CN107994806B - Precision piezoelectric stick-slip turntable and its driving method - Google Patents
Precision piezoelectric stick-slip turntable and its driving method Download PDFInfo
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
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Abstract
一种高精度压电粘滑旋转台，以解决当前粘滑式压电旋转平台输出推力小、定位精度低、运动速度慢、摩擦损耗大以及环境适应性差等技术问题。本发明包括壳体、限位装置Ⅰ、轴承、齿轮、旋转台、封装板、齿条、限位装置Ⅱ、定子、挡板和封装壳。通过齿轮与齿条啮合传动，提升了旋转平台的推力和速度；通过齿轮的旋转带动旋转台运动，相比于直接驱动微动旋转平台，减少了驱动元件与旋转轴之间由于快速摩擦产生的损耗；在不同工况下，平台可随时实现对驱动元件正压力大小的调节，有效的提升了旋转台的输出精度及环境适应性。本发明在精密光学仪器、生物微操作和微纳精密驱动与定位技术领域具有很好的应用前景。
A high-precision piezoelectric stick-slip rotary table is provided to solve the technical problems of the current stick-slip piezoelectric rotary table, such as small output thrust, low positioning accuracy, slow motion speed, large friction loss, and poor environmental adaptability. The invention includes a casing, a limiting device I, a bearing, a gear, a rotary table, a packaging plate, a rack, a limiting device II, a stator, a baffle and a packaging shell. The thrust and speed of the rotating platform are improved through the meshing transmission of the gear and the rack; the rotation of the gear drives the movement of the rotating platform, which reduces the friction between the driving element and the rotating shaft due to rapid friction compared with the direct drive of the micro-motion rotating platform. Loss; under different working conditions, the platform can adjust the positive pressure of the drive element at any time, effectively improving the output accuracy and environmental adaptability of the rotary table. The invention has good application prospects in the technical fields of precision optical instruments, biological micro-manipulation and micro-nano precision driving and positioning.
Description
技术领域technical field
本发明涉及一种高精度压电粘滑旋转台，属于微纳精密驱动与定位技术领域。The invention relates to a high-precision piezoelectric stick-slip rotary table, which belongs to the technical field of micro-nano precision driving and positioning.
背景技术Background technique
压电驱动技术是一种利用压电材料的逆压电效应将电能转化为机械能的新型驱动方式，与传统的电磁驱动方式相比，具有低速大转矩（推力）、力矩密度高、设计灵活、结构紧凑、定位精度高、响应速度快、断电自锁、无电磁干扰且不受电磁干扰以及可不使用轴承和润滑等优点，在机器人关节驱动、精密仪器仪表、超精密加工、航空航天以及生命科学等领域均具有广泛的应用前景，是近年来精密特种驱动技术领域研究的热点之一。Piezoelectric drive technology is a new drive method that uses the inverse piezoelectric effect of piezoelectric materials to convert electrical energy into mechanical energy. Compared with traditional electromagnetic drive methods, it has low speed, high torque (thrust), high torque density, and flexible design. , compact structure, high positioning accuracy, fast response, power-off self-locking, no electromagnetic interference and no electromagnetic interference, no need to use bearings and lubrication, etc., in robot joint drive, precision instrumentation, ultra-precision machining, aerospace and Life science and other fields have broad application prospects, and are one of the hot spots in the field of precision special drive technology in recent years.
压电微动平台是由压电陶瓷执行器驱动的、能够产生微纳米级运动精度与运动分辨率的精密定位装置，它可应用于超精密加工、大规模集成电路制造、扫描探针显微镜、生物工程等前沿技术领域中。现有技术中的微动旋转平台，多为直接驱动式微动旋转平台，它采用压电陶瓷驱动器作为激励源，直接驱动微动旋转平台进行微旋转，从而带动固定在平台上的装置实现旋转运动。由于传统微动旋转平台采用压电陶瓷直接驱动，其往往存在输出推力小、定位精度低、运动速度慢和摩擦损耗大、环境适应性差等技术问题，因此，设计一种输出推力大、传动精度高、运动速度快、摩擦损耗小、环境适应性强的微纳米级粘滑惯性驱动平台是十分有必要的。The piezoelectric micro-motion platform is a precision positioning device driven by a piezoelectric ceramic actuator that can produce micro-nano-level motion accuracy and motion resolution. It can be applied to ultra-precision machining, large-scale integrated circuit manufacturing, scanning probe microscope, In the field of cutting-edge technology such as bioengineering. Most of the micro-motion rotary platforms in the prior art are direct-drive micro-motion rotary platforms, which use piezoelectric ceramic drivers as the excitation source to directly drive the micro-motion rotary platform for micro-rotation, thereby driving the device fixed on the platform to achieve rotation sports. Since the traditional micro-motion rotary platform is directly driven by piezoelectric ceramics, it often has technical problems such as small output thrust, low positioning accuracy, slow motion speed, large friction loss, and poor environmental adaptability. Therefore, it is necessary to design a It is very necessary to have a micro-nano scale stick-slip inertial drive platform with high speed, fast movement speed, small friction loss and strong environmental adaptability.
发明内容Contents of the invention
为解决已有粘滑式压电旋转平台输出推力小、定位精度低、运动速度慢、摩擦损耗大、环境适应性差等技术问题，本发明公开了一种高精度压电粘滑旋转台。In order to solve the technical problems of the existing stick-slip piezoelectric rotary platform such as small output thrust, low positioning accuracy, slow movement speed, large friction loss, and poor environmental adaptability, the present invention discloses a high-precision piezoelectric stick-slip rotary platform.
本发明所采用的技术方案是：The technical scheme adopted in the present invention is:
所述高精度压电粘滑旋转台为一种双堆叠双驱动足定子组件实现方式的高精度压电粘滑旋转台包括壳体、限位装置Ⅰ、轴承、齿轮、旋转台、封装板、齿条、限位装置Ⅱ、定子、挡板和封装壳；限位装置Ⅰ通过限位装置安装凸台固定在壳体内，轴承通过轴承安装面安装在壳体内，齿轮通过齿轮安装凹槽安装在壳体内，齿轮通过键槽与旋转轴固定连接，旋转台通过旋转轴插入轴承内侧，封装板通过螺纹连接固定在壳体上，齿条通过限位槽Ⅰ和限位槽Ⅱ安装在限位装置Ⅰ和限位装置Ⅱ内与齿轮相啮合，限位装置Ⅱ通过限位装置安装凸台Ⅱ安装在壳体内，定子通过定子固定螺栓安装在壳体内与齿条紧密接触，挡板通过挡板安装螺纹孔固定在壳体上，封装壳通过封装壳螺纹孔安装在壳体上。The high-precision piezoelectric stick-slip rotary table is a high-precision piezoelectric stick-slip rotary table that realizes double-stacked double-drive foot stator assemblies, including a housing, a limit device I, bearings, gears, a rotary table, a packaging board, Rack, limit device II, stator, baffle and package shell; limit device I is fixed in the housing through the installation boss of the limit device, the bearing is installed in the housing through the bearing installation surface, and the gear is installed in the gear through the gear installation groove. In the housing, the gear is fixedly connected to the rotating shaft through the keyway, the rotating table is inserted into the inner side of the bearing through the rotating shaft, the packaging plate is fixed on the housing through screw connection, and the rack is installed on the limiting device I through the limiting groove I and the limiting groove II It meshes with the gear in the limit device II, the limit device II is installed in the housing through the limit device installation boss II, the stator is installed in the housing through the stator fixing bolts and is in close contact with the rack, and the baffle is installed through the baffle installation thread The hole is fixed on the shell, and the package shell is installed on the shell through the threaded hole of the package shell.
所述壳体包括限位装置螺纹孔Ⅰ、限位装置安装凸台Ⅰ、轴承安装面、齿轮安装凹槽、限位装置安装凸台Ⅱ、限位装置螺纹孔Ⅱ、封装板螺纹孔、封装板安装面、定子螺纹孔、挡板安装螺纹孔、内置通线孔和封装壳螺纹孔；限位装置螺纹孔Ⅰ和限位装置安装凸台Ⅰ用于安装限位装置Ⅰ，轴承安装面与轴承接触、齿轮安装凹槽用于安装齿轮，限位装置安装凸台Ⅱ和限位装置螺纹孔Ⅱ用于安装限位装置Ⅱ，封装板螺纹孔可将封装板固定安装在封装板安装面上，定子螺纹孔用于安装定子，挡板安装螺纹孔可将挡板固定安装在壳体上，封装壳螺纹孔用于安装封装壳。The housing includes a limit device threaded hole I, a limit device installation boss I, a bearing mounting surface, a gear installation groove, a limit device installation boss II, a limit device thread hole II, a package plate threaded hole, and a package Plate mounting surface, stator threaded hole, baffle mounting threaded hole, built-in wire hole and package shell threaded hole; limit device threaded hole Ⅰ and limit device installation boss Ⅰ are used to install limit device Ⅰ, bearing installation surface and The bearing contact and gear installation groove are used to install the gear, the limit device installation boss II and the limit device threaded hole II are used to install the limit device II, and the package board threaded hole can fix the package board on the package board mounting surface , the stator threaded hole is used to install the stator, the baffle installation threaded hole can fix the baffle on the shell, and the package shell threaded hole is used to install the package shell.
所述限位装置Ⅰ设置有限位装置安装孔Ⅰ、限位槽Ⅰ和限位基座Ⅰ；限位装置安装孔Ⅰ用于将限位装置Ⅰ固定安装在限位装置安装凸台Ⅰ上，限位槽Ⅰ与限位基座用于放置齿条。The limit device I is provided with a limit device installation hole I, a limit groove I and a limit base I; the limit device installation hole I is used to fix the limit device I on the limit device installation boss I, The limit groove I and the limit base are used to place the rack.
所述轴承包括轴承内表面和轴承外表面；轴承内表面与旋转轴接触，轴承外表面与壳体接触。The bearing includes an inner surface of the bearing and an outer surface of the bearing; the inner surface of the bearing is in contact with the rotating shaft, and the outer surface of the bearing is in contact with the casing.
所述齿轮包括齿轮内表面、键槽和齿轮直齿；齿轮内表面与旋转轴接触，键槽通过与键固定旋转轴齿轮直齿与齿条直齿进行配合。The gear includes an inner surface of the gear, a keyway and straight teeth of the gear; the inner surface of the gear is in contact with the rotating shaft, and the keyway cooperates with the straight teeth of the gear rack to fix the rotating shaft through the key.
