CN109904096A - A kind of semiconductor load all-in-one machine - Google Patents
A kind of semiconductor load all-in-one machine Download PDFInfo
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- CN109904096A CN109904096A CN201910123740.7A CN201910123740A CN109904096A CN 109904096 A CN109904096 A CN 109904096A CN 201910123740 A CN201910123740 A CN 201910123740A CN 109904096 A CN109904096 A CN 109904096A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 23
- 239000000463 material Substances 0.000 claims abstract description 126
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 76
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 76
- 239000010439 graphite Substances 0.000 claims abstract description 76
- 238000000034 method Methods 0.000 claims abstract description 20
- 238000012546 transfer Methods 0.000 claims description 74
- 239000003292 glue Substances 0.000 claims description 48
- 238000001514 detection method Methods 0.000 claims description 22
- 238000007599 discharging Methods 0.000 claims description 11
- 238000010521 absorption reaction Methods 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 238000004026 adhesive bonding Methods 0.000 claims description 2
- 230000003028 elevating effect Effects 0.000 claims description 2
- 230000008450 motivation Effects 0.000 claims 2
- 239000004575 stone Substances 0.000 claims 2
- 239000000853 adhesive Substances 0.000 claims 1
- 230000001070 adhesive effect Effects 0.000 claims 1
- 238000009434 installation Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 230000000694 effects Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
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Abstract
The invention discloses a kind of semiconductor load all-in-one machines, including organic frame, linear motor mould group, servo motor mould group and electric-control system, it is provided with feeding station, dispensing station, patch chip station, graphite plate on the workbench of rack and closes piece station and discharge station, it is equipped with linear guide and linear motor on the table, accurate position is arranged by guide rail and linear motor in each station.By the way that linear guide is arranged on the table material fetching mechanism everywhere is arranged, the corresponding material fetching mechanism of station at basic realization one in the present invention in linear guide；Each operating mechanism is arranged each along linear guide, i.e. progress corresponding operation is moved at corresponding station by material fetching mechanism, the dispensing of egative film bracket can be carried out simultaneously, chip fitting, chip dispensing, the processes such as piece, blanking are closed on graphite plate, and realize that double-sheet transmits, to keep entire operation process more smoothly, failure rate is reduced, production efficiency is greatly improved, manpower 3-4 people can be saved compared to one assembly line of tradition.
Description
Technical field
The present invention relates to semiconductor production technical fields, and in particular to a kind of for manufacturing semi-conductor electronic device
Equipment, such as semiconductor diode, transistor.
Background technique
With the fast development of science and technology, semi-conductor electronic device is had been more and more widely used, two pole of semiconductor
Pipe, transistor etc., the requirement simultaneously for this kind of semi-conductor electronic device is also higher and higher, therefore its production process
Also it is increasingly stringenter.In the production process of semiconductor devices, generally encapsulation is realized using loader, however partly leading at present
Body sealed in unit is lacking in structure design aspect, lack of wisdom, leads to that production procedure is cumbersome, inefficiency, each operative employee
Can completely is not connected sequence, and there are problems for stabilization of equipment performance and quality control aspect, without big data as statistics；Separately
Outside, the problems such as maintenance is inconvenient, and equipment safety performance is bad is caused since structure is complicated.
Summary of the invention
The present invention is directed to disadvantage of the existing technology, provide a kind of structure is relatively simpler, design more rationally, production stream
Journey is more smooth, the higher semiconductor load all-in-one machine of production efficiency.
