CN110057478A - A kind of highly sensitive pliable pressure senser element of resistance-type - Google Patents
A kind of highly sensitive pliable pressure senser element of resistance-type Download PDFInfo
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- CN110057478A CN110057478A CN201910409890.4A CN201910409890A CN110057478A CN 110057478 A CN110057478 A CN 110057478A CN 201910409890 A CN201910409890 A CN 201910409890A CN 110057478 A CN110057478 A CN 110057478A
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- varistor layer
- outer ring
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- resistance
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Thermistors And Varistors (AREA)
Abstract
The present invention provides a kind of highly sensitive pliable pressure senser elements of resistance-type, the first flexible film substrate including lamination setting, varistor layer, annular electrode layer and the second flexible film substrate, wherein, the varistor layer is located at first flexible film substrate, between annular electrode layer, the annular electrode layer is located at the varistor layer, between second flexible film substrate, the annular electrode layer includes annular electrode and electrode leads to client, the annular electrode is connect with the electrode leads to client, first flexible film substrate and second flexible film substrate are encapsulated by cohesive material, the varistor layer includes the outer ring varistor layer and inner ring varistor layer being generally aligned in the same plane, the diameter of the outer ring varistor layer is greater than the inner ring varistor layer, the sheet resistance of the inner ring varistor layer is greater than the sheet resistance of the outer ring varistor layer.The beneficial effects of the present invention are: having both higher sensitivity and range curve of output without mutation.
Description
Technical field
The present invention relates to senser element more particularly to a kind of highly sensitive pliable pressure senser elements of resistance-type.
Background technique
Flexible electronic device be organic and/or inorganic material electronic device is produced on it is new on flexible or extending substrate
Type electronic technology compares conditional electronic, and deformation to a certain extent can occur for flexible electronic itself, to meet particular job environment
Requirement, have certain flexibility.Measured signal can be converted to electric signal according to certain rule as one kind by sensor
And the device exported, it is widely used in the fields such as space flight, ship, medical treatment, military affairs, and flexible sensor can both retain sensing
The basic performance of device, while device can keep flexible in a certain range.With the arrival of new technology revolution, the world start into
Enter the information age, highly sensitive pliable pressure sensor can be used as a kind of consumer electronics, can acquire in real time pressure signal, remember
Human-computer interaction is realized in record.
In current existing fexible film pressure sensor, it is mostly based under external force, interdigital electrode and varistor layer
Exposure level exports measurable resistance accordingly, realizes sensing function.Two problems of this kind of sensor:
One, sensitivity is difficult to compatible with range regulation: being promoted sensor sensitivity by reducing varistor layer sheet resistance, be will lead to
Limit output resistance reduces, and useful range is too small；Otherwise varistor layer sheet resistance is promoted, the range of sensor is able to ascend, but
Measurement sensitivity can substantially be sacrificed.
Two, in many application scenarios, force acting on transducer load is spread around by center, and traditional interdigital figure
Pattern electrode, in centre, electrode spacing is small (or electrode density is big), i.e., slight by pressure, center electrode and pressure sensitive
It is in contact, output resistance, which just will appear, to be drastically reduced, and so as to cause output, there are mutation problems.
Therefore, how obtaining one and having both pliable pressure sensor of the higher sensitivity with range curve of output without mutation is
Technological difficulties urgently to be resolved at present.
Summary of the invention
In order to solve the problems in the prior art, the present invention provides a kind of highly sensitive pliable pressure sensors of resistance-type
Part.
The present invention provides a kind of highly sensitive pliable pressure senser element of resistance-type, the first flexible thin including lamination setting
Film substrate, varistor layer, annular electrode layer and the second flexible film substrate, wherein the varistor layer is located at first flexible thin
Between film substrate, annular electrode layer, the annular electrode layer is described between the varistor layer, the second flexible film substrate
Annular electrode layer includes annular electrode and electrode leads to client, and the annular electrode is connect with the electrode leads to client, and described first
Flexible film substrate and second flexible film substrate are encapsulated by cohesive material, and the varistor layer includes being generally aligned in the same plane
Outer ring varistor layer and inner ring varistor layer, the diameter of the outer ring varistor layer is greater than the inner ring varistor layer, and the inner ring is pressure-sensitive
The sheet resistance of layer is greater than the sheet resistance of the outer ring varistor layer.
