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CN109155166A - Transparent conducting film and its manufacturing method - Google Patents

Transparent conducting film and its manufacturing method Download PDF

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Publication number
CN109155166A
CN109155166A CN201780029395.XA CN201780029395A CN109155166A CN 109155166 A CN109155166 A CN 109155166A CN 201780029395 A CN201780029395 A CN 201780029395A CN 109155166 A CN109155166 A CN 109155166A
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CN
China
Prior art keywords
resin film
dielectric layer
indium tin
transparent conducting
bis
Prior art date
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Application number
CN201780029395.XA
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Chinese (zh)
Inventor
田口祐介
大本慎也
坂口雅史
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Kaneka Corp
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Kaneka Corp
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Publication date
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Publication of CN109155166A publication Critical patent/CN109155166A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00Apparatus or processes specially adapted for manufacturing conductors or cables
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Laminated Bodies (AREA)
  • Non-Insulated Conductors (AREA)
  • Manufacturing Of Electric Cables (AREA)

Abstract

The present invention relates to a kind of transparent conducting film (10), it is configured in order dielectric layer (2) and indium tin composite oxide layer (3) on a surface of resin film (1), resin film (1) is selected from by polyester based resin film, one of the group of cellulose-based resin film and imide series resin film composition, dielectric layer (2) is made of the mixture of organic matter or organic matter and inorganic matter, and with a thickness of 0.005 μm or more and 0.100 μm or less, on the surface of the opposite side of the side configured with dielectric layer (2) of indium tin composite oxide layer (3), there are more than 2.1 atom % and 4.0 atom % are below, the active hydrogen-based that can be chemically modified by trifluoroacetic anhydride.Indium tin composite oxide layer (3) can be laminated on the surface of the opposite side of the side configured with resin film (1) of dielectric layer (2) to make by the way that dielectric layer (2) are laminated on a surface of resin film (1) in transparent conducting film (10) of the invention.

Description

Transparent conducting film and its manufacturing method
Technical field
The present invention relates to the single side in resin film configured with indium tin composite oxide layer transparent conducting film and its Manufacturing method.
Background technique
The transparent conducting film for being formed with the transparent and electrically conductive films such as indium tin composite oxide layer over the transparent substrate is wide It is general to be used for the devices such as display and touch panel.In these devices, transparent conducting film require the transparency and electric conductivity this It is used in the component of the two.
On the other hand, transparent and electrically conductive film usually utilizes extraction electrode and IC controller etc. to be electrically connected.In recent years, due to aobvious The narrow frame for showing device and touch panel etc. has the tendency that the contact area reduction of extraction electrode and transparent and electrically conductive film, strongly It is required that improving the adaptation of transparent and electrically conductive film and extraction electrode.Therefore, it is proposed on transparent and electrically conductive film in patent document 1 The adaptation being made of the low metal oxide of crystallinity, which is arranged, improves the technology of layer.
Existing technical literature
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2013-228782 bulletin
Summary of the invention
Problems to be solved by the invention
But the transparency or poorly conductive for the metal oxide layer being usually made of the low metal oxide of crystallinity, Therefore in patent document 1, having adaptation to improve layer makes the electric conductivity of transparent conducting film or the worry of transparency deterioration.
The present invention in order to solve the problem above-mentioned, provide be not provided with adaptation improve layer and with high electric conductivity and transparent Property and with the adaptation of extraction electrode improve transparent conducting film and its manufacturing method.
The solution to the problem
The present invention relates to a kind of transparent conducting films, are configured in order dielectric on a surface of resin film Layer and indium tin composite oxide layer, which is characterized in that resin film is selected from thin by polyester based resin film, cellulose-based resin One of the group of film and imide series resin film composition, aforementioned dielectric layer are mixed by organic matter or organic matter and inorganic matter Object is closed to constitute and with a thickness of 0.005 μm or more and 0.100 μm hereinafter, in aforementioned indium tin composite oxide layer configured with electricity The surface of the opposite side of the side of dielectric layer there are it is more than 2.1 atom % and 4.0 atom % it is below can by trifluoroacetic anhydride into The active hydrogen-based of row chemical modification.
In addition, the invention further relates to a kind of manufacturing methods of transparent conducting film, which is characterized in that selected from by polyester One table of one of the group of based resin film, cellulose-based resin film and imide series resin film composition resin film On face stacking be made of the mixture of organic matter or organic matter and inorganic matter and with a thickness of 0.005 μm or more and 0.100 μm with Under dielectric layer, on the surface of the opposite side of the side configured with resin film of aforementioned dielectric layer be laminated indium tin it is compound Oxide skin(coating), obtains transparent conducting film, and the transparent conducting film includes that resin film, dielectric layer and indium tin are compound Oxide skin(coating), and on the surface of the opposite side of the side configured with dielectric layer of indium tin composite oxide layer, there are 2.1 originals Sub- % or more and the 4.0 atom % active hydrogen-based below that can be chemically modified by trifluoroacetic anhydride.
The effect of invention
The present invention provides the transparent conductivity that there is the adaptation of high electric conductivity and the transparency and extraction electrode to improve Film.In addition, manufacturing method according to the invention, can easily make with high electric conductivity and the transparency and draw electricity The transparent conducting film that the adaptation of pole improves.
Detailed description of the invention
Fig. 1 is the schematic cross-section of the transparent conducting film of an embodiment of the invention.
Fig. 2 is the schematic cross-section of the transparent conducting film of another embodiment of the present invention.
Fig. 3 is the work that can be chemically modified by trifluoroacetic anhydride for showing the surface for being present in indium tin composite oxide layer The figure of the relationship of the removing ratio of the amount and transparent conducting film and extraction electrode of property hydrogen-based.
Specific embodiment
The inventors of the present invention are high to the electric conductivity and the transparency that keep transparent conducting film and improve and extraction electrode The case where adaptation, has made intensive studies.Itself as a result, it has been found that, by using selected from by polyester based resin film, cellulose-based tree One of the group of membrane of lipoprotein and imide series resin film composition resin film uses indium tin combined oxidation as transparent substrate Nitride layer is as transparent and electrically conductive film, and configuration is between resin film and indium tin composite oxide layer with a thickness of 0.005 μm~0.100 μm the dielectric layer being made of the mixture of organic matter or organic matter and inorganic matter, deposit the surface of indium tin composite oxide layer More than 2.1 atom % (atomic%) and the 4.0 atom % reactive hydrogen below that can be chemically modified by trifluoroacetic anhydride Base can obtain having high electric conductivity and the transparency, the transparent conducting film with the adaptation raising of extraction electrode, thus complete At the present invention.
In addition, the adaptation of transparent conducting film and extraction electrode of the invention is high, therefore for using metal to draw The touch panel of electrode can more reliably obtain the touch sensor being made of transparent conducting film using extraction electrode Signal, the reliability of touch sensor improves.Especially because the adaptation with extraction electrode is high, therefore even if heating After humidification test, the function for the touch sensor being made of transparent conducting film is also kept well, is improved contact and is passed The durability of sensor.
Hereinafter, the embodiments of the present invention will be described with reference to the drawings.Fig. 1 is the saturating of an embodiment of the invention The schematic section of bright conductive membrane.As shown in Figure 1, transparent conducting film 10 includes resin film 1, is configured at resin Dielectric layer 2 on one surface of film 1 and be configured at dielectric layer 2 the side configured with resin film 1 opposite side Surface on indium tin composite oxide layer 3.It should be noted that in this specification, indium tin composite oxides and ITO (Indium Tin Oxide) meaning is identical.
