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CN109212843A - A kind of LCoS micro-display based on bilateral IPS electrode structure - Google Patents

A kind of LCoS micro-display based on bilateral IPS electrode structure Download PDF

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Publication number
CN109212843A
CN109212843A CN201811154193.0A CN201811154193A CN109212843A CN 109212843 A CN109212843 A CN 109212843A CN 201811154193 A CN201811154193 A CN 201811154193A CN 109212843 A CN109212843 A CN 109212843A
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substrate
bilateral
electrode
electrode structure
ips
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王琼华
田莉兰
储繁
窦虎
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Sichuan University
Beihang University
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Sichuan University
Beihang University
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • G02F1/134309Electrodes characterised by their geometrical arrangement
    • G02F1/134363Electrodes characterised by their geometrical arrangement for applying an electric field parallel to the substrate, i.e. in-plane switching [IPS]
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1334Constructional arrangements; Manufacturing methods based on polymer dispersed liquid crystals, e.g. microencapsulated liquid crystals
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136277Active matrix addressed cells formed on a semiconductor substrate, e.g. of silicon
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/137Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/137Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering
    • G02F1/13775Polymer-stabilized liquid crystal layers
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/137Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering
    • G02F1/13793Blue phases

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Liquid Crystal (AREA)
  • Dispersion Chemistry (AREA)
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  • Microelectronics & Electronic Packaging (AREA)
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Abstract

本发明提出一种基于双边IPS电极结构的LCoS微显示器。该微显示器由上基板、蓝相液晶层、下基板构成;上基板和下基板彼此平行设置;上基板包括偏振器、二分之一波片、四分之一波片、玻璃基板、上基板透明平面公共电极、上基板透明平面像素电极;下基板包括下基板透明平面公共电极、下基板透明平面像素电极、绝缘层、金属漫反射膜、单晶硅基板;上下基板的透明平面公共电极和透明平面像素电极彼此相对平行设置并且相间排列,构成双边的IPS电极结构。本发明的基于双边IPS电极结构的LCoS微显示器的响应时间为亚毫秒,制作工艺简单,驱动电压较低。The present invention provides an LCoS microdisplay based on a bilateral IPS electrode structure. The microdisplay consists of an upper substrate, a blue phase liquid crystal layer, and a lower substrate; the upper substrate and the lower substrate are arranged in parallel with each other; the upper substrate includes a polarizer, a half-wave plate, a quarter-wave plate, a glass substrate, and an upper substrate Transparent plane common electrode, upper substrate transparent plane pixel electrode; lower substrate includes lower substrate transparent plane common electrode, lower substrate transparent plane pixel electrode, insulating layer, metal diffuse reflection film, single crystal silicon substrate; transparent plane common electrodes of upper and lower substrates and The transparent planar pixel electrodes are arranged parallel to each other and arranged alternately to form a bilateral IPS electrode structure. The response time of the LCoS microdisplay based on the double-sided IPS electrode structure of the present invention is sub-millisecond, the manufacturing process is simple, and the driving voltage is low.

