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CN108336204B - LED chip with single-sided light emitting function and manufacturing method thereof - Google Patents

LED chip with single-sided light emitting function and manufacturing method thereof Download PDF

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CN108336204B
CN108336204B CN201810298933.1A CN201810298933A CN108336204B CN 108336204 B CN108336204 B CN 108336204B CN 201810298933 A CN201810298933 A CN 201810298933A CN 108336204 B CN108336204 B CN 108336204B
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emitting layer
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led chip
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CN108336204A (en
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张智
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Shanghai Enbi Technology Co ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/84Coatings, e.g. passivation layers or antireflective coatings
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/84Coatings, e.g. passivation layers or antireflective coatings
    • H10H20/841Reflective coatings, e.g. dielectric Bragg reflectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01Manufacture or treatment
    • H10H20/034Manufacture or treatment of coatings

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Abstract

The invention relates to a single-sided light emitting LED chip and a manufacturing method thereof, comprising a substrate; the light-emitting layer is connected to the upper surface of the substrate, a side light-blocking layer is covered on the side surface of the light-emitting layer, a groove is formed on the upper surface of the light-emitting layer, close to the edge, and a light-blocking material is filled in the groove; and an electrode electrically connected to the light emitting layer. The beneficial effects of the invention are as follows: the side of the light-emitting layer is coated with the side light-blocking layer to form a first light-blocking structure, and the groove of the light-emitting layer close to the edge is filled with a light-blocking material to form a second light-blocking structure, so that light leakage from the side of the light-emitting layer is completely blocked, the light-emitting layer is ensured to emit light only from the upper surface, and the requirements of the high-precision light source of the optical encoder are met.

Description

单面出光的LED芯片及其制作方法LED chip with single-side light emission and manufacturing method thereof

技术领域Technical Field

本发明涉及LED芯片技术领域,特指一种单面出光的LED芯片及其制作方法。The invention relates to the technical field of LED chips, and in particular to a single-side light-emitting LED chip and a manufacturing method thereof.

背景技术Background technique

目前,LED芯片在光学编码器领域中的应用十分广泛,随着光学编码器对精度的追求越来越高,人们对应用于光学编码器的高精度光源的需求也在日益提升。At present, LED chips are widely used in the field of optical encoders. As optical encoders pursue higher and higher precision, people's demand for high-precision light sources used in optical encoders is also increasing.

现有的LED芯片如图1所示,包括一衬底91、设于衬底之上的反射层92、设于反射层之上的发光层93以及与发光层93电连接的电极94。在电极94的作用下,发光层93产生光,并且在反射层92的作用下,光朝向发光层93的上方和四周发散。As shown in FIG1 , an existing LED chip includes a substrate 91, a reflective layer 92 disposed on the substrate, a light-emitting layer 93 disposed on the reflective layer, and an electrode 94 electrically connected to the light-emitting layer 93. Under the action of the electrode 94, the light-emitting layer 93 generates light, and under the action of the reflective layer 92, the light is diffused toward the top and around the light-emitting layer 93.

而应用于光学编码器的高精度光源,要求LED芯片仅从上表面出光,现有的LED芯片显然无法达到高精度光源的要求。However, the high-precision light source used in optical encoders requires that the LED chip emit light only from the top surface. Existing LED chips obviously cannot meet the requirements of high-precision light sources.

发明内容Summary of the invention

本发明的目的在于克服现有技术的缺陷,提供一种单面出光的LED芯片及其制作方法,可以解决现有的LED芯片无法达到高精度光源的要求的问题。The purpose of the present invention is to overcome the defects of the prior art and provide a single-sided light emitting LED chip and a manufacturing method thereof, which can solve the problem that the existing LED chips cannot meet the requirements of high-precision light sources.

