CN109804108B

CN109804108B - Workpiece holding jig and surface treatment device

Info

Publication number: CN109804108B
Application number: CN201780060162.6A
Authority: CN
Inventors: 石井胜己; 渡边重幸
Original assignee: Almex PE Inc
Current assignee: Almex Technologies Inc
Priority date: 2016-09-29
Filing date: 2017-09-27
Publication date: 2021-07-23
Anticipated expiration: 2037-09-27
Also published as: PH12019500669A1; WO2018062259A1; MY197368A; JPWO2018062259A1; KR20190057319A; CN112962136A; JP6793966B2; CN109804108A

Abstract

The work holding jig has: a conductive frame-shaped member (630); a plurality of conductive 1 st clamping members (610) which are supported by the upper frame member (631) and hold the upper side of the rectangular workpiece (20); a plurality of conductive 2 nd clamping members (620) which are supported by the lower frame member (632) and hold the lower side of the rectangular workpiece; a common power supply unit (650); a 1 st conducting part (660) for conducting electricity from the common power supply part to the upper frame member; and a 2 nd power supply unit (670) that supplies power to the pair of vertical frame members (633, 634) from the common power supply unit. The 1 st conducting part comprises: a pair of 1 st conductive members (661, 662) electrically connected to and fixed to both ends of the upper frame member and guiding the pair of vertical frame members so as to be movable up and down, respectively, via an insulating member (635); and a pair of 2 nd conductive members (663, 664) electrically connecting the common power supply portion and the pair of 1 st conductive members.

Description

Workpiece holding jig and surface treatment device

Technical Field

The present invention relates to a work holding jig used in a surface treatment apparatus such as a continuous plating apparatus, a surface treatment apparatus, and the like.

Background

In a surface treatment apparatus such as a continuous plating apparatus, a workpiece is held by a workpiece holding jig while being suspended, and the workpiece is continuously conveyed in a liquid in a surface treatment tank. For example, as shown in patent document 1, a workpiece holding jig is generally used to clamp an upper end of a workpiece and hold the workpiece by sagging.

In addition, the work holding jig has another function of setting the work as a cathode (anode) with respect to an anode (anode) disposed in the surface treatment tank. An electric field is formed between the cathode and the anode, and the electroplating solution is electrolyzed to electroplate the surface of the workpiece. Therefore, the clamping member for clamping the upper end of the workpiece is formed of a conductive member, and the workpiece is set as a cathode by the workpiece holding jig.

However, there is a limitation in ensuring in-plane uniformity of surface treatment of a workpiece by merely ensuring a current-carrying path at the upper end of the workpiece. Therefore, the applicant of the present application has developed a work holding jig in which power is supplied from the vertical direction of a work by clamping members for clamping the upper end and the lower end of the work (patent document 2).

Prior art documents

Patent document

Patent document 1: japanese patent laid-open publication No. 2009-132956

Patent document 2: japanese patent No. 5898540

Disclosure of Invention

Problems to be solved by the invention

According to the technique disclosed in patent document 2, although the in-plane uniformity of the current distribution of the workpiece can be improved, for example, it is required to further reduce the resistance difference of the current-carrying paths for carrying current to the upper and lower end portions of the workpiece, or to further improve the in-plane uniformity by simultaneously reducing the resistance difference of the current-carrying paths for carrying current to the front and back surfaces of the workpiece.

An object of some aspects of the present invention is to provide a workpiece holding jig and a surface treatment apparatus that can further reduce the difference in resistance of a current path for supplying current to the upper and lower end portions or the front and back surfaces of a workpiece, thereby further improving the in-plane uniformity of the current distribution of the workpiece.

Means for solving the problems

(1) One aspect of the present invention relates to a workpiece holding jig for holding a rectangular workpiece in a vertical state in a processing liquid in a processing bath and setting the workpiece as a cathode, the workpiece holding jig including:

a conductive frame-shaped member including a horizontal frame member having an upper frame member and a lower frame member, and a pair of vertical frame members electrically connected to the lower frame member, the frame-shaped member being disposed so as to surround the workpiece;

a plurality of conductive 1 st clamping members supported by the upper frame member and gripping an upper side of the workpiece;

a plurality of conductive 2 nd clamping members supported by the lower frame member and gripping a lower edge of the workpiece;

a common power supply unit;

a 1 st current-carrying portion for carrying current from the common power supply portion to the upper frame member; and

a 2 nd conducting portion which conducts electricity from the common power supply portion to the pair of vertical frame members and has a resistance value smaller than that of the 1 st conducting portion,

The 1 st conducting part comprises:

a pair of 1 st conductive members electrically connected and fixed to both end portions of the upper frame member, and guiding the pair of vertical frame members so as to be movable up and down, respectively, via an insulating member; and

and a pair of 2 nd conductive members electrically connecting the common power feeding portion and the pair of 1 st conductive members.

According to one aspect of the present invention, the plurality of 1 st clamping members are energized from the common power supply portion through the pair of 1 st and 2 nd conductive members and the upper frame member as the 1 st energizing portions, and the plurality of 2 nd clamping members are energized from the common power supply portion through the 2 nd energizing portions, the pair of vertical frame members and the lower frame member, each having a smaller resistance value than the 1 st energizing portion.

Here, the 1 st current-carrying portion is not directly current-carried to the upper frame member by the shortest path as in patent document 2, but is current-carried by a pair of 1 st and 2 nd conductive members serving also as a pair of vertical frame members as a lifting guide. Therefore, it is easy to set the resistance value of the 1 st conducting portion to be substantially equal to the total resistance value of the 2 nd conducting portion and the pair of vertical frame members. Accordingly, the current flowing from the plurality of 1 st clamping members to the workpiece can be made substantially equal to the current flowing from the plurality of 2 nd clamping members to the workpiece, and the in-plane uniformity of the current distribution of the workpiece can be further improved. The pair of 1 st conductive members electrically connected and fixed to both end portions of the upper frame member also serve as members for guiding the pair of vertical frame members to be movable up and down through the insulating member. Thus, the lower frame member and the plurality of 2 nd clamping members supported by the pair of vertical frame members move downward by their own weight to apply tension to the workpiece, and deflection that may occur particularly in a thin plate-like workpiece can be prevented. Further, since the upper frame member and the pair of 1 st conductive members are electrically insulated from the pair of vertical frame members by the insulating member, the current-carrying paths of the 1 st and 2 nd current-carrying portions can be electrically insulated.

