CN110299589A - Frequency division and frequency multiplication generation method and device - Google Patents
Frequency division and frequency multiplication generation method and device Download PDFInfo
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Abstract
本申请公开了一种分频与倍频产生方法和装置,解决了分频与倍频装置结构复杂、成本高、精度和集成度低的问题。前端激光器、相位区、后端激光器依次集成在同一衬底上;前端激光器、后端激光器相互注入;两个激光器的工作波长不同;所述相位区通过电极调谐两个激光器之间的耦合强度和耦合相位,改变两个激光器的光注入比;两个激光器的驱动信号为调制信号,通过调节调制信号的频率,实现微波的分频或倍频;所述后端激光器的输出光经过所述单模光纤引出,经过所述光电探测器转换为调制信号,通过所述射频电缆输出。本发明实现简单,产生的调制信号纯度高、精确性强、结构紧凑、性能稳定、成本低。
The present application discloses a method and device for generating frequency division and multiplication, which solves the problems of complex structure, high cost, low precision and low integration of the frequency division and multiplication device. The front-end laser, the phase region, and the back-end laser are sequentially integrated on the same substrate; the front-end laser and the back-end laser are injected into each other; the working wavelengths of the two lasers are different; the phase region tunes the coupling strength and The coupling phase changes the light injection ratio of the two lasers; the driving signal of the two lasers is a modulation signal, and by adjusting the frequency of the modulation signal, the frequency division or frequency multiplication of the microwave is realized; the output light of the back-end laser passes through the single The mode fiber is led out, converted into a modulated signal by the photodetector, and output through the radio frequency cable. The invention is simple to implement, and the generated modulation signal has high purity, high precision, compact structure, stable performance and low cost.
Description
技术领域technical field
本申请涉及光电子领域,尤其涉及一种分频与倍频产生方法和装置。The present application relates to the field of optoelectronics, in particular to a frequency division and frequency multiplication generation method and device.
背景技术Background technique
光微波收发系统是微波通信、电子对抗、雷达、遥控、遥感以及许多测量系统中至关重要的部件。作为收发系统的核心,倍频与分频产生方法和装置对系统性能起着关键性的作用。由于“电子瓶颈”限制,传统电域方法实现微波倍频与分频通常存在系统结构复杂、成本高、稳定性差等缺点;此外,产生的调制信号频率(低于数GHz)较低、相位噪声较差,尤其是,频率每放大一倍相位噪声劣化约6dB;利用光学方法实现调制信号的分频与倍频也是一种常用的方法,其中尤以基于分立器件的光注入锁定半导体激光器系统为主,不过,偏振控制繁琐、结构复杂、体积大、功耗高、耦合损耗大。如果用一般的单片集成激光器来实现,两个激光器集成在同一芯片上,共用同一波导、同一温度控制器,则无法通过温度控制实现两激光器波长失谐。The optical microwave transceiver system is a crucial component in microwave communication, electronic countermeasures, radar, remote control, remote sensing and many measurement systems. As the core of the transceiver system, the frequency multiplication and frequency division generation method and device play a key role in system performance. Due to the limitation of "electronic bottleneck", the traditional electric domain method to achieve microwave frequency multiplication and frequency division usually has disadvantages such as complex system structure, high cost, and poor stability; in addition, the generated modulation signal frequency (below a few GHz) is low Poor, especially, the phase noise degradation is about 6dB every time the frequency is doubled; the use of optical methods to achieve frequency division and frequency multiplication of modulated signals is also a common method, especially the optical injection-locked semiconductor laser system based on discrete devices. However, the polarization control is complicated, the structure is complex, the volume is large, the power consumption is high, and the coupling loss is large. If it is implemented with a general monolithic integrated laser, the two lasers are integrated on the same chip, share the same waveguide, and the same temperature controller, and the wavelength detuning of the two lasers cannot be achieved through temperature control.
发明内容Contents of the invention
本申请实施例提供一种分频与倍频产生方法和装置,解决了分频与倍频装置结构复杂、成本高、精度和集成度低的问题。Embodiments of the present application provide a method and device for generating frequency division and multiplication, which solve the problems of complex structure, high cost, and low precision and integration of the frequency division and multiplication device.