(resin film 1)
Resin film 1 is selected from by polyester based resin film, cellulose-based resin film and imide series resin film group At one of group.By making polyester based resin, cellulose-based resin and imide series resin that there is pole in molecular skeleton Property group, to show appropriate moisture content (also referred to as moisture rate).Therefore it could be speculated that in transparent conducting film 10, The moisture as contained in these resin films 1 for being formed of resins in molecular skeleton with polar group is by indium tin composite oxygen Mobile to the surface of indium tin composite oxide layer 3 when compound layer is film-made, on the surface of indium tin composite oxide layer 3, there are 2.1 originals The active hydrogen-based that can be chemically modified by trifluoroacetic anhydride of the atom of sub- %~4.0 %, transparent conducting film and extraction electricity The adaptation of pole improves.
It as above-mentioned polyester based resin, is not particularly limited, the copolymer of dicarboxylic acid component and diol component can be used. Such polyester based resin for example can make these at distribution by using dicarboxylic acid component and diol component as raw material Raw esterification, polycondensation reaction obtain.
As above-mentioned dicarboxylic acid component, be not particularly limited, for example, can enumerate malonic acid, succinic acid, glutaric acid, oneself two Acid, suberic acid, decanedioic acid, dodecanedioic acid, dimeric dibasic acid, eicosane diacid, pimelic acid, azelaic acid, methylmalonic acid, ethyl third The aliphatic dicarboxylic acids class such as diacid;Adamantane dicarboxylic acids, norbornene dicarboxylic acids, cyclohexane dicarboxylic acid, decahydro naphthalene dicarboxylic acids etc. Alicyclic dicarboxylic acid's class;Terephthalic acid (TPA), M-phthalic acid, phthalic acid, 1,4- naphthalene dicarboxylic acids, 1,5- naphthalene dicarboxylic acids, 2, 6- naphthalene dicarboxylic acids, 1,8- naphthalene dicarboxylic acids, 4,4 '-diphenyldicarboxylic acids, 4,4 '-diphenyl ether dicarboxylic acids, M-phthalic acid -5- sulphur Aromatic dicarboxylic acids such as sour sodium, phenyl indane dicarboxylic acid, anthracene dicarboxylic acids, luxuriant and rich with fragrance dicarboxylic acids, 9,9 '-bis- (4- carboxyl phenyl) fluorenic acids etc. Dicarboxylic acids or its ester derivant.These dicarboxylic acid components can be used a kind, two or more can also be applied in combination.
The case where it is preferable to use at least one kind of aromatic dicarboxylic acids as above-mentioned dicarboxylic acid component.It is further preferred that dicarboxylic acids Contain aromatic dicarboxylic acid in ingredient as principal component.It should be noted that " principal component " refers to aromatic dicarboxylic acid in dicarboxyl Shared ratio is 80 mass % or more in sour component.
It as above-mentioned diol component, is not particularly limited, for example, ethylene glycol, 1,2-PD, 1,3- the third two can be enumerated The aliphatic diols classes such as alcohol, 1,4- butanediol, 1,2- butanediol, 1,3 butylene glycol;Cyclohexanedimethanol, spiral shell glycol, different sorb The ester ring types glycols such as alcohol;Bisphenol-A, 1,3- benzene dimethanol, Isosorbide-5-Nitrae-benzene dimethanol, 9, the fragrance such as 9 '-bis- (4- hydroxy phenyl) fluorenes Race's glycols etc..Above-mentioned diol component can be used a kind, two or more can also be applied in combination.
The case where it is preferable to use at least one kind of aliphatic diols as above-mentioned diol component.As aliphatic diol, can wrap Containing ethylene glycol, ethylene glycol is preferably comprised as principal component.It should be noted that " principal component " refers to ethylene glycol in diol component Shared ratio is 80 mass % or more.
As described above, being not particularly limited as polyester resin obtained from dicarboxylic acid component and diol component is used, example Such as, it is preferably selected from by polyethylene terephthalate (PET), poly- 2,6-naphthalenedicarboxylic acid glycol ester (PEN) and gathers to benzene two One or more of the group of formic acid butanediol ester (PBT) composition, from the viewpoint of cost, more preferably PET.
It as above-mentioned cellulose-based resin, is not particularly limited, for example, it is preferable to cellulose and/or as its derivative Cellulose esters.The ester of cellulose esters preferred cellulose and fatty acid (including aromatic series fatty acid), preferably with above-mentioned fatty acid Acyl group will be located at 2 of glucose unit, 3,6 hydroxyls that the β -1,4 for constituting cellulose is bonded and replace and carry out acyl The cellulose acylate of base.Such as the alkyl oxycarbonyl base ester of cellulose, alkenyl carbonyl ester, aromatic carbonyl ester, virtue can be enumerated Fragrant race's alkyl oxycarbonyl base ester etc..Even if these cellulose acylates are acyl made of the acyl group of two or more fatty acid is replaced Compound it is also preferred that.There can also be other substituent groups.
As the acyl group replaced to above-mentioned hydroxyl, it is preferable to use the acetyl group of carbon number 2 and the acyl of carbon number 3~22 Base.Acyl group can be fitted according to required optical characteristics, thermal characteristics, mechanical property, the surface free energy of resin, compatibility etc. Preferably determine.
The degree of substitution of acyl group in cellulose esters used in the present invention is not particularly limited.Degree of substitution can be according to being wanted Optical characteristics, thermal characteristics, mechanical property, the surface free energy of resin, compatibility for asking etc. are being suitable for decision.
Above-mentioned acyl group can may be aromatic series for aliphatic, be not particularly limited.For example, can enumerate acetyl group, Propiono, bytyry, heptanoyl group, caproyl, caprylyl, capryl, dodecane acyl group, tridecane acyl group, tetradecane acyl group, ten Six alkanoyls, octadecanoyl, isobutyryl, tertiary bytyry, cyclohexane carbo, oleoyl, benzoyl, naphthyl carbonyl, meat Osmanthus acyl group etc..In these, preferably acetyl group, propiono, bytyry, benzoyl, naphthyl carbonyl etc..
As the cellulose esters replaced by above-mentioned acyl group, for example, cellulose acetate, cellulose propionate, butyric acid can be enumerated Cellulose, naphthalenedicarboxylic acid cellulose acetate, cellulose benzoate etc..
As above-mentioned imide series resin, be not particularly limited, can be used carried out imidizate, diamine component with The copolymer of carboxylic acid dianhydride ingredient can be used by using diamine component and carboxylic acid dianhydride ingredient as raw material and make this Resin obtained from a little ingredient polymerizations, imidizate.
