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CN104819957A - CRDS principle-based gas concentration measurement system of continuously adjustable laser light source - Google Patents

CRDS principle-based gas concentration measurement system of continuously adjustable laser light source Download PDF

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CN104819957A
CN104819957A CN201510071864.7A CN201510071864A CN104819957A CN 104819957 A CN104819957 A CN 104819957A CN 201510071864 A CN201510071864 A CN 201510071864A CN 104819957 A CN104819957 A CN 104819957A
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颜昌翔
崔立红
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Abstract

本发明涉及一种连续可调激光光源的基于CRDS原理的气体浓度测量系统,包括光路部分器件和电路部分器件;所述光路部分器件包括激光器、光隔离器、光准直器、波长计、光学无源腔;所述电路部分器件包括光电探测器、控制电路、PZT腔长调制器、高速数据采集卡及计算机。本发明仅利用一个偏振方向的光进行探测,与光准直器的连接采用保偏光纤连接,省掉系统中的光隔离器,并能获得较好的偏振激光光束;并且解决环形腔中,S分量和P分量具有不同的谐振频率因此不能同时谐振的问题。本发明简化省掉了一些偏振分束调整功能的器件,提高了激光器的光能利用率;通过电流调谐实现激光器的开关功能,从而省略了AOM及其相关的控制系统。

The invention relates to a gas concentration measurement system based on the CRDS principle of a continuously adjustable laser light source, which includes a part of the optical path device and a part of the circuit device; the part of the optical path device includes a laser, an optical isolator, an optical collimator, a wavelength meter, an optical Passive cavity; the circuit components include a photoelectric detector, a control circuit, a PZT cavity length modulator, a high-speed data acquisition card and a computer. The invention only uses light of one polarization direction for detection, and the connection with the optical collimator is connected by a polarization-maintaining optical fiber, which saves the optical isolator in the system, and can obtain a better polarized laser beam; and solves the problem that in the ring cavity, The problem that the S component and the P component have different resonant frequencies and therefore cannot resonate at the same time. The invention simplifies and omits some devices with polarization beam splitting and adjusting functions, improves the light energy utilization rate of the laser, realizes the switching function of the laser through current tuning, thereby omitting the AOM and its related control system.

Description

一种连续可调激光光源的基于CRDS原理的气体浓度测量系统A Gas Concentration Measurement System Based on CRDS Principle with Continuously Adjustable Laser Source

技术领域technical field

本发明涉及CRDS测量系统技术领域,特别涉及一种连续可调激光光源的基于CRDS原理的气体浓度测量系统。The invention relates to the technical field of CRDS measurement systems, in particular to a gas concentration measurement system based on the CRDS principle of a continuously adjustable laser light source.

背景技术Background technique

在传统的CRDS测量系统中,用于装待测气体高品质光学无源腔通常采用两镜式直腔。在腔内建立起来的脉冲光束的光强随时间衰减。对于空腔来说,腔内光强衰减速度与腔镜反射率、两腔镜间的距离以及光在腔内的速度有关。当光学无源腔内充满待测气体时,腔内光强衰减速度增加。在良好的条件下,腔内光强将呈单e数衰减。这样通过绘制腔内光强衰减速率与对应的激光波长之间的关系获得腔内吸收光谱。In the traditional CRDS measurement system, the high-quality optical passive cavity used to contain the gas to be measured usually adopts a two-mirror straight cavity. The intensity of the pulsed beam established in the cavity decays with time. For a cavity, the attenuation speed of the light intensity in the cavity is related to the reflectivity of the cavity mirror, the distance between the two cavity mirrors and the speed of light in the cavity. When the optical passive cavity is filled with the gas to be measured, the attenuation speed of the light intensity in the cavity increases. Under good conditions, the light intensity in the cavity will decay with a single e number. In this way, the intracavity absorption spectrum is obtained by plotting the relationship between the decay rate of the intracavity light intensity and the corresponding laser wavelength.