一方面,本申请实施例提出一种分频与倍频产生装置,包括前端激光器、相位区、后端激光器、单模光纤、光电探测器、射频电缆。On the one hand, an embodiment of the present application proposes a frequency division and frequency multiplication generating device, including a front-end laser, a phase zone, a back-end laser, a single-mode optical fiber, a photodetector, and a radio frequency cable.
所述前端激光器、相位区、后端激光器依次集成在同一衬底上。所述前端激光器、后端激光器通过相位区连接,实现相互注入;所述前端激光器和所述后端激光器的工作波长不同;所述相位区为有源波导构成,相位区长度为200-300μm,通过电极调谐所述前端激光器、后端激光器之间的耦合强度和耦合相位,改变所述前端激光器与所述后端激光器的光注入比;所述前端激光器或后端激光器的驱动信号为调制信号,通过调节调制信号的频率,实现微波的分频或倍频;所述后端激光器的输出光经过所述单模光纤引出,经过所述光电探测器转换为微波信号,通过所述射频电缆输出。The front-end laser, the phase region, and the back-end laser are sequentially integrated on the same substrate. The front-end laser and the back-end laser are connected through a phase zone to realize mutual injection; the working wavelengths of the front-end laser and the back-end laser are different; the phase zone is composed of an active waveguide, and the length of the phase zone is 200-300 μm. Adjust the coupling strength and coupling phase between the front-end laser and the back-end laser through the electrodes to change the light injection ratio between the front-end laser and the back-end laser; the driving signal of the front-end laser or the back-end laser is a modulation signal , by adjusting the frequency of the modulation signal, microwave frequency division or frequency multiplication is realized; the output light of the back-end laser is drawn through the single-mode optical fiber, converted into a microwave signal by the photodetector, and output through the radio frequency cable .
优选地,所述前端激光器和所述后端激光器是用重构-等效啁啾技术制成的DFB激光器。Preferably, the front-end laser and the back-end laser are DFB lasers made by reconstruction-equivalent chirp technology.
优选地,所述前端激光器、相位区、后端激光器具有相同的外延材料及结构;所述材料外延结构通过传统二阶金属有机化合物化学气相沉淀法对材料外延生长得到,所述材料外延结构包括n型衬底、n型缓冲层、n型限制层、应变多量子阱层、p型限制层、光栅材料层、p型熔覆层、p型欧姆接触层、p型波导层、绝缘层和正负电极。Preferably, the front-end laser, the phase region, and the back-end laser have the same epitaxial material and structure; the material epitaxial structure is obtained by the traditional second-order metal-organic compound chemical vapor deposition method for material epitaxial growth, and the material epitaxial structure includes n-type substrate, n-type buffer layer, n-type confinement layer, strained multi-quantum well layer, p-type confinement layer, grating material layer, p-type cladding layer, p-type ohmic contact layer, p-type waveguide layer, insulating layer and Positive and negative electrodes.
优选地,所述前端激光器和所述相位区之间为第一电隔离区,所述相位区和所述后端激光器之间为第二电隔离区。Preferably, there is a first electrical isolation area between the front-end laser and the phase area, and a second electrical isolation area between the phase area and the back-end laser.
优选地,所述第一电隔离区、第二电隔离区、前端激光器、相位区、后端激光器共用同一脊波导结构;Preferably, the first electrical isolation region, the second electrical isolation region, the front-end laser, the phase region, and the rear-end laser share the same ridge waveguide structure;
优选地,所述第一电隔离区和所述第二电隔离区是利用电子束刻蚀技术刻蚀掉光栅结构和欧姆接触层制成。Preferably, the first electrical isolation region and the second electrical isolation region are formed by etching away the grating structure and the ohmic contact layer by electron beam etching technology.
优选地,所述第一电隔离区和所述第二电隔离区的长度均在30~80μm范围内。Preferably, the lengths of the first electrical isolation region and the second electrical isolation region are both in the range of 30-80 μm.
优选地,所述前端激光器、相位区、后端激光器所采用的外延材料是III-V族化合物半导体材料、II-VI族化合物半导体材料、IV-VI族化合物半导体材料、掺铝半导体材料中至少一种。Preferably, the epitaxial materials used in the front-end laser, the phase region, and the back-end laser are at least A sort of.
优选地,所述前端激光器和所述后端激光器的波长间隔<0.5nm。Preferably, the wavelength interval between the front-end laser and the back-end laser is <0.5nm.
