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CN109752394B - High-precision detection method and system for defects of display screen - Google Patents

High-precision detection method and system for defects of display screen Download PDF

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Publication number
CN109752394B
CN109752394B CN201910081145.1A CN201910081145A CN109752394B CN 109752394 B CN109752394 B CN 109752394B CN 201910081145 A CN201910081145 A CN 201910081145A CN 109752394 B CN109752394 B CN 109752394B
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defect
precision
defects
dark
detection
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CN109752394A (en
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高敏
姚毅
解三霞
路建伟
马增婷
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Luster LightTech Co Ltd
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Luster LightTech Co Ltd
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Abstract

The application discloses a high-precision detection method and a system for defects of a display screen, wherein the method comprises the steps of obtaining a global image and determining a defect area; extracting light and dark information of the defect area; shooting focusing images of the defect positions on different layers, and determining the specific layer position of the defect; judging defective products according to the detection standard; the system comprises a low-precision gray-scale camera, a processor, a high-precision color camera and a display; according to the method and the system, the high-precision color camera is used for shooting the local defect position in a high-precision mode, the local sub-pixel level image processing of the defect position can be realized, the analog point measurement standard is introduced to judge the brightness of the bright point, the bad degree is accurately quantized, the defect detected after being compared with the actual detection standard is guaranteed to be correct, and the false detection is avoided.

Description

High-precision detection method and system for defects of display screen
Technical Field
The application relates to the technical field of defect detection, in particular to a high-precision detection method and system for defects of a display screen.
Background
Along with the continuous improvement of the living standard of people, the quality requirement on the display screen is gradually improved, and meanwhile, the defect detection on the display screen also faces higher requirements. The display screen is composed of a plurality of pixel points, wherein each pixel point comprises three sub-pixels (also called drawing pixels) of R (red), G (green) and B (blue), and various colors are expressed by adjusting the brightness of the sub-pixels of the three colors of RGB.
Common display screen defects can be roughly divided into three defects of points, lines and color spots according to the forms of the defects. The point defects are the most common defects in the display screen, and can be roughly divided into dark points, bright points and foreign matters. The dark point is a normally dark point, and under a full white picture, if any sub-pixel of the RGB three points is not bright, the defect is called a dark point; the bright spot is a normally bright spot, and in a full black picture, if any sub-pixel of the RGB three spots is bright, the defect is called the bright spot; the foreign matter is an indelible interference object such as dust, broken filaments and the like in an interlayer such as a glass cover plate, a backlight layer or a polarizer, and can be divided into bright foreign matter and dark foreign matter according to the type of a visible picture, wherein the bright foreign matter is visible in a black picture, and the dark foreign matter is visible in a white picture. In actual industrial production, the shapes of bright and dark spots are various and have different criteria for determination. The detection of dark spots is usually determined according to the number, distance and connection form; for the detection of the bright spots, besides the determination of the number, distance and connection form, the brightness is also measured, generally speaking, the bright spots with brightness lower than a certain threshold are regarded as good products and ignored; the foreign matter is determined mainly based on its size and distance, and is generally regarded as a defective product if the size exceeds a certain standard.
At present, most detection equipment commonly adopts a gray camera to carry out global shooting on a display screen, detects bright and dark defects according to a neighborhood comparison method, calculates contrast and size information of the bright and dark defects, sets contrast and size threshold values according to experience, and determines the defects as bad if the contrast and the size threshold values exceed the threshold values, otherwise, determines the defects as good. The detection system can better detect most millimeter-scale defects by performing image processing based on pixels, but cannot be used for detecting the micron-scale defects with higher detection precision requirements and cannot be aligned with the detection reference required by the market. The method is characterized in the following three aspects: when detecting the dark spot defect, if the traditional detection equipment is adopted to carry out global gray level image acquisition, the fine morphological characteristics of the dark spot cannot be seen from the image, namely the dark spot cannot be judged to be a distance dark spot or a two-connected dark spot, and the purpose of accurate measurement cannot be achieved; when the bright points are detected, because the gray level camera does not have color information and human eyes have different sensitivities to red and green, when the brightness difference is relatively close, the bad degree is difficult to distinguish, and the measurement precision is reduced; when the foreign matter is detected, the specific position of the foreign matter cannot be measured by the gray scale camera, so that the display screen which can be repaired is judged as a waste product by mistake, and the resource waste is caused.
