CN108315800A - A kind of preparation method of the differential arc oxidation of magnesium/magnesium alloy-alumina composite coating - Google Patents
A kind of preparation method of the differential arc oxidation of magnesium/magnesium alloy-alumina composite coating Download PDFInfo
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Abstract
Description
技术领域technical field
本发明涉及涂层制备领域,具有涉及一种镁/镁合金的微弧氧化-氧化铝复合涂层的制备方法。The invention relates to the field of coating preparation, and relates to a preparation method of a magnesium/magnesium alloy micro-arc oxidation-alumina composite coating.
背景技术Background technique
镁及其合金具有重量轻、比强度高、抗震性好等特点,是新一代轻金属结构材料,在3C产品、汽车、高铁和航空航天领域具有广泛的应用前景。但是,镁合金过快的腐蚀速率依然是限制其应用的主要因素。镁的高活性造成镁合金结构件在使用过程中容易发生腐蚀。镁合金构件如与异种金属连结,则易于产生电偶腐蚀。因此,开发一种有效的防腐蚀涂层与技术是目前推进镁合金规模化应用亟待解决的难题。Magnesium and its alloys have the characteristics of light weight, high specific strength, and good shock resistance. They are a new generation of light metal structural materials and have broad application prospects in the fields of 3C products, automobiles, high-speed rail, and aerospace. However, the excessive corrosion rate of magnesium alloy is still the main factor limiting its application. The high activity of magnesium makes magnesium alloy structural parts prone to corrosion during use. If magnesium alloy components are connected with dissimilar metals, they are prone to galvanic corrosion. Therefore, developing an effective anti-corrosion coating and technology is an urgent problem to be solved in promoting the large-scale application of magnesium alloys.
目前,人们主要从两个方面着手来解决此问题。第一种思路是提高镁合金自身的耐蚀性,常用途径有:(1)制备高纯镁、(2)添加合金元素、(3)采用快速凝固等技术。第二种思路是对镁合金进行表面改性,包括阳极氧化、化学转化处理等。镁合金阳极氧化处理是最为有效的表面技术之一。镁合金阳极氧化是利用电化学的方法在镁合金基体表面形成一层稳定的氧化物膜层来提高镁合金的耐蚀性能。此氧化膜是在镁合金基体表面原位生长,所得膜层与基体具有优良的结合力。At present, people mainly start from two aspects to solve this problem. The first idea is to improve the corrosion resistance of magnesium alloy itself. The common ways are: (1) preparation of high-purity magnesium, (2) addition of alloying elements, (3) rapid solidification and other technologies. The second idea is to modify the surface of magnesium alloys, including anodic oxidation and chemical conversion treatment. Anodizing of magnesium alloys is one of the most effective surface techniques. Magnesium alloy anodic oxidation is to use electrochemical method to form a stable oxide film on the surface of magnesium alloy substrate to improve the corrosion resistance of magnesium alloy. The oxide film is grown in situ on the surface of the magnesium alloy substrate, and the obtained film layer has excellent bonding force with the substrate.
微弧氧化(Microarc oxidation,MAO)表面处理技术,又称等离子体电解液氧化(Plasma electrolytic oxidation,PEO),是指在阳极氧化的基础上,利用弧光放电增强并激活在阳极上发生的反应,从而在阀金属(Al、Ti和Mg)及其合金工件表面形成陶瓷膜的方法。或者说,通过调节电解液与电源参数,在微弧放电产生的瞬时高温作用下,在阀金属表面生长出以基体元素为主、辅以电解液组分的陶瓷膜层。此陶瓷层具有硬度高,制备方法简单的优点。Microarc oxidation (MAO) surface treatment technology, also known as plasma electrolyte oxidation (PEO), refers to the use of arc discharge to enhance and activate the reaction on the anode on the basis of anodic oxidation. A method for forming a ceramic film on the surface of valve metals (Al, Ti and Mg) and their alloy workpieces. In other words, by adjusting the parameters of the electrolyte and the power supply, under the action of the instantaneous high temperature generated by the micro-arc discharge, a ceramic film layer consisting mainly of matrix elements and supplemented by electrolyte components is grown on the surface of the valve metal. The ceramic layer has the advantages of high hardness and simple preparation method.
目前,镁合金微弧氧化技术发展较快,从电解液及工艺来看,正在向着节能、绿色和环保的方向不断的发展,其发展过程主要经历了三个阶段:At present, magnesium alloy micro-arc oxidation technology is developing rapidly. From the perspective of electrolyte and process, it is constantly developing in the direction of energy saving, green and environmental protection. Its development process has mainly gone through three stages:
一、20世纪50年代微弧氧化开始应用到镁合金领域。一般以碱性电解液为主,主要问题是电解液都含有六价铬离子,对环境危害严重;1. In the 1950s, micro-arc oxidation began to be applied to the field of magnesium alloys. Generally, alkaline electrolyte is the main solution. The main problem is that the electrolyte contains hexavalent chromium ions, which is seriously harmful to the environment;
二、从20世纪80年代开始使用氟离子作为电解液主要成分。氟离子仍然对环境危害较大,对操作者产生潜在的安全危害;Second, since the 1980s, fluoride ions have been used as the main component of the electrolyte. Fluoride ions are still harmful to the environment and pose potential safety hazards to operators;
三、21世纪初期以来,绿色、环保的镁合金微弧氧化电解液成为了研究的重点。一般地,在碱性电解液的基础体系中加入各种添加剂来改善膜层的性能。添加剂主要包括在铝酸系、硅酸系和磷酸系三类。其中,铝酸系能促进氧化膜层的生长,形成致密膜层,降低自腐蚀电流,从而提高耐蚀性。但是,铝酸系电解液不易控制,溶液易浑浊,严重影响成膜效果。硅酸系电解液稳定,能促进基体合金的氧化,并形成难溶的化合物,但是需要设备电压比较高,功耗大,能耗高。磷酸系电解液可在较低电压下制备,形成的氧化膜层致密稳定。3. Since the beginning of the 21st century, the green and environment-friendly magnesium alloy micro-arc oxidation electrolyte has become the focus of research. Generally, various additives are added to the basic system of alkaline electrolyte to improve the performance of the film layer. Additives mainly include three types: aluminate, silicic acid and phosphoric acid. Among them, the aluminum acid system can promote the growth of the oxide film layer, form a dense film layer, reduce the self-corrosion current, and thus improve the corrosion resistance. However, the alumina-based electrolyte is not easy to control, and the solution is easily turbid, which seriously affects the film-forming effect. The silicic acid-based electrolyte is stable, can promote the oxidation of the matrix alloy, and form insoluble compounds, but requires relatively high equipment voltage, high power consumption, and high energy consumption. Phosphate-based electrolytes can be prepared at lower voltages, and the formed oxide film is dense and stable.
然而,镁合金在由无机盐组成的环保型电解液中进行阳极氧化处理时易出现破坏性火花放电现象,使得氧化膜表面粗糙度大,微孔分布不均且孔径较大,同时出现通孔、微裂纹和局部烧蚀。利用这些电解液制备出的微弧氧化层具有比较高的孔隙率和明显的微裂纹和一定数量的通孔,导致长期耐蚀性能较差,从而降低阳极氧化膜结构件的使用寿命。However, magnesium alloys are prone to destructive spark discharges when they are anodized in an environmentally friendly electrolyte composed of inorganic salts, resulting in large surface roughness of the oxide film, uneven distribution of micropores and large pore diameters, and the appearance of through holes. , microcracks and localized ablation. The micro-arc oxidation layer prepared by using these electrolytes has relatively high porosity, obvious micro-cracks and a certain number of through holes, resulting in poor long-term corrosion resistance, thereby reducing the service life of anodized film structural parts.
研究发现,有机添加剂如三乙醇胺、乙二胺四乙酸(EDTA)、氨基酸类等可抑制火花放电,提高氧化膜的击穿电压,增加氧化膜的厚度和表面光洁度。例如,L-鸟氨酸醋酸盐在碱性阳极氧化电解液中能够和Mg表面通过δ-NH2的N原子(Mg-N)和羧基的O原子(Mg-O)之间形成配位键而产生很强的化学吸附(沟引宁,稀有金属材料与工程,2017,4:1103)。Studies have found that organic additives such as triethanolamine, ethylenediaminetetraacetic acid (EDTA), and amino acids can inhibit spark discharge, increase the breakdown voltage of the oxide film, and increase the thickness and surface finish of the oxide film. For example, L-ornithine acetate can form a coordination bond with the Mg surface through the N atom (Mg-N) of δ-NH2 and the O atom (Mg-O) of the carboxyl group in the alkaline anodizing electrolyte. And produce strong chemical adsorption (Gou Yining, Rare Metal Materials and Engineering, 2017, 4: 1103).
