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CN109572104B - Metal clad laminate and circuit substrate - Google Patents

Metal clad laminate and circuit substrate Download PDF

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CN109572104B
CN109572104B CN201811122639.1A CN201811122639A CN109572104B CN 109572104 B CN109572104 B CN 109572104B CN 201811122639 A CN201811122639 A CN 201811122639A CN 109572104 B CN109572104 B CN 109572104B
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thermoplastic polyimide
diamine
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clad laminate
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CN109572104A (en
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金子和明
安藤敏男
樱井慎一郎
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Nippon Steel Chemical and Materials Co Ltd
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Nippon Steel and Sumikin Chemical Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02Physical, chemical or physicochemical properties
    • B32B7/023Optical properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/20Layered products comprising a layer of metal comprising aluminium or copper
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/28Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B32B27/281Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B33/00Layered products characterised by particular properties or particular surface features, e.g. particular surface coatings; Layered products designed for particular purposes not covered by another single class
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1067Wholly aromatic polyimides, i.e. having both tetracarboxylic and diamino moieties aromatically bound
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1067Wholly aromatic polyimides, i.e. having both tetracarboxylic and diamino moieties aromatically bound
    • C08G73/1071Wholly aromatic polyimides containing oxygen in the form of ether bonds in the main chain
    • BPERFORMING OPERATIONS; TRANSPORTING
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    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/20Properties of the layers or laminate having particular electrical or magnetic properties, e.g. piezoelectric
    • B32B2307/206Insulating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/40Properties of the layers or laminate having particular optical properties
    • B32B2307/42Polarizing, birefringent, filtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/70Other properties
    • B32B2307/732Dimensional properties
    • B32B2307/734Dimensional stability
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/08PCBs, i.e. printed circuit boards

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  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)

Abstract

本发明提供一种可减少相对于电路加工工序、基板层叠工序及零件安装工序等工序中的温度、湿度及压力的变化以及工序间的温度·湿度环境变化而言的尺寸变化的覆金属层叠板及电路基板。包括绝缘树脂层与金属层的覆金属层叠板,其中,绝缘树脂层具有非热塑性聚酰亚胺层与热塑性聚酰亚胺层,并且满足:(i)面内双折射率(Δn)的值为2×10‑3以下;(ii)宽度方向(TD方向)的面内双折射率(Δn)的偏差[Δ(Δn)]为4×10‑4以下。

Figure 201811122639

The present invention provides a metal-clad laminate capable of reducing dimensional changes with respect to changes in temperature, humidity, and pressure in processes such as a circuit processing process, a substrate lamination process, and a component mounting process, and changes in temperature and humidity environments between processes. and circuit boards. A metal-clad laminate comprising an insulating resin layer and a metal layer, wherein the insulating resin layer has a non-thermoplastic polyimide layer and a thermoplastic polyimide layer, and satisfies: (i) a value of in-plane birefringence (Δn) (ii) The in-plane birefringence (Δn) variation [Δ(Δn)] in the width direction (TD direction) is 4×10 −4 or less.

Figure 201811122639

Description

覆金属层叠板及电路基板Metal clad laminate and circuit substrate

技术领域technical field

本发明涉及一种覆金属层叠板及电路基板。The invention relates to a metal-clad laminate and a circuit substrate.

背景技术Background technique

近年来,伴随电子设备的小型化、轻量化、省空间化的发展,对薄且轻量、具有可挠性、即便反复弯曲仍具有优异耐久性的柔性印刷布线板(FPC:Flexible PrintedCircuits)的需要正在增加。FPC即便在有限的空间内仍可实现立体且高密度的安装,因此,其用途正扩大到例如硬盘驱动器(Hard Disk Drive,HDD)、数字多功能光盘(DigitalVersatile Disc,DVD)、移动电话等电子设备的可动部分的布线、或电缆(cable)、连接器(connector)等零件。In recent years, with the development of miniaturization, weight reduction, and space saving of electronic devices, flexible printed circuit boards (FPC: Flexible Printed Circuits), which are thin, lightweight, flexible, and have excellent durability even after repeated bending Demand is increasing. FPC can achieve three-dimensional and high-density installation even in a limited space, so its use is expanding to electronic devices such as Hard Disk Drive (HDD), Digital Versatile Disc (DVD), mobile phone, etc. Wiring of movable parts of equipment, or parts such as cables and connectors.

FPC是通过蚀刻覆铜层叠板(Copper-Clad Laminate,CCL)的铜层进行布线加工而制造。在移动电话或智能手机中,对于连续弯曲或弯折180°的FPC,大多使用压延铜箔作为铜层的材料。例如,专利文献1中提出:以耐折裂次数来规定使用压延铜箔所制作的覆铜层叠板的耐弯曲性。另外,专利文献2中提出了一种使用以光泽度和弯折次数规定的压延铜箔的覆铜层叠板。The FPC is manufactured by etching the copper layer of a copper-clad laminate (CCL) and performing wiring processing. In mobile phones or smart phones, for FPCs that are continuously bent or bent by 180°, rolled copper foil is mostly used as the material for the copper layer. For example, Patent Document 1 proposes that the bending resistance of a copper-clad laminate produced by using a rolled copper foil is defined by the number of cracking resistances. In addition, Patent Document 2 proposes a copper-clad laminate using a rolled copper foil specified in terms of glossiness and number of times of bending.

在对覆铜层叠板进行的光刻(photolithography)工序、或安装FPC的过程中,以设置于覆铜层叠板中的对准标记(alignment mark)为基准而进行接合、切断、曝光、蚀刻等各种加工。这些工序中的加工精度在维持搭载有FPC的电子设备的可靠性方面变得重要。然而,覆铜层叠板具有将热膨胀系数不同的铜层和树脂层加以层叠的结构,因此,由于铜层和树脂层的热膨胀系数的差而在层间产生应力。所述应力的一部分或全部在蚀刻铜层进行布线加工的情况下被解除,由此发生伸缩,并成为使布线图案的尺寸发生变化的主要原因。因此,最终在FPC的阶段中发生尺寸变化,成为引起布线间或布线与端子的连接不良的原因,从而使电路基板的可靠性或良率降低。因此,在作为电路基板材料的覆铜层叠板中,尺寸稳定性是非常重要的特性。但在所述专利文献1、专利文献2中,关于覆铜层叠板的尺寸稳定性,未作任何考虑。In the photolithography process performed on the copper clad laminate or the process of mounting the FPC, bonding, cutting, exposure, etching, etc. are performed based on the alignment mark provided in the copper clad laminate. Various processing. The machining accuracy in these steps is important in maintaining the reliability of the electronic device mounted with the FPC. However, since the copper clad laminate has a structure in which copper layers and resin layers having different thermal expansion coefficients are stacked, stress is generated between the layers due to the difference in thermal expansion coefficients between the copper layers and the resin layers. Part or all of the stress is relieved when the copper layer is etched for wiring processing, which causes expansion and contraction to cause changes in the dimensions of the wiring pattern. Therefore, a dimensional change finally occurs in the FPC stage, which causes poor connection between wirings or wirings and terminals, thereby reducing the reliability and yield of the circuit board. Therefore, dimensional stability is a very important characteristic in a copper-clad laminate as a circuit board material. However, in Patent Document 1 and Patent Document 2, no consideration is given to the dimensional stability of the copper-clad laminate.

另外,专利文献3中提出,为了降低绝缘树脂层的热膨胀系数并提高尺寸稳定性,在并不设置热塑性聚酰亚胺层而包含铜箔与非热塑性聚酰亚胺层的柔性覆金属层叠板中,作为非热塑性聚酰亚胺层的二胺成分,使用包含对苯二胺(p-phenylenediamine,p-PDA)或2,2'-二甲基-4,4'-二氨基联苯(2,2'-dimethyl-4,4'-diaminobiphenyl,m-TB)的二胺化合物和1,3-双(4-氨基苯氧基)苯(1,3-bis(4-aminophenoxy)benzene,TPE-R)等二胺化合物。p-PDA虽为降低热膨胀系数且有助于尺寸稳定性的单体,但由于分子量小,因此存在酰亚胺基浓度增加且聚酰亚胺的吸湿性变高这一问题。若聚酰亚胺的吸湿性变高,则存在如下问题:由于电路加工时的加热等环境变化而容易发生尺寸变化或翘曲。In addition, in Patent Document 3, in order to reduce the thermal expansion coefficient of the insulating resin layer and improve the dimensional stability, a flexible metal-clad laminate comprising a copper foil and a non-thermoplastic polyimide layer is not provided with a thermoplastic polyimide layer. Among them, as the diamine component of the non-thermoplastic polyimide layer, p-phenylenediamine (p-PDA) or 2,2'-dimethyl-4,4'-diaminobiphenyl ( 2,2'-dimethyl-4,4'-diaminobiphenyl, m-TB) diamine compound and 1,3-bis(4-aminophenoxy)benzene (1,3-bis(4-aminophenoxy)benzene, TPE-R) and other diamine compounds. Although p-PDA is a monomer which lowers the thermal expansion coefficient and contributes to dimensional stability, since the molecular weight is small, the imide group concentration increases and the hygroscopicity of the polyimide increases. When the hygroscopicity of the polyimide increases, there is a problem that dimensional change and warpage are likely to occur due to environmental changes such as heating during circuit processing.

另一方面,专利文献4中揭示出:在电路加工时的裂纹的产生得到了抑制的多层聚酰亚胺膜中,将m-TB与p-PDA组合使用作为非热塑性聚酰亚胺的原料的二胺化合物。但是,专利文献4的单体组成中,二胺化合物中的p-PDA的摩尔比过大,因此,与所述同样地存在如下问题:聚酰亚胺的吸湿性变高,由于电路加工时的环境变化而容易发生尺寸变化或翘曲。此外,专利文献4中记载了在将m-TB与p-PDA及2,2-双[4-(4-氨基苯氧基)苯基]丙烷(2,2-bis[4-(4-aminophenoxy)phenyl]propane,BAPP)组合使用作为二胺化合物的情况下,耐裂纹(crack)性恶化。所述情况下,二胺化合物中的p-PDA的摩尔比也过大,因此认为,与所述同样地存在聚酰亚胺的吸湿性变高的问题。On the other hand, Patent Document 4 discloses that in a multilayer polyimide film in which the occurrence of cracks during circuit processing is suppressed, m-TB and p-PDA are used in combination as a non-thermoplastic polyimide film. The raw diamine compound. However, in the monomer composition of Patent Document 4, since the molar ratio of p-PDA in the diamine compound is too large, there is a problem similar to the above that the hygroscopicity of the polyimide increases, and the Dimensional change or warping is likely to occur due to environmental changes. In addition, Patent Document 4 describes the combination of m-TB with p-PDA and 2,2-bis[4-(4-aminophenoxy)phenyl]propane (2,2-bis[4-(4- When aminophenoxy)phenyl]propane, BAPP) is used in combination as a diamine compound, crack resistance is deteriorated. In this case, since the molar ratio of p-PDA in the diamine compound is too large, it is considered that there is a problem that the hygroscopicity of the polyimide increases similarly to the above.

[现有技术文献][Prior Art Literature]

[专利文献][Patent Literature]

[专利文献1]日本专利特开2014-15674公报(权利要求书等)[Patent Document 1] Japanese Patent Laid-Open No. 2014-15674 (claims, etc.)

[专利文献2]日本专利特开2014-11451号公报(权利要求书等)[Patent Document 2] Japanese Patent Laid-Open No. 2014-11451 (claims, etc.)

[专利文献3]日本专利第5162379号公报(权利要求书等)[Patent Document 3] Japanese Patent No. 5162379 (claims, etc.)

[专利文献4]WO2016/159104号(合成例6、合成例9等)[Patent Document 4] WO2016/159104 (Synthesis Example 6, Synthesis Example 9, etc.)

发明内容SUMMARY OF THE INVENTION

[发明所要解决的问题][Problems to be Solved by Invention]

本发明的目的在于提供一种可减少相对于电路加工工序、基板层叠工序及零件安装工序等工序中的温度、湿度及压力的变化以及工序间的温度·湿度环境变化而言的尺寸变化的覆金属层叠板。An object of the present invention is to provide a coating that can reduce dimensional changes with respect to changes in temperature, humidity, and pressure in processes such as a circuit processing process, a board lamination process, and a component mounting process, and changes in temperature and humidity environments between processes. Metal laminate.

[解决问题的技术手段][Technical means to solve the problem]

本发明人等人进行了努力研究,结果发现,通过控制绝缘树脂层的面内双折射率(Δn)可解决所述课题,从而完成了本发明。As a result of diligent studies, the present inventors found that the above-mentioned problems can be solved by controlling the in-plane birefringence (Δn) of the insulating resin layer, and completed the present invention.

即,本发明的覆金属层叠板包括:绝缘树脂层;及层叠于所述绝缘树脂层的至少单面上的金属层,所述覆金属层叠板中,所述绝缘树脂层在包含非热塑性聚酰亚胺的非热塑性聚酰亚胺层的至少一个面上具有包含热塑性聚酰亚胺的热塑性聚酰亚胺层。而且,其中,所述绝缘树脂层满足下述条件(i)及条件(ii),并且满足下述条件(iii)、或者条件(iv)与条件(v)两者、或者条件(vi)与条件(vii)两者。That is, the metal-clad laminate of the present invention includes: an insulating resin layer; and a metal layer laminated on at least one side of the insulating resin layer, in which the insulating resin layer is formed of a non-thermoplastic polymer layer. The non-thermoplastic polyimide layer of imide has a thermoplastic polyimide layer containing thermoplastic polyimide on at least one surface. And, wherein, the insulating resin layer satisfies the following conditions (i) and (ii), and satisfies the following conditions (iii), or both conditions (iv) and (v), or conditions (vi) and Condition (vii) Both.

(i)面内双折射率(Δn)的值为2×10-3以下。(i) The value of the in-plane birefringence (Δn) is 2×10 −3 or less.

(ii)宽度方向(横向(Transverse Direction,TD)方向)的面内双折射率(Δn)的偏差[Δ(Δn)]为4×10-4以下。(ii) The deviation [Δ(Δn)] of the in-plane birefringence (Δn) in the width direction (transverse direction (TD) direction) is 4×10 −4 or less.

(iii)以250℃加热30分钟后的面内双折射率(Δnh)的值与加热前的面内双折射率(Δn)的值的差(Δnh-Δn)为±2×10-4以下。(iii) The difference (Δnh-Δn) between the value of the in-plane birefringence (Δnh) after heating at 250° C. for 30 minutes and the value of the in-plane birefringence (Δn) before heating is ±2×10 −4 or less .

(iv)在所述非热塑性聚酰亚胺层的厚度方向上,以一个面为基点的中央部方向上1.5μm的点中的双折射率(Δna)、与以另一个面为基点的中央部方向上1.5μm的点中的双折射率(Δnb)的差(Δna-Δnb)为±0.01以下。(iv) In the thickness direction of the non-thermoplastic polyimide layer, the birefringence (Δna) at a point of 1.5 μm in the direction of the central portion based on one surface and the center based on the other surface The difference (Δna−Δnb) of the birefringence (Δnb) in the point of 1.5 μm in the partial direction was ±0.01 or less.

(v)与所述Δna及所述Δnb以及厚度方向的中央部中的双折射率(Δnc)的合计(Δna+Δnb+Δnc)的平均值(Δnv)的差在所述Δna及Δnb的任一者中均为±0.01以下。(v) The difference from the average value (Δnv) of the total (Δna+Δnb+Δnc) of the Δna and the Δnb and the birefringence (Δnc) in the central portion in the thickness direction is any one of the Δna and Δnb All of them were ±0.01 or less.

(vi)以80℃干燥1小时后,在23℃、50%相对湿度(Relative Humidity,RH)的恒温恒湿下,调湿4小时后的吸湿率(Am)为1.0重量%以下。(vi) After drying at 80°C for 1 hour, the moisture absorption rate (A m ) after conditioning for 4 hours at a constant temperature and humidity of 23°C and 50% relative humidity (RH) is 1.0 wt % or less.

(vii)以80℃干燥1小时后,在23℃、50%RH的恒温恒湿下,调湿1小时后的吸湿率(Am1)及在相同条件下调湿2小时后的吸湿率(Am2)的差(Am2-Am1)为0.2重量%以下。(vii) After drying at 80°C for 1 hour, under the constant temperature and humidity of 23°C and 50% RH, the moisture absorption rate (A m1 ) after conditioning for 1 hour and the moisture absorption rate (A m1 ) after conditioning for 2 hours under the same conditions m2 ) difference (A m2 -A m1 ) is 0.2 wt % or less.

本发明的覆金属层叠板中可为,所述非热塑性聚酰亚胺包含四羧酸残基及二胺残基,且相对于所有二胺残基100摩尔份,由下述通式(1)所表示的二胺化合物所衍生的二胺残基为20摩尔份以上。In the metal-clad laminate of the present invention, the non-thermoplastic polyimide may contain tetracarboxylic acid residues and diamine residues, and relative to 100 mole parts of all diamine residues, the following general formula (1 The amount of the diamine residue derived from the diamine compound represented by ) is 20 mole parts or more.

[化1][hua 1]

Figure BDA0001811565610000031
Figure BDA0001811565610000031

通式(1)中,连结基Z表示单键或-COO-,Y独立地表示可经卤素原子或苯基取代的碳数1~3的一价烃或碳数1~3的烷氧基、或碳数1~3的全氟烷基、或烯基,n表示0~2的整数,p及q独立地表示0~4的整数。In the general formula (1), the linking group Z represents a single bond or -COO-, and Y independently represents a monovalent hydrocarbon having 1 to 3 carbon atoms or an alkoxy group having 1 to 3 carbon atoms which may be substituted by a halogen atom or a phenyl group , or a perfluoroalkyl group having 1 to 3 carbon atoms, or an alkenyl group, n represents an integer of 0 to 2, and p and q independently represent an integer of 0 to 4.

关于本发明的覆金属层叠板,相对于所述非热塑性聚酰亚胺所含的所有二胺残基100摩尔份,由所述通式(1)所表示的二胺化合物所衍生的二胺残基可为70摩尔份~95摩尔份的范围内,选自下述通式(2)及通式(3)中的二胺残基的合计量可为5摩尔份~30摩尔份的范围内。The metal-clad laminate of the present invention is a diamine derived from the diamine compound represented by the general formula (1) with respect to 100 mol parts of all the diamine residues contained in the non-thermoplastic polyimide. The residue may be in the range of 70 to 95 parts by mole, and the total amount of the diamine residues selected from the following general formula (2) and (3) may be in the range of 5 to 30 parts by mole Inside.

[化2][hua 2]

Figure BDA0001811565610000032
Figure BDA0001811565610000032

Figure BDA0001811565610000033
Figure BDA0001811565610000033

通式(2)及通式(3)中,R5、R6、R7及R8分别独立地表示卤素原子、或者碳数1~4的可经卤素原子取代的烷基或烷氧基、或烯基,X独立地表示选自-O-、-S-、-CH2-、-CH(CH3)-、-C(CH3)2-、-CO-、-COO-、-SO2-、-NH-或-NHCO-中的二价基,X1及X2分别独立地表示单键、选自-O-、-S-、-CH2-、-CH(CH3)-、-C(CH3)2-、-CO-、-COO-、-SO2-、-NH-或-NHCO-中的二价基,但将X1及X2两者为单键的情况除外,m、n、o及p独立地表示0~4的整数。In general formula (2) and general formula (3), R 5 , R 6 , R 7 and R 8 each independently represent a halogen atom, or an alkyl or alkoxy group having 1 to 4 carbon atoms which may be substituted by a halogen atom , or alkenyl, X independently represents selected from -O-, -S-, -CH 2 -, -CH(CH 3 )-, -C(CH 3 ) 2 -, -CO-, -COO-, - Divalent group in SO 2 -, -NH- or -NHCO-, X 1 and X 2 each independently represent a single bond, selected from -O-, -S-, -CH 2 -, -CH(CH 3 ) A divalent group in -, -C(CH 3 ) 2 -, -CO-, -COO-, -SO 2 -, -NH- or -NHCO-, but both X 1 and X 2 are single bonds Unless otherwise specified, m, n, o, and p independently represent an integer of 0 to 4.

