CN108581816A - Three-phase flow dynamic pressure cavitation polishing method and device - Google Patents

Abstract

A three-phase flow pressure cavitation polishing method. The free-form surface workpiece is fixed on the bottom of the polishing liquid container through a fixture. The cylindrical polishing tool does not directly contact the free-form surface workpiece and is immersed in the polishing liquid. The serial-parallel parallel polishing platform controls the polishing tool. Relative to the position and posture of the workpiece, the tool and the surface of the workpiece always maintain a small processing gap; the servo motor drives the cylindrical polishing tool to rotate at high speed above the workpiece through the connecting device, so that the polishing liquid mixed with abrasive grains can be driven by the high-speed rotation of the tool Rotating together, the polishing liquid is squeezed when it passes through the wedge-shaped gap between the tool and the workpiece to increase the pressure and generate dynamic pressure; the abrasive grains are pressed into the surface of the workpiece to cause surface and sub-surface damage, achieving extremely high-precision polishing on the surface of the workpiece. The invention improves the polishing efficiency under the premise of not causing surface and subsurface damage.

Description

Three-phase flow pressure cavitation polishing method and device

technical field

The invention relates to the technical field of ultra-precision machining, and more specifically relates to a three-phase flow pressure cavitation polishing method and device.

Background technique

With the development of science and technology, ultra-precision machining technology is not only an important development direction of modern manufacturing science and technology, but also an important basis for future advanced manufacturing technology. The rise of ultra-precision machining has significantly improved the surface roughness of most current workpieces, and at the same time, the performance and reliability of products have also been improved. The ensuing problem is that the precision requirements of parts in different fields are increasing day by day. In order to obtain higher processing accuracy and surface quality, it is necessary to realize ultra-smooth surface processing on the surface of precision optical parts and functional crystal materials. Ultra-smooth surface processing technology occupies a very important position in ultra-precision processing technology, and is an important embodiment of a country's scientific and technological level and comprehensive national strength. However, under normal circumstances, in order to achieve the removal of atomic-level materials in ultra-smooth surface processing, a small force is used to process the surface of the workpiece during processing. The processing time is often long, and the processing efficiency is very low. At the same time, the processing cost is also high. will be high. It can be seen that how to improve the processing efficiency and reduce the processing without causing surface and sub-surface damage is an urgent technical problem in the field of precision manufacturing.

In order to realize the ultra-smooth surface polishing of these parts, many ultra-smooth surface processing methods have been developed in China. The existing ultra-smooth surface processing methods can be generally divided into two categories. One category is processed by direct contact between the processing tool and the workpiece surface, such as: traditional grinding and polishing using abrasive belts, grinding wheels or other flexible materials as tools. Wait. This type of processing method uses the micro-cutting of the surface of the workpiece by the fine abrasive grains on the tool to remove the micro-protrusion on the surface of the workpiece to achieve the effect of polishing. Although the processing efficiency is high, it also has certain disadvantages and limitations.

1. Due to the different particle sizes of the abrasive grains, the polishing force of the abrasive grains on the tool surface is uneven, which inevitably causes surface and sub-surface damage to the workpiece.

2. Due to the tool contact processing method, some workpieces with special shape and structure cannot be processed, such as the inner wall of the workpiece, holes and other parts, which cannot be processed because the tool is difficult to penetrate. Another type of processing method does not rely on the direct contact between the processing tool and the workpiece surface for polishing, such as: fluid polishing, electrolytic polishing, chemical polishing, magnetic grinding and polishing, etc. In this type of processing method, fluid polishing is the most widely used. Fluid polishing relies on the high-speed flowing liquid and the abrasive particles carried to scour the surface of the workpiece to achieve the purpose of polishing. The current two-phase flow polishing method also has some disadvantages:

1. The fluid velocity is not high and the flow direction is single. The flow velocity of the fluid relative to the surface of the workpiece cannot reach a turbulent state, but is in a laminar flow state with a single flow direction, which makes the impact direction of the abrasive particles in the polishing liquid consistent, scratches the workpiece, and causes damage to the surface and subsurface.

