CN108831956B - Flexible solar cell copper indium gallium selenide manufacturing equipment - Google Patents

Abstract

The invention discloses a flexible solar cell copper indium gallium selenide manufacturing equipment. This flexible solar cell copper indium gallium selenide manufacturing equipment monitors the mechanical drive in real time, roll-to-roll speed and tension are automatically corrected, the linear source heating unit is protected separately, the heating temperature is monitored online, and controlled in real time. It can also use diffusion pumps and mechanical pump sets. Vacuuming is carried out step by step to ensure the stability of the process environment.

Description

Flexible solar cell copper indium gallium selenide manufacturing equipment

Technical field

The invention relates to the technical field of solar cells, and in particular to a flexible solar cell copper indium gallium selenide manufacturing equipment.

Background technique

With global climate warming, ecological environment deterioration and conventional energy shortages, solar energy has become an important strategic decision for the sustainable development of various countries. Solar cells are devices that convert solar energy into electrical energy. They have energy that exceeds electricity, wind energy and other resources, and are expected to become an important pillar of the future power industry. Solar cells are mainly divided into silicon solar cells, compound semiconductor thin film cells, organic polymer cells, organic thin film cells, etc. Among them, copper indium gallium selenide (CIGS) thin film solar cells are semiconductor thin film cells. Since copper indium gallium selenide has a direct band gap structure and a high absorption coefficient, the film layer only needs to reach the micron level to have a full absorption capacity greater than that of copper. Indium gallium selenide thin film has a band width of incident light, so copper indium gallium selenide thin film solar cells can save a lot of raw materials, and are relatively less affected by rising prices of rare elements and shortages of raw materials. They have strong light absorption capabilities, good discharge stability, It has the advantages of high conversion efficiency, so it has broad market prospects.

The existing technology for manufacturing copper indium gallium selenide thin films on flexible solar cells is based on high-temperature roll-to-roll co-evaporation. When using the three-step co-evaporation method, it is impossible to partition the linear source and monitor it in real time, and cannot guarantee transmission at high temperatures. Stability, real-time monitoring and automatic correction of tension and transmission are not possible. The linear arrangement of each individual source does not have partition protection and online monitoring. When using co-evaporation, the vacuum of the entire environment cannot be guaranteed while the cavity is filled with metal vapor.

Contents of the invention

In order to solve the above technical problems, the present invention designs a flexible solar cell copper indium gallium selenide manufacturing equipment.

The present invention adopts the following technical solutions:

A flexible solar cell copper indium gallium selenide manufacturing equipment, including a cavity and a control unit. The control unit is connected to the control center. The cavity includes an upper cavity and a lower cavity. The upper cavity and the lower cavity are pressed and sealed, and are provided in the cavity. There is a mechanical transmission unit, a vacuum unit, a heating unit, a cooling unit and a film deposition source unit. The mechanical transmission unit includes an unwinding roller, a rewinding roller and several transmission rollers. The upper cavity is rotatably connected to the unwinding roller, the rewinding roller and several transmission rollers. The ends of the unwinding roller and the rewinding roller are fixedly connected to the servo motor. Several transmission rollers between the unwinding roller and the rewinding roller are connected to form a conveying channel. The thin film deposition source unit includes a linear source box and an XRF detection device, and the corresponding conveying channel is in the lower cavity. Multiple linear source boxes are provided respectively, and XRF detection devices are respectively provided at the middle position and end of the conveying channel. The heating unit includes a heater and a temperature sensor. A temperature sensor is provided at a position corresponding to the linear source box on the conveying channel. Each The upper end of the linear source box is open. A linear source is installed in each linear source box. A heater is installed at the bottom of each linear source. The control unit is connected to the servo motor, XRF detection device, temperature sensor, heater, vacuum unit and cooling unit through wires. .

Preferably, the vacuum system includes a diffusion pump and a mechanical pump set, and the diffusion pump and mechanical pump set are connected to the control unit through wires.

Preferably, a high-pressure valve is provided between the diffusion pump and the cavity.

Preferably, a mechanically driven detector is provided at the end of the conveying channel. The mechanically driven detector includes a semicircular fixed block fixedly installed at the end of the transmission roller, a probe, a signal transmitter and a signal receiver. The probe is fixed Connect the high-frequency power supply, the end of the probe is connected to the semicircular fixed block, the signal receiver is connected to the semicircular fixed block, and the signal receiver is connected to the control unit through wires. As the transmission roller rotates, the probe intermittently contacts the semicircular fixed block, and the control unit monitors whether the driven transmission roller rotates at a normal frequency through the signal frequency received by the signal receiver.

Preferably, an ion gauge is provided at each linear source box in the cavity, and the ion gauge is connected to the control unit through wires.

Preferably, a speed sensor and a tension sensor are provided at the front end of the conveying channel, and the speed sensor and the tension sensor are connected to the control unit through wires. Through the data monitoring of the speed sensor and tension sensor, the control unit feedbacks and adjusts the rotation speed of the unwinding roller and rewinding roller private motor, thereby automatically correcting and adjusting the tension.