(2) In one aspect of the present invention, the pair of the 2 nd electrically conductive members may be formed in a redundant manner while bypassing the respective shortest paths between the pair of the 1 st electrically conductive members and the common power feeding portion. In this way, it is easier to set the resistance value of the 1 st conducting portion to be substantially equal to the total resistance value of the 2 nd conducting portion and the pair of vertical frame members.

(3) In one aspect of the present invention, the pair of 1 st conductive members may be provided with longitudinal holes, respectively, and the pair of vertical frame members may be provided with the insulating members that are guided along the longitudinal holes, respectively. In this way, since the resistance value of the pair of 1 st conductive members having the longitudinal holes is increased, it is easier to set the resistance value of the 1 st conductive portion to be substantially equal to the total resistance value of the 2 nd conductive portion and the pair of longitudinal frame members.

(4) In one aspect of the present invention, the 2 nd energization portion may include 2 conductive cables electrically connecting the common power supply portion and the upper end portions of the pair of vertical frame members. In this way, by reducing the resistance value of the 2 nd conducting portion, it is easier to set the resistance value of the 1 st conducting portion to be substantially equal to the total resistance value of the 2 nd conducting portion and the pair of vertical frame members.

(5) One aspect of the present invention may be further configured such that,

the work holding jig energizes the work to process both surfaces of the work,

the plurality of 1 st clamping members and the plurality of 2 nd clamping members respectively include:

a fixed clamp piece fixed to the horizontal frame member;

a movable clamp piece supported to be swingable with respect to the fixed clamp piece; and

an elastic member for maintaining a clamped state of the workpiece clamped by the fixed clamp piece and the movable clamp piece,

the elastic member is a conductive plate spring electrically connected and fixed to at least the horizontal frame member and the movable clamp piece.

(6) Another aspect of the invention relates to a workpiece holding fixture,

the workpiece holding jig is characterized by comprising:

a fixed clamp piece fixed to the conductive member;

a movable clamp piece which is swingable relative to the fixed clamp piece; and

the elastic member is a conductive plate spring that is electrically connected and fixed to at least the conductive member and the movable clamp piece.

According to the aspects (5) and (6) described above, the movable clamp piece can be energized from the lateral frame member (conductive member) through the leaf spring. In general, the movable clamp piece is supported to be swingable on a shaft portion supported by the fixed clamp piece, and a torsion coil spring inserted through the shaft portion is used as an elastic member for maintaining a clamped state of a workpiece clamped between the fixed clamp piece and the movable clamp piece. In this case, the fixed grip piece, the shaft portion, and the torsion coil spring are interposed in the current-carrying path between the conductive member and the movable grip piece. However, the intervening member formed of the shaft portion and the torsion coil spring is only partially in contact with the fixed grip piece and the movable grip piece. Therefore, the resistance value of the current-carrying path from the conductive member to the movable grip piece via the intervening member is much larger than the resistance value of the current-carrying path from the conductive member to the fixed grip piece. When both surfaces of a workpiece are subjected to surface treatment by applying current to both surfaces of the workpiece, the uniformity of treatment of the front and back surfaces of the workpiece cannot be ensured due to the difference in the resistance values. According to the aspects (4) and (5), the movable clamp piece is energized through the leaf spring from the electric component, so that the uniformity of processing of the front and back surfaces of the workpiece can be improved. Further, the plate spring that maintains the clamped state of the workpiece clamped by the fixed clamping piece 7 and the movable clamping piece is also used as the energizing member, so that the number of components is not increased.

(7) Another aspect of the present invention may be further configured such that,

the plate spring includes:

a 1 st fixing portion electrically connected to the movable clamp piece and fixed thereto;

a 2 nd fixing portion electrically conducted with the conductive member and fixed; and

a pair of arm parts connecting the 1 st fixing part and the 2 nd fixing part,

a part of the pair of arm portions disposed on both sides of the fixed grip piece and the movable grip piece in a plan view includes a U-shaped bent portion.

Thus, the plate spring has a line-symmetric shape in plan view, and the clamping force lines of the plate spring can be symmetrically and uniformly applied, and the current-carrying path of the plate spring from the conductive member to the movable clamping piece can be ensured in line symmetry. This improves the in-plane uniformity of the current distribution of the workpiece.

(8) Another aspect of the present invention may be further configured such that,

the fixed clamping piece is fixed by being electrically insulated from the conductive member,

the plate spring includes:

a 2 nd fixing portion electrically conducted with the conductive member and fixed;

a 3 rd fixing portion electrically connected to the fixing clip piece and fixed thereto; and

A pair of arm parts connecting the 1 st fixing part and the 2 nd fixing part,

the 2 nd fixing part is located between the 1 st fixing part and the 3 rd fixing part in the longitudinal direction of the plate spring,

In this way, since the conductive member forms the current-carrying path on the movable grip piece in line symmetry via the 2 nd fixing portion, the pair of arm portions, and the 1 st fixing portion, the in-plane uniformity of the current distribution of the workpiece is improved. Further, a current-carrying path is formed on the fixed clamp piece from the conductive member electrically insulated from the fixed clamp piece through the 2 nd fixing portion and the 3 rd fixing portion of the plate spring. Thus, the 1 st conduction path from the conductive member to the fixed grip piece and the 2 nd conduction path from the conductive member to the movable grip piece are formed by the plate spring, and thereby the difference in resistance value between the 1 st and 2 nd conduction paths can be further reduced. This can further improve the uniformity of the treatment of the front and back surfaces of the workpiece.

(9) In another aspect of the present invention, the work holding jig may include a shaft portion supported by the fixed clamp piece and supporting the movable clamp piece to be swingable, and the 1 st fixing portion may be fixed to the movable clamp piece at a position offset toward a clamp end side of the movable clamp piece from a position of the shaft portion.

In this way, not only the clamp end of the movable clamp piece can be moved toward the fixed clamp piece by the plate spring, but also the increase in the resistance value of the 2 nd conduction path through the U-shaped bent portion of the plate spring can be offset by shortening the distance from the 1 st fixing portion to the clamp end of the movable clamp piece.

(10) In another aspect of the present invention, the work holding jig may include a shaft portion supported by the fixed clamp piece and supporting the movable clamp piece to be swingable, the 1 st fixing portion may be fixed to the movable clamp piece at a position offset toward a clamp end side of the movable clamp piece from a position of the shaft portion in the plan view, and the 3 rd fixing portion may be fixed to the fixed clamp piece at a position offset toward an end portion side of the fixed clamp piece opposite to the clamp end from the position of the shaft portion in the plan view.