Above-mentioned diamine component is not particularly limited, such as can enumerate p-phenylenediamine, m-phenylene diamine (MPD), o-phenylenediamine, 3, and 3 '- Diamino-diphenyl ether, 3,4 '-diamino-diphenyl ethers, 4,4 '-diamino-diphenyl ethers, 3,3 '-diamino diphenyl sulfides, 3,4 '-diamino diphenyl sulfides, 4,4 '-diamino diphenyl sulfides, 3,3 '-diamino diphenyl sulfones, 3,4 '-diamino two Phenylsulfone, 4,4 '-diamino diphenyl sulfones, 3,3 '-diaminobenzophenones, 4,4 '-diaminobenzophenones, 3,4 '-diaminos Base benzophenone, 3,3 '-diaminodiphenyl-methanes, 4,4 '-diaminodiphenyl-methanes, 3,4 '-diaminodiphenyl-methanes, 2,2- bis- (3- aminophenyl) propane, 2,2- bis- (4- aminophenyl) propane, 2- (3- aminophenyl) -2- (4- aminophenyl) third Alkane, 1,1- bis- (3- aminophenyl) -1- diphenylphosphino ethane, 1,1- bis- (4- aminophenyl) -1- diphenylphosphino ethane, 1- (3- aminobenzene Base) -1- (4- aminophenyl) -1- diphenylphosphino ethane, bis- (3- amino-benzene oxygen) benzene of 1,3-, bis- (4- amino-benzene oxygen) benzene of 1,3-, Bis- (3- amino-benzene oxygen) benzene of 1,4-, bis- (4- amino-benzene oxygen) benzene of 1,4-, bis- (3- amino benzoyl) benzene of 1,3-, 1,3- are bis- Bis- (3- amino benzoyl) benzene of (4- amino benzoyl) benzene, 1,4-, bis- (4- amino benzoyl) benzene of 1,4-, 1,3- are bis- Bis- (4- amino-bis (alpha, alpha-dimethylbenzyl) base) benzene of (3- amino-bis (alpha, alpha-dimethylbenzyl) base) benzene, 1,3-, 1,4- bis- (3- amino-α, α- Dimethyl benzyl) benzene, bis- (4- amino-bis (alpha, alpha-dimethylbenzyl) base) benzene of 1,4-, 2,6- bis- (3- amino-benzene oxygen) benzonitriles, 2,6- It is bis- (3- amino-benzene oxygen) pyridines, 4,4 '-bis- (3- amino-benzene oxygen) biphenyl, 4,4 '-bis- (4- amino-benzene oxygen) biphenyl, double [4- (3- amino-benzene oxygen) phenyl] ketone, bis- [4- (4- amino-benzene oxygen) phenyl] ketone, bis- [4- (3- amino-benzene oxygen) phenyl] Thioether, bis- [4- (4- amino-benzene oxygen) phenyl] thioethers, bis- [4- (3- amino-benzene oxygen) phenyl] sulfones, bis- [4- (4- aminobenzene oxygen Base) phenyl] sulfone, bis- [4- (3- amino-benzene oxygen) phenyl] ethers, bis- [4- (4- amino-benzene oxygen) phenyl] ethers, the bis- [4- (3- of 2,2- Amino-benzene oxygen) phenyl] propane, bis- [4- (4- amino-benzene oxygen) phenyl] propane of 2,2-, the bis- [4- (3- amino-benzene oxygen) of 1,3- Benzoyl] benzene, bis- [4- (4- amino-benzene oxygen) benzoyl] benzene of 1,3-, bis- [4- (3- amino-benzene oxygen) benzoyls of 1,4- Base] benzene, bis- [4- (4- amino-benzene oxygen) benzoyl] benzene of 1,4-, bis- [4- (3- the amino-benzene oxygen)-bis (alpha, alpha-dimethylbenzyl)s of 1,3- Base] benzene, bis- [4- (4- the amino-benzene oxygen)-bis (alpha, alpha-dimethylbenzyl) base] benzene of 1,3-, bis- [4- (3- the amino-benzene oxygen)-α, α-of 1,4- Dimethyl benzyl] benzene, bis- [4- (4- the amino-benzene oxygen)-bis (alpha, alpha-dimethylbenzyl) base] benzene of 1,4-, 4,4 '-bis- [4- (4- aminobenzene oxygen Base) benzoyl] it is diphenyl ether, 4,4 '-bis- [4- (4- amino-bis (alpha, alpha-dimethylbenzyl) base) phenoxy group] benzophenone, 4,4 '-bis- [4- (4- amino-bis (alpha, alpha-dimethylbenzyl) base) phenoxy group] diphenyl sulfone, 4,4 '-bis- [4- (4- amino-benzene oxygen) phenoxy group] hexichol Base sulfone,-two phenoxy benzophenone of 3,3 '-diamino -4,4 ', 3,3 '-diamino -4,4 '-bigeminy phenoxy benzophenone, 3, 3 '-diamino -4- phenoxy benzophenones, 3,3 '-diamino -4-, two phenoxy benzophenone, 6,6 '-bis- (3- aminobenzene oxygen Base) -3,3,3 ', 3 '-tetramethyls -1,1 '-spirobiindene is full, 6,6 '-bis- (4- amino-benzene oxygen) -3,3,3 ', 3 '-tetramethyl -1, 1 '-spirobiindene is full, 1,3- is bis- (3- aminopropyl) tetramethyl disiloxane, the bis- two silicon oxygen of (4- aminobutyl) tetramethyl of 1,3- Alkane, α, ω-bis- (3- aminopropyl) dimethyl silicone polymers, α, bis- (3- aminobutyl) dimethyl silicone polymers of ω-, bis- (ammonia Ylmethyl) ether, bis- (2- amino-ethyl) ethers, bis- (3- aminopropyl) ethers, bis- (2- aminomethoxy) ethyls] ether, bis- [2- (2- Amino ethoxy) ethyl] ether, bis- [2- (3- amino propoxyl group) ethyl] ethers, bis- (aminomethoxy) ethane of 1,2-, 1,2- be bis- Bis- [2- (aminomethoxy) ethyoxyl] ethane of (2- amino ethoxy) ethane, 1,2-, bis- [2- (2- amino ethoxy) second of 1,2- Oxygroup] ethane, bis- (3- aminopropyl) ethers of ethylene glycol, bis- (3- aminopropyl) ethers of diethylene glycol, bis- (the 3- aminopropans of triethylene glycol Base) ether, ethylenediamine, 1,3- diaminopropanes, 1,4- diaminobutane, 1,5- 1,5-DAP, 1,6- diamino hexane, 1,7- Diaminoheptane, 1,8- diamino-octane, 1,9- diamino nonane, 1,10- diamino decane, 1,11- diamino undecane, 1, 12- diamino dodecane, 1,2- diaminocyclohexane, 1,3- diaminocyclohexane, 1,4- diaminocyclohexane, anti-form-1,4- Diaminocyclohexane, 1,2- bis- (2- amino-ethyl) hexamethylene, 1,3- bis- (2- amino-ethyl) hexamethylene, (the 2- amino of 1,4- bis- Ethyl) hexamethylene, bis- (4- aminocyclohexyl) methane, bis- (amino methyl) two ring [2.2.1] heptane of 2,6-, the bis- (amino of 2,5- Methyl) two rings [2.2.1] heptane, 1,4- diamino -2- fluorobenzene, 1,4- diamino -2,3- difluorobenzene, 1,4- diamino -2,5- Difluorobenzene, 1,4- diamino -2,6- difluorobenzene, 1,4- diamino -2,3,5- trifluoro-benzene, 1,4- diamino -2,3,5,6- tetrafluoro Benzene, 1,4- diamino -2- (trifluoromethyl) benzene, bis- (trifluoromethyl) benzene