CN109212264B - Annular shear flexoelectric acceleration sensor and laminated structure acceleration sensor - Google Patents
Annular shear flexoelectric acceleration sensor and laminated structure acceleration sensor Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
- G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
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Abstract
本发明公开了一种环形剪切式挠曲电加速度传感器及层叠结构加速度传感器，包括支撑杆、输出端子、环形质量块和挠曲电介电材料制成的环形敏感块,环形敏感块的内圈和外圈均镀有金属膜层，环形敏感块内圈设置在支撑杆的上端，环形质量块的内圈固定在环形敏感块的外圈；环形敏感块内圈的金属膜层和外圈的金属膜层分别通过引线与两只输出端子连接。本发明通过在环形质量块产生的剪切应力作用下挠曲电介电材料沿着轴向产生的应变梯度与基于挠曲电效应产生电荷之间的线性关系，来测量加速度的大小，从而实现对振动的测量。
The invention discloses a ring-shaped shearing flexoelectric acceleration sensor and a laminated structure acceleration sensor, comprising a support rod, an output terminal, a ring-shaped mass block and a ring-shaped sensitive block made of a flexural dielectric material. Both the ring and the outer ring are plated with a metal film layer, the inner ring of the annular sensitive block is arranged on the upper end of the support rod, the inner ring of the annular mass block is fixed on the outer ring of the annular sensitive block; the metal film layer of the inner ring of the annular sensitive block and the outer ring The metal film layer is connected to the two output terminals through leads respectively. The invention measures the magnitude of the acceleration through the linear relationship between the strain gradient generated by the flexural dielectric material along the axial direction and the electric charge generated based on the flexoelectric effect under the action of the shear stress generated by the annular mass block, so as to realize Measurement of vibration.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to an annular shear type flexural electric acceleration sensor and an annular shear type flexural electric acceleration sensor with a laminated structure.
Background
The piezoelectric effect is a linear coupling of stress to electrical polarization and is generally described as a phenomenon accompanied by the generation of electric charges upon application of pressure to a crystal. The traditional piezoelectric acceleration sensor is manufactured by utilizing the phenomenon that certain dielectric materials have piezoelectric effect after being stressed. Although piezoelectric materials have excellent force-electricity conversion effects, there are some disadvantages: first, in terms of the selection of dielectric materials, many dielectric materials have good mechanical and electrical coupling characteristics, such as PMNT, PZT, etc., but are very susceptible to environmental pollution due to heavy metals such as lead; secondly, the piezoceramic material must be polarized out at a high voltage before use, which increases the cost; third, it must operate in an environment below the curie temperature due to the mechanism of the piezoelectric effect; fourth, the piezoelectric effect has a time-dependent degradation phenomenon.
In addition to the coupling of stress and electric polarization, there is a relatively special phenomenon of force-electric coupling, namely the flexoelectric effect. The flexoelectric effect means that the inversion symmetry of the structure is locally destroyed due to strain gradient, so that the electric polarization phenomenon occurs on the surface of the crystal. The piezoelectric effect exists only in 20 non-centrosymmetric point group crystals, while the flexoelectric effect can exist in all 32 point group crystals. Therefore, the flexible electric material has wider selection range, and can select the material with no pollution and low cost to prepare the sensor.
At present, pressure sensors designed based on the flexoelectric effect are mainly classified into two types: the pressure sensor is a ladder-shaped structure pressure sensor based on a longitudinal flexoelectric effect and a cantilever beam structure pressure sensor based on a transverse flexoelectric effect. However, once the base material of the pressure sensor with the trapezoidal structure undergoes phase change, the accuracy of the test is seriously affected, and the pressure sensor with the cantilever beam structure has poor stability and is not high-temperature resistant. In addition, the two types of sensors are inconvenient to design as acceleration sensors with small g values because the excited electric signals are weak.
Disclosure of Invention
In order to overcome the problems in the prior art, an object of the present invention is to provide an annular shear type flexoelectric acceleration sensor and an annular shear type flexoelectric acceleration sensor with a stacked structure, in which the magnitude of acceleration is measured by a linear relationship between a strain gradient generated by a flexoelectric dielectric material along an axial direction under a shear stress generated by an annular mass block and charges generated based on a flexoelectric effect, thereby realizing measurement of vibration.
The technical scheme of the invention is as follows:
an annular shear type flexural electric acceleration sensor comprises a supporting rod, an output terminal, an annular mass block and an annular sensitive block made of flexural dielectric electric materials, wherein metal film layers are plated on an inner ring and an outer ring of the annular sensitive block, the inner ring of the annular sensitive block is arranged at the upper end of the supporting rod, and the inner ring of the annular mass block is fixed on the outer ring of the annular sensitive block; the metal film layer of the inner ring and the metal film layer of the outer ring of the annular sensitive block are respectively connected with the two output terminals through lead wires.