In order to solve the above technical problems, the present invention adopts the following technical scheme: a kind of semiconductor load all-in-one machine, includes
Rack, linear motor mould group, servo motor mould group and electric-control system, are provided with feeding station, dispensing on the workbench of rack
Station, patch chip station, graphite plate close piece station and discharge station, and the material fetching mechanism for carrying tablet is equipped between station
And the transfer robot for shifting tablet, it is characterised in that: be equipped with linear guide, the material fetching mechanism peace on the table
Station can be transferred to from previous station for tablet along the structure that linear guide moves by being formed in linear guide；Respectively
Station is arranged along the edge of linear guide, and each transfer robot is set to beside station or between two stations；
The dispensing station includes the first dispensing station and the second dispensing station, is respectively arranged with the first point glue equipment and second
Point glue equipment, the first point glue equipment are set to the side of linear guide starting end position, and feeding station is also close to linear guide
Starting point, the tablet being transferred in the material fetching mechanism of the first dispensing station by feeding station complete point by the first point glue equipment
Glue process；
Patch chip station is set to after the first dispensing station, and pasting chip station includes dividing column there are two chip unit is pasted
In the two sides of linear guide, two patch chip units are respectively provided with a set of chip Tie Qu mechanism；Chip Tie Qu mechanism includes chip
Apparatus for placing, coring sheet devices and positioning detection mechanism are taken out the chip on chip apparatus for placing simultaneously by coring sheet devices
It is transferred in the material fetching mechanism at patch chip station, and chip is placed under the control of positioning detection mechanism and is located at patch chip
Patch chip process is completed on tablet at station in material fetching mechanism；
Second dispensing station is set to after patch chip station, and the second point glue equipment is set to the side of linear guide, by pasting
Chip station is transferred to the chip being carried on tablet at the second dispensing station and completes point glue process by the second point glue equipment；
Graphite plate close piece station be set to after the second dispensing station, graphite plate close piece station at be provided with graphite plate microscope carrier and
Corresponding transfer robot mechanism, the setting of graphite plate microscope carrier form removable frame, transmitting mechanical mobile phone in linear guide
Structure is then suspended from the top of graphite plate microscope carrier, will complete to put glue process by the transfer robot mechanism and carries the tablet of chip
It is transferred on graphite plate microscope carrier, covers upper plate rack in the egative film bracket for having put chip gluing also through the transfer robot mechanism
On；
Discharge station is set to after graphite plate conjunction piece station, is located at the end of linear guide.
Further, the material fetching mechanism includes the first material fetching mechanism, the second material fetching mechanism and third material fetching mechanism,
It include tablet microscope carrier, tablet microscope carrier is set on a material containing Y-axis Mobile base, and material containing Y-axis Mobile base is mounted on material containing X-axis shifting
On dynamic seat, material containing X-axis Mobile base is equipped with the moving track perpendicular with linear guide, and material containing Y-axis Mobile base is connected with driving
Device forms the structure that can be moved back and forth on material containing X-axis Mobile base along Y-direction, and material containing X-axis Mobile base is connected with driving device shape
At structure of the X to reciprocating movement can be done in linear guide；First material fetching mechanism is set at the first dispensing station, the second material containing
Mechanism is set at patch chip station, and third material fetching mechanism is set at the second dispensing station.Each material fetching mechanism is used and is held in this way
The position of egative film bracket can be better achieved to just in mounted mechanism.
Further, it is equipped with the first transfer robot on the side of feeding station, had thereon for detecting egative film bracket
Successful detection sensor part whether is drawn, the tablet of feeding station is transferred to by the first material containing machine by the first transfer robot
On the tablet microscope carrier of structure；It is equipped with the second transfer robot between the first dispensing station and patch chip station, passes through the second transmission
Tablet in first material fetching mechanism is transferred on the tablet microscope carrier of the second material fetching mechanism by manipulator；In patch chip station and second
It is provided with third transfer robot between dispensing station, chip will be carried in the second material fetching mechanism by third transfer robot
Tablet be transferred on the tablet microscope carrier of third material fetching mechanism；Closing the transfer robot mechanism being arranged at piece station in graphite plate is
4th transfer robot, the 4th transfer robot be mounted in one the 4th transfer robot Y-axis moving mechanism formed can be past along Y-direction
The structure moved again, the 4th transfer robot Y-axis moving mechanism and linear guide are perpendicular, and it is horizontal be suspended from above linear guide,
The tablet that chip is carried in third material fetching mechanism is transferred on graphite plate microscope carrier by the 4th transfer robot, and at upper
Bracket cover is taken to complete to close piece movement on graphite plate microscope carrier at hopper；The 5th transfer robot is provided at discharge station,
5th transfer robot is mounted on the structure for being formed and being moved back and forth in one the 5th transfer robot Y-axis moving mechanism along Y-direction, the
Five transfer robot Y-axis moving mechanism and linear guide are perpendicular, close piece for graphite plate is completed by the 5th transfer robot
Tablet carries out blanking.
Further, the load carrier of graphite plate microscope carrier is identical as the load carrier of tablet microscope carrier, also includes material containing X-axis
Mobile base and material containing Y-axis Mobile base, graphite plate microscope carrier are set on material containing Y-axis Mobile base, and material containing Y-axis Mobile base is mounted on material containing
On X-axis Mobile base, material containing X-axis Mobile base is equipped with the moving track perpendicular with linear guide, and material containing Y-axis Mobile base is connected with
Driving device forms the structure that can be moved back and forth on material containing X-axis Mobile base along Y-direction, and material containing X-axis Mobile base is connected with driving dress
It sets to be formed and can do structure of the X to reciprocating movement in linear guide.Egative film branch can be better achieved using such load carrier
Frame is aligned with upper plate rack.
