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CN110527891A - Hard alloy in low cobalt surface diamond coating and preparation method thereof - Google Patents

Hard alloy in low cobalt surface diamond coating and preparation method thereof Download PDF

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CN110527891A
CN110527891A CN201910871141.3A CN201910871141A CN110527891A CN 110527891 A CN110527891 A CN 110527891A CN 201910871141 A CN201910871141 A CN 201910871141A CN 110527891 A CN110527891 A CN 110527891A
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diamond
cobalt
diamond coating
substrate
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CN110527891B (en
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张建国
原一高
阮钧
张金江
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Donghua University
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    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C1/00Making non-ferrous alloys
    • C22C1/04Making non-ferrous alloys by powder metallurgy
    • C22C1/05Mixtures of metal powder with non-metallic powder
    • C22C1/051Making hard metals based on borides, carbides, nitrides, oxides or silicides; Preparation of the powder mixture used as the starting material therefor
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C29/00Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides
    • C22C29/005Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides comprising a particular metallic binder
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C29/00Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides
    • C22C29/02Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides
    • C22C29/06Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides based on carbides, but not containing other metal compounds
    • C22C29/067Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides based on carbides, but not containing other metal compounds comprising a particular metallic binder
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C29/00Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides
    • C22C29/02Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides
    • C22C29/06Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides based on carbides, but not containing other metal compounds
    • C22C29/08Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides based on carbides, but not containing other metal compounds based on tungsten carbide
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26Deposition of carbon only
    • C23C16/27Diamond only
    • C23C16/271Diamond only using hot filaments
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C2204/00End product comprising different layers, coatings or parts of cermet

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Powder Metallurgy (AREA)

Abstract

本发明涉及一种低钴硬质合金表面金刚石涂层及其制备方法,以低钴含量的硬质合金为基体材料沉积金刚石薄膜。利用石墨烯的优异物理性能,提升低钴含量硬质合金的韧性,用于金刚石涂层的基体材料。减少金刚石涂层前的化学预处理时间,避免了长时间的化学反应对基体材料的腐蚀损伤,更好地保持产品的尺寸精度。同时,缓解了钴在金刚石涂层沉积过程中的热扩散作用,改善涂层与基体的附着强度。实现用于金刚石涂层硬质合金基体韧性提升与消除钴元素不利影响的双重效果,为提高金刚石涂层硬质合金产品性能提供了有效方法。

The invention relates to a diamond coating on the surface of a low-cobalt hard alloy and a preparation method thereof. The hard alloy with a low cobalt content is used as a base material to deposit a diamond film. Using the excellent physical properties of graphene to improve the toughness of low-cobalt cemented carbide, it is used as a base material for diamond coating. Reduce the chemical pretreatment time before diamond coating, avoid the corrosion damage to the base material caused by the long-term chemical reaction, and better maintain the dimensional accuracy of the product. At the same time, the thermal diffusion effect of cobalt in the diamond coating deposition process is alleviated, and the adhesion strength between the coating and the substrate is improved. The dual effects of improving the toughness of the diamond-coated cemented carbide substrate and eliminating the adverse effects of cobalt elements are realized, which provides an effective method for improving the performance of diamond-coated cemented carbide products.

Description

低钴硬质合金表面金刚石涂层及其制备方法Diamond coating on low-cobalt hard alloy surface and preparation method thereof

技术领域technical field

本发明属于金刚石涂层及其制备领域,特别涉及一种低钴硬质合金表面金刚石涂层及其制备方法。The invention belongs to the field of diamond coating and its preparation, in particular to a low-cobalt hard alloy surface diamond coating and a preparation method thereof.

背景技术Background technique

金刚石涂层的高硬度、高耐磨性、高热导率、低摩擦系数和良好的化学惰性等诸多优异性能,使得其在工模具领域广泛应用。在硬质合金工模具表面沉积金刚石涂层,不仅可以大幅度提高工模具的使用寿命,还能改善工件的加工表面质量。The high hardness, high wear resistance, high thermal conductivity, low friction coefficient and good chemical inertness of diamond coating make it widely used in the field of tools and molds. Depositing a diamond coating on the surface of a cemented carbide tool can not only greatly increase the service life of the tool, but also improve the surface quality of the workpiece.