In this way, by increasing the length of the 1 st conduction path from the 2 nd fixing portion of the plate spring to the clamping end of the fixed clamping piece through the 3 rd fixing portion, the difference between the resistance value of the 2 nd conduction path to the clamping end of the movable clamping piece through the 2 nd fixing portion, the U-shaped bent portion, and the 1 st fixing portion of the plate spring and the resistance value of the 1 st conduction path can be reduced.

(11) Another aspect of the present invention is a surface treatment apparatus, comprising:

a surface treatment tank which contains a treatment liquid and has an upper end opening;

(1) the work holding jig of any one of (1) to (10), which holds a rectangular work immersed in the treatment liquid in the surface treatment tank to hang down and sets the work as a cathode; and

an anode electrode disposed at a position opposing the workpiece in the surface treatment tank.

Drawings

Fig. 1 is a longitudinal sectional view of a surface treatment apparatus according to an embodiment of the present invention.

Fig. 2 is a partially enlarged view of fig. 1.

Fig. 3 is a perspective view of a workpiece holding jig of a comparative example.

Fig. 4 is a diagram showing two guide rails and a workpiece holding jig of a comparative example.

Fig. 5 is a diagram showing a portion to be energized of the workpiece holding jig according to the embodiment of the present invention.

Fig. 6 is a front view showing a current-carrying portion and a workpiece holding portion of the workpiece holding jig according to the embodiment of the present invention.

Fig. 7(a) is a view showing a part of a support structure to which a pair of conductive members guiding a pair of vertical frame members so as to be able to move up and down are connected, and fig. 7(B) is a view showing a vertical hole formed in the 1 st conductive member.

Fig. 8 is a diagram showing a 2 nd power supply unit of patent document 2.

Fig. 9 is a side view of the 1 st and 2 nd clamping members.

Fig. 10 is a plan view of the 1 st and 2 nd clamping members.

Fig. 11 is a bottom view of the 1 st and 2 nd gripping members.

FIG. 12 is a schematic view showing an anode electrode part disposed in the treatment tank of FIG. 1.

Detailed Description

Preferred embodiments of the present invention will be described in detail below. The present embodiment described below is not intended to unduly limit the contents of the present invention described in the claims, and all of the configurations described in the present embodiment are not necessarily essential as means for solving the present invention.

1. Outline of surface treatment apparatus

FIG. 1 is a longitudinal sectional view of a surface treatment apparatus such as a continuous plating apparatus. In the continuous plating apparatus 10, a plurality of conveying jigs 30A each holding a workpiece 20 such as a circuit board are circularly conveyed in a direction perpendicular to the sheet surface of fig. 1. Fig. 1 shows 2 parallel

linear conveyance paths

110 and 120 in the circulating conveyance path 100. The two

linear conveyance paths

110 and 120 are connected at both ends to form an endless circulating conveyance path 100.

The circulation conveyance path 100 is provided with: a plating tank (broadly, a surface treatment tank) 200 that performs a surface treatment such as a plating treatment on the workpieces 20 held by the plurality of workpiece holding jigs 30A, respectively; a carrying-in section (not shown) which is provided upstream of the plating tank 200 in the circulating transport path 100 and which carries the unprocessed workpieces 20 into the plurality of transport jigs 30A; and a carrying-out section (not shown) provided downstream of the plating tank 200 on the circulating transport path 100, for carrying out the processed workpieces 20 from the plurality of workpiece holding jigs 30A.

In the present embodiment, the plating vessel 200 is provided along the 2 nd linear transport path 120, and the carry-in part and the carry-out part are provided on the 1 st linear transport path 110. The circulation conveyance path 100 further includes a pretreatment tank group 230 disposed upstream of the plating vessel 200 and a post-treatment tank group (not shown) disposed downstream of the plating vessel 200.

The pretreatment tank group 230 is configured by disposing, for example, a degreasing tank, a hot water washing tank, a shower tank, and a pickling tank in this order from the upstream side between the carry-in part and the plating tank 200. The post-treatment tank is configured by disposing, for example, a shower tank and a rinsing tank in this order from the upstream side between the plating tank 200 and the carry-out section. The number and type of the pretreatment tank set 230 and the post-treatment tank set may be changed as appropriate.

As shown in fig. 1, the continuous plating apparatus 10 includes a plating vessel (broadly, a surface treatment vessel) 200, and the plating vessel 200 contains a plating liquid Q (broadly, a treatment liquid) and has an upper end opening 201. As shown in fig. 2 showing a part of fig. 1 in an enlarged manner, the continuous plating apparatus 10 further includes, for example, 2 1 st rails 130 and 2 nd rails 140 extending in the 1 st direction (direction perpendicular to the paper plane) parallel to the longitudinal direction of the plating tank 200 at a position deviated from the upper side of the upper end opening 201 of the plating tank 200. The plurality of transfer jigs 30A are disposed in the processing liquid in the plating tank 200, hold the workpieces 20, and are supported by the 1 st and 2

nd guide rails

130 and 140, respectively. The number of the guide rails may be 1 or 3 or more.

As shown in fig. 3, each of the plurality of workpiece holding jigs 30A roughly includes a conveying unit 300 and a workpiece holding unit 500. The conveying unit 300 of the work holding jig 30A shown in fig. 1 may be shared with a work holding jig 30B of the present embodiment described later. The energization portion 330 and the workpiece holding portion 500 in the workpiece holding jig 30A shown in fig. 1 are comparative examples, and are different from the power supply portion 650 and the workpiece holding portion 600 in the workpiece holding jig 30B of the present embodiment shown in fig. 6.

The work holding jig 30A shown in fig. 1 includes a conveying section 300 and a current-carrying section 330. The conveying member 300 includes a horizontal arm 301, a 1 st guided portion 310, and a 2 nd guided portion 320. As shown in fig. 3, the horizontal arm portion 301 includes, for example, two 1 st and 2 nd

horizontal arms

301A and 301B extending in a 2 nd direction B perpendicular to (in a broad sense, intersecting) the 1 st direction (conveying direction) a. As shown in fig. 4, the 1 st guided portion 310 is supported by one end side of the horizontal arm portion 301 and guided by the 1 st guide rail 130. As shown in fig. 4, the 2 nd guided portion 320 is supported by the other end side of the horizontal arm portion 301 and guided by the 2 nd guide rail 140.

As shown in fig. 3, the current-carrying portion 330 includes: a conductive horizontal arm 301(301A, 301B) also serving as the conveying member 300; a conductive support plate 331; and, for example, 2 conductive

vertical arm portions

332A and 332B (332) suspended and supported from the support plate 331. As shown in fig. 3, the support plate 331 is fixed to the horizontal arm portion 301 at a position between the 1 st guided portion 310 and the 2 nd guided portion 320.

