Background technique
LCoS display technology is to combine LCD (Liquid Crystal Display) and CMOS (Complementary
Metal Oxide Semiconductor) integrated circuit Reflective liquid crystal displays technology, due to its is low in energy consumption, small in size, point
Resolution is high, has very big advantage in portable display application aspect, global micro-display market all shows good growth
Situation.
For traditional transmission-type TFT-LCD, due to the shared face within the pixel TFT (Thin Film Transistor)
Product cannot complete light transmission, cannot be led to not show correct ash by the control of voltage by the light in TFT occupied area region
Rank is equivalent to the dead zone there are light modulation, needs to be covered using black matrix, so that aperture opening ratio is lower.It is saturating compared to traditional
Formula TFT-LCD is penetrated, the circuit and transistor of the driving pixel of LCoS micro-display are integrated on monocrystalline silicon substrate, and are located at pixel
The lower section of reflecting mirror, so that aperture opening ratio is improved, and monocrystalline silicon electron mobility is higher than amorphous silicon electron mobility, pixel ruler
It is very little to accomplish very little, to realize higher resolution ratio.
General LCoS display technology mainly uses sequential colorization display system, compared to the optical system of traditional three-chip type,
The structure for the single-panel optical system that time-sequential colour projection display uses is simpler, but in order to reduce motion artefact, liquid crystal
Box should have ultrafast response speed.Currently, TN (Twisted Nematic) liquid crystal cell, hybrid-type TN liquid crystal cell, VA
The liquid crystal cell of (Vertical Alignment) orientation has been applied to reflective LCoS Projection Display, if liquid crystal cell box is thick
It is sufficiently small, the response time can be greatly reduced, however, the uniformity coefficient of box thickness is but difficult to control when box thickness is reduced to 1 μm.
Emerging polymer stabilizing blue phase liquid crystal has response time of sub- millisecond due to it, without oriented layer and dark-state is in
Optical isotropy, if electrode uses IPS structure, as long as liquid crystal cell thickness is more than the maximum penetration depth of electric field, transmitance pair
The variation of box thickness is just unobvious, can be applied to LCoS Projection Display.However traditional blue phase liquid crystal based on IPS electrode structure is aobvious
Show that the operating voltage (~50V) of device is relatively high.
Present invention aims to overcome that defect existing in the prior art, proposes a kind of based on bilateral IPS electrode structure
LCoS micro-display, which has the gray-scale response time of sub- millisecond, and manufacture craft is simple, driving voltage relative to
Traditional is greatly lowered based on IPS electrode structure blue phase liquid crystal display.
The present invention is achieved by the following technical solutions:
The present invention is made of upper substrate 13, blue phase liquid crystal layer 7, lower substrate 14;Upper substrate and lower substrate are set parallel to each other;Upper base
Plate 13 includes polarizer 1, half wave plate 2, quarter-wave plate 3, glass substrate 4, upper substrate transparent flat public electrode
5, upper substrate transparent flat pixel electrode 6;Lower substrate includes lower substrate transparent flat public electrode 8, lower substrate transparent flat picture
Plain electrode 9, insulating layer 10, metal diffusive reflective film 11, monocrystalline silicon substrate 12.
The half wave plate 2 and quarter-wave plate 3 constitute circular polarizing disk, are passed through by the linearly polarized light of polarizer 1
Become circularly polarized light after circular polarizing disk, after blue phase liquid crystal layer 7 is reflected by metal diffusive reflective film 11, half-wave loss, phase occurs
Change π, then the direction for the linearly polarized light being emitted through blue phase liquid crystal layer 7 and circular polarizing disk and the polarization axle of polarizer 1 it is mutually orthogonal,
Make display that good dark-state be presented when voltage is not added, realizes the wide viewing angle characteristics of display.
The blue phase liquid crystal layer 7 is had the response time of sub- millisecond, is able to achieve using the blue phase liquid crystal of polymer stabilizing
Sequential colorization is shown, reduces motion artefact;Blue phase liquid crystal dark-state is optical isotropy, so that viewing visual angle is wider;It is not necessarily to
Spin coating alignment agent is orientated, and manufacture craft is simplified.The thickness of the blue phase liquid crystal layer 7 is controlled using introns.
The metal diffusive reflective film 11 is placed in the surface of monocrystalline silicon substrate 12, is made of the metal of high reflectance,
Surface uneven, for reflecting incident ray.Reflective display is hardly limited by aperture opening ratio, and higher light reflection can be obtained
Rate.The insulating layer 10 is made of oxide, for avoiding the voltage shield effect of metal diffusive reflective film 11.
The upper substrate transparent flat public electrode 5, upper substrate transparent flat pixel electrode 6, lower substrate transparent flat are public
Common electrode 8 and lower substrate transparent flat pixel electrode 9 use the electrically conducting transparents material such as tin indium oxide (ITO) or indium zinc oxide (IZO)
Material production, has high transmittance and high conductivity.Upper substrate transparent flat public electrode 5, upper substrate transparent flat pixel electrode
6, lower substrate transparent flat public electrode 8 and lower substrate transparent flat pixel electrode 9 are all stripe-shape plane electrode and width, gap
It is all identical, the setting parallel with respect to each other. of the transparent flat public electrode and transparent flat pixel electrode of upper and lower base plate and alternate row
Column, constitute bilateral IPS electrode structure, increase the penetration depth of electric field, reduce operating voltage.
