CN108538718B - Cutting device - Google Patents
Cutting device Download PDFInfo
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- CN108538718B CN108538718B CN201810159197.1A CN201810159197A CN108538718B CN 108538718 B CN108538718 B CN 108538718B CN 201810159197 A CN201810159197 A CN 201810159197A CN 108538718 B CN108538718 B CN 108538718B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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- Microelectronics & Electronic Packaging (AREA)
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Abstract
Description
技术领域Technical Field
本发明涉及对被加工物进行切削的切削装置。The present invention relates to a cutting device for cutting a workpiece.
背景技术Background technique
在切削装置中，使切削刀具切入至被加工物的加工预定线而进行切削。切削刀具构成为安装在主轴上，通过主轴的旋转，切削刀具也进行旋转。In the cutting device, a cutting tool is cut into a workpiece along a planned machining line to perform cutting. The cutting tool is mounted on a main spindle, and the cutting tool is rotated by the rotation of the main spindle.
在基于切削刀具的切削加工中，当切削刀具发生磨损而使切削能力降低时，可能出现在被加工物上产生崩边等问题。因此，在切削装置中，按照主轴以一定的转速进行旋转的方式进行控制，并对主轴的负载电流值进行监视，在负载电流值上升的情况下，进行对切削刀具的修整等处理，从而实现切削品质的维持(例如，参照专利文献1)。In cutting processing based on cutting tools, when the cutting tools are worn and the cutting ability is reduced, problems such as chipping of the workpiece may occur. Therefore, in the cutting device, the spindle is controlled to rotate at a certain speed, and the load current value of the spindle is monitored. When the load current value increases, the cutting tool is dressed, etc., so as to maintain the cutting quality (for example, refer to Patent Document 1).
专利文献1：日本特开2009-283604号公报Patent Document 1: Japanese Patent Application Publication No. 2009-283604
但是，即使通过对负载电流值进行监视而在切削时能够把握到负载电流值上升，但要知晓该情况是在哪条加工预定线的切削时产生的并不容易。因此，无法把握在被加工物被分割而形成的多个芯片中的哪个芯片的品质上存在问题。另一方面，若操作者能够把握在哪里的切削时检测到多大的负载电流值，则容易确定认为在品质上存在问题的芯片。However, even if the load current value is monitored and the load current value is detected during cutting, it is not easy to know which predetermined processing line the load current value is detected during cutting. Therefore, it is impossible to know which chip has a quality problem among the multiple chips formed by dividing the workpiece. On the other hand, if the operator can know where and how large the load current value is detected during cutting, it is easy to identify the chip that is considered to have a quality problem.
发明内容Summary of the invention
本发明是鉴于这样的问题而完成的，其课题在于提供一种切削装置，在被加工物的切削时，操作者容易确定出安装有切削刀具的主轴的负载电流值变高的部位。The present invention has been made in view of the above problems, and an object of the present invention is to provide a cutting device that allows an operator to easily identify a portion where a load current value of a spindle on which a cutting tool is mounted becomes high when cutting a workpiece.
本发明为切削装置，该切削装置具有：卡盘工作台，其对被加工物进行保持；主轴，该主轴被旋转驱动；以及切削刀具，其安装在该主轴的前端，对该卡盘工作台所保持的被加工物进行切削，该切削装置沿着加工预定线对该被加工物进行切削加工，其中，该切削刀具具有：负载电流值检测单元，其对切削加工时的该主轴的负载电流值进行检测；显示单元，其对该负载电流值检测单元所检测的负载电流值进行显示；以及控制单元，其至少对该负载电流值检测单元和该显示单元进行控制，该控制单元将加工预定线与对该加工预定线进行加工时的该主轴的负载电流值对应地显示在该显示单元上。The present invention is a cutting device, which comprises: a chuck worktable, which holds a workpiece; a spindle, which is driven to rotate; and a cutting tool, which is installed at the front end of the spindle and cuts the workpiece held by the chuck worktable. The cutting device cuts the workpiece along a predetermined processing line, wherein the cutting tool comprises: a load current value detection unit, which detects the load current value of the spindle during cutting; a display unit, which displays the load current value detected by the load current value detection unit; and a control unit, which controls at least the load current value detection unit and the display unit, and the control unit displays the predetermined processing line and the load current value of the spindle when processing the predetermined processing line on the display unit in correspondence.
在上述切削装置中，优选控制单元根据所述主轴的负载电流值的值，利用颜色区分、线型区分中的任意一方或双方而将加工预定线显示在所述显示单元上。In the above-mentioned cutting device, it is preferable that the control unit displays the planned machining line on the display unit by using either or both of color distinction and line type distinction according to the value of the load current value of the spindle.
在本发明中，控制单元将加工预定线与对该加工预定线进行加工时的主轴的负载电流值对应地显示在显示单元上，因此能够一目了然地把握在哪条加工预定线的切削时产生了多大的负载电流。因此，容易确定出认为在品质上存在问题的芯片。In the present invention, the control unit displays the processing scheduled line and the load current value of the spindle when processing the processing scheduled line on the display unit, so that it can be clearly understood at a glance how much load current is generated when cutting which processing scheduled line. Therefore, it is easy to identify the chip that is considered to have quality problems.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1是示出切削装置的一例的立体图。FIG. 1 is a perspective view showing an example of a cutting device.