本发明的覆金属层叠板中可为,所述热塑性聚酰亚胺包含四羧酸残基及二胺残基,且相对于所有二胺残基100摩尔份,选自所述通式(2)及通式(3)中的二胺残基的合计量为50摩尔份以上。In the metal-clad laminate of the present invention, the thermoplastic polyimide may include a tetracarboxylic acid residue and a diamine residue, and relative to 100 mole parts of all the diamine residues, the thermoplastic polyimide is selected from the general formula (2 ) and the total amount of the diamine residues in the general formula (3) is 50 mole parts or more.

本发明的覆金属层叠板中,所述通式(2)所表示的二胺残基可为由1,3-双(4-氨基苯氧基)苯所衍生的二胺残基,In the metal-clad laminate of the present invention, the diamine residue represented by the general formula (2) may be a diamine residue derived from 1,3-bis(4-aminophenoxy)benzene,

所述通式(3)所表示的二胺残基可为由2,2-双[4-(4-氨基苯氧基)苯基]丙烷所衍生的二胺残基。The diamine residue represented by the general formula (3) may be a diamine residue derived from 2,2-bis[4-(4-aminophenoxy)phenyl]propane.

本发明的覆金属层叠板中,所述非热塑性聚酰亚胺层的厚度(A)与所述热塑性聚酰亚胺层的厚度(B)的厚度比(A)/(B)可为1~20的范围内。In the metal-clad laminate of the present invention, the thickness ratio (A)/(B) of the thickness (A) of the non-thermoplastic polyimide layer to the thickness (B) of the thermoplastic polyimide layer may be 1 ~20 range.

本发明的覆金属层叠板中,宽度方向(TD方向)的长度可为490mm以上。In the metal-clad laminate of the present invention, the length in the width direction (TD direction) may be 490 mm or more.

本发明的电路基板是将所述任一项所述的覆金属层叠板的所述金属层加工为布线而成。The circuit board of the present invention is formed by processing the metal layer of the metal-clad laminate according to any one of the above into wiring.

[发明的效果][Effect of invention]

本发明的覆金属层叠板满足条件(i)及条件(ii),并且满足条件(iii)、或者条件(iv)与条件(v)两者、或者条件(vi)与条件(vii)两者,由此,即便在高温·高压的环境下或湿度变化的环境下,绝缘树脂层的尺寸稳定性也优异,因此,难以因电路加工工序、基板层叠工序及零件安装工序时的环境变化(例如,高温或高压、湿度变化等)而发生翘曲等不良状况。尤其是在宽幅的覆金属层叠板中,绝缘树脂层的总宽也尺寸变化率低,尺寸稳定,因此可将由所述覆金属层叠板所得的FPC高密度安装。因此,通过利用本发明的覆金属层叠板作为FPC材料,可实现电路基板的可靠性与良率的提升。The metal-clad laminate of the present invention satisfies the condition (i) and the condition (ii), and also satisfies the condition (iii), or both the condition (iv) and the condition (v), or both the condition (vi) and the condition (vii). Therefore, the dimensional stability of the insulating resin layer is excellent even in a high-temperature and high-pressure environment or an environment with changes in humidity, so it is difficult to be , high temperature or high pressure, humidity changes, etc.) and other undesirable conditions such as warpage occur. Especially in a wide metal-clad laminate, the overall width of the insulating resin layer has a low dimensional change rate and is dimensionally stable, so that the FPC obtained from the metal-clad laminate can be mounted at high density. Therefore, by using the metal-clad laminate of the present invention as the FPC material, the reliability and yield of the circuit substrate can be improved.

附图说明Description of drawings

图1是表示吸湿率及每单位时间的吸湿率变化不同的树脂的吸湿率的变化的图表。FIG. 1 is a graph showing the change in the moisture absorption rate of resins having different moisture absorption rate and moisture absorption rate per unit time.

具体实施方式Detailed ways

接下来,对本发明的实施方式进行说明。Next, embodiments of the present invention will be described.

<覆金属层叠板><Metal-clad laminate>

本实施方式的覆金属层叠板包括:绝缘树脂层;及层叠于所述绝缘树脂层的至少单面上的金属层。The metal-clad laminate of the present embodiment includes: an insulating resin layer; and a metal layer laminated on at least one side of the insulating resin layer.

<绝缘树脂层><Insulating resin layer>

本实施方式的覆金属层叠板中,绝缘树脂层在非热塑性聚酰亚胺层的至少一个面上具有热塑性聚酰亚胺层。即,热塑性聚酰亚胺层设置于非热塑性聚酰亚胺层的单面或两面上。例如,在本实施方式的覆金属层叠板中,金属层层叠于热塑性聚酰亚胺层的表面。In the metal-clad laminate of the present embodiment, the insulating resin layer has a thermoplastic polyimide layer on at least one surface of the non-thermoplastic polyimide layer. That is, the thermoplastic polyimide layer is provided on one side or both sides of the non-thermoplastic polyimide layer. For example, in the metal-clad laminate of the present embodiment, the metal layer is laminated on the surface of the thermoplastic polyimide layer.

这里,所谓非热塑性聚酰亚胺,通常为即便加热产生软化也不显示出粘接性的聚酰亚胺,而本发明中是指使用动态粘弹性测定装置(动态机械分析仪(dynamic mechanicalanalyzer,DMA))所测定的30℃下的储存弹性系数为1.0×109Pa以上、360℃下的储存弹性系数为1.0×108Pa以上的聚酰亚胺。另外,所谓热塑性聚酰亚胺,通常为可明确地确认到玻璃化转变温度(Tg)的聚酰亚胺,而本发明中是指使用DMA所测定的30℃下的储存弹性系数为1.0×109Pa以上、360℃下的储存弹性系数小于1.0×108Pa的聚酰亚胺。Here, the so-called non-thermoplastic polyimide is usually a polyimide that does not show adhesiveness even if it is softened by heating, and in the present invention, a dynamic viscoelasticity measuring device (dynamic mechanical analyzer (dynamic mechanical analyzer) A polyimide having a storage elastic modulus at 30° C. measured by DMA) of 1.0×10 9 Pa or more and a storage elastic modulus at 360° C. of 1.0×10 8 Pa or more. In addition, the thermoplastic polyimide is usually a polyimide whose glass transition temperature (Tg) can be clearly confirmed, and in the present invention, it means that the storage elastic modulus at 30° C. measured using DMA is 1.0× A polyimide of 10 9 Pa or more and a storage elastic modulus at 360° C. of less than 1.0×10 8 Pa.

本实施方式的覆金属层叠板中,绝缘树脂层满足下述条件(i)及条件(ii),并且满足条件(iii)、或者条件(iv)与条件(v)两者、或者条件(vi)与条件(vii)两者。In the metal-clad laminate of the present embodiment, the insulating resin layer satisfies the following condition (i) and condition (ii), and also satisfies condition (iii), or both of condition (iv) and condition (v), or condition (vi) ) and condition (vii).

(i)面内双折射率(Δn)的值为2×10-3以下。(i) The value of the in-plane birefringence (Δn) is 2×10 −3 or less.

(ii)宽度方向(TD方向)的面内双折射率(Δn)的偏差[Δ(Δn)]为4×10-4以下。(ii) The variation [Δ(Δn)] of the in-plane birefringence (Δn) in the width direction (TD direction) is 4×10 −4 or less.

(iii)以250℃加热30分钟后的面内双折射率(Δnh)的值与加热前的面内双折射率(Δn)的值的差(Δnh-Δn)为±2×10-4以下。(iii) The difference (Δnh-Δn) between the value of the in-plane birefringence (Δnh) after heating at 250° C. for 30 minutes and the value of the in-plane birefringence (Δn) before heating is ±2×10 −4 or less .

(iv)在所述非热塑性聚酰亚胺层的厚度方向上,以一个面为基点的中央部方向上1.5μm的点中的双折射率(Δna)、与以另一个面为基点的中央部方向上1.5μm的点中的双折射率(Δnb)的差(Δna-Δnb)为±0.01以下。(iv) In the thickness direction of the non-thermoplastic polyimide layer, the birefringence (Δna) at a point of 1.5 μm in the direction of the central portion based on one surface and the center based on the other surface The difference (Δna−Δnb) of the birefringence (Δnb) in the point of 1.5 μm in the partial direction was ±0.01 or less.

(v)与所述Δna及所述Δnb以及厚度方向的中央部中的双折射率(Δnc)的合计(Δna+Δnb+Δnc)的平均值(Δnv)的差在所述Δna及Δnb的任一者中均为±0.01以下。(v) The difference from the average value (Δnv) of the total (Δna+Δnb+Δnc) of the Δna and the Δnb and the birefringence (Δnc) in the central portion in the thickness direction is any one of the Δna and Δnb All of them were ±0.01 or less.

(vi)以80℃干燥1小时后,在23℃、50%RH的恒温恒湿下,调湿4小时后的吸湿率(Am)为1.0重量%以下。(vi) After drying at 80° C. for 1 hour, the moisture absorption rate (A m ) after conditioning for 4 hours at a constant temperature and humidity of 23° C. and 50% RH is 1.0% by weight or less.

(vii)以80℃干燥1小时后,在23℃、50%RH的恒温恒湿下,调湿1小时后的吸湿率(Am1)及在相同条件下调湿2小时后的吸湿率(Am2)的差(Am2-Am1)为0.2重量%以下。(vii) After drying at 80°C for 1 hour, under the constant temperature and humidity of 23°C and 50% RH, the moisture absorption rate (A m1 ) after conditioning for 1 hour and the moisture absorption rate (A m1 ) after conditioning for 2 hours under the same conditions m2 ) difference (A m2 -A m1 ) is 0.2 wt % or less.

关于条件(i),若面内双折射率(Δn)的值超过2×10-3,则面内取向的各向异性变大,并成为尺寸稳定性恶化的原因。Δn的值的下限值虽无特别限定,但从面内取向为各向同性且尺寸稳定性提升,另一方面抑制热膨胀系数过度下降且与金属箔的热膨胀系数不匹配所致的翘曲的观点来看,优选设为2×10-4以上。从以上观点来看,绝缘树脂层的面内双折射率(Δn)的值优选为2×10-4以上且8×10-4以下的范围内,更优选为2×10-4以上且6×10-4以下的范围内。Regarding the condition (i), when the value of the in-plane birefringence (Δn) exceeds 2×10 −3 , the anisotropy of the in-plane orientation increases, which causes deterioration of dimensional stability. Although the lower limit of the value of Δn is not particularly limited, the in-plane orientation becomes isotropic and the dimensional stability is improved, and on the other hand, the thermal expansion coefficient is excessively lowered and the warpage caused by the mismatch with the thermal expansion coefficient of the metal foil is suppressed. From a viewpoint, it is preferable to set it as 2x10-4 or more. From the above viewpoints, the value of the in-plane birefringence (Δn) of the insulating resin layer is preferably in the range of 2×10 -4 or more and 8×10 -4 or less, and more preferably 2×10 -4 or more and 6 x10 -4 or less.

另外,关于条件(ii),若TD方向的Δn的偏差[Δ(Δn)]超过4×10-4,则面内取向的偏差变大,并成为尺寸变化率的面内偏差的原因。TD方向的Δn的偏差[Δ(Δn)]优选2×10-4以下,更有选1.2×10-4以下。若为此种范围内,则例如即便在按比例放大(scale up)了的情况下,也能够维持高尺寸精度。In addition, regarding condition (ii), when the variation in Δn in the TD direction [Δ(Δn)] exceeds 4×10 −4 , the variation in the in-plane orientation increases, which causes the in-plane variation in the dimensional change rate. The deviation of Δn in the TD direction [Δ(Δn)] is preferably 2×10 −4 or less, and more preferably 1.2×10 −4 or less. Within such a range, high dimensional accuracy can be maintained, for example, even when it is scaled up.

另外,关于条件(iii),加热前后的面内双折射率(Δn)的值的差(Δnh-Δn)为±2×10-4以下,由此,在加热前后维持面内取向的各向同性,因此,可抑制由加热引起的尺寸变化。加热前后的面内双折射率(Δn)的值的差(Δnh-Δn)优选±1.2×10-4以下,更优选±0.8×10-4以下。In addition, regarding the condition (iii), the difference (Δnh-Δn) in the values of the in-plane birefringence (Δn) before and after heating is ±2×10 −4 or less, whereby the in-plane orientations are maintained in all directions before and after heating. Homogeneity, therefore, dimensional changes caused by heating can be suppressed. The difference (Δnh−Δn) in the values of the in-plane birefringence (Δn) before and after heating is preferably ±1.2×10 −4 or less, and more preferably ±0.8×10 −4 or less.

通过满足所述条件(i)~条件(iii),而构成绝缘树脂层的聚酰亚胺的取向性提高,并且可抑制由加热引起的尺寸变化,因此,尺寸稳定性提升。By satisfying the above-mentioned conditions (i) to (iii), the orientation of the polyimide constituting the insulating resin layer is improved, and the dimensional change due to heating can be suppressed, so that the dimensional stability is improved.

另外,关于所述条件(iv)及条件(v),非热塑性聚酰亚胺层的厚度方向上的双折射率的差(Δna-Δnb)为±0.01以下,且所述Δna及Δnb与平均值(Δnv)的差(Δnv-Δna)及差(Δnv-Δnb)均为±0.01以下,由此,厚度方向上的聚酰亚胺取向的均质性提高,可抑制翘曲的发生。差(Δnv-Δna)及差(Δnv-Δnb)均优选±0.008以下,更优选±0.006以下。In addition, regarding the conditions (iv) and (v), the difference (Δna-Δnb) in the birefringence in the thickness direction of the non-thermoplastic polyimide layer is ±0.01 or less, and the Δna and Δnb are the same as the average The difference (Δnv-Δna) and the difference (Δnv-Δnb) of the values (Δnv) are both ±0.01 or less, whereby the homogeneity of the polyimide orientation in the thickness direction is improved, and the occurrence of warpage can be suppressed. Both the difference (Δnv-Δna) and the difference (Δnv-Δnb) are preferably ±0.008 or less, and more preferably ±0.006 or less.

另外,通过满足所述条件(i)与条件(ii)与条件(iv)与条件(v),而构成绝缘树脂层的聚酰亚胺的取向性提高,尺寸稳定性提升,并且翘曲的发生得到抑制。In addition, by satisfying the condition (i), condition (ii), condition (iv), and condition (v), the orientation of the polyimide constituting the insulating resin layer is improved, the dimensional stability is improved, and the warpage is improved. occurrence is suppressed.

另外,关于所述条件(vi)及条件(vii),若绝缘树脂层的吸湿率变高,则存在因温度、压力等环境变化而容易发生尺寸变化或翘曲这一问题。图1是对于吸湿率及每单位时间的吸湿率变化不同的两种树脂,以80℃干燥1小时后,在23℃、50%RH的恒温恒湿下显示出吸湿率的变化的图表。在显示出如图1所示的吸湿特性的两种树脂的比较中,获得如下见解:不仅吸湿率而且每单位时间的吸湿率变化(Am2-Am1)也少的树脂对于尺寸变化或翘曲的减少来说更有效果。因此,通过满足所述(vi)及条件(vii),可抑制由电路加工工序、基板层叠工序及零件安装工序时的环境变化(例如,高温·高压环境、湿度变化等)引起的尺寸变化或翘曲。在所述Am超过1.0重量%的情况下或者(Am2-Am1)超过0.2重量%的情况下,由于电路加工工序、基板层叠工序及零件安装工序时的高温或高压、湿度变化等而尺寸变化量变大,尺寸精度降低,或者发生翘曲。In addition, regarding the above-mentioned conditions (vi) and (vii), when the moisture absorption rate of the insulating resin layer becomes high, there is a problem that dimensional change and warpage are likely to occur due to environmental changes such as temperature and pressure. FIG. 1 is a graph showing changes in moisture absorption at a constant temperature and humidity of 23°C and 50% RH after drying at 80°C for 1 hour for two resins having different moisture absorption rates and changes in moisture absorption per unit time. In the comparison of the two resins showing the moisture absorption characteristics as shown in Fig. 1, the following insight was obtained: a resin having less not only a moisture absorption rate but also a change in moisture absorption rate per unit time (A m2 - A m1 ) is less sensitive to dimensional change or warpage It is more effective for the reduction of the curve. Therefore, by satisfying the above (vi) and condition (vii), it is possible to suppress the dimensional change or the warping. When the above-mentioned A m exceeds 1.0 wt % or when (A m2 -A m1 ) exceeds 0.2 wt %, due to high temperature or high pressure, humidity changes, etc. The amount of dimensional change increases, the dimensional accuracy decreases, or warpage occurs.

通过满足所述条件(i)及条件(ii),并且满足条件(iii)、或者条件(iv)与条件(v)两者、或者条件(vi)与条件(vii)两者,可有效地抑制由电路加工工序、基板层叠工序及零件安装工序时的环境变化(例如,高温·高压环境、湿度变化等)引起的尺寸变化或翘曲。另一方面,在不具备条件(i)与条件(ii)与条件(iii)的组合、或者条件(i)与条件(ii)与条件(iv)与条件(v)的组合、或者条件(i)与条件(ii)与条件(vi)与条件(vii)的组合中的任一组合的情况下,由于电路加工工序、基板层叠工序及零件安装工序时的高温或高压、湿度变化等而尺寸变化量变大,尺寸精度降低,或者发生翘曲。By satisfying the condition (i) and the condition (ii), and satisfying the condition (iii), or both the condition (iv) and the condition (v), or both the condition (vi) and the condition (vii), it is possible to effectively Dimensional changes and warpage caused by environmental changes (eg, high temperature and high pressure environments, humidity changes, etc.) during circuit processing, substrate lamination, and component mounting processes are suppressed. On the other hand, in the absence of a combination of condition (i) and condition (ii) and condition (iii), or a combination of condition (i) and condition (ii) and condition (iv) and condition (v), or condition ( In the case of any combination of i) and the combination of condition (ii) and condition (vi) and condition (vii), due to high temperature or high pressure, humidity change, etc. The amount of dimensional change increases, the dimensional accuracy decreases, or warpage occurs.

本实施方式的覆金属层叠板例如在应用为电路基板材料的情况下,为了防止翘曲的发生或尺寸稳定性的降低,重要的是绝缘树脂层的热膨胀系数(Coefficient ofThermal Expansion,CTE)为10ppm/K以上且30ppm/K以下的范围内,优选以10ppm/K以上且25ppm/K以下的范围内为宜。若CTE小于10ppm/K、或超过30ppm/K,则发生翘曲、或者尺寸稳定性降低。另外,本实施方式的覆金属层叠板中,相对于包含铜箔等的金属层的CTE,绝缘树脂层的CTE更优选±5ppm/K以下的范围内,最优选±2ppm/K以下的范围内。For example, when the metal-clad laminate of the present embodiment is used as a circuit board material, it is important that the thermal expansion coefficient (CTE) of the insulating resin layer is 10 ppm in order to prevent the occurrence of warpage and the reduction of dimensional stability. /K or more and within a range of 30 ppm/K or less, preferably within a range of 10 ppm/K or more and 25 ppm/K or less. When CTE is less than 10 ppm/K or exceeds 30 ppm/K, warpage occurs or dimensional stability decreases. In addition, in the metal-clad laminate of the present embodiment, the CTE of the insulating resin layer is more preferably within a range of ±5ppm/K or less, and most preferably within a range of ±2ppm/K or less, with respect to the CTE of the metal layer including copper foil or the like. .

绝缘树脂层中,非热塑性聚酰亚胺层构成低热膨胀性的聚酰亚胺层,热塑性聚酰亚胺层构成高热膨胀性的聚酰亚胺层。这里,低热膨胀性的聚酰亚胺层是指热膨胀系数(CTE)优选1ppm/K以上且25ppm/K以下的范围内、更优选3ppm/K以上且25ppm/K以下的范围内的聚酰亚胺层。另外,高热膨胀性的聚酰亚胺层是指CTE优选35ppm/K以上、更优选35ppm/K以上且80ppm/K以下的范围内、进而优选35ppm/K以上且70ppm/K以下的范围内的聚酰亚胺层。聚酰亚胺层可通过适当变更所使用的原料的组合、厚度、干燥·固化条件而制成具有所需CTE的聚酰亚胺层。In the insulating resin layer, the non-thermoplastic polyimide layer constitutes a low thermal expansion polyimide layer, and the thermoplastic polyimide layer constitutes a high thermal expansion polyimide layer. Here, the low thermal expansion polyimide layer refers to a polyimide having a coefficient of thermal expansion (CTE) within a range of preferably 1 ppm/K or more and 25 ppm/K or less, and more preferably 3 ppm/K or more and 25 ppm/K or less. Amine layer. In addition, the polyimide layer with high thermal expansion means a CTE of preferably 35 ppm/K or more, more preferably 35 ppm/K or more and 80 ppm/K or less, and still more preferably 35 ppm/K or more and 70 ppm/K or less. polyimide layer. The polyimide layer can be a polyimide layer having a desired CTE by appropriately changing the combination of the raw materials used, the thickness, and drying and curing conditions.

