CN110823084A - Strain gauge and strain sensor based on carbon nano composite material - Google Patents
Strain gauge and strain sensor based on carbon nano composite material Download PDFInfo
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- CN110823084A CN110823084A CN201911045738.9A CN201911045738A CN110823084A CN 110823084 A CN110823084 A CN 110823084A CN 201911045738 A CN201911045738 A CN 201911045738A CN 110823084 A CN110823084 A CN 110823084A
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- carbon nano
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 112
- 229910052799 carbon Inorganic materials 0.000 title claims abstract description 66
- 239000002114 nanocomposite Substances 0.000 title claims abstract description 22
- 239000000463 material Substances 0.000 title claims abstract description 16
- 239000002041 carbon nanotube Substances 0.000 claims abstract description 38
- 229910021393 carbon nanotube Inorganic materials 0.000 claims abstract description 38
- 239000000758 substrate Substances 0.000 claims abstract description 25
- 239000012212 insulator Substances 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 10
- 238000005229 chemical vapour deposition Methods 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 3
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims description 3
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims description 3
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims description 3
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 3
- 239000000741 silica gel Substances 0.000 claims description 3
- 229910002027 silica gel Inorganic materials 0.000 claims description 3
- 238000005452 bending Methods 0.000 abstract description 9
- 230000008859 change Effects 0.000 description 6
- 238000012544 monitoring process Methods 0.000 description 4
- 229910021389 graphene Inorganic materials 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
- G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The invention discloses a strain gauge and a strain sensor based on a carbon nano composite material, wherein the strain gauge comprises a rectangular substrate, a hairy carbon nano wall arranged on the upper surface of the substrate, a plurality of carbon nano tubes arranged on the carbon nano wall and electrodes connected to two ends of the carbon nano wall, the substrate is a flexible insulator, the upper surface of the substrate and the carbon nano wall are in a harmonic shape, the carbon nano tubes are vertically arranged on the carbon nano wall, the length of the carbon nano tubes is about 1-10 mu m, and the distribution density of the plurality of carbon nano tubes is 1000-. According to the invention, the carbon nano wall in the harmonic wave shape is arranged on the flexible substrate, and the carbon nano wall is provided with the plurality of carbon nano tubes, so that the lapping position and the lapping density of the carbon nano tubes can be changed when the bending deformation is generated, the conductive effective length is changed, namely the resistance value is changed, and the bending deformation of the object to be detected is accurately monitored.
Description
Technical Field
The invention relates to the technical field of sensing, in particular to a strain gauge and a strain sensor.
Background
The strain sensor is a sensor based on measuring the strain generated by the forced deformation of an object, and the most common sensing element is a strain gauge, which is a sensing element capable of converting the change of strain on a mechanical member into the change of resistance.
Most of the existing strain gauges adopt a resistance element with a sensitive grid structure to sense deformation, the material of the strain gauges is generally metal or semiconductor, and the sensitivity and the monitoring precision of the strain gauges are not ideal enough.
The research on the carbon nanomaterial technology is a very active topic in recent years, wherein the two-dimensional carbon nanomaterial-graphene has excellent characteristics in optics, electricity and mechanics, so that the application prospect of being capable of being called as a 'reform' is provided for the aspects of materials science, biomedicine and the like, and the performance of a strain sensor can be greatly improved by applying the graphene material to the design of a strain gauge based on the flexibility of the graphene material.
Disclosure of Invention
The invention aims to solve the technical problem of providing a strain gage based on a carbon nano composite material, which has the advantages of ingenious structure, sensitive resistance value change along with deformation and high measurement precision on bending deformation. The invention also provides a strain sensor comprising the carbon nanocomposite-based strain gauge.
