CN110132993B - Device and method for rapidly detecting node defect of optical film - Google Patents
Device and method for rapidly detecting node defect of optical film Download PDFInfo
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- 230000007547 defect Effects 0.000 title claims abstract description 53
- 239000012788 optical film Substances 0.000 title claims abstract description 28
- 238000000034 method Methods 0.000 title claims abstract description 17
- 238000003384 imaging method Methods 0.000 claims abstract description 94
- 238000004458 analytical method Methods 0.000 claims abstract description 8
- 238000001514 detection method Methods 0.000 claims description 10
- 238000012545 processing Methods 0.000 claims description 8
- 238000005516 engineering process Methods 0.000 claims description 6
- 206010028980 Neoplasm Diseases 0.000 claims description 2
- 238000012031 short term test Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 abstract description 14
- 239000010408 film Substances 0.000 abstract description 9
- 238000012360 testing method Methods 0.000 description 9
- 238000004630 atomic force microscopy Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
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- 238000000149 argon plasma sintering Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000000386 microscopy Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000004626 scanning electron microscopy Methods 0.000 description 2
- 238000000204 total internal reflection microscopy Methods 0.000 description 2
- 238000013519 translation Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
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- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
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Abstract
The invention discloses a device for rapidly detecting an optical film layer nodule defect, which belongs to the technical field of optical films and comprises a sample table, a three-dimensional electric moving platform, an imaging acquisition unit and a control analysis unit, wherein the imaging acquisition unit comprises a light source module and two imaging modules, the light source module comprises a laser, a beam expanding system and a semi-transparent semi-reflecting mirror, the two imaging modules are respectively a common microscopic imaging module and a phase imaging module, the common microscopic imaging module comprises an imaging objective lens, an adapter and a common imaging camera which are sequentially arranged, and the phase imaging module comprises an imaging objective lens, an adapter and a phase imaging camera which are sequentially arranged; the method is particularly suitable for detecting and imaging the defects of the film layer of the large-caliber optical element commonly used in the super-huge high-power laser system.
Description
Technical Field
The invention relates to the technical field of optical films, in particular to a device and a method for rapidly detecting the nodule defect of an optical film.
Background
Optical films are used in a wide range from common optical lenses and lasers for civil use to reconnaissance satellites for military use, to achieve desired optical functions. Especially with the development and application of large-energy and high-power laser systems, optical thin films with high damage threshold have become indispensable elements in laser systems. Because various unavoidable microdefects exist in the growth process of the optical film, the optical film is the weak link which is most easily damaged by laser in a laser system, and therefore, the improvement of the laser damage resistance of the optical film becomes a hot point problem to be solved in the field of high-energy laser.
Research has shown that nodule defects are a major contributor to optical film damage for nanosecond-scale pulse width laser pulses, and the structure of a typical nodule defect is shown in FIG. 1, which is cited in FIG. 1 [ Liu X F et al. Characteristics of novel defects in HfO2/SiO2 multilayer optical coatings [ J ]. Applied Surface Science, 256 (2010) 3783-. Therefore, the identification of the nodule defects and the research on the influence of the nodule defects on the laser damage of the thin film are very important for improving the laser damage performance of the thin film.
At present, the detection methods for the nodule defects include optical microscopy, atomic force microscopy, focused ion beam microscopy, light scattering, scanning electron microscopy, total internal reflection microscopy, photothermal and the like.
The most common optical polarization microscope can quickly and effectively judge the nodule defects with larger size, and has the defect that the longitudinal information of the nodule defects cannot be given; the light scattering technology cannot give longitudinal information and accurately judge the transverse size; the total internal reflection microscopy technology can only be incident from the side surface of the optical element, requires the side surface of the optical element to be polished and cannot realize the test in the full aperture range, namely has special requirements on the incident light.
The focused ion beam microscopy and the scanning electron microscopy have higher testing accuracy and sensitivity, but the two devices have requirements on the size of an optical element and damage to the surface of the optical element during testing. The photothermal technology is mainly used for detecting the laser absorption condition of the nodule defects, the atomic force microscopy technology can clearly give the height and the geometric dimension of the nodule defects, and the test efficiency of the two detection modes is extremely low. The methods can not be applied to the full-aperture detection of film nodal defects of large-aperture optical elements with the aperture of more than one hundred millimeters.
