CN111609941A - Adjustment device for infrared thermometer, infrared temperature measurement system and working method - Google Patents
Adjustment device for infrared thermometer, infrared temperature measurement system and working method Download PDFInfo
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Abstract
本发明涉及红外温度测量技术领域,公开了一种用于红外测温仪的调节装置、红外测温系统及工作方法。该调节装置包括第一角度调整机构、第二角度调整机构和控制模块,第一角度调整机构与第二角度调整机构用于从两个不同方向调节探头的测量角度,控制模块用于根据红外测温仪测量到的温度控制第一角度调整机构和/或第二角度调整机构的调节状态,以调整探头的测量角度。该红外测温系统包括探头角度可调的红外测温仪和该调节装置。利用该红外测温系统的工作方法,可根据温度变化规律找到最佳的测温位置,代替手动控制定位,实现自动控制定位,提高测温的准确性和可重复性。
The invention relates to the technical field of infrared temperature measurement, and discloses an adjustment device for an infrared thermometer, an infrared temperature measurement system and a working method. The adjustment device includes a first angle adjustment mechanism, a second angle adjustment mechanism and a control module. The first angle adjustment mechanism and the second angle adjustment mechanism are used to adjust the measurement angle of the probe from two different directions. The temperature measured by the thermometer controls the adjustment state of the first angle adjustment mechanism and/or the second angle adjustment mechanism, so as to adjust the measurement angle of the probe. The infrared temperature measurement system includes an infrared thermometer with adjustable probe angle and the adjustment device. Using the working method of the infrared temperature measurement system, the best temperature measurement position can be found according to the temperature change law, instead of manual control positioning, automatic control positioning can be realized, and the accuracy and repeatability of temperature measurement can be improved.
Description
技术领域technical field
本发明涉及红外温度测量技术领域,特别是涉及一种用于红外测温仪的调节装置、红外测温系统及工作方法。The invention relates to the technical field of infrared temperature measurement, in particular to an adjustment device for an infrared thermometer, an infrared temperature measurement system and a working method.
背景技术Background technique
在碳化硅晶体生长过程中,控温是非常关键的,由于碳化硅晶体生长温度区间很窄,一旦产生温度变化就有可能影响晶体生长的质量。由于测温需要,通常在使用的坩埚的顶部保温毡中心开孔,通过红外测温仪测量坩埚顶部温度。而测温孔中的不同位置对外辐射角度不同,导致在测温孔中不同位置的温度分布不相同,从边缘到中心至少有几十度的温度偏差,这个温度偏差会严重影响晶体的质量。因此红外测温仪的瞄准是晶体生长过程中非常重要的调节过程。由于热场每次都会重新装入,位置会有变化,需要多次调整。现有技术中一般采用两个方向可以调整的旋转滑台手动调整红外的瞄准位置,尽可能准确瞄准,但是由于温度变化比较大,很难找到精确瞄准位置;且采用手动调整,操作难度大,对工人经验要求高,可重复性差。In the process of silicon carbide crystal growth, temperature control is very critical. Since the silicon carbide crystal growth temperature range is very narrow, once a temperature change occurs, the quality of the crystal growth may be affected. Due to the need for temperature measurement, a hole is usually opened in the center of the insulation felt on the top of the crucible used, and the temperature at the top of the crucible is measured by an infrared thermometer. Different positions in the temperature measuring hole have different external radiation angles, resulting in different temperature distributions at different positions in the temperature measuring hole. There is at least a few tens of degrees of temperature deviation from the edge to the center, which will seriously affect the quality of the crystal. Therefore, the aiming of the infrared thermometer is a very important adjustment process in the crystal growth process. Since the thermal field is reloaded each time, the position will change and require multiple adjustments. In the prior art, a rotary slide that can be adjusted in two directions is generally used to manually adjust the infrared aiming position to aim as accurately as possible. However, due to the relatively large temperature change, it is difficult to find the precise aiming position; and manual adjustment is used, which is difficult to operate. High requirements for worker experience and poor repeatability.
