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CN109889089B - Twice stepping piezoelectric rotary driver - Google Patents

Twice stepping piezoelectric rotary driver Download PDF

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CN109889089B
CN109889089B CN201910090839.1A CN201910090839A CN109889089B CN 109889089 B CN109889089 B CN 109889089B CN 201910090839 A CN201910090839 A CN 201910090839A CN 109889089 B CN109889089 B CN 109889089B
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parallelogram flexible
flexible hinge
parallelogram
rotating platform
axis
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CN109889089A (en
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董景石
刘畅
徐智
关志鹏
田大越
曹义
黄虎
范尊强
赵宏伟
杨志刚
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Jilin University
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Jilin University
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Abstract

The application relates to a twice stepping piezoelectric rotary driver, which comprises a base, a driving flexible hinge, a piezoelectric stack, a U-shaped plate, a parallelogram flexible hinge a, a parallelogram flexible hinge b, a rotary platform, a bearing, a triangular microprotrusion, a base and a mandrel, wherein the base is provided with a first driving flexible hinge and a second driving flexible hinge; the positive pressure between the outer surfaces of the parallelogram flexible hinges a and b and the rotating platform can be changed by the parallelogram flexible hinges a and b which are symmetrical about the center line of the mandrel, the triangular microprotrusions which are symmetrical about the center line of the mandrel enable the friction coefficients of the outer surfaces of the parallelogram flexible hinges a and b along the positive direction and the negative direction of the X axis to be different, under the combined action of the positive and negative directions, the electric signals excite the extension/shortening deformation of the piezoelectric stack to drive the U-shaped plate to reciprocate along the positive direction and the negative direction of the X axis, and in one working period, the parallelogram flexible hinges a and b alternately drive the rotating platform to realize two rotations in the anticlockwise direction.

Description

一种两次步进压电旋转驱动器A Two-step Piezoelectric Rotary Driver

技术领域technical field

本发明涉及一种两次步进压电旋转驱动器,属于微纳精密驱动技术领域。The invention relates to a two-step piezoelectric rotary driver, which belongs to the technical field of micro-nano precision driving.

背景技术Background technique

伴随着精密超精密加工、电子学、生物技术、精密测量等领域的快速发展,对微纳米精密驱动技术的要求越来越高,各研究机构也在积极对大行程、高精度的压电驱动器进行研究。在现有大行程、高精度的压电驱动器中,通常可将驱动过程分为压电叠堆伸长阶段和压电叠堆回缩阶段,利用压电叠堆的缓慢伸长和快速回缩实现。在此过程中,只能通过压电叠堆伸长阶段实现驱动器的正向旋转驱动,压电叠堆回缩阶段无法使驱动器正向旋转,甚至会使驱动器回退,极大的降低了驱动器的输出效率。With the rapid development of precision ultra-precision machining, electronics, biotechnology, precision measurement and other fields, the requirements for micro-nano precision drive technology are getting higher and higher, and various research institutions are also actively developing large-travel, high-precision piezoelectric actuators. research. In the existing large-stroke, high-precision piezoelectric actuators, the driving process can usually be divided into the piezoelectric stack extension stage and the piezoelectric stack retraction stage, using the slow elongation and rapid retraction of the piezoelectric stack accomplish. During this process, the positive rotation of the driver can only be achieved through the extension stage of the piezoelectric stack, and the retraction stage of the piezoelectric stack cannot make the driver rotate forward, and even cause the driver to retreat, which greatly reduces the driving force of the driver. output efficiency.

发明内容Contents of the invention

为了在实现大行程、高精度的同时,提高驱动器的输出效率,本发明公开一种两次步进压电旋转驱动器。In order to improve the output efficiency of the driver while realizing large stroke and high precision, the invention discloses a two-step piezoelectric rotary driver.

本发明通过以下技术方案实现:The present invention is realized through the following technical solutions:

