CN109212264A - The electric acceleration transducer of the shearing flexure of annular and stepped construction acceleration transducer - Google Patents
The electric acceleration transducer of the shearing flexure of annular and stepped construction acceleration transducer Download PDFInfo
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- CN109212264A CN109212264A CN201811214474.0A CN201811214474A CN109212264A CN 109212264 A CN109212264 A CN 109212264A CN 201811214474 A CN201811214474 A CN 201811214474A CN 109212264 A CN109212264 A CN 109212264A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
- G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
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Abstract
本发明公开了一种环形剪切式挠曲电加速度传感器及层叠结构加速度传感器，包括支撑杆、输出端子、环形质量块和挠曲电介电材料制成的环形敏感块,环形敏感块的内圈和外圈均镀有金属膜层，环形敏感块内圈设置在支撑杆的上端，环形质量块的内圈固定在环形敏感块的外圈；环形敏感块内圈的金属膜层和外圈的金属膜层分别通过引线与两只输出端子连接。本发明通过在环形质量块产生的剪切应力作用下挠曲电介电材料沿着轴向产生的应变梯度与基于挠曲电效应产生电荷之间的线性关系，来测量加速度的大小，从而实现对振动的测量。
The invention discloses a ring-shaped shearing flexoelectric acceleration sensor and a laminated structure acceleration sensor, comprising a support rod, an output terminal, a ring-shaped mass block and a ring-shaped sensitive block made of a flexural dielectric material. Both the ring and the outer ring are plated with a metal film layer, the inner ring of the annular sensitive block is arranged on the upper end of the support rod, the inner ring of the annular mass block is fixed on the outer ring of the annular sensitive block; the metal film layer of the inner ring of the annular sensitive block and the outer ring The metal film layer is connected to the two output terminals through leads respectively. The invention measures the magnitude of the acceleration through the linear relationship between the strain gradient generated by the flexural dielectric material along the axial direction and the electric charge generated based on the flexoelectric effect under the action of the shear stress generated by the annular mass block, so as to realize Measurement of vibration.
Description
Technical field
The present invention relates to sensor technical fields, and in particular to a kind of electric acceleration transducer and one of the shearing flexure of annular
The electric acceleration transducer of the shearing flexure of annular of kind stepped construction.
Background technique
Piezoelectric effect is stress and electropolarized linear coupling, is commonly described as being accompanied by charge after applying pressure to crystal
The phenomenon that generation.Traditional piezoelectric acceleration transducer is exactly to have piezoelectric effect after utilizing certain dielectric substance stress
Phenomenon is made.Although piezoelectric material has superior power electricity transition effects, some drawbacks are equally existed: first, in dielectric material
In terms of the selection of material, although many dielectric materials have good stress-electric coupling characteristic, such as PMNT, PZT, but because of it
Leaded equal heavy metals easily pollute environment；Second, piezoceramic material has to pass through high voltage polarization before the use and comes out, this
It will make increased costs；Third, since the mechanism of piezoelectric effect makes it must be in the environmental work for being lower than Curie temperature；4th, pressure
There is degradation phenomena at any time in electrical effect.
Stress-electric coupling is coupled in addition to stress with electropolarized, and there is also a kind of relatively special stress-electric coupling phenomenons, that is, scratch
Bent electrical effect.Flexoelectric effect refers to the inversion symmetry due to strain gradient local failure structure, so as to cause plane of crystal
Polarization occurs.Piezoelectric effect exists only in 20 kinds of non-centrosymmetrical point group crystal, and flexoelectric effect can be deposited
It is in 32 kinds of all point group crystal.Therefore, flexure electric material range of choice is more extensive, can choose pollution-free, inexpensive
Material prepare sensor.
It is mainly two classes currently based on the pressure sensor that flexoelectric effect designs: the halfpace based on longitudinal flexure electrical effect
Shape structural pressure sensor, the cantilever beam structure pressure sensor of lateral delfection electrical effect.However, trapezoidal shape structural pressure senses
Device base material once undergoes phase transition the accuracy that will seriously affect test, and cantilever beam structure pressure sensor stability is poor,
Non-refractory.In addition these two types of structure sensors due to the electric signal of excitation it is weak, thus be not easy to be designed as the lesser acceleration of g value
Spend sensor.