Further, egative film discharging device is provided at feeding station, egative film discharging device is equipped with two bottoms arranged side by side
Piece loading plate is provided with the egative film limited post for blocking egative film bracket around two egative film loading plates, passes through the first transmission
Manipulator is once drawn two egative film brackets simultaneously and is transferred in the first material fetching mechanism.
Further, first point glue equipment and the second point glue equipment structure having the same, include dispensing control
Device and Glue dripping head processed, Glue dripping head are controlled by dispensing controller；Several Glue dripping heads install glue liter on one point by X-axis guide rail
Being formed on drop seat can be along X to the structure moved, and dispensing lifting seat is mounted in dispensing fixing seat by Z axis guide rail and forms liftable
Structure, dispensing driving mechanism is equipped in dispensing fixing seat, and dispensing driving mechanism connects dispensing lifting seat to control its lifting fortune
It is dynamic.
Further, it is equipped with the first detection camera at the first dispensing station, the second inspection is equipped at the second dispensing station
Camera is surveyed, to detect effect for dispensing glue；It is closed in graphite plate and is equipped with third detection camera at piece station, to detect graphite plate upper piece branch
The effect of frame.
Further, chip apparatus for placing includes that chip places ring and straight line mould group X, Y mobile mechanism, and chip places ring
It is mounted on forming position adjustable structure in straight line mould group X, Y mobile mechanism, the diaphragm for carrying chip is placed on chip and places ring
On；Positioning detection mechanism is set to the top that chip places ring；Coring sheet devices include feeding swing arm and ejector pin mechanism, feeding
Swing arm carries out absorption chip by rotating servo motor control left and right and up and down, by vacuum gas, and feeding swing arm is horizontally placed on
Chip is placed between ring and the second material fetching mechanism, and the chip on chip bearing diaphragm is transferred to the second material containing by feeding swing arm
Mechanism is bonded with tablet；Ejector pin mechanism is set to the lower section that chip places ring, is jacked up chip bearing diaphragm by ejector pin mechanism
To press from both sides absorption chip with cooperation feeding swing arm.
Further, it closes in graphite plate and is equipped with beside the linear guide at piece station for placing plate rack on graphite plate
Upper piece discharging device, plate rack is previously positioned on this in discharging device on graphite plate, is then moved by the 4th transfer robot
It is sent on graphite plate microscope carrier and is bonded with chip.
Further, the first graphite carrier and the second graphite carrier are additionally provided at discharge station, the two is symmetrically disposed on
Tablet on graphite plate microscope carrier is transferred to the first graphite carrier by the 5th transfer robot by the end two sides of linear guide respectively
With blanking is carried out on the second graphite carrier, both sides can carry out blanking simultaneously, improve efficiency.
The present invention leads to the linear guide of tail by setting one on the table, and material containing machine everywhere is arranged in linear guide
Structure, it is basic to realize the corresponding material fetching mechanism of station at one, and material fetching mechanism can be moved left and right in linear guide to realize material
Transfer and exactitude position；The operating mechanism of each station is arranged each along linear guide, is moved to corresponding station by material fetching mechanism
Place carries out corresponding operation, can carry out the dispensing of egative film bracket, chip fitting, chip dispensing, graphite plate fitting, blanking etc. simultaneously
Process, and realize that double-sheet transmits, to keep entire operation process more smoothly, production efficiency can be greatly improved, compared to biography
System technique, an assembly line can save manpower 3-4 people.In addition, smooth degree of the whole equipment due to improving process, thus product
Matter control is more accurate, and detection camera cooperates software, realizes digitization, and Realtime Alerts are relatively reliable.Pass through industrial computer and control
Board communication, controls linear motor and servo motor (in each mobile mechanism), realizes being precisely controlled for position.
Detailed description of the invention
Fig. 1 is three-dimensional structure diagram of the present invention；
Fig. 2 is overlooking structure figure of the present invention；
Fig. 3 is the portion the A enlarged drawing of Fig. 1；
Fig. 4 is the portion the B enlarged drawing of Fig. 1；
Fig. 5 is the portion the C enlarged drawing of Fig. 1.