Preferably, the cooling unit includes a cooling water filtering device. The cooling water filtering device is installed at the vacuum ports on both sides of the cavity to condense and filter Se vapor.

Preferably, a heating plate is provided in the conveying channel located on the back side of the solar panel base, and the heating plate keeps the reaction temperature at the solar panel base uniform.

Compared with the existing technology, the beneficial effects of this flexible solar cell copper indium gallium selenide manufacturing equipment are:

1. While the servo motor controls the mechanical transmission of the motor, it uses speed sensors and tension sensors to provide online monitoring and real-time feedback on speed and tension. It uses a double closed-loop control system to adjust roll-to-roll tension and speed in real time, increasing the accuracy of servo control. stability;

2. Added a mechanical driven detector, real-time mechanical driven online monitoring, using changes in high and low levels to detect the continuity of the transmission, achieving diversified monitoring of the closed environment, and monitoring roll-to-roll tension and deviation. It can automatically correct and achieve the stability of the entire high-temperature mechanical transmission;

3. During co-evaporation, the linear arrangement of the copper, indium, gallium and selenide metal sources is improved. The linear source heating units are separately protected and heated separately, so that the sources can fully reflect each other without interfering with each other, and promote the growth of crystal grains. A thin film layer with large and dense grain size was obtained;

4. When the metal source is heated, the heating feedback is monitored online through the temperature sensor and controlled in real time. While XRF detects the thickness of each source, it will also be fed back to the computer through the control unit. After the computer calculates, it will be set according to the process. Calculation and PID adjustment of various feedback data to achieve automatic control of the thickness and temperature of the metal source;

5. In the entire vacuum system, the equipment is evacuated step by step. When it is in a high vacuum state, the vacuum degree of each zone is monitored. Use the ion gauge and its control unit to monitor the Se vapor pressure and vacuum of each zone. Monitor the temperature and feed it back to the computer. Use PID to adjust the vapor pressure of each zone to the set value, ensuring a sufficient selenization reaction environment for the metal source in each zone;

6. In the entire operation interface control, only one computer can control each system of the entire equipment, which facilitates operation, and each operation is interlocked and protected. The corresponding operation can only be started when the opening conditions are met, which is beneficial to the entire equipment. The equipment is operationally protected to avoid losses caused by misoperation.

Description of drawings

Figure 1 is a schematic structural diagram of the present invention;

In the picture: 1. Upper cavity, 2. Lower cavity, 3. Unwinding roller, 4. Rewinding roller, 5. Transmission roller, 6. Flexible solar cell roll, 7. Linear source box, 8. XRF detection device , 9. Temperature sensor, 10. High-pressure valve, 11. Diffusion pump, 12. Mechanical pump set.

Implementation

The technical solution of the present invention will be further described in detail below through specific examples and in conjunction with the accompanying drawings:

Embodiment: As shown in Figure 1, a flexible solar cell copper indium gallium selenide manufacturing equipment includes a cavity and a control unit. The control unit is connected to the control center. The cavity includes an upper cavity 1 and a lower cavity 2. The upper cavity The body and the lower cavity are pressed and sealed. The cavity is equipped with a mechanical transmission unit, a vacuum unit, a heating unit, a cooling unit and a film deposition source unit. The mechanical transmission unit includes an unwinding roller 3, a rewinding roller 4 and several transmission rollers 5. The upper chamber is rotatably connected to the unwinding roller, the rewinding roller and several transmission rollers. The ends of the unwinding roller and the rewinding roller are fixedly connected to the servo motor. Several transmission rollers between the unwinding roller and the rewinding roller are connected to form a conveying channel. The film deposition source unit It includes a linear source box 7 and an XRF detection device 8. A plurality of linear source boxes are provided in the lower cavity corresponding to the conveying channel. XRF detecting devices are respectively provided in the middle and end of the conveying channel. The heating unit includes a heater and a temperature sensor 9. , there are temperature sensors located at corresponding positions of the linear source boxes on the conveying channel. The upper end of each linear source box is open. There is a linear source in each linear source box. There is a heater at the bottom of each linear source. The control unit is connected through wires. Servo motor, XRF detection device, temperature sensor, heater, vacuum unit and cooling unit. The vacuum system includes a diffusion pump 11 and a mechanical pump group 12. The diffusion pump and mechanical pump group are connected to the control unit through wires, and are set between the diffusion pump and the cavity. There is a high-pressure valve 10, and a mechanically driven detector is provided at the end of the conveying channel. The mechanically driven detector includes a semicircular fixed block fixedly installed at the end of the transmission roller, a probe, a signal transmitter and a signal receiver. The probe is fixed Connect the high-frequency power supply, the end of the probe is connected to the semicircular fixed block, the signal receiver is connected to the semicircular fixed block, and the signal receiver is connected to the control unit through wires. As the transmission roller rotates, the probe intermittently contacts the semicircular fixed block. The control unit uses the signal frequency received by the signal receiver to monitor whether the driven transmission roller rotates at a normal frequency. Each linear source box in the cavity is equipped with an ion The gauge and ion gauge are connected to the control unit through wires. A speed sensor and a tension sensor are provided at the front end of the conveying channel. The speed sensor and tension sensor are connected to the control unit through wires. Through the data monitoring of the speed sensor and tension sensor, the control unit feedbacks and adjusts the rotation speed of the unwinding roller and the rewinding roller private motor, thereby automatically correcting and adjusting the tension. The cooling unit includes a cooling water filtering device, which is installed on both sides of the cavity. At the vacuum port, the filtered Se vapor is condensed.

