CN109633405B - A device for junction temperature calibration and heat dissipation component performance evaluation based on bias current pre-compensation - Google Patents
A device for junction temperature calibration and heat dissipation component performance evaluation based on bias current pre-compensation Download PDFInfo
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Abstract
本发明提供了一种基于偏流预补偿的结温标定及散热组件性能评估装置,该装置包括标定和测量两种工作模式。标定模式是由恒流源激励下的被测器件与伴随负载并联组成,控制伴随负载漏、源极两端电压,使得恒流源两端电压在被测器件导通前后保持不变,测量被测器件在不同结温下的饱和导通压降,得到结温、饱和导通压降的关系;测量模式是由恒流源激励下的被测器件组成,将被测器件置于散热组件上,控制饱和导通压降使被测器件工作于不同发热功率下,测量被测器件的饱和导通压降,根据上述结温、饱和导通压降的关系反推被测器件的结温,得到器件在不同发热功率下的结温特性,用以评价散热组件散热性能。
The invention provides a junction temperature calibration and heat dissipation component performance evaluation device based on bias current pre-compensation. The device includes two working modes: calibration and measurement. The calibration mode is composed of the device under test under constant current source excitation and the accompanying load in parallel. The saturation conduction voltage drop of the device under test at different junction temperatures can be obtained, and the relationship between the junction temperature and the saturation conduction voltage drop can be obtained; , control the saturation conduction voltage drop to make the device under test work under different heating power, measure the saturation conduction voltage drop of the device under test, and inversely infer the junction temperature of the device under test according to the relationship between the junction temperature and the saturation conduction voltage drop, The junction temperature characteristics of the device under different heating power are obtained to evaluate the heat dissipation performance of the heat dissipation component.
Description
技术领域technical field
本发明是一种基于偏流预补偿的结温标定及散热组件性能评估装置,属于功率开关器件的可靠性试验技术领域。The invention relates to a junction temperature calibration and heat dissipation component performance evaluation device based on bias current pre-compensation, belonging to the technical field of reliability testing of power switching devices.
背景技术Background technique
功率开关器件在对电能进行变换和控制的同时,也在芯片上产生了一定的功率损耗,导致芯片温度的急剧上升。因此,避免因过热而造成器件损坏的问题是功率开关器件工作过程中必须考虑的问题。为了便于散热,功率开关器件需要加装散热组件。因此,实际工程中功率器件与散热组件安装质量的好坏对器件整体的散热性能对起到至关重要的作用。When the power switch device converts and controls the electrical energy, it also produces a certain power loss on the chip, which leads to a sharp rise in the temperature of the chip. Therefore, the problem of avoiding device damage caused by overheating is a problem that must be considered in the working process of the power switching device. In order to facilitate heat dissipation, power switching devices need to be equipped with heat dissipation components. Therefore, the installation quality of power devices and heat dissipation components in actual engineering plays a crucial role in the overall heat dissipation performance of the device.
为了评估器件整体的散热性能,需要设定器件的发热功率来获取结温,检测其是否超过其最高允许结温。In order to evaluate the overall heat dissipation performance of the device, it is necessary to set the heating power of the device to obtain the junction temperature and detect whether it exceeds its maximum allowable junction temperature.
目前比较成熟的功率开关器件结温测量方法主要有四种,分别是物理接触法、光学法、电热耦合模型法、温敏参数法。其中物理接触法主要利用铂电阻或热电偶温度传感器进行接触式地测量。在测量时,为了使热敏元件与被测器件芯片表面充分接触,必须将器件封装打开,且测量精确度易受测温元件安装质量的影响,故其操作性不强;光学法一般是用红外热成像仪对被测元件进行非接触式地测量,可以得到整个芯片表面的温度分布,可以满足被测器件实时结温的测量要求。但这种测量方法也需要打开器件封装,且设备造价昂贵,测量成本高,对测量人员也有较高的要求;电热耦合模型法是一种常用的结温模拟方法,它通过由热电比拟理论建立的热网络模型来实时获得结温及其变化趋势,可以实现在线测量。但实际工况中热阻难以获取,因此无法应用;温敏参数法在通过利用在特定的温度范围内,被测器件芯片的某些状态参数与温度之间存在一定的相关性,来间接测量得到结温。这些状态参数被称为温敏参数,通常测量的温敏参数主要有饱和导通压降Vce-sat、栅极开通延时时间td(on)、阈值电压Vge(th)等。At present, there are mainly four kinds of mature junction temperature measurement methods for power switching devices, namely physical contact method, optical method, electrothermal coupling model method, and temperature-sensitive parameter method. The physical contact method mainly uses platinum resistance or thermocouple temperature sensor for contact measurement. During measurement, in order to make the thermal element fully contact with the chip surface of the device under test, the device package must be opened, and the measurement accuracy is easily affected by the installation quality of the temperature measuring element, so its operability is not strong; the optical method is generally used The infrared thermal imager measures the component under test non-contact, and can obtain the temperature distribution of the entire chip surface, which can meet the real-time junction temperature measurement requirements of the device under test. However, this measurement method also needs to open the device package, and the equipment is expensive, the measurement cost is high, and it also has high requirements for the measurement personnel; the electrothermal coupling model method is a commonly used junction temperature simulation method, which is established by the thermoelectric comparison theory. The thermal network model can be used to obtain the junction temperature and its variation trend in real time, which can realize online measurement. However, the thermal resistance is difficult to obtain in actual working conditions, so it cannot be applied; the temperature-sensitive parameter method indirectly measures the correlation between some state parameters of the device under test and the temperature in a specific temperature range. get the junction temperature. These state parameters are called temperature-sensitive parameters, and the temperature-sensitive parameters usually measured mainly include the saturation turn-on voltage drop V ce-sat , the gate turn-on delay time t d(on) , and the threshold voltage V ge(th) .