2. Since the flow direction of the abrasive grains is basically the same, only a layer of abrasive grains attached to the surface of the workpiece plays a polishing role, and the polishing efficiency is low.

3. The recycling efficiency of the abrasive flow is low, and abrasive deposits are generated during the processing, which affects the effect and efficiency of polishing.

Contents of the invention

In order to overcome the disadvantage of low polishing efficiency of the existing polishing methods, the present invention proposes a three-phase flow air compressor in order to improve the polishing efficiency without causing damage to the surface and sub-surface when polishing free-form surface workpieces. Chemical polishing method and device.

The technical solution adopted by the present invention to solve its technical problems is:

A three-phase flow pressure cavitation polishing method. The free-form surface workpiece is fixed on the bottom of the polishing liquid container through a fixture, and the series-parallel hybrid platform composed of a three-degree-of-freedom series platform and a three-bar parallel platform is installed above the container. Cylindrical The polishing tool and the servo motor are installed at the end of the serial-parallel hybrid platform; the abrasive flow delivery pump is installed on both sides of the polishing liquid container, and the delivery pump is connected to the agitator on the other side through the abrasive flow delivery hose; the ultrasonic generator is installed Based on the multi-degree-of-freedom mechanical end; the cylindrical polishing tool is not in direct contact with the free-form surface workpiece and is immersed in the polishing liquid. The series-parallel polishing platform controls the posture of the polishing tool relative to the workpiece, so that the tool and the workpiece surface always maintain a small distance. Processing gap; the servo motor drives the cylindrical polishing tool to rotate at high speed above the workpiece through the connecting device, so that the polishing liquid mixed with abrasive particles rotates together under the action of the high-speed rotation of the tool, and the polishing liquid passes through the wedge-shaped gap between the tool and the workpiece. Squeezing increases the pressure and generates dynamic pressure; the abrasive grains added to the polishing liquid continuously impact the microscopic raised part of the workpiece surface at an approximately horizontal angle under the action of dynamic pressure, forming a certain material removal for the workpiece; through Adjust the distance and angle between the ultrasonic bubble generator installed at the end of the mechanical arm and the tool, so that the horn is aligned with the micro-gap between the tool and the workpiece, and cavitation bubbles are generated at the end of the horn. The ultrasonic positive pressure phase and negative pressure phase continuously expand and compress, and when passing through the liquid dynamic pressure area, due to the pressure change in the dynamic pressure area, the cavitation bubbles collapse; the energy generated by the collapse drives the polishing liquid mixed with abrasive particles, Increase the impact velocity of abrasive grains, increase the randomness of abrasive grain impact, improve polishing efficiency, avoid scratches caused by the flow of abrasive grains in one direction, and avoid direct contact between tools and workpieces, and abrasive grains press into the surface of the workpiece to cause surface and sub-surface damage , to achieve extremely high-precision polishing of the workpiece surface.

Further, in order to avoid the deposition of abrasive particles in the polishing liquid during the polishing process, the agitator is connected with two abrasive flow delivery pumps installed on both sides of the polishing liquid container to form an abrasive flow circulation system by using the abrasive flow delivery hose.

Furthermore, the surface of the cylindrical polishing tool is either smooth or has grooves, and the free-form surface workpiece is fixed on the bottom of the polishing liquid container through a fixture. Both the tool and the workpiece are completely immersed in the polishing liquid mixed with abrasive grains; the three-bar parallel platform is installed on the The Z-direction guide rail of the three-degree-of-freedom series platform forms a series-parallel hybrid platform. The polishing tool is installed at the end of the serial-parallel hybrid mechanism. The serial platform controls the position of the tool along the X, Y, and Z directions, and the parallel platform controls the attitude of the tool. The pose of the polishing tool relative to the workpiece can be precisely controlled.