传统的脉冲CRDS测量系统有几个急待解决的问题,激光器通常采用脉冲式半导体激光器,数据获得率受限于激光器的脉冲频率。此外,由于脉冲激光器的激光频率与腔固有光谱频率重合部分较小,受脉冲激光器的脉冲频率的影响,耦合进光学无源腔的并在腔内建立起来的稳定光强的也会较小。The traditional pulsed CRDS measurement system has several problems to be solved urgently. The laser usually uses a pulsed semiconductor laser, and the data acquisition rate is limited by the pulse frequency of the laser. In addition, due to the small overlap between the laser frequency of the pulsed laser and the natural spectral frequency of the cavity, the stable light intensity coupled into the optical passive cavity and established in the cavity will be small due to the influence of the pulse frequency of the pulsed laser.

传统的CRDS测量系统中采用Drever的PDH方法,Drever等人利用光学光学无源腔的相位特性构成稳频系统,利用调频光谱技术获得光学光学无源腔的色散曲线作为鉴频曲线图。对激光作微小的相位调制,产生分布在载频两侧、幅度相等但初始位相相反的二个边频带。由于受光学无源腔或其它介质的影响,两个边频带的幅度或相位有了不均匀的变化,则两差拍信号不能完全抵消,接收器会输出一个频率信号。该输出信号用来产生类似于光学无源腔相移曲线的鉴频曲线,这样在较小的范围内均能产生有效的误差信号用以调控腔长,因此,系统不易失锁,抗干扰能力很强。The traditional CRDS measurement system adopts Drever's PDH method. Drever et al. used the phase characteristics of the optical passive cavity to form a frequency stabilization system, and used the frequency modulation spectrum technology to obtain the dispersion curve of the optical optical passive cavity as a frequency discrimination curve. The laser is slightly phase modulated to produce two sidebands distributed on both sides of the carrier frequency, with equal amplitudes but opposite initial phases. Due to the influence of the optical passive cavity or other media, the amplitude or phase of the two sidebands has an uneven change, the double-beat signal cannot be completely canceled, and the receiver will output a frequency signal. The output signal is used to generate a frequency discrimination curve similar to the phase shift curve of an optical passive cavity, so that an effective error signal can be generated in a small range to adjust the cavity length. Therefore, the system is not easy to lose lock, and the anti-interference ability very strong.

发明内容Contents of the invention

本发明要解决现有技术中的技术问题,提供一种连续可调激光光源的基于CRDS原理的气体浓度测量系统。The invention aims to solve the technical problems in the prior art, and provides a gas concentration measurement system based on the CRDS principle of a continuously adjustable laser light source.

为了解决上述技术问题,本发明的技术方案具体如下:In order to solve the problems of the technologies described above, the technical solution of the present invention is specifically as follows:

一种连续可调激光光源的基于CRDS原理的气体浓度测量系统,包括光路部分器件和电路部分器件;A gas concentration measurement system based on the CRDS principle of a continuously adjustable laser light source, including some components of the optical path and some components of the circuit;

所述光路部分器件包括激光器、光隔离器、光准直器、波长计、光学无源腔;所述激光器包含待测气体的吸收光频率;所述光隔离器的作用是保护激光器免受反馈光的影响和控制支路中光的偏振特性;所述光准直器的作用是调节激光器出射光束的质量,便于与光学无源腔进行模式匹配;The optical path components include a laser, an optical isolator, an optical collimator, a wavelength meter, and an optical passive cavity; the laser contains the absorption light frequency of the gas to be measured; the function of the optical isolator is to protect the laser from feedback The influence of light and the polarization characteristics of light in the control branch; the function of the optical collimator is to adjust the quality of the outgoing beam of the laser, so as to facilitate mode matching with the optical passive cavity;

所述电路部分器件包括光电探测器、控制电路、PZT腔长调制器、高速数据采集卡及计算机;The parts of the circuit include a photodetector, a control circuit, a PZT cavity length modulator, a high-speed data acquisition card and a computer;