Summary of the invention
In order to overcome the above-mentioned problems of the prior art, the purpose of the present invention is to provide a kind of shearing flexures of annular
The electric acceleration transducer of the shearing flexure of the annular of electric acceleration transducer and stepped construction, passes through what is generated in annulus mass block
Bent under shear stress strain gradient that electric dielectric material axially generates with based on flexoelectric effect generate charge it
Between linear relationship measure acceleration magnitude, to realize the measurement to vibration.
Technical scheme is as follows:
A kind of electric acceleration transducer of the shearing flexure of annular, including support rod, output terminal, annulus mass block and flexure
Annular sensitive blocks made of electric dielectric material, the equal metal-plated membrane layer of inner ring and outer ring of the annular sensitive blocks, annular are sensitive
The upper end of support rod is arranged in the inner ring of block, and the inner ring of annulus mass block is fixed on the outer ring of annular sensitive blocks；Annular sensitive blocks
The metallic diaphragm of inner ring and the metallic diaphragm of outer ring pass through lead respectively and connect with two output terminals.
In the above-mentioned electric acceleration transducer of the shearing flexure of annular, the lower end of support rod is fixed on the base, sets on pedestal
It is equipped with the shell of seal sensor, two output terminals are fixed on shell.
In the above-mentioned electric acceleration transducer of the shearing flexure of annular, metallic diaphragm is the vapor deposition gold electrode of thickness 10nm, defeated
Terminal is the copper rod of diameter 2mm, long 10mm out.
In the above-mentioned electric acceleration transducer of the shearing flexure of annular, annular sensitive blocks are the non-polarized titanium of 5mm thickness, 1mm high
Sour strontium barium annulus, annulus mass block are the tungsten annulus of 8mm thickness, 1mm high.
It is between annular sensitive blocks and annulus mass block and annular in the above-mentioned electric acceleration transducer of the shearing flexure of annular
Glue sticking mode is all made of between sensitive blocks and support rod to couple.
A kind of electric acceleration transducer of the shearing flexure of annular of stepped construction, including support rod, output terminal, n ring
Form quality gauge block and n only bend annular sensitive blocks made of electric dielectric material, and the inner ring and outer ring of the annular sensitive blocks is coated with
Metallic diaphragm, only annular sensitive blocks and n annulus mass block are from center to the folded setting of outer spacer layer by n, and wherein innermost layer annular is quick
The upper end of support rod is arranged in the inner ring of sense block；N only annular sensitive blocks inner ring metallic diaphragm by lead concatenate to one it is defeated
The metallic diaphragm of terminal out, n annular sensitive blocks outer rings is concatenated by lead to another output terminal.
In the electric acceleration transducer of the shearing flexure of annular of above-mentioned stepped construction, the lower end of support rod is fixed on pedestal
On, the shell of seal sensor is provided on pedestal, two output terminals are fixed on shell.
In the electric acceleration transducer of the shearing flexure of annular of above-mentioned stepped construction, metallic diaphragm is the vapor deposition of thickness 10nm
Gold electrode, output terminal are the copper rod of diameter 2mm, long 10mm.
In the electric acceleration transducer of the shearing flexure of annular of above-mentioned stepped construction, annular sensitive blocks are 5mm thickness, 1mm high
Non-polarized barium strontium titanate annulus, annulus mass block is that 8mm is thick, tungsten annulus of 1mm high, n=3.
In the annular shearing flexure electricity acceleration transducer of above-mentioned stepped construction, annular sensitive blocks and annulus mass block it
Between and annular sensitive blocks and support rod between be all made of glue sticking mode and couple.
Compared to the prior art compared with, the invention has the following advantages that
1) present invention breaches the longitudinal flexure electrical effect and lateral delfection electrical effect mode that traditional flexoelectric effect uses,
A kind of size based on shear flexure electrical effect measurement acceleration is proposed, compared with prior art, annular shearing shape structure is set
Meter is convenient, easy to process, and shearing structure reduces the influence of pedestal and temperature changes on sensor sensitivity, relatively more suitable
The measurement of force for acceleration parameter.