Disclosure of Invention
The application provides a display screen defect high-precision detection method and system, which aim to solve the problems of low measurement precision and poor accuracy in the prior art, and the method is based on high-precision color camera shooting local defect positions, can realize sub-pixel level image processing of the local defect positions, and simultaneously introduces analog point measurement standard to judge brightness of bright spots, and ensures that the detected defects are correct after being compared with actual detection standard by accurately quantizing the bad degree, thereby avoiding false detection.
The application provides a high-precision detection method for defects of a display screen, which comprises the steps of obtaining a global image and determining a defect area;
extracting light and dark information of the defect area;
shooting focusing images of the defect positions on different layers, and determining the specific layer position of the defect;
and judging defective products according to the detection standard.
Optionally, when the defect is a dark spot defect, the determining the defective product of the defect according to the detection criterion includes:
analyzing the connection form of the defects;
if the connection form of the defects is a distance dark point, judging that the product is good; and if the connection form of the defects is two continuous dark points, determining that the defects are defective.
Optionally, when the defect is a bright spot defect, the determining the defective product of the defect according to the detection criterion includes:
analyzing the color of the defect and calculating the brightness to obtain a first brightness value;
shooting a simulation point image with the same color according to the color of the defect, and calculating the brightness of the simulation point image to obtain a second brightness value;
comparing the first luminance value with the second luminance value; if the first brightness value is larger than the second brightness value, determining that the product is defective; if the first brightness value is less than or equal to the second brightness value, the product is determined to be good.
Optionally, when the defect is a foreign object defect, the determining the defective product of the defect according to the detection criterion includes:
setting a theoretical foreign matter size threshold;
calculating the size of the actually measured foreign matter and performing morphological analysis;
comparing the measured foreign body size with a theoretical foreign body size threshold; and if the measured foreign matter size exceeds the theoretical foreign matter size threshold, determining that the product is a defective product.
Optionally, the theoretical foreign matter size threshold includes a width threshold, an area threshold, and an outline threshold; the comparing the measured foreign matter size to the theoretical foreign matter size threshold comprises:
and respectively comparing the width value, the area value and the outline value in the actually measured foreign body size with a theoretical size threshold, and if any one of the width value, the area value and the outline value exceeds the theoretical foreign body size threshold, judging that the foreign body is a defective product.
Optionally, the capturing the focus images of the defect positions on different layers includes:
shooting an image of the defect position in the liquid crystal layer;
shooting an image of a defect position on the virtual focus N layer;
and shooting an image of the defect position on the virtual focus-N layer.
Optionally, the bright and dark information includes the number of bright and dark points, a connection form, and a foreign object image.
The embodiment of the application also provides a high-precision detection system for the defects of the display screen, which comprises a low-precision gray-scale camera, a processor, a high-precision color camera and a display;
the low-precision gray camera is used for acquiring a global image from the display screen to be detected and sending the global image to the processor;
the processor is used for determining a defect area according to the global image and extracting brightness information of the defect area;
the high-precision color camera is used for shooting focusing images of the defect positions on different layers and sending the focusing images to the processor;
the processor is also used for determining the specific layer position where the defect is located according to the focusing image; judging defective products according to the detection standard;
the display is used for displaying the global image, the defect area and the defective product judgment result.
According to the technical scheme, the method and the system for detecting the defects of the display screen with high precision are provided, and the method comprises the steps of obtaining a global image and determining a defect area; extracting light and dark information of the defect area; shooting focusing images of the defect positions on different layers, and determining the specific layer position of the defect; judging defective products according to the detection standard; the system comprises a low-precision gray-scale camera, a processor, a high-precision color camera and a display; according to the method and the system, the high-precision color camera is used for shooting the local defect position in a high-precision mode, the local sub-pixel level image processing of the defect position can be realized, the analog point measurement standard is introduced to judge the brightness of the bright point, the bad degree is accurately quantized, the defect detected after being compared with the actual detection standard is guaranteed to be correct, and the false detection is avoided.
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In order to more clearly explain the technical solution of the present application, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious to those skilled in the art that other drawings can be obtained according to the drawings without any creative effort.