在所述光学无源腔的腔内形成稳定光路后,在光学无源腔输出镜透射较强的光信号,出射光被分束器分成两束光,一束光被光电探测器探测得到激光器与光学无源腔匹配情况是否良好的信息,通过对腔出射光的光斑分布,来确定激光器仅仅激发起光学无源腔对应的基模高斯光束;另一束光由光电探测器探测,来获得腔内光强阈值积累的判断和衰减速率的测量;最后通过对光强衰减速率的测量获得强衰荡光谱。After a stable optical path is formed in the cavity of the optical passive cavity, a strong optical signal is transmitted through the output mirror of the optical passive cavity, and the outgoing light is divided into two beams by the beam splitter, and one beam of light is detected by a photodetector to obtain a laser Information on whether the matching with the optical passive cavity is good or not, through the spot distribution of the light emitted from the cavity, it is determined that the laser only excites the fundamental mode Gaussian beam corresponding to the optical passive cavity; the other beam is detected by a photodetector to obtain Judgment of light intensity threshold accumulation in the cavity and measurement of decay rate; finally, strong ring-down spectrum is obtained by measuring light intensity decay rate.

在上述技术方案中,还设有辅助低损光学腔的抽充气装置。In the above technical solution, a pumping and filling device for assisting the low-loss optical cavity is also provided.

在上述技术方案中,所述激光器为DFB激光器。In the above technical solution, the laser is a DFB laser.

在上述技术方案中,所述光学无源腔由两平面镜一球面镜构成,其中两平面镜分别为输入镜面和输出镜面,三面镜子均渡有与待测气体吸收频率对应的超高反射率。In the above technical solution, the optical passive cavity is composed of two plane mirrors and one spherical mirror, wherein the two plane mirrors are the input mirror and the output mirror respectively, and all three mirrors have ultra-high reflectivity corresponding to the absorption frequency of the gas to be measured.

在上述技术方案中,所用激光器偏振状态为S分量偏振光,在对光学无源腔中的镜子镀膜以及镜子间距离的确定时,都需要针对S分量进行安装调制。In the above technical solution, the polarization state of the laser used is S-component polarized light, and when determining the mirror coating in the optical passive cavity and the distance between the mirrors, it is necessary to perform installation modulation for the S-component.

在上述技术方案中,通过激光扩束器和模式匹配镜对激光器出射光模式与光学无源腔的本征模式进行匹配,并通过光阑对光束的横向光斑大小进行调整,对横向分布不规则的部分光进行拦截。In the above technical solution, the laser beam expander and mode matching mirror are used to match the laser output light mode with the eigenmode of the optical passive cavity, and the transverse spot size of the beam is adjusted through the diaphragm, and the irregular transverse distribution Part of the light is intercepted.

本发明具有以下的有益效果:The present invention has following beneficial effect:

1)三角形环形腔及相关问题的解决。三角形环形腔具有以下优势:(1)能在有限的腔体材料内实现较长的吸收路径。这对于调谐式系统而言,可减少腔纵模间隔,从而提高系统光谱分辨率;(2)除输入、输出腔镜外,折叠镜的加入方便了调腔式系统中PZT腔长调制器的安装;(3)激光选择从折叠镜入射到腔内时,可防止光束直接被反射回激光器,从而可节省光隔离器。其特征在于:利用三角形环形腔并采用具有偏振特性的激光光源,仅利用一个偏振方向的光进行探测,与光准直器的连接采用保偏光纤连接,这样来省掉系统中的光隔离器,并能获得较好的偏振激光光束;并且解决环形腔中,S分量和P分量具有不同的谐振频率因此不能同时谐振的问题。1) The solution of triangular annular cavity and related problems. The triangular annular cavity has the following advantages: (1) It can realize a long absorption path in a limited cavity material. For a tuned system, this can reduce the cavity longitudinal mode interval, thereby improving the spectral resolution of the system; (2) In addition to the input and output cavity mirrors, the addition of folding mirrors facilitates the adjustment of the PZT cavity length modulator in the tuned system. Installation; (3) When the laser is selected to be incident into the cavity from the folding mirror, it can prevent the light beam from being directly reflected back to the laser, thereby saving the optical isolator. It is characterized in that it uses a triangular ring cavity and adopts a laser light source with polarization characteristics, and only uses light in one polarization direction for detection, and the connection with the optical collimator is connected by a polarization-maintaining optical fiber, so as to save the optical isolator in the system , and can obtain a better polarized laser beam; and solve the problem that in the ring cavity, the S component and the P component have different resonance frequencies and therefore cannot resonate at the same time.