of 1,4- diamino -2,3-, 1,4- diamino -2,5- are double Bis- (trifluoromethyl) benzene of (trifluoromethyl) benzene, 1,4- diamino -2,6-, 1,4- diamino -2,3,5- three (trifluoromethyl) benzene, 1, 4- diamino -2,3,5,6- four (trifluoromethyl) benzene, 2- fluorine benzidine, 3- fluorine benzidine, 2,3- DfBP amine, 2,5- difluoro Benzidine, 2,6- DfBP amine, 2,3,5- trifluoro-biphenyl amine, 2,3,6- trifluoro-biphenyl amine, 2,3,5,6- tetrafluoro benzidine, 2, 2 '-DfBP amine, 3,3 '-DfBP amine, 2,3 '-DfBP amine, 2,2 ', 3- trifluoro-biphenyl amine, 2,3,3 '-trifluoros connection Aniline, 2,2 ', 5- trifluoro-biphenyl amine, 2,2 ', 6- trifluoro-biphenyl amine, 2,3 ', 5- trifluoro-biphenyl amine, 2,3 ', 6 ,-trifluoro-biphenyl Amine, 2,2 ', 3,3 '-tetrafluoro benzidine, 2,2 ', 5,5 '-tetrafluoro benzidine, 2,2 ', 6,6 '-tetrafluoro benzidine, 2,2 ', 3,3 ', 6,6 '-hexafluoro benzidine, 2,2 ', 3,3 ', 5,5 ', 6,6 '-octafluorobiphenyl amine, 2- (trifluoromethyl) benzidine, 3- (fluoroform Base) benzidine, bis- (trifluoromethyl) benzidine of 2,3-, bis- (trifluoromethyl) benzidine of 2,5-, bis- (trifluoromethyl) biphenyl of 2,6- Amine, 2,3,5- tri- (trifluoromethyl) benzidine, 2,3,6- tri- (trifluoromethyl) benzidine, 2,3,5,6- tetra- (trifluoromethyl) biphenyl Amine, 2,2 '-bis- (trifluoromethyl) benzidine, 3,3 '-bis- (trifluoromethyl) benzidine, 2,3 '-bis- (trifluoromethyl) benzidine, 2, 2 ', 3- tri- (trifluoromethyl) benzidine, 2,3,3 '-three (trifluoromethyl) benzidine, 2,2 ', 5- tri- (trifluoromethyl) benzidine, 2,2 ', 6- tri- (trifluoromethyl) benzidine, 2,3 ', 5- tri- (trifluoromethyl) benzidine, 2,3 ', 6- tri- (trifluoromethyl) biphenyl Amine, 2,2 ', 3,3 '-four (trifluoromethyl) benzidine, 2,2 ', 5,5 '-four (trifluoromethyl) benzidine, 2,2 ', 6,6 '-four (three Methyl fluoride) benzidine etc..Above-mentioned diamine component can be used a kind, two or more can also be applied in combination.
Above-mentioned carboxylic acid dianhydride ingredient is not particularly limited, such as can enumerate ethylene tetracarboxylic dianhydride, butane tetracarboxylic acid two Acid anhydride, cyclobutane tetracarboxylic dianhydride, pentamethylene tetracarboxylic dianhydride, 3,3 ', 4,4 '-benzophenone tetracarboxylic dianhydrides, 2,2 ', 3,3 '- Benzophenone tetracarboxylic dianhydride, 3,3 ', 4,4 '-biphenyltetracarboxylic dianhydrides, 2,2- bis- (3,4- dicarboxyphenyi) propane dianhydrides, 2, Bis- (2,3- dicarboxyphenyi) propane dianhydrides of 2-, bis- (3,4- dicarboxyphenyi) ether dianhydrides, bis- (3,4- dicarboxyphenyi) sulfones two Bis- (2,3- dicarboxyphenyi) the ethane dianhydrides of acid anhydride, 1,1-, bis- (2,3- dicarboxyphenyi) methane dianhydrides, bis- (3,4- dicarboxyl benzene Base) methane dianhydride, bis- (3,4- the dicarboxyphenyi) -1,1,1,3,3,3- hexafluoropropane dianhydrides of 2,2-, bis- (the 2,3- dicarboxyls of 2,2- Phenyl) -1,1,1,3,3,3- hexafluoropropane dianhydride, bis- [(3,4- dicarboxyl) benzoyl] benzene dianhydrides of 1,3-, 1,4- it is bis- [(3, 4- dicarboxyl) benzoyl] benzene dianhydride, bis- { 4- [4- (1,2- dicarboxyl) phenoxy group] phenyl } propane dianhydrides of 2,2-, 2,2- be bis- { 4- [3- (1,2- dicarboxyl) phenoxy group] phenyl } propane dianhydride, bis- { 4- [4- (1,2- dicarboxyl) phenoxy group] phenyl } ketone two Acid anhydride, bis- { 4- [3- (1,2- dicarboxyl) phenoxy group] phenyl } ketone dianhydrides, 4,4 '-bis- [4- (1,2- dicarboxyl) phenoxy group] biphenyl two Acid anhydride, 4,4 '-bis- [3- (1,2- dicarboxyl) phenoxy group] biphenyl dianhydrides, bis- { 4- [4- (1,2- dicarboxyl) phenoxy group] phenyl } ketone two Acid anhydride, bis- { 4- [3- (1,2- dicarboxyl) phenoxy group] phenyl } ketone dianhydrides, bis- { 4- [4- (1,2- dicarboxyl) phenoxy group] phenyl } sulfones Dianhydride, bis- { 4- [3- (1,2- dicarboxyl) phenoxy group] phenyl } sulfone dianhydrides, bis- { 4- [4- (1,2- dicarboxyl) phenoxy group] phenyl } Thioether dianhydride, bis- { 4- [3- (1,2- dicarboxyl) phenoxy group] phenyl } thioether dianhydrides, bis- { 4- [4- (1,2- dicarboxyl) benzene of 2,2- Oxygroup] phenyl } -1,1,1,3,3,3- hexafluoropropane dianhydride, bis- { 4- [3- (1,2- dicarboxyl) phenoxy group] phenyl } -1,1 of 2,2-, 1,3,3,3- propane dianhydride, 2,3,6,7- naphthalene tetracarboxylic acid dianhydride, 1,4,5,8- naphthalene tetracarboxylic acid dianhydride, 1,2,5,6- naphthalene tetracarboxylic acid two Acid anhydride, 1,2,3,4- benzene tertacarbonic acid dianhydride, 3,4,9,10- tetracarboxylic dianhydride, 2,3,6,7- anthracene tetracarboxylic dianhydride, 1,2,7,8- are luxuriant and rich with fragrance Tetracarboxylic dianhydride etc..Above-mentioned carboxylic acid dianhydride ingredient can be used a kind, two or more can also be applied in combination.
Resin film 1 is selected from by polyester based resin film, cellulose-based resin film and imide series resin film group At one of group resin film be preferably at least colorless and transparent in visible light region.As resin film 1, do not limit especially It is fixed, for example, pet film (PET film) can be suitably used.
PET film is not particularly limited, for example, can enumerate non-stretched film, single axle drawn membrane, biaxially oriented film, Oblique extension film etc..From the viewpoint of mechanical property, excellent heat resistance, in the present invention, make preferably by biaxial stretch-formed The biaxially oriented film that molecule is orientated.