值得注意的是,镁合金表面微弧氧化膜存在微孔和微裂纹的,需要通过封孔等后处理来进一步提高膜层的耐蚀性能和保护作用。目前,有多种方式来对微弧氧化膜层进行封孔处理。镁合金氧化膜封孔方法按照原理来分主要有水合反应、碱处理、无机物填充和有机物填充等。It is worth noting that there are micropores and microcracks in the micro-arc oxidation film on the surface of magnesium alloy, and post-treatment such as hole sealing is required to further improve the corrosion resistance and protective effect of the film layer. At present, there are many ways to seal the pores of the micro-arc oxidation film layer. According to the principle, the sealing methods of magnesium alloy oxide film mainly include hydration reaction, alkali treatment, inorganic filling and organic filling.
水合反应和碱处理是将阳极氧化膜在沸水或者碱性溶液(如氢氧化钠、NaHCO3)中处理,形成氢氧化物(如氢氧化镁)、产生体积膨胀,从而达到封孔的目的。此类处理效果非常有限。因为在干燥环境中,氢氧化镁也可失去水分子变成氧化膜,孔径又恢复到原始尺寸。Hydration reaction and alkali treatment are to treat the anodized film in boiling water or alkaline solution (such as sodium hydroxide, NaHCO3) to form hydroxide (such as magnesium hydroxide) and produce volume expansion, so as to achieve the purpose of sealing. Such treatments have very limited effects. Because in a dry environment, magnesium hydroxide can also lose water molecules to form an oxide film, and the pore size returns to its original size.
无机物填充一般采用封孔剂,包括铬酸盐、硅酸盐、磷酸盐和溶胶-凝胶。铬酸盐工艺如HAE虽然耐蚀性能好,但六价铬具有毒性,易于致癌。硅酸盐封孔又称水玻璃封孔。硅酸盐和磷酸盐比较环保。但硅酸盐封孔因水玻璃较软,不能保持陶瓷膜的高硬度。溶胶-凝胶为物理封孔。有机物涂层的种类可分为石蜡系列、热可塑性树脂系列如乙烯树脂、热硬化性树脂系列如环氧树脂、氟树脂系列如聚四氟乙烯树脂、有机高分子系列如硅树脂等。有机物涂层是物理封孔方法,受氧化膜和涂层材料润湿性的影响。需要选择浸润程度大的封孔剂,这样它们能深入地渗透到氧化膜孔洞里面,另一方面考虑到表面现象的作用,涂层的表面张力应该比较小,这样有利于涂层在氧化膜表面的铺展和涂层通过毛细作用进入氧化膜的孔洞内部。Inorganic fillings generally use sealing agents, including chromates, silicates, phosphates, and sol-gels. Although chromate process such as HAE has good corrosion resistance, hexavalent chromium is toxic and easy to cause cancer. Silicate sealing is also called water glass sealing. Silicates and phosphates are more environmentally friendly. However, the silicate sealing can not maintain the high hardness of the ceramic membrane because the water glass is soft. Sol-gel is a physical sealer. The types of organic coatings can be divided into paraffin series, thermoplastic resin series such as vinyl resin, thermosetting resin series such as epoxy resin, fluororesin series such as polytetrafluoroethylene resin, organic polymer series such as silicone resin, etc. Organic coating is a physical sealing method, which is affected by the wettability of oxide film and coating material. It is necessary to choose a sealing agent with a large degree of wetting, so that they can penetrate deeply into the pores of the oxide film. On the other hand, considering the effect of surface phenomena, the surface tension of the coating should be relatively small, which is conducive to the coating on the surface of the oxide film. The spreading and coating enter the pores of the oxide film through capillary action.
中国专利《镁合金微弧氧化膜的封孔方法》(201510076185.9)首先配置PVDF溶液,然后加入原硅酸钠、氢氧化钾或氢氧化钠,再选择性加入过氧化二苯甲酰(BPO)和二乙烯苯DVB,经过浸泡,干燥后制得。中国专利《一种在镁合金微弧氧化陶瓷层表面构建超疏水膜层的方法》(201510527099.5)采用氟硅烷进行修饰固化。中国专利《医用镁合金表面植酸微弧阳极氧化膜及聚乳酸涂层及工艺》(201210184704.X)介绍了镁合金阳极氧化膜表面聚乳酸膜封孔的方法,通过冷冻干燥在阳极氧化膜上形成多孔的聚乳酸膜。但曾荣昌等(ACSApplied Materials & Interfaces,2016,8:10014)研究表明,植酸微弧阳极氧化膜在模拟体液(hank's)中的有效寿命仅为50多小时。且浸泡140小时后聚乳酸膜出现鼓泡脱落现象。主要原因是有机涂层聚乳酸具有较高的透水率,且与阳极氧化膜的结合为机械结合或物理结合,因而结合力较弱。这些方法虽然有一定的保护作用,但是膜层较厚,结合力不强,容易脱落,对于有机涂层而言还会有水解过快,不能起到长期保护的作用。Chinese patent "Sealing Method of Magnesium Alloy Micro-arc Oxidation Film" (201510076185.9) first configure PVDF solution, then add sodium orthosilicate, potassium hydroxide or sodium hydroxide, and then selectively add dibenzoyl peroxide (BPO) And divinylbenzene DVB, after soaking and drying the system. The Chinese patent "A Method for Constructing a Superhydrophobic Film on the Surface of a Magnesium Alloy Micro-arc Oxidation Ceramic Layer" (201510527099.5) uses fluorosilane for modification and curing. The Chinese patent "Phytic acid micro-arc anodic oxidation film and polylactic acid coating and process on the surface of magnesium alloy for medical use" (201210184704.X) introduces the method of sealing the polylactic acid film on the surface of the anodic oxidation film of magnesium alloy. A porous polylactic acid film was formed on it. However, Zeng Rongchang et al. (ACS Applied Materials & Interfaces, 2016, 8:10014) showed that the effective life of phytic acid micro-arc anodic oxidation film in simulated body fluid (hank's) is only more than 50 hours. And after soaking for 140 hours, the polylactic acid film appeared bubbling and shedding phenomenon. The main reason is that the organic coating polylactic acid has a high water permeability, and the combination with the anodized film is mechanical or physical, so the binding force is weak. Although these methods have a certain protective effect, the film layer is thicker, the binding force is not strong, and it is easy to fall off. For the organic coating, the hydrolysis is too fast, so it cannot play the role of long-term protection.
原子层沉积(Atomic Layer Deposition,ALD)技术的特点是一种自我限制的表面生长方式。原子层沉积可以实现薄膜厚度在单原子层量级的可控,在纵横比很大的三维结构上可实现100%均匀和保形的薄膜覆盖。Atomic Layer Deposition (ALD) technology is characterized by a self-limiting surface growth method. Atomic layer deposition can achieve controllable film thickness at the level of single atomic layer, and can achieve 100% uniform and conformal film coverage on three-dimensional structures with large aspect ratios.
原子层沉积技术之前主要用于半导体领域,制备高K材料(即高介电常数材料)和IC(integrated circuit集成电路)互联技术,目前还没有检索到利用原子层沉积技术封孔镁合金微弧氧化的专利,不过有文献(Nanoscale,2017年第9期)报道,利用原子层沉积技术在多孔表面沉积Zn-Al-O的涂层,这种涂层具有结构致密的特点,但是对耐蚀性的提高微乎其微。因此,为了进一步提高微弧氧化的性能,遴选效果更好的原子层沉积工艺还是非常有必要的。Atomic layer deposition technology was mainly used in the field of semiconductors to prepare high-K materials (that is, high dielectric constant materials) and IC (integrated circuit integrated circuit) interconnection technology. At present, there is no search for using atomic layer deposition technology to seal holes in magnesium alloys. Oxidation patents, but there are reports (Nanoscale, 2017 No. 9) that use atomic layer deposition technology to deposit Zn-Al-O coatings on porous surfaces. This coating has the characteristics of compact structure, but it is harmful to corrosion resistance Sexual improvements are negligible. Therefore, in order to further improve the performance of micro-arc oxidation, it is necessary to select an atomic layer deposition process with better effect.
发明内容Contents of the invention
为解决镁/镁合金服役时间短,微弧氧化层耐蚀性差,无法满足生产的需要的问题,本发明提供了一种镁/镁合金的微弧阳极氧化-氧化铝复合涂层的制备方法。本发明主要是提供了(1)一种最优植酸-葡萄糖复配电解液,并提供最佳的陈化时间;(2)一种更好,更简单的原子层沉积工艺方法,以提供更好的保护作用。In order to solve the problem that the service time of magnesium/magnesium alloy is short, the corrosion resistance of the micro-arc oxidation layer is poor, and it cannot meet the needs of production, the invention provides a method for preparing a micro-arc anodic oxidation-alumina composite coating of magnesium/magnesium alloy . The present invention mainly provides (1) a kind of optimum phytic acid-glucose composite electrolyte, and provides optimum aging time; (2) a kind of better, simpler atomic layer deposition process method, with Provide better protection.