一种两次步进压电旋转驱动器,包括基座、驱动柔性铰链、压电叠堆、U形板、平行四边形柔性铰链a、平行四边形柔性铰链b、旋转平台、轴承、三角形微凸起、底座以及心轴;基座、驱动柔性铰链和U形板顺次刚性连结为一体,通过基座固定在底座上,压电叠堆紧配合安装在驱动柔性铰链内部,U形板两U形臂内侧设置有平行四边形柔性铰链a、b,平行四边形柔性铰链a、b外表面加工有三角形微凸起,三角形微凸起与旋转平台相接触,旋转平台、轴承、心轴配合安装于底座上;平行四边形柔性铰链a向U形板的U形底部倾斜,关于心轴中心线中心对称的平行四边形柔性铰链a、b可改变平行四边形柔性铰链a、b外表面与旋转平台之间的正压力,关于心轴中心线中心对称的三角形微凸起使平行四边形柔性铰链a、b外表面沿X轴正向和负向的摩擦系数不同,在两者共同作用下,电信号激励压电叠堆的伸长/缩短变形,带动U形板沿X轴正向/负向往复运动,在一个工作周期内,平行四边形柔性铰链a、b交替驱动旋转平台,实现逆时针方向上的两次转动。A two-step piezoelectric rotary driver, including a base, a driving flexible hinge, a piezoelectric stack, a U-shaped plate, a parallelogram flexible hinge a, a parallelogram flexible hinge b, a rotating platform, a bearing, a triangular micro-protrusion, The base and the mandrel; the base, the driving flexible hinge and the U-shaped plate are rigidly connected in sequence, fixed on the base through the base, the piezoelectric stack is tightly fitted inside the driving flexible hinge, and the two U-shaped arms of the U-shaped plate The inner side is provided with parallelogram flexible hinges a, b, and the outer surface of the parallelogram flexible hinges a, b is processed with triangular micro-protrusions, the triangular micro-protrusions are in contact with the rotating platform, and the rotating platform, bearings, and mandrels are installed on the base in cooperation; The parallelogram flexible hinge a is inclined to the U-shaped bottom of the U-shaped plate, and the parallelogram flexible hinges a and b symmetrical to the center line of the mandrel can change the positive pressure between the outer surface of the parallelogram flexible hinge a and b and the rotating platform, The triangular micro-protrusions that are symmetrical about the center line of the mandrel make the friction coefficients of the outer surfaces of the parallelogram flexible hinges a and b different along the positive and negative directions of the X-axis. Under the joint action of the two, the electric signal excites the piezoelectric stack. The elongation/shortening deformation drives the U-shaped plate to reciprocate along the positive/negative direction of the X axis. In one working cycle, the parallelogram flexible hinges a and b alternately drive the rotating platform to realize two rotations in the counterclockwise direction.

U形板两U形臂内侧设置有倾斜角度相同的平行四边形柔性铰链a、b,压电叠堆伸长时,U形板沿X轴负向运动,平行四边形柔性铰链b外表面受到沿X轴正方向的摩擦力作用,平行四边形柔性铰链b具有向X轴正方向形变的趋势,与旋转平台表面之间的正压力减小,平行四边形柔性铰链a外表面受到沿X轴正方向的摩擦力,具有向X轴正方向形变的趋势,与旋转平台表面之间的正压力增大,从而使得平行四边形柔性铰链a与旋转平台之间的摩擦力大于平行四边形柔性铰链b与旋转平台之间的摩擦力,旋转平台逆时针转动;当压电叠堆缩短时,平行四边形柔性铰链b与旋转平台之间摩擦力大于平行四边形柔性铰链a与旋转平台之间的摩擦力,使得旋转平台继续逆时针旋转。The inner sides of the two U-shaped arms of the U-shaped plate are provided with parallelogram flexible hinges a and b with the same inclination angle. When the piezoelectric stack is extended, the U-shaped plate moves in the negative direction of the X-axis, and the outer surface of the parallelogram flexible hinge b is affected by the force along the X-axis. Under the action of friction in the positive direction of the axis, the parallelogram flexible hinge b has a tendency to deform in the positive direction of the X-axis, and the positive pressure between it and the surface of the rotating platform decreases, and the outer surface of the parallelogram flexible hinge a is subjected to friction along the positive direction of the X-axis force, has a tendency to deform toward the positive direction of the X-axis, and the positive pressure between the surface of the rotating platform increases, so that the friction between the parallelogram flexible hinge a and the rotating platform is greater than that between the parallelogram flexible hinge b and the rotating platform The friction force of the rotating platform rotates counterclockwise; when the piezoelectric stack shortens, the friction force between the parallelogram flexible hinge b and the rotating platform is greater than the friction force between the parallelogram flexible hinge a and the rotating platform, so that the rotating platform continues to reverse The hour hand rotates.

