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CN108646325A - A kind of adjustable graphene wide angle Terahertz wave absorbing device of frequency - Google Patents

A kind of adjustable graphene wide angle Terahertz wave absorbing device of frequency Download PDF

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CN108646325A
CN108646325A CN201810425436.3A CN201810425436A CN108646325A CN 108646325 A CN108646325 A CN 108646325A CN 201810425436 A CN201810425436 A CN 201810425436A CN 108646325 A CN108646325 A CN 108646325A
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graphene
frequency
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CN108646325B (en
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叶龙芳
曾芳
刘颜回
张淼
柳清伙
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Xiamen University
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    • G02B5/003Light absorbing elements

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Abstract

一种频率可调的石墨烯宽角度太赫兹吸波器,涉及太赫兹吸波。是一种5层结构器件,从上至下依次为:上石墨烯条带层、上介质层、下石墨烯条带层、下介质层和金属衬底层;在xoy平面内具有周期性,所述上石墨烯条带层由矩形带状石墨烯组成;上介质层由低介电常数材料构成,下石墨烯条带层由矩形条带状石墨烯组成;下介质层由低介电常数材料构成;金属衬底层的厚度大于入射波的趋肤深度;所述下石墨烯条带层与上石墨烯条带层相互垂直放置并由上介质层隔离。

A frequency-tunable graphene wide-angle terahertz absorber relates to terahertz absorbing. It is a 5-layer structure device, from top to bottom: upper graphene strip layer, upper dielectric layer, lower graphene strip layer, lower dielectric layer and metal substrate layer; it is periodic in the xoy plane, so The upper graphene strip layer is composed of rectangular strip graphene; the upper dielectric layer is composed of low dielectric constant material, and the lower graphene strip layer is composed of rectangular strip graphene; the lower dielectric layer is composed of low dielectric constant material Composition; the thickness of the metal substrate layer is greater than the skin depth of the incident wave; the lower graphene strip layer and the upper graphene strip layer are vertically placed and separated by the upper dielectric layer.

Description

一种频率可调的石墨烯宽角度太赫兹吸波器A frequency-tunable graphene wide-angle terahertz absorber

技术领域technical field

本发明涉及太赫兹吸波,尤其是涉及一种频率可调的石墨烯宽角度太赫兹吸波器。The invention relates to terahertz absorbers, in particular to a graphene wide-angle terahertz absorber with adjustable frequency.

背景技术Background technique

太赫兹波一般是指频率在0.1~10THz的电磁波,对应的波长范围为3~0.03mm[1-2],在宽带通信、频谱分析、探测传感、生物医学、安检成像等众多领域都具有广阔的应用前景。自从2008年Landy等人提出了一种完美的超材料吸波器(Phys.Rev.Lett.,vol.100,pp.207402,2008)之后,对太赫兹超材料吸波器研究引起了人们的极大关注。亚波长金属微结构阵列层-介质层-金属层三明治状结构是超材料吸波器的一类典型结构,能够通过抑制透射和反射通道,利用亚波长金属阵列层结构、金属层的欧姆损耗以及介质吸收实现对入射电磁波的完美吸收。然而这类吸波器由于采用常规的金属和介质材料,在通常情况下,只能通过改变几何结构尺寸的方式才能实现对这类超材料吸波器吸波频率的调节,一旦器件制备完成、结构尺寸确定,其吸收特性便不具有可调性。因此,为了能够在不改变几何结构的同时实现对太赫兹吸收频率的调节,深入开展带有电磁参数可调材料的新型吸波器研究工作,已成为太赫兹吸波器领域的一个重要研究方向。Terahertz waves generally refer to electromagnetic waves with a frequency of 0.1-10THz, and the corresponding wavelength range is 3-0.03mm[1-2]. Broad application prospects. Since Landy et al. proposed a perfect metamaterial absorber in 2008 (Phys.Rev.Lett., vol.100, pp.207402, 2008), the research on terahertz metamaterial absorber has attracted people's attention. great concern. The sub-wavelength metal microstructure array layer-dielectric layer-metal layer sandwich structure is a typical structure of metamaterial absorbers, which can suppress the transmission and reflection channels by utilizing the subwavelength metal array layer structure, the ohmic loss of the metal layer and the Dielectric absorption achieves perfect absorption of incident electromagnetic waves. However, due to the use of conventional metal and dielectric materials for this type of absorber, the adjustment of the absorbing frequency of this type of metamaterial absorber can only be realized by changing the geometric structure size under normal circumstances. Once the device is prepared, The structure size is fixed, and its absorption characteristics are not adjustable. Therefore, in order to realize the adjustment of the terahertz absorption frequency without changing the geometric structure, it has become an important research direction in the field of terahertz absorbers to conduct in-depth research on new absorbers with materials with adjustable electromagnetic parameters. .

