CN110658160A - 一种基于线激光扫描的铝氧化膜均匀程度检测装置 - Google Patents
一种基于线激光扫描的铝氧化膜均匀程度检测装置 Download PDFInfo
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- CN110658160A CN110658160A CN201910954828.3A CN201910954828A CN110658160A CN 110658160 A CN110658160 A CN 110658160A CN 201910954828 A CN201910954828 A CN 201910954828A CN 110658160 A CN110658160 A CN 110658160A
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- Prior art keywords
- line laser
- uniformity
- module
- oxide film
- laser scanning
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 title claims abstract description 25
- 238000001514 detection method Methods 0.000 title claims abstract description 16
- 238000004364 calculation method Methods 0.000 claims abstract description 56
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 36
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 36
- 238000000034 method Methods 0.000 claims description 11
- 238000006243 chemical reaction Methods 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 3
- 238000012935 Averaging Methods 0.000 claims 2
- 238000013500 data storage Methods 0.000 abstract description 12
- 238000005070 sampling Methods 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000010407 anodic oxide Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000006056 electrooxidation reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000013535 sea water Substances 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N2021/4735—Solid samples, e.g. paper, glass
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
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CN201910954828.3A CN110658160B (zh) | 2019-10-09 | 2019-10-09 | 一种基于线激光扫描的铝氧化膜均匀程度检测装置 |
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CN201910954828.3A CN110658160B (zh) | 2019-10-09 | 2019-10-09 | 一种基于线激光扫描的铝氧化膜均匀程度检测装置 |
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CN110658160A true CN110658160A (zh) | 2020-01-07 |
CN110658160B CN110658160B (zh) | 2022-06-07 |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09329423A (ja) * | 1996-04-09 | 1997-12-22 | Dainippon Screen Mfg Co Ltd | レジスト膜の塗布むら検出装置 |
CN106442543A (zh) * | 2016-10-14 | 2017-02-22 | 龚新林 | 一种在线识别金属工件连续激光焊缝表面质量的检测方法 |
CN106767518A (zh) * | 2017-02-17 | 2017-05-31 | 华南理工大学 | 一种基于线激光扫描的手机外壳质量在线检测装置与方法 |
CN107179053A (zh) * | 2016-03-10 | 2017-09-19 | 中国科学院高能物理研究所 | 导光装置、薄膜的均匀性测试装置和方法 |
CN108061743A (zh) * | 2017-12-13 | 2018-05-22 | 厦门大学 | 一种铅酸蓄电池极板检测仪 |
CN109187377A (zh) * | 2018-09-21 | 2019-01-11 | 泉州装备制造研究所 | 用于检测感光复合材料分布均匀度的检测装置及检测方法 |
-
2019
- 2019-10-09 CN CN201910954828.3A patent/CN110658160B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09329423A (ja) * | 1996-04-09 | 1997-12-22 | Dainippon Screen Mfg Co Ltd | レジスト膜の塗布むら検出装置 |
CN107179053A (zh) * | 2016-03-10 | 2017-09-19 | 中国科学院高能物理研究所 | 导光装置、薄膜的均匀性测试装置和方法 |
CN106442543A (zh) * | 2016-10-14 | 2017-02-22 | 龚新林 | 一种在线识别金属工件连续激光焊缝表面质量的检测方法 |
CN106767518A (zh) * | 2017-02-17 | 2017-05-31 | 华南理工大学 | 一种基于线激光扫描的手机外壳质量在线检测装置与方法 |
CN108061743A (zh) * | 2017-12-13 | 2018-05-22 | 厦门大学 | 一种铅酸蓄电池极板检测仪 |
CN109187377A (zh) * | 2018-09-21 | 2019-01-11 | 泉州装备制造研究所 | 用于检测感光复合材料分布均匀度的检测装置及检测方法 |
Non-Patent Citations (1)
Title |
---|
唐民 等: "《煤矿带式输送机设计与制造关键技术研究及应用》", 31 August 2013, 中国矿业大学出版社 * |
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Application publication date: 20200107 Assignee: Xianweikang New Materials Technology Co.,Ltd. Assignor: HUNAN INSTITUTE OF TECHNOLOGY Contract record no.: X2024980041374 Denomination of invention: A device for detecting the uniformity of aluminum oxide film based on line laser scanning Granted publication date: 20220607 License type: Common License Record date: 20241223 Application publication date: 20200107 Assignee: LUXI LANTIAN HIGH-TECH CO.,LTD. Assignor: HUNAN INSTITUTE OF TECHNOLOGY Contract record no.: X2024980041373 Denomination of invention: A device for detecting the uniformity of aluminum oxide film based on line laser scanning Granted publication date: 20220607 License type: Common License Record date: 20241223 Application publication date: 20200107 Assignee: HUNAN JINHAO NEW MATERIAL TECHNOLOGY CO.,LTD. Assignor: HUNAN INSTITUTE OF TECHNOLOGY Contract record no.: X2024980041372 Denomination of invention: A device for detecting the uniformity of aluminum oxide film based on line laser scanning Granted publication date: 20220607 License type: Common License Record date: 20241225 |