CN108963006A - A kind of solar battery and preparation method thereof and cell piece and photovoltaic module based on it - Google Patents
A kind of solar battery and preparation method thereof and cell piece and photovoltaic module based on it Download PDFInfo
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Abstract
本发明公开一种太阳能电池及其制备方法和基于其的电池片及光伏组件,太阳能电池的硅基体上的发射极设置为若干个独立的发射极,相邻的发射极的边缘之间具有预设的间距;阳能电池的正面电极图形和背面电极图形均设置为若干独立的电极图形,每个发射极上下各对应一处独立的正面电极图形和背面电极图形。本发明的太阳能电池切片时,沿相邻的发射极的边缘之间的部分对太阳能电池进行切割,能够避免太阳能电池在切片过程对pn结造成破坏,造成太阳能电池的性能衰减,以及切片后电极残余浆料和切片过程中的金属粉末污染切口,导致边缘漏电和短路;使得切口的应力较小,减少切片过程中应力释放导致的电池片碎片或隐裂,提高了切片良率和组件可靠性。
The invention discloses a solar cell, a preparation method thereof, and a solar cell and a photovoltaic module based on the solar cell. The emitter on the silicon substrate of the solar cell is set as several independent emitters, and there are predetermined gaps between the edges of the adjacent emitters. The set spacing; the front electrode pattern and the back electrode pattern of the solar cell are set as several independent electrode patterns, and each emitter corresponds to an independent front electrode pattern and back electrode pattern. When slicing the solar cell of the present invention, the solar cell is cut along the part between the edges of adjacent emitters, which can prevent the solar cell from causing damage to the pn junction during the slicing process, causing the performance of the solar cell to attenuate, and the electrode after slicing Residual slurry and metal powder in the slicing process contaminate the incision, leading to edge leakage and short circuit; making the stress of the incision smaller, reducing cell fragments or cracks caused by stress release during slicing, and improving slicing yield and component reliability .
Description
技术领域technical field
本发明属于晶硅太阳能电池技术领域,特别涉及一种太阳能电池及其制备方法和基于其的电池片及光伏组件。The invention belongs to the technical field of crystalline silicon solar cells, and in particular relates to a solar cell, a preparation method thereof, and a solar cell and a photovoltaic module based thereon.
背景技术Background technique
太阳能电池是一种利用光生伏特效应将光能直接转化为电能的光电器件。根据制造太阳能电池的基体材料通常可分为硅基太阳能电池、化合物太阳能电池、薄膜太阳能电池、有机太阳能电池、纳米太阳能电池等。目前硅基太阳能电池技术最成熟,已被规模化商业生产,占据太阳能电池市场的85%以上份额。A solar cell is a photoelectric device that uses the photovoltaic effect to directly convert light energy into electrical energy. According to the matrix material used to manufacture solar cells, it can generally be divided into silicon-based solar cells, compound solar cells, thin-film solar cells, organic solar cells, nano-solar cells, and the like. At present, silicon-based solar cell technology is the most mature and has been commercially produced on a large scale, accounting for more than 85% of the solar cell market.
一般晶硅太阳能电池由硅基体、发射极、发射极表面陷光结构、发射极表面钝化减反结构、硅基体背面钝化结构、正面电极和背面电极等组成。正面电极一般包含相互垂直的主栅和副栅,主栅和副栅主要由含有银的浆料印刷烧结形成。背面电极一般包含与正面主栅相对应的背银电极和背铝,背银电极浆料的主要成分为银;背面电极上除背银电极以外的部分被含有铝的浆料覆盖,形成背铝。正电极图案和背电极图案一般与硅片边缘保持0.5~1.0mm左右的空白区域。为了减少银浆耗量,主栅一般做成分段或者镂空样式。A general crystalline silicon solar cell consists of a silicon substrate, an emitter, a light-trapping structure on the emitter surface, a passivation anti-reflection structure on the emitter surface, a passivation structure on the back of the silicon substrate, a front electrode, and a back electrode. The front electrode generally includes a main grid and a sub-gate perpendicular to each other, and the main grid and the sub-gate are mainly formed by printing and sintering paste containing silver. The back electrode generally includes a back silver electrode and a back aluminum corresponding to the front main grid. . The positive electrode pattern and the back electrode pattern generally maintain a blank area of about 0.5-1.0 mm from the edge of the silicon wafer. In order to reduce the consumption of silver paste, the busbars are generally segmented or hollowed out.
现有技术一的技术方案:The technical scheme of prior art one:
用于制备半片组件或叠瓦组件的小电池片单元是由完整的电池片切割而成,其切片方式包括激光切割,机械切割,或是先用激光切割再用机械裂片方式。被切割的完整电池片的制备工艺与常规组件采用的电池片的制备工艺完全一致。整个电池片属于一个电池单元。正、背电极图案也与常规组件一致,即正面电极主栅保持连续,背面铝背场也保持连续、完整。The small cell units used to prepare half-cell modules or shingled modules are cut from complete cells, and the slicing methods include laser cutting, mechanical cutting, or laser cutting first and then mechanical splitting. The preparation process of the cut complete battery sheet is exactly the same as that of the battery sheet used in conventional components. The entire battery slice belongs to a battery cell. The front and back electrode patterns are also consistent with conventional components, that is, the main grid of the front electrode remains continuous, and the aluminum back field on the back also remains continuous and complete.
