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CN111552014B - A Transverse MIM Lattice Plasmon Absorber - Google Patents

A Transverse MIM Lattice Plasmon Absorber Download PDF

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CN111552014B
CN111552014B CN202010416222.7A CN202010416222A CN111552014B CN 111552014 B CN111552014 B CN 111552014B CN 202010416222 A CN202010416222 A CN 202010416222A CN 111552014 B CN111552014 B CN 111552014B
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CN111552014A (en
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肖功利
杨文琛
薛淑文
杨宏艳
杨寓婷
张开富
李海鸥
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Guilin University of Electronic Technology
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Abstract

The invention relates to a transverse MIM grid lattice plasmon absorber which is composed of a dielectric substrate and a periodic metal nanoparticle array, wherein each group of metal nanoparticles is composed of two opposite gold cuboid blocks and a dielectric layer sandwiched between the two gold cuboid blocks. Incident light is TM plane wave with a magnetic field direction parallel to the plane of the medium substrate, and a certain included angle is formed between a wave vector k and the vertical direction, so that OLP-type lattice point array plasmons can be excited in the metal nanoparticle array, strong resonance coupling can be generated between adjacent nanometer metal units, and a specific absorption peak can be generated on the incident light under specific structural parameters and an incident angle. Compared with other array-based plasmon absorbers, the transverse MIM grid point array plasmon absorber has high quality factor and good tuning performance, and has good application prospect in the field of micro-nano optical integrated devices.

Description

一种横向MIM格点阵等离激元吸收器A Transverse MIM Lattice Plasmon Absorber

(一)技术领域(1) Technical field

本发明属于微纳光学技术领域,涉及由斜入射的TM光波在金属纳米颗粒阵列中激发格点阵等离激元,具体是一种横向MIM格点阵等离激元吸收器。The invention belongs to the technical field of micro-nano optics, and relates to the excitation of lattice plasmons in metal nanoparticle arrays by obliquely incident TM light waves, in particular to a transverse MIM lattice plasmon absorber.

(二)背景技术(2) Background technology

等离激元纳米结构由于能将光集中在小区域内,从而大大增强光与物质的相互作用而受到越来越多的关注,单个金属纳米粒子它可以支持局域表面等离激元共振(LSPR),具有较大的局域场增强。然而,LSPR的等离子体持续时间较短以及低品质因数限制了局域场强度和光与物质相互作用的增强。但由于相邻纳米粒子之间具有很强的耦合,因而由金属纳米粒子阵列支持的格点阵等离激元结合了理想的光子和等离子体特性,在抑制辐射损耗、高品质因数和大体积上显著场增强等方面有非常明显的优势。目前基于等离激元的吸收器在抗反射以及太阳能利用方面有着巨大的潜力,已成为许多课题组的研究对象,而且还具有封装尺寸小、功耗低、易集成等方面优点,在光电和热电产品领域有非常高的应用潜质。Plasmonic nanostructures have received increasing attention due to their ability to concentrate light in a small area, thereby greatly enhancing the light-matter interaction, and a single metal nanoparticle can support localized surface plasmon resonance (LSPR). ), with a large local field enhancement. However, the short plasma duration and low quality factor of LSPR limit the enhancement of local field strength and light-matter interaction. However, due to the strong coupling between adjacent nanoparticles, lattice plasmons supported by metal nanoparticle arrays combine ideal photonic and plasmonic properties, while suppressing radiation loss, high quality factor, and large volume. It has very obvious advantages in terms of significant field enhancement. At present, plasmon-based absorbers have great potential in anti-reflection and solar energy utilization, and have become the research object of many research groups. They also have the advantages of small package size, low power consumption, and easy integration. Thermoelectric products have very high application potential.

随着社会科学技术的不断进步发展,人们对高科技产品和绿色新能源开发利用的要求不断提高,同时伴随着纳米科技的进步,光子能量与电、热辐射能量的相互转换与应用是光电子学研究领域的主要内容,基于等离激元的吸收器为这种转换与光子能量局部场化提供了新的途径,已经成为微纳光学的重要研究领域。With the continuous progress and development of social science and technology, people's requirements for the development and utilization of high-tech products and green new energy continue to increase. At the same time, with the progress of nanotechnology, the mutual conversion and application of photon energy, electricity, and thermal radiation energy is optoelectronics. The main content of the research field, the plasmon-based absorber provides a new way for this conversion and localization of photon energy, and has become an important research field of micro-nano optics.