As a further improvement of the present invention, the varistor layer is printed on the surface of first flexible film substrate, institute
State the surface that annular electrode layer is printed on second flexible film substrate.
As a further improvement of the present invention, the outer ring varistor layer and inner ring varistor layer combine to form a complete circle
Shape is equipped with gap between the varistor layer, annular electrode.
As a further improvement of the present invention, the varistor layer is the tool of deformation synchronous with first flexible film substrate
There is the material of voltage-sensitive effect to be made, the varistor layer is mainly mixed by high molecular material and conductive material.
As a further improvement of the present invention, the conductive material doping concentration range of inner ring varistor layer is in the varistor layer
2-4wt%, the conductive material doping concentration range of outer ring varistor layer is 4-7.5wt% in the varistor layer.
As a further improvement of the present invention, the high molecular material of the varistor layer is propylene dichloride resinoid, polyurethane
Resinoid, epoxy resin, phenolic resin, any one in organic siliconresin, the conductive material of the varistor layer is carbon nanometer
Pipe, carbon fiber, conductive carbon powder, any one in graphene.
As a further improvement of the present invention, the annular electrode includes at least a pair of outer ring electrode circuit and at least a pair
Central electrode circuit, the pair of outer ring electrode circuit includes the first outer ring electrode circuit and the second outer ring electrode circuit, described
A pair of of central electrode circuit includes the first central electrode circuit and the second central electrode circuit, and the electrode leads to client includes first
Electrode leads to client and second electrode exit, the first outer ring electrode circuit, the first central electrode circuit converge after with it is described
The connection of first electrode exit, the second outer ring electrode circuit, the second central electrode circuit converge the rear and second electrode
Exit connection, the first outer ring electrode circuit, the first central electrode circuit altogether, the second outer ring electrode circuit, the
Two central electrode circuits are altogether.
As a further improvement of the present invention, the first outer ring electrode circuit, the second outer ring electrode circuit are distinguished outside
It encloses circumferentially, annularly, the first central electrode circuit, the second central electrode circuit are radially symmetrical at center respectively
Arrangement, spacing between the first outer ring electrode circuit, the second outer ring electrode circuit be less than the first central electrode circuit,
The spacing of second central electrode circuit.
As a further improvement of the present invention, described outer when pressing the highly sensitive pliable pressure senser element of the resistance-type
Enclose varistor layer and the first outer ring electrode circuit, the second outer ring electrode electrical contact, the inner ring varistor layer and described first
Central electrode circuit, the second central electrode electrical contact.
As a further improvement of the present invention, first flexible film substrate, the second flexible film substrate are used to pass
Power load is passed, the material of first flexible film substrate is polyester film, Kapton, polypropylene film, polychlorostyrene second
At least one of materials such as alkene film, the material of second flexible film substrate are polyester film, Kapton, gather
At least one of materials such as Polypropylene film, polyvinyl chloride film.
The beneficial effects of the present invention are: through the above scheme, the cooperation of annular electrode layer has the pressure-sensitive of different surfaces resistance
Layer, forms the pliable pressure sensor of high sensitive, the internal muting sensitive sense in outer ring, and cooperation has certain thickness cohesive material, passes
It is exportable that there is the sensing curve low without mutation, maximum resistance after sensor is pressurized, have both higher sensitivity and range curve of output
Without mutation.
Detailed description of the invention
Fig. 1 is a kind of stratiform schematic diagram of the highly sensitive pliable pressure senser element of resistance-type of the present invention.
Fig. 2 is a kind of schematic diagram of the annular electrode layer of the highly sensitive pliable pressure senser element of resistance-type of the present invention.
