CN110345870B - A five-degree-of-freedom error measuring device for a precision linear displacement stage - Google Patents

Abstract

The invention discloses a five-degree-of-freedom error measuring device for a precision linear displacement stage, comprising a precise linear displacement platform, a five-degree-of-freedom error measuring unit (1) and a vertical reflector (2), the vertical reflector (2) being placed on the The five-degree-of-freedom error measuring unit (1) is in a mutually perpendicular depression; the five-degree-of-freedom error measuring unit (1) includes a three-degree-of-freedom error measuring unit one (101) and a three-degree-of-freedom error measuring unit two (102), so The three-degree-of-freedom error measuring unit one (101) and the three-degree-of-freedom error measuring unit two (102) are fixedly connected through a connector (103); the vertical reflector (2) includes a square box (201), and the square box The side of (201) is bonded with a plane mirror one (202) and a plane mirror two (203) that are perpendicular to each other; the five-degree-of-freedom error measuring unit (1) is fixedly connected to the sliding table of the precision linear displacement stage, The base of the precision linear displacement stage is fixedly connected with the vertical reflection mirror (2).

Description

A five-degree-of-freedom error measuring device for a precision linear displacement stage

technical field

The invention belongs to the field of precision measurement, in particular to a five-degree-of-freedom error measurement device of a precision linear displacement table.

Background technique

Most of the motion mechanisms of high-precision machine tools, CMMs, video cameras and other high-end precision equipment are composed of precision linear displacement stages. Due to the existence of error factors such as parts processing and assembly, there will be motion errors (yaw, pitch, roll, horizontal straightness error and vertical straightness error) during the movement of the precision linear stage. The above errors will be It directly affects the motion accuracy of the precision linear displacement stage, and further affects the accuracy of high-end precision equipment such as high-precision machine tools, CMMs, and imagers. At present, the motion error measurement of the precision linear stage is mostly measured by measuring instruments such as laser interferometer and laser autocollimator, and only 1~2 errors can be measured each time, which is expensive. Gao et al. proposed a 3-DOF angular motion error measurement method using diffraction gratings as reflective elements. Huang et al. proposed a 4-DOF motion error measurement method for a linear stage. Liu et al. used a combination of geometric optics and laser interferometer to build a 6-DOF error measurement system for a long linear stage. The above methods have the problem that it is difficult to integrate into the precision linear displacement stage. Therefore, there is an urgent need to propose a low-cost and easy-to-integrate 5-DOF real-time error measurement method on a precision linear stage.

SUMMARY OF THE INVENTION

The purpose of the present invention is to solve this problem, solve the technical problem that the prior art cannot be integrated into a precision linear displacement stage, and provide a five-degree-of-freedom error measuring device that is low-cost and easy to integrate into a precise linear displacement stage.

In order to realize the above-mentioned purpose of the invention, the technical scheme of the present invention is:

A five-degree-of-freedom error measurement device for a precision linear displacement stage, comprising a precise linear displacement platform, a five-degree-of-freedom error measurement unit 1 and a vertical reflector 2, wherein the vertical reflector 2 is placed in the five-degree-of-freedom error measurement unit. The recesses where the units 1 are perpendicular to each other; the five-degree-of-freedom error measuring unit 1 includes the three-degree-of-freedom error measuring unit one 101 and the three-degree-of-freedom error measuring unit two 102, and the three-degree-of-freedom error measuring unit one 101 and the three-degree-of-freedom error measurement unit 2 102 are fixedly connected to each other through a connector 103 in a mutually perpendicular manner; the vertical reflector 2 includes a square box 201, and the square box 201 is close to the side of the three-degree-of-freedom error measurement unit 1 101. A plane mirror 1 202 is bonded, the side of the square box 201 close to the three-degree-of-freedom error measurement unit 2 102 is bonded with a plane mirror 2 203, and the plane mirror 1 202 and the plane mirror 2 203 are perpendicular to each other The five-degree-of-freedom error measuring unit 1 is fixedly connected with the sliding table of the precision linear displacement stage, and the base of the precise linear displacement stage is fixedly connected with the vertical reflector 2, so as to realize the rolling and deflection of the precision linear displacement stage. Real-time measurement of the straightness error in the pendulum, pitch, horizontal direction and vertical direction.

Preferably, the connecting members 103 are two continuous vertically curved straight plates.

Preferably, the square box 201 has a chamfered box body and is made of invar material.

Preferably, the three-degree-of-freedom error measurement unit includes a laser module 4, a polarization beam splitter 5, a reflector 6, two detection modules 7 and 3 installed in the box, the polarization beam splitter 5 and the detection module 3 are arranged at the light entrance of the box in turn, the two sides of the polarizing beam splitter 5 are fixedly provided with a laser module 4 and a reflector 6, and between the laser module 4, the polarizing beam splitter 5 and the detection module 3 A detection module 7 is provided inside; the laser module 4, the polarization beam splitter 5 and the detection module 7 constitute a laser self-collimation optical path, which can respectively realize the angle error measurement of the precision linear displacement stage around the X axis and the measurement of the angle error around the Z axis. Angle error amount; the laser module 4, the mirror 6 and the detection module 3 constitute a laser triangulation optical path, which can realize the straightness error measurement of the precision linear displacement stage in the Y-axis direction; when the 3-degree-of-freedom error measurement unit is installed When in the XOZ plane, the angle error measurement of the precision linear stage around the Y axis and the straightness error measurement in the Z axis direction can be realized.

Compared with the prior art, the beneficial effects of the present invention are:

The materials and manufacturing device costs used by the five-degree-of-freedom error measuring device of the precision linear displacement stage of the present invention are far lower than those of traditional measuring instruments. Compared with traditional measuring instruments, the present invention is easy to integrate into high-end equipment such as precision machine tools and coordinate measuring machines, and can realize real-time measurement and real-time compensation of the five-degree-of-freedom error of the precision linear displacement table.