近年来,等离激元吸收器被提出并加以研究,其许多明显优势吸引着越来越多的研究人员去探索。本发明专利提出了一种新的横向MIM格点阵等离激元吸收器,本横向MIM格点阵等离激元吸收器与其它基于等离激元的吸收器相比有更高的品质因数,可以较为容易地实现静态调谐。工作时仅对特定入射方向的平面光波起作用,可随入射光的入射方向进行动态调谐,并且本横向MIM格点阵等离激元吸收器材料单一,周期性强,具备加工简单的优点。In recent years, plasmonic absorbers have been proposed and studied, and their many obvious advantages attract more and more researchers to explore. The patent of the present invention proposes a new lateral MIM lattice lattice plasmon absorber. Compared with other plasmon-based absorbers, the transverse MIM lattice lattice plasmon absorber has higher quality factor, static tuning can be achieved relatively easily. When working, it only acts on the plane light wave in a specific incident direction, and can be dynamically tuned with the incident direction of the incident light. In addition, the transverse MIM lattice plasmon absorber has a single material, strong periodicity, and simple processing.

(三)发明内容(3) Contents of the invention

本发明的目的是设计一种横向MIM格点阵等离激元吸收器,在原始的介质基底上对纳米格点阵列的结构进一步的研究,通过改变金属纳米颗粒阵列的周期、金属纳米颗粒的尺寸和斜入射光的入射角度等参数,可以发现此结构能够有效的调节本横向MIM格点阵等离激元吸收器的吸收率、带宽、共振波长等性能。The purpose of the present invention is to design a transverse MIM lattice plasmon absorber, further study the structure of the nano lattice array on the original dielectric substrate, by changing the period of the metal nano particle array, the According to the parameters such as the size and the incident angle of the oblique incident light, it can be found that this structure can effectively adjust the absorption rate, bandwidth, resonance wavelength and other properties of the transverse MIM lattice plasmon absorber.

本发明的目的是设计一种横向MIM格点阵等离激元吸收器,主要由介质基底和具有周期性的金属纳米颗粒阵列构成,每组金属纳米颗粒由两个相对的金长方体块构成,相对的两个金长方体块的中间夹有一层介质,每个金长方体块的几何参数完全相同,相对于介质基底垂直地竖立在其上表面,每组金属纳米颗粒在介质基底上表面沿水平相互垂直的X轴和Y轴成一定周期分布构成金属纳米颗粒阵列,整个结构放置在真空或空气中,入射光为平面波,光源在整个结构的正上方且入射方向与介质基底上平面有一定的夹角,入射光的磁场方向平行于每组金属纳米颗粒中两个金长方体块的宽,入射光的电场方向与介质基底上表面有一定的夹角,且入射方向即波矢k要在特定的斜入射方向上。透射光从金属纳米颗粒阵列下方射出,反射光从金属纳米颗粒阵列上方射出。The purpose of the present invention is to design a transverse MIM lattice lattice plasmon absorber, which is mainly composed of a dielectric substrate and an array of metal nanoparticles with periodicity, each group of metal nanoparticles is composed of two opposite gold cuboid blocks, A layer of medium is sandwiched between the two opposite gold cuboid blocks. The geometric parameters of each gold cuboid block are exactly the same, and are vertically erected on the upper surface of the medium base. The vertical X axis and Y axis are distributed in a certain period to form a metal nanoparticle array. The entire structure is placed in a vacuum or air. The incident light is a plane wave. Angle, the direction of the magnetic field of the incident light is parallel to the width of the two gold cuboid blocks in each group of metal nanoparticles, the electric field direction of the incident light has a certain angle with the upper surface of the dielectric substrate, and the incident direction, that is, the wave vector k, must be at a specific angle. oblique incidence direction. The transmitted light emerges from below the metal nanoparticle array, and the reflected light emerges from above the metal nanoparticle array.

所述每组金属纳米颗粒中金长方体块的高度可以任意符合横向MIM格点阵等离激元吸收器工作条件的高度,为了获得吸收器的最佳特性,采用金长方体块高度为260nm。The height of the gold cuboid block in each group of metal nanoparticles can be arbitrarily in line with the working conditions of the transverse MIM lattice plasmon absorber. In order to obtain the best characteristics of the absorber, the height of the gold cuboid block is 260 nm.

所述每组金属纳米颗粒中金长方体块的长度可以任意符合横向MIM格点阵等离激元吸收器工作条件的长度,为了获得吸收器的最佳特性,采用金长方体块长度为180nm。The length of the gold cuboid block in each group of metal nanoparticles can be arbitrarily in line with the working conditions of the transverse MIM lattice plasmon absorber. In order to obtain the best characteristics of the absorber, the length of the gold cuboid block is 180 nm.

