CN109633197B - Double-heating-electrode wide-range wind speed sensor and manufacturing method thereof - Google Patents
Double-heating-electrode wide-range wind speed sensor and manufacturing method thereof Download PDFInfo
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- CN109633197B CN109633197B CN201910078142.2A CN201910078142A CN109633197B CN 109633197 B CN109633197 B CN 109633197B CN 201910078142 A CN201910078142 A CN 201910078142A CN 109633197 B CN109633197 B CN 109633197B
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/02—Means for indicating or recording specially adapted for thermometers
- G01K1/026—Means for indicating or recording specially adapted for thermometers arrangements for monitoring a plurality of temperatures, e.g. by multiplexing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P13/00—Indicating or recording presence, absence, or direction, of movement
- G01P13/02—Indicating direction only, e.g. by weather vane
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/002—Heaters using a particular layout for the resistive material or resistive elements
- H05B2203/006—Heaters using a particular layout for the resistive material or resistive elements using interdigitated electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/017—Manufacturing methods or apparatus for heaters
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Aviation & Aerospace Engineering (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Measuring Volume Flow (AREA)
Abstract
A double-heating electrode wide-range wind speed sensor and a manufacturing method thereof are used for improving detection sensitivity and speed, and belong to the field of wind speed sensors. The invention comprises the following steps: the heater electrode is positioned at the center of the octagonal substrate, the heater electrode is formed by enclosing a square coiled structure with a double heater as the center and four reference electrodes, the four reference electrodes are respectively led out from four corners of the square coiled structure, and the width of each reference electrode is gradually widened; each temperature detector electrode is of a symmetrical structure and comprises a fan-shaped body and two detection electrodes which are led out from the edge of the body and extend to the edge of the octagonal substrate, four temperature detector electrodes are distributed on the octagonal substrate around the heater electrode, and one temperature detector electrode is arranged between every two adjacent leading-out electrodes of the heater electrode; a thermal isolation slot is provided in the octagonal substrate between each temperature detector electrode and the heater electrode.
Description
Technical Field
The invention relates to a wind speed sensor, in particular to a double-heating electrode wide-range wind speed sensor and a manufacturing method thereof.
Background
The wind speed sensor is widely applied to the fields of wind power generation, mine ventilation, solar power generation wind direction control, gas flow monitoring and the like.
The existing aluminum nitride ceramic substrate is adopted as a substrate, is very stable in an inert high-temperature environment, and can generate micro-particles on the surface of aluminum nitride substances when the temperature is higher than 700 ℃ in airOxidizing to form Al with a thickness of 5-10 nm 2 O 3 The oxide film plays a role in protection, and meanwhile, the temperature of the air nearby is heated by the intermediate heating electrode, the temperature of the surrounding air is detected and measured by utilizing the temperature detection, and the wind speed is measured by utilizing the thermal temperature difference principle.
Disclosure of Invention
In order to overcome the defects, the invention provides a double-heating-electrode wide-range wind speed sensor capable of improving detection sensitivity and detection rate and a manufacturing method thereof.
The invention relates to a wide-range wind speed sensor, which comprises an octagonal substrate 1, four temperature detector electrodes 3, a heater electrode 4 and four heat isolation grooves 5, wherein the heater electrode 4 is positioned at the center of the octagonal substrate 1, the heater electrode 4 is formed by enclosing a square coiled structure with a double heater as the center and four reference electrodes, the four reference electrodes are respectively led out from four corners of the square coiled structure and extend to the edge of the octagonal substrate 1, the width of each reference electrode is gradually widened, and the four leading-out electrodes are crisscrossed;
each temperature detector electrode 3 is of a symmetrical structure and comprises a fan-shaped body and two detection electrodes which are led out from the edge of the body and extend to the edge of the octagonal substrate 1, four temperature detector electrodes 3 are distributed on the octagonal substrate 1 around the heater electrode 4, and one temperature detector electrode 3 is arranged between every two adjacent leading-out electrodes of the heater electrode 4;
a thermal isolation groove 5 is provided in the octagonal substrate 1 between each temperature probe electrode 3 and the heater electrode 4.
Preferably, the sensor further comprises an octagonal heat conducting medium layer 2;
an octagonal heat conducting medium layer 2 is plated on the octagonal substrate 1, and four temperature detector electrodes 3, heater electrodes 4 and four heat isolation grooves 5 are arranged on the octagonal heat conducting medium layer 2.