本发明中使用到的植酸(Phytic acid)(俗称肌醇六磷酸,分子式为C6H18O24P6)也属于磷酸系的主要成分,来源环保,用途广泛。弱酸性的植酸在提供磷酸根的同时对镁合金基体的损伤及微弧氧化膜的腐蚀程度都较小,形成的氧化膜质量比较致密,具有较好的耐蚀性。葡萄糖(化学式C6H12O6)广泛存在于植物淀粉和纤维素中,是自然界分布最广且最为重要的一种单糖,它是一种多羟基醛,含有五个羟基和一个醛基,这种结构导致它容易与其它分子吸附。基于以上论述,可以假设在含植酸和葡萄糖复配的电解液中,镁合金微弧氧化膜的耐蚀性能将比在植酸或者葡萄糖溶液中的好。这里需要考虑的主要技术参数包括植酸与葡萄糖的配比、pH值和电解液陈化时间等。Phytic acid (commonly known as phytic acid, molecular formula C 6 H 18 O 24 P 6 ) used in the present invention also belongs to the main component of phosphoric acid system, which is environmentally friendly and widely used. The weakly acidic phytic acid provides phosphate radicals, and at the same time, the damage to the magnesium alloy substrate and the corrosion degree of the micro-arc oxidation film are small, and the quality of the formed oxide film is relatively dense and has good corrosion resistance. Glucose (chemical formula C 6 H 12 O 6 ) widely exists in plant starch and cellulose, and is the most widely distributed and most important monosaccharide in nature. It is a polyhydroxy aldehyde containing five hydroxyl groups and one aldehyde group , this structure makes it easy to adsorb with other molecules. Based on the above discussion, it can be assumed that in the electrolyte solution containing phytic acid and glucose, the corrosion resistance of magnesium alloy MAO coating will be better than that in phytic acid or glucose solution. The main technical parameters that need to be considered here include the ratio of phytic acid to glucose, pH value, and electrolyte aging time.
原子层沉积将一个完整的反应拆分成两步来进行,依次分别向腔室内通入两种不同的前驱体源,通过过饱和吸附和化学反应实现原子级别的逐层生长。因为每个半反应都是化学结合,所以原子层沉积膜层具有纳米尺度、强的结合力,高的致密性,高三维保型性的特点。此膜层即可封堵微裂纹,提高耐蚀性能,还能保留微弧氧化多孔层的功能性。本发明选用氧化铝作为修饰层,主要因为相比较于同系列的氧化物(如:氧化钽,氧化镁,氧化锌等),氧化铝是原子层沉积技术最容易沉积的,原料易得,制备条件简单,生长速率快,制备的氧化铝层致密无污染。Atomic layer deposition splits a complete reaction into two steps. Two different precursor sources are fed into the chamber in turn, and layer-by-layer growth at the atomic level is achieved through supersaturated adsorption and chemical reaction. Because each half-reaction is a chemical combination, the atomic layer deposition film has the characteristics of nanoscale, strong binding force, high density, and high three-dimensional shape retention. This film layer can block microcracks, improve corrosion resistance, and retain the functionality of the micro-arc oxidation porous layer. The present invention selects aluminum oxide as the modification layer, mainly because compared with oxides of the same series (such as: tantalum oxide, magnesium oxide, zinc oxide, etc.), aluminum oxide is the easiest to deposit by atomic layer deposition technology, and the raw material is easy to get, and the preparation The conditions are simple, the growth rate is fast, and the prepared alumina layer is dense and pollution-free.
本发明采取以下技术方案:The present invention takes the following technical solutions:
一种镁/镁合金的微弧氧化-氧化铝复合涂层的制备方法,包括以下步骤:A method for preparing a magnesium/magnesium alloy micro-arc oxidation-alumina composite coating, comprising the following steps:
(1)将镁或镁合金基体依次经过机械打磨、氢氧化钠溶液和去离子水中清洗,在暖空气中快速吹干,去除基体表面的氧化物和杂质;(1) The magnesium or magnesium alloy substrate is sequentially mechanically polished, washed with sodium hydroxide solution and deionized water, and quickly dried in warm air to remove oxides and impurities on the surface of the substrate;
(2)配置植酸、氢氧化钠、葡萄糖的微弧氧化电解液溶液,陈化备用;(2) Configure the micro-arc oxidation electrolyte solution of phytic acid, sodium hydroxide, and glucose, and age it for subsequent use;
(3)将经过前处理的镁/镁合金夹在电极上,浸入电解液溶液中后,在恒定电流的情况下缓慢升高电压,在镁/镁合金表面生长微弧氧化陶瓷层;(3) Clamp the pretreated magnesium/magnesium alloy on the electrode, immerse in the electrolyte solution, slowly increase the voltage under the condition of constant current, and grow a micro-arc oxidation ceramic layer on the surface of the magnesium/magnesium alloy;
(4)当电压升到最大后,电流降到0.02A以下时,微弧氧化陶瓷层制备结束,切断电源,取出样品,在去离子水中清洗,吹干备用;(4) When the voltage rises to the maximum and the current drops below 0.02A, the preparation of the micro-arc oxidation ceramic layer is completed, the power is cut off, the sample is taken out, cleaned in deionized water, and dried for later use;
(5)将步骤(4)所得样品置于原子层沉积设备反应腔中,密封腔室,通入氮气或氩气惰性气体并抽真空,将温度逐渐升高到反应温度,腔室压力控制在0.1-1.0Torr,温度控制在80-150℃,在镁/镁合金表面生长的微弧氧化陶瓷层上进行原子层沉积生长;(5) The sample obtained in step (4) is placed in the reaction chamber of the atomic layer deposition equipment, the chamber is sealed, nitrogen or argon inert gas is introduced and vacuumized, the temperature is gradually raised to the reaction temperature, and the chamber pressure is controlled at 0.1-1.0 Torr, the temperature is controlled at 80-150°C, and atomic layer deposition is grown on the micro-arc oxidation ceramic layer grown on the surface of magnesium/magnesium alloy;
所述原子层沉积生长的一个周期包括以下四个环节:①向反应腔中通入第一种反应前驱体三甲基铝,通入时间为t1,在腔室中与样品发生过饱和吸附,发生化学反应释放副产物;②停止通入第一种反应前驱体,惰性载气将过量的前驱体和副产物清洗干净,载气吹扫时间为t2;③向反应腔室中通入第二种反应前驱体,通入时间为t3,与第一种前驱体反应释放副产物;④停止通入第二种反应前驱体,惰性载气将过量的前驱体和副产物清洗干净,载气吹扫时间为t4。A cycle of the atomic layer deposition growth includes the following four links: 1. The first reaction precursor, trimethylaluminum, is introduced into the reaction chamber for a time of t1, and supersaturated adsorption occurs with the sample in the chamber. A chemical reaction occurs to release by-products; ② Stop feeding the first reaction precursor, the inert carrier gas will clean up the excess precursor and by-products, and the carrier gas purging time is t2; The first reaction precursor is introduced at t3, which reacts with the first precursor to release by-products; ④ stop feeding the second reaction precursor, the inert carrier gas will clean up the excess precursor and by-products, and the carrier gas will blow The sweep time is t4.
优选地,步骤(1)中所述机械打磨是利用水磨砂纸打磨至1500目以上。Preferably, the mechanical polishing in step (1) is to use water-grinding sandpaper to polish to more than 1500 mesh.
优选地,步骤(2)中所述微弧氧化电解液溶液中植酸、氢氧化钠、葡萄糖的浓度依次为5-10g/L、6.25-12.5g/L、8-12g/L。Preferably, the concentrations of phytic acid, sodium hydroxide, and glucose in the micro-arc oxidation electrolyte solution in step (2) are 5-10 g/L, 6.25-12.5 g/L, and 8-12 g/L in sequence.
优选地,植酸与氢氧化钠的重量比为4:5,最终电解液pH为9.5-11。Preferably, the weight ratio of phytic acid to sodium hydroxide is 4:5, and the pH of the final electrolyte is 9.5-11.
优选地,步骤(2)中所述陈化的时间为0-48小时。Preferably, the aging time in step (2) is 0-48 hours.
优选地,步骤(2)中所述陈化的时间为12-24小时。Preferably, the aging time in step (2) is 12-24 hours.
优选地,步骤(3)中所述恒定电流为0.1-0.25A。Preferably, the constant current in step (3) is 0.1-0.25A.