另一方面,本申请还提出一种分频与倍频产生方法,用于本申请任意一项实施例所所述装置,包含以下步骤:On the other hand, the present application also proposes a frequency division and multiplication generation method, which is used in the device described in any embodiment of the present application, including the following steps:
调节所述前端激光器和/或所述后端激光器的直流偏置电流,改变所述前端激光器和所述后端激光器之间的频率间隔以及光注入比,使所述装置工作在双周期振荡状态;Adjusting the DC bias current of the front-end laser and/or the back-end laser, changing the frequency interval and light injection ratio between the front-end laser and the back-end laser, so that the device works in a double-cycle oscillation state ;
在双周期振荡状态下,使所述前端激光器和所述后端激光器共同作用产生的振荡光信号相互锁定;In the double-period oscillation state, the oscillating optical signals generated by the joint action of the front-end laser and the back-end laser are locked to each other;
改变所述调制信号的频率,调制信号直接调制所述前端激光器或所述后端激光器,当频率源注入的调制信号频率逐渐靠近双周期振荡频率时,实现微波的倍频;逐渐靠近失谐频率时,实现微波的分频。Changing the frequency of the modulation signal, the modulation signal directly modulates the front-end laser or the back-end laser, and when the frequency of the modulation signal injected by the frequency source gradually approaches the double-cycle oscillation frequency, microwave frequency doubling is realized; gradually approaching the detuning frequency , realize the frequency division of microwave.
本申请实施例采用的上述至少一个技术方案能够达到以下有益效果:分频与倍频产生装置实现方法简单,产生的微波信号谱纯度高、精确性强、结构紧凑、性能稳定、成本低,其中单片集成互注入激光器是低成本实现的。克服了传统分立器件多、注入系统体积大、结构复杂、稳定性差等缺点;提高了两个激光器失谐频率的控制精度、提高单片集成激光器的可生产性与成品率、降低了制造难度和制造成本。以较低成本、低质量的注入射频信号调制所述前端激光器和所述后端激光器实现高质量的分频与倍频信号产生。The above at least one technical solution adopted in the embodiment of the present application can achieve the following beneficial effects: the implementation method of the frequency division and frequency multiplication generation device is simple, the generated microwave signal spectrum has high purity, high accuracy, compact structure, stable performance, and low cost, among which Monolithically integrated inter-injection lasers are realized at low cost. It overcomes the shortcomings of traditional discrete devices, large volume of injection system, complex structure, and poor stability; it improves the control accuracy of the detuning frequency of the two lasers, improves the manufacturability and yield of monolithic integrated lasers, and reduces the manufacturing difficulty and manufacturing cost. The front-end laser and the back-end laser are modulated with low-cost and low-quality injected radio frequency signals to realize high-quality frequency division and frequency multiplication signal generation.
附图说明Description of drawings
此处所说明的附图用来提供对本申请的进一步理解,构成本申请的一部分,本申请的示意性实施例及其说明用于解释本申请,并不构成对本申请的不当限定。在附图中:The drawings described here are used to provide a further understanding of the application and constitute a part of the application. The schematic embodiments and descriptions of the application are used to explain the application and do not constitute an improper limitation to the application. In the attached picture:
图1为基于单片集成互注入激光器的分频与倍频产生装置结构示意图;Figure 1 is a schematic structural diagram of a frequency division and frequency multiplication generation device based on a monolithic integrated inter-injection laser;
图2为单片集成激光器结构示意图;Fig. 2 is a schematic structural diagram of a monolithic integrated laser;
图3为双周期振荡状态下的输出光谱示意图;Fig. 3 is a schematic diagram of the output spectrum in the double-period oscillation state;
图4为本发明分频与倍频产生方法的实际效果图;Fig. 4 is the actual effect diagram of frequency division and frequency multiplication generation method of the present invention;
图5为本发明分频与倍频产生方法的控制流程图。FIG. 5 is a control flow chart of the frequency division and multiplication generation method of the present invention.
具体实施方式Detailed ways
为使本申请的目的、技术方案和优点更加清楚,下面将结合本申请具体实施例及相应的附图对本申请技术方案进行清楚、完整地描述。显然,所描述的实施例仅是本申请一部分实施例,而不是全部的实施例。基于本申请中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本申请保护的范围。In order to make the purpose, technical solution and advantages of the present application clearer, the technical solution of the present application will be clearly and completely described below in conjunction with specific embodiments of the present application and corresponding drawings. Apparently, the described embodiments are only some of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.