Furthermore, the servo motor drives the polishing tool to rotate at a high speed while the tool maintains a small gap above the workpiece. The polishing liquid mixed with abrasive particles rotates together under the action of the high-speed rotation of the tool. When the polishing liquid passes through the wedge-shaped gap between the tool and the workpiece due to Squeeze occurs to increase the pressure and generate dynamic pressure; under the action of dynamic pressure, the abrasive particles added to the polishing liquid continuously impact the microscopic raised part of the workpiece surface at an approximately horizontal angle, forming a certain amount of material removal on the workpiece.

The ultrasonic bubble generator is installed at the end of the multi-degree-of-freedom manipulator through the connecting device, and the multi-degree-of-freedom manipulator continuously adjusts the position of the horn of the ultrasonic generator relative to the dynamic pressure area, so that the cavitation bubbles generated at the end of the horn just pass through dynamic pressure area. When the ultrasonic bubble generator is working, a large number of cavitation bubbles are generated at the end of the horn. The cavitation bubbles continue to expand and contract under the action of the ultrasonic positive pressure phase and negative pressure phase. When passing through the liquid dynamic pressure area due to the pressure change in the dynamic pressure area, Rapid collapse of cavitation bubbles occurs.

The abrasive flow circulation system is composed of two abrasive flow delivery pumps, an agitator and abrasive flow delivery hoses. Two abrasive flow delivery pumps are respectively installed on both sides of the polishing processing platform, and are connected to the agitator on the other side through abrasive flow delivery hoses. The liquid-solid two-phase abrasive flow circulation system can effectively prevent the abrasive particles from depositing at the bottom of the polishing liquid container, improve the recovery and use efficiency of the abrasive flow, and thus improve the polishing efficiency.

A three-phase flow pressure cavitation polishing device, the device includes a three-degree-of-freedom series platform, a three-bar parallel platform, a polishing liquid mixed with abrasive particles, an abrasive flow delivery pump, an abrasive flow delivery hose, an agitator, Multi-degree-of-freedom mechanical arm, workpiece, polishing liquid container, fixture, servo motor, coupling, polishing tool and ultrasonic bubble generator, the three-degree-of-freedom series platform installed above the polishing liquid container is mainly composed of X, Y, Z direction guide rails The guide rails in three directions are respectively driven by motors to control the position of the polishing tool; the three-bar parallel platform is composed of a dynamic platform and a static platform, and the dynamic platform is composed of three telescopic rods to control the attitude of the polishing tool; The three-bar parallel platform is installed on the Z-direction guide rail of the three-degree-of-freedom series platform to form a series-parallel hybrid platform. The polishing tool is connected to the servo motor and installed at the end of the serial-parallel hybrid mechanism, so that the polishing tool and the workpiece can rotate at high speed while maintaining a small gap. , to generate a dynamic pressure area; the free-form surface workpiece is fixed on the bottom of the polishing liquid container by a fixture, and is completely immersed in the polishing liquid mixed with abrasive particles; two abrasive flow delivery pumps are respectively installed on both sides of the polishing liquid container, through the abrasive The particle flow delivery hose is connected to the agitator on the other side to avoid abrasive particle deposition during the polishing process; the ultrasonic bubble generator is installed at the end of the multi-degree-of-freedom mechanical arm through a connecting device, so that the ultrasonic bubble generator at the end of the horn Cavitation bubbles pass right through the dynamic pressure region.

The polishing tool is a cylindrical polishing tool, and the cylindrical polishing tool is connected with a servo motor through a connecting device and installed at the end of the three-bar parallel platform, and the surface of the tool is grooved or smooth.

Two abrasive flow delivery pumps are respectively installed on both sides of the polishing processing platform, and are connected with the agitator and the polishing liquid container through the abrasive flow delivery hose; The granular flow is stirred and transported circularly.

The beneficial effects of the present invention are mainly manifested in: improving the polishing efficiency without causing surface and sub-surface damage.

Description of drawings

FIG. 1 is a schematic diagram of the overall structure of the three-phase flow cavitation polishing device of the present invention.

Fig. 2 is a schematic diagram of a partial structure of a three-phase flow cavitation polishing device of the present invention.

