CN108212694B - Coating liquid supplying device - Google Patents
Coating liquid supplying device Download PDFInfo
- Publication number
- CN108212694B CN108212694B CN201711224793.5A CN201711224793A CN108212694B CN 108212694 B CN108212694 B CN 108212694B CN 201711224793 A CN201711224793 A CN 201711224793A CN 108212694 B CN108212694 B CN 108212694B
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- bar
- space
- bellows members
- enclosed
- liquid
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- 239000011248 coating agent Substances 0.000 title claims abstract description 108
- 238000000576 coating method Methods 0.000 title claims abstract description 108
- 239000007788 liquid Substances 0.000 title claims abstract description 83
- 239000012530 fluid Substances 0.000 claims abstract description 70
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 230000007423 decrease Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 12
- 238000003780 insertion Methods 0.000 description 7
- 230000037431 insertion Effects 0.000 description 7
- 230000003247 decreasing effect Effects 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 230000017260 vegetative to reproductive phase transition of meristem Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 239000004744 fabric Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000010422 painting Methods 0.000 description 3
- 238000011038 discontinuous diafiltration by volume reduction Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
Landscapes
- Coating Apparatus (AREA)
- Reciprocating Pumps (AREA)
Abstract
A kind of coating liquid supplying device (3), comprising: accommodate the accepting container (5) of coating fluid；It is axially moveable in accepting container (5), the bar (6) for making the coating fluid for being contained in accepting container (5) spue from accepting container (5)；And the coating fluids (P) of accepting container (5) will be contained in and be isolated with bar (6), bar (6) are installed in a manner of forming enclosure space i.e. enclosed space (9) with bar (6), and the axial movement relative to bar (6) carries out flexible bellows members (8), is sealed with liquid (W) in enclosed space (9).
Description
Technical field
The present invention relates to a kind of coating liquid supplying devices suitable for apparatus for coating.
Background technique
In the past, it is known that a kind of rod-type syringe pump that pump is used as the coating fluid suction of table coating machine etc., discharge.On but
Stating pump has O-ring etc. in the slipper use of bar, needs to consider the micro leakage of coating fluid, affixed feasibility.Therefore,
It as shown in Patent Document 1, further include coating fluid recovery room on the outside of O-ring, but structure can become complicated and large-scale, this
Outside, coating fluid recovery room and bar are sealed by O-ring, need to consider same technical problem.Here, such as patent text
It offers shown in 2 bellows 58, a kind of stretching using bellows members is provided, contact coating fluid will not with the slipper of bar
Pump.In addition, being taken as the syringe pump of bellows members, it is however generally that, it is the component as shown in patent document 3.
Existing technical literature
Patent document
Patent document 1: Japanese Patent Laid-Open 2008-161740 bulletin
Patent document 2: Japanese Patent Laid-Open 2011-14732 bulletin
Patent document 3: Japanese Patent Laid-Open No. Sho 60-261464 bulletin
But bellows members by metal, synthetic resin thin slice and formed, therefore when bellows members single side by
When pressure, bellows members can generate the flexible deformations such as protuberance.In addition, using the pump for having bellows members as shown above
In, the single side exposure of bellows members is under atmospheric pressure.Accordingly, there exist bar is pressed into when coating fluid spues, because of above-mentioned bar
Indentation pressure cause bellows members to be deformed, the intrusion of bar (volume) and spue coating fluid amount it is inconsistent, coating
Amount changes and leads to be difficult to the thickness on substrate and be equably coated such technical problem.
Summary of the invention
Therefore, the purpose of the present invention is to provide a kind of supplies of the coating fluid of the precision of coating weight that can be improved coating fluid
Device.
The present invention includes: the accepting container for accommodating coating fluid；Bar, the bar are axially moveable in above-mentioned accepting container, make
The coating fluid for being contained in above-mentioned accepting container spues from above-mentioned accepting container；And bellows members, bellows members will accommodate
It is isolated in the coating fluid of above-mentioned accepting container with above-mentioned bar, is installed in a manner of forming the i.e. enclosed space of enclosure space with above-mentioned bar
In above-mentioned bar, and the axial movement relative to above-mentioned bar is stretched, and in above-mentioned enclosed space, is sealed with liquid.
According to above structure, by by liquid-filled to enclosed space, to even if be caused by by the axial movement of bar
Pressure, the volume in enclosed space will not change, and bellows members can be prevented to be deformed, thus by the axial direction of bar
The amount of coating fluid of variable quantity and discharge of volume caused by movement, in accepting container is consistent.Therefore, it can be improved coating
The precision of the coating weight of liquid.
Furthermore, it may be desirable to, the invention also includes with flowering structure.