实现上述目的的技术方案是:The technical solution to achieve the above purpose is:

本发明提供了一种单面出光的LED芯片,包括:The present invention provides a single-side light emitting LED chip, comprising:

一衬底;a substrate;

设于所述衬底上表面的反射层;a reflective layer disposed on the upper surface of the substrate;

设于所述反射层上表面的发光层,所述发光层的侧面上覆有侧挡光层,且所述发光层的上表面靠近边缘处形成有沟槽,所述沟槽内填充有挡光材料;以及A light-emitting layer is disposed on the upper surface of the reflective layer, the side of the light-emitting layer is covered with a side light-blocking layer, and a groove is formed on the upper surface of the light-emitting layer near the edge, and the groove is filled with a light-blocking material; and

与所述发光层电连接的电极。An electrode electrically connected to the light emitting layer.

本发明的有益效果是,通过在发光层的侧面涂覆侧挡光层形成第一道挡光结构,且通过在发光层靠近边缘的沟槽内填充挡光材料形成第二道挡光结构,从而完全阻断光从发光层侧部漏出,确保发光层仅从上表面出光,符合光学编码器高精度光源的要求。The beneficial effect of the present invention is that a first light-blocking structure is formed by coating a side light-blocking layer on the side of the light-emitting layer, and a second light-blocking structure is formed by filling a light-blocking material in a groove near the edge of the light-emitting layer, thereby completely blocking light from leaking from the side of the light-emitting layer and ensuring that the light-emitting layer only emits light from the upper surface, which meets the requirements of high-precision light sources for optical encoders.

本发明单面出光的LED芯片的进一步改进在于,所述发光层的侧面为倾斜面。A further improvement of the LED chip with single-side light emission of the present invention is that the side surface of the light-emitting layer is an inclined surface.

本发明单面出光的LED芯片的进一步改进在于,所述倾斜面为圆弧形的凹面。A further improvement of the LED chip with single-side light emission of the present invention is that the inclined surface is a circular arc-shaped concave surface.

本发明单面出光的LED芯片的进一步改进在于,所述侧挡光层为吸光层,所述挡光材料为吸光材料。A further improvement of the LED chip with single-side light emission of the present invention is that the side light blocking layer is a light absorbing layer, and the light blocking material is a light absorbing material.

本发明单面出光的LED芯片的进一步改进在于,所述侧挡光层为金属反射层,所述挡光材料为金属反射材料。A further improvement of the LED chip with single-side light emission of the present invention is that the side light blocking layer is a metal reflective layer, and the light blocking material is a metal reflective material.

本发明单面出光的LED芯片的进一步改进在于,所述沟槽的底部位于所述发光层的底部。A further improvement of the LED chip with single-side light emission of the present invention is that the bottom of the groove is located at the bottom of the light-emitting layer.

本发明单面出光的LED芯片的进一步改进在于,所述发光层的上表面位于所述沟槽与所述发光层边缘之间的表面上涂覆有上挡光层,所述上挡光层的一侧与所述侧挡光层连接、所述上挡光层的另一侧与所述挡光材料连接。A further improvement of the single-sided light-emitting LED chip of the present invention is that an upper light-blocking layer is coated on the surface of the upper surface of the light-emitting layer between the groove and the edge of the light-emitting layer, one side of the upper light-blocking layer is connected to the side light-blocking layer, and the other side of the upper light-blocking layer is connected to the light-blocking material.

本发明还提供了一种单面出光的LED芯片的制作方法,包括:The present invention also provides a method for manufacturing a single-side light emitting LED chip, comprising:

提供一衬底;providing a substrate;

于所述衬底之上设置发光层,于所述发光层的侧面上涂覆侧挡光层;A light-emitting layer is arranged on the substrate, and a side light-blocking layer is coated on the side of the light-emitting layer;

于所述发光层的上表面靠近边缘处加工形成沟槽,并于所述沟槽内填充挡光材料;Processing a groove near the edge of the upper surface of the light-emitting layer, and filling the groove with a light-blocking material;

提供一电极,将所述电极与所述发光层电连接。An electrode is provided to electrically connect the electrode to the light emitting layer.

本发明单面出光的LED芯片的制作方法的进一步改进在于,还包括:A further improvement of the method for manufacturing a single-side light emitting LED chip of the present invention is that it further comprises:

加工使所述发光层的侧面向内倾斜形成倾斜面。The side surface of the light emitting layer is processed to be inclined inward to form an inclined surface.