Description

A kind of LCoS micro-display based on bilateral IPS electrode structure
Technical field
It is specifically a kind of to be based on bilateral IPS (In Plane Switching) electrode the present invention relates to field of liquid crystal display LCoS (Liquid Crystal on Silicon) micro-display of structure.
Background technique
LCoS display technology is to combine LCD (Liquid Crystal Display) and CMOS (Complementary Metal Oxide Semiconductor) integrated circuit Reflective liquid crystal displays technology, due to its is low in energy consumption, small in size, point Resolution is high, has very big advantage in portable display application aspect, global micro-display market all shows good growth Situation.
For traditional transmission-type TFT-LCD, due to the shared face within the pixel TFT (Thin Film Transistor) Product cannot complete light transmission, cannot be led to not show correct ash by the control of voltage by the light in TFT occupied area region Rank is equivalent to the dead zone there are light modulation, needs to be covered using black matrix, so that aperture opening ratio is lower.It is saturating compared to traditional Formula TFT-LCD is penetrated, the circuit and transistor of the driving pixel of LCoS micro-display are integrated on monocrystalline silicon substrate, and are located at pixel The lower section of reflecting mirror, so that aperture opening ratio is improved, and monocrystalline silicon electron mobility is higher than amorphous silicon electron mobility, pixel ruler It is very little to accomplish very little, to realize higher resolution ratio.
General LCoS display technology mainly uses sequential colorization display system, compared to the optical system of traditional three-chip type, The structure for the single-panel optical system that time-sequential colour projection display uses is simpler, but in order to reduce motion artefact, liquid crystal Box should have ultrafast response speed.Currently, TN (Twisted Nematic) liquid crystal cell, hybrid-type TN liquid crystal cell, VA The liquid crystal cell of (Vertical Alignment) orientation has been applied to reflective LCoS Projection Display, if liquid crystal cell box is thick It is sufficiently small, the response time can be greatly reduced, however, the uniformity coefficient of box thickness is but difficult to control when box thickness is reduced to 1 μm.
Emerging polymer stabilizing blue phase liquid crystal has response time of sub- millisecond due to it, without oriented layer and dark-state is in Optical isotropy, if electrode uses IPS structure, as long as liquid crystal cell thickness is more than the maximum penetration depth of electric field, transmitance pair The variation of box thickness is just unobvious, can be applied to LCoS Projection Display.However traditional blue phase liquid crystal based on IPS electrode structure is aobvious Show that the operating voltage (~50V) of device is relatively high.
Present invention aims to overcome that defect existing in the prior art, proposes a kind of based on bilateral IPS electrode structure LCoS micro-display, which has the gray-scale response time of sub- millisecond, and manufacture craft is simple, driving voltage relative to Traditional is greatly lowered based on IPS electrode structure blue phase liquid crystal display.
The present invention is achieved by the following technical solutions:
The present invention is made of upper substrate 13, blue phase liquid crystal layer 7, lower substrate 14;Upper substrate and lower substrate are set parallel to each other;Upper base Plate 13 includes polarizer 1, half wave plate 2, quarter-wave plate 3, glass substrate 4, upper substrate transparent flat public electrode 5, upper substrate transparent flat pixel electrode 6;Lower substrate includes lower substrate transparent flat public electrode 8, lower substrate transparent flat picture Plain electrode 9, insulating layer 10, metal diffusive reflective film 11, monocrystalline silicon substrate 12.
The half wave plate 2 and quarter-wave plate 3 constitute circular polarizing disk, are passed through by the linearly polarized light of polarizer 1 Become circularly polarized light after circular polarizing disk, after blue phase liquid crystal layer 7 is reflected by metal diffusive reflective film 11, half-wave loss, phase occurs Change π, then the direction for the linearly polarized light being emitted through blue phase liquid crystal layer 7 and circular polarizing disk and the polarization axle of polarizer 1 it is mutually orthogonal, Make display that good dark-state be presented when voltage is not added, realizes the wide viewing angle characteristics of display.
The blue phase liquid crystal layer 7 is had the response time of sub- millisecond, is able to achieve using the blue phase liquid crystal of polymer stabilizing Sequential colorization is shown, reduces motion artefact;Blue phase liquid crystal dark-state is optical isotropy, so that viewing visual angle is wider;It is not necessarily to Spin coating alignment agent is orientated, and manufacture craft is simplified.The thickness of the blue phase liquid crystal layer 7 is controlled using introns.
The metal diffusive reflective film 11 is placed in the surface of monocrystalline silicon substrate 12, is made of the metal of high reflectance, Surface uneven, for reflecting incident ray.Reflective display is hardly limited by aperture opening ratio, and higher light reflection can be obtained Rate.The insulating layer 10 is made of oxide, for avoiding the voltage shield effect of metal diffusive reflective film 11.
The upper substrate transparent flat public electrode 5, upper substrate transparent flat pixel electrode 6, lower substrate transparent flat are public Common electrode 8 and lower substrate transparent flat pixel electrode 9 use the electrically conducting transparents material such as tin indium oxide (ITO) or indium zinc oxide (IZO) Material production, has high transmittance and high conductivity.Upper substrate transparent flat public electrode 5, upper substrate transparent flat pixel electrode 6, lower substrate transparent flat public electrode 8 and lower substrate transparent flat pixel electrode 9 are all stripe-shape plane electrode and width, gap It is all identical, the setting parallel with respect to each other. of the transparent flat public electrode and transparent flat pixel electrode of upper and lower base plate and alternate row Column, constitute bilateral IPS electrode structure, increase the penetration depth of electric field, reduce operating voltage.