In this way, the plurality of clamps 30A have a double-supported beam configuration as follows: the 1 st and 2 nd guided

portions

310 and 320 on both end sides in the 2 nd direction B are supported on the 1 st and 2

nd guide rails

130 and 140, respectively, via the vertical arm portion 332 that holds the workpiece 20. Therefore, in the present embodiment, the vertical movement of the workpiece holding jig 30A is suppressed during the entire conveyance process, and the conveyed workpiece 20 can be stably held. Further, since the 1 st and 2 nd rails 130 and 140 and the 1 st and 2 nd guided

portions

310 and 320, which are sliding portions, are located at positions deviated from the upper side of the upper end opening 201 of the plating vessel 200, dust and the like do not fall into the plating vessel 200 to contaminate the plating liquid.

In the plating apparatus 10, the workpiece 20 is used as a cathode (cathode), the plating vessel 200 is provided with cylindrical mesh bags (housing sections) 202 and 203 housing anodes (anodes, for example, copper-based anode balls) 410L and 410R on both sides of a conveyance path of the workpiece 20, and an electric field is formed between the cathode and the anode to electrolyze the plating solution, thereby plating the workpiece 20. Therefore, it is necessary to energize the workpiece 20 which is immersed in the plating liquid Q and conveyed. For example, at least one of the 1 st and 2 nd rails 130 and 140 may be used as a power supply rail for supplying power to the workpiece 20. In this case, of the members constituting the workpiece holding jig 30A, the material of the path for passing the current from the 1 st and 2

nd guide rails

130 and 140 to the workpiece 20 through the current passing portion 330 may be formed using an electric conductor.

Alternatively, as shown in fig. 1 and 2, the plating apparatus 10 may be provided with at least 1 current-carrying rail 210 separately from the 1 st and 2

nd guide rails

130 and 140. In particular, as shown in fig. 2, in order to implement the current control method disclosed in japanese patent application laid-open No. 2009-132999, the current-carrying rail 210 of the present embodiment has a plurality of, for example, 4 divided current-carrying rails 210A to 210D insulated from each other. Each of the plurality of workpiece holding jigs 30A has a current-receiving portion 340 (fig. 2 and 3) that is brought into contact with and receives current from any one of the 4 divided current-receiving rails 210A to 210D. The current-carrying portion 340 is fixed to the horizontal arm portions 301(301A and 301B) which are components of the current-carrying portion 330.

In this way, the plurality of clamps 30A have a double beam support form as follows: the 1 st and 2 nd guided

portions

nd guide rails

130 and 140 through the electrified portion 340, respectively. Therefore, the vertical movement of the powered portion 340 is suppressed and the contact with the power supply rail 210 can be stably maintained throughout the conveyance of the workpiece holding jig 30A.

Fig. 5 shows a specific case of the energized portion 340. The current-carrying part 340 has a parallel link mechanism 342 of a hinged four-bar structure, and the parallel link mechanism 342 connects a conductive support plate 350 fixed to the horizontal arm parts 301(301A, 301B) and a conductive contact part 341 by using, for example, two conductive

parallel links

342A, 342B. The two

links

342A and 342B are constantly urged to move clockwise by the torsion coil springs 343 and 343 as urging members. As a result, the contact portion 341 can be brought into contact with the current-carrying rail 210 with an appropriate contact pressure.

The two

parallel links

342A and 342B are inclined so that the upper side support point advances and the lower side support point advances. As a result, the contact portion 341 travels while being pulled by the conveyance jig 30A, and therefore travels stably.

2. Current-carrying part and work holding part of comparative example

As described above, as shown in fig. 3, the current-carrying portion 330 of the workpiece holding jig 30a of the comparative example includes: a conductive horizontal arm portion 301; a conductive support plate 331; and conductive

vertical arm portions

332A, 332B (332). Further, the workpiece holding portion 500 as a comparative example is supported by being suspended from the two

vertical arm portions

332A and 332B.

As shown in fig. 3, the work holding portion 500 includes: a plurality of conductive 1 st clamping members 510 for holding the upper side 20a of the rectangular workpiece 20; a plurality of conductive 2 nd clamping members 520 for holding the lower part 20b of the rectangular workpiece 20 facing the upper side 20a in the vertical direction C; and a frame member 530 disposed so as to surround the rectangular workpiece 20 and supporting the plurality of 1 st clamping members 510 and the plurality of 2 nd clamping members 520.

The frame member 530 has: a conductive upper frame member 531 for supporting the plurality of 1 st clamping members 510; a conductive lower frame member 532 supporting the plurality of 2 nd clamping members 520; and two conductive

vertical frame members

533, 534 connecting both end portions of the upper frame member 531 and both end portions of the lower frame member 532, respectively.

In this way, in the frame-like member 530 of the comparative example, the upper frame member 531 and the lower frame member 532 are electrically conducted by the two

vertical frame members

533, 534. The upper frame member 531 is passed through the 2

vertical arm portions

332A and 332B functioning as current-carrying portions to carry current to the lower frame member 532. Therefore, conventionally, the resistance value of the current path to the lower frame member 532 is inevitably larger than the resistance value of the current path to the upper frame member 531. Therefore, the current distribution in the workpiece 20 is not good in the in-plane uniformity because the current value is higher as it approaches the upper side 20a and is lower as it approaches the lower side 20 b.

3. Workpiece holding section of workpiece holding jig of the present embodiment

3.1. No. 1, No. 2 clamp member, frame-shaped member and No. 1, No. 2 energizing part

Fig. 6 shows a workpiece holding jig 30B according to an embodiment of the present invention, and particularly shows a workpiece holding portion 600 having a different configuration from the workpiece holding jig 30A of the comparative example. The workpiece holding jig 30A of the comparative example and the workpiece holding jig 30B of the present embodiment can share the conveying unit 300 shown in fig. 3. The workpiece holding jig 30B of fig. 6 differs from the workpiece holding jig 30A of fig. 3 in the configuration of the workpiece holding portion 600 including the common power feeding portion 650. The common power supply unit 650 is connected to a current-carrying path that extends from the contact portion 341 (fig. 5) of the conveying unit 300 shown in fig. 3 to the workpiece holding unit 600 through the support plate 350, the horizontal arm portions 301(301A, 301B), and the support plate 331 in this order. Fig. 6 shows a configuration in which the common power supply unit 650 shown in fig. 6 is coupled to the support plate 331 shown in fig. 3, instead of the vertical arm units 332(332A, 332B) and the workpiece holding unit 500 shown in fig. 3.