本发明单面出光的LED芯片的制作方法的进一步改进在于,还包括:A further improvement of the method for manufacturing a single-side light emitting LED chip of the present invention is that it further comprises:

选取吸光层作为所述侧挡光层;选取吸光材料作为所述挡光材料。A light absorbing layer is selected as the side light blocking layer; and a light absorbing material is selected as the light blocking material.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1为现有的LED芯片的结构示意图。FIG. 1 is a schematic diagram showing the structure of an existing LED chip.

图2为本发明单面出光的LED芯片省略了挡光结构的示意图。FIG. 2 is a schematic diagram of a single-side light-emitting LED chip of the present invention with the light-shielding structure omitted.

图3为本发明单面出光的LED芯片的结构示意图。FIG. 3 is a schematic diagram of the structure of a single-side light-emitting LED chip of the present invention.

图4为本发明单面出光的LED芯片的俯视图。FIG. 4 is a top view of a single-side light emitting LED chip according to the present invention.

具体实施方式Detailed ways

下面结合附图和具体实施例对本发明作进一步说明。The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

参阅图3,本发明提供了一种单面出光的LED芯片及其制作方法,其发光层仅从上部出光,符合光学编码器高精度光源的要求,解决了现有的LED芯片无法达到高精度光源的要求的问题。下面结合附图对本发明单面出光的LED芯片进行说明。Referring to FIG3 , the present invention provides a single-sided light emitting LED chip and a manufacturing method thereof, wherein the light emitting layer emits light only from the upper portion, which meets the requirements of the optical encoder for a high-precision light source and solves the problem that the existing LED chip cannot meet the requirements for a high-precision light source. The single-sided light emitting LED chip of the present invention is described below in conjunction with the accompanying drawings.

结合图2至图4所示,本发明单面出光的LED芯片包括一衬底11、设于衬底上表面的DBR反射层12、设于DBR反射层上表面的发光层13以及设于发光层之上且与发光层电连接的电极14。As shown in Figures 2 to 4, the single-sided LED chip of the present invention includes a substrate 11, a DBR reflective layer 12 arranged on the upper surface of the substrate, a light-emitting layer 13 arranged on the upper surface of the DBR reflective layer, and an electrode 14 arranged on the light-emitting layer and electrically connected to the light-emitting layer.

其中,衬底11为GaAs衬底。发光层13包括N型半导体层、位于N型半导体层之上的本征半导体层以及位于本征半导体层之上的P型半导体层,且三者的材料均为GaAlAs。The substrate 11 is a GaAs substrate. The light emitting layer 13 includes an N-type semiconductor layer, an intrinsic semiconductor layer located on the N-type semiconductor layer, and a P-type semiconductor layer located on the intrinsic semiconductor layer, and the materials of the three are all GaAlAs.

发光层13的侧面上覆有侧挡光层21,从而防止发光层13的侧面漏光,形成第一道挡光结构。优选地,发光层13的侧面向内倾斜形成倾斜面131,且进一步地,该倾斜面131为圆弧形的凹面。通过将侧面设计为倾斜面,尤其是圆弧形的凹面,可以提高光在内部全反射的可能,且增加侧挡光层21的面积,更好地对侧面发出的光进行遮挡,防止光从侧面漏出。The side of the light-emitting layer 13 is covered with a side light-blocking layer 21, thereby preventing light leakage from the side of the light-emitting layer 13, forming a first light-blocking structure. Preferably, the side of the light-emitting layer 13 is inclined inward to form an inclined surface 131, and further, the inclined surface 131 is a circular arc-shaped concave surface. By designing the side surface as an inclined surface, especially a circular arc-shaped concave surface, the possibility of total internal reflection of light can be increased, and the area of the side light-blocking layer 21 can be increased, so as to better block the light emitted from the side and prevent light from leaking from the side.