现有技术二的方案:The scheme of prior art 2:
用于制备半片组件或叠瓦组件的小电池片单元是由完整的电池片切割而成,其切片方式包括激光切割,机械切割,或是先用激光切割再用机械裂片方式。被切割的完整电池片的制备工艺与常规组件采用的电池片的制备工艺完全一致。整个电池片属于一个电池单元。与现有技术一不同的是,现有技术二在正、背电极设计做了更改,即正面主栅在切片位置保持断开,相应的,背面对应位置保持镂空,未用铝浆覆盖。The small cell units used to prepare half-cell modules or shingled modules are cut from complete cells, and the slicing methods include laser cutting, mechanical cutting, or laser cutting first and then mechanical splitting. The preparation process of the cut complete battery sheet is exactly the same as that of the battery sheet used in conventional components. The entire battery slice belongs to a battery cell. Different from the prior art 1, the design of the front and back electrodes of the prior art 2 has been changed, that is, the front busbar remains disconnected at the slicing position, and correspondingly, the corresponding position on the back remains hollowed out and not covered with aluminum paste.
现有技术一、二存在以下缺点:There are following disadvantages in prior art one and two:
现有技术一制成的切片电池,电池背面全部有铝浆覆盖,在高温烧结过程中,铝和硅发生共熔,在稍后的冷却过程中,由于铝的热膨胀系数高于硅,因而在电池片内部形成应力,导致电池片翘曲。在切片过程中,断口位置发生应力释放,因切割造成的损伤会随着应力释放而生长,进而延伸至电池内部。因此,根据现有技术一制成的切片电池,在后续的切片和封装过程中容易发生碎片和隐裂。而且,现有技术一切片过程中,断口易被正面银粉和背面铝粉污染,轻则造成边缘漏电,重则导致电极短路,进而导致功率输出下降。In the sliced battery made in prior art 1, the back of the battery is covered with aluminum paste. During high-temperature sintering, aluminum and silicon eutectic. In the later cooling process, because the thermal expansion coefficient of aluminum is higher than that of silicon, the Stress builds up inside the cell, causing the cell to warp. During the slicing process, stress release occurs at the fracture site, and the damage caused by cutting will grow along with the stress release, and then extend to the inside of the battery. Therefore, the sliced battery produced according to the prior art is prone to fragments and cracks in the subsequent slicing and packaging processes. Moreover, during the slicing process of the prior art, the fracture is easily polluted by the silver powder on the front and the aluminum powder on the back, which may cause edge leakage at the slightest, and short-circuit the electrodes at the worst, resulting in a decrease in power output.
现有技术二避免了正面银粉和背面铝粉对断口处的污染。而且切片位置没有被铝浆覆盖,也减小了切割过程中应力的释放所导致的碎片率和隐裂率。但是现有技术一和现有技术二所采用的切片电池均属于完整的单一电池单元,即现有技术一和现有技术二所采用的切片电池均只含有一个pn结。在切割过程中,原有完整的pn结被切割成若干个pn结单元,而pn结是太阳能电池的核心结构,一旦被破坏势必会造成器件性能的衰减,因此现有技术一和现有技术二仍会导致切片电池的功率输出发生衰减,且良率较低。The second prior art prevents the front silver powder and the back aluminum powder from polluting the fracture. Moreover, the slicing position is not covered by aluminum paste, which also reduces the fragmentation rate and hidden crack rate caused by stress release during the cutting process. However, the sliced cells used in the prior art 1 and the prior art 2 are all complete single battery units, that is, the sliced cells used in the prior art 1 and the prior art 2 both contain only one pn junction. In the cutting process, the original complete pn junction is cut into several pn junction units, and the pn junction is the core structure of the solar cell, once it is destroyed, it will inevitably cause the attenuation of device performance, so prior art one and prior art Second, it will still cause the power output of the sliced battery to attenuate, and the yield rate is low.
发明内容Contents of the invention
为解决现有技术中存在的问题,本发明的目的在于提供一种太阳能电池。In order to solve the problems existing in the prior art, the object of the present invention is to provide a solar cell.
一种太阳能电池,所述太阳能电池的硅基体上的发射极设置为若干个独立的发射极,相邻的发射极的边缘之间具有预设的间距;A solar cell, wherein the emitters on the silicon substrate of the solar cell are set as several independent emitters, and there is a predetermined distance between the edges of adjacent emitters;
所述太阳能电池的正面电极图形设置为若干独立的正面电极图形,每个发射极对应一处独立的正面电极图形;The front electrode pattern of the solar cell is set as several independent front electrode patterns, and each emitter corresponds to an independent front electrode pattern;
所述太阳能电池的背面电极图形设置为若干独立的背面电极图形,每个发射极对应一处独立的背面电极图形。The back electrode pattern of the solar cell is set as several independent back electrode patterns, and each emitter corresponds to an independent back electrode pattern.
优选的,相邻的发射极的边缘之间的间距为0.5毫米至4毫米。优选的,所述正面电极图形包含主栅以及与主栅相连的副栅,所述背面电极图形包含背面铝浆区域和背银电极。Preferably, the distance between the edges of adjacent emitters is 0.5 mm to 4 mm. Preferably, the front electrode pattern includes a main grid and a sub-gate connected to the main grid, and the back electrode pattern includes a rear aluminum paste region and a rear silver electrode.
优选的,所述太阳能电池的正面电极图在无pn结区域隔开,背面电极图形在无pn结区域隔开。Preferably, the front electrode pattern of the solar cell is separated in a pn junction-free region, and the back electrode pattern is separated in a pn junction-free region.
优选的,所述太阳能电池的无pn结区域方向与主栅方向垂直或平行。Preferably, the direction of the pn junction-free region of the solar cell is perpendicular to or parallel to the direction of the main grid.
优选的,所述太阳能电池为单晶硅太阳能电池或多晶硅太阳能电池。Preferably, the solar cell is a monocrystalline silicon solar cell or a polycrystalline silicon solar cell.
本发明的目的还在于提供一种电池片。The purpose of the present invention is also to provide a battery sheet.