优选地,步骤(4)中所述电压为200-350V。Preferably, the voltage in step (4) is 200-350V.
优选地,步骤(5)中所述第二种反应前躯体为超纯水、双氧水、氧气或臭氧。Preferably, the second reaction precursor in step (5) is ultrapure water, hydrogen peroxide, oxygen or ozone.
优选地,步骤(5)中所述原子层沉积生长过程中的四个环节的时间分别为t1:0.015-0.1s、t2:10-120s、t3:0.015-0.2s、t4:10-120s。Preferably, the time of the four links in the atomic layer deposition growth process in step (5) is t1: 0.015-0.1s, t2: 10-120s, t3: 0.015-0.2s, t4: 10-120s.
优选地,步骤(5)中所述原子层沉积生长的周期数为1-5000。Preferably, the number of cycles of atomic layer deposition growth in step (5) is 1-5000.
相对于现有技术本发明的有益效果是:Compared with the beneficial effects of the prior art the present invention is:
(1)将现有的微弧氧化技术与原子层沉积技术巧妙地结合在一起,利用原子层沉积技术的高结合力和三维保型性,制备出具有强结合力和致密的复合涂层,同时可以保留微结构并起到很好的耐蚀效果;(2)微弧氧化电解液溶液中含有植酸和葡萄糖,可以有效降低微弧氧化过程中电解液的起弧电压,植酸和葡萄糖复配具有更高的耐蚀性能,葡萄糖在植酸的电解液中具有进一步抑制火花放电,使得氧化膜致密,微孔分布均匀及孔径变小,与未添加葡萄糖所形成的氧化膜相比,具有很好的性能,这主要是葡萄糖分子中具有较多含孤对电子的羟基,能与镁离子的空轨道结合,有效吸附于镁合金表面,形成吸附层,能更为有效地抑制火花放电,减少因火花放电形成的大孔的出现,使得微弧氧化涂层表面微孔数量降低,微孔的尺寸有所减小;(3)采用原子层沉积技术在微弧氧化多孔层上沉积的氧化铝膜层,具有极佳的表面覆盖性、三维保型性;(4)纳米级膜层的厚度精确可控,能够对微弧氧化的裂纹缺陷完全覆盖,从而起到保护的作用。(1) Ingeniously combine the existing micro-arc oxidation technology with atomic layer deposition technology, and use the high bonding force and three-dimensional shape retention of atomic layer deposition technology to prepare a composite coating with strong bonding force and density, At the same time, it can retain the microstructure and play a good corrosion resistance effect; (2) The micro-arc oxidation electrolyte solution contains phytic acid and glucose, which can effectively reduce the arcing voltage of the electrolyte during the micro-arc oxidation process, and the phytic acid and glucose The compound has higher corrosion resistance. Glucose can further inhibit spark discharge in the phytic acid electrolyte, making the oxide film dense, with uniform micropore distribution and smaller pore size. Compared with the oxide film formed without adding glucose, It has very good performance, which is mainly due to the fact that there are more hydroxyl groups containing lone pair electrons in the glucose molecule, which can combine with the empty orbitals of magnesium ions, effectively adsorb on the surface of magnesium alloys, and form an adsorption layer, which can more effectively suppress spark discharge , to reduce the appearance of macropores formed by spark discharge, so that the number of micropores on the surface of the microarc oxidation coating is reduced, and the size of the micropores is reduced; (3) the atomic layer deposition technology is used to deposit on the microarc oxidation porous layer The aluminum oxide film layer has excellent surface coverage and three-dimensional shape retention; (4) The thickness of the nanoscale film layer is accurately and controllable, which can completely cover the crack defects of micro-arc oxidation, thereby playing a protective role.
附图说明Description of drawings
图1为实施例1与实施例2所制备的微弧氧化涂层极化曲线对比图。Fig. 1 is a graph comparing the polarization curves of the micro-arc oxidation coatings prepared in Example 1 and Example 2.
图2为实施例1与实施例2所制备的微弧氧化涂层的交流阻抗Bode对比图。FIG. 2 is a comparison chart of AC impedance Bode of the micro-arc oxidation coatings prepared in Example 1 and Example 2.
图3为实施例2所制备的MAO和MAO/Al2O3表观微观形貌SEM对比图。Fig. 3 is a SEM comparison diagram of the microscopic morphology of MAO prepared in Example 2 and MAO/Al 2 O 3 .
图4为实施例2所制备的MAO、MAO/Al2O3复合涂层的样品与AZ31基体在氯化钠溶液中的极化曲线对比图。Fig. 4 is a comparison diagram of the polarization curves of MAO, MAO/Al 2 O 3 composite coating samples prepared in Example 2 and AZ31 substrate in sodium chloride solution.
图5为实施例2所制备的MAO、MAO/Al2O3复合涂层的样品与AZ31基体在氯化钠溶液中的交流阻抗Bode对比图。Fig. 5 is a comparison chart of AC impedance Bode of MAO, MAO/Al 2 O 3 composite coating samples prepared in Example 2 and AZ31 substrate in sodium chloride solution.
图6为实施例2所制备的MAO/Al2O3复合涂层的样品与AZ31基体在氯化钠溶液中析氢速率对比图。Fig. 6 is a comparison chart of the hydrogen evolution rate between the MAO/Al 2 O 3 composite coating sample prepared in Example 2 and the AZ31 substrate in sodium chloride solution.
图7为实施例2所制备的MAO、MAO/Al2O3复合涂层的样品与AZ31基体在氯化钠溶液中浸泡14天后宏观形貌对比图。Fig. 7 is a comparison diagram of the macroscopic morphology of the MAO, MAO/Al 2 O 3 composite coating samples prepared in Example 2 and the AZ31 substrate soaked in sodium chloride solution for 14 days.
其中,图3中a为MAO(只经微弧氧化处理的涂层)的表观微观形貌图,b为MAO/Al2O3(经微弧氧化处理后又进行原子层沉积氧化铝层的复合涂层)的表观微观形貌图;图7中a为AZ31基体在氯化钠溶液中浸泡两周后宏观形貌图,b为MAO(只经微弧氧化处理的涂层)在氯化钠溶液中浸泡两周后宏观形貌图,c为MAO/Al2O3(经微弧氧化处理后又进行原子层沉积氧化铝层的复合涂层)在氯化钠溶液中浸泡两周后宏观形貌图。Among them, in Fig. 3, a is the microscopic appearance diagram of MAO (coating treated only by micro-arc oxidation), b is MAO/Al 2 O 3 (after micro-arc oxidation treatment, atomic layer deposition aluminum oxide layer Composite coating) in Figure 7; a is the macroscopic appearance of the AZ31 substrate soaked in sodium chloride solution for two weeks, and b is the MAO (coating only treated by micro-arc oxidation) The macroscopic image after soaking in sodium chloride solution for two weeks, c is the composite coating of MAO/Al 2 O 3 (a composite coating of atomic layer deposition aluminum oxide layer after micro-arc oxidation treatment) soaked in sodium chloride solution for two weeks Macroscopic image after one week.
具体实施方式Detailed ways
原子层沉积(Atomic Layer Deposition,简称ALD)技术是一种纳米结构制造与表面修饰的技术,该技术是依据自下而上的组装思想,通过周期性控制气态反应前驱体与基体材料过饱和化学吸附,反应,实现原子级精度的可控薄膜的生长,ALD技术独特的高覆盖性,使得该技术可以用到多孔材料中,起到高深度可覆盖的作用。本发明采用ALD技术对多孔的微弧氧化(Microarc oxidation,MAO)涂层进行表面修饰,在一定沉积周期内,得到完整、均匀的包覆膜,并且依然保留多孔层的微结构不变。Atomic Layer Deposition (ALD) technology is a nanostructure manufacturing and surface modification technology, which is based on the idea of bottom-up assembly, through periodic control of gaseous reaction precursors and matrix material supersaturated chemistry Adsorption, reaction, and growth of controllable thin films with atomic-level precision are realized. The unique high coverage of ALD technology allows this technology to be used in porous materials to play a role in high-depth coverage. The present invention uses ALD technology to modify the surface of the porous microarc oxidation (MAO) coating, and within a certain deposition period, a complete and uniform coating film is obtained, and the microstructure of the porous layer remains unchanged.