以下结合附图,详细说明本申请各实施例提供的技术方案。The technical solutions provided by various embodiments of the present application will be described in detail below in conjunction with the accompanying drawings.
图1为基于单片集成互注入激光器的分频与倍频产生装置结构示意图。Fig. 1 is a schematic structural diagram of a frequency division and frequency multiplication generating device based on a monolithic integrated inter-injection laser.
本申请实施例提出一种分频与倍频产生装置,包括前端激光器1、相位区2、后端激光器3、单模光纤4、光电探测器5、射频电缆6。The embodiment of the present application proposes a frequency division and frequency multiplication generating device, including a front-end laser 1 , a phase zone 2 , a back-end laser 3 , a single-mode optical fiber 4 , a photodetector 5 , and a radio frequency cable 6 .
所述前端激光器、相位区、后端激光器依次集成在同一衬底上。所述前端激光器、后端激光器通过相位区连接,实现相互注入;所述前端激光器和所述后端激光器的工作波长不同;所述相位区为有源波导构成,相位区长度为200-300μm,通过电极调谐所述前端激光器、后端激光器之间的耦合强度和耦合相位,改变所述前端激光器与所述后端激光器的光注入比。所述前端激光器或后端激光器的驱动信号为调制信号,通过调节调制信号的频率,实现微波的分频或倍频。所述后端激光器的输出光经过所述单模光纤引出,经过所述光电探测器转换为微波信号,通过所述射频电缆输出。The front-end laser, the phase region, and the back-end laser are sequentially integrated on the same substrate. The front-end laser and the back-end laser are connected through a phase zone to realize mutual injection; the working wavelengths of the front-end laser and the back-end laser are different; the phase zone is composed of an active waveguide, and the length of the phase zone is 200-300 μm. The coupling strength and coupling phase between the front-end laser and the back-end laser are tuned by the electrodes to change the light injection ratio of the front-end laser and the back-end laser. The driving signal of the front-end laser or the back-end laser is a modulation signal, and by adjusting the frequency of the modulation signal, frequency division or multiplication of the microwave is realized. The output light of the back-end laser is led out through the single-mode optical fiber, converted into a microwave signal by the photodetector, and output through the radio frequency cable.
在现有技术中,集成激光器制作是有源波导,无源波导结合,制作过程复杂。本申请实施例的相位区只使用有源波导,避免了集成激光器制作过程中复杂的有源无源波导结合。In the prior art, the fabrication of integrated lasers is a combination of active waveguides and passive waveguides, and the fabrication process is complicated. The phase region of the embodiment of the present application only uses active waveguides, which avoids the complicated combination of active and passive waveguides in the manufacturing process of integrated lasers.
所述前端激光器的光通过相位区注入到后端激光器中,后端激光器的光通过相位区注入到前端激光器中,两个激光器实现相互注入,从而改变两个激光器的物理特性(调制带宽增大、阈值电流降低、电光转换效率增强)。通过调谐相位区的电流可改变相位区中载流子的浓度,从而实现折射率的改变,促使光在相位区中传播的光程的变化,从而实现对前端激光器与后端激光器激射出的光的相位以及强度的控制。The light of the front-end laser is injected into the back-end laser through the phase region, and the light of the back-end laser is injected into the front-end laser through the phase region, and the two lasers realize mutual injection, thereby changing the physical characteristics of the two lasers (the modulation bandwidth increases , threshold current reduction, electro-optical conversion efficiency enhancement). By tuning the current in the phase region, the concentration of carriers in the phase region can be changed, thereby changing the refractive index and promoting the change of the optical path of light propagating in the phase region, thereby realizing the laser excitation of the front-end laser and the back-end laser. phase and intensity controls.
另外,所述前端激光器以及所述后端激光器光栅结构中在其中央各增加了一段pi相移,可以有效的提高前端激光器与后端激光器的单模性能。制作过程中,使前端激光器自由振荡状态下激射的光波长小于后端激光器自由振荡状态下激射的光波长,从而更有利于单片集成激光器实现注入锁定。In addition, a section of pi phase shift is added in the center of the grating structure of the front-end laser and the back-end laser, which can effectively improve the single-mode performance of the front-end laser and the back-end laser. During the manufacturing process, the wavelength of light emitted by the front-end laser in the free-oscillation state is smaller than that of the back-end laser in the free-oscillation state, which is more conducive to the injection locking of the monolithic integrated laser.