一种电池片,所述电池片由上述太阳能电池沿相邻的发射极的边缘之间的区域切割而成。A cell sheet, which is cut from the above solar cell along the area between the edges of adjacent emitters.
本发明的目的还在于提供一种光伏组件。The purpose of the present invention is also to provide a photovoltaic module.
一种光伏组件,所述光伏组件的太阳能电池由上述电池片制成。A photovoltaic component, the solar cell of the photovoltaic component is made of the above battery sheet.
优选的,所述光伏组件为半片组件或叠瓦组件。Preferably, the photovoltaic module is a half-cut module or a shingled module.
本发明的目的还在于提供一种太阳能电池的制备方法。The object of the present invention is also to provide a method for preparing a solar cell.
一种太阳能电池的制备方法,其过程如下:A kind of preparation method of solar cell, its process is as follows:
在具有绒面陷光结构的硅基体的一个表面制备若干个独立的发射极,相邻的发射极的边缘之间具有预设的间距;Prepare several independent emitters on one surface of the silicon substrate with a textured light-trapping structure, and there is a preset distance between the edges of adjacent emitters;
在制备有发射极的硅基体表面制备钝化层;preparing a passivation layer on the surface of the silicon substrate prepared with an emitter;
再制备电极图形,制备电极图形时,在钝化层的表面上与每个发射极对应的区域制备独立的正面电极图形;在硅基体的另一个表面上与每个发射极对应的区域制备独立的背面电极图形。Prepare the electrode pattern again. When preparing the electrode pattern, prepare an independent front electrode pattern on the surface of the passivation layer corresponding to each emitter; prepare an independent front electrode pattern on the other surface of the silicon substrate corresponding to each emitter. electrode pattern on the back.
优选的,制备发射极时,采用高温扩散或离子注入的方式制备。Preferably, the emitter is prepared by high-temperature diffusion or ion implantation.
与现有技术相比,本发明具有如下有益效果:Compared with the prior art, the present invention has the following beneficial effects:
本发明的太阳能电池将发射极设置为若干个独立的发射极,相邻的发射极的边缘之间具有预设的间距,当该太阳能电池切片时,沿相邻的发射极的边缘之间的部分对太阳能电池进行切割,能够避免太阳能电池在切片过程对pn结造成破坏,进而避免了因pn结的破坏而造成太阳能电池的性能衰减;又由于阳能电池的正面电极图形设置为若干独立的正面电极图形,每个发射极对应一处独立的正面电极图形,太阳能电池的背面电极图形设置为若干独立的背面电极图形,每个发射极对应一处独立的背面电极图形,因此也避免了切片后电极残余浆料和切片过程中的金属粉末污染切口导致的边缘漏电和短路的风险;也使得切口的应力较小,减少了切片过程中应力释放导致的电池片碎片或隐裂,提高了切片良率和组件可靠性。The solar cell of the present invention sets the emitter as several independent emitters, and there is a preset distance between the edges of adjacent emitters. When the solar cell is sliced, along the Partially cutting the solar cell can avoid the damage of the solar cell to the pn junction during the slicing process, thereby avoiding the performance attenuation of the solar cell caused by the damage of the pn junction; and because the front electrode pattern of the solar cell is set as several independent Front electrode pattern, each emitter corresponds to an independent front electrode pattern, the back electrode pattern of the solar cell is set to several independent back electrode patterns, and each emitter corresponds to an independent back electrode pattern, so slicing is also avoided The risk of edge leakage and short circuit caused by the residual slurry of the rear electrode and the metal powder contamination in the slicing process; it also makes the stress of the slit smaller, reducing the cell fragments or cracks caused by the stress release during the slicing process, and improving the slicing process. Yield and component reliability.
本发明的电池片由本发明太阳能电池沿相邻的发射极的边缘之间的区域切割而成,因此该电池片的pn结完整,未造成破坏,能够避免因pn结的破坏而造成太阳能电池片功率输出发生衰减。The battery sheet of the present invention is formed by cutting the solar cell of the present invention along the region between the edges of adjacent emitters, so the pn junction of the battery sheet is complete without damage, and the damage of the solar cell sheet due to the damage of the pn junction can be avoided. The power output is attenuated.
本发明的光伏组件的太阳能电池由本发明的电池片制成,由本发明的电池片的有益效果可知,本发明的太阳能组件可靠性高,功率输出相对于现有光伏组件较高。The solar cell of the photovoltaic module of the present invention is made of the battery sheet of the present invention. From the beneficial effect of the battery sheet of the present invention, it can be seen that the solar module of the present invention has high reliability and higher power output than the existing photovoltaic module.
由本发明太阳能电池的有益效果可知,本发明制备方法制备的太阳能电池在切割时,能够避免太对pn结造成破坏,进而避免了因pn结的破坏而造成太阳能电池的性能衰减;同时也能够避免切片后电极残余浆料和切片过程中的金属粉末污染切口导致的边缘漏电和短路的风险;也使得切口的应力较小,减少了切片过程中应力释放导致的电池片碎片或隐裂,提高了切片良率和组件可靠性。From the beneficial effect of the solar cell of the present invention, it can be seen that the solar cell prepared by the preparation method of the present invention can avoid too much damage to the pn junction when cutting, thereby avoiding the performance attenuation of the solar cell caused by the damage of the pn junction; The risk of edge leakage and short circuit caused by residual electrode slurry after slicing and metal powder contamination in the slicing process; also makes the stress of the slit smaller, reducing cell fragments or cracks caused by stress release during slicing, and improving Slicing yield and component reliability.