在平行四边形柔性铰链a、b外表面上加工有非中心对称形的三角形微凸起,且三角形微凸起的倾斜方向与所在的平行四边形柔性铰链倾斜方向一致,使倾向侧的摩擦系数大于另一侧;平行四边形柔性铰链a外表面沿X轴正方向的摩擦系数大于沿X轴负方向的摩擦系数;平行四边形柔性铰链b外表面沿X轴负方向的摩擦系数大于沿X轴正方向的摩擦系数。Non-centrosymmetric triangular micro-protrusions are processed on the outer surfaces of the parallelogram flexible hinges a and b, and the inclination direction of the triangular micro-protrusions is consistent with the inclination direction of the parallelogram flexible hinge, so that the friction coefficient on the inclined side is greater than that on the other side One side; the friction coefficient of the outer surface of the parallelogram flexible hinge a along the positive direction of the X axis is greater than that along the negative direction of the X axis; the friction coefficient of the outer surface of the parallelogram flexible hinge b along the negative direction of the X axis is greater than that along the positive direction of the X axis coefficient of friction.

本发明的有益效果是:利用一个压电叠堆在一次工作周期内,使驱动器产生,两次步进,提高驱动器的输出效率。The beneficial effect of the present invention is that: using one piezoelectric stack in one working cycle, the driver generates two steps, and the output efficiency of the driver is improved.

附图说明Description of drawings

此处所说明的附图用来提供对本发明的进一步理解,构成本申请的一部分,本发明的示意性实例及其说明用于解释本发明,并不构成对本发明的不当限定。The accompanying drawings described here are used to provide a further understanding of the present invention, and constitute a part of the application. The schematic examples and descriptions of the present invention are used to explain the present invention, and do not constitute improper limitations to the present invention.

图1所示为本发明的整体结构示意图;Figure 1 shows a schematic diagram of the overall structure of the present invention;

图2所示为本发明的工作原理图;Fig. 2 shows the working principle diagram of the present invention;

图3所示为本发明的平行四边形柔性铰链a表面三角形微凸起放大图;Fig. 3 shows the enlarged view of the triangular micro-protrusion on the surface of the parallelogram flexible hinge a of the present invention;

图4所示为本发明的平行四边形柔性铰链b表面三角形微凸起放大图;Figure 4 shows an enlarged view of the triangular micro-protrusion on the surface of the parallelogram flexible hinge b of the present invention;

具体实施方式Detailed ways

下面结合附图进一步说明本发明的详细内容及其具体实施方式。The detailed content of the present invention and its specific implementation will be further described below in conjunction with the accompanying drawings.

参见图1至图4所示,本实施方式提供一种两次步进压电旋转驱动器的具体实施方案。所述的一种两次步进压电旋转驱动器利用一个压电叠堆(3)在一次工作周期内,使驱动器产生两次步进;结构包括基座(1)、驱动柔性铰链(2)、压电叠堆(3)、U形板(4)、平行四边形柔性铰链a(5)、平行四边形柔性铰链b(6)、旋转平台(7)、轴承(8)、三角形微凸起(9)、底座(10)以及心轴(11);基座(1)、驱动柔性铰链(2)和U形板(4)顺次刚性连结为一体,通过基座(1)固定在底座(10)上,压电叠堆(3)紧配合安装在驱动柔性铰链(2)内部,U形板(4)两U形臂内侧设置有平行四边形柔性铰链a(5)、b(6),平行四边形柔性铰链a(5)、b(6)外表面加工有三角形微凸起(9),三角形微凸起(9)与旋转平台(7)相接触,旋转平台(7)、轴承(8)、心轴(11)配合安装于底座(10)上;平行四边形柔性铰链a(5)向U形板(4)的U形底部倾斜,关于心轴(11)中心线中心对称的平行四边形柔性铰链a(5)、b(6)可改变平行四边形柔性铰链a(5)、b(6)外表面与旋转平台(7)之间的正压力,关于心轴(11)中心线中心对称的三角形微凸起(9)使平行四边形柔性铰链a(5)、b(6)外表面沿X轴正向和负向的摩擦系数不同,在两者共同作用下,电信号激励压电叠堆(3)的伸长/缩短变形,带动U形板(4)沿X轴正向/负向往复运动,在一个工作周期内,平行四边形柔性铰链a(5)、b(6)交替驱动旋转平台(7),实现逆时针方向上的两次转动。Referring to FIG. 1 to FIG. 4 , this embodiment provides a specific implementation of a two-step piezoelectric rotary driver. The two-step piezoelectric rotary driver uses a piezoelectric stack (3) to make the driver produce two steps in one working cycle; the structure includes a base (1), a flexible hinge (2) , piezoelectric stack (3), U-shaped plate (4), parallelogram flexible hinge a (5), parallelogram flexible hinge b (6), rotating platform (7), bearing (8), triangular micro-protrusion ( 9), the base (10) and the mandrel (11); the base (1), the driving flexible hinge (2) and the U-shaped plate (4) are sequentially rigidly connected as one, and fixed on the base ( 10), the piezoelectric stack (3) is tightly fitted inside the driving flexible hinge (2), and the inner sides of the two U-shaped arms of the U-shaped plate (4) are provided with parallelogram flexible hinges a (5), b (6), The outer surfaces of the parallelogram flexible hinges a (5) and b (6) are processed with triangular micro-protrusions (9), and the triangular micro-protrusions (9) are in contact with the rotating platform (7). The rotating platform (7), the bearing (8) ), the mandrel (11) is mounted on the base (10); the parallelogram flexible hinge a (5) is inclined to the U-shaped bottom of the U-shaped plate (4), and the parallelogram is symmetrical about the center line of the mandrel (11) The flexible hinges a(5), b(6) can change the positive pressure between the outer surface of the parallelogram flexible hinges a(5), b(6) and the rotating platform (7), and are symmetrical about the center line of the mandrel (11) The triangular micro-protrusions (9) make the friction coefficients of the outer surfaces of the parallelogram flexible hinges a (5) and b (6) different along the positive and negative directions of the X-axis. Under the joint action of the two, the electric signal excites the piezoelectric stack The elongation/shortening deformation of the pile (3) drives the U-shaped plate (4) to reciprocate along the positive/negative direction of the X-axis. In one working cycle, the parallelogram flexible hinges a (5) and b (6) are driven alternately The rotating platform (7) realizes two rotations in the counterclockwise direction.

