CN111139446A - Vacuum coating production line - Google Patents
Vacuum coating production line Download PDFInfo
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- CN111139446A CN111139446A CN201811309459.4A CN201811309459A CN111139446A CN 111139446 A CN111139446 A CN 111139446A CN 201811309459 A CN201811309459 A CN 201811309459A CN 111139446 A CN111139446 A CN 111139446A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 45
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 38
- 230000007246 mechanism Effects 0.000 claims abstract description 118
- 230000005540 biological transmission Effects 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 7
- 238000012546 transfer Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 3
- 238000005086 pumping Methods 0.000 description 18
- 230000007704 transition Effects 0.000 description 14
- 238000000576 coating method Methods 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 9
- 239000007888 film coating Substances 0.000 description 8
- 238000009501 film coating Methods 0.000 description 8
- 238000007599 discharging Methods 0.000 description 4
- 230000007723 transport mechanism Effects 0.000 description 4
- 239000000284 extract Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000010924 continuous production Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 239000005328 architectural glass Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
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- Mechanical Engineering (AREA)
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- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
本发明属于真空镀膜领域，尤其涉及一种真空镀膜生产线。所述真空镀膜生产线包括至少一个工件小车、至少一个并列设置有进片腔和出片腔的真空室、分别设置在进片腔内和出片腔内的第一传送机构和第二传送机构、回转室，所述真空室与回转室连接。通过在一个真空室里并列设置进片腔和出片腔，所述进片腔和出片腔内分别设置第一传送机构和第二传送机构，即可在一个真空室里完成两个工序，有效的减少真空室的使用数量；再通过设置一个与真空室连接的回转室，即可将流出产线的工件小车转向传送回到产线上，有效的缩小小车返回装置的占地面积；本发明具有结构简单，占地面积小，投资成本低，工作效率高等优点。
The invention belongs to the field of vacuum coating, in particular to a vacuum coating production line. The vacuum coating production line includes at least one workpiece trolley, at least one vacuum chamber which is provided with a wafer feeding cavity and a wafer output cavity in parallel, a first conveying mechanism and a second conveying mechanism respectively arranged in the wafer feeding cavity and the wafer output cavity, A rotary chamber, the vacuum chamber is connected with the rotary chamber. By arranging the film feeding cavity and the film outputting cavity side by side in one vacuum chamber, and the first conveying mechanism and the second conveying mechanism are respectively arranged in the film feeding cavity and the film outputting cavity, the two processes can be completed in one vacuum chamber, Effectively reduce the number of vacuum chambers used; by setting up a rotary chamber connected to the vacuum chamber, the workpiece trolley that flows out of the production line can be turned and transferred back to the production line, effectively reducing the footprint of the trolley return device; this The invention has the advantages of simple structure, small footprint, low investment cost and high work efficiency.
Description
Technical Field
The invention belongs to the field of vacuum coating, and particularly relates to a vacuum coating production line.
Background
The vacuum coating technology is developed rapidly, from evaporation coating to magnetron sputtering coating, multi-arc ion coating and the like; the application range is also wider and wider as: the fields of architectural glass, solar energy, electric products, cutter production and the like are all applied to the vacuum coating technology; vacuum coating equipment has also evolved from single chamber batch vacuum coating machines to multi-chamber continuous vacuum coating lines.
The more typical vertical continuous vacuum coating production line of the prior art includes: the device comprises a front transverse moving device, a wafer inlet frame, a wafer inlet chamber, a front fine pumping chamber, a front transition chamber, a coating chamber (the coating chamber may be provided with a plurality of chambers), a rear transition chamber, a rear fine pumping chamber, a wafer outlet frame, a rear transverse moving device and a workpiece trolley returning device which are connected in sequence, wherein the chambers are collectively called as a vacuum chamber; the joints of some vacuum chambers are provided with a vacuum lock (a flap valve which can cut off a gas passage between the two vacuum chambers when closed and can allow a workpiece trolley to pass through a material inlet and a material outlet of a valve when opened) and an air extractor set (a device which enables the vacuum chambers to obtain certain negative pressure); each vacuum chamber, the front transverse moving device, the sheet inlet frame, the sheet outlet frame, the rear transverse moving device and the workpiece trolley return assembly are provided with workpiece trolley conveying devices for driving the workpiece trolleys to move in a translation manner; the front and rear transverse moving devices can also drive the workpiece trolley to move left and right.