2) the invention proposes the electric acceleration sensor solutions of the shearing flexure of annular of stepped construction, using multilayer center
The sensor structure of symmetrical annular stacking, so that the charge signal that multiple annular sensitive blocks under more mass block effects generate
Superposition, signal amplitude increase, and improve transducer sensitivity, it is easy to accomplish the precise measurement of mechanics parameter.
Detailed description of the invention
Fig. 1 is the electric acceleration sensor structure schematic diagram of the shearing flexure of present invention annular.
Fig. 2 is the shearing sensitive blocks and mass block top view for bending electric acceleration transducer of present invention annular.
Fig. 3 is the sensor structure schematic diagram of stepped construction of the present invention.
Fig. 4 is the sensitive blocks and mass block top view of stepped construction sensor of the present invention.
Fig. 5 is the force analysis schematic illustration of acceleration transducer of the present invention.
In figure: 1-metallic diaphragm；2-annulus mass blocks；3-annular sensitive blocks；4-pedestals；5-support rods；6-shells
Body；7-output terminals；8-leads.
Specific embodiment
The present invention is described in further details with reference to the accompanying drawings and detailed description.
As shown in attached drawing 1-2, the invention discloses a kind of electric acceleration transducers of the shearing flexure of annular, including support rod
5, output terminal 7, annulus mass block 2 and annular sensitive blocks 3, annular sensitive blocks 3 are made of electric dielectric material is bent, preferably
The non-polarized barium strontium titanate annulus of 5mm thickness, 1mm high, in the equal metal-plated membrane layer 1 of the inner ring and outer ring of annulus, the metallic diaphragm 1
It adopts vapor deposition method, under normal conditions with a thickness of the golden film of 10nm, is used as bending the output electrode of electric dielectric material.
The tungsten annulus of the preferred 8mm of annulus mass block 2 thickness, 1mm high, the inner ring of annular sensitive blocks 3 are fixed on the upper of support rod 5
End, the inner ring of annulus mass block 2 are fixed on the outer ring of annular sensitive blocks 3, it is preferred to use the mode of epoxy glue bonding is solid to realize
It is fixed.The metallic diaphragm 1 of annular 3 inner ring of sensitive blocks and the metallic diaphragm 1 of outer ring pass through lead 8 and two output terminals 7 respectively
It connects.
The lower end of support rod 5 is fixed on pedestal 4, and the shell 6 of seal sensor is provided on pedestal 4, by above-mentioned device
It is sealed in inside shell 6, meets the application of outdoor occasion.Two output terminals 7 are fixed on shell 6, and expose outside connector.Institute
Shell 6 to be stated to be made of polymerized organics material, pedestal 4 is made of steel alloy, and support rod 5 is the pole of alloy steel construction,
It can be fixed on by helicitic texture on pedestal 4.Output terminal 7 is the copper rod of two diameter 2mm, long 10mm, realizes sensor electricity
The output of signal.Lead 8 can be connect with metallic diaphragm electrode and external delivery point 7 by way of wire bonding.
Fig. 3 and Fig. 4 gives a kind of electric acceleration transducer of the shearing flexure of annular of currently preferred stepped construction,
The difference of itself and Fig. 1 and Fig. 2 are that only annular sensitive blocks 3 and n annulus mass block 2 are folded from center to outer spacer layer using n
Setting, wherein the upper end of support rod 5 is arranged in the inner ring of innermost layer annular sensitive blocks 3；Outermost layer is then annulus mass block 2.N is only
The metallic diaphragm 1 of annular 3 inner ring of sensitive blocks, that is, bend electric dielectric material output electrode connected by lead 8 after, connection
To an output terminal 7, the metallic diaphragm 1 of n 3 outer rings of annular sensitive blocks, that is, the output electrode of the electric dielectric material of flexure
After connecting by lead 8, it is attached to another output terminal 7.Wherein preferred n=3.
This sensor structure using the centrosymmetric annular stacking of multilayer, so that multiple under more mass block effects
The charge signal superposition that annular sensitive blocks generate, signal amplitude increase, and improve transducer sensitivity, it is easy to accomplish mechanics parameter
Precise measurement.