所述旋转台包括刻度线、外围装置安装螺纹孔、键和旋转轴，外围装置安装螺纹孔用于安装外围装置，键用于将旋转轴与齿轮安装固定，旋转轴与轴承内表面和齿轮内表面接触。The rotary table includes a scale line, a peripheral device installation threaded hole, a key and a rotating shaft, the peripheral device installation threaded hole is used for installing the peripheral device, the key is used for installing and fixing the rotating shaft and the gear, and the rotating shaft and the inner surface of the bearing and the inner surface of the gear surface contact.
所述封装板设置有封装板安装孔，螺钉通过封装板安装孔将封装板固定安装在壳体上。The package board is provided with a package board installation hole, and the screw passes through the package board installation hole to fix the package board on the housing.
所述齿条包括限位块Ⅰ、限位板、齿条直齿和摩擦接触面，其中限位板放置在限位槽Ⅰ和限位槽Ⅱ内，齿条直齿与齿轮直齿配合连接齿轮和齿条，摩擦接触面与驱动足接触。The rack includes a limiting block I, a limiting plate, straight teeth of the rack and a frictional contact surface, wherein the limiting plate is placed in the limiting groove I and the limiting groove II, and the straight teeth of the rack are connected with the straight teeth of the gear Gear and rack, the friction contact surface is in contact with the drive foot.
所述限位装置Ⅱ设置有限位基座Ⅱ、限位块Ⅱ、限位装置安装孔Ⅱ和限位槽Ⅱ；螺栓通过限位装置安装孔Ⅱ用于将限位装置Ⅱ固定在限位装置安装凸台Ⅱ上，限位块Ⅱ与限位块Ⅰ配合，限位槽Ⅱ和限位基座Ⅱ用于放置齿条。The limiting device II is provided with a limiting base II, a limiting block II, a limiting device installation hole II and a limiting groove II; bolts pass through the limiting device installation hole II to fix the limiting device II on the limiting device On the installation boss II, the limit block II cooperates with the limit block I, and the limit groove II and the limit base II are used to place the rack.
所述定子包括预紧螺钉、垫片、压电叠堆、柔性铰链和定子固定螺栓；所述压电叠堆通过垫片和预紧螺钉固定在柔性铰链内，所述定子固定螺栓通过定子安装孔将定子固定安装在壳体上；The stator includes pre-tightening screws, gaskets, piezoelectric stacks, flexible hinges and stator fixing bolts; the piezoelectric stack is fixed in the flexible hinge through gaskets and pre-tightening screws, and the stator fixing bolts are installed through the stator The stator is fixedly installed on the shell through the hole;
所述柔性铰链机构设置有端部横梁、定子安装孔、预紧螺钉安装孔、直圆型铰链Ⅰ、直圆型铰链Ⅱ、直圆型铰链Ⅲ、直圆型铰链Ⅳ、直圆型铰链Ⅴ、直圆型铰链Ⅵ、双驱动足、直圆型凹槽、刚性直梁Ⅸ、刚性横梁Ⅲ和刚性直梁Ⅹ。所述端部横梁用于传递压电叠堆的作用力，所述定子安装孔用于固定柔性铰链机构。所述预紧螺钉安装孔与预紧螺钉进行螺纹连接预紧压电叠堆。所述直圆型铰链Ⅰ和直圆型铰链Ⅳ通过刚性横梁Ⅲ刚性连接，所述直圆型铰链Ⅴ和直圆型铰链Ⅵ通过刚性直梁Ⅸ刚性连接，所述直圆型铰链Ⅱ和直圆型铰链Ⅲ通过刚性直梁Ⅹ进行刚性连接，所述直圆型铰链Ⅰ、直圆型铰链Ⅳ、刚性横梁Ⅲ、直圆型铰链Ⅴ、刚性直梁Ⅸ和直圆型铰链Ⅵ组成的框型结构可以实现齿条沿限位槽Ⅰ和限位槽Ⅱ向右运动，所述直圆型铰链Ⅰ、直圆型铰链Ⅳ、刚性横梁Ⅲ、直圆型铰链Ⅱ、直圆型铰链Ⅲ和刚性直梁Ⅹ组成的框型结构可以实现齿条沿限位槽Ⅰ和限位槽Ⅱ向左运动。所述双驱动足位于端部横梁中心轴线位置，双驱动足端部涂有摩擦类材料。The flexible hinge mechanism is provided with end beams, stator mounting holes, pre-tightening screw mounting holes, straight circular hinges I, straight circular hinges II, straight circular hinges III, straight circular hinges IV, and straight circular hinges V , Straight round hinge Ⅵ, double driving feet, straight round groove, rigid straight beam Ⅸ, rigid cross beam Ⅲ and rigid straight beam Ⅹ. The end beam is used to transmit the force of the piezoelectric stack, and the stator mounting hole is used to fix the flexible hinge mechanism. The pre-tightening screw mounting hole is threadedly connected with the pre-tightening screw to pre-tighten the piezoelectric stack. The straight circular hinge I and the straight circular hinge IV are rigidly connected by a rigid beam III, the straight circular hinge V and the straight circular hinge VI are rigidly connected by a rigid straight beam IX, and the straight circular hinge II and the straight The circular hinge III is rigidly connected through the rigid straight beam X, and the frame composed of the straight circular hinge I, the straight circular hinge IV, the rigid beam III, the straight circular hinge V, the rigid straight beam IX and the straight circular hinge VI Type structure can realize the rightward movement of the rack along the limit groove I and limit groove II, the straight circular hinge I, straight circular hinge IV, rigid beam III, straight circular hinge II, straight circular hinge III and The frame structure composed of the rigid straight beam X can realize the leftward movement of the rack along the limiting groove I and the limiting groove II. The double driving feet are located at the central axis of the beam at the end, and the ends of the double driving feet are coated with friction materials.
或为一种菱形定子组件实现方式的高精度压电粘滑旋转台，所述柔性铰链机构采用5052铝合金、6061铝合金或7075铝合金材料，柔性铰链采用菱形结构铰链。所述柔性铰链设置有驱动足、端部横梁、定子安装孔、预紧螺钉安装孔、刚性折梁Ⅰ、刚性折梁Ⅱ、刚性折梁Ⅲ、刚性折梁Ⅳ、直圆型铰链Ⅷ、直圆型铰链Ⅶ、直圆型铰链Ⅹ和直圆型铰链Ⅸ。所述柔性铰链通过定子安装孔固定在定子螺纹孔上，所述驱动足位于端部横梁的中间位置，驱动足与齿条的摩擦接触面滑动接触，驱动足的表面涂有耐摩擦材料，所述刚性折梁Ⅰ与刚性折梁Ⅱ通过直圆型铰链Ⅶ刚性连接，所述刚性折梁Ⅲ与刚性折梁Ⅳ通过直圆型铰链Ⅸ刚性连接，所述直圆型铰链Ⅷ和直圆型铰链Ⅶ通过刚性折梁Ⅰ刚性连接，所述直圆型铰链Ⅹ和直圆型铰链Ⅸ通过刚性折梁Ⅲ刚性连接。所述直圆型铰链Ⅷ、直圆型铰链Ⅶ和直圆型铰链Ⅸ具有相同的圆角半径值R3，直圆型铰链Ⅹ具有圆角半径值R4，R4与R3的比值为2~5，调整圆角半径R4与R3的比值，可改变柔性铰链9-4的轴向刚度分布。Or it is a high-precision piezoelectric stick-slip rotary table that realizes a rhombic stator assembly. The flexible hinge mechanism is made of 5052 aluminum alloy, 6061 aluminum alloy or 7075 aluminum alloy, and the flexible hinge is a rhombus structure hinge. The flexible hinge is provided with a driving foot, an end beam, a stator mounting hole, a pre-tightening screw mounting hole, a rigid folding beam I, a rigid folding beam II, a rigid folding beam III, a rigid folding beam IV, a straight circular hinge VIII, a straight Round hinge VII, straight round hinge X and straight round hinge IX. The flexible hinge is fixed on the threaded hole of the stator through the stator mounting hole. The driving foot is located in the middle of the end beam, and the driving foot is in sliding contact with the friction contact surface of the rack. The surface of the driving foot is coated with a friction-resistant material. The rigid fold beam I and the rigid fold beam II are rigidly connected by a straight circular hinge VII, the rigid fold beam III and the rigid fold beam IV are rigidly connected by a straight circular hinge IX, and the straight circular hinge VIII and the straight circular hinge Hinge VII is rigidly connected by rigid fold beam I, and the straight circular hinge X and straight circular hinge IX are rigidly connected by rigid fold beam III. The straight round hinge VIII, straight round hinge VII and straight round hinge IX have the same fillet radius value R3, the straight round hinge X has a fillet radius value R4, and the ratio of R4 to R3 is 2~5, Adjusting the ratio of the fillet radii R4 to R3 can change the axial stiffness distribution of the flexible hinge 9-4.
或为一种斜梯型定子组件实现方式的高精度压电粘滑旋转台，所述柔性铰链机构采用斜梯式框型结构的柔性铰链，所述柔性铰链机构采用5052铝合金、6061铝合金、7075铝合金、Ti-35A钛合金或Ti-13钛合金材料。所述柔性铰链机构设置有定子安装孔，通过定子固定螺栓将柔性铰链机构与壳体的定子螺纹孔固定。所述柔性铰链机构设置有刚性直梁Ⅴ和刚性直梁Ⅵ，所述柔性铰链机构设置有直圆型铰链Ⅱ、直圆型铰链Ⅲ、直圆型铰链Ⅴ和直圆型铰链Ⅵ，所述直圆型铰链Ⅱ和直圆型铰链Ⅲ通过刚性直梁Ⅵ刚性连接，所述直圆型铰链Ⅴ和直圆型铰链Ⅵ通过刚性直梁Ⅴ刚性连接。所述刚性直梁Ⅴ和刚性直梁Ⅵ之间的距离为H，所述直圆型铰链Ⅱ、直圆型铰链Ⅲ、直圆型铰链Ⅴ和直圆型铰链Ⅵ具有相同的圆角半径值R8，其中R8/H的取值范围0.017~0.09，可以保证柔性铰链机构具有位移放大能力以及压电叠堆具有一定的安装空间。所述柔性铰链机构设置有斜梯型梁，所述斜梯型梁的长度为K，其中K/H取值范围为1.5~4，所述斜梯型梁与水平方向的夹角为α，其中α取值范围为10°~80°。定子通过柔性铰链机构进行位移放大，所述斜梯型梁沿轴向刚度分布不均而产生侧向位移。所述驱动足端面相应涂有陶瓷类或玻璃纤维类摩擦材料，所述驱动足驱动齿条运动。Or it is a high-precision piezoelectric stick-slip rotary table in the form of an inclined ladder stator assembly. The flexible hinge mechanism adopts a flexible hinge with an inclined ladder frame structure, and the flexible hinge mechanism is made of 5052 aluminum alloy and 6061 aluminum alloy. , 7075 aluminum alloy, Ti-35A titanium alloy or Ti-13 titanium alloy material. The flexible hinge mechanism is provided with a stator mounting hole, and the flexible hinge mechanism is fixed to the stator threaded hole of the housing through stator fixing bolts. The flexible hinge mechanism is provided with a rigid straight beam V and a rigid straight beam VI, and the flexible hinge mechanism is provided with a straight circular hinge II, a straight circular hinge III, a straight circular hinge V, and a straight circular hinge VI. The straight circular hinge II and the straight circular hinge III are rigidly connected by a rigid straight beam VI, and the straight circular hinge V and the straight circular hinge VI are rigidly connected by a rigid straight beam V. The distance between the rigid straight beam V and the rigid straight beam VI is H, and the straight circular hinge II, straight circular hinge III, straight circular hinge V and straight circular hinge VI have the same fillet radius value R8, where the value range of R8/H is 0.017~0.09, can ensure that the flexible hinge mechanism has displacement amplification capability and the piezoelectric stack has a certain installation space. The flexible hinge mechanism is provided with an inclined ladder beam, the length of the inclined ladder beam is K, wherein the value range of K/H is 1.5~4, and the angle between the inclined ladder beam and the horizontal direction is α, Wherein the value range of α is 10°~80°. The displacement of the stator is amplified through a flexible hinge mechanism, and the lateral displacement of the inclined ladder beam is caused by the uneven distribution of stiffness along the axial direction. The end surface of the driving foot is correspondingly coated with ceramic or glass fiber friction material, and the driving foot drives the rack to move.