Automatic coating process: a workpiece trolley (used for bearing a coated workpiece such as glass, a rubber plate and the like) on the workpiece trolley returning device enters the wafer feeding frame through the front transverse moving device to load the workpiece, the workpiece trolley enters the wafer feeding chamber when the vacuum lock of the wafer feeding chamber is opened, the vacuum lock of the wafer feeding chamber is closed after the workpiece completely enters the wafer feeding chamber, the gas of the wafer feeding chamber is pumped into the wafer feeding chamber by a wafer feeding chamber gas pump, the vacuum lock of the front fine pumping chamber is opened when the gas pressure of the wafer feeding chamber reaches a certain value (usually 3 Pa), and the workpiece trolley enters the front fine pumping chamber; the workpiece trolleys sequentially enter each vacuum chamber, and the air extractor set corresponding to each vacuum chamber extracts air according to a certain program; when the workpiece of the workpiece trolley passes through the coating chamber, the workpiece is coated with one or more layers of films, and then the workpiece is taken out of other vacuum chambers to a film discharging frame through a certain procedure, and the workpiece can be taken down from the workpiece trolley; the workpiece trolley after taking the workpiece moves into the rear transverse moving device, and then moves into the rear transverse moving device through the workpiece trolley returning device to complete a working cycle, thereby achieving the purpose of continuous production (a plurality of workpiece trolleys are arranged on the production line at the same time).
The vertical continuous vacuum coating production line in the prior art has more vacuum chambers, is also provided with a special workpiece trolley returning device, and has the defects of complex structure, large floor area, high investment cost and the like.
Disclosure of Invention
The invention aims to solve the technical problems that the existing vacuum coating production line is complex in structure, large in occupied area, high in investment cost and the like.
The technical scheme adopted by the invention for solving the technical problems is as follows: the vacuum coating production line comprises at least one workpiece trolley for fixing a workpiece, at least one vacuum chamber, a first conveying mechanism, a second conveying mechanism and a rotary chamber, wherein the vacuum chamber is provided with a workpiece inlet cavity and a workpiece outlet cavity in parallel, the first conveying mechanism and the second conveying mechanism are respectively arranged in the workpiece inlet cavity and the workpiece outlet cavity and are used for conveying the workpiece trolley flowing out of the workpiece inlet cavity into the workpiece outlet cavity, and the vacuum chamber is connected with the rotary chamber.
Further preferred embodiments of the present invention are: the vacuum coating production line also comprises a rotary assembly used for conveying the workpiece trolley flowing out of the sheet outlet cavity into the sheet inlet cavity, and the rotary assembly and the rotary chamber are respectively arranged at two ends of the vacuum chamber.
Further preferred embodiments of the present invention are: the vacuum coating production line also comprises a loading and unloading rack for loading and unloading workpieces, and the loading and unloading rack is arranged between the rotary assembly and the vacuum chamber.
Further preferred embodiments of the present invention are: the rotary chamber comprises a rotary chamber body communicated with the vacuum chamber, a first rotary mechanism arranged on the rotary chamber body and used for rotating the workpiece trolley by 180 degrees, and a third conveying mechanism arranged on the first rotary mechanism and used for conveying the workpiece trolley, wherein a material inlet and a material outlet are formed in the position, matched with the vacuum chamber, of the rotary chamber body.
Further preferred embodiments of the present invention are: the first slewing mechanism comprises a first slewing support used for placing the workpiece trolley and the third conveying mechanism, a first slewing bearing which is connected with the first slewing support and a slewing bin body and provided with a toothed outer ring, a first transmission gear meshed with the toothed outer ring, and a first driving device used for driving the first transmission gear to rotate.