经过大量的实验验证,MAO的性能会随着微弧氧化电解液溶液的陈化的时间,先升高后降低,最佳时间为12-24小时(25℃),MAO多孔层上包裹原子层沉积的膜层性能,随着原子层沉积周期的延长其性能逐渐提高。对于本发明所涉及的包覆材料,每个原子层沉积周期生成的膜层厚度在0.08-0.13nm之间。通过重复进行一定周期的原子层沉积,就可以很好的保护MAO多孔层。After a large number of experimental verifications, the performance of MAO will first increase and then decrease with the aging time of the micro-arc oxidation electrolyte solution. The best time is 12-24 hours (25°C), and the atomic layer is wrapped on the MAO porous layer. The performance of the deposited film is gradually improved with the prolongation of the atomic layer deposition cycle. For the cladding material involved in the present invention, the thickness of the film layer formed by each atomic layer deposition cycle is between 0.08-0.13nm. By repeating a certain period of atomic layer deposition, the MAO porous layer can be well protected.
上述原子层沉积所使用的仪器是嘉兴科民电子设备与仪器公司,型号:KemicroT-ALD-150A。The instrument used for the above atomic layer deposition is Jiaxing Kemin Electronic Equipment and Instrument Company, model: KmicroT-ALD-150A.
下面结合附图和实施例对本发明进行详细说明。The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.
实施例1:Example 1:
(1)通过微弧氧化方法在AZ31表面制备MAO涂层,具体步骤为:将AZ31基体依次使用150#,400#,800#,1200#,1500#的水磨砂纸机械打磨,依次经过1mol/L氢氧化钠溶液和去离子水清洗,在暖空气中快速吹干,去除表面的氧化物和杂质;(1) Prepare MAO coating on the surface of AZ31 by micro-arc oxidation method. The specific steps are: use 150#, 400#, 800#, 1200#, 1500# water-grinding sandpaper to mechanically polish the AZ31 substrate, and then pass through 1mol/L Wash with sodium hydroxide solution and deionized water, and quickly dry in warm air to remove oxides and impurities on the surface;
(2)配置植酸、氢氧化钠、葡萄糖的微弧氧化电解液溶液,浓度依次为8g/L、10g/L、0g/L(即不添加葡萄糖),植酸与氢氧化钠质量比为4:5,电解液pH为10,25℃下陈化24h备用;(2) Configure the micro-arc oxidation electrolyte solution of phytic acid, sodium hydroxide and glucose, the concentration is 8g/L, 10g/L, 0g/L (i.e. without adding glucose), the mass ratio of phytic acid and sodium hydroxide is 4:5, the pH of the electrolyte is 10, aged at 25°C for 24 hours for later use;
(3)将AZ31基体夹在电极上,浸入电解液中后,在恒定电流0.2A的情况下缓慢升高电压至220V,生长微弧氧化陶瓷层;(3) Clamp the AZ31 substrate on the electrode, after immersing in the electrolyte, slowly increase the voltage to 220V under the condition of a constant current of 0.2A, and grow the micro-arc oxidation ceramic layer;
(4)微弧氧化陶瓷层制备结束,切断电源,取出样品,在去离子水中清洗,吹干备用;(4) After the preparation of the micro-arc oxidation ceramic layer is completed, the power is cut off, the sample is taken out, cleaned in deionized water, and dried for later use;
(5)将样品置于原子层沉积设备反应腔中,进行氧化铝纳米膜层的制备;(5) The sample is placed in the reaction chamber of the atomic layer deposition equipment, and the preparation of the aluminum oxide nano film layer is carried out;
原子层沉积的设定参数为:沉积温度:100℃;腔室压力:0.2Torr;反应前驱体源:三甲基铝和超纯水,前驱体保持在室温;载气:8sccm的高纯氮气;工艺出源和吹扫时间,循环周期:三甲基铝出源时间为0.02s,吹扫时间为30s;超纯水出源时间为0.015s,吹扫时间为30s,循环周期为500周期,得到均匀致密的氧化铝薄膜。The set parameters of atomic layer deposition are: deposition temperature: 100°C; chamber pressure: 0.2Torr; reaction precursor source: trimethylaluminum and ultrapure water, the precursor is kept at room temperature; carrier gas: 8 sccm high-purity nitrogen ; Process source and purging time, cycle period: trimethylaluminum source time is 0.02s, purging time is 30s; ultrapure water source time is 0.015s, purging time is 30s, cycle period is 500 cycles , to obtain a uniform and dense aluminum oxide film.
实施例2Example 2
(1)通过微弧氧化方法在AZ31表面制备MAO涂层,具体步骤为:将AZ31基体依次使用150#,400#,800#,1200#,1500#的水磨砂纸机械打磨,依次经过1mol/L氢氧化钠溶液和去离子水清洗,在暖空气中快速吹干,去除表面的氧化物和杂质;(1) Prepare MAO coating on the surface of AZ31 by micro-arc oxidation method. The specific steps are: use 150#, 400#, 800#, 1200#, 1500# water-grinding sandpaper to mechanically polish the AZ31 substrate, and then pass through 1mol/L Wash with sodium hydroxide solution and deionized water, and quickly dry in warm air to remove oxides and impurities on the surface;
(2)配置植酸、氢氧化钠、葡萄糖的微弧氧化电解液溶液,浓度依次为8g/L、10g/L、10g/L,植酸与氢氧化钠质量比为4:5,电解液pH为10,25℃下陈化24h备用;(2) Prepare the micro-arc oxidation electrolyte solution of phytic acid, sodium hydroxide, and glucose. The concentrations are 8g/L, 10g/L, and 10g/L in sequence. The pH is 10, aged at 25°C for 24 hours for later use;
(3)将AZ31基体夹在电极上,浸入电解液中后,在恒定电流0.2A的情况下缓慢升高电压至220V,生长微弧氧化陶瓷层;(3) Clamp the AZ31 substrate on the electrode, after immersing in the electrolyte, slowly increase the voltage to 220V under the condition of a constant current of 0.2A, and grow the micro-arc oxidation ceramic layer;
(4)微弧氧化陶瓷层制备结束,切断电源,取出样品,在去离子水中清洗,吹干备用;(4) After the preparation of the micro-arc oxidation ceramic layer is completed, the power is cut off, the sample is taken out, cleaned in deionized water, and dried for later use;
(5)将样品置于原子层沉积设备反应腔中,进行氧化铝纳米膜层的制备;(5) The sample is placed in the reaction chamber of the atomic layer deposition equipment, and the preparation of the aluminum oxide nano film layer is carried out;
原子层沉积的设定参数为:沉积温度:100℃;腔室压力:0.2Torr;反应前驱体源:三甲基铝和超纯水,前驱体保持在室温;载气:8sccm的高纯氮气;工艺出源和吹扫时间,循环周期:三甲基铝出源时间为0.02s,吹扫时间为30s;水出源时间为0.015s,吹扫时间为30s,循环周期为500周期,得到均匀致密的氧化铝薄膜。The set parameters of atomic layer deposition are: deposition temperature: 100°C; chamber pressure: 0.2Torr; reaction precursor source: trimethylaluminum and ultrapure water, the precursor is kept at room temperature; carrier gas: 8 sccm high-purity nitrogen ; Process source and purge time, cycle period: trimethylaluminum source time is 0.02s, purge time is 30s; water source time is 0.015s, purge time is 30s, cycle is 500 cycles, get Uniform and dense aluminum oxide film.
实施例3:Example 3:
(1)通过微弧氧化方法在AZ31表面制备MAO涂层,具体步骤为:将AZ31基体依次使用150#,400#,800#,1200#,1500#的水磨砂纸机械打磨,依次经过1mol/L氢氧化钠溶液和去离子水清洗,在暖空气中快速吹干,去除表面的氧化物和杂质;(1) Prepare MAO coating on the surface of AZ31 by micro-arc oxidation method. The specific steps are: use 150#, 400#, 800#, 1200#, 1500# water-grinding sandpaper to mechanically polish the AZ31 substrate, and then pass through 1mol/L Wash with sodium hydroxide solution and deionized water, and quickly dry in warm air to remove oxides and impurities on the surface;
(2)配置植酸、氢氧化钠、葡萄糖的微弧氧化电解液溶液,浓度依次为8g/L、10g/L、10g/L,植酸与氢氧化钠质量比为4:5,电解液pH为10,25℃下陈化24h备用;(2) Prepare the micro-arc oxidation electrolyte solution of phytic acid, sodium hydroxide, and glucose. The concentrations are 8g/L, 10g/L, and 10g/L in sequence. The pH is 10, aged at 25°C for 24 hours for later use;
(3)将AZ31基体夹在电极上,浸入电解液中后,在恒定电流0.2A的情况下缓慢升高电压至220V,生长微弧氧化陶瓷层;(3) Clamp the AZ31 substrate on the electrode, after immersing in the electrolyte, slowly increase the voltage to 220V under the condition of a constant current of 0.2A, and grow the micro-arc oxidation ceramic layer;
(4)微弧氧化陶瓷层制备结束,切断电源,取出样品,在去离子水中清洗,吹干备用;(4) After the preparation of the micro-arc oxidation ceramic layer is completed, the power is cut off, the sample is taken out, cleaned in deionized water, and dried for later use;
(5)将样品置于原子层沉积设备反应腔中,进行氧化铝纳米膜层的制备;(5) The sample is placed in the reaction chamber of the atomic layer deposition equipment, and the preparation of the aluminum oxide nano film layer is carried out;
原子层沉积的设定参数为:沉积温度:100℃;腔室压力:0.2Torr;反应前驱体源:三甲基铝和超纯水,前驱体保持在室温;载气:8sccm的高纯氮气;工艺出源和吹扫时间,循环周期:三甲基铝出源时间为0.02s,吹扫时间为30s;水出源时间为0.015s,吹扫时间为30s,循环周期为1000周期,得到均匀致密的氧化铝薄膜。The set parameters of atomic layer deposition are: deposition temperature: 100°C; chamber pressure: 0.2Torr; reaction precursor source: trimethylaluminum and ultrapure water, the precursor is kept at room temperature; carrier gas: 8 sccm high-purity nitrogen ; Process source and purge time, cycle period: the source time of trimethyl aluminum is 0.02s, and the purge time is 30s; the water source time is 0.015s, the purge time is 30s, and the cycle period is 1000 cycles, Uniform and dense aluminum oxide film.
