CN109078442A - A kind of crystal pulling furnace richness argon tail gas oil removing system - Google Patents

Abstract

The invention relates to an argon-rich tail gas degreasing system of a crystal pulling furnace, which comprises at least one vacuum pump connected to the argon-rich tail gas pipeline, a wire mesh filter connected to the vacuum pump, at least one A fan connected to the mesh filter, a cooler connected to the fan, at least one element filter connected to the cooler, an electrostatic degreasing device connected to the filter element filter, at least one degreasing adsorption device connected to the electrostatic degreasing device cylinder and a gas cabinet connected to the deoiling adsorption cylinder; the present invention uses a variety of combinations to remove the oil in the argon-rich tail gas step by step to meet the requirements for subsequent low-temperature purification, and at the same time reduces the number of fans. Only three fans are used, reducing the The equipment is activated, thereby reducing the failure rate.

Description

A crystal pulling furnace argon-rich tail gas degreasing system

technical field

The invention relates to the technical field of oil and gas separation, in particular to an argon-rich tail gas deoiling system of a crystal pulling furnace.

Background technique

Monocrystalline silicon solar energy companies need to fill a large amount of high-purity argon into the polysilicon production furnace or monocrystalline silicon production furnace during the production process as a protective gas to prevent air from entering. The tail gas containing argon is pumped out by the vacuum pump and discharged into the atmosphere, resulting in waste. The content of argon in the argon-rich tail gas discharged during the production of monocrystalline silicon is as high as 98%, which has a high extraction value. At the same time, the argon-rich tail gas discharged contains CO, CH ₄ , hydrocarbons, oil, dust and other substances that pollute the air and are harmful to the human body.

At the same time, the argon-enriched tail gas contains oil and dust, which is difficult to remove, and it is easy to increase the system resistance and even block the pipeline. The existence of oil pollution will greatly reduce the efficiency or even failure of the dust removal equipment, and the existence of dust will reduce the efficiency of the oil removal equipment or even block the oil removal equipment. The efficient removal of oil and dust at the same time is currently a technical problem.

At present, there are few domestic literatures on the recovery and treatment of argon-rich tail gas. There is no actual project to recover argon-rich tail gas and purify high-purity argon. Or simply mention that the oil and dust need to be removed, without considering the technical difficulty. After actual debugging, it is found that the oil content in the argon-rich tail gas is very large.

In the invention patent with the application number CN201721189615.9, the simple H-shaped tube plus oil removal adsorption bucket mode cannot purify the oil to the effect required by the process.

Crystal pulling manufacturers generally have hundreds of crystal pulling furnaces. These crystal pulling furnaces are distributed in multiple workshops. To recover these exhaust gases after degreasing, the invention patent with application number CN201721189615.9 is used in each workshop Install the fan, send the tail gas of the workshop into the fan through the pipeline, and then gather the fans of each workshop into the main pipe. The disadvantage of this solution is that there are too many fans, and the fans are dynamic equipment that consumes electricity. Once a fan fails , the gas of other fans will flow back through the faulty fan, so that the gas cannot be recovered.

Based on this, in view of the deficiencies in the prior art, it is necessary to design a crystal pulling furnace argon-rich tail gas oil removal system that can clean the oil in the argon-rich tail gas and reduce the number of fans and reduce the risk.

Contents of the invention

The purpose of the present invention is to overcome the deficiencies of the prior art and obtain a crystal pulling furnace argon-rich tail gas deoiling system that can clean the oil in the argon-rich tail gas while reducing the number of fans and reducing the risk.