或为一种非对称结构定子组件实现方式的高精度压电粘滑旋转台，所述柔性铰链机构采用5052铝合金、6061铝合金或7075铝合金材料，柔性铰链机构采用非对称框型结构铰链，所述柔性铰链机构设置有定子安装孔，通过定子安装孔可将柔性铰链机构固定在壳体上，所述柔性铰链机构设置有直圆型铰链Ⅰ、直圆型铰链Ⅳ、直圆型铰链Ⅴ、直圆型铰链Ⅵ、刚性直梁Ⅰ和刚性直梁Ⅱ，所述直圆型铰链Ⅰ和直圆型铰链Ⅳ通过刚性直梁Ⅱ刚性连接，所述直圆型铰链Ⅴ和直圆型铰链Ⅵ通过刚性直梁Ⅰ刚性连接。所述直圆型铰链Ⅰ和直圆型铰链Ⅳ具有相同的圆角半径值R5，直圆型铰链Ⅴ和直圆型铰链Ⅵ具有相同的圆角半径值R6，通过调整圆角半径R6与R5的比值，可改变定子的轴向刚度分布，其中R6和R5的比值范围为0.1~1。所述柔性铰链机构采用非对称框型结构，使其沿轴向刚度分布不均而产生侧向位移。所述柔性铰链机构设置有驱动足和端部横梁，驱动足位于端部横梁的中间处，所述驱动足的厚度为N，齿条的厚度为M，其中N＜M可以保证有效接触面积，提高传动效率，其中M=（N+1）mm。所述驱动足端面相应涂有陶瓷类或玻璃纤维类摩擦材料。Or a high-precision piezoelectric stick-slip rotary table with an asymmetric structure stator assembly, the flexible hinge mechanism is made of 5052 aluminum alloy, 6061 aluminum alloy or 7075 aluminum alloy material, and the flexible hinge mechanism adopts an asymmetric frame structure hinge , the flexible hinge mechanism is provided with a stator mounting hole through which the flexible hinge mechanism can be fixed on the housing, and the flexible hinge mechanism is provided with a straight round hinge I, a straight round hinge IV, a straight round hinge V. Straight round hinge VI, rigid straight beam I and rigid straight beam II, the straight round hinge I and straight round hinge IV are rigidly connected by rigid straight beam II, the straight round hinge V and straight round hinge Hinge VI is rigidly connected by rigid straight beam I. The straight circular hinge I and the straight circular hinge IV have the same fillet radius value R5, the straight circular hinge V and the straight circular hinge VI have the same fillet radius value R6, by adjusting the fillet radius R6 and R5 The ratio of R6 and R5 can change the axial stiffness distribution of the stator, and the ratio of R6 and R5 ranges from 0.1 to 1. The flexible hinge mechanism adopts an asymmetrical frame structure, so that the stiffness distribution along the axial direction is uneven and produces lateral displacement. The flexible hinge mechanism is provided with a driving foot and an end beam, the driving foot is located in the middle of the end beam, the thickness of the driving foot is N, and the thickness of the rack is M, wherein N<M can ensure the effective contact area, Improve transmission efficiency, where M=(N+1)mm. The end surface of the driving foot is correspondingly coated with ceramic or glass fiber friction material.
或为一种双堆叠拱形定子组件实现方式的高精度压电粘滑旋转台，所述柔性铰链机构设置有驱动足、横梁、定子安装孔、预紧螺钉安装孔、椭圆型铰链Ⅱ、椭圆型铰链Ⅰ、刚性横梁Ⅱ、刚性曲梁Ⅰ、刚性曲梁Ⅱ、刚性曲梁Ⅲ和刚性曲梁Ⅳ。所述驱动足位于横梁的中间位置，所述驱动足端部涂有摩擦材料，驱动足与摩擦接触面线接触，用于驱动齿条。所述定子安装孔用于固定柔性铰链机构，所述预紧螺钉安装孔通过与预紧螺钉螺纹连接固定压电叠堆。所述刚性横梁Ⅱ位于柔性铰链机构的中心位置，所述刚性曲梁Ⅰ和刚性曲梁Ⅱ通过椭圆型铰链Ⅰ刚性连接，所述刚性曲梁Ⅲ和刚性曲梁Ⅳ通过椭圆型铰链Ⅱ刚性连接，所述刚性曲梁Ⅰ、刚性曲梁Ⅱ、椭圆型铰链Ⅰ和刚性横梁Ⅱ组成的框型结构可以实现齿条沿限位槽Ⅰ和限位槽Ⅱ向右运动，所述刚性横梁Ⅱ、椭圆型铰链Ⅱ、刚性曲梁Ⅲ和刚性曲梁Ⅳ组成的框型结构可以实现齿条沿限位槽Ⅰ和限位槽Ⅱ向左运动。Or it is a high-precision piezoelectric stick-slip rotary table with double-stacked arched stator components. Type hinge Ⅰ, rigid beam Ⅱ, rigid curved beam Ⅰ, rigid curved beam Ⅱ, rigid curved beam Ⅲ and rigid curved beam Ⅳ. The driving foot is located in the middle of the beam, the end of the driving foot is coated with friction material, and the driving foot is in line contact with the friction contact surface for driving the rack. The stator mounting hole is used to fix the flexible hinge mechanism, and the pre-tightening screw mounting hole is threaded with the pre-tightening screw to fix the piezoelectric stack. The rigid beam II is located at the center of the flexible hinge mechanism, the rigid curved beam I and rigid curved beam II are rigidly connected by an elliptical hinge I, and the rigid curved beam III and rigid curved beam IV are rigidly connected by an elliptical hinge II , the frame structure composed of the rigid curved beam I, the rigid curved beam II, the elliptical hinge I and the rigid beam II can realize the rightward movement of the rack along the limiting groove I and the limiting groove II, and the rigid beam II, The frame structure composed of the elliptical hinge II, the rigid curved beam III and the rigid curved beam IV can realize the leftward movement of the rack along the limiting groove I and the limiting groove II.
或为一种斜槽式定子组件实现方式的高精度压电粘滑旋转台，所述柔性铰链机构采用5052铝合金、6061铝合金、7075铝合金、Ti-35A钛合金或Ti-13钛合金材料，柔性铰链机构采用斜槽式框形结构铰链。所述柔性铰链机构设置有定子安装孔，通过定子固定螺栓将柔性铰链机构与壳体的定子螺纹孔固定。所述柔性铰链机构设置有刚性直梁Ⅺ和刚性直梁Ⅻ，所述柔性铰链机构设置有直圆型铰链Ⅱ、直圆型铰链Ⅲ、直圆型铰链Ⅴ和直圆型铰链Ⅵ，所述直圆型铰链Ⅱ和直圆型铰链Ⅲ通过刚性直梁Ⅻ刚性连接，所述直圆型铰链Ⅴ和直圆型铰链Ⅵ通过刚性直梁Ⅺ刚性连接，所述刚性直梁Ⅺ和刚性直梁Ⅻ之间的距离为L，刚性直梁Ⅺ和刚性直梁Ⅻ的宽度为L1，厚度为B，其中L1/L取值范围为1/6~1/2，B/L取值范围为0.5~1可以保证柔性铰链机构具有位移放大的能力。所述直圆型铰链Ⅱ、直圆型铰链Ⅲ、直圆型铰链Ⅴ和直圆型铰链Ⅵ具有相同的圆角半径值R1，其中R1/L取值范围为1/60~1/12。所述柔性铰链机构设置有斜槽，所述斜槽的个数为X，高度为L2，宽度为C，与竖直方向的夹角为α，其中X≥1，L2/C取值范围为1~8，C/L取值范围为0.01~0.1，夹角α的取值范围为10°~80°。所述柔性铰链机构设置有驱动足和加厚横梁，所述驱动足位于加厚横梁的中间位置处，锯齿波电信号激励压电叠堆产生输出力，通过斜槽传递到驱动足上，所述斜槽与驱动足沿轴向刚度分布不均而产生侧向位移。所述驱动足端面相应涂有陶瓷类或玻璃纤维类摩擦材料，所述驱动足的厚度为N，齿条的厚度为M，其中N≤M可以保证有效接触面积，提高传动效率，其中M=（N+1）mm。Or it is a high-precision piezoelectric stick-slip rotary table that realizes a skewed stator assembly, and the flexible hinge mechanism is made of 5052 aluminum alloy, 6061 aluminum alloy, 7075 aluminum alloy, Ti-35A titanium alloy or Ti-13 titanium alloy material, the flexible hinge mechanism adopts a chute type frame structure hinge. The flexible hinge mechanism is provided with a stator mounting hole, and the flexible hinge mechanism is fixed to the stator threaded hole of the housing through stator fixing bolts. The flexible hinge mechanism is provided with a rigid straight beam Ⅺ and a rigid straight beam Ⅻ, and the flexible hinge mechanism is provided with a straight circular hinge II, a straight circular hinge III, a straight circular hinge V and a straight circular hinge VI, and the The straight circular hinge II and the straight circular hinge III are rigidly connected by a rigid straight beam Ⅻ, the straight circular hinge V and the straight circular hinge VI are rigidly connected by a rigid straight beam Ⅺ, and the rigid straight beam Ⅺ and the rigid straight beam The distance between Ⅻ is L, the width of rigid straight beam Ⅺ and rigid straight beam Ⅻ is L1, and the thickness is B, where the value range of L1/L is 1/6~1/2, and the value range of B/L is 0.5 ~1 can ensure that the flexible hinge mechanism has the ability of displacement amplification. The straight round hinge II, straight round hinge III, straight round hinge V and straight round hinge VI have the same fillet radius R1, wherein R1/L ranges from 1/60 to 1/12. The flexible hinge mechanism is provided with a chute, the number of the chute is X, the height is L2, the width is C, and the angle with the vertical direction is α, wherein X≥1, and the value range of L2/C is 1~8, the value range of C/L is 0.01~0.1, and the value range of the included angle α is 10°~80°. The flexible hinge mechanism is provided with a driving foot and a thickened beam. The driving foot is located in the middle of the thickened beam. The sawtooth wave electric signal excites the piezoelectric stack to generate an output force, which is transmitted to the driving foot through the chute. The uneven distribution of axial rigidity between the chute and the driving foot produces lateral displacement. The end surface of the driving foot is correspondingly coated with ceramic or glass fiber friction material, the thickness of the driving foot is N, and the thickness of the rack is M, where N≤M can ensure the effective contact area and improve the transmission efficiency, where M= (N+1) mm.