目前,功率开关器件相关的结温检测技术已经取得了很大的发展。其中温敏参数法由于具有测量成本低、精确度高、响应快的优点,成为功率开关器件结温检测的主要测量手段。“一种IGBT瞬态热特性测试装置及其运行方法”(专利申请号:CN106353665A),通过采用光纤温度传感器对被测IGBT进行接触式测量,需要破坏IGBT封装结构,故实际操作性不强;“一种IGBT结温测量装置”(专利申请号:CN201610525421)主要通过实时测量IGBT的关断延迟时间td(off)和IGBT集电极电流,根据IGBT结温、IGBT集电极电流和IGBT关断延迟时间td(off)的三维关系得到对应的IGBT的结温。该方法使用关断延时时间作为温敏参数测量成本高、对实验环境要求高,实际工况下在难以实现对IGBT的关断延时时间的在线测量;“基于饱和导通压降测量IGBT结温的温度定标平台及实现IGBT结温测量的方法”(专利申请号:CN201510245724)主要是通过在恒温箱环境下标定出IGBT饱和导通压降、结温、集电极电流的三维关系,进而通过测量饱和导通压降和集电极电流得到对应的结温。该方法难以保证测量与标定模式下偏置条件的一致性,进而影响结温测量的准确性。At present, the junction temperature detection technology related to power switching devices has made great progress. Among them, the temperature-sensitive parameter method has become the main measurement method for junction temperature detection of power switching devices due to its advantages of low measurement cost, high accuracy and fast response. "An IGBT transient thermal characteristic testing device and its operation method" (patent application number: CN106353665A), by using an optical fiber temperature sensor to perform contact measurement on the tested IGBT, it is necessary to destroy the IGBT package structure, so the actual operability is not strong; "An IGBT junction temperature measurement device" (patent application number: CN201610525421) mainly measures the IGBT turn-off delay time t d(off) and the IGBT collector current in real time, according to the IGBT junction temperature, IGBT collector current and IGBT turn-off The three-dimensional relationship of the delay time t d(off) obtains the corresponding junction temperature of the IGBT. This method uses the turn-off delay time as a temperature-sensitive parameter, which has high measurement cost and high requirements for the experimental environment. It is difficult to realize the on-line measurement of the turn-off delay time of the IGBT under actual working conditions. The temperature calibration platform for junction temperature and the method for realizing IGBT junction temperature measurement" (patent application number: CN201510245724) is mainly to calibrate the three-dimensional relationship of IGBT saturated on-voltage drop, junction temperature and collector current in the environment of incubator. Then, the corresponding junction temperature is obtained by measuring the saturated on-state voltage drop and collector current. This method is difficult to ensure the consistency of the measurement and the bias conditions in the calibration mode, which affects the accuracy of the junction temperature measurement.
传统基于饱和导通压降的温敏参数结温测量方法,在大电流工作工况下,为防止器件自热,通常被测器件栅极信号给一窄脉冲。同时需要在很短的时间内采集饱和导通压降,否则会因结温的快速上升导致测量的不准确。由于测量采用的恒流源并非理想恒流源,其输出电流会受到负载两端压降的变化的影响,进而影响结温测量结果的准确性。In the traditional junction temperature measurement method based on the temperature-sensitive parameter of the saturated on-state voltage drop, under the working condition of high current, in order to prevent the device from self-heating, the gate signal of the device under test is usually given a narrow pulse. At the same time, it is necessary to collect the saturated conduction voltage drop in a very short time, otherwise the measurement will be inaccurate due to the rapid rise of the junction temperature. Since the constant current source used in the measurement is not an ideal constant current source, its output current will be affected by the change of the voltage drop across the load, which will affect the accuracy of the junction temperature measurement result.
发明内容SUMMARY OF THE INVENTION
本发明主要针对传统基于饱和导通压降的温敏参数法测量结温时,忽略了标定模式下与测量模式下器件的工况不同,造成的测量时刻偏置条件变化而带来误差的问题,提出了一种基于偏流预补偿的结温标定及散热组件性能评估装置。The present invention is mainly aimed at the problem that when the traditional temperature-sensitive parameter method based on the saturation conduction voltage drop measures the junction temperature, it ignores the problem that the working conditions of the device in the calibration mode and the measurement mode are different, resulting in the change of the bias conditions at the measurement moment and bring about errors. , a junction temperature calibration and heat dissipation component performance evaluation device based on bias current pre-compensation is proposed.
未解决上述技术目的,本发明提供了一种基于偏流预补偿的结温标定及散热组件性能评估装置,在标定模式下的组成包括:可调电压源、可调恒流源与被测器件Q1串联构成回路;可调电压源的负极为公共地;被测器件、温度传感器及储热块置于保温容器中;伴随负载Q2与被测器件Q1并联;A/D1的模拟输入端与被测器件Q1的集电极、发射极相连;A/D1接收控制器转化启动信号,并向控制器传送转模数转化的数据结果;被测器件Q1的栅极与栅极驱动1的输出端O相连;栅极驱动1的电源端V与D/A1相连;D/A1接收控制器传送的数据;控制器输出的栅极控制信号与栅极驱动2的控制端C相连,同时栅极控制信号通过非门与栅极驱动1的控制端C相连;栅极驱动1的接地端G与公共地相连;伴随负载Q2的栅极与栅极驱动2的输出端O相连;栅极驱动2的电源端V与运算放大器D1的输出端相连;运算放大器D1的正相输入端与伴随负载Q2的漏极相连;运算放大器D1的反相输入端与D/A2的电压输出端相连;D/A2接受控制器传送的数据;栅极驱动2的接地端G与公共地相连;控制器与温度传感器相连;Without solving the above technical purpose, the present invention provides a junction temperature calibration and heat dissipation component performance evaluation device based on bias current pre-compensation. The components in the calibration mode include: an adjustable voltage source, an adjustable constant current source and a device under test Q1 A loop is formed in series; the negative electrode of the adjustable voltage source is the common ground; the device under test, the temperature sensor and the heat storage block are placed in a heat preservation container; the accompanying load Q2 is connected in parallel with the device under test Q1; the analog input end of A/D1 is connected to the test device Q1 The collector and emitter of the device Q1 are connected; A/D1 receives the conversion start signal of the controller and transmits the data result of the analog-to-digital conversion to the controller; the gate of the device under test Q1 is connected to the output terminal O of the