In the figure, 1-Z direction guide rail motor, 2-X direction guide rail motor, 14-Y direction guide rail motor, 3-Y direction guide rail, 4-X direction guide rail, 5-static platform, 6-moving platform, 7-mixed Abrasive polishing liquid, 8(11)-abrasive flow delivery pump, 9-abrasive flow delivery hose, 10-stirrer, 12-Z direction guide rail, 13-multi-degree-of-freedom mechanical arm, 15-workpiece, 16 -Polishing liquid container, 17-workpiece fixture, 18-extensible rod, 19-extensible rod motor, 20-servo motor, 21-coupling, 22-cylindrical polishing tool with groove, 23-coupling , 24-ultrasonic bubble generator.

Detailed ways

The present invention will be further described below in conjunction with the accompanying drawings.

Referring to Figure 1 and Figure 2, a three-phase flow pressure cavitation polishing method, the free-form surface workpiece is fixed on the bottom of the polishing liquid container through a fixture, and the serial platform composed of a three-degree-of-freedom series platform and a three-bar parallel platform is installed above the container. Parallel hybrid platform, cylindrical polishing tools and servo motors are installed at the end of the serial parallel hybrid platform; abrasive flow delivery pumps are installed on both sides of the polishing liquid container, and the delivery pump communicates with the agitator on the other side through the abrasive flow delivery hose The ultrasonic generator is installed at the end of the multi-degree-of-freedom machine; the cylindrical polishing tool is not in direct contact with the free-form surface workpiece and is immersed in the polishing liquid. The workpiece surface always maintains a small processing gap; the servo motor drives the cylindrical polishing tool to rotate at high speed above the workpiece through the connecting device, so that the polishing liquid mixed with abrasive particles rotates together under the action of the high-speed rotation of the tool, and the polishing liquid passes through the tool and the workpiece. The wedge-shaped gap between them is squeezed to increase the pressure and generate dynamic pressure; under the action of dynamic pressure, the abrasive grains added to the polishing liquid continuously impact the microscopic convex part of the workpiece surface at an approximate horizontal angle, which is harmful to the workpiece. A certain material removal is formed; by adjusting the distance and angle between the ultrasonic bubble generator installed at the end of the mechanical arm and the tool, the horn is aligned with the micro gap between the tool and the workpiece, and a void is generated at the end of the horn. Cavitation bubbles, cavitation bubbles continue to expand and compress under the action of ultrasonic positive pressure phase and negative pressure phase, when passing through the liquid dynamic pressure area due to the pressure change in the dynamic pressure area, the cavitation bubbles collapse; the energy generated by the collapse drives the mixing Polishing liquid with abrasive grains increases the impact velocity of abrasive grains, increases the randomness of abrasive grain impact, improves polishing efficiency, avoids scratches caused by the flow of abrasive grains in one direction, and avoids direct contact between tools and workpieces, and abrasive grains are pressed into the workpiece Surface and sub-surface damage are generated on the surface to achieve extremely high-precision polishing of the workpiece surface.

Further, in order to avoid the deposition of abrasive particles in the polishing liquid during the polishing process, the agitator is connected with two abrasive flow delivery pumps installed on both sides of the polishing liquid container by the abrasive flow delivery hose to form an abrasive flow circulation system.

Furthermore, the surface of the cylindrical polishing tool is either smooth or has grooves, and the free-form surface workpiece is fixed on the bottom of the polishing liquid container through a fixture. Both the tool and the workpiece are completely immersed in the polishing liquid mixed with abrasive grains; the three-bar parallel platform is installed on the The Z-direction guide rail of the three-degree-of-freedom series platform forms a series-parallel hybrid platform. The polishing tool is installed at the end of the serial-parallel hybrid mechanism. The serial platform controls the position of the tool along the X, Y, and Z directions, and the parallel platform controls the attitude of the tool. The pose of the polishing tool relative to the workpiece can be precisely controlled.

Furthermore, the servo motor drives the polishing tool to rotate at a high speed while the tool maintains a small gap above the workpiece. The polishing liquid mixed with abrasive particles rotates together under the action of the high-speed rotation of the tool. When the polishing liquid passes through the wedge-shaped gap between the tool and the workpiece due to Squeeze occurs to increase the pressure and generate dynamic pressure; under the action of dynamic pressure, the abrasive particles added to the polishing liquid continuously impact the microscopic raised part of the workpiece surface at an approximately horizontal angle, forming a certain amount of material removal on the workpiece.