或为一种双堆叠单驱动足定子组件实现方式的高精度压电粘滑旋转台，所述柔性铰链机构设置有驱动足、横梁、定子安装孔、预紧螺钉安装孔、刚性直梁、直圆型铰链Ⅰ、刚性横梁、直圆型铰链Ⅱ、直圆型铰链Ⅲ、直圆型铰链Ⅳ、直圆型铰链Ⅴ和直圆型铰链Ⅵ；所述驱动足位于横梁的中间位置，驱动足与齿条的摩擦接触面滑动接触，所述定子安装孔通过与定子固定螺栓进行螺纹连接将定子固定在壳体的定子螺纹孔上，所述预紧螺钉安装孔与预紧螺钉螺纹连接将压电叠堆预紧，所述直圆型铰链Ⅰ和直圆型铰链Ⅳ通过刚性横梁刚性连接，所述直圆型铰链Ⅱ和直圆型铰链Ⅲ通过刚性直梁刚性连接，所述直圆型铰链Ⅴ和直圆型铰链Ⅵ通过刚性直梁刚性连接。所述直圆型铰链Ⅱ、直圆型铰链Ⅲ、直圆型铰链Ⅴ和直圆型铰链Ⅵ具有相同的圆角半径为R1，所述直圆型铰链Ⅰ和直圆型铰链Ⅳ具有相同的圆角半径为R2，R1和R2的比值为D，D的取值范围为1.5~4.5。Or it is a high-precision piezoelectric stick-slip rotary table with a double-stacked single-drive foot stator assembly. The flexible hinge mechanism is provided with drive feet, beams, stator mounting holes, pre-tightening screw mounting holes, rigid straight Circular hinge Ⅰ, rigid beam, straight circular hinge Ⅱ, straight circular hinge Ⅲ, straight circular hinge Ⅳ, straight circular hinge Ⅴ and straight circular hinge Ⅵ; Sliding contact with the frictional contact surface of the rack, the stator mounting hole is threaded with the stator fixing bolt to fix the stator on the stator threaded hole of the housing, and the pre-tightening screw mounting hole is threaded with the pre-tightening screw to press The electric stack is preloaded, the straight circular hinge I and the straight circular hinge IV are rigidly connected by a rigid beam, the straight circular hinge II and the straight circular hinge III are rigidly connected by a rigid straight beam, and the straight circular hinge Hinge Ⅴ and straight circular hinge Ⅵ are rigidly connected by rigid straight beams. The straight round hinge II, straight round hinge III, straight round hinge V and straight round hinge VI have the same fillet radius R1, and the straight round hinge I and straight round hinge IV have the same The fillet radius is R2, the ratio of R1 to R2 is D, and the range of D is 1.5~4.5.
所述挡板设置有挡板安装孔；挡板安装孔用于将挡板安装在壳体上。The baffle is provided with a baffle installation hole; the baffle installation hole is used to install the baffle on the housing.
所述封装壳设置有封装壳安装孔、外接通线孔和导线放置腔，螺栓通过封装壳安装孔和封装壳螺纹孔将封装壳安装在壳体上。The package case is provided with a package case installation hole, an external wiring hole and a wire placement cavity, and the bolts pass through the package case installation hole and the package case threaded hole to install the package case on the case.
所述齿条的长度为a，所述限位装置Ⅰ与限位装置Ⅱ的宽度为b，限位装置Ⅰ与限位装置Ⅱ之间的距离为c，其中a>b+c。The length of the rack is a, the width of the limiting device I and the limiting device II is b, and the distance between the limiting device I and the limiting device II is c, wherein a>b+c.
所述驱动方法采用的复合激励电信号实现，复合激励电信号包括摩擦调控波和驱动波，通过将摩擦调控波复合叠加于驱动波的快速通电阶段，激发定子在快速变形阶段处于微副高频共振状态，基于超声减摩效应降低快速变形阶段定子与齿条间的摩擦阻力；所述驱动波为锯齿波，所述摩擦调控波为正弦波；其中锯齿波的周期为T1，激励电压幅值为V1，对称性为S，正弦波周期为T2，激励电压幅值为V2，锯齿波与正弦波的周期比为T1/T2=100~20000，激励电压幅值比为V1/V2=2~6。The driving method is realized by a composite excitation electric signal. The composite excitation electric signal includes a friction regulation wave and a driving wave. By superimposing the friction regulation wave on the fast energization stage of the driving wave, the stator is excited at a micro-secondary high frequency during the rapid deformation stage. Resonance state, based on the ultrasonic anti-friction effect to reduce the frictional resistance between the stator and the rack in the rapid deformation stage; the driving wave is a sawtooth wave, and the friction control wave is a sine wave; the period of the sawtooth wave is T 1 , and the amplitude of the excitation voltage is The value is V 1 , the symmetry is S, the period of the sine wave is T 2 , the amplitude of the excitation voltage is V 2 , the cycle ratio of the sawtooth wave and the sine wave is T 1 /T 2 =100~20000, and the amplitude ratio of the excitation voltage is V 1 /V 2 =2~6.
本发明的有益效果是：The beneficial effects of the present invention are:
本发明由于采用直齿圆柱齿轮与直齿齿条的啮合传动，提升了旋转平台的输出推力和运动速度；通过齿轮的旋转带动旋转台运动，相比于直接驱动微动旋转平台，减少了驱动元件与旋转轴之间由于快速摩擦产生的损耗；在不同工况下，平台可随时实现对驱动元件正压力大小的调节，有效的提升了旋转台的输出精度及环境适应性。The present invention improves the output thrust and movement speed of the rotary platform by adopting the meshing transmission of the spur gear and the spur rack; the rotation of the gear drives the movement of the rotary platform, which reduces the driving force compared with the direct drive of the micro-motion rotary platform. The loss caused by rapid friction between the components and the rotating shaft; under different working conditions, the platform can adjust the positive pressure of the driving components at any time, effectively improving the output accuracy and environmental adaptability of the rotary table.