Preferably, the octagonal substrate 1 is an alumina ceramic substrate with 99% purity;
the octagonal heat-conducting medium layer 2 is an aluminum nitride heat-conducting medium film;
the four temperature probe electrodes 3 and the heater electrode 4 are each platinum films.
Preferably, the ends of the four lead-out electrodes of the heater electrode 4 and the ends of the eight detection electrodes of the temperature detector electrode 3 are provided with lead-out pads; 12 through hole bonding pads 6 are arranged on the edge of the octagonal substrate 1, the positions of the through hole bonding pads correspond to the positions of the lead-out bonding pads of the heater electrode 4 and the temperature detector electrode 3, and the through hole bonding pads corresponding to the positions are connected with the lead-out bonding pads.
Preferably, the leads pass through the lead-out pad and the through hole pad, are led out from the back surface of the octagonal substrate 1, and the lead-out pad and the through hole pad are internally provided with platinum paste welding coverage.
Preferably, the thickness of the octagonal substrate 1 is 0.1-0.15mm, the thickness of the octagonal heat conducting medium layer 2 is 0.1-10 mu m, the film thicknesses of the temperature detector electrode 3 and the heater electrode 4 are 50-500nm, the film line width a of the heater electrode 4 is 40-100 mu m, the film line width b of the temperature detector electrode 3 is 10-50 mu m, the groove depth of the thermal isolation groove 5 is 0.1-0.15mm, the groove width is 20-50 mu m, and the diameter of the through hole bonding pad 6 is 50-100 mu m.
Preferably, the octagonal substrate 1 includes four long sides with equal length and four short sides with equal length, the four long sides and the four short sides are alternately connected, the lead-out pads of the four temperature detector electrodes 3 are distributed on four short side edges, and the four lead-out pads of the heater electrodes 4 are distributed on the opposite four long side edges.
The invention also provides a manufacturing method of the double-heating-electrode wide-range wind speed sensor, which comprises the following steps:
step one: cleaning and baking the aluminum oxide ceramic substrate;
step two: sputtering an aluminum nitride heat-conducting medium film on the baked aluminum oxide ceramic substrate in the first step;
step three: nitriding or oxidizing the aluminum oxide ceramic substrate of the step two sputtering aluminum nitride heat conducting medium film;
step four: forming a layer of positive photoresist on the heat conducting medium film of the step III, nitridation or oxynitridation or aluminum oxide nitride;
step five: manufacturing a plate making mold, wherein the plate making mold is a mask plate with opposite patterns of a sensor electrode surface structure formed by four temperature detector electrodes 3 and heater electrodes 4, and the plate making mold is used for carrying out reverse exposure and development on the positive photoresist formed in the step four to obtain an aluminum oxide ceramic substrate with a photoresist pattern;
step six: the alumina ceramic substrate with the photoresist pattern in the fifth step is metallized to form a film, and the alumina ceramic substrate with the pattern covering the platinum film is formed;
step seven: carrying out flexible mechanical stripping on the aluminum oxide ceramic substrate with the pattern covered with the platinum film in the step six, and leaving a platinum film sensor electrode pattern structure with the pattern opposite to that of the plate-making mould on the surface of the aluminum nitride dielectric film on the aluminum oxide ceramic substrate;
step eight: performing laser etching on the aluminum oxide ceramic substrate at the periphery of the heater electrode 4 and the center of the lead-out bonding pad in the platinum film sensor electrode pattern structure in the step seven, and etching to form a thermal isolation groove and a bonding pad through hole 6;
step nine: the platinum wire leads penetrate through the through holes of the bonding pads from the lead-out bonding pads, the platinum wire leads are led out from the back surface of the aluminum oxide ceramic substrate, the bonding pads on the front surface of the aluminum oxide ceramic substrate are covered with platinum paste solder and a protective layer, and after solidification, the manufacturing of the double-heating electrode wide-range wind speed sensor is completed.
Preferably, the second step includes:
and (3) sputtering an aluminum nitride film on the baked aluminum oxide ceramic substrate in the step one by adopting a magnetron radio frequency sputtering method under the environment of keeping the pressure of 0.5-1.2Pa and the ratio of argon to nitrogen of 2:1 to obtain the aluminum nitride heat-conducting medium film.