The present invention is realized through the following technical solutions:

A crystal pulling furnace argon-rich tail gas deoiling system, comprising at least one vacuum pump connected to the argon-rich tail gas pipeline, a wire mesh filter connected to the vacuum pump, at least one wire mesh filter arranged in sequence along the tail gas inlet direction A fan connected to the fan, a cooler connected to the fan, at least one element filter connected to the cooler, an electrostatic degreasing device connected to the filter element filter, at least one deoiling adsorption cylinder connected to the electrostatic degreasing device, and The gas cabinet connected to the deoiling adsorption cylinder; among them,

Vacuum pump and wire mesh filter constitute the pretreatment and degreasing part of the system, fans and coolers constitute the reprocessing and degreasing part of the system, filter element filters constitute the filtering and degreasing part of the system, and electrostatic degreasing devices constitute the electrostatic degreasing part of the system. The deoiling part and the deoiling adsorption cartridge form the deoiling and adsorbing part of the system.

Further, several steel wool balls are arranged in the wire mesh filter, and an oil discharge pipe is arranged at the bottom of the wire mesh filter.

Further, the cooler includes multiple rows of cooling process tubes, fins arranged outside the cooling process tubes, sleeves sleeved outside the fins to accommodate the cooling process tubes and fins, partitions and boxes; The baffle has an upper baffle and a lower baffle to form a clamping space for clamping the two ends of the casing, and the upper baffle and the lower baffle are provided with through holes adapted to the casing; There is a working area for accommodating partitions, with exhaust holes set on the upper wall of the box and air inlet holes set at the bottom of the side walls of the box; each row of cooling process tubes includes multiple U-shaped bends that are bent alternately in front and back Each row of cooling process tubes has a head end and an end. The head end of each row of cooling process tubes extends out of the outer end of the lower partition and is connected to the liquid outlet pipe. The liquid outlet pipe passes through the side wall of the corresponding box. The ends of the row cooling process pipes extend out from the outer end of the upper partition and are connected to the liquid inlet pipe, and the liquid inlet pipe passes through the side wall of the corresponding box body.

Furthermore, the outer edge of the cooling process tube is provided with several fins extending along the axis of the tube, and the fins are evenly distributed in an annular array.

Furthermore, the lower wall of the box is inclined, and an oil discharge pipe is provided on the lowest side of the lower wall, and an oil discharge valve is provided on the oil discharge pipe.

Further, a filter element is arranged inside the filter element, and the filter element has several pores.

Further, the electrostatic degreasing device is externally supplied with a high-voltage direct current of 14KV-16KV to form two electric fields with opposite polarities.

Further, a silicate adsorbent is arranged in the deoiling adsorption cylinder.

Further, there are three fans arranged in parallel.

Further, a cooling water jacket is provided on the pipeline between the cooler and the fan, and a chilled water pipeline is provided on the cooling water jacket.

Compared with the existing technology, the beneficial effect of the present invention is: the present invention uses a variety of combination methods to remove the oil in the argon-rich tail gas step by step, so as to meet the requirements of subsequent low-temperature purification, and at the same time reduce the number of fans, only three are used The fan reduces the number of moving equipment, thereby reducing the failure rate.

Description of drawings

Fig. 1 is a schematic diagram of the system structure of an embodiment of the present invention;

Fig. 2 is the three-dimensional structure schematic diagram of cooler 6 in one embodiment of the present invention (two sidewalls of casing 66 have been removed);

Fig. 3 is the right view of Fig. 2;

Fig. 4 is the front view of Fig. 2;

Fig. 5 is A-A direction sectional view among Fig. 4;

Fig. 6 is the back view of Fig. 4;

FIG. 7 is a schematic perspective view of the cooler 6 without the box 66 in one embodiment of the present invention;

Fig. 8 is a front view of Fig. 7;

Fig. 9 is a schematic perspective view of the other side of Fig. 7;

Fig. 10 is a top view structural schematic diagram of Fig. 9;

Fig. 11 is a structural schematic view of the cooperation of single row of cooling process tubes 61 and fins 62 in one embodiment of the present invention;

FIG. 12 is a schematic structural view of a single row of cooling process tubes 61 in an embodiment of the present invention.

