CN110132184A - Nanometer indentation area measuring device - Google Patents
Nanometer indentation area measuring device Download PDFInfo
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- CN110132184A CN110132184A CN201910494551.0A CN201910494551A CN110132184A CN 110132184 A CN110132184 A CN 110132184A CN 201910494551 A CN201910494551 A CN 201910494551A CN 110132184 A CN110132184 A CN 110132184A
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- 238000007373 indentation Methods 0.000 title claims abstract description 35
- 238000005259 measurement Methods 0.000 claims abstract description 65
- 230000003287 optical effect Effects 0.000 claims abstract description 36
- 238000012545 processing Methods 0.000 claims abstract description 32
- 238000000034 method Methods 0.000 claims description 23
- 230000008569 process Effects 0.000 claims description 14
- 230000010365 information processing Effects 0.000 claims description 6
- 230000003993 interaction Effects 0.000 claims description 6
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 238000002356 laser light scattering Methods 0.000 claims description 5
- 230000008859 change Effects 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 229910003460 diamond Inorganic materials 0.000 claims description 3
- 239000010432 diamond Substances 0.000 claims description 3
- 229920000642 polymer Polymers 0.000 abstract 1
- 239000000463 material Substances 0.000 description 5
- 241001517299 Bulbophyllum Species 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012625 in-situ measurement Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000000879 optical micrograph Methods 0.000 description 1
- 238000000399 optical microscopy Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/28—Measuring arrangements characterised by the use of optical techniques for measuring areas
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Laser Beam Processing (AREA)
Abstract
Nanometer disclosed by the invention is pressed into area measuring device, belongs to optics and mechanics Technology of Precision Measurement field.The present invention is mainly made of control system module, Optical system module, signal demodulation module, data processing module.Mainly by light source, scatterometry optical component, scatterometry receiving device composition in the Optical system module.The present invention is using the laser of firm power output as measurement light source；Light beam is gathered in nanometer indentation pressure head through the laggard membership polymers mirror of Amici prism；Regulate and control the power of laser light source, it scatters the concentrated object lens of light and Amici prism and obtains measurement photosignal in measuring receiver part, pressure head and measurand spacing and area are pressed into according to signal processing nanometer, determine that nanometer is pressed into area by scattering optical power and hot spot range, the accuracy for improving nanometer indentation area measurement, has compared with high measurement object adaptability.
Description
Technical field
The present invention relates to a kind of nanometer of indentation area measuring devices, belong to optics and mechanics Technology of Precision Measurement field.
Background technique
The mechanical characteristic of Nanoindentation measurement material is widely used in skills such as physics, material science and chemistry
Art field, the measuring technique being related to also are continuously improved according to increasingly developed demand.The height of mechanical characteristic as material is precisely
The important means of measurement, nanometer is pressed into relevant measurement method and the raising of accurate ability has a very important significance.Nanometer
In plunging, cause the measuring result error of nanometer indentation area big since the depth dimensions of indentation are small and structure is complicated, at random
Property, systematicness and gross error be difficult to determine and separate, especially in structure measurement size in the case where several nanometers, measurement
Error is possible to suitable with measurement range.There is the serious measurement capability for restricting nanometer method of press-fitting, limitation in this measurement error
The evaluations of associated materials mechanical properties, nanometer be pressed into area it is accurate whether as key influence factor.That applies at present receives
The method of rice indentation area mostly carries out the measurement of structure size using Principle Methods such as optical microphotograph amplification, contact probe scannings,
The error of measuring principle and the complexity of measured structure lead to the inaccuracy of measurement result, especially in elasticity and fragile material
It is especially prominent when measurement.Therefore it is the key that promote measurement level that nanometer indentation area measurement accuracy how is improved from principle
One of technology.