The monocrystalline silicon substrate 12 is the monocrystalline silicon substrate with CMOS integrated circuit.Based on bilateral IPS electrode structure The liquid crystal cell of LCoS micro-display is formed by monocrystalline silicon substrate 12 and 4 sealing-in of glass substrate, the coefficient of expansion and silicon of glass used The coefficient of expansion of piece is suitable.Monocrystalline silicon has good electron mobility, can integrate highdensity switch matrix, the picture of liquid crystal cell Element is able to achieve high-resolution and shows having a size of micron dimension.
Shown by reference numeral in above-mentioned each attached drawing are as follows:
1 polarizer, 2 half wave plates, 3 quarter-wave plates, 4 glass substrates, 5 upper substrate transparent flat public electrodes, on 6 Substrate transparent flat pixel electrode, 7 blue phase liquid crystal layers, 8 lower substrate transparent flat public electrodes, 9 lower substrate transparent flat pixels Electrode, 10 insulating layers, 11 metal diffusive reflective films, 12 monocrystalline silicon substrates, 13 upper substrates, 14 lower substrates.
Detailed description of the invention
Attached drawing 1 is the structural representation of the LCoS micro-display provided in an embodiment of the present invention based on bilateral IPS electrode structure Figure.
Attached drawing 2 is that the LCoS micro-display upper substrate provided in an embodiment of the present invention based on bilateral IPS electrode structure is transparent The positional relationship top view of plane public electrode 5, upper substrate transparent flat pixel electrode 6.
Attached drawing 3 is voltage-reflection of the LCoS micro-display provided in an embodiment of the present invention based on bilateral IPS electrode structure Rate curve.
Attached drawing 4 be the LCoS micro-display provided in an embodiment of the present invention based on bilateral IPS electrode structure etc. contrasts Visual angle figure.
Specific embodiment
To enable those skilled in the art to be further understood that the present invention, this hair is explained in detail below in conjunction with attached drawing Bright specific embodiment.It should be noted that attached drawing is only for the purpose of description, and map not according to original size.
Attached drawing 1 is the structural representation of the LCoS micro-display provided in an embodiment of the present invention based on bilateral IPS electrode structure Figure, the micro-display are made of upper substrate 13, blue phase liquid crystal layer 7, lower substrate 14.Upper substrate 13 includes polarizer 1, half Wave plate 2, quarter-wave plate 3, glass substrate 4, upper substrate transparent flat public electrode 5, upper substrate transparent flat pixel electrode 6;Lower substrate includes that lower substrate transparent flat public electrode 8, lower substrate transparent flat pixel electrode 9, insulating layer 10, metal are unrestrained anti- Penetrate film 11, monocrystalline silicon substrate 12;Half wave plate 2 is negativity, and quarter-wave plate 3 is positivity, half wave plate 2 and four / mono- wave plate 3 constitutes circular polarizing disk, so that good dark-state is presented in the display when voltage is not added;Blue phase liquid crystal layer 7 use the blue phase liquid crystal of polymer stabilizing;Upper substrate and lower substrate transparent flat public electrode and transparent flat pixel electrode are adopted It is made of transparent conductive material tin indium oxide (ITO), when to upper substrate transparent flat pixel electrode 6 and lower substrate transparent flat picture When plain electrode 9 applies voltage, blue phase liquid crystal becomes anisotropy from original isotropism, accumulates to incident and reflection light Phase difference, to change the grayscale of pixel;The transparent flat public electrode and transparent flat pixel electrode of upper substrate and lower substrate All for stripe-shape plane electrode and width, gap are all identical, the transparent flat public electrode and transparent flat pixel electricity of upper and lower base plate Extremely it is parallel with respect to each other. setting and it is spaced, constitute bilateral IPS electrode structure, increase the penetration depth of electric field, reduce Operating voltage;Metal diffusive reflective film is made of metallic aluminium and reflectance coating rough surface, is attached on monocrystalline silicon substrate 12, so that entering It penetrates light and reflection exiting liquid crystal box again occurs.
Attached drawing 2 is in LCoS micro-display one pixel provided in an embodiment of the present invention based on bilateral IPS electrode structure The positional relationship top view of upper substrate and lower substrate transparent flat public electrode and transparent flat pixel electrode, transparent flat are public Electrode, transparent flat pixel electrode width are w, and gap is g, and the width of a pixel is l.
1 light transmission shaft of analyzer is set as 0 °, the light transmission shaft of half wave plate 2 is relative to the direction of glass substrate 4 75 °, 3 light transmission shaft of quarter-wave plate is -75 ° relative to the direction of glass substrate 4.
The characterisitic parameter of liquid crystal material used in the present embodiment are as follows: the Refractive Index of Material of blue phase liquid crystal is no=1.5, ne =1.654, dielectric coefficient ε=94, in wavelength X=550nm, greatest birefringence 0.154, saturation electric field is 4.15V/ μm, Kerr coefficient K=16.3nm/V2
7 thickness d=5 μm of blue phase liquid crystal layer in the present embodiment, upper substrate and lower substrate transparent flat public electrode and transparent W=1 μm of the width of pixel electrode, g=2 μm of gap.
Attached drawing 3 is voltage-reflection of the LCoS micro-display provided in an embodiment of the present invention based on bilateral IPS electrode structure Rate curve.By attached drawing 3 it is found that the crest voltage of the embodiment of the present invention is 9.6Vrms, peak reflectivity 60%.
Attached drawing 4 be the LCoS micro-display provided in an embodiment of the present invention based on bilateral IPS electrode structure etc. contrasts Visual angle figure, by attached drawing 4 it is found that the visual angle of the present embodiment is in perfect proportion, visual angle of the contrast greater than 1000:1 can reach 20 °. LCoS micro-display proposed by the present invention based on bilateral IPS electrode structure is suitably applied large high-definition screen curtain projector, portable Formula minitype projection machine and near-eye display.
The above description is only a preferred embodiment of the present invention, however, the present invention is not limited thereto embodiment.The common skill of this field Art personnel should be appreciated that in the case where not departing from the spirit and scope of the present invention being defined by the claims to its shape The various changes that formula and details are made should all belong in the scope of the present invention.