为了兼顾基体材料硬度和韧性的平衡,金刚石涂层选用的硬质合金基体含钴量通常为6wt.%~8wt.%。然而,为了消除基体材料中的钴元素在金刚石涂层沉积过程中的催石墨化作用,在制备金刚石涂层之前,又必须对硬质合金基体进行“化学腐蚀去钴”预处理。基体的含钴量越高,化学腐蚀的时间就越长。“去钴”的同时,对基体中的碳化钨结构带来不可避免的损伤,从而影响基体材料的性能。使得金刚石涂层产品的性能不能达到预期效果。In order to balance the hardness and toughness of the base material, the cobalt content of the cemented carbide base selected for the diamond coating is usually 6wt.%-8wt.%. However, in order to eliminate the graphitization effect of the cobalt element in the substrate material during the deposition of the diamond coating, the cemented carbide substrate must be pretreated by "chemical corrosion to remove cobalt" before the diamond coating is prepared. The higher the cobalt content of the substrate, the longer the chemical etching time. At the same time of "cobalt removal", it will inevitably damage the tungsten carbide structure in the matrix, thus affecting the performance of the matrix material. The performance of the diamond-coated product cannot achieve the desired effect.

经对现有技术的专利检索发现,中国专利申请号201510673007.4和03117958.4提出利用表面层贫钴的梯度硬质合金作为基体材料,制备金刚石涂层,用以解决钴元素对金刚石涂层沉积的影响,同时兼顾基体的强度和韧性。但是,梯度硬质合金基体芯部的富钴层在金刚石涂层沉积过程中,由于基体受热,钴的热扩散作用仍然会引起金刚石涂层的催石墨化和降低膜基附着强度。According to the patent search of the existing technology, Chinese patent application Nos. 201510673007.4 and 03117958.4 proposed to use gradient cemented carbide with a cobalt-poor surface layer as the substrate material to prepare a diamond coating to solve the effect of cobalt on the deposition of the diamond coating. At the same time, the strength and toughness of the matrix are taken into account. However, during the deposition of the diamond coating on the cobalt-rich layer at the core of the gradient cemented carbide substrate, due to the heating of the substrate, the thermal diffusion of cobalt will still cause the graphitization of the diamond coating and reduce the adhesion strength of the film substrate.

发明内容Contents of the invention

本发明所要解决的技术问题是提供一种硬质合金基体增韧金刚石涂层及其制备方法,克服现有技术中应用于金刚石涂层的硬质合金中含钴量为6wt.%~8wt.%,为了获得较好的预处理效果,需要进行较长时间的化学预处理,“去钴”的同时,也损伤了基体的结构性能。另外,基体内部较高的钴含量在金刚石涂层沉积过程中,有较强的热扩散作用,导致金刚石涂层与基体的结合强度低的技术问题。本发明中低钴含量硬质合金基体增韧沉积金刚石涂层。The technical problem to be solved by the present invention is to provide a cemented carbide substrate toughened diamond coating and its preparation method, which overcomes the cobalt content of 6wt.%~8wt.% in the hard alloy used in the diamond coating in the prior art. %, in order to obtain a better pretreatment effect, it is necessary to carry out chemical pretreatment for a long time, while "removing cobalt", it also damages the structural properties of the matrix. In addition, the high cobalt content inside the substrate has a strong thermal diffusion effect during the deposition of the diamond coating, resulting in the technical problem of low bonding strength between the diamond coating and the substrate. In the present invention, the cemented carbide substrate with low cobalt content is toughened and deposited with a diamond coating.

本发明的一种金刚石涂层,所述涂层以硬质合金为基体材料沉积金刚石薄膜;A kind of diamond coating of the present invention, described coating is deposited diamond thin film with cemented carbide as matrix material;

其特征在于,按质量百分比,硬质合金的原料组分包括:石墨烯(粉末)0.1wt.%~1wt.%、钴2wt.%~3wt.%、碳化钨(粉末)97.9wt.%-96wt.%。It is characterized in that, by mass percentage, the raw material components of cemented carbide include: graphene (powder) 0.1wt.% ~ 1wt.%, cobalt 2wt.% ~ 3wt.%, tungsten carbide (powder) 97.9wt.% - 96wt.%.

本发明的一种金刚石涂层的制备方法,包括:A kind of preparation method of diamond coating of the present invention comprises:

(1)将分散的石墨烯、钴粉与碳化钨粉球磨混合,得到浆料,进行真空干燥,基体烧结成型,得到硬质合金基体材料;(1) Mixing dispersed graphene, cobalt powder and tungsten carbide powder by ball milling to obtain a slurry, vacuum drying, and sintering the matrix to obtain a cemented carbide matrix material;

(2)将上述基体预处理,沉积金刚石涂层,即得。(2) pretreating the above-mentioned substrate, and depositing a diamond coating, to obtain.