Further preferred embodiments of the present invention are: the rotary chamber further comprises a height adjusting mechanism for adjusting the height of the first rotary mechanism, and the height adjusting mechanism is arranged between the first rotary mechanism and the rotary chamber body.
Further preferred embodiments of the present invention are: the rotary chamber further comprises a rotary center adjusting mechanism for adjusting the rotary center of the first rotary mechanism, and the rotary center adjusting mechanism penetrates through the height adjusting mechanism to be connected with the rotary chamber body.
Further preferred embodiments of the present invention are: the rotary assembly comprises a rotary mechanism underframe arranged on one side of the vacuum chamber, a second rotary mechanism arranged on the rotary mechanism underframe and used for rotating the workpiece trolley by 180 degrees, and a fourth conveying mechanism arranged on the second rotary mechanism and used for conveying the workpiece trolley.
Further preferred embodiments of the present invention are: the third conveying mechanism comprises a guide mechanism, a plurality of friction wheels rotatably arranged on the first rotary support, a second driving device for driving the friction wheels to rotate, and a transmission assembly for connecting the friction wheels with the second driving device, wherein one end of the workpiece trolley is slidably arranged on the guide mechanism in a penetrating mode, and the other end of the workpiece trolley is abutted against the friction wheels.
Further preferred embodiments of the present invention are: the third conveying mechanism further comprises a shaft sleeve which is rotatably arranged on the lower portion of the rotary bin body in a penetrating mode, and the second driving device is connected with the first rotary support through the shaft sleeve and coaxially rotates with the first rotary support.
The invention has the beneficial effects that: the two working procedures can be finished in one vacuum chamber by arranging the wafer inlet cavity and the wafer outlet cavity in parallel in one vacuum chamber and arranging the first conveying mechanism and the second conveying mechanism in the wafer inlet cavity and the wafer outlet cavity respectively, so that the use number of the vacuum chambers is effectively reduced; the workpiece trolley flowing out of the production line can be turned and conveyed back to the production line by arranging the rotary chamber connected with the vacuum chamber, so that the floor area of the trolley returning device is effectively reduced; the invention has the advantages of simple structure, small occupied area, low investment cost, high working efficiency and the like.
Drawings
The invention will be further described with reference to the accompanying drawings and examples, in which:
FIG. 1 is a schematic view showing the structure of a vacuum coating line according to the present invention;
FIG. 2 is an enlarged view of a portion of the vacuum coating line of the present invention;
FIG. 3 is a schematic view of the internal structure of the turn-around chamber of the present invention;
FIG. 4 is a cross-sectional view of a turn-around chamber of the present invention;
FIG. 5 is a cross-sectional view of the turn-around chamber of the present invention taken in another direction;
FIG. 6 is an enlarged partial cross-sectional view of the turn chamber of the present invention;
FIG. 7 is a partially enlarged schematic view of the internal structure of the turn chamber of the present invention;
figure 8 is a cross-sectional view of the swivel assembly of the present invention.
Detailed Description
The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings.
As shown in fig. 1 and 2, the vacuum coating production line of the present embodiment includes at least one workpiece trolley 1 for fixing a workpiece, at least one vacuum chamber 2 having a sheet feeding cavity 21 and a sheet discharging cavity 22 arranged in parallel, a first conveying mechanism and a second conveying mechanism respectively arranged in the sheet feeding cavity 21 and the sheet discharging cavity 22 and used for conveying the workpiece trolley 1, and a rotation chamber 4 for conveying the workpiece trolley 1 flowing out from the sheet feeding cavity 21 into the sheet discharging cavity 22, wherein the vacuum chamber 2 is connected to the rotation chamber 4. By arranging the sheet inlet cavity 21 and the sheet outlet cavity 22 in parallel in one vacuum chamber 2 and arranging the first conveying mechanism and the second conveying mechanism in the sheet inlet cavity 21 and the sheet outlet cavity 22 respectively, two processes can be finished in one vacuum chamber 2, and the using number of the vacuum chambers 2 is effectively reduced; then, by arranging a rotary chamber 4 connected with the vacuum chamber 2, the workpiece trolley 1 flowing out of the production line can be turned and conveyed back to the production line, and the floor area of the trolley returning device is effectively reduced; the invention has the advantages of simple structure, small occupied area, low investment cost, high working efficiency and the like.