The monocrystalline silicon substrate 12 is the monocrystalline silicon substrate with CMOS integrated circuit.Based on bilateral IPS electrode structure
The liquid crystal cell of LCoS micro-display is formed by monocrystalline silicon substrate 12 and 4 sealing-in of glass substrate, the coefficient of expansion and silicon of glass used
The coefficient of expansion of piece is suitable.Monocrystalline silicon has good electron mobility, can integrate highdensity switch matrix, the picture of liquid crystal cell
Element is able to achieve high-resolution and shows having a size of micron dimension.
Shown by reference numeral in above-mentioned each attached drawing are as follows:
1 polarizer, 2 half wave plates, 3 quarter-wave plates, 4 glass substrates, 5 upper substrate transparent flat public electrodes, on 6
Substrate transparent flat pixel electrode, 7 blue phase liquid crystal layers, 8 lower substrate transparent flat public electrodes, 9 lower substrate transparent flat pixels
Electrode, 10 insulating layers, 11 metal diffusive reflective films, 12 monocrystalline silicon substrates, 13 upper substrates, 14 lower substrates.
Specific embodiment
To enable those skilled in the art to be further understood that the present invention, this hair is explained in detail below in conjunction with attached drawing
Bright specific embodiment.It should be noted that attached drawing is only for the purpose of description, and map not according to original size.
Attached drawing 1 is the structural representation of the LCoS micro-display provided in an embodiment of the present invention based on bilateral IPS electrode structure
Figure, the micro-display are made of upper substrate 13, blue phase liquid crystal layer 7, lower substrate 14.Upper substrate 13 includes polarizer 1, half
Wave plate 2, quarter-wave plate 3, glass substrate 4, upper substrate transparent flat public electrode 5, upper substrate transparent flat pixel electrode
6;Lower substrate includes that lower substrate transparent flat public electrode 8, lower substrate transparent flat pixel electrode 9, insulating layer 10, metal are unrestrained anti-
Penetrate film 11, monocrystalline silicon substrate 12;Half wave plate 2 is negativity, and quarter-wave plate 3 is positivity, half wave plate 2 and four
/ mono- wave plate 3 constitutes circular polarizing disk, so that good dark-state is presented in the display when voltage is not added;Blue phase liquid crystal layer
7 use the blue phase liquid crystal of polymer stabilizing;Upper substrate and lower substrate transparent flat public electrode and transparent flat pixel electrode are adopted
It is made of transparent conductive material tin indium oxide (ITO), when to upper substrate transparent flat pixel electrode 6 and lower substrate transparent flat picture
When plain electrode 9 applies voltage, blue phase liquid crystal becomes anisotropy from original isotropism, accumulates to incident and reflection light
Phase difference, to change the grayscale of pixel;The transparent flat public electrode and transparent flat pixel electrode of upper substrate and lower substrate
All for stripe-shape plane electrode and width, gap are all identical, the transparent flat public electrode and transparent flat pixel electricity of upper and lower base plate
Extremely it is parallel with respect to each other. setting and it is spaced, constitute bilateral IPS electrode structure, increase the penetration depth of electric field, reduce
Operating voltage;Metal diffusive reflective film is made of metallic aluminium and reflectance coating rough surface, is attached on monocrystalline silicon substrate 12, so that entering
It penetrates light and reflection exiting liquid crystal box again occurs.
Attached drawing 2 is in LCoS micro-display one pixel provided in an embodiment of the present invention based on bilateral IPS electrode structure
The positional relationship top view of upper substrate and lower substrate transparent flat public electrode and transparent flat pixel electrode, transparent flat are public
Electrode, transparent flat pixel electrode width are w, and gap is g, and the width of a pixel is l.
1 light transmission shaft of analyzer is set as 0 °, the light transmission shaft of half wave plate 2 is relative to the direction of glass substrate 4
75 °, 3 light transmission shaft of quarter-wave plate is -75 ° relative to the direction of glass substrate 4.
The characterisitic parameter of liquid crystal material used in the present embodiment are as follows: the Refractive Index of Material of blue phase liquid crystal is no=1.5, ne
=1.654, dielectric coefficient ε=94, in wavelength X=550nm, greatest birefringence 0.154, saturation electric field is 4.15V/ μm,
Kerr coefficient K=16.3nm/V2。
7 thickness d=5 μm of blue phase liquid crystal layer in the present embodiment, upper substrate and lower substrate transparent flat public electrode and transparent
W=1 μm of the width of pixel electrode, g=2 μm of gap.
Attached drawing 3 is voltage-reflection of the LCoS micro-display provided in an embodiment of the present invention based on bilateral IPS electrode structure
Rate curve.By attached drawing 3 it is found that the crest voltage of the embodiment of the present invention is 9.6Vrms, peak reflectivity 60%.
Attached drawing 4 be the LCoS micro-display provided in an embodiment of the present invention based on bilateral IPS electrode structure etc. contrasts
Visual angle figure, by attached drawing 4 it is found that the visual angle of the present embodiment is in perfect proportion, visual angle of the contrast greater than 1000:1 can reach 20 °.
LCoS micro-display proposed by the present invention based on bilateral IPS electrode structure is suitably applied large high-definition screen curtain projector, portable
Formula minitype projection machine and near-eye display.
The above description is only a preferred embodiment of the present invention, however, the present invention is not limited thereto embodiment.The common skill of this field
Art personnel should be appreciated that in the case where not departing from the spirit and scope of the present invention being defined by the claims to its shape
The various changes that formula and details are made should all belong in the scope of the present invention.