Disclosure of Invention
It is therefore an objective of the claimed invention to provide an apparatus for rapidly detecting nodule defects in an optical film to solve the above problems.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows: a device for rapidly detecting the defect of the node tumor of an optical film comprises
The sample stage is used for vertically placing a sample;
the three-dimensional electric moving platform is connected with the sample table and is used for adjusting the position of the sample;
the imaging acquisition unit is used for image acquisition and imaging; and
the control analysis unit is used for controlling the three-dimensional electric mobile platform and the imaging acquisition unit;
wherein, the formation of image collection unit includes a light source module and two imaging module, light source module includes laser instrument, beam expanding system and semi-transparent half anti-reflection mirror, two imaging module are ordinary microscopic imaging module and phase place imaging module respectively, ordinary microscopic imaging module is including the formation of image objective, adapter and the ordinary camera that images that arrange in proper order, phase place imaging module is including the formation of image objective, adapter and the phase place camera that images that arrange in proper order.
As a preferred technical scheme: the laser is a 405nm diode laser.
The laser can be any wavelength in the 400nm-1100nm wave band because the nodule defect can change the laser wave front, the shorter the wavelength, the higher the resolution, the better the sensitivity, in order to obtain the resolution and sensitivity as high as possible, and considering the cost of the laser, the 405nm laser is selected.
The invention utilizes wavefront analysis equipment, namely a phase imaging camera based on a four-wave transverse shear interference technology to obtain defect three-dimensional distribution information by testing the condition that the film layer nodule defect of an optical element changes the wavefront. Taking a 10 × microscopic imaging system as an example, the imaging area of a single image can be controlled to be 1.2 × 0.9mm2The imaging time is controlled within 0.5 second for a pixel of 3 μm. By combining the three-dimensional electric translation table and the image splicing processing system, the full-aperture test of the film defects of the square element with the side length of 100mm can be realized within 1.5 hours. Taking the atomic force microscopy technique which can obtain defect three-dimensional distribution information as an example, the imaging speed of the commonly used atomic force microscopy technique is extremely slow, the scale of tens of micrometers needs several minutes to tens of minutes, and the imaging speed is 1000 μm according to 1 minute2The speed calculation of (1.7X 10) is required for the full aperture test of the film defects of the 100mm square element5This is not at all practical in practical large caliber applications when small.
The second purpose of the present invention is to provide a method for detecting the nodule defect of the optical film layer by using the above device, which adopts the technical scheme that the method comprises the following steps:
(1) marking points on the surface to be detected of the sample;
(2) installing a sample, fixing a sample table, starting a light source module and a common imaging module, and finely adjusting the sample table to enable the sample to be clearly imaged in the whole large-caliber range;
(3) and starting the phase imaging module, setting the motion direction of the sample stage, wherein the direction vertical to the imaging acquisition unit is the Z direction, the direction vertical to the Z direction is the XY direction, adjusting the sample stage to move along the XY direction, continuously imaging different positions, and acquiring images by the control analysis unit, splicing and processing the images to acquire the optical film layer nodule defects.
The method comprises the steps that a beam of laser source is utilized and passes through a beam expanding system, a half mirror and an imaging objective lens to reach the surface of a sample, and reflected light on the surface of the sample passes through the objective lens, the half mirror and an adapter to reach a corresponding imaging camera;
the common imaging camera is used for automatically leveling a large-caliber sample;
as can be seen from fig. 1, the transverse size of the film layer nodule defect is several microns or tens of microns, a certain protrusion is several tens of nanometers to several microns, and the wavefront change of reflected light or transmitted light is several tens of nanometers to several microns, so that the phase resolution precision and the detectable range of the phase imaging camera are met, and therefore, the phase imaging camera can be used for providing phase and intensity information of the surface of a large-caliber sample;
the three-dimensional electric mobile platform and the image processing system are combined, and the rapid three-dimensional detection of the large-caliber optical film nodal defect is realized based on the machine vision acquisition, processing and resolution of the optical film nodal defect.
The invention provides a nondestructive and rapid detection method for film nodule defects, which is particularly suitable for detecting the defects of a large-caliber optical film, can obtain three-dimensional distribution of microscopic defects and realizes full-caliber detection.