在测量模式下的组成包括:可调电压源、MOS管Q3、反馈电阻R与被测器件Q1串联构成回路;可调恒流源由MOS管Q3、运算放大器D2、反馈电阻R组成;MOS管Q3的栅极与运算放大器D2的输出端相连;运算放大器D2的反相输入端与MOS管Q3的源极相连;D/A4的电压输出端一端与运算放大器D2的同相输入端相连,另一端与被测器件Q1的集电极相连;D/A4接收控制器传送的数据;被测器件置于散热组件上;A/D2的模拟输入端与被测器件的集电极、发射极相连;A/D3的模拟输入端与反馈电阻R的两端相连;A/D2、A/D3接收控制器转化启动信号,并向控制器传送模数转化的数据结果;被测器件的栅极与栅极驱动1的输出端O相连;栅极驱动1的接地端G与运算放大器D3的输出端相连;栅极驱动1的控制端与控制器相连;栅极驱动1的电源端V与标准栅极电压电源相连;运算放大器D3的同相输入端与被测器件的集电极相连;运算放大器D3的反相输入端与D/A3的电压输出端相连;D/A3接收控制器传送的数据。The composition in the measurement mode includes: adjustable voltage source, MOS tube Q3, feedback resistor R and the device under test Q1 in series to form a loop; the adjustable constant current source is composed of MOS tube Q3, operational amplifier D2, and feedback resistor R; MOS tube The gate of Q3 is connected to the output end of the operational amplifier D2; the inverting input end of the operational amplifier D2 is connected to the source electrode of the MOS transistor Q3; one end of the voltage output end of D/A4 is connected to the non-inverting input end of the operational amplifier D2, and the other end Connect to the collector of the device under test Q1; D/A4 receives the data sent by the controller; the device under test is placed on the heat sink; the analog input end of A/D2 is connected to the collector and emitter of the device under test; A/ The analog input terminal of D3 is connected to both ends of the feedback resistor R; A/D2 and A/D3 receive the conversion start signal of the controller and transmit the data results of the analog-to-digital conversion to the controller; the gate and gate drive of the device under test The output terminal O of 1 is connected to the output terminal O of the
其中,使用本发明的基于偏流动态预补偿法的功率开关结温标定及散热组件性能评估装置进行标定和评估,包括标定步骤和测量步骤;Wherein, use the power switch junction temperature calibration and heat dissipation component performance evaluation device based on the bias current dynamic pre-compensation method of the present invention for calibration and evaluation, including a calibration step and a measurement step;
其中,标定步骤包括:Wherein, the calibration step includes:
标定步骤一:注入初始参数:被测器件芯片热容Cdie、储热块的热容C储热块、、恒流源偏置电流IS、热平衡过渡时间tm、温度测量列表、额定栅极电压VGE、被测器件开通延时时间td(on)、被测器件的饱和导通压降采集时间ts、被测器件最高允许结温Tjmax、切换器件电压变化量阈值VMAX、额定电流下被测器件饱和导通压降值VS、恒流源两端电压预定值Vm、温度测量误差阈值Te;Calibration step 1: Inject initial parameters: the heat capacity C die of the device under test, the heat capacity of the heat storage block C heat storage block , the constant current source bias current IS , the thermal equilibrium transition time t m , the temperature measurement list, the rated grid The pole voltage V GE , the turn-on delay time t d(on) of the device under test, the acquisition time ts s of the saturated conduction voltage drop of the device under test, the maximum allowable junction temperature T jmax of the device under test, and the voltage change threshold V MAX of the switching device , the saturated conduction voltage drop value V S of the device under test at the rated current, the predetermined value V m of the voltage at both ends of the constant current source, and the temperature measurement error threshold T e ;
标定步骤二:将温度低于温度测量列表项最小值的储热块装入保温容器中;由低到高从温度测量列表项中取值,记作Tm,并将保温容器内部温度升到目标温度Tm;升温至目标温度Tm的过程如下:①测量保温容器内初始温度T0,设定可调恒流源偏置电流为IS,控制器输出栅极控制信号为低电平,使被测器件导通,持续时间为t,测量其饱和导通压降Vce;控制器输出栅极控制信号为高电平,使被测器件关断,等待时间tm后,被测器件结、壳温度达到一致,温度传感器测量此时保温容器内部温度T1;由公式C=(T1-T0)/Vce*IS*t,计算出保温容器内热容量C;②根据热容量C、目标温度Tm,计算出被测器件的开通时间t1;将被测器件导通,持续时间为t1;关断被测器件,等待时间tm后,测量此时保温容器内部温度Tn;③判断Tm-Tn<Te,若其小于Te,则升温过程结束;若其大于Te,则返回到步骤②,直到其小于Te;Calibration step 2: put the heat storage block whose temperature is lower than the minimum value of the temperature measurement list item into the heat preservation container; take the value from the temperature measurement list item from low to high, denoted as T m , and raise the internal temperature of the heat preservation container to Target temperature T m ; the process of raising the temperature to the target temperature T m is as follows: ① Measure the initial temperature T 0 in the heat preservation container, set the bias current of the adjustable constant current source as I S , and the controller output gate control signal is low level , the device under test is turned on, the duration is t, and the saturation conduction voltage drop V ce is measured; the controller outputs the gate control signal as a high level, so that the device under test is turned off, after waiting time t m , the under test When the junction and shell temperatures of the device are consistent, the temperature sensor measures the internal temperature T 1 of the thermal insulation container at this time; by the formula C=(T 1 -T 0 )/V ce *I S *t, the heat capacity C in the thermal insulation container is calculated; ②According to Heat capacity C, target temperature T m , calculate the turn-on time t 1 of the device under test; turn the device under test on for a duration of t 1 ; turn off the device under test, wait for the time t m , and measure the inside of the thermal insulation container at this time temperature T n ; ③ Judging that T m -T n <T e , if it is less than T e , the heating process ends; if it is greater than T e , then return to step ② until it is less than T e ;
标定步骤三:控制器向栅极驱动2的控制端发送高电平,使伴随负载导通,调节D/A2的大小,使伴随负载漏源极两端电压VB等于VS;Calibration step 3: The controller sends a high level to the control terminal of the gate driver 2 to turn on the accompanying load, and adjust the size of D/A2, so that the voltage V B across the drain and source of the accompanying load is equal to V S ;