In the annular shear type deflection electric acceleration sensor, the lower end of the supporting rod is fixed on the base, the base is provided with a shell for sealing the sensor, and the two output terminals are fixed on the shell.
In the annular shear type flexoelectric acceleration sensor, the metal film layer is a gold-evaporated electrode with the thickness of 10nm, and the output terminal is a copper bar with the diameter of 2mm and the length of 10 mm.
In the annular shear type flexural electric acceleration sensor, the annular sensitive block is a non-polarized barium strontium titanate ring with the thickness of 5mm and the height of 1mm, and the annular mass block is a tungsten ring with the thickness of 8mm and the height of 1 mm.
In the annular shear type bending electric acceleration sensor, the annular sensitive block and the annular mass block as well as the annular sensitive block and the supporting rod are connected in an adhesive bonding mode.
An annular shear type flexural electric acceleration sensor with a laminated structure comprises a supporting rod, an output terminal, n annular mass blocks and n annular sensitive blocks made of flexural dielectric electric materials, wherein metal film layers are plated on the inner ring and the outer ring of each annular sensitive block; the metal film layers of the inner rings of the n annular sensitive blocks are connected to one output terminal in series through leads, and the metal film layers of the outer rings of the n annular sensitive blocks are connected to the other output terminal in series through leads.
In the annular shear type bending electric acceleration sensor with the laminated structure, the lower end of the supporting rod is fixed on the base, the base is provided with a shell for sealing the sensor, and the two output terminals are fixed on the shell.
In the annular shear type flexoelectric acceleration sensor with the laminated structure, the metal film layer is a gold-evaporated electrode with the thickness of 10nm, and the output terminal is a copper rod with the diameter of 2mm and the length of 10 mm.
In the annular shear type flexural electric acceleration sensor with the laminated structure, the annular sensitive block is a non-polarized barium strontium titanate ring with the thickness of 5mm and the height of 1mm, the annular mass block is a tungsten ring with the thickness of 8mm and the height of 1mm, and n is 3.
In the annular shear type flexural electric acceleration sensor with the laminated structure, the annular sensitive block and the annular mass block and the annular sensitive block and the supporting rod are connected in an adhesive bonding mode.
Compared with the prior art, the invention has the following advantages:
1) compared with the prior art, the annular shear-shaped structure is convenient to design and easy to process, and the shear-shaped structure reduces the influence of the base and temperature change on the sensitivity of the sensor, so that the method is more suitable for measuring the mechanical parameters of the acceleration.
2) The invention provides a scheme of an annular shear type flexoelectric acceleration sensor with a laminated structure, which adopts a multi-layer centrosymmetric annular laminated sensor structure to superpose charge signals generated by a plurality of annular sensitive blocks under the action of a plurality of mass blocks, so that the signal amplitude is increased, the sensitivity of the sensor is improved, and the accurate measurement of mechanical parameters is easy to realize.
Drawings
Fig. 1 is a schematic structural diagram of an annular shear type flexional electric acceleration sensor according to the present invention.
Fig. 2 is a top view of the sensing mass and the mass block of the annular shear type flexoelectric acceleration sensor of the present invention.
FIG. 3 is a schematic diagram of a sensor structure of a stacked structure according to the present invention.
Fig. 4 is a top view of the sensing mass and the mass block of the sensor of the present invention in a stacked configuration.
Fig. 5 is a schematic diagram illustrating the principle of force analysis of the acceleration sensor according to the present invention.
In the figure, 1-metal film layer; 2-an annular mass block; 3-ring-shaped sensitive block; 4, a base; 5, supporting a rod; 6, a shell; 7-output terminal; 8-lead wire.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
As shown in fig. 1-2, the present invention discloses an annular shear type flexoelectric acceleration sensor, which comprises a support rod 5, an output terminal 7, an annular mass block 2 and an annular sensing block 3, wherein the annular sensing block 3 is made of a flexoelectric dielectric material, preferably a non-polarized barium strontium titanate circular ring with a thickness of 5mm and a height of 1mm, the inner ring and the outer ring of the circular ring are both plated with a metal film layer 1, the metal film layer 1 adopts a vapor deposition mode, and a gold film with a thickness of 10nm is usually used as an output electrode of the flexoelectric dielectric material.