2)、激光器的波长锁定系统。本发明中采用具有可调谐作用的DFB激光器,因该激光光源具有温度、电流调谐功能,利用波长计对激光器的温度、电流调谐系数的确定,在产品中便可采用数据控制的方式,通过控制温度和电流实现对激光器的频率进行精确调谐和激光器与光学无源腔的频率锁定系统,以上的激光器的温度电流控制结合目前精度较高的波长计,采用误差反馈调谐的方式对激光器进行频率稳定方式与传统的PDH方式相比,既降低了仪器中控制器件的个数,降低了控制系统的难度,又可以实现激光光源在较长时间内稳频。2) The wavelength locking system of the laser. In the present invention, the DFB laser with tunable function is adopted. Because the laser light source has the function of temperature and current tuning, the wavelength meter is used to determine the temperature and current tuning coefficient of the laser, and the data control method can be adopted in the product. By controlling The temperature and current realize the precise tuning of the frequency of the laser and the frequency locking system between the laser and the optical passive cavity. The temperature and current control of the above laser is combined with the current high-precision wavelength meter, and the frequency of the laser is stabilized by error feedback tuning. Compared with the traditional PDH method, this method not only reduces the number of control devices in the instrument, reduces the difficulty of the control system, but also realizes the frequency stabilization of the laser light source for a long time.

3)、本发明实现在吸收谱线上进行多点测量。精确地测量和控制温度和压力对定量分析至关重要。传统的光腔衰荡光谱(CRDS)仪器仅仅通过两点来测量吸光率,即最大吸收波长和基线波长两点,激光仅仅在这两点之间交替发射,这导致出现多种噪音和错误源。首先,简单的统计学说明,单点的峰高测量是受限的,因其受到散粒噪音(双镜腔室)的影响;其次,这个方法假设激光总是处在谱线中心,这是不对的,即使激光波长真的没有漂离谱线中心,基线和峰线也会漂离,除非设备的温度和压力能被准确稳定地控制。第三,非目标气体吸收线若与目标气体吸收线重叠,哪怕是接近目标气体被选基线的波长,测两点的设备均无法将其识别。所有这些均将导致测量结果的不准确。事实上,本发明是沿着目标气体光谱的吸收线,调节对应吸收线不同位置的激光波长,并通过精细的匹配吸收峰来计算目标气体的浓度。3). The present invention realizes multi-point measurement on the absorption spectrum line. Accurately measuring and controlling temperature and pressure is critical for quantitative analysis. Traditional cavity ring-down spectroscopy (CRDS) instruments measure absorbance at only two points, the wavelength of maximum absorption and the baseline wavelength, between which the laser is emitted alternately, leading to multiple sources of noise and error . First, simple statistics show that single-point peak height measurement is limited because it is affected by shot noise (double-mirror chamber); second, this method assumes that the laser is always at the center of the spectral line, which is No, even if the laser wavelength does not drift away from the center of the spectral line, the baseline and peak lines will drift away, unless the temperature and pressure of the equipment can be accurately and stably controlled. Third, if the absorption line of the non-target gas overlaps with the absorption line of the target gas, even if the wavelength is close to the selected baseline of the target gas, the equipment for measuring the two points cannot identify it. All of these will lead to inaccurate measurement results. In fact, the present invention adjusts the laser wavelengths corresponding to different positions of the absorption line along the absorption line of the spectrum of the target gas, and calculates the concentration of the target gas by finely matching the absorption peaks.