The device and the method of the invention can not only detect film layer nodule defects, but also be suitable for detecting structural defects of other optical materials.
Compared with the prior art, the invention has the advantages that: by adopting the device and the method, the nodule defects of the optical film layer can be rapidly detected, the resolution is 3 mu m under 10 times of an objective lens, and the full-aperture test of a square element with the side length of 100mm can be realized within 1.5 hours; the three-dimensional information of the nodule defects including longitudinal information can be obtained, the nodule defects with smaller size can be judged, and the resolution of 50 times of the objective lens is better than 1 micron; the method has no special requirements on incident laser and is suitable for detecting the defects of the film layer of the large-caliber optical element.
Drawings
FIG. 1 is a block diagram of a typical nodule defect;
FIG. 2 is a schematic view of a device connection according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a computer control system according to an embodiment of the present invention.
In the figure: 1. a 405nm laser; 2. a beam expanding system; 31. a first half mirror; 32. a second half mirror; 4. a high magnification imaging objective lens; 5. a three-dimensional electric mobile platform; 6. a sample to be tested; 71. a first adapter; 72. a second adapter; 8. a phase imaging camera; 9. a general imaging camera; 10. a computer control system.
Detailed Description
The invention will be further explained with reference to the drawings.
Example (b):
referring to fig. 2, an apparatus for rapid detection of an optical film nodule defect comprises
A sample stage for vertically placing a sample 6 to be tested;
the three-dimensional electric moving platform 5 is connected with the sample stage and is used for adjusting the position of a sample;
the imaging acquisition unit is used for image acquisition and imaging; and
a control and analysis unit for controlling the three-dimensional electric moving platform 5 and the imaging acquisition unit, wherein the control and analysis unit of the embodiment is a computer control system 10;
the imaging acquisition unit comprises a light source module and two imaging modules, wherein the light source module comprises a 405nm laser 1, a beam expanding system 2, a first semi-transparent semi-reflective mirror 31 and a second semi-transparent semi-reflective mirror 32, the two imaging modules are respectively a common microscopic imaging module and a phase imaging module, the common microscopic imaging module comprises a high-magnification imaging objective 4 which is sequentially arranged, in order to meet two requirements of rapidness and resolution, the imaging objective is set to be rotatable and selectable and is respectively 5 x, 10 x, 20 x and 50 x, a first adapter 71 and a common imaging camera 9, and the phase imaging module comprises the high-magnification imaging objective 4, a second adapter 72 and a phase imaging camera 8 which are sequentially arranged;
the 405nm laser 1, the three-dimensional electric moving platform 5, the phase imaging camera 8 and the common imaging camera 9 are all connected with the computer control system 10, the computer control system 10 acquires image signals of the common microscopic imaging module and the phase imaging module, can perform related signal processing, obtains optical film nodule defect information, and can control light beam output of the 405nm laser 1 and motion of the three-dimensional electric moving platform 5;
the three-dimensional electric moving platform 5 has an automatic posture adjustment function, can automatically realize fine adjustment of the posture of the sample 6 to be tested through image analysis of a common imaging camera and control of a computer control system 10;
among the above components of the present embodiment, the 405nm laser 1, the beam expanding system 2, the first half mirror 31, the second half mirror 32, the high-magnification imaging objective 4, the three-dimensional electric moving platform 5, the adapter 7, the phase imaging camera 8, the general imaging camera 9 and the computer control system 10 are all the prior art,
in order to realize high-precision splicing, a grating ruler type electric translation table with high positioning and resetting precision is preferably used, such as a grating ruler type platform KST (GS) series and the like produced by Sigma company of Japan.
The phase imaging camera may for example be selected from the SID4-Bio series, from phasics, france, etc.
A schematic diagram of the computer control system 10 is shown in fig. 3;
the method for detecting the nodule defects of the optical film by adopting the device comprises the following steps:
(1) marking points on the surface to be tested of the sample 6 to be tested;
(2) installing a sample 6 to be tested, fixing a sample table, starting a light source module and a common imaging module, and controlling a three-dimensional electric moving platform 5 to finely adjust the sample table through a computer control system 10, so that the sample 6 to be tested can be clearly imaged in the whole large-caliber range;
(3) and starting the phase imaging module, setting the motion direction of the sample stage, wherein the direction vertical to the imaging acquisition unit is the Z direction, the direction vertical to the Z direction is the XY direction, controlling the three-dimensional electric moving platform 5 to adjust the sample stage to move along the XY direction through the computer control system 10, continuously imaging different positions, acquiring images through the computer control system 10, splicing and processing the images through the computer control system 10, and acquiring the node defect of the optical film layer.