Summary of the invention
The precision of nanometer indentation measurement is influenced to avoid existing nanometer from being pressed into area measurement error, and solves calibration verification
Must be using practical auxiliary precise displacement measurement device back work the problem of, nanometer disclosed by the invention is pressed into area measuring device
Technical problems to be solved are as follows: the synchronous in situ measurement of process of press in for realizing nanometer indentation area improves nanometer indentation area and surveys
The accuracy of amount has compared with high measurement object adaptability.The purpose of the present invention is what is be achieved through the following technical solutions.
Nanometer disclosed by the invention is pressed into area measuring device, mainly by control system module, Optical system module, signal
Demodulation module, data processing module composition.Using the principle of laser light scattering, using in measurement nanometer process of press in displacement and
Measurement scattering region changing value determines that nanometer is pressed into area, and mainly by light source, scatterometry optical component dissipates Optical system module
Penetrate measuring receiver part composition.
Control system module is used to control Optical system module, signal demodulation module, data processing module, and for setting
Determine predefined parameter, control system module is pressed into according to the nanometer of the parameter selection respective type of setting, realizes nanometer process of press in
Automatic measurement.Optical system module includes optical scattering component, photoelectric conversion and the number of light source and various optical elements composition
According to Acquisition Circuit, nanometer indentation area change amount is converted to by above-mentioned component the electrical signal for being used for digital processing.Signal
The photosignal that demodulation module obtains Optical system module carries out classification processing and tissue, obtain for data processing module into
The data used substantially that row operation and correcting process use, signal demodulation module work by the mode of pre-selection setting.
Data processing module, will be logical after operation for information processing and operation after measurement demodulation in nanometer indentation area measuring device
With final output measurement result after result and the interaction of control system module.
The optical measurement module includes light source, Amici prism, converges object lens, pressure head, laser defusing measure receiver.
The pressure head selects the pressure head that there is translucency, hardness to meet requirement.Using the laser of firm power output as measurement
Light source；Light beam enters convergence object lens after Amici prism and is gathered in nanometer indentation pressure head；Regulate and control the power of laser light source, scatters light
Through convergence object lens and Amici prism measuring receiver part obtain measurement photosignal, according to signal processing nanometer be pressed into pressure head with
Measurand spacing and area determine that nanometer is pressed into area by scattering optical power and hot spot range.
Preferably, the pressure head is Buddha's warrior attendant Bulbophyllum peotinatum Pinet pressure head.
The working method of nanometer indentation area measuring device disclosed by the invention are as follows: the predetermined ginseng of control system module setting
Number, the workflow that control system module is pressed into according to the nanometer of the parameter selection respective type of setting；Optical system module is adopted
Use the laser of firm power output as measurement light source；Light beam enters convergence object lens after Amici prism and is gathered in nanometer indentation pressure
Head；Regulate and control the power of laser light source, scattering light obtains measurement optical telecommunications in measuring receiver part through convergence object lens and Amici prism
Number；The photosignal that signal demodulation module obtains Optical system module carries out classification processing and tissue, obtains at data
Reason module carries out the data used substantially that operation and correcting process use, signal demodulation module by pre-selection setting mode into
Row work.Data processing module will be transported for information processing and operation after measurement demodulation in nanometer indentation area measuring device
Final measurement is exported after general result and the interaction of control system module after calculation.
The utility model has the advantages that
1, to overcome the problems, such as to carry out measuring inaccuracy after usual nanometer is pressed into again indirectly, nanometer disclosed by the invention is pressed into
Area measuring device utilizes the displacement and measurement scattering region in measurement nanometer process of press in using the principle of laser light scattering
Changing value determines that nanometer is pressed into area.
2, to overcome the problems, such as that existing optical microscopy and scanning sonde method measurement error are big, nanometer disclosed by the invention
It is pressed into area measuring device, using the principle of laser light scattering, is changed by the scatter light flux of contact area and determines nanometer indentation
Area can be realized the synchronous in situ measurement of process of press in of nanometer indentation area, can reduce elastic shape in nanometer process of press in
Become the influence to measurement indentation area, improves the accuracy of nanometer indentation measurement.
2, nanometer disclosed by the invention is pressed into area measuring device, and opposed configuration is compact, and integrated level is good.