在本申请的一个实施例中,单片集成激光器通过标准蝶形封装,共有7个管脚,分别控制着集成激光器的温度以及两个激光器区和相位区的电流,封装过程中,对单片集成激光器的芯片进行解离,并分别在集成激光器的两侧涂覆高反射膜以及抗反射膜,从而将更多的光反馈到后端激光器一侧,提高单片集成激光器输出光的功率,本集成激光器中,输出的光最终将从后端激光器口输出。In one embodiment of the present application, the monolithic integrated laser is packaged in a standard butterfly shape, with a total of 7 pins, which respectively control the temperature of the integrated laser and the currents of the two laser regions and the phase region. During the packaging process, the monolithic The chip of the integrated laser is dissociated, and the two sides of the integrated laser are coated with high-reflection film and anti-reflection film, so that more light can be fed back to the side of the back-end laser, and the power of the output light of the single-chip integrated laser can be increased. In this integrated laser, the output light will finally be output from the back-end laser port.
如图1所示,外部注入的调制信号71,单片集成的前端激光器1,相位区2,单片集成的后端激光器3,外部注入的调制信号72,单模光纤4,光电探测器5,射频线缆6。上述配置中,单片集成的前端激光器、后端激光器以及位于两个激光器之间的相位区构成了单片集成激光器的主体结构。As shown in Fig. 1, externally injected modulation signal 71, monolithically integrated front-end laser 1, phase zone 2, monolithically integrated back-end laser 3, externally injected modulated signal 72, single-mode fiber 4, photodetector 5 , RF cable 6. In the above configuration, the monolithically integrated front-end laser, the back-end laser and the phase region between the two lasers constitute the main structure of the monolithically integrated laser.
需要说明的是,为了使本发明所述装置能够工作在双周期振荡状态,所述前端激光器和所述后端激光器的波长间隔<0.5nm。本申请文件所述“双周期振荡状态”,是指所述前端激光器与所述后端激光器在相互光注入条件下联合进入的一种振荡状态,产生的双周期振荡光信号从光谱上看类似于在两个激光器的主振荡光波长上进行频率调制,且调制频率为双周期振荡频率。一般地,通过光电探测器拍频所产生的调制信号包含所述前端激光器与所述后端激光器失谐频率分量以及其对应的次谐波分量(或称双周期振荡频率分量),具有大带宽调谐范围,不过由于实现机理为注入锁定激光器的非线性效应,拍频产生的调制信号质量较差。It should be noted that, in order to enable the device of the present invention to work in a double-period oscillation state, the wavelength interval between the front-end laser and the back-end laser is <0.5 nm. The "double-period oscillation state" mentioned in this application document refers to an oscillation state in which the front-end laser and the back-end laser jointly enter under the condition of mutual optical injection, and the double-period oscillation optical signal generated is similar in spectrum to The frequency modulation is carried out on the main oscillation light wavelengths of the two lasers, and the modulation frequency is a double-period oscillation frequency. Generally, the modulation signal generated by the beat frequency of the photodetector contains the detuning frequency component of the front-end laser and the back-end laser and its corresponding sub-harmonic component (or double-period oscillation frequency component), which has a large bandwidth Tuning range, but due to the nonlinear effect of the injection-locked laser, the quality of the modulation signal generated by the beat frequency is poor.
还需说明的是,调制信号71和72可以通过射频口同时分别注入前端激光器或后端激光器,也可以只将71注入前端激光器或将72注入后端激光器。若同时注入前端激光器和后端激光器,则需要注入的调制信号71和72的频率一致。It should also be noted that the modulation signals 71 and 72 can be respectively injected into the front-end laser or the back-end laser through the radio frequency port, or only 71 can be injected into the front-end laser or 72 can be injected into the back-end laser. If the front-end laser and the back-end laser are injected at the same time, the frequency of the injected modulation signals 71 and 72 needs to be the same.
图2为单片集成激光器结构示意图。Figure 2 is a schematic diagram of the monolithic integrated laser structure.