Preferably, in the second step, the radio frequency sputtering of the aluminum nitride film is performed under the condition that the pressure is kept between 0.5 Pa and 1.2Pa in the ratio of argon to nitrogen of 2:1, and the radio frequency sputtering process is performed:
sputtering temperature is alternately carried out at room temperature of 25 ℃ and 200 ℃, namely magnetron radio frequency sputtering aluminum nitride film at room temperature of 25 ℃ for 2 hours, heating to 200 ℃, radio frequency sputtering aluminum nitride film for 2 hours, cooling to room temperature of 25 ℃, and coating film;
repeating the radio frequency sputtering process for 2-3 times to obtain the multilayer aluminum nitride film with obvious grain boundary.
The sensor has the beneficial effects that the temperature field formed by the center of the sensor is square, the thermal diffusion towards four directions is facilitated, the temperature diffusion field is fan-shaped, the symmetrical temperature field is facilitated, the double-heater extraction electrode extends to the edge bonding pad, the width of the electrode is gradually widened, the influence of the extraction electrode on the temperature field is reduced, the heating power of the sensor is doubled by adopting the double heaters, the thermal temperature difference sensitivity is greatly improved, the wind speed range detection range is widened, and meanwhile, the influence of the environment temperature change can be resisted by the high-temperature field. In order to improve the design precision of the thermal temperature difference wind speed sensor, the four temperature detector electrodes 3 are of a fan-shaped structure, the four temperature detector electrodes 3 form four fan-shaped areas which just cover four temperature diffusion fields of the heater electrode 4, and the fan-shaped detector electrode structure is designed to cover the temperature diffusion fields to the maximum area, so that the improvement of the heat field exchange area and efficiency is facilitated, and the wind speed detection sensitivity and detection precision are improved.
Drawings
FIG. 1 is a plan view of a dual heater electrode wide range wind speed sensor chip of the present invention.
Fig. 2 is a sectional structural view of fig. 1.
Fig. 3 is a diagram showing an electrode structure of one of the temperature probes in fig. 1.
Fig. 4 is a diagram of the structure of the dual heater electrode of fig. 1.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that, without conflict, the embodiments of the present invention and features of the embodiments may be combined with each other.
The invention is further described below with reference to the drawings and specific examples, which are not intended to be limiting.
The wide-range wind speed sensor in the embodiment comprises an octagonal substrate 1, four temperature detector electrodes 3, a heater electrode 4 and four heat isolation grooves 5, wherein the heater electrode 4 is positioned at the center of the octagonal substrate 1, the heater electrode 4 is surrounded by double heaters to form a square coiled structure with the center and four reference electrodes, the four reference electrodes are respectively led out from four corners of the square coiled structure and extend to the edge of the octagonal substrate 1, the width of each reference electrode is gradually widened, and the four leading-out electrodes are crisscrossed;
each temperature detector electrode 3 is of a symmetrical structure and comprises a fan-shaped body and two detection electrodes which are led out from the edge of the body and extend to the edge of the octagonal substrate 1, four temperature detector electrodes 3 are distributed on the octagonal substrate 1 around the heater electrode 4, and one temperature detector electrode 3 is arranged between every two adjacent leading-out electrodes of the heater electrode 4;
a thermal isolation groove 5 is provided in the octagonal substrate 1 between each temperature probe electrode 3 and the heater electrode 4.
In this embodiment, in order to ensure balance of temperature fields in windless conditions, the platinum membrane electrode of the sensor adopts a strictly symmetrical structural design, as shown in fig. 4, the heater electrode 4 is arranged in a square disk-shaped structure, i.e. two heating electrodes are coiled together to form a square structure and positioned at the center of the sensor, the temperature field formed by the center of the sensor is square, which is favorable for thermal diffusion in four directions, the diffusion field of temperature is fan-shaped, which is favorable for forming a symmetrical temperature field, the two heater extraction electrodes extend to edge bonding pads, the electrode width is gradually widened, the influence of the extraction electrodes on the temperature field is reduced, and the heating power of the sensor is doubled by adopting double heating electrodes, so that the thermal temperature difference sensitivity is greatly improved, the wind speed range detection range is widened, and meanwhile, the influence of resisting environmental temperature change can be improved by the high temperature field.