所述每组金属纳米颗粒中金长方体块的宽度可以任意符合横向MIM格点阵等离激元吸收器工作条件的宽度,为了获得吸收器的最佳特性,采用金长方体块宽度为80nm。The width of the gold cuboid block in each group of metal nanoparticles can be arbitrarily in line with the working conditions of the transverse MIM lattice plasmon absorber. In order to obtain the best characteristics of the absorber, the width of the gold cuboid block is 80 nm.

所述每组金属纳米颗粒中两个金长方体块的间距可以任意符合横向MIM格点阵等离激元吸收器工作条件的间距,为了获得吸收器的最佳特性,采用两个金长方体块的间距为50nm。The spacing between the two gold cuboid blocks in each group of metal nanoparticles can be arbitrarily in line with the working conditions of the transverse MIM lattice plasmon absorber. In order to obtain the best characteristics of the absorber, two gold cuboid blocks are used. The pitch is 50nm.

所述金属纳米颗粒阵列的周期可以任意符合横向MIM格点阵等离激元吸收器工作条件的周期,为了获得吸收器的最佳特性,采用金属纳米颗粒阵列平行于每组金属纳米颗粒中两个金长方体块长方向上和宽方向上的周期均为为450nm。The period of the metal nanoparticle array can be arbitrarily in line with the period of the working conditions of the transverse MIM lattice plasmon absorber. The period of each gold cuboid block is 450 nm in both the length direction and the width direction.

所述介质基底的材料可以任意符合横向MIM格点阵等离激元吸收器工作条件的材料,为了获得吸收器的最佳特性,采用折射率n=1.52的介质基底材料。The material of the dielectric substrate can be any material that conforms to the working conditions of the transverse MIM lattice plasmon absorber. In order to obtain the best characteristics of the absorber, a dielectric substrate material with a refractive index of n=1.52 is used.

所述金属纳米颗粒阵列的入射平面光在YZ面内的波矢k与Z轴的夹角θ可以任意符合横向MIM格点阵等离激元吸收器工作条件的角度,为了获得吸收器的最佳特性,采用入射平面光在YZ面内的波矢k与Z轴的夹角θ为为15°。The angle θ between the wave vector k of the incident plane light of the metal nanoparticle array in the YZ plane and the Z axis can be any angle that conforms to the working conditions of the transverse MIM lattice plasmon absorber. To achieve the best characteristics, the angle θ between the wave vector k of the incident plane light in the YZ plane and the Z axis is 15°.

所述每个金属纳米颗粒中两个金长方体块中间的介质层可以任意符合横向MIM格点阵等离激元吸收器工作条件的介质材料,为了获得吸收器的最佳特性,使用空气作为介质材料。The dielectric layer between the two gold cuboid blocks in each metal nanoparticle can be any dielectric material that meets the working conditions of the transverse MIM lattice plasmon absorber. In order to obtain the best characteristics of the absorber, air is used as the medium. Material.

与现有的等离激元吸收器相比,本发明的优点为:1.平面光波入射方向与介质基底上表面有一定的夹角,入射光的磁场方向平行于每组金属纳米颗粒中两个金长方体块的宽,入射光的电场方向与介质基底上表面有一段的夹角,即入射平面光波为TM波,这就使金属纳米颗粒阵列中不仅存在着横向极化电场,而且还存在垂直于介质基底上表面的竖直极化电场,在每组金属纳米颗粒中的介质与金属的表面上产生更强的局域电场增强,而且相邻的每组金属纳米颗粒之间具有很强的耦合作用,从而实现更强的等离激元共振获得更高的品质因数和吸收系数。2.通过改变金长方体块的结构参数和金属纳米颗粒阵列的周期可以静态改变共振波长、带宽、吸收率以及品质因数。3.通过改变入射平面光的电场方向(入射角度),可以动态改变共振波长、带宽、吸收率以及品质因数。4.相比其它等离激元吸收器,本横向MIM格点阵等离激元吸收器具有共振波长在可见光到近红外波段可灵活调节的特点。5.因为在X轴和Y轴方向具有一定的周期性,而且每组金属纳米颗粒结构简单,同时也具备加工容易的特点。Compared with the existing plasmonic absorber, the advantages of the present invention are: 1. The incident direction of the plane light wave has a certain angle with the upper surface of the dielectric substrate, and the magnetic field direction of the incident light is parallel to the two in each group of metal nanoparticles; The width of a gold cuboid block, the electric field direction of the incident light has an included angle with the upper surface of the dielectric substrate, that is, the incident plane light wave is a TM wave, which makes the metal nanoparticle array not only have a laterally polarized electric field, but also exist The vertically polarized electric field perpendicular to the upper surface of the dielectric substrate produces stronger local electric field enhancement on the surface of the dielectric and metal in each group of metal nanoparticles, and there is a strong The coupling effect, so as to achieve stronger plasmon resonance and obtain higher quality factor and absorption coefficient. 2. The resonance wavelength, bandwidth, absorption rate and quality factor can be changed statically by changing the structural parameters of the gold cuboid block and the period of the metal nanoparticle array. 3. By changing the electric field direction (incidence angle) of incident plane light, the resonance wavelength, bandwidth, absorption rate and quality factor can be dynamically changed. 4. Compared with other plasmonic absorbers, the transverse MIM lattice plasmonic absorber has the characteristic that the resonance wavelength can be flexibly adjusted in the visible light to the near-infrared band. 5. Because there is a certain periodicity in the X-axis and Y-axis directions, and the structure of each group of metal nanoparticles is simple, and also has the characteristics of easy processing.

