CN109856078A - Optical gas detection system - Google Patents
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- CN109856078A CN109856078A CN201910039538.6A CN201910039538A CN109856078A CN 109856078 A CN109856078 A CN 109856078A CN 201910039538 A CN201910039538 A CN 201910039538A CN 109856078 A CN109856078 A CN 109856078A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 86
- 238000001514 detection method Methods 0.000 title claims abstract description 31
- 238000005259 measurement Methods 0.000 claims abstract description 30
- 238000010521 absorption reaction Methods 0.000 claims abstract description 9
- 239000004065 semiconductor Substances 0.000 claims description 10
- 238000005057 refrigeration Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 95
- 238000012360 testing method Methods 0.000 description 25
- 238000002835 absorbance Methods 0.000 description 24
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 10
- 238000010586 diagram Methods 0.000 description 6
- 230000000747 cardiac effect Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910021529 ammonia Inorganic materials 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 239000004615 ingredient Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000002329 infrared spectrum Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 210000001367 artery Anatomy 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000021715 photosynthesis, light harvesting Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 210000003462 vein Anatomy 0.000 description 1
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Abstract
本发明涉及气体检测领域，特别是涉及一种光学气体检测系统。一种光学气体检测系统，包括：激光器，用于生成第一激光束；光学气体吸收池；光学镜片；中心波长锁定装置；其中，所述第一激光束透过所述光学镜片生成射向所述光学气体吸收池的第二激光束，同时该第一激光束还被所述光学镜片反射生成射向所述中心波长锁定装置的第三激光束；所述第二激光束用于对所述待测气体进行浓度检测，所述中心波长锁定装置用于利用所述第三激光束对所述激光器的中心波长进行校准，且所述第二激光束的强度大于所述第三激光束的强度。上述光学气体检测系统，通过所述激光器中心波长锁定装置对所述激光器的中心波长进行测量并校准，保证浓度测量的准确性。
The invention relates to the field of gas detection, in particular to an optical gas detection system. An optical gas detection system, comprising: a laser for generating a first laser beam; an optical gas absorption cell; an optical lens; the second laser beam of the optical gas absorption cell, and the first laser beam is also reflected by the optical lens to generate a third laser beam directed to the central wavelength locking device; the second laser beam is used for the The concentration of the gas to be tested is detected, and the central wavelength locking device is used to calibrate the central wavelength of the laser by using the third laser beam, and the intensity of the second laser beam is greater than that of the third laser beam . In the above optical gas detection system, the central wavelength of the laser is measured and calibrated by the laser central wavelength locking device, so as to ensure the accuracy of the concentration measurement.
Description
Technical field
The present invention relates to field of gas detection, more particularly to a kind of optical gas detection system.
Background technique
It, can be according under test gas to infrared light when application Infrared Spectrum Technology carries out gas detection under test gas
The absorption intensity in source calculates the concentration of under test gas.Applied to the laser of Infrared Spectrum Technology, in the process used
In, because of environmental change or device aging, central wavelength can change, and cause gas concentration measurement inaccurate.
Summary of the invention
Based on this, a kind of optical gas detection system is provided, the central wavelength of energy real time calibration laser guarantees that concentration is surveyed
The accuracy of amount.
A kind of optical gas detection system, comprising:
Laser, for generating first laser beam；
Optical gas absorbance pond, is equipped under test gas；
Optical mirror slip；And
Central wavelength locking device is connect with the laser；
Wherein, the first laser beam swashs through the optical mirror slip generates optical gas absorbance pond described in directive second
Light beam, while the first laser beam is also swashed by the third that the optical mirror slip reflects central wavelength locking device described in generation directive
Light beam；And
The second laser beam is used to carry out Concentration Testing to the under test gas, and the central wavelength locking device is used for
The central wavelength of the laser is calibrated using the third laser beam, and the intensity of the second laser beam is greater than institute
State the intensity of third laser beam.