As shown in fig. 3, the temperature detector electrodes 3 in this embodiment are arranged in a fan-shaped structure, and four temperature detector electrodes 3 form four fan-shaped areas to exactly cover four temperature diffusion fields of the heater electrode 4, which is beneficial to improving the heat field exchange area and efficiency and improving the sensitivity and detection accuracy of wind speed and wind direction.
In a preferred embodiment, the sensor of the present embodiment further comprises an octagonal heat conducting medium layer 2;
an octagonal heat conducting medium layer 2 is plated on the octagonal substrate 1, and four temperature detector electrodes 3, heater electrodes 4 and four heat isolation grooves 5 are arranged on the octagonal heat conducting medium layer 2.
When the heater electrode 4 heats, the octagonal heat conducting medium layer 2 of the embodiment is beneficial to transverse and rapid temperature conduction, so that the longitudinal heat conduction loss is reduced, the transverse heat gradient is reduced, and the thermal response rate is improved, thereby improving the detection rate of wind speed and direction.
In a preferred embodiment, the octagonal substrate 1 is an alumina ceramic substrate with 99% purity;
the octagonal heat conducting medium layer 2 is an aluminum nitride heat conducting medium film, the aluminum nitride heat conducting medium film is a high heat conductivity medium film, and meanwhile, the octagonal heat conducting medium layer has a high dielectric coefficient, and a platinum film metal electrode structure is formed on the high heat conducting aluminum nitride film.
The four temperature probe electrodes 3 and the heater electrode 4 are each platinum films.
The octagonal heat conducting medium layer 2 of the embodiment is a high-heat conductivity aluminum nitride film, the high-heat conductivity aluminum nitride film is plated on the aluminum oxide substrate 1 with low-heat conductivity materials to form a composite ceramic medium film, the heater electrode 4 and the temperature detector electrode 3 of the platinum film are plated on the surface of the aluminum nitride medium film, the heat conductivity coefficients of the three materials have longitudinal gradients, the longitudinal heat conduction loss is reduced, the temperature transverse quick conduction is facilitated, and the structural design improves the heat response rate, so that the detection rate of wind speed and wind direction is improved.
In a preferred embodiment, the ends of the four extraction electrodes of the heater electrode 4 and the ends of the eight detection electrodes of the temperature detector electrode 3 are provided with extraction pads; 12 through hole bonding pads 6 are arranged on the edge of the octagonal substrate 1, the positions of the through hole bonding pads correspond to the positions of the lead-out bonding pads of the heater electrode 4 and the temperature detector electrode 3, and the through hole bonding pads corresponding to the positions are connected with the lead-out bonding pads.
In the preferred embodiment, the lead passes through the lead-out bonding pad and the through hole bonding pad and is led out from the back surface of the octagonal substrate 1, the lead-out bonding pad and the through hole bonding pad are internally provided with platinum paste welding cover, the bonding pad is subjected to platinum paste 850 ℃ sintering welding, and the through hole bonding pad is covered by the platinum paste sintering welding.
In a preferred embodiment, the thickness of the octagonal substrate 1 is 0.1-0.15mm, the thickness of the octagonal heat-conducting medium layer 2 is 0.1-10 mu m, the thicknesses of the films of the temperature detector electrode 3 and the heater electrode 4 are 50-500nm, the film line width a of the heater electrode 4 is 40-100 mu m, the film line width b of the temperature detector electrode 3 is 10-50 mu m, the groove depth of the thermal isolation groove 5 is 0.1-0.15mm, the groove width is 20-50 mu m, and the diameter of the through hole bonding pad 6 is 50-100 mu m.
In a preferred embodiment, the octagonal substrate 1 includes four long sides with equal length and four short sides with equal length, the four long sides and the four short sides are alternately connected, the lead-out pads of the four temperature probe electrodes 3 are distributed on four short side edges, and the four lead-out pads of the heater electrodes 4 are distributed on the opposite four long side edges.