附图说明Description of drawings
图1现有太阳能电池结构剖面图;Fig. 1 is a cross-sectional view of an existing solar cell structure;
图2本发明实施例制备的半片切片电池结构剖面图;Fig. 2 is a cross-sectional view of the structure of a half-cut sliced battery prepared in the embodiment of the present invention;
图3本发明实施例制备的半片切片电池正面电极图案(切口位置垂直正面主栅);Figure 3 is the front electrode pattern of the half-sliced battery prepared in the embodiment of the present invention (the position of the incision is vertical to the front busbar);
图4本发明实施例制备的半片切片电池背面电极图案(切口位置垂直正面主栅);Figure 4 is the electrode pattern on the back of the half-sliced battery prepared in the embodiment of the present invention (the position of the incision is vertical to the front busbar);
图5本发明实施例制备的半片切片电池正面电极图案(切口位置平行正面主栅);Fig. 5 is the front electrode pattern of the half slice battery prepared by the embodiment of the present invention (the position of the incision is parallel to the front main grid);
图6本发明实施例制备的半片切片电池背面电极图案(切口位置平行正面主栅);Figure 6 is the electrode pattern on the back of the half-sliced battery prepared in the embodiment of the present invention (the position of the incision is parallel to the front busbar);
图7本发明实施例制备的五分之一片切片电池结构的剖面图;Fig. 7 is a cross-sectional view of a fifth slice battery structure prepared in the embodiment of the present invention;
图8本发明实施例制备五分之一片切片电池过程中正面掩膜层示意图。Fig. 8 is a schematic diagram of the front mask layer in the process of preparing one-fifth sliced battery according to the embodiment of the present invention.
其中1-钝化层,2-发射极,3-硅基体,4-铝背表面,5-切口位置,6-硅片边缘,7-正面电极副栅,8-正面电极主栅,9-正面电极图形边框,11-背面铝浆覆盖边缘,12-铝浆覆盖区,13-背面银电极,14-掩膜层。Among them, 1-passivation layer, 2-emitter, 3-silicon substrate, 4-aluminum back surface, 5-notch position, 6-silicon chip edge, 7-front electrode sub-gate, 8-front electrode main grid, 9- Frame of front electrode pattern, 11-edge covered by aluminum paste on the back, 12-covered area by aluminum paste, 13-silver electrode on the back, 14-mask layer.
具体实施方式Detailed ways
下面结合附图和实施例来对本发明作进一步的说明。The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
参照图2和图7,本发明太阳能电池的硅基体3上的发射极设置为若干个独立的发射极2,相邻的发射极2的边缘之间具有预设的间距;Referring to Fig. 2 and Fig. 7, the emitter on the silicon substrate 3 of the solar cell of the present invention is set as several independent emitters 2, and there is a preset distance between the edges of adjacent emitters 2;
再参照图3和图5,太阳能电池的正面电极图形设置为若干独立的正面电极图形,每个发射极2对应一处独立的正面电极图形,独立的正面电极图形为完整的正面电极图形;Referring to Figure 3 and Figure 5 again, the front electrode pattern of the solar cell is set to several independent front electrode patterns, each emitter 2 corresponds to an independent front electrode pattern, and the independent front electrode pattern is a complete front electrode pattern;
再参照图4和图6,太阳能电池的背面电极图形设置为若干独立的背面电极图形,每个发射极2对应一处独立的背面电极图形,独立的背面电极图形为完整的背面电极图形。Referring to Fig. 4 and Fig. 6 again, the back electrode pattern of the solar cell is set as several independent back electrode patterns, and each emitter 2 corresponds to an independent back electrode pattern, and the independent back electrode pattern is a complete back electrode pattern.
作为本发明优选的实施方案,相邻的正面电极图形之间具有无图案区域,该无图案区域为太阳能电池的无pn结区在太阳能电池正面对应的区域(即太阳能电池的正面电极图在无pn结区域隔开),该无图案区域作为太阳能电池正面的切口位置5;As a preferred embodiment of the present invention, there is a pattern-free area between adjacent front electrode patterns, and this pattern-free area is the region corresponding to the front side of the solar cell without a pn junction region (that is, the front electrode figure of the solar cell is in the absence of a pn junction region). The pn junction area is separated), and the pattern-free area is used as the incision position 5 on the front side of the solar cell;
相邻的背面电极图形之间具有无图案区域,该无图案区域为太阳能电池的无pn结区在太阳能电池背面对应的区域(即背面电极图形在无pn结区域隔开),该无图案区域作为太阳能电池背面的切口位置5。There is a pattern-free area between adjacent back electrode patterns, and the pattern-free region is the region corresponding to the pn junction region of the solar cell at the back of the solar cell (that is, the back electrode pattern is separated from the pn junction region), and the pattern-free region As the cutout position 5 on the back of the solar cell.
作为本发明优选的实施方案,相邻的发射极2的边缘之间的间距为0.5毫米至4毫米,相邻的正面电极图形之间的无图案区域以及相邻的背面电极图形之间的无图案区域的宽度均为0.5毫米至4毫米。As a preferred embodiment of the present invention, the distance between the edges of adjacent emitters 2 is 0.5 millimeters to 4 millimeters, and there is no pattern area between adjacent front electrode patterns and no pattern area between adjacent back electrode patterns. The pattern area has a width of 0.5 mm to 4 mm.
参照图3和图5,作为本发明优选的实施方案,正面电极图形包含主栅以及与主栅相连的副栅,背面电极图形包含背面铝浆区域和背银电极。3 and 5, as a preferred embodiment of the present invention, the front electrode pattern includes a main grid and a sub-gate connected to the main grid, and the back electrode pattern includes a rear aluminum paste region and a rear silver electrode.
参照图3和图4,作为本发明优选的实施方案,太阳能电池的pn结断开方向与主栅方向垂直。Referring to FIG. 3 and FIG. 4 , as a preferred embodiment of the present invention, the disconnection direction of the pn junction of the solar cell is perpendicular to the main gate direction.