绝缘树脂层的厚度可根据使用目的而设定为既定范围内的厚度,例如优选处于4μm~50μm的范围内,更优选处于11μm~26μm的范围内。若绝缘树脂层的厚度不满所述下限值,则有时无法保证电绝缘性,或产生因操作性降低而在制造工序中处理变得困难等问题。另一方面,若绝缘树脂层的厚度超过所述上限值,则为了控制面内双折射率(Δn)或厚度方向的双折射率而需要高精度地控制制造条件,从而产生生产性降低等不良状况。The thickness of the insulating resin layer can be set to a thickness within a predetermined range according to the purpose of use. If the thickness of the insulating resin layer is less than the lower limit value, electrical insulating properties may not be ensured, or problems such as handling in the manufacturing process may be difficult due to reduced workability. On the other hand, when the thickness of the insulating resin layer exceeds the upper limit value, it is necessary to control the manufacturing conditions with high precision in order to control the in-plane birefringence (Δn) or the birefringence in the thickness direction, resulting in a decrease in productivity and the like. Bad condition.

另外,绝缘树脂层中,非热塑性聚酰亚胺层的厚度(A)与热塑性聚酰亚胺层的厚度(B)的厚度比((A)/(B))优选为1~20的范围内,更优选2~12的范围内。此外,在非热塑性聚酰亚胺层和/或热塑性聚酰亚胺层的层数为多层的情况下,厚度(A)或厚度(B)是指合计的厚度。若所述比的值不满1,则相对于绝缘树脂层整体的非热塑性聚酰亚胺层变薄,因此面内双折射率(Δn)的偏差容易变大,若所述比的值超过20,则热塑性聚酰亚胺层变薄,因此绝缘树脂层与金属层的粘接可靠性容易降低。这里,面内双折射率(Δn)的控制与构成绝缘树脂层的各聚酰亚胺层的树脂构成及其厚度有关。关于作为赋予粘接性即高热膨胀性或软化的树脂构成的热塑性聚酰亚胺层,其厚度越大,则对绝缘树脂层的Δn的值造成的影响越大。所以,优选的是增大非热塑性聚酰亚胺层的厚度的比率,减小热塑性聚酰亚胺层的厚度的比率,并减小绝缘树脂层的Δn的值及其偏差。如后文所述,本实施方式中设计成,即便在减小热塑性聚酰亚胺层的厚度的比率的情况下,热塑性聚酰亚胺层也含有既定量的选自通式(2)及通式(3)中的二胺残基,由此可确保金属层与绝缘树脂层的粘接性。In addition, in the insulating resin layer, the thickness ratio ((A)/(B)) of the thickness (A) of the non-thermoplastic polyimide layer to the thickness (B) of the thermoplastic polyimide layer is preferably in the range of 1 to 20 within the range of 2 to 12 is more preferable. In addition, when the number of layers of the non-thermoplastic polyimide layer and/or the thermoplastic polyimide layer is a plurality of layers, the thickness (A) or the thickness (B) means the total thickness. If the value of the ratio is less than 1, the non-thermoplastic polyimide layer with respect to the entire insulating resin layer becomes thinner, and thus the variation in the in-plane birefringence (Δn) tends to increase. If the value of the ratio exceeds 20 , the thermoplastic polyimide layer becomes thinner, and thus the adhesion reliability between the insulating resin layer and the metal layer tends to decrease. Here, the control of the in-plane birefringence (Δn) is related to the resin composition and thickness of each polyimide layer constituting the insulating resin layer. Regarding the thermoplastic polyimide layer made of resin that imparts adhesiveness, that is, high thermal expansion or softening, the larger the thickness thereof, the greater the influence on the value of Δn of the insulating resin layer. Therefore, it is preferable to increase the ratio of the thickness of the non-thermoplastic polyimide layer, decrease the ratio of the thickness of the thermoplastic polyimide layer, and reduce the value of Δn of the insulating resin layer and its deviation. As will be described later, in this embodiment, even when the ratio of the thickness of the thermoplastic polyimide layer is reduced, the thermoplastic polyimide layer is designed to contain a predetermined amount selected from the group consisting of general formula (2) and The diamine residue in the general formula (3) can thereby ensure the adhesiveness between the metal layer and the insulating resin layer.

从更大地表现出绝缘树脂层的尺寸精度的改善效果的观点来看,本实施方式的覆金属层叠板优选的是,宽度方向(TD方向)的长度(膜宽度)以优选490mm以上且1200mm以下的范围内、更优选520mm以上且1100mm以下的范围内为宜,且长条状的长度为20m以上。在连续地制造本实施方式的覆金属层叠板的情况下,宽度方向(TD方向)越宽,则发明的效果越尤其变显著。此外,也包括连续地制造本实施方式的覆金属层叠板之后,在长条的覆金属层叠板的长度方向(纵向(Machine Direction,MD)方向)及TD方向上以某一定的值切割(slit)所得的覆金属层叠板。In the metal-clad laminate of the present embodiment, it is preferable that the length (film width) in the width direction (TD direction) is preferably 490 mm or more and 1200 mm or less, from the viewpoint of exhibiting a greater effect of improving the dimensional accuracy of the insulating resin layer. Within the range of 520 mm or more and 1100 mm or less, the length of the long strip is preferably 20 m or more. In the case where the metal-clad laminate of the present embodiment is continuously produced, the effect of the invention is particularly remarkable as the width direction (TD direction) is wider. In addition, after continuously manufacturing the metal-clad laminate of the present embodiment, the long metal-clad laminate is cut by a certain value in the longitudinal direction (machine direction (MD) direction) and the TD direction of the long metal-clad laminate. ) obtained metal-clad laminate.

另外,绝缘树脂层制成聚酰亚胺膜时的拉伸弹性系数优选为3.0GPa~10.0GPa的范围内,更优选为4.5GPa~8.0GPa的范围内。若制成聚酰亚胺膜时的拉伸弹性系数不满3.0GPa,则聚酰亚胺自身的强度降低,由此,当将覆金属层叠板加工为电路基板时,有时产生绝缘树脂层的开裂等操作上的问题。相反地,若制成聚酰亚胺膜时的拉伸弹性系数超过10.0GPa,则覆金属层叠板的对于弯折的刚性上升,结果,当将覆金属层叠板弯折时,对金属布线施加的弯曲应力上升,耐弯折性降低。通过将制成聚酰亚胺膜时的拉伸弹性系数设为所述范围内,可保证绝缘树脂层的强度与柔软性。Moreover, when the insulating resin layer is used as a polyimide film, it is preferable to exist in the range of 3.0GPa - 10.0GPa, and, as for the tensile elastic modulus, it is more preferable to exist in the range of 4.5GPa - 8.0GPa. When the tensile modulus of elasticity at the time of making a polyimide film is less than 3.0 GPa, the strength of the polyimide itself is lowered, and as a result, when the metal-clad laminate is processed into a circuit board, cracking of the insulating resin layer may occur. and other operational problems. Conversely, when the tensile elastic modulus of the polyimide film exceeds 10.0 GPa, the rigidity of the metal-clad laminate against bending increases, and as a result, when the metal-clad laminate is bent, the metal wiring is applied The bending stress increases and the bending resistance decreases. The strength and flexibility of the insulating resin layer can be ensured by setting the tensile modulus of elasticity when the polyimide film is formed into the above-mentioned range.

(非热塑性聚酰亚胺)(Non-thermoplastic polyimide)

本实施方式中,优选的是构成非热塑性聚酰亚胺层的非热塑性聚酰亚胺包含四羧酸残基及二胺残基,且这些残基均包含芳香族基。通过非热塑性聚酰亚胺所含的四羧酸残基及二胺残基均包含芳香族基,而容易形成非热塑性聚酰亚胺的秩序结构,且抑制绝缘树脂层在高温环境下的面内双折射率(Δn)的变化量,减小加热前后的面内双折射率(Δn)的值的差(Δnh-Δn),并且可抑制面内双折射率(Δn)的偏差。进而,可抑制厚度方向的双折射率变化。In this embodiment, it is preferable that the non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer contains a tetracarboxylic acid residue and a diamine residue, and these residues all contain an aromatic group. Since both the tetracarboxylic acid residue and the diamine residue contained in the non-thermoplastic polyimide contain aromatic groups, the ordered structure of the non-thermoplastic polyimide can be easily formed, and the surface of the insulating resin layer in a high temperature environment is suppressed. The amount of change in the in-plane birefringence (Δn) reduces the difference (Δnh-Δn) in the in-plane birefringence (Δn) values before and after heating, and can suppress variations in the in-plane birefringence (Δn). Furthermore, the birefringence change in the thickness direction can be suppressed.

此外,本发明中,所谓四羧酸残基,表示由四羧酸二酐所衍生的四价基,所谓二胺残基,表示由二胺化合物所衍生的二价基。另外,关于“二胺化合物”,末端的两个氨基中的氢原子可经取代,例如可为-NR3R4(这里,R3、R4独立地表示烷基等任意的取代基)。Further, in the present invention, the term "tetracarboxylic acid residue" refers to a tetravalent group derived from tetracarboxylic dianhydride, and the term "diamine residue" refers to a divalent group derived from a diamine compound. In addition, regarding the "diamine compound", the hydrogen atoms in the two terminal amino groups may be substituted, for example, -NR 3 R 4 (here, R 3 and R 4 independently represent arbitrary substituents such as an alkyl group).

非热塑性聚酰亚胺所含的四羧酸残基并无特别限制,例如可优选地列举:由均苯四甲酸二酐(pyromellitic dianhydride,PMDA)所衍生的四羧酸残基(以下也称作PMDA残基)、由3,3',4,4'-联苯四羧酸二酐(3,3',4,4'-biphenyl tetracarboxylicdianhydride,BPDA)所衍生的四羧酸残基(以下也称作BPDA残基)。这些四羧酸残基容易形成秩序结构,可抑制高温环境下的面内双折射率(Δn)的变化量并减小加热前后的面内双折射率(Δn)的值的差(Δnh-Δn)。进而,可抑制厚度方向的双折射率变化。另外,PMDA残基为发挥控制热膨胀系数及控制玻璃化转变温度的作用的残基。进而,关于BPDA残基,由于四羧酸残基中不存在极性基且分子量比较大,因此还可期待降低非热塑性聚酰亚胺的酰亚胺基浓度并抑制绝缘树脂层的吸湿的效果。从这种观点来看,相对于非热塑性聚酰亚胺所含的所有四羧酸残基100摩尔份,PMDA残基和/或BPDA残基的合计量以优选50摩尔份以上、更优选50摩尔份~100摩尔份的范围内、最优选70摩尔份~100摩尔份的范围内为宜。The tetracarboxylic acid residue contained in the non-thermoplastic polyimide is not particularly limited. For example, a tetracarboxylic acid residue derived from pyromellitic dianhydride (PMDA) (hereinafter also referred to as as PMDA residues), tetracarboxylic acid residues (below Also known as BPDA residues). These tetracarboxylic acid residues tend to form ordered structures, suppress the amount of change in in-plane birefringence (Δn) in a high-temperature environment, and reduce the difference in in-plane birefringence (Δn) values before and after heating (Δnh−Δn). ). Furthermore, the birefringence change in the thickness direction can be suppressed. In addition, the PMDA residue is a residue that functions to control the thermal expansion coefficient and control the glass transition temperature. Furthermore, with regard to the BPDA residue, since there is no polar group in the tetracarboxylic acid residue and the molecular weight is relatively large, the effect of reducing the imide group concentration of the non-thermoplastic polyimide and suppressing the moisture absorption of the insulating resin layer can also be expected. . From this point of view, the total amount of PMDA residues and/or BPDA residues is preferably 50 mole parts or more, more preferably 50 mole parts relative to 100 mole parts of all tetracarboxylic acid residues contained in the non-thermoplastic polyimide. It is suitable to exist in the range of 70 mol part - 100 mol part most preferably in the range of mol part - 100 mol part.

非热塑性聚酰亚胺所含的其他四羧酸残基例如可列举由以下的芳香族四羧酸二酐所衍生的四羧酸残基:2,3',3,4'-联苯四羧酸二酐、2,2',3,3'-联苯四羧酸二酐、3,3',4,4'-二苯基砜四羧酸二酐、4,4'-氧双邻苯二甲酸酐、2,2',3,3'-二苯甲酮四羧酸二酐、2,3,3',4'-二苯甲酮四羧酸二酐或3,3',4,4'-二苯甲酮四羧酸二酐、2,3',3,4'-二苯基醚四羧酸二酐、双(2,3-二羧基苯基)醚二酐、3,3”,4,4”-对三联苯四羧酸二酐、2,3,3”,4”-对三联苯四羧酸二酐或2,2”,3,3”-对三联苯四羧酸二酐、2,2-双(2,3-二羧基苯基)-丙烷二酐或2,2-双(3,4-二羧基苯基)-丙烷二酐、双(2,3-二羧基苯基)甲烷二酐或双(3,4-二羧基苯基)甲烷二酐、双(2,3-二羧基苯基)砜二酐或双(3,4-二羧基苯基)砜二酐、1,1-双(2,3-二羧基苯基)乙烷二酐或1,1-双(3,4-二羧基苯基)乙烷二酐、1,2,7,8-菲-四羧酸二酐、1,2,6,7-菲-四羧酸二酐或1,2,9,10-菲-四羧酸二酐、2,3,6,7-蒽四羧酸二酐、2,2-双(3,4-二羧基苯基)四氟丙烷二酐、2,3,5,6-环己烷二酐、1,2,5,6-萘四羧酸二酐、1,4,5,8-萘四羧酸二酐、2,3,6,7-萘四羧酸二酐、4,8-二甲基-1,2,3,5,6,7-六氢萘-1,2,5,6-四羧酸二酐、2,6-二氯萘-1,4,5,8-四羧酸二酐或2,7-二氯萘-1,4,5,8-四羧酸二酐、2,3,6,7-四氯萘-1,4,5,8-四羧酸二酐或1,4,5,8-四氯萘-2,3,6,7-四羧酸二酐、2,3,8,9-苝-四羧酸二酐、3,4,9,10-苝-四羧酸二酐、4,5,10,11-苝-四羧酸二酐或5,6,11,12-苝-四羧酸二酐、环戊烷-1,2,3,4-四羧酸二酐、吡嗪-2,3,5,6-四羧酸二酐、吡咯烷-2,3,4,5-四羧酸二酐、噻吩-2,3,4,5-四羧酸二酐、4,4'-双(2,3-二羧基苯氧基)二苯基甲烷二酐等。Examples of other tetracarboxylic acid residues contained in the non-thermoplastic polyimide include tetracarboxylic acid residues derived from the following aromatic tetracarboxylic dianhydrides: 2,3',3,4'-biphenyltetrakis Carboxylic dianhydride, 2,2',3,3'-biphenyltetracarboxylic dianhydride, 3,3',4,4'-diphenylsulfone tetracarboxylic dianhydride, 4,4'-oxybis Phthalic anhydride, 2,2',3,3'-benzophenone tetracarboxylic dianhydride, 2,3,3',4'-benzophenone tetracarboxylic dianhydride or 3,3' ,4,4'-benzophenone tetracarboxylic dianhydride, 2,3',3,4'-diphenyl ether tetracarboxylic dianhydride, bis(2,3-dicarboxyphenyl) ether dianhydride , 3,3",4,4"-p-terphenyltetracarboxylic dianhydride, 2,3,3",4"-p-terphenyltetracarboxylic dianhydride or 2,2",3,3"-p-terphenyltetracarboxylic dianhydride terphenyltetracarboxylic dianhydride, 2,2-bis(2,3-dicarboxyphenyl)-propane dianhydride or 2,2-bis(3,4-dicarboxyphenyl)-propane dianhydride, bis( 2,3-Dicarboxyphenyl)methane dianhydride or bis(3,4-dicarboxyphenyl)methane dianhydride, bis(2,3-dicarboxyphenyl)sulfone dianhydride or bis(3,4-di Carboxyphenyl)sulfone dianhydride, 1,1-bis(2,3-dicarboxyphenyl)ethanedianhydride or 1,1-bis(3,4-dicarboxyphenyl)ethanedianhydride, 1,1-bis(3,4-dicarboxyphenyl)ethanedianhydride 2,7,8-phenanthrene-tetracarboxylic dianhydride, 1,2,6,7-phenanthrene-tetracarboxylic dianhydride or 1,2,9,10-phenanthrene-tetracarboxylic dianhydride, 2,3, 6,7-Anthracenetetracarboxylic dianhydride, 2,2-bis(3,4-dicarboxyphenyl)tetrafluoropropane dianhydride, 2,3,5,6-cyclohexanedianhydride, 1,2, 5,6-naphthalenetetracarboxylic dianhydride, 1,4,5,8-naphthalenetetracarboxylic dianhydride, 2,3,6,7-naphthalenetetracarboxylic dianhydride, 4,8-dimethyl-1 ,2,3,5,6,7-hexahydronaphthalene-1,2,5,6-tetracarboxylic dianhydride, 2,6-dichloronaphthalene-1,4,5,8-tetracarboxylic dianhydride or 2,7-dichloronaphthalene-1,4,5,8-tetracarboxylic dianhydride, 2,3,6,7-tetrachloronaphthalene-1,4,5,8-tetracarboxylic dianhydride or 1 ,4,5,8-tetrachloronaphthalene-2,3,6,7-tetracarboxylic dianhydride, 2,3,8,9-perylene-tetracarboxylic dianhydride, 3,4,9,10-perylene -Tetracarboxylic dianhydride, 4,5,10,11-perylene-tetracarboxylic dianhydride or 5,6,11,12-perylene-tetracarboxylic dianhydride, cyclopentane-1,2,3,4 -Tetracarboxylic dianhydride, pyrazine-2,3,5,6-tetracarboxylic dianhydride, pyrrolidine-2,3,4,5-tetracarboxylic dianhydride, thiophene-2,3,4,5 -Tetracarboxylic dianhydride, 4,4'-bis(2,3-dicarboxyphenoxy)diphenylmethane dianhydride, etc.

非热塑性聚酰亚胺所含的二胺残基可优选地列举由通式(1)所表示的二胺化合物所衍生的二胺残基。Preferable examples of the diamine residue contained in the non-thermoplastic polyimide include diamine residues derived from a diamine compound represented by the general formula (1).

[化3][hua 3]

Figure BDA0001811565610000081
Figure BDA0001811565610000081

通式(1)中,连结基Z表示单键或-COO-,Y独立地表示可经卤素原子或苯基取代的碳数1~3的一价烃或碳数1~3的烷氧基、或碳数1~3的全氟烷基、或烯基,n表示0~2的整数,p及q独立地表示0~4的整数。这里,所谓“独立地”,是指所述式(1)中,多个取代基Y、整数p、整数q可相同,也可不同。In the general formula (1), the linking group Z represents a single bond or -COO-, and Y independently represents a monovalent hydrocarbon having 1 to 3 carbon atoms or an alkoxy group having 1 to 3 carbon atoms which may be substituted by a halogen atom or a phenyl group , or a perfluoroalkyl group having 1 to 3 carbon atoms, or an alkenyl group, n represents an integer of 0 to 2, and p and q independently represent an integer of 0 to 4. Here, "independently" means that in the formula (1), a plurality of substituents Y, integer p, and integer q may be the same or different.