4)、增加模式检测系统。在探测器的一端连有CCD用于检测光学无源腔出射光斑的分布情况,确保了激光器是与光学无源腔的基模耦合。此外,系统还辅助有一套高精度激光波长标定系统及真空系统(尚未在图中标出),用于DFB激光器波长及调谐系数的测定,以及低损光学腔的抽充气。除硬件外,光谱系统的正常运行还需配套有相应的软件。软件部分需完成的功能包括:协调硬件各模块工作、采集并分析腔衰荡信号及显示腔损耗值、光谱曲线等。通过采用具有偏振特性、具有一定光隔离功能、并具有电流可调谐的DFB激光器,仅仅采用一个偏振方向用于对腔内气体的探测。通过这样的简化省掉了一些偏振分束调整功能的器件,提高了激光器的光能利用率;通过电流调谐实现激光器的开关功能,从而省略了AOM及其相关的控制系统。4), increase the mode detection system. A CCD is connected to one end of the detector to detect the distribution of the light spot emitted from the optical passive cavity, which ensures that the laser is coupled with the fundamental mode of the optical passive cavity. In addition, the system is also supplemented with a set of high-precision laser wavelength calibration system and vacuum system (not shown in the figure), which are used for the determination of DFB laser wavelength and tuning coefficient, and the pumping and filling of low-loss optical cavity. In addition to the hardware, the normal operation of the spectroscopy system also needs to be equipped with corresponding software. The functions to be completed by the software part include: coordinating the work of each module of the hardware, collecting and analyzing cavity ring-down signals, and displaying cavity loss values and spectral curves, etc. By using a DFB laser with polarization characteristics, a certain optical isolation function, and current tunable, only one polarization direction is used to detect the gas in the cavity. Through such simplification, some devices with polarization beam splitting and adjusting functions are omitted, and the light energy utilization rate of the laser is improved; the switching function of the laser is realized through current tuning, thereby omitting the AOM and its related control system.

附图说明Description of drawings

下面结合附图和具体实施方式对本发明作进一步详细说明。The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.

图1为测量系统的系统构成示意图。Figure 1 is a schematic diagram of the system configuration of the measurement system.

图2为本发明的测量系统示意图。Fig. 2 is a schematic diagram of the measurement system of the present invention.

具体实施方式Detailed ways

下面结合附图对本发明做以详细说明。The present invention will be described in detail below in conjunction with the accompanying drawings.

如图1是目前发明的首选系统,光学连接由虚线表明,电子学连接用实线表明。系统包括:一个可调谐单频的光源1,在光路中连有一个衰荡光学无源腔20,样品探测电子学系统30,指示电子学系统40,锁定电子学系统50与光学无源腔之间为光学连接。锁定系统在光学无源腔与激光器之间的连接为电子学连接。指示电子学系统50与样品探测间是电子学连接。Figure 1 is the preferred system for the present invention, with optical connections indicated by dotted lines and electronic connections indicated by solid lines. The system includes: a tunable single-frequency light source 1, a ring-down optical passive cavity 20 connected in the optical path, a sample detection electronic system 30, an indicating electronic system 40, a locking electronic system 50 and the optical passive cavity between optical connections. The connection of the locking system between the optical passive cavity and the laser is an electronic connection. The indicator electronics system 50 is electronically connected to the sample detection.

本发明设计的测量系统示意图如图2所示,系统以DFB(DistributedFeed-Back)激光器为光源,通过DFB激光器的电流调制来实现连续激光的快速关断;通过激光光束整形及腔体结构等参数的设计来实现两者的模式耦合;通过调谐DFB激光器注入电流以及扫描无源腔腔长来实现两者之间的频率匹配。因此,相对于传统的光谱系统而言,本系统可节省系统成本、减少系统体积。从上图可看出,系统的硬件可分为光、电两大部分共7个模块。其中,光路部分器件主要包括激光器、光隔离器、光准直器、低损耗光学腔等;电路部分器件主要包括光电探测器、控制电路、PZT腔长调制器、高速数据采集卡及计算机等。The schematic diagram of the measurement system designed by the present invention is shown in Figure 2. The system uses the DFB (Distributed Feed-Back) laser as the light source, and realizes the rapid shutdown of the continuous laser through the current modulation of the DFB laser; through parameters such as laser beam shaping and cavity structure The mode coupling of the two is realized by the design of the two; the frequency matching between the two is realized by tuning the injection current of the DFB laser and scanning the cavity length of the passive cavity. Therefore, compared with the traditional spectroscopic system, the system can save system cost and reduce system volume. As can be seen from the above figure, the hardware of the system can be divided into two parts, optical and electrical, with a total of 7 modules. Among them, the components of the optical path mainly include lasers, optical isolators, optical collimators, and low-loss optical cavities; the components of the circuit mainly include photodetectors, control circuits, PZT cavity length modulators, high-speed data acquisition cards, and computers.