实施例4:Example 4:
(1)通过微弧氧化方法在镁合金表面制备MAO涂层,具体步骤为:将AZ31基体依次使用150#,400#,800#,1200#,1500#的水磨砂纸机械打磨,依次经过1mol/L氢氧化钠溶液和去离子水清洗,在暖空气中快速吹干,去除表面的氧化物和杂质;(1) Prepare MAO coating on the surface of magnesium alloy by micro-arc oxidation method. The specific steps are: the AZ31 substrate is mechanically polished with 150#, 400#, 800#, 1200#, 1500# water-grinding sandpaper, and then passed through 1mol/ Wash with L sodium hydroxide solution and deionized water, and quickly dry in warm air to remove oxides and impurities on the surface;
(2)配置植酸、氢氧化钠、葡萄糖的微弧氧化电解液溶液,浓度依次为5g/L、6.25g/L、8g/L,植酸与氢氧化钠质量比为5:6.25,电解液pH为9,25℃下陈化0h备用;(2) Prepare micro-arc oxidation electrolyte solutions of phytic acid, sodium hydroxide, and glucose. The liquid pH is 9, aged at 25°C for 0h for later use;
(3)将AZ31基体夹在电极上,浸入电解液中后,在恒定电流0.1A的情况下缓慢升高电压至200V,生长微弧氧化陶瓷层;(3) Clamp the AZ31 substrate on the electrode, after immersing in the electrolyte, slowly increase the voltage to 200V under the condition of a constant current of 0.1A, and grow the micro-arc oxidation ceramic layer;
(4)微弧氧化陶瓷层制备结束,切断电源,取出样品,在去离子水中清洗,吹干备用;(4) After the preparation of the micro-arc oxidation ceramic layer is completed, the power is cut off, the sample is taken out, cleaned in deionized water, and dried for later use;
(5)将样品置于原子层沉积设备反应腔中,进行氧化铝纳米膜层的制备;(5) The sample is placed in the reaction chamber of the atomic layer deposition equipment, and the preparation of the aluminum oxide nano film layer is carried out;
原子层沉积的设定参数为:沉积温度:80℃;腔室压力:0.1Torr;反应前驱体源:三甲基铝和双氧水,前驱体保持在室温;载气:8sccm的高纯氮气;工艺出源和吹扫时间,循环周期:三甲基铝出源时间为0.015s,吹扫时间为10s;双氧水出源时间为0.015s,吹扫时间为10s,循环周期为5000周期,得到均匀致密的氧化铝薄膜。The set parameters of atomic layer deposition are: deposition temperature: 80°C; chamber pressure: 0.1Torr; reaction precursor source: trimethylaluminum and hydrogen peroxide, the precursor is kept at room temperature; carrier gas: 8 sccm high-purity nitrogen; process Source and purge time, cycle period: trimethylaluminum source time is 0.015s, purge time is 10s; hydrogen peroxide source time is 0.015s, purge time is 10s, cycle period is 5000 cycles, and uniform and dense aluminum oxide film.
实施例5:Example 5:
(1)通过微弧氧化方法在镁基底表面制备MAO涂层,具体步骤为:将AZ31基体依次使用150#,400#,800#,1200#,1500#的水磨砂纸机械打磨,依次经过1mol/L氢氧化钠溶液和去离子水清洗,在暖空气中快速吹干,去除表面的氧化物和杂质;(1) Prepare MAO coating on the surface of magnesium substrate by micro-arc oxidation method. The specific steps are: the AZ31 substrate is mechanically polished with 150#, 400#, 800#, 1200#, 1500# water-grinding sandpaper, and then passed through 1mol/ Wash with L sodium hydroxide solution and deionized water, and quickly dry in warm air to remove oxides and impurities on the surface;
(2)配置植酸、氢氧化钠、葡萄糖的微弧氧化电解液溶液,浓度依次为10g/L、12.5g/L、12g/L,植酸与氢氧化钠质量比为10:12.5,电解液pH为11,25℃下陈化12h备用;(2) Prepare micro-arc oxidation electrolyte solutions of phytic acid, sodium hydroxide, and glucose, the concentrations of which are 10g/L, 12.5g/L, and 12g/L in turn, and the mass ratio of phytic acid to sodium hydroxide is 10:12.5. The liquid pH is 11, aged at 25°C for 12 hours for later use;
(3)将AZ31基体夹在电极上,浸入电解液中后,在恒定电流0.3A的情况下缓慢升高电压至350V,生长微弧氧化陶瓷层;(3) Clamp the AZ31 substrate on the electrode, and after immersing in the electrolyte, slowly increase the voltage to 350V under the condition of a constant current of 0.3A, and grow the micro-arc oxidation ceramic layer;
(4)微弧氧化陶瓷层制备结束,切断电源,取出样品,在去离子水中清洗,吹干备用;(4) After the preparation of the micro-arc oxidation ceramic layer is completed, the power is cut off, the sample is taken out, cleaned in deionized water, and dried for later use;
(5)将样品置于原子层沉积设备反应腔中,进行氧化铝纳米膜层的制备;(5) The sample is placed in the reaction chamber of the atomic layer deposition equipment, and the preparation of the aluminum oxide nano film layer is carried out;
原子层沉积的设定参数为:沉积温度:150℃;腔室压力:1Torr;反应前驱体源:三甲基铝和氧气,前驱体保持在室温;载气:8sccm的高纯氮气;工艺出源和吹扫时间,循环周期:三甲基铝出源时间为0.1s,吹扫时间为120s;氧气出源时间为0.2s,吹扫时间为120s,循环周期为1周期,得到均匀致密的氧化铝薄膜。The set parameters of atomic layer deposition are: deposition temperature: 150°C; chamber pressure: 1Torr; reaction precursor source: trimethylaluminum and oxygen, the precursor is kept at room temperature; carrier gas: 8 sccm high-purity nitrogen; Source and purge time, cycle period: trimethylaluminum source time is 0.1s, purge time is 120s; oxygen source time is 0.2s, purge time is 120s, cycle period is 1 cycle, and uniform and dense aluminum oxide film.