图2是示出被加工物的一例的立体图。FIG. 2 is a perspective view showing an example of a workpiece.
图3是示出显示单元中的显示例的主视图。FIG. 3 is a front view showing a display example on a display unit.
标号说明Description of symbols
1：切削装置；10：卡盘工作台；100：吸附部；100a：保持面；101：框体；102：罩；103：旋转单元；11：切削单元；110：外壳；111：主轴；112：电动机；113：切削刀具；114：刀具罩；115：切削水提供喷嘴；12：切削进给单元；120：滚珠丝杠；121：导轨；122：电动机；123：可动板；13：分度进给单元；130：滚珠丝杠；131：导轨；132：电动机；133：可动板；14：切入进给单元；140：滚珠丝杠；141：导轨；142：电动机；143：支架；145：壁部；15：负载电流值检测单元；16：控制单元；17：存储单元；18：显示单元；19：对准单元；190：拍摄单元；W：被加工物；Wa：正面；Wb：背面；T：划片带；F：环状框架；G：切削槽。1: cutting device; 10: chuck table; 100: adsorption part; 100a: holding surface; 101: frame; 102: cover; 103: rotation unit; 11: cutting unit; 110: housing; 111: spindle; 112: motor; 113: cutting tool; 114: tool cover; 115: cutting water supply nozzle; 12: cutting feed unit; 120: ball screw; 121: guide rail; 122: motor; 123: movable plate; 13: indexing feed unit; 130 : ball screw; 131: guide rail; 132: motor; 133: movable plate; 14: cutting feed unit; 140: ball screw; 141: guide rail; 142: motor; 143: bracket; 145: wall; 15: load current value detection unit; 16: control unit; 17: storage unit; 18: display unit; 19: alignment unit; 190: shooting unit; W: workpiece; Wa: front side; Wb: back side; T: dicing tape; F: annular frame; G: cutting groove.
具体实施方式Detailed ways
图1所示的切削装置1是对被加工物W实施切削加工的装置，其例如至少具有：卡盘工作台10，其对被加工物W进行保持；以及切削单元11，其对卡盘工作台10所保持的被加工物W进行切削。The cutting device 1 shown in FIG. 1 is a device for cutting a workpiece W, and includes, for example, at least a chuck table 10 that holds the workpiece W and a cutting unit 11 that cuts the workpiece W held by the chuck table 10 .
在切削装置1的基台1A的前方(+Y方向侧)具有使卡盘工作台10在X轴方向上往复移动的切削进给单元12。切削进给单元12包含：滚珠丝杠120，其具有X轴方向的轴心；一对导轨121，它们与滚珠丝杠120平行地配设；电动机122，其使滚珠丝杠120转动；以及可动板123，其内部的螺母与滚珠丝杠120螺合，并且该可动板123的底部与导轨121滑动接触。并且，当电动机122使滚珠丝杠120转动时，与此相伴可动板123被导轨121引导而在X轴方向上移动，配设在可动板123上的卡盘工作台10随着可动板123的移动而在X轴方向上移动，从而对卡盘工作台10所保持的被加工物W进行切削进给。A cutting and feeding unit 12 for reciprocating the chuck table 10 in the X-axis direction is provided in front of the base 1A of the cutting device 1 (on the +Y direction side). The cutting and feeding unit 12 includes: a ball screw 120 having an axis in the X-axis direction; a pair of guide rails 121 arranged in parallel with the ball screw 120; a motor 122 for rotating the ball screw 120; and a movable plate 123, a nut inside of which is screwed with the ball screw 120, and the bottom of the movable plate 123 is in sliding contact with the guide rail 121. When the motor 122 rotates the ball screw 120, the movable plate 123 is guided by the guide rail 121 and moves in the X-axis direction, and the chuck table 10 arranged on the movable plate 123 moves in the X-axis direction as the movable plate 123 moves, thereby performing cutting and feeding on the workpiece W held by the chuck table 10.
图1所示的卡盘工作台10具有：吸附部100，其由对被加工物W进行吸附的多孔部件等构成；以及框体101，其对吸附部100进行支承。吸附部100与未图示的吸引源连通，在作为吸附部100的露出面的保持面100a上对被加工物W进行吸引保持。卡盘工作台10被罩102从周围包围，通过配设在卡盘工作台10的底面侧的旋转单元103进行驱动而能够旋转。另外，在框体101的周围沿周向均等地配设有四个对环状框架F进行固定的固定夹具104。The chuck table 10 shown in FIG1 has: an adsorption portion 100, which is composed of a porous component or the like for adsorbing the workpiece W; and a frame 101, which supports the adsorption portion 100. The adsorption portion 100 is connected to a suction source not shown in the figure, and the workpiece W is sucked and held on a holding surface 100a which is an exposed surface of the adsorption portion 100. The chuck table 10 is surrounded by a cover 102, and can be rotated by being driven by a rotating unit 103 arranged on the bottom side of the chuck table 10. In addition, four fixing clamps 104 for fixing the annular frame F are evenly arranged around the frame 101 in the circumferential direction.