Further, as shown in fig. 1 and 2, the vacuum coating production line further includes a rotating assembly 5 for transferring the workpiece trolley 1 flowing out of the sheet outlet cavity 22 into the sheet inlet cavity 21, wherein the rotating assembly 5 and the rotating chamber 4 are respectively arranged at two ends of the vacuum chamber 2. The workpiece trolley 1 which flows out from the film outlet cavity 22 is conveyed into the film inlet cavity 21 by adding the rotary component 5, so that the convenience of a vacuum coating production line can be further improved, the full-automatic production of the vacuum coating production line can be realized by matching the rotary component 5 with the rotary chamber 4, the workpiece trolley 1 does not need to be carried manually, and the occupied area is smaller.
Further, as shown in fig. 1 and 2, the vacuum coating production line further includes a loading and unloading rack 3 for loading and unloading workpieces, and the loading and unloading rack 3 is disposed between the rotary assembly 5 and the vacuum chamber 2. The loading and unloading rack 3 comprises a loading and unloading rack main body, and a fifth conveying mechanism and a sixth conveying mechanism which are arranged on the loading and unloading rack main body and correspond to the positions of the sheet inlet cavity 21 and the sheet outlet cavity 22 of the vacuum chamber 2. In this embodiment, the loading and unloading rack 3 is composed of a loading and unloading rack main body, a fifth transport mechanism and a sixth transport mechanism, the fifth transport mechanism and the sixth transport mechanism can be used for transporting the workpiece trolley 1, and the workpiece trolley can be loaded and unloaded when staying in the loading and unloading rack main body, so that the use convenience of the vacuum coating production line is improved.
Further, as shown in fig. 1, fig. 2, fig. 3, and fig. 4, the revolving chamber 4 includes a revolving bin 41 communicated with the vacuum chamber 2, a first revolving mechanism 42 disposed on the revolving bin 41 for rotating the workpiece trolley 1 by 180 °, and a third conveying mechanism 43 disposed on the first revolving mechanism 42 for conveying the workpiece trolley 1, wherein a material inlet/outlet 411 is disposed at a position on the revolving bin 41, which is matched with the vacuum chamber 2. The workpiece trolley 1 can be conveyed into and out of the rotary chamber 4 by the third conveying mechanism 43, and the workpiece trolley 1 can be reversed by the first rotary mechanism 42; and then the rotary bin body 41 is communicated with the vacuum chamber 2, so that the workpiece trolley 1 can be reversed under the condition that the pressure intensity of the rotary bin body 41 is kept the same as that of the vacuum chamber 2, the atmospheric pressure does not need to be restored, the reversing time of the workpiece trolley 1 is effectively shortened, and the working efficiency of a vacuum coating production line is improved. The rotary chamber 4 further comprises an air suction hole 412 arranged on the rotary bin body 41, and the air suction hole 412 can be used for being connected with an air extractor set to adjust the air pressure of the rotary chamber 4, so that the air pressure of the rotary chamber 4 is consistent with the air pressure of a connected vacuum chamber, and the working efficiency of a coating production line is improved.
Further, as shown in fig. 3, 4 and 6, the first rotating mechanism 42 includes a first rotating support 421 for placing the workpiece trolley 1 and the third conveying mechanism 43, a first rotating support 422 connecting the first rotating support 421 and the rotating cabin 41 and provided with a toothed outer ring 4221, a first transmission gear 423 engaged with the toothed outer ring 4221, and a first driving device 424 for driving the first transmission gear 423 to rotate. The first slewing bearing 422 further comprises an inner ring 4222, the inner ring 4222 is arranged on the slewing bin body 41, and the first slewing bracket 421 is arranged on the toothed outer ring 4221. The first driving device 424 drives the first transmission gear 423 to rotate, so that the first rotary support 421 can be driven to rotate, and the reversing function of the workpiece trolley 1 is completed. In the present embodiment, the first driving device 424 is a driving motor, but may be a rotary cylinder or the like.