上述制备方法的优选方式如下:The preferred mode of above-mentioned preparation method is as follows:

所述步骤(1)中分散的石墨烯具体为:采用无水乙醇为分散溶液,无水乙醇与石墨烯的配比为100mL:(0.1~0.5)g,利用超声振荡分散工艺,其中超声频率为40KHz;超声工作时间的占空比为1:1;超声振荡的时间为4~6h。The graphene dispersed in the step (1) is specifically: using dehydrated alcohol as the dispersion solution, the proportion of dehydrated alcohol and graphene is 100mL:(0.1~0.5)g, utilizing the ultrasonic oscillation dispersion process, wherein the ultrasonic frequency It is 40KHz; the duty ratio of ultrasonic working time is 1:1; the time of ultrasonic oscillation is 4~6h.

所述步骤(1)中球磨混合具体工艺参数为:采用的磨球为直径5mm的硬质合金WC-3wt.%Co球,球磨机的转速为300~500rpm,球磨时间为6~8h;其中无水乙醇:粉料:磨球的配比为:(1~2)mL:1g:(7~10)g。The specific process parameters of ball milling in the step (1) are: the balls used are cemented carbide WC-3wt.% Co balls with a diameter of 5mm, the speed of the ball mill is 300-500rpm, and the ball milling time is 6-8h; The ratio of water ethanol: powder: grinding ball is: (1~2)mL:1g:(7~10)g.

所述步骤(1)中真空干燥为:将混合搅拌后的浆料,置于真空干燥箱中,进行干燥,干燥过程中,加热温度为90~100℃,至浆料中无可见液体时,停止加热(关闭加热功能),自然干燥2~3h,干燥全过程中,保持真空室内的压力为10000~15000Pa。The vacuum drying in the step (1) is as follows: the mixed and stirred slurry is placed in a vacuum drying oven for drying. During the drying process, the heating temperature is 90-100° C. until there is no visible liquid in the slurry, Stop heating (turn off the heating function), and dry naturally for 2-3 hours. During the whole drying process, keep the pressure in the vacuum chamber at 10000-15000Pa.

所述步骤(1)中烧结成型:将干燥后的粉末,压制成设计要求的形状后,采用真空压力烧结方法,烧结成型,的温度为1380℃,压力为40MPa。Sintering molding in the step (1): After the dried powder is pressed into the shape required by the design, vacuum pressure sintering method is used to sinter molding at a temperature of 1380° C. and a pressure of 40 MPa.

所述步骤(2)中预处理具体为:将基体浸没于碱溶液处理10min,清洗,吹干,再将碱处理后的基体浸没于酸溶液自然反应10s,清洗,吹干;用金刚石粉和丙三醇的混合溶液研磨,清洗,吹干;其中碱液为铁氰化钾:氢氧化钾:水=1g:1g:10mL;酸溶液为盐酸:双氧水=1mL:4mL。The pretreatment in the step (2) is specifically: immersing the substrate in an alkali solution for 10 minutes, cleaning, and drying, then immersing the alkali-treated substrate in an acid solution to react naturally for 10 seconds, cleaning, and drying; using diamond powder and The mixed solution of glycerol is ground, washed, and dried; the lye is potassium ferricyanide: potassium hydroxide: water = 1g: 1g: 10mL; the acid solution is hydrochloric acid: hydrogen peroxide = 1mL: 4mL.

所述步骤(2)中沉积具体为:采用热丝化学气相沉积方法,将预处理后的基体,置于化学气相沉积设备中,待设备的真空室压力达到5Pa以下后,输入反应工作气体甲烷流量10~20sccm,氢气流量1000~2000sccm,调节反应压力为2000~4000Pa,涂层沉积时间为6~10h。本发明提供一种所述方法制备的金刚石涂层。The deposition in the step (2) is specifically: using the hot wire chemical vapor deposition method, placing the pretreated substrate in the chemical vapor deposition equipment, and after the vacuum chamber pressure of the equipment reaches below 5Pa, input the reaction working gas methane The flow rate is 10-20 sccm, the hydrogen flow rate is 1000-2000 sccm, the reaction pressure is adjusted to 2000-4000 Pa, and the coating deposition time is 6-10 hours. The invention provides a diamond coating prepared by the method.

本发明提供一种所述金刚石涂层的应用。The invention provides an application of the diamond coating.