发明内容SUMMARY OF THE INVENTION
(一)要解决的技术问题(1) Technical problems to be solved
本发明实施例的目的是提供一种用于红外测温仪的调节装置、红外测温系统及工作方法,以解决现有技术中采用手动调整红外测温仪的瞄准位置存在的操作难度大,准确性差的技术问题。The purpose of the embodiment of the present invention is to provide an adjustment device, an infrared temperature measurement system and a working method for an infrared thermometer, so as to solve the difficulty in operation by manually adjusting the aiming position of the infrared thermometer in the prior art, Technical issues with poor accuracy.
(二)技术方案(2) Technical solutions
为了解决上述技术问题,本发明实施例提供一种用于红外测温仪的调节装置,包括:第一角度调整机构、第二角度调整机构和控制模块,所述第一角度调整机构与所述第二角度调整机构分别和红外测温仪的探头连接,用于从两个不同方向调节所述探头的测量角度,所述控制模块分别与红外测温仪、所述第一角度调整机构和所述第二角度调整机构电连接,用于根据所述红外测温仪测量到的温度控制所述第一角度调整机构和/或所述第二角度调整机构的调节状态,以调整所述探头的测量角度。In order to solve the above technical problems, an embodiment of the present invention provides an adjustment device for an infrared thermometer, comprising: a first angle adjustment mechanism, a second angle adjustment mechanism and a control module, the first angle adjustment mechanism and the The second angle adjustment mechanisms are respectively connected with the probes of the infrared thermometer, and are used to adjust the measurement angles of the probes from two different directions. The control module is respectively connected with the infrared thermometer, the first angle adjustment mechanism and the The second angle adjustment mechanism is electrically connected, and is used to control the adjustment state of the first angle adjustment mechanism and/or the second angle adjustment mechanism according to the temperature measured by the infrared thermometer, so as to adjust the temperature of the probe. Measure the angle.
其中,所述第一角度调整机构包括第一步进电机和绕第一水平轴线转动设置的第一旋转架,所述第一步进电机的输出轴与所述第一旋转架的第一端连接,所述第一旋转架的第二端通过所述第二角度调整机构与所述探头连接。The first angle adjustment mechanism includes a first stepping motor and a first rotating frame rotatably arranged around a first horizontal axis, and the output shaft of the first stepping motor is connected to the first end of the first rotating frame. connected, and the second end of the first rotating frame is connected with the probe through the second angle adjustment mechanism.
其中,所述第二角度调整机构包括第二步进电机和绕第二水平轴线转动设置的第二旋转架,且所述第二水平轴线与所述第一水平轴线相互垂直,所述第一旋转架的第二端与所述第二角度调整机构的所述第二步进电机连接,所述第二步进电机的输出轴与所述第二旋转架的第一端连接,所述第二旋转架的第二端用于与所述红外测温仪的探头连接。Wherein, the second angle adjustment mechanism includes a second stepping motor and a second rotating frame rotatably arranged around a second horizontal axis, and the second horizontal axis is perpendicular to the first horizontal axis, and the first horizontal axis is perpendicular to each other. The second end of the rotating frame is connected with the second stepping motor of the second angle adjustment mechanism, the output shaft of the second stepping motor is connected with the first end of the second rotating frame, the first The second ends of the two rotating frames are used for connecting with the probe of the infrared thermometer.
其中,所述第一旋转架和所述第二旋转架均为“L”型弯板。Wherein, the first rotating frame and the second rotating frame are both "L"-shaped bent plates.