Further, as shown in fig. 3, 4, 6 and 7, the revolving chamber 4 further includes an elevation mechanism 44 for adjusting the height of the first revolving mechanism 42, and the elevation mechanism 44 is disposed between the first revolving mechanism 42 and the revolving bin 41. By adding a height adjusting mechanism 44 for adjusting the height of the first rotating mechanism 42 to be suitable for the height of the production line, the requirement of the processing precision of the rotating chamber 4 can be effectively reduced, and the production cost can be effectively reduced. Further, the height adjusting mechanism 44 includes a height adjusting plate 441, a first adjusting bolt 442 for adjusting the height of the height adjusting plate 441, and a first adjusting nut 443, wherein one end of the first adjusting bolt 442 is connected to the rotary cabin 41, and the other end passes through the height adjusting plate 441, two first adjusting nuts 443 are provided, and are respectively disposed at the upper portion and the lower portion of the height adjusting plate 441, and the rotary support 422 is disposed on the height adjusting plate 441. The height of the elevation plate 441 can be adjusted by rotating the first adjustment nut 443 on the lower portion of the elevation plate 411, and the height of the first rotation mechanism 42 is adjusted by fixing the elevation plate 411 to the first adjustment nut 443 on the upper portion. In this embodiment, four sets of the first adjusting bolts 442 and the first adjusting nuts 443 are provided, and the stability of the height adjusting mechanism 44 can be effectively improved by adjusting the heights of the four sets of the first adjusting bolts 442 and the first adjusting nuts 443 at the same time.
Further, as shown in fig. 1, fig. 3, fig. 4, and fig. 7, the revolving chamber 4 further includes a revolving center adjusting mechanism 45 for adjusting a revolving center of the first revolving mechanism 42, and the revolving center adjusting mechanism 45 is connected to the revolving bin 41 through the height adjusting mechanism 44. By adding the rotation center adjusting mechanism 45, the rotation center of the first rotating mechanism 42 can be adjusted, the processing precision requirement of the rotating chamber 4 can be effectively reduced, and the production cost can be effectively reduced.
Further, as shown in fig. 3, 5, 6 and 7, the rotation center adjusting mechanism 45 includes a plurality of second adjusting bolts 451 disposed on both sides of the height-adjusting plate 441 and second adjusting nuts 452 rotatably disposed on the second adjusting bolts 451, the second adjusting bolts 451 pass through the height-adjusting plate 441 and are connected to the rotary cartridge 41, and the second adjusting nuts 452 are disposed on one side of the second adjusting bolts 451 away from the rotary cartridge 41 and abut against the height-adjusting plate 441. The position of the elevation plate 441 can be adjusted by rotating the second adjustment nut 452. The height-adjusting plate 441 is provided with a waist-shaped hole 4411 matched with the first adjusting bolt 442, and the long axis direction of the waist-shaped hole 4411 is the same as the adjusting direction of the second adjusting bolt 451. In this embodiment, the height-adjusting plate 441 is connected to the rotary bin 41 via a first adjusting bolt 442. When the rotation center of the rotation bracket 421 is adjusted, the waist-shaped hole 4411 of the first adjustment bolt 442 is added to accommodate the position change of the elevation plate 441, so that the first adjustment bolt 442 is prevented from being bent and deformed due to the position change of the elevation plate 441. It should be noted that the rotation center of the first rotation mechanism 42 is mainly adjusted based on the advancing direction of the production line workpiece trolley 1, and the rotation center of the first rotation mechanism 42 can be adjusted to be adapted to the production line by setting the adjusting direction of the second adjusting bolt 451 to be perpendicular to the direction in which the workpiece trolley 1 enters or exits the rotation chamber 4, so that accidents caused by the fact that the position of the first rotation mechanism 42 is not in normal collision with the workpiece trolley 1 can be effectively prevented.