所述前端激光器、相位区、后端激光器共用同一脊波导结构。所述前端激光器1、相位区2、后端激光器3具有相同的外延材料及结构。所述材料外延结构通过传统二阶金属有机化合物化学气相沉淀法对材料外延生长得到,所述材料外延结构包括n型衬底、n型缓冲层、n型限制层、应变多量子阱层、p型限制层、光栅材料层、p型熔覆层、p型欧姆接触层、p型波导层、绝缘层和正负电极。The front-end laser, the phase region, and the back-end laser share the same ridge waveguide structure. The front-end laser 1 , phase region 2 and back-end laser 3 have the same epitaxial material and structure. The epitaxial structure of the material is obtained by the epitaxial growth of the material by the traditional second-order metal organic compound chemical vapor deposition method, and the epitaxial structure of the material includes an n-type substrate, an n-type buffer layer, an n-type confinement layer, a strained multiple quantum well layer, p Type confinement layer, grating material layer, p-type cladding layer, p-type ohmic contact layer, p-type waveguide layer, insulating layer and positive and negative electrodes.
例如,所述前端激光器和所述后端激光器是用重构-等效啁啾技术制成的DFB激光器。所述前端激光器和所述相位区之间为第一电隔离区8,所述相位区和所述后端激光器之间为第二电隔离区9。所述第一电隔离区、第二电隔离区、前端激光器、相位区、后端激光器共用同一脊波导结构。所述第一电隔离区和所述第二电隔离区是利用电子束刻蚀技术刻蚀掉光栅结构和欧姆接触层制成。For example, the front-end laser and the back-end laser are DFB lasers made by reconstruction-equivalent chirp technology. Between the front-end laser and the phase region is a first electrical isolation region 8 , and between the phase region and the back-end laser is a second electrical isolation region 9 . The first electrical isolation region, the second electrical isolation region, the front-end laser, the phase region, and the rear-end laser share the same ridge waveguide structure. The first electrical isolation region and the second electrical isolation region are formed by etching away the grating structure and the ohmic contact layer by electron beam etching technology.
需要说明的是,所述第一电隔离区和所述第二电隔离区的长度均在30~80μm范围内。长度小于30μm,会使电隔离区防止前端激光器与相位区,相位区与后端激光器的电极互相干扰。It should be noted that the lengths of the first electrical isolation region and the second electrical isolation region are both in the range of 30-80 μm. If the length is less than 30 μm, the electrical isolation region will prevent the electrodes of the front-end laser from interfering with the phase region, and the phase region from interfering with the electrodes of the back-end laser.
单片集成三段式激光器在材料结构上包括:n型衬底10;n型缓冲层11;n型限制层12;应变多量子阱层13;p型限制层14;光栅材料层15;p型熔覆层16;p型高掺杂欧姆接触层17;SiO2绝缘层18;前端激光器正电极19;相位区正电极20;后端激光器正电极21;负电极22。The monolithic integrated three-segment laser includes: n-type substrate 10; n-type buffer layer 11; n-type confinement layer 12; strained multiple quantum well layer 13; p-type confinement layer 14; grating material layer 15; Type cladding layer 16; p-type highly doped ohmic contact layer 17; SiO 2 insulating layer 18; front-end laser positive electrode 19; phase region positive electrode 20; back-end laser positive electrode 21; negative electrode 22.
需要说明的是,本申请任意一项实施例所述的分频与倍频产生装置中,所述前端激光器、相位区、后端激光器所采用的外延材料是III-V族化合物半导体材料、II-VI族化合物半导体材料、IV-VI族化合物半导体材料、掺铝半导体材料中至少一种。It should be noted that, in the frequency division and frequency multiplication generation device described in any embodiment of the present application, the epitaxial materials used in the front-end laser, phase region, and back-end laser are III-V compound semiconductor materials, II - At least one of Group VI compound semiconductor materials, Group IV-VI compound semiconductor materials, and Al-doped semiconductor materials.
图3为集成激光器双周期振荡状态典型光谱示意图。Fig. 3 is a schematic diagram of a typical spectrum of the dual-period oscillation state of the integrated laser.