(四)附图说明(4) Description of drawings

图1为本横向MIM格点阵等离激元吸收器的三维立体结构示意图。FIG. 1 is a schematic diagram of a three-dimensional structure of a transverse MIM lattice plasmon absorber.

图2为本横向MIM格点阵等离激元吸收器的每组金属纳米颗粒的二维结构XZ面示意图。FIG. 2 is a schematic diagram of the XZ plane of the two-dimensional structure of each group of metal nanoparticles of the transverse MIM lattice plasmon absorber.

图3为本横向MIM格点阵等离激元吸收器的每组金属纳米颗粒的二维结构YZ面示意图。FIG. 3 is a schematic diagram of the YZ plane of the two-dimensional structure of each group of metal nanoparticles of the transverse MIM lattice plasmon absorber.

图4为为为本横向MIM格点阵等离激元吸收器的每组金属纳米颗粒的二维结构XY面示意图。FIG. 4 is a schematic XY plane of the two-dimensional structure of each group of metal nanoparticles of the present transverse MIM lattice plasmon absorber.

图5为本横向MIM格点阵等离激元吸收器工作在最佳时得到的反射、透射、吸收三条光谱图。Figure 5 is the reflection, transmission and absorption spectra obtained when the transverse MIM lattice plasmon absorber works optimally.

图6为每组金属纳米颗粒的高度h=230nm~260nm范围内变化时得到的本横向MIM格点阵等离激元吸收器的吸收光谱图。FIG. 6 is an absorption spectrum diagram of the present transverse MIM lattice plasmon absorber obtained when the height h of each group of metal nanoparticles is changed in the range of 230 nm to 260 nm.

图7为入射平面光在YZ面内的波矢k与Z轴的夹角θ=10°~25°范围内调节时得到的本横向MIM格点阵等离激元吸收器的吸收光谱图。Fig. 7 is the absorption spectrum of the transverse MIM lattice plasmon absorber obtained when the angle θ of the incident plane light k in the YZ plane and the Z axis is adjusted in the range of 10° to 25°.

图8为金属纳米颗粒阵列平行于每组金属纳米颗粒中两个金长方体块长方向上和宽方向上的周期D=430nm~460nm范围内变化时得到的本横向MIM格点阵等离激元吸收器的吸收光谱图。Fig. 8 is the transverse MIM lattice plasmon obtained when the metal nanoparticle array is parallel to the two gold cuboid blocks in each group of metal nanoparticles in the length direction and the width direction of the period D=430nm~460nm Absorption spectrum of the absorber.

(五)具体实施方式(5) Specific implementation manner

下面结合附图及本实施方案对本发明作进一步解释说明。The present invention will be further explained below with reference to the accompanying drawings and this embodiment.