标定步骤四:调节电压源两端电压,使恒流源两端电压为预定值Vm;调节恒流源偏置电流等于IS,等待可调恒流源偏置电流稳定;设置D/A1的大小等于被测器件的额定栅极电压VGE;在τ0时刻,控制器输出栅极控制信号为低电平,使被测器件导通,伴随负载关断;在τ1(τ0+td(on)<τ1<τ0+ts)时刻,采集A/D1的值,记作VA;控制器输出栅极控制信号为高电平,使伴随负载导通,被测器件关断;Calibration step 4: adjust the voltage across the voltage source to make the voltage across the constant current source a predetermined value V m ; adjust the bias current of the constant current source to be equal to I S , wait for the bias current of the adjustable constant current source to stabilize; set D/A1 is equal to the rated gate voltage V GE of the device under test; at the moment of τ 0 , the controller outputs the gate control signal as a low level, which makes the device under test turn on and the load is turned off; at τ 1 (τ 0 + t d(on) <τ 1 <τ 0 +t s ), collect the value of A /D1, denoted as VA; the controller outputs the gate control signal as high level, which makes the device under test turn on with the load. turn off;
标定步骤五:判断|VA-VB|<VMAX,若其小于VMAX,记录被测器件的饱和导通压降VA值;若差值的绝对值大于VMAX,设置D/A2的大小,使伴随负载漏、源极两端电压VB等于VA,并返回到标定步骤四,直到|VA-VB|<VMAX;Calibration Step 5: Judging |V A -V B |<V MAX , if it is less than V MAX , record the V A value of the saturated conduction voltage drop of the device under test; if the absolute value of the difference is greater than V MAX , set D/A2 , make the voltage VB between the drain and source of the accompanying load equal to VA, and return to the calibration step 4 until |V A -V B | < V MAX ;
标定步骤六:判断温度列表项取值是否完成,若完成,继续下一步;若未完成,则回到标定步骤二;Calibration step 6: determine whether the temperature list item value is completed, if completed, continue to the next step; if not completed, go back to calibration step 2;
标定步骤七:将测量得到的被测器件不同结温下的饱和导通压降数据值,拟合成Tj=f(VCE)关系式;Calibration step 7: Fit the measured data values of the saturated on-state voltage drop of the device under test at different junction temperatures into a relationship of T j =f(V CE );
测量步骤包括:The measurement steps include:
测量步骤一:注入初始参数:被测器件开通延时时间td(on)、被测器件的饱和导通压降采集时间ts、被测器件的发热功率列表项、恒流源偏置电流IS、电流误差阈值Ie;Measurement step 1: Inject initial parameters: DUT turn-on delay time t d(on) , DUT saturation conduction voltage drop acquisition time ts , DUT heating power list item, constant current source bias current I S , the current error threshold I e ;
测量步骤二:从被测器件的发热功率列表项取值,记作Pi;Measurement step 2: take the value from the list item of the heating power of the device under test, denoted as P i ;
测量步骤三:设置D/A4的大小,使恒流源偏置电流等于IS,等待恒流源偏置电流稳定;Measurement step 3: Set the size of D/A4, make the constant current source bias current equal to IS , and wait for the constant current source bias current to stabilize;
测量步骤四:控制器输出栅极控制信号为低电平,根据公式VD/A3=Pi/IS,设置D/A3的大小,等待热稳态;Measurement step 4: The controller outputs the gate control signal as low level, according to the formula V D/A3 =P i / IS , set the size of D/A3, and wait for the thermal steady state;
测量步骤五:在τ2时刻,控制器输出栅极控制信号为高电平;在τ3(τ2+td(on)<τ3<τ2+ts)时刻,采集A/D2和A/D3的值,分别记作VCE和IA;计算公式ΔIS=IS-IA的大小;Measurement step 5: At the moment of τ 2 , the controller outputs the gate control signal as a high level; at the moment of τ 3 (τ 2 +t d(on) <τ 3 <τ 2 +t s ), the A/D2 and The value of A/D3 is denoted as V CE and IA respectively; the size of calculation formula ΔI S =I S -I A ;
测量步骤六:判断|ΔIS|<Ie,若其小于Ie,则继续下一步;若其大于Ie,则设置D/A4的大小,使可调恒流源偏置电流等于IS+ΔIS,等待可调恒流源偏置电流稳定,并返回测量步骤四;Measurement Step 6: Judging |ΔI S |<I e , if it is less than I e , proceed to the next step; if it is greater than I e , set the size of D/A4 to make the bias current of the adjustable constant current source equal to I S +ΔI S , wait for the bias current of the adjustable constant current source to stabilize, and return to measurement step 4;
测量步骤七:由关系Tj=f(VCE)和饱和导通压降VCE值,反推被测器件结温Tj;Measurement step 7: Inversely infer the junction temperature T j of the device under test from the relationship T j =f(V CE ) and the saturated conduction voltage drop V CE value;
测量步骤八:判断发热功率列表项取值是否完成,若完成,则继续下一步;若未完成,则回到测量步骤二;Measurement step 8: determine whether the value of the heating power list item is completed, if completed, continue to the next step; if not, return to measurement step 2;
测量步骤九:得被测器件在不同发热功率下的结温特性。Measurement Step 9: Obtain the junction temperature characteristics of the device under test under different heating powers.
区别于现有技术,本发明的基于偏流预补偿的结温标定及散热组件性能评估装置包括标定和测量两种工作模式。标定模式是由恒流源激励下的被测器件与伴随负载并联组成,控制伴随负载漏、源极两端电压,使得恒流源两端电压在被测器件导通前后保持不变,测量被测器件在不同结温下的饱和导通压降,得到结温、饱和导通压降的关系;测量模式是由恒流源激励下的被测器件组成,将被测器件置于散热组件上,控制饱和导通压降使被测器件工作于不同发热功率下,测量被测器件的饱和导通压降,根据上述结温、饱和导通压降的关系反推被测器件的结温,得到器件在不同发热功率下的结温特性,用以评价散热组件散热性能。Different from the prior art, the device for junction temperature calibration and heat dissipation component performance evaluation based on bias current pre-compensation of the present invention includes two working modes: calibration and measurement. The calibration mode is composed of the device under test under constant current source excitation and the accompanying load in parallel. The saturation conduction voltage drop of the device under test at different junction temperatures can be obtained, and the relationship between the junction temperature and the saturation conduction voltage drop can be obtained; , control the saturation conduction voltage drop to make the device under test work under different heating power, measure the saturation conduction voltage drop of the device under test, and inversely infer the junction temperature of the device under test according to the relationship between the junction temperature and the saturation conduction voltage drop, The junction temperature characteristics of the device under different heating power are obtained to evaluate the heat dissipation performance of the heat dissipation component.
附图说明Description of drawings
图1为本发明在标定模式下被测器件导通电路图。FIG. 1 is a circuit diagram of the device under test in the calibration mode of the present invention.
图2为本发明在标定模式下伴随负载导通电路图。FIG. 2 is a circuit diagram of the present invention in the calibration mode with the load conducting.
图3为本发明在测量模式下电路图。FIG. 3 is a circuit diagram of the present invention in a measurement mode.
图4为恒流源输出电流随其两端电压变化曲线趋势图。Figure 4 is a trend diagram of the output current of the constant current source as a function of the voltage at both ends thereof.