Fig. 3 is the position of a kind of varistor layer of the highly sensitive pliable pressure senser element of resistance-type of the present invention, annular electrode layer
Comparative diagram.
Fig. 4 is the size of a kind of varistor layer of the highly sensitive pliable pressure senser element of resistance-type of the present invention, annular electrode layer
Figure.
Fig. 5 is a kind of sensing curve graph of the highly sensitive pliable pressure senser element of resistance-type of the present invention.
Specific embodiment
The invention will be further described for explanation and specific embodiment with reference to the accompanying drawing.
As shown in Figures 1 to 5, the highly sensitive pliable pressure senser element of a kind of resistance-type (abbreviation sensor), including lamination
The first flexible film substrate 1, varistor layer 20, annular electrode layer 30 and the second flexible film substrate 7 being arranged, wherein the pressure
Between first flexible film substrate 1, annular electrode layer 30, the annular electrode layer 30 is located at described pressure-sensitive photosensitive layer 20
Between the 20, second flexible film substrate 7 of layer, the annular electrode layer 30 includes annular electrode 5 and electrode leads to client 6, the ring
Shape electrode 5 is connect with the electrode leads to client 6, and first flexible film substrate 1 passes through with second flexible film substrate 7
Cohesive material 3 encapsulates, and the varistor layer 20 includes the outer ring varistor layer 2 and inner ring varistor layer 4 being generally aligned in the same plane, the outer ring
The diameter of varistor layer 2 is greater than the inner ring varistor layer 4, and the sheet resistance of the inner ring varistor layer 4 is greater than the outer ring varistor layer 2
Sheet resistance.
As shown in Figures 1 to 5, the outer ring varistor layer 2 is low-resistance region, and sheet resistance range is 10-50k Ω/sq, described
Inner ring varistor layer 4 is high resistance area, and sheet resistance range is 50-200k Ω/sq.
As shown in Figures 1 to 5, the varistor layer 20 is printed on the surface of first flexible film substrate 1, the annular
Electrode layer 30 is printed on the surface of second flexible film substrate 7.
As shown in Figures 1 to 5, the outer ring varistor layer 2 and the combination of inner ring varistor layer 4 form a complete circle, do not have
When pressing the highly sensitive pliable pressure senser element of the resistance-type, gap is equipped between the varistor layer 20, annular electrode 5.
As shown in Figures 1 to 5, cohesive material 3 is used to encapsulate the first flexible film substrate 1, the second flexible film substrate 7,
The outer ring varistor layer 2, inner ring varistor layer 4 is set to keep contacting face-to-face with the annular electrode 5, while ensure to be separated by a spacing
From.
As shown in Figures 1 to 5, the varistor layer 20 is that having for deformation synchronous with first flexible film substrate 1 is pressed
The material of quick effect is made, and the varistor layer 20 is mainly mixed by high molecular material and conductive material.
As shown in Figures 1 to 5, the conductive material doping concentration range of inner ring varistor layer 4 is 2- in the varistor layer 20
4wt%, the conductive material doping concentration range of outer ring varistor layer 2 is 4-7.5wt% in the varistor layer 20.
As shown in Figures 1 to 5, the high molecular material of the varistor layer 20 be propylene dichloride resinoid, polyurethane based resin,
At least one of materials such as epoxy resin, phenolic resin, organic siliconresin, the conductive material of the varistor layer 20 are carbon nanometer
At least one of materials such as pipe, carbon fiber, conductive carbon powder, graphene.
As shown in Figures 1 to 5, the annular electrode 5 includes at least a pair of of outer ring electrode circuit and electrocardio at least in a pair
Polar circuit, the pair of outer ring electrode circuit include the first outer ring electrode circuit 10 and the second outer ring electrode circuit 11, described one
It include the first central electrode circuit 12 and the second central electrode circuit 13 to central electrode circuit, the electrode leads to client includes the
One electrode leads to client 8 and second electrode exit 9, the first outer ring electrode circuit 10, the first central electrode circuit 12 converge
Connect afterwards with the first electrode exit 8, the second outer ring electrode circuit 11, the second central electrode circuit 13 converge after with
The second electrode exit 9 connects, the first outer ring electrode circuit 10, the first central electrode circuit 12 altogether, described the
Two outer ring electrode circuits 11, the second central electrode circuit 13 are altogether.