fm为所述前端激光器的主振荡光模式,fs为所述后端激光器的主振荡光模式,所述前端激光器与所述后端激光器的频率差(或称失谐频率)为fr;单片集成互注入激光器在双周期振荡状态下,产生的振荡光信号类似于在所述前端激光器与所述后端激光器的主振荡模式处进行调制信号频率调制产生的多级光边带,且调制频率为双周期振荡频率为f0(f0=0.5×fr)。优选地,所述分频与倍频产生装置中,注入到所述前端激光器或所述后端激光器的调制信号的频率为失谐频率或双周期振荡频率,从而实现双周期振荡状态下各光波信号的注入锁定,通过光电探测器拍频得到高质量的分频与倍频信号。f m is the main oscillating light mode of the front-end laser, f s is the main oscillating light mode of the back-end laser, and the frequency difference (or detuning frequency) between the front-end laser and the back-end laser is f r ; The monolithic integrated inter-injection laser generates an oscillating optical signal similar to the multi-level optical sidebands generated by frequency modulation of the modulation signal at the main oscillation mode of the front-end laser and the back-end laser in the double-period oscillation state, And the modulation frequency is a double-period oscillation frequency f 0 (f 0 =0.5×f r ). Preferably, in the frequency division and frequency multiplication generating device, the frequency of the modulation signal injected into the front-end laser or the back-end laser is a detuning frequency or a double-cycle oscillation frequency, so that each light wave in a double-cycle oscillation state Signal injection locking, high-quality frequency division and frequency multiplication signals are obtained through the beating frequency of the photodetector.
图4为本发明分频与倍频产生方法的实际效果图。Fig. 4 is an actual effect diagram of the frequency division and frequency multiplication generation method of the present invention.
所述前端激光器或后端激光器的驱动信号为调制信号,通过调节调制信号的频率,使注入到所述前端激光器或所述后端激光器的调制信号的频率为失谐频率fr时,经过分频与倍频装置输出频率为双周期振荡频率f0的调制信号,实现微波分频;使注入到所述前端激光器或所述后端激光器的调制信号的频率为双周期振荡频率f0时,经过分频与倍频装置输出频率为失谐频率的调制信号fr,实现微波倍频。The driving signal of the front-end laser or the back-end laser is a modulation signal, and when the frequency of the modulation signal injected into the front-end laser or the back-end laser is the detuning frequency f r by adjusting the frequency of the modulation signal, after the division The output frequency of the frequency and frequency multiplication device is a modulation signal with a double-period oscillation frequency f 0 to realize microwave frequency division; when the frequency of the modulation signal injected into the front-end laser or the back-end laser is a double-cycle oscillation frequency f 0 , The frequency division and frequency multiplication device outputs the modulated signal f r at the detuned frequency to realize microwave frequency multiplication.
需要说明的是,调制信号可以通过射频口注入前端激光器和或后端激光器。一次只需注入前端激光器或后端激光器中的一个即可,若同时注入前端激光器和后端激光器,则需要注入的调制信号的频率一致。It should be noted that the modulation signal can be injected into the front-end laser and or the back-end laser through the radio frequency port. Only one of the front-end laser or the back-end laser needs to be injected at a time. If the front-end laser and the back-end laser are injected at the same time, the frequency of the injected modulation signal needs to be the same.
图5为本发明分频与倍频产生方法的控制流程图。用于本申请任意一项实施例所述所装置,包含以下步骤:FIG. 5 is a control flow chart of the frequency division and multiplication generation method of the present invention. The device used in any one of the embodiments of the present application includes the following steps:
步骤101、调节所述前端激光器和/或所述后端激光器的直流偏置电流,改变所述前端激光器和所述后端激光器之间的频率间隔以及光注入比,使所述装置工作在双周期振荡状态;Step 101, adjusting the DC bias current of the front-end laser and/or the back-end laser, changing the frequency interval and light injection ratio between the front-end laser and the back-end laser, so that the device works at double Periodic oscillation state;
在步骤101中,采用重构-等效啁啾技术来设计制造所述前端激光器与所述后端激光器,便于实现单片集成激光器工作波长的精确调控;此外,在具体实施中还需要仔细调谐位于两个激光器区之间的相位区偏置电流的大小,起到进一步精细调控所述前端激光器与所述后端激光器之间的失谐频率效果。In step 101, the front-end laser and the back-end laser are designed and manufactured by using reconstruction-equivalent chirp technology, which facilitates the precise regulation of the operating wavelength of the monolithic integrated laser; in addition, careful tuning is required in the specific implementation The magnitude of the bias current in the phase region between the two laser regions has the effect of further fine-tuning the detuning frequency between the front-end laser and the back-end laser.