(1) above-mentioned enclosed space has and is formed between the outer peripheral surface of above-mentioned bar and the inner surface of above-mentioned bellows members
First space, when the flexible volume for leading to above-mentioned first space of above-mentioned bellows members increases and decreases, above-mentioned enclosed space
With can make to enclose the adjustment space mobile to the liquid in above-mentioned enclosed space.
(2) in above structure (1), in the front end of above-mentioned bar, be equipped with can relative to above-mentioned bar front end along axial direction
Mobile protruding member, the front end of above-mentioned bellows members are installed on above-mentioned protruding member, a part of above-mentioned adjustment space by
The front end of above-mentioned bar and above-mentioned protruding member are formed.
(3) in above structure (1), the axial middle part of above-mentioned bellows members is installed on the front end of above-mentioned bar, above-mentioned
The front end of bellows members be it is closed, above-mentioned adjustment space is by the front end of above-mentioned bar and the front end of above-mentioned bellows members
It is formed.
(4) in any one structure in above structure (1)~(3), a part of above-mentioned adjustment space is via being formed in
The space of the inside of above-mentioned bar is connected to above-mentioned first space.
(5) in any one structure in above structure (1)~(4), aforesaid liquid is at the volume in above-mentioned first space
In the state of maximum, it is enclosed to above-mentioned enclosed space.
(6) cardinal extremity of above-mentioned bellows members is installed on above-mentioned accepting container, and front end is by Self-Closing.
According to above structure (1), there is the adjustment space mobile for liquid due to enclosing space, can easily realize
Relative to the axial movement of bar, make the structure of the constant volume in enclosed space.
According to above structure (2), a part of adjustment space can be formed by the front end of bar and protruding member, thus shape
At the mobile source of liquid when being increased and decreased by the flexible volume for leading to the first space of bellows members, mobile place to go.Its
As a result, it is possible to easily realize with flowering structure: when bellows members are stretched, can make to move smooth, can make to seal
Enter the constant volume in space.
According to above structure (3), adjustment space can be formed by the front end of bar and the front end of bellows members, thus
Form mobile source, the mobile place to go of liquid when being increased and decreased by the flexible volume for leading to the first space of bellows members.
As a result, can be easily implemented with flowering structure: when bellows members are stretched, the volume in enclosed space can be made permanent
It is fixed.
According to above structure (4), when being increased and decreased by the flexible volume for leading to the first space of bellows members, liquid
Across the inside of bar, movement can easily be done between the first space and adjustment space.
According to above structure (5), since liquid is enclosed in the state that the volume in the first space is in maximum, thus
No matter bar be in where, can accurately play above-mentioned effect.
According to above structure (6), being capable of providing a kind of includes that the very simple coating fluid of bellows members, structure supplies
To device.
In short, in accordance with the invention it is possible to providing a kind of coating liquid supplying device of the precision of coating weight for improving coating fluid.
Detailed description of the invention
Fig. 1 is the schematic diagram of the apparatus for coating of first embodiment of the invention.
Fig. 2 is the schematic diagram of accepting container.
Fig. 3 is the schematic diagram that the volume in the first space reaches the accepting container of maximum rating.
Fig. 4 A is the schematic diagram for making the bar accepting container of fallback state to the maximum extent.
Fig. 4 B is the partial, detailed view for indicating the first~the 5th space, θ and L.
Schematic diagram when Fig. 5 is the outer perimeter holes arrival second space to form the 5th space.
Fig. 6 is the schematic diagram of the accepting container for the state that bar advances from initial position and be located at maximum insertion position.
Fig. 7 is the schematic diagram of the accepting container for the state that bar retreated and be located at initial position from maximum insertion position.
Fig. 8 is to be fitted without the coating liquid supplying device of protruding member in other embodiments of the present invention on bar to show
It is intended to.
Fig. 9 is to be fitted without the coating liquid supplying device of protruding member in other embodiments of the present invention on bar to show
It is intended to.
Figure 10 is in other embodiments of the present invention, and bellows members 8 are fitted without in the coating liquid supplying device of bar 6
Schematic diagram.
Figure 11 is the coating for moving back and forth bar along axial direction by axis motor in other embodiments of the present invention
The schematic diagram of liquid supplying device.
Figure 12 is to indicate in the case where enclosed liquid is less, the signal of the shape of bellows members when bar is pressed into
Figure.