The annular mass block 2 is preferably a tungsten ring with the thickness of 8mm and the height of 1mm, the inner ring of the annular sensitive block 3 is fixed at the upper end of the supporting rod 5, the inner ring of the annular mass block 2 is fixed at the outer ring of the annular sensitive block 3, and the annular mass block is preferably fixed by adopting an epoxy adhesive bonding mode. The metal film layer 1 of the inner ring and the metal film layer 1 of the outer ring of the annular sensitive block 3 are respectively connected with two output terminals 7 through lead wires 8.
The lower end of the support rod 5 is fixed on the base 4, the base 4 is provided with a shell 6 for sealing the sensor, and the device is sealed in the shell 6 to meet the application of outdoor occasions. Two output terminals 7 are fixed to the housing 6, and the terminals are exposed. The shell 6 is made of a polymer organic material, the base 4 is made of alloy steel, and the support rod 5 is a round rod of an alloy steel structure and can be fixed on the base 4 through a threaded structure. The output terminal 7 is two copper bars with the diameter of 2mm and the length of 10mm, and the output of the electric signals of the sensor is realized. The lead 8, the metal film layer electrode and the external output terminal 7 can be connected by wire bonding.
Fig. 3 and 4 show a preferred annular shear type flexural electric acceleration sensor of a laminated structure of the present invention, which is different from fig. 1 and 2 in that n annular sensing blocks 3 and n annular mass blocks 2 are arranged in a laminated manner from the center to the outside, wherein the inner ring of the innermost annular sensing block 3 is arranged at the upper end of the support rod 5; the outermost layer is an annular mass block 2. The metal film layers 1 of the inner circles of the n annular sensitive blocks 3, namely the output electrodes of the flexible dielectric materials are connected in series through leads 8 and then are connected to one output terminal 7, and the metal film layers 1 of the outer circles of the n annular sensitive blocks 3, namely the output electrodes of the flexible dielectric materials are connected in series through leads 8 and then are connected to the other output terminal 7. Among them, n-3 is preferable.
The sensor structure adopting the multilayer centrosymmetric annular stacking enables charge signals generated by the plurality of annular sensitive blocks under the action of the plurality of mass blocks to be superposed, signal amplitude is increased, sensor sensitivity is improved, and accurate measurement of mechanical parameters is easy to realize.
The working mechanism of the sensor was analyzed as follows:
when the sample vibrates in a direction parallel to the axial direction, the annular sensitive block 3 is subjected to shear stress by the axial additional force generated by the mass block 2 sleeved on the support rod, so that the annular sensitive block 3 generates a strain gradient and generates a larger strain gradient along the thickness direction. Since the ring-shaped sensitive block 3 is a non-polarized barium strontium titanate circular ring with thickness of 5mm and height of 1mm, the force analysis is shown in fig. 5 (fig. 5 only corresponds to the single-layer structure of fig. 1 and fig. 2). Due to the symmetry of the circular ring and the relationship between the thickness and the height, the generated strain distribution can be solved by utilizing a cantilever beam theory. For a rectangular section beam, the polar moment of inertia I is
Wherein the width of the beam is taken as the unit length and h is the thickness of the beam. Let the total length of the beam be l. And the strain (epsilon) of the cantilever beam is theoretically analyzed according to the related theory of the elastic mechanics0) The distribution along the thickness (x) and length (z) directions is
Where F is the force applied by the free end of the cantilever beam and E is the modulus of elasticity of the material.
The expression of the strain gradient generated in the thickness direction is
Of beams l0Point-to-point productionThe resultant strain gradient is expressed as
And the total strain gradient for the ring-shaped flexoelectric material of the laminated structure shown in FIGS. 3 and 4 is expressed as
Wherein n is the number of layers of the annular flexoelectric material.
The inertial force of the mass block is expressed as
F＝ma
Where m is the mass of the annular mass and a is the required acceleration.
Therefore, the cantilever beam generates flexoelectric effect along the thickness direction and generates polarization charge, and the expression is
Where μ is the flexoelectric coefficient, ε is the elastic strain of the material, x is the direction of the gradient,
is the strain gradient along the thickness, P is the polarization due to the strain gradient caused by the flexoelectric effect, Q is the total output charge of the sensor, and a is the surface area of the flexoelectric dielectric material.
By the derivation of the formula, the acceleration expression of the laminated structure sensor is obtained as
The above formula can show that, as long as the output charge value is measured, the acceleration can be accurately measured through the linear relation between the strain gradient generated by the flexoelectric dielectric material along the axial direction under the action of the shear stress generated by the annular mass block and the charge generated based on the flexoelectric effect, so that the vibration can be measured. The annular shear-shaped structure is convenient to design and easy to process, and the combination of the three layers of annular flexible electric materials increases the amplitude of a generated charge signal, so that the accurate measurement is easy. Further research results and verification tests show that the flexoelectric effect has size-related characteristics, the strain gradient is increased along with the reduction of the structure size, and the small-size high-sensitivity flexoelectric micro device is more accurate in measurement and is more suitable for measuring high-sensitivity mechanical parameters.