在切削装置1的基台1A上具有使切削单元11在Y轴方向上往复移动的分度进给单元13。分度进给单元13包含：滚珠丝杠130，其具有Y轴方向的轴心；一对导轨131，它们与滚珠丝杠130平行地配设；电动机132，其使滚珠丝杠130转动；可动板133，其内部的螺母与滚珠丝杠130螺合，并且该可动板133的底部与导轨131滑动接触。并且，当电动机132使滚珠丝杠130转动时，与此相伴可动板133被导轨131引导而在Y轴方向上移动，配设在可动板133上的切削单元11随着可动板133的移动而在Y轴方向上移动，从而对切削单元11进行分度进给。The base 1A of the cutting device 1 is provided with an indexing feed unit 13 for reciprocating the cutting unit 11 in the Y-axis direction. The indexing feed unit 13 includes: a ball screw 130 having an axis in the Y-axis direction; a pair of guide rails 131 arranged in parallel with the ball screw 130; a motor 132 for rotating the ball screw 130; and a movable plate 133, a nut inside of which is screwed with the ball screw 130, and the bottom of the movable plate 133 is in sliding contact with the guide rail 131. When the motor 132 rotates the ball screw 130, the movable plate 133 is guided by the guide rail 131 and moves in the Y-axis direction, and the cutting unit 11 arranged on the movable plate 133 moves in the Y-axis direction as the movable plate 133 moves, thereby performing indexing feed on the cutting unit 11.
壁部145从可动板133上一体地竖立设置，在壁部145的+X方向侧的侧面上具有使切削单元11在Z轴方向上往复移动的切入进给单元14。切入进给单元14包含：滚珠丝杠140，其具有Z方向的轴心；一对导轨141，它们与滚珠丝杠140平行地配设；电动机142，其使滚珠丝杠140转动；以及支架143，其内部的螺母与滚珠丝杠140螺合，并且该支架143的侧部与导轨141滑动接触。并且，当电动机142使滚珠丝杠140转动时，与此相伴支架143被导轨141引导而在Z轴方向上移动，借助外壳110而被支架143支承的切削单元11随着支架143的移动而在Z轴方向上移动。The wall portion 145 is integrally erected from the movable plate 133, and a cutting feed unit 14 is provided on the side surface of the wall portion 145 on the +X direction side, which reciprocates the cutting unit 11 in the Z-axis direction. The cutting feed unit 14 includes: a ball screw 140 having an axis in the Z direction; a pair of guide rails 141, which are arranged in parallel with the ball screw 140; a motor 142, which rotates the ball screw 140; and a bracket 143, the nut inside of which is screwed with the ball screw 140, and the side of the bracket 143 is in sliding contact with the guide rail 141. When the motor 142 rotates the ball screw 140, the bracket 143 is guided by the guide rail 141 and moves in the Z-axis direction, and the cutting unit 11 supported by the bracket 143 via the housing 110 moves in the Z-axis direction as the bracket 143 moves.
切削单元11具有：外壳110，其被支架143支承；主轴111，其被外壳110支承为能够旋转；电动机112，其对主轴111进行旋转驱动；以及切削刀具113，其安装在主轴112的前端部。The cutting unit 11 includes a housing 110 supported by a bracket 143 , a spindle 111 rotatably supported by the housing 110 , a motor 112 for rotationally driving the spindle 111 , and a cutting tool 113 attached to a front end of the spindle 112 .
图1所示的切削刀具113例如是轮毂刀具，其具有：铝制的基台，其形成为圆盘状，在中央具有安装孔；以及切削刃，其固定在基台的外周部。另外，切削刀具113并不限于轮毂刀具，也可以是外形为环状的垫圈型刀具。The cutting tool 113 shown in FIG1 is, for example, a hub tool, which has: an aluminum base formed in a disc shape with a mounting hole in the center; and a cutting edge fixed to the outer periphery of the base. In addition, the cutting tool 113 is not limited to a hub tool, and may also be a washer-type tool having an annular shape.
主轴111的轴向是相对于卡盘工作台10的移动方向(X轴方向)在水平方向上垂直的方向(Y轴方向)，主轴111的后端侧(-Y方向侧的端侧)与传递电动机112的旋转力的轴连结，在主轴111的前端侧安装有切削刀具113。并且，随着通过电动机112对主轴111进行旋转驱动，切削刀具113也进行高速旋转。The axial direction of the spindle 111 is a direction (Y-axis direction) that is perpendicular to the horizontal direction relative to the moving direction (X-axis direction) of the chuck table 10. The rear end side (the end side on the -Y direction side) of the spindle 111 is connected to a shaft that transmits the rotational force of the motor 112, and a cutting tool 113 is installed on the front end side of the spindle 111. And, as the spindle 111 is driven to rotate by the motor 112, the cutting tool 113 also rotates at a high speed.