Claims (4)

1.一种基于双边IPS电极结构的LCoS微显示器,该微显示器由上基板、蓝相液晶层、下基板构成;上基板和下基板彼此平行设置;上基板包括偏振器、二分之一波片、四分之一波片、玻璃基板、上基板透明平面公共电极、上基板透明平面像素电极;下基板包括下基板透明平面公共电极、下基板透明平面像素电极、绝缘层、金属漫反射膜、单晶硅基板。1. an LCoS microdisplay based on a bilateral IPS electrode structure, the microdisplay is made up of an upper substrate, a blue phase liquid crystal layer, a lower substrate; the upper substrate and the lower substrate are arranged in parallel with each other; the upper substrate comprises a polarizer, a half-wave plate, quarter-wave plate, glass substrate, upper substrate transparent plane common electrode, upper substrate transparent plane pixel electrode; lower substrate includes lower substrate transparent plane common electrode, lower substrate transparent plane pixel electrode, insulating layer, metal diffuse reflection film , Monocrystalline silicon substrate. 2.根据权利要求1所述的一种基于双边IPS电极结构的LCoS微显示器,其特征为,所述的蓝相液晶层采用聚合物稳定的蓝相液晶。2 . The LCoS microdisplay based on a bilateral IPS electrode structure according to claim 1 , wherein the blue phase liquid crystal layer adopts polymer-stabilized blue phase liquid crystal. 3 . 3.根据权利要求1所述的一种基于双边IPS电极结构的LCoS微显示器,其特征为,所述金属漫反射膜置于单晶硅基板的表面。3 . The LCoS microdisplay based on a bilateral IPS electrode structure according to claim 1 , wherein the metal diffuse reflection film is placed on the surface of the monocrystalline silicon substrate. 4 . 4.根据权利要求1所述的一种基于双边IPS电极结构的LCoS微显示器,其特征为,所述上下基板的透明平面公共电极和透明平面像素电极都为条形平面电极且电极宽度、间隙都相同。4. a kind of LCoS microdisplay based on bilateral IPS electrode structure according to claim 1, is characterized in that, the transparent plane common electrode and the transparent plane pixel electrode of described upper and lower substrates are strip plane electrodes and electrode width, gap all the same.
CN201811154193.0A 2018-09-30 2018-09-30 A kind of LCoS micro-display based on bilateral IPS electrode structure Pending CN109212843A (en)

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CN110221499A (en) * 2019-05-27 2019-09-10 北京航空航天大学 The LCoS micro-display of low edge field crosstalk
WO2021001493A3 (en) * 2019-07-02 2021-03-11 Dualitas Ltd Spatial light modulator
US11927851B2 (en) 2021-01-18 2024-03-12 Beijing Boe Display Technology Co., Ltd. Display panel and display device

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Application publication date: 20190115