图5为被测器件输出特性曲线图。Figure 5 is a graph of the output characteristics of the device under test.
图6为被测器件在不同测试电流下的标定测量结果对比图。Figure 6 is a comparison chart of the calibration measurement results of the device under test under different test currents.
图7为装置在标定模式下的RC热网络模型。Figure 7 shows the RC thermal network model of the device in calibration mode.
图8为Pspice环境下器件从加热开始到稳态结束,结、壳温度随时间变化曲线图。Figure 8 is a graph showing the change of the junction and case temperature with time from the start of heating to the end of the steady state of the device in the Pspice environment.
图9为Pspice环境下器件在加热初,结温随时间变化曲线图。Figure 9 is a graph showing the change of junction temperature with time at the beginning of heating of the device in the Pspice environment.
图10为Matlab拟合出的结温、饱和导通压降、栅极电压的三维关系图。Figure 10 is a three-dimensional relationship diagram of junction temperature, saturated on-state voltage drop, and gate voltage fitted by Matlab.
图11为标定模式流程图。Figure 11 is a flow chart of the calibration mode.
图12为标定模式下升温过程流程图。Figure 12 is a flow chart of the heating process in the calibration mode.
图13为测量模式流程图。Figure 13 is a flow chart of the measurement mode.
具体实施方式Detailed ways
下面结合具体实施方式对本发明的技术方案作进一步更详细的描述。显然,所描述的实施例仅仅是本发明的一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有作出创造性劳动的前提下所获得的所有其他实施例,都应属于本发明保护的范围。The technical solutions of the present invention will be further described in more detail below in conjunction with specific embodiments. Obviously, the described embodiments are only some, but not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
本发明所设计的测试装置如图1、2、3所示。被测器件为IGBT,型号为IKW40T120,封装形式为TO-247,额定电流为40A,最大允许结温为150℃,开通延时时间为52ns。The testing device designed by the present invention is shown in Figures 1 , 2 and 3 . The device under test is an IGBT, the model is IKW40T120, the package is TO-247, the rated current is 40A, the maximum allowable junction temperature is 150℃, and the turn-on delay time is 52ns.
本发明提供了一种基于偏流预补偿的结温标定及散热组件性能评估装置,如图1所示,该装置在标定模式下的组成包括:可调电压源、可调恒流源与被测器件Q1串联构成回路;可调电压源的负极为公共地;被测器件、温度传感器及储热块置于保温容器中;伴随负载Q2与被测器件Q1并联;A/D1的模拟输入端与被测器件Q1的集电极、发射极相连;A/D1接收控制器转化启动信号,并向控制器传送转模数转化的数据结果;被测器件Q1的栅极与栅极驱动1的输出端O相连;栅极驱动1的电源端V与D/A1相连;D/A1接收控制器传送的数据;控制器输出的栅极控制信号与栅极驱动2的控制端C相连,同时栅极控制信号通过非门与栅极驱动1的控制端C相连;栅极驱动1的接地端G与公共地相连;伴随负载Q2的栅极与栅极驱动2的输出端O相连;栅极驱动2的电源端V与运算放大器D1的输出端相连;运算放大器D1的正相输入端与伴随负载Q2的漏极相连;运算放大器D1的反相输入端与D/A2的电压输出端相连;D/A2接受控制器传送的数据;栅极驱动2的接地端G与公共地相连;控制器与温度传感器相连;The present invention provides a junction temperature calibration and heat dissipation component performance evaluation device based on bias current pre-compensation. As shown in Figure 1, the device in the calibration mode is composed of: an adjustable voltage source, an adjustable constant current source and a measured The device Q1 is connected in series to form a loop; the negative electrode of the adjustable voltage source is the common ground; the device under test, the temperature sensor and the heat storage block are placed in a heat preservation container; the accompanying load Q2 is connected in parallel with the device under test Q1; the analog input terminal of A/D1 is connected to The collector and emitter of the device under test Q1 are connected; A/D1 receives the conversion start signal of the controller and transmits the data result of the analog-to-digital conversion to the controller; the gate of the device under test Q1 is connected to the output terminal of gate driver 1 O is connected to; the power supply terminal V of gate driver 1 is connected to D/A1; D/A1 receives the data transmitted by the controller; the gate control signal output by the controller is connected to the control terminal C of gate driver 2, and the gate control The signal is connected to the control terminal C of the gate driver 1 through the NOT gate; the ground terminal G of the gate driver 1 is connected to the common ground; the gate of the accompanying load Q2 is connected to the output terminal O of the gate driver 2; The power supply terminal V is connected to the output terminal of the operational amplifier D1; the non-inverting input terminal of the operational amplifier D1 is connected to the drain of the accompanying load Q2; the inverting input terminal of the operational amplifier D1 is connected to the voltage output terminal of D/A2; D/A2 Accept the data sent by the controller; the ground terminal G of the gate driver 2 is connected to the common ground; the controller is connected to the temperature sensor;
如图2所示,该装置在测量模式下的组成包括:可调电压源、MOS管Q3、反馈电阻R与被测器件Q1串联构成回路;可调恒流源由MOS管Q3、运算放大器D2、反馈电阻R组成;MOS管Q3的栅极与运算放大器D2的输出端相连;运算放大器D2的反相输入端与MOS管Q3的源极相连;D/A4的电压输出端一端与运算放大器D2的同相输入端相连,另一端与被测器件Q1的集电极相连;D/A4接收控制器传送的数据;被测器件置于散热组件上;A/D2的模拟输入端与被测器件的集电极、发射极相连;A/D3的模拟输入端与反馈电阻R的两端相连;A/D2、A/D3接收控制器转化启动信号,并向控制器传送模数转化的数据结果;被测器件的栅极与栅极驱动1的输出端O相连;栅极驱动1的接地端G与运算放大器D3的输出端相连;栅极驱动1的控制端与控制器相连;栅极驱动1的电源端V与标准栅极电压电源相连;运算放大器D3的同相输入端与被测器件的集电极相连;运算放大器D3的反相输入端与D/A3的电压输出端相连;D/A3接收控制器传送的数据。As shown in Figure 2, the composition of the device in the measurement mode includes: an adjustable voltage source, a MOS transistor Q3, a feedback resistor R and the device under test Q1 in series to form a loop; the adjustable constant current source consists of a MOS transistor Q3 and an operational amplifier D2 , feedback resistor R; the gate of MOS tube Q3 is connected to the output end of operational amplifier D2; the inverting input end of operational amplifier D2 is connected to the source of MOS tube Q3; one end of the voltage output end of D/A4 is connected to operational amplifier D2 The non-inverting input of A/D2 is connected to the non-inverting input, and the other end is connected to the collector of the device under test Q1; D/A4 receives the data sent by the controller; the device under test is placed on the heat sink; the analog input of A/D2 is connected to the collector of the device under test. The electrode and the emitter are connected; the analog input end of A/D3 is connected to both ends of the feedback resistor R; A/D2 and A/D3 receive the conversion start signal of the controller, and transmit the data result of the analog-to-digital conversion to the controller; the tested The gate of the device is connected to the output terminal O of the
本实施方式中,恒流源提供被测IGBT的工作电流为被测器件的额定电流40A。In this embodiment, the constant current source provides the working current of the IGBT under test to be 40A of the rated current of the device under test.