The workpiece holding portion 600 shown in fig. 6 includes: a plurality of conductive 1 st clamping members 610 for holding the upper side 20a of the rectangular workpiece 20; a plurality of conductive 2 nd clamping members 620 for gripping the lower side 20b of the rectangular workpiece 20; a frame member 630 disposed so as to surround the rectangular workpiece 20 and supporting the plurality of 1 st clamping members 610 and the plurality of 2 nd clamping members 620; a common power supply unit 650; and a 1 st conducting part 660 and a 2 nd conducting part 670. In the present embodiment, the workpiece holding portion 600 connects the common power supply portion 650 and the frame member 630 via, for example, 2 insulating

arms

601, 601.

Here, particularly in the case where an extremely thin workpiece is to be surface-treated, the hanging-down state of the workpiece 20 cannot be maintained by the hydraulic pressure when the workpiece 20 is lowered and loaded into the treatment tank 200 or when the workpiece 20 is conveyed in the treatment tank 200 in the conveying direction a of fig. 3.

Since the workpiece holding portion 600 of the present embodiment clamps the upper and

lower sides

20a, 20b of the workpiece 20, the vertical posture of the workpiece 20 can be maintained even if hydraulic pressure is applied. In addition, the 2 nd clamping member 620 is made movable in the vertical direction. This will be described later.

According to the present embodiment, even an extremely thin workpiece 20 having a thickness of 100 μm or less, preferably 60 μm or less, of the workpiece 20 can be prevented from being deformed. In the present embodiment, the thickness of the workpiece 20 is, for example, 0.04mm, which is 40 μm. Further, the workpiece holding portion 500 of the comparative example also has the upper and lower 1 st and 2

nd clamping members

510 and 520, and thus can prevent deformation of the workpiece 20, which is the same as the present embodiment.

However, when the frame member 530 is electrically connected to the 1 st and 2

nd clamping members

510 and 520 as in the comparative workpiece holding portion 500, the resistance value of the electrical path to the lower frame member 532 supporting the 2 nd clamping member 520 is inevitably larger than the resistance value of the electrical path to the upper frame member 531 supporting the 1 st clamping member 510. This is because the current-carrying path to the lower frame member 532 must pass through the current-carrying path to the upper frame member 531. Further, as in the conventional technique of patent document 1, when only the upper end of the workpiece is clamped by the holding jig, the current-carrying path is limited to the upper frame member. Therefore, the current (or the flow of electrons in the opposite direction) flowing from the anode through the liquid to the workpiece and the frame-like member is more likely to flow toward the upper end side of the workpiece clamped by the workpiece holding jig, and the current distribution in the workpiece becomes uneven in the workpiece surface. The in-plane uniformity of the current distribution of the workpiece can affect the surface treatment quality of the workpiece.

In the present embodiment, the frame member 630 disposed so as to surround the rectangular workpiece 20 may include: a conductive upper frame member (lateral frame member) 631 supporting the plurality of 1 st clamping members 610; a conductive lower frame member (horizontal frame member) 632 for supporting the plurality of 2 nd clamping members 620; and a pair of conductive

vertical frame members

633, 634. The plurality of 1 st clamping members 610 are disposed in line symmetry with respect to the longitudinal axis line of the frame-like member 630 with respect to the upper frame member (horizontal frame member) 631, and the plurality of 2 nd clamping members 620 are disposed in line symmetry with respect to the longitudinal axis line of the frame-like member 630 with respect to the upper frame member (horizontal frame member) 632. In the present embodiment, the 1 st current conducting portion 660 for supplying power from the common power supply portion 650 to the frame member 631 may include: a pair of 1 st

conductive members

661, 662 provided at both end portions of the upper frame member 631; and a pair of 2 nd

conductive members

663 and 664 that electrically connect the common power feeding portion 650 and the pair of 1 st conductive members 640A and 640B. The 2 nd power supply unit 670 for supplying power from the common power supply unit 650 to the pair of

vertical frame members

633, 634 includes, for example, two vertical frame

power supply cables

671A, 671B.

The current-carrying path from the common power supply portion 650 to the 1 st clamping member 610 via the 1 st current-carrying portion 660 and the current-carrying path from the common power supply portion 650 to the 2 nd clamping member 620 via the 2 nd current-carrying portion 670 are electrically insulated by an insulating member 640, which will be described later, and the resistance value can be set independently. This improves the in-plane uniformity of the current distribution in the workpiece 20, and further improves the surface treatment quality of the workpiece 20.

In the present embodiment, the plurality of 1 st clamping members 610 and the plurality of 2 nd clamping members 620 are electrically insulated. Further, the electricity supplied from the common power supply unit 650 to the 1 st and 2

nd clamping members

610 and 620 is also separated to the 1 st and 2 nd

electricity supply units

660 and 670 electrically insulated from each other. The 1 st current-carrying portion 660 carries current from the common power supply portion 650 to the plurality of 1 st clamping members 610 through the upper frame member 531 as a part of the frame member 630. The 2 nd current-carrying portion 670 carries current from the common power-feeding portion 650 to the pair of

vertical frame members

533, 534 and the lower frame member 532, which are the other part of the frame-like member 630, to the plurality of 2 nd clamping members 620.

Therefore, the current-carrying path from the common power supply portion 650 to the 1 st clamping member 610 via the 1 st current-carrying portion 660 and the current-carrying path from the common power supply portion 650 to the 2 nd clamping member 620 via the 2 nd current-carrying portion 670 can be independently set to the resistance value. Thus, the resistance value of the current-carrying path from the common power supply portion 650 to the plurality of 1 st clamping members 610 and the resistance value of the current-carrying path from the common power supply portion 650 to the plurality of 2 nd clamping members 620 can be set to be substantially equal. As a result, the in-plane uniformity of the current distribution of the workpiece 20 can be improved, and the surface treatment quality of the workpiece 20 can be further improved.

In particular, in the present embodiment, the 1 st current-carrying portion 660 for carrying current from the common current-carrying portion 650 to the upper frame member 631 includes a pair of 1 st

conductive members

661, 662 and a pair of 2 nd

conductive members

663, 664. The pair of 1 st

conductive members

661, 662 are electrically connected and fixed to both end portions of the upper frame member 631, and the pair of

vertical frame members

533, 534 are guided to be vertically movable by an insulating member 640 described later. The pair of 2 nd

conductive members

663 and 664 electrically connect the common power supply portion 650 and the pair of 1 st

conductive members

661 and 662. Thus, the 1 st conducting part 660 is formed in a long length. The pair of 2 nd

conductive members

663 and 664 are formed in redundant lengths on the shortest paths between the pair of 1 st

conductive members

661 and 662 and the common power feeding portion 650, respectively. In the present embodiment, each of the pair of 2 nd

conductive members

663 and 664 includes: a vertical piece 665 whose upper end is connected to the common power supply part 650; a horizontal strip 666 having one end connected to one of the pair of 1 st

conductive members

661, 662; and an inclined piece 667 connecting a lower end of the vertical piece 665 and the other end of the horizontal piece 666, and is formed lengthily.