电动机112是电动电机，在电动机112上连接有：未图示的电源，其向电动机112提供电力；以及负载电流值检测单元15，其对提供至电动机112的电力的负载电流值进行检测。The motor 112 is an electric motor, and is connected to a power source (not shown) that supplies electric power to the motor 112 and a load current value detection unit 15 that detects a load current value of the electric power supplied to the motor 112 .
在外壳110上安装有刀具罩114。刀具罩114在其大致中央部具有用于安装切削刀具113的开口部，将切削刀具113定位于开口部而从上方覆盖切削刀具113。另外，在刀具罩114上安装有切削水提供喷嘴115，其向被加工物W与切削刀具113接触的加工点提供切削水。例如从Y轴方向观察形成为L字型的切削水提供喷嘴115按照从Y轴方向两侧夹着切削刀具113的方式配设有两个，它们具有朝向切削刀具113的侧面的喷射口，与未图示的切削水提供源连通。A tool cover 114 is mounted on the housing 110. The tool cover 114 has an opening for mounting the cutting tool 113 at its substantially central portion, and the cutting tool 113 is positioned at the opening to cover the cutting tool 113 from above. In addition, a cutting water supply nozzle 115 is mounted on the tool cover 114, and supplies cutting water to a processing point where the workpiece W contacts the cutting tool 113. For example, two cutting water supply nozzles 115 formed in an L shape when viewed from the Y-axis direction are arranged so as to sandwich the cutting tool 113 from both sides in the Y-axis direction, and they have a jet port facing the side of the cutting tool 113, and are connected to a cutting water supply source (not shown).
在外壳110的侧面上配设有对准单元19。对准单元19具有对被加工物W进行拍摄的拍摄单元190，拍摄单元190例如具有：光照射部，其对被加工物W照射光；以及相机，其由捕捉来自被加工物W的反射光的光学体系以及输出与反射光对应的电信号的拍摄元件(CCD)等构成。对准单元19能够根据拍摄单元190所获取的图像对被加工物W的要进行切削的加工预定线进行检测。对准单元19与切削单元11构成为一体，两者联动地沿Y轴方向和Z轴方向移动。An alignment unit 19 is provided on the side surface of the housing 110. The alignment unit 19 includes a photographing unit 190 for photographing the workpiece W. The photographing unit 190 includes, for example, a light irradiation unit for irradiating light to the workpiece W, and a camera composed of an optical system for capturing reflected light from the workpiece W and a photographing element (CCD) for outputting an electrical signal corresponding to the reflected light. The alignment unit 19 can detect the predetermined processing line to be cut of the workpiece W based on the image acquired by the photographing unit 190. The alignment unit 19 is integrally formed with the cutting unit 11, and the two move in conjunction with each other in the Y-axis direction and the Z-axis direction.
切削装置1具有控制单元16，其由CPU和存储器等存储元件构成，进行装置整体的控制。控制单元16通过布线与切削进给单元12和切入进给单元14等各装置结构要素连接，在控制单元16的控制下，对切削进给单元12所实现的卡盘工作台10向X轴方向的切削进给动作、切入进给单元14所实现的切削单元11向Z轴方向的切入进给动作等进行控制。另外，控制单元16与负载电流值检测单元15连接，负载电流值检测单元15能够将关于所检测的电动机112的负载电流值的信息输送至控制单元16，控制单元16基于负载电流值进行控制。The cutting device 1 has a control unit 16, which is composed of a storage element such as a CPU and a memory, and controls the entire device. The control unit 16 is connected to each device component such as the cutting feed unit 12 and the cutting feed unit 14 through wiring. Under the control of the control unit 16, the cutting feed action of the chuck table 10 in the X-axis direction implemented by the cutting feed unit 12 and the cutting feed action of the cutting unit 11 in the Z-axis direction implemented by the cutting feed unit 14 are controlled. In addition, the control unit 16 is connected to the load current value detection unit 15, and the load current value detection unit 15 can transmit information about the detected load current value of the motor 112 to the control unit 16, and the control unit 16 performs control based on the load current value.
控制单元16具有：存储单元17，其具有存储器等存储元件；以及显示单元18，其对来自控制单元16的输出信息进行画面显示。The control unit 16 includes a storage unit 17 including a storage element such as a memory, and a display unit 18 that displays output information from the control unit 16 on a screen.
以下，对将图1所示的被加工物W纵横地切削而进行分割加工的情况下的切削装置1的动作进行说明。图1所示的被加工物W形成为矩形状，在其内部在格子状的区域形成有多个器件。被加工物W的背面Wb粘贴在划片带T上而被划片带T保护。在划片带T的粘接面的外周区域粘贴有具有圆形的开口的环状框架F，被加工物W借助划片带T而被环状框架F支承。另外，被加工物W不限于矩形。The following describes the operation of the cutting device 1 when the workpiece W shown in FIG. 1 is cut vertically and horizontally to perform a splitting process. The workpiece W shown in FIG. 1 is formed into a rectangular shape, and a plurality of devices are formed in a grid-like region inside the workpiece W. The back surface Wb of the workpiece W is attached to the dicing tape T and protected by the dicing tape T. An annular frame F having a circular opening is attached to the outer peripheral region of the adhesive surface of the dicing tape T, and the workpiece W is supported by the annular frame F via the dicing tape T. In addition, the workpiece W is not limited to a rectangular shape.
