CN108406324B - Rotary ultrasonic three-dimensional elliptical vibration immersion polishing fluid milling device and method - Google Patents

Abstract

The milling processing device and method of rotating ultrasonic three-dimensional elliptical vibration dipped in polishing fluid according to the present invention belong to the technical field of ultrasonic vibration milling, adopting a separate processing form of spindle rotating ultrasonic one-dimensional vibration and worktable ultrasonic two-dimensional vibration, both of which have the same frequency and different phases The device of the elliptical vibration mode has not been reported yet, and the three technologies of immersing the workpiece in the polishing liquid are coupled together to carry out closed processing of the workpiece, which can significantly improve the processing range of existing machine tools and increase production efficiency. The invention expands the processing range of ordinary numerical control machine tools, improves the processing efficiency of the machine tool, and completes materials that cannot be processed before; improves the processing efficiency of processing hard and brittle materials, and can increase the speed of the machine tool and increase the feed through rotating ultrasonic three-dimensional elliptical vibration milling. Speed; Improve the surface texture morphology, surface defects, microstructure, surface metallurgy and surface mechanical properties of difficult-to-machine materials.

Description

Rotary ultrasonic three-dimensional elliptical vibration immersion polishing fluid milling device and method

technical field

The invention belongs to the technical field of ultrasonic vibration milling, and in particular relates to a rotating ultrasonic three-dimensional elliptical vibration immersion milling processing device and method.

Background technique

Rotary ultrasonic vibration processing has its unique advantages, its working frequency is greater than 20KHz, and its working stroke is about 10μm. Rotary ultrasonic machining is a composite special processing technology, which combines the material removal methods of traditional ultrasonic machining and ordinary grinding.

It has significant advantages in improving the removal efficiency of hard and brittle materials, reducing cutting force, improving machining accuracy and surface integrity. Since the invention of rotary ultrasonic machining technology, domestic and foreign scholars have carried out a lot of research work on rotary ultrasonic machining equipment and technology, and have been practically applied in the main hard, brittle and difficult-to-machine materials and composite materials.

Three-dimensional elliptical vibration cutting is an emerging processing technology. In an elliptical cycle, the tool participates in cutting part of the time, and the other time is separated from the workpiece. The cutting speed is reversed during separation, which reverses the direction of friction between the chip and the rake face, and more It is conducive to the discharge of chips, improves the friction state between the tool and the machined surface, further improves the surface quality, and greatly reduces the cutting force; reduces tool wear and prolongs tool life: Professor Eiji Japan and others have proved that two-dimensional elliptical vibration Cutting tool life is longer than that of one-dimensional vibrating cutting tools; realize cutting of difficult-to-machine materials. Combined three-dimensional elliptical vibration + cutting processing in ultrasonic vibration processing can improve the efficiency of processing hard and brittle materials.

Therefore, a novel technical solution is urgently needed in the prior art to solve the problem of high-efficiency cutting of hard and brittle materials and composite materials.

Contents of the invention

The technical problem to be solved by the present invention is to provide a milling processing device and method for milling with rotating ultrasonic three-dimensional elliptical vibration dipped in polishing fluid, aiming at problems such as chipping, cracking and serious tool wear during the processing of hard and brittle materials and the processing of composite materials. Problems such as flash, burr, delamination and fiber pull-out will occur in the process. Using the milling method of rotating ultrasonic three-dimensional elliptical vibration dipped in polishing fluid to achieve efficient processing of hard and brittle materials, the use of ultrasonic waves in the liquid will cause cavitation. , to accelerate the polishing abrasive grains, hit the surface of the workpiece to form secondary processing, and achieve better surface integrity of the workpiece.

Rotary ultrasonic three-dimensional elliptical vibration immersion polishing liquid milling device, characterized by: including vibration isolation platform, Z-direction spindle system, XY moving slide system, rotary ultrasonic one-dimensional vibration milling system, ultrasonic two-dimensional vibration platform, polishing liquid sealing groove , ultrasonic signal generator and central control system;

The Z-direction spindle system includes a Z-direction spindle power system, a Z-direction spindle movement system, a gantry beam and a gantry column. The gantry column is fixed on the shock-isolation platform by bolts, and the gantry beam is fixed on the gantry column by bolts. The top of the Z-direction spindle moving system is fixed on the gantry beam by bolts, and the Z-direction spindle power system is fixed on the Z-direction spindle movement system by bolts;