实施例6:Embodiment 6:
(1)通过微弧氧化方法在镁表面制备MAO涂层,具体步骤为:将AZ31基体依次使用150#,400#,800#,1200#,1500#的水磨砂纸机械打磨,依次经过1mol/L氢氧化钠溶液和去离子水清洗,在暖空气中快速吹干,去除表面的氧化物和杂质;(1) Prepare MAO coating on the surface of magnesium by micro-arc oxidation method. The specific steps are: the AZ31 substrate is mechanically polished with 150#, 400#, 800#, 1200#, 1500# water-grinding sandpaper, and then passed through 1mol/L Wash with sodium hydroxide solution and deionized water, and quickly dry in warm air to remove oxides and impurities on the surface;
(2)配置植酸、氢氧化钠、葡萄糖的微弧氧化电解液溶液,浓度依次为6g/L、7.5g/L、9g/L,植酸与氢氧化钠质量比为6:7.5,电解液pH为10,25℃下陈化36h备用;(2) Prepare micro-arc oxidation electrolyte solutions of phytic acid, sodium hydroxide, and glucose. The pH of the solution is 10, and it is aged for 36 hours at 25°C for later use;
(3)将AZ31基体夹在电极上,浸入电解液中后,在恒定电流0.15A的情况下缓慢升高电压至260V,生长微弧氧化陶瓷层;(3) Clamp the AZ31 substrate on the electrode, and after immersing in the electrolyte, slowly increase the voltage to 260V at a constant current of 0.15A to grow the micro-arc oxidation ceramic layer;
(4)微弧氧化陶瓷层制备结束,切断电源,取出样品,在去离子水中清洗,吹干备用;(4) After the preparation of the micro-arc oxidation ceramic layer is completed, the power is cut off, the sample is taken out, cleaned in deionized water, and dried for later use;
(5)将样品置于原子层沉积设备反应腔中,进行氧化铝纳米膜层的制备;(5) The sample is placed in the reaction chamber of the atomic layer deposition equipment, and the preparation of the aluminum oxide nano film layer is carried out;
原子层沉积的设定参数为:沉积温度:120℃;腔室压力:0.8Torr;反应前驱体源:三甲基铝和臭氧驱体保持在室温;载气:8sccm的高纯氩气;工艺出源和吹扫时间,循环周期:三甲基铝出源时间为0.08s,吹扫时间为100s;臭氧出源时间为0.15s,吹扫时间为100s,循环周期为100周期,得到均匀致密的氧化铝薄膜。The set parameters of atomic layer deposition are: deposition temperature: 120 ° C; chamber pressure: 0.8 Torr; reaction precursor source: trimethylaluminum and ozone precursor kept at room temperature; carrier gas: 8 sccm high-purity argon; process Source and purging time, cycle period: trimethylaluminum source time is 0.08s, purging time is 100s; ozone source time is 0.15s, purging time is 100s, cycle period is 100 cycles, and uniform and dense aluminum oxide film.
实施例7:Embodiment 7:
(1)通过微弧氧化方法在镁表面制备MAO涂层,具体步骤为:将AZ31基体依次使用150#,400#,800#,1200#,1500#的水磨砂纸机械打磨,依次经过1mol/L氢氧化钠溶液和去离子水清洗,在暖空气中快速吹干,去除表面的氧化物和杂质;(1) Prepare MAO coating on the surface of magnesium by micro-arc oxidation method. The specific steps are: the AZ31 substrate is mechanically polished with 150#, 400#, 800#, 1200#, 1500# water-grinding sandpaper, and then passed through 1mol/L Wash with sodium hydroxide solution and deionized water, and quickly dry in warm air to remove oxides and impurities on the surface;
(2)配置植酸、氢氧化钠、葡萄糖的微弧氧化电解液溶液,浓度依次为9g/L、11.25g/L、11g/L,,植酸与氢氧化钠质量比为9:11.25,电解液pH为9.5,25℃下陈化48h备用;(2) The micro-arc oxidation electrolyte solution of phytic acid, sodium hydroxide, and glucose is configured, the concentrations are 9g/L, 11.25g/L, and 11g/L in sequence, and the mass ratio of phytic acid to sodium hydroxide is 9:11.25, The pH of the electrolyte solution is 9.5, aged at 25°C for 48 hours for later use;
(3)将AZ31基体夹在电极上,浸入电解液中后,在恒定电流0.25A的情况下缓慢升高电压至320V,生长微弧氧化陶瓷层;(3) Clamp the AZ31 substrate on the electrode, after immersing in the electrolyte, slowly increase the voltage to 320V at a constant current of 0.25A, and grow the micro-arc oxidation ceramic layer;
(4)微弧氧化陶瓷层制备结束,切断电源,取出样品,在去离子水中清洗,吹干备用;(4) After the preparation of the micro-arc oxidation ceramic layer is completed, the power is cut off, the sample is taken out, cleaned in deionized water, and dried for later use;
(5)将样品置于原子层沉积设备反应腔中,进行氧化铝纳米膜层的制备;(5) The sample is placed in the reaction chamber of the atomic layer deposition equipment, and the preparation of the aluminum oxide nano film layer is carried out;
原子层沉积的设定参数为:沉积温度:140℃;腔室压力:0.4Torr;反应前驱体源:三甲基铝和双氧水,前驱体保持在室温;载气:8sccm的高纯氩气;工艺出源和吹扫时间,循环周期:三甲基铝出源时间为0.06s,吹扫时间为60s;双氧水出源时间为0.02s,吹扫时间为60s,循环周期为3000周期,得到均匀致密的氧化铝薄膜。The set parameters of atomic layer deposition are: deposition temperature: 140°C; chamber pressure: 0.4Torr; reaction precursor source: trimethylaluminum and hydrogen peroxide, the precursor is kept at room temperature; carrier gas: 8 sccm high-purity argon; Process source and purging time, cycle period: trimethylaluminum source time is 0.06s, purging time is 60s; hydrogen peroxide source time is 0.02s, purging time is 60s, cycle period is 3000 cycles, and uniform dense aluminum oxide film.
样品检测及结果:Sample testing and results:
对于微弧氧化,一般认为,火花放电现象是施加电压高于电极表面已有膜层击穿电压的结果。火花放电前偶发电子放电导致电极表面已经形成的薄而致密的无定型氧化膜局部受热,引起局部晶化。当氧化膜层达到某一临界值时,局部电子放电发展成为大面积持续的电子雪崩,氧化膜发生局部剧烈破坏,出现火花放电现象。随着氧化的进行,施加的电压不断升高,火花由微弧向弧光过渡。而微弧和弧光开始均主要集中于样品的边缘,然后均匀分布于整个样品表面。与微弧氧化阶段相比,弧光氧化阶段火花的数量明显减少,尺寸增大,并且持续的时间延长。与火花变化过程相对应,氧化膜表面孔数量减少,直径逐渐增大。氧化时间超过一定时间后,氧化膜表面呈现不明显的多孔结构。因此,抑制电弧形成成为制备高质量的微弧阳极氧化膜的关键。For micro-arc oxidation, it is generally believed that the spark discharge phenomenon is the result of an applied voltage higher than the breakdown voltage of the existing film on the electrode surface. The occasional electronic discharge before the spark discharge causes the thin and dense amorphous oxide film formed on the electrode surface to be locally heated, causing local crystallization. When the oxide film layer reaches a certain critical value, the partial electronic discharge develops into a large-area continuous electronic avalanche, the oxide film is locally severely damaged, and a spark discharge phenomenon occurs. As the oxidation progresses, the applied voltage increases continuously, and the spark transitions from a micro-arc to an arc. However, the micro-arc and arc light are mainly concentrated on the edge of the sample at first, and then evenly distributed on the entire sample surface. Compared with the micro-arc oxidation stage, the number of sparks in the arc oxidation stage is significantly reduced, the size is increased, and the duration is prolonged. Corresponding to the spark change process, the number of pores on the surface of the oxide film decreases and the diameter gradually increases. After the oxidation time exceeds a certain period of time, the surface of the oxide film presents an inconspicuous porous structure. Therefore, the suppression of arc formation is the key to the preparation of high-quality MAO films.
代表性的专利有:《一种环保型镁合金微弧氧化以及微弧氧化的方法》(CN101386982)和《镁及镁合金环保型阳极氧化电解液及应用》(CN 01114075)。张荣发等(功能材料,2007,A10:3762)发现,植酸加入到碱性硅酸钠溶液中,可降低单位面积孔数,增加氧化膜厚度,提高氧化膜耐蚀性。但是,植酸氧化膜膜层厚度一般较薄(<20μm),氧化膜孔径增加,从而增加了通孔产生的概率。而曾荣昌等(Journal of Alloys and Compounds,2017,695:2464)发现,通孔则是导致氧化膜与镁合金基体发生电偶腐蚀,加速镁合金氧化膜化学腐蚀和电化学腐蚀失效的主要原因。Representative patents include: "An Environment-friendly Magnesium Alloy Micro-arc Oxidation and Micro-arc Oxidation Method" (CN101386982) and "Magnesium and Magnesium Alloy Environment-friendly Anodizing Electrolyte and Its Application" (CN 01114075). Zhang Rongfa et al. (Functional Materials, 2007, A10: 3762) found that adding phytic acid to alkaline sodium silicate solution can reduce the number of pores per unit area, increase the thickness of the oxide film, and improve the corrosion resistance of the oxide film. However, the thickness of the phytic acid oxide film is generally thin (<20 μm), and the pore size of the oxide film increases, thereby increasing the probability of through holes. Zeng Rongchang et al. (Journal of Alloys and Compounds, 2017, 695: 2464) found that through holes are the main reason for the galvanic corrosion between the oxide film and the magnesium alloy substrate, and the accelerated chemical corrosion and electrochemical corrosion of the magnesium alloy oxide film. .