由通式(1)所表示的二胺化合物所衍生的二胺残基(以下,有时记作“二胺残基(1)”)容易形成秩序结构,提高尺寸稳定性,且可有效地抑制尤其是高温环境下的面内双折射率(Δn)的变化量,并且可将加热前后的面内双折射率(Δn)的值的差(Δnh-Δn)抑制得小。进而,可有效地抑制厚度方向的双折射率变化。从这种观点来看,二胺残基(1)以相对于非热塑性聚酰亚胺所含的所有二胺残基100摩尔份而以20摩尔份以上、优选70摩尔份~95摩尔份的范围内、更优选80摩尔份~90摩尔份的范围内含有为宜。The diamine residue (hereinafter, sometimes referred to as "diamine residue (1)") derived from the diamine compound represented by the general formula (1) tends to form an ordered structure, improves dimensional stability, and can effectively inhibit In particular, the amount of change in the in-plane birefringence (Δn) in a high-temperature environment can be suppressed to a small value (Δnh−Δn) between the values of the in-plane birefringence (Δn) before and after heating. Furthermore, the birefringence change in the thickness direction can be effectively suppressed. From this viewpoint, the amount of the diamine residue (1) is 20 mol parts or more, preferably 70 mol parts to 95 mol parts with respect to 100 mol parts of all the diamine residues contained in the non-thermoplastic polyimide. Within the range, it is more preferable to contain within the range of 80 to 90 mol parts.

二胺残基(1)的优选具体例可列举由以下的二胺化合物所衍生的二胺残基:对苯二胺(p-PDA)、2,2'-二甲基-4,4'-二氨基联苯(m-TB)、2,2'-二乙基-4,4'-二氨基联苯(2,2'-diethyl-4,4'-diaminobiphenyl,m-EB)、2,2'-二乙氧基-4,4'-二氨基联苯(2,2'-diethoxy-4,4'-diaminobiphenyl,m-EOB)、2,2'-二丙氧基-4,4'-二氨基联苯(2,2'-dipropoxy-4,4'-diaminobiphenyl,m-POB)、2,2'-正丙基-4,4'-二氨基联苯(2,2'-n-propyl-4,4'-diaminobiphenyl,m-NPB)、2,2'-二乙烯基-4,4'-二氨基联苯(2,2'-divinyl-4,4'-diaminobiphenyl,VAB)、4,4'-二氨基联苯、4,4'-二氨基-2,2'-双(三氟甲基)联苯(4,4'-diamino-2,2'-bis(trifluoromethyl)biphenyl,TFMB)等。这些二胺化合物中,尤其是2,2'-二甲基-4,4'-二氨基联苯(m-TB)容易形成秩序结构,可抑制高温环境下的面内双折射率(Δn)的变化量并减小加热前后的面内双折射率(Δn)的值的差(Δnh-Δn),进而可抑制厚度方向的双折射率变化,因此尤其优选。Preferred specific examples of the diamine residue (1) include diamine residues derived from the following diamine compounds: p-phenylenediamine (p-PDA), 2,2'-dimethyl-4,4' -Diaminobiphenyl (m-TB), 2,2'-diethyl-4,4'-diaminobiphenyl (2,2'-diethyl-4,4'-diaminobiphenyl, m-EB), 2 ,2'-diethoxy-4,4'-diaminobiphenyl (2,2'-diethoxy-4,4'-diaminobiphenyl, m-EOB), 2,2'-dipropoxy-4, 4'-diaminobiphenyl (2,2'-dipropoxy-4,4'-diaminobiphenyl, m-POB), 2,2'-n-propyl-4,4'-diaminobiphenyl (2,2' -n-propyl-4,4'-diaminobiphenyl, m-NPB), 2,2'-divinyl-4,4'-diaminobiphenyl (2,2'-divinyl-4,4'-diaminobiphenyl, VAB), 4,4'-diaminobiphenyl, 4,4'-diamino-2,2'-bis(trifluoromethyl)biphenyl (4,4'-diamino-2,2'-bis( trifluoromethyl) biphenyl, TFMB) and so on. Among these diamine compounds, 2,2'-dimethyl-4,4'-diaminobiphenyl (m-TB) is easy to form an ordered structure and can suppress the in-plane birefringence (Δn) in a high temperature environment This is particularly preferable because the change in the in-plane birefringence (Δn) before and after heating can be reduced (Δnh−Δn), and the change in birefringence in the thickness direction can be suppressed.

另外,为了降低绝缘树脂层的弹性系数,并提升伸长率及耐弯折性等,优选的是非热塑性聚酰亚胺包含选自由下述通式(2)及通式(3)所表示的二胺残基所组成的群组中的至少一种二胺残基。In addition, in order to reduce the modulus of elasticity of the insulating resin layer and improve elongation, bending resistance, etc., it is preferable that the non-thermoplastic polyimide contains a compound selected from the group consisting of the following general formula (2) and general formula (3) At least one diamine residue in the group consisting of diamine residues.

[化4][hua 4]

Figure BDA0001811565610000091
Figure BDA0001811565610000091

Figure BDA0001811565610000092
Figure BDA0001811565610000092

所述式(2)及式(3)中,R5、R6、R7及R8分别独立地表示卤素原子、或者碳数1~4的可经卤素原子取代的烷基或烷氧基、或烯基,X独立地表示选自-O-、-S-、-CH2-、-CH(CH3)-、-C(CH3)2-、-CO-、-COO-、-SO2-、-NH-或-NHCO-中的二价基,X1及X2分别独立地表示单键、选自-O-、-S-、-CH2-、-CH(CH3)-、-C(CH3)2-、-CO-、-COO-、-SO2-、-NH-或-NHCO-中的二价基,但将X1及X2两者为单键的情况除外,m、n、o及p独立地表示0~4的整数。In the above formulas (2) and (3), R 5 , R 6 , R 7 and R 8 each independently represent a halogen atom, or a halogen atom-substituted alkyl or alkoxy group having 1 to 4 carbon atoms. , or alkenyl, X independently represents selected from -O-, -S-, -CH 2 -, -CH(CH 3 )-, -C(CH 3 ) 2 -, -CO-, -COO-, - Divalent group in SO 2 -, -NH- or -NHCO-, X 1 and X 2 each independently represent a single bond, selected from -O-, -S-, -CH 2 -, -CH(CH 3 ) A divalent group in -, -C(CH 3 ) 2 -, -CO-, -COO-, -SO 2 -, -NH- or -NHCO-, but both X 1 and X 2 are single bonds Unless otherwise specified, m, n, o, and p independently represent an integer of 0 to 4.

此外,所谓“独立地”,是指所述式(2)、式(3)中的一者或两者中,多个连结基X、连结基X1与连结基X2、多个取代基R5、取代基R6、取代基R7、取代基R8、进而整数m、整数n、整数o、整数p可相同,也可不同。In addition, "independently" means that in one or both of the above-mentioned formula (2) and formula (3), a plurality of linking groups X, a linking group X 1 and a linking group X 2 , a plurality of substituents R 5 , substituent R 6 , substituent R 7 , substituent R 8 , further integer m, integer n, integer o, and integer p may be the same or different.

通式(2)及通式(3)所表示的二胺残基由于具有弯曲性的部位,因此可对绝缘树脂层赋予柔软性。这里,通式(3)所表示的二胺残基由于苯环为4个,因此为了抑制热膨胀系数(CTE)的增加,优选的是将键结于苯环的末端基设为对位。另外,从对绝缘树脂层赋予柔软性并且抑制热膨胀系数(CTE)的增加的观点来看,通式(2)及通式(3)所表示的二胺残基以相对于非热塑性聚酰亚胺所含的所有二胺残基100摩尔份而以优选5摩尔份~30摩尔份的范围内、更优选10摩尔份~20摩尔份的范围内含有为宜。若通式(2)及通式(3)所表示的二胺残基小于5摩尔份,则有时绝缘树脂层的弹性系数增加,伸长率降低,产生耐弯折性等的降低,若通式(2)及通式(3)所表示的二胺残基超过30摩尔份,则有时分子的取向性降低,低CTE化变得困难。The diamine residues represented by the general formula (2) and the general formula (3) can impart flexibility to the insulating resin layer because they have a flexible portion. Here, since the diamine residue represented by the general formula (3) has four benzene rings, it is preferable to set the terminal group bonded to the benzene ring to the para position in order to suppress an increase in the coefficient of thermal expansion (CTE). In addition, from the viewpoint of imparting flexibility to the insulating resin layer and suppressing an increase in the coefficient of thermal expansion (CTE), the diamine residues represented by the general formula (2) and the general formula (3) are relatively low relative to the non-thermoplastic polyimide. It is preferable to contain 100 mol parts of all the diamine residues contained in an amine in the range of preferably 5 mol parts - 30 mol parts, and more preferably 10 mol parts - 20 mol parts. When the diamine residues represented by the general formula (2) and the general formula (3) are less than 5 mole parts, the elastic modulus of the insulating resin layer may increase, the elongation may decrease, and the bending resistance and the like may decrease. When the diamine residue represented by the formula (2) and the general formula (3) exceeds 30 mole parts, the orientation of the molecules may be lowered, and it may become difficult to reduce the CTE.

通式(2)所表示的二胺残基优选的是m、n及o的一个以上为0者,另外,基R5、基R6及基R7的优选例可列举:碳数1~4的可经卤素原子取代的烷基、或碳数1~3的烷氧基、或碳数2~3的烯基。另外,通式(2)中,连结基X的优选例可列举:-O-、-S-、-CH2-、-CH(CH3)-、-SO2-或-CO-。通式(2)所表示的二胺残基的优选具体例可列举由以下的二胺化合物所衍生的二胺残基:1,3-双(4-氨基苯氧基)苯(TPE-R)、1,4-双(4-氨基苯氧基)苯(1,4-bis(4-aminophenoxy)benzene,TPE-Q)、双(4-氨基苯氧基)-2,5-二-叔丁基苯(bis(4-aminophenoxy)-2,5-di-tert-butyl benzene,DTBAB)、4,4-双(4-氨基苯氧基)二苯甲酮(4,4-bis(4-aminophenoxy)benzophenone,BAPK)、1,3-双[2-(4-氨基苯基)-2-丙基]苯、1,4-双[2-(4-氨基苯基)-2-丙基]苯等。As for the diamine residue represented by the general formula (2), one or more of m, n, and o is preferably 0, and preferable examples of the group R 5 , the group R 6 , and the group R 7 include 1 to 1 carbon atoms. The alkyl group of 4 which may be substituted by a halogen atom, or the alkoxy group having 1 to 3 carbon atoms, or the alkenyl group having 2 to 3 carbon atoms. In addition, in the general formula (2), preferable examples of the linking group X include -O-, -S-, -CH 2 -, -CH(CH 3 )-, -SO 2 - or -CO-. Preferred specific examples of the diamine residue represented by the general formula (2) include diamine residues derived from the following diamine compounds: 1,3-bis(4-aminophenoxy)benzene (TPE-R ), 1,4-bis(4-aminophenoxy)benzene (1,4-bis(4-aminophenoxy)benzene, TPE-Q), bis(4-aminophenoxy)-2,5-di- tert-butylbenzene (bis(4-aminophenoxy)-2,5-di-tert-butyl benzene, DTBAB), 4,4-bis(4-aminophenoxy) benzophenone (4,4-bis( 4-aminophenoxy)benzophenone, BAPK), 1,3-bis[2-(4-aminophenyl)-2-propyl]benzene, 1,4-bis[2-(4-aminophenyl)-2- Propyl]benzene, etc.

通式(3)所表示的二胺残基优选的是m、n、o及p的一个以上为0者,另外,基R5、基R6、基R7及基R8的优选例可列举:碳数1~4的可经卤素原子取代的烷基、或碳数1~3的烷氧基、或碳数2~3的烯基。另外,通式(3)中,连结基X1及连结基X2的优选例可列举:单键、-O-、-S-、-CH2-、-CH(CH3)-、-SO2-或-CO-。其中,从赋予弯曲部位的观点来看,将连结基X1及连结基X2两者为单键的情况除外。通式(3)所表示的二胺残基的优选具体例可列举由以下的二胺化合物所衍生的二胺残基:4,4'-双(4-氨基苯氧基)联苯(4,4'-bis(4-aminophenoxy)biphenyl,BAPB)、2,2'-双[4-(4-氨基苯氧基)苯基]丙烷(BAPP)、2,2'-双[4-(4-氨基苯氧基)苯基]醚(2,2'-bis[4-(4-aminophenoxy)phenyl]ether,BAPE)、双[4-(4-氨基苯氧基)苯基]砜等。In the diamine residue represented by the general formula (3), one or more of m, n, o and p is preferably 0, and preferable examples of the group R 5 , the group R 6 , the group R 7 and the group R 8 may be Examples include an alkyl group having 1 to 4 carbon atoms which may be substituted by a halogen atom, an alkoxy group having 1 to 3 carbon atoms, or an alkenyl group having 2 to 3 carbon atoms. In addition, in the general formula (3), preferable examples of the linking group X 1 and the linking group X 2 include a single bond, -O-, -S-, -CH 2 -, -CH(CH 3 )-, -SO 2- or -CO-. However, from the viewpoint of providing a bent portion, the case where both the linking group X 1 and the linking group X 2 are single bonds is excluded. Preferred specific examples of the diamine residue represented by the general formula (3) include diamine residues derived from the following diamine compounds: 4,4′-bis(4-aminophenoxy)biphenyl (4 ,4'-bis(4-aminophenoxy)biphenyl, BAPB), 2,2'-bis[4-(4-aminophenoxy)phenyl]propane (BAPP), 2,2'-bis[4-( 4-Aminophenoxy)phenyl] ether (2,2'-bis[4-(4-aminophenoxy)phenyl]ether, BAPE), bis[4-(4-aminophenoxy)phenyl]sulfone, etc. .

通式(2)所表示的二胺残基中,尤其优选由1,3-双(4-氨基苯氧基)苯(TPE-R)所衍生的二胺残基(有时记作“TPE-R残基”),通式(3)所表示的二胺残基中,尤其优选由2,2'-双[4-(4-氨基苯氧基)苯基]丙烷(BAPP)所衍生的二胺残基(有时记作“BAPP残基”)。TPE-R残基及BAPP残基具有弯曲性的部位,因此可使绝缘树脂层的弹性系数降低,并赋予柔软性。另外,由于BAPP残基的分子量大,因此还可期待降低非热塑性聚酰亚胺的酰亚胺基浓度并抑制绝缘树脂层的吸湿的效果。Among the diamine residues represented by the general formula (2), diamine residues derived from 1,3-bis(4-aminophenoxy)benzene (TPE-R) (sometimes referred to as "TPE-R") are particularly preferred. "R residue"), among the diamine residues represented by the general formula (3), those derived from 2,2'-bis[4-(4-aminophenoxy)phenyl]propane (BAPP) are particularly preferred Diamine residues (sometimes referred to as "BAPP residues"). Since the TPE-R residue and the BAPP residue have bendable portions, the elastic modulus of the insulating resin layer can be lowered and flexibility can be imparted. In addition, since the molecular weight of the BAPP residue is large, the effect of reducing the imide group concentration of the non-thermoplastic polyimide and suppressing the moisture absorption of the insulating resin layer can also be expected.

非热塑性聚酰亚胺所含的其他二胺残基例如可列举由以下的芳香族二胺化合物所衍生的二胺残基:间苯二胺(m-phenylenediamine,m-PDA)、4,4'-二氨基二苯基醚(4,4'-diamino diphenyl ether,DAPE)、3,3'-二氨基二苯基醚、3,4'-二氨基二苯基醚、4,4'-二氨基二苯基甲烷、3,3'-二氨基二苯基甲烷、3,4'-二氨基二苯基甲烷、4,4'-二氨基二苯基丙烷、3,3'-二氨基二苯基丙烷、3,4'-二氨基二苯基丙烷、4,4'-二氨基二苯基硫醚、3,3'-二氨基二苯基硫醚、3,4'-二氨基二苯基硫醚、4,4'-二氨基二苯基砜、3,3'-二氨基二苯基砜、4,4'-二氨基二苯甲酮、3,4'-二氨基二苯甲酮、3,3'-二氨基二苯甲酮、2,2-双-[4-(3-氨基苯氧基)苯基]丙烷、双[4-(3-氨基苯氧基)苯基]砜、双[4-(3-氨基苯氧基)联苯、双[1-(3-氨基苯氧基)]联苯、双[4-(3-氨基苯氧基)苯基]甲烷、双[4-(3-氨基苯氧基)苯基]醚、双[4-(3-氨基苯氧基)]二苯甲酮、9,9-双[4-(3-氨基苯氧基)苯基]芴、2,2-双-[4-(4-氨基苯氧基)苯基]六氟丙烷、2,2-双-[4-(3-氨基苯氧基)苯基]六氟丙烷、3,3'-二甲基-4,4'-二氨基联苯、4,4'-亚甲基二-邻甲苯胺、4,4'-亚甲基二-2,6-二甲苯胺、4,4'-亚甲基-2,6-二乙基苯胺、3,3'-二氨基二苯基乙烷、3,3'-二氨基联苯、3,3'-二甲氧基联苯胺、3,3”-二氨基-对三联苯、4,4'-[1,4-亚苯基双(1-甲基亚乙基)]双苯胺、4,4'-[1,3-亚苯基双(1-甲基亚乙基)]双苯胺、双(对氨基环己基)甲烷、双(对β-氨基-叔丁基苯基)醚、双(对β-甲基-δ-氨基戊基)苯、对双(2-甲基-4-氨基戊基)苯、对双(1,1-二甲基-5-氨基戊基)苯、1,5-二氨基萘、2,6-二氨基萘、2,4-双(β-氨基-叔丁基)甲苯、2,4-二氨基甲苯、间二甲苯-2,5-二胺、对二甲苯-2,5-二胺、间苯二甲胺、对苯二甲胺、2,6-二氨基吡啶、2,5-二氨基吡啶、2,5-二氨基-1,3,4-噁二唑、哌嗪等。Other diamine residues contained in the non-thermoplastic polyimide include, for example, diamine residues derived from the following aromatic diamine compounds: m-phenylenediamine (m-PDA), 4,4 '-Diaminodiphenyl ether (DAPE), 3,3'-diaminodiphenyl ether, 3,4'-diaminodiphenyl ether, 4,4'- Diaminodiphenylmethane, 3,3'-diaminodiphenylmethane, 3,4'-diaminodiphenylmethane, 4,4'-diaminodiphenylpropane, 3,3'-diamino Diphenylpropane, 3,4'-diaminodiphenylpropane, 4,4'-diaminodiphenyl sulfide, 3,3'-diaminodiphenyl sulfide, 3,4'-diamino Diphenyl sulfide, 4,4'-diaminodiphenylsulfone, 3,3'-diaminodiphenylsulfone, 4,4'-diaminobenzophenone, 3,4'-diaminodiphenylsulfone Benzophenone, 3,3'-diaminobenzophenone, 2,2-bis-[4-(3-aminophenoxy)phenyl]propane, bis[4-(3-aminophenoxy) Phenyl]sulfone, bis[4-(3-aminophenoxy)biphenyl, bis[1-(3-aminophenoxy)]biphenyl, bis[4-(3-aminophenoxy)phenyl ]methane, bis[4-(3-aminophenoxy)phenyl]ether, bis[4-(3-aminophenoxy)]benzophenone, 9,9-bis[4-(3-amino Phenoxy)phenyl]fluorene, 2,2-bis-[4-(4-aminophenoxy)phenyl]hexafluoropropane, 2,2-bis-[4-(3-aminophenoxy) Phenyl]hexafluoropropane, 3,3'-dimethyl-4,4'-diaminobiphenyl, 4,4'-methylenebis-o-toluidine, 4,4'-methylenebis- 2,6-xylidine, 4,4'-methylene-2,6-diethylaniline, 3,3'-diaminodiphenylethane, 3,3'-diaminobiphenyl, 3 ,3'-dimethoxybenzidine, 3,3"-diamino-p-terphenyl, 4,4'-[1,4-phenylenebis(1-methylethylene)]dianiline, 4,4'-[1,3-phenylene bis(1-methylethylene)]dianiline, bis(p-aminocyclohexyl)methane, bis(p-β-amino-tert-butylphenyl) ether , bis(p-β-methyl-δ-aminopentyl)benzene, p-bis(2-methyl-4-aminopentyl)benzene, p-bis(1,1-dimethyl-5-aminopentyl) Benzene, 1,5-diaminonaphthalene, 2,6-diaminonaphthalene, 2,4-bis(β-amino-tert-butyl)toluene, 2,4-diaminotoluene, m-xylene-2,5- Diamine, p-xylene-2,5-diamine, m-xylylenediamine, p-xylylenediamine, 2,6-diaminopyridine, 2,5-diaminopyridine, 2,5-diamino-1 , 3,4-oxadiazole, piperazine, etc.