The optical gas absorbance pond includes: in one of the embodiments,
Accommodating cavity, for holding under test gas；And
Diaphragm is set on the side wall of the accommodating cavity, for being used as the optical mirror slip；
Wherein, the first laser beam generates the second laser beam of accommodating cavity described in directive through the diaphragm, simultaneously
The first laser beam is also reflected the third laser beam for generating central wavelength locking device described in directive by the diaphragm.
Can under the premise of not changing original optical gas absorbance pool structure, using the diaphragm reflection nothing use up into
The calibration of the central wavelength of the row laser.
The diaphragm is wedge-shaped lens in one of the embodiments, avoids optical interference phenomena.
The laser center wavelength locking device includes: in one of the embodiments,
Measurement module is equipped with reference gas；The measurement module is for receiving and absorbing the third laser beam, to obtain
Obtain the real-time center wavelength of the laser；
Analysis module, including analytical unit and storage unit, the analytical unit is connect with the measurement module, described to deposit
Storage unit is stored with center for standard wavelength；
Control module is connect with the laser and the analysis module respectively, with the reality of laser described in real-time control
When central wavelength；
Wherein, the analysis module receives the real-time center wavelength that the measurement module obtains, and with the standard
Central wavelength is compared, to obtain deviation of the real-time center wavelength relative to the center for standard wavelength；And
Control module controls the laser, according to the received deviation of institute by the real-time center wave
Length is locked in the center for standard wavelength.
The measurement module includes: in one of the embodiments,
Condenser lens, for being focused to the third laser beam.
The measurement module in one of the embodiments, further include:
Infrared detector, for detecting the third laser beam after reference gas absorption.
The reference gas is identical as the under test gas ingredient in one of the embodiments,.
In one of the embodiments, the gas concentration in the measurement module according to the system range, it is described to
Survey the optical path length of gas module, the measurement module length and set.
The laser is semiconductor laser in one of the embodiments,.
The control module is semiconductor refrigerating module in one of the embodiments, for by controlling the laser
The temperature of device controls the central wavelength of the laser.
The laser is TO encapsulated laser in one of the embodiments, and cost is relatively low, is suitable for high volume applications.
Above-mentioned optical gas detection system, the first laser beam that the laser is issued by the optical mirror slip
It is transmitted and is reflected respectively, generate the corresponding second laser beam and the third laser beam, the second laser beam is used
In the incident optical gas absorbance pond to carry out Concentration Testing to the under test gas, the third laser beam is used for incident institute
Laser center wavelength locking device is stated, measures and calibrates with the central wavelength to the laser, so that the optics
Gas detecting system can carry out real-time monitoring and amendment to the wave length shift that the laser occurs in use, ensure that
The accuracy of measurement result, also, the intensity of the second laser beam is greater than the intensity of the third laser beam, avoids laser
The waste of energy.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of optical gas detection system in one embodiment；
Fig. 2 is the structural schematic diagram of laser center wavelength locking device in one embodiment；
Fig. 3 is the structural schematic diagram of optical gas detection system in another embodiment.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that specific embodiment described herein is used only for explaining the present invention, and
It is not used in the restriction present invention.
Fig. 1 is the structural schematic diagram of optical gas detection system in one embodiment, as shown in Figure 1, a kind of optical gas
Detection system 10, including laser 100, optical gas absorbance pond 200, optical mirror slip 300 and laser center wavelength locking
Device 400, wherein the laser 100 can produce first laser beam, and the optical gas absorbance pond 200 is equipped with gas to be measured
Body, the laser center wavelength locking device 400 are connect with the laser 100, can be used for described in real-time measurement and calibration
The central wavelength of the laser 100 is locked in the central wavelength of standard by the central wavelength of laser 100；Described first
Laser beam is incident to the optical mirror slip 300, transmits and reflects through optical mirror slip, and transmission generates second laser beam, reflection respectively
Third laser beam is generated, the second laser beam is incident to the optical gas absorbance pond 200, to carry out the under test gas
Concentration Testing, the third laser beam are incident to the laser center wavelength locking device 400, to measure the laser
100 central wavelength, and accordingly by the central wavelength of the central wavelength adjustment of the laser 100 to standard.