In order to solve the technical problems, the invention provides the following technical scheme:
a strain gauge based on a carbon nano composite material comprises a rectangular substrate, a hairy carbon nano wall arranged on the upper surface of the substrate, a plurality of carbon nano tubes arranged on the carbon nano wall and electrodes connected to two ends of the carbon nano wall, wherein the substrate is a flexible insulator, the upper surface of the substrate and the carbon nano wall are in a harmonic shape, the carbon nano tubes are vertically arranged on the carbon nano wall, the length of each carbon nano tube is about 1-10 mu m, and the distribution density of the plurality of carbon nano tubes is 1000-.
According to the strain gauge based on the carbon nano composite material, the harmonic-wave-shaped carbon nano wall is arranged on the flexible substrate, and the carbon nano walls are provided with the plurality of carbon nano tubes, so that the lapping positions and the lapping density of the carbon nano tubes can be changed when the bending deformation is generated, the effective length of the electric conduction is changed, namely the change of the resistance value is generated, and the bending deformation of a measured object is accurately monitored. The length and distribution density of the carbon nano tube are designed, so that the conductive effect can be ensured, and the carbon nano tube is easy to process and prepare.
Preferably, the substrate is made of PDMS silica gel, which is beneficial to the setting of the carbon nano wall and the monitoring of bending deformation.
Preferably, the carbon nanowall is prepared by a chemical vapor deposition method, and is preferably bonded to a substrate.
Preferably, the thickness of the carbon nanowall is 0.5 to 2 μm, which can ensure the monitoring effect.
Preferably, the vertical distance from the wave crest to the wave trough of the carbon nanowall is 15-20 μm, and the length of one harmonic period is 20-40 μm, so that the fine deformation is monitored with high sensitivity.
Preferably, the carbon nanotubes are prepared by a chemical vapor deposition method and are well combined with the carbon nanowalls.
Preferably, the plurality of carbon nanotubes are uniformly distributed on the carbon nanotube wall, so that the monitoring accuracy can be improved.
Preferably, the electrode is a thin sheet metal.
A strain sensor comprises the strain gauge based on the carbon nano composite material.
Compared with the prior art, the strain gauge and the strain sensor based on the carbon nano composite material have the beneficial effects that: the carbon nano wall with the harmonic waves is arranged on the flexible substrate, and the carbon nano wall is provided with the carbon nano tubes, so that the lapping positions and the lapping density of the carbon nano tubes can be changed when the bending deformation is generated, the conductive effective length is changed, namely the resistance value is changed, and the bending deformation of a measured object is accurately monitored. The invention has the advantages of ingenious structural design, sensitive resistance value change along with deformation, high measurement precision on bending deformation and obvious improvement significance.
Description of the drawings:
FIG. 1 is a schematic structural diagram of the present invention.
FIG. 2 is a schematic view of a substrate structure according to the present invention.
Fig. 3 is a schematic view of the structure of the present invention when bent upward.
Fig. 4 is a schematic view of the structure of the present invention when bent downward.
Wherein, the labels in the figure are: 1 is a substrate, 2 is a carbon nano wall, 3 is a carbon nano tube, and 4 is an electrode.
Detailed Description
The present invention will be described in further detail with reference to test examples and specific embodiments. It should be understood that the scope of the above-described subject matter is not limited to the following examples, and any techniques implemented based on the disclosure of the present invention are within the scope of the present invention.
All of the features disclosed in this specification, or all of the steps in any method or process so disclosed, may be combined in any combination, except combinations of features and/or steps that are mutually exclusive.
Any feature disclosed in this specification may be replaced by alternative features serving equivalent or similar purposes, unless expressly stated otherwise. That is, unless expressly stated otherwise, each feature is only an example of a generic series of equivalent or similar features.
As shown in fig. 1-4, the strain gage based on carbon nano composite material of the present invention comprises a rectangular substrate 1, an hairy carbon nano wall 2 disposed on the upper surface of the substrate 1, a plurality of carbon nanotubes 3 disposed on the carbon nano wall 2, and electrodes 4 connected to two ends of the carbon nano wall 2, wherein the substrate 1 is a flexible insulator, the upper surface of the substrate 1 and the carbon nano wall 2 are harmonic, the carbon nanotubes 3 are vertically disposed on the carbon nano wall 2, the length of the carbon nanotubes 3 is about 1-10 μm, and the distribution density of the plurality of carbon nanotubes 3 is 1000-.