非热塑性聚酰亚胺中,通过选定所述四羧酸残基及二胺残基的种类、或应用两种以上的四羧酸残基或二胺残基的情况下的各自的摩尔比,可控制热膨胀系数、储存弹性系数、拉伸弹性系数等。另外,在非热塑性聚酰亚胺中具有多个聚酰亚胺的结构单元的情况下,能以嵌段的形式存在,也可无规地存在,从抑制面内双折射率(Δn)的偏差的观点来看,优选的是无规地存在。In the non-thermoplastic polyimide, the molar ratio of each in the case of selecting the kind of the tetracarboxylic acid residue and the diamine residue, or using two or more tetracarboxylic acid residues or diamine residues , can control thermal expansion coefficient, storage elastic coefficient, tensile elastic coefficient and so on. In addition, when the non-thermoplastic polyimide has a plurality of structural units of the polyimide, it can exist in the form of a block, or it can exist randomly, from the suppression of the in-plane birefringence (Δn) From the viewpoint of deviation, it is preferable to exist randomly.

非热塑性聚酰亚胺的酰亚胺基浓度优选为35重量%以下。这里,“酰亚胺基浓度”是指聚酰亚胺中的酰亚胺基部(-(CO)2-N-)的分子量除以聚酰亚胺的结构整体的分子量所得的值。若酰亚胺基浓度超过35重量%,则树脂自身的分子量变小,并且由于极性基的增加而低吸湿性也恶化。通过选择所述酸酐与二胺化合物的组合来控制非热塑性聚酰亚胺中的分子的取向性,由此,抑制伴随酰亚胺基浓度降低的CTE的增加,从而保证低吸湿性。The imide group concentration of the non-thermoplastic polyimide is preferably 35% by weight or less. Here, the "imide group concentration" means a value obtained by dividing the molecular weight of the imide group (-(CO) 2 -N-) in the polyimide by the molecular weight of the entire structure of the polyimide. When the imide group concentration exceeds 35% by weight, the molecular weight of the resin itself becomes small, and the low hygroscopicity also deteriorates due to an increase in polar groups. By selecting the combination of the acid anhydride and the diamine compound, the orientation of the molecules in the non-thermoplastic polyimide is controlled, thereby suppressing the increase in CTE accompanying the reduction in the imide group concentration, thereby ensuring low hygroscopicity.

非热塑性聚酰亚胺的重量平均分子量例如优选10,000~400,000的范围内,更优选50,000~350,000的范围内。若重量平均分子量小于10,000,则有绝缘树脂层的强度降低且容易脆化的倾向。另一方面,若重量平均分子量超过400,000,则有粘度过度地增加而在涂敷操作时容易产生厚度不均、条纹等不良的倾向。The weight average molecular weight of the non-thermoplastic polyimide is, for example, preferably in the range of 10,000 to 400,000, and more preferably in the range of 50,000 to 350,000. When the weight-average molecular weight is less than 10,000, the strength of the insulating resin layer tends to decrease, and it tends to become brittle. On the other hand, when the weight average molecular weight exceeds 400,000, the viscosity tends to increase excessively, and defects such as uneven thickness and streaks tend to be easily generated during the coating operation.

(热塑性聚酰亚胺)(thermoplastic polyimide)

本实施方式中,优选的是构成热塑性聚酰亚胺层的热塑性聚酰亚胺包含四羧酸残基及二胺残基,且这些残基均包含芳香族基。通过热塑性聚酰亚胺所含的四羧酸残基及二胺残基均包含芳香族基,可抑制绝缘树脂层在高温环境下的面内双折射率(Δn)的变化量,并减小加热前后的面内双折射率(Δn)的值的差(Δnh-Δn)。进而,可抑制厚度方向的双折射率变化。In this embodiment, it is preferable that the thermoplastic polyimide which comprises a thermoplastic polyimide layer contains a tetracarboxylic-acid residue and a diamine residue, and these residues all contain an aromatic group. Since both the tetracarboxylic acid residue and the diamine residue contained in the thermoplastic polyimide contain an aromatic group, the amount of change in the in-plane birefringence (Δn) of the insulating resin layer in a high temperature environment can be suppressed and reduced The difference (Δnh−Δn) between the values of the in-plane birefringence (Δn) before and after heating. Furthermore, the birefringence change in the thickness direction can be suppressed.

热塑性聚酰亚胺所含的四羧酸残基并无特别限制,例如可优选地列举:由均苯四甲酸二酐(PMDA)所衍生的四羧酸残基(以下也称作PMDA残基)、由3,3',4,4'-联苯四羧酸二酐(BPDA)所衍生的四羧酸残基(以下也称作BPDA残基)。这些四羧酸残基容易形成秩序结构,可抑制高温环境下的面内双折射率(Δn)的变化量并减小加热前后的面内双折射率(Δn)的值的差(Δnh-Δn)。进而,可抑制厚度方向的双折射率变化。另外,PMDA残基为发挥控制热膨胀系数及控制玻璃化转变温度的作用的残基。进而,关于BPDA残基,由于四羧酸残基中不存在极性基且分子量比较大,因此还可期待降低热塑性聚酰亚胺的酰亚胺基浓度并抑制绝缘树脂层的吸湿的效果。从这种观点来看,PMDA残基和/或BPDA残基的合计量以相对于热塑性聚酰亚胺所含的所有四羧酸残基100摩尔份而为优选50摩尔份以上、更优选50摩尔份~100摩尔份的范围内、最优选70摩尔份~100摩尔份的范围内为宜。The tetracarboxylic acid residue contained in the thermoplastic polyimide is not particularly limited, and for example, a tetracarboxylic acid residue derived from pyromellitic dianhydride (PMDA) (hereinafter also referred to as PMDA residue) is preferably mentioned. ), a tetracarboxylic acid residue (hereinafter also referred to as BPDA residue) derived from 3,3',4,4'-biphenyltetracarboxylic dianhydride (BPDA). These tetracarboxylic acid residues tend to form ordered structures, suppress the amount of change in in-plane birefringence (Δn) in a high-temperature environment, and reduce the difference in in-plane birefringence (Δn) values before and after heating (Δnh−Δn). ). Furthermore, the birefringence change in the thickness direction can be suppressed. In addition, the PMDA residue is a residue that functions to control the thermal expansion coefficient and control the glass transition temperature. Furthermore, the BPDA residue has no polar group in the tetracarboxylic acid residue and has a relatively large molecular weight, so the effect of reducing the imide group concentration of the thermoplastic polyimide and suppressing the moisture absorption of the insulating resin layer can also be expected. From this viewpoint, the total amount of PMDA residues and/or BPDA residues is preferably 50 parts by mole or more, more preferably 50 parts by mole with respect to 100 parts by mole of all tetracarboxylic acid residues contained in the thermoplastic polyimide It is suitable to exist in the range of 70 mol part - 100 mol part most preferably in the range of mol part - 100 mol part.

热塑性聚酰亚胺所含的其他四羧酸残基可列举由与所述非热塑性聚酰亚胺中所例示者同样的芳香族四羧酸二酐所衍生的四羧酸残基。As the other tetracarboxylic acid residues contained in the thermoplastic polyimide, tetracarboxylic acid residues derived from the same aromatic tetracarboxylic dianhydrides as those exemplified in the above-mentioned non-thermoplastic polyimides are exemplified.

本实施方式中,热塑性聚酰亚胺所含的二胺残基优选为选自所述通式(2)及通式(3)中的至少一种二胺残基。相对于所有二胺残基100摩尔份,选自通式(2)及通式(3)中的二胺残基优选为合计50摩尔份以上,更优选为50摩尔份~100摩尔份,最优选70摩尔份~100摩尔份的范围内。通过相对于所有二胺残基100摩尔份而包含合计50摩尔份以上的选自通式(2)及通式(3)中的二胺残基,可对热塑性聚酰亚胺层赋予柔软性与粘接性,并使其作为对于金属层的粘接层发挥功能。另外,通式(2)所表示的二胺残基中尤其优选TPE-R残基,通式(3)所表示的二胺残基中尤其优选BAPP残基。由于TPE-R残基及BAPP残基具有弯曲性的部位,因此可使绝缘树脂层的弹性系数降低并赋予柔软性。另外,由于BAPP残基的分子量大,因此还可期待降低热塑性聚酰亚胺的酰亚胺基浓度并抑制绝缘树脂层的吸湿的效果。In the present embodiment, the diamine residue contained in the thermoplastic polyimide is preferably at least one diamine residue selected from the above-mentioned general formula (2) and general formula (3). With respect to 100 mol parts of all diamine residues, the total amount of diamine residues selected from the general formula (2) and the general formula (3) is preferably 50 mol parts or more, more preferably 50 mol parts to 100 mol parts, and most preferably 50 mol parts to 100 mol parts. Preferably, it exists in the range of 70 mol part - 100 mol part. By including a total of 50 mol parts or more of the diamine residues selected from the general formula (2) and the general formula (3) with respect to 100 mol parts of all the diamine residues, flexibility can be imparted to the thermoplastic polyimide layer and adhesiveness, and make it function as an adhesive layer with respect to the metal layer. In addition, among the diamine residues represented by the general formula (2), a TPE-R residue is particularly preferable, and among the diamine residues represented by the general formula (3), a BAPP residue is particularly preferable. Since the TPE-R residue and the BAPP residue have bendable portions, the elastic modulus of the insulating resin layer can be lowered and flexibility can be imparted. In addition, since the molecular weight of the BAPP residue is large, the effect of reducing the imide group concentration of the thermoplastic polyimide and suppressing the moisture absorption of the insulating resin layer can also be expected.

另外,如上所述,在构成非热塑性聚酰亚胺层的非热塑性聚酰亚胺含有选自通式(2)及通式(3)中的二胺残基的情况下,构成热塑性聚酰亚胺层的热塑性聚酰亚胺也以含有类似结构、优选为选自通式(2)及通式(3)中的同种的二胺残基来作为二胺残基为宜。所述情况下,热塑性聚酰亚胺与非热塑性聚酰亚胺中,二胺残基的含有比率不同,但通过含有类似或同种的二胺残基,尤其是利用浇铸(cast)法形成聚酰亚胺膜时,热塑性聚酰亚胺层与非热塑性聚酰亚胺层的取向控制变得容易,且容易管理尺寸精度。从这种观点来看,本实施方式中优选的是,构成非热塑性聚酰亚胺层的非热塑性聚酰亚胺、与构成热塑性聚酰亚胺层的热塑性聚酰亚胺均含有选自所述通式(2)及通式(3)中的至少一种二胺残基,所述二胺残基最优选的是含有TPE-R残基和/或BAPP残基。In addition, as described above, when the non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer contains a diamine residue selected from the group consisting of the general formula (2) and the general formula (3), the thermoplastic polyimide is constituted The thermoplastic polyimide of the imine layer preferably has a similar structure, preferably the same diamine residue selected from the general formula (2) and the general formula (3) as the diamine residue. In this case, the thermoplastic polyimide and the non-thermoplastic polyimide have different content ratios of diamine residues, but are formed by containing similar or the same diamine residues, especially by a casting method. In the case of a polyimide film, the orientation control of the thermoplastic polyimide layer and the non-thermoplastic polyimide layer becomes easy, and it becomes easy to manage the dimensional accuracy. From such a viewpoint, in the present embodiment, it is preferable that both the non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer and the thermoplastic polyimide constituting the thermoplastic polyimide layer contain selected from the group consisting of At least one diamine residue in the general formula (2) and the general formula (3), the diamine residue most preferably contains a TPE-R residue and/or a BAPP residue.

本实施方式中,热塑性聚酰亚胺所含的所述通式(2)及通式(3)以外的二胺残基例如可列举由以下的二胺化合物所衍生的二胺残基:2,2'-二甲基-4,4'-二氨基联苯(m-TB)、2,2'-二乙基-4,4'-二氨基联苯(m-EB)、2,2'-二乙氧基-4,4'-二氨基联苯(m-EOB)、2,2'-二丙氧基-4,4'-二氨基联苯(m-POB)、2,2'-正丙基-4,4'-二氨基联苯(m-NPB)、2,2'-二乙烯基-4,4'-二氨基联苯(VAB)、4,4'-二氨基联苯、4,4'-二氨基-2,2'-双(三氟甲基)联苯(TFMB)、对苯二胺(p-phenylenediamine,p-PDA)、间苯二胺(m-PDA)、3,3'-二氨基二苯基甲烷、3,3'-二氨基二苯基丙烷、3,3'-二氨基二苯基硫醚、3,3'-二氨基二苯基砜、3,3-二氨基二苯基醚、3,4'-二氨基二苯基醚、3,4'-二氨基二苯基甲烷、3,4'-二氨基二苯基丙烷、3,4'-二氨基二苯基硫醚、3,3'-二氨基二苯甲酮、(3,3'-双氨基)二苯基胺、1,4-双(3-氨基苯氧基)苯、3-[4-(4-氨基苯氧基)苯氧基]苯胺、3-[3-(4-氨基苯氧基)苯氧基]苯胺、1,3-双(3-氨基苯氧基)苯(1,3-bis(3-aminophenoxy)benzene,APB)、4,4'-[2-甲基-(1,3-亚苯基)双氧基]双苯胺、4,4'-[4-甲基-(1,3-亚苯基)双氧基]双苯胺、4,4'-[5-甲基-(1,3-亚苯基)双氧基]双苯胺、双[4-(3-氨基苯氧基)苯基]甲烷、双[4-(3-氨基苯氧基)苯基]丙烷、双[4-(3-氨基苯氧基)苯基]醚、双[4-(3-氨基苯氧基)苯基]砜、双[4-(3-氨基苯氧基)]二苯甲酮、双[4,4'-(3-氨基苯氧基)]苯甲酰苯胺、4-[3-[4-(4-氨基苯氧基)苯氧基]苯氧基]苯胺、4,4'-[氧基双(3,1-亚苯基氧基)]双苯胺、双[4-(4-氨基苯氧基)苯基]醚(BAPE)、双[4-(4-氨基苯氧基)苯基]酮(BAPK)、双[4-(3-氨基苯氧基)]联苯、双[4-(4-氨基苯氧基)]联苯等。In the present embodiment, the diamine residues other than the general formula (2) and the general formula (3) contained in the thermoplastic polyimide include, for example, diamine residues derived from the following diamine compounds: 2 ,2'-Dimethyl-4,4'-diaminobiphenyl (m-TB), 2,2'-diethyl-4,4'-diaminobiphenyl (m-EB), 2,2 '-diethoxy-4,4'-diaminobiphenyl (m-EOB), 2,2'-dipropoxy-4,4'-diaminobiphenyl (m-POB), 2,2 '-n-propyl-4,4'-diaminobiphenyl (m-NPB), 2,2'-divinyl-4,4'-diaminobiphenyl (VAB), 4,4'-diamino Biphenyl, 4,4'-diamino-2,2'-bis(trifluoromethyl)biphenyl (TFMB), p-phenylenediamine (p-PDA), m-phenylenediamine (m- PDA), 3,3'-diaminodiphenylmethane, 3,3'-diaminodiphenylpropane, 3,3'-diaminodiphenyl sulfide, 3,3'-diaminodiphenyl Sulfone, 3,3-diaminodiphenyl ether, 3,4'-diaminodiphenyl ether, 3,4'-diaminodiphenylmethane, 3,4'-diaminodiphenylpropane, 3 ,4'-diaminodiphenyl sulfide, 3,3'-diaminobenzophenone, (3,3'-bisamino)diphenylamine, 1,4-bis(3-aminophenoxy) ) benzene, 3-[4-(4-aminophenoxy)phenoxy]aniline, 3-[3-(4-aminophenoxy)phenoxy]aniline, 1,3-bis(3-amino) Phenoxy)benzene (1,3-bis(3-aminophenoxy)benzene, APB), 4,4'-[2-methyl-(1,3-phenylene)bisoxy]dianiline, 4, 4'-[4-Methyl-(1,3-phenylene)bisoxy]bisaniline, 4,4'-[5-methyl-(1,3-phenylene)bisoxy]bis Aniline, bis[4-(3-aminophenoxy)phenyl]methane, bis[4-(3-aminophenoxy)phenyl]propane, bis[4-(3-aminophenoxy)phenyl] ] ether, bis[4-(3-aminophenoxy)phenyl]sulfone, bis[4-(3-aminophenoxy)]benzophenone, bis[4,4'-(3-aminobenzene oxy)]benzylaniline, 4-[3-[4-(4-aminophenoxy)phenoxy]phenoxy]aniline, 4,4'-[oxybis(3,1-ylidene) phenyloxy)] bisaniline, bis[4-(4-aminophenoxy)phenyl]ether (BAPE), bis[4-(4-aminophenoxy)phenyl]ketone (BAPK), bis [4-(3-aminophenoxy)]biphenyl, bis[4-(4-aminophenoxy)]biphenyl, and the like.

热塑性聚酰亚胺中,通过选定所述四羧酸残基及二胺残基的种类、或应用两种以上的四羧酸残基或二胺残基的情况下的各自的摩尔比,可控制热膨胀系数、拉伸弹性系数、玻璃化转变温度等。另外,在热塑性聚酰亚胺中具有多个聚酰亚胺的结构单元的情况下,能以嵌段的形式存在,也可无规地存在,优选的是无规地存在。In the thermoplastic polyimide, by selecting the kinds of the tetracarboxylic acid residues and the diamine residues, or the respective molar ratios when two or more tetracarboxylic acid residues or diamine residues are used, The thermal expansion coefficient, tensile elastic coefficient, glass transition temperature, etc. can be controlled. In addition, when the thermoplastic polyimide has a plurality of structural units of the polyimide, it may exist in the form of a block or may exist randomly, and it is preferable to exist randomly.

构成热塑性聚酰亚胺层的热塑性聚酰亚胺可提升与金属层的密接性。这种热塑性聚酰亚胺的玻璃化转变温度为200℃以上且350℃以下的范围内,优选为200℃以上且320℃以下的范围内。The thermoplastic polyimide which comprises a thermoplastic polyimide layer can improve the adhesiveness with a metal layer. The glass transition temperature of such a thermoplastic polyimide is in the range of 200°C or higher and 350°C or lower, preferably in the range of 200°C or higher and 320°C or lower.

热塑性聚酰亚胺的酰亚胺基浓度优选为35重量%以下。这里,“酰亚胺基浓度”是指聚酰亚胺中的酰亚胺基部(-(CO)2-N-)的分子量除以聚酰亚胺的结构整体的分子量所得的值。若酰亚胺基浓度超过35重量%,则树脂自身的分子量变小,并且由于极性基的增加而低吸湿性也恶化。通过选择所述酸酐与二胺化合物的组合来控制热塑性聚酰亚胺中的分子的取向性,由此,抑制伴随酰亚胺基浓度降低的CTE的增加,从而保证低吸湿性。The imide group concentration of the thermoplastic polyimide is preferably 35% by weight or less. Here, the "imide group concentration" means a value obtained by dividing the molecular weight of the imide group (-(CO) 2 -N-) in the polyimide by the molecular weight of the entire structure of the polyimide. When the imide group concentration exceeds 35% by weight, the molecular weight of the resin itself becomes small, and the low hygroscopicity also deteriorates due to an increase in polar groups. By selecting the combination of the acid anhydride and the diamine compound, the orientation of the molecules in the thermoplastic polyimide is controlled, thereby suppressing the increase in CTE accompanying the decrease in the imide group concentration, thereby ensuring low hygroscopicity.

热塑性聚酰亚胺的重量平均分子量例如优选10,000~400,000的范围内,更优选50,000~350,000的范围内。若重量平均分子量小于10,000,则有绝缘树脂层的强度降低而容易脆化的倾向。另一方面,若重量平均分子量超过400,000,则有粘度过度地增加而在涂敷操作时容易产生厚度不均、条纹等不良的倾向。The weight average molecular weight of the thermoplastic polyimide is, for example, preferably in the range of 10,000 to 400,000, and more preferably in the range of 50,000 to 350,000. When the weight-average molecular weight is less than 10,000, the strength of the insulating resin layer tends to be lowered and it tends to become brittle. On the other hand, when the weight average molecular weight exceeds 400,000, the viscosity tends to increase excessively, and defects such as uneven thickness and streaks tend to be easily generated during the coating operation.

