizing film 102 having an operating wavelength band of 0.4 to 0.7 μm in a comb-like periodic arrangement is plated on a substrate 101 of transparent glass to form a micro-polarizer array 103.
S12: the micro-polarizer array is adhered to the focal plane of the focal plane detector to form a focal plane polarization detector 106, the working bands of the substrate and the focal plane detector have an intersection band I, and the working band of the unidirectional polarizing film and the intersection band I have an intersection band II.
Specifically, as shown in fig. 3 and 4, the micro-polarizer array 103 is attached to the focal plane of the visible light focal plane detector 104 with an operating wavelength band of 0.4-0.7 μm, and constitutes a sub-focal plane polarization detector 106 of the visible light wavelength band aligned along the horizontal direction of the focal plane of the visible light focal plane detector 104.
In the embodiment of the invention, the substrate 101 may be a glass substrate with a working waveband covering of 0.35-1.0, the substrate 101 is preferably made of K9 glass, and may also be made of K7 and F5 glass.
In the embodiment of the invention, the working waveband of the unidirectional polarizing film 102 is 0.4-0.7 μm, the working waveband of the K9 glass substrate is 0.35-2.0 μm, and the working waveband of the visible light focal plane detector 104 is 0.4-0.7 μm. The intersection of the working wavelength bands of the unidirectional polarizing film 102, the transparent glass substrate 101 and the visible light focal plane detector 104 is 0.4-0.7 μm.
In the embodiment of the present invention, the plurality of unidirectional polarizing films 102 are arranged on the surface of the transparent glass substrate 101 in a comb-shaped period, the arrangement period of the single unidirectional polarizing film 102 is 9.6 μm, the width of the single unidirectional polarizing film 102 is 4.8 μm, and the width of the single unidirectional polarizing film 102 is equal to 1/2 of the arrangement period.
In the present example, the thickness of the K9 glass substrate was 0.5 mm.
In the embodiment of the invention, the visible light focal plane detector 104 is a frame exposure CCD focal plane detector, the working waveband is 0.4-0.7 μm, the area array size of the frame exposure CCD focal plane detector is 1280 × 1024, and the pixel size is 4.8 μm × 4.8 μm.
In the embodiment of the present invention, the micro-polarizer array 103 is attached to the focal plane of the visible light focal plane detector 104, and the attached surface of the micro-polarizer array 103 is any one of the upper surface and the lower surface thereof.
In the embodiment of the present invention, the alignment direction of the micro-polarizer array 103 and the visible light focal plane detector 104 is aligned along the horizontal direction of the focal plane of the visible light focal plane detector 104, the extension direction of the unidirectional polarizing film 102 is consistent with the horizontal direction of the focal plane of the visible light focal plane detector 104, and a single unidirectional polarizing film 102 and the n-shaped polarizing film of the visible light focal plane detector 104 are aligned1Line pixels aligned, n1Is a positive integer.
As a preferred embodiment of the present invention: the micro-polarizer array 103 is adhered to the focal plane of the visible light focal plane detector 104 to form a sub-focal plane polarization detector 106 of a visible light wave band, and the adhering process comprises the following steps:
s21: coating ultraviolet sensitive glue with the thickness less than 100nm on the focal plane of the visible light focal plane detector 104;
s22: the working light source is formed by adding a polaroid in front of the LED light source, wherein the transmission direction of the polaroid is different from that of the unidirectional polarizing film 102;
s23: under the irradiation of a working light source, the position and the angle of the micro-polaroid array 103 are adjusted, so that the micro-polaroid array 103 is aligned with a focal plane pixel of the visible light focal plane detector 104;
s24: the micro-polarizer array 103 is cured with the focal plane of the visible focal plane detector 104 using an ultraviolet lamp exposure.