Symbol description
1 storage bin
10 apparatus for coating
11 supporting stations
12 substrates
13 coating fluid supply pipe 13a supply valves
14 coating fluid discharge pipe 14a discharge valves
15 air discharge duct 15a dump valves
16 liquid-filled pipe 16a enclose valve
2 gap nozzles
3 coating liquid supplying devices
4 control devices
5 accepting containers
51 containment member 51a insertion hole, 52 containment member
6 bars
6a pilot hole 6b outer perimeter holes 6c intercommunicating pore
61 protruding members
61a plectane portion 61b pin portion
7 drive members
71 motor, 72 ball-screw, 73 supporting part, 74 axis motor
75 ball bushings
8 bellows members
8a ring element
81 first bellows members, 82 second bellows members
The 4th space 95 of 9 enclosed 91 first space of space 92 second space, 93 third space 94
The 6th space of five spaces 96
2 gap of C1 clearance C
T distance
P coating fluid
W encloses liquid
Specific embodiment
(overall structure)
Fig. 1 is the schematic diagram of the apparatus for coating 10 of first embodiment of the invention.As shown in Figure 1, apparatus for coating 10 includes:
Store the storage bin 1 of coating fluid；Coating fluid is coated on to the gap nozzle 2 of the substrate 12 on supporting station 11；By coating fluid from storage
Deposit the coating liquid supplying device 3 that case 1 is supplied to gap nozzle 2；And to the control device 4 that apparatus for coating 10 is controlled.It is narrow
Seam nozzle 2 is formed with for slit that coating fluid spues to nozzle itself, defined width, is by moving gap nozzle 2
It moves coating fluid being coated on substrate 12, table coating machine (registered trademark: テ ー Block ル コ ー タ ー) gap nozzle.
The movement of gap nozzle 2 is controlled by control device 4.
It is fed with compressed air in storage bin 1, using the pressure of above-mentioned compressed air, coating fluid is extruded from below.Separately
Outside, the coating fluid in storage bin 1 can also not use compressed air, but use gravity to extrude.
Coating liquid supplying device 3 includes: the accepting container 5 for accommodating coating fluid；Make to be contained in the coating fluid of accepting container 5 from
The bar 6 that accepting container 5 spues to gap nozzle 2；And the drive member 7 for being axially moveable bar 6.
Accepting container 5 is made of cylindric cylinder.In the present embodiment, it in order to improve internal visuality, accommodates
Container 5 uses the cylinder of glass system.But accepting container 5 can also be manufactured by stainless steel and other metal materials.In such case
Under, need to reduce the surface roughness of the inner surface of accepting container 5 by mirror finish etc..
The one end of accepting container 5 is closed, and is equipped with containment member 51, the above-mentioned formation of containment member 51 in the other end
There is the insertion hole 51a inserted for bar 6.In the inner peripheral surface of insertion hole 51a, configured with containment members 52 such as O-rings.Containment member 52
Ensure the leakproofness between containment member 51 and bar 6.
Coating fluid passes through coating fluid supply pipe 13, supplies from storage bin 1 to accepting container 5.It is set in coating fluid supply pipe 13
There is supply valve 13a, according to the opening and closing of supply valve 13a, supplies coating fluid to accepting container 5, stops supplying coating to accepting container 5
Liquid.The opening and closing of supply valve 13a is controlled by control device 4.
Coating fluid passes through coating fluid discharge pipe 14, supplies from accepting container 5 to gap nozzle 2.In coating fluid discharge pipe 14
Equipped with discharge valve 14a, according to the opening and closing of discharge valve 14a, coating fluid is supplied to gap nozzle 2, stops supplying painting to gap nozzle 2
Cloth liquid.The opening and closing of discharge valve 14a is controlled by control device 4.
The air discharge duct 15 of the air in discharge accepting container 5 is connected in accepting container 5.It is set in air discharge duct 15
There is dump valve 15a, dump valve 15a is opened for the air in accepting container 5 to be discharged.The opening and closing of dump valve 15a is by controlling
Device 4 controls.
It is connected in accepting container 15 and encloses enclosed liquid W to the liquid-filled pipe 16 in aftermentioned enclosed space.In liquid
Enclosed pipe 16 is equipped with enclosed valve 16a, and enclosed valve 16a is opened to enclose enclosed liquid W to enclosed space.When enclosed liquid W fills
When completely enclosing space, enclosed valve 16a is closed.The opening and closing of enclosed valve 16a is controlled by control device 4.
Bar 6 is constituted such as by stainless steel, synthetic resin or in the material that the surface of metal material carries out chromium plating,
And there is cylindrical shape.The surface roughness on the surface of bar 6 is reduced by mirror finish etc..
It is integrally formed with the rotary shaft of motor 71 under the driving of stepping motor, that is, motor 71 of drive member 7
Ball-screw 72 rotated, via the supporting part (ball nut) 73 screwed togather with ball-screw 72, make bar 6 along axial progress
It moves back and forth.