The reference signs are as follows:

1. Argon-rich tail gas pipeline, 2. Vacuum pump, 3. Screen filter, 4. Fan, 5. Cooling water jacket, 6. Cooler, 61. Cooling process tube, 62. Fins, 63. Sleeve, 64, upper partition, 65, lower partition, 66, box body, 66-1, exhaust hole, 66-2, air intake hole, 67, liquid outlet pipe, 68, liquid inlet pipe, 69, oil discharge pipe , 7, filter element filter, 8, electrostatic degreasing device, 9, degreasing adsorption cylinder.

Detailed ways

In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

As shown in Figure 1, a crystal pulling furnace argon-rich tail gas degreasing system includes at least one vacuum pump 2 connected to the argon-rich tail gas pipeline 1 and a wire mesh filter connected to the vacuum pump 2 arranged in sequence along the tail gas inlet direction 3. At least one fan 4 connected to the wire mesh filter 3, a cooler 6 connected to the fan 4, at least one element filter 7 connected to the cooler 6, and an electrostatic degreasing device connected to the element filter 7 8. At least one deoiling adsorption cylinder 9 connected to the electrostatic degreasing device 8 and a gas cabinet connected to the deoiling adsorption cylinder 9; wherein,

Vacuum pump 2 and wire mesh filter 3 form the pretreatment oil removal part in the system, fan 4 and cooler 6 form the reprocessing oil removal part in the system, filter element filter 7 forms the filter oil removal part in the system, and electrostatic oil removal device 8 forms the electrostatic oil removal part in the system, and the deoiling adsorption cylinder 9 forms the deoiling adsorption part in the system.

During specific implementation, several steel wool balls are arranged inside the wire mesh filter 3 , and an oil discharge pipe 69 is arranged at the bottom of the wire mesh filter 3 .

During specific implementation, as shown in FIGS. 2 to 12, the cooler 6 includes multiple rows of cooling process tubes 61, fins 62 arranged outside the cooling process tubes 61, and sleeved outside the fins 62 to accommodate the cooling process tubes. 61 and the sleeve pipe 63 of fin 62, dividing plate and casing 66; Said dividing plate has upper dividing plate 64 and lower dividing plate 65, to form the clamping space of clamping sleeve pipe 63 two ends, said upper dividing plate 64 and the lower partition 65 are provided with through holes that are compatible with the sleeve 63; the box body 66 is formed with a working area for accommodating the partition board, and has an exhaust hole 66-1 arranged on the upper wall of the box body 66 And the air inlet 66-2 arranged at the bottom of the side wall of the box body 66; each row of cooling process tubes 61 includes a plurality of U-shaped bending tubes that are bent alternately forward and reverse, and each row of cooling process tubes 61 has a head end and an end, The head end of each row of cooling process pipes 61 extends out of the outer end of the lower partition 65 and is connected to the liquid outlet pipe 67, which passes through the side wall of the corresponding box body 66, and the end of each row of cooling process pipes 61 extends Out of the outer end of the upper partition 64 and connected to the liquid inlet pipe 68 , the liquid inlet pipe 68 passes through the side wall of the corresponding box body 66 .

During specific implementation, the outer edge of the cooling process tube 61 is provided with several fins 62 extending along the axis of the tube, and the fins 62 are evenly distributed in an annular array.

During specific implementation, the lower wall of the box body 66 is arranged obliquely, and an oil discharge pipe 69 is arranged on the lowest side of the lower wall, and an oil discharge valve is arranged on the oil discharge pipe 69 .

In the above technical solution, when the present invention is used, the lower pressure gas enters the box body 66 through the intake pipe, then contacts the fins 62 through the sleeve 63, then enters the upper part of the box body 66, and then enters the follow-up system through the exhaust pipe . The cooling water enters from the liquid inlet pipe 68 , enters the cooling process pipe 61 , and then discharges from the liquid outlet pipe 67 . In the casing 63, the water in the aluminum water pipe exchanges heat with the gas outside the fins 62 to reduce the temperature of the gas. The gas enters from the bottom and exits from the top, and the water enters and exits from the top to realize countercurrent heat exchange. The lower wall of the box 66 is set at a certain angle of inclination. After the oil-containing gas is cooled, part of the oil mist condenses into a liquid, which flows to the lower wall of the box 66 by its own gravity. Because the lower wall of the box 66 has a certain inclination, the oil will Flow to the lowest point, and then install an oil discharge hole at the lowest point. The oil discharge hole is connected with an oil discharge pipe and an oil discharge valve. When the oil accumulates to a certain extent, open the oil discharge valve to discharge the liquid oil.