Referring to fig. 1 again, the present embodiment further provides an orthogonal polarization image obtaining method based on the manufacturing method of the polarization detector with a focus splitting plane described in the foregoing embodiment, where the orthogonal polarization image obtaining method includes the following steps:
s31: in the polarization detector with the focus-splitting plane prepared by the method for manufacturing the polarization detector with the focus-splitting plane, the pixel which is not acted by the unidirectional polarizing film outputs the intensity image, and the pixel which is acted by the unidirectional polarizing film outputs the first polarization image, so that the intensity image and the first polarization image are obtained;
s32: respectively carrying out double-image amplification processing on the intensity image and the first polarized image along the direction perpendicular to the extending direction of the unidirectional polarizing film by using an image amplification processing method to correspondingly obtain a full-size intensity image and a full-size first polarized image;
s33: and removing the full-size first polarization image from the full-size intensity image to obtain a full-size second polarization image, so as to obtain two full-size orthogonal polarization images, wherein the removing method is to subtract the full-size first polarization image from the full-size intensity image with beta times to obtain the full-size second polarization image, the beta value is the ratio of the average value of the first polarization image output by the polarization detector of the focus splitting plane to the average value of the intensity image under the condition of irradiation of a linearly polarized light source in the same transmission direction of the unidirectional polarization film, and the average value of the image is the average value of all pixel values in the image.
As a preferred embodiment of the present invention: the image amplification processing method is any one of four methods, namely nearest neighbor interpolation, linear interpolation, cubic spline interpolation and deep learning.
Example two
Referring to fig. 1, fig. 1 is a flowchart of a method for manufacturing a polarization detector with a focal plane according to the present invention. The embodiment of the invention provides a manufacturing method of a polarization detector with a split-focus plane, which is used for designing an embodiment of an orthogonal polarization imaging method of a short wave infrared band, and the manufacturing method of the polarization detector with the split-focus plane comprises the following steps:
s11: the substrate is plated with unidirectional polarizing films which are arranged in a comb-shaped period to form a micro-polarizer array.
Specifically, as shown in fig. 5 and 6, a substrate 201 of short-wave infrared material is plated with a unidirectional polarizing film 202 having a comb-shaped periodic arrangement with a working wavelength band of 0.9 to 1.7 μm to form a micro-polarizer array 203.
S12: the micro-polaroid array is adhered to a focal plane of the focal plane detector to form a focal plane polarization detector, the working wave bands of the substrate and the focal plane detector have an intersection wave band I, and the working wave band of the unidirectional polarization film and the intersection wave band I have an intersection wave band II.
Specifically, as shown in fig. 6 and 7, the micro-polarizer array 203 is attached to the focal plane of the short-wave infrared focal plane detector 204 having a working wavelength band of 0.9 to 1.7 μm, and constitutes a split-focal-plane polarization detector 206 of the short-wave infrared wavelength band aligned in the direction perpendicular to the focal plane of the short-wave infrared focal plane detector 204.
In the embodiment of the invention, the substrate 201 may be a substrate made of a short-wave infrared material with a working waveband covering 0.9-1.7 μm, preferably a magnesium fluoride material is used as the substrate, and may also be a calcium fluoride material or a barium fluoride material.
In the embodiment of the invention, the working waveband of the unidirectional polarizing film 202 is 0.9-1.7 μm, the working waveband of the magnesium fluoride material substrate 201 is 0.11-8.5 μm, and the working waveband of the short-wave infrared focal plane detector 204 is 0.9-1.7 μm. The intersection of the working wave bands of the unidirectional polarizing film 202, the substrate 201 of the short-wave infrared material and the short-wave infrared focal plane detector 204 is 0.9-1.7 mu m.
In the embodiment of the present invention, the plurality of unidirectional polarizing films 202 are arranged in a comb-shaped period on the surface of the substrate 201 of the short wave infrared material, the arrangement period of the single unidirectional polarizing film 202 is 9.6 μm, the width of the single unidirectional polarizing film 202 is 4.8 μm, and the width of the single unidirectional polarizing film 202 is equal to 1/2 of the arrangement period.
In the embodiment of the invention, the thickness of the magnesium fluoride material substrate is 0.8 mm.