When the flexible solar cell copper indium gallium selenide manufacturing equipment is used, the flexible solar cell roll 6 is put into the unwinding roller for unwinding, transported along the transmission roller, and finally enters the winding roller for winding. During the transportation process, the flexible solar cell roll 6 The linear source of each linear source box is heated and coated accordingly, and the temperature is sensed to the control unit through a temperature sensor. The XRF detection device detects the thickness of the linear source film. If the detected thickness is too large, the control unit adjusts the thickness of the corresponding linear source box at the bottom. heater to lower the heating temperature. If the detected thickness is not enough, the control unit correspondingly adjusts the heater at the bottom of the corresponding linear source box to increase the heating temperature until the required coating thickness is reached.

This flexible solar cell copper indium gallium selenide manufacturing equipment monitors the mechanical drive in real time, automatically corrects the roll-to-roll speed and tension, separates the linear source heating unit for protection, and online monitors the heating temperature for real-time control. It can also use diffusion pumps and mechanical pumps. The group evacuates step by step to ensure the stability of the process environment.

The above-described embodiment is only a preferred solution of the present invention and does not limit the present invention in any form. There are other variations and modifications without exceeding the technical solution described in the claims.

Claims (4)

1. The flexible solar cell copper indium gallium diselenide manufacturing equipment comprises a cavity and a control unit, wherein the control unit is connected with a control center, the cavity comprises an upper cavity and a lower cavity, the upper cavity and the lower cavity are in pressing sealing, and the flexible solar cell copper indium gallium diselenide manufacturing equipment is characterized in that a mechanical transmission unit, a vacuum unit, a heating unit, a cooling unit and a film deposition source unit are arranged in the cavity;

when the metal source is heated, the temperature sensor performs on-line monitoring and real-time control on temperature feedback, and when XRF detects the thickness of each source, the temperature sensor also feeds back to a computer through a control unit, and after the computer performs calculation, each feedback data is calculated and PID regulated according to a process set value, so that the automatic control of the thickness and the temperature of the metal source is realized;

an ion gauge is arranged at each linear source box in the cavity and is communicated with the control unit through a lead, the Se vapor pressure and the vacuum degree of each zone are monitored by using the ion gauge and the control unit thereof and fed back to a computer, and the vapor pressure of each zone is regulated to be at a set value by using PID, so that the full selenizing reaction environment of the metal source of each zone is ensured;

the vacuum unit comprises a diffusion pump and a mechanical pump group, a vacuumizing port is arranged in the cavity, the diffusion pump and the mechanical pump group are communicated with the vacuumizing port, the diffusion pump and the mechanical pump group are communicated with the control unit through wires, equipment is vacuumized step by step in the whole vacuum unit, and the vacuum degree of each area is monitored when the equipment is in a high vacuum state;

the tail end of the conveying channel is provided with a mechanically driven detector, the mechanically driven detector comprises a semicircular fixed block, a probe, a signal transmitter and a signal receiver, the tail end of the driving roller is fixedly arranged, the probe is fixedly communicated with a high-frequency power supply, the tail end of the probe is overlapped with the semicircular fixed block, the signal receiver is communicated with a control unit through a wire, the mechanically driven detector is added, the mechanically driven detector is monitored on line in real time, the continuity of transmission is detected by utilizing the change of high and low levels, the diversified monitoring of the closed environment is realized, the tension and correction of the coil-to-coil can be automatically corrected, and the stability of the whole high-temperature mechanical transmission is realized;

the front end of the conveying channel is provided with a speed sensor and a tension sensor, the speed sensor and the tension sensor are communicated with a control unit through wires, the speed sensor and the tension sensor are utilized to perform online monitoring and real-time feedback on the speed and the tension, a double closed-loop control system is used for adjusting the reel-to-reel tension and the speed in real time, and the control stability of a server is improved.

2. The flexible solar cell copper indium gallium diselenide manufacturing equipment according to claim 1, wherein a high-pressure valve is arranged between the diffusion pump and the cavity.

3. The flexible solar cell copper indium gallium diselenide manufacturing equipment according to claim 1, wherein the cooling unit comprises a cooling water filtering device, the cooling water filtering device is arranged at two vacuumizing ports in the cavity, and Se vapor is condensed and filtered.

4. The flexible solar cell copper indium gallium diselenide manufacturing equipment according to claim 1, wherein a heating plate is arranged in a conveying channel positioned on the back surface of the solar cell panel substrate, and the heating plate keeps the reaction temperature at the position of the solar cell panel substrate uniform.