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CN109143572B - Beam combiner for pulse laser, pulse beam combining laser system and method - Google Patents

Beam combiner for pulse laser, pulse beam combining laser system and method Download PDF

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CN109143572B
CN109143572B CN201811084011.7A CN201811084011A CN109143572B CN 109143572 B CN109143572 B CN 109143572B CN 201811084011 A CN201811084011 A CN 201811084011A CN 109143572 B CN109143572 B CN 109143572B
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pulsed
optical path
reflector
pulse
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CN109143572A (en
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陈绍武
冯国斌
王飞
王振宝
张磊
赵海川
王平
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Northwest Institute of Nuclear Technology
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements
    • G02B27/0977Reflective elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10Beam splitting or combining systems
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating

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Abstract

本发明具体涉及一种用于脉冲激光的合束器及脉冲合束激光系统及方法。为了克服现有脉冲时序合束中,所需要的透射型元件难以适应长时间高功率激光,或者其他合束方法会对合束后激光束质量产生影响的缺陷,本发明提供了一种用于脉冲激光的合束器,包括至少两个沿输出光路依次设置的移位装置,设置于移位装置上,用于使脉冲激光能在空间合束后沿输出光路出射的反射镜。一种脉冲合束激光系统,包括多个合束器、脉冲激光器和折返镜,按设定时序发射激光,经折返镜折返入射至反射镜形成合束激光。一种用于脉冲激光合束的方法,包括以下步骤:1)脉冲激光经反射镜反射后沿输出光路(4)出射;2)各反射镜移入和移出输出光路不阻挡后方。

Figure 201811084011

The present invention particularly relates to a beam combiner for pulsed laser and a pulsed beam combining laser system and method. In order to overcome the defects in the existing pulse sequential beam combination, the required transmission type element is difficult to adapt to the long-time high-power laser, or other beam combination methods will affect the quality of the laser beam after the combination. The beam combiner of the pulsed laser includes at least two shifting devices arranged in sequence along the output optical path, and is arranged on the shifting device, and is used to make the pulsed laser beams can be spatially combined and output along the output optical path. A pulsed beam combining laser system includes a plurality of beam combiners, pulsed lasers and a foldback mirror, emits laser light according to a set time sequence, and is folded and incident on a reflector through the foldback mirror to form a combined beam of laser light. A method for combining pulsed laser beams, comprising the following steps: 1) the pulsed laser light is reflected by a mirror and then exits along an output optical path (4); 2) each reflection mirror moves into and out of the output optical path without blocking the rear.