其中,所述控制模块包括记录器、比较器和控制器,所述记录器与所述红外测温仪电连接,用于记录所述红外测温仪的探头的测量角度以及所述探头处于该测量角度时所述红外测温仪测得的对应温度;所述比较器与所述记录器电连接,用于比较所述红外测温仪测得的温度值大小关系;所述控制器分别与所述比较器、所述第一角度调整机构和所述第二角度调整机构电连接,用于根据所述比较器比较得出的温度最小值对应的所述探头的获取角度来通过所述第一角度调整机构和所述第二角度调整机构调节所述探头的测量角度。Wherein, the control module includes a recorder, a comparator and a controller, and the recorder is electrically connected to the infrared thermometer for recording the measurement angle of the probe of the infrared thermometer and the position of the probe in the infrared thermometer. The corresponding temperature measured by the infrared thermometer when measuring the angle; the comparator is electrically connected to the recorder, and is used to compare the magnitude relationship of the temperature values measured by the infrared thermometer; the controller is respectively connected with The comparator, the first angle adjustment mechanism and the second angle adjustment mechanism are electrically connected, and are configured to pass the first angle according to the acquisition angle of the probe corresponding to the minimum temperature obtained by the comparison of the comparator. An angle adjustment mechanism and the second angle adjustment mechanism adjust the measurement angle of the probe.
其中,所述记录器分别与所述第一角度调整机构的所述第一步进电机和所述第二角度调整机构的所述第二步进电机电连接,用于根据所述第一步进电机和所述第二步进电机的脉冲次数来判断并记录所述探头的测量角度。Wherein, the recorder is respectively electrically connected with the first stepper motor of the first angle adjustment mechanism and the second stepper motor of the second angle adjustment mechanism, and is used for according to the first step The measurement angle of the probe is judged and recorded according to the pulse times of the advance motor and the second stepper motor.
其中,所述控制器分别与所述第一角度调整机构的所述第一步进电机和所述第二角度调整机构的所述第二步进电机电连接,用于控制所述第一步进电机和所述第二步进电机的脉冲次数来调节所述探头的测量角度。Wherein, the controller is electrically connected to the first stepper motor of the first angle adjustment mechanism and the second stepper motor of the second angle adjustment mechanism, respectively, for controlling the first step The measurement angle of the probe is adjusted by the pulse times of the advance motor and the second stepper motor.
其中,还包括角度传感器,所述角度传感器与所述记录器电连接,所述角度传感器的测量端与所述探头连接,用于修正所述记录器记录的所述探头的测量角度。Wherein, an angle sensor is also included, the angle sensor is electrically connected with the recorder, and the measurement end of the angle sensor is connected with the probe for correcting the measurement angle of the probe recorded by the recorder.
本发明实施例还公开了一种红外测温系统,包括:探头角度可调的红外测温仪和如本发明实施例的用于红外测温仪的调节装置,所述用于红外测温仪的调节装置安装于所述红外测温仪。The embodiment of the present invention also discloses an infrared temperature measurement system, comprising: an infrared thermometer with an adjustable probe angle and an adjustment device for the infrared thermometer according to the embodiment of the present invention, the infrared thermometer is used for the infrared thermometer. The adjustment device is installed on the infrared thermometer.
本发明实施例还公开了一种利用如本发明实施例的红外测温系统的工作方法,包括:The embodiment of the present invention also discloses a working method using the infrared temperature measurement system according to the embodiment of the present invention, including:
S1、将红外测温仪放置于测温孔中心位置,开启红外测温仪,对测温孔进行测温;S1. Place the infrared thermometer at the center of the temperature measurement hole, turn on the infrared thermometer, and measure the temperature of the temperature measurement hole;
S2、将第一角度调整机构设为待机,并通过第二角度调整机构对红外测温仪的探头的测量角度进行调整,控制模块通过第二角度调整机构将探头的测量角度调整至红外测温仪测得温度最低点对应的探头的获取角度;S2. Set the first angle adjustment mechanism to standby, and adjust the measurement angle of the probe of the infrared thermometer through the second angle adjustment mechanism, and the control module adjusts the measurement angle of the probe to the infrared temperature measurement through the second angle adjustment mechanism The acquisition angle of the probe corresponding to the lowest temperature point measured by the instrument;
S3、将第二角度调整机构设为待机,并通过第一角度调整机构对红外测温仪的探头的测量角度进行调整,控制模块通过第一角度调整机构将探头的测量角度调整至红外测温仪测得温度最低点对应的探头的获取角度。S3. Set the second angle adjustment mechanism to standby, and adjust the measurement angle of the probe of the infrared thermometer through the first angle adjustment mechanism, and the control module adjusts the measurement angle of the probe to the infrared temperature measurement through the first angle adjustment mechanism The acquisition angle of the probe corresponding to the lowest temperature point measured by the instrument.