Claims (10)
1. An annular shear type flexural electric acceleration sensor, characterized in that: the flexible-electricity-based touch screen comprises a supporting rod (5), an output terminal (7), an annular mass block (2) and an annular sensitive block (3) made of flexible electricity dielectric materials, wherein the inner ring and the outer ring of the annular sensitive block (3) are plated with metal film layers (1), the inner ring of the annular sensitive block (3) is arranged at the upper end of the supporting rod (5), and the inner ring of the annular mass block (2) is fixed on the outer ring of the annular sensitive block (3); the metal film layer (1) of the inner ring and the metal film layer (1) of the outer ring of the annular sensitive block (3) are respectively connected with two output terminals (7) through lead wires (8).
2. An annular shear flexure electrical acceleration sensor according to claim 1, characterized in that: the lower end of the support rod (5) is fixed on the base (4), a shell (6) of the sealing sensor is arranged on the base, and the two output terminals (7) are fixed on the shell (6).
3. An annular shear flexure electrical acceleration sensor according to claim 1, characterized in that: the metal film layer (1) is a gold-evaporated electrode with the thickness of 10nm, and the output terminal (7) is a copper bar with the diameter of 2mm and the length of 10 mm.
4. An annular shear flexure electrical acceleration sensor according to claim 1, characterized in that: the annular sensitive block (3) is a non-polarized barium strontium titanate circular ring with the thickness of 5mm and the height of 1mm, and the annular mass block (2) is a tungsten circular ring with the thickness of 8mm and the height of 1 mm.
5. An annular shear flexure electrical acceleration sensor according to claim 1, characterized in that: the annular sensitive block (3) and the annular mass block (2) and the annular sensitive block (3) and the supporting rod (5) are connected in an adhesive bonding mode.
6. An annular shear type flexural electric acceleration sensor of a laminated structure, characterized in that: the sensor comprises a supporting rod (5), an output terminal (7), n annular mass blocks (2) and n annular sensitive blocks (3) made of flexible electric dielectric materials, wherein the inner ring and the outer ring of each annular sensitive block (3) are plated with metal film layers (1), the n annular sensitive blocks (3) and the n annular mass blocks (2) are arranged in a spacing layer stacking mode from the center to the outside, and the inner ring of the innermost annular sensitive block (3) is arranged at the upper end of the supporting rod (5); the metal film layers (1) of the inner rings of the n annular sensitive blocks (3) are connected to one output terminal (7) in series through lead wires (8), and the metal film layers (1) of the outer rings of the n annular sensitive blocks (3) are connected to the other output terminal (7) in series through the lead wires (8).
7. An annular shear mode flexural electrical acceleration sensor of a laminated structure, according to claim 6, characterized in that: the lower end of the support rod (5) is fixed on the base (4), a shell (6) of the sealing sensor is arranged on the base, and the two output terminals (7) are fixed on the shell (6).
8. An annular shear mode flexural electrical acceleration sensor of a laminated structure, according to claim 6, characterized in that: the metal film layer (1) is a gold-evaporated electrode with the thickness of 10nm, and the output terminal (7) is a copper bar with the diameter of 2mm and the length of 10 mm.
9. An annular shear mode flexural electrical acceleration sensor of a laminated structure, according to claim 6, characterized in that: the annular sensitive block (3) is a non-polarized barium strontium titanate circular ring with the thickness of 5mm and the height of 1mm, the annular mass block (2) is a tungsten circular ring with the thickness of 8mm and the height of 1mm, and n is 3.
10. An annular shear mode flexural electrical acceleration sensor of a laminated structure, according to claim 6, characterized in that: the annular sensitive block (3) and the annular mass block (2) and the annular sensitive block (3) and the supporting rod (5) are connected in an adhesive bonding mode.
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| CN110361563A (en) * | 2019-06-21 | 2019-10-22 | 西人马（厦门）科技有限公司 | Charge output element and piezoelectric acceleration sensor |
| CN112145511B (en) * | 2020-09-25 | 2021-11-12 | 长安大学 | A kind of kinematic mechanism locking device and locking method based on inverse flexoelectric effect |
| CN113267647A (en) * | 2021-06-29 | 2021-08-17 | 中铁二院工程集团有限责任公司 | Low-frequency vibration acceleration sensor |
| CN113985067A (en) * | 2021-12-29 | 2022-01-28 | 山东利恩斯智能科技有限公司 | Plane deflection type high-sensitivity acceleration sensor and manufacturing method thereof |
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