我们前期的研究(Scientific Reports,2015,5,13026)发现,葡萄糖在水溶液中醛基可酸化,形成葡萄糖酸,可在镁合金表面与镁结合形成葡萄糖酸镁。因此,葡萄糖在镁合金表面可形成化学吸附。屠晓华等(中国有色金属学报,2013,3:727)研究表明,在NaOH、Na2SiO3、Na2B4O7组成的电解液体系中,葡萄糖可以有效地抑制镁合金AZ31阳极氧化膜火花放电,使氧化膜致密,微孔分布均匀及孔径变小。Our previous research (Scientific Reports, 2015, 5, 13026) found that the aldehyde group of glucose can be acidified in aqueous solution to form gluconic acid, which can combine with magnesium on the surface of magnesium alloy to form magnesium gluconate. Therefore, glucose can form chemical adsorption on the surface of magnesium alloy. Tu Xiaohua et al. (Chinese Journal of Nonferrous Metals, 2013, 3: 727) showed that in an electrolyte system composed of NaOH, Na 2 SiO 3 , and Na 2 B 4 O 7 , glucose can effectively inhibit the sparking of the anodized film of magnesium alloy AZ31. Discharge makes the oxide film dense, the micropore distribution is uniform and the pore size becomes smaller.
对上述实施例进行电化学性能检测,微弧氧化电解液添加葡萄糖后在25℃陈化,陈化时间为12-24h时制备的样品性能最佳,陈化的目的是使得电解液中的成分完全混合反应;原子层沉积技术处理的样品,随着周期的延长,越来越致密,同时表现出良好的耐蚀性。Electrochemical performance testing was carried out on the above examples. The micro-arc oxidation electrolyte was aged at 25°C after adding glucose. The performance of the sample prepared when the aging time was 12-24h was the best. Fully mixed reaction; samples processed by atomic layer deposition technology become denser and denser with the prolongation of the cycle, and at the same time show good corrosion resistance.
对实施例1和2作为代表实施例,对形貌,在氯化钠溶液中的极化曲线、交流阻抗和析氢pH变化进行介绍,结果如下:Embodiment 1 and 2 are used as representative examples, and the morphology, the polarization curve, AC impedance and hydrogen evolution pH changes in sodium chloride solution are introduced, and the results are as follows:
图1为实施例1与例2两种不同电解液,微弧氧化后膜层耐蚀性测试的极化曲线,可以看出添加葡萄糖后的植酸-葡萄糖复配电解液,制备的样品自腐蚀电位升高,自腐蚀电流明显降低从1.11×10-5A降到3.00×10-6A(这是耐蚀性提高的最明显的表征)。Fig. 1 is two kinds of different electrolytes of embodiment 1 and example 2, the polarization curve of film corrosion resistance test after micro-arc oxidation, it can be seen that the phytic acid-glucose composite electrolyte after adding glucose, the prepared sample The self-corrosion potential increased, and the self-corrosion current decreased significantly from 1.11×10 -5 A to 3.00×10 -6 A (this is the most obvious sign of the improvement of corrosion resistance).
表1对应图1极化曲线拟合结果Table 1 corresponds to the fitting results of the polarization curve in Figure 1
图2是图1电化学测试对应的阻抗-频率图,也可以发现添加葡萄糖后制备的样品阻抗升高,耐蚀性效果更佳。从电化学的测试说明这种植酸-葡萄糖的复配电解液有着更好的效果。Figure 2 is the impedance-frequency diagram corresponding to the electrochemical test in Figure 1. It can also be found that the impedance of the sample prepared after adding glucose increases, and the corrosion resistance effect is better. The electrochemical test shows that this phytic acid-glucose compound electrolyte has a better effect.
图3为实施例2所制备的MAO和MAO/Al2O3表观微观形貌SEM对比图,即只进行微弧氧化处理和进行微弧氧化处理后又进行原子层沉积Al2O3层处理的表面微观形貌对比。Figure 3 is the SEM comparison of the microstructure of MAO and MAO/Al 2 O 3 prepared in Example 2, that is, only the micro-arc oxidation treatment and the atomic layer deposition Al 2 O 3 layer after the micro-arc oxidation treatment Comparison of the microscopic morphology of the treated surface.
如图3所示,经过ALD处理后的涂层,微裂纹和微孔结构明显减少。对图3中的复合涂层进行EDS分析,结果如表2所示:As shown in Figure 3, the microcracks and microporous structure of the coating after ALD treatment are significantly reduced. EDS analysis was performed on the composite coating in Figure 3, and the results are shown in Table 2:
表2对应图3中块状结构的A、B点位置的EDS分析Table 2 corresponds to the EDS analysis of the positions of points A and B of the block structure in Figure 3
测试了A和B处的元素含量。结果显示Al元素明显增加,Mg和P元素明显减少,说明氧化铝的涂层覆盖了微弧氧化的基体,并且随着沉积周期的增多,厚度逐渐增加。The element content at A and B was tested. The results showed that the Al element increased significantly, and the Mg and P elements decreased significantly, indicating that the alumina coating covered the micro-arc oxidation substrate, and the thickness gradually increased with the increase of the deposition cycle.
图4为实施例2所制备的微弧氧化涂层、复合涂层的样品与AZ31基体在氯化钠溶液中的极化曲线对比图。Fig. 4 is a comparison diagram of the polarization curves of the samples of the micro-arc oxidation coating and composite coating prepared in Example 2 and the AZ31 substrate in sodium chloride solution.
通过powersuit软件拟合后得出下表中的数据,微弧氧化处理后的样品自腐蚀电流从3.16×10-4降到3.55×10-6A/cm2,再经过原子层沉积技术处理后降到6.66×10-9A/cm2,样品的耐蚀性得到明显的提高。After fitting by powersuit software, the data in the table below are obtained. After micro-arc oxidation treatment, the self-corrosion current of the sample dropped from 3.16×10 -4 to 3.55×10 -6 A/cm 2 , and then processed by atomic layer deposition technology The corrosion resistance of the sample was significantly improved when the temperature dropped to 6.66×10 -9 A/cm 2 .
表3对应图4极化曲线拟合结果Table 3 corresponds to the fitting results of the polarization curve in Figure 4
图5为实施例2所制备的微弧氧化涂层、复合涂层的样品与AZ31基体在氯化钠溶液中的交流阻抗对比图。从bode图我们看出,经过微弧氧化处理后的样品和再经过原子层沉积技术处理的样品,相对于基体耐蚀性分别提高了2和5个数量级。Fig. 5 is a comparison chart of AC impedance of samples of the micro-arc oxidation coating and composite coating prepared in Example 2 and the AZ31 substrate in sodium chloride solution. From the bode diagram, we can see that the corrosion resistance of the samples treated by micro-arc oxidation and the samples treated by atomic layer deposition technology are respectively increased by 2 and 5 orders of magnitude relative to the substrate.
图6为实施例2所制备的微弧氧化涂层、复合涂层的样品与AZ31基体在氯化钠溶液中的析氢速率对比图。经过长期的浸泡发现MAO与ALD处理后的样品耐蚀性要远远好于基体,再对微弧氧化涂层和原子层沉积复合层比较,发现原子层沉积复合涂层具有更低的腐蚀速率,有着更好的效果。Fig. 6 is a comparison chart of the hydrogen evolution rate of the samples of the micro-arc oxidation coating and composite coating prepared in Example 2 and the AZ31 substrate in sodium chloride solution. After long-term immersion, it was found that the corrosion resistance of the samples treated by MAO and ALD was much better than that of the substrate. Then, comparing the micro-arc oxidation coating and the atomic layer deposition composite layer, it was found that the atomic layer deposition composite coating had a lower corrosion rate. , with a better effect.
图7中a、b、c分别为实施例2中基体、MAO(只经微弧氧化处理的涂层)、MAO/Al2O3(经微弧氧化处理后又进行原子层沉积氧化铝层的复合涂层)在氯化钠溶液中浸泡两周后宏观形貌图。从宏观的腐蚀后的图片可以很直观的看出经过MAO/Al2O3这种复合涂层没有受到破坏,具有很好的保护作用。In Figure 7, a, b, and c are the substrate, MAO (only the coating treated by micro-arc oxidation treatment), MAO/Al 2 O 3 (the atomic layer deposition aluminum oxide layer after the micro-arc oxidation treatment) in Example 2, respectively. Composite coating) macroscopic morphology after immersion in sodium chloride solution for two weeks. From the macroscopic pictures after corrosion, it can be seen intuitively that the MAO/Al 2 O 3 composite coating has not been damaged and has a good protective effect.
当然,上述说明并非是对本发明的限制,本发明也并不仅限于上述举例,本技术领域的技术人员在本发明的实质范围内所做出的变化、改型、添加或替换,也应属于本发明的保护范围。Of course, the above descriptions are not intended to limit the present invention, and the present invention is not limited to the above examples. Changes, modifications, additions or replacements made by those skilled in the art within the scope of the present invention shall also belong to the present invention. protection scope of the invention.
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