石墨烯是一种蜂窝状二维碳原子材料,由于其特殊的电子能带结构,石墨烯表现出独特的电学可调性、低本征损耗和高度光场局域等优异的性能特性,受到广泛关注。特别是,由于能够支持在太赫兹、红外及可见等波段的表面等离子体激元(SPPs)传输,石墨烯已成为一种性能优良的电磁薄膜材料广泛应用于各类表面等离激元器件。基于石墨烯材料新型超材料吸波器,不仅可以实现极高的吸收率,还可通过外部偏置电压实现对石墨烯电导率的调节,进而实现对其吸波特性的调节。目前,人们已经提出了多种形式的石墨烯的吸收器,例如,Ning Renxia等人提出了一种基于双曲线图形石墨烯超材料的宽带吸收器,其吸收率为70%的相对吸收带宽为45%(Eur.Phys.J.Appl.Phys.,68(2):20401,2014);YayingNing等人提出了基于石墨烯-金属纳米结构可调吸波器吸波器的频率当石墨烯化学势从0.2eV变化到0.8eV时,吸波器对中心吸收频率将由30.1THz增加到32.2THz,相对于最低吸波频率分数调频范围仅为6.97%,且其入射波角度不依赖的范围仅为-12°到12°(OpticsExpress,25(26),2017)。然而,现在的许多石墨烯吸波器依然存在器件结构复杂、角度依赖、对入射波的吸波频率和吸收率调节调节范围小等问题。鉴于频率可调的宽角度太赫兹吸波器在探测器、传感器、传感器、电磁波探测及调控、隐身等领域等具有重要的应用前景,因此,研究具有结构简单、吸波频率可大范围调节的的石墨烯宽角度太赫兹吸波器具有重要意义。Graphene is a honeycomb two-dimensional carbon atom material. Due to its special electronic band structure, graphene exhibits excellent performance characteristics such as unique electrical tunability, low intrinsic loss, and high optical field localization. extensive attention. In particular, graphene has become an electromagnetic film material with excellent performance and is widely used in various surface plasmon devices due to its ability to support surface plasmon polaritons (SPPs) transmission in terahertz, infrared and visible bands. The new metamaterial absorber based on graphene material can not only achieve extremely high absorption rate, but also adjust the conductivity of graphene through external bias voltage, and then realize the adjustment of its absorbing characteristics. At present, people have proposed various forms of graphene absorbers. For example, Ning Renxia et al. proposed a broadband absorber based on hyperbolic graphene metamaterials, and its absorption rate is 70%. The relative absorption bandwidth is 45% (Eur.Phys.J.Appl.Phys.,68(2):20401,2014); YayingNing et al proposed a graphene-based metal nanostructure tunable absorber when the frequency of the absorber is graphene chemistry When the potential changes from 0.2eV to 0.8eV, the central absorption frequency of the absorber will increase from 30.1THz to 32.2THz, and the fractional frequency modulation range relative to the lowest absorption frequency is only 6.97%, and the incident wave angle-independent range is only -12° to 12° (Optics Express, 25(26), 2017). However, many current graphene absorbers still have problems such as complex device structure, angle dependence, and small adjustment range of absorbing frequency and absorption rate for incident waves. In view of the fact that frequency-tunable wide-angle terahertz absorbers have important application prospects in the fields of detectors, sensors, sensors, electromagnetic wave detection and control, and stealth, the research has the advantages of simple structure and wide-range adjustable absorbing frequency The graphene wide-angle terahertz absorber is of great significance.