发光层13的上表面靠近边缘处形成有沟槽132,沟槽132内填充有挡光材料22。通过沟槽132和挡光材料22形成第二道挡光结构,阻碍光线横向传至侧面。优选地,沟槽132的底部位于发光层13的底部,从而使得该处的发光层13完全被沟槽132隔断,进而使挡光材料22完全阻断光在横向方向的传播。且沟槽的侧壁133为圆弧面,增大挡光材料22与沟槽侧壁133的接触面积。A groove 132 is formed near the edge of the upper surface of the light-emitting layer 13, and the groove 132 is filled with a light-blocking material 22. The groove 132 and the light-blocking material 22 form a second light-blocking structure to prevent light from being transmitted laterally to the side. Preferably, the bottom of the groove 132 is located at the bottom of the light-emitting layer 13, so that the light-emitting layer 13 at this location is completely blocked by the groove 132, and the light-blocking material 22 completely blocks the propagation of light in the lateral direction. The side wall 133 of the groove is an arc surface, which increases the contact area between the light-blocking material 22 and the side wall 133 of the groove.

发光层13的上表面位于沟槽132与发光层边缘之间的表面为遮光面135,而其余的表面为出光面134。遮光面135上涂覆有上挡光层23,该上挡光层23的一侧与侧挡光层21连接、另一侧与挡光材料22连接。通过上挡光层23阻碍遮光面135上的出光,使侧面漏出光的量减至最少,光仅从连续的出光面134上射出。The upper surface of the light-emitting layer 13 between the groove 132 and the edge of the light-emitting layer is a light-shielding surface 135, and the remaining surface is a light-emitting surface 134. The light-shielding surface 135 is coated with an upper light-blocking layer 23, one side of which is connected to the side light-blocking layer 21, and the other side is connected to the light-blocking material 22. The upper light-blocking layer 23 blocks the light from the light-shielding surface 135, so that the amount of light leaking from the side is reduced to a minimum, and the light is emitted only from the continuous light-emitting surface 134.

在一较佳的实施方式中,侧挡光层21和上挡光层23为金属反射层,而挡光材料22为金属反射材料。使得发光层13内横向传播的光线经过金属反射层反射回发光层13而无法从侧面漏出。In a preferred embodiment, the side light blocking layer 21 and the upper light blocking layer 23 are metal reflective layers, and the light blocking material 22 is a metal reflective material, so that the light propagating laterally in the light emitting layer 13 is reflected back to the light emitting layer 13 through the metal reflective layer and cannot leak out from the side.

在另一较佳的实施方式中,侧挡光层21和上挡光层23为吸光层,而挡光材料22为吸光材料。使得发光层13内横向传播的光线经过吸光层吸收而无法从侧面漏出。采用吸光层和吸光材料时,由于完全吸收发光层13内横向传播的光线,可进一步使得出光面134上射出的光不经过任何反射而垂直射出,从而得到更佳的配光曲线。In another preferred embodiment, the side light blocking layer 21 and the upper light blocking layer 23 are light absorbing layers, and the light blocking material 22 is a light absorbing material. The light propagating laterally in the light emitting layer 13 is absorbed by the light absorbing layer and cannot leak out from the side. When the light absorbing layer and the light absorbing material are used, the light emitted from the light emitting surface 134 can be further emitted vertically without any reflection due to the complete absorption of the light propagating laterally in the light emitting layer 13, thereby obtaining a better light distribution curve.

下面结合附图对本发明单面出光的LED芯片的制作方法进行说明。The method for manufacturing the LED chip with single-side light emission of the present invention is described below with reference to the accompanying drawings.