Preferably 15 μm~250 μm of resin film 1, the thickness such as PET film, it is 20 μm~190 μm more preferable, further It is preferred that 45 μm~130 μm, it is 45 μm~55 μm particularly preferred.When with a thickness of in above range, the resin films such as PET film 1 have The flexibility of durability and appropriateness, therefore be able to produce more efficiently by way of roll-to-roll (roll to roll) at it On make dielectric layer 2, indium tin composite oxide layer 3 form a film.
Resin film 1 is not particularly limited such as PET film, from improving transparent conducting film and extraction electrode From the perspective of adaptation, preferably the surface of configuration dielectric layer 2 is implemented at the surfaces such as sided corona treatment, corona treatment Reason.
From the viewpoint of the durability for making resin film 1 have appropriateness, resin film 1 can be fitted such as PET film Locality is formed with hard conating using the surface of the opposite side in the side configured with dielectric layer 2, indium tin composite oxide layer 3 The resin film of (not shown).If having hard conating, treatability when scratch resistance improves, touch panel is processed is improved.
Hard conating for example can by solidify thermohardening type resin combination or ultraviolet-curing resin composition come It is formed., it is preferable to use the ultraviolet-curing resin composition of radical polymerization collaboration from the viewpoint of productivity.Ultraviolet light is solid Change type resin combination generally comprises unsaturated monomer, oligomer, and/or resin and Photoepolymerizationinitiater initiater etc..It can be preferred Use the ultraviolet curing resin of the acrylic compounds comprising polyfunctional ultraviolet hardening and Photoepolymerizationinitiater initiater Composition.As the acrylic compounds of polyfunctional ultraviolet hardening, for example, can enumerate with 2 or more functions Polyfunctional acrylic ester, polyfunctional carbamate acrylate, the multifunctional polyester acrylate etc. of group.Draw as photopolymerization Agent is sent out, well known Photoepolymerizationinitiater initiater can be used.
For the thickness of hard conating, from the viewpoint of surface hardness and flexibility, preferably 0.5 μm~5.0 μm, more preferably 0.6 μm~2.0 μm.
The formation method of hard conating is not particularly limited, and wet process (rubbing method) can be used to be formed.
(dielectric layer 2)
For transparent conducting film, from raising indium tin composite oxide layer (also referred to as transparency conducting layer or electrically conducting transparent Film) pattern formed after non-identification from the perspective of, sometimes in the transparent substrate of resin film etc. and indium tin combined oxidation Setting has the dielectric layer of pH effect function between nitride layer.In contrast, it is believed that in the present invention, dielectric layer 2 has PH effect function, by pH effect function make indium tin composite oxide layer pattern formed after non-identification improve, and And as described later, the function that there is the amount to the active hydrogen-based on the surface for being present in indium tin composite oxide layer 3 to be adjusted.This In specification, " active hydrogen-based " refers to the activity that can be chemically modified by trifluoroacetic anhydride in case of no particular description Hydrogen-based.
Speculate by a surface configuration in resin film 1, such as polyester based resin film with a thickness of 0.005 μm~ 0.100 μm and the dielectric layer 2 that is made of the mixture of organic matter or organic matter and inorganic matter, and in the configuration of dielectric layer 2 There is the surface configuration indium tin composite oxide layer 3 of the opposite side of the side of resin film 1, thus being situated between using sputtering method etc. in electricity When the surface of matter layer 2 forms indium tin composite oxide layer 3, the moisture from the resin films such as polyester based resin film 1 is to indium tin The surface of composite oxide layer 3 is mobile, and therefore, on the surface of indium tin composite oxide layer 3, there are 2.1 atom %~4.0 originals Sub- %, the active hydrogen-based that can be chemically modified by trifluoroacetic anhydride.
Make transparent conducting film 10 as touch sensor and when playing a role, it is necessary to indium tin composite oxide layer 3 progress patterns are formed.It is formed in indium tin composite oxide layer 3 in figuratum transparent conducting film 10, it is multiple that there are indium tin It closes the part of oxide skin(coating) 3 and the transmissivity for the part being not present, reflectivity and color difference is different, therefore there are electrode patterns to become It is easy the problem of being identified, but by having the dielectric layer 2 with pH effect function, makes that there are indium tin composite oxide layers The optical transmittance of 3 part and the part being not present is poor, reflection differences and color difference reduce, so that pattern becomes difficult to recognize.
Dielectric layer 2 is made of the mixture of organic matter or organic matter and inorganic matter.By there is dielectric layer 2 Machine object, to be easy to deposit on the surface for being in opposite side with the side configured with dielectric layer 2 of indium tin composite oxide layer 3 Reactive hydrogen base be adjusted to defined range.As organic matter, can enumerate acrylic resin, carbamate resins, Melamine resin, alkyd resin, siloxane-based polymers, organosilan condensation product etc..As inorganic matter, controlled from refractive index Easiness from the perspective of, it is preferable to use silica (also referred to as silica), aluminium oxide, zirconium oxide, titanium oxide etc..Its In, it can be suitably used selected from the inorganic of one or more of the group being made of silica, aluminium oxide, zirconium oxide and titanium oxide The mixture or siloxane-based polymers of composition granule and acrylic resin.For particles of inorganic material, if partial size is small, disperse Property reduce, thus light transmittance is easily reduced, and if partial size becomes larger, possible refractive index adjusts function and is easily reduced or light transmittance It is easily reduced, therefore average grain diameter is preferably 5nm~100nm, more preferably 10~20nm.As acrylic resin, for example, It can enumerate and send as an envoy to comprising third made of the solidification of the resin combination of polyfunctional carbamate acrylate and Photoepolymerizationinitiater initiater Olefin(e) acid resinoid etc..In addition, can be suitably used makes alkoxy silane hydrolysate and organosilicon as siloxane-based polymers Alkoxy silane hydrolytic condensate made of sol particle condensation etc..Alternatively, it is also possible to by making dielectric layer 2 in organic matter On the basis of also contain particles of inorganic material, thus be easy the reactive hydrogen base on the surface of indium tin composite oxide layer 3 is adjusted to provide Range, and the surface roughness of transparent conducting film can be also adjusted to range appropriate to improving durability. In the present invention, the average grain diameter of particles of inorganic material refers to the particle in the cross-sectional image obtained by transmission electron microscope Value obtained from diameter is weighted and averaged.
Dielectric layer 2 can be 1 layer, or 2 layers or more of multilayer.From the viewpoint of productivity, preferably 1 layer. From the viewpoint of the balance of transmissivity, reflectivity and color difference, preferably 2 layers or more.In the case where 2 layers or more of multilayered structure, From the viewpoint of the balance of transmissivity, reflectivity and color difference, the dielectric layer 2 close to the side of resin film 1 is preferably improved Refractive index and reduce far from resin film 1 side dielectric layer 2 refractive index.It is good from pH effect function Viewpoint is set out, and the refractive index of dielectric layer 2 is preferably 1.30~1.80, is more preferably 1.40~1.60, is more preferably 1.50~1.60.