发明内容Contents of the invention

本发明的目的在于为了解决现有技术中石墨烯吸波器的吸波率频率和角度调节范围较小的问题,提供可实现对宽角度入射太赫兹波的吸收频率进行大范围调节的一种频率可调的石墨烯宽角度太赫兹吸波器。The purpose of the present invention is to solve the problem of the graphene wave absorber in the prior art that the frequency and angle adjustment range of the absorption rate is small, and to provide a large-scale adjustment of the absorption frequency of the wide-angle incident terahertz wave Frequency-tunable graphene wide-angle terahertz absorber.

本发明是一种5层结构器件,从上至下依次为:上石墨烯条带层、上介质层、下石墨烯条带层、下介质层和金属衬底层;在xoy平面内具有周期性,所述上石墨烯条带层由矩形带状石墨烯组成;上介质层由低介电常数材料构成,下石墨烯条带层由矩形条带状石墨烯组成;下介质层由低介电常数材料构成;金属衬底层的厚度大于入射波的趋肤深度;所述下石墨烯条带层与上石墨烯条带层相互垂直放置并由上介质层隔离。The present invention is a device with a 5-layer structure. From top to bottom, it is: upper graphene strip layer, upper dielectric layer, lower graphene strip layer, lower dielectric layer and metal substrate layer; it has periodicity in the xoy plane , the upper graphene strip layer is composed of rectangular strip graphene; the upper dielectric layer is composed of low dielectric constant material, and the lower graphene strip layer is composed of rectangular strip graphene; the lower dielectric layer is composed of low dielectric constant Composed of constant materials; the thickness of the metal substrate layer is greater than the skin depth of the incident wave; the lower graphene strip layer and the upper graphene strip layer are vertically placed and separated by the upper dielectric layer.

所述在xoy平面内具有周期性的单元结构在x和y方向上的周期长度分别为Lx=Ly=4μm;所述上石墨烯条带层由宽度为Wu=0.9μm,长度为Lx=4μm的矩形带状石墨烯组成;上介质层的厚度为h1=1μm的低介电常数材料构成,下石墨烯条带层由宽度为Wd=0.9μm,长度为Ly=4μm的矩形条带状石墨烯组成;下介质层的厚度为h2=4μm的低介电常数材料构成;金属衬底层的厚度为h3=1μm大于入射波的趋肤深度。The period lengths of the periodic unit structure in the xoy plane in the x and y directions are L x =L y =4 μm respectively; the upper graphene strip layer has a width of W u =0.9 μm and a length of L x = 4 μm rectangular ribbon-shaped graphene; the upper dielectric layer is made of low dielectric constant material with a thickness of h 1 = 1 μm, and the lower graphene strip layer is composed of a width of W d = 0.9 μm and a length of L y = 4μm rectangular striped graphene; the thickness of the lower dielectric layer is h 2 =4μm low dielectric constant material; the thickness of the metal substrate layer is h 3 =1μm greater than the skin depth of the incident wave.

所述低介电常数材料可为Sio2、Topas、Zro2等中的一种;所述金属衬底层可采用金或银等良导体材料。The low dielectric constant material can be one of Sio 2 , Topas, Zro 2 , etc.; the metal substrate layer can be made of good conductor materials such as gold or silver.

本发明的工作原理如下:The working principle of the present invention is as follows:

本发明为一种周期性石墨烯条带层-介质层-石墨烯条带层-介质层-金属层5层结构器件,设计结构中的厚金属层对电磁波入射相当于镜面反射抑制电磁波的透射,同时通过合理设计上下石墨烯层、上下介质层的结构尺寸能够有效抑制电磁波反射,通过上下石墨烯层同时激励起相互耦合的太赫兹局域表面等离激元谐振的方式,实现对入射太赫兹波的完美吸收;利用石墨烯的电可调性,通过调节石墨烯层的化学势改变石墨烯表面等激元的束缚性能,从而实现对入射太赫兹波中心频率的太范围调节。The invention is a periodic graphene strip layer-dielectric layer-graphene strip layer-dielectric layer-metal layer 5-layer structure device, the thick metal layer in the design structure is equivalent to mirror reflection to suppress the transmission of electromagnetic waves when electromagnetic waves are incident At the same time, by rationally designing the structural dimensions of the upper and lower graphene layers and the upper and lower dielectric layers, the electromagnetic wave reflection can be effectively suppressed, and the mutually coupled terahertz localized surface plasmon resonance can be excited by the upper and lower graphene layers at the same time. Perfect absorption of Hertzian waves; using the electrical tunability of graphene, the binding properties of excitons such as the graphene surface can be changed by adjusting the chemical potential of the graphene layer, so as to achieve a wide range of adjustment of the center frequency of the incident terahertz wave.