During specific implementation, the filter element filter 7 is provided with a filter element, and the filter element has several pores.

During specific implementation, the electrostatic degreasing device 8 is externally supplied with a high-voltage direct current of 14KV-16KV to form two electric fields with opposite polarities.

During specific implementation, the deoiling adsorption cylinder 9 is provided with a silicate adsorbent.

During specific implementation, there are three blowers 4 arranged in parallel.

During specific implementation, a cooling water jacket 5 is also provided on the pipeline between the cooler 6 and the fan 4 , and a chilled water pipeline is provided on the cooling water jacket 5 .

Working principle of the present invention is:

In specific implementation, the argon-rich tail gas extracted from each workshop vacuum pump 2 first enters the wire mesh filter 3, which is filled with steel wire balls, and the oil in the gas collides with the steel wire to condense into liquid, and the liquid oil relies on itself Gravity flows to the bottom of the filter barrel, and an oil discharge pipeline is set at the bottom. When the oil accumulates to a certain extent, the oil discharge valve is opened to discharge the oil.

After the above steps, a part of the oil in the gas is removed, and then the argon-rich tail gas pipeline 1 of each workshop is merged and sucked into the fan 4 by the suction of the fan 4. After the fan 4 is pressurized, the gas pressure increases on the one hand to make the gas in it saturated. The oil content decreases, so that part of the oil becomes liquid oil. On the other hand, the temperature of the gas increases after pressurization (by calculation, it rises by about 13°C), which makes part of the liquid oil volatilize into a gaseous state. Therefore, a set of designed finned cooler 6 is added behind the blower fan 4 .

In the cooler 6, the temperature of the argon-rich tail gas is lowered, so that part of the gaseous oil is re-liquefied into a liquid state and flows to the bottom of the cooler 6. An oil discharge pipe 69 and an oil discharge valve are arranged at the bottom to discharge the liquid oil therein regularly.

Through the above steps, the large particles of liquid oil have basically been removed, and then the argon-rich exhaust gas enters the filter element filter 7. The principle of the filter element filter 7 is: the gas passes through the filter element with a large number of small holes, and the oil with smaller particles cannot pass through the filter element The small holes are thus intercepted, and flow to the bottom of the cartridge filter 7 after accumulating, and are discharged through the oil discharge pipe.

Because the oil content in the argon-rich tail gas is too much, the above steps still cannot meet the oil removal requirements, and there is still more gaseous oil mixed in the argon-rich tail gas, so the argon-rich tail gas enters the electrostatic oil removal device 8 for further oil removal, and uses external High-voltage (14KV-16KV) direct current forms two electric fields with opposite polarities. Under the action of Coulomb force, the soot particles are charged and then move to the collection plate. The repulsive force is attached to the collection plate. This step removes most of the gaseous oil mist. Afterwards, the gas is passed into the deoiling adsorption cylinder 9 equipped with a silicate adsorbent. The silicate adsorbent utilizes its porous characteristics, and the micropores therein can absorb very small molecules of gaseous oil, thereby removing the residual argon-rich tail gas. Small molecule oil mist, after which the gas enters the gas cabinet.

After the combination of the above multiple methods to remove oil, the oil can finally be removed to meet the requirements of subsequent purification.

The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention should be included in the protection of the present invention. within range.