(三)有益效果(3) Beneficial effects
本发明实施例提供的用于红外测温仪的调节装置、红外测温系统及工作方法,在红外测温仪测量过程中,利用第一角度调整机构和第二角度调整机构对红外测温仪的探头的测量角度完成一个周期的调整,利用控制模块根据红外测温仪测量到的温度确定最佳的测量角度,并控制第一角度调整机构和第二角度调整机构的调节状态,以调整探头的测量角度。采用本发明的调节装置、红外测温系统及工作方法,可根据温度变化规律找到最佳的测温位置,代替手动控制定位,实现自动控制定位,提高测温的准确性和可重复性。The adjusting device, the infrared temperature measuring system and the working method for the infrared thermometer provided by the embodiments of the present invention, during the measurement process of the infrared thermometer, the infrared thermometer is adjusted by the first angle adjustment mechanism and the second angle adjustment mechanism. The measurement angle of the probe is adjusted for one cycle, and the control module is used to determine the best measurement angle according to the temperature measured by the infrared thermometer, and control the adjustment state of the first angle adjustment mechanism and the second angle adjustment mechanism to adjust the probe. measurement angle. By adopting the adjusting device, infrared temperature measuring system and working method of the present invention, the best temperature measuring position can be found according to the law of temperature change, instead of manual control positioning, automatic control positioning can be realized, and the accuracy and repeatability of temperature measuring can be improved.
附图说明Description of drawings
图1为本发明实施例一种用于红外测温仪的调节装置的结构示意图。FIG. 1 is a schematic structural diagram of an adjustment device for an infrared thermometer according to an embodiment of the present invention.
附图标记:Reference number:
100:红外测温仪;101:探头;201:第一步进电机;202:第一水平轴线;203:第一旋转架;301:第二步进电机;302:第二水平轴线;303:第二旋转架。100: Infrared thermometer; 101: Probe; 201: The first stepping motor; 202: The first horizontal axis; 203: The first rotating frame; 301: The second stepping motor; 302: The second horizontal axis; 303: Second rotating frame.
具体实施方式Detailed ways
下面结合附图和实施例,对本发明的具体实施方式作进一步详细描述。以下实例用于说明本发明,但不用来限制本发明的范围。The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and embodiments. The following examples are intended to illustrate the present invention, but not to limit the scope of the present invention.
在本发明的描述中,需要说明的是,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本发明中的具体含义。In the description of the present invention, it should be noted that the terms "installed", "connected" and "connected" should be understood in a broad sense, unless otherwise expressly specified and limited, for example, it may be a fixed connection or a detachable connection Connection, or integral connection; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be internal communication between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood in specific situations.