本发明的有益效果是:The beneficial effects of the present invention are:

1)本发明具有周期性石墨烯条带层结构,可以激发局部表面等离激元,对窄带入射太赫兹波具有极高吸收率,合理设置参数本发明可实现100%的完美吸收。1) The present invention has a periodic graphene strip layer structure, can excite local surface plasmons, and has a very high absorption rate for narrow-band incident terahertz waves, and the present invention can achieve 100% perfect absorption by setting parameters reasonably.

2)本发明具有对入射太赫兹波的吸收率具有角度不依赖的特性,当石墨烯化学势取0.5eV时,入射太赫兹波的角度在0°~85°范围内变化时,所述吸波器的吸收率均可保持在80%以上。2) The present invention has the characteristic that the absorption rate of the incident terahertz wave is angle-independent. When the chemical potential of graphene is 0.5eV, when the angle of the incident terahertz wave changes in the range of 0°~85°, the absorption The absorption rate of the wave filter can be kept above 80%.

3)本发明具有电可调性,通过改变上下石墨烯条带层的偏置电压能够实现对太赫兹波的吸收频率大范围调节,当石墨烯化学势从0.2eV变化到0.9eV时,吸波器对太赫兹波的中心吸收频率将由5.4THz增加到12THz,相对于最低频率的分数调频范围达122.2%。3) The present invention has electrical adjustability. By changing the bias voltage of the upper and lower graphene strip layers, the absorption frequency of the terahertz wave can be adjusted in a large range. When the graphene chemical potential changes from 0.2eV to 0.9eV, the absorption The central absorption frequency of the oscilloscope for terahertz waves will increase from 5.4THz to 12THz, and the fractional frequency modulation range relative to the lowest frequency will reach 122.2%.

4)本发明结构简单,易于施加偏置,可以通过尺度变换用于红外区域、可见光区域或其它频段的电磁波吸收。4) The present invention has a simple structure, is easy to apply a bias, and can be used for electromagnetic wave absorption in the infrared region, visible light region or other frequency bands through scale transformation.

附图说明Description of drawings

图1为本发明实施例的结构组成示意图。FIG. 1 is a schematic diagram of the structural composition of an embodiment of the present invention.

图2为本发明实施例的单元结构俯视图。Fig. 2 is a top view of the unit structure of the embodiment of the present invention.

图3为本发明实施例在0~85°不同入射角度的吸收曲线图。Fig. 3 is a diagram of absorption curves at different incident angles from 0° to 85° according to an embodiment of the present invention.

图4为本发明实施例在0.2~0.9eV等不同化学势下的吸收率曲线图。Fig. 4 is a curve diagram of the absorption rate of the embodiment of the present invention under different chemical potentials such as 0.2-0.9eV.

具体实施方式Detailed ways

下面结合附图和具体实例,进一步阐述说明本发明。The present invention will be further elaborated below in conjunction with the accompanying drawings and specific examples.

