CN105806209A - Cuttable and wearable stress sensor and preparation method thereof - Google Patents

Abstract

The invention relates to a cuttable and wearable stress sensor and a preparation method thereof.The sensor comprises a flexible substrate, a flexible stress sensing thin film arranged on the flexible substrate, and wires arranged at the two ends of the flexible stress sensing thin film.The cuttable and wearable stress sensor has the advantages that compared with other sensors, the stress sensor is rapid in mass manufacturing, low in cost, good in product performance, easy and convenient to operate, cuttable and the like, the stress sensor can be worn on skin surface of a body, can be fixed to furniture, building structures and other objects for detecting stress, and has application prospects on the aspects of body motion detection, intelligent medical services and structural safety monitoring.

Description

A shearable wearable strain sensor and its preparation method

technical field

The invention relates to the field of sensors, in particular to a shearable wearable strain sensor and a preparation method thereof.

Background technique

A wearable device is a computing device that can be installed on people, animals and objects, and can perceive, transmit and process information. Sensors are the core components of wearable devices. Sensors have wearable properties and have important potential for adaption in the fields of intelligent transportation, consumer electronics, medical equipment, smart home, industrial control, aviation and military industry. A strain sensor is a sensor that can be used to detect objects that are deformed by external forces or driven by themselves. With the continuous development of science and technology and the continuous improvement of people's material conditions, the demand for electronic devices of wearable sensors is increasing. There are a wide variety of wearable devices currently on the market, from smart glasses to smart watches, from smart clothing to smart shoes, from golf gloves to boxing gloves, but they are all closely related to sensors. For example, in the field of consumer electronics, wearable sensors can be easily worn on people's wrists to monitor body movements; in the field of smart homes, wearable sensors can monitor the deformation of furniture to feedback whether objects are in an ideal state.

Traditional strain sensors are generally fixed on a hard substrate, which cannot meet the requirements of wearable conditions. In order to realize the wearable requirements of strain sensors, such devices need to have characteristics such as flexibility. At present, the flexible characteristics of strain sensors can be realized through the research and preparation of materials and the optimal design of devices. Flexible wearable strain sensors have the ability of convenient, flexible and continuous monitoring of human health status. Compared with silicon-based strain sensors or glass-based sensors, sandpaper provides a new platform for flexible and shearable strain sensors. The rapid development of new sensors has important application prospects in future robots, the extended "sixth sense" of human beings, and health and healthcare monitoring. At the same time, the optimization design of electronic devices needs to be further developed. Preparation process, cost control, shape can be cut and so on.

Contents of the invention

In order to solve the above problems, the present invention proposes a shearable, wearable strain sensor with a simple manufacturing process and a short cycle and a manufacturing method thereof.

To achieve the above object, the present invention adopts the following technical solutions:

A shearable wearable strain sensor comprising: a flexible substrate, a flexible strain sensing film disposed on the flexible substrate, and wires disposed at both ends of the flexible strain sensing film .

Further, the flexible substrate includes sandpaper of 800 mesh, 1000 mesh, 1200 mesh, 1500 mesh, 2000 mesh, 2500 mesh, 3000 mesh, 5000 mesh, 6000 mesh, 8000 mesh, 10000 mesh, 12000 mesh.

Further, the flexible strain-sensing film is a gold nano film with a thickness of 20-60 nanometers.

Further, the wires are fixed on both ends of the flexible strain-sensing film with conductive silver glue.

A shearable wearable strain sensor method, the method specifically includes the following steps:

Step 1: Sputter a layer of flexible strain-sensitive thin film on the surface of flexible substrate sandpaper by DC sputtering or magnetron sputtering. The flexible substrate is 800 mesh, 1000 mesh, 1200 mesh, 1500 mesh, 2000 mesh, Sandpaper of 2500 mesh, 3000 mesh, 5000 mesh, 6000 mesh, 8000 mesh, 10000 mesh, 12000 mesh, etc., the flexible strain sensing film is a gold nano film, and the thickness of the gold nano film is 20 to 60 nanometers;

Step 2: Cut the flexible substrate to a suitable size;

Step 3: lead wires at both ends of the flexible strain-sensing film to form a shearable wearable strain sensor.

The beneficial effect of the present invention is that, compared with other sensors, the wearable strain sensor of the present invention has the characteristics of rapid large-area preparation, low cost, good product performance, easy operation, and can be cut, and it can be worn on the skin surface of the human body , and can be fixed on furniture, building structures and other objects for strain detection, and has application prospects in human motion detection, intelligent medical services, and structural safety monitoring.

Description of drawings

Fig. 1 is the scanning electron microscope picture of the strain-sensitive thin film of the present invention;

Fig. 2 is a schematic diagram of the sensor of the present invention.

detailed description

In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

On the contrary, the invention covers any alternatives, modifications, equivalent methods and schemes within the spirit and scope of the invention as defined by the claims. Further, in order to make the public have a better understanding of the present invention, some specific details are described in detail in the detailed description of the present invention below. The present invention can be fully understood by those skilled in the art without the description of these detailed parts.

As shown in Figure 1-2, a shearable wearable strain sensor, the strain sensor includes: a flexible substrate 1 and a flexible strain sensing film 2 disposed on the flexible substrate 1 and a flexible strain sensing film 2 disposed on the flexible strain sensor Wires 3 at both ends of the sensing film 2 .