参照图5和图6,作为本发明优选的实施方案,太阳能电池的pn结断开方向与主栅方向平行。Referring to FIG. 5 and FIG. 6 , as a preferred embodiment of the present invention, the disconnection direction of the pn junction of the solar cell is parallel to the direction of the busbar.
参照图2~图8,本发明太阳能电池可根据组件设计要求,在单一硅基体3上制成2个、3个、4个、5个或6个等若干电池单元,太阳能可被相应的切成2个、3个、4个、5个或6个等若干电池片。Referring to Figures 2 to 8, the solar cell of the present invention can be made into 2, 3, 4, 5 or 6 battery units on a single silicon substrate 3 according to the design requirements of the components, and the solar energy can be cut accordingly. Into 2, 3, 4, 5 or 6 cells, etc.
作为本发明优选的实施方案,太阳能电池为单晶硅太阳能电池或多晶硅太阳能电池。As a preferred embodiment of the present invention, the solar cell is a monocrystalline silicon solar cell or a polycrystalline silicon solar cell.
本发明提供的电池片,由上述太阳能电池沿相邻的发射极的边缘之间的区域切割而成。The cell sheet provided by the present invention is formed by cutting the above solar cell along the area between the edges of adjacent emitters.
本发明提供的光伏组件的太阳能电池由上述电池片制成。The solar cell of the photovoltaic module provided by the present invention is made of the above cell sheet.
作为本发明优选的实施方案,所述光伏组件为半片组件或叠瓦组件。As a preferred embodiment of the present invention, the photovoltaic module is a half-cut module or a shingled module.
本发明提供的太阳能电池的制备方法,其过程如下:The preparation method of solar cell provided by the invention, its process is as follows:
在具有绒面陷光结构的硅基体3的一个表面制备若干个独立的发射极2,相邻的发射极2的边缘之间具有预设的间距;Prepare several independent emitters 2 on one surface of the silicon substrate 3 with a textured light-trapping structure, and there is a preset distance between the edges of adjacent emitters 2;
在制备有发射极2的硅基体表面制备钝化层1;Prepare a passivation layer 1 on the surface of the silicon substrate prepared with the emitter 2;
再制备电极图形,制备电极图形时,在钝化层1的表面上与每个发射极2对应的区域制备独立的正面电极图形;在硅基体3的另一个表面上与每个发射极2对应的区域制备独立的背面电极图形。Prepare the electrode pattern again, when preparing the electrode pattern, prepare an independent front electrode pattern on the surface of the passivation layer 1 corresponding to each emitter 2; on the other surface of the silicon substrate 3, correspond to each emitter 2 area to prepare independent back electrode patterns.
作为本发明优选的实施方案,硅基体3通过化学腐蚀方法形成绒面陷光结构。As a preferred embodiment of the present invention, the silicon substrate 3 forms a textured light-trapping structure by chemical etching.
作为本发明优选的实施方案,通过丝网印刷的方式制备电极图形。As a preferred embodiment of the present invention, the electrode pattern is prepared by screen printing.
作为本发明优选的实施方案,通过电镀的方式制备电极图形。As a preferred embodiment of the present invention, electrode patterns are prepared by electroplating.
作为本发明优选的实施方案,通过喷墨打印的方式制备电极图形。As a preferred embodiment of the present invention, the electrode pattern is prepared by inkjet printing.
作为本发明优选的实施方案,制备发射极2时,采用高温扩散的方式制备。As a preferred embodiment of the present invention, when preparing the emitter 2, it is prepared by high-temperature diffusion.
作为本发明优选的实施方案,制备发射极2时,采用离子注入的方式制备。As a preferred embodiment of the present invention, when preparing the emitter 2, it is prepared by ion implantation.
本发明制备发射极2,形成时pn结时,不限于高温扩散和离子注入这两种制备方式。The present invention prepares the emitter 2, and when forming a pn junction, it is not limited to the two preparation methods of high-temperature diffusion and ion implantation.
实施例1Example 1
本实施例制备太阳能电池的程如下:The process of preparing solar cells in this embodiment is as follows:
(1)制绒:将M2尺寸的P型单晶硅片置于氢氧化钾碱液中进行各向异性腐蚀,形成金字塔陷光结构;(1) Texturing: Put the P-type monocrystalline silicon wafer of M2 size in potassium hydroxide alkali solution for anisotropic etching to form a pyramidal light-trapping structure;
(2)扩散:将制绒后的P型单晶硅片置于管式扩散炉中,并在POCl3气体氛围中进行高温扩散,扩散完成后,将形成完整的pn结;(2) Diffusion: place the textured P-type monocrystalline silicon wafer in a tubular diffusion furnace, and perform high-temperature diffusion in a POCl 3 gas atmosphere. After the diffusion is completed, a complete pn junction will be formed;
(3)刻蚀:将扩散后的P型单晶硅片表面涂覆一层石蜡,并在P型单晶硅片中间留下宽约4mm的空白无石蜡区,将涂覆石蜡的P型单晶硅片置于链式清洗槽中进行刻蚀,去除扩散过程中形成的边结和背结以及表面无石蜡区的pn结;(3) Etching: Coat the surface of the diffused P-type single crystal silicon wafer with a layer of paraffin, and leave a blank area with a width of about 4 mm in the middle of the P-type single crystal silicon wafer without paraffin. The single crystal silicon wafer is etched in a chain cleaning tank to remove the side junction and back junction formed during the diffusion process and the pn junction in the paraffin-free area on the surface;
(4)清洗:将刻蚀后涂覆有石蜡的P型单晶硅片置于水剂石蜡清洗液中进行清洗,去除表面石蜡覆盖层,并将表面含磷二氧化硅层(PSG)去除;(4) Cleaning: Place the P-type monocrystalline silicon wafer coated with paraffin after etching in an aqueous paraffin cleaning solution for cleaning, remove the paraffin coating on the surface, and remove the phosphorus-containing silicon dioxide layer (PSG) on the surface ;
(5)PECVD镀膜:将刻蚀完的硅片置于管式炉中,对具有pn结的一面进行镀膜,形成钝化膜1;(5) PECVD coating: place the etched silicon wafer in a tube furnace, and coat the side with the pn junction to form a passivation film 1;
(6)金属化:正面电极网版图形按图3设计,背面电极网板图形按图4设计。经丝网印刷和高温烧结后便形成二分之一片切片电池,电池结构剖的剖面如图2所示。(6) Metallization: The front electrode screen pattern is designed according to Figure 3, and the back electrode screen pattern is designed according to Figure 4. After screen printing and high-temperature sintering, a half sliced battery is formed, and the section of the battery structure is shown in Figure 2.