图1所示为本横向MIM格点阵等离激元吸收器的三维立体结构示意图。包括折射率n=1.52的介质基底2,两个金长方体块相对且中间夹有一层介质(空气)构成的每组金属纳米颗粒1,两个金长方体块的长平行于Y轴,宽平行于X轴。每组金属纳米颗粒在介质基底上平面沿X轴和Y轴成一定的周期分布构成金属纳米颗粒阵列,本发明中介质基底的厚度符合工作条件即可。入射光为平面波,波矢k在YZ平面内且入射方向与Z轴的夹角为θ,且入射光的偏振方向(电场方向)垂直于波矢k在YZ平面内,磁场方向平行于X轴。FIG. 1 is a schematic diagram of the three-dimensional structure of the transverse MIM lattice plasmon absorber. Including a dielectric substrate 2 with a refractive index of n=1.52, two gold cuboid blocks facing each other and sandwiching a layer of medium (air) in the middle of each group of metal nanoparticles 1, the length of the two gold cuboid blocks is parallel to the Y axis, and the width is parallel to the Y axis. X axis. Each group of metal nanoparticles is distributed periodically along the X axis and the Y axis on the dielectric substrate to form a metal nanoparticle array, and the thickness of the dielectric substrate in the present invention only needs to meet the working conditions. The incident light is a plane wave, the wave vector k is in the YZ plane and the angle between the incident direction and the Z axis is θ, and the polarization direction (electric field direction) of the incident light is perpendicular to the wave vector k in the YZ plane, and the magnetic field direction is parallel to the X axis.

图2为本横向MIM格点阵等离激元吸收器的每组金属纳米颗粒的二维结构XZ面示意图,工作在最佳时,每组金属纳米颗粒中的两个金长方体块的宽W=80nm,两个金长方体块的相对距离m=50nm、两个金长方体块中间所夹的介质层为空气,且每组金属纳米颗粒在介质基底上方沿着X轴方向排列的周期为D=450nm,整个结构竖立垂直地排列在介质基底的上表面。Figure 2 is a schematic diagram of the XZ plane of the two-dimensional structure of each group of metal nanoparticles in the transverse MIM lattice plasmon absorber. When working at the optimum, the width W of the two gold cuboid blocks in each group of metal nanoparticles =80nm, the relative distance between the two gold cuboid blocks is m=50nm, the dielectric layer sandwiched between the two gold cuboid blocks is air, and the period of each group of metal nanoparticles arranged along the X-axis direction above the dielectric substrate is D = 450nm, the whole structure is vertically arranged on the upper surface of the dielectric substrate.

图3为本横向MIM格点阵等离激元吸收器的每组金属纳米颗粒的二维结构YZ面示意图,工作在最佳时,其中每组金属纳米颗粒在介质基底上方沿着Y轴方向排列的周期为T=D=450nm,每组金属纳米颗粒中的两个金长方体块的高h=260nm。Fig. 3 is a schematic diagram of the YZ plane of the two-dimensional structure of each group of metal nanoparticles in the transverse MIM lattice plasmon absorber. When working optimally, each group of metal nanoparticles is above the dielectric substrate along the Y-axis direction The period of the arrangement is T=D=450nm, and the height of the two gold cuboid blocks in each group of metal nanoparticles is h=260nm.

图4为本横向MIM格点阵等离激元吸收器的每组金属纳米颗粒的二维结构XY面示意图,工作在最佳时,每组金属纳米颗粒中的两个金长方体块的长a=180nm。Fig. 4 is a schematic diagram of the XY plane of the two-dimensional structure of each group of metal nanoparticles in the transverse MIM lattice plasmon absorber. When working optimally, the length a of the two gold cuboid blocks in each group of metal nanoparticles =180nm.

