CN110605643A - Metal mask cleaning device and metal mask cleaning method - Google Patents

Abstract

The invention relates to a metal shade cleaning device which is arranged above a bearing platform and connected with a driving mechanism, the driving mechanism can drive the metal shade cleaning device to move in three-dimensional direction, the metal shade cleaning device comprises a base and a grinding mechanism arranged on the base, the metal shade cleaning method is to detect the position of foreign matters attached to the surface of the metal shade by using an image identification means and transmit the foreign matters to a control device, the driving mechanism drives the metal mask cleaning device to move to the position where the foreign matters are attached on the surface of the metal mask through the control device according to the foreign matter position data, the metal mask cleaning device mainly removes the foreign matters on the surface of the metal mask in a grinding way, so that the problem of damage to the metal mask can be effectively avoided, and the reuse rate of the metal mask can be improved.

Description

Metal mask cleaning device and metal mask cleaning method

technical field

The present invention relates to a metal mask cleaning device and a metal mask cleaning method, in particular to a metal mask cleaning device and a metal mask cleaning method for cleaning the metal mask used in organic light emitting diode panel evaporation process and the like.

Background technique

With the development of science and technology, the technology of organic light emitting diode (OLED) panels is becoming more and more mature, and has become a competitive lighting and display technology. At present, the main mass production method of organic light-emitting diodes (OLEDs) is to use vacuum evaporation technology to heat and sublimate organic materials with metal masks to control their patterns under high vacuum conditions, so that the vaporized organic materials uniformly deposited on the substrate.

However, when the metal mask is used for a long time, foreign matters tend to adhere to the surface of the metal mask, which will affect the evaporation quality of the organic light emitting diode panel. Therefore, in order to ensure the organic light emitting diode (OLED) vacuum evaporation process To ensure the quality of the metal mask, the surface of the metal mask must be cleaned regularly or according to actual use needs.

Nowadays, in the cleaning operation of the surface of the metal mask, it is mainly to detect the position of the foreign matter on the surface of the metal mask by means of image recognition, and then use the laser to remove the foreign matter attached to the surface of the metal mask. However, since the types and sizes of foreign matter attached to the surface of the metal mask are different, and the effective beam area projected by the laser is limited, when the laser is operated for removal, precise alignment is required to accurately remove the surface of the metal mask In addition, during the process of using laser to remove foreign matter, the laser beam is likely to damage the surface of the metal mask, causing damage to the metal mask and affecting subsequent manufacturing operations.

Contents of the invention

The main purpose of the present invention is to provide a metal mask cleaning device and a metal mask cleaning method, hoping to improve the current methods of cleaning foreign objects on the metal mask surface, which are difficult to operate and easily damage the metal mask.

In order to achieve the purpose disclosed above, the metal mask cleaning device of the present invention is used to be arranged above a carrying platform and connected to a driving mechanism, the driving mechanism can drive the metal mask cleaning device to move in three-dimensional directions, and the metal mask cleaning device The device contains:

A base, which includes a seat body and a fixing component, the base body includes a cassette installation part and a guide belt part, the guide belt part is located below the cassette installation part, the fixing component is arranged on the base body Cassette installation part, and form an installation area with the cassette installation part of this seat body; And

A grinding mechanism, which is arranged on the base body, the grinding mechanism includes:

a grinding head, which is arranged on the guide belt portion of the seat body and protrudes from the bottom of the seat body;

A tape drive assembly, which includes a winding motor, a tension motor, a winding protrusion, a tension protrusion and a plurality of guide shafts, the winding motor and the tension motor are arranged at intervals on the cassette installation At the part, the take-up protruding shaft is controlled by the take-up motor and extends into the installation area, the tension protruding shaft is controlled by the tension motor and extends into the installation area, and the plurality of tape guide shafts Pivoted on the tape guide portion of the base body, the grinding cassette set is arranged on the cassette installation portion of the base body; and

A grinding cassette group, which includes a shell, two winding wheels arranged at intervals and a grinding belt, the two winding wheels are rotatably arranged in the shell, and the winding cam shaft and the tension cam shaft respectively extend into For the two winding wheels, the grinding belt goes around the plurality of belt guide shafts and the bottom of the grinding head, and the two ends of the grinding belt extend into the shell and are respectively wound on the two winding wheels.