FIG. 1 is a flow chart of a method for detecting defects of a display screen with high precision according to the present application;
FIG. 2 is an exploded step diagram of step S4 in the method provided herein;
FIG. 3 is a schematic structural diagram of a high-precision system for detecting defects of a display screen according to the present application;
fig. 4 is a detection flow chart of a high-precision detection system for defects of a display screen provided by the present application.
Detailed Description
Referring to fig. 1, a flowchart of a high-precision method for detecting defects of a display screen provided by the present application is shown;
as can be seen from fig. 1, an embodiment of the present application provides a method for detecting defects of a display screen with high precision, including:
s1: acquiring a global image and determining a defect area; in this embodiment, the object for acquiring the global image is the whole screen of the display screen to be detected, such as a mobile phone, a computer, an electronic station report, a television, a remote controller, and the like, and a suitable image acquisition device is adaptively selected according to the size of the screen of the object to be detected, so as to shoot the global image as soon as possible, thereby increasing the image acquisition efficiency. It should be noted that, in the present embodiment, the main functions of step S1 are: the approximate position of the bright and dark spot defect in the image is rapidly acquired and divided by the defect area, which plays a screening role for subsequent high-precision shooting, therefore, in order to determine the defect area more rapidly and reduce the equipment cost, the image acquisition equipment adopted in the step S1 can be selected from a traditional low-precision gray scale camera or other equipment with similar functions.
Further, the defect area in this embodiment refers to an image range having a certain area and containing a defect, and since the defect may exist at any position of the detected display screen and a plurality of defects may exist in the display screen at the same time, a plurality of defect areas may exist on the entire display screen and the size of each defect area may be different. Therefore, when dividing the defect regions, in order to facilitate accurate measurement of each defect region, it should be ensured that each defect region is filled with defect points as much as possible. If the distance between two defect points is close, the two defect points can be divided into the same defect area; if two defect points are separated by a certain distance, the two defect points cannot be in the same defect area, and the defect points are divided into one defect area;
furthermore, in order to facilitate the analysis and management of data, after the defect areas are divided, rules may be manually established to number the defect areas, such as defect area 1, defect area 2 … …, and so on.
S2: extracting light and dark information of the defect area; after dividing a plurality of defect areas according to the rough positions of the defects, acquiring brightness information of each defect area, wherein the brightness information mainly comprises the number of brightness points, connection forms, foreign body images and the like. Since the defect area may contain one or two kinds of defects during dividing, it is necessary to count the light and dark information of each defect area for subsequently adopting different accurate detection schemes respectively for different kinds of light and dark information.
In addition, after the light and dark information is collected respectively, for convenience of management, the light and dark information can be expressed in a list and other intuitive modes, for example: "defect area 1-bright spot 3-there is bright foreign matter, defect area 2-bright spot 1-there is no bright foreign matter" or "defect area 1-dark spot 4-2-two even dark spots 2-there is no dark foreign matter, defect area 2-dark spot 2-there is dark foreign matter 2-there is dark spot".
Further, the light and dark information in the present embodiment is not limited to the above information, and may also include position information (represented by coordinates) of light and dark points, position information of the area, and the like, so that the high-precision camera can quickly lock the defective area to be photographed, and the processing efficiency is increased; similarly, the above information may be presented in a list together with other information to assist the operator in performing the subsequent operation steps.
After the steps S1 and S2, the defect regions are determined and the defect types in the defect regions are obtained, and in order to accurately judge whether the defects in the defect regions meet the determination of defective products, it is necessary to perform high-precision color camera local photographing on the defect regions, as shown in step S3,
s3: shooting focusing images of the defect positions on different layers, and determining the specific layer position of the defect; because the position of the defect area is determined in the previous step, and the shooting range is maximally reduced, when a color camera with higher precision is adopted in the step, the loss of the camera caused by shooting other areas is avoided, and the defect of the shooting area can be more accurately judged. Specifically, when the high-precision color camera shoots different layers of foreign matter images, images with shooting defect positions in the liquid crystal layer, the virtual focus N layer and the virtual focus-N layer can be respectively selected, and the shot images are contrasted and analyzed to determine whether the foreign matter exists in the liquid crystal layer or the backlight layer, so that the foreign matter can be removed through repair if the foreign matter exists in the backlight layer, and the foreign matter can be determined as a defective product if the foreign matter exists in the liquid crystal layer.