结合图2至图4所示,本发明单面出光的LED芯片的制作方法包括以下步骤:2 to 4 , the method for manufacturing a single-side light emitting LED chip of the present invention comprises the following steps:

提供一衬底11;Providing a substrate 11;

于衬底上设置DBR反射层12,并于DBR反射层之上设置发光层13;A DBR reflective layer 12 is disposed on the substrate, and a light emitting layer 13 is disposed on the DBR reflective layer;

通过刻蚀或采样激光切割工艺使发光层13的侧面向内倾斜形成倾斜面131;优选地,该倾斜面131为圆弧形的凹面;The side surface of the light emitting layer 13 is tilted inwardly to form an inclined surface 131 by etching or sampling laser cutting process; preferably, the inclined surface 131 is an arc-shaped concave surface;

于该倾斜面131上涂覆侧挡光层21;优选地,选取吸光层或金属反射层作为侧挡光层21;A side light blocking layer 21 is coated on the inclined surface 131; preferably, a light absorbing layer or a metal reflective layer is selected as the side light blocking layer 21;

通过刻蚀或采样激光切割工艺在发光层13的上表面靠近边缘处形成沟槽132,并于沟槽132内填充挡光材料22;优选地,选取吸光材料或金属反射材料作为挡光材料22;A groove 132 is formed on the upper surface of the light-emitting layer 13 near the edge by etching or sampling laser cutting process, and a light-blocking material 22 is filled in the groove 132; preferably, a light-absorbing material or a metal reflective material is selected as the light-blocking material 22;

提供一电极14,将电极14置于发光层13之上并与发光层13电连接。An electrode 14 is provided, and the electrode 14 is placed on the light-emitting layer 13 and electrically connected to the light-emitting layer 13 .

本发明单面出光的LED芯片及其制作方法的有益效果为:The LED chip with single-side light emission and the manufacturing method thereof of the present invention have the following beneficial effects:

通过在发光层的侧面涂覆侧挡光层形成第一道挡光结构,且通过在发光层靠近边缘的沟槽内填充挡光材料形成第二道挡光结构,从而完全阻断光从发光层侧部漏出,确保发光层仅从上表面出光,符合光学编码器高精度光源的要求。The first light-blocking structure is formed by coating a side light-blocking layer on the side of the light-emitting layer, and the second light-blocking structure is formed by filling a light-blocking material in the groove near the edge of the light-emitting layer, thereby completely blocking light from leaking from the side of the light-emitting layer and ensuring that the light-emitting layer only emits light from the upper surface, which meets the requirements of high-precision light sources for optical encoders.

以上结合附图实施例对本发明进行了详细说明,本领域中普通技术人员可根据上述说明对本发明做出种种变化例。因而,实施例中的某些细节不应构成对本发明的限定,本发明将以所附权利要求书界定的范围作为本发明的保护范围。The present invention is described in detail above in conjunction with the embodiments of the accompanying drawings. A person skilled in the art can make various variations of the present invention according to the above description. Therefore, certain details in the embodiments should not constitute a limitation of the present invention, and the scope of protection of the present invention shall be defined by the scope of the attached claims.

Claims (9)