本发明工作时:入射的平面光波的偏振方向(电场方向)在YZ平面内,磁场方向平行于X轴,并且入射方向与Z轴的夹角为θ,θ的最佳度数为15°,这样就会在金属纳米颗粒阵列中产生平行于Z轴的电场,从而可以在金属纳米颗粒阵列中激发OLP形式的格点阵等离激元,相邻的金属纳米颗粒之间会产生较强的耦合共振,在特定的结构参数和入射角下就会对入射光产生特定的吸收峰,并且相比于与其它基于周期阵列的等离激元吸收器具有很高的品质因数。改变金长方体块的结构参数和金属纳米颗粒阵列的周期可以改变吸收峰的偏移从而实现静态调谐,改变平面光波的入射角度也可以改变吸收峰的偏移从而实现动态调谐。图5所示为本横向MIM格点阵等离激元吸收器工作最佳时的光谱图,图中的横坐标表示平面光入射波长,纵坐标表示对入射平面光波的反射系数、透射系数、吸收系数,三条曲线分别代表本横向MIM格点阵等离激元吸收器对入射平面光波的反射谱线(Reflectance)、透射谱线(Transmittance)、吸收谱线(Absorbance),且三者的关系为A=1-T-R。通过吸收谱线可以看出,本横向MIM格点阵等离激元吸收器的吸收峰具有非常窄的带宽,且最高峰值的吸收系数高达0.88,因而具有很高的品质因数。When the present invention works: the polarization direction (electric field direction) of the incident plane light wave is in the YZ plane, the magnetic field direction is parallel to the X axis, and the angle between the incident direction and the Z axis is θ, and the optimal degree of θ is 15°, so that An electric field parallel to the Z axis will be generated in the metal nanoparticle array, so that lattice plasmons in the form of OLP can be excited in the metal nanoparticle array, and strong coupling will be generated between adjacent metal nanoparticles. Resonance produces a specific absorption peak for incident light under specific structural parameters and incident angles, and has a high quality factor compared to other periodic array-based plasmonic absorbers. Changing the structural parameters of the gold cuboid block and the period of the metal nanoparticle array can change the shift of the absorption peak to achieve static tuning, and changing the incident angle of the plane light wave can also change the shift of the absorption peak to achieve dynamic tuning. Figure 5 shows the spectrogram when the transverse MIM lattice plasmon absorber works optimally. The abscissa in the figure represents the incident wavelength of the plane light, and the ordinate represents the reflection coefficient, transmission coefficient, Absorption coefficient, the three curves represent the reflection line (Reflectance), transmission line (Transmittance), and absorption line (Absorbance) of the transverse MIM lattice plasmon absorber to the incident plane light wave respectively, and the relationship between the three is A=1-T-R. It can be seen from the absorption spectrum that the absorption peak of the transverse MIM lattice plasmon absorber has a very narrow bandwidth, and the absorption coefficient of the highest peak is as high as 0.88, so it has a high quality factor.

本发明的工作思路是:在结构参数固定和初始值的条件下进行展开工作。①当每组金属纳米颗粒的中金长方体块的高度h=230nm~260nm范围内变化时,所得出的吸收光谱结果如图6所示;②当入射平面光波即波矢k与Z轴的夹角θ=10°~25°范围内调节时,所得出的吸收光谱结果如图7所示;③当金属纳米颗粒阵列的沿着X轴和Y轴的周期D=T=430nm~460nm范围内改变时,所得出的吸收光谱结果如图8所示。The working idea of the present invention is to carry out the work under the conditions of fixed structural parameters and initial values. ①When the height h=230nm~260nm of the gold cuboid block of each group of metal nanoparticles changes, the absorption spectrum results obtained are shown in Figure 6; ②When the incident plane light wave is the clip between the wave vector k and the Z axis When the angle θ=10°~25° is adjusted, the obtained absorption spectrum results are shown in Fig. 7; ③ When the period of the metal nanoparticle array along the X axis and the Y axis is D=T=430nm~460nm When changed, the resulting absorption spectrum results are shown in Figure 8.

下面结合本例实施方式,通过对本横向MIM格点阵等离激元吸收器仿真验证,得出以下结果:The following results are obtained through the simulation and verification of the transverse MIM lattice plasmon absorber in combination with the implementation of this example:

图6为每组金属纳米颗粒中的金长方体块的高度h=230nm~260nm范围内变化时的吸收光谱图。图中的横坐标表示平面光的入射波长,纵坐标表示对入射平面光波的吸收系数,也称为吸收率,在图中可见四种不同的吸收光谱曲线分别为每组金属纳米颗粒中的金长方体块不同高度仿真的结果,其高度h分别为230nm、240nm、250nm、260nm。由图中的结果可见,随着高度h的增加,本横向MIM格点阵等离激元吸收器的吸收峰值会逐渐增加,吸收峰逐渐红移,并且对吸收通带内的吸收系数逐渐减小,因而随着两个金长方体块的高度在230nm~260nm范围内增加时本横向MIM格点阵等离激元吸收器性能逐渐增强,峰值的吸收系数逐渐由0.76增加到0.88,共振峰波长逐渐由684nm增加到693nm,具有很好的静态调谐特性。FIG. 6 is an absorption spectrum diagram when the height of the gold cuboid block in each group of metal nanoparticles varies in the range of h=230 nm to 260 nm. The abscissa in the figure represents the incident wavelength of the plane light, and the ordinate represents the absorption coefficient of the incident plane light wave, also known as the absorptivity. It can be seen in the figure that four different absorption spectrum curves are the gold in each group of metal nanoparticles. The simulation results of different heights of the cuboid block, the heights h are 230nm, 240nm, 250nm and 260nm respectively. It can be seen from the results in the figure that with the increase of the height h, the absorption peak of the transverse MIM lattice plasmon absorber will gradually increase, the absorption peak will gradually red-shift, and the absorption coefficient in the absorption passband will gradually decrease. Therefore, as the height of the two gold cuboid blocks increases in the range of 230nm to 260nm, the performance of the transverse MIM lattice plasmon absorber gradually increases, and the peak absorption coefficient gradually increases from 0.76 to 0.88, and the resonance peak wavelength Gradually increased from 684nm to 693nm, with good static tuning characteristics.