首先，由操作者通过未图示的操作单元将卡盘工作台10的切削进给速度、被加工物W的大小、相邻的切削线之间的间隔、切削刀具113的切入深度等加工条件输入至控制单元16。First, the operator inputs machining conditions such as the cutting feed speed of the chuck table 10 , the size of the workpiece W, the interval between adjacent cutting lines, and the cutting depth of the cutting tool 113 into the control unit 16 via an operation unit (not shown).
被加工物W按照图1所示的卡盘工作台10的中心与被加工物W的中心一致的方式，使划片带T侧朝下而载置于保持面100a上。并且，使未图示的吸引源所产生的吸引力作用于保持面100a，从而被加工物W的作为与被加工面Wa相反的面的背面Wb被卡盘工作台10吸引保持。另外，通过各固定夹具104对环状框架F进行固定。The workpiece W is placed on the holding surface 100a with the dicing tape T side facing downward so that the center of the chuck table 10 shown in FIG. 1 coincides with the center of the workpiece W. Then, a suction force generated by a suction source (not shown) is applied to the holding surface 100a, so that the back surface Wb of the workpiece W, which is the surface opposite to the workpiece surface Wa, is sucked and held by the chuck table 10. In addition, the annular frame F is fixed by each fixing fixture 104.
接着，切削进给单元12将卡盘工作台10所保持的被加工物W向+X方向输送，通过对准单元19对要使切削刀具113切入的加工预定线进行检测。即，根据拍摄单元190所拍摄的被加工物W的正面Wa的图像，对准单元19执行图案匹配等图像处理，对要使切削刀具113切入的加工预定线进行检测。随着对加工预定线进行检测，切削单元11通过所示的分度进给单元13在Y轴方向上进行驱动，进行要切削的加工预定线与切削刀具113在Y轴方向上的对位。Next, the cutting feed unit 12 conveys the workpiece W held by the chuck table 10 in the +X direction, and detects the predetermined processing line to be cut by the cutting tool 113 through the alignment unit 19. That is, based on the image of the front Wa of the workpiece W photographed by the imaging unit 190, the alignment unit 19 performs image processing such as pattern matching to detect the predetermined processing line to be cut by the cutting tool 113. As the predetermined processing line is detected, the cutting unit 11 is driven in the Y-axis direction through the indexing feed unit 13 shown, and the predetermined processing line to be cut and the cutting tool 113 are aligned in the Y-axis direction.
向构成切削单元11的电动机112提供交流电力，主轴111和切削刀具113进行高速旋转。在该状态下，切入进给单元14对切削单元11向-Z方向进行切入进给，将切削刀具113定位于规定的高度位置。AC power is supplied to the motor 112 constituting the cutting unit 11, and the spindle 111 and the cutting tool 113 rotate at high speed. In this state, the cutting feed unit 14 cuts and feeds the cutting unit 11 in the -Z direction, and positions the cutting tool 113 at a predetermined height.
在进行了切削刀具113与所检测的加工预定线在Y轴方向的对位的状态下，对被加工物W进行保持的卡盘工作台10以规定的切削进给速度进一步向+X方向被送出，从而卡盘工作台10与切削刀具113以规定的速度在切削进给方向(X轴方向)上相对地移动，切削刀具113一边高速旋转一边切入至被加工物W的被检测的加工预定线，对该加工预定线进行切削。切削中，从切削水提供喷嘴115对切削刀具113提供切削水。After the cutting tool 113 and the detected predetermined processing line are aligned in the Y-axis direction, the chuck table 10 holding the workpiece W is further fed in the +X direction at a predetermined cutting feed speed, so that the chuck table 10 and the cutting tool 113 move relatively in the cutting feed direction (X-axis direction) at a predetermined speed, and the cutting tool 113 cuts into the detected predetermined processing line of the workpiece W while rotating at a high speed, and cuts the predetermined processing line. During cutting, cutting water is supplied to the cutting tool 113 from the cutting water supply nozzle 115.
接着，按照相邻的加工预定线的间隔对切削单元11在Y轴方向上进行转位进给，并进行同样的切削，从而对切削完成的加工预定线的相邻的加工预定线进行切削。这样，反复进行转位进给和切削，从而对同方向的所有加工预定线进行切削。另外，在使卡盘工作台10旋转90度之后进行同样的切削，从而如图2所示那样所有的加工预定线被纵横地切削而分割成各个芯片。Next, the cutting unit 11 is indexed and fed in the Y-axis direction according to the intervals between adjacent processing lines, and the same cutting is performed, so that the adjacent processing lines of the processing lines that have been cut are cut. In this way, the indexing and cutting are repeated, so that all processing lines in the same direction are cut. In addition, the same cutting is performed after the chuck table 10 is rotated 90 degrees, so that all processing lines are cut vertically and horizontally as shown in FIG. 2 and divided into individual chips.