The working mechanism of analyte sensors below:
When sample is parallel to axial vibration, the axial additional force for being placed on the generation of mass block 2 of support rod makes annular
Sensitive blocks 3 are by shear stress, so that so that annular sensitive blocks 3 is generated strain gradient radially generates strain gradient, along thickness
Direction generates biggish strain gradient.Since annular sensitive blocks 3 are 5mm thickness, the non-polarized barium strontium titanate annulus of 1mm high, by
Power is analyzed as shown in Figure 5 (the only single layer structure of corresponding diagram 1 and Fig. 2 in Fig. 5).Due to the symmetry and thickness of annulus, height
Between relationship, the Strain Distribution of generation can use cantilever beam theory to solve.For rectangular cross section beam, polar inertia square I
For
Wherein, the thickness that the width of beam is taken as unit length, h is beam.If the overall length of beam is l.And according to Elasticity phase
It closes theoretical to above-mentioned experimental method progress theory analysis, the strain (ε of cantilever beam0) along the distribution of thickness (x) and length (z) direction
For
Wherein F is the power that cantilever beam free end applies, and E is the elasticity modulus of material.
So the expression formula for the strain gradient that through-thickness generates is
The l of beam0The strain gradient expression formula of generation of point to l point is
And it is for the overall strain pressure gradient expression formula of the annular flex electric material of Fig. 3 and stepped construction shown in Fig. 4
Wherein, n is the number of plies of annular flex electric material.
The inertia force expression formula of mass block is
F=ma
Wherein, m is the quality of annulus mass block, and a is required acceleration.
Therefore, cantilever beam through-thickness generates flexoelectric effect, generates polarization charge, and expression formula is
Wherein μ is flexoelectric coefficient, and ε is the elastic strain of material, and x is the direction of gradient,It is to be answered along what thickness generated
Become gradient, P is the polarization that the strain gradient as caused by flexoelectric effect generates, and Q is total output charge of sensor, and A is flexure
The surface area of electric dielectric material.
By the derivation of equation above, show that the acceleration expression formula of stepped construction sensor is
As long as above formula is made, it can be seen that measurement output charge value by the shear stress generated in annulus mass block
It is bent strain gradient that electric dielectric material axially generates with lower and the linear pass between charge is generated based on flexoelectric effect
System, can accurately measure the size of acceleration, to realize the measurement to vibration.This annular shearing shape structure design is convenient,
It is easy to process, and the combination of shellring shape flexure electric material increases the charge signal amplitude generated, is easy to precise measurement.Into one
The result of study and verification test of step show that flexoelectric effect has size correlation properties, and strain gradient is with structure size
Reduction and increase, small size high sensitivity flexure electric-type microdevice measurement it is more accurate, be relatively specific for highly sensitive
Spend the measurement of mechanics parameter.
Claims (10)
1. a kind of electric acceleration transducer of the shearing flexure of annular, it is characterised in that: including support rod (5), output terminal (7),
Annulus mass block (2) and annular sensitive blocks (3) made of electric dielectric material are bent, the inner ring of the annular sensitive blocks (3) and outside
Equal metal-plated membrane layer (1) is enclosed, the inner ring of annular sensitive blocks (3) is arranged in the upper end of support rod (5), annulus mass block (2)
Inner ring is fixed on the outer ring of annular sensitive blocks (3)；The metallic diaphragm of metallic diaphragm (1) and outer ring of annular sensitive blocks (3) inner ring
(1) it is connect respectively by lead (8) with two output terminals (7).
2. the electric acceleration transducer of the shearing flexure of annular according to claim 1, it is characterised in that: support rod (5)
Lower end is fixed on pedestal (4), and the shell (6) of seal sensor is provided on pedestal, and two output terminals (7) are fixed on shell
(6) on.
3. the electric acceleration transducer of the shearing flexure of annular according to claim 1, it is characterised in that: metallic diaphragm (1)
For the vapor deposition gold electrode of thickness 10nm, output terminal (7) is the copper rod of diameter 2mm, long 10mm.