有益效果Beneficial effect

(1)本发明解决了现有技术中金刚石涂层的硬质合金基体中高钴含量对涂层不利影响和基体强度韧性无法协调的问题,提供了一种用于金刚石涂层的低钴含量硬质合金基体增韧工艺及涂层制备方法;(1) The present invention solves the problem that the high cobalt content in the cemented carbide substrate of the diamond coating has an adverse effect on the coating and the inability to coordinate the strength and toughness of the substrate in the prior art, and provides a low cobalt content hard alloy used for the diamond coating. Toughening process of alloy matrix and preparation method of coating;

(2)利用石墨烯强度高、韧性好等优异特性,提高低钴含量硬质合金基体的韧性,石墨烯的成份是碳,在硬质合金制备过程中不引入其他杂质元素,使得硬质合金的成份不会受到影响;(2) Utilize the excellent characteristics of graphene such as high strength and good toughness to improve the toughness of the low-cobalt content cemented carbide substrate. The composition of graphene is carbon, and no other impurity elements are introduced during the preparation of cemented carbide, so that The composition of the will not be affected;

(3)低钴含量的硬质合金用于金刚石涂层时,预处理阶段“碱+酸”的化学腐蚀时间减少,避免了长时间化学腐蚀对硬质合金材料性能的不良影响以及对成品工件尺寸精度的影响,同时也避免了传统硬质合金内部高钴含量在沉积过程的热扩散,导致涂层质量和膜基结合强度差的问题;(3) When cemented carbide with low cobalt content is used for diamond coating, the chemical corrosion time of "alkali + acid" in the pretreatment stage is reduced, avoiding the adverse effects of long-term chemical corrosion on the properties of cemented carbide materials and the finished workpiece The impact of dimensional accuracy, and also avoid the thermal diffusion of high cobalt content in traditional cemented carbide during the deposition process, resulting in poor coating quality and poor bonding strength of the film base;

(4)本发明利用石墨烯的优异物理性能,提升低钴含量硬质合金的韧性,用于金刚石涂层的基体材料,减少金刚石涂层前的化学预处理时间,避免了长时间的化学反应对基体材料的腐蚀损伤,更好地保持产品的尺寸精度。同时,缓解了钴在金刚石涂层沉积过程中的热扩散作用,改善涂层与基体的附着强度,实现用于金刚石涂层硬质合金基体韧性提升与消除钴元素不利影响的双重效果,为提高金刚石涂层硬质合金产品性能提供了有效方法。(4) The present invention utilizes the excellent physical properties of graphene to improve the toughness of cemented carbide with low cobalt content, which is used as the base material of diamond coating, reduces the chemical pretreatment time before diamond coating, and avoids long-term chemical reaction Corrosion damage to the base material, better maintain the dimensional accuracy of the product. At the same time, it alleviates the thermal diffusion of cobalt in the diamond coating deposition process, improves the adhesion strength between the coating and the substrate, and realizes the dual effects of improving the toughness of the diamond-coated cemented carbide substrate and eliminating the adverse effects of cobalt. Diamond-coated cemented carbide product performance provides an effective method.

附图说明Description of drawings

图1是对比例中制得的普通硬质合金(6wt.%Co)基体表面金刚石涂层的压痕形貌;Fig. 1 is the indentation morphology of the diamond coating on the surface of a common cemented carbide (6wt.% Co) substrate made in comparative examples;

图2是实施例1制得的石墨烯增强低钴含量(3wt.%Co)硬质合金(0.3wt.%石墨烯)基体表面金刚石涂层的压痕形貌。Fig. 2 is the indentation morphology of the diamond coating on the surface of the graphene reinforced low cobalt content (3wt.% Co) cemented carbide (0.3wt.% graphene) substrate obtained in Example 1.

图3是实施例2制得的石墨烯增强低钴含量(3wt.%Co)硬质合金(0.5wt.%石墨烯)基体表面金刚石涂层的压痕形貌。Fig. 3 is the indentation morphology of the diamond coating on the surface of the graphene reinforced low cobalt content (3wt.% Co) cemented carbide (0.5wt.% graphene) substrate obtained in Example 2.

具体实施方式Detailed ways

下面结合具体实施例,进一步阐述本发明。应理解,这些实施例仅用于说明本发明而不用于限制本发明的范围。此外应理解,在阅读了本发明讲授的内容之后,本领域技术人员可以对本发明作各种改动或修改,这些等价形式同样落于本申请所附权利要求书所限定的范围。Below in conjunction with specific embodiment, further illustrate the present invention. It should be understood that these examples are only used to illustrate the present invention and are not intended to limit the scope of the present invention. In addition, it should be understood that after reading the teachings of the present invention, those skilled in the art can make various changes or modifications to the present invention, and these equivalent forms also fall within the scope defined by the appended claims of the present application.

实施例和对比例中所涉及的石墨烯为市售产品,片径5-10微米,厚度3-10纳米;钴粉为市售产品,颗粒直径1微米;碳化钨粉为市售产品,颗粒直径为0.8微米。The graphene involved in the examples and comparative examples is a commercially available product with a sheet diameter of 5-10 microns and a thickness of 3-10 nanometers; cobalt powder is a commercially available product with a particle diameter of 1 micron; tungsten carbide powder is a commercially available product with a particle diameter of 0.8 microns in diameter.