Further, as shown in fig. 1 and 8, the swing assembly 5 includes a swing mechanism chassis 51 disposed at one side of the vacuum chamber 2, a second swing mechanism 52 disposed on the swing mechanism chassis 51 for rotating the workpiece carriage 1 by 180 °, and a fourth transfer mechanism 53 disposed on the second swing mechanism 52 for transporting the workpiece carriage 1. The workpiece trolley 1 can be sent into and out of the rotating assembly 5 through the fourth conveying mechanism 53; the workpiece pallet 1 can be reversed by means of the second slewing gear 52. In this embodiment, the second rotating mechanism 52 is similar to the first rotating mechanism in structure, and drives the rotating support to drive the rotating support to rotate through the driving device, so as to achieve the function of steering the workpiece trolley 1.
Further, as shown in fig. 4, 5, and 8, the third conveying mechanism 43 includes a guiding mechanism 431, a plurality of friction wheels 432 rotatably disposed on one side of the first rotating bracket 421, a second driving device 433 for driving the friction wheels 432 to rotate, and a transmission assembly 434 connecting the friction wheels 432 and the second driving device 433, wherein one sliding end of the workpiece trolley 1 is inserted into the guiding mechanism 431, and the other sliding end of the workpiece trolley 1 abuts against the friction wheels 432. The friction wheel 432 is driven to rotate by the second driving device 433, so that the workpiece trolley 1 on the friction wheel 432 moves forwards or backwards, the guide mechanism 431 can be used for guiding the advancing direction of the workpiece trolley 1, and the running stability of the third conveying mechanism 43 is ensured. In this embodiment, the third transfer mechanism is not limited to use the second driving device 433 to drive the friction wheel 432 to complete the function of transferring the workpiece trolley 1, and may also transfer the workpiece trolley 1 by means of a gear, a rack, or the like.
Further, the transmission assembly 434 comprises a transmission shaft and a transmission gear, and the power of the second driving device 433 can be transmitted through the cooperation between the transmission shaft and the transmission gear, so as to complete the function of transmitting the workpiece trolley 1; wherein the gear may be a bevel gear or a helical gear. In this embodiment, the transmission assembly 434 also drives the friction wheel 432 to rotate by using a transmission manner such as chain transmission, belt transmission, etc., so as to complete the forward or backward movement of the workpiece trolley 1.
Further, as shown in fig. 5, the guide mechanism 431 is a magnetic guide mechanism, and the guide mechanism 431 includes a magnetic rail and a plurality of permanent magnets disposed above the workpiece cart 1 for cooperating with the magnetic rail. The permanent magnets and the magnetic guide rails have the same polarity and are mutually repelled, and the friction force between the workpiece trolley 1 and the guide rails can be effectively reduced through the matching of the permanent magnets and the magnetic guide rails, so that the transportation effect of the third conveying mechanism 43 is improved.
Further, as shown in fig. 4 and 8, the third transfer mechanism 43 and the fourth transfer mechanism 53 have similar structures, and both complete the transportation function of the workpiece trolley 1 by driving the friction wheel 432 to rotate by the driving device 2. In this embodiment, the first conveying mechanism, the second conveying mechanism, the fifth conveying mechanism and the sixth conveying mechanism are similar in structure, and the synchronous belt drives the pulley to drive the workpiece trolley 1 to move, so that the function of conveying the workpiece trolley 1 is realized.
Furthermore, as shown in fig. 3 and 5, the third conveying mechanism 43 further includes a shaft sleeve 435 rotatably disposed at the lower portion of the rotary bin body 41, and the second driving device 433 is connected to the first rotary bracket 421 through the shaft sleeve 435 and rotates coaxially with the first rotary bracket 421. The transmission assembly 434 connects the friction wheel 432 and the second driving device 433 through a shaft sleeve 435. By adding a shaft sleeve 435 to connect the second driving device 433 and the first rotating bracket 421, when the first rotating bracket 421 rotates, the second driving device 433 and the transmission assembly 434 rotate simultaneously, so as to simplify the structure of the third conveying mechanism 43 and improve the stability of the third conveying mechanism 43.