Claims (10)

1. The utility model provides a crystal pulling furnace rich argon tail gas deoiling system which characterized in that: the device comprises at least one vacuum pump (2) connected with an argon-rich tail gas pipeline (1), a silk screen filter (3) connected with the vacuum pump (2), at least one fan (4) connected with the silk screen filter (3), a cooler (6) connected with the fan (4), at least one filter element filter (7) connected with the cooler (6), an electrostatic oil removal device (8) connected with the filter element filter (7), at least one oil removal adsorption cylinder (9) connected with the electrostatic oil removal device (8) and an air cabinet connected with the oil removal adsorption cylinder (9), which are sequentially arranged along the tail gas inlet direction; wherein,

the vacuum pump (2) and the silk screen filter (3) form a pretreatment oil removing part in the system, the fan (4) and the cooler (6) form a retreatment oil removing part in the system, the filter element filter (7) forms a filtration oil removing part in the system, the electrostatic oil removing device (8) forms an electrostatic oil removing part in the system, and the deoiling adsorption cylinder (9) forms a deoiling adsorption part in the system.

2. The argon-rich tail gas oil removal system for the crystal pulling furnace as claimed in claim 1, wherein: the wire mesh filter is characterized in that a plurality of steel wire balls are arranged in the wire mesh filter (3), and an oil discharge pipeline (69) is arranged at the bottom of the wire mesh filter (3).

3. The argon-rich tail gas oil removal system for the crystal pulling furnace as claimed in claim 1, wherein: the cooler (6) comprises a plurality of rows of cooling process pipes (61), fins (62) arranged outside the cooling process pipes (61), sleeves (63) sleeved outside the fins (62) to accommodate the cooling process pipes (61) and the fins (62), partition plates and a box body (66); the partition plate is provided with an upper partition plate (64) and a lower partition plate (65) to form clamping spaces for clamping two ends of the sleeve (63), and through holes matched with the sleeve (63) are formed in the upper partition plate (64) and the lower partition plate (65); a working area for accommodating the partition plate is formed in the box body (66), and the box body is provided with an exhaust hole (66-1) arranged on the upper wall of the box body (66) and an air inlet hole (66-2) arranged at the bottom of the side wall of the box body (66); every row of cooling process pipe (61) is including a plurality of U type pipes of bending of positive and negative alternative, and every row of cooling process pipe (61) has head end and end, and the head end of every row of cooling process pipe (61) extends baffle (65) outer end down and connects to drain pipe (67), the lateral wall that corresponds box (66) is worn out in drain pipe (67), and the end of every row of cooling process pipe (61) extends baffle (64) outer end and connects to feed liquor pipe (68), the lateral wall that corresponds box (66) is worn out in feed liquor pipe (68).

4. A low resistance oil removal cooler (6) according to claim 3, characterized in that: the outer edge of the cooling process pipe (61) is provided with a plurality of fins (62) extending along the axis of the pipe, and the fins (62) are uniformly distributed in an annular array.

5. A low resistance oil removal cooler (6) according to claim 3, characterized in that: the lower wall of the box body (66) is obliquely arranged, an oil discharge pipeline (69) is arranged on the lowest side of the lower wall, and an oil discharge valve is arranged on the oil discharge pipeline (69).

6. The argon-rich tail gas oil removal system for the crystal pulling furnace as claimed in claim 1, wherein: and a filter element is arranged in the filter element filter (7), and the filter element is provided with a plurality of pores.

7. The argon-rich tail gas oil removal system for the crystal pulling furnace as claimed in claim 1, wherein: the static oil removing device (8) is externally added with high-voltage direct current of 14KV-16KV to form two electric fields with opposite polarities.

8. The argon-rich tail gas oil removal system for the crystal pulling furnace as claimed in claim 1, wherein: a silicate adsorbent is arranged in the deoiling adsorption cylinder (9).

9. The argon-rich tail gas oil removal system for the crystal pulling furnace as claimed in claim 1, wherein: three fans (4) are connected in parallel.

10. The argon-rich tail gas oil removal system for the crystal pulling furnace as claimed in claim 1, wherein: and a cooling water jacket (5) is also arranged on the pipeline between the cooler (6) and the fan (4), and a chilled water pipeline is arranged on the cooling water jacket (5).