实施例2Example 2
本实施例制备太阳能电池的程如下:The process of preparing solar cells in this embodiment is as follows:
(1)制绒:将M2尺寸的P型单晶硅片置于氢氧化钠碱液中进行各向异性腐蚀,形成金字塔陷光结构;(1) Texturing: Put the P-type monocrystalline silicon wafer of M2 size in sodium hydroxide alkali solution for anisotropic etching to form a pyramidal light-trapping structure;
(2)扩散:将制绒后的P型单晶硅片置于管式扩散炉中,并在POCl3气体氛围中进行高温扩散,扩散完成后,将形成完整的pn结;(2) Diffusion: place the textured P-type monocrystalline silicon wafer in a tubular diffusion furnace, and perform high-temperature diffusion in a POCl 3 gas atmosphere. After the diffusion is completed, a complete pn junction will be formed;
(3)刻蚀:将扩散后的P型单晶硅片表面涂覆一层石蜡,并在P型单晶硅片中间留下宽约4mm的空白无石蜡区,将涂覆石蜡的P型单晶硅片置于链式清洗槽中进行刻蚀,去除扩散过程中形成的边结和背结以及表面无石蜡区的pn结;(3) Etching: Coat the surface of the diffused P-type single crystal silicon wafer with a layer of paraffin, and leave a blank area with a width of about 4 mm in the middle of the P-type single crystal silicon wafer without paraffin. The single crystal silicon wafer is etched in a chain cleaning tank to remove the side junction and back junction formed during the diffusion process and the pn junction in the paraffin-free area on the surface;
(4)清洗:将刻蚀后涂覆有石蜡的P型单晶硅片置于水剂石蜡清洗液中进行清洗,去除表面石蜡覆盖层,并将表面含磷二氧化硅层(PSG)去除;(4) Cleaning: Place the P-type monocrystalline silicon wafer coated with paraffin after etching in an aqueous paraffin cleaning solution for cleaning, remove the paraffin coating on the surface, and remove the phosphorus-containing silicon dioxide layer (PSG) on the surface ;
(5)PECVD镀膜:将刻蚀完的硅片置于板式炉中进行镀膜,对具有pn结的一面进行镀膜,形成钝化膜1;(5) PECVD coating: place the etched silicon wafer in a plate furnace for coating, and coat the side with the pn junction to form a passivation film 1;
(6)金属化:正面电极网版图形按图5设计,背面电极网板图形按图6设计。经丝网印刷和高温烧结后便形成二分之一片切片电池,电池结构的剖面如图2所示。(6) Metallization: The front electrode screen pattern is designed according to Figure 5, and the back electrode screen pattern is designed according to Figure 6. After screen printing and high-temperature sintering, a half sliced battery is formed, and the section of the battery structure is shown in Figure 2.
作为本发明优选的实施方案,在实施例1和实施例2中,在高温扩散制备pn结过程中通过氧化硅作为掩膜层,在单个硅基体上形成两个完整的相互独立的pn单元。As a preferred embodiment of the present invention, in Example 1 and Example 2, silicon oxide is used as a mask layer during high-temperature diffusion to form a pn junction, and two complete independent pn units are formed on a single silicon substrate.
实施例3:Example 3:
(1)制绒:将M2尺寸P型单晶硅片置于氢氧化钾碱液中进行各向异性腐蚀,形成金字塔陷光结构;(1) Texturing: Put the M2 size P-type single crystal silicon wafer in potassium hydroxide alkali solution for anisotropic etching to form a pyramidal light-trapping structure;
(2)扩散:将制绒后的P型单晶硅片置于管式扩散炉中,并在POCl3气体氛围中进行高温扩散。扩散完成后,将形成完整的pn结;(2) Diffusion: place the textured P-type monocrystalline silicon wafer in a tubular diffusion furnace, and perform high-temperature diffusion in a POCl 3 gas atmosphere. After the diffusion is completed, a complete pn junction will be formed;
(3)激光去除pn结:采用激光将硅片中间宽约4mm的pn结去除,使得扩散后完整的单个pn结变成两个小pn结;(3) Laser removal of the pn junction: use laser to remove the pn junction with a width of about 4mm in the middle of the silicon wafer, so that the complete single pn junction after diffusion becomes two small pn junctions;
(4)刻蚀:将激光去结后的P型单晶硅片置于链式清洗槽中进行刻蚀,去除扩散过程中形成的边结和背结以及表面的PSG;(4) Etching: place the P-type single crystal silicon wafer after laser dejunction in a chain cleaning tank for etching to remove the edge junction and back junction formed during the diffusion process and the PSG on the surface;
(5)PECVD镀膜:将刻蚀完的硅片置于板式炉中进行镀膜,对具有pn结的一面进行镀膜,形成钝化膜1;(5) PECVD coating: place the etched silicon wafer in a plate furnace for coating, and coat the side with the pn junction to form a passivation film 1;
(6)金属化:正面电极网版图形按图5设计,背面电极网板图形按图6设计。经丝网印刷和高温烧结后便形成二分之一片切片电池,电池结构的剖面如图2所示。(6) Metallization: The front electrode screen pattern is designed according to Figure 5, and the back electrode screen pattern is designed according to Figure 6. After screen printing and high-temperature sintering, a half sliced battery is formed, and the section of the battery structure is shown in Figure 2.