Further, as shown in fig. 1 and 2, the vacuum coating production line includes six vacuum chambers disposed in series, and the vacuum chambers are divided into a sheet inlet chamber, a sheet outlet chamber, a fine pumping chamber, a front transition chamber, a coating chamber a, a coating chamber B, and a rear transition chamber according to different processes, wherein the sheet inlet chamber and the sheet outlet chamber are connected to a loading and unloading frame 3, and the rotation chamber is connected to the rear transition chamber. The chip inlet cavity and the chip outlet cavity of the chip inlet and outlet chamber are respectively communicated with a first air extractor set and a second air extractor set; the chip inlet cavity and the chip outlet cavity of the fine pumping chamber are respectively communicated with a third air pumping unit and a fourth air pumping unit; the film inlet cavities of the front transition chamber, the film coating chamber A, the film coating chamber B and the rear transition chamber are connected with a fifth air pumping unit; and the film outlet cavities of the front transition chamber, the film coating chamber A, the film coating chamber B and the rear transition chamber and the rotation chamber are connected with a sixth air pumping unit. A first vacuum lock and a second vacuum lock are arranged between the sheet inlet and outlet chamber and the loading and unloading frame 3; and a third vacuum lock and a fourth vacuum lock are arranged between the sheet inlet and outlet chamber and the fine pumping chamber, and a fifth vacuum lock and a sixth vacuum lock are arranged between the fine pumping chamber and the front transition chamber.
The working principle of the invention is as follows:
after unloading the workpiece, the workpiece trolley 1 at one side of the sixth conveying mechanism on the loading and unloading rack 3 enters the rotary component 5, after the second rotary mechanism 52 on the rotary component 5 drives the workpiece trolley 1 to rotate 180 degrees, the workpiece trolley 1 conveyed by the fourth conveying mechanism 53 enters one side of the fifth conveying mechanism of the loading and unloading rack, then the workpiece to be coated can be fixed on the workpiece trolley 1, the first vacuum lock is opened, the workpiece trolley 1 moves into the sheet inlet cavity of the sheet inlet and outlet chamber, when the workpiece trolley completely enters, the first vacuum lock is closed, the first air extractor group extracts air from the sheet inlet and outlet chamber, when the air pressure reaches a certain value (usually 3 Pa), the third vacuum lock is opened, the workpiece trolley enters the sheet inlet cavity of the fine pumping chamber, when the workpiece trolley 1 completely enters, the third vacuum lock is closed, when the air pressure of the sheet inlet chamber of the fine pumping chamber reaches a certain value (usually 0.08 Pa, the third air extractor group continuously extracts air from the sheet inlet chamber of the fine pumping chamber during automatic control), opening a fifth vacuum lock; the workpiece trolley 1 enters a front transition chamber sheet inlet cavity, then enters a sheet inlet cavity of a film coating chamber for film coating, then enters a rotary chamber through a rear transition chamber sheet inlet cavity, after the workpiece trolley completely enters the rotary chamber, a first rotary mechanism 42 of the rotary chamber 4 rotates 180 degrees, the workpiece trolley 1 enters a rear transition chamber sheet outlet cavity from the rotary chamber 4, then enters a film coating chamber sheet outlet cavity for film coating again, continues to enter the front transition chamber sheet outlet cavity, opens a sixth vacuum lock when reaching a specified position, the workpiece trolley enters a fine pumping chamber sheet outlet cavity, closes the sixth vacuum lock after the workpiece trolley completely enters, opens the fourth vacuum lock, the workpiece trolley enters the sheet inlet chamber sheet outlet cavity of the sheet outlet chamber, closes the fourth vacuum lock after the workpiece trolley completely enters (the fine pumping chamber sheet outlet cavity is continuously pumped by a fourth air pumping unit during automatic control), deflates the sheet outlet cavity of the sheet inlet chamber (discharges vacuum), opens the second vacuum lock after the workpiece trolley completely enters the sheet outlet chamber, the workpiece trolley moves into the sheet outlet side of the loading and unloading frame, the second vacuum lock is closed (the second air pump group pumps air into the sheet outlet chamber of the inlet and outlet chamber after the second vacuum lock is closed), and the workpiece can be taken down from the workpiece trolley 1; after the workpiece is taken out, the workpiece trolley 1 goes into the rotating assembly 5 to start the next working cycle. A plurality of workpiece trolleys 1 are arranged on the production line at the same time, and the work on each station can be carried out at the same time, so that the aim of continuous production is fulfilled.