Here, according to fig. 6 of patent document 2, the 1 st current-carrying portion 660 carries current directly from the common current-carrying

portions

301A and 301B to the upper frame member 631, and the conductive connecting portions 662(662A and 662B) that are components of a part of the 1 st current-carrying portion 660 linearly extend vertically downward as the shortest path between the insulating connecting portion 661 that supports the common

power supply portions

301A and 301B and the upper frame member 631. On the other hand, as shown in fig. 6, the 1 st current-carrying portion of the present embodiment supplies power to the upper frame member 631 without supplying power directly from the common power supply portion 650, but supplies power to the upper frame member 631 with the pair of 1 st

conductive members

661 and 662 interposed therebetween. The pair of 2 nd

conductive members

663 and 664 to which power is supplied from the common power supply unit 650 to the pair of 1 st

conductive members

661 and 662 are formed redundantly as described above. Therefore, the 1 st current-carrying portion 660 of the present embodiment can easily set the resistance value of the power supply path from the common power supply portion 650 to the upper frame member 631 to be larger than the 1 st current-carrying portion 660 of patent document 2.

On the other hand, in both patent document 2 and the present embodiment, the 2 nd power supply portion 670 is common in that it has two vertical-frame

power supply cables

671A and 671B. However, in the 2 nd energization part 670 of patent document 2, as shown in fig. 8, the vertical frame energization cable 671A (671B) is connected to the vertical frame member 633(634) through the compression coil spring 643 and the fixing member 644. The fixing member 644 fixes the vertical frame current-carrying

cables

671A and 671B to the insulating guide member 641 fixed to the upper frame member 631. In the insulating guide member 641, two

horizontal pieces

641B and 641C are coupled to the vertical piece 641A, and the vertical-

frame cables

671A and 671B are fixed to the horizontal piece 641C by bolts 644A, nuts 644B, and

washers

644C and 644D. Below the horizontal piece 641B, an insulating cylindrical member 642 is provided that vertically movably guides the upper end portion 633A (634A) of the vertical frame member 633 (634). The upper end portion 633A (634A) is inserted through a hole 642A or the like of the insulating cylindrical member 642, and has a flange 633B (634B) at a position projecting upward from the horizontal piece 641B. The compression coil spring 643 is disposed between the washer 644D and the flange 633B (634B), and presses the vertical frame member 633(634) to apply tension to the workpiece 20. Therefore, in the 2 nd conducting portion 670, compared to patent document 2 in which a coil spring 643 needs to be compressed in a power supply path from the common power supply portion 650 to the pair of

vertical frame members

633, 634, or the like, the resistance value of the power supply path can be set to be smaller more easily in the present embodiment.

As is clear from the above, the resistance value of the 1 st current carrying part 660 of the present embodiment can be set to be substantially equal to the total resistance value of the 2 nd current carrying part 670 and the vertical frame members 633 (634). Thus, the resistance value of the current-carrying path from the common power supply portion 650 to the plurality of 1 st clamping members 610 and the resistance value of the current-carrying path from the common power supply portion 650 to the plurality of 2 nd clamping members 620 can be set to be substantially equal.

3.2. Liftable supporting structure of a pair of vertical frame members

The pair of

vertical frame members

633, 634 are supported by the pair of 1 st

conductive members

661, 662 so as to be movable up and down. Fig. 7(a) shows a supporting structure that can be lifted and lowered, and fig. 7(B) shows at least one, for example, two elongated holes 661A formed in the 1 st conductive member 661. Similarly, the 1 st conductive member 662 is provided with a longitudinal hole 662A (see fig. 7 a).

Fig. 7(a) shows a vertical frame member 634 supported on a 1 st conductive member 662 so as to be movable up and down. The vertical frame member 633 is also supported by the 1 st conductive member 661 with the same support structure as in fig. 7 (a). The vertical frame member 664 has an insulating member 635 that is guided along a vertical hole 662A formed in the 1 st conductive member 662. The vertical frame member 664 is vertically movable along the vertical hole 662A formed in the 1 st conductive member 662 by the insulating member 635, and is electrically insulated from the 1 st conductive member 662.

Insulating member 635 may include, for example, a shaft portion 635B with a flange 635A and an insulating washer 635C. The flange 635A is disposed between the vertical frame member 634 and the 1 st conductive member 662, and the shaft portion 635B is inserted into the vertical hole 662A. The axial length of the shaft portion 635B is set to be longer than the thickness t of the 1 st conductive member 662. An insulating washer 635C is disposed on a free end surface of the shaft portion 635B slightly protruding from the elongated hole 662A. In this state, the insulating member 635 is fixed to the vertical frame member 634. For example, a fastener 636 such as a screw, a tapping screw, or a bolt is fastened to the vertical frame member 634 through a hole formed in the insulating washer 635C, the shaft portion 635B, and the flange 635A.

As shown in fig. 7(a), the shaft portion 635B of the insulating member 635 ensures the degree of freedom of being able to move up and down along the elongated hole 662A. Therefore, the vertical frame member 634 moves within the range of the vertical hole 662A due to the weight of the vertical frame member 634, the lower frame member 632, and the 2 nd clamping member 620, thereby applying tension to the workpiece 20. The tension applied to the workpiece 20 is sufficient due to the weight of the vertical frame member 634, the lower frame member 632, and the 2 nd clamping member 620 so as not to deflect the workpiece 20 moving in the liquid. Therefore, in the present embodiment, an elastic member such as a spring for applying tension to the workpiece 20 is not required.

As an advantage of the elevating support structure shown in fig. 7(a), it is possible to eliminate or minimize the need for processing for increasing the electrical resistance of the

vertical frame members

633, 634. This is because, when screws or bolts are used as the fasteners 636, screw holes may be provided in the

vertical frame members

633, 634, and screws or bolts are screwed into the screw holes. When a tapping screw is used as the fastener 636, a guide hole may be provided in the

vertical frame members

633, 634, and the tapping screw is screwed into the guide hole. In addition, when the flange 635A of the insulating member 635 is fixed to the

vertical frame members

633, 634 by bonding or the like, the

vertical frame members

633, 634 do not need to be processed.