Fig. 2 is the schematic diagram of accepting container 5.As shown in Fig. 2, in the front end of bar 6, be equipped with can be relative to bar 6 before
Hold the protruding member 61 being axially moveable.Protruding member 61 includes plectane portion 61a and columned pin portion 61b.In addition, bar 6 wraps
Include: the pin portion 61b of circular pilot hole 6a, protruding member 61 along the axially directed of bar 6 and are slided by pilot hole 6a；With
And the outer perimeter holes 6b of the outer peripheral surface set on bar 6.In addition, the torsion of aftermentioned bellows members in order to prevent, it can be by prominent structure
The pin portion 61b and pilot hole 6a of part 61 are set as multiple or form polygonal shape etc., to carry out rotation stop to protruding member 61.
Bellows members 8 are installed in protruding member 61.One end of bellows members 8 is installed on the plectane of protruding member 61
The periphery (A in Fig. 2) of portion 61a, the other end are installed on ring element 8a (B in Fig. 2).The periphery of ring element 8a be for example clipped in by
Accepting container 5 forms between structural body 5a, 5b of segmentation construction and fixed.The connection method of structural body 5a and structural body 5b can be with
Using any means.Whereby, the coating fluid P for being contained in accepting container 5 is isolated with bar 6, it is i.e. enclosed to form enclosure space with bar 6
Space 9.In addition, clearance C 1 is equipped between the outer peripheral surface of bar 6 and the inner surface of bellows members 8, in addition, in the periphery of bar 6
Clearance C 2 is equipped between face and the inner circumferential of ring element 8a, so as to which enclosed liquid W so that bellows members 8 are stretched, can be made
Pass through.In addition, bellows members 8 are stretched relative to the axial movement of bar 6.
The enclosed liquid W from liquid-filled pipe 16 is sealed in enclosed space 9.Enclosed enclosed liquid W is incompressible
Fluid.Enclosed space 9 includes: the first space 91 between the outer peripheral surface of the inner surface and bar 6 that are formed in bellows members 8；Shape
At the second space 92 between accepting container 5, containment member 51 and bar 6；Be formed in protruding member 61, bellows members 8 and
Third space 93 between the front end of bar 6；The 4th space for being formed in bar 6, and being formed between protruding member 61 and bar 6
94；And the 5th space 95 for being formed in bar 6, and the first space 91 being connected to the 4th space 94.Enclosed liquid W passes through the
The 91~the 5th space 95 of one space and clearance C above-mentioned 1, C2 can be flowed integrally.
Before using apparatus for coating 10, following prepare is carried out.
Firstly, as shown in figure 3, a sharp volume for making bar 6 proceed to bellows members 8 reaches at maximum position.
It is predetermined angular that one sharp volume of bellows members 8, which reaches the sharp angle, θ that maximum state is bellows members 8,
State when (different according to the shape of bellows members 8, usually 60 degree or so), at this point, the volume in the first space 91 is most
Greatly.Then, at this point, using bellows members 8 elastic force, the front end face of bar 6 is contacted with plectane portion 61a, at the 4th space 94
In minimum volume.Here, enclosed valve 16a is opened, liquid of viaing while the air of the inside in enclosed space 9 is discharged is sealed
Enter pipe 16 and supply enclosed liquid W to enclosed space 9, later closes enclosed valve 16a, in order not to make air remain on enclosed space
9 and enclosed liquid W is enclosed.In addition, whether enclosed liquid W fills with enclosed space 9 and makes plectane portion according to the supply of enclosed liquid W
61a is moved slightly away to judge from the front end of bar 6.At this point, supply valve 13a, discharge valve 14a, dump valve 15a, which are in, closes shape
State, but in order to move bar 6 glibly, dump valve 15a can be opened in advance, hold receiving via air discharge duct 15
The air of the inside of device 5 is discharged.
As shown in figure 4, retreating bar 6 to maximum going-back position, (front end face of bar 6 is another with accepting container 5
The immediate position in end, hereinafter referred to as initial position) at, supply valve 13a is opened, via coating fluid supply pipe 13, will be stored up
The coating fluid P for being stored in storage bin 1 is supplied into accepting container 5.At this point, dump valve 15a is opened, via air discharge duct 15,
By the air discharge in accepting container 5.Air discharge duct 15 is located at the position with 13 opposite side of coating fluid supply pipe, is set to receiving
Highest position in container 5.Therefore, the air in accepting container 5 can be smoothly discharged.In addition, when coating fluid P is arranged from air
When outlet pipe 15 is overflowed, dump valve 15a is closed.