附图说明Description of drawings
图1所示为本发明提出的一种双堆叠双驱动足定子组件实现方式的高精度压电粘滑旋转台的结构示意图；Fig. 1 is a schematic structural diagram of a high-precision piezoelectric stick-slip rotary table in a double-stacked double-drive foot stator assembly implementation mode proposed by the present invention;
图2所示为本发明提出的一种双堆叠双驱动足定子组件实现方式的高精度压电粘滑旋转台的壳体结构示意图；FIG. 2 is a schematic diagram of the housing structure of a high-precision piezoelectric stick-slip rotary table in a dual-stacked dual-drive foot stator assembly implementation mode proposed by the present invention;
图3所示为本发明提出的一种双堆叠双驱动足定子组件实现方式的高精度压电粘滑旋转台的限位装置Ⅰ结构示意图；Fig. 3 is a schematic diagram of the structure of the high-precision piezoelectric stick-slip rotary table limit device I proposed by the present invention in a dual-stack dual-drive foot stator assembly implementation mode;
图4所示为本发明提出的一种双堆叠双驱动足定子组件实现方式的高精度压电粘滑旋转台的轴承结构示意图；Fig. 4 is a schematic diagram of the bearing structure of a high-precision piezoelectric stick-slip rotary table in a double-stacked double-drive foot stator assembly implementation mode proposed by the present invention;
图5所示为本发明提出的一种双堆叠双驱动足定子组件实现方式的高精度压电粘滑旋转台的齿轮结构示意图；FIG. 5 is a schematic diagram of the gear structure of a high-precision piezoelectric stick-slip rotary table in a double-stacked double-drive foot stator assembly implementation mode proposed by the present invention;
图6所示为本发明提出的一种双堆叠双驱动足定子组件实现方式的高精度压电粘滑旋转台的旋转台结构示意图；Fig. 6 is a schematic diagram of the rotary table structure of a high-precision piezoelectric stick-slip rotary table in a double-stacked double-drive foot stator assembly implementation mode proposed by the present invention;
图7所示为本发明提出的一种双堆叠双驱动足定子组件实现方式的高精度压电粘滑旋转台的封装板结构示意图；FIG. 7 is a schematic structural diagram of a packaging board of a high-precision piezoelectric stick-slip rotary table that implements a double-stacked double-drive foot stator assembly proposed by the present invention;
图8所示为本发明提出的一种双堆叠双驱动足定子组件实现方式的高精度压电粘滑旋转台的齿条结构示意图Ⅰ；Fig. 8 is a schematic diagram of rack structure I of a high-precision piezoelectric stick-slip rotary table in a double-stacked double-drive foot stator assembly implementation mode proposed by the present invention;
图9所示为本发明提出的一种双堆叠双驱动足定子组件实现方式的高精度压电粘滑旋转台的齿条结构示意图Ⅱ；Fig. 9 is a schematic diagram II of the rack structure of a high-precision piezoelectric stick-slip rotary table in a double-stacked double-drive foot stator assembly implementation mode proposed by the present invention;
图10所示为本发明提出的一种双堆叠双驱动足定子组件实现方式的高精度压电粘滑旋转台的限位装置Ⅱ示意图；Fig. 10 is a schematic diagram of the limit device II of the high-precision piezoelectric stick-slip rotary table in a double-stacked double-drive foot stator assembly implementation mode proposed by the present invention;
图11所示为本发明提出的一种双堆叠双驱动足定子组件实现方式的高精度压电粘滑旋转台的定子结构示意图；FIG. 11 is a schematic diagram of the stator structure of a high-precision piezoelectric stick-slip rotary table in a dual-stacked dual-drive foot stator assembly implementation mode proposed by the present invention;
图12所示为本发明提出的一种双堆叠双驱动足定子组件实现方式的高精度压电粘滑旋转台的柔性铰链的正视图；Fig. 12 is a front view of a flexible hinge of a high-precision piezoelectric stick-slip rotary table in a double-stacked double-drive foot stator assembly implementation mode proposed by the present invention;
图13所示为本发明提出的一种双堆叠双驱动足定子组件实现方式的高精度压电粘滑旋转台的挡板结构示意图；Fig. 13 is a schematic diagram of the baffle plate structure of a high-precision piezoelectric stick-slip rotary table in a double-stacked double-drive foot stator assembly implementation mode proposed by the present invention;
图14所示为本发明提出的一种双堆叠双驱动足定子组件实现方式的高精度压电粘滑旋转台的封装壳结构示意图；Fig. 14 is a schematic diagram of the packaging shell structure of a high-precision piezoelectric stick-slip rotary table in a double-stacked double-drive foot stator assembly implementation mode proposed by the present invention;
图15所示为本发明提出的一种菱形定子组件实现方式的高精度压电粘滑旋转台的结构示意图；Fig. 15 is a schematic structural diagram of a high-precision piezoelectric stick-slip rotary table that implements a diamond-shaped stator assembly proposed by the present invention;
图16所示为本发明提出的一种菱形定子组件实现方式的高精度压电粘滑旋转台的柔性铰链结构示意图；Fig. 16 is a schematic diagram of a flexible hinge structure of a high-precision piezoelectric stick-slip rotary table in a diamond-shaped stator assembly implementation mode proposed by the present invention;
图17所示为本发明提出的一种斜梯型定子组件实现方式的高精度压电粘滑旋转台的结构示意图；Fig. 17 is a schematic structural diagram of a high-precision piezoelectric stick-slip rotary table that implements an inclined ladder stator assembly proposed by the present invention;
图18所示为本发明提出的一种斜梯型定子组件实现方式的高精度压电粘滑旋转台的柔性铰链结构示意图；Fig. 18 is a schematic diagram of a flexible hinge structure of a high-precision piezoelectric stick-slip rotary table proposed by the present invention to realize an inclined ladder stator assembly;
图19所示为本发明提出的一种非对称结构定子组件实现方式的高精度压电粘滑旋转台的结构示意图；Fig. 19 is a schematic structural diagram of a high-precision piezoelectric stick-slip rotary table that implements an asymmetric structure stator assembly proposed by the present invention;
图20所示为本发明提出的一种非对称结构定子组件实现方式的高精度压电粘滑旋转台的柔性铰链结构示意图；Fig. 20 is a schematic diagram of a flexible hinge structure of a high-precision piezoelectric stick-slip rotary table according to an implementation method of an asymmetric structure stator assembly proposed by the present invention;
图21所示为本发明提出的一种双堆叠拱形定子组件实现方式的高精度压电粘滑旋转台的结构示意图；Fig. 21 is a schematic diagram of the structure of a high-precision piezoelectric stick-slip rotary table in a double-stack arched stator assembly implementation mode proposed by the present invention;
图22所示为本发明提出的一种双堆叠拱形定子组件实现方式的高精度压电粘滑旋转台的柔性铰链结构示意图；Fig. 22 is a schematic diagram of a flexible hinge structure of a high-precision piezoelectric stick-slip rotary table in a double-stack arched stator assembly implementation mode proposed by the present invention;
图23所示为本发明提出的一种斜槽式定子组件实现方式的高精度压电粘滑旋转台的结构示意图；Fig. 23 is a schematic structural diagram of a high-precision piezoelectric stick-slip rotary table that implements a skewed stator assembly proposed by the present invention;
图24所示为本发明提出的一种斜槽式定子组件实现方式的高精度压电粘滑旋转台的柔性铰链示意图；Fig. 24 is a schematic diagram of a flexible hinge of a high-precision piezoelectric stick-slip rotary table according to an implementation mode of a skewed stator assembly proposed by the present invention;
图25所示为本发明提出的一种双叠堆单驱动足定子组件实现方式的高精度压电粘滑旋转台的结构示意图；Fig. 25 is a schematic structural diagram of a high-precision piezoelectric stick-slip rotary table in a dual-stack single-drive foot stator assembly implementation mode proposed by the present invention;
图26所示为本发明提出的一种双叠堆单驱动足定子组件实现方式的高精度压电粘滑旋转台的柔性铰链结构示意图；Fig. 26 is a schematic diagram of a flexible hinge structure of a high-precision piezoelectric stick-slip rotary table in a dual-stack single-drive foot stator assembly implementation mode proposed by the present invention;
图27所示为本发明提出的一种高精度压电粘滑旋转台的驱动信号波形示意图。FIG. 27 is a schematic diagram of a driving signal waveform of a high-precision piezoelectric stick-slip rotary table proposed by the present invention.
具体实施方式Detailed ways
具体实施方式一：结合图1~图14说明本实施方式，本实施方式提供了一种双堆叠双驱动足定子组件实现方式的高精度压电粘滑旋转台的具体实施方案。所述一种双堆叠双驱动足定子组件实现方式的高精度压电粘滑旋转台的具体实施方式表述如下：Specific Embodiment 1: This embodiment is described with reference to FIGS. 1 to 14 . This embodiment provides a specific embodiment of a high-precision piezoelectric stick-slip rotary table that realizes double-stacked double-drive foot stator assemblies. The specific implementation of the high-precision piezoelectric stick-slip rotary table with double-stacked double-drive foot stator assembly is described as follows:
所述一种双堆叠双驱动足定子组件实现方式的高精度压电粘滑旋转台包括壳体1、限位装置Ⅰ2、轴承3、齿轮4、旋转台5、封装板6、齿条7、限位装置Ⅱ8、定子9、挡板10和封装壳11。The high-precision piezoelectric stick-slip rotary table of the dual-stack dual-drive foot stator assembly implementation method includes a housing 1, a limit device I2, a bearing 3, a gear 4, a rotary table 5, a packaging plate 6, a rack 7, Limiting device II8, stator 9, baffle plate 10 and package shell 11.
所述壳体1包括限位装置螺纹孔Ⅰ1-1、限位装置安装凸台Ⅰ1-2、轴承安装面1-3、齿轮安装凹槽1-4、限位装置安装凸台Ⅱ1-5、限位装置螺纹孔Ⅱ1-6、封装板螺纹孔1-7、封装板安装面1-8、定子螺纹孔1-9、挡板安装螺纹孔1-10、内置通线孔1-11和封装壳螺纹孔1-12。所述限位装置螺纹孔Ⅰ1-1用于将限位装置Ⅰ2安装在限位装置安装凸台Ⅰ1-2上，所述轴承安装面1-3与轴承3接触，所述齿轮安装凹槽1-4用于安装齿轮4，所述限位装置螺纹孔Ⅱ1-6用于将限位装置Ⅱ8安装在限位装置安装凸台Ⅱ1-5上，所述封装板螺纹孔1-7可将封装板6固定安装在封装板安装面1-8上，所述定子螺纹孔1-9用于安装定子9，所述挡板安装螺纹孔1-10可将挡板10固定安装在壳体1上，所述内置通线孔1-11可将导线通入壳体1内部，所述封装壳螺纹孔1-12用于安装封装壳11，封装壳11可以放置一段长度的导线。The housing 1 includes threaded holes I1-1 for the limiting device, mounting bosses I1-2 for the limiting device, bearing mounting surfaces 1-3, gear mounting grooves 1-4, mounting bosses II1-5 for the limiting device, Limiting device threaded holes Ⅱ 1-6, packaging board threaded holes 1-7, packaging board mounting surface 1-8, stator threaded holes 1-9, baffle mounting threaded holes 1-10, built-in wiring holes 1-11 and packaging Shell threaded holes 1-12. The threaded hole I1-1 of the limiting device is used to install the limiting device I2 on the mounting boss I1-2 of the limiting device, the bearing mounting surface 1-3 is in contact with the bearing 3, and the gear mounting groove 1 -4 is used to install the gear 4, the threaded hole II1-6 of the limiting device is used to install the limiting device II8 on the mounting boss II1-5 of the limiting device, and the threaded hole 1-7 of the packaging plate can package The board 6 is fixedly installed on the mounting surface 1-8 of the packaging board, the stator threaded hole 1-9 is used to install the stator 9, and the baffle plate installation threaded hole 1-10 can fix the baffle plate 10 on the housing 1 , the built-in wire holes 1-11 can lead wires into the housing 1, and the packaging shell threaded holes 1-12 are used to install the packaging shell 11, and the packaging shell 11 can place a certain length of wires.
所述限位装置Ⅰ2包括限位装置安装孔Ⅰ2-1、限位槽Ⅰ2-2和限位基座Ⅰ2-3。所述限位装置安装孔Ⅰ2-1与限位装置螺纹孔Ⅰ1-1通过螺栓连接将限位装置Ⅰ2安装壳体1的限位装置安装凸台Ⅰ1-2上，所述限位槽Ⅰ2-2内放置齿条7，限位槽Ⅰ2-2可以使齿条7保持竖直，从而使齿轮4和齿条7更好的啮合，所述限位基座Ⅰ2-3用于放置齿条7。The limiting device I2 includes a limiting device installation hole I2-1, a limiting groove I2-2 and a limiting base I2-3. The limit device installation hole I2-1 is connected with the limit device threaded hole I1-1 by bolts to install the limit device I2 on the limit device installation boss I1-2 of the housing 1, and the limit groove I2- 2. The rack 7 is placed inside, the limit groove I2-2 can keep the rack 7 vertical, so that the gear 4 and the rack 7 are better meshed, and the limit base I2-3 is used to place the rack 7 .
所述轴承3设置有轴承内表面3-1和轴承外表面3-2。所述轴承内表面3-1与旋转轴5-4接触，将轴承3套在旋转轴5-4上，所述轴承外表面3-2与壳体1接触，将轴承3放置在壳体1内，轴承3与旋转轴5-4的配合使旋转轴5-4更有效的旋转。The bearing 3 is provided with a bearing inner surface 3-1 and a bearing outer surface 3-2. The bearing inner surface 3-1 is in contact with the rotating shaft 5-4, the bearing 3 is set on the rotating shaft 5-4, the bearing outer surface 3-2 is in contact with the housing 1, and the bearing 3 is placed in the housing 1 Inside, the cooperation between the bearing 3 and the rotating shaft 5-4 makes the rotating shaft 5-4 rotate more effectively.