By make dielectric layer 2 with a thickness of 0.005 μm~0.100 μm of range, to be easy to will be present in indium tin multiple The amount for closing the active hydrogen-based on the surface of oxide skin(coating) 3 is adjusted to defined range.In the present invention, dielectric layer 2 is 2 layers or more In the case where multilayered structure, using all layers of aggregate thickness as the thickness of dielectric layer 2.In addition, if the thickness of dielectric layer 2 For above-mentioned range, then pH effect function and also become good with the adaptation of extraction electrode.If the thickness of dielectric layer 2 is super Cross 0.100 μm, then since membrane stress, indium tin composite oxide layer 3 and the adaptation of extraction electrode reduce, if dielectric layer 2 Thickness is less than 0.005 μm, then pH effect function reduces.From the adaptation and optics of indium tin composite oxide layer and extraction electrode It sets out in terms of the balance for adjusting function, the thickness of dielectric layer 2 is preferably 0.015 μm~0.040 μm, more preferably 0.020 μ M~0.035 μm, further preferably 0.025 μm~0.030 μm.
Dielectric layer 2 can be by the dry or wets such as vacuum vapour deposition, sputtering method, ion plating method (rubbing method) come shape At.Wherein, from the viewpoint of productivity, preferred wet process.
(indium tin composite oxide layer 3)
Indium tin composite oxide layer 3 is the metal oxidation being made of indium-tin composite oxides (Indium Tin Oxide) Object film.For indium tin composite oxide layer 3, from the viewpoint of taking into account the transparency and low resistance, by indium oxide and tin oxide Overall weight when being set as 100 weight %, preferably comprise 88 weight of weight %~98 % of indium oxide and contain 2 weight of tin oxide The weight % of %~12 is measured, further preferably 90 weight of weight %~97 % of indium oxide simultaneously contains 3 weight of weight %~10 of tin oxide % is measured, further preferably 92 weight of weight %~95 % of indium oxide simultaneously contains 5 weight of weight %~8 % of tin oxide.If oxygen The content for changing tin is then to be easy to take into account the electrical characteristics such as the optical characteristics such as transmissivity, color difference and resistance value in above range.
For indium tin composite oxide layer 3, when being heated 90 minutes at 140 DEG C, sheet resistance be preferably 150 Ω/ with Under, more preferably 140 Ω/ or less.When indium tin composite oxide layer after heating is low resistance, the sound of capacitive touch panels It answers speed to improve, can help to saving power consumption of various optical devices etc..It should be noted that indium tin composite oxide layer 3 is logical It crosses and heats 90 minutes at 140 DEG C to be crystallized.
In indium tin composite oxide layer 3, on the surface for being in opposite side with the side configured with dielectric layer 2, there are 2.1 The active hydrogen-based that can be chemically modified by trifluoroacetic anhydride of the atom of atom %~4.0 %.If there are 2.1 originals for active hydrogen-based Sub- % or more, the then Interaction enhanced of active hydrogen-based and extraction electrode material, indium tin composite oxide layer 3 and extraction electrode The adaptation of adaptation, i.e. transparent conducting film 10 and extraction electrode improves.On the other hand, it is more than if active hydrogen-based exists 4.0 atom %, the then electric conductivity, deterioration in optical properties of indium tin composite oxide layer 3 sometimes.From indium tin composite oxide layer 3 with It, can be by trifluoro from the perspective of the adaptation of extraction electrode and the electric conductivity of indium tin composite oxide layer 3, the balance of optical characteristics The amount for the active hydrogen-based that acetic anhydride is chemically modified preferably 2.5 atom of atom %~3.5 %, more preferable 2.6 atom % ~3.0 atom %.
In the present invention, the active hydrogen-based that can be chemically modified by trifluoroacetic anhydride is quantified by the following method. After transparent conducting film to be carried out to heat treatment in 90 minutes at 140 DEG C, the exposure 60 in the steam of trifluoroacetic anhydride immediately Minute is to be chemically modified processing.To the number of fluorine atoms X-ray on the transparent conducting film surface before and after moditied processing Electron spectroscopy for chemical analysis (XPS) is quantified, and number of fluorine atoms increased after moditied processing is used as divided by 3 resulting values can be by trifluoro The amount for the active hydrogen-based that acetic anhydride is chemically modified.
Preferred 15nm~the 40nm of thickness of indium tin composite oxide layer 3, more preferably 18nm~35nm, it is more preferably 20nm~30nm.By making with a thickness of the range, so as to make 3 low resistance of indium tin composite oxide layer after crystallization and High-transmission rate.
It as the forming method of indium tin composite oxide layer 3, is not particularly limited, known method can be used. Specifically, vacuum vapour deposition, sputtering method, ion plating method etc. can be enumerated.Wherein, go out from the viewpoint of film thickness monitoring and productivity It sends out, preferably sputtering method, among sputtering method, from the viewpoint of productivity, particularly preferred DC magnetron sputtering method.
In the present invention, transparent conducting film, the thickness (also referred to as film thickness) of each layer for constituting transparent conducting film can By utilizing transmission electron microscope (TEM) or scanning electron microscope (SEM) to transparent conducting film laminated body Section observed to find out.
Fig. 2 is the schematic section of the transparent conducting film of another embodiment of the present invention.As shown in Fig. 2, transparent Conductive membrane 20 includes resin film 1, the dielectric layer 2 being configured on a surface of resin film 1, in dielectric layer 2 The side configured with resin film 1 opposite side surface on the indium tin composite oxide layer 3 that configures and in indium tin composite oxygen The extraction electrode 11 of the peripheral part configuration on the surface of the opposite side of the side configured with dielectric layer 2 of compound layer 3.It is right in Fig. 2 Part identical with Fig. 1 marks identical appended drawing reference, and the repetitive description thereof will be omitted.In addition, identical part has in Fig. 2 and Fig. 1 There is same function.
(extraction electrode 11)
Extraction electrode 11 can be formed by metal.Specifically, the material as extraction electrode, can enumerate silver, copper, Aluminium, nickel, palladium, chromium, iron, molybdenum, titanium or using them as metals such as the alloys of principal component;By silver, copper, aluminium, nickel, palladium, chromium, iron, molybdenum, titanium Or using they be the metals such as the alloy of principal component as the conducting paste material etc. of principal component.Wherein, preferred conductions such as silver, copper The high metal of property, the metal dispersion for keeping the electric conductivity such as silver, copper high are formed in curable resins such as epoxy resin, acrylic resins Conductive metal Paste Materials since extraction electrode can be readily formed by printing, preferably.Wherein, from extraction It sets out in terms of the balance for the easiness that the electric conductivity of electrode is formed with extraction electrode, particularly preferably using silver as the conduction of principal component Property silver paste agent material.For metal, from the viewpoint of the fine precision of the resistance of extraction electrode and electrode pattern, average grain diameter Preferably 0.1~10 μm, more preferably 0.1~3.0 μm.In the present invention, " using metal as the conducting paste material of principal component " Refer to the metal in terms of solid component concentration comprising 50 weight % or more.In addition, in the present invention, the average grain diameter of metallic particles is Refer to value obtained from being weighted and averaged as the particle diameter in the cross-sectional image that transmission electron microscope obtains.
In an embodiment of the invention, from the viewpoint of the transparency is excellent, the total light transmission of transparent conducting film Rate is preferably 80% or more, more preferably 85% or more, further preferably 87% or more.The total light transmission of transparent conducting film Rate is measured as described later.
In an embodiment of the invention, for transparent conducting film, from electrode pattern formed after non-identification From the perspective of good, L*a*b*B in colour system*Value preferably 2.5 or less is more preferably 2.4 or less, is further preferred It is 2.3 or less.The b of transparent conducting film*Value is measured as described later.