The XY mobile slide system includes an X-axis mobile platform device base, an X-axis mobile platform device mobile platform, an X-axis mobile platform device servo motor, a Y-axis mobile platform device base, a Y-axis mobile platform device mobile platform, and a Y-axis The servo motor of the mobile platform device, the base of the X-axis mobile platform device is fixed on the vibration isolation platform by bolts; the servo motor of the X-axis mobile platform device is arranged on the side of the base of the X-axis mobile platform device; the X-axis The mobile platform device mobile platform is arranged on the top of the base of the X-axis mobile platform device; the base of the Y-axis mobile platform device is fixedly arranged on the mobile platform of the X-axis mobile platform device; the servo motor of the Y-axis mobile platform device is arranged on the Y axis The side of the base of the Y-axis mobile platform device; the Y-axis mobile platform device mobile platform is arranged on the upper part of the Y-axis mobile platform device base;

The rotary ultrasonic one-dimensional vibration milling system includes a rotary ultrasonic one-dimensional vibration tool holder and a double-edged face milling cutter, and the rotary ultrasonic one-dimensional vibration tool holder includes a horn of a rotary ultrasonic one-dimensional vibration tool holder, a rotary ultrasonic one-dimensional The plane installation part of the vibrating tool holder, the special pulling nail for CNC milling machine, the cone surface installation part of the rotating ultrasonic one-dimensional vibrating tool holder and the transducer of the rotating ultrasonic one-dimensional vibrating tool holder, the rotating ultrasonic one-dimensional vibrating tool holder The plane installation part of the one-dimensional vibrating tool holder, the special pulling nail for CNC milling machine, and the tapered surface installation part of the rotating ultrasonic one-dimensional vibrating tool holder are set at the lower part of the Z-direction spindle power system;

The ultrasonic two-dimensional vibration platform is set on the vibration isolation platform through the ultrasonic two-dimensional vibration platform clamping frame, and the ultrasonic two-dimensional vibration platform is provided with a workpiece fixture, an ultrasonic horn of the ultrasonic two-dimensional vibration platform, and The ultrasonic transducer, the signal source interface of the ultrasonic transducer of the ultrasonic two-dimensional vibration platform, and the cooperative control unit of the ultrasonic two-dimensional vibration platform;

The polishing liquid sealing groove is a semi-closed transparent container with an upper end opening, which is arranged on the upper part of the moving platform of the Y-axis moving platform device, and the inside of the sealing groove is provided with a polishing liquid;

Both the ultrasonic signal generator and the central control system are fixedly arranged on the upper part of the vibration isolation platform; The power system, the Z-direction spindle moving system, the rotating ultrasonic one-dimensional vibration tool holder and the ultrasonic two-dimensional vibration platform are connected by signal lines;

The double-edged face milling cutter is arranged in the spring sleeve at the lower end of the rotating ultrasonic one-dimensional vibrating handle, and is fastened and installed.

The abrasive particle composition of the polishing liquid includes diamond polishing abrasive particles and cerium oxide polishing abrasive particles.

The ultrasonic signal generator simultaneously inputs ultrasonic signals for the rotating ultrasonic one-dimensional vibration tool holder and the ultrasonic two-dimensional vibration platform, and the signals have the same frequency of 20KHz and different phases.

The milling processing method of rotating ultrasonic three-dimensional elliptical vibration dipped in polishing liquid is characterized in that: processing is carried out by using a rotating ultrasonic three-dimensional elliptical vibration dipped in polishing liquid milling processing device, including the following steps, and the following steps are carried out in sequence,

Step 1: According to the material of the workpiece to be processed, the shape and size of the workpiece to be processed are prepared in advance, and the material and size of the milling cutter are selected;

Step 2: Inject the polishing liquid that matches the workpiece to be processed in the step 1 into the sealing groove of the polishing liquid, and adjust the height of the liquid level to completely immerse the workpiece;

Step 3: According to the shape of the workpiece to be processed, enter the G code in the central control system to calculate the tool compensation in advance to ensure the processing accuracy;

Step 4: Adjust the input ultrasonic signal frequency and phase difference between the rotating ultrasonic one-dimensional vibration tool holder and the ultrasonic two-dimensional vibration platform on which the workpiece is installed, so that the tool processing path forms a three-dimensional ellipsoid in a single cycle to realize elliptical vibration processing;

Step 5: Adjust the height of the tool installed on the Z-direction spindle, and perform Z-direction tool setting;

Step 6: Adjust the XY two-dimensional platform to move the workpiece directly below the tool;

Step 7: Keep a certain distance between the tool and the workpiece to prevent interference, and simulate the G code program to ensure that the program is correct and prevent collisions;

Step 8: After the program is verified to be correct, start formal processing. First, start processing by executing the program in a single step, observe the processing status after each step, and continue processing after confirming that it is correct.