4. the electric acceleration transducer of the shearing flexure of annular according to claim 1, it is characterised in that: annular sensitive blocks
It (3) is 5mm thickness, the non-polarized barium strontium titanate annulus of 1mm high, annulus mass block (2) is the tungsten annulus of 8mm thickness, 1mm high.
5. the electric acceleration transducer of the shearing flexure of annular according to claim 1, it is characterised in that: annular sensitive blocks
(3) between annulus mass block (2) and glue sticking mode is all made of between annular sensitive blocks (3) and support rod (5) couples.
6. a kind of annular shearing flexure electricity acceleration transducer of stepped construction, it is characterised in that: including support rod (5), defeated
Terminal (7), n annulus mass block (2) and n only bend annular sensitive blocks (3) made of electric dielectric material out, and the annular is sensitive
The equal metal-plated membrane layer (1) of the inner ring and outer ring of block (3), n only annular sensitive blocks (3) and n annulus mass block (2) from center to
Interval is stacked, wherein upper end of the inner ring setting of innermost layer annular sensitive blocks (3) in support rod (5)；Only annular is sensitive by n
The metallic diaphragm (1) of block (3) inner ring is concatenated by lead (8) to an output terminal (7), only annular sensitive blocks (3) outer ring n
Metallic diaphragm (1) is concatenated by lead (8) to another output terminal (7).
7. the electric acceleration transducer of the shearing flexure of annular of stepped construction according to claim 6, it is characterised in that: branch
The lower end of strut (5) is fixed on pedestal (4), and the shell (6) of seal sensor, two output terminals (7) are provided on pedestal
It is fixed on shell (6).
8. the electric acceleration transducer of the shearing flexure of annular of stepped construction according to claim 6, it is characterised in that: gold
Belong to the vapor deposition gold electrode that film layer (1) is thickness 10nm, output terminal (7) is the copper rod of diameter 2mm, long 10mm.
9. the electric acceleration transducer of the shearing flexure of annular of stepped construction according to claim 6, it is characterised in that: ring
Shape sensitive blocks (3) are the non-polarized barium strontium titanate annulus of 5mm thickness, 1mm high, and annulus mass block (2) is that 8mm is thick, 1mm high tungsten is round
Ring, n=3.
10. the electric acceleration transducer of the shearing flexure of annular of stepped construction according to claim 6, it is characterised in that:
Glue sticking is all made of between annular sensitive blocks (3) and annulus mass block (2) and between annular sensitive blocks (3) and support rod (5)
Mode couples.
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| CN201811214474.0A CN109212264B (en) | 2018-10-18 | 2018-10-18 | Annular shear flexoelectric acceleration sensor and laminated structure acceleration sensor |
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| CN201811214474.0A CN109212264B (en) | 2018-10-18 | 2018-10-18 | Annular shear flexoelectric acceleration sensor and laminated structure acceleration sensor |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110361563A (en) * | 2019-06-21 | 2019-10-22 | 西人马（厦门）科技有限公司 | Charge output element and piezoelectric acceleration sensor |
| CN112145511A (en) * | 2020-09-25 | 2020-12-29 | 长安大学 | Movement mechanism locking device and locking method based on inverse flexoelectric effect |
| CN113267647A (en) * | 2021-06-29 | 2021-08-17 | 中铁二院工程集团有限责任公司 | Low-frequency vibration acceleration sensor |
| CN113985067A (en) * | 2021-12-29 | 2022-01-28 | 山东利恩斯智能科技有限公司 | Plane deflection type high-sensitivity acceleration sensor and manufacturing method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110361563A (en) * | 2019-06-21 | 2019-10-22 | 西人马（厦门）科技有限公司 | Charge output element and piezoelectric acceleration sensor |
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| CN113267647A (en) * | 2021-06-29 | 2021-08-17 | 中铁二院工程集团有限责任公司 | Low-frequency vibration acceleration sensor |
| CN113985067A (en) * | 2021-12-29 | 2022-01-28 | 山东利恩斯智能科技有限公司 | Plane deflection type high-sensitivity acceleration sensor and manufacturing method thereof |
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| CN109212264B (en) | 2020-03-31 |
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