U形板(4)两U形臂内侧设置有倾斜角度相同的平行四边形柔性铰链a(5)、b(6),压电叠堆(3)伸长时,U形板(4)沿X轴负向运动,平行四边形柔性铰链b(6)外表面受到沿X轴正方向的摩擦力作用,平行四边形柔性铰链b(6)具有向X轴正方向形变的趋势,与旋转平台(7)表面之间的正压力减小,平行四边形柔性铰链a(5)外表面受到沿X轴正方向的摩擦力,具有向X轴正方向形变的趋势,与旋转平台(7)表面之间的正压力增大,从而使得平行四边形柔性铰链a(5)与旋转平台(7)之间的摩擦力大于平行四边形柔性铰链b(6)与旋转平台(7)之间的摩擦力,旋转平台(7)逆时针转动;当压电叠堆(3)缩短时,平行四边形柔性铰链b(6)与旋转平台(7)之间摩擦力大于平行四边形柔性铰链a(5)与旋转平台(7)之间的摩擦力,使得旋转平台(7)继续逆时针旋转。The inner sides of the two U-shaped arms of the U-shaped plate (4) are provided with parallelogram flexible hinges a (5) and b (6) with the same inclination angle. When the piezoelectric stack (3) is extended, the U-shaped plate (4) moves along the X The axis moves in the negative direction, and the outer surface of the parallelogram flexible hinge b(6) is subjected to friction along the positive direction of the X-axis. The parallelogram flexible hinge b(6) has a tendency to deform in the positive direction of the X-axis. The positive pressure between the surfaces decreases, the outer surface of the parallelogram flexible hinge a (5) is subjected to friction along the positive direction of the X-axis, and has a tendency to deform in the positive direction of the X-axis, and the positive force between the surface of the rotating platform (7) The pressure increases, so that the friction between the parallelogram flexible hinge a (5) and the rotating platform (7) is greater than the friction between the parallelogram flexible hinge b (6) and the rotating platform (7), and the rotating platform (7 ) rotates counterclockwise; when the piezoelectric stack (3) shortens, the friction between the parallelogram flexible hinge b (6) and the rotating platform (7) is greater than that between the parallelogram flexible hinge a (5) and the rotating platform (7) The friction between them makes the rotating platform (7) continue to rotate counterclockwise.

在平行四边形柔性铰链a(5)、b(6)外表面上加工有非中心对称形的三角形微凸起(9),且三角形微凸起(9)的倾斜方向与所在的平行四边形柔性铰链倾斜方向一致,使倾向侧的摩擦系数大于另一侧;平行四边形柔性铰链a(5)外表面沿X轴正方向的摩擦系数大于沿X轴负方向的摩擦系数;平行四边形柔性铰链b(6)外表面沿X轴负方向的摩擦系数大于沿X轴正方向的摩擦系数。Non-centrosymmetric triangular micro-protrusions (9) are processed on the outer surfaces of the parallelogram flexible hinges a (5) and b (6), and the inclination direction of the triangular micro-protrusions (9) is the same as that of the parallelogram flexible hinge. The inclination direction is the same, so that the friction coefficient of the inclined side is greater than that of the other side; the friction coefficient of the outer surface of the parallelogram flexible hinge a (5) along the positive direction of the X axis is greater than the friction coefficient along the negative direction of the X axis; the parallelogram flexible hinge b (6 ) The friction coefficient of the outer surface along the negative direction of the X-axis is greater than that along the positive direction of the X-axis.