Specifically, the laser 100 is selected according under test gas, need to meet when the laser 100 in practice
Cardiac wave it is long in center for standard wavelength when, under test gas inhales the second laser beam (i.e. laser 100 issued laser)
It receives most strong；The optical gas absorbance pond 200 has incident mirror and outgoing mirror, and the second laser beam enters the optical gas
Can be repeatedly by the reflection of incident mirror and reflecting mirror after absorption cell 200, biography of repeatedly turning back in the optical gas absorbance pond 200
Defeated, during this period, the under test gas absorbs the second laser beam, according to the intensity of absorption can interpretation obtain described in
The concentration of under test gas.
Further, the intensity of the second laser beam is greater than the intensity of the third laser beam, and the intensity can be function
Rate or energy, when the laser 100 is continuous-wave laser, the intensity is power, when the laser 100 is arteries and veins
When rushing laser, the intensity is energy；The second laser beam is that the first laser beam exposes to the optical mirror slip 300
The laser beam of the optical mirror slip was transmitted when upper, the third laser beam is that the first laser beam exposes to the optical mirror slip
The laser beam reflected when on 300 by the optical mirror slip, the i.e. second laser beam and third laser beam are above-mentioned first laser beam
It exposes on optical mirror slip while generating, the sum of intensity and the intensity of third laser beam of corresponding second laser beam is less than etc.
In the intensity of first laser beam, and certain light consumption can be generated in view of first laser beam exposes on optical mirror slip, so second
The sum of intensity and the intensity of third laser beam of laser beam are less than the intensity of first laser beam；And using the third laser beam
It is not high to the intensity requirement of the third laser beam when carrying out the measurement and calibration of laser center wavelength, at the same time, second
Laser beam can pass through multiple reflections during the optical gas absorbance pond 200 is propagated, and energy loss is larger, needs higher
Intensity.Therefore, the intensity of second laser beam is higher than the intensity of third laser beam, ensure that the accuracy of measurement of concetration, simultaneously
In turn avoid unnecessary energy dissipation.
The optical mirror slip 300 is the diaphragm in the optical gas absorbance pond 200 in one of the embodiments,.Institute
Stating optical gas absorbance pond 200 includes accommodating cavity and diaphragm, and the accommodating cavity is for holding under test gas, the diaphragm
It is set on the side wall of the accommodating cavity, for being used as the optical mirror slip 300；Wherein, described in the first laser beam penetrates
Diaphragm generates the second laser beam of accommodating cavity described in directive, while the first laser beam is also generated by diaphragm reflection and penetrated
To the third laser beam of the central wavelength locking device.Generally, it needs to pass through for measuring the light beam of under test gas concentration
Diaphragm enters optical gas absorbance pond 200, and during passing through the diaphragm, inevitably reflect,
The first laser beam, to generate third laser beam, and the third laser beam is used for described by the reflection of the diaphragm
The central wavelength of laser 100 locks, and avoids the waste of luminous energy.
Specifically, specific optical thin film can be plated on the diaphragm, with control the diaphragm reflectivity and
Transmitance, to control the intensity ratio of the second laser beam and the third laser beam.
It should be noted that optical mirror slip 300 can be arranged independently of optical gas absorbance pond 200, and when being independently arranged, dress
It adjusts and is more convenient, be also convenient for dismounting and change.
The diaphragm is wedge-shaped lens in one of the embodiments,.The wedge-shaped lens have first surface and the
Two surfaces, the first surface and the second surface are non-parallel state, and the first laser beam is incident to first table
Face transmits to form the second laser beam in the first surface, while the first laser beam first surface reflection life again
At the third laser beam, the second laser beam propagates to the second surface of the wedge-shaped lens, swashs through described second
Light beam again passes by transmission and reflection in the second surface, is respectively formed the 4th laser beam and the 5th laser beam, and the described 4th
Laser beam enters the measurement that the optical gas absorbance pond 200 carries out under test gas concentration, and the 5th laser beam is turned back to institute
The first plane is stated, and again through first plane transmission, generates the 6th laser beam, described the first of the wedge-shaped lens
Surface and the second surface are not parallel, and it is existing to ensure that the third laser beam and the 6th laser beam will not interfere
As to ensure that the accuracy of measurement.