In addition, to achieve the purpose disclosed above, the present invention provides a metal mask cleaning method, which is implemented using the aforementioned metal mask cleaning device, and the metal mask cleaning method includes:

placing and positioning a metal mask to be cleaned on the carrying platform;

Detecting the position of foreign matter attached to the surface of the metal mask by means of image recognition, and transmitting the position data of each foreign matter to a control device;

The control device executes the following steps according to the position data of each foreign object:

controlling the driving mechanism to drive the metal mask cleaning device to move above the position where the foreign matter is attached to the metal mask surface, and to drive the metal mask cleaning device to move downward; and

The grinding mechanism is driven to grind and remove the foreign matter attached to the surface of the metal mask, and after the foreign matter attached to the surface of the metal mask is ground and removed, the driving mechanism is controlled to drive the metal mask cleaning device to rise.

The metal mask cleaning device of the present invention is mainly used to remove foreign matter on the surface of the metal mask used in the OLED panel manufacturing process, and has the following advantages:

1. Can avoid damage to the metal mask during cleaning operations: As mentioned above, the metal mask cleaning device of the present invention mainly uses grinding to remove foreign matter on the surface of the metal mask, so that the grinding mechanism can only target the metal mask Grinding foreign matter on the surface can effectively avoid the problem of damage to the metal mask.

2. It can reliably remove foreign matter on the surface of the metal mask and improve the reuse rate of the metal mask: the metal mask cleaning device of the present invention can withstand the grinding belt through the grinding head, so that the grinding belt contacts the metal mask to be cleaned. The surface of the cover, and the winding motor and tension motor of the grinding mechanism can drive the winding wheel of the grinding cassette group to roll, so that the grinding belt moves relative to the grinding head, thereby enabling the grinding belt to A small area of grinding is carried out on the surface of the metal mask to remove foreign matter on the surface of the metal mask, and at the same time improve the reusability of the metal mask.

Description of drawings

FIG. 1 is a schematic front plan view of the metal mask cleaning device of the present invention installed above the carrying platform and connected to the driving mechanism.

Fig. 2: is a front view plan view of a preferred embodiment of the metal mask cleaning device of the present invention.

FIG. 3 is a schematic view of the opening state of the fixing assembly of the metal mask cleaning device of the present invention.

Figure 4: A schematic diagram of removing the grinding cassette set in Figure 3.

Fig. 5: It is a schematic diagram of the front view of the metal mask placed on the carrier platform.

Fig. 6: It is a schematic diagram of the metal mask cleaning device of the present invention performing grinding operations.

Detailed ways

The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments, but not as a limitation of the present invention.

Please refer to Fig. 1 to Fig. 4, it is a kind of preferred embodiment of the metal mask cleaning device of the present invention, and it is used to be arranged on a carrying platform 30 tops and connects a driving mechanism 40, and described driving mechanism 40 can drive this metal mask The mask cleaning device moves in three dimensions, and the metal mask cleaning device includes a base 10 and a grinding mechanism 20 .

As shown in Fig. 1 and Fig. 4, the base 10 includes a seat body 11 and a fixing component 12, the seat body 11 includes a cassette installation part 13 and a belt guide part 14, and the belt guide part 14 is located on the cassette mount Below the mounting portion 13 , the fixing component 12 is disposed on the cassette mounting portion 13 of the base body 11 , and forms a mounting area with the cassette mounting portion 13 of the base body 11 .