Claims (1)

1. A two-step piezoelectric rotary actuator, characterized by: using a piezoelectric stack to make the driver step twice in a working period; the structure comprises a base (1), a driving flexible hinge (2), a piezoelectric stack (3), a U-shaped plate (4), a parallelogram flexible hinge a (5), a parallelogram flexible hinge b (6), a rotating platform (7), a bearing (8), a triangular microprotrusion (9), a base (10) and a mandrel (11); the base (1), the driving flexible hinge (2) and the U-shaped plate (4) are sequentially and rigidly connected into a whole, the piezoelectric stack (3) is fixed on the base (10) through the base (1), the piezoelectric stack (3) is tightly matched and installed inside the driving flexible hinge (2), the inner sides of two U-shaped arms of the U-shaped plate (4) are provided with parallelogram flexible hinges a (5) and b (6), triangular microprotrusions (9) are processed on the outer surfaces of the parallelogram flexible hinges a (5) and b (6), the triangular microprotrusions (9) are contacted with the rotating platform (7), and the rotating platform (7), the bearing (8) and the mandrel (11) are matched and installed on the base (10); the parallelogram flexible hinge a (5) inclines towards the U-shaped bottom of the U-shaped plate (4), positive pressure between the outer surfaces of the parallelogram flexible hinges a (5) and b (6) and the rotating platform (7) can be changed by the parallelogram flexible hinges a (5) and b (6) which are symmetrical about the center line of the mandrel (11), the triangular microprotrusions (9) which are symmetrical about the center line of the mandrel (11) enable the friction coefficients of the outer surfaces of the parallelogram flexible hinges a (5) and b (6) along the positive direction and the negative direction of the X axis to be different, under the combined action of the parallelogram flexible hinges a (5) and b (6), the electric signal excites the extension/shortening deformation of the piezoelectric stack (3) to drive the U-shaped plate (4) to reciprocate along the positive direction and the negative direction of the X axis, and in one working period, the parallelogram flexible hinges a (5) and b (6) alternately drive the rotating platform (7) to realize two rotations in the anticlockwise direction; the inner sides of the two U-shaped arms of the U-shaped plate (4) are provided with parallelogram flexible hinges a (5) and b (6) with the same inclination angle, when the piezoelectric stack (3) stretches, the U-shaped plate (4) moves along the X axis in the negative direction, the outer surfaces of the parallelogram flexible hinges a (5) and b (6) are subjected to the friction force action along the positive direction of the X axis, the positive pressure between the parallelogram flexible hinge b (6) with the deformation trend towards the positive direction of the X axis and the surface of the rotating platform (7) is reduced, the positive pressure between the parallelogram flexible hinge a (5) with the deformation trend towards the positive direction of the X axis and the surface of the rotating platform (7) is increased, so that the friction force between the parallelogram flexible hinge a (5) and the rotating platform (7) is larger than the friction force between the parallelogram flexible hinge b (6) and the rotating platform (7), and the rotating platform (7) rotates anticlockwise; when the piezoelectric stack (3) is shortened, the friction force between the parallelogram flexible hinge b (6) and the rotating platform (7) is larger than the friction force between the parallelogram flexible hinge a (5) and the rotating platform (7), so that the rotating platform (7) continues to rotate anticlockwise; triangular microprotrusions (9) which are not in central symmetry are processed on the outer surfaces of the parallelogram flexible hinges a (5) and b (6), and the inclination direction of the triangular microprotrusions (9) is consistent with the inclination direction of the parallelogram flexible hinges, so that the friction coefficient of the inclined side is larger than that of the other side; the friction coefficient of the outer surface of the parallelogram flexible hinge a (5) along the positive direction of the X axis is larger than that along the negative direction of the X axis; the friction coefficient of the outer surface of the parallelogram flexible hinge b (6) along the X-axis negative direction is larger than that along the X-axis positive direction.
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006074442A2 (en) * 2005-01-07 2006-07-13 Tibion Corporation High-torque motor
CN104578901A (en) * 2015-01-15 2015-04-29 合肥工业大学 Walking piezoelectric rotary motor

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JP6852563B2 (en) * 2017-05-25 2021-03-31 コニカミノルタ株式会社 Rotational motion control device, image forming device and rotary motion control method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006074442A2 (en) * 2005-01-07 2006-07-13 Tibion Corporation High-torque motor
CN104578901A (en) * 2015-01-15 2015-04-29 合肥工业大学 Walking piezoelectric rotary motor

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