(非热塑性聚酰亚胺及热塑性聚酰亚胺的合成)(Synthesis of non-thermoplastic polyimide and thermoplastic polyimide)

通常,聚酰亚胺可通过以下方式制造:使四羧酸二酐与二胺化合物在溶剂中反应,生成聚酰胺酸后进行加热闭环。例如,使四羧酸二酐与二胺化合物以大致等摩尔溶解在有机溶剂中,在0℃~100℃的范围内的温度下搅拌30分钟~24小时而进行聚合反应,由此获得作为聚酰亚胺的前体的聚酰胺酸。反应时,以所生成的前体在有机溶剂中成为5重量%~30重量%的范围内、优选10重量%~20重量%的范围内的方式将反应成分溶解。聚合反应中所使用的有机溶剂例如可列举:N,N-二甲基甲酰胺(N,N-dimethyl formamide,DMF)、N,N-二甲基乙酰胺(N,N-dimethyl acetamide,DMAc)、N,N-二乙基乙酰胺、N-甲基-2-吡咯烷酮(N-methyl-2-pyrrolidone,NMP)、2-丁酮、二甲基亚砜(dimethyl sulfoxide,DMSO)、六甲基磷酰胺、N-甲基己内酰胺、硫酸二甲酯、环己酮、二噁烷、四氢呋喃、二乙二醇二甲醚(diglyme)、三乙二醇二甲醚(triglyme)、甲酚等。还可将这些溶剂并用两种以上来使用,进而还能够并用二甲苯、甲苯那样的芳香族烃。另外,这种有机溶剂的使用量并无特别限制,优选的是调整为通过聚合反应而获得的聚酰胺酸溶液的浓度成为5重量%~30重量%左右那样的使用量而使用。Generally, a polyimide can be manufactured by making a tetracarboxylic dianhydride and a diamine compound react in a solvent, and heating ring-closure after generating a polyamic acid. For example, the tetracarboxylic dianhydride and the diamine compound are dissolved in an organic solvent in approximately equimolar amounts, and the polymerization reaction is carried out by stirring at a temperature in the range of 0°C to 100°C for 30 minutes to 24 hours. A polyamic acid that is a precursor of an imide. During the reaction, the reaction components are dissolved in the organic solvent so that the produced precursor is in the range of 5 to 30% by weight, preferably in the range of 10 to 20% by weight. Examples of the organic solvent used in the polymerization reaction include N,N-dimethylformamide (N,N-dimethylformamide, DMF), N,N-dimethylacetamide (N,N-dimethylacetamide, DMAc) ), N,N-diethylacetamide, N-methyl-2-pyrrolidone (NMP), 2-butanone, dimethyl sulfoxide (DMSO), six Methyl phosphoramide, N-methyl caprolactam, dimethyl sulfate, cyclohexanone, dioxane, tetrahydrofuran, diethylene glycol dimethyl ether (diglyme), triethylene glycol dimethyl ether (triglyme), cresol Wait. These solvents can be used in combination of two or more, and aromatic hydrocarbons such as xylene and toluene can also be used in combination. Moreover, the usage-amount in particular of such an organic solvent is not restrict|limited, It is preferable to adjust and use so that the density|concentration of the polyamic-acid solution obtained by a polymerization reaction may become about 5 weight% - 30weight%.

所合成的聚酰胺酸通常有利的是以反应溶剂溶液的形式使用,视需要可进行浓缩、稀释或置换为其他有机溶剂。另外,聚酰胺酸通常溶剂可溶性优异,因此可有利地使用。聚酰胺酸的溶液的粘度优选为500cps~100,000cps的范围内。若偏离所述范围,则利用涂布机等进行涂敷操作时,膜中容易产生厚度不均、条纹等不良。使聚酰胺酸加以酰亚胺化的方法并无特别限制,例如适宜采用在所述溶剂中在80℃~400℃的范围内的温度条件下花1小时~24小时进行加热那样的热处理。The synthesized polyamic acid is usually advantageously used in the form of a reaction solvent solution, and can be concentrated, diluted or replaced with other organic solvents as necessary. Moreover, since polyamic acid is generally excellent in solvent solubility, it can be used advantageously. The viscosity of the solution of the polyamic acid is preferably in the range of 500 cps to 100,000 cps. If it deviates from the said range, when coating operation with a coater etc. is performed, it is easy to generate|occur|produce defects, such as thickness unevenness and a streak, in a film. The method of imidizing the polyamic acid is not particularly limited, and for example, a heat treatment such as heating in the solvent at a temperature in the range of 80° C. to 400° C. for 1 hour to 24 hours is suitably employed.

<金属层><Metal layer>

构成金属层的金属例如可列举选自铜、铝、不锈钢、铁、银、钯、镍、铬、钼、钨、锆、金、钴、钛、钽、锌、铅、锡、硅、铋、铟或它们的合金等中的金属。金属层还可利用溅射、蒸镀、镀覆等方法来形成,但从粘接性的观点来看,优选的是使用金属箔。在导电性方面尤其优选的是铜箔。铜箔可为电解铜箔、压延铜箔中的任一种。此外,在连续地生产本实施方式的覆金属层叠板的情况下,使用将既定厚度者卷绕成辊状而成的长条状的金属箔来作为金属箔。For example, the metal constituting the metal layer is selected from the group consisting of copper, aluminum, stainless steel, iron, silver, palladium, nickel, chromium, molybdenum, tungsten, zirconium, gold, cobalt, titanium, tantalum, zinc, lead, tin, silicon, bismuth, Metals in indium or their alloys, etc. The metal layer may be formed by methods such as sputtering, vapor deposition, and plating, but it is preferable to use a metal foil from the viewpoint of adhesiveness. Particularly preferred in terms of conductivity is copper foil. The copper foil may be either an electrolytic copper foil or a rolled copper foil. In addition, in the case of continuously producing the metal-clad laminate of the present embodiment, a long metal foil having a predetermined thickness wound in a roll shape is used as the metal foil.

以下,作为覆金属层叠板的优选实施方式,列举具有铜层的覆铜层叠板来说明。Hereinafter, as a preferred embodiment of the metal-clad laminate, a copper-clad laminate having a copper layer will be described.

<覆铜层叠板><Copper clad laminate>

本实施方式的覆铜层叠板只要包括绝缘层、且在所述绝缘层的至少一个面上包括铜箔等铜层即可。另外,为了提高绝缘层与铜层的粘接性,绝缘层中的与铜层接触的层为热塑性聚酰亚胺层。铜层设置于绝缘层的单面或两面上。即,本实施方式的覆铜层叠板可为单面覆铜层叠板(单面CCL),也可为双面覆铜层叠板(双面CCL)。单面CCL的情况下,将层叠于绝缘层的单面上的铜层设为本发明中的“第1铜层”。双面CCL的情况下,将层叠于绝缘层的单面上的铜层设为本发明中的“第1铜层”,将层叠于绝缘层中与层叠有第1铜层的面为相反侧的面上的铜层设为本发明中的“第2铜层”。本实施方式的覆铜层叠板是对铜层进行蚀刻等而进行布线电路加工,形成铜布线,并作为FPC来使用。The copper-clad laminate of the present embodiment only needs to include an insulating layer, and at least one surface of the insulating layer only needs to include a copper layer such as copper foil. Moreover, in order to improve the adhesiveness of an insulating layer and a copper layer, the layer in contact with the copper layer among the insulating layers is a thermoplastic polyimide layer. The copper layer is arranged on one side or both sides of the insulating layer. That is, the copper clad laminate of this embodiment may be a single-sided copper clad laminate (single-sided CCL) or a double-sided copper clad laminate (double-sided CCL). In the case of single-sided CCL, the copper layer laminated on one surface of the insulating layer is referred to as the "first copper layer" in the present invention. In the case of double-sided CCL, the copper layer laminated on one side of the insulating layer is referred to as the "first copper layer" in the present invention, and the surface laminated on the insulating layer is on the opposite side to the surface on which the first copper layer is laminated. The copper layer on the surface is referred to as the "second copper layer" in the present invention. The copper-clad laminate of the present embodiment performs wiring circuit processing by etching or the like of the copper layer to form copper wiring, and is used as an FPC.

覆铜层叠板例如也可通过以下方式制备:准备树脂膜,并对其溅射金属而形成种子层(seed layer)后,例如通过镀铜形成铜层。A copper-clad laminate can also be prepared, for example, by preparing a resin film, sputtering metal to form a seed layer, and then forming a copper layer by, for example, copper plating.

另外,覆铜层叠板也可通过以下方式制备:准备树脂膜,并利用热压接等方法对其层压铜箔。In addition, a copper-clad laminate can also be prepared by preparing a resin film and laminating copper foil thereon by a method such as thermocompression bonding.

进而,覆铜层叠板也可通过以下方式制备:在铜箔上浇铸含有作为聚酰亚胺的前体的聚酰胺酸的涂布液,进行干燥而制成涂布膜后,进行热处理而酰亚胺化,从而形成聚酰亚胺层。Furthermore, a copper-clad laminate can also be prepared by casting a coating liquid containing a polyamic acid as a precursor of a polyimide on a copper foil, drying it to obtain a coating film, and then performing a heat treatment to obtain a coating film. imidization to form a polyimide layer.

(第1铜层)(1st copper layer)

本实施方式的覆铜层叠板中,第1铜层中所使用的铜箔(以下,有时记作“第1铜箔”)并无特别限定,例如可为压延铜箔,也可为电解铜箔。In the copper-clad laminate of the present embodiment, the copper foil (hereinafter, sometimes referred to as "first copper foil") used in the first copper layer is not particularly limited, and may be, for example, rolled copper foil or electrolytic copper. foil.

第1铜箔的厚度以优选为13μm以下、更优选6μm~12μm的范围内为宜。若第1铜箔的厚度超过13μm,则将覆铜层叠板(或FPC)弯折时对铜层(或铜布线)施加的弯曲应力变大,由此耐弯折性降低。另外,从生产稳定性及操作性的观点来看,第1铜箔的厚度的下限值优选的是设为6μm。The thickness of the first copper foil is preferably 13 μm or less, and more preferably within a range of 6 μm to 12 μm. When the thickness of the first copper foil exceeds 13 μm, the bending stress applied to the copper layer (or copper wiring) when the copper clad laminate (or FPC) is bent becomes large, thereby reducing the bending resistance. Moreover, it is preferable to set the lower limit of the thickness of a 1st copper foil to 6 micrometers from a viewpoint of production stability and workability|operativity.

另外,第1铜箔的拉伸弹性系数例如优选为10GPa~35GPa的范围内,更优选15GPa~25GPa的范围内。在本实施方式中使用压延铜箔作为第1铜箔的情况下,若通过热处理而进行退火(anneal),则柔软性容易变高。因此,若铜箔的拉伸弹性系数不满所述下限值,则在长条的第1铜箔上形成绝缘层的工序中,因加热而导致第1铜箔自身的刚性降低。另一方面,若拉伸弹性系数超过所述上限值,则将FPC弯折时对铜布线施加更大的弯曲应力,其耐弯折性降低。此外,压延铜箔有其拉伸弹性系数根据在铜箔上形成绝缘层时的热处理条件、或形成绝缘层后的铜箔的退火处理等而变化的倾向。因此,本实施方式中,只要最终获得的覆铜层叠板中,第1铜箔的拉伸弹性系数处于所述范围内即可。Moreover, it is preferable to exist in the range of 10GPa-35GPa, and, as for the tensile elastic modulus of a 1st copper foil, for example, it is more preferable to exist in the range of 15GPa-25GPa. In the present embodiment, when the rolled copper foil is used as the first copper foil, when annealing is performed by heat treatment, the flexibility tends to increase. Therefore, when the tensile modulus of elasticity of the copper foil is less than the lower limit value, in the step of forming the insulating layer on the long first copper foil, the rigidity of the first copper foil itself is lowered by heating. On the other hand, when the tensile elastic modulus exceeds the upper limit value, a larger bending stress is applied to the copper wiring when the FPC is bent, and the bending resistance thereof decreases. In addition, the tensile elastic modulus of the rolled copper foil tends to vary depending on the heat treatment conditions at the time of forming the insulating layer on the copper foil, the annealing treatment of the copper foil after forming the insulating layer, and the like. Therefore, in the present embodiment, in the finally obtained copper-clad laminate, the tensile modulus of elasticity of the first copper foil may be within the above-described range.

第1铜箔并无特别限定,可使用市售的压延铜箔。The first copper foil is not particularly limited, and a commercially available rolled copper foil can be used.

(第2铜层)(2nd copper layer)

第2铜层层叠于绝缘层中的与第1铜层为相反侧的面上。第2铜层中所使用的铜箔(第2铜箔)并无特别限定,例如可为压延铜箔,也可为电解铜箔。另外,还可使用市售的铜箔作为第2铜箔。此外,也可使用与第1铜箔相同的铜箔作为第2铜箔。The second copper layer is laminated on the surface opposite to the first copper layer among the insulating layers. The copper foil (2nd copper foil) used for a 2nd copper layer is not specifically limited, For example, a rolled copper foil may be sufficient, and an electrolytic copper foil may be sufficient as it. Moreover, a commercially available copper foil can also be used as a 2nd copper foil. In addition, the same copper foil as the 1st copper foil can also be used as a 2nd copper foil.

<电路基板><Circuit board>

本实施方式的覆金属层叠板主要作为FPC等电路基板的材料而有用。例如,通过常用方法将所述例示的覆铜层叠板的铜层加工成图案状而形成布线层,由此可制造作为本发明的一实施方式的FPC等电路基板。The metal-clad laminate of the present embodiment is mainly useful as a material for circuit boards such as FPC. For example, a circuit board such as an FPC which is an embodiment of the present invention can be produced by patterning the copper layer of the copper-clad laminate described above by a common method to form a wiring layer.

[实施例][Example]

以下示出实施例,对本发明的特征进行更具体的说明。但本发明的范围不限定于实施例。此外,以下的实施例中,只要无特别说明,则各种测定、评价是利用下述方法。An Example is shown below, and the characteristic of this invention is demonstrated more concretely. However, the scope of the present invention is not limited to the Examples. In addition, in the following examples, unless otherwise specified, various measurements and evaluations were performed by the following methods.

[粘度的测定][Measurement of Viscosity]

关于粘度的测定,使用E型粘度计(博勒飞(Brookfield)公司制造的商品名:DV-II+Pro)测定25℃下的粘度。以扭矩(torque)成为10%~90%的方式设定转速,开始测定起经过2分钟后,读取粘度稳定时的值。Regarding the measurement of viscosity, the viscosity at 25°C was measured using an E-type viscometer (trade name: DV-II+Pro manufactured by Brookfield). The rotational speed was set so that the torque was 10% to 90%, and the value when the viscosity was stabilized was read after 2 minutes elapsed from the start of the measurement.

[玻璃化转变温度(Tg)的测定][Measurement of glass transition temperature (Tg)]

关于玻璃化转变温度,使用动态粘弹性测定装置(DMA:UBM公司制造的商品名:E4000F),从30℃到400℃以升温速度4℃/分钟、频率11Hz对5mm×20mm的尺寸的聚酰亚胺膜进行测定,将弹性系数变化(tanδ)达到最大的温度作为玻璃化转变温度。此外,将使用DMA所测定的30℃下的储存弹性系数为1.0×109Pa以上、360℃下的储存弹性系数显示出小于1.0×108Pa者设为“热塑性”,将30℃下的储存弹性系数为1.0×109Pa以上、360℃下的储存弹性系数为1.0×108Pa以上者设为“非热塑性”。Regarding the glass transition temperature, using a dynamic viscoelasticity measuring apparatus (DMA: trade name: E4000F manufactured by UBM), from 30° C. to 400° C., at a heating rate of 4° C./min and a frequency of 11 Hz, for polyamide having a size of 5 mm×20 mm The imine film was measured, and the temperature at which the elastic modulus change (tan δ) became the largest was taken as the glass transition temperature. In addition, the storage elastic modulus at 30°C measured using DMA was 1.0×10 9 Pa or more and the storage elastic modulus at 360° C. showed less than 1.0×10 8 Pa as “thermoplastic”. A storage elastic modulus of 1.0×10 9 Pa or more and a storage elastic modulus at 360° C. of 1.0×10 8 Pa or more were defined as “non-thermoplastic”.

[热膨胀系数(CTE)的测定][Measurement of Coefficient of Thermal Expansion (CTE)]

使用热机械分析仪(布鲁克(Bruker)公司制造的商品名:4000SA),对3mm×20mm的尺寸的聚酰亚胺膜一面施加5.0g的负重,一面以一定的升温速度使其从30℃升温到265℃,进而在所述温度下保持10分钟后,以5℃/分钟的速度冷却,求出250℃至100℃的平均热膨胀系数(热膨胀系数)。Using a thermomechanical analyzer (trade name: 4000SA, manufactured by Bruker), a polyimide film having a size of 3 mm×20 mm was heated from 30° C. at a constant temperature increase rate while applying a load of 5.0 g. After the temperature reached 265°C, the temperature was further maintained for 10 minutes, and then cooled at a rate of 5°C/min, and the average thermal expansion coefficient (thermal expansion coefficient) from 250°C to 100°C was obtained.

[面内延迟(RO)的测定][Measurement of in-plane retardation (RO)]

使用双折射率计(光子晶格(Photonic-Lattice)公司制造的商品名:宽范围(widerange)双折射评价系统WPA-100,测定区域:MD:140mm×TD:100mm),求出既定样品的面内方向的延迟(retardation)。此外,入射角为0°,测定波长为543nm。Using a birefringence meter (trade name: wide-range birefringence evaluation system WPA-100, manufactured by Photonic-Lattice Co., Ltd., measurement area: MD: 140 mm×TD: 100 mm), the value of the predetermined sample was determined. Retardation in the in-plane direction. In addition, the incident angle was 0°, and the measurement wavelength was 543 nm.

[面内延迟(RO)的评价用样品的制备][Preparation of samples for evaluation of in-plane retardation (RO)]

在对长条状的覆金属层叠板的金属层进行蚀刻而获得的聚酰亚胺膜中的TD方向的左右两个端部(左(Left)及右(Right))以及中央部(Center),分别以A4尺寸(TD:210mm×MD:297mm)切断,制备样品L(Left)、样品R(Right)及样品C(Center)。In the polyimide film obtained by etching the metal layer of the elongated metal-clad laminate, the left and right ends (Left and Right) and the center (Center) in the TD direction , were cut at A4 size (TD: 210 mm×MD: 297 mm) to prepare sample L (Left), sample R (Right) and sample C (Center).

[面内双折射率(Δn)的评价][Evaluation of in-plane birefringence (Δn)]

针对样品L、样品R及样品C的每一者,分别测定面内延迟(RO)。将各样品的测定值的最大值除以评价用样品的厚度所得的值设为“面内双折射率(Δn)”,将面内延迟(RO)的测定值中的最大值与最小值的差设为“宽度方向(TD方向)的面内延迟(RO)的偏差(ΔRO)”,将所述ΔRO除以评价用样品的厚度所得的值设为“宽度方向(TD方向)的面内双折射率(Δn)的偏差[Δ(Δn)]”。For each of Sample L, Sample R, and Sample C, in-plane retardation (RO) was measured, respectively. The value obtained by dividing the maximum value of the measured values of each sample by the thickness of the sample for evaluation was defined as "in-plane birefringence (Δn)", and the difference between the maximum value and the minimum value in the measured values of in-plane retardation (RO) was calculated. The difference was defined as "deviation (ΔRO) of in-plane retardation (RO) in the width direction (TD direction)", and the value obtained by dividing the ΔRO by the thickness of the sample for evaluation was defined as "in-plane in the width direction (TD direction)" Birefringence (Δn) deviation [Δ(Δn)]”.