As shown in fig. 1 to 4, in the strain gage based on the carbon nano composite material of the present invention, the substrate 1 is made of PDMS silica gel, the carbon nano wall 2 is made by a chemical vapor deposition method, the thickness of the carbon nano wall 2 is 0.5 to 2 μm, the vertical distance from the peak to the trough of the carbon nano wall 2 is 15 to 20 μm, the length of one harmonic period is 20 to 40 μm, the carbon nano tubes 3 are made by the chemical vapor deposition method, the carbon nano tubes 3 are uniformly distributed on the carbon nano wall 2, and the electrode 4 is made of a sheet metal.
As shown in fig. 1-4, in a normal state (i.e., without any deformation), the carbon nanotubes 3 on both sides of the carbon nanowall 2 have sparse and dispersed contact points with each other, and the resistance of the strain gauge is a fixed value Rx. When the foil gage receives the exogenic action, produces upwards or when downward deformation, certain change can take place for the resistance value, specifically is: when the strain gauge deforms upwards, the carbon nanotubes 3 at the wave trough of the carbon nanotube wall 2 are in mutual 'dense contact', more connecting channels are generated compared with the normal state, the effective conducting length of the connecting channels begins to be reduced, the resistance value Rx at the moment is reduced according to the resistance law; on the contrary, when the strain gauge is deformed upward, the contact portion between the carbon nanotubes 3 starts to decrease at the valley of the carbon nanotube wall 2 and becomes more sparse than the normal state, so the effective conductive length starts to increase, which can be obtained according to the law of resistance, and the resistance value Rx becomes larger.
As shown in fig. 1 to 4, the strain sensor of the present invention includes the above-mentioned strain gauge based on carbon nanocomposite, and further includes a lead, a case, and other components.
Claims (10)
1. A strain gage based on carbon nano composite material is characterized in that: the carbon nano-tube array comprises a rectangular substrate (1), an fuzz-shaped carbon nano-wall (2) arranged on the upper surface of the substrate (1), a plurality of carbon nano-tubes (3) arranged on the carbon nano-wall (2) and electrodes (4) connected to two ends of the carbon nano-wall (2), wherein the substrate (1) is a flexible insulator, the upper surface of the substrate (1) and the carbon nano-wall (2) are in a harmonic shape, the carbon nano-tubes (3) are vertically arranged on the carbon nano-wall (2), the length of the carbon nano-tubes (3) is about 1-10 mu m, and the distribution density of the carbon nano-tubes (3) is 1000-inch per square micron and 5000-inch.
2. The carbon nanocomposite-based strain gage as defined in claim 1 wherein: the substrate (1) is made of PDMS silica gel.
3. The carbon nanocomposite-based strain gage as defined in claim 1 wherein: the carbon nanowall (2) is prepared by a chemical vapor deposition method.
4. The carbon nanocomposite-based strain gage as defined in claim 1 wherein: the thickness of the carbon nanowall (2) is 0.5 to 2 μm.
5. The carbon nanocomposite-based strain gauge according to claim 2, characterized in that: the thickness of the carbon nanowall (2) is 0.5 to 2 μm.
6. The carbon nanocomposite-based strain gage as defined in claim 1, 3, 4 or 5, wherein: the vertical distance from the wave crest to the wave trough of the carbon nanowall (2) is 15-20 μm, and the length of one harmonic period is 20-40 μm.
7. The carbon nanocomposite-based strain gage as defined in claim 1 wherein: the carbon nanotubes (3) are prepared by a chemical vapor deposition method.