Through the above design scheme, the present invention can bring the following beneficial effects:

1. Expand the processing range of ordinary CNC machine tools, improve the processing efficiency of machine tools, and complete materials that cannot be processed before.

2. To improve the processing efficiency of processing hard and brittle materials, the speed of the machine tool can be increased and the feed rate can be increased by rotating ultrasonic three-dimensional elliptical vibration milling.

3. Improve the surface texture morphology, surface defects, microstructure, surface metallurgy and surface mechanical properties of difficult-to-machine materials.

Description of drawings

The present invention will be further described below in conjunction with accompanying drawing and specific embodiment:

Fig. 1 is a structural schematic diagram of a three-dimensional elliptical vibration immersion polishing liquid milling device of the present invention.

Fig. 2 is a partially enlarged schematic diagram of a rotary ultrasonic three-dimensional elliptical vibration immersion polishing liquid milling device of the present invention.

Fig. 3 is a schematic diagram of the structure of the rotary ultrasonic one-dimensional vibration milling system of the rotary ultrasonic three-dimensional elliptical vibration immersion polishing liquid milling processing device of the present invention.

Fig. 4 is a structural schematic diagram of the ultrasonic two-dimensional vibration platform of the rotary ultrasonic three-dimensional elliptical vibration immersion polishing fluid milling device of the present invention.

Fig. 5 is a schematic structural diagram of the XY moving sliding table system of the rotary ultrasonic three-dimensional elliptical vibration immersion polishing liquid milling device of the present invention.

In the figure, 101-double-edged face milling cutter, 102-rotating ultrasonic one-dimensional vibrating tool holder, 103-horn of rotating ultrasonic one-dimensional vibrating tool holder, 104-plane installation part of rotating ultrasonic one-dimensional vibrating tool holder, 105- Pull nails for CNC milling machines, 106-cone mounting part of rotating ultrasonic one-dimensional vibrating tool holder, 107-transducer of rotating ultrasonic one-dimensional vibrating tool holder, 108-spring sleeve, 201-Z-direction spindle power system, 202- Z-direction spindle moving system, 3-ultrasonic two-dimensional vibration platform, 301-workpiece to be processed, 302-ultrasonic two-dimensional vibration platform clamping frame, 304-workpiece fixture, 305-ultrasonic horn of the ultrasonic two-dimensional vibration platform, 306 -Ultrasonic transducer of ultrasonic two-dimensional vibration platform, 307-Signal source interface of ultrasonic transducer of ultrasonic two-dimensional vibration platform, 308-Cooperative control unit of ultrasonic two-dimensional vibration platform, 401-Central control system, 402-Ultrasonic Signal generator, 501-gantry beam, 502-gantry column, 601-Y-axis mobile platform device servo motor, 602-X-axis mobile platform device base, 603-Y-axis mobile platform device base, 604-Y-axis mobile platform Device mobile platform, 605-X-axis mobile platform device mobile platform, 606-X-axis mobile platform device servo motor, 701-polishing liquid, 702-polishing liquid sealing groove, 8-vibration isolation platform.

Detailed ways

The rotary ultrasonic three-dimensional elliptical vibration immersion polishing liquid milling device, as shown in Figures 1 to 5, consists of the following eight major parts, mainly including the vibration isolation platform 8, the Z-direction spindle system, the XY moving slide system, and the rotary ultrasonic one-dimensional Vibration milling system, ultrasonic two-dimensional vibration platform 3 , polishing fluid sealing tank 702 , ultrasonic signal generator 402 and central control system 401 .

The Z-direction spindle system includes a Z-direction spindle power system 201 , a Z-direction spindle movement system 202 , a gantry beam 501 and a gantry column 502 . The Z-direction spindle power system 201 is fixed to the Z-direction spindle moving system 202 by bolts, the Z-direction spindle movement system 202 is fixed to the gantry beam 501 by bolts, the gantry beam 501 is fixed to the gantry column 502 by bolts, and the gantry column 502 is fixed on the vibration isolation platform 8 by bolts, and the Z-direction spindle power system 201 can drive the rotating ultrasonic one-dimensional vibration tool holder 102 to rotate and move along the Z-direction spindle moving system 202 .