It should be understood that the above embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same, and those skilled in the art can modify the technical solutions described in the above embodiments, or make equivalent substitutions for some technical features; and all such modifications and alterations are intended to fall within the scope of the appended claims.
Claims (10)
1. A vacuum coating production line is characterized by comprising at least one workpiece trolley for fixing a workpiece, at least one vacuum chamber, a first conveying mechanism, a second conveying mechanism and a rotary chamber, wherein the vacuum chamber is provided with a workpiece inlet cavity and a workpiece outlet cavity in parallel, the first conveying mechanism and the second conveying mechanism are respectively arranged in the workpiece inlet cavity and the workpiece outlet cavity and used for conveying the workpiece trolley flowing out of the workpiece inlet cavity into the workpiece outlet cavity, and the vacuum chamber is connected with the rotary chamber.
2. The vacuum coating production line of claim 1, further comprising a rotary assembly for conveying the workpiece trolley flowing out of the sheet outlet cavity into the sheet inlet cavity, wherein the rotary assembly and the rotary chamber are respectively arranged at two ends of the vacuum chamber.
3. The vacuum coating production line of claim 2, further comprising a loading and unloading rack for loading and unloading the workpiece, wherein the loading and unloading rack is disposed between the rotary assembly and the vacuum chamber.
4. The vacuum coating production line of claim 1, wherein the rotary chamber comprises a rotary bin body communicated with the vacuum chamber, a first rotary mechanism arranged on the rotary bin body and used for rotating the workpiece trolley by 180 degrees, and a third conveying mechanism arranged on the first rotary mechanism and used for conveying the workpiece trolley, wherein a material inlet and a material outlet are formed in the position, matched with the vacuum chamber, of the rotary bin body.
5. The vacuum coating production line of claim 4, wherein the first rotating mechanism comprises a first rotating support for placing the workpiece trolley and the third conveying mechanism, a first rotating support connected with the first rotating support and the rotating bin body and provided with a toothed outer ring, a first transmission gear meshed with the toothed outer ring, and a first driving device for driving the first transmission gear to rotate.
6. The vacuum coating production line of claim 4, wherein the rotary chamber further comprises a height adjusting mechanism for adjusting the height of the first rotary mechanism, and the height adjusting mechanism is arranged between the first rotary mechanism and the rotary chamber body.
7. The vacuum coating production line of claim 6, wherein the rotation chamber further comprises a rotation center adjusting mechanism for adjusting the rotation center of the first rotation mechanism, and the rotation center adjusting mechanism passes through the height adjusting mechanism and is connected with the rotation bin body.
8. The vacuum coating production line of claim 2, wherein the rotating assembly comprises a turntable chassis disposed at one side of the vacuum chamber, a second turntable disposed on the turntable chassis for rotating the workpiece cart by 180 °, and a fourth transfer mechanism disposed on the second turntable for transporting the workpiece cart.
9. The vacuum coating production line of claim 5, wherein the third conveying mechanism comprises a guiding mechanism, a plurality of friction wheels rotatably disposed on the first rotary support, a second driving device for driving the friction wheels to rotate, and a transmission assembly for connecting the friction wheels and the second driving device, one end of the workpiece trolley is slidably disposed on the guiding mechanism, and the other end of the workpiece trolley is abutted against the friction wheels.
10. The vacuum coating production line of claim 9, wherein the third conveying mechanism further comprises a shaft sleeve rotatably disposed at a lower portion of the rotary bin body, and the second driving device is connected to the first rotary bracket through the shaft sleeve and rotates coaxially with the first rotary bracket.
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| CN201811309459.4A CN111139446A (en) | 2018-11-05 | 2018-11-05 | Vacuum coating production line |
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| CN201811309459.4A CN111139446A (en) | 2018-11-05 | 2018-11-05 | Vacuum coating production line |
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