In figure, 1 is rack, and 10 be workbench, and 11 be linear guide, and 13 be the first material fetching mechanism, and 14 be the second material containing machine
Structure, 15 be third material fetching mechanism, and 16 be tablet microscope carrier, and 17 be material containing X-axis Mobile base, and 18 be material containing Y-axis Mobile base, and 19 be graphite
Disk microscope carrier, 2 be egative film discharging device, and 21 be egative film loading plate, and 22 be egative film limited post, and 31 be the first transfer robot, and 32 are
Second transfer robot, 33 be third transfer robot, and 34 be the 4th transfer robot, and 35 be the 5th transfer robot, and 36 are
4th transfer robot Y-axis moving mechanism, 37 be the 5th transfer robot Y-axis moving mechanism, and 41 be the first point glue equipment, and 42 are
Second point glue equipment, 43 be dispensing controller, and 44 be Glue dripping head, and 45 be dispensing lifting seat, and 46 be Z axis guide rail, and 47 is solid for dispensing
Reservation, 48 be dispensing driving mechanism；5 be chip Tie Qu mechanism, and 51 place ring for chip, and 52 be straight line mould group X, Y mobile mechanism,
53 be feeding swing arm, and 54 be feeding control cabinet, and 55 be ejector pin mechanism, and 56 be positioning detection mechanism, and 6 be indication mechanism, and 71 be the
One detection camera, 72 be the second detection camera, and 73 detect camera for third, and 8 be upper piece discharging device, and 91 carry for the first graphite
Tool, 92 be the second graphite carrier.
Specific embodiment
In the present embodiment ,-Fig. 4, the semiconductor load all-in-one machine, including organic frame 1, indication mechanism 6 and electricity referring to Fig.1
Control system, be provided on the workbench 10 of rack 1 feeding station, dispensing station, patch chip station, graphite plate close piece station and
Discharge station is equipped with the transfer robot for carrying the material fetching mechanism of tablet and for shifting tablet between station；?
Workbench 10 is equipped with linear guide 11, and the material fetching mechanism, which is mounted on, to be formed in linear guide 11 and can move along linear guide 11
Structure, tablet is transferred to station from previous station；Each station is arranged along the edge of linear guide 11, and respectively passes
Manipulator is sent to be set to beside station or between two stations；
The dispensing station includes the first dispensing station and the second dispensing station, is respectively arranged with the first point glue equipment 41 and
Two point glue equipments 42, the first point glue equipment 41 are set to the side that linear guide 11 originates end position, and feeding station is also close to straight
The starting point of line guide rail 11, the tablet being transferred in the material fetching mechanism of the first dispensing station by feeding station pass through the first dispensing
Device 41 completes point glue process；
Patch chip station is set to after the first dispensing station, and pasting chip station includes dividing column there are two chip unit is pasted
In the two sides of linear guide 11, two patch chip units are respectively provided with a set of chip Tie Qu mechanism 5；Chip Tie Qu mechanism 5 includes
Chip apparatus for placing, coring sheet devices and positioning detection mechanism 56, by coring sheet devices by the chip on chip apparatus for placing
It takes out and is transferred in the material fetching mechanism at patch chip station, and place chip in place under the control of positioning detection mechanism 56
Patch chip process is completed on the tablet at chip station in material fetching mechanism in pasting；
Second dispensing station is set to after patch chip station, and the second point glue equipment 42 is set to the side of linear guide 11,
Point is completed by the second point glue equipment 42 by the chip being carried on tablet that patch chip station is transferred to the second dispensing station
Glue process；
Graphite plate closes piece station and is set to after the second dispensing station, closes in graphite plate and is provided with graphite plate microscope carrier 19 at piece station
With corresponding transfer robot mechanism, the setting of graphite plate microscope carrier 19 forms removable frame, conveyer in linear guide 11
Tool mobile phone structure is then suspended from the top of graphite plate microscope carrier 19, will complete point glue process by the transfer robot mechanism and carries core
The tablet of piece is transferred on graphite plate microscope carrier 19, and graphite plate upper piece is fitted on chip also through the transfer robot mechanism；
Discharge station is set to after graphite plate conjunction piece station, is located at the end of linear guide 11.