The XY moving slide system includes an X-axis moving platform device and a Y-axis moving platform device. Described X-axis mobile platform device comprises X-axis mobile platform device base 602, X-axis mobile platform device mobile platform 605 and X-axis mobile platform device servo motor 606; Described Y-axis mobile platform device comprises Y-axis mobile platform device base 603, the Y-axis mobile platform device mobile platform 604 and the Y-axis mobile platform device servo motor 601; the X-axis mobile platform device base 602 is fixed to the vibration isolation platform 8 by bolts, and the Y-axis mobile platform device base 603 is fixed to the X-axis The mobile platform device on the mobile platform 605 can move along the X and Y directions through the central control system 401 .

The rotating ultrasonic one-dimensional vibrating milling system includes a rotating ultrasonic one-dimensional vibrating tool holder 102, a horn 103 for rotating the ultrasonic one-dimensional vibrating tool holder, a plane mounting part 104 for rotating the ultrasonic one-dimensional vibrating tool holder, and a special puller for CNC milling machines. The nail 105, the tapered surface mounting part 106 of the rotating ultrasonic one-dimensional vibrating tool holder and the transducer 107 of the rotating ultrasonic one-dimensional vibrating tool holder; the rotating ultrasonic one-dimensional vibrating tool holder 106 is installed on the spindle taper hole of the Z-direction spindle power system 201 Inside, the 101 double-edged face milling cutter is installed on the Z-direction spindle power system 201, and the rotating ultrasonic one-dimensional vibrating handle 106 can perform ultrasonic vibration along the axis of the Z-axis.

The ultrasonic two-dimensional vibration platform 3 for installing workpieces includes a workpiece fixture 304, an ultrasonic horn 305 of the ultrasonic two-dimensional vibration platform, an ultrasonic transducer 306 of the ultrasonic two-dimensional vibration platform, and an ultrasonic transducer of the ultrasonic two-dimensional vibration platform. The signal source interface 307 of the instrument and the coordinated control unit 308 of the ultrasonic two-dimensional vibration platform.

The polishing liquid sealing groove 702 is provided with a polishing liquid 701 inside, and the polishing liquid sealing groove 702 is a semi-closed container with a transparent upper end opening, and the ultrasonic two-dimensional vibration platform 3 extends into the polishing liquid through the side waterproof channel for processing.

The ultrasonic signal generator 402 simultaneously inputs ultrasonic signals for the rotating ultrasonic one-dimensional vibrating tool handle 102 and the ultrasonic two-dimensional vibrating platform 3, the signals have the same frequency of 20KHz and different phases.

The central control system 401 controls the XYZ three-axis movement of the device through the G code of the operating system.

The servo motor 606 of the X-axis mobile platform device, the servo motor 601 of the Y-axis mobile platform device, the control switch of the Z-axis spindle power system 201 and the Z-axis spindle movement system 202, the rotating ultrasonic one-dimensional vibrating tool holder and the ultrasonic two-dimensional vibration tool for installing the workpiece All three-dimensional vibration platforms are connected to the central control system 401 and the ultrasonic signal generator 402 through signal lines.

The abrasive grain composition in the polishing liquid 701 includes two abrasive grain components: diamond polishing grain and cerium oxide polishing grain. The hard diamond grain is responsible for improving the polishing efficiency, and the soft cerium oxide polishing grain is responsible for precision polishing. .

The processing tool is a hard alloy double-edged face milling cutter 101, which is installed in the spring sleeve 108 at the lower end of the rotating ultrasonic one-dimensional vibrating handle 102, and is fastened and installed.

The milling processing method of rotating ultrasonic three-dimensional elliptical vibration dipped in polishing liquid is characterized in that: processing is carried out by using a rotating ultrasonic three-dimensional elliptical vibration dipped in polishing liquid milling processing device, including the following steps, and the following steps are carried out in sequence,

Step 1: According to the material of the workpiece 301 to be processed, the shape and size of the workpiece to be processed are prepared in advance, and the material and size of the milling cutter are selected;

Step 2: Inject the polishing liquid that matches the workpiece to be processed in the step 1 into the sealing groove 702 of the polishing liquid, and adjust the height of the liquid level to completely immerse the workpiece;

Step 3: According to the shape of the workpiece 301 to be processed, enter the G code in the central control system 401 to calculate the tool compensation in advance to ensure the machining accuracy;

Step four:

Adjust the frequency and phase difference of the input ultrasonic signal between the rotating ultrasonic one-dimensional vibrating tool handle 102 and the ultrasonic two-dimensional vibrating platform 3 on which the workpiece is installed, so that the machining path of the tool forms a three-dimensional ellipsoid in a single cycle to realize elliptical vibration processing;

Step 5: Adjust the height of the tool installed on the Z-direction spindle, and perform Z-direction tool setting;

Step 6: Adjust the XY two-dimensional platform to move the workpiece directly below the tool;

Step 7: Keep a certain distance between the tool and the workpiece to prevent interference, and simulate the G code program to ensure that the program is correct and prevent collisions;

Step 8: After the program is verified to be correct, start formal processing. First, start processing by executing the program in a single step, observe the processing status after each step, and continue processing after confirming that it is correct.

Polishing liquid processing in the present invention is to drive polishing liquid 701 to flow by milling cutter rotation, and the liquid in polishing liquid is cavitated by ultrasonic wave, eliminates the agglomeration phenomenon of nano-scale polishing liquid abrasive grain, makes the abrasive grain of acceleration The impact effect occurs on the surface. After the rotary ultrasonic three-dimensional elliptical vibration milling is completed, the processed surface is polished and secondary processed, which has a significant effect on reducing the surface roughness value and residual stress.

The present invention proposes a three-dimensional rotating ultrasonic elliptical vibration immersion polishing fluid milling method, which adopts a separate processing form of spindle rotating ultrasonic one-dimensional vibration and worktable ultrasonic two-dimensional vibration. It has not been reported that the three technologies of immersing the workpiece in the polishing solution are coupled together to carry out closed processing of the workpiece, which has a significant improvement in expanding the processing range of existing machine tools and increasing production efficiency.

The invention aims at problems such as chipping, cracking and severe tool wear during the processing of hard and brittle materials and flashes, burrs, delamination and fiber pulling out during the processing of composite materials, and utilizes rotating ultrasonic three-dimensional elliptical vibration dipping and polishing The liquid milling processing method realizes the efficient processing of hard and brittle materials. Three technologies are used for processing. First, the rotary ultrasonic vibration processing technology. At present, academia and engineering circles have used this technology to carry out a lot of research and application. It is in Hard and brittle difficult-to-machine materials, carbon fiber reinforced resin matrix composites and continuous fiber toughened ceramic matrix composites are widely used; then, there are many reports on three-dimensional elliptical vibration cutting in diamond cutting and difficult-to-machine materials; finally, the two technologies The processing area is immersed in the polishing liquid for processing, and the use of ultrasonic waves to propagate in the liquid will produce cavitation, accelerate the polishing abrasive particles, and hit the surface of the workpiece to form secondary processing to achieve better surface integrity of the workpiece.

Claims (2)

1. rotary ultrasonic three-dimensional elliptical vibration leaching polishing fluid milling device, it is characterized in that: including vibration-isolating platform (8), Z-direction master Axle system, XY Mobile Slide system, the one-dimensional vibration milling system of rotary ultrasonic, ultrasonic two-dimension vibration platform (3), polishing fluid sealing Slot (702), ultrasonic signal generator (402) and central control system (401)；

The Z-direction axis system includes Z-direction main shaft power system (201), Z-direction main axle moving system (202), gantry beam (501) and gantry upright post (502), the gantry upright post (502), which is bolted, is arranged on shock insulation platform (8), described Gantry beam (501) is bolted setting at the top of gantry upright post (502), and the Z-direction main axle moving system (202) is logical It crosses bolt to be fixed on gantry beam (501), the Z-direction main shaft power system (201), which is bolted, to be arranged in Z-direction In main axle moving system (202)；

The XY Mobile Slide system includes X-axis moving platform device pedestal (602), X-axis moving platform device mobile platform (605), X-axis moving platform device servo motor (606), Y-axis moving platform device pedestal (603), Y-axis moving platform device move Moving platform (604) and Y-axis moving platform device servo motor (601), the X-axis moving platform device pedestal (602) pass through Bolt is fixed on vibration-isolating platform (8)；The X-axis moving platform device servo motor (606) is arranged in X-axis mobile platform The side of device pedestal (602)；The X-axis moving platform device mobile platform (605) is arranged in X-axis moving platform device pedestal (602) top；The Y-axis moving platform device pedestal (603) is fixed at X-axis moving platform device mobile platform (605) on；The Y-axis moving platform device servo motor (601) is arranged in the side of Y-axis moving platform device pedestal (603)； The Y-axis moving platform device mobile platform (604) is arranged on the top of Y-axis moving platform device pedestal (603)；