所述齿轮4包括齿轮内表面4-1、键槽4-2和齿轮直齿4-3。所述齿轮内表面4-1与旋转轴5-4外侧接触，所述键槽4-2与键5-3配合连接，将齿轮4与旋转轴5-4连接在一起，齿轮4可带动旋转轴5-4共同转动，所述齿轮直齿4-3与齿条直齿7-3啮合，可将齿条7的直线运动装换为齿轮4的旋转运动，提升了旋转平台的输出推力和运动速度，减少了驱动元件与旋转轴之间由于快速摩擦产生的损耗。The gear 4 includes a gear inner surface 4-1, a keyway 4-2 and a gear spur tooth 4-3. The inner surface 4-1 of the gear is in contact with the outer side of the rotating shaft 5-4, and the key groove 4-2 is connected with the key 5-3 to connect the gear 4 with the rotating shaft 5-4, and the gear 4 can drive the rotating shaft 5-4 rotate together, the gear straight teeth 4-3 mesh with the rack straight teeth 7-3, the linear motion of the rack 7 can be replaced by the rotary motion of the gear 4, and the output thrust and motion of the rotary platform are improved speed, reducing losses due to rapid friction between the drive element and the rotating shaft.
所述旋转台5包括刻度线5-1、外围装置安装螺纹孔5-2、键5-3和旋转轴5-4。所述刻度线5-1便于显示转动的角度，所述外围装置安装螺纹孔5-2用于放置和安装其他设备在旋转台5上，所述键5-3与键槽4-2配合连接，将旋转轴5-4与齿轮4连接在一起，实现共同转动，所述旋转轴5-4插入轴承3内侧实现旋转。The rotary table 5 includes a scale mark 5-1, a peripheral device mounting threaded hole 5-2, a key 5-3 and a rotating shaft 5-4. The scale line 5-1 is convenient for displaying the angle of rotation, the peripheral device mounting threaded hole 5-2 is used to place and install other equipment on the rotary table 5, the key 5-3 is mated with the keyway 4-2, The rotating shaft 5-4 is connected with the gear 4 to realize common rotation, and the rotating shaft 5-4 is inserted into the inner side of the bearing 3 to realize rotation.
所述封装板6设置有封装板安装孔6-1。所述封装板安装孔6-1通过螺栓与封装板螺纹孔1-7进行连接，将封装板6安装在壳体1上。The package board 6 is provided with a package board mounting hole 6-1. The mounting hole 6 - 1 of the packaging board is connected with the threaded hole 1 - 7 of the packaging board through bolts, so that the packaging board 6 is installed on the casing 1 .
所述齿条7包括限位块Ⅰ7-1、限位板7-2、齿条直齿7-3和摩擦接触面7-4。所述限位块Ⅰ7-1与限位块Ⅱ8-2配合，当运动到一定的位置时，限位块Ⅰ7-1与限位块Ⅱ8-2可以相互卡住，防止齿条7掉落，所述限位板7-2放置在限位槽Ⅰ2-2和限位槽Ⅱ8-4中，限定了齿条7运动的方向，所述齿条直齿7-3与齿轮直齿4-3啮合，将齿条7的直线运动转换为齿轮4的旋转运动，所述摩擦接触面7-4与驱动足9-4-1接触，驱动足9-4-1可以通过摩擦接触带动齿条7实现直线运动。The rack 7 includes a limiting block I 7-1, a limiting plate 7-2, straight rack teeth 7-3 and a frictional contact surface 7-4. The limit block I7-1 cooperates with the limit block II8-2. When moving to a certain position, the limit block I7-1 and the limit block II8-2 can be locked together to prevent the rack 7 from falling. The limiting plate 7-2 is placed in the limiting groove I2-2 and the limiting groove II8-4, which limits the direction of movement of the rack 7, and the straight teeth 7-3 of the rack and the straight teeth 4-3 of the gear Mesh, convert the linear motion of the rack 7 into the rotational motion of the gear 4, the friction contact surface 7-4 is in contact with the driving foot 9-4-1, and the driving foot 9-4-1 can drive the rack 7 through frictional contact Achieve linear motion.
所述限位装置Ⅱ8包括限位基座Ⅱ8-1、限位块Ⅱ8-2、限位装置安装孔Ⅱ8-3和限位槽Ⅱ8-4。所述限位基座Ⅱ8-1用于放置齿条7，所述限位块Ⅱ8-2与限位块Ⅰ7-1配合，实现对齿条7的保护和运动行程的限制，所述限位装置安装孔Ⅱ8-3与限位装置螺纹孔Ⅱ1-6通过螺栓连接将限位装置Ⅱ8安装在壳体1的限位装置安装凸台Ⅱ1-5上，所述限位槽Ⅱ8-4内放置齿条7，限位槽Ⅱ8-4可以使齿条7保持竖直，从而使齿轮4齿条和7更好的啮合。The limiting device II8 includes a limiting base II8-1, a limiting block II8-2, a limiting device installation hole II8-3 and a limiting groove II8-4. The limiting base II8-1 is used to place the rack 7, the limiting block II8-2 cooperates with the limiting block I7-1 to realize the protection of the rack 7 and the limitation of the movement stroke, the limiting The device installation hole Ⅱ8-3 and the limit device threaded hole Ⅱ1-6 are connected by bolts to install the limit device Ⅱ8 on the limit device installation boss Ⅱ1-5 of the shell 1, and the limit groove Ⅱ8-4 is placed The rack 7, the limit groove II 8-4 can keep the rack 7 vertical, so that the gear 4 rack and 7 are better meshed.
所述定子9包括预紧螺钉9-1、垫片9-2、压电叠堆9-3、柔性铰链9-4和定子固定螺栓9-5；所述压电叠堆9-3通过垫片9-2和预紧螺钉9-1固定在柔性铰链9-4内，所述定子固定螺栓9-5通过定子安装孔9-4-4将定子9固定安装在壳体1上；The stator 9 includes a pre-tightening screw 9-1, a gasket 9-2, a piezoelectric stack 9-3, a flexible hinge 9-4 and a stator fixing bolt 9-5; the piezoelectric stack 9-3 passes through the gasket The sheet 9-2 and the pre-tightening screw 9-1 are fixed in the flexible hinge 9-4, and the stator fixing bolt 9-5 fixes the stator 9 on the housing 1 through the stator installation hole 9-4-4;
所述柔性铰链机构9-4设置有端部横梁9-4-3、定子安装孔9-4-4、预紧螺钉安装孔9-4-6、直圆型铰链Ⅰ 9-4-9、直圆型铰链Ⅱ 9-4-13、直圆型铰链Ⅲ 9-4-14、直圆型铰链Ⅳ9-4-15、直圆型铰链Ⅴ 9-4-16、直圆型铰链Ⅵ 9-4-17、双驱动足9-4-70、直圆型凹槽9-4-71、刚性直梁Ⅸ 9-4-72、刚性横梁Ⅲ 9-4-73和刚性直梁Ⅹ 9-4-74。所述端部横梁9-4-3用于传递压电叠堆9-3的作用力，所述定子安装孔9-4-4用于固定柔性铰链机构9-4。所述预紧螺钉安装孔9-4-6与预紧螺钉9-1进行螺纹连接预紧压电叠堆9-3。所述直圆型铰链Ⅰ9-4-9和直圆型铰链Ⅳ 9-4-15通过刚性横梁Ⅲ 9-4-73刚性连接，所述直圆型铰链Ⅴ 9-4-16和直圆型铰链Ⅵ 9-4-17通过刚性直梁Ⅸ 9-4-72刚性连接，所述直圆型铰链Ⅱ 9-4-13和直圆型铰链Ⅲ 9-4-14通过刚性直梁Ⅹ 9-4-74进行刚性连接。所述直圆型铰链Ⅰ 9-4-9、直圆型铰链Ⅳ 9-4-15、刚性横梁Ⅲ 9-4-73、刚性直梁Ⅸ 9-4-72和直圆型铰链Ⅵ 9-4-17组成的框型结构可以实现齿条7沿限位槽Ⅰ2-2和限位槽Ⅱ8-4向右运动，所述直圆型铰链Ⅰ 9-4-9、直圆型铰链Ⅳ 9-4-15、刚性横梁Ⅲ 9-4-73、直圆型铰链Ⅱ 9-4-13、直圆型铰链Ⅲ 9-4-14和刚性直梁Ⅹ 9-4-74组成的框型结构可以实现齿条7沿限位槽Ⅰ2-2和限位槽Ⅱ8-4向左运动。所述双驱动足9-4-70位于端部横梁9-4-3中心轴线位置，双驱动足9-4-70端部涂有摩擦类材料。The flexible hinge mechanism 9-4 is provided with an end beam 9-4-3, a stator mounting hole 9-4-4, a pre-tightening screw mounting hole 9-4-6, a straight circular hinge I 9-4-9, Straight round hinge Ⅱ 9-4-13, straight round hinge Ⅲ 9-4-14, straight round hinge Ⅳ 9-4-15, straight round hinge Ⅴ 9-4-16, straight round hinge Ⅵ 9- 4-17, double drive foot 9-4-70, straight round groove 9-4-71, rigid straight beam Ⅸ 9-4-72, rigid cross beam Ⅲ 9-4-73 and rigid straight beam Ⅹ 9-4 -74. The end beam 9-4-3 is used to transmit the force of the piezoelectric stack 9-3, and the stator mounting hole 9-4-4 is used to fix the flexible hinge mechanism 9-4. The pre-tightening screw mounting hole 9-4-6 is threadedly connected with the pre-tightening screw 9-1 to pre-tighten the piezoelectric stack 9-3. The straight round hinge I 9-4-9 and the straight round hinge IV 9-4-15 are rigidly connected by a rigid beam III 9-4-73, and the straight round hinge V 9-4-16 and the straight round hinge Hinge Ⅵ 9-4-17 is rigidly connected by rigid straight beam Ⅸ 9-4-72, and said straight circular hinge Ⅱ 9-4-13 and straight circular hinge Ⅲ 9-4-14 are connected by rigid straight beam Ⅸ 9- 4-74 for rigid connection. The straight round hinge I 9-4-9, straight round hinge IV 9-4-15, rigid beam III 9-4-73, rigid straight beam IX 9-4-72 and straight round hinge VI 9- The frame structure composed of 4-17 can realize the rightward movement of the rack 7 along the limit groove I2-2 and the limit groove II8-4, the straight circular hinge I 9-4-9, the straight circular hinge IV 9 Frame structure composed of -4-15, rigid beam III 9-4-73, straight circular hinge II 9-4-13, straight circular hinge III 9-4-14 and rigid straight beam X 9-4-74 The leftward movement of the rack 7 along the limiting groove I2-2 and the limiting groove II8-4 can be realized. The double driving feet 9-4-70 are located at the central axis of the end beam 9-4-3, and the ends of the double driving feet 9-4-70 are coated with friction materials.