Here, the 2 nd power supply part 670 and the

vertical frame members

633 and 634 are conductive members disposed between the common power supply part 650 and the lower frame member 632, and are required to have the same degree of resistance as the 1 st power supply part 660 disposed between the common power supply part 650 and the upper frame member 631. For this reason, it is necessary to reduce the electric resistance of the

vertical frame members

633, 634. In the present embodiment, the

vertical frame members

633, 634 have a constant rectangular cross section over the entire length, for example, and thus there is no need to provide a long hole, a spring, or the like to increase the resistance in a deformed cross section.

3.3. Clamping structure

The structure of the 1 st and 2

nd clamping members

610 and 620 will be described with reference to fig. 9 to 11. In the present embodiment, as shown in fig. 9 to 11, each of the plurality of 1 st clamping members 610 and the plurality of 2 nd clamping members 620 has: a fixed clamp piece 710 fixed to the lateral frame member 700 (the upper frame member 631 or the lower frame member 632) serving as a conductive member; and a movable clamping piece 720 movable relative to the fixed clamping piece 710. The movable clamp piece 720 is swingably supported by a shaft portion 740, and the shaft portion 740 is supported by the fixed clamp piece 710. As shown in fig. 9, the workpiece 20 can be clamped between the clamp ends 711, 721 by closing the clamp ends 711, 721 of the fixed clamp piece 710 and the movable clamp piece 720. By operating the operating portion 722 located at a position opposite to the clamp end 721 with respect to the shaft portion 740, the clamp end 721 is separated from the clamp end 711, and the clamped state of the workpiece 20 can be released.

The workpiece 20 is clamped by the fixed clamping piece 710 contacting, for example, the front surface of the workpiece 20 and the movable clamping piece 720 contacting, for example, the rear surface of the workpiece 20. The clamped state of the workpiece 20 can be maintained by the elastic member 730. In the present embodiment, the elastic member 730 may be configured as a conductive plate spring that is electrically connected and fixed to at least the lateral frame member 700 (the upper frame member 631 or the lower frame member 632) and the movable clamp piece 720.

Here, as an elastic member for maintaining a clamped state of the workpiece clamped between the fixed clamp piece 710 and the movable clamp piece 720, a torsion coil spring inserted through the shaft portion 740 is generally used. In this case, the fixed grip piece 710, the shaft portion 740, and the torsion coil spring are interposed in the current-carrying path between the conductive member 700 and the movable grip piece 720. However, the intervening member formed of the shaft portion 740 and the torsion coil spring is only partially in contact with the fixed grip piece 710 and the movable grip piece 720. Therefore, the resistance value of the 2 nd conduction path from the conductive member 700 to the movable grip piece 720 via the intervening member is much larger than the resistance value of the 1 st conduction path from the conductive member 700 to the fixed grip piece 710. When both surfaces of the workpiece 20 are subjected to surface treatment by applying current to both surfaces of the workpiece 20, the uniformity of treatment of the front and back surfaces of the workpiece 20 cannot be ensured due to the difference in the resistance values. According to the configuration of the present embodiment, the movable clamp piece 720 is energized from the conductive member 700 (the upper frame member 631 or the lower frame member 632) through the plate spring 730, and the uniformity of the treatment of the front and back surfaces of the workpiece 20 can be improved. Further, the plate spring 730 that maintains the clamped state of the workpiece 20 clamped by the fixed clamping piece 710 and the movable clamping piece 720 is also used as the energizing member, so that the number of components is not increased.

Here, the plate spring 730 may include at least a 1 st fixing part 731, a 2 nd fixing part 732, and a pair of

arm parts

733A, 733B that connect the 1 st fixing part 731 and the 2 nd fixing part 732. The 1 st fixing portion 731 of the plate spring 730 is fixed by electrically conducting the movable clamp piece 720 with a bolt 750. The 2 nd fixing portion 732 of the plate spring 730 is fixed by electrically conducting the conductive member 700 (the upper frame member 631 or the lower frame member 632) with the bolt 751 and, if necessary, the

conductive plates

752 and 753 on the front and back surface sides of the 2 nd fixing portion 732. Further, a conductive or insulating plate 754 may be provided between the conductive member 700 and the fixed clamp piece 71. When the plate 754 is an insulating plate, as shown in fig. 9 or 11, the 3 rd fixing portion 733 of the plate spring 730 and the fixing clip piece 710 can be fixed by electrically conducting them. However, when the plate 754 is a conductive plate or the plate 754 is not provided, the 3 rd fixing portion 733 is not necessarily provided. This is because the fixing clip piece 710 is electrically connected to the conductive member 700 even though it does not pass through the 3 rd fixing portion 733. In any case, a part of each of the pair of

arm portions

733A and 733B, which is disposed on both sides of the fixed grip piece 710 and the movable grip piece 720 in a plan view shown in fig. 10 or 11, is formed into a bent portion bent in a U-shape as shown in fig. 9.

Thus, the plate spring 730 has a line-symmetric shape in plan view, and the clamping force of the plate spring 730 acts linearly symmetrically and equally, and a current-carrying path from the conductive member 700 to the plate spring 730 of the movable clamp piece 720 can be secured linearly symmetrically. This improves the in-plane uniformity of the current distribution in the workpiece 20.

Here, in the example shown in fig. 9, the 2 nd fixing part 732 is located between the 1 st fixing part 731 and the 3 rd fixing part 733 in the longitudinal direction of the plate spring 730 at the time of expansion. Further, a current-carrying path is formed in the fixed clamp piece 710 from the conductive member 700 electrically insulated from the fixed clamp piece 710 through the 2 nd fixing portion 732 and the 3 rd fixing portion 733 of the plate spring 730. Thus, the plate spring 730 forms the 1 st current-carrying path from the conductive member 700 to the fixed grip piece 710 and the 2 nd current-carrying path from the conductive member 700 to the movable grip piece 720, thereby further reducing the difference in resistance value between the 1 st and 2 nd current-carrying paths. This can further improve the uniformity of the treatment of the front and back surfaces of the workpiece 20.

In the present embodiment, as is apparent from fig. 9 and 10, the 1 st fixing portion 731 is provided at a position closer to the clamp end 721 of the movable clamp piece 720 than the position of the shaft portion 740 in a plan view. Thus, the clamp end 721 of the movable clamp piece 720 can be biased to move toward the fixed clamp piece 710 by the plate spring 730. In addition, the increase in the resistance value of the 2 nd conduction path via the U-shaped bent portion of the pair of

arm portions

733A and 733B of the plate spring 730 can be offset or alleviated by shortening the distance from the 1 st fixing portion 731 to the clamping end 721 of the movable clamping piece 720.