在这样进行的切削的过程中，控制单元16根据构成切削进给单元12的电动机122相关的控制信息(例如输送至电动机122的脉冲数或来自编码器的信息)对被加工物W的X轴方向的位置进行检测，并且根据构成分度进给单元13的电动机132相关的控制信息(例如输送至电动机132的脉冲数或来自编码器的信息)对切削刀具113的Y轴方向的位置进行检测。即，根据这两个控制信息，控制单元16对目前的切削加工位置进行识别。并且，如图3所示，将加工所形成的切削槽G实时地显示在显示单元18上。During the cutting process, the control unit 16 detects the position of the workpiece W in the X-axis direction according to the control information related to the motor 122 constituting the cutting feed unit 12 (e.g., the number of pulses sent to the motor 122 or information from the encoder), and detects the position of the cutting tool 113 in the Y-axis direction according to the control information related to the motor 132 constituting the indexing feed unit 13 (e.g., the number of pulses sent to the motor 132 or information from the encoder). That is, based on these two control information, the control unit 16 identifies the current cutting position. And, as shown in FIG3 , the cutting groove G formed by the processing is displayed on the display unit 18 in real time.
另外，与此并行，控制单元16逐次读入负载电流值检测单元15中的负载电流。并且，将加工位置与对该加工位置进行加工时的负载电流值相对应的加工位置对应负载电流值信息存储于存储单元17。另外，控制单元16将加工位置对应负载电流值信息与加工的行进一致地实时显示在显示单元18上。In parallel with this, the control unit 16 sequentially reads the load current in the load current value detection unit 15. And the processing position corresponding load current value information corresponding to the processing position and the load current value when the processing position is processed is stored in the storage unit 17. In addition, the control unit 16 displays the processing position corresponding load current value information on the display unit 18 in real time in accordance with the progress of the processing.
利用切削刀具113进行切削加工时，当施加在切削刀具113的负载变大时，切削刀具113需要更强的旋转力。控制单元16按照主轴111以一定的转速进行旋转的方式对电动机112进行控制，因此当作用于切削刀具113的负载变大时，电动机112的负载电流值上升。如图3所示，控制单元16对从上方观察的状态的被加工物W进行显示，并且对因切削加工而形成的切削槽G进行显示，将切削槽G的形成时的负载电流值与切削槽G对应地显示。在图3的例子中，与负载电流值一致地改变切削槽G的粗细，从而能够一目了然地把握负载电流值高的部位。即，图3所示的例子示出了所有的加工预定线的切削结束并沿着所有的加工预定线形成了切削槽的状态。When cutting is performed using the cutting tool 113, when the load applied to the cutting tool 113 increases, the cutting tool 113 requires a stronger rotational force. The control unit 16 controls the motor 112 in such a way that the spindle 111 rotates at a certain speed, so when the load acting on the cutting tool 113 increases, the load current value of the motor 112 increases. As shown in FIG3 , the control unit 16 displays the workpiece W in a state observed from above, and displays the cutting groove G formed by the cutting process, and displays the load current value when the cutting groove G is formed corresponding to the cutting groove G. In the example of FIG3 , the thickness of the cutting groove G is changed in accordance with the load current value, so that the part with a high load current value can be grasped at a glance. That is, the example shown in FIG3 shows the state in which the cutting of all the predetermined processing lines is completed and the cutting grooves are formed along all the predetermined processing lines.
在图3的例子中，按照操作者能够识别示出通常的负载电流值的部位与示出比通常的负载电流值大的值的部位的方式进行显示。具体而言，切削中的负载电流值为通常的值的部位以细线显示、切削中的负载电流值为1.0A的部位以粗线G1显示、切削中的负载电流值为1.5A的部位以极粗线G2显示、切削中的负载电流值为2.0A的部位以虚线G3显示、负载电流值为2.5A的部位以波浪线G4显示。另外，也可以代替基于加工预定线的线型的识别(线型区分)，而例如通过颜色区分对负载电流值的值进行识别。另外，可以并用线型区分和颜色区分。In the example of FIG. 3 , the display is performed in such a manner that the operator can distinguish between the portion showing the normal load current value and the portion showing the value greater than the normal load current value. Specifically, the portion showing the normal load current value during cutting is displayed with a thin line, the portion showing the load current value of 1.0A during cutting is displayed with a thick line G1, the portion showing the load current value of 1.5A during cutting is displayed with an extremely thick line G2, the portion showing the load current value of 2.0A during cutting is displayed with a dotted line G3, and the portion showing the load current value of 2.5A is displayed with a wavy line G4. In addition, the value of the load current value may be identified by, for example, color differentiation instead of the identification of the line type based on the predetermined processing line (line type differentiation). In addition, line type differentiation and color differentiation may be used together.