S4: and judging defective products according to the detection standard. For different types of defects, different detection standards are required to judge defective products, and more precise detection standards are required to be formulated to obtain higher detection precision, however, the traditional detection method has low shooting precision, so that even if the higher standards are formulated, the detection result cannot be completely aligned with the detection standards, and the detection standards are disabled; since the step S3 in this embodiment adopts high-precision color camera shooting, the shooting result can be matched with a higher detection reference, and thus the determination result is more real and effective.
Referring to fig. 2, there is provided an exploded step diagram of step S4 in the method provided by the present application;
further, in a possible embodiment, when the defect types are different, the process of implementing step S4 may be implemented in various forms;
for example, when the defect is a dark spot defect, the determining defective products according to the detection criteria includes:
s411: analyzing the connection form of the defects; the connection form mainly includes a distance dark point and two continuous dark points. The distance dark points can be defined as a combination of dark points, wherein the distance between two dark points satisfies a certain distance range according to different formulated detection standards, for example, when the interval between two dark points is set to be three to five pixel points, the distance dark points form one distance dark point, and on the premise, the pixel points which are three to five pixel points away from one dark point form the distance dark points with the dark points. The number of the two continuous dark points is not limited, and if a plurality of dark points are within a certain interval range (the interval can be defined as zero to three pixel points), all the dark points meeting the definition range form the two continuous dark points.
S412: if the connection form of the defects is a distance dark point, judging that the product is good; and if the connection form of the defects is two continuous dark points, determining that the defects are defective. In the setting of the detection criterion in this embodiment, the determination of whether the defect is a defective product or not by determining the connection form of the defect of the dark point is made based on the defective degree of the defect, and since the defects of two consecutive dark points are more concentrated, the defective degree of the defect type should be considered to be higher, that is, the defect type is determined to be a defective product; therefore, the situation that the display screen is scrapped in advance due to the fact that the distance dark spot is judged to be a defective product in the traditional detection method is avoided through high-precision detection.
As another example, when the defect is a bright point defect, the determining the defective product of the defect based on the detection criteria includes:
s421: analyzing the color of the defect and calculating the brightness to obtain a first brightness value; the detection of the bright spots depends on the brightness of the bright spots to a great extent, and in the actual production process, the light transmittance of different screens is different, so that human eyes have certain difference in visibility of bright defects with the same gray level on different screens. In the traditional detection method, because the gray-scale camera does not have color information, when the brightness difference of the two compared images is small, the poor degree of the brightness is difficult to distinguish only by the perception capability of human eyes on the brightness. Due to the adoption of the color camera, the measurement difficulty of the brightness value is effectively reduced, and the detection precision is further improved. For example, if a red bright point and a green bright point exist in the same defect area at the same time, if a gray camera is used for shooting and gray brightness detection reference comparison is used at the same time, because human eyes have different color sensitivity, it is difficult to accurately judge whether the two are defective products, and if the color camera of the embodiment is used for shooting, the reference brightness of corresponding colors can be selected to implement brightness comparison respectively on the premise of knowing the colors of the defects, so that the comparison result is more accurate.
In addition, in the embodiment, the brightness value of the bright point at the defect is quantized to obtain the first brightness value, and the detection result is more accurate by using numerical comparison instead of human eye identification.
S422: shooting a simulation point image with the same color according to the color of the defect, and calculating the brightness of the simulation point image to obtain a second brightness value; in the embodiment, in order to ensure the detection accuracy of the bright points, analog points are introduced as detection references, the analog points are bright points which are simulated on a screen in advance, the bright points include three types of red, green and blue, the positions of the bright points are fixed, the shapes of the analog points and the bright point defects are consistent, the brightness values of the analog points can be set according to the reference requirements of different manufacturers, and the setting of the visible and invisible critical brightness of the adult eyes can be generally considered.
S423: comparing the first luminance value with the second luminance value; if the first brightness value is larger than the second brightness value, the brightness of the bright point is considered to be overproof, and the bright point is judged to be a defective product; if the first brightness value is less than or equal to the second brightness value, the optical module is determined to be good, and the bright spot defect can be ignored.
In addition, in order to further ensure the detection precision, when each display screen is detected, the analog point image corresponding to the color of the bright point in the current display screen is shot in real time, and the brightness of the analog point image is used as a brightness threshold value for judging the bright point defect of the display screen; when the detected display screen is replaced, the simulation point image still needs to be shot again.