[加热后的面内延迟(ROh)及面内双折射率(Δnh)的评价][Evaluation of in-plane retardation (ROh) and in-plane birefringence (Δnh) after heating]

制备对覆金属层叠板的金属层进行蚀刻而获得的聚酰亚胺膜,测定在23℃、50%RH的环境下调湿24小时后的样品的面内延迟(RO)。然后,在250℃的高温环境下对本样品进行30分钟加热处理,测定加热后的面内延迟(ROh)。算出以250℃加热30分钟后的面内延迟(ROh)的值与加热前的面内延迟(RO)的值的差(|ROh-RO|)。将在23℃、50%RH的环境下调湿24小时后的样品的面内延迟(RO)的值除以本样品的厚度所得的值设为“加热前的面内双折射率(Δn)”,将加热后的面内延迟(ROh)的值除以本样品的厚度所得的值设为“以250℃加热30分钟后的面内双折射率(Δnh)”,将加热前后的面内延迟(RO)的差(|ROh-RO|)除以本样品的厚度所得的值设为“以250℃加热30分钟后的面内双折射率(Δnh)的值与加热前的面内双折射率(Δn)的值的差(|Δnh-Δn|)”。A polyimide film obtained by etching the metal layer of the metal-clad laminate was prepared, and the in-plane retardation (RO) of the sample was measured after humidity was adjusted in an environment of 23° C. and 50% RH for 24 hours. Then, this sample was heat-processed for 30 minutes in the high temperature environment of 250 degreeC, and the in-plane retardation (ROh) after heating was measured. The difference (|ROh-RO|) between the value of in-plane retardation (ROh) after heating at 250 degreeC for 30 minutes, and the value of in-plane retardation (RO) before heating was calculated. The value obtained by dividing the value of the in-plane retardation (RO) of the sample after humidity conditioning for 24 hours in an environment of 23° C. and 50% RH by the thickness of the sample was defined as “in-plane birefringence (Δn) before heating” , the value obtained by dividing the value of the in-plane retardation (ROh) after heating by the thickness of the sample was set as "in-plane birefringence (Δnh) after heating at 250°C for 30 minutes", and the in-plane retardation before and after heating The value obtained by dividing the difference (|ROh-RO|) of (RO) by the thickness of the present sample was set as "the value of the in-plane birefringence (Δnh) after heating at 250°C for 30 minutes and the in-plane birefringence before heating The difference (|Δnh-Δn|) in the value of the rate (Δn)”.

[厚度方向的延迟及双折射率的测定][Measurement of retardation in thickness direction and birefringence]

针对作为绝缘树脂层的聚酰亚胺层,利用超薄切片法实施厚度0.5μm的薄膜切片的制作,并实施厚度方向的延迟测定。此时,使用双折射率计(光子晶格(Photonic-Lattice)公司制造的商品名:显微镜安装用双折射分布观察照相机PI-微型(micro))。此外,测定波长为520nm,入射角为0°。About the polyimide layer which is an insulating resin layer, the film slice of thickness 0.5 micrometers was produced by the ultra-thin sectioning method, and the retardation measurement in the thickness direction was implemented. At this time, a birefringence meter (trade name: Microscope Mounting Birefringence Distribution Observation Camera PI-micro, manufactured by Photonic-Lattice) was used. In addition, the measurement wavelength was 520 nm, and the incident angle was 0°.

所谓ROa,为以聚酰亚胺层(膜)中的非热塑性聚酰亚胺层的一个面为基点的中央部方向上1.5μm的点中的延迟的值。ROa is the value of retardation in the point of 1.5 micrometers in the center part direction based on one surface of the non-thermoplastic polyimide layer in the polyimide layer (film).

所谓ROb,为以聚酰亚胺层(膜)中的非热塑性聚酰亚胺层的另一个面为基点的中央部方向上1.5μm的点中的延迟的值。ROb is the value of retardation in the point of 1.5 micrometers in the center part direction based on the other surface of the non-thermoplastic polyimide layer in a polyimide layer (film).

所谓ROv,为ROa、ROb、及聚酰亚胺层(膜)中的非热塑性聚酰亚胺层的厚度方向的中央部中的延迟的值(ROc)的合计(ROa+ROb+ROc)的平均值。ROv is the sum (ROa+ROb+ROc) of the retardation values (ROc) in the central portion in the thickness direction of the non-thermoplastic polyimide layer in the polyimide layer (film), ROa, ROb, and average value.

另外,将ROa的值除以薄膜切片的厚度(0.5μm)所得的值设为“在非热塑性聚酰亚胺层的厚度方向上,以一个面为基点的中央部方向上1.5μm的点中的双折射率(Δna)”,将Rob的值除以薄膜切片的厚度(0.5μm)所得的值设为“在非热塑性聚酰亚胺层的厚度方向上,以另一个面为基点的中央部方向上1.5μm的点中的双折射率(Δnb)”,将Roc的值除以薄膜切片的厚度(0.5μm)所得的值设为“非热塑性聚酰亚胺层的厚度方向的中央部中的双折射率(Δnc)”。In addition, the value obtained by dividing the value of ROa by the thickness (0.5 μm) of the film slice was defined as “in the thickness direction of the non-thermoplastic polyimide layer, in the point of 1.5 μm in the direction of the central portion based on one surface. Birefringence (Δna)”, the value obtained by dividing the value of Rob by the thickness of the film slice (0.5 μm) was set as “in the thickness direction of the non-thermoplastic polyimide layer, taking the other side as the center of the point Birefringence (Δnb) at a point of 1.5 μm in the part direction”, and the value obtained by dividing the value of Roc by the thickness (0.5 μm) of the thin film slice was set as “the center part of the thickness direction of the non-thermoplastic polyimide layer Birefringence (Δnc) in .

Δnv为Δna、Δnb及Δnc的合计(Δna+Δnb+Δnc)的平均值。Δnv is the average value of the sum of Δna, Δnb, and Δnc (Δna+Δnb+Δnc).

[吸湿率(Am1、Am2、Am)的测定][Measurement of moisture absorption rate (A m1 , A m2 , A m )]

使A4尺寸(TD:210mm×MD:297mm)的聚酰亚胺膜在80℃的热风烘箱中干燥1小时,测定干燥后的重量,将其作为干燥重量(W1)。使测定了干燥重量的聚酰亚胺膜在23℃、50%RH的恒温恒湿下吸湿既定时间后,测定其重量并作为吸湿后的重量(W2)。基于所测定的重量,代入下述式中,计算吸湿率。The polyimide film of A4 size (TD: 210 mm×MD: 297 mm) was dried in a hot air oven at 80° C. for 1 hour, and the weight after drying was measured, and this was taken as dry weight (W1). After the polyimide film whose dry weight was measured was allowed to absorb moisture for a predetermined time at a constant temperature and humidity of 23° C. and 50% RH, the weight was measured and used as the weight after moisture absorption (W2). Based on the measured weight, it was substituted into the following formula, and the moisture absorption rate was calculated.

此外,吸湿率(Am)为以80℃干燥1小时后,在23℃、50%RH的恒温恒湿下调湿4小时后的吸湿率,吸湿率(Am1)为以80℃干燥1小时后,在23℃、50%RH的恒温恒湿下调湿1小时后的吸湿率,吸湿率(Am2)为以80℃干燥1小时后,在23℃、50%RH的恒温恒湿下调湿2小时后的吸湿率。In addition, the moisture absorption rate (A m ) is the moisture absorption rate after drying at 80°C for 1 hour, and the humidity is adjusted at a constant temperature and humidity of 23°C and 50%RH for 4 hours, and the moisture absorption rate (A m1 ) is dried at 80°C for 1 hour. After drying at 23°C and 50%RH for 1 hour, the moisture absorption rate (A m2 ) is the moisture absorption rate (A m2 ) after drying at 80°C for 1 hour, and then adjust the humidity at a constant temperature and humidity of 23°C and 50%RH for 1 hour. Moisture uptake after 2 hours.

[式1][Formula 1]

吸湿率(重量%)=(W2-W1)/W1Moisture absorption rate (wt%)=(W2-W1)/W1

[翘曲的测定][Determination of warpage]

对50mm×50mm的尺寸的聚酰亚胺膜在23℃、50%RH下调湿24小时后,将卷曲的方向设为上表面,并设置于平滑的台上。对此时的卷曲量使用游标卡尺进行测定。此时,将膜朝基材蚀刻面侧卷曲的情况记载为正(plus),将朝相反面卷曲的情况记载为负(minus),将膜的四角的测定值的平均设为卷曲量。After the polyimide film having a size of 50 mm×50 mm was adjusted to humidity at 23° C. and 50% RH for 24 hours, the direction of the curl was set as the upper surface, and it was installed on a smooth stage. The amount of curl at this time was measured using a vernier caliper. At this time, the case where the film curled toward the etched surface of the substrate was described as positive (plus), and the case where the film was curled toward the opposite surface was described as negative (minus), and the average of the measured values of the four corners of the film was defined as the amount of curl.

[剥离强度的测定][Measurement of peel strength]

将单面覆铜层叠板(铜箔/树脂层)的铜箔以宽度1.0mm进行电路加工后,以宽度:8cm×长度:4cm切断,制备测定样品。使用腾喜龙测试仪(Tensilon tester)(东洋精机制作所制造的商品名:斯特罗格拉夫(Strograph)VE-1D),利用双面胶带将测定样品的树脂层侧固定于铝板上,将铜箔朝90°方向以50mm/分钟的速度剥离,求出将铜箔从树脂层剥离10mm时的中央强度。After the copper foil of the single-sided copper-clad laminate (copper foil/resin layer) was circuit-processed with a width of 1.0 mm, it was cut at width: 8 cm×length: 4 cm to prepare a measurement sample. Using a Tensilon tester (trade name: Strograph VE-1D, manufactured by Toyo Seiki Co., Ltd.), the resin layer side of the measurement sample was fixed to an aluminum plate with a double-sided tape, The copper foil was peeled off at a speed of 50 mm/min in the 90° direction, and the central strength when the copper foil was peeled off from the resin layer by 10 mm was determined.

实施例及比较例中使用的略号表示以下的化合物。The abbreviations used in Examples and Comparative Examples represent the following compounds.

PMDA:均苯四甲酸二酐PMDA: pyromellitic dianhydride

BPDA:3,3',4,4'-联苯四羧酸二酐BPDA: 3,3',4,4'-biphenyltetracarboxylic dianhydride

m-TB:2,2'-二甲基-4,4'-二氨基联苯m-TB: 2,2'-dimethyl-4,4'-diaminobiphenyl

TPE-R:1,3-双(4-氨基苯氧基)苯TPE-R: 1,3-bis(4-aminophenoxy)benzene

DAPE:4,4'-二氨基二苯基醚DAPE: 4,4'-diaminodiphenyl ether

BAPP:2,2-双[4-(4-氨基苯氧基)苯基]丙烷BAPP: 2,2-bis[4-(4-aminophenoxy)phenyl]propane

p-PDA:对苯二胺p-PDA: p-phenylenediamine

DMAc:N,N-二甲基乙酰胺DMAc: N,N-Dimethylacetamide

(合成例1)(Synthesis Example 1)

在氮气流下,向反应槽中投入23.0重量份的m-TB(0.108摩尔份)及3.5重量份的TPE-R(0.012摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下搅拌而加以溶解。接着,添加26.0重量份的PMDA(0.119摩尔份)后,在室温下继续搅拌3小时而进行聚合反应,获得聚酰胺酸溶液a。聚酰胺酸溶液a的溶液粘度为41,100cps。由所述聚酰胺酸溶液a所得的聚酰亚胺的玻璃化转变温度为421℃,非热塑性,热膨胀系数为10(ppm/K)。Under a nitrogen stream, 23.0 parts by weight of m-TB (0.108 parts by mol), 3.5 parts by weight of TPE-R (0.012 parts by mol), and DMAc in such an amount that the solid content concentration after polymerization was 15 wt % were put into the reaction tank, It was dissolved by stirring at room temperature. Next, after adding 26.0 parts by weight of PMDA (0.119 parts by mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction to obtain a polyamic acid solution a. The solution viscosity of the polyamic acid solution a was 41,100 cps. The glass transition temperature of the polyimide obtained from the polyamic acid solution a was 421° C., non-thermoplastic, and the thermal expansion coefficient was 10 (ppm/K).

(合成例2)(Synthesis example 2)

在氮气流下,向反应槽中投入17.3重量份的m-TB(0.081摩尔份)及10.2重量份的TPE-R(0.035摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下搅拌而加以溶解。接着,添加25.1重量份的PMDA(0.115摩尔份)后,在室温下继续搅拌3小时而进行聚合反应,获得聚酰胺酸溶液b。聚酰胺酸溶液b的溶液粘度为38,200cps。由所述聚酰胺酸溶液b所得的聚酰亚胺的玻璃化转变温度为427℃,非热塑性,热膨胀系数为22(ppm/K)。Under a nitrogen stream, 17.3 parts by weight of m-TB (0.081 parts by mol), 10.2 parts by weight of TPE-R (0.035 parts by mol), and DMAc in such an amount that the solid content concentration after polymerization was 15 wt % were put into the reaction tank, It was dissolved by stirring at room temperature. Next, after adding 25.1 parts by weight of PMDA (0.115 parts by mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction to obtain a polyamic acid solution b. The solution viscosity of the polyamic acid solution b was 38,200 cps. The glass transition temperature of the polyimide obtained from the polyamic acid solution b was 427° C., non-thermoplastic, and the thermal expansion coefficient was 22 (ppm/K).

(合成例3)(Synthesis example 3)

在氮气流下,向反应槽中投入16.4重量份的m-TB(0.077摩尔份)及9.7重量份的TPE-R(0.033摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下搅拌而加以溶解。接着,添加16.7重量份的PMDA(0.077摩尔份)及9.7重量份的BPDA(0.033摩尔份)后,在室温下继续搅拌3小时而进行聚合反应,获得聚酰胺酸溶液c。聚酰胺酸溶液c溶液粘度为46,700cps。由所述聚酰胺酸溶液c所得的聚酰亚胺的玻璃化转变温度为366℃,非热塑性,热膨胀系数为23(ppm/K)。Under a nitrogen stream, 16.4 parts by weight of m-TB (0.077 parts by mol), 9.7 parts by weight of TPE-R (0.033 parts by mol), and DMAc in such an amount that the solid content concentration after polymerization was 15 wt % were put into the reaction tank, It was dissolved by stirring at room temperature. Next, after adding 16.7 parts by weight of PMDA (0.077 parts by mol) and 9.7 parts by weight of BPDA (0.033 parts by mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction to obtain a polyamic acid solution c. The viscosity of the polyamic acid solution c was 46,700 cps. The glass transition temperature of the polyimide obtained from the polyamic acid solution c was 366° C., non-thermoplastic, and the thermal expansion coefficient was 23 (ppm/K).

(合成例4)(Synthesis example 4)

在氮气流下,向反应槽中投入22.4重量份的m-TB(0.105摩尔份)及4.8重量份的BAPP(0.012摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下搅拌而加以溶解。接着,添加25.3重量份的PMDA(0.116摩尔份)后,在室温下继续搅拌3小时而进行聚合反应,获得聚酰胺酸溶液d。聚酰胺酸溶液d的溶液粘度为36,800cps。由所述聚酰胺酸溶液d所得的聚酰亚胺的玻璃化转变温度为408℃,非热塑性,热膨胀系数为9(ppm/K)。Under a nitrogen stream, 22.4 parts by weight of m-TB (0.105 parts by mol), 4.8 parts by weight of BAPP (0.012 parts by mol), and DMAc in an amount such that the solid content concentration after polymerization was 15% by weight were put into the reaction tank, and the reaction was carried out at room temperature. Stir to dissolve. Next, after adding 25.3 parts by weight of PMDA (0.116 parts by mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction, and a polyamic acid solution d was obtained. The solution viscosity of the polyamic acid solution d was 36,800 cps. The glass transition temperature of the polyimide obtained from the polyamic acid solution d was 408° C., non-thermoplastic, and the thermal expansion coefficient was 9 (ppm/K).

(合成例5)(Synthesis Example 5)

在氮气流下,向反应槽中投入12.3重量份的m-TB(0.058摩尔份)、10.1重量份的TPE-R(0.035摩尔份)及2.5重量份的p-PDA(0.023摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下搅拌而加以溶解。接着,添加17.5重量份的PMDA(0.080摩尔份)及10.1重量份的BPDA(0.034摩尔份)后,在室温下继续搅拌3小时而进行聚合反应,获得聚酰胺酸溶液e。聚酰胺酸溶液e的溶液粘度为42,700cps。由所述聚酰胺酸溶液e所得的聚酰亚胺的玻璃化转变温度为360℃,非热塑性,热膨胀系数为18(ppm/K)。Under nitrogen flow, 12.3 parts by weight of m-TB (0.058 parts by mol), 10.1 parts by weight of TPE-R (0.035 parts by mol), and 2.5 parts by weight of p-PDA (0.023 parts by mol) were put into the reaction tank, and after polymerization DMAc in such an amount that the solid content concentration of 15% by weight was dissolved by stirring at room temperature. Next, after adding 17.5 parts by weight of PMDA (0.080 parts by mol) and 10.1 parts by weight of BPDA (0.034 parts by mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction to obtain a polyamic acid solution e. The solution viscosity of the polyamic acid solution e was 42,700 cps. The glass transition temperature of the polyimide obtained from the polyamic acid solution e was 360° C., non-thermoplastic, and the thermal expansion coefficient was 18 (ppm/K).

(合成例6)(Synthesis Example 6)

在氮气流下,向反应槽中投入2.2重量份的m-TB(0.010摩尔份)及27.6重量份的TPE-R(0.094摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下搅拌而加以溶解。接着,添加22.7重量份的PMDA(0.104摩尔份)后,在室温下继续搅拌3小时而进行聚合反应,获得聚酰胺酸溶液f。聚酰胺酸溶液f的溶液粘度为33,900cps。由所述聚酰胺酸溶液f所得的聚酰亚胺的玻璃化转变温度为446℃,热塑性,热膨胀系数为55(ppm/K)。Under a nitrogen stream, 2.2 parts by weight of m-TB (0.010 parts by mol), 27.6 parts by weight of TPE-R (0.094 parts by mol), and DMAc in such an amount that the solid content concentration after polymerization was 15% by weight were put into the reaction tank, It was dissolved by stirring at room temperature. Next, after adding 22.7 parts by weight of PMDA (0.104 parts by mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction, and a polyamic acid solution f was obtained. The solution viscosity of the polyamic acid solution f was 33,900 cps. The glass transition temperature of the polyimide obtained from the said polyamic acid solution f was 446 degreeC, thermoplasticity, and the thermal expansion coefficient was 55 (ppm/K).

(合成例7)(Synthesis Example 7)

在氮气流下,向反应槽中投入30.2重量份的BAPP(0.074摩尔份)及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下搅拌而加以溶解。接着,添加22.3重量份的BPDA(0.076摩尔份)后,在室温下继续搅拌3小时而进行聚合反应,获得聚酰胺酸溶液g。聚酰胺酸溶液g的溶液粘度为9,800cps。由所述聚酰胺酸溶液g所得的聚酰亚胺的玻璃化转变温度为252℃,热塑性,热膨胀系数为46(ppm/K)。Under a nitrogen flow, 30.2 parts by weight of BAPP (0.074 parts by mol) and DMAc in an amount such that the solid content concentration after polymerization was 15% by weight were put into the reaction tank, and the mixture was stirred and dissolved at room temperature. Next, after adding 22.3 parts by weight of BPDA (0.076 parts by mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction to obtain a polyamic acid solution g. The solution viscosity of the polyamic acid solution g was 9,800 cps. The glass transition temperature of the polyimide obtained from the said polyamic acid solution g was 252 degreeC, thermoplasticity, and the thermal expansion coefficient was 46 (ppm/K).

(合成例8)(Synthesis Example 8)

在氮气流下,向反应槽中投入25.8重量份的TPE-R(0.088摩尔份)及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下搅拌而加以溶解。接着,添加26.7重量份的BPDA(0.091摩尔份)后,在室温下继续搅拌3小时而进行聚合反应,获得聚酰胺酸溶液h。聚酰胺酸溶液h的溶液粘度为8,800cps。由所述聚酰胺酸溶液h所得的聚酰亚胺的玻璃化转变温度为243℃,热塑性,热膨胀系数为65(ppm/K)。Under a nitrogen stream, 25.8 parts by weight of TPE-R (0.088 parts by mol) and DMAc after polymerization were put into the reaction tank in such an amount that the solid content concentration after polymerization was 15% by weight, and the mixture was stirred and dissolved at room temperature. Next, after adding 26.7 parts by weight of BPDA (0.091 part by mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction, and a polyamic acid solution h was obtained. The solution viscosity of the polyamic acid solution h was 8,800 cps. The glass transition temperature of the polyimide obtained from the polyamic acid solution h was 243° C., thermoplastic, and the thermal expansion coefficient was 65 (ppm/K).