1.一种单面出光的LED芯片,其特征在于,包括:1. A single-side LED chip, comprising: 一衬底;a substrate; 设于所述衬底上表面的反射层;a reflective layer disposed on the upper surface of the substrate; 设于所述反射层上表面的发光层,所述发光层的侧面上覆有侧挡光层,且所述发光层内形成有沟槽,所述沟槽位于所述发光层的上表面靠近边缘处,所述沟槽内填充有挡光材料,所述发光层包括N型半导体层、位于N型半导体层之上的本征半导体层以及位于本征半导体层之上的P型半导体层,所述沟槽的底部位于所述发光层的底部并与所述反射层接触,从而使得该处的发光层完全被沟槽隔断;以及a light-emitting layer disposed on the upper surface of the reflective layer, the side of the light-emitting layer being covered with a side light-blocking layer, and a groove being formed in the light-emitting layer, the groove being located near the edge of the upper surface of the light-emitting layer, the groove being filled with a light-blocking material, the light-emitting layer comprising an N-type semiconductor layer, an intrinsic semiconductor layer located on the N-type semiconductor layer, and a P-type semiconductor layer located on the intrinsic semiconductor layer, the bottom of the groove being located at the bottom of the light-emitting layer and contacting the reflective layer, so that the light-emitting layer at this location is completely blocked by the groove; and 与所述发光层电连接的电极。An electrode electrically connected to the light emitting layer. 2.如权利要求1所述的单面出光的LED芯片,其特征在于,所述发光层的侧面向内倾斜形成倾斜面。2 . The single-sided light emitting LED chip according to claim 1 , wherein the side surface of the light emitting layer is inclined inward to form an inclined surface. 3.如权利要求2所述的单面出光的LED芯片,其特征在于,所述倾斜面为圆弧形的凹面。3 . The single-side light emitting LED chip according to claim 2 , wherein the inclined surface is an arc-shaped concave surface. 4.如权利要求1或2所述的单面出光的LED芯片,其特征在于,所述侧挡光层为吸光层;所述挡光材料为吸光材料。4. The single-sided light emitting LED chip according to claim 1 or 2, characterized in that the side light blocking layer is a light absorbing layer; and the light blocking material is a light absorbing material. 5.如权利要求1或2所述的单面出光的LED芯片,其特征在于,所述侧挡光层为金属反射层;所述挡光材料为金属反射材料。5. The single-sided light emitting LED chip according to claim 1 or 2, characterized in that the side light blocking layer is a metal reflective layer; and the light blocking material is a metal reflective material. 6.如权利要求1所述的单面出光的LED芯片,其特征在于,6. The single-side light emitting LED chip according to claim 1, characterized in that: 所述发光层的上表面位于所述沟槽与所述发光层边缘之间的表面上涂覆有上挡光层,所述上挡光层的一侧与所述侧挡光层连接、所述上挡光层的另一侧与所述挡光材料连接。An upper light-blocking layer is coated on the upper surface of the light-emitting layer between the groove and the edge of the light-emitting layer, one side of the upper light-blocking layer is connected to the side light-blocking layer, and the other side of the upper light-blocking layer is connected to the light-blocking material. 7.一种单面出光的LED芯片的制作方法,其特征在于,包括以下步骤:7. A method for manufacturing a single-side light emitting LED chip, characterized by comprising the following steps: 提供一衬底;providing a substrate; 于所述衬底之上设置反射层,于所述反射层上设发光层,于所述发光层的侧面涂覆侧挡光层,所述发光层包括N型半导体层、位于N型半导体层之上的本征半导体层以及位于本征半导体层之上的P型半导体层;A reflective layer is arranged on the substrate, a light-emitting layer is arranged on the reflective layer, and a side light-blocking layer is coated on the side of the light-emitting layer, wherein the light-emitting layer comprises an N-type semiconductor layer, an intrinsic semiconductor layer located on the N-type semiconductor layer, and a P-type semiconductor layer located on the intrinsic semiconductor layer; 于所述发光层内加工形成沟槽,使所述沟槽位于所述发光层的上表面靠近边缘处,并于所述沟槽内填充挡光材料,所述沟槽的底部位于所述发光层的底部并与所述反射层接触,从而使得该处的发光层完全被沟槽隔断;A groove is formed in the light-emitting layer so that the groove is located near the edge of the upper surface of the light-emitting layer, and a light-blocking material is filled in the groove. The bottom of the groove is located at the bottom of the light-emitting layer and contacts the reflective layer, so that the light-emitting layer at this location is completely blocked by the groove. 提供一电极,将所述电极与所述发光层电连接。An electrode is provided to electrically connect the electrode to the light emitting layer. 8.如权利要求7所述的单面出光的LED芯片的制作方法,其特征在于,还包括:8. The method for manufacturing a single-side light emitting LED chip according to claim 7, further comprising: 加工使所述发光层的侧面向内倾斜形成倾斜面。The side surface of the light emitting layer is processed to be inclined inward to form an inclined surface. 9.如权利要求7所述的单面出光的LED芯片的制作方法,其特征在于,还包括:9. The method for manufacturing a single-side light emitting LED chip according to claim 7, further comprising: 选取吸光层作为所述侧挡光层;选取吸光材料作为所述挡光材料。A light absorbing layer is selected as the side light blocking layer; and a light absorbing material is selected as the light blocking material.
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