As shown in Figures 1 to 4, the grinding mechanism 20 is arranged on the base body 11. The grinding mechanism 20 includes a grinding head 21, a cassette driving assembly 22 and a grinding cassette group 23. The grinding head 21 is arranged on the The tape guide portion 14 of the base body 11 protrudes from the bottom of the base body 11. The cassette driving assembly 22 includes a winding motor 221, a tension motor 222, a winding protruding shaft 223, a tension protruding shaft 224 and multiple A tape guide shaft 225, the winding motor 221 and the tension motor 222 are arranged at the cassette installation part 13 at intervals, the winding protruding shaft 223 is connected and controlled by the winding motor 221 and extends into the installation area, the tension protruding shaft 224 is connected and controlled by the tension motor 222 and extends into the installation area, the plurality of tape guide shafts 225 are pivotally mounted on the tape guide portion 14 of the seat body 11, and the grinding cassette set 23 is set On the cassette mounting portion 13 of the base body 11, the grinding cassette set 23 includes a casing 231, two winding wheels 232 arranged at intervals and a grinding belt 233, and the two winding wheels 232 are rotatably arranged on the casing 231 Inside, and the take-up protruding shaft 223 and the tension protruding shaft 224 respectively extend into the two take-up wheels 232, the grinding belt 233 goes around the bottom of the plurality of tape guide shafts 225 and the grinding head 21, and the grinding belt Two ends of the belt 233 protrude into the housing 231 and are respectively wound on the two winding wheels 232 .

Wherein, the fixing component 12 includes a fixing locking piece 121 and a fixing box 122, the fixing locking piece 121 is arranged on one side of the cassette mounting portion 13 of the base body 11, and the fixing box 122 is pivotally mounted on the cassette On the other side of the installation part 13 relative to the fixed lock piece 121, the fixed box 122 can be fastened to the fixed lock piece 121, and forms a circle with the fixed lock piece 121 and the cassette installation part 13. In addition, two limiting grooves 211 are respectively formed on two sides of the grinding head 21, and the grinding belt 233 extends into the two limiting grooves 211.

As shown in FIGS. 5 to 6 , the present invention provides a metal mask cleaning method, which is performed using the aforementioned metal mask cleaning device. The metal mask 50 cleaning method includes:

placing and positioning a metal mask 50 to be cleaned on the carrying platform 30;

The control device executes the following steps according to the position data of each foreign object:

Controlling the drive mechanism 40 to drive the metal mask cleaning device to move above the position where the foreign matter is attached to the surface of the metal mask 50, and to drive the metal mask cleaning device to move downward; and

The grinding mechanism 20 is driven to grind and remove the foreign matter attached to the surface of the metal mask 50 , and after the foreign matter attached to the surface of the metal mask 50 is ground and removed, the driving mechanism 40 is controlled to drive the metal mask cleaning device to rise.

In the embodiment of the metal mask cleaning method of the present invention, in the step of the grinding mechanism 20 grinding and removing the foreign matter attached to the surface of the metal mask 50, the winding motor 221 of the cassette drive assembly 22 rotates in the forward direction to wind up The grinding belt 223 and the tension motor 222 are rotated forward to release the grinding belt 223 .

As shown in Figure 6, when the control device controls the drive mechanism 40 to move the metal mask cleaning device downwards, the grinding head 21 of the metal mask cleaning device is against the grinding belt 233 at its bottom, so that the grinding belt 233 contacts and grinds foreign matter attached to the surface of the metal mask 50 .

Wherein, as shown in FIG. 2, the grinding belt 233 bypasses the grinding head 21 and extends into the limiting grooves 211 on both sides of the grinding head 21, so that the metal mask cleaning device can clean the metal mask 50 During the grinding process of foreign matter on the surface, effectively positioning the grinding belt 233 can prevent the grinding belt 233 from detaching from the grinding head 21, and the winding motor 221 and the tension motor 222 drive the two winding pulleys during the grinding operation 232 is retracted and released in the forward direction respectively, which can avoid the repeated use of the contacted and ground part on the grinding belt 233, and can effectively improve the grinding quality.

As shown in Figures 2 to 4, when the operator is replacing the grinding cassette set 23, the operator can open the fixing box 122 of the fixing assembly 12, so that the fixing box 122 is separated from the fixing locking piece 121, and then Take out the grinding cassette set 23, pull out the grinding tape 233 of the new grinding cassette set 23 and walk around the plurality of tape guide shafts 225 and the grinding head 21, and then set the grinding cassette set 23 on the grinding cassette set 23. In the installation area of the base 10, the winding protruding shaft 223 and the tensioning protruding shaft 224 are respectively inserted into the two winding wheels 232 of the grinding cassette group 23. Finally, the operator can pass the fixed box 122 The replacement of the grinding cassette set 23 can be completed by buckling the fixed locking piece 121 .