由激光光源1应包含待测气体的吸收光频率,出射光束具有偏振特性的基模高斯光束,理想的激光器带宽为2MHz,激光输出功率为10mW,激光器1为具有温度、电流调谐功能的DFB激光器。为了安全起见,通常在激光器1后连有法布里光隔离器2,光隔离器2有两个作用,一是来保护激光器免受反馈光的影响;二是控制支路中光的偏振特性。同一个腔镜对于不同的偏振特性(S、P)的光有不同的反射率,我们选择S分量作为探测光。从光隔离器2出射后的光为S方向的偏振光。光学无源腔由两平面镜一球面镜构成,其中两平面镜分别为输入镜面6和输出镜面8,三面镜子均渡有与待测气体吸收频率对应的超高反射率。在球面镜7的一端连有腔长调节装置9(PZT),通过调节镜子间距离使能在稳定腔里存在的基模模式的谐振频率为待测气体的吸收频率。The laser light source 1 should contain the absorption light frequency of the gas to be measured, and the output beam is a fundamental-mode Gaussian beam with polarization characteristics. The ideal laser bandwidth is 2MHz, and the laser output power is 10mW. Laser 1 is a DFB laser with temperature and current tuning functions . For safety reasons, a Fabry optical isolator 2 is usually connected behind the laser 1. The optical isolator 2 has two functions, one is to protect the laser from the feedback light; the other is to control the polarization characteristics of the light in the branch . The same cavity mirror has different reflectivity for light with different polarization characteristics (S, P), and we choose the S component as the probe light. The light emitted from the optical isolator 2 is polarized light in the S direction. The optical passive cavity is composed of two plane mirrors and one spherical mirror. The two plane mirrors are the input mirror 6 and the output mirror 8 respectively. All three mirrors have ultra-high reflectivity corresponding to the absorption frequency of the gas to be measured. One end of the spherical mirror 7 is connected with a cavity length adjusting device 9 (PZT). By adjusting the distance between the mirrors, the resonance frequency of the fundamental mode mode existing in the stable cavity is the absorption frequency of the gas to be measured.

光准直器3的作用是调节激光器出射光束的质量,便于与光学无源腔进行模式匹配。光准直器3后连有控制光斑大小的光阑装置5,用于滤掉光束分布特性不太好的边缘光。通过匹配透镜4的作用将入射光束高效率的耦合进光学无源腔,耦合进光学无源腔的光束将在腔内往返多次建立起具有一定强度的脉冲光强信号,最后出射光由出射镜面出射。The function of the optical collimator 3 is to adjust the quality of the beam emitted by the laser, so as to facilitate the mode matching with the optical passive cavity. The optical collimator 3 is connected with an aperture device 5 to control the size of the light spot, which is used to filter out the edge light with poor beam distribution characteristics. Through the function of the matching lens 4, the incident light beam is efficiently coupled into the optical passive cavity, and the light beam coupled into the optical passive cavity will go back and forth in the cavity for many times to establish a pulse light intensity signal with a certain intensity, and finally the outgoing light is transmitted by the Specular exit.