The embodiment also provides a manufacturing method of the double-heating-electrode wide-range wind speed sensor, which comprises the following steps:
step one: cleaning and baking the aluminum oxide ceramic substrate:
sequentially placing the aluminum oxide ceramic substrate into dilute sulfuric acid, deionized water, an acetone solution, deionized water and an alcohol solution, respectively performing ultrasonic cleaning for 2min, 8min, 5min, 8min and 5min, taking out, and then placing into a drying oven at 150 ℃ for baking for 2h;
step two: sputtering an aluminum nitride heat conducting medium film on the baked aluminum oxide ceramic substrate in the first step:
sputtering an aluminum nitride film on the baked aluminum oxide ceramic substrate in the first step by adopting a magnetron radio frequency sputtering method under the conditions that the argon and nitrogen are in a ratio of 2:1 and the pressure is kept at 0.5-1.2Pa, so as to obtain an aluminum nitride heat-conducting medium film;
step three: nitriding or oxidizing the aluminum oxide ceramic substrate of the step two sputtered aluminum nitride heat conducting medium film:
putting the aluminum oxide ceramic substrate sputtered with the aluminum nitride film in the second step into a tubular low-temperature furnace, sintering for 2 hours at 500 ℃ in a nitrogen environment, and sintering for 2 hours at 500 ℃ in an oxygen environment, so that residual metal aluminum is nitrided or oxidized again;
step four: forming a layer of positive photoresist on the step III of nitriding or oxidizing aluminum nitride heat conducting medium film:
carrying out a positive photoresist homogenizing process on the aluminum oxide ceramic substrate sputtered with the aluminum nitride film in the third step, wherein the thickness of the adhesive film is 1-2 mu m, and putting the aluminum oxide ceramic substrate into a furnace for baking at 100-120 ℃ for 10-15min to form a layer of positive photoresist on the aluminum nitride heat conducting medium film of the aluminum oxide ceramic substrate;
step five: manufacturing a plate making mold, wherein the plate making mold is a mask plate with opposite patterns of a sensor electrode surface structure formed by four temperature detector electrodes 3 and heater electrodes 4, and the plate making mold is used for carrying out plate making exposure and development on positive photoresist formed in the step four to obtain an aluminum oxide ceramic substrate with a photoresist pattern:
carrying out ultraviolet exposure on the photoresist on the aluminum oxide ceramic substrate coated with the photoresist in the step four by using a plate making die, after the exposure time is 20-30s, putting the aluminum oxide ceramic substrate into a drying oven for baking at 90-100 ℃ for 10-15min, taking out the aluminum oxide ceramic substrate and putting the aluminum oxide ceramic substrate into a positive photoresist developing solution for developing for 1-3min until the photoresist pattern is clear, washing the developing solution by using deionized water, and putting the aluminum oxide ceramic substrate into the drying oven for baking at 90 ℃ for 10-15min to obtain the aluminum oxide ceramic substrate with the photoresist pattern;
step six: and (3) metallizing the aluminum oxide ceramic substrate with the photoresist pattern in the step (V) to form a film, and forming the aluminum oxide ceramic substrate with the pattern covering the platinum film:
putting the aluminum oxide ceramic substrate with the photoresist pattern in the fifth step into a magnetron sputtering coating machine, and performing magnetron sputtering coating by taking 99.999% of platinum target material as a sputtering target material for 15-20min to form the aluminum oxide ceramic substrate with the pattern covered by the platinum film;
step seven: and D, flexible mechanical stripping is carried out on the aluminum oxide ceramic substrate with the pattern covered with the platinum film in the step six, and a platinum film sensor electrode pattern structure with the pattern opposite to that of the plate making mould is left on the surface of the aluminum nitride dielectric film on the aluminum oxide ceramic substrate:
putting the aluminum oxide ceramic substrate with the platinum film covered pattern in the step six into acetone solution, soaking for 2-5min, dissolving photoresist, simultaneously carrying out ultrasonic treatment on the aluminum oxide ceramic substrate with the platinum film covered pattern at the frequency of 30kHz for 20-30s, damaging the step connection part of the platinum film pattern, simultaneously accelerating dissolving of the photoresist pattern, carrying out ultrasonic cleaning for 10-20s, taking out, stripping the platinum film on the surface of the photoresist by adopting a flexible polypropylene tape by adopting a mechanical stripping method, and leaving a platinum film sensor electrode pattern structure with the pattern opposite to that of a plate making mould on the surface of an aluminum nitride medium film on the aluminum oxide ceramic substrate;
step eight: performing laser etching on the aluminum oxide ceramic substrate at the periphery of the heater electrode 4 and the center of the lead-out bonding pad in the platinum film sensor electrode pattern structure in the step seven by using a laser dicing saw, and etching to form a thermal isolation groove and a bonding pad through hole 6:
step nine: the platinum wire leads pass through the through holes of the bonding pads from the lead-out bonding pads, the platinum wire leads are led out from the back of the aluminum oxide ceramic substrate, the bonding pads on the front of the aluminum oxide ceramic substrate are covered with platinum paste solder, the bonding pads are put into a 850 ℃ high-temperature furnace for annealing treatment for 10min, the bonding pads are taken out to be covered with a glass glaze protection layer, and the bonding pads are put into the 750-800 ℃ high-temperature furnace for annealing treatment for 10min again for curing, so that the dual-heating electrode wide-range wind speed sensor is obtained.