如图1所示,本发明实施例公开了一种用于红外测温仪的调节装置,包括:第一角度调整机构、第二角度调整机构和控制模块,第一角度调整机构与第二角度调整机构分别和红外测温仪100的探头101 连接,用于从两个不同方向调节探头101的测量角度,控制模块分别与红外测温仪100、第一角度调整机构和第二角度调整机构电连接,用于根据红外测温仪100测量到的温度控制第一角度调整机构和/或第二角度调整机构的调节状态,以调整探头101的测量角度。As shown in FIG. 1 , an embodiment of the present invention discloses an adjustment device for an infrared thermometer, including: a first angle adjustment mechanism, a second angle adjustment mechanism and a control module, the first angle adjustment mechanism and the second angle adjustment mechanism The adjustment mechanisms are respectively connected with the
具体地,本实施例中通过在水平面上两个不同方向的角度调整机构对红外测温仪100的探头101的测量角度进行调整,实现探头101 在水平面内各个测量角度的调整。Specifically, in this embodiment, the measurement angles of the
一般地,测温孔的中心位置温度最低,温度逐渐向边缘升高,理想状态下等温线是以测温孔中心为同心圆,且温度逐渐向测温孔边缘升高。当红外测温仪100的探头101向测温孔中心移动时,温度会逐渐降低,当探头101越过中心位置时,温度会逐渐升高。因此,根据红外测温仪100测得的温度最低值应为测温孔的中心位置(理想状态下),如热场重新装入,测温孔的中心位置可能会发生变化,则需要重新调整探头101的测量角度,以找到精准的测量位置。Generally, the temperature at the center of the temperature measuring hole is the lowest, and the temperature gradually increases toward the edge. Ideally, the isotherm takes the center of the temperature measuring hole as the concentric circle, and the temperature gradually increases toward the edge of the temperature measuring hole. When the
本实施例中的控制模块获取红外测温仪100测得的温度以及第一角度调整机构和第二角度调整机构调整的角度。可将红外测温仪 100的探头101竖直向下摆正,并尽量瞄准测温孔的中心位置,规定该测量角度为0°,控制模块可将测得的温度和探头101的测量角度一一对应,并筛选出温度最低时探头101的对应角度,根据该角度控制第一角度调整机构和第二角度调整机构对探头101进行相应角度调整。例如,先控制第一角度调整机构待机,第二角度调整机构调整探头101的测量角度,同时红外测温仪100测量温度,完成一个测量周期后(即测量范围在该方向上覆盖整个测温孔),对比发现测量角度为10°时(也可能为其他数值,此处仅为示意性举例)温度最低,则控制第二角度调整机构将探头101的测量角度调整至10°;之后,控制第二角度调整机构待机,第一角度调整机构调整探头101的测量角度,同时红外测温仪100测量温度,完成一个测量周期后(即测量范围在该方向上覆盖整个测温孔),对比发现测量角度为5°时(也可能为其他数值,此处仅为示意性举例)温度最低,则控制第二角度调整机构将探头101的测量角度调整至5°。通过两个方向的比较,可自动定位温度最低点,如果要求精准测量,则可重复上述步骤,重复调节测量角度。The control module in this embodiment acquires the temperature measured by the
本发明实施例提供的用于红外测温仪100的调节装置、红外测温系统及工作方法,在红外测温仪100测量过程中,利用第一角度调整机构和第二角度调整机构对红外测温仪100的探头101的测量角度完成一个周期的调整,利用控制模块根据红外测温仪100测量到的温度确定最佳的测量角度,并控制第一角度调整机构和第二角度调整机构的调节状态,以调整探头101的测量角度。采用本发明的调节装置、红外测温系统及工作方法,可根据温度变化规律找到最佳的测温位置,代替手动控制定位,实现自动控制定位,提高测温的准确性和可重复性。The adjusting device, the infrared temperature measuring system and the working method for the