Fig. 2 is the structural schematic diagram of laser center wavelength locking device in one embodiment, as shown in Fig. 2, the laser
Device central wavelength locking device 400 may include measurement module 410, analysis module 420 and control module 430；Wherein, the survey
Measuring module 410 has reference gas chamber, and certain density reference gas is equipped in the reference gas chamber, and the third laser beam passes
The measurement module 410 is cast to, and in the reference gas indoor propagation, is absorbed through the reference gas, to obtain the third
The wavelength of laser beam, to obtain the real-time center wavelength of the laser 100；The analysis module 420 include analytical unit and
Storage unit, the analytical unit are connect with the measurement module 410, are subjected to the reality that the measurement module 410 measures
When central wavelength, meanwhile, the storage unit is stored with center for standard wavelength, the analysis module 420 can by it is described in real time in
Cardiac wave length is compared with the center for standard wavelength, calculates the real-time center wavelength relative to the center for standard wavelength
Deviation；The control module 430 is connect with the laser 100 and the analysis module 420 respectively, is subjected to the analysis mould
The deviation obtained of block 420, and the laser 100 is controlled according to the deviation, to swash described in real-time control
The real-time center wavelength of light device 100, by the real-time center wavelength locking in the center for standard wavelength.Specifically, in reality
Use process in, the laser center wavelength locking device 400 can be linked as one with the optical gas absorbance pond 200
Body can also be separately provided, and can determine according to practical set demand.
The measurement module 410 includes condenser lens and infrared detector in one of the embodiments,；Wherein, described
Condenser lens is for converging the third laser beam, and by the third laser beam focus to the infrared detector table
Face enhances the System Error-tolerance Property of the optical gas detection system 10；The infrared detector reception is inhaled through the reference gas
Third laser beam after receipts, and strength investigation is carried out to the third laser beam, to obtain the middle cardiac wave of the third laser beam
It is long.
The ingredient of the reference gas is identical as the ingredient of the under test gas in one of the embodiments,.It needs
Bright, the reference gas is not required for the gas of single component with the under test gas, it is only necessary to guarantee the two and swash
Light device reaction gas componant one, for example, the under test gas ingredient be ammonia, then the reference gas and it is described to
Survey gas can all be single ammonia, can also all for nitrogen and ammonia mixed gas, wherein nitrogen is background gas, not with
Laser is had an effect, and does not influence the accuracy of measurement, or also can be used two different background gas separately constitute two kinds it is mixed
Close gas.
The reference gas concentration in the measurement module 410 can be according to optical gas absorbance in one of the embodiments,
The light path of the reference gas chamber of the light path in pond 200 and the measurement module 410 is arranged.For example, with the detection of laser ammonia
For system, the laser ammonia gas detecting system range is 0~100ppm, the optical gas absorbance of the laser ammonia gas detecting system
Pond optical path length is 1000mm, and the optical path length of reference gas chamber is 5mm, then the concentration of reference gas described in reference gas chamber=
Light path/reference gas chamber light path=the 100*0.5*1000/5 in the * optical gas absorbance pond 200 (under test gas upper limit of concentration * 0.5)
=10000ppm.
The laser 100 is TO encapsulated laser, the outgoing of the TO encapsulated laser in one of the embodiments,
Laser is directly transmitted to Systems for optical inspection, and without the transmission of optical fiber, to be suitable for the laser demand of each wave band, also more
It is easy of integration, in addition, TO encapsulated laser is moderate, it is suitable for high volume applications.The laser in one of the embodiments,
Device 100 is semiconductor laser, and small in size, the service life is long, cheap.