根据热电比拟理论,热路参数可以类比为电路参数,因此可以将IGBT的散热模型类比成图7所示的电路。其中P为发热功率,Tj为结温,Zth-jc为结到壳的热阻,Zth-ch为壳到散热器的热阻,Zth-ha为散热器到环境温度的热阻,Ta为环境温度。According to the thermoelectric comparison theory, the thermal circuit parameters can be analogized to the circuit parameters, so the heat dissipation model of the IGBT can be analogized to the circuit shown in Figure 7. where P is the heating power, T j is the junction temperature, Z th-jc is the thermal resistance from the junction to the case, Z th-ch is the thermal resistance from the case to the radiator, and Z th-ha is the thermal resistance from the radiator to the ambient temperature , T a is the ambient temperature.
热平衡过渡时间tm的确定:在Pspice电路仿真软件中,建立图4所示的RC热网络模型。查询被测IGBT的手册,设置结、壳热阻值与热容值,并设置结到保温层、保温层到环境的热阻与热容值。设置电流源为脉冲电流源,电流峰值为76A,脉冲宽度为500us,延时时间为10ms,设置电压源电压为15V。分别在结温Tj和壳温Tc处设置电压探针,对电路进行瞬态仿真分析,模拟在环境温度15℃,发热功率为76W的工况下,被测器件从加热开始,结、壳温度随时间变化趋势,仿真结果如图5所示。由图5可知,结、壳温度在时刻120ms处,达到稳态值16.8℃。因此,保温层内部达到热平衡的过渡时间tm为110ms,即温度传感器至少需要从被测器件导通开始的110ms后开始测量保温层内部温度。Determination of thermal equilibrium transition time t m : In the Pspice circuit simulation software, the RC thermal network model shown in Figure 4 is established. Check the manual of the IGBT under test, set the junction and case thermal resistance and thermal capacitance, and set the thermal resistance and thermal capacitance from the junction to the insulation layer and the insulation layer to the environment. Set the current source to pulse current source, the current peak value is 76A, the pulse width is 500us, the delay time is 10ms, and the voltage source voltage is set to 15V. Voltage probes are set at the junction temperature T j and the case temperature T c respectively, and the transient simulation analysis of the circuit is carried out. The simulation is performed under the condition of an ambient temperature of 15°C and a heating power of 76W. The variation trend of the shell temperature with time is shown in Figure 5. It can be seen from Figure 5 that the junction and case temperatures reach a steady-state value of 16.8°C at 120ms. Therefore, the transition time t m to reach thermal equilibrium inside the thermal insulation layer is 110 ms, that is, the temperature sensor needs to start measuring the internal temperature of the thermal insulation layer at least 110 ms after the device under test is turned on.
饱和导通压降采集时间ts的确定:在Pspice仿真软件下建立图4的电路,在结温Tj处设置电压探针,对电路进行瞬态仿真分析,模拟被测器件在施加激励后,结温随时间变化趋势,仿真结果如图6所示。由图6可知,结温从温度15℃上升到16℃,时间为30.1us;结温从16℃上升到17℃,时间为31.6us;结温从17℃上升到18℃,时间为36.2us。此后,结温随时间变化曲线逐渐平缓。因此被测器件饱和导通压降的采集时间ts需在30us之内,才可以满足结温测量误差小于1℃。Determination of saturation conduction voltage drop acquisition time t s : Build the circuit in Figure 4 under the Pspice simulation software, set a voltage probe at the junction temperature T j , conduct transient simulation analysis of the circuit, and simulate the device under test after the excitation is applied. , the junction temperature changes with time, and the simulation results are shown in Figure 6. It can be seen from Figure 6 that the junction temperature rises from 15°C to 16°C in 30.1us; the junction temperature rises from 16°C to 17°C in 31.6us; the junction temperature rises from 17°C to 18°C in 36.2us . After that, the junction temperature curve with time gradually flattened. Therefore, the acquisition time t s of the saturated conduction voltage drop of the device under test needs to be within 30us to satisfy the junction temperature measurement error of less than 1°C.
切换器件电压变化量阈值VMAX的确定:在Pspice电路仿真软件中,建立图7所示恒流源电路,设置电压源V为脉冲电压源,恒流源输出稳态电流为40A,在IC处放置电流探针,对电路进行瞬态分析,模拟伴随负载切换至被测器件时,恒流源偏置电流的变化规律,仿真结果如图8所示。由图8可知,当恒流源两端电压阶跃变化0.1V,在饱和导通压降采集时间30us处,恒流源偏置电流变化40mA。图9为被测器件的输出特性曲线。由图9可知,当被测器件集射极电流变化40mA时,饱和导通压降变化1mV;图10为某栅极电压下,不同结温下被测器件饱和导通压降变化曲线。由图10可知,当被测器件集射级电流变化40mA,饱和导通压降变化1mV,标定工作点会从A点变化至B点,导致被测器件的结温变化1℃。因此,保证被测器件结温测量误差在1℃的范围内,伴随负载切换至被测器件时,两者之间电压变化量不得超过0.1V,即切换负载电压变化量阈值VMAX为0.1V。Determination of the voltage change threshold V MAX of the switching device: In the Pspice circuit simulation software, establish the constant current source circuit shown in Figure 7, set the voltage source V as a pulse voltage source, and the output steady - state current of the constant current source is 40A. Place a current probe at the place, conduct transient analysis on the circuit, and simulate the change law of the bias current of the constant current source when the load is switched to the device under test. The simulation results are shown in Figure 8. It can be seen from Figure 8 that when the voltage across the constant current source changes stepwise by 0.1V, the bias current of the constant current source changes by 40mA at the 30us collection time of the saturated conduction voltage drop. Figure 9 is the output characteristic curve of the device under test. It can be seen from Figure 9 that when the collector-emitter current of the device under test changes by 40mA, the saturated on-state voltage drop changes by 1mV; Figure 10 shows the change curve of the device's saturation on-state voltage drop under a certain gate voltage under different junction temperatures. As can be seen from Figure 10, when the collector-emitter current of the device under test changes by 40mA and the saturated on-state voltage drop changes by 1mV, the calibration operating point will change from point A to point B, resulting in a 1°C change in the junction temperature of the device under test. Therefore, to ensure that the measurement error of the junction temperature of the device under test is within the range of 1°C, when the load is switched to the device under test, the voltage change between the two should not exceed 0.1V, that is, the threshold V MAX of the load voltage change is 0.1V .