Here, enclosed liquid W is incompressible fluid, remained in enclosed space 9 without air, thus even if bellows structure
Part 8 is deformed with the advance and retreat of bar 6, and the volume in enclosed space 9 is constant all the time.Therefore, during bar 6 is retreated, liquid W is enclosed
It is flowed between first space 91, third space 93, the 4th space 94 and the 5th space 95 shown in Fig. 4 B, first is empty
Between 91, the volume in third space 93 and the 4th space 94 changes.In the 5th space 95, volume there is no variation,
In second space 92, there is no variations for volume, and enclosing liquid W, also there is no flowings.Accordingly, with respect to the first space 91
The space that volume increase and decrease is adjusted is third space 93 and the 4th space 94.
Specifically, one sharp angle, θ of bellows members 8 is becoming smaller from the state of Fig. 3 to the state of Fig. 4, first
The volume in space 91 is becoming smaller.But the constant volume due to enclosing liquid W, thus become smaller by the volume in the first space 91 and pressed
Enclosed liquid W out flows to third space 93, correspondingly, as a result, the plectane portion 61a of the front end face of bar 6 and protruding member 61
Between separate, while bar 6 retreat.
In addition, the volume in the 4th space 94 becomes larger as pin portion 61b is moved together with plectane portion 61a, at this point, by
The 5th space 95 is passed through from the first space 91 in enclosed liquid W and is flowed, so that the volume of enclosed liquid W is kept constant.
In addition, due to design problems, when the outer perimeter holes 6b for forming the 5th space 95 reaches second space 92, enclosing liquid
In second space 92 flowing (referring to Fig. 5) can also occur for W.In addition, needing to be designed to that outer perimeter holes 6b is made to pass through second empty when design
Between 92, but not by containment member 51 cover (needing distance T shown in fig. 5).
In this way, enclosed liquid W is enclosed to enclosed space 9, coating fluid P is filled in accepting container 5, apparatus for coating 10 carry out with
Under movement.In fact, coating fluid P is also filled in coating fluid discharge pipe 14 and gap nozzle 2, omit the description herein.
As shown in fig. 6, discharge valve 14a is opened, the motor 71 of drive member 7 is made to drive and carry out ball-screw 72
Rotation, so that bar 6 be made to advance according to discharge-amount required for gap nozzle 2, discharge speed.Due to the advance of bar 6, it is installed on
The protruding member 61 of the front end of bar 6 also advances, but the volume due to enclosing space 9 remains constant, thus protruding member 61 is only
Advance distance more smaller than the advance amount of bar 6 (while the distance between the front end face of bar 6 shown in Fig. 4 B and plectane portion 61a L contract
It is small).The bellows members 8 for being installed on protruding member 61 only extend the advance amount of protruding member 61.Then, in accepting container 5
Coating fluid P spues via coating fluid discharge pipe 14 to gap nozzle 2.The coating fluid P to spue to gap nozzle 2 is from gap nozzle 2
Slit be coated to substrate 12.When being coated with stopping, discharge valve 14a being closed, when coating starts again at, by discharge valve
14a is opened.
In addition, bar 6 moves on, when a sharp angle, θ of bellows members 8 is more than predetermined angular (such as 60 degree left sides
It is right) when (when the position that bar 6 crosses Fig. 3 is advanced), since the volume in the first space 91 is becoming smaller, so far, enclose liquid W reverse flow
Dynamic, bar 6 is advancing while the distance L of Fig. 4 B expands.
In this way, in apparatus for coating 10, the volume due to enclosing space 9 will not change, thus by before bar 6 in turn
Volume variation caused, inside accepting container 5 is consistent with the discharge-amount of coating fluid P.In addition, the bellows structure formed by thin slice
The inside and outside of part 8 is filled by incompressible liquid, thus the pressure by generating when the advance of bar 6 is via the bellows members of elasticity
8 are transmitted, and coating fluid P is identical with the pressure of enclosed liquid W, thus bellows members 8 will not generate flexible deformation.Whereby, it applies
The coating weight of cloth liquid P will not change, and coating fluid P is equably coated on substrate 12 by thickness.
As shown in fig. 7, advance to bar 6 after maximum progressive position (hereinafter referred to as maximum insertion position), it will
Discharge valve 14a is closed and is opened supply valve 13a, at the same time, is driven reverse the motor 71 of drive member 7,
It retreats bar 6 to initial position from maximum insertion position, via coating fluid supply pipe 13, coating fluid P is supplied into accepting container 5
It gives.The spatial volume for being retreated and being increased according to bar 6, gradually supplies coating fluid P into accepting container 5, thus at second
In coating fluid supply step later, dump valve 15a is made to remain off state.In addition, as shown in figure 12, enclosing to enclosed sky
Between 9 enclosed liquid W amount it is seldom in the case where, in the midway that bar 6 advances, the film of bellows members 8 starts in a manner of being recessed
Deformation cannot achieve correct discharge-amount, but as shown in figure 3, since the sharp volume of one in bellows members 8 is maximum
Enclosed liquid W is enclosed under state, therefore the above problem will not be generated.