For another example, when the defect is a foreign object defect, the determining the defective product based on the detection criterion includes:
s431: setting a theoretical foreign matter size threshold; before the detection process is implemented, a detection standard needs to be established for the foreign matter defect, namely the foreign matter defect is judged to be a defective product when the specification size exceeds a certain limited threshold value;
further, the theoretical foreign matter size threshold may include a width threshold, an area threshold, an outline threshold, and the like, and the specifically defined size type is set by a manufacturer according to actual requirements, which is not limited herein.
S432: calculating the size of the actually measured foreign matter and performing morphological analysis; because the foreign body has different shapes, in order to simplify the calculation process, the size calculation must be performed based on morphological analysis to obtain a more accurate measured foreign body size.
S433: comparing the measured foreign body size with a theoretical foreign body size threshold; and if the measured foreign matter size exceeds the theoretical foreign matter size threshold, determining that the product is a defective product.
Further, when the theoretical foreign matter size threshold is provided in plurality, the method further includes:
s434: respectively comparing the width value, the area value and the outline value in the actually measured foreign body size with a theoretical size threshold, and if any one of the width value, the area value and the outline value exceeds the theoretical foreign body size threshold, judging that the foreign body is a defective product; on the contrary, when all the items do not exceed the theoretical foreign matter size threshold, the product is determined as good.
According to the technical scheme, the high-precision detection method for the defects of the display screen comprises the steps of obtaining a global image and determining a defect area; extracting light and dark information of the defect area; shooting focusing images of the defect positions on different layers, and determining the specific layer position of the defect; judging defective products according to the detection standard; according to the method, the high-precision color camera is used for shooting the local defect position in a high-precision mode, the local sub-pixel level image processing of the defect position can be achieved, meanwhile, the analog point measurement standard is introduced to judge the brightness of the bright point, the bad degree is accurately quantized, the defect detected after being compared with the actual detection standard is guaranteed to be correct, and the false detection is avoided.
Referring to fig. 3, a schematic structural diagram of a high-precision system for detecting defects of a display screen is provided in the present application.
As can be seen from fig. 3, the embodiment of the present application further provides a system for detecting defects of a display screen with high precision, which includes a low-precision grayscale camera 2, a processor 4, a high-precision color camera 3 and a display 5;
the low-precision gray camera 2 is used for acquiring a global image from the display screen 1 to be detected and sending the global image to the processor 4;
the processor 4 is configured to determine the defect area 11 according to the global image, and extract light and dark information of the defect area 11;
the high-precision color camera 3 is used for shooting focusing images of the defect positions on different layers and sending the focusing images to the processor 4;
the processor 4 is further configured to determine a specific layer position where the defect is located according to the focusing image; judging defective products according to the detection standard;
the display 5 is used for displaying the global image, the defect area 11 and the defective product judgment result.
Referring to fig. 4, a detection flow chart of a high-precision detection system for defects of a display screen is provided in the present application.
As can be seen from fig. 4, the detection process of the detection system provided by the present application is as follows: shooting a display screen 1 to be detected by using a low-precision gray camera 2 to obtain a global image, and sending the global image to a processor 4; after receiving the global image, the processor 4 extracts the defects in the global image and analyzes the brightness and darkness attributes of the defects, and then sends the position information of the defects to the high-precision color camera 3 and the display 5, so that the positions of the defects are shown in the display 5; after receiving the position information of the defect, the high-precision color camera 3 performs high-precision shooting on the position of the defect under different focal lengths to obtain defect images under different focal lengths and sends the defect images back to the processor 4; then, the processor 4 determines the layer where the foreign matters are located through calculation and analysis, and judges whether the foreign matters are defective products or not according to the defect images; the specific defective product judging process is as follows: firstly, judging foreign matter defects, comparing a preset theoretical size threshold with an actual size, and directly judging as a defective product if the actual size is larger than the theoretical size threshold; if the actual measurement sizes are not larger than the theoretical size threshold, the next step of judgment is carried out; judging whether the dark spot is defective or not by analyzing the form of the dark spot and judging whether the dark spot is defective or not according to a specified detection standard if the dark spot is defective; if the defect is a bright spot defect, firstly analyzing the color of the bright spot, shooting a simulation point image of the corresponding color, comparing the actually measured brightness of the bright spot with the brightness of the simulation point, and if the actually measured brightness of the bright spot is higher than the brightness of the simulation point, judging the defect to be a defective product; otherwise, the bright spot defect is ignored; finally, when the detection processes of all the defect areas 11 are completed, the detection results are summarized and displayed on the display 5.