In the preferred embodiment, in the second step, the radio frequency sputtering of the aluminum nitride film is carried out under the environment that the pressure is kept between 0.5 Pa and 1.2Pa in the ratio of argon to nitrogen of 2:1, and the radio frequency sputtering process is carried out:
sputtering temperature is alternately carried out at room temperature of 25 ℃ and 200 ℃, namely magnetron radio frequency sputtering aluminum nitride film at room temperature of 25 ℃ for 2 hours, heating to 200 ℃, radio frequency sputtering aluminum nitride film for 2 hours, cooling to room temperature of 25 ℃, and coating film;
the radio frequency sputtering process is repeated for 2 to 3 times, so that the multilayer aluminum nitride film with obvious grain boundary can be obtained, the transverse heat conductivity is improved, and the longitudinal heat conduction loss is reduced. Obtaining Al plated with aluminum nitride film 2 O 3 A ceramic substrate.
Although the invention herein has been described with reference to particular embodiments, it is to be understood that these embodiments are merely illustrative of the principles and applications of the present invention. It is therefore to be understood that numerous modifications may be made to the illustrative embodiments and that other arrangements may be devised without departing from the spirit and scope of the present invention as defined by the appended claims. It should be understood that the different dependent claims and the features described herein may be combined in ways other than as described in the original claims. It is also to be understood that features described in connection with separate embodiments may be used in other described embodiments.
Claims (10)
1. The double-heating-electrode wide-range wind speed sensor comprises an octagonal substrate (1), four temperature detector electrodes (3), a heater electrode (4) and four heat isolation grooves (5), and is characterized in that the heater electrode (4) is positioned at the center of the octagonal substrate (1), the heater electrode (4) is surrounded by a double heater to form a square coiled structure and four reference electrodes, the four reference electrodes are respectively led out from four corners of the square coiled structure and extend to the edge of the octagonal substrate (1), the width of each reference electrode is gradually widened, and the four leading-out electrodes are crisscrossed;
each temperature detector electrode (3) is of a symmetrical structure and comprises a fan-shaped body and two detection electrodes which are led out from the edge of the body and extend to the edge of the octagonal substrate (1), the four temperature detector electrodes (3) are distributed on the octagonal substrate (1) around the heater electrode (4), and one temperature detector electrode (3) is arranged between every two adjacent leading-out electrodes of the heater electrode (4);
a thermal isolation groove (5) is provided on the octagonal substrate (1) between each temperature detector electrode (3) and the heater electrode (4).
2. A dual heating electrode wide range wind speed sensor according to claim 1, characterized in that the sensor further comprises an octagonal heat conducting medium layer (2);
the octagonal heat conducting medium layer (2) is plated on the octagonal substrate (1), and the four temperature detector electrodes (3), the heater electrodes (4) and the four heat isolation grooves (5) are arranged on the octagonal heat conducting medium layer (2).
3. A dual heating electrode wide range wind speed sensor according to claim 2, characterized in that the octagonal substrate (1) is an aluminium oxide ceramic substrate with a purity of 99%;
the octagonal heat-conducting medium layer (2) is an aluminum nitride heat-conducting medium film;
the four temperature detector electrodes (3) and the heater electrode (4) are platinum films.
4. A dual heating electrode wide range wind speed sensor according to claim 3, characterized in that the ends of the four extraction electrodes of the heater electrode (4) and the ends of the eight detection electrodes of the temperature detector electrode (3) are provided with extraction pads; 12 through hole bonding pads (6) are arranged on the edge of the octagonal substrate (1), the positions of the through hole bonding pads correspond to the positions of the lead-out bonding pads of the heater electrode (4) and the temperature detector electrode (3), and the through hole bonding pads corresponding to the positions are connected with the lead-out bonding pads.