Description of drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description serve to explain the principles of the invention.

FIG. 1 is a schematic structural diagram of a five-degree-of-freedom error measuring device for a precision linear displacement stage of the present invention.

FIG. 2 is a schematic diagram of a three-degree-of-freedom error measuring device of the five-degree-of-freedom error measuring device of the precision linear displacement stage of the present invention.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.

As shown in Figures 1 and 2, a five-degree-of-freedom error measurement device for a precision linear displacement stage includes a precision linear displacement platform, a five-degree-of-freedom error measurement unit 1 and a vertical reflector 2, and the vertical reflector 2 is placed on five The sag where the error measuring units 1 are perpendicular to each other; the error measuring unit 1 with five degrees of freedom includes the error measuring unit 1 101 with three degrees of freedom and the error measuring unit 2 102 with three degrees of freedom. The measurement unit 1 101 and the three-degree-of-freedom error measurement unit 2 102 are fixedly connected in a mutually perpendicular manner through a connecting piece 103 ; the connecting piece 103 is two continuous vertically curved straight plates. The vertical reflector 2 includes a square box 201, and the square box 201 is a box with a chamfered corner and is made of invar. A plane mirror 1 202 is bonded on the side of the square box 201 close to the three-degree-of-freedom error measurement unit 1 101 , and a plane mirror 2 is bonded on the side of the square box 201 close to the three-degree-of-freedom error measurement unit 102 203, the plane mirror 1 202 and the plane mirror 2 203 are perpendicular to each other; when in use, the five-degree-of-freedom error measurement unit 1 is fixedly connected to the sliding table of the precision linear displacement stage, and the The base is fixedly connected with the vertical reflector 2 to realize the real-time measurement of the roll, yaw, pitch, horizontal straightness error and vertical straightness error of the precision linear stage.

The three-degree-of-freedom error measurement unit includes a laser module 4, a polarization beam splitter 5, a reflector 6, two detection modules 7 and 3 installed in the box, and the polarization beam splitter 5 and the detection module 3 are arranged in sequence. At the light entrance of the box, a laser module 4 and a reflector 6 are fixed on both sides of the polarizing beam splitter 5 , and a laser module 4 , the polarizing beam splitter 5 and the detection module 3 are arranged between the laser module 4 , the polarizing beam splitter 5 and the detection module 3 . The detection module 7; the laser module 4, the polarizing beam splitter 5 and the detection module 7 constitute a laser self-collimation optical path, which can respectively realize the angle error measurement of the precision linear displacement stage around the X axis and the angle error amount around the Z axis ; The laser module 4, the reflection mirror 6 and the detection module 3 constitute a laser triangulation optical path, which can realize the straightness error measurement of the precision linear displacement stage in the Y-axis direction; when the 3-degree-of-freedom error measurement unit is installed on the XOZ surface It can realize the angle error measurement of the precision linear stage around the Y-axis and the straightness error measurement in the Z-axis direction.

The above-described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

Claims (3)

1. a five-degree-of-freedom error measuring device of a precision linear displacement stage, comprising a precision linear displacement platform, a five-degree-of-freedom error measuring unit (1) and a vertical reflector (2), characterized in that the vertical reflector (2) ) is placed at the mutually perpendicular depression of the five-degree-of-freedom error measuring unit (1); the five-degree-of-freedom error measuring unit (1) includes a three-degree-of-freedom error measuring unit one (101) and a three-degree-of-freedom error measuring unit two (102). ), the three-degree-of-freedom error measuring unit one (101) and the three-degree-of-freedom error measuring unit two (102) are fixedly connected by connecting pieces (103) in a mutually perpendicular manner; the vertical reflector (2) includes a square box ( 201), a plane mirror one (202) is glued on the side of the square box (201) close to the three-degree-of-freedom error measuring unit one (101), and the square box (201) is close to the three-degree-of-freedom error measuring unit two A second plane mirror (203) is bonded on the side surface of (102), and the first plane mirror (202) and the second plane mirror (203) are perpendicular to each other; the five-degree-of-freedom error measurement unit (1) is connected to the precision The sliding table of the linear displacement stage is fixedly connected, and the base of the precision linear displacement stage is fixedly connected with the vertical reflector (2), so as to realize the roll, yaw, pitch, straightness error and vertical error of the precision linear displacement stage in the horizontal direction. Real-time measurement of straightness error in straight direction; The three-degree-of-freedom error measurement unit includes a laser module (4), a polarization beam splitter (5), a reflector (6), two detection modules (3) and (7) installed in the box, and the polarization The beam splitter (5) and the detection module (3) are sequentially arranged at the light entrance of the box body, and the two sides of the polarized beam splitter (5) are fixedly provided with a laser module (4) and a reflector (6), so A detection module (7) is arranged between the laser module (4), the polarization beam splitter (5) and the detection module (3); the laser module (4), the polarization beam splitter (5) and The detection module (7) constitutes a laser self-collimation optical path, which respectively realizes the measurement of the angle error of the precision linear displacement stage around the X axis and the angular error around the Z axis; the laser module (4) and the reflector (6) The laser triangulation optical path is formed with the detection module (3) to realize the straightness error measurement of the precise linear displacement stage in the Y-axis direction. 2 . The five-degree-of-freedom error measuring device for a precision linear displacement stage according to claim 1 , wherein the connecting member ( 103 ) is two continuous vertically curved straight plates. 3 . 3 . The five-degree-of-freedom error measuring device for a precision linear displacement stage according to claim 1 , wherein the square box ( 201 ) is a box with chamfered corners and is made of invar material. 4 .

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