The one-dimensional vibration milling system of rotary ultrasonic includes the one-dimensional vibrating knife handle of rotary ultrasonic (102) and twolip end mill (101), the one-dimensional vibrating knife handle of the rotary ultrasonic (102) includes the amplitude transformer (103) of the one-dimensional vibrating knife handle of rotary ultrasonic, rotation The Plane Installation position (104) of the one-dimensional vibrating knife handle of ultrasound, the dedicated blind rivet of CNC milling machine (105), the one-dimensional vibrating blade of rotary ultrasonic The conical surface installation position (106) of handle and the energy converter (107) of the one-dimensional vibrating knife handle of rotary ultrasonic, the one-dimensional vibrating blade of rotary ultrasonic Handle (102) passes through the Plane Installation position (104) of the one-dimensional vibrating knife handle of rotary ultrasonic, the dedicated blind rivet of CNC milling machine (105), rotation The conical surface installation position (106) of the one-dimensional vibrating knife handle of ultrasound is arranged in the lower part of Z-direction main shaft power system (201)；

The ultrasound two-dimension vibration platform (3) passes through ultrasonic two-dimension vibration platform holding frame (302) and is arranged in vibration-isolating platform (8) On, the ultrasonic amplitude transformer of work piece holder (304), ultrasonic two-dimension vibration platform is provided on ultrasonic two-dimension vibration platform (3) (305), the ultrasonic transducer (306) of ultrasonic two-dimension vibration platform, ultrasonic two-dimension vibration platform ultrasonic transducer signal source The Collaborative Control unit (308) of interface (307) and ultrasonic two-dimension vibration platform；

The polishing fluid seal groove (702) is the semiclosed transparent vessel of upper end opening, and setting is mobile in Y-axis moving platform device The top of platform (604), seal groove (702) are internally provided with polishing fluid (701)；

The ultrasonic signal generator (402) and central control system (401) are fixed on vibration-isolating platform (8) Portion；The central control system (401) and ultrasonic signal generator (402) are electric with X-axis moving platform device servo respectively Machine (606), Y-axis moving platform device servo motor (601), Z-direction main shaft power system (201), Z-direction main axle moving system (202), the one-dimensional vibrating knife handle of rotary ultrasonic (102) and ultrasonic two-dimension vibration platform (3) are connected by signal wire；

Spring pocket (108) of twolip end mill (101) setting in the one-dimensional vibrating knife handle of rotary ultrasonic (102) lower end is interior, Fastening installation；

Polishing fluid (701) abrasive particle composition includes diamond polishing abrasive grain and cerium oxide polishing abrasive grain；

The ultrasonic signal generator (402) is simultaneously the one-dimensional vibrating knife handle of rotary ultrasonic (102) and ultrasonic two-dimension vibration Platform (3) inputs ultrasonic signal, signal same frequency 20KHz, out of phase.

2. rotary ultrasonic three-dimensional elliptical vibration leaching polishing fluid milling method, it is characterized in that: using rotation described in claim 1 Turn ultrasonic three-dimensional elliptical vibration leaching polishing fluid milling device processed, include the following steps, and following steps sequentially into Row,

Step 1: according to the material of workpiece to be processed (301), the shape and size of workpiece to be processed, selection milling are prepared in advance The material and size of knife；

Step 2: the polishing fluid to match with workpiece to be processed in the step 1 is injected into polishing fluid seal groove (702) In, adjustment liquid level makes it be totally submerged workpiece；

Step 3: according to the shape of workpiece to be processed (301), G code is inputted in central control system (401), is calculated in advance Good cutter compensation guarantees machining accuracy；

Step 4: the input of the ultrasonic two-dimension vibration platform (3) of the adjustment one-dimensional vibrating knife handle of rotary ultrasonic (102) and installation workpiece Ultrasonic signal frequencies and phase difference make tool sharpening path form a triaxial ellipsoid in signal period, realize elliptical vibration Processing；

Step 5: the height of adjustment Z-direction main shaft installation cutter carries out Z-direction to knife；

Step 6: workpiece is moved to the underface of cutter by adjustment XY two-dimensional stage；

Step 7: cutter and workpiece keep certain distance, cannot interfere, and G code program are simulated one time, it is ensured that program is just Really, prevent to collide；

Step 8: after program verification is correct, starts formal processing, first start to process with the mode that single step executes program, observe Machining state after each step confirms errorless rear progress Continuous maching.