被测器件导通时间t的约束条件的确定:①t≤(Tjmax-T0)/Cdie*IS*VS。②t≤(Tjmax-T0)/C储热块*IS*VS。取①、②两者中t的最小值为t的取值范围。Determination of the constraints of the on-time t of the device under test: ①t≤(T jmax -T 0 )/C die *I S *V S . ②t≤(T jmax -T 0 )/C heat storage block *I S *V S . Take the minimum value of t in both ① and ② as the value range of t.
本发明提供了一种基于偏流预补偿的结温标定及散热组件性能评估装置,其操作步骤包括以下标定步骤和测量步骤:The invention provides a junction temperature calibration and heat dissipation component performance evaluation device based on bias current pre-compensation, the operation steps of which include the following calibration steps and measurement steps:
其中,标定步骤的流程图如图11所示,包括步骤:The flowchart of the calibration step is shown in Figure 11, including the steps:
标定步骤一:注入初始参数:被测器件芯片热容Cdie、储热块的热容C储热块、恒流源偏置电流IS、热平衡过渡时间tm、温度测量列表、额定栅极电压VGE、被测器件开通延时时间td(on)、被测器件的饱和导通压降采集时间ts、被测器件最高允许结温Tjmax、切换器件电压变化量阈值VMAX、额定电流下被测器件饱和导通压降值VS、恒流源两端电压预定值Vm、温度测量误差阈值Te。Calibration step 1: Inject initial parameters: the heat capacity C die of the device under test, the heat capacity of the heat storage block C heat storage block , the constant current source bias current IS , the thermal equilibrium transition time t m , the temperature measurement list, the rated gate voltage V GE , turn-on delay time t d(on) of the device under test, acquisition time ts of the saturated conduction voltage drop of the device under test, maximum allowable junction temperature T jmax of the device under test, threshold V MAX of the voltage change of the switching device, Under the rated current, the saturated conduction voltage drop value V S of the device under test, the predetermined value V m of the voltage across the constant current source, and the temperature measurement error threshold T e .
标定步骤二:将温度低于温度测量列表项最小值的储热块装入保温容器中。由低到高从温度测量列表项中取值,记作Tm,并将保温容器内部温度升到目标温度Tm。图12所示是标定模式下升温至目标温度Tm的流程示意图,其过程如下:①测量保温容器内初始温度T0,设定恒流源偏置电流为IS,控制器输出栅极控制信号为低电平,使被测器件导通,持续时间为t,测量其饱和导通压降Vce。控制器输出栅极控制信号为高电平,使被测器件关断,等待时间tm后,被测器件结、壳温度达到一致,温度传感器测量此时保温容器内部温度T1。由公式C=(T1-T0)/Vce*IS*t,计算出保温容器内热容量C。②根据热容量C、目标温度Tm,计算出被测器件的开通时间t1。将被测器件导通,持续时间为t1。关断被测器件,等待时间tm后,测量此时保温容器内部温度Tn。③判断Tm-Tn<Te,若其小于Te,则升温过程结束;若其大于Te,则返回到步骤②,直到其小于Te。Calibration step 2: Put the heat storage block whose temperature is lower than the minimum value of the temperature measurement list item into the heat preservation container. Take values from the temperature measurement list items from low to high, denoted as T m , and raise the internal temperature of the heat preservation container to the target temperature T m . Figure 12 shows a schematic diagram of the process of heating up to the target temperature T m in the calibration mode. The process is as follows: ① Measure the initial temperature T 0 in the heat preservation container, set the bias current of the constant current source to I S , and control the output grid of the controller. When the signal is low, the device under test is turned on for a duration of t, and its saturation conduction voltage drop V ce is measured. The controller outputs the gate control signal as high level to turn off the device under test. After waiting time tm , the junction and case temperatures of the device under test reach the same level, and the temperature sensor measures the internal temperature T1 of the heat preservation container. From the formula C=(T 1 -T 0 )/V ce *I S *t, the heat capacity C in the thermal insulation container is calculated. ②According to the heat capacity C and the target temperature T m , calculate the turn-on time t 1 of the device under test. Turn on the device under test for a duration of t 1 . Turn off the device under test, and after waiting time t m , measure the internal temperature T n of the thermal insulation container at this time. ③ It is judged that T m -T n <T e , if it is smaller than T e , the heating process ends; if it is larger than T e , return to step ② until it is smaller than T e .
标定步骤三:控制器向栅极驱动2的控制端发送高电平,使伴随负载导通,调节D/A2的大小,使伴随负载漏源极两端电压VB等于VS。Calibration step 3: The controller sends a high level to the control terminal of the gate driver 2 to turn on the accompanying load, adjust the size of D/A2, and make the voltage V B across the drain and source of the accompanying load equal to V S .
标定步骤四:调节电压源两端电压,使恒流源两端电压为预定值Vm。调节恒流源偏置电流等于IS,等待恒流源偏置电流稳定。设置D/A1的大小等于被测器件的额定栅极电压VGE。在τ0时刻,控制器输出栅极控制信号为低电平,使被测器件导通,伴随负载关断;在τ1(τ0+52ns<τ1<τ0+30us)时刻,采集A/D1的值,记作VA。控制器输出栅极控制信号为高电平,使伴随负载导通,被测器件关断。Calibration step 4: Adjust the voltage across the voltage source so that the voltage across the constant current source is a predetermined value V m . Adjust the constant current source bias current to be equal to I S , and wait for the constant current source bias current to stabilize. Set D/A1 to be equal to the rated gate voltage V GE of the device under test. At the moment of τ 0 , the controller outputs the gate control signal to a low level, which makes the device under test turn on and the load is turned off; at the moment of τ 1 (τ 0 +52ns<τ 1 <τ 0 +30us), the A The value of /D1 is recorded as V A . The controller outputs the gate control signal as a high level, which makes the device under test turn off with the load turned on.