The image splicing is mainly set according to the scanning step length set by the acquired image, and the mode of compounding the partially overlapped characteristic points of the image is considered to be utilized simultaneously in order to avoid the resetting error of a large stroke; and obtaining a full aperture image in a test range after splicing. Because the phase camera can obtain the phase change information caused by the nodule defects, the nodule defect information is obtained by denoising, defect signal identification, defect signal extraction and the like of the image.
The detection principle of the invention is as follows: the method comprises the following steps that a 405nm laser 1 is started through a computer control system 10 to emit a beam of 405nm laser, the diameter of the parallel laser is enlarged through a beam expanding system 2 to obtain a larger parallel output beam, the beam with the enlarged diameter is transmitted to a first half-transmitting and half-reflecting mirror 31, reflected light is reflected to a high-magnification imaging objective 4, passes through the high-magnification imaging objective 4 to reach the surface of a sample 6 to be tested, the reflected light on the surface of the sample 6 to be tested passes through the high-magnification imaging objective 4 and then is transmitted through the first half-transmitting and half-reflecting mirror 31, the transmitted light passes through a second half-transmitting and half-reflecting mirror 32, the reflected light passes through a first adapter 71 to a common imaging camera 9, and the transmitted light passes through a second adapter 72 to a phase imaging camera 8; and then, acquiring and splicing and processing the image of the phase imaging camera 8 by adopting a computer control system 10 to obtain the defect of the optical film nodular.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (3)
1. The utility model provides a device of short-term test optical film festival tumour defect which characterized in that: comprises that
The sample stage is used for vertically placing a sample;
the three-dimensional electric moving platform is connected with the sample table and is used for adjusting the position of the sample;
the imaging acquisition unit is used for image acquisition and imaging;
the control analysis unit is used for controlling the three-dimensional electric mobile platform and the imaging acquisition unit;
the imaging acquisition unit comprises a light source module and two imaging modules, wherein the light source module comprises a laser, a beam expanding system and a semi-transparent semi-reflecting mirror, the two imaging modules are respectively a common microscopic imaging module and a phase imaging module, the common microscopic imaging module comprises an imaging objective lens, an adapter and a common imaging camera which are sequentially arranged, and the phase imaging module comprises an imaging objective lens, an adapter and a phase imaging camera which are sequentially arranged;
the device adopts a phase imaging camera to realize the detection of the nodule defects through an area imaging technology according to the principle of four-wave transverse shear interference.
2. The apparatus for rapidly detecting an optical film nodal defect according to claim 1 and wherein: the laser is a 405nm diode laser.
3. A method for optical film segment defect detection using the device of claim 1, comprising the steps of:
(1) marking points on the surface to be detected of the sample;
(2) installing a sample, fixing a sample table, starting a light source module and a common imaging module, and finely adjusting the sample table to enable the sample to be clearly imaged in the whole large-caliber range;
(3) and starting the phase imaging module, setting the motion direction of the sample stage, wherein the direction vertical to the imaging acquisition unit is the Z direction, the direction vertical to the Z direction is the XY direction, adjusting the sample stage to move along the XY direction, continuously imaging different positions, and acquiring images by the control analysis unit, splicing and processing the images to acquire the optical film layer nodule defects.
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| CN107121065A (en) * | 2017-05-04 | 2017-09-01 | 北京理工大学深圳研究院 | A kind of portable phase quantitative testing device |
| WO2018172161A1 (en) * | 2017-03-20 | 2018-09-27 | Carl Zeiss Microscopy Gmbh | Microscope and method for imaging an object |
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Patent Citations (5)
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|---|---|---|---|---|
| CN103148800A (en) * | 2013-01-28 | 2013-06-12 | 浙江大学 | Label-free three-dimensional microscope method based on light filed propagation and device |
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| CN104122228A (en) * | 2014-07-14 | 2014-10-29 | 江苏大学 | A microscopic imaging system for analysis of integrated light interference and scattering information and a method |
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