In an embodiment of the invention, for transparent conducting film, from the excellent adhesion with extraction electrode Viewpoint is set out, and the area of release surface is preferably 60% or less, more preferably 55% or less in adaptation evaluation.Transparent conductivity The adaptation evaluation of film carries out as described later.
In an embodiment of the invention, for transparent conducting film, from the durability including scratch resistance From the perspective of good, surface roughness Ra is preferably 1.80nm~30.0nm, is more preferably 1.85nm~20.0nm, is further Preferably 1.90nm~10.0nm.The surface roughness Ra of transparent conducting film refers to arithmetic average roughness, as described later Ground is measured.
In an embodiment of the invention, transparent conducting film can be used as the devices such as display, touch panel, hair The transparent electrode of the semiconductor elements such as optical element, photo-electric conversion element uses, and the transparent electrode for being suitable as touch panel makes With particularly preferably being used in capacitive touch panels.
In an embodiment of the invention, transparent conducting film for example can be by as selected from by Polyester tree One table of the resin film 1 of one of the group of membrane of lipoprotein, cellulose-based resin film and imide series resin film composition Dielectric layer 2 is laminated on face, indium tin is laminated on the surface of the opposite side of the side configured with resin film 1 of dielectric layer 2 Composite oxide layer 3 makes.As resin film 1, the surface that the side of configuration dielectric layer 2 can be used passes through at corona The resin film that reason or corona treatment are surface-treated.In addition, can be used and be configured with as resin film 1 The opposite side of the side of dielectric layer 2 has the resin film of hard conating.As the forming method of indium tin composite oxide layer 3, From the viewpoint of film thickness monitoring and productivity, preferred sputtering method, in sputtering method, from the viewpoint of productivity, particularly preferably DC magnetron sputtering method.Sputtering method is not particularly limited, and can carry out under conditions of well known formation indium tin composite oxide layer.
It can speculate: by being formed on a surface of resin film 1 with a thickness of 0.005 μm~0.100 μm, by organic matter Or after the dielectric layer 2 of the mixture composition of organic matter and inorganic matter, in the side configured with resin film 1 of dielectric layer 2 The surface of opposite side indium tin composite oxide layer 3 is formed by sputtering method etc., so that the moisture from resin film 1 makes indium It is mobile to the surface of indium tin composite oxide layer 3 when tin composite oxide layer forms a film, it is deposited on the surface of indium tin composite oxide layer 3 In the active hydrogen-based that can be chemically modified by trifluoroacetic anhydride of 2.1 atom of atom %~4.0 %.
Embodiment
Hereinafter, enumerating embodiment, more specifically the present invention will be described.It should be noted that the present invention is not limited to this A little embodiments.
In Examples and Comparative Examples, various characteristics are evaluated or measured as described below.
<adaptation evaluation>
On the surface of the indium tin oxide layer of the transparent conducting film after 140 DEG C, heat treatment in 90 minutes, utilize Screen process press is coated with about 75 weight of Argent grain containing 2 μm of average grain diameter with the area of 7 μm of thickness after roasting, 3cm square Measure the conductive silver paste of %, about 2 weight % of epoxy system resin, about 0.5 weight % of acrylic resin.10 points are stood after coating Zhong Hou carries out heating in 60 minutes at 140 DEG C and roasts to conductive silver paste, formed on indium tin oxide layer by leading Electrical silver paste dosage form at extraction electrode.It is relatively wet that the transparent conducting film for foring extraction electrode is put into temperature 60 C 240 hours in the environment chambers of degree 90%, after taking-up, from extraction electrode side, about 30 μm of depth of 100 lattice are cut out with knife Cut mark, as adaptation sample for evaluation.There is the surface of the side of extraction electrode to attach 25mm's wide in the formation of evaluation sample Transparent adhesion adhesive tape (3M corporation, #610) was that 90 degree of directions are used about 1 second relative to transparent conducting film after about 1 minute Clock removes adhesive tape, calculates the stripping area of extraction electrode removing relative to transparent conducting film configured with extraction electrode The ratio (%) of the entire area on the surface of side.The ratio of stripping area is smaller, and adaptation is the better.
<conducting of release surface is evaluated>
Make the testing machine contact part that extraction electrode is removed in adaptation evaluation, the presence or absence of confirmation conducting.Energy The part for enough confirming conducting means to be removed between indium tin oxide layer and extraction electrode.
<quantifying for active hydrogen-based>
Carried out at 140 DEG C 90 minutes heat treatment after, immediately by transparent conducting film trifluoroacetic anhydride steam Middle exposure 60 minutes and be chemically modified processing.To the indium tin oxide layer in the transparent conducting film before and after moditied processing The number of fluorine atoms on surface quantified with X-ray photoelectron spectroscopy (XPS), number of fluorine atoms increased after moditied processing is removed Using 3 resulting values as can be by the amount of the active hydrogen-based of trifluoroacetic anhydride chemical modification.
<measurement of total light transmittance>
It is measured using optical profile type nephelometer (Japanese electricity Shi Industrial Co., Ltd system, NDH7000).Light source uses D light Source makes light from the incidence of indium tin oxide layer side, measures total light transmittance.
<b*The measurement of value >
It is measured using colour difference meter (Japanese electricity Shi Industrial Co., Ltd system, SE2000).Light source uses D light source, makes light From the incidence of indium tin oxide layer side, b is measured*Value.b*When value is 2.5 or less, the non-identification of pattern is good.
<measurement of sheet resistance>
The transparent conducting film after heating will be carried out 90 minutes at 140 DEG C and cuts out 60mm × 60mm, uses three Water chestnut Chemical Co., Ltd. Loresta GP, with the sheet resistance of four probe method measurement indium tin oxide layer.
<measurement of surface roughness Ra>
The transparent conducting film after heating will be carried out 90 minutes at 140 DEG C and is cut into 60mm × 60mm, to gained The two sides of sample calculates 0.1mm × 0.1mm's with surface shape measuring machine (Canon Inc. system, Zygo New View7300) Arithmetic average roughness Ra in measurement range, as surface roughness Ra.Measurement is in 23 DEG C of temperature, the perseverance of relative humidity 50% It is carried out in greenhouse.Cutoff value is 0.5mm.
(embodiment 1)
As resin film, 50 μm of pet film of thickness is used.The poly terephthalic acid second Terephthalate films have 1.0 μm of thickness of hard conating on a surface.Hard conating is made with ultraviolet light comprising multifunctional amino first The resin combination of acid esters acrylate, silica dioxide granule (average grain diameter 200nm or less) and Photoepolymerizationinitiater initiater solidify and It is formed.0.030 μm of thickness of dielectric layer is formed on another surface of the pet film.Electricity is situated between Matter layer is to make the resin comprising polyfunctional carbamate acrylate, silica dioxide granule and Photoepolymerizationinitiater initiater with ultraviolet light What composition was solidified to form, refractive index 1.5.By the laminated body of the pet film and dielectric layer Imported into coiling type DC magnetron sputtering film forming apparatus, after being heated 30 seconds at 90 DEG C, by sputtering method dielectric layer table The indium tin composite oxide layer of face formation thickness 23nm.
Formation for indium tin composite oxide layer, as target, using containing 7.0 weight % of tin oxide and indium oxide 93.0 The tin indium oxide of weight %.For sputtering, while the mixed gas that oxygen/argon ratio is 5/100 is imported into film interior, side Pressure in device is set as 0.4Pa, is carried out 30 seconds under conditions of input power 18.5kW.Then, 90 are carried out at 140 DEG C Minute heat treatment, crystallizes indium tin composite oxide layer.