Detailed description of the invention
Fig. 1 is the working principle diagram that nanometer of the present invention is pressed into area measuring device.
Fig. 2 is the optical principle schematic diagram that nanometer of the present invention is pressed into area measuring device.
Wherein 1-control system module, 2-Optical system modules, 3-signal demodulation modules, 4-data processing modules,
5-measurement light sources, 6-Amici prisms, 7-convergence object lens, 8-diamond penetrators, 9-nanometers are pressed into measurement object, and 10-swash
Light scattering measurement receiver, 11-nanometer pressing structure main bodys；
Specific embodiment
The present invention will be further described with reference to the accompanying drawings and examples.
Embodiment 1
As shown in Figure 1, nanometer disclosed in the present embodiment is pressed into area measuring device, mainly by control system module 1, optics
System module 2, signal demodulation module 3, data processing module 4 form.Using the principle of laser light scattering, it is pressed into using measurement nanometer
Displacement in the process and measurement scattering region changing value determine that nanometer is pressed into area, mainly by light source in Optical system module 2,
Scatterometry optical component, scatterometry receiving device composition.
Control system module 1 is used to control Optical system module 2, signal demodulation module 3, data processing module 4, is used in combination
In setting predefined parameter, the workflow that control system module 1 is pressed into according to the nanometer of the parameter selection respective type of setting.Light
Learning system module 2 includes optical scattering component, photoelectric conversion and the data acquisition circuit that light source and various optical elements form, and is led to
It crosses above-mentioned component and converts nanometer indentation area change amount to the electrical signal for being used for digital processing.Signal demodulation module 3 is by light
It learns the photosignal that system module 2 obtains and carries out classification processing and tissue, obtain carrying out operation for data processing module 4 and repair
The data used substantially used are just handled, signal demodulation module 3 works by the mode of pre-selection setting.Data processing mould
Block 4 for nanometer indentation area measuring device in measurement demodulation after information processing and operation, by after operation general result and
Final output measurement result after the interaction of control system module 1.
As shown in Fig. 2, the optical measurement module includes light source, Amici prism 6, convergence object lens 7, pressure head 8, laser dissipate
Penetrate measuring receiver 10.The pressure head 8 selects the pressure head 8 that there is translucency, hardness to meet requirement.It is defeated using firm power
Laser out is as measurement light source 5；Light beam enters convergence object lens 7 after Amici prism 6 and is gathered in nanometer indentation pressure head 8；Regulation
The power of laser light source, scattering light obtain measurement photosignal, root in measuring receiver part through convergence object lens 7 and Amici prism 6
According to signal processing nanometer indentation pressure head 8 and measurand spacing and area, nanometer is determined by scattering optical power and hot spot range
It is pressed into area.The pressure head 8 is Buddha's warrior attendant Bulbophyllum peotinatum Pinet pressure head 8.
If Fig. 1,2 are, nanometer disclosed in the present embodiment is pressed into the working method of area measuring device are as follows: control system module
1 setting predefined parameter, the workflow that control system module 1 is pressed into according to the nanometer of the parameter selection respective type of setting；Light
System module 2 is learned using the wavelength 633nm laser of firm power output as measurement light source 5；Light beam enters after Amici prism 6
Convergence object lens 7 are gathered in nanometer indentation pressure head 8, and pressure head is diamond (120 °) pressure head；Regulate and control the power of laser light source, scatters light
Measurement photosignal is obtained in measuring receiver part through 40 times of convergence object lens 7 and Amici prism 6；Signal demodulation module 3 is by optics
The photosignal that system module 2 obtains carries out classification processing and tissue, obtains carrying out operation and amendment for data processing module 4
The data used substantially used are handled, signal demodulation module 3 works by the mode of pre-selection setting.Data processing module
4 for the information processing and operation after measurement demodulation in nanometer indentation area measuring device, by the general result and control after operation
Final measurement is exported after the interaction of system module 1 processed.