标定步骤五:判断|VA-VB|<0.1V,若其小于0.1V,记录被测器件的饱和导通压降VA值;若差值的绝对值大于VMAX,设置D/A2的输出VB等于VA,并返回到标定步骤四,直到|VA-VB|<0.1V。Calibration Step 5: Judging |V A -V B |<0.1V, if it is less than 0.1V, record the saturated conduction voltage drop V A value of the device under test; if the absolute value of the difference is greater than V MAX , set D/A2 The output V B is equal to V A , and returns to calibration step four until |V A - V B | < 0.1V.
标定步骤六:判断温度列表项取值是否完成,若完成,继续下一步;若未完成,则回到标定步骤二。Calibration step 6: determine whether the temperature list item value is completed, if completed, continue to the next step; if not, go back to calibration step 2.
标定步骤七:将测量得到的被测器件不同结温下的饱和导通压降数据值,拟合成Tj=f(VCE)关系式,结温与饱和导通压降关系如图10所示。Calibration Step 7: Fit the measured data values of the saturated conduction voltage drop at different junction temperatures into the relationship of T j = f(V CE ). The relationship between the junction temperature and the saturated conduction voltage drop is shown in Figure 10 shown.
测量步骤的流程图如图13所示,包括步骤:The flow chart of the measurement steps is shown in Figure 13, including the steps:
测量步骤一:注入初始参数:被测器件开通延时时间td(on)、被测器件的饱和导通压降采集时间ts、被测器件的发热功率列表项、恒流源偏置电流IS、电流误差阈值Ie。Measurement step 1: Inject initial parameters: DUT turn-on delay time t d(on) , DUT saturation conduction voltage drop acquisition time ts , DUT heating power list item, constant current source bias current I S , the current error threshold I e .
测量步骤二:从被测器件的发热功率列表项取值,记作Pi。Measurement Step 2: Take the value from the list item of the heating power of the device under test, and record it as P i .
测量步骤三:设置D/A4的大小,使恒流源偏置电流等于IS,等待恒流源偏置电流稳定。Measurement Step 3: Set the size of D/A4 to make the constant current source bias current equal to IS , and wait for the constant current source bias current to stabilize.
测量步骤四:控制器输出栅极控制信号为低电平,根据公式VD/A3=Pi/IS,设置D/A3的大小,等待热稳态。Measurement step 4: the controller outputs the gate control signal as low level, according to the formula V D/A3 =P i / IS , set the size of D/A3, and wait for the thermal steady state.
测量步骤五:在τ2时刻,控制器输出栅极控制信号为高电平;在τ3(τ2+52ns<τ3<τ2+30us)时刻,采集A/D2和A/D3的值,分别记作VCE和IA。计算公式ΔIS=IS-IA的大小。Measurement Step 5: At the moment of τ 2 , the controller outputs the gate control signal as a high level; at the moment of τ 3 (τ 2 +52ns<τ 3 <τ 2 +30us), collect the values of A/D2 and A/D3 , denoted as V CE and IA , respectively. Calculation formula ΔI S =I S -I A size.
测量步骤六:判断|ΔIS|<Ie,若其小于Ie,则继续下一步;若其大于Ie,则设置D/A4的大小,使可调恒流源偏置电流等于IS+ΔIS,等待恒流源偏置电流稳定,并返回测量步骤四。Measurement Step 6: Judging |ΔI S |<I e , if it is less than I e , proceed to the next step; if it is greater than I e , set the size of D/A4 to make the bias current of the adjustable constant current source equal to I S +ΔI S , wait for the constant current source bias current to stabilize, and return to measurement step 4.
测量步骤七:由关系Tj=f(VCE)和饱和导通压降VCE值,反推被测器件结温Tj。Measurement step 7: Inversely infer the junction temperature T j of the device under test from the relationship T j =f(V CE ) and the value of the saturated turn-on voltage drop V CE .
测量步骤八:判断发热功率列表项取值是否完成,若完成,则继续下一步;若未完成,则回到测量步骤二。Measurement step 8: determine whether the value of the heating power list item is completed, if completed, continue to the next step; if not, return to measurement step 2.
测量步骤九:得被测器件在不同发热功率下的结温特性。Measurement Step 9: Obtain the junction temperature characteristics of the device under test under different heating powers.
区别于现有技术,本发明的基于偏流预补偿的结温标定及散热组件性能评估装置包括标定和测量两种工作模式。标定模式是由恒流源激励下的被测器件与伴随负载并联组成,控制伴随负载漏、源极两端电压,使得恒流源两端电压在被测器件导通前后保持不变,测量被测器件在不同结温下的饱和导通压降,得到结温、饱和导通压降的关系;测量模式是由恒流源激励下的被测器件组成,将被测器件置于散热组件上,控制饱和导通压降使被测器件工作于不同发热功率下,测量被测器件的饱和导通压降,根据上述结温、饱和导通压降的关系反推被测器件的结温,得到器件在不同发热功率下的结温特性,用以评价散热组件散热性能。Different from the prior art, the device for junction temperature calibration and heat dissipation component performance evaluation based on bias current pre-compensation of the present invention includes two working modes: calibration and measurement. The calibration mode is composed of the device under test under constant current source excitation and the accompanying load in parallel. The saturation conduction voltage drop of the device under test at different junction temperatures can be obtained, and the relationship between the junction temperature and the saturation conduction voltage drop can be obtained; , control the saturation conduction voltage drop to make the device under test work under different heating power, measure the saturation conduction voltage drop of the device under test, and inversely infer the junction temperature of the device under test according to the relationship between the junction temperature and the saturation conduction voltage drop, The junction temperature characteristics of the device under different heating power are obtained to evaluate the heat dissipation performance of the heat dissipation component.
以上仅为本发明的实施方式,并非因此限制本发明的专利范围,凡是利用本发明说明书及附图内容所作的等效结构或等效流程变换,或直接或间接运用在其他相关的技术领域,均同理包括在本发明的专利保护范围内。The above are only the embodiments of the present invention, and are not intended to limit the scope of the patent of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the description and drawings of the present invention, or directly or indirectly applied in other related technical fields, All are similarly included in the scope of patent protection of the present invention.
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