In the embodiment of the invention, the short-wave infrared focal plane detector 204 is an indium-gallium-arsenic focal plane detector, the working waveband is 0.9-1.7 mu m, the area array size of the indium-gallium-arsenic focal plane detector is 640 multiplied by 512, and the pixel size is 15 mu m multiplied by 15 mu m.
In the embodiment of the invention, the micro-polarizer array 203 is adhered to the focal plane of the short wave infrared focal plane detector 204, and the adhering surface of the micro-polarizer array 203 is any one of the upper surface and the lower surface of the short wave infrared focal plane detector 204.
In the embodiment of the invention, the alignment direction of the micro-polarizer array 203 and the short wave infrared focal plane detector 204 is aligned along the vertical direction of the focal plane of the short wave infrared focal plane detector 204, the extension direction of the unidirectional polarizing film 202 is consistent with the vertical direction of the focal plane of the short wave infrared focal plane detector 204, and the single unidirectional polarizing film 102 and the n-shaped polarizing film of the short wave infrared focal plane detector 204 are aligned2Column pixels aligned, n2Is a positive integer.
As a preferred embodiment of the present invention: the micro-polaroid array 203 is adhered to the focal plane of the short wave infrared focal plane detector 204 to form a sub-focal plane polarization detector 206 of the short wave infrared band, and the adhering process comprises the following steps:
s21: coating ultraviolet sensitive glue with the thickness of less than 100nm on the focal plane of the short wave infrared focal plane detector 204;
s22: the working light source is formed by adding a polarizing plate in front of the LED light source, wherein the polarizing plate has a transmission direction different from that of the unidirectional polarizing film 202;
s23: under the irradiation of a working light source, the position and the angle of the micro-polaroid array 203 are adjusted, so that the micro-polaroid array 203 is aligned with focal plane pixels of the short-wave infrared focal plane detector 204;
s24: the focal plane of the micro-polarizer array 203 and the short wave infrared focal plane detector 204 are cured together using an ultraviolet lamp exposure.
Referring to fig. 1 again, the present embodiment further provides an orthogonal polarization image obtaining method based on the manufacturing method of the polarization detector with a focus-splitting plane in the foregoing embodiment, where the orthogonal polarization image obtaining method includes the following steps:
s31: in the polarization detector with the focus-splitting plane prepared by the method for manufacturing the polarization detector with the focus-splitting plane, the pixel which is not acted by the unidirectional polarizing film outputs the intensity image, and the pixel which is acted by the unidirectional polarizing film outputs the first polarization image, so that the intensity image and the first polarization image are obtained;
s32: respectively carrying out double-image amplification processing on the intensity image and the first polarized image along the direction perpendicular to the extension direction of the unidirectional polarizing film by using an image amplification processing method to correspondingly obtain a full-size intensity image and a full-size first polarized image;
s33: and removing the full-size first polarization image from the full-size intensity image to obtain a full-size second polarization image, so as to obtain two full-size orthogonal polarization images, wherein the removing method is to subtract the full-size first polarization image from the full-size intensity image with beta times to obtain the full-size second polarization image, the beta value is the ratio of the average value of the first polarization image output by the polarization detector of the focus splitting plane to the average value of the intensity image under the condition of irradiation of a linearly polarized light source in the same transmission direction of the unidirectional polarization film, and the average value of the image is the average value of all pixel values in the image.
As a preferred embodiment of the present invention: the image amplification processing method is any one of four methods, namely nearest neighbor interpolation, linear interpolation, cubic spline interpolation and deep learning.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art. The present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
While the preferred embodiments of the present invention have been described in detail with reference to the accompanying drawings, the present invention is not limited to the above embodiments, and various changes, which relate to the related art known to those skilled in the art and fall within the scope of the present invention, can be made within the knowledge of those skilled in the art without departing from the gist of the present invention.
Many other changes and modifications can be made without departing from the spirit and scope of the invention. It is to be understood that the invention is not to be limited to the specific embodiments, but only by the scope of the appended claims.