(embodiment 2)
The alkoxy silane hydrolytic condensate as made of being condensed alkoxy silane hydrolysate and organic silica gel is (siloxane-based Polymer) dielectric layer is formed, and make with a thickness of 0.025 μm, refractive index 1.5, in addition to this, by same with embodiment 1 The method of sample obtains transparent conducting film.
(embodiment 3)
To shape after the surface progress sided corona treatment of the side of the formation dielectric layer of pet film At dielectric layer, in addition to this, transparent conducting film is obtained by method similarly to Example 2.
(comparative example 1)
Make dielectric layer with a thickness of 1.600 μm, refractive index 1.6, in addition to this, pass through side similarly to Example 1 Method obtains transparent conducting film.
(comparative example 2)
Make operating similarly with example 1 in addition to this with a thickness of 1.600 μm, refractive index 1.6 for dielectric layer, obtains To the laminated body of pet film and dielectric layer.By the pet film and electricity The laminated body of dielectric layer is imported into coiling type RF magnetron sputtering film forming apparatus, after heating in 75 seconds is carried out at 90 DEG C, by splashing It penetrates method and forms the indium tin composite oxide layer of thickness 20nm on the surface of dielectric layer.
Formation for indium tin composite oxide layer, as target, using containing 7.0 weight % of tin oxide, indium oxide 93.0 The tin indium oxide of weight %.For sputtering, while the mixed gas that oxygen/argon ratio is 5/100 is imported into film interior, side Pressure in device is set as 0.4Pa, is carried out 75 seconds under conditions of input power 6kW.To obtained transparent conducting film It carries out heating for 90 minutes at 140 DEG C, crystallizes indium tin composite oxide layer.
In Examples 1 to 3 and comparative example 1~2, adaptation, the removing of transparent conducting film are carried out as described above The conductive evaluation in face.In addition, in Examples 1 to 3 and comparative example 1~2, carry out active the quantitative of hydrogen-based, sheet resistance, it is total thoroughly Light rate, b*The measurement of value and surface roughness.It the results are shown in following table 1.
[table 1]
In addition, the indium tin for being present in transparent conducting film for showing Examples 1 to 3 and comparative example 1~2 in Fig. 3 is multiple Close oxide skin(coating) surface the active hydrogen-based that can be chemically modified by trifluoroacetic anhydride amount and transparent conducting film with The relationship of the removing ratio of extraction electrode.
According to table 1 and Fig. 3 it is found that being 2.1 former for the active hydrogen-based on the surface for being present in indium tin composite oxide layer The transparent conducting film of the Examples 1 to 3 of sub- % or more, the stripping area in adaptation evaluation are not observed less than 60% To the conducting of release surface, therefore the adaptation of indium tin composite oxide layer and extraction electrode improves.And then it is found that total light transmittance, The evaluation of sheet resistance, b* value and surface roughness Ra is good, transparent, non-identification, electric conductivity and excellent in te pins of durability, can To be suitable for touch panel.Wherein, stripping area of the transparent conducting film of embodiment 3 in adaptation evaluation is insufficient 10%, adaptation is especially excellent.
On the other hand it is found that the active hydrogen-based on the surface for being present in indium tin composite oxide layer is few, is former less than 2.1 The transparent conducting film of the comparative example 1 and 2 of sub- %, the stripping area in adaptation evaluation is more than 60%, observes removing The conducting in face, therefore transparency conducting layer is low with the adaptation of extraction electrode.
Description of symbols
1 resin film
2 dielectric layers
3 indium tin composite oxide layers
10,20 transparent conducting film
11 extraction electrodes

Claims (7)

1. a kind of transparent conducting film is configured in order dielectric layer on a surface of resin film and indium tin is compound Oxide skin(coating), which is characterized in that
The resin film is selected from being made of polyester based resin film, cellulose-based resin film and imide series resin film One of group,
The dielectric layer is made of the mixture of organic matter or organic matter and inorganic matter, and with a thickness of 0.005 μm or more and 0.100 μm hereinafter,
On the surface of the opposite side of the side configured with dielectric layer of indium tin composite oxide layer, there are more than 2.1 atom % And 4.0 atom % active hydrogen-based below that can be chemically modified by trifluoroacetic anhydride.
2. transparent conducting film according to claim 1, wherein the indium tin composite oxide layer be configured with The side of dielectric layer is in the peripheral part on the surface of opposite side configured with extraction electrode.
3. transparent conducting film according to claim 2, wherein the extraction electrode is by using silver as the conduction of principal component Property paste constitute.
4. transparent conducting film described in any one of claim 1 to 3, wherein described to match in the resin film The surface for being equipped with the side of dielectric layer has carried out sided corona treatment.
5. a kind of manufacturing method of transparent conducting film, which is characterized in that selected from by polyester based resin film, cellulose-based Dielectric layer is laminated on a surface of resin film in one of the group of resin film and imide series resin film composition, institute Dielectric layer is stated to be made of the mixture of organic matter or organic matter and inorganic matter and with a thickness of 0.005 μm or more and 0.100 μm Hereinafter,
Indium tin composite oxide layer is laminated on the surface of the opposite side of the side configured with resin film of the dielectric layer,
Transparent conducting film is obtained, the transparent conducting film includes resin film, dielectric layer and indium tin combined oxidation Nitride layer, and the surface of the opposite side of the side configured with dielectric layer of indium tin composite oxide layer there are 2.1 atom % with The upper and 4.0 atom % active hydrogen-based below that can be chemically modified by trifluoroacetic anhydride.
6. the manufacturing method of transparent conducting film according to claim 5, wherein described in the configuration of the resin film The surface of the side of dielectric layer has carried out sided corona treatment.
7. the manufacturing method of transparent conducting film according to claim 5 or 6, wherein formed by sputtering method described Indium tin composite oxide layer.
CN201780029395.XA 2016-05-13 2017-02-08 Transparent conducting film and its manufacturing method Pending CN109155166A (en)

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JP2009076432A (en) * 2007-01-18 2009-04-09 Nitto Denko Corp Transparent conductive film, method for producing the same, and touch panel provided with the same
CN102076776A (en) * 2008-06-30 2011-05-25 住友化学株式会社 Composition for insulating layer
JP2015032071A (en) * 2013-07-31 2015-02-16 王子ホールディングス株式会社 Method for manufacturing conductive sheet, conductive sheet and touch panel

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JP2013171454A (en) * 2012-02-21 2013-09-02 Toppan Printing Co Ltd Electrode panel of display device and method of manufacturing thereof

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JPH0279027A (en) * 1988-09-16 1990-03-19 Hitachi Ltd Polycrystalline silicon thin film transistor
CN1639294A (en) * 2002-06-28 2005-07-13 株式会社普利司通 Anisotropic conductive film
JP2009076432A (en) * 2007-01-18 2009-04-09 Nitto Denko Corp Transparent conductive film, method for producing the same, and touch panel provided with the same
CN102076776A (en) * 2008-06-30 2011-05-25 住友化学株式会社 Composition for insulating layer
JP2015032071A (en) * 2013-07-31 2015-02-16 王子ホールディングス株式会社 Method for manufacturing conductive sheet, conductive sheet and touch panel

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