Figure 201811084011

Description

Beam combiner for pulse laser, pulse beam combining laser system and method
Technical Field
The invention belongs to the technical field of laser, and particularly relates to a beam combiner for pulse laser, a pulse beam combining laser system and a pulse beam combining laser method, which can improve laser power and repetition frequency parameters.
Background
With the continuous development and maturity of laser technology, high-power laser has wider and wider application, and the development of multiple industries is deeply influenced. The high-power laser is divided into high peak power laser (high-energy pulse laser) and high average power laser.
For high-energy pulse laser, a certain repetition frequency is required in various application fields, however, the direct increase of the repetition frequency of the high-energy pulse laser in operation can generate serious thermal effect, thereby affecting the performance of the laser, even leading to the reduction of the output pulse energy of the laser or the incapability of working. For high average power laser, higher requirements are continuously put forward on the laser output power by application requirements, and the single-path laser power is limited to be increased, so that higher average output power is difficult to realize. Therefore, it is an urgent problem to increase the repetition rate of the pulse laser for both high-energy pulse laser and high-average power laser.
The single laser realizes the output with high power, high beam quality and high efficiency characteristics, the beam quality is reduced nonlinearly due to the increase of the power, and the nonlinear relation is very complex, so that the capability of the single laser output is always limited under specific basic conditions, but the requirement of people on the output of three-high laser is endless, and the optimal path is the multi-beam synthesis technology to realize the output with higher power.
The existing beam combining method includes coherent beam combining, spectral beam combining and pulse laser time-sharing beam combining. The 'incoherent synthesis technical research of pulse laser' published in 'laser technology' in 3 months in 2015 discloses a method for realizing pulse laser beam combination based on turntable rotation, wherein lasers with different time sequences are obliquely incident to crystals with different thicknesses and then shifted, and are refracted by the crystals and then coaxially output to realize beam combination of pulse lasers, so that the aim of improving the laser output repetition frequency and average power is fulfilled. The problem with this solution is that the strong laser needs to be transmitted through the crystal, the optical element has limited ability to withstand the laser power, and it is difficult to meet the incident requirements of high power high energy laser.
The Chinese patent application 201210078189.7 discloses a pulse laser beam combining method, which provides a method of using a rotary reflector to combine a plurality of pulse laser beams with lower repetition frequency into a pulse laser beam with high repetition frequency. According to the technical effect description, all optical elements of the polygon mirror system can be reflecting optical elements, and the device can bear any high-power laser and can output any high-power pulse laser beam as long as the input laser power is high enough. However, this solution has a problem that the quality of the combined light beam is reduced due to the continuous movement of the mirror during the light emitting period of the pulsed laser, for example, when the pulse duration is in the order of milliseconds (ms), the system has an adverse effect on the popularization and application of the system due to the quality reduction of the combined light beam in the order of 1/10 caused by the continuous movement of the mirror.
Disclosure of Invention
The invention aims to overcome the defects that a transmission type element required by the existing pulse time sequence beam combination is difficult to adapt to long-time high-power laser, or other beam combination methods can influence the quality of a combined laser beam, and provides a beam combiner for pulse laser and a pulse beam combination laser system, so that the average output power and the repetition frequency of a single laser are greatly improved, the beam quality of the original laser is basically kept unchanged, and the pulse beam combiner has good power and good expandability of the number of lasers.
The technical scheme of the invention is as follows:
a beam combiner for pulse laser comprises a plurality of reflecting mirrors which are obliquely arranged along an output light path; a plurality of beams of pulse laser emitted according to a set time sequence are reflected and combined by corresponding reflectors and then emitted along the same output optical path; the reflector is arranged on the shifting device, the shifting device acts to enable the reflector to move in and out of the output light path according to a time sequence matched with the pulse laser, and in the laser emitting direction of the output light path, the reflector in the front position cannot block the emitting light beam of the reflector in the rear position.
Furthermore, in the beam combiner of the pulse laser, the shifting devices are a plurality of electrically controlled shifting stages which are controlled only according to a time sequence.
Further, in the beam combiner of the pulse laser, the electrically controlled displacement stage moves in a direction perpendicular to the output optical path.
Further, in the beam combiner of the pulse laser, the electric control displacement table is driven by a lead screw, an air cylinder or a hydraulic cylinder.
Furthermore, in the beam combiner for pulse laser, an included angle between each reflector and the output light path is 30 to 60 degrees, and an included angle between each reflector and the output light path may be different, but it is required to ensure that the pulse laser is emitted along the same output light path after being reflected by the reflectors.