实施例1Example 1

石墨烯增强低钴含量(3wt.%Co)硬质合金(0.3wt.%石墨烯)基体金刚石涂层沉积。Graphene-Enhanced Diamond Coating Deposition on Low Cobalt Content (3wt.% Co) Cemented Carbide (0.3wt.% Graphene) Substrates.

(1)石墨烯分散:用精密电子天平称量石墨烯粉末0.3g,倒入100mL的无水乙醇中,采用细胞粉碎仪,设置超声频率为40KHz;超声工作时间的占空比为1:1;超声振荡的时间为4h。(1) Graphene dispersion: Weigh 0.3g of graphene powder with a precision electronic balance, pour it into 100mL of absolute ethanol, use a cell smasher, set the ultrasonic frequency to 40KHz; the duty ratio of the ultrasonic working time is 1:1 ; The time of ultrasonic oscillation is 4h.

(2)球磨混合:用精密电子天平称量2.991g的钴粉和96.709g的碳化钨粉末,连同(1)中的石墨烯-酒精溶液倒入球磨罐。称量700g直径5mm的硬质合金(WC-wt.3%Co)球,放入球磨罐。在球磨罐中加入100mL无水乙醇,设置球磨机的转速为400rpm,球磨时间8h。(2) Ball mill mixing: Weigh 2.991g of cobalt powder and 96.709g of tungsten carbide powder with a precision electronic balance, and pour the graphene-alcohol solution in (1) into a ball mill jar. Weigh 700 g of cemented carbide (WC-wt.3% Co) balls with a diameter of 5 mm and put them into a ball mill jar. Add 100 mL of absolute ethanol into the ball mill tank, set the ball mill speed to 400 rpm, and ball mill for 8 hours.

(3)真空干燥:将球磨后的浆料,置于真空干燥箱中,进行干燥。设置干燥箱内的压力为15000Pa,加热温度为90℃,至浆料中无可见液体时,关闭加热功能,自然干燥3h。(3) Vacuum drying: the ball-milled slurry is placed in a vacuum drying oven for drying. Set the pressure in the drying box to 15000Pa, and the heating temperature to 90°C. When there is no visible liquid in the slurry, turn off the heating function and let it dry naturally for 3 hours.

(4)基体烧结成型:将干燥后的粉末,用120目的筛网过筛后,采用粉末压片机压制预成型。采用真空烧结炉,设置烧结温度为1380℃,压力为40MPa,烧结时间40min。烧结后的样品,用金相磨抛机将基体表面磨抛成镜面。(4) Matrix sintering and molding: the dried powder is sieved with a 120-mesh sieve, and preformed by pressing with a powder tablet press. A vacuum sintering furnace is used, the sintering temperature is set at 1380°C, the pressure is 40MPa, and the sintering time is 40min. After sintering the sample, use a metallographic grinding and polishing machine to grind and polish the surface of the substrate into a mirror surface.

(5)基体预处理:将步骤(4)中的基体用无水乙醇超声清洗后,吹干。将基体浸没于碱溶液(铁氰化钾:氢氧化钾:水=1g:1g:10mL)处理10min,清洗,吹干。再将碱处理后的基体浸没于酸溶液(盐酸:双氧水=1mL:4mL)自然反应10s,清洗,吹干。用金刚石粉和丙三醇的混合溶液研磨,清洗,吹干。(5) Substrate pretreatment: After the substrate in step (4) is ultrasonically cleaned with absolute ethanol, it is blown dry. Submerge the substrate in alkaline solution (potassium ferricyanide:potassium hydroxide:water=1g:1g:10mL) for 10min, wash and dry. Then immerse the alkali-treated substrate in an acid solution (hydrochloric acid: hydrogen peroxide = 1 mL: 4 mL) to react naturally for 10 seconds, wash and dry. Grind with a mixed solution of diamond powder and glycerin, wash and dry.

(6)金刚石涂层沉积:采用热丝化学气相沉积方法,将步骤(5)中预处理后的基体,置于化学气相沉积设备中,待设备的真空室压力达到5Pa以下后,输入反应工作气体甲烷流量15sccm,氢气流量1000sccm,调节反应压力为3000Pa,涂层沉积时间为6h。(6) Diamond coating deposition: using the hot wire chemical vapor deposition method, the substrate pretreated in step (5) is placed in the chemical vapor deposition equipment, and after the vacuum chamber pressure of the equipment reaches below 5Pa, input the reaction work The gas methane flow rate is 15 sccm, the hydrogen gas flow rate is 1000 sccm, the reaction pressure is adjusted to 3000 Pa, and the coating deposition time is 6 hours.