In the present embodiment, as is apparent from fig. 9 and 11, the 3 rd fixing portion 733 is provided at a position closer to the end portion side of the fixed clamp piece 710 opposite to the clamp end 711 than the position of the shaft portion 740 in a plan view. Thus, the length of the 1 st conduction path from the 2 nd fixing portion 732 of the plate spring 730 to the clamping end 711 of the fixing clamp piece 710 through the 3 rd fixing portion 733 can be increased. Thus, a difference between the resistance value of the 2 nd current carrying path from the 2 nd fixing portion 732 of the plate spring 730 to the clamping end of the movable clamping piece 720 via the U-shaped bent portion of the pair of

arm portions

733A and 733B and the 1 st fixing portion 731 can be reduced.

4. Anode electrode for improving in-plane uniformity of current distribution within a workpiece

Fig. 12 schematically shows anode electrodes (anodes) 410R (410L) arranged on both sides of the conveyance path of the workpiece 20 shown in fig. 1. The anode electrode 410R (410L) is energized by an anode rod 400 extending in the longitudinal direction of the processing bath 200. The anode electrode 410R (410L) is usually directly connected to the anode rod 400, but in the present embodiment, the insulator 430 is interposed between the anode rod 400 and the anode electrode 410R (410L) to fix the anode electrode 410R (410L) to the anode rod 400. An intermediate conducting portion 420 is provided to hang down from the anode rod 400. The contact member 420A at the lower end of the relay portion 420 is provided at a position lower than the liquid surface Q1 of the treatment liquid Q in the treatment tank 200. The contact member 420A is connected to, for example, a middle position in the vertical direction of the anode electrode 410R (410L), and is configured to supply current to the anode electrode 410R (410L).

The intermediate position in the vertical direction of the anode electrode 410R (410L) connected to the relay conducting portion 420 is preferably a position that divides the vertical dimension of the workpiece 20 held suspended by the workpiece holding jig 30B into two. When a plurality of kinds of workpieces 20 having different vertical dimensions are used, the vertical position of the contact member 420A can be adjusted with respect to the relay portion 420 by a known elevating mechanism. The contact member 420A can contact the anode electrode 410R (410L) by a predetermined length in a direction perpendicular to the paper surface of fig. 12.

In the anode 410R (410L), when the current from the contact member 420A flows to the workpiece 20 as the cathode through the treatment liquid in the treatment bath 200, the current branches off from the height position of the contact member 420A in the anode 410L (410R) in the upward direction E1 and the downward direction E2. By using the anode electrode 410R (410L) shown in fig. 9 in combination with the work holding jig 30B having the work holding portion 600, the current flows uniformly to the 1 st clamping member 610 and the 2 nd clamping member 620 on the cathode side at the center position in the vertical direction of the work 20 facing the relay conducting portion 420 of the anode electrode 410R (410L), and the current flowing through the work 20 is improved in the nonuniformity of the current distribution in the vertical direction.

Although the present embodiment has been described in detail as above, it is needless to say that a person skilled in the art can make many modifications without actually departing from the novel matters and effects of the present invention. Therefore, all such modifications are included in the scope of the present invention. For example, a term described at least once in the specification or the drawings together with a different term having a broader meaning or the same meaning can be replaced with a different term at any position in the specification or the drawings. All combinations of the embodiment and the modifications are also included in the scope of the present invention.

For example, the current-carrying portion 330 of the jig 30B may be connected to the current-receiving portion 340 and the common power supply portion 650 by a cable, not via the horizontal arm portion 301 or the like.

Description of the reference symbols

10: a surface treatment apparatus (continuous plating apparatus); 20: a workpiece; 20 a: an upper side; 20 b: the lower side; 30A, 30B: a workpiece holding jig; 200: a surface treatment tank (plating tank); 201: the upper end is open; 210: electrifying the track; 210A to 210D: cutting the electrified track; 301. 301A, 301B: 1 st and 2 nd horizontal arms; 340: a powered part; 410L, 410R: an anode electrode; 600: a workpiece holding section; 610: 1 st clamping member; 620: a 2 nd clamping member; 630 a frame-like member; 631: an upper frame member (a horizontal frame member, a conductive member); 632: a lower frame member (a horizontal frame member, a conductive member); 633. 634: a pair of vertical frame members; 635: an insulating member; 640: an insulating member; 641: an insulating plate; 642: an insulating pin; 643: an anti-drop flange; 650: a common power supply unit; 660: the 1 st electrification part; 661. 662: a pair of 1 st conductive members; 663. 664: a pair of 2 nd conductive members; 670: a 2 nd conducting part; 671A, 671B: a longitudinal frame energizing cable; 700: conductive members (upper frame member, lower frame member); 710: fixing the clamping sheet; 711: a clamping end; 720: a movable clamping piece; 721: a clamping end; 730: an elastic member (plate spring); 731: 1 st fixed part; 732: a 2 nd fixing part; 733A, 733B: a pair of arm portions; 740: a shaft portion; a: the 1 st direction (conveying direction); b: a 2 nd direction; c: a vertical direction; q: a treatment liquid (plating liquid); q1: the liquid level.

Claims

1. A workpiece holding jig for holding a rectangular workpiece in a vertical state in a processing liquid in a processing bath and setting the workpiece as a cathode, comprising:

a common power supply unit;

the 1 st conducting part comprises:

2. The workpiece holding jig of claim 1,

the pair of 2 nd electrically conductive members are formed in a redundant manner while bypassing the respective shortest paths between the pair of 1 st electrically conductive members and the common power feeding portion.

3. The workpiece holding jig according to claim 1 or 2,

the pair of 1 st conductive members are provided with longitudinal holes,

the pair of vertical frame members are provided with the insulating members that are guided along the vertical long holes, respectively.

4. The workpiece holding jig of claim 1,

the 2 nd energization part includes 2 conductive cables electrically connecting the common power supply part and the upper end parts of the pair of vertical frame members.

5. The workpiece holding jig of claim 1,

the work holding jig energizes the work to process both surfaces of the work,

a fixed clamp piece fixed to the horizontal frame member;

6. A surface treatment device is characterized by comprising:

the work holding jig of any one of claims 1 to 5, which holds a rectangular work immersed in the treatment liquid of the surface treatment tank as hanging down and sets the work as a cathode; and