Further, in the beam combiner for pulse laser, an included angle between the reflecting mirror and the output light path is 45 degrees.
A pulse beam combination laser system, characterized in that: the laser comprises n pulse lasers and n reflectors, wherein the pulse lasers emit laser according to a set time sequence and form beam combination laser emission after being incident to the reflectors, and n is a positive integer larger than 1.
Furthermore, the pulse beam combination laser system also comprises a turn-only mirror; the emergent laser is reflected back by the reflecting mirror and then enters the reflecting mirror.
A method for pulse laser beam combination is characterized by comprising the following steps:
1) pulse lasers emitted by at least two lasers according to a set time sequence are reflected by respective reflectors and then emitted out along an output light path;
2) each reflector moves in and out of the output light path according to the time sequence matched with the pulse laser, and in the laser emitting direction of the output light path, the reflector at the front position cannot block the light beam of the reflector at the rear position.
Further, the pulse laser in the step 1) is refracted by a catadioptric mirror and then reflected by a reflecting mirror.
The invention has the beneficial effects that:
1. the invention realizes the combination of the pulse laser by arranging a plurality of reflectors on the same output light path and moving out and in according to the time sequence matched with the emission time sequence of the pulse laser, greatly improves the power and the repetition frequency of the output laser on the premise of not changing the characteristic parameters of the light beam of the original laser, can expand the quantity, has no upper limit of power in the combination mode, and has important application value in the industry and other fields;
2. the reflector and other optical path devices of the invention adopt a total reflection mode, thus avoiding the defects of limited device tolerance power and influence on the beam quality when adopting a transmission type optical element, being particularly suitable for the conditions of high power and long-time light emitting, avoiding additional influences such as beam expanding and beam shrinking on the parameters of incident laser in beam combining implementation and ensuring the beam quality of the laser after beam combining.
Drawings
FIG. 1 is a schematic diagram of the operation of the beam combiner for pulsed laser according to the present invention;
FIG. 2 is a timing diagram of n pulse lasers before pulse laser beam combining according to the present invention;
FIG. 3 is a schematic diagram of the output power of the laser after the pulse laser is combined;
FIG. 4 is a schematic diagram illustrating the principle of shifting the beam combiner mirror for pulsed laser according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of the pulse beam combination laser system of the present invention;
FIG. 6 is a schematic diagram of a pulse beam combination laser system according to an embodiment of the present invention;
description of reference numerals:
1-a displacement device; 2-a reflector; 3-incident laser beam; 4-output optical path; 5-a shift control unit; 6-an electric control displacement platform; 7-laser time sequence control unit; 8-synchronous trigger signal; 9-a pulsed laser; 10-fold mirror.
Detailed Description
The invention is described in detail below with reference to the figures and specific embodiments.
As shown in fig. 1, fig. 2 and fig. 3, the principle idea of pulse beam combination of the present invention is: n reflectors 2 are obliquely arranged on the same output light path 4, each reflector 2 is arranged on the shifting device 1, and the reflectors 2 can be shifted out of the beam combining light path along the shifting direction 3 in the figure and then shifted back to the beam combining light path, and the beam combining light path is the output light path 4; the shifting means may be an integral or separate mechanism, which allows independent movement of each mirror 2.
Each reflector 2 corresponds to an incident laser beam 3, wherein the laser is a pulse laser output at a repetition frequency, the light emitting time sequence of each laser is as shown in fig. 2, and a scheme of 'research on incoherent synthesis technology of pulse lasers' in the background art can be adopted, a programmable logic array generates an electrical signal with pulse width, frequency and time delay meeting requirements, and then the electrical signal drives a seed laser and amplifies or drives a pulse pumping laser, so that the light pulse output by each laser keeps different time delays to meet the requirements of pulse beam combination.
In fig. 1, when n lasers are incident on the corresponding mirrors 2, the shifting device 1 moves the mirrors 2 away and back to the original positions according to the incident timing sequence, so that when the laser incident from the rear is reflected and output, the front mirror 2 does not block the incident beam from the rear, and thus the combination of multiple pulsed lasers can be realized. For example, the outgoing pulse of the 2# laser has a certain delay compared with that of the 1# laser, when the 2# laser is incident to the 2# mirror, as long as the 1# mirror in front is moved away by the shifting device and is not blocked on the optical path, there is only one laser beam on the beam combining optical path, namely the 2# pulse laser; similarly, the light-emitting pulse of the 3# laser is delayed from that of the 2# laser, when the 3# laser enters the 3# reflector, as long as the 1# reflector and the 2# reflector in front are moved away by the shifting device and are not blocked on the light path, the laser output on the beam combining light path at the moment is the 3# pulse laser, and so on, and after all the lasers are sequentially incident, the laser is recycled from the 1# so as to obtain the high repetition frequency or quasi-continuous laser output shown in fig. 3.