In summary, the metal mask cleaning device and the metal mask cleaning method of the present invention mainly drive the grinding belt 233 of the grinding cassette set 23 to move relative to the grinding head 21, and the grinding head 21 resists the grinding belt 233, the grinding belt 233 removes foreign matter on the surface of the metal mask by grinding, which can not only effectively avoid the problem of damage to the metal mask, but also improve the reusability of the metal mask.

Of course, the present invention can also have other various embodiments, and those skilled in the art can make various corresponding changes and deformations according to the present invention without departing from the spirit and essence of the present invention. All changes and deformations should belong to the protection scope of the appended claims of the present invention.

Claims (5)

1. A metal mask cleaning device, characterized in that, it is used to be arranged on a carrying platform and connected to a driving mechanism, the driving mechanism can drive the metal mask cleaning device to move in three dimensions, and the metal mask cleaning The device contains: A base, which includes a seat body and a fixing component, the base body includes a cassette installation part and a guide belt part, the guide belt part is located below the cassette installation part, the fixing component is arranged on the base body Cassette installation part, and form an installation area with the cassette installation part of this seat body; And A grinding mechanism, which is arranged on the base body, the grinding mechanism includes: a grinding head, which is arranged on the guide belt portion of the seat body and protrudes from the bottom of the seat body; A tape drive assembly, which includes a winding motor, a tension motor, a winding protrusion, a tension protrusion and a plurality of guide shafts, the winding motor and the tension motor are arranged at intervals on the cassette installation At the part, the take-up protruding shaft is controlled by the take-up motor and extends into the installation area, the tension protruding shaft is controlled by the tension motor and extends into the installation area, and the plurality of tape guide shafts Pivoted on the tape guide portion of the base body, the grinding cassette set is arranged on the cassette installation portion of the base body; and A grinding cassette group, which includes a shell, two winding wheels arranged at intervals and a grinding belt, the two winding wheels are rotatably arranged in the shell, and the winding cam shaft and the tension cam shaft respectively extend into For the two winding wheels, the grinding belt goes around the plurality of belt guide shafts and the bottom of the grinding head, and the two ends of the grinding belt extend into the shell and are respectively wound on the two winding wheels. 2. The metal mask cleaning device as claimed in claim 1, wherein the fixing component comprises a fixing lock piece and a fixing box, and the fixing lock piece is arranged on one side of the cassette mounting portion of the seat body , and the fixed box is pivotally arranged on the other side of the cassette installation part relative to the fixed lock piece, the fixed box can be buckled on the fixed lock piece, and is connected with the fixed lock piece and the cassette installation part The enclosure forms the installation area. 3. The metal mask cleaning device according to claim 1 or 2, wherein two sides of the grinding head respectively form a limiting groove, and the grinding belt extends into the two limiting grooves. 4. A metal mask cleaning method, characterized in that it is performed using the metal mask cleaning device according to any one of claims 1 to 3, the metal mask cleaning method comprising: placing and positioning a metal mask to be cleaned on the carrying platform; Detecting the position of foreign matter attached to the surface of the metal mask by means of image recognition, and transmitting the position data of each foreign matter to a control device; The control device executes the following steps according to the position data of each foreign object: controlling the driving mechanism to drive the metal mask cleaning device to move above the position where the foreign matter is attached to the metal mask surface, and to drive the metal mask cleaning device to move downward; and The grinding mechanism is driven to grind and remove the foreign matter attached to the surface of the metal mask, and after the foreign matter attached to the surface of the metal mask is ground and removed, the driving mechanism is controlled to drive the metal mask cleaning device to rise. 5. The metal mask cleaning method according to claim 4, characterized in that, in the step of grinding and removing foreign matter attached to the surface of the metal mask by the grinding mechanism, the winding motor of the cassette driving assembly rotates in the forward direction The grinding belt is rolled up, and the tension motor rotates forward to release the grinding belt.