对于负载电流值不高的部位，推定为加工品质不低；对于负载电流值高的部位，推定为加工品质低。因此，操作者能够推定在负载电流值高的部位产生了一些加工故障，能够容易地确定该部位。另外，也可以仅对负载电流值显示得较高的切削槽的两侧的芯片进行检查，能够提高生产率。For the parts with low load current values, it is estimated that the processing quality is not low; for the parts with high load current values, it is estimated that the processing quality is low. Therefore, the operator can estimate that some processing failures have occurred in the parts with high load current values, and can easily identify the parts. In addition, it is also possible to inspect only the chips on both sides of the cutting groove where the load current value is high, which can improve productivity.
有时也在加工预定线中埋入被称为TEG(Test Element Group，测试元件组)的金属。当切削刀具113切入至TEG等金属时，施加于切削刀具113的负载变大，因此电动机112的负载电流值上升。例如在无TEG的部位的切削时的负载电流值为1.5A的情况下，当对TEG进行切削时，负载电流值达到2.0A左右。因此，在负载电流值局部地上升的情况下，推定存在TEG，能够判断为负载电流值的增加并非基于切削刀具113的切削能力的降低。另外，能够确认TEG的存在位置，因此在对同种的被加工物进行切削时，能够根据TEG的存在位置对加工预定线的切削顺序进行调整。例如通过最后对存在TEG的加工预定线进行切削，能够降低切削刀具的修整次数或更换次数，从而提高生产率。Sometimes, a metal called TEG (Test Element Group) is embedded in the predetermined processing line. When the cutting tool 113 cuts into the metal such as TEG, the load applied to the cutting tool 113 becomes larger, so the load current value of the motor 112 increases. For example, when the load current value is 1.5A when cutting a part without TEG, the load current value reaches about 2.0A when cutting TEG. Therefore, in the case where the load current value rises locally, it is inferred that TEG exists, and it can be judged that the increase in the load current value is not based on the reduction of the cutting ability of the cutting tool 113. In addition, the position of TEG can be confirmed, so when cutting the same kind of workpiece, the cutting order of the predetermined processing line can be adjusted according to the position of TEG. For example, by cutting the predetermined processing line with TEG last, the number of times the cutting tool is trimmed or replaced can be reduced, thereby improving productivity.
在由于长期使用切削刀具113而导致切削能力降低的情况下，负载电流值也变高。例如当负载电流值达到2.5A～3.0A时，加工品质降低。并且，在由于切削能力的降低而使负载电流值变高的情况下，负载电流值高的状态一直持续。因此，在操作者根据显示在显示单元18上的加工位置对应负载电流值信息而判断为由于切削刀具113的切削能力降低导致负载电流值高的状态持续的情况下，进行切削刀具的修整。例如在图1所示的卡盘工作台10的附近配设未图示的修整板等，使切削刀具113切入至修整板，从而能够提高切削刀具的切削能力。另外，也可以代替修整，对切削刀具113进行更换。When the cutting ability of the cutting tool 113 is reduced due to long-term use, the load current value also becomes higher. For example, when the load current value reaches 2.5A to 3.0A, the processing quality is reduced. In addition, when the load current value becomes higher due to the reduction in cutting ability, the high load current value continues. Therefore, when the operator determines that the high load current value continues due to the reduction in the cutting ability of the cutting tool 113 based on the load current value information corresponding to the processing position displayed on the display unit 18, the cutting tool is trimmed. For example, a trimming plate not shown in the figure is arranged near the chuck workbench 10 shown in Figure 1, so that the cutting tool 113 cuts into the trimming plate, thereby improving the cutting ability of the cutting tool. In addition, the cutting tool 113 can also be replaced instead of trimming.
另外，根据被加工物W的尺寸，能够求出已进行了切削的加工预定线的总距离，因此在修整后切削能力再次降低而负载电流值达到规定的值以上的情况下，计算出从修整后的再次开始切削时至负载电流值达到规定的值以上的期间的总切削距离，从而能够把握在对多少距离进行了切削的时刻进行修整(中间修整)即可。In addition, based on the size of the workpiece W, the total distance of the planned processing line that has been cut can be calculated. Therefore, when the cutting ability decreases again after trimming and the load current value reaches a specified value or more, the total cutting distance from the time when cutting is restarted after trimming to the time when the load current value reaches a specified value or more is calculated, so that it is possible to determine the time when trimming is performed after how much distance has been cut (intermediate trimming).
显示在显示单元18上的加工位置对应负载电流值信息能够存储在图1所示的存储单元17中。即，能够以一张被加工物为单位，分别预先对加工位置对应负载电流值信息进行存储。因此，能够按照各个被加工物进行芯片的品质管理。另外，能够对所有加工预定线的负载电流值进行存储，因此对于切削已结束的被加工物，也能够对认为负载电流值异常的位置进行确认。The load current value information corresponding to the processing position displayed on the display unit 18 can be stored in the storage unit 17 shown in FIG1. That is, the load current value information corresponding to the processing position can be stored in advance for each workpiece. Therefore, the quality management of the chip can be performed according to each workpiece. In addition, the load current values of all the processing scheduled lines can be stored, so for the workpiece whose cutting has been completed, the position where the load current value is considered to be abnormal can also be confirmed.