图7为入射平面光波在YZ面内的波矢k与Z轴的夹角θ在10°~25°范围内调节时得到的本横向MIM格点阵等离激元吸收器的吸收光谱图。图中的横坐标和纵坐标的表示与图6相同。通过波矢k与Z轴的四个不同的夹角仿真得到的四条吸收谱线可以发现,随着入射夹角θ的增大,本横向MIM格点阵等离激元吸收器的吸收峰逐渐蓝移,且随着入射夹角θ的增大,本横向MIM格点阵等离激元吸收器的吸收峰值逐渐增大然后减小,在15°左右达到最大值,且随着入射夹角θ的增大,本横向MIM格点阵等离激元吸收器的吸收峰逐渐变窄然后变宽,在15°左右达到最窄,因而在平面光波的入射角θ=15°时具有很高的品质因数和吸收系数,入射平面光波的波矢k与Z轴夹角θ在10°~25°范围内变化时,共振峰波长逐渐由702nm减小到673nm,因而可以非常灵活地调节吸收峰的偏移,具有非超好的动态调谐特性。Figure 7 shows the absorption spectrum of the transverse MIM lattice plasmon absorber obtained when the angle θ between the wave vector k of the incident plane light wave in the YZ plane and the Z axis is adjusted in the range of 10° to 25°. The representations of the abscissa and the ordinate in the figure are the same as in FIG. 6 . It can be found that the absorption peak of the transverse MIM lattice plasmon absorber gradually increases with the increase of the incident angle θ from the four absorption lines obtained by the simulation of the four different angles between the wave vector k and the Z axis. blue-shift, and with the increase of the incident angle θ, the absorption peak of this transverse MIM lattice plasmonic absorber gradually increases and then decreases, reaching a maximum value around 15°, and with the incident angle With the increase of θ, the absorption peak of this transverse MIM lattice plasmonic absorber gradually narrows and then widens, reaching the narrowest at about 15°, so it has a very high incidence angle θ=15°. When the angle θ between the wave vector k of the incident plane light wave and the Z-axis changes in the range of 10° to 25°, the resonance peak wavelength gradually decreases from 702 nm to 673 nm, so the absorption peak can be adjusted very flexibly offset, with non-superior dynamic tuning characteristics.

图8为当金属纳米颗粒阵列的沿着X轴和Y轴的周期D=T=430nm~460nm范围内改变时得到的本横向MIM格点阵等离激元吸收器的吸收光谱图。图中的横坐标和纵坐标的表示与图6相同。通过对金属纳米颗粒阵列周期的调节得到的本横向MIM格点阵等离激元吸收器的四条吸收谱线结果可以发现,在D=T=430nm~460nm范围内,随着周期的增加,本横向MIM格点阵等离激元吸收器的吸收峰逐渐红移,共振峰波长逐渐由664nm增加到708nm,说明通过改变金属纳米颗粒阵列的周期也可以灵活地对共振波长实现静态调谐。且随着周期的增加,本横向MIM格点阵等离激元吸收器的吸收峰值逐渐增大,在周期D和T为450nm和460nm时的峰值基本相平,但在周期D=T=450nm时对吸收通带内的吸收系数有更好的抑制减小,因而在周期D=T=450nm时本横向MIM格点阵等离激元吸收器的性能最佳。8 is an absorption spectrum diagram of the present transverse MIM lattice plasmonic absorber obtained when the period of the metal nanoparticle array along the X-axis and the Y-axis is changed in the range of D=T=430nm-460nm. The representations of the abscissa and the ordinate in the figure are the same as in FIG. 6 . The results of the four absorption lines of the transverse MIM lattice plasmon absorber obtained by adjusting the period of the metal nanoparticle array can be found that in the range of D=T=430nm~460nm, with the increase of the period, the The absorption peak of the transverse MIM lattice plasmonic absorber gradually shifted to red, and the resonance peak wavelength gradually increased from 664 nm to 708 nm, indicating that the resonance wavelength can also be flexibly tuned statically by changing the period of the metal nanoparticle array. And with the increase of the period, the absorption peak of the transverse MIM lattice plasmon absorber gradually increases, and the peaks are basically the same when the period D and T are 450 nm and 460 nm, but when the period D = T = 450 nm At the same time, the absorption coefficient in the absorption passband is better suppressed and reduced, so the performance of the transverse MIM lattice plasmon absorber is the best when the period D=T=450nm.