The control module 430 can be semiconductor refrigerating module in one of the embodiments, can be used for by controlling institute
The temperature of laser 100 is stated to control its corresponding real-time center wavelength.Specifically, the launch wavelength of semiconductor laser is general
All elongated with temperature raising, wavelength temperature drift coefficient is generally 0.3nm/K~0.4nm/K, therefore, can pass through semiconductor refrigerating
Module controls the temperature of the semiconductor laser, so as to adjust corresponding real-time center wavelength to center for standard wave
It is long.
Below with reference to specific application, optical gas detection system in the application is described in detail:
Fig. 3 is the structural block diagram of optical gas detection system in another embodiment, as shown in figure 3, a kind of optical gas
Detection system includes laser, optical gas absorbance pond, diaphragm and laser center wavelength locking device (dotted line side in figure
Shown in frame), wherein the diaphragm is described optical gas absorbance pond a part, for the incidence of laser beam, the laser
Central wavelength locking device includes condenser lens, reference gas and infrared detector；Specifically, the laser issues first
Laser beam, the first laser beam are transmitted to the diaphragm, transmit through the diaphragm and generate second laser beam, while the institute
It states first laser beam and reflects generation third laser beam through the diaphragm.The second laser beam enters the optical gas absorbance
In the cavity in pond, absorbed by the intracorporal under test gas of the optical gas absorbance cell cavity, so that the concentration of under test gas is obtained, institute
The reference gas chamber for entering the laser center wavelength locking device after third laser beam line focus lens focus is stated, by the ginseng
It examines the indoor reference gas of gas to absorb, then is detected through the infrared detector, to obtain the middle cardiac wave of the third laser beam
Long, to obtain the real-time center wavelength of the laser, the semiconductor refrigerating module (not shown) is according to the reality
When central wavelength and the standard wave length difference, control the laser accordingly, thus by the laser it is real-time in
Cardiac wave length is locked in the center for standard wavelength.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, all should be considered as described in this specification.
The embodiments described above only express several embodiments of the present invention, and the description thereof is more specific and detailed, but simultaneously
It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that coming for those of ordinary skill in the art
It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to protection of the invention
Range.Therefore, the scope of protection of the patent of the invention shall be subject to the appended claims.
Claims (10)
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110554002A (en) * | 2019-09-30 | 2019-12-10 | 大连艾科科技开发有限公司 | Hydrogen sulfide concentration detection module, hydrogen sulfide concentration telemeter and application |
| CN112782119A (en) * | 2020-12-30 | 2021-05-11 | 汉威科技集团股份有限公司 | Laser gas detection method and system capable of monitoring wavelength |
| CN113841041A (en) * | 2019-06-27 | 2021-12-24 | 株式会社堀场制作所 | Analysis device |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1155655A (en) * | 1995-10-10 | 1997-07-30 | 液体空气乔治洛德方法利用和研究有限公司 | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and method of use |
| US20020139934A1 (en) * | 2001-03-30 | 2002-10-03 | Shih-Yi Chang | Multi-component gas analyzer having cassette-type light path system |
| US20030063284A1 (en) * | 1995-10-10 | 2003-04-03 | Mcandrew James | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use |