实施例2Example 2

石墨烯增强低钴含量(3wt.%Co)硬质合金(0.5wt.%石墨烯)基体金刚石涂层沉积。Graphene-Enhanced Diamond Coating Deposition on Low Cobalt Content (3wt.% Co) Cemented Carbide (0.5wt.% Graphene) Substrates.

(1)石墨烯分散:用精密电子天平称量石墨烯粉末0.5g,倒入100mL的无水乙醇中,采用细胞粉碎仪,设置超声频率为40KHz;超声工作时间的占空比为:1:1;超声振荡的时间为4h。(1) Graphene dispersion: Weigh 0.5g of graphene powder with a precision electronic balance, pour it into 100mL of absolute ethanol, use a cell pulverizer, set the ultrasonic frequency to 40KHz; the duty ratio of the ultrasonic working time is: 1: 1; The time of ultrasonic oscillation is 4h.

(2)球磨混合:用精密电子天平称量2.985g的钴粉和96.515g的碳化钨粉末,连同(1)中的石墨烯-酒精溶液倒入球磨罐。称量1000g直径5mm的硬质合金(WC-wt.3%Co)球,放入球磨罐。在球磨罐中加入100mL无水乙醇,设置球磨机的转速为400rpm,球磨时间8h。(2) Ball mill mixing: Weigh 2.985g of cobalt powder and 96.515g of tungsten carbide powder with a precision electronic balance, and pour the graphene-alcohol solution in (1) into a ball mill jar. Weigh 1000 g of cemented carbide (WC-wt.3% Co) balls with a diameter of 5 mm and put them into a ball mill jar. Add 100 mL of absolute ethanol into the ball mill tank, set the ball mill speed to 400 rpm, and ball mill for 8 hours.

(3)真空干燥:将球磨后的浆料,置于真空干燥箱中,进行干燥。设置干燥箱内的压力为15000Pa,加热温度为90℃,至浆料中无可见液体时,关闭加热功能,自然干燥3h。(3) Vacuum drying: the ball-milled slurry is placed in a vacuum drying oven for drying. Set the pressure in the drying box to 15000Pa, and the heating temperature to 90°C. When there is no visible liquid in the slurry, turn off the heating function and let it dry naturally for 3 hours.

(4)基体烧结成型:将干燥后的粉末,用120目的筛网过筛后,采用粉末压片机压制预成型。采用真空烧结炉,设置烧结温度为1380℃,压力为40MPa,烧结时间40min。烧结后的样品,用金相磨抛机将基体表面磨抛成镜面。(4) Matrix sintering and molding: the dried powder is sieved with a 120-mesh sieve, and preformed by pressing with a powder tablet press. A vacuum sintering furnace is used, the sintering temperature is set at 1380°C, the pressure is 40MPa, and the sintering time is 40min. After sintering the sample, use a metallographic grinding and polishing machine to grind and polish the surface of the substrate into a mirror surface.

(5)基体预处理:将步骤(4)中的基体用无水乙醇超声清洗后,吹干。将基体浸没于碱溶液(铁氰化钾:氢氧化钾:水=1g:1g:10mL)处理10min,清洗,吹干。再将碱处理后的基体浸没于酸溶液(盐酸:双氧水=1mL:4mL)自然反应10s,清洗,吹干。用金刚石粉和丙三醇的混合溶液研磨,清洗,吹干。(5) Substrate pretreatment: After the substrate in step (4) is ultrasonically cleaned with absolute ethanol, it is blown dry. Submerge the substrate in alkaline solution (potassium ferricyanide:potassium hydroxide:water=1g:1g:10mL) for 10min, wash and dry. Then immerse the alkali-treated substrate in an acid solution (hydrochloric acid: hydrogen peroxide = 1 mL: 4 mL) to react naturally for 10 seconds, wash and dry. Grind with a mixed solution of diamond powder and glycerin, wash and dry.

(6)金刚石涂层沉积:采用热丝化学气相沉积方法,将步骤(5)中预处理后的基体,置于化学气相沉积设备中,待设备的真空室压力达到5Pa以下后,输入反应工作气体甲烷流量15sccm,氢气流量1000sccm,调节反应压力为3000Pa,涂层沉积时间为6h。(6) Diamond coating deposition: using the hot wire chemical vapor deposition method, the substrate pretreated in step (5) is placed in the chemical vapor deposition equipment, and after the vacuum chamber pressure of the equipment reaches below 5Pa, input the reaction work The gas methane flow rate is 15 sccm, the hydrogen gas flow rate is 1000 sccm, the reaction pressure is adjusted to 3000 Pa, and the coating deposition time is 6 hours.