The above process is repeated, to be coated operation.
According to the apparatus for coating 10 of above structure, following effect can be played.
(1) by enclosing the i.e. enclosed liquid W of liquid to enclosed space 9, relative to the axial movement of bar 6, space 9 is enclosed
Volume will not change, and the bellows members formed by thin slice 8 can be prevented itself to be deformed, thus by the axial direction of bar 6
The variable quantity of volume caused by movement, in accepting container 5 is consistent with the amount of coating fluid P of discharge.Therefore, it can be improved painting
The precision (quantitative) of the coating weight of cloth liquid P.
(2) it can be easily implemented with flowering structure: being sent out when by the flexible volume for leading to the first space 91 of bellows members 8
When life increase and decrease, there is adjustment space (the third sky that can make to enclose to the enclosed liquid W movement in enclosed space 9 due to enclosing space 9
Between 93 and the 4th space 94), thus the axial movement relative to bar 6 can make the constant volume in enclosed space 9.
(3) a part (third space) of adjustment space can be formed by the front end and protruding member 61 of bar 6, thus
Form mobile source, the movement of enclosed liquid W when being increased and decreased by the flexible volume for leading to the first space 91 of bellows members 8
Place to go.As a result, can be easily implemented with flowering structure: when bellows members 8 are stretched, can make to move it is smooth,
It can make the constant volume in enclosed space 9.
(4) due to a part of adjustment space (the 4th space 94) via the 5th space 95 being formed in inside bar 6 and with
The connection of first space 91, thus when being increased and decreased by the flexible volume for leading to the first space 91 of bellows members 8, liquid meeting
Across the inside of bar 6, moved between the first space 91 and adjustment space.
(5) it since enclosed liquid W is in the state that the volume in the first space 91 is in maximum, is enclosed to enclosed space 9, because
Regardless of bar 6 be in where, can accurately play above-mentioned effect.Specifically, as shown in figure 12, if in the first sky
Between 91 volume be in very little in the state of will be liquid-filled, then when bar 6 is pressed into, bellows members 8 can be by inwards
It inhales and is deformed, it may appear that the discharge-amount of the coating fluid state fewer than the intrusion of bar 6, thus be able to solve according to this structure
The above problem.
(6) since bar 6 and coating fluid P will not be directly in contact, it is thus possible to prevent the painting as caused by the movement of bar 6
Cloth liquid P is dry, into ash, liquid leakage etc..In addition, the liquid sedimentation as caused by the delay of coating fluid P, polymerization can be prevented not
Uniformly etc..
(other embodiment)
Fig. 8 and Fig. 9 is the coating fluid supply for being fitted without protruding member 61 in other embodiments of the present invention on bar 6
The schematic diagram of device.Other embodiment does not have protruding member 61, different from the embodiment described above in this regard, others knot
Structure is identical as above embodiment.Therefore, in the explanation of other embodiment, part identical with above embodiment is marked
Identical symbol is infused, and omits the detailed description of above content.
As shown in Figure 8 and Figure 9, the axial middle part of bellows members 8 is installed on the front end (part of X1 in figure) of bar 6,
In addition, the front end of bellows members 8 is closed (part of X2 in figure).Bellows members 8 include the first bellows members
81 and second bellows members 82, one end of above-mentioned first bellows members 81 be installed on the front end of bar 6, the other end is installed on bar
Boundary between 6 and accepting container 5, above-mentioned second bellows members 82 it is closed at one end, the other end is installed on the front end of bar 6.
In addition, between the first bellows members 81 and the second bellows members 82 so that enclosed liquid can freely movably,
Equipped with gap, intercommunicating pore 6c.
Enclosed space 9 includes: the first sky between the outer peripheral surface of the inner surface and bar 6 that are formed in the first bellows members 81
Between 91；The second space 92 being formed between the outer peripheral surface of accepting container 5, containment member 51 and bar 6；And it is formed in the second wave
The 6th space 96 between line pipe component 82 and the front end of bar 6.
Bellows members 8 are stretched relative to the axial movement of bar 6, whereby, the volume in the first space 91, the 6th space
96 volume can change, but the constant volume of second space 92.As shown in Figure 8 and Figure 9, hold when bar 6 is inserted into receiving
In device 5, the first bellows members 81 elongation, the second bellows members 82 are shunk.As a result, the volume in the first space 91 increases
Add, the volume reduction in the 6th space 96 is only the volume incrementss in the first space 91.Therefore, the whole volume in space 9 is enclosed
Constant, the pressure enclosed to the liquid in enclosed space 9 is also constant.