在腔内形成稳定光路后,在光学无源腔输出镜8透射较强的光信号,出射光被分束器分成两束光,一束光被探测器CCD14探测得到激光器与无源腔匹配情况是否良好的信息,通过对腔出射光的光斑分布,来确定激光器1仅仅激发起光学无源腔对应的基模高斯光束,具体的理论及实验过程见相关文献。另一束光由光电探测器探测13,来获得腔内光强阈值积累的判断和衰减速率的测量。最后通过对光强衰减速率的测量获得强衰荡光谱。After forming a stable optical path in the cavity, a strong optical signal is transmitted through the output mirror 8 of the optical passive cavity, and the outgoing light is divided into two beams by the beam splitter, and one beam is detected by the detector CCD14 to obtain the matching between the laser and the passive cavity Whether the information is good or not, it is determined that the laser 1 only excites the fundamental mode Gaussian beam corresponding to the optical passive cavity through the spot distribution of the cavity exit light. For the specific theory and experimental process, please refer to the relevant literature. The other beam of light is detected by a photodetector 13 to obtain the judgment of the threshold accumulation of light intensity in the cavity and the measurement of the decay rate. Finally, the strong ring-down spectrum is obtained by measuring the decay rate of light intensity.

显然,上述实施例仅仅是为清楚地说明所作的举例,而并非对实施方式的限定。对于所属领域的普通技术人员来说,在上述说明的基础上还可以做出其它不同形式的变化或变动。这里无需也无法对所有的实施方式予以穷举。而由此所引伸出的显而易见的变化或变动仍处于本发明创造的保护范围之中。Apparently, the above-mentioned embodiments are only examples for clear description, rather than limiting the implementation. For those of ordinary skill in the art, other changes or changes in different forms can be made on the basis of the above description. It is not necessary and impossible to exhaustively list all the implementation manners here. And the obvious changes or changes derived therefrom are still within the scope of protection of the present invention.

Claims (6)

1. the gas concentration measurement system based on CRDS principle of continuously adjustabe LASER Light Source, is characterized in that, comprises light path part device and circuit part device;
Described light path part device comprises laser instrument, optoisolator, optical collimator, wavemeter, optical passive chamber; Described laser instrument comprises the absorption light frequency of gas to be measured; The effect of described optoisolator is protection laser instrument from polarisation of light characteristic in the impact of feedback light and controlling brancher; The effect of described optical collimator is the quality regulating laser emitting light beam, is convenient to carry out pattern match with optical passive chamber;
Described circuit part device comprises photodetector, control circuit, the long modulator in PZT chamber, high-speed data acquisition card and computing machine;
Formed after stablizing light path in the chamber in described optical passive chamber, at the light signal that optical passive chamber output mirror transmission is stronger, emergent light is divided into two-beam by beam splitter, light beam is obtained laser instrument and the whether good information of optical passive chamber match condition by photodetector detection, by distributing to the hot spot of chamber emergent light, determine the fundamental-mode gaussian beam that laser instrument has only excited optical passive chamber corresponding; Another light beam is detected by photodetector, obtains the judgement of Intensity threshold accumulation and the measurement of rate of decay in chamber; Strong ring-down spectroscopy is obtained finally by the measurement of light intensity attenuation speed.
2. the gas concentration measurement system based on CRDS principle of continuously adjustabe LASER Light Source according to claim 1, is characterized in that, what be also provided with auxiliary low damage optics cavity takes out aerating device.
3. the gas concentration measurement system based on CRDS principle of continuously adjustabe LASER Light Source according to claim 1, is characterized in that, described laser instrument is Distributed Feedback Laser.
4. the gas concentration measurement system based on CRDS principle of continuously adjustabe LASER Light Source according to claim 1, it is characterized in that, described optical passive chamber is made up of two level crossing one spherical mirrors, wherein two level crossings are respectively input minute surface and export minute surface, and three mirror contact lens all crosses the ultra-high reflectivity corresponding with gas absorption frequency to be measured.
5. the gas concentration measurement system based on CRDS principle of continuously adjustabe LASER Light Source according to claim 4, it is characterized in that, laser instrument polarization state used is S component polarization light, to the mirror plated film in optical passive chamber and the timing really of mirror spacing, all need to carry out installation modulation for S component.
6. the gas concentration measurement system based on CRDS principle of continuously adjustabe LASER Light Source according to claim 1, it is characterized in that, by laser beam expander and pattern match mirror, the eigenmodes of laser emitting optical mode with optical passive chamber is mated, and adjusted by the horizontal spot size of diaphragm to light beam, the irregular part light of cross direction profiles is tackled.
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