| CN103115894A (en) * | 2013-01-31 | 2013-05-22 | 中国科学院合肥物质科学研究院 | Stable isotopic abundance ratio real-time online monitoring device and method |
| CN103528993A (en) * | 2013-11-04 | 2014-01-22 | 中绿环保科技股份有限公司 | Laser gas analyzer |
| CN104132911A (en) * | 2014-08-04 | 2014-11-05 | 中国科学院合肥物质科学研究院 | Open long optical path CO and CH4 online detection instrument |
| CN104819957A (en) * | 2015-02-11 | 2015-08-05 | 中国科学院长春光学精密机械与物理研究所 | CRDS principle-based gas concentration measurement system of continuously adjustable laser light source |
| CN104819956A (en) * | 2015-02-11 | 2015-08-05 | 中国科学院长春光学精密机械与物理研究所 | Control system based on CRDS gas concentration measurement system |
| CN104897591A (en) * | 2015-06-08 | 2015-09-09 | 苏州谱道光电科技有限公司 | Sample measuring device |
| CN105319170A (en) * | 2014-07-31 | 2016-02-10 | 横河电机株式会社 | Optical system for generating beam of reference light and method for splitting beam of light to generate beam of reference light |
| CN205719923U (en) * | 2016-06-13 | 2016-11-23 | 山西中科华仪科技有限公司 | Self-calibration air-breathing laser methane full-scale detection device |
| CN206710256U (en) * | 2017-05-03 | 2017-12-05 | 安徽宝龙环保科技有限公司 | A kind of Design of Vehicle Tail Gas Analyzer |
| CN207163908U (en) * | 2017-09-05 | 2018-03-30 | 安徽宝龙环保科技有限公司 | A kind of device of optical maser wavelength locking for gas detection |
-
2019
- 2019-01-16 CN CN201910039538.6A patent/CN109856078B/en active Active
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1155655A (en) * | 1995-10-10 | 1997-07-30 | 液体空气乔治洛德方法利用和研究有限公司 | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and method of use |
| US20030063284A1 (en) * | 1995-10-10 | 2003-04-03 | Mcandrew James | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use |
| US20020139934A1 (en) * | 2001-03-30 | 2002-10-03 | Shih-Yi Chang | Multi-component gas analyzer having cassette-type light path system |
| CN103115894A (en) * | 2013-01-31 | 2013-05-22 | 中国科学院合肥物质科学研究院 | Stable isotopic abundance ratio real-time online monitoring device and method |
| CN103528993A (en) * | 2013-11-04 | 2014-01-22 | 中绿环保科技股份有限公司 | Laser gas analyzer |
| CN105319170A (en) * | 2014-07-31 | 2016-02-10 | 横河电机株式会社 | Optical system for generating beam of reference light and method for splitting beam of light to generate beam of reference light |
| CN104132911A (en) * | 2014-08-04 | 2014-11-05 | 中国科学院合肥物质科学研究院 | Open long optical path CO and CH4 online detection instrument |
| CN104819957A (en) * | 2015-02-11 | 2015-08-05 | 中国科学院长春光学精密机械与物理研究所 | CRDS principle-based gas concentration measurement system of continuously adjustable laser light source |
| CN104819956A (en) * | 2015-02-11 | 2015-08-05 | 中国科学院长春光学精密机械与物理研究所 | Control system based on CRDS gas concentration measurement system |
| CN104897591A (en) * | 2015-06-08 | 2015-09-09 | 苏州谱道光电科技有限公司 | Sample measuring device |
| CN205719923U (en) * | 2016-06-13 | 2016-11-23 | 山西中科华仪科技有限公司 | Self-calibration air-breathing laser methane full-scale detection device |
| CN206710256U (en) * | 2017-05-03 | 2017-12-05 | 安徽宝龙环保科技有限公司 | A kind of Design of Vehicle Tail Gas Analyzer |
| CN207163908U (en) * | 2017-09-05 | 2018-03-30 | 安徽宝龙环保科技有限公司 | A kind of device of optical maser wavelength locking for gas detection |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113841041A (en) * | 2019-06-27 | 2021-12-24 | 株式会社堀场制作所 | Analysis device |
| EP3992614A4 (en) * | 2019-06-27 | 2023-06-28 | HORIBA, Ltd. | Analysis device |
| US12111255B2 (en) | 2019-06-27 | 2024-10-08 | Horiba, Ltd. | Analysis device |
| CN110554002A (en) * | 2019-09-30 | 2019-12-10 | 大连艾科科技开发有限公司 | Hydrogen sulfide concentration detection module, hydrogen sulfide concentration telemeter and application |
| CN112782119A (en) * | 2020-12-30 | 2021-05-11 | 汉威科技集团股份有限公司 | Laser gas detection method and system capable of monitoring wavelength |
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