As shown in the movement from Fig. 9 to Fig. 8, when bar 6 is retreated from accepting container 5, the first bellows members 81 are shunk, the
The elongation of two bellows members 82.
As a result, the volume in the first space 91 is reduced, the volume incrementss in the 6th space 96 are only the first space 91
Volume reduction.
Therefore, the whole constant volume in space 9 is enclosed, the pressure enclosed to the liquid in enclosed space 9 is also constant.
According to the apparatus for coating 10 of above structure, following effect can be played.
(1) adjustment space (the 6th space 96) can be formed by the front end of bar 6 and the front end of bellows members 8, from
And form the mobile source of liquid when being increased and decreased by the flexible volume for leading to the first space 91 of bellows members 8, movement
Place to go.As a result, can be easily implemented with flowering structure: when bellows members 8 are stretched, enclosed space 9 can be made
Constant volume.
(2) the axial middle part of bellows members 8 is installed on the front end of bar 6, and middle part works as bellows members as boundary
When i.e. the first bellows members 81 in a 8 side side extend, i.e. the second bellows members 82 in another party side are shunk, when a side side i.e. the
When one bellows members 81 are shunk, the elongation of i.e. the second bellows members 82 in another party side.As a result, according to this structure, relatively
In the axial movement of bar 6, it is able to maintain that the constant volume in enclosed space 9.
(3) protruding member that setting can be axially moveable relative to the front end of bar 6 is not needed, furthermore, it is not necessary that in bar 6
Inside formed be contained in enclosed space 9, for liquid-filled space.Therefore, the structure around bar 6 can be simplified.
In addition, as shown in Figure 10, bellows members 8 can not also be installed on bar 6.In this case, by very
Simple structure can make bellows members 8 stretch relative to the axial movement of bar 6, can maintain the body in enclosed space 9
Product is constant.But in this case, make bellows since bellows members 8 are not installed on bar 6, thus are needed to pay attention to
Component 8 does not generate bending, torsion or stretches uneven.In addition, according to until Fig. 9 embodiment, bellows members 8 into
When row is flexible, the above problem will not occur, the movement of bellows members 8 can be made smooth, can be improved the resistance to of bellows members 8
Long property.
(other embodiment)
In the respective embodiments described above, the rotary shaft one under the driving of the motor 71 of drive member 7, with motor 71
The ball-screw 72 that body is formed is rotated, and via the supporting part 73 screwed togather with ball-screw 72, bar 6 is back and forth moved along axial
It is dynamic.But it is also possible to as shown in figure 11, by axis motor 74, move back and forth bar 6 along axial direction.
Drive member 7 includes: axis motor 74；And to the ball bushing 75 that axis motor 74 is supported.
According to the present embodiment, due to being that the driving force from axis motor 74 is transferred directly to bar 6, it is thus possible to mention
The responsiveness of the axial movement of high bar 6.Further, since ball-screw and supporting member can be deleted, it is thus possible to reduce and drive
Space required for dynamic component 7.In addition, can prevent from causing shadow to bar by the vibration that the rotary motion of ball-screw generates
It rings, can be improved the precision of the axial movement of bar, as a result, being unevenly coated for coating fluid can be reduced.
In addition, in the respective embodiments described above, coating liquid supplying device 3 be laterally, i.e. so that bar 6 in the horizontal direction into
What the mode that row moves back and forth configured, but coating liquid supplying device is also possible to longitudinally, i.e. so that bar vertically carries out
The mode of reciprocating movement configures, or can obliquely configure.
Under the premise of not departing from the spirit and scope of the present invention for being recorded in claims, can be carried out various modifications and
Change.
Industrial utilizability
In the present invention, the coating fluid supply dress improved due to being capable of providing a kind of precision of coating weight for making coating fluid
It sets, therefore utility value industrially is very big.
Claims (4)
1. a kind of coating liquid supplying device characterized by comprising
Accommodate the accepting container of coating fluid；
Bar, the bar are axially moveable in the accepting container, make to be contained in the coating fluid of the accepting container from the receiving
Container spues；And
The coating fluid for being contained in the accepting container is isolated with the bar for bellows members, bellows members, with the bar
Between form the mode that enclosure space is enclosed space and be installed on the bar, and the axial movement relative to the bar is stretched
Contracting,
It is sealed with the liquid of incoercible fluid in the enclosed space,
The enclosed space has the first sky being formed between the outer peripheral surface of the bar and the inner surface of the bellows members
Between, the liquid is enclosed in the state that the volume in first space is in maximum to the enclosed space,
When the flexible volume for leading to first space of the bellows members increases and decreases, the enclosed space has energy
It is enough to supply to enclose the adjustment space mobile to the liquid in the enclosed space.