The material fetching mechanism includes the first material fetching mechanism 13, the second material fetching mechanism 14 and third material fetching mechanism 13, is wrapped
Tablet microscope carrier 16 is included, tablet microscope carrier 16 is set on a material containing Y-axis Mobile base 18, and material containing Y-axis Mobile base 18 is mounted on a load
Expect on X-axis Mobile base 17, material containing X-axis Mobile base 17 is equipped with the moving track perpendicular with linear guide 11, and material containing Y-axis is mobile
Seat 18 is connected with driving device and forms the structure that can be moved back and forth on material containing X-axis Mobile base 17 along Y-direction, material containing X-axis Mobile base
17 are connected with driving device formation can do structure of the X to reciprocating movement in linear guide 11；First material fetching mechanism 13 is set to
At first dispensing station, the second material fetching mechanism 14 is set at patch chip station, and third material fetching mechanism 14 is set to the second dispensing
At station.The position of egative film bracket can be better achieved to just using such load carrier in each material fetching mechanism.
It is equipped with the first transfer robot 31 on the side of feeding station, is had thereon for detecting whether egative film bracket is drawn
Successful detection sensor part, is transferred to the first material fetching mechanism 13 for the tablet of feeding station by the first transfer robot 31
On tablet microscope carrier 16；It is equipped with the second transfer robot 32 between the first dispensing station and patch chip station, passes through the second transmission
Tablet in first material fetching mechanism 13 is transferred on the tablet microscope carrier 16 of the second material fetching mechanism 14 by manipulator 32；In patch chip work
It is provided with third transfer robot 33 between position and the second dispensing station, by third transfer robot 33 by the second material fetching mechanism
The tablet that chip is carried on 14 is transferred on the tablet microscope carrier 16 of third material fetching mechanism 15；It closes in graphite plate and is arranged at piece station
Transfer robot mechanism be the 4th transfer robot 34, the 4th transfer robot 34 is mounted on one the 4th transfer robot Y-axis
The structure that can be moved back and forth along Y-direction, the 4th transfer robot Y-axis moving mechanism 36 and linear guide 11 are formed in mobile mechanism 36
It is perpendicular, and it is horizontal be suspended from the top of linear guide 11, core will be carried in third material fetching mechanism 15 by the 4th transfer robot 34
The tablet of piece is transferred on graphite plate microscope carrier 19；The 5th transfer robot 35, the 5th transmitting mechanical are provided at discharge station
Hand 35 is mounted on the structure for being formed and being moved back and forth in one the 5th transfer robot Y-axis moving mechanism 37 along Y-direction, the 5th conveyer
Tool hand Y-axis moving mechanism 37 is perpendicular with linear guide 11, and the material of graphite plate conjunction piece will be completed by the 5th transfer robot 35
Piece carries out blanking.
The load carrier of graphite plate microscope carrier 19 is identical as the load carrier of tablet microscope carrier 16, also includes that material containing X-axis is mobile
Seat 17 and material containing Y-axis Mobile base 18, graphite plate microscope carrier 19 are set on material containing Y-axis Mobile base 18, and material containing Y-axis Mobile base 18 is installed
On material containing X-axis Mobile base 17, material containing X-axis Mobile base 17 is equipped with the moving track perpendicular with linear guide 11, material containing Y-axis
Mobile base 18 is connected with driving device and forms the structure that can be moved back and forth on material containing X-axis Mobile base 17 along Y-direction, and material containing X-axis is moved
Dynamic seat 17 is connected with driving device formation can do structure of the X to reciprocating movement in linear guide 11.Using such load carrier
Egative film bracket can be better achieved to be aligned with upper plate rack.
Egative film discharging device 2 is provided at feeding station, egative film discharging device 2 is equipped with two egative film loading plates arranged side by side
21, it is provided with the egative film limited post 22 for blocking egative film bracket around two egative film loading plates 21, passes through the first conveyer
The primary two egative film brackets of drawing simultaneously of tool hand 31 are transferred in the first material fetching mechanism 13.
First point glue equipment 41 and the structure having the same of the second point glue equipment 42, include dispensing controller 43
With Glue dripping head 44, Glue dripping head 44 is controlled by dispensing controller 43；Several (such as 3) Glue dripping heads 44 are pacified by X-axis guide rail
Being formed on a dispensing lifting seat 45 can be along X to the structure moved, and dispensing lifting seat 45 is mounted on dispensing by Z axis guide rail 46
Liftable structure is formed in fixing seat 47, dispensing driving mechanism 48 is installed in dispensing fixing seat 47, and dispensing driving mechanism 48 connects
Contact glue lifting seat 45 is to control its elevating movement.