其中,第一角度调整机构包括第一步进电机201和绕第一水平轴线202转动设置的第一旋转架203,第一步进电机201的输出轴与第一旋转架203的第一端连接,第一旋转架203的第二端通过第二角度调整机构与探头101连接。具体地,本实施例中采用的第一步进电机 201带有减速器,第一步进电机201的作用为驱动第一旋转架203绕第一水平轴线202转动,第一旋转架203可将第一步进电机201的转动运动传递给第二角度调整机构,通过第二角度调整机构传递给红外测温仪100的探头101。The first angle adjustment mechanism includes a
进一步地,第二角度调整机构包括第二步进电机301和绕第二水平轴线302转动设置的第二旋转架303,且第二水平轴线302与第一水平轴线202相互垂直,第一旋转架203的第二端与第二角度调整机构的第二步进电机301连接,第二步进电机301的输出轴与第二旋转架303的第一端连接,第二旋转架303的第二端用于与红外测温仪 100的探头101连接。具体地,本实施例中采用的第二步进电机301 带有减速器,第二步进电机301的作用为驱动第二旋转架303绕第二水平轴线302转动,并且第二水平轴线302和第一水平轴线202为垂直关系,即若第二水平轴线302为水平面的X轴向方向,第一水平轴线202则为水平面的Y轴线方向,通过两个旋转架带动探头101 前后左右摆动以调节测量角度。应当理解的是,第一水平轴线202与第一步进电机201的输出轴为同轴,第二水平轴线302与第二步进电机301的输出轴为同轴。值得注意的是:图1中虚线带箭头的转动方向分别代表第一旋转架203和第二旋转架303绕对应轴线的旋转轨迹。Further, the second angle adjustment mechanism includes a
更进一步地,第一旋转架203和第二旋转架303均为“L”型弯板。“L”型弯板具有两个端面,例如:第一旋转架203的“L”型弯板,其中一个端面安装于第一步进电机201,并与第一步进电机201 的输出轴同轴转动,带动“L”型弯板的另一端面一同转动,该端面安装于第二步进电机301,带动第二步进电机301旋转。同理,第二旋转架303的“L”型弯板,其中一个端面安装于第二步进电机301,另一端面安装于探头101上。Furthermore, the first
其中,控制模块包括记录器、比较器和控制器,记录器与红外测温仪100电连接,用于记录红外测温仪100的探头101的测量角度以及探头101处于该测量角度时红外测温仪100测得的对应温度;比较器与记录器电连接,用于比较红外测温仪100测得的温度值大小关系;控制器分别与比较器、第一角度调整机构和第二角度调整机构电连接,用于根据比较器比较得出的温度最小值对应的探头101的获取角度(“获取角度”并非实际的测量角度,其为根据温度最低点所对应推断获取的探头101角度)来通过第一角度调整机构和第二角度调整机构调节探头101的测量角度。具体地,本实施例中控制模块的记录器、比较器和控制器均可集成于PLC中,其中记录器主要用于记录测得的温度和对应的探头101测量角度,规定探头101初始状态为竖直设置,记录器记录初始状态为0°。由于红外测温仪100测温原理是将物体发射的红外线具有的辐射能转变成电信号,比较器将红外测温仪100转变成的电信号进行比较可对应得出温度值大小关系,或者直接通过比较器比较红外测温仪100得出的温度值大小关系。控制器获取温度最低点时探头101对应的获取角度,并根据该获取角度调节第一角度调整机构和第二角度调整机构对探头101的测量角度进行对应调节。The control module includes a recorder, a comparator and a controller, and the recorder is electrically connected to the
其中,记录器分别与第一角度调整机构的第一步进电机201和第二角度调整机构的第二步进电机301电连接,用于根据第一步进电机 201和第二步进电机301的脉冲次数来判断并记录探头101的测量角度。具体地,第一步进电机201和第二步进电机301采用同规格的步进电机,每一次脉冲输出轴旋转的角度相同,根据步进电机的规格获得每一次输出轴旋转的角度后,可通过记录脉冲次数来判断第一角度调整机构和/或第二角度调整机构带动探头101移动的角度。为了方便计算,规定探头101初始角度为0°,即竖直设置,当探头101的测量角度变化时,可记录为对应角度,也为探头101的测量角度偏移初始角度的数值。The recorder is respectively electrically connected to the
其中,控制器分别与第一角度调整机构的第一步进电机201和第二角度调整机构的第二步进电机301电连接,用于控制第一步进电机 201和第二步进电机301的脉冲次数来调节探头101的测量角度。根据步进电机的规格可以获知每一次脉冲旋转轴旋转的角度,本实施例中的控制器只需要控制第一步进电机201和第二步进电机301的脉冲次数就可以控制探头101移动的角度,若探头101角度不需要调整则关闭步进电机即可。The controller is respectively electrically connected to the