上述实施方式,仅为本发明的技术方案和目的进一步的具体解释说明,并非用于限制本发明,对于本领域的技术人员来说,凡在本发明的公开的范围之内,所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above-mentioned embodiments are only further specific explanations of the technical solutions and purposes of the present invention, and are not intended to limit the present invention. For those skilled in the art, any Modifications, equivalent replacements, improvements, etc., should all be included within the protection scope of the present invention.

Claims (2)

1.一种横向MIM格点阵等离激元吸收器,由介质基底和具有周期性的金属纳米颗粒阵列构成,金属纳米颗粒由两个相对的金长方体块为一组,相对于介质基底垂直地竖立在其上表面,相对的两个金长方体块的中间夹有一层介质,每组金属纳米颗粒在基底上表面沿着相互垂直的水平X轴和Y轴成周期分布构成金属纳米颗粒阵列,入射光为平面波,光源在整个结构的正上方且斜入射到介质基底上平面,入射光波为磁场方向平行于介质基底上平面的TM波,透射光从金属纳米颗粒阵列下方射出,反射光从金属纳米颗粒阵列上方射出,整个结构工作在真空或空气介质环境中;每组金属纳米颗粒由两个相对的金长方体块及其中间所夹的介质层构成,两个相对的金长方体几何尺寸完全相同;垂直竖立在介质基底上表面的每组金属纳米颗粒沿着金长方体块长方向上的排列周期D介于300nm~700nm之间,沿着金长方体块宽度方向上的排列周期T介于300nm~700nm之间;每组金属纳米颗粒中金长方体块的高度h介于150nm~300nm之间,宽度W介于20nm~100nm之间,长度a介于100nm~300nm之间,两个相对金长方体块的间距m介于20nm~150nm之间。1. A transverse MIM lattice lattice plasmon absorber, which is composed of a dielectric substrate and a periodic metal nanoparticle array, wherein the metal nanoparticles are composed of two opposite gold cuboid blocks, which are perpendicular to the dielectric substrate. A layer of medium is sandwiched between two opposite gold cuboid blocks, and each group of metal nanoparticles is periodically distributed along the horizontal X-axis and Y-axis perpendicular to each other on the upper surface of the substrate to form a metal nanoparticle array, The incident light is a plane wave, the light source is directly above the entire structure and obliquely incident on the upper plane of the medium substrate, the incident light wave is a TM wave with the magnetic field direction parallel to the upper plane of the medium substrate, the transmitted light is emitted from the bottom of the metal nanoparticle array, and the reflected light is emitted from the metal nanoparticle array. The nanoparticle array is ejected from above, and the whole structure works in a vacuum or air medium environment; each group of metal nanoparticles is composed of two opposite gold cuboid blocks and a dielectric layer sandwiched between them. The geometric dimensions of the two opposite gold cuboid blocks are exactly the same. ; The arrangement period D of each group of metal nanoparticles vertically erected on the upper surface of the dielectric substrate along the length direction of the gold cuboid block is between 300nm and 700nm, and the arrangement period T along the width direction of the gold cuboid block is between 300nm and 300nm. Between 700 nm; the height h of the gold cuboid blocks in each group of metal nanoparticles is between 150 nm and 300 nm, the width W is between 20 nm and 100 nm, and the length a is between 100 nm and 300 nm. The spacing m is between 20nm and 150nm. 2.根据权利要求1所述的一种横向MIM格点阵等离激元吸收器,其特征在于:入射光为TM平面光波,入射光的磁场方向平行于每组金属纳米颗粒中两个金长方体块的宽度方向,入射平面光波在YZ平面内的波矢k与Z轴的夹角θ介于1°~60°之间。2. a kind of transverse MIM lattice plasmon absorber according to claim 1, is characterized in that: incident light is TM plane light wave, and the magnetic field direction of incident light is parallel to two gold in each group of metal nanoparticles In the width direction of the cuboid block, the angle θ between the wave vector k of the incident plane light wave in the YZ plane and the Z axis is between 1° and 60°.
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