5. The dual heater electrode wide range wind speed sensor of claim 4, wherein the leads pass through the lead out pads and the via pads, lead out from the back surface of the octagonal substrate (1), and the lead out pads and the via pads are covered by platinum paste solder.
6. The dual heating electrode wide-range wind speed sensor according to claim 5, wherein the thickness of the octagonal substrate (1) is 0.1-0.15mm, the thickness of the octagonal heat conducting medium layer (2) is 0.1-10 μm, the film thicknesses of the temperature detector electrode (3) and the heater electrode (4) are 50-500nm, the film line width a of the heater electrode (4) is 40-100 μm, the film line width b of the temperature detector electrode (3) is 10-50 μm, the groove depth of the thermal isolation groove (5) is 0.1-0.15mm, the groove width is 20-50 μm, and the diameter of the through hole pad (6) is 50-100 μm.
7. A dual heating electrode wide range wind speed sensor according to any of claims 1 to 6, characterized in that the octagonal substrate (1) comprises four long sides of equal length and four short sides of equal length, the four long sides and the four short sides being alternately connected, the lead out pads of the four temperature probe electrodes (3) being distributed at the edges of the four short sides, the four lead out pads of the heater electrodes (4) being distributed at the edges of the opposite four long sides.
8. A method of manufacturing a dual heater electrode wide range wind speed sensor according to claim 4 or 5, the method comprising:
step one: cleaning and baking the aluminum oxide ceramic substrate;
step two: sputtering an aluminum nitride heat-conducting medium film on the baked aluminum oxide ceramic substrate in the first step;
step three: nitriding or oxidizing the aluminum oxide ceramic substrate sputtered with the aluminum nitride heat-conducting medium film in the second step;
step four: forming a layer of positive photoresist on the heat conducting medium film of the step III, nitridation or oxynitridation or aluminum oxide nitride;
step five: manufacturing a plate making mould, wherein the plate making mould is a mask plate with opposite patterns of a sensor electrode surface structure formed by four temperature detector electrodes (3) and heater electrodes (4), and the plate making mould is used for carrying out reverse exposure and development on the positive photoresist formed in the step four to obtain an aluminum oxide ceramic substrate with a photoresist pattern;
step six: the alumina ceramic substrate with the photoresist pattern in the fifth step is metallized to form a film, and the alumina ceramic substrate with the pattern covering the platinum film is formed;
step seven: carrying out flexible mechanical stripping on the aluminum oxide ceramic substrate with the pattern covered with the platinum film in the step six, and leaving a platinum film sensor electrode pattern structure with the pattern opposite to that of the plate-making mould on the surface of the aluminum nitride dielectric film on the aluminum oxide ceramic substrate;
step eight: performing laser etching on the aluminum oxide ceramic substrate at the periphery of the heater electrode (4) and the center of the lead-out bonding pad in the platinum film sensor electrode pattern structure in the step seven, and etching to form a thermal isolation groove and a through hole bonding pad (6);
step nine: and a platinum wire lead passes through the through hole bonding pad (6) from the lead bonding pad, the platinum wire lead is led out from the back of the aluminum oxide ceramic substrate, the bonding pad on the front of the aluminum oxide ceramic substrate is covered with platinum paste solder and is covered with a protective layer, and after solidification, the manufacturing of the double-heating electrode wide Cheng Fengsu sensor is completed.
9. The method of manufacturing according to claim 8, wherein the second step includes:
and (3) sputtering an aluminum nitride film on the baked aluminum oxide ceramic substrate in the step one by adopting a magnetron radio frequency sputtering method under the environment of keeping the pressure of 0.5-1.2Pa and the ratio of argon to nitrogen of 2:1 to obtain the aluminum nitride heat-conducting medium film.
10. The method according to claim 9, wherein in the second step, the rf sputtering of the aluminum nitride film is performed in an atmosphere where the ratio of argon to nitrogen is maintained at a pressure of 0.5 to 1.2Pa, and the rf sputtering process is as follows:
sputtering temperature is alternately carried out at room temperature of 25 ℃ and 200 ℃, namely magnetron radio frequency sputtering aluminum nitride film at room temperature of 25 ℃ for 2 hours, heating to 200 ℃, radio frequency sputtering aluminum nitride film for 2 hours, cooling to room temperature of 25 ℃, and coating film;
repeating the radio frequency sputtering process for 2-3 times to obtain the multilayer aluminum nitride film with obvious grain boundary.
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