其中,还包括角度传感器,角度传感器与记录器电连接,角度传感器的测量端与探头101连接,用于修正记录器记录的探头101的测量角度。由于上述实施例的记录器针对探头101的测量角度是通过第一步进电机201和第二步进电机301的脉冲次数来判断的,探头101 实际的测量角度可能会出现偏差,通过角度传感器实时监测探头101 的角度变化,对记录器中的探头101测量角度的数值进行修正,以保证测量准确。An angle sensor is also included, the angle sensor is electrically connected to the recorder, and the measurement end of the angle sensor is connected to the
本发明实施例还公开了一种红外测温系统,包括探头101角度可调的红外测温仪100和如上述实施例的用于红外测温仪100的调节装置,用于红外测温仪100的调节装置安装于红外测温仪100。可以理解的是,本实施例的红外测温系统,在测温的同时,可利用第一角度调整机构和第二角度调整机构对红外测温仪100的探头101的测量角度完成一个周期的调整,利用控制模块根据红外测温仪100测量到的温度确定最佳的测量角度,并控制第一角度调整机构和第二角度调整机构的调节状态,以调整探头101的测量角度。The embodiment of the present invention also discloses an infrared temperature measurement system, including an
本发明实施例还公开了如上述实施例的红外测温系统的工作方法,包括:The embodiment of the present invention also discloses the working method of the infrared temperature measurement system as described above, including:
S1、将红外测温仪100放置于测温孔中心位置,开启红外测温仪 100,对测温孔进行测温;S1, place the
S2、将第一角度调整机构设为待机,并通过第二角度调整机构对红外测温仪100的探头101的测量角度进行调整,控制模块通过第二角度调整机构将探头101的测量角度调整至红外测温仪100测得温度最低点对应的探头101的获取角度;S2. Set the first angle adjustment mechanism to stand by, and adjust the measurement angle of the
S3、将第二角度调整机构设为待机,并通过第一角度调整机构对红外测温仪100的探头101的测量角度进行调整,控制模块通过第一角度调整机构将探头101的测量角度调整至红外测温仪100测得温度最低点对应的探头101的获取角度。S3. Set the second angle adjustment mechanism to standby, and adjust the measurement angle of the
应当理解的是,步骤S2和S3在控制模块控制第二角度调整机构 (或第一角度调整机构)调整之前,第二角度调整机构(或第一角度调整机构)应已完成一个周期的探头测量角度的调整,才能得出在该调整周期内的温度最低点对应的探头的获取角度。It should be understood that, before the control module controls the adjustment of the second angle adjustment mechanism (or the first angle adjustment mechanism) in steps S2 and S3, the second angle adjustment mechanism (or the first angle adjustment mechanism) should have completed one cycle of probe measurement Only by adjusting the angle can the acquisition angle of the probe corresponding to the lowest temperature point in the adjustment period be obtained.
应当理解的是,步骤S2和步骤S3的顺序可相应调换和调整。It should be understood that the sequence of step S2 and step S3 can be exchanged and adjusted accordingly.
其中,还包括S4,步骤S4重复步骤S2,本实施例中通过第二角度调整机构对探头101的测量角度进行重复调整校正。根据实际校正需要,也可以重复步骤S3,或步骤S2和S3,重复校正探头101的测量角度,本发明的工作方法不局限于此。Among them, S4 is also included. Step S4 repeats step S2. In this embodiment, the measurement angle of the
以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the scope of the present invention. within the scope of protection.