In practical application, due to action delay of the shifting mechanism, when the reflector shifts, the front reflector inevitably has small blocking effect on the rear, and seamless time sequence synthesis is difficult to achieve, so that continuous output is difficult to achieve, and quasi-continuous output can be achieved or the repetition frequency of original laser can be improved. Because each pulse laser is output with a certain duty ratio, the laser after the combination is the combination of n lasers, the average power of the laser is the sum of the average powers of all the n lasers, thereby greatly improving the output average power of the laser, simultaneously, the reflected light beams are coaxial, the quality of the light beams after the combination can not change due to the movement of the reflector, and the laser after the combination can be remotely transmitted and transmitted with high efficiency and high quality.
The significance of this pulse combination is: whether solid state, fiber or semiconductor lasers are affected by nonlinear and thermal effects, it is difficult to increase the average power output of a single laser, especially for a continuous output laser. The purpose of using pulse beam combination is to make a single laser into a pulse laser with a certain repetition frequency output and a small duty ratio, and although the average power cannot be too high due to the influence of nonlinear effect and thermal effect, the peak power of the pulse can be very high. Then, the pulse time sequence characteristic of each laser is adjusted through a pulse beam combination scheme, and n beams of laser beams are combined into high repetition frequency laser or quasi-continuous laser through the beam combination device, so that the output power is improved by n times, the original beam quality is still kept, and the beam combination mode has no power upper limit theoretically, and has important application value in the industry and other fields.
As shown in fig. 4, the shifting apparatus 1 in the embodiment of the present invention is a plurality of electrically controlled shifting stages 6 only electrically connected to the shifting control unit 5, the electrically controlled shifting stages 6 adopt a lead screw transmission mode or an operating mode of an air cylinder or a hydraulic cylinder, under the control of the shifting control unit 5, sequentially drive the corresponding mirrors 2 to move out of the output optical paths 4 according to a time sequence, and then move back to an original position, and ensure that the mirrors 2 in front of the optical paths at each time do not block the light beams behind, and only one laser beam can be output along the output optical paths 4 at the same time. Meanwhile, in order to match with the output time sequence of the laser, the shift control unit 5 outputs a synchronous trigger signal 8 to the laser time sequence control unit 7, or the laser time sequence control unit 7 outputs a synchronous trigger signal 8 to the shift control unit 5, so that the matching of the displacement of the reflector 2 and the pulse laser time sequence is realized. The mirror surface of the reflector 2 is a plane, the included angle between the mirror surface and the output light path 4 is 30-60 degrees, preferably 45 degrees, and the electrically controlled displacement table 6 moves in and out of the output light path 4 according to the direction perpendicular to the output light path 4.
If the effective incident area (i.e. the area after oblique angle projection) of the reflector is far larger than the light spot of the laser beam, the reflector is always in a reciprocating state under the action of the electric control displacement table from the starting time to the ending time of the laser pulse, and the width and the displacement speed of the laser pulse are controlled to ensure that the incident light beam cannot leak out of the reflector surface. If the effective incident area of the reflector is only slightly larger than the light spot of the laser beam, the reflector is kept static at the moment of laser light emitting through the program control setting of the electric control displacement table, and the reflector is quickly moved away from the position of the emitted light beam after the light emitting is finished, so that the shielding of the back reflected light is avoided. The moving mode of the electric control displacement platform can meet the requirements of power superposition and unchanged beam quality of the pulse combined beam and the adoption of a total reflection device on an optical path, and the beam combination requirement of the low-repetition-frequency pulse laser is realized.
Fig. 5 shows a schematic diagram of the composition principle of the pulse beam combination laser system, wherein a light beam output by the pulse laser 9 controlled according to a time sequence is directly incident on the reflector 2, and finally the combined beam is output after being a beam of pulse laser. Fig. 6 shows a compact pulse beam combining laser system, in which the output beam of the laser 9 passes through the turning mirror 10 and then enters the reflecting mirror 2 for beam combining. The whole system is compact in structure, convenient to arrange and implement in the direction perpendicular to the combined beam, and meanwhile, all the combined beam optical devices are in a reflection type, so that the system is particularly suitable for the conditions of high power and long-time light emitting, additional influences such as beam expanding and beam shrinking on parameters of incident laser are not generated in the combined beam implementation, and the quality of the combined laser beam is ensured.
The embodiment also provides a method for pulse laser beam combining, which includes the following steps:
1) pulse lasers emitted by at least two lasers according to a set time sequence are reflected by respective reflectors and then emitted out along an output light path;
2) each reflector moves in and out of the output light path according to the time sequence matched with the pulse laser, and in the laser emitting direction of the output light path, the reflector at the front position cannot block the light beam of the reflector at the rear position.
The pulse laser in the step 1) is refracted by the catadioptric mirror and then reflected by the reflecting mirror.