The ultrasonic bubble generator is installed at the end of the multi-degree-of-freedom manipulator through the connecting device, and the multi-degree-of-freedom manipulator continuously adjusts the position of the horn of the ultrasonic generator relative to the dynamic pressure area, so that the cavitation bubbles generated at the end of the horn just pass through dynamic pressure area. When the ultrasonic bubble generator is working, a large number of cavitation bubbles are generated at the end of the horn. The cavitation bubbles continue to expand and contract under the action of the ultrasonic positive pressure phase and negative pressure phase. When passing through the liquid dynamic pressure area due to the pressure change in the dynamic pressure area, Rapid collapse of cavitation bubbles occurs.

The abrasive flow circulation system is composed of two abrasive flow delivery pumps, an agitator and abrasive flow delivery hoses. Two abrasive flow delivery pumps are respectively installed on both sides of the polishing processing platform, and are connected to the agitator on the other side through abrasive flow delivery hoses. The liquid-solid two-phase abrasive flow circulation system can effectively prevent the abrasive particles from depositing at the bottom of the polishing liquid container, improve the recovery and use efficiency of the abrasive flow, and thus improve the polishing efficiency.

A three-phase flow pressure cavitation polishing device, including 1-Z direction guide rail motor, 2-X direction guide rail motor, 3-Y direction guide rail, 4-X direction guide rail, 5-static platform, 6-moving platform, 7- Polishing liquid mixed with abrasive particles, 8(11)-abrasive flow delivery pump, 9-abrasive flow delivery hose, 10-stirrer, 12-Z direction guide rail, 13-multi-degree-of-freedom mechanical arm, 14-Y Direction rail motor, 15-free-form surface workpiece, 16-polishing liquid container, 17-workpiece fixture, 18-extensible rod, 19-extensible rod motor, 20-servo motor, 21-coupling, 22-with groove The cylindrical polishing tool, 23-coupling, 24-ultrasonic bubble generator. The free-form surface workpiece 15 is fixed on the bottom of the polishing liquid container 16 by the workpiece fixture 17, and is completely immersed in the polishing liquid 7 mixed with abrasive grains; the three-degree-of-freedom series platform is mainly composed of the X direction guide rail 4 and the Y direction guide rail 3 , Z-direction guide rail 12 and is installed above the polishing liquid container 16, the guide rails in three directions are respectively driven by guide rail motors 1, 2, 14; the three-bar parallel platform is mainly composed of a static platform 5 and a moving platform 6, of which the moving platform 6 It mainly consists of three telescopic rods 18. The three-bar parallel platform is installed at the end of the Z-direction guide rail 12 of the three-degree-of-freedom series platform to form a series-parallel hybrid platform. The grooved cylindrical polishing tool 22 is connected with the servo motor 20 and installed at the end of the series-parallel hybrid mechanism, so that the polishing tool and the workpiece can rotate at a high speed while maintaining a small gap to generate a dynamic pressure area. Two abrasive flow delivery pumps 8 and 11 are respectively installed on both sides of the polishing liquid container 16, and are connected to the agitator 10 on the other side through the abrasive flow delivery hose 9 to avoid abrasive deposition during the polishing process. The ultrasonic bubble generator 24 is installed at the end of the multi-degree-of-freedom mechanical arm 13 .