The above is presently preferred embodiments of the present invention, and it is public that the present invention should not be limited to embodiment and attached drawing institute
The content opened.It is all not depart from the lower equivalent or modification completed of spirit disclosed in this invention, both fall within the model that the present invention protects
It encloses.
Claims (5)
1. nanometer indentation area measuring device, it is characterised in that: mainly by control system module (1), Optical system module (2),
Signal demodulation module (3), data processing module (4) composition；Using the principle of laser light scattering, using in measurement nanometer process of press in
Displacement and measurement scattering region changing value determine that nanometer is pressed into area, Optical system module (2) mainly by light source, survey by scattering
Measure optical component, scatterometry receiving device composition.
2. nanometer as described in claim 1 is pressed into area measuring device, it is characterised in that: control system module (1) for pair
Optical system module (2), signal demodulation module (3), data processing module (4) control, and for setting predefined parameter, control system
Module (1) is united according to the indentation of the nanometer of the parameter selection respective type of setting, realizes the automatic measurement of nanometer process of press in；Optics
System module (2) includes optical scattering component, photoelectric conversion and the data acquisition circuit of light source and various optical elements composition, is led to
It crosses above-mentioned component and converts nanometer indentation area change amount to the electrical signal for being used for digital processing；Signal demodulation module (3) will
The photosignal that Optical system module (2) obtains carries out classification processing and tissue, obtains being transported for data processing module (4)
The data used substantially that calculation and correcting process use, signal demodulation module (3) work by the mode of pre-selection setting；Number
According to processing module (4) for the information processing and operation after measurement demodulation in nanometer indentation area measuring device, after operation
Final output measurement result after general result and control system module (1) interaction.
3. nanometer as claimed in claim 1 or 2 is pressed into area measuring device, it is characterised in that: the optical measurement module
Including light source, Amici prism (6), object lens (7), pressure head (8), laser defusing measure receiver (10) are converged；Pressure head (8) choosing
With the pressure head (8) for meeting requirement with translucency, hardness；Using the laser of firm power output as measurement light source (5)；
Light beam enters convergence object lens (7) after Amici prism (6) and is gathered in nanometer indentation pressure head (8)；Regulate and control the power of laser light source, dissipates
It penetrates light and obtains measurement photosignal in measuring receiver part through convergence object lens (7) and Amici prism (6), according to signal processing nanometer
It is pressed into pressure head (8) and measurand spacing and area, determines that nanometer is pressed into area by scattering optical power and hot spot range.
4. nanometer as claimed in claim 3 is pressed into area measuring device, it is characterised in that: the pressure head (8) is diamond three
Rib pressure head (8).
5. nanometer as claimed in claim 1 or 2 is pressed into area measuring device, it is characterised in that: working method is control system
Module (1) sets predefined parameter, the work that control system module (1) is pressed into according to the nanometer of the parameter selection respective type of setting
Process；Optical system module (2) is using the laser of firm power output as measurement light source (5)；Light beam is after Amici prism (6)
Nanometer indentation pressure head (8) is gathered in into convergence object lens (7)；Regulate and control laser light source power, scattering light through convergence object lens (7) and
Amici prism (6) obtains measurement photosignal in measuring receiver part；Signal demodulation module (3) obtains Optical system module (2)
The photosignal obtained carries out classification processing and tissue, obtains carrying out operation for data processing module (4) and correcting process uses
The data used substantially, signal demodulation module (3) by pre-selection setting mode work；Data processing module (4) is used
General result after operation is by information processing and operation in nanometer indentation area measuring device after measurement demodulation with control
Final measurement is exported after system module (1) interaction.
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| CN201910494551.0A CN110132184B (en) | 2019-06-10 | 2019-06-10 | Nano-indentation area measuring device |
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| CN201910494551.0A CN110132184B (en) | 2019-06-10 | 2019-06-10 | Nano-indentation area measuring device |
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| CN110132184A true CN110132184A (en) | 2019-08-16 |
| CN110132184B CN110132184B (en) | 2020-09-11 |
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|---|---|---|---|---|
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