According to the technical scheme, the embodiment of the application provides a high-precision detection system for the defects of the display screen; the system comprises a low-precision gray-scale camera, a processor, a high-precision color camera and a display; the system of this application carries out the high accuracy through high accuracy color camera to the defect position part and shoots, can realize the local sub-pixel level image processing of defect position, introduces analog point measurement standard simultaneously and judges bright point luminance, through carrying out accurate quantization to the harmful degree, guarantees that the defect that detects out after comparing with actual detection standard is correct, avoids the false retrieval.
Other embodiments of the invention will be apparent to those skilled in the art from consideration of the specification and practice of the invention disclosed herein. This application is intended to cover any variations, uses, or adaptations of the invention following, in general, the principles of the invention and including such departures from the present disclosure as come within known or customary practice within the art to which the invention pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the invention being indicated by the following claims.
It will be understood that the invention is not limited to the precise arrangements described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the invention is limited only by the appended claims.

Claims (4)

1. A high-precision detection method for defects of a display screen is characterized by comprising the following steps:
acquiring a global image, and determining one or more defect areas in the global image;
extracting light and dark information of the defect area; the bright and dark information comprises defect types, bright and dark point numbers, connection forms and foreign body images;
shooting focusing images of the defect positions on different layers, and determining the specific layer position of the defect;
judging defective products according to the detection standard;
when the defect is a dark spot defect, the judging the defective product of the defect according to the detection standard comprises the following steps:
analyzing the connection form of the defects;
if the connection form of the defects is a distance dark point, judging that the product is good; if the connection form of the defect is two continuous dark points, determining that the defect is a defective product;
when the defect is a bright point defect, the judging the defective product of the defect according to the detection reference comprises:
analyzing the color of the defect and calculating the brightness to obtain a first brightness value;
shooting a simulation point image with the same color according to the color of the defect, and calculating the brightness of the simulation point image to obtain a second brightness value;
comparing the first luminance value with the second luminance value; if the first brightness value is larger than the second brightness value, determining that the product is defective; if the first brightness value is less than or equal to the second brightness value, determining that the product is good;
when the defect is a foreign matter defect, the judging the defective product according to the detection standard comprises:
setting a theoretical foreign matter size threshold;
calculating the size of the actually measured foreign matter and performing morphological analysis;
comparing the measured foreign body size with a theoretical foreign body size threshold; if the measured foreign body size exceeds the theoretical foreign body size threshold, determining that the foreign body is a defective product;
the theoretical foreign matter size threshold comprises a width threshold, an area threshold and an outline threshold; the comparing the measured foreign matter size to the theoretical foreign matter size threshold comprises:
and respectively comparing the width value, the area value and the outline value in the actually measured foreign body size with a theoretical size threshold, and if any one of the width value, the area value and the outline value exceeds the theoretical foreign body size threshold, judging that the foreign body is a defective product.
2. The method for detecting the defects of the display screen with high precision as claimed in claim 1, wherein the step of taking the in-focus images of the defect positions at different layers comprises the following steps:
shooting an image of the defect position in the liquid crystal layer;
shooting an image of a defect position on the virtual focus N layer;
and shooting an image of the defect position on the virtual focus-N layer.
3. The method for detecting the defects of the display screen with high precision as claimed in claim 1, wherein the bright and dark information comprises the number of bright and dark points, the connection form and a foreign object image.
4. A high-precision detection system for defects of a display screen is characterized by comprising a low-precision gray-scale camera, a processor, a high-precision color camera and a display;
the low-precision gray camera is used for acquiring a global image from the display screen to be detected and sending the global image to the processor;
the processor is used for determining a defect area according to the global image and extracting brightness information of the defect area;
the high-precision color camera is used for shooting focusing images of the defect positions on different layers and sending the focusing images to the processor;
the processor is also used for determining the specific layer position where the defect is located according to the focusing image; judging defective products according to the detection standard;
the display is used for displaying the global image, the defect area and the defective product judgment result.
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