When the three-phase flow pressure cavitation polishing device is working, the series-parallel hybrid polishing platform controls the posture of the cylindrical polishing tool relative to the workpiece, so that the polishing tool and the workpiece surface always maintain a small processing gap, and the tool and the workpiece are completely immersed in the polishing in the liquid. The cylindrical polishing tool is driven by a servo motor to rotate at high speed, so that the polishing liquid mixed with abrasive particles rotates together under the action of the high-speed rotation of the tool to generate dynamic pressure. The abrasive particles in the polishing liquid continuously pass through the machining gap under the action of the dynamic pressure flow, and impact the microscopic raised part of the workpiece surface at an approximately horizontal angle, forming a certain material removal on the workpiece. The ultrasonic bubble generating mechanism constantly adjusts the posture of the horn relative to the dynamic pressure area, so that the cavitation bubbles generated at the end of the horn just pass through the hydrodynamic pressure area. Due to the pressure change in the dynamic pressure area, the cavitation cloud collapses, and the energy generated by the collapse drives the polishing liquid mixed with abrasive grains, increases the impact velocity of abrasive grains, increases the randomness of abrasive grain impact, improves polishing efficiency, and avoids single abrasive grains The flow in the direction will scratch the workpiece and realize the extremely high-precision polishing of the surface of the workpiece. As the polishing progresses, the abrasive particle flow circulation system circulates the abrasive particles in the polishing container to avoid the deposition of abrasive particles in the polishing liquid. The three-phase flow compression cavitation polishing device mainly includes a series-parallel hybrid polishing platform, an abrasive particle flow circulation system, an ultrasonic bubble generating mechanism, a workpiece, a polishing liquid container, a fixture, a polishing tool, and a polishing liquid mixed with abrasive particles.

The series-parallel hybrid polishing platform is composed of a three-bar parallel platform and a three-degree-of-freedom series platform. The three-degree-of-freedom series platform is mainly composed of guide rails in X, Y, and Z directions. The three-bar parallel platform is installed on the Z-direction guide rail of the three-degree-of-freedom series platform. The guide rails in the three directions are respectively driven by motors; The platform is composed of a static platform, and the dynamic platform is mainly composed of three retractable rods. The cylindrical polishing tool is connected to the servo motor through a connecting device and installed at the end of the three-bar parallel platform. The surface of the tool can be grooved or smooth. The serial platform controls the position of the tool along the X, Y, and Z directions, and the parallel platform controls the attitude of the tool, so that the posture of the polishing tool relative to the workpiece can be precisely controlled.

The tool maintains a small gap above the workpiece, the servo motor drives the polishing tool to rotate at high speed, and the polishing liquid mixed with abrasive grains rotates together under the action of the high-speed rotation of the tool. When the polishing liquid passes through the wedge-shaped gap between the tool and the workpiece, due to Extrusion increases the pressure and generates dynamic pressure. Under the action of dynamic pressure, the abrasive particles added to the polishing liquid continuously impact the microscopic raised part of the workpiece surface at an approximately horizontal angle, forming a certain amount of material removal on the workpiece.

The ultrasonic bubble generating mechanism is composed of an ultrasonic bubble generator and a multi-degree-of-freedom mechanical arm. The ultrasonic bubble generator is installed at the end of the multi-degree-of-freedom mechanical arm through a connecting device, and is not limited to the mechanical arm, any device that can adjust the pose of the end of the ultrasonic generator is sufficient. The multi-degree-of-freedom mechanical arm continuously adjusts the pose of the sonotrode horn relative to the dynamic pressure area, so that the cavitation bubbles generated at the end of the horn just pass through the dynamic pressure area. When the ultrasonic bubble generator is working, a large number of cavitation bubbles are generated at the end of the horn. The cavitation bubbles continue to expand and contract under the action of the ultrasonic positive pressure phase and negative pressure phase. When passing through the liquid dynamic pressure area due to the pressure change in the dynamic pressure area, Rapid collapse of cavitation bubbles occurs.

The material removal is a comprehensive result of changes in the movement state and distribution of abrasive grains caused by hydrodynamic pressure and cavitation collapse, which improves polishing efficiency, avoids damage to the surface and subsurface of the workpiece, and achieves a uniform polishing effect.

The abrasive flow circulation system is composed of two abrasive flow delivery pumps and an agitator. Two abrasive flow delivery pumps are respectively installed on both sides of the polishing processing platform, and are connected with the agitator and the polishing liquid container through abrasive flow delivery hoses. The abrasive flow circulation system continuously stirs and conveys the abrasive flow in the polishing container during the polishing process, avoiding the deposition of abrasive particles at the bottom of the polishing liquid container, improving the recovery and use efficiency of the abrasive flow, thereby improving the polishing efficiency.