As shown in Figures 1 to 5, the first outer ring electrode circuit 10, the second outer ring electrode circuit 11 are respectively on peripheral edge
Circumferentially, annularly, the first central electrode circuit 12, the second central electrode circuit 13 are radially symmetrical at center respectively
Arrangement, the spacing between the first outer ring electrode circuit 10, the second outer ring electrode circuit 11 are less than first central electrode
The spacing of circuit 12, the second central electrode circuit 13.
As shown in Figures 1 to 5, the first central electrode circuit 12, the second central electrode circuit 13 are isocentric circular arc, parallel lines
One of simple symmetrics patterns such as section.
As shown in Figures 1 to 5, when pressing the highly sensitive pliable pressure senser element of the resistance-type, the outer ring varistor layer 2
It is completely attached to the first outer ring electrode circuit 10, the second outer ring electrode circuit 11, the inner ring varistor layer 4 and described first
Central electrode circuit 12, the second central electrode circuit 13 completely attach to, and when sensor is pressurized, preferentially deformation occurs for center,
Outer ring varistor layer 2 is contacted with the first central electrode circuit 12, the second central electrode circuit 13, and output resistance more slowly reduces,
Curve of output is without mutation；Sensor compression further increases, outer ring varistor layer 2 and the first outer ring electrode circuit 10, the second outer ring
Telegraph circuit 11 contacts, and output resistance further decreases, and finally obtains lower limit output resistance.
As shown in Figures 1 to 5, first electrode exit 8 and second electrode exit 9 are corresponding with 14 He of the first test port
Second test port 15, the first test port 14 and the second test port 15 are exposed, for connecting and testing.
As shown in Figures 1 to 5,9 wider width of the first test port 14 and the second test port, can be used as signal output end
Mouthful, it is used for signal processing module and/or test equipment.
As shown in Figures 1 to 5, first flexible film substrate 1, the second flexible film substrate 7 are used to transmission force load
Lotus, under stress condition, the annular electrode 5 and 20 joint of varistor layer, the measurable resistance of exportable corresponding variation, described the
The material of one flexible film substrate 1 is in the materials such as polyester film, Kapton, polypropylene film, polyvinyl chloride film
At least one, the material of second flexible film substrate 7 is polyester film, Kapton, polypropylene film, polychlorostyrene
At least one of materials such as vinyl film.
As shown in Figures 1 to 5, for the cohesive material 3 with sticking PET material, thickness is preferably 50-150 μm, thus
Cohesive material does not deform during guaranteeing pressing, and sensor is kept to have good resilience and service life.
As shown in Figures 1 to 5, invention also provides prepare the highly sensitive pliable pressure senser element of the resistance-type
One of optimization experiment scheme, comprising the following steps:
Step 1) configures low-resistance region pressure sensitive mixed solution: high molecular material host agent being mixed with diluent, in high-speed stirred
Under the conditions of be added conductive material to be uniformly mixed, use preceding addition curing agent；
Step 2 prepares annular low-resistance region layer of pressure sensitive: the mixed solution prepared in step 1) is printed and/or print and/or
Fexible film surface is sprayed and/or is spun on, printing figures are annular, and are dried at a certain temperature；
Step 3) configures high resistance area pressure sensitive mixed solution: high molecular material host agent being mixed with diluent, in high-speed stirred
Under the conditions of be added conductive material to be uniformly mixed, use preceding addition curing agent；
Step 4) prepares round high resistance area layer of pressure sensitive: the mixed solution prepared in step 3) is printed and/or print and/or
Fexible film surface described in step 2 is sprayed and/or is spun on, printing figures are circle, and printing position is the annular low-resistance
Inside area's pressure sensitive layer pattern, ultimately form complete circle pressure sensitive pattern, after dry at a certain temperature.