或为一种菱形定子组件实现方式的高精度压电粘滑旋转台。所述柔性铰链机构9-4采用5052、6061或7075铝合金材料，柔性铰链机构9-4采用菱形结构铰链。所述柔性铰链机构9-4设置有驱动足9-4-1、端部横梁9-4-3、定子安装孔9-4-4、预紧螺钉安装孔9-4-6、刚性折梁Ⅰ9-4-20、刚性折梁Ⅱ 9-4-21、刚性折梁Ⅲ 9-4-22、刚性折梁Ⅳ 9-4-23、直圆型铰链Ⅷ 9-4-24、直圆型铰链Ⅶ 9-4-25、直圆型铰链Ⅹ9-4-26和直圆型铰链Ⅸ 9-4-27。所述柔性铰链机构9-4通过定子安装孔9-4-4固定在定子螺纹孔1-9上，所述驱动足9-4-1位于端部横梁9-4-3的中间位置，驱动足9-4-1与齿条7的摩擦接触面7-4滑动接触，驱动足9-4-1的表面涂有耐摩擦材料，所述刚性折梁Ⅰ9-4-20与刚性折梁Ⅱ9-4-21通过直圆型铰链Ⅶ 9-4-25刚性连接，所述刚性折梁Ⅲ 9-4-22与刚性折梁Ⅳ9-4-23通过直圆型铰链Ⅸ9-4-27刚性连接，所述直圆型铰链Ⅷ 9-4-24和直圆型铰链Ⅶ 9-4-25通过刚性折梁Ⅰ9-420刚性连接，所述直圆型铰链Ⅹ 9-4-26和直圆型铰链Ⅸ9-4-27通过刚性折梁Ⅲ 9-4-22刚性连接。所述直圆型铰链Ⅷ 9-4-24、直圆型铰链Ⅶ 9-4-25和直圆型铰链Ⅸ 9-4-27具有相同的圆角半径值R3，直圆型铰链Ⅹ9-4-26具有圆角半径值R4，R4与R3的比值为2~5，调整圆角半径R4与R3的比值，可改变柔性铰链机构9-4的轴向刚度分布。本实施方式中R4与R3比值的取值为3。R3与R4的值不同，引起柔性铰链机构9-4的轴向刚度分布不均匀，在压电叠堆9-3产生轴向振动位移时，柔性铰链机构9-4的轴线会发生偏转产生侧向位移。Or it is a high-precision piezoelectric stick-slip rotary table that realizes a rhombic stator assembly. The flexible hinge mechanism 9-4 is made of 5052, 6061 or 7075 aluminum alloy, and the flexible hinge mechanism 9-4 adopts a rhombus structure hinge. The flexible hinge mechanism 9-4 is provided with a driving foot 9-4-1, an end beam 9-4-3, a stator mounting hole 9-4-4, a pre-tightening screw mounting hole 9-4-6, a rigid folding beam Ⅰ 9-4-20, rigid folding beam Ⅱ 9-4-21, rigid folding beam Ⅲ 9-4-22, rigid folding beam Ⅳ 9-4-23, straight round hinge Ⅷ 9-4-24, straight round Hinge VII 9-4-25, straight round hinge X9-4-26 and straight round hinge IX 9-4-27. The flexible hinge mechanism 9-4 is fixed on the stator threaded hole 1-9 through the stator mounting hole 9-4-4, and the driving foot 9-4-1 is located at the middle position of the end beam 9-4-3, and drives The foot 9-4-1 is in sliding contact with the friction contact surface 7-4 of the rack 7, the surface of the driving foot 9-4-1 is coated with a friction-resistant material, and the rigid fold beam I 9-4-20 and the rigid fold beam II 9 -4-21 is rigidly connected by straight circular hinge VII 9-4-25, and the rigid fold beam III 9-4-22 is rigidly connected with rigid fold beam IV 9-4-23 by straight circular hinge IX 9-4-27 , the straight round hinge Ⅷ 9-4-24 and the straight round hinge VII 9-4-25 are rigidly connected by a rigid fold beam I 9-420, the straight round hinge X 9-4-26 and the straight round hinge Hinge IX 9-4-27 is rigidly connected by rigid polybeam III 9-4-22. The straight round hinge VIII 9-4-24, straight round hinge VII 9-4-25 and straight round hinge IX 9-4-27 have the same fillet radius value R3, straight round hinge X9-4 -26 has a fillet radius R4, and the ratio of R4 to R3 is 2-5. Adjusting the ratio of the fillet radius R4 to R3 can change the axial stiffness distribution of the flexible hinge mechanism 9-4. In this embodiment, the ratio of R4 to R3 is 3. The values of R3 and R4 are different, causing the axial stiffness distribution of the flexible hinge mechanism 9-4 to be uneven. When the piezoelectric stack 9-3 produces axial vibration displacement, the axis of the flexible hinge mechanism 9-4 will deflect and produce to the displacement.
或为一种斜梯型定子组件实现方式的高精度压电粘滑旋转台。所述柔性铰链机构9-4采用斜梯式框型结构的柔性铰链，所述柔性铰链机构9-4采用5052铝合金、6061铝合金、7075铝合金、Ti-35A钛合金或Ti-13钛合金材料。所述柔性铰链机构9-4设置有定子安装孔9-4-4，通过定子固定螺栓9-5将柔性铰链机构9-4与壳体1的定子螺纹孔1-9固定。所述柔性铰链机构9-4设置有刚性直梁Ⅴ 9-4-50和刚性直梁Ⅵ 9-4-51，所述柔性铰链机构9-4设置有直圆型铰链Ⅱ 9-4-13、直圆型铰链Ⅲ 9-4-14、直圆型铰链Ⅴ 9-4-16和直圆型铰链Ⅵ9-4-17，所述直圆型铰链Ⅱ 9-4-13和直圆型铰链Ⅲ 9-4-14通过刚性直梁Ⅵ 9-4-51刚性连接，所述直圆型铰链Ⅴ 9-4-16和直圆型铰链Ⅵ 9-4-17通过刚性直梁Ⅴ 9-4-50刚性连接。所述刚性直梁Ⅴ 9-4-50和刚性直梁Ⅵ 9-4-51之间的距离为H，所述直圆型铰链Ⅱ 9-4-13、直圆型铰链Ⅲ 9-4-14、直圆型铰链Ⅴ 9-4-16和直圆型铰链Ⅵ 9-4-17具有相同的圆角半径值R8，其中R8/H的取值范围0.017~0.09，可以保证柔性铰链机构9-4具有位移放大能力以及压电叠堆9-3具有一定的安装空间，本实施方式中R8=1mm，H=12mm。所述柔性铰链机构9-4设置有斜梯型梁9-4-21，所述斜梯型梁9-4-21的长度为K，其中K/H取值范围为1.5~4，所述斜梯型梁9-4-21与水平方向的夹角为α，其中α取值范围为10°~80°，本实施方式中的夹角α为30°。定子9通过柔性铰链机构9-4进行位移放大，所述斜梯型梁9-4-21沿轴向刚度分布不均而产生侧向位移，增大缓慢变形驱动阶段时摩擦驱动力，减小快速变形驱动阶段时摩擦阻力，可实现对摩擦力的综合调控。所述驱动足9-4-1端面相应涂有陶瓷类或玻璃纤维类摩擦材料，所述驱动足9-4-1驱动齿条7运动。Or it is a high-precision piezoelectric stick-slip rotary table that realizes an inclined ladder stator assembly. The flexible hinge mechanism 9-4 adopts a flexible hinge with an inclined ladder frame structure, and the flexible hinge mechanism 9-4 adopts 5052 aluminum alloy, 6061 aluminum alloy, 7075 aluminum alloy, Ti-35A titanium alloy or Ti-13 titanium alloy. The flexible hinge mechanism 9-4 is provided with a stator mounting hole 9-4-4, and the flexible hinge mechanism 9-4 is fixed to the stator threaded hole 1-9 of the casing 1 through the stator fixing bolt 9-5. The flexible hinge mechanism 9-4 is provided with a rigid straight beam V 9-4-50 and a rigid straight beam VI 9-4-51, and the flexible hinge mechanism 9-4 is provided with a straight circular hinge II 9-4-13 , straight round hinge III 9-4-14, straight round hinge V 9-4-16 and straight round hinge VI 9-4-17, the straight round hinge II 9-4-13 and straight round hinge Ⅲ 9-4-14 is rigidly connected by rigid straight beam Ⅵ 9-4-51, and the straight circular hinge Ⅴ 9-4-16 and straight circular hinge Ⅵ 9-4-17 are connected by rigid straight beam Ⅴ 9-4 -50 rigid connection. The distance between the rigid straight beam V 9-4-50 and the rigid straight beam VI 9-4-51 is H, and the straight round hinge II 9-4-13, straight round hinge III 9-4- 14. Straight round hinge Ⅴ 9-4-16 and straight round hinge Ⅵ 9-4-17 have the same fillet radius value R8, where the value range of R8/H is 0.017~0.09, which can ensure the flexible hinge mechanism 9 -4 has a displacement amplification capability and the piezoelectric stack 9-3 has a certain installation space. In this embodiment, R8=1mm, H=12mm. The flexible hinge mechanism 9-4 is provided with an inclined ladder beam 9-4-21, the length of the inclined ladder beam 9-4-21 is K, wherein the value range of K/H is 1.5~4, and the The included angle between the inclined ladder beam 9-4-21 and the horizontal direction is α, where α ranges from 10° to 80°, and the included angle α in this embodiment is 30°. The displacement of the stator 9 is amplified through the flexible hinge mechanism 9-4, and the uneven distribution of the axial stiffness of the inclined ladder beam 9-4-21 produces lateral displacement, which increases the frictional driving force during the slow deformation driving stage and decreases The frictional resistance during the rapid deformation driving stage can realize the comprehensive regulation of the frictional force. The end surface of the driving foot 9-4-1 is correspondingly coated with ceramic or glass fiber friction material, and the driving foot 9-4-1 drives the rack 7 to move.