在本实施方式中，根据构成切削进给单元的电动机的控制信息对被加工物的切削部位的X轴方向的位置进行识别，根据构成分度进给单元的电动机的控制信息对被加工物的切削部位的Y轴方向的位置进行识别，但对于切削部位的识别而言，也可以采用这些以外的方法。例如也可以是，预先在X轴方向和Y轴方向上分别配设标尺，通过标尺的读取值对切削部位进行识别。In the present embodiment, the position of the cutting part of the workpiece in the X-axis direction is identified based on the control information of the motor constituting the cutting feed unit, and the position of the cutting part of the workpiece in the Y-axis direction is identified based on the control information of the motor constituting the indexing feed unit, but other methods may be used for identifying the cutting part. For example, scales may be provided in advance in the X-axis direction and the Y-axis direction, respectively, and the cutting part may be identified by the read values of the scales.
另外，在本实施方式中，构成为能够对在加工预定线的哪个部位出现了负载电流值上升进行把握，但也可以是仅对在哪条加工预定线上产生了负载电流值上升进行把握，而不对该加工预定线中的位置进行确定。在该情况下，仅根据构成分度进给单元13的电动机132的控制信息而确定加工预定线即可，可以不使用构成切削进给单元12的电动机122的控制信息。In addition, in the present embodiment, it is configured to be able to grasp at which part of the processing schedule line the load current value rises, but it is also possible to grasp only at which processing schedule line the load current value rises without determining the position in the processing schedule line. In this case, the processing schedule line can be determined only based on the control information of the motor 132 constituting the indexing feed unit 13, and the control information of the motor 122 constituting the cutting feed unit 12 may not be used.
Claims (2)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017038158A JP6814662B2 (en) | 2017-03-01 | 2017-03-01 | Cutting equipment |
| JP2017-038158 | 2017-03-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108538718A CN108538718A (en) | 2018-09-14 |
| CN108538718B true CN108538718B (en) | 2024-05-17 |
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| JP (1) | JP6814662B2 (en) |
| KR (1) | KR102341606B1 (en) |
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| DE102018204402A1 (en) * | 2018-03-22 | 2019-09-26 | Siemens Aktiengesellschaft | Method and device for taking a sample and use of such a device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04289071A (en) * | 1990-12-28 | 1992-10-14 | Noritake Co Ltd | Cutter and cutting method using rotary body |
| JPH11224116A (en) * | 1998-02-06 | 1999-08-17 | Mitsubishi Electric Corp | Working information display method and device for machine tool |
| JP2006235776A (en) * | 2005-02-23 | 2006-09-07 | Mitsubishi Heavy Ind Ltd | Machine tool and processing method by this machine tool |
| CN105690462A (en) * | 2014-12-12 | 2016-06-22 | 东和株式会社 | Cutting apparatus and cutting method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6165051A (en) * | 1998-10-29 | 2000-12-26 | Kulicke & Soffa Investments, Inc. | Monitoring system for dicing saws |
| JP5134216B2 (en) * | 2006-06-23 | 2013-01-30 | 株式会社ディスコ | Wafer processing result management method |
| JP2008004885A (en) * | 2006-06-26 | 2008-01-10 | Disco Abrasive Syst Ltd | Processing machine |
| JP5149072B2 (en) * | 2008-05-21 | 2013-02-20 | 株式会社ディスコ | Cutting equipment |
| JP5561222B2 (en) * | 2011-03-29 | 2014-07-30 | 株式会社デンソー | CUTTING DEVICE, CUTTING METHOD USING CUTTING DEVICE, AND PRODUCT MANUFACTURING METHOD |
| JP6280459B2 (en) * | 2014-06-27 | 2018-02-14 | 株式会社ディスコ | Tape expansion unit |
| JP6695102B2 (en) * | 2015-05-26 | 2020-05-20 | 株式会社ディスコ | Processing system |
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- 2018-02-05 TW TW107103993A patent/TWI745541B/en active
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- 2018-02-28 KR KR1020180024563A patent/KR102341606B1/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04289071A (en) * | 1990-12-28 | 1992-10-14 | Noritake Co Ltd | Cutter and cutting method using rotary body |
| JPH11224116A (en) * | 1998-02-06 | 1999-08-17 | Mitsubishi Electric Corp | Working information display method and device for machine tool |
| JP2006235776A (en) * | 2005-02-23 | 2006-09-07 | Mitsubishi Heavy Ind Ltd | Machine tool and processing method by this machine tool |
| CN105690462A (en) * | 2014-12-12 | 2016-06-22 | 东和株式会社 | Cutting apparatus and cutting method |
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| Publication number | Publication date |
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| TWI745541B (en) | 2021-11-11 |
| KR20180100497A (en) | 2018-09-11 |
| JP6814662B2 (en) | 2021-01-20 |
| KR102341606B1 (en) | 2021-12-22 |
| JP2018147913A (en) | 2018-09-20 |
| CN108538718A (en) | 2018-09-14 |
| TW201834045A (en) | 2018-09-16 |
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