It is equipped with the first detection camera 71 at the first dispensing station, the second detection camera is equipped at the second dispensing station
72, to detect effect for dispensing glue；It is closed in graphite plate and is equipped with third detection camera 73 at piece station, to detect plate rack on graphite plate
Effect.
Chip apparatus for placing includes that chip places ring 51 and straight line mould group X, Y mobile mechanism 52, and chip is placed ring 51 and pacified
The forming position adjustable structure in straight line mould group X, Y mobile mechanism 52, the diaphragm for carrying chip are placed on chip and place ring
On 51；Positioning detection mechanism 56 is set to the top that chip places ring 51；Coring sheet devices include feeding swing arm 53 and thimble
Mechanism 55, feeding swing arm 53 by feeding control cabinet 54 rotating servo motor control left and right with up and down, by vacuum gas into
Row absorption chip, feeding swing arm 53 are horizontally placed on chip and place between ring 51 and the second material fetching mechanism 14, pass through feeding swing arm
Chip on chip bearing diaphragm is transferred to the second material fetching mechanism 14 by 53 to be bonded with tablet；Ejector pin mechanism 55 is set to chip and puts
The lower section for setting ring 51 is jacked up chip bearing diaphragm to press from both sides absorption chip with cooperation feeding swing arm 53 by ejector pin mechanism 55.
Graphite plate close be equipped with beside the linear guide 11 at piece station for place plate rack on graphite plate upper piece put
Expect device 8, plate rack is previously positioned on this in discharging device 8 on graphite plate, is then transferred by the 4th transfer robot 34
It is bonded on to graphite plate microscope carrier 19 with chip.
The first graphite carrier 91 and the second graphite carrier 92 are additionally provided at discharge station, the two is symmetrically disposed on straight line and leads
Tablet on graphite plate microscope carrier 19 is transferred to the first graphite carrier by the 5th transfer robot 35 by the end two sides of rail 11 respectively
91 and second carry out blanking on graphite carrier 92, and both sides can carry out blanking simultaneously, improve efficiency.
The above has been described in detail, described above, is only a preferred embodiment of the present invention, when cannot
It limit the scope of implementation of the present invention, i.e., it is all according to the made equivalent changes and modifications of the application range, it should still belong to covering scope of the present invention
It is interior.
Claims (10)
1. a kind of semiconductor load all-in-one machine, including organic frame, linear motor mould group, servo motor mould group and electric-control system,
It is provided with feeding station, dispensing station, patch chip station, graphite plate on the workbench of rack and closes piece station and discharge station,
The transfer robot for carrying the material fetching mechanism of tablet and for shifting tablet is equipped between station, it is characterised in that:
Workbench be equipped with linear guide, the material fetching mechanism be mounted in linear guide formed can along the structure that linear guide moves,
Tablet is transferred to station from previous station；Each station is arranged along the edge of linear guide, and each transfer robot
It is set to beside station or between two stations；
The dispensing station includes the first dispensing station and the second dispensing station, is respectively arranged with the first point glue equipment and second
Point glue equipment, the first point glue equipment are set to the side of linear guide starting end position, and feeding station is also close to linear guide
Starting point, the tablet being transferred in the material fetching mechanism of the first dispensing station by feeding station complete point by the first point glue equipment
Glue process；
Patch chip station is set to after the first dispensing station, and pasting chip station includes dividing column there are two chip unit is pasted
In the two sides of linear guide, two patch chip units are respectively provided with a set of chip Tie Qu mechanism；Chip Tie Qu mechanism includes chip
Apparatus for placing, coring sheet devices and positioning detection mechanism are taken out the chip on chip apparatus for placing simultaneously by coring sheet devices
It is transferred in the material fetching mechanism at patch chip station, and under the control of positioning detection mechanism, chip is placed on and is located at patch core
On tablet at piece station in material fetching mechanism, patch chip process is completed；Second dispensing station is set to after patch chip station,
Second point glue equipment is set to the side of linear guide, is transferred to the second dispensing station by patch chip station, is carried on tablet
On chip, pass through the second point glue equipment complete point a glue process；
Graphite plate close piece station be set to after the second dispensing station, graphite plate close piece station at be provided with graphite plate microscope carrier and
Corresponding transfer robot mechanism, the setting of graphite plate microscope carrier form removable frame, transmitting mechanical mobile phone in linear guide
Structure is then suspended from the top of graphite plate microscope carrier, will complete point glue process by the transfer robot mechanism, and carry the material of chip
Piece is transferred on graphite plate microscope carrier, covers upper plate rack in the egative film branch for having put chip gluing also through the transfer robot mechanism
On frame；
Discharge station is set to after graphite plate conjunction piece station, is located at the end of linear guide.