本发明的一个实施例如图1和2所示,一种频率可调的石墨烯宽角度太赫兹吸波器是一种五层结构器件,从上至下依次为:上石墨烯条带层1、上介质层2、下石墨烯条带层3、下介质层4、金属衬底层5构成;所述频率可调的石墨烯宽角度太赫兹吸波器在xoy平面内具有周期性的单元结构在x和y方向上的周期长度分别为Lx和Ly,其中:上石墨烯条带层1是由宽度为Wu,长度为Lx的矩形带状石墨烯组成;上介质层2为厚度为h1的低介电常数材料构成,如:Sio2、Topas、Zro2等;下石墨烯条带层3也是由宽度为Wd长度为Ly的矩形条带状石墨烯组成;下介质层4为厚度为h2的低介电常数材料构成,如:Sio2、Topas、Zro2等;金属衬底层5的材料为金或银等良导体材料,其厚度为h3大于入射波的趋肤深度;所述一种频率可调的石墨烯的宽角度太赫兹吸波器其结构特征在于吸波器的结构中石墨烯条带3与石墨烯条带1相互垂直放置,由上介质层2隔离。所述单元结构尺寸参数设置为:Lx=Ly=4μm,Wu=Wd=0.9μm,h1=1μm,h2=4μm,h3=1μm。由于所述吸波器的上下两层石墨烯条带层可以激励起相互耦合的太赫兹表面等离激元,可对较宽角度范围入射的窄带太赫兹波具有极高吸收率,当化学势取0.5eV时,电磁仿真得到本实施例对不同角度入射太赫兹波的吸收率曲线如图3所示,由此可见当入射TM极化的太赫兹波在角度在0°~85°范围内变化时,本实施例的吸收率均可保持在80%以上,具有良好的角度不依赖的吸收特性。通过改变加载在石墨烯层上的偏置电压的方式可以改变石墨烯的化学势,进而能够实现吸收率的调节,本实施例在不同化学势条件下对垂直入射太赫兹波的吸收率曲线如图4所示,由此可见,在化学势取0.3eV和0.5eV时,本实施例的吸收率均可达到100%,本实施例具有电可调性,当维持本实施例几何参数不变的前提下,石墨烯化学势从0.2eV变化到0.9eV时,本实施例对太赫兹波的中心吸收频率将由5.4THz增加到12THz,即相对于最低频率分数调频范围可达122.2%,是一种性能良好的中心频率可调的宽角度新型太赫兹吸波器。An embodiment of the present invention is shown in Figures 1 and 2. A frequency-tunable graphene wide-angle terahertz absorber is a five-layer structure device, from top to bottom: the upper graphene strip layer 1 , an upper dielectric layer 2, a lower graphene strip layer 3, a lower dielectric layer 4, and a metal substrate layer 5; the frequency-tunable graphene wide-angle terahertz absorber has a periodic unit structure in the xoy plane The period lengths in the x and y directions are L x and Ly y respectively, wherein: the upper graphene strip layer 1 is composed of rectangular ribbon graphene with a width of Wu u and a length of L x ; the upper dielectric layer 2 is Thickness h 1 low dielectric constant material, such as: Sio 2 , Topas, Zro 2 , etc.; the lower graphene strip layer 3 is also composed of rectangular strips of graphene with a width of W d and a length of Ly ; The dielectric layer 4 is made of a low dielectric constant material with a thickness of h2, such as: Sio2, Topas, Zro2 , etc.; the material of the metal substrate layer 5 is a good conductor material such as gold or silver, and its thickness is h3 greater than that of the incident wave skin depth; the structure of the wide-angle terahertz wave absorber of a frequency-tunable graphene is characterized in that the graphene strip 3 and the graphene strip 1 are placed perpendicularly to each other in the structure of the wave absorber. Dielectric layer 2 isolation. The size parameters of the unit structure are set as: L x =L y =4 μm, Wu u =W d =0.9 μm, h 1 =1 μm, h 2 =4 μm, h 3 =1 μm. Since the upper and lower graphene strip layers of the absorber can excite mutually coupled terahertz surface plasmons, it can have a very high absorption rate for narrow-band terahertz waves incident in a wide range of angles. When the chemical potential When 0.5eV is taken, the electromagnetic simulation obtained the absorption rate curves of this embodiment for different angles of incident terahertz waves, as shown in Figure 3. It can be seen that when the incident TM polarized terahertz waves have an angle in the range of 0° to 85° When changing, the absorption rate of this embodiment can be kept above 80%, and has good angle-independent absorption characteristics. The chemical potential of graphene can be changed by changing the bias voltage loaded on the graphene layer, and then the adjustment of the absorptivity can be realized. The absorptivity curves of this embodiment for vertically incident terahertz waves under different chemical potential conditions are as follows As shown in Figure 4, it can be seen that when the chemical potential is 0.3eV and 0.5eV, the absorption rate of this embodiment can reach 100%. This embodiment has electrical adjustability. When the geometric parameters of this embodiment are kept constant Under the premise that the chemical potential of graphene changes from 0.2eV to 0.9eV, the central absorption frequency of the terahertz wave in this embodiment will increase from 5.4THz to 12THz, that is, the range of fractional frequency modulation relative to the lowest frequency can reach 122.2%, which is a A novel wide-angle terahertz absorber with adjustable center frequency and good performance.