Step 5) printed electrode layer: in fexible film surface printing and/or deposition and/or printing and/or coating electrode figure
Shape；
Step 6) encapsulates pliable pressure sensor: will print layer of pressure sensitive and prints the fexible film substrate progress of annular electrode
Fitting encapsulation face-to-face.
As shown in Figures 1 to 5, the highly sensitive pliable pressure senser element of a kind of resistance-type provided by the invention, annular electrode
30 cooperation of layer has the varistor layer 20 of different surfaces resistance, forms the pliable pressure sensing of high sensitive, the internal muting sensitive sense in outer ring
Device, cooperation has certain thickness cohesive material 3, exportable to have the sensing low without mutation, maximum resistance after sensor is pressurized
Curve.The sensor has both higher sensitivity and range curve of output without mutation.
In use, the electrode output interface of sensor is connected with pressure signal processor, while being using power module
Signal processor power supply.In the case that sensor applies without external force, varistor layer 20 and annular electrode layer 30 keep certain distance,
Sensor output resistance is infinitely great；In the case that sensor is by smaller external force, preferentially deformation occurs for sensor center position,
Contact center electrode with inner ring varistor layer 4, since electrode pattern center is center electrode pair, and inner ring varistor layer
4 be high resistance area, and the variation of sensor output resistance is relatively slow, exports the voltage change curve without mutation；When being applied to sensor
The pressure on surface further increases, and gradually deformation occurs for outer ring marginal zone, since electrode pattern marginal position is annular electrode
It is right, cooperate the outer ring varistor layer 2 of low-resistance, sensor output resistance further decreases；When sensor pressure reaches maximum,
Colorimetric sensor films deformation reaches capacity, and annular electrode layer 30 and varistor layer 20 completely attach to, and exports lower maximum resistance value.
Existing major part pliable pressure sensor, electrode pattern are all made of interdigital structure, and sensitizing range is located in sensor
Heart position, when sensor receives pressed by external force, sensitizing range electrode is preferentially contacted with pressure sensitive, and sensor output resistance is anxious
Fall sharply low, sensing curve is easy to appear mutation, and during Continued depression, in interdigital electrode outer ring circuit gradually with pressure sensitive
Contact, since outer ring circuit belongs to muting sensitive sensillary area, output resistance variation is smaller under larger pressure, exists so as to cause sensor and presses
Pressure mutation exports the problems such as linear zone is narrow, sensibility is poor.Using annular electrode structure provided by the invention, by electrode sensitive
Area is adjusted to sensor periphery, is cooperated annular layer of pressure sensitive and is had certain thickness cohesive material, is realized by pressing through
Piezoresistive effect first occurs for Cheng Zhong, muting sensitive sensillary area (sensor center position), and output is without mutation electric signal curve, when pressure increases
Afterwards, piezoresistive effect occurs for high sensitizing range (sensor outer ring position), and output resistance persistently reduces, and finally available range is larger,
While susceptibility is higher, the lesser pressure sensor of limit output resistance.
Example 1
As shown in Figures 1 to 5, circuit width is 0.5mm, electrocardio in the first central electrode circuit 12 and second in annular electrode 5
Polar circuit 13 is isocentric circular arc, and radius is R1=2mm, between the first central electrode circuit 12 and the second central electrode circuit 13
Away from D1=3mm, the first outer ring electrode circuit 10 arc radius R2=3.5mm, 11 arc radius R3 of the second outer ring electrode circuit=
2=1mm of space D of 4.5mm, the first central electrode circuit 12 and the first outer ring electrode circuit 10,10 He of the first outer ring electrode circuit
3=0.5mm of space D of second outer ring electrode circuit 11.The length D4 of first electrode exit 8 and second electrode exit 9=
3mm, the first test port 14 and the second test port 15 are having a size of D5=3.5mm, D6=1.5mm.