8. The carbon nanocomposite-based strain gauge according to claim 1 or 7, characterized in that: the carbon nano tubes (3) are uniformly distributed on the carbon nano wall (2).
9. The carbon nanocomposite-based strain gage as defined in claim 1 wherein: the electrode (4) is made of thin sheet metal.
10. A strain sensor, characterized by: a strain gage comprising the carbon nanocomposite-based material of any one of claims 1-8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911045738.9A CN110823084A (en) | 2019-10-30 | 2019-10-30 | Strain gauge and strain sensor based on carbon nano composite material |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911045738.9A CN110823084A (en) | 2019-10-30 | 2019-10-30 | Strain gauge and strain sensor based on carbon nano composite material |
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| CN110823084A true CN110823084A (en) | 2020-02-21 |
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| CN201911045738.9A Pending CN110823084A (en) | 2019-10-30 | 2019-10-30 | Strain gauge and strain sensor based on carbon nano composite material |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111272063A (en) * | 2020-03-09 | 2020-06-12 | 江苏柔世电子科技有限公司 | Resistance type curvature sensor |
| CN118544387A (en) * | 2024-07-24 | 2024-08-27 | 清华大学深圳国际研究生院 | A self-sensing flexible robotic arm joint and three-dimensional reconstruction method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101276012A (en) * | 2007-03-30 | 2008-10-01 | 清华大学 | Polarizing element and its preparation method |
| CN101734646A (en) * | 2008-11-14 | 2010-06-16 | 清华大学 | Carbon nano-tube film |
| CN104538088A (en) * | 2014-12-30 | 2015-04-22 | 江南石墨烯研究院 | Constructing and preparation scheme of conductive elastic composite material |
| CN105806209A (en) * | 2016-05-12 | 2016-07-27 | 北京科技大学 | Cuttable and wearable stress sensor and preparation method thereof |
| CN106767374A (en) * | 2016-11-17 | 2017-05-31 | 南京工业大学 | Preparation method of graphene/carbon nanotube network flexible multifunctional strain sensor |
| CN107726971A (en) * | 2016-08-11 | 2018-02-23 | 清华大学 | Strain transducer |
| CN109513590A (en) * | 2017-09-20 | 2019-03-26 | 中国科学院苏州纳米技术与纳米仿生研究所 | Super-hydrophobic intelligent strain sensing coating of one kind and the preparation method and application thereof |
-
2019
- 2019-10-30 CN CN201911045738.9A patent/CN110823084A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101276012A (en) * | 2007-03-30 | 2008-10-01 | 清华大学 | Polarizing element and its preparation method |
| CN101734646A (en) * | 2008-11-14 | 2010-06-16 | 清华大学 | Carbon nano-tube film |
| CN104538088A (en) * | 2014-12-30 | 2015-04-22 | 江南石墨烯研究院 | Constructing and preparation scheme of conductive elastic composite material |
| CN105806209A (en) * | 2016-05-12 | 2016-07-27 | 北京科技大学 | Cuttable and wearable stress sensor and preparation method thereof |
| CN107726971A (en) * | 2016-08-11 | 2018-02-23 | 清华大学 | Strain transducer |
| CN106767374A (en) * | 2016-11-17 | 2017-05-31 | 南京工业大学 | Preparation method of graphene/carbon nanotube network flexible multifunctional strain sensor |
| CN109513590A (en) * | 2017-09-20 | 2019-03-26 | 中国科学院苏州纳米技术与纳米仿生研究所 | Super-hydrophobic intelligent strain sensing coating of one kind and the preparation method and application thereof |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111272063A (en) * | 2020-03-09 | 2020-06-12 | 江苏柔世电子科技有限公司 | Resistance type curvature sensor |
| CN118544387A (en) * | 2024-07-24 | 2024-08-27 | 清华大学深圳国际研究生院 | A self-sensing flexible robotic arm joint and three-dimensional reconstruction method |
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Application publication date: 20200221 |
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