The flexible substrate 1 includes: sandpaper of 800 mesh, 1000 mesh, 1200 mesh, 1500 mesh, 2000 mesh, 2500 mesh, 3000 mesh, 5000 mesh, 6000 mesh, 8000 mesh, 10000 mesh, 12000 mesh, etc. The flexible strain sensing film 2 is a gold nano film with a thickness of 20-60 nanometers. The wire 3 is fixed on both ends of the flexible strain-sensing film 2 with conductive silver glue. The flexible substrate 1 and the flexible strain-sensing film 2 can be further cut into wearable strain sensors of different sizes by cutting tools such as scissors and a knife. The surface of the sandpaper is provided with particles so that it has a surface microscopic topography, which provides the sensor with a surface microscopic topography, so that the gold nano film sputtered on the surface of the sandpaper by DC sputtering or magnetron sputtering can produce Microcracks, when the sensor is subjected to external strain, the microcracks will be deformed, the crack spacing between the gold nanofilms will change, and the microcracks will cause the resistance of the entire sensor to change, so as to sense the external strain.

A shearable wearable strain sensor method, the method specifically includes the following steps:

Step 1: Sputter a layer of flexible strain-sensitive thin film on the surface of flexible substrate sandpaper by DC sputtering or magnetron sputtering. The flexible substrate is 800 mesh, 1000 mesh, 1200 mesh, 1500 mesh, 2000 mesh, Sandpaper of 2500 mesh, 3000 mesh, 5000 mesh, 6000 mesh, 8000 mesh, 10000 mesh, 12000 mesh, etc., the flexible strain sensing film is a gold nano film, and the thickness of the gold nano film is 20 to 60 nanometers;

Step 2: Cut the flexible substrate to a suitable size;

Step 3: lead wires at both ends of the flexible strain-sensing film to form a shearable wearable strain sensor.

Below is the embodiment that the present invention is actually applied in life:

Example 1:

Step 1: Sputter a 50-nm-thick gold nanofilm by direct current sputtering on the surface of a rectangular sandpaper with a width of 5.0 cm and a width of 4.0 cm and a mesh number of 10,000. The microscopic appearance of the gold nanofilm formed is shown in the figure 1.

Step 2: Use scissors to cut into a cuttable wearable strain sensor with a length of 5.0 cm and a width of 3.0 cm.

Step 3: Use silver glue to lead wires from both ends of the sandpaper obtained in step 2 along the length direction to obtain a wearable strain sensor that can be cut, and its structure diagram is shown in Figure 2.

The obtained wearable shearable strain sensor with a length of 5.0 cm and a width of 3.0 cm is fixed on the index finger with double-sided tape, and can be used for finger bending detection, which can meet the 0-10 Hz finger bending monitoring.

Example 2:

Step 1: Sputter a 30 nanometer thick gold nano film by direct current sputtering on the surface of a rectangular sandpaper with a width of 3.0 cm and a width of 1.0 cm and a mesh number of 1500.

Step 2: Use scissors to cut into a cuttable wearable strain sensor with a length of 3.0 cm and a width of 0.5 cm.

Step 3: Use silver glue to draw wires from both ends of the sandpaper obtained in step 2 along the length direction to obtain a wearable strain sensor that can be cut.

The obtained cutable wearable strain sensor with a length of 3.0 cm and a width of 0.5 cm is fixed at the crack of the door with double-sided tape, and can be used to detect the opening and closing angle of the door. The detected opening and closing angle is -179 to Between 179 degrees.

Example 3:

Step 1: Sputter a 45 nm thick gold nano film by magnetron sputtering on the surface of a rectangular sandpaper with a width of 2.0 cm and a width of 0.5 cm and a mesh number of 2000.

Step 2: Use scissors to cut into a cuttable wearable strain sensor with a length of 2.0 cm and a width of 0.25 cm.

Step 3: Use silver glue to draw wires from both ends of the sandpaper obtained in step 2 along the length direction to obtain a wearable strain sensor that can be cut.

The obtained cutable wearable strain sensor with a length of 2.0 cm and a width of 0.25 cm is fixed on the arm skin with double-sided adhesive, and can be used to detect arm muscle activity, which can meet the 0-20 Hz muscle movement monitoring.

Claims (5)

1. A shearable wearable strain sensor, characterized in that, the shearable wearable strain sensor comprises: a flexible substrate and a flexible strain sensing film disposed on the flexible substrate and disposed on a flexible Wires at both ends of the strain-sensitive film. 2. The shearable wearable strain sensor according to claim 1, wherein the flexible substrate includes 800 mesh, 1000 mesh, 1200 mesh, 1500 mesh, 2000 mesh, 2500 mesh, 3000 mesh, 5000 mesh mesh, 6000 mesh, 8000 mesh, 10000 mesh, 12000 mesh sandpaper. 3. The shearable wearable strain sensor according to claim 1, wherein the flexible strain sensing film is a gold nano film with a thickness of 20-60 nanometers. 4. The shearable wearable strain sensor according to claim 1, wherein the wires are fixed at both ends of the flexible strain sensing film with conductive silver glue. 5. A shearable wearable strain sensor method, characterized in that the method specifically comprises the following steps: Step 1: Sputter a layer of flexible strain-sensitive thin film on the surface of flexible substrate sandpaper by DC sputtering or magnetron sputtering. The flexible substrate is 800 mesh, 1000 mesh, 1200 mesh, 1500 mesh, 2000 mesh, 2500 meshes, 3000 meshes, 5000 meshes, 6000 meshes, 8000 meshes, 10000 meshes, 12000 meshes and other sandpapers, the flexible strain sensing film is a gold nanofilm, and the thickness of the gold nanofilm is 20-60 nanometers; Step 2: Cut the flexible substrate to a suitable size; Step 3: lead wires at both ends of the flexible strain-sensing film to form a shearable wearable strain sensor.