The inner ring varistor layer 4 is the circular configuration that radius is R5=3.3mm, and the outer ring varistor layer 2 is ring structure,
R4=5.2mm, the inner ring varistor layer 4 is with outer ring varistor layer 2 without interval.
When attachment, annular varistor layer 20 and 5 corresponding position of annular electrode are as shown in Figure 3.
This embodiment provides the specific manufacture craft of the pliable pressure sensor simultaneously, comprising the following steps:
Step 1) configures low-resistance region pressure sensitive mixed solution: 10g acrylic resin host agent and 3g diluent isophorone are mixed
It closes, 4g carbon nanotube is added under high speed agitation to being uniformly mixed, uses preceding addition 1g curing agent；
Step 2 prepares annular low-resistance region layer of pressure sensitive: the mixed solution prepared in step 1) is printed in PVC film surface,
Printing figures are annular, and spare after drying 30min at 70 DEG C；
Step 3) configures high resistance area pressure sensitive mixed solution: 10g acrylic resin host agent being mixed with 3g diluent, in high speed
2.5g carbon nanotube is added under stirring condition to being uniformly mixed, uses preceding addition 1g curing agent；
Step 4) prepares round high resistance area layer of pressure sensitive: the mixed solution prepared in step 3) is printed in described in step 2
PVC film surface, printing figures are circle, and printing position is to ultimately form complete circle inside the annular low-resistance region figure
Pressure sensitive pattern, after dry 30min at 70 DEG C.
Step 5) printed electrode layer: using conductive silver slurry in PET fexible film surface printing annular electrode, after 130
Conduction is sintered at DEG C；
Step 6) encapsulates pliable pressure sensor: will print layer of pressure sensitive and prints the fexible film substrate progress of annular electrode
Fitting encapsulation face-to-face, uses cohesive material for two-sided PET glue, with a thickness of 0.1mm.
The test of sensor performance described in embodiment 1:
By the first test port 14 described in prepared pressure sensor electrode and the second test port 15 and processor module
And power module is connected, and tests it by defeated under different pressures state using Japanese figure skill high-speed record instrument (GL900APS)
Voltage change out.
There is provided voltage in this embodiment for sensor is 2.7V, and when no external force is when sensor surface, pressure is passed
Sensor output voltage is 2.7V；It is less than 20N when applying external force, pressure sensor output voltage is still 2.7V or so, without obvious
Variation keeps varistor layer and electrode under original state mutual this is because the binding material used when encapsulation just has certain thickness
At a certain distance, therefore under smaller external force, varistor layer is not generated with electrode and is contacted, and output voltage does not change；Work as application
External force be greater than 20N when, sensor output voltage significantly reduces, in 20N ~ 100N, sensor output voltage with applied
Good negatively correlated characteristic is presented in pressure；When pressure is greater than 100N, sensor output voltage reaches capacity, due to outer ring electrode
With the presence of low-resistance region pressure sensitive, limit output voltage is down to 0.17V.
The pliable pressure sensor prepared in this embodiment, in range ability, output voltage and pressure applied have
There are good correlation properties, and have lower limit output voltage, which has the high, curve of output to pressure-sensitivity
Without advantages such as mutation.
The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and it cannot be said that
Specific implementation of the invention is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs, exist
Under the premise of not departing from present inventive concept, a number of simple deductions or replacements can also be made, all shall be regarded as belonging to of the invention
Protection scope.
Claims (10)
1. a kind of highly sensitive pliable pressure senser element of resistance-type, it is characterised in that: the first fexible film including lamination setting
Substrate, varistor layer, annular electrode layer and the second flexible film substrate, wherein the varistor layer is located at first fexible film
Between substrate, annular electrode layer, the annular electrode layer is between the varistor layer, the second flexible film substrate, the ring
Shape electrode layer includes annular electrode and electrode leads to client, and the annular electrode is connect with the electrode leads to client, and described first is soft
Property film substrate and second flexible film substrate by cohesive material encapsulation, the varistor layer includes being generally aligned in the same plane
The diameter of outer ring varistor layer and inner ring varistor layer, the outer ring varistor layer is greater than the inner ring varistor layer, the inner ring varistor layer
Sheet resistance be greater than the outer ring varistor layer sheet resistance.