对比例comparative example

普通硬质合金(6wt.%Co)基体金刚石涂层沉积。Ordinary cemented carbide (6wt.% Co) substrate diamond coating deposition.

(1)球磨混合:用精密电子天平称量6g的钴粉和94g的碳化钨粉末倒入球磨罐。称量1000g直径5mm的硬质合金(WC-wt.6%Co)球,放入球磨罐。在球磨罐中加入200mL无水乙醇,设置球磨机的转速为400rpm,球磨时间8h。(1) Ball mill mixing: Weigh 6g of cobalt powder and 94g of tungsten carbide powder with a precision electronic balance and pour them into a ball mill jar. Weigh 1000 g of cemented carbide (WC-wt.6% Co) balls with a diameter of 5 mm and put them into a ball mill jar. Add 200 mL of absolute ethanol into the ball mill tank, set the ball mill speed to 400 rpm, and ball mill for 8 hours.

(2)真空干燥:将球磨后的浆料,置于真空干燥箱中,进行干燥。设置干燥箱内的压力为15000Pa,加热温度为90℃,至浆料中无可见液体时,关闭加热功能,自然干燥3h。(2) Vacuum drying: the ball-milled slurry is placed in a vacuum drying oven for drying. Set the pressure in the drying box to 15000Pa, and the heating temperature to 90°C. When there is no visible liquid in the slurry, turn off the heating function and let it dry naturally for 3 hours.

(3)基体烧结成型:将干燥后的粉末,用120目的筛网过筛后,采用粉末压片机压制预成型。采用真空烧结炉,设置烧结温度为1380℃,压力为40MPa,烧结时间40min。烧结后的样品,用金相磨抛机将基体表面磨抛成镜面。对比(3) Matrix sintering and forming: the dried powder is sieved through a 120-mesh screen, and then pressed into a preform by a powder tablet press. A vacuum sintering furnace is used, the sintering temperature is set at 1380°C, the pressure is 40MPa, and the sintering time is 40min. After sintering the sample, use a metallographic grinding and polishing machine to grind and polish the surface of the substrate into a mirror surface. Compared

(4)基体预处理:将步骤(3)中的基体用无水乙醇超声清洗后,吹干。将基体浸没于碱溶液(铁氰化钾:氢氧化钾:水=1g:1g:10mL)处理10min,清洗,吹干。再将碱处理后的基体浸没于酸溶液(盐酸:双氧水=1mL:4mL)自然反应10s,清洗,吹干。用金刚石粉和丙三醇的混合溶液研磨,清洗,吹干。(4) Substrate pretreatment: After the substrate in step (3) is ultrasonically cleaned with absolute ethanol, it is blown dry. Submerge the substrate in alkaline solution (potassium ferricyanide:potassium hydroxide:water=1g:1g:10mL) for 10min, wash and dry. Then immerse the alkali-treated substrate in an acid solution (hydrochloric acid: hydrogen peroxide = 1 mL: 4 mL) to react naturally for 10 seconds, wash and dry. Grind with a mixed solution of diamond powder and glycerin, wash and dry.

(5)金刚石涂层沉积:采用热丝化学气相沉积方法,将步骤(4)中预处理后的基体,置于化学气相沉积设备中,待设备的真空室压力达到5Pa以下后,输入反应工作气体甲烷流量15sccm,氢气流量1000sccm,调节反应压力为3000Pa,涂层沉积时间为6h。(5) Diamond coating deposition: using the hot wire chemical vapor deposition method, place the pretreated substrate in step (4) in the chemical vapor deposition equipment, and input the reaction work after the vacuum chamber pressure of the equipment reaches below 5Pa. The gas methane flow rate is 15 sccm, the hydrogen gas flow rate is 1000 sccm, the reaction pressure is adjusted to 3000 Pa, and the coating deposition time is 6 hours.

利用显微硬度计分别检测实施例1中步骤(4)所制得的试样、实施例2中步骤(4)所制得的试样、对比例中步骤(3)所制得的试样,通过压痕载荷和压痕裂纹扩展长度计算得到三种情况下的断裂韧性数值分别为13.1±0.1MPa·m1/2,12.9±0.1MPa·m1/2和10.9±0.1MPa·m1/2。结果表明本发明的工艺方法,可提高硬质合金的韧性。Utilize microhardness tester to detect respectively the sample made by step (4) in embodiment 1, the sample made by step (4) in embodiment 2, the sample made by step (3) in the comparative example , calculated by indentation load and indentation crack growth length, the fracture toughness values in the three cases are 13.1±0.1MPa·m 1/2 , 12.9±0.1MPa·m 1/2 and 10.9±0.1MPa·m 1 /2 . The result shows that the process method of the present invention can improve the toughness of cemented carbide.