实施例4:Example 4:
(1)制绒:将M2尺寸P型单晶硅片置于氢氧化钠碱液中进行各向异性腐蚀,形成金字塔陷光结构;(1) Texturing: Put M2 size P-type monocrystalline silicon wafers in sodium hydroxide lye for anisotropic etching to form a pyramidal light-trapping structure;
(2)扩散:将制绒后的P型单晶硅片置于管式扩散炉中,并在POCl3气体氛围中进行高温扩散,散完成后,将形成完整的pn结;(2) Diffusion: place the textured P-type monocrystalline silicon wafer in a tubular diffusion furnace, and perform high-temperature diffusion in a POCl 3 gas atmosphere. After the diffusion is completed, a complete pn junction will be formed;
(3)激光去除pn结:采用激光将P型单晶硅片中间宽约4mm的pn结去除,使得扩散后完整的单个pn结变成两个小pn结;(3) Laser removal of the pn junction: use laser to remove the pn junction with a width of about 4mm in the middle of the P-type single crystal silicon wafer, so that the complete single pn junction after diffusion becomes two small pn junctions;
(4)刻蚀:将激光去结后的P型单晶硅片置于链式清洗槽中进行刻蚀,去除扩散过程中形成的边结和背结以及表面的PSG;(4) Etching: place the P-type single crystal silicon wafer after laser dejunction in a chain cleaning tank for etching to remove the edge junction and back junction formed during the diffusion process and the PSG on the surface;
(5)PECVD镀膜:将刻蚀完的硅片置于板式炉中进行镀膜,对具有pn结的一面进行镀膜,形成钝化膜1;(5) PECVD coating: place the etched silicon wafer in a plate furnace for coating, and coat the side with the pn junction to form a passivation film 1;
(6)金属化:正面电极网版图形按图3设计,背面电极网板图形按图4设计。经丝网印刷和高温烧结后便形成二分之一片切片电池,电池结构的剖面如图2所示。(6) Metallization: The front electrode screen pattern is designed according to Figure 3, and the back electrode screen pattern is designed according to Figure 4. After screen printing and high-temperature sintering, a half sliced battery is formed, and the section of the battery structure is shown in Figure 2.
实施例5:Example 5:
(1)制绒:将M2尺寸P型单晶硅片置于氢氧化钾碱液中进行各向异性腐蚀,形成金字塔陷光结构;(1) Texturing: Put the M2 size P-type single crystal silicon wafer in potassium hydroxide alkali solution for anisotropic etching to form a pyramidal light-trapping structure;
(2)离子注入:将制绒后的P型单晶硅片置于离子注入机中进行离子注入,离子注入时,P型单晶硅片中间用一块宽约4毫米的石墨板进行遮挡,注入完成后,将形成从P型单晶硅片中间分开的两个独立的pn结,如图2所示;(2) Ion implantation: Place the P-type monocrystalline silicon wafer after texturing in an ion implanter for ion implantation. During ion implantation, a graphite plate with a width of about 4 mm is used to block the middle of the P-type monocrystalline silicon wafer. After the implantation is completed, two independent pn junctions separated from the middle of the P-type single crystal silicon wafer will be formed, as shown in Figure 2;
(3)刻蚀:将清洗干净的扩散后P型单晶硅片置于链式清洗槽中进行刻蚀,去除扩散过程中形成的边结和背结以及表面的PSG;(3) Etching: place the cleaned and diffused P-type single crystal silicon wafer in a chain cleaning tank for etching to remove the side junctions and back junctions formed during the diffusion process and the PSG on the surface;
(4)PECVD镀膜:将刻蚀完的硅片置于管式炉中进行镀膜,对具有pn结的一面进行镀膜,形成钝化膜1;(4) PECVD coating: place the etched silicon wafer in a tube furnace for coating, and coat the side with the pn junction to form a passivation film 1;
(5)金属化:正面电极网版图形按图3设计,背面电极网板图形按图4设计。经丝网印刷和高温烧结后便形成二分之一片切片电池,电池结构的剖面如图2所示。(5) Metallization: The front electrode screen pattern is designed according to Figure 3, and the back electrode screen pattern is designed according to Figure 4. After screen printing and high-temperature sintering, a half sliced battery is formed, and the section of the battery structure is shown in Figure 2.