(合成例9)(Synthesis Example 9)

在氮气流下,向反应槽中投入17.6重量份的TPE-R(0.060摩尔份)及1.6重量份的p-PDA(0.015摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下搅拌而加以溶解。接着,添加22.8重量份的BPDA(0.077摩尔份)后,在室温下继续搅拌3小时而进行聚合反应,获得聚酰胺酸溶液i。聚酰胺酸溶液i的溶液粘度为7,800cps。由所述聚酰胺酸溶液i所得的聚酰亚胺的玻璃化转变温度为239℃,热塑性,热膨胀系数为65(ppm/K)。Under a nitrogen stream, 17.6 parts by weight of TPE-R (0.060 parts by mol), 1.6 parts by weight of p-PDA (0.015 parts by mol), and DMAc so that the solid content concentration after polymerization was 15% by weight were put into the reaction tank, It was dissolved by stirring at room temperature. Next, after adding 22.8 parts by weight of BPDA (0.077 parts by mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction to obtain a polyamic acid solution i. The solution viscosity of the polyamic acid solution i was 7,800 cps. The glass transition temperature of the polyimide obtained from the said polyamic acid solution i was 239 degreeC, thermoplasticity, and the thermal expansion coefficient was 65 (ppm/K).

(合成例10)(Synthesis Example 10)

在氮气流下,向反应槽中投入11.7重量份的DAPE(0.058摩尔份)及11.4重量份的TPE-R(0.039摩尔份)以及聚合后的固体成分浓度成为15重量%的量的DMAc,在室温下搅拌而加以溶解。接着,添加29.5重量份的BPDA(0.100摩尔份)后,在室温下继续搅拌3小时而进行聚合反应,获得聚酰胺酸溶液j。聚酰胺酸溶液j的溶液粘度为11,200cps。由所述聚酰胺酸溶液j所得的聚酰亚胺的玻璃化转变温度为265℃,热塑性,热膨胀系数为58(ppm/K)。Under a nitrogen stream, 11.7 parts by weight of DAPE (0.058 parts by mol), 11.4 parts by weight of TPE-R (0.039 parts by mol), and DMAc in such an amount that the solid content concentration after polymerization was 15 wt % were put into the reaction tank, and the reaction was carried out at room temperature. Stir to dissolve. Next, after adding 29.5 parts by weight of BPDA (0.100 parts by mol), stirring was continued at room temperature for 3 hours to perform a polymerization reaction to obtain a polyamic acid solution j. The solution viscosity of the polyamic acid solution j was 11,200 cps. The glass transition temperature of the polyimide obtained from the said polyamic acid solution j was 265 degreeC, thermoplasticity, and the thermal expansion coefficient was 58 (ppm/K).

[实施例1][Example 1]

在厚度12μm且宽度1,080mm的长条状的电解铜箔的单面上,以固化后的厚度成为2.5μm的方式均匀地涂布合成例7中制备的聚酰胺酸溶液g后(第1层),在120℃下加热干燥而将溶剂去除。在其上以固化后的厚度成为20μm的方式均匀地涂布合成例1中制备的聚酰胺酸溶液a后(第2层),在120℃下加热干燥而将溶剂去除。进而,在其上以固化后的厚度成为2.5μm的方式均匀地涂布合成例7中制备的聚酰胺酸溶液g后(第3层),在120℃下加热干燥而将溶剂去除。然后,从130℃到360℃进行阶段性的热处理,完成酰亚胺化,制备单面覆铜层叠板。After the polyamic acid solution g prepared in Synthesis Example 7 was uniformly applied to one side of a long electrolytic copper foil with a thickness of 12 μm and a width of 1,080 mm so that the thickness after curing was 2.5 μm (the first layer ), heated and dried at 120°C to remove the solvent. After the polyamic acid solution a prepared in Synthesis Example 1 was uniformly applied thereon so that the thickness after curing was 20 μm (second layer), the solution was heated and dried at 120° C. to remove the solvent. Further, the polyamic acid solution g prepared in Synthesis Example 7 was uniformly applied thereon so that the thickness after curing would be 2.5 μm (third layer), and then heated and dried at 120° C. to remove the solvent. Then, stepwise heat treatment is performed from 130° C. to 360° C. to complete imidization, and a single-sided copper-clad laminate is prepared.

[实施例2~实施例8及比较例1~比较例3][Example 2 to Example 8 and Comparative Example 1 to Comparative Example 3]

当将聚酰胺酸的树脂溶液涂布于电解铜箔的单面上之后,进行加热干燥及阶段性的热处理而制备单面覆铜层叠板时,将第1层~第3层中使用的树脂以及厚度变更为下述表1记载的构成,除此以外,以与实施例1同样的方式获得单面覆铜层叠板。After applying the resin solution of polyamic acid to one side of the electrolytic copper foil, heat drying and stepwise heat treatment are performed to prepare a single-sided copper-clad laminate, the resin used in the first to third layers is A single-sided copper-clad laminate was obtained in the same manner as in Example 1, except that the thickness was changed to the configuration described in Table 1 below.

表1中示出,实施例1~实施例8及比较例1~比较例3中获得的单面覆铜层叠板的绝缘树脂层中的非热塑性聚酰亚胺层(A)与热塑性聚酰亚胺层(B)的厚度比(非热塑性聚酰亚胺层(A)/热塑性聚酰亚胺层(B))、面内延迟(RO)、宽度方向(TD方向)的面内延迟(RO)的偏差(ΔRO)加热后的面内延迟(ROh)的值与加热前的面内延迟(RO)的值的差(|ROh-RO|)、非热塑性聚酰亚胺层的厚度方向中的延迟的差(|ROa-Rob|、|ROv-ROa|、|ROv-ROb|)、翘曲量及剥离强度。Table 1 shows the non-thermoplastic polyimide layer (A) and thermoplastic polyamide in the insulating resin layers of the single-sided copper-clad laminates obtained in Examples 1 to 8 and Comparative Examples 1 to 3. Thickness ratio of imine layer (B) (non-thermoplastic polyimide layer (A)/thermoplastic polyimide layer (B)), in-plane retardation (RO), in-plane retardation in width direction (TD direction) ( Variation in RO) (ΔRO) Difference (|ROh-RO|) between the value of in-plane retardation (ROh) after heating and the value of in-plane retardation (RO) before heating, the thickness direction of the non-thermoplastic polyimide layer difference in retardation (|ROa-Rob|, |ROv-ROa|, |ROv-ROb|), warpage amount, and peel strength.

另外,表2中示出,实施例1~实施例8及比较例1~比较例3中获得的单面覆铜层叠板的绝缘树脂层中的面内双折射率(Δn)、宽度方向(TD方向)的面内双折射率(Δn)的偏差[Δ(Δn)]、加热后的面内双折射率(Δnh)的值与加热前的面内双折射率(Δn)的值的差(|Δnh-Δn|)、非热塑性聚酰亚胺层的厚度方向中的双折射率的差(|Δna-Δnb|、|Δnv-Δna|、|Δnv-Δnb|)。In addition, Table 2 shows the in-plane birefringence (Δn) and the width direction ( Variation [Δ(Δn)] of in-plane birefringence (Δn) in TD direction), difference between the value of in-plane birefringence (Δn) after heating and the value of in-plane birefringence (Δn) before heating (|Δnh-Δn|), the difference in birefringence in the thickness direction of the non-thermoplastic polyimide layer (|Δna-Δnb|, |Δnv-Δna|, |Δnv-Δnb|).

进而,表3中示出,实施例1~实施例4、实施例6、实施例8及比较例1~比较例3中获得的单面覆铜层叠板的绝缘树脂层中的吸湿率(Am)、调湿1小时后的吸湿率(Am1)与调湿2小时后的吸湿率(Am2)的差(Am2-Am1)。Furthermore, Table 3 shows the moisture absorption rate (A m ), and the difference (A m2 -A m1 ) between the moisture absorption rate (A m1 ) after humidity conditioning for 1 hour and the moisture absorption rate (A m2 ) after humidity conditioning for 2 hours.

<IC芯片安装性><IC chip mountability>

在实施例1~实施例8及比较例1~比较例3中所制作的单面覆铜层叠板的铜箔表面层压干膜(dry film),对干膜抗蚀剂进行图案化(patterning)之后,沿着所述图案蚀刻铜箔而形成电路,制备电路基板。在400℃下,通过0.5秒的接合处理将IC芯片安装于所获得的电路基板的铜布线侧,结果,对于实施例1~实施例8,不存在铜布线与IC芯片的位置偏移,未发生不良状况。另一方面,对于比较例1,发生了铜布线与IC芯片的位置偏移,对于比较例2及比较例3,发生了铜布线与IC芯片的位置偏移及电路基板的翘曲,且安装中发生了不良状况。Dry film was laminated on the copper foil surface of the single-sided copper-clad laminates produced in Examples 1 to 8 and Comparative Examples 1 to 3, and patterning of the dry film resist was performed. ), the copper foil was etched along the pattern to form a circuit, and a circuit board was prepared. As a result of mounting an IC chip on the copper wiring side of the obtained circuit board by a bonding process at 400° C. for 0.5 seconds, there was no positional shift between the copper wiring and the IC chip in Examples 1 to 8, and no Bad condition occurs. On the other hand, in the comparative example 1, the positional displacement of the copper wiring and the IC chip occurred, and in the comparative examples 2 and 3, the positional displacement of the copper wiring and the IC chip and the warpage of the circuit board occurred, and the mounting An adverse situation has occurred.

[表1][Table 1]

Figure BDA0001811565610000201
Figure BDA0001811565610000201

[表2][Table 2]

Figure BDA0001811565610000211
Figure BDA0001811565610000211

[表3][table 3]

Figure BDA0001811565610000221
Figure BDA0001811565610000221

以上,以例示的目的对本发明的实施方式进行了详细说明,但本发明并不受所述实施方式制约,可进行各种变形。As mentioned above, although embodiment of this invention was described in detail for the purpose of illustration, this invention is not limited by the said embodiment, Various deformation|transformation is possible.

Claims (7)

1.一种覆金属层叠板,包括:绝缘树脂层;及层叠于所述绝缘树脂层的至少单面上的金属层,所述覆金属层叠板的特征在于:1. A metal-clad laminate comprising: an insulating resin layer; and a metal layer laminated on at least one side of the insulating resin layer, wherein the metal-clad laminate is characterized by: 所述绝缘树脂层在包含非热塑性聚酰亚胺的非热塑性聚酰亚胺层的至少一个面上具有包含热塑性聚酰亚胺的热塑性聚酰亚胺层,The insulating resin layer has a thermoplastic polyimide layer containing thermoplastic polyimide on at least one surface of the non-thermoplastic polyimide layer containing non-thermoplastic polyimide, 所述非热塑性聚酰亚胺及所述热塑性聚酰亚胺所含的四羧酸残基以及二胺残基都为芳香族四羧酸残基以及芳香族二胺残基,The tetracarboxylic acid residues and diamine residues contained in the non-thermoplastic polyimide and the thermoplastic polyimide are both aromatic tetracarboxylic acid residues and aromatic diamine residues, 相对于所述非热塑性聚酰亚胺所含的所有二胺残基100摩尔份,选自下述通式(2)及通式(3)中的二胺残基的合计量为5摩尔份~30摩尔份的范围内,The total amount of diamine residues selected from the following general formula (2) and general formula (3) is 5 mole parts with respect to 100 mole parts of all the diamine residues contained in the non-thermoplastic polyimide In the range of ~30 mole parts, 相对于所述热塑性聚酰亚胺所含的所有二胺残基100摩尔份,选自下述通式(2)及通式(3)中的二胺残基的合计量为50摩尔份以上,The total amount of diamine residues selected from the following general formula (2) and general formula (3) is 50 mole parts or more with respect to 100 mole parts of all the diamine residues contained in the thermoplastic polyimide ,
Figure DEST_PATH_IMAGE002
Figure DEST_PATH_IMAGE002
通式(2)及通式(3)中,R5、R6、R7及R8分别独立地表示卤素原子、或者碳数1〜4的可经卤素原子取代的烷基或烷氧基、或烯基,X独立地表示选自-O-、-S-、-CH2-、-CH(CH3)-、-C(CH3)2-、-CO-、-COO-、-SO2-、-NH-或-NHCO-中的二价基,X1及X2分别独立地表示单键、选自-O-、-S-、-CH2-、-CH(CH3)-、-C(CH3)2-、-CO-、-COO-、-SO2-、-NH-或-NHCO-中的二价基,但将X1及X2两者为单键的情况除外,m、n、o及p独立地表示0〜4的整数,且In general formula (2) and general formula (3), R 5 , R 6 , R 7 and R 8 each independently represent a halogen atom, or an alkyl or alkoxy group having 1 to 4 carbon atoms which may be substituted by a halogen atom , or alkenyl, X independently represents selected from -O-, -S-, -CH 2 -, -CH(CH 3 )-, -C(CH 3 ) 2 -, -CO-, -COO-, - Divalent group in SO 2 -, -NH- or -NHCO-, X 1 and X 2 each independently represent a single bond, selected from -O-, -S-, -CH 2 -, -CH(CH 3 ) A divalent group in -, -C(CH 3 ) 2 -, -CO-, -COO-, -SO 2 -, -NH- or -NHCO-, but both X 1 and X 2 are single bonds Except where m, n, o, and p independently represent integers from 0 to 4, and 所述绝缘树脂层满足下述条件i及条件ii:The insulating resin layer satisfies the following conditions i and ii: i、面内双折射率Δn的值为2×10-3以下;i. The value of the in-plane birefringence Δn is 2×10 -3 or less; ii、宽度方向的面内双折射率Δn的偏差Δ(Δn)为4×10-4以下;并且ii. The deviation Δ(Δn) of the in-plane birefringence Δn in the width direction is 4×10 −4 or less; and 进而满足下述条件iii、或者条件iv与条件v两者、或者条件vi与条件vii两者:And then satisfy the following condition iii, or both condition iv and condition v, or both condition vi and condition vii: iii、以250℃加热30分钟后的面内双折射率Δnh的值与加热前的面内双折射率Δn的值的差Δnh-Δn为±2×10-4以下;iii. The difference Δnh-Δn between the value of the in-plane birefringence Δnh after heating at 250° C. for 30 minutes and the value of the in-plane birefringence Δn before heating is ±2×10 −4 or less; iv、在所述非热塑性聚酰亚胺层的厚度方向上,以一个面为基点的中央部方向上1.5 μm的点中的双折射率Δna、与以另一个面为基点的中央部方向上1.5 μm的点中的双折射率Δnb的差Δna-Δnb为±0.01以下;iv. In the thickness direction of the non-thermoplastic polyimide layer, the birefringence Δna at a point of 1.5 μm in the direction of the central part based on one surface and the direction of the central part based on the other surface The difference Δna-Δnb of the birefringence Δnb in the point of 1.5 μm is ±0.01 or less; v、所述Δna及所述Δnb与平均值Δnv的差Δnv-Δna及差Δnv-Δnb均为±0.01以下,其中所述平均值Δnv为所述Δna及所述Δnb以及厚度方向的中央部中的双折射率Δnc的合计Δna+Δnb+Δnc的平均值;v. The difference Δnv-Δna and the difference Δnv-Δnb between the Δna and the Δnb and the average value Δnv are both ±0.01 or less, wherein the average value Δnv is the central part of the Δna and the Δnb and the thickness direction The average value of the total birefringence Δnc of Δna+Δnb+Δnc; vi、以80℃干燥1小时后,在23℃、50%相对湿度的恒温恒湿下,调湿4小时后的吸湿率Am为1.0重量%以下;vi. After drying at 80°C for 1 hour, under the constant temperature and humidity of 23°C and 50% relative humidity, the moisture absorption rate A m after humidity adjustment for 4 hours is less than 1.0% by weight; vii、以80℃干燥1小时后,在23℃、50%相对湿度的恒温恒湿下,调湿1小时后的吸湿率Am1及在相同条件下调湿2小时后的吸湿率Am2的差Am2-Am1为0.2重量%以下。vii. After drying at 80°C for 1 hour, under the constant temperature and humidity of 23°C and 50% relative humidity, the difference between the moisture absorption rate A m1 after conditioning for 1 hour and the moisture absorption rate A m2 after conditioning for 2 hours under the same conditions A m2 -A m1 is 0.2 wt % or less.
2.根据权利要求1所述的覆金属层叠板,其特征在于,相对于所述非热塑性聚酰亚胺所含的所有二胺残基100摩尔份,由下述通式(1)所表示的二胺化合物所衍生的二胺残基为20摩尔份以上,2 . The metal-clad laminate according to claim 1 , which is represented by the following general formula (1) with respect to 100 parts by mole of all diamine residues contained in the non-thermoplastic polyimide. 3 . The diamine residue derived from the diamine compound is more than 20 mole parts,
Figure DEST_PATH_IMAGE004
Figure DEST_PATH_IMAGE004
通式(1)中,连结基Z表示单键或-COO-,Y独立地表示可经卤素原子或苯基取代的碳数1~3的一价烃或碳数1~3的烷氧基、或碳数1~3的全氟烷基、或烯基,n表示0~2的整数,p及q独立地表示0~4的整数。In the general formula (1), the linking group Z represents a single bond or -COO-, and Y independently represents a monovalent hydrocarbon having 1 to 3 carbon atoms or an alkoxy group having 1 to 3 carbon atoms which may be substituted by a halogen atom or a phenyl group , or a perfluoroalkyl group having 1 to 3 carbon atoms, or an alkenyl group, n represents an integer of 0 to 2, and p and q independently represent an integer of 0 to 4.
3.根据权利要求2所述的覆金属层叠板,其特征在于,相对于所述非热塑性聚酰亚胺所含的所有二胺残基100摩尔份,由所述通式(1)所表示的二胺化合物所衍生的二胺残基为70摩尔份~95摩尔份的范围内。3 . The metal-clad laminate according to claim 2 , wherein, with respect to 100 parts by mole of all diamine residues contained in the non-thermoplastic polyimide, it is represented by the general formula (1). 4 . The diamine residue derived from the diamine compound is in the range of 70 mole parts to 95 mole parts. 4.根据权利要求1至3中任一项所述的覆金属层叠板,其特征在于,所述通式(2)所表示的二胺残基为由1,3-双(4-氨基苯氧基)苯所衍生的二胺残基,且4. The metal-clad laminate according to any one of claims 1 to 3, wherein the diamine residue represented by the general formula (2) is composed of 1,3-bis(4-aminobenzene) oxy) benzene-derived diamine residue, and 所述通式(3)所表示的二胺残基为由2,2-双[4-(4-氨基苯氧基)苯基]丙烷所衍生的二胺残基。The diamine residue represented by the general formula (3) is a diamine residue derived from 2,2-bis[4-(4-aminophenoxy)phenyl]propane. 5.根据权利要求1至3中任一项所述的覆金属层叠板,其特征在于,所述非热塑性聚酰亚胺层的厚度A与所述热塑性聚酰亚胺层的厚度B的厚度比A/B为1~20的范围内。5. The metal-clad laminate according to any one of claims 1 to 3, wherein the thickness A of the non-thermoplastic polyimide layer and the thickness B of the thermoplastic polyimide layer are the thicknesses The ratio A/B is in the range of 1 to 20. 6.根据权利要求1至3中任一项所述的覆金属层叠板,其特征在于,宽度方向的长度为490 mm以上。6 . The metal-clad laminate according to claim 1 , wherein the length in the width direction is 490 mm or more. 7 . 7.一种电路基板,其特征在于,其是将如权利要求1至6中任一项所述的覆金属层叠板的所述金属层加工为布线而成。7 . A circuit board obtained by processing the metal layer of the metal-clad laminate according to claim 1 to wiring. 8 .
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