2. semiconductor load all-in-one machine according to claim 1, it is characterised in that: the material fetching mechanism includes the first load
Expect mechanism, the second material fetching mechanism and third material fetching mechanism, include tablet microscope carrier, tablet microscope carrier is set to material containing Y-axis shifting
On dynamic seat, material containing Y-axis Mobile base is mounted on a material containing X-axis Mobile base, and material containing X-axis Mobile base is equipped with mutually to hang down with linear guide
Straight moving track, material containing Y-axis Mobile base are connected with driving device and are formed and can be moved back and forth on material containing X-axis Mobile base along Y-direction
Structure, material containing X-axis Mobile base be connected with driving device formation structure of the X to reciprocating movement can be done in linear guide；First
Material fetching mechanism is set at the first dispensing station, and the second material fetching mechanism is set at patch chip station, the setting of third material fetching mechanism
At the second dispensing station.
3. semiconductor load all-in-one machine according to claim 2, it is characterised in that: be equipped with first on the side of feeding station
Transfer robot has for detecting whether egative film bracket draws successful detection sensor part thereon, passes through the first conveyer
The tablet of feeding station is transferred on the tablet microscope carrier of the first material fetching mechanism by tool hand；In the first dispensing station and patch chip station
Between be equipped with the second transfer robot, the tablet in the first material fetching mechanism is transferred to by the second material containing by the second transfer robot
On the tablet microscope carrier of mechanism；It is provided with third transfer robot between patch chip station and the second dispensing station, passes through third
The tablet that chip is carried in second material fetching mechanism is transferred on the tablet microscope carrier of third material fetching mechanism by transfer robot；In stone
It is the 4th transfer robot that disc, which closes the transfer robot mechanism being arranged at piece station, and the 4th transfer robot is mounted on one the 4th
In transfer robot Y-axis moving mechanism formed can along Y-direction move back and forth structure, the 4th transfer robot Y-axis moving mechanism with
Linear guide is perpendicular, and it is horizontal be suspended from above linear guide, will be carried in third material fetching mechanism by the 4th transfer robot
The tablet of chip is transferred on graphite plate microscope carrier, and is taken bracket cover to complete conjunction piece on graphite plate microscope carrier at upper hopper and moved
Make；The 5th transfer robot is provided at discharge station, the 5th transfer robot is mounted on the shifting of one the 5th transfer robot Y-axis
The structure that can be moved back and forth along Y-direction is formed on motivation structure, the 5th transfer robot Y-axis moving mechanism and linear guide are perpendicular,
The tablet for completing graphite plate conjunction piece is subjected to blanking by the 5th transfer robot.
4. semiconductor load all-in-one machine according to claim 3, it is characterised in that: the load carrier and material of graphite plate microscope carrier
The load carrier of piece microscope carrier is identical, also includes material containing X-axis Mobile base and material containing Y-axis Mobile base, and graphite plate microscope carrier is set to load
Expect on Y-axis Mobile base, material containing Y-axis Mobile base is mounted on material containing X-axis Mobile base, and material containing X-axis Mobile base is equipped with and leads with straight line
The perpendicular moving track of rail, material containing Y-axis Mobile base is connected with driving device formation can be past along Y-direction on material containing X-axis Mobile base
The structure moved again, material containing X-axis Mobile base is connected with driving device formation can do knot of the X to reciprocating movement in linear guide
Structure.
5. semiconductor load all-in-one machine according to claim 3, it is characterised in that: be provided with egative film at feeding station and put
Expect that device, egative film discharging device are equipped with two egative film loading plates arranged side by side, are provided with around two egative film loading plates for keeping off
The firmly limited post of egative film bracket is once drawn two egative film brackets simultaneously by the first transfer robot and is transferred to the first material fetching mechanism
On.
6. semiconductor load all-in-one machine according to claim 1, it is characterised in that: first point glue equipment and second point
Adhesive dispenser structure having the same, includes dispensing controller and Glue dripping head, and Glue dripping head is controlled by dispensing controller；
Several Glue dripping heads can be along X to the structure moved by being formed in X-axis guide rail installation on one point glue lifting seat, and dispensing lifting seat passes through
Z axis guide rail, which is mounted in dispensing fixing seat, forms liftable structure, and dispensing driving mechanism is equipped in dispensing fixing seat, and dispensing is driven
Motivation structure connects dispensing lifting seat to control its elevating movement.