本发明是一种5层结构器件,从上至下依次为石墨烯条带层-介质层-石墨烯条带层-介质层-金属层,其中石墨烯条带层是由周期性矩形带状石墨烯组成,两层石墨烯条带层相互垂直放置,由介质层隔离。本发明能够实现对太赫兹波的强吸收且对太赫兹波具有角度不依赖的特性,入射角度增加到85°时,其吸收率仍可维持在80%以上,当石墨烯化学势从0.2eV增加到0.9eV,其吸波频率由5.4THz增加到12THz,对应的分数调频范围达122.2%。本发明可实现对太赫兹波的吸收率和中心频率大范围调节,是一种极有潜力的频率可调的新型宽角度太赫兹吸波器。The invention is a device with a 5-layer structure, which is graphene strip layer-dielectric layer-graphene strip layer-dielectric layer-metal layer from top to bottom, wherein the graphene strip layer is composed of periodic rectangular strips Composed of graphene, two layers of graphene strips are placed perpendicular to each other and separated by a dielectric layer. The invention can achieve strong absorption of terahertz waves and has angle-independent characteristics for terahertz waves. When the incident angle increases to 85°, its absorption rate can still be maintained above 80%. When the chemical potential of graphene changes from 0.2eV Increase to 0.9eV, its absorbing frequency increases from 5.4THz to 12THz, and the corresponding fractional frequency modulation range reaches 122.2%. The invention can realize the large-range adjustment of the absorption rate and center frequency of the terahertz wave, and is a novel wide-angle terahertz wave absorber with great potential for frequency adjustment.

Claims (9)

1. a kind of adjustable graphene wide angle Terahertz wave absorbing device of frequency, it is characterised in that be a kind of 5 layers of structure devices, from upper It is followed successively by under:Upper graphene strips belt, upper dielectric layer, lower graphene strips belt, lower dielectric layer and metallic substrate layer;In xoy Have in plane periodically, the upper graphene strips belt is made of rectangular strip shape graphene;Upper dielectric layer is by low-k Material is constituted, and lower graphene strips belt is made of the band-like graphene of rectangular strip;Lower dielectric layer is made of advanced low-k materials;Gold The thickness for belonging to substrate layer is more than the skin depth of incidence wave;The lower graphene strips belt is mutually perpendicular to upper graphene strips belt It places and is isolated by upper dielectric layer.
2. a kind of adjustable graphene wide angle Terahertz wave absorbing device of frequency as described in claim 1, it is characterised in that it is described It is respectively L to have the cycle length of periodic cellular construction in the x and y direction in xoy planesx=Ly=4 μm.
3. a kind of adjustable graphene wide angle Terahertz wave absorbing device of frequency as described in claim 1, it is characterised in that on described Graphene strips belt is W by widthu=0.9 μm, length Lx=4 μm of rectangular strip shape graphene composition.
4. a kind of adjustable graphene wide angle Terahertz wave absorbing device of frequency as described in claim 1, it is characterised in that on described The thickness of dielectric layer is h1=1 μm of advanced low-k materials are constituted.
5. a kind of adjustable graphene wide angle Terahertz wave absorbing device of frequency as described in claim 1, it is characterised in that under described Graphene strips belt is W by widthd=0.9 μm, length Ly=4 μm of the band-like graphene composition of rectangular strip.
6. a kind of adjustable graphene wide angle Terahertz wave absorbing device of frequency as described in claim 1, it is characterised in that under described The thickness of dielectric layer is h2=4 μm of advanced low-k materials are constituted.
7. a kind of adjustable graphene wide angle Terahertz wave absorbing device of frequency as described in claim 1, it is characterised in that the gold The thickness for belonging to substrate layer is h3=1 μm of skin depth for being more than incidence wave.
8. a kind of adjustable graphene wide angle Terahertz wave absorbing device of frequency as described in claim 1, it is characterised in that described low Dielectric constant material is Sio2、Topas、Zro2In one kind.
9. a kind of adjustable graphene wide angle Terahertz wave absorbing device of frequency as described in claim 1, it is characterised in that the gold Belong to substrate layer using gold or silver-colored good conductor material.
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