2. coating liquid supplying device as described in claim 1, which is characterized in that
In the front end of the bar, the protruding member that can be axially moveable relative to the front end of the bar is installed,
The front end of the bellows members is installed on the protruding member,
A part of the adjustment space is formed by the front end and the protruding member of the bar.
3. coating liquid supplying device as described in claim 1, which is characterized in that
The axial middle part of the bellows members is installed on the front end of the bar,
The front end of the bellows members be it is closed,
The adjustment space is formed by the front end of the bar and the front end of the bellows members.
4. coating liquid supplying device as described in claim 1, which is characterized in that
A part of the adjustment space is connected to via the space for the inside for being formed in the bar with first space.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016240574A JP6174776B1 (en) | 2016-12-12 | 2016-12-12 | Coating liquid supply device |
| JP2016-240574 | 2016-12-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108212694A CN108212694A (en) | 2018-06-29 |
| CN108212694B true CN108212694B (en) | 2019-05-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711224793.5A Active CN108212694B (en) | 2016-12-12 | 2017-11-29 | Coating liquid supplying device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6174776B1 (en) |
| KR (1) | KR101840174B1 (en) |
| CN (1) | CN108212694B (en) |
| TW (1) | TWI638685B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113102171A (en) * | 2021-03-04 | 2021-07-13 | 南昌大学 | Slit coating head of coating machine |
| CN113751289B (en) * | 2021-09-29 | 2024-03-19 | 广西玉柴机器股份有限公司 | Leak-proof coating device for oilcan |
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| JPS63100731A (en) * | 1986-10-17 | 1988-05-02 | Canon Inc | High viscosity resist pump |
| CN101187365A (en) * | 2006-11-20 | 2008-05-28 | 株式会社小金井 | Liquid medicine supply device |
| CN101209444A (en) * | 2006-12-27 | 2008-07-02 | 中外炉工业株式会社 | Coating liquid supplying device |
| CN102576660A (en) * | 2009-11-11 | 2012-07-11 | 株式会社小金井 | Chemical liquid supply device and chemical liquid supply method |
| CN104707763A (en) * | 2013-12-12 | 2015-06-17 | 东京毅力科创株式会社 | Liquid supplying apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP3865938B2 (en) * | 1998-06-30 | 2007-01-10 | 株式会社コガネイ | Bellows pump |
| JP4652067B2 (en) * | 2005-01-21 | 2011-03-16 | 株式会社鷺宮製作所 | Bellows pump |
| JP4585563B2 (en) * | 2007-12-03 | 2010-11-24 | 株式会社コガネイ | Chemical supply device and pump assembly |
| JP4824792B2 (en) * | 2009-07-02 | 2011-11-30 | 東京エレクトロン株式会社 | Coating device |
| KR101147167B1 (en) * | 2010-12-06 | 2012-05-25 | 주식회사 나래나노텍 | An improved pumping device and method of chemical liquids and a feeding device of chemical liquids having the same |
| US8624482B2 (en) * | 2011-09-01 | 2014-01-07 | Toshiba Techno Center Inc. | Distributed bragg reflector for reflecting light of multiple wavelengths from an LED |
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2016
- 2016-12-12 JP JP2016240574A patent/JP6174776B1/en active Active
-
2017
- 2017-10-03 TW TW106134253A patent/TWI638685B/en active
- 2017-11-22 KR KR1020170156220A patent/KR101840174B1/en active Active
- 2017-11-29 CN CN201711224793.5A patent/CN108212694B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63100731A (en) * | 1986-10-17 | 1988-05-02 | Canon Inc | High viscosity resist pump |
| CN101187365A (en) * | 2006-11-20 | 2008-05-28 | 株式会社小金井 | Liquid medicine supply device |
| CN101209444A (en) * | 2006-12-27 | 2008-07-02 | 中外炉工业株式会社 | Coating liquid supplying device |
| CN102576660A (en) * | 2009-11-11 | 2012-07-11 | 株式会社小金井 | Chemical liquid supply device and chemical liquid supply method |
| CN104707763A (en) * | 2013-12-12 | 2015-06-17 | 东京毅力科创株式会社 | Liquid supplying apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6174776B1 (en) | 2017-08-02 |
| TWI638685B (en) | 2018-10-21 |
| CN108212694A (en) | 2018-06-29 |
| JP2018094500A (en) | 2018-06-21 |
| KR101840174B1 (en) | 2018-03-19 |
| TW201821166A (en) | 2018-06-16 |
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