7. semiconductor load all-in-one machine according to claim 1, it is characterised in that: be equipped with first at the first dispensing station
Camera is detected, the second detection camera is equipped at the second dispensing station, is closed in graphite plate and detects camera equipped with third at piece station.
8. semiconductor load all-in-one machine according to claim 2, it is characterised in that: chip apparatus for placing includes that chip is put
Ring and straight line mould group X, Y mobile mechanism are set, chip places ring and is mounted on the adjustable knot of forming position in straight line mould group X, Y mobile mechanism
Structure, the diaphragm for carrying chip are placed on chip and place on ring；Positioning detection mechanism is set to the top that chip places ring；Coring
Sheet devices include feeding swing arm and ejector pin mechanism, feeding swing arm by rotating servo motor control left and right with up and down, pass through vacuum
Gas carries out absorption chip, and feeding swing arm is horizontally placed on chip and places between ring and the second material fetching mechanism, passes through feeding swing arm
Chip on chip bearing diaphragm is transferred to the second material fetching mechanism to be bonded with tablet；Ejector pin mechanism is set to chip and places ring
Chip bearing diaphragm is jacked up by ejector pin mechanism and cooperates feeding swing arm absorption chip by lower section.
9. semiconductor load all-in-one machine according to claim 1, it is characterised in that: close the straight line at piece station in graphite plate
Upper piece discharging device for placing plate rack on graphite plate is equipped with beside guide rail.
10. semiconductor load all-in-one machine according to claim 3, it is characterised in that: be additionally provided with first at discharge station
Graphite carrier and the second graphite carrier, the two are symmetrically disposed on the end two sides of linear guide, by the 5th transfer robot by stone
Tablet on disc microscope carrier is transferred on the first graphite carrier and the second graphite carrier respectively and carries out blanking.
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| CN201910123740.7A CN109904096B (en) | 2019-02-19 | 2019-02-19 | Semiconductor dress piece all-in-one |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910123740.7A CN109904096B (en) | 2019-02-19 | 2019-02-19 | Semiconductor dress piece all-in-one |
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| CN109904096A true CN109904096A (en) | 2019-06-18 |
| CN109904096B CN109904096B (en) | 2024-01-19 |
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| CN110252596A (en) * | 2019-06-21 | 2019-09-20 | 深圳市昌富祥智能科技有限公司 | Intelligent automatic dispensing device |
| CN110600410A (en) * | 2019-10-21 | 2019-12-20 | 广东协铖微电子科技有限公司 | Dispensing and chip feeding machine for chip frame |
| CN111048456A (en) * | 2019-10-22 | 2020-04-21 | 苏州艾科瑞思智能装备股份有限公司 | Chip loading machine |
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| CN113911735A (en) * | 2021-11-19 | 2022-01-11 | 博众精工科技股份有限公司 | Feeding equipment |
| CN114453880A (en) * | 2021-12-20 | 2022-05-10 | 太仓市晨启电子精密机械有限公司 | Automatic equipment mechanism before welding of electric welding square bridge |
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Address after: Floor 6, Industrial Zone, Hezhou Fishery Village, Hezhou Community, Hangcheng Street, Bao'an District, Shenzhen, Guangdong 518100 Applicant after: SHENZHEN AFFIX INTELLIGENT TECHNOLOGY Co.,Ltd. Address before: 518132 22b, block D, huaxiangnian Huaxiang home, Yulu Road, Bao'an District, Shenzhen, Guangdong Province Applicant before: SHENZHEN AFFIX INTELLIGENT TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20240401 Address after: 518000 sixth floor, complex building, industrial zone, Hezhou fishery village, Hezhou community, Hangcheng street, Bao'an District, Shenzhen, Guangdong Province Patentee after: Xinmai Technology Equipment (Shenzhen) Co.,Ltd. Country or region after: China Address before: Floor 6, Industrial Zone, Hezhou Fishery Village, Hezhou Community, Hangcheng Street, Bao'an District, Shenzhen, Guangdong 518100 Patentee before: SHENZHEN AFFIX INTELLIGENT TECHNOLOGY Co.,Ltd. Country or region before: China |