步骤102、在双周期振荡状态下,改变所述调制信号的频率,使所述前端激光器和所述后端激光器共同作用产生的振荡光信号相互锁定;用调制信号直接调制所述前端激光器和或所述后端激光器,当频率源注入的调制信号频率逐渐靠近双周期振荡频率时,实现微波的倍频;逐渐靠近失谐频率时,实现微波的分频。Step 102. In the double-period oscillation state, change the frequency of the modulation signal so that the oscillating optical signals generated by the joint action of the front-end laser and the back-end laser are locked to each other; use the modulation signal to directly modulate the front-end laser and or The back-end laser implements microwave frequency multiplication when the frequency of the modulation signal injected by the frequency source is gradually approaching the double-period oscillation frequency; and realizes microwave frequency division when gradually approaching the detuning frequency.
例如,所述调制信号,可加载在前端激光器上,也可加载在后端激光器上。For example, the modulation signal can be loaded on the front-end laser or on the back-end laser.
需要说明的是,在本申请中:用于直接调制到单片集成激光器上的所述调制信号,其调制频率为所述前端激光器与所述后端激光器的失谐频率或者双周期振荡频率,所述双周期振荡频率为所述前端激光器与所述后端激光器失谐频率的一半。It should be noted that, in this application: the modulation signal used for direct modulation to the monolithic integrated laser, its modulation frequency is the detuning frequency or double-cycle oscillation frequency of the front-end laser and the back-end laser, The double-period oscillation frequency is half of the detuning frequency of the front-end laser and the back-end laser.
本发明提供了一种结构紧凑、性能稳定的分频与倍频产生装置及其实现方法,并且所用到的单片集成激光器是低成本实现的。本发明用单片集成激光器方式来实现DFB激光器的双周期振荡,克服传统分立器件多、注入系统体积大、结构复杂、稳定性差等缺点。The invention provides a frequency division and frequency multiplication generating device with compact structure and stable performance and its realization method, and the used monolithic integrated laser is realized at low cost. The invention realizes the double-period oscillation of the DFB laser by means of a monolithic integrated laser, and overcomes the traditional disadvantages of many discrete devices, large volume of injection system, complex structure, poor stability and the like.
在本发明的实施例中,利用重构-等效啁啾技术制作单片集成DFB激光器的光栅,可以通过控制μm量级的采样光栅周期来精确控制两个激光器的波长,提高了失谐频率的控制精度,从而提高单片集成激光器双周期振荡状态的可生产性与成品率,降低了单片集成激光器的制造难度和制造成本。In the embodiment of the present invention, the grating of the monolithic integrated DFB laser is manufactured by using the reconstruction-equivalent chirp technology, and the wavelength of the two lasers can be precisely controlled by controlling the sampling grating period of the μm order, and the detuning frequency is improved. The control precision of the monolithic integrated laser is improved, thereby improving the manufacturability and yield of the double-period oscillation state of the monolithic integrated laser, and reducing the manufacturing difficulty and manufacturing cost of the monolithic integrated laser.
还需要说明的是,术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含,从而使得包括一系列要素的过程、方法、商品或者设备不仅包括那些要素,而且还包括没有明确列出的其他要素,或者是还包括为这种过程、方法、商品或者设备所固有的要素。在没有更多限制的情况下,由语句“包括一个……”限定的要素,并不排除在包括所述要素的过程、方法、商品或者设备中还存在另外的相同要素。It should also be noted that the term "comprises", "comprises" or any other variation thereof is intended to cover a non-exclusive inclusion such that a process, method, article, or apparatus comprising a set of elements includes not only those elements, but also includes Other elements not expressly listed, or elements inherent in the process, method, commodity, or apparatus are also included. Without further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of additional identical elements in the process, method, article or apparatus comprising said element.
以上所述仅为本申请的实施例而已,并不用于限制本申请。对于本领域技术人员来说,本申请可以有各种更改和变化。凡在本申请的精神和原理之内所作的任何修改、等同替换、改进等,均应包含在本申请的权利要求范围之内。The above descriptions are only examples of the present application, and are not intended to limit the present application. For those skilled in the art, various modifications and changes may occur in this application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included within the scope of the claims of the present application.
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CN111007422A (en) * | 2019-12-18 | 2020-04-14 | 青岛航天半导体研究所有限公司 | Method for manufacturing highly integrated electronic frequency divider |
CN111007422B (en) * | 2019-12-18 | 2022-08-05 | 青岛航天半导体研究所有限公司 | Method for manufacturing highly integrated electronic frequency divider |
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