Claims (8)

1.一种用于脉冲激光的合束器,其特征在于:包括激光时序控制单元(7)、移位控制单元(5)、移位装置(1)和多只沿同一个输出光路(4)倾斜设置的反射镜(2);按照设定时序发射的多束脉冲激光经对应的反射镜(2)反射,并在空间合束后沿输出光路(4)出射,每只反射镜(2)与入射激光束相对应;所述的反射镜(2)设置在移位装置(1)上,移位装置(1)产生动作,使得反射镜(2)按照与脉冲激光相匹配的时序移入和移出输出光路(4),且在输出光路(4)的激光出射方向上,处于前方位置的反射镜(2)不会阻挡后方位置反射镜(2)的光束;1. a beam combiner for pulsed laser is characterized in that: comprise laser timing control unit (7), shift control unit (5), shift device (1) and many along the same output optical path (4) ) reflector (2) arranged obliquely; the multi-beam pulsed laser light emitted according to the set timing is reflected by the corresponding reflector (2), and then exits along the output optical path (4) after spatial combination, and each reflector (2) ) corresponds to the incident laser beam; the reflecting mirror (2) is arranged on the shifting device (1), and the shifting device (1) produces an action, so that the reflecting mirror (2) moves in according to the timing matching with the pulsed laser and move out of the output optical path (4), and in the laser output direction of the output optical path (4), the reflector (2) in the front position will not block the beam of the reflector (2) at the rear position; 所述的移位装置为若干只与移位控制单元(5)电连接的按照时序控制的电控位移台(6);所述的电控位移台沿垂直于输出光路(4)的方向移动,反射镜(2)在电控位移台(6)的作用下,一直处于往复移动状态中;The displacement device is a plurality of electrically controlled displacement stages (6) that are only electrically connected to the displacement control unit (5) and controlled according to time sequence; the electrically controlled displacement stages move in a direction perpendicular to the output optical path (4) , the mirror (2) is always in a state of reciprocating movement under the action of the electronically controlled displacement stage (6); 所述激光时序控制单元(7)输出同步触发信号(8)至移位控制单元(5),实现反射镜(2)的位移与脉冲激光时序的匹配;The laser timing control unit (7) outputs a synchronous trigger signal (8) to the displacement control unit (5), so as to realize the matching between the displacement of the mirror (2) and the timing of the pulsed laser; 所述脉冲激光为重频输出的脉冲激光,且每只激光器输出的光脉冲保持不同的时延。The pulsed laser is a pulsed laser output at a repeated frequency, and the optical pulse output by each laser maintains a different time delay. 2.根据权利要求1所述的用于脉冲激光的合束器,其特征在于:所述电控位移台采用丝杠、气缸或液压缸驱动。2 . The beam combiner for pulsed lasers according to claim 1 , wherein the electronically controlled displacement stage is driven by a lead screw, an air cylinder or a hydraulic cylinder. 3 . 3.根据权利要求2所述的用于脉冲激光的合束器,其特征在于:所述反射镜(2)与输出光路(4)的夹角为30-60度。3 . The beam combiner for pulsed laser light according to claim 2 , wherein the angle between the reflection mirror ( 2 ) and the output optical path ( 4 ) is 30-60 degrees. 4 . 4.根据权利要求3所述的用于脉冲激光的合束器,其特征在于:所述反射镜(2)与输出光路(4)的夹角为45度。4 . The beam combiner for pulsed laser light according to claim 3 , wherein the angle between the reflection mirror ( 2 ) and the output optical path ( 4 ) is 45 degrees. 5 . 5.一种利用权利要求1-4任意之一所述的用于脉冲激光的合束器获取的脉冲合束激光系统,其特征在于:包括n只脉冲激光器(9)和n只反射镜(2),脉冲激光器(9)按照设定的时序出射激光,入射至反射镜(2)形成合束激光出射,其中n为大于1的正整数。5. a pulsed beam combining laser system that utilizes the beam combiner described in any one of claims 1-4 to obtain for pulsed laser, it is characterized in that: comprise n pulse lasers (9) and n reflectors ( 2), the pulsed laser (9) emits laser light according to the set time sequence, and is incident on the reflector (2) to form a combined beam of laser light, where n is a positive integer greater than 1. 6.根据权利要求5所述的脉冲合束激光系统,其特征在于:还包括n只折返镜(10);出射激光经过折返镜(10)折返后入射至反射镜(2)。6. The pulsed beam combining laser system according to claim 5, characterized in that: it further comprises n folding mirrors (10); the outgoing laser is folded back by the folding mirror (10) and then incident on the reflecting mirror (2). 7.一种用于脉冲激光合束的方法,基于权利要求5或6所述脉冲合束激光系统,其特征在于,包括以下步骤:7. A method for pulsed laser beam combining, based on the pulsed combining laser system of claim 5 or 6, characterized in that, comprising the following steps: 1)至少两个激光器(9)按照设定时序发射的脉冲激光经各自的反射镜(2)反射后沿输出光路(4)出射;1) The pulsed lasers emitted by at least two lasers (9) according to the set timing are reflected by the respective mirrors (2) and then exit along the output optical path (4); 2)各反射镜(2)按照与脉冲激光相匹配的时序移入和移出输出光路(4),且在输出光路(4)的激光出射方向上,处于前方位置的反射镜(2)不会阻挡后方位置反射镜(2)的光束。2) Each reflector (2) moves in and out of the output optical path (4) according to the timing matching with the pulsed laser, and the reflector (2) in the front position will not block the laser output direction of the output optical path (4). The beam from the rear position mirror (2). 8.根据权利要求7所述的一种用于脉冲激光合束的方法,其特征在于:8. a kind of method for pulsed laser beam combining according to claim 7 is characterized in that: 所述步骤1)中的脉冲激光先经过折反镜折射后再经反射镜(2)的反射。The pulsed laser in the step 1) is first refracted by the catadioptric mirror and then reflected by the reflecting mirror (2).
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