The above-described embodiments are only preferred embodiments of the present invention, and are not limitations to the technical solutions of the present invention. As long as they are technical solutions that can be realized on the basis of the above-mentioned embodiments without creative work, they should be regarded as falling into the scope of the patent of the present invention. within the scope of protection of rights.

Claims (9)

1. a kind of three-phase flow dynamic pressure cavitation polishing method, it is characterised in that：Free curve surface work pieces are fixed on polishing fluid by fixture Container bottom is installed on the serial-parallel mirror being made of with three bar parallel connection platforms Three Degree Of Freedom series connection platform above container and puts down Platform, cylindrical polishing tool are installed on serial-parallel mirror platform end with servo motor；It is defeated equipped with abrasive Flow to polish liquid container both sides Pump, delivery pump is sent to be connected with the blender of the other side by abrasive Flow delivery hose；Supersonic generator is then installed on mostly freely Spend mechanical end；Cylindrical polishing tool is not directly contacted with and is immersed in polishing fluid with free curve surface work pieces, serial-parallel mirror Polished land controls the pose of polishing tool opposite piece, between so that tool and workpiece surface is remained a small processing Gap；Servo motor drives cylindrical polishing tool high speed rotation above workpiece by attachment device, makes the polishing for being mixed with abrasive grain Liquid rotates together under the high-speed rotating effect of tool, and polishing fluid generates extruding when passing through the wedge gap between tool and workpiece And pressure is improved, generate dynamic pressure；It is incorporated in the constantly angle of level of approximation under the action of dynamic pressure of the abrasive grain in polishing fluid The part for going impact workpiece surface microscopic protrusions forms certain material to workpiece and removes；By adjusting mounted on mechanical arm end The distance between the ultrasonic bubble generator and tool at end and angle, make the microgap between amplitude transformer alignment tools and workpiece Work, amplitude transformer end generate cavitation bubble, cavitation bubble under ultrasonic wave positive pressure phase and negative pressure phase separation constantly expansion and Compression, by the pressure change due to dynamic pressure region when Hydrodynamic region, cavitation bubble is crumbled and fall；It crumbles and fall the energy of generation Driving is mixed with the polishing fluid of abrasive grain, increases abrasive grain impact velocity, increases abrasive grain and impacts randomness, improves polishing efficiency, avoid grinding The flowing of grain single direction generates cut to workpiece, while the tool workpiece of avoiding is in direct contact, and abrasive grain is pressed into workpiece surface and generates Surface and sub-surface damage realize the polishing of workpiece surface very high degree of precision.

2. a kind of three-phase flow dynamic pressure cavitation polishing method as described in claim 1, it is characterised in that：In order to keep away in polishing process Exempt from the wear particle deposition in polishing fluid, is ground blender with mounted on polish liquid container both sides two using abrasive Flow delivery hose Grain stream delivery pump connects into an abrasive particle flow circulating system.

3. three-phase flow dynamic pressure cavitation polishing method as claimed in claim 1 or 2, it is characterised in that：Cylindrical polishing tool table Face is smooth or be provided with groove, and free curve surface work pieces are fixed on polishing fluid container bottom by fixture, and tool and workpiece are all complete It is immersed in the polishing fluid for being mixed with abrasive grain；Three bar parallel connection platforms are installed on the Z-direction guide rail of Three Degree Of Freedom series connection platform and form Serial-parallel mirror platform, polishing tool are mounted on serial-parallel mirror mechanism end, control the position of tool along X, Y, Z-direction by series connection platform It sets, parallel connection platform controls the posture of tool, and polishing tool is allow to be accurately controlled relative to the pose of workpiece.