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113029357A (en) * | 2021-03-04 | 2021-06-25 | 中北大学 | Automatic temperature measuring instrument probe position adjusting device and method |
CN113847991A (en) * | 2021-09-22 | 2021-12-28 | 广东韶钢工程技术有限公司 | Automatic positioning pyrometer and automatic positioning method |
CN114136449A (en) * | 2021-11-26 | 2022-03-04 | 中钢热能金灿新能源科技(湖州)有限公司 | Temperature measuring device and temperature measuring method for graphitization furnace |
CN116429271A (en) * | 2023-02-17 | 2023-07-14 | 杭州凯源电子有限公司 | Electrical equipment temperature monitoring device |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130041624A1 (en) * | 2011-08-11 | 2013-02-14 | Mitutoyo Corporation | Cmm moving path adjustment assisting method and apparatus |
US20180073930A1 (en) * | 2015-03-23 | 2018-03-15 | The Trustees Of Princeton University | Spherical-motion average radiant temperature sensor |
CN208238940U (en) * | 2018-06-19 | 2018-12-14 | 韶山恒升机械工业有限公司 | A kind of temperature measurement of vacuum furnace device of angle adjustable and position |
US20190093332A1 (en) * | 2016-04-28 | 2019-03-28 | Beijing Peakhonor Technology Co., Ltd. | Urine automatic positioning method and device, and healthy smart toilet containing same |
CN109646805A (en) * | 2019-01-31 | 2019-04-19 | 武汉市海沁医疗科技有限公司 | A kind of infrared temperature-sensitive measurement and control instrument |
KR20200037699A (en) * | 2018-10-01 | 2020-04-09 | (주)카탈로닉스 | Thermal-infrared temperature measurement apparatus for monitoring photovoltaic solar panel and measurement method thereof |
CN212482713U (en) * | 2020-07-06 | 2021-02-05 | 北京北方华创真空技术有限公司 | Adjusting device for infrared thermometer and infrared temperature measuring system |
-
2020
- 2020-07-06 CN CN202010642457.8A patent/CN111609941A/en active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130041624A1 (en) * | 2011-08-11 | 2013-02-14 | Mitutoyo Corporation | Cmm moving path adjustment assisting method and apparatus |
US20180073930A1 (en) * | 2015-03-23 | 2018-03-15 | The Trustees Of Princeton University | Spherical-motion average radiant temperature sensor |
US20190093332A1 (en) * | 2016-04-28 | 2019-03-28 | Beijing Peakhonor Technology Co., Ltd. | Urine automatic positioning method and device, and healthy smart toilet containing same |
CN208238940U (en) * | 2018-06-19 | 2018-12-14 | 韶山恒升机械工业有限公司 | A kind of temperature measurement of vacuum furnace device of angle adjustable and position |
KR20200037699A (en) * | 2018-10-01 | 2020-04-09 | (주)카탈로닉스 | Thermal-infrared temperature measurement apparatus for monitoring photovoltaic solar panel and measurement method thereof |
CN109646805A (en) * | 2019-01-31 | 2019-04-19 | 武汉市海沁医疗科技有限公司 | A kind of infrared temperature-sensitive measurement and control instrument |
CN212482713U (en) * | 2020-07-06 | 2021-02-05 | 北京北方华创真空技术有限公司 | Adjusting device for infrared thermometer and infrared temperature measuring system |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113029357A (en) * | 2021-03-04 | 2021-06-25 | 中北大学 | Automatic temperature measuring instrument probe position adjusting device and method |
CN113847991A (en) * | 2021-09-22 | 2021-12-28 | 广东韶钢工程技术有限公司 | Automatic positioning pyrometer and automatic positioning method |
CN113847991B (en) * | 2021-09-22 | 2025-02-25 | 广东韶钢工程技术有限公司 | Automatic positioning pyrometer and automatic positioning method |
CN114136449A (en) * | 2021-11-26 | 2022-03-04 | 中钢热能金灿新能源科技(湖州)有限公司 | Temperature measuring device and temperature measuring method for graphitization furnace |
CN114136449B (en) * | 2021-11-26 | 2024-03-22 | 湖州启源金灿新能源科技有限公司 | Graphitization furnace temperature measuring device and graphitization furnace temperature measuring method |
CN116429271A (en) * | 2023-02-17 | 2023-07-14 | 杭州凯源电子有限公司 | Electrical equipment temperature monitoring device |
CN116429271B (en) * | 2023-02-17 | 2023-10-20 | 杭州凯源电子有限公司 | Electrical equipment temperature monitoring device |
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