实施例6:Embodiment 6:
(1)制绒:将M2尺寸P型单晶硅片置于氢氧化钠碱液中进行各向异性腐蚀,形成金字塔陷光结构;(1) Texturing: Put M2 size P-type monocrystalline silicon wafers in sodium hydroxide lye for anisotropic etching to form a pyramidal light-trapping structure;
(2)离子注入:将制绒后的P型单晶硅片置于离子注入机中进行离子注入,离子注入时,P型单晶硅片中间用一块宽约4毫米的石墨板进行遮挡,注入完成后,将形成从P型单晶硅片中间分开的两个独立的pn结,如图2所示;(2) Ion implantation: Place the P-type monocrystalline silicon wafer after texturing in an ion implanter for ion implantation. During ion implantation, a graphite plate with a width of about 4 mm is used to block the middle of the P-type monocrystalline silicon wafer. After the implantation is completed, two independent pn junctions separated from the middle of the P-type single crystal silicon wafer will be formed, as shown in Figure 2;
(3)刻蚀:将清洗干净的扩散后P型单晶硅片置于链式清洗槽中进行刻蚀,去除扩散过程中形成的边结和背结以及表面的PSG;(3) Etching: place the cleaned and diffused P-type single crystal silicon wafer in a chain cleaning tank for etching to remove the side junctions and back junctions formed during the diffusion process and the PSG on the surface;
(4)PECVD镀膜:将刻蚀完的硅片置于板式炉中进行镀膜,对具有pn结的一面进行镀膜,形成钝化膜1;(4) PECVD coating: place the etched silicon wafer in a plate furnace for coating, and coat the side with the pn junction to form a passivation film 1;
(5)金属化:正面电极网版图形按图5设计,背面电极网板图形按图6设计。经丝网印刷和高温烧结后便形成二分之一片切片电池,电池结构的剖面如图2所示。(5) Metallization: The screen pattern of the front electrode is designed according to Figure 5, and the screen pattern of the back electrode is designed according to Figure 6. After screen printing and high-temperature sintering, a half sliced battery is formed, and the section of the battery structure is shown in Figure 2.
实施例7:Embodiment 7:
(1)制绒:将M2尺寸P型单晶硅片置于氢氧化钾碱液中进行各向异性腐蚀,形成金字塔陷光结构;(1) Texturing: Put the M2 size P-type single crystal silicon wafer in potassium hydroxide alkali solution for anisotropic etching to form a pyramidal light-trapping structure;
(2)离子注入:将制绒后的P型单晶硅片置于离子注入机中进行离子注入,离子注入时,如图8所示,在P型单晶硅片表面用石墨板作为掩膜层,注入完成后,将形成以掩膜层为分界线的5个独立的pn结,如图7所示;(2) Ion implantation: Place the P-type monocrystalline silicon wafer after texturing in an ion implanter for ion implantation. During ion implantation, as shown in Figure 8, a graphite plate is used as a mask on the surface of the P-type monocrystalline silicon wafer. The film layer, after the injection is completed, will form 5 independent pn junctions with the mask layer as the dividing line, as shown in Figure 7;
(3)刻蚀:将清洗干净的扩散后P型单晶硅片置于链式清洗槽中进行刻蚀,去除扩散过程中形成的边结和背结以及表面的PSG;(3) Etching: place the cleaned and diffused P-type single crystal silicon wafer in a chain cleaning tank for etching to remove the side junctions and back junctions formed during the diffusion process and the PSG on the surface;
(4)PECVD镀膜:将刻蚀完的硅片置于管式炉中进行镀膜,对具有pn结的一面进行镀膜,形成钝化膜1;(4) PECVD coating: place the etched silicon wafer in a tube furnace for coating, and coat the side with the pn junction to form a passivation film 1;
(5)金属化:电极版图采用5根主栅设计。与实施例1~实施例6类似,在pn结断开处,无正面电极以及背面铝浆覆盖。最后经丝网印刷和高温烧结后便形成五分之一片切片电池,电池结构的剖面如图7所示。(5) Metallization: The electrode layout adopts 5 busbar designs. Similar to Embodiment 1 to Embodiment 6, where the pn junction is disconnected, there is no front electrode and back aluminum paste covering. Finally, one-fifth sliced battery is formed after screen printing and high-temperature sintering, and the section of the battery structure is shown in Figure 7 .
实施例8:Embodiment 8:
(1)制绒:将M2尺寸P型单晶硅片置于氢氧化钠碱液中进行各向异性腐蚀,形成金字塔陷光结构;(1) Texturing: Put M2 size P-type monocrystalline silicon wafers in sodium hydroxide lye for anisotropic etching to form a pyramidal light-trapping structure;
(2)离子注入:将制绒后的P型单晶硅片置于离子注入机中进行离子注入,离子注入时,如图8所示,在P型单晶硅片表面用石墨板作为掩膜层,注入完成后,将形成以掩膜层为分界线的5个独立的pn结,如图7所示;(2) Ion implantation: Place the P-type monocrystalline silicon wafer after texturing in an ion implanter for ion implantation. During ion implantation, as shown in Figure 8, a graphite plate is used as a mask on the surface of the P-type monocrystalline silicon wafer. The film layer, after the injection is completed, will form 5 independent pn junctions with the mask layer as the dividing line, as shown in Figure 7;
(3)刻蚀:将清洗干净的扩散后硅片置于链式清洗槽中进行刻蚀,去除扩散过程中形成的边结和背结以及表面的PSG;(3) Etching: place the cleaned and diffused silicon wafer in a chain cleaning tank for etching to remove the side junctions and back junctions formed during the diffusion process and the PSG on the surface;
(4)PECVD镀膜:将刻蚀完的硅片置于板式炉中进行镀膜,对具有pn结的一面进行镀膜,形成钝化膜1;(4) PECVD coating: place the etched silicon wafer in a plate furnace for coating, and coat the side with the pn junction to form a passivation film 1;
(5)金属化:电极版图采用5根主栅设计。与实施例1~实施例6类似,在pn结断开处,无正面电极以及背面铝浆覆盖。最后经丝网印刷和高温烧结后便形成五分之一片切片电池,电池结构的剖面如图7所示。(5) Metallization: The electrode layout adopts 5 busbar designs. Similar to Embodiment 1 to Embodiment 6, where the pn junction is disconnected, there is no front electrode and back aluminum paste covering. Finally, one-fifth sliced battery is formed after screen printing and high-temperature sintering, and the section of the battery structure is shown in Figure 7 .
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