4. three-phase flow dynamic pressure cavitation polishing method as claimed in claim 2 or claim 3, it is characterised in that：Tool is protected above workpiece Servo motor drives polishing tool high speed rotation while holding microgap, is mixed with the polishing fluid of abrasive grain in the high-speed rotating work of tool It is rotated together under, polishing fluid is generated by improving pressure due to generating extruding when wedge gap between tool and workpiece Dynamic pressure；Constantly the angle of level of approximation goes impact workpiece surface microcosmic to the abrasive grain being incorporated in polishing fluid under the action of dynamic pressure The part of protrusion forms certain material to workpiece and removes.

5. three-phase flow dynamic pressure cavitation polishing method as claimed in claim 2 or claim 3, it is characterised in that：Ultrasonic bubble generator It is installed on multi-degree-of-freemechanical mechanical arm end by attachment device, multi-degree-of-freemechanical mechanical arm constantly adjusts supersonic generator amplitude transformer Relative to the pose in dynamic pressure region, make the cavitation bubble that amplitude transformer end generates just past dynamic pressure region.Supersonic gas is soaked When raw device work, amplitude transformer end generates a large amount of cavitation bubbles, cavitation bubble under ultrasonic wave positive pressure phase and negative pressure phase separation not Disconnected expansion and contraction, by the pressure change due to dynamic pressure region when Hydrodynamic region, cavitation bubble generation is quickly crumbled and fall.

6. three-phase flow dynamic pressure cavitation polishing method as claimed in claim 2, it is characterised in that：The abrasive particle flow circulating system by Two abrasive Flow delivery pumps, blender and abrasive Flow delivery hose composition.Two abrasive Flow delivery pumps are respectively arranged in polishing and add Work platform both sides are connected by abrasive Flow delivery hose with the blender of the other side.Liquid-solid two phase abrasive particle flow circulating system can have Effect avoids wear particle deposition in polishing fluid container bottom, the recycling service efficiency of abrasive Flow is improved, to promote polishing efficiency.

7. a kind of device of three-phase flow dynamic pressure cavitation polishing method as described in claim 1, it is characterised in that：Described device packet Include Three Degree Of Freedom series connection platform, three bar parallel connection platforms, the polishing fluid for being mixed with abrasive grain, abrasive Flow delivery pump, abrasive Flow delivery hose, Blender, multi-degree-of-freemechanical mechanical arm, workpiece, polishing liquid container, fixture, servo motor, shaft coupling, polishing tool and supersonic gas Generator is steeped, the Three Degree Of Freedom series connection platform above polishing liquid container is installed on and is mainly made of X, Y, Z-direction guide rail, three sides To guide rail driven respectively by motor, the position for controlling polishing tool；Three bar parallel connection platforms are by moving platform and silent flatform group At wherein moving platform is made of three telescopic rods, the posture for controlling polishing tool；Three bar parallel connection platforms are installed on three certainly By forming serial-parallel mirror platform on the Z-direction guide rail of degree series connection platform, polishing tool is connected mounted on string and is mixed with servo motor Join mechanism end, makes polishing tool and high speed rotation while workpiece holding microgap, generate dynamic pressure region；Free curve surface work pieces Polishing fluid container bottom is then fixed on by fixture, and is totally submerged in being mixed in the polishing fluid of abrasive grain；Two abrasive Flows are defeated It send pump to be respectively arranged in polishing liquid container both sides, is connected with other side blender by abrasive Flow delivery hose, is thrown for avoiding Wear particle deposition in photoreduction process；Ultrasonic bubble generator is installed on multi-degree-of-freemechanical mechanical arm end by attachment device, makes to surpass The cavitation bubble that sonic generator amplitude transformer end generates is just past dynamic pressure region.

8. device as claimed in claim 7, it is characterised in that：The polishing tool is cylindrical polishing tool, and cylinder is thrown Optical tool, which is then connected by attachment device with servo motor, is installed on three bar parallel connection platform ends, and tool surfaces are with groove or light It is sliding.

9. device as claimed in claim 7 or 8, it is characterised in that：Two abrasive Flow delivery pumps are respectively arranged in polishing Platform both sides are connected by abrasive Flow delivery hose with blender and polishing liquid container；Abrasive particle flow circulating system is in polishing process In ceaselessly to polishing container in abrasive Flow carry out circulation stirring with conveying.