依据GB/T 230.1-2018《金属材料洛氏硬度试验第1部分:试验方法》,利用金刚石圆锥压头(锥角120°,顶部曲率半径0.2mm),采用980N试验力进行压痕试验。用扫描电子显微镜检测压痕形貌。利用上述方法分别检测普通硬质合金基体的金刚石涂层样品、实施例1和实施例2制备的金刚石涂层样品,压痕形貌分别如图1、图2和图3所示。可以看出图1中的样品表面的涂层脱落面积大于图2和图3中的样品表面。结果表明本发明方法制备的低钴含量石墨烯增强硬质合金基体表面的涂层附着强度高于普通较高钴含量的硬质合金。According to GB/T 230.1-2018 "Rockwell Hardness Test of Metallic Materials Part 1: Test Method", the indentation test is carried out with a diamond conical indenter (cone angle 120°, top curvature radius 0.2mm) and a test force of 980N. The indentation morphology was examined with a scanning electron microscope. The diamond-coated samples of ordinary cemented carbide substrates and the diamond-coated samples prepared in Example 1 and Example 2 were detected by the above method, and the indentation morphology is shown in Figure 1, Figure 2 and Figure 3, respectively. It can be seen that the coating peeling area of the sample surface in Fig. 1 is larger than that of the sample surfaces in Fig. 2 and Fig. 3 . The results show that the coating adhesion strength of the low-cobalt-content graphene reinforced cemented carbide substrate surface prepared by the method of the present invention is higher than that of ordinary cemented carbide with higher cobalt content.

Claims (10)

1. a kind of diamond coatings, the coating is using hard alloy as basis material depositing diamond film;
It is characterized in that, by mass percentage, the raw material components of hard alloy include: graphene 0.1~1%, cobalt 2~3%, carbon Change tungsten 97.9-96%.
2. a kind of preparation method of diamond coatings, comprising:
(1) by the graphene of dispersion, cobalt powder and tungsten carbide ball milling mixing, slurry is obtained, is dried in vacuo, sinter molding obtains To hard alloy substrate;
(2) by above-mentioned substrate pretreated, deposition of diamond coatings to get.
3. preparation method according to claim 2, which is characterized in that the graphene dispersed in the step (1) specifically: adopt It is to disperse solution with dehydrated alcohol, the proportion of dehydrated alcohol and graphene is 100mL:(0.1~0.5) g, utilize sonic oscillation point Day labor skill, wherein supersonic frequency is 40KHz;The duty ratio of ultrasound works time is 1:1;The time of sonic oscillation is 4~6h.
4. preparation method according to claim 2, which is characterized in that ball milling mixing specific process parameter in the step (1) Are as follows: for the abrading-ball used for the hard alloy WC-3wt.%Co ball of diameter 5mm, the revolving speed of ball mill is 300~500rpm, ball milling Time is 6~8h.
5. preparation method according to claim 2, which is characterized in that vacuum drying in the step (1) are as follows: drying process In, heating temperature is 90~100 DEG C, until in slurry without visible liquid when, stop heating, spontaneously dry 2~3h, dry overall process In, the holding indoor pressure of vacuum is 10000~15000Pa.
6. preparation method according to claim 2, which is characterized in that the temperature of sinter molding is 1380 in the step (1) DEG C, pressure 40MPa.
7. preparation method according to claim 2, which is characterized in that pretreatment in the step (2) specifically: soak matrix It not in alkaline solution treatment 10min, cleans, drying, then the matrix after alkali process is immersed in acid solution natural reaction 10s, clean, Drying;It is ground, is cleaned with the mixed solution of bortz powder and glycerine, drying;Wherein lye is the potassium ferricyanide: potassium hydroxide: Water=1g:1g:10mL;Acid solution is hydrochloric acid: hydrogen peroxide=1mL:4mL.
8. preparation method according to claim 2, which is characterized in that deposition in the step (2) specifically: use heated filament It learns vapor deposition method pretreated matrix is placed in chemical vapor depsotition equipment, the vacuum chamber pressure to equipment reaches After 5Pa or less, input reaction 10~20sccm of working gas methane flow, 1000~2000sccm of hydrogen flowing quantity adjust reaction Pressure is 2000~4000Pa, and coat deposition time is 6~10h.
9. a kind of diamond coatings of claim 2 the method preparation.
10. a kind of application of diamond coatings described in claim 1.
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