2. the highly sensitive pliable pressure senser element of resistance-type according to claim 1, it is characterised in that: the varistor layer print
For system on the surface of first flexible film substrate, the annular electrode layer is printed on the table of second flexible film substrate
Face.
3. the highly sensitive pliable pressure senser element of resistance-type according to claim 1, it is characterised in that: the outer ring is pressure-sensitive
Layer and inner ring varistor layer combine to form a complete circle, and gap is equipped between the varistor layer, annular electrode.
4. the highly sensitive pliable pressure senser element of resistance-type according to claim 1, it is characterised in that: the varistor layer is
The material with voltage-sensitive effect of deformation synchronous with first flexible film substrate is made, and the varistor layer is mainly by macromolecule
Material is mixed with conductive material.
5. the highly sensitive pliable pressure senser element of resistance-type according to claim 4, it is characterised in that: in the varistor layer
The conductive material doping concentration range of inner ring varistor layer is 2-4wt%, the conductive material doping of outer ring varistor layer in the varistor layer
Concentration range is 4-7.5wt%.
6. the highly sensitive pliable pressure senser element of resistance-type according to claim 4, it is characterised in that: the varistor layer
High molecular material be propylene dichloride resinoid, polyurethane based resin, epoxy resin, phenolic resin, in organic siliconresin at least
One kind, the conductive material of the varistor layer are at least one of carbon nanotube, carbon fiber, conductive carbon powder, graphene.
7. the highly sensitive pliable pressure senser element of resistance-type according to claim 1, it is characterised in that: the annular electrode
Including at least a pair of of outer ring electrode circuit and at least a pair of of central electrode circuit, the pair of outer ring electrode circuit includes outside first
Ring electrode circuit and the second outer ring electrode circuit, the pair of central electrode circuit include in the first central electrode circuit and second
Electrocardio polar circuit, the electrode leads to client include first electrode exit and second electrode exit, first outer ring electrode
Circuit, the first central electrode circuit are connect after converging with the first electrode exit, the second outer ring electrode circuit, second
Central electrode circuit is connect after converging with the second electrode exit, the first outer ring electrode circuit, the first central electrode
Altogether, the second outer ring electrode circuit, the second central electrode circuit are altogether for circuit.
8. the highly sensitive pliable pressure senser element of resistance-type according to claim 7, it is characterised in that: first outer ring
Telegraph circuit, the second outer ring electrode circuit respectively periphery circumferentially, annularly, the first central electrode circuit, the
Two central electrode circuits are radially arranged symmetrically at center respectively, the first outer ring electrode circuit, the second outer ring electrode circuit
Between spacing be less than the first central electrode circuit, the second central electrode circuit spacing.
9. the highly sensitive pliable pressure senser element of resistance-type according to claim 7, it is characterised in that: press the resistance
When the highly sensitive pliable pressure senser element of formula, the outer ring varistor layer and the first outer ring electrode circuit, the second outer ring electrode
Electrical contact, the inner ring varistor layer and the first central electrode circuit, the second central electrode electrical contact.
10. the highly sensitive pliable pressure senser element of resistance-type according to claim 1, it is characterised in that: described first is soft
Property film substrate, the second flexible film substrate be used to transmission force load, the material of first flexible film substrate is polyester
At least one of film, Kapton, polypropylene film, polyvinyl chloride film, second flexible film substrate
Material is at least one of polyester film, Kapton, polypropylene film, polyvinyl chloride film.
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| CN117302712A (en) * | 2023-10-16 | 2023-12-29 | 深圳市优必行科技有限公司 | Intelligent tray and robot |
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