或为一种非对称结构定子组件实现方式的高精度压电粘滑旋转台。所述柔性铰链机构9-4采用5052铝合金、6061铝合金或7075铝合金材料，柔性铰链机构9-4采用非对称框型结构铰链，所述柔性铰链机构9-4设置有定子安装孔9-4-4，通过定子安装孔5-1-4可将柔性铰链机构9-4固定在壳体1上，所述柔性铰链机构9-4设置有直圆型铰链Ⅰ 9-4-9、直圆型铰链Ⅳ 9-4-15、直圆型铰链Ⅴ 9-4-16、直圆型铰链Ⅵ9-4-17、刚性直梁Ⅰ 9-4-30和刚性直梁Ⅱ 9-4-31，所述直圆型铰链Ⅰ9-4-9和直圆型铰链Ⅳ9-4-15通过刚性直梁Ⅱ 9-4-31刚性连接，所述直圆型铰链Ⅴ 9-4-16和直圆型铰链Ⅵ 9-4-17通过刚性直梁Ⅰ 9-4-30刚性连接。所述直圆型铰链Ⅰ 9-4-9和直圆型铰链Ⅳ 9-4-15具有相同的圆角半径值R5，直圆型铰链Ⅴ 9-4-16和直圆型铰链Ⅵ 9-4-17具有相同的圆角半径值R6，通过调整圆角半径R6与R5的比值，可改变定子9的轴向刚度分布，其中R6和R5的比值范围为0.1~1。所述柔性铰链机构9-4采用非对称框型结构，使其沿轴向刚度分布不均而产生侧向位移。增大缓慢变形驱动阶段时摩擦驱动力，减小快速变形驱动阶段时摩擦阻力，可实现对摩擦力的综合调控。所述柔性铰链机构9-4设置有驱动足9-4-1和端部横梁9-4-3，驱动足9-4-1位于端部横梁9-4-3的中间处，所述驱动足9-4-1的厚度为N，齿条7的厚度为M，其中N＜M可以保证有效接触面积，提高传动效率，本实施方式中M=8mm，N=7mm。所述驱动足9-4-1端面相应涂有陶瓷类或玻璃纤维类摩擦材料。Or it is a high-precision piezoelectric stick-slip rotary table that realizes a stator assembly with an asymmetric structure. The flexible hinge mechanism 9-4 is made of 5052 aluminum alloy, 6061 aluminum alloy or 7075 aluminum alloy material, the flexible hinge mechanism 9-4 adopts an asymmetric frame structure hinge, and the flexible hinge mechanism 9-4 is provided with a stator mounting hole 9 -4-4, the flexible hinge mechanism 9-4 can be fixed on the housing 1 through the stator installation hole 5-1-4, and the flexible hinge mechanism 9-4 is provided with a straight circular hinge I 9-4-9, Straight round hinge Ⅳ 9-4-15, straight round hinge Ⅴ 9-4-16, straight round hinge Ⅵ 9-4-17, rigid straight beam Ⅰ 9-4-30 and rigid straight beam Ⅱ 9-4- 31. The straight round hinge I 9-4-9 and straight round hinge IV 9-4-15 are rigidly connected by a rigid straight beam II 9-4-31, and the straight round hinge V 9-4-16 and straight Circular hinge VI 9-4-17 is rigidly connected by rigid straight beam I 9-4-30. The straight round hinge I 9-4-9 and the straight round hinge IV 9-4-15 have the same fillet radius value R5, the straight round hinge V 9-4-16 and the straight round hinge VI 9- 4-17 have the same fillet radius R6, by adjusting the ratio of the fillet radius R6 to R5, the axial stiffness distribution of the stator 9 can be changed, wherein the ratio of R6 to R5 ranges from 0.1 to 1. The flexible hinge mechanism 9-4 adopts an asymmetrical frame structure, so that the stiffness distribution along the axial direction is uneven and produces lateral displacement. Increasing the friction driving force in the slow deformation driving stage and reducing the friction resistance in the rapid deformation driving stage can realize the comprehensive regulation of the friction force. The flexible hinge mechanism 9-4 is provided with a driving foot 9-4-1 and an end beam 9-4-3, the driving foot 9-4-1 is located in the middle of the end beam 9-4-3, and the driving The thickness of the foot 9-4-1 is N, and the thickness of the rack 7 is M, where N<M can ensure the effective contact area and improve the transmission efficiency. In this embodiment, M=8mm and N=7mm. The end surface of the driving foot 9-4-1 is correspondingly coated with ceramic or glass fiber friction material.
或为一种双堆叠拱形定子组件实现方式的高精度压电粘滑旋转台。所述柔性铰链机构9-4设置有驱动足9-4-1、横梁9-4-2、定子安装孔9-4-4、预紧螺钉安装孔9-4-6、椭圆型铰链Ⅱ 9-4-5、椭圆型铰链Ⅰ 9-4-9、刚性横梁Ⅱ 9-4-10、刚性曲梁Ⅰ 9-4-60、刚性曲梁Ⅱ9-4-61、刚性曲梁Ⅲ 9-4-62和刚性曲梁Ⅳ 9-4-63。所述驱动足9-4-1位于横梁9-4-2的中间位置，所述驱动足9-4-1端部涂有摩擦材料，驱动足9-4-1与摩擦接触面7-4线接触，用于驱动齿条7。所述定子安装孔9-4-4用于固定柔性铰链机构9-4，所述预紧螺钉安装孔9-4-6通过与预紧螺钉9-1螺纹连接固定压电叠堆9-3。所述刚性横梁Ⅱ 9-4-10位于柔性铰链机构9-4的中心位置，所述刚性曲梁Ⅰ 9-4-60和刚性曲梁Ⅱ 9-4-61通过椭圆型铰链Ⅰ 9-4-9刚性连接，所述刚性曲梁Ⅲ 9-4-62和刚性曲梁Ⅳ 9-4-63通过椭圆型铰链Ⅱ 9-4-5刚性连接，所述刚性曲梁Ⅰ9-4-60、刚性曲梁Ⅱ 9-4-61、椭圆型铰链Ⅰ 9-4-9和刚性横梁Ⅱ 9-4-10组成的框型结构可以实现齿条7沿限位槽Ⅰ2-2和限位槽Ⅱ8-4向右运动，所述刚性横梁Ⅱ9-4-10、椭圆型铰链Ⅱ 9-4-5、刚性曲梁Ⅲ 9-4-62和刚性曲梁Ⅳ 9-4-63组成的框型结构可以实现齿条7沿限位槽Ⅰ2-2和限位槽Ⅱ8-4向左运动。Or it is a high-precision piezoelectric stick-slip rotary table that realizes double-stacked arched stator assemblies. The flexible hinge mechanism 9-4 is provided with a driving foot 9-4-1, a beam 9-4-2, a stator mounting hole 9-4-4, a pre-tightening screw mounting hole 9-4-6, and an oval hinge II 9 -4-5, elliptical hinge Ⅰ 9-4-9, rigid beam Ⅱ 9-4-10, rigid curved beam Ⅰ 9-4-60, rigid curved beam Ⅱ 9-4-61, rigid curved beam Ⅲ 9-4 -62 and Rigid Curved Beam IV 9-4-63. The driving foot 9-4-1 is located in the middle of the beam 9-4-2, the end of the driving foot 9-4-1 is coated with friction material, and the driving foot 9-4-1 and the friction contact surface 7-4 The line contact is used to drive the rack 7. The stator mounting hole 9-4-4 is used to fix the flexible hinge mechanism 9-4, and the pre-tightening screw mounting hole 9-4-6 is threaded with the pre-tightening screw 9-1 to fix the piezoelectric stack 9-3 . The rigid beam II 9-4-10 is located at the center of the flexible hinge mechanism 9-4, and the rigid curved beam I 9-4-60 and rigid curved beam II 9-4-61 pass through the elliptical hinge I 9-4 -9 Rigid connection, the rigid curved beam III 9-4-62 and the rigid curved beam IV 9-4-63 are rigidly connected by an elliptical hinge II 9-4-5, the rigid curved beam I 9-4-60, The frame structure composed of rigid curved beam II 9-4-61, elliptical hinge I 9-4-9 and rigid beam II 9-4-10 can realize the rack 7 along the limit groove I2-2 and limit groove II8. -4 moves to the right, the frame structure composed of rigid beam II 9-4-10, elliptical hinge II 9-4-5, rigid curved beam III 9-4-62 and rigid curved beam IV 9-4-63 The leftward movement of the rack 7 along the limiting groove I2-2 and the limiting groove II8-4 can be realized.
或为一种斜槽式定子组件实现方式的高精度压电粘滑旋转台。所述柔性铰链机构9-4采用5052铝合金、6061铝合金、7075铝合金、Ti-35A钛合金或Ti-13钛合金材料，柔性铰链机构9-4采用斜槽式框形结构铰链。所述柔性铰链机构9-4设置有定子安装孔9-4-4，通过定子固定螺栓9-5将柔性铰链机构9-4与壳体1的定子螺纹孔1-9固定。所述柔性铰链机构9-4设置有刚性直梁Ⅺ9-4-42和刚性直梁Ⅻ 9-4-43，所述柔性铰链机构9-4设置有直圆型铰链Ⅱ 9-4-13、直圆型铰链Ⅲ 9-4-14、直圆型铰链Ⅴ 9-4-16和直圆型铰链Ⅵ 9-4-17，所述直圆型铰链Ⅱ 9-4-13和直圆型铰链Ⅲ 9-4-14通过刚性直梁Ⅻ 9-4-43刚性连接，所述直圆型铰链Ⅴ 9-4-16和直圆型铰链Ⅵ 9-4-17通过刚性直梁Ⅺ 9-4-42刚性连接，所述刚性直梁Ⅺ 9-4-42和刚性直梁Ⅻ 9-4-43之间的距离为L，刚性直梁Ⅺ 9-4-42和刚性直梁Ⅻ9-4-43的宽度为L1，厚度为B，其中L1/L取值范围为1/6~1/2，B/L取值范围为0.5~1可以保证柔性铰链机构9-4具有位移放大的能力，本实施方式中L=13mm，L1=2.5mm，B=7mm。所述直圆型铰链Ⅱ 9-4-13、直圆型铰链Ⅲ 9-4-14、直圆型铰链Ⅴ 9-4-16和直圆型铰链Ⅵ 9-4-17具有相同的圆角半径值R1，其中R1/L取值范围为1/60~1/12。所述柔性铰链机构9-4设置有斜槽9-4-40，所述斜槽9-4-40的个数为X，高度为L2，宽度为C，与竖直方向的夹角为α，其中X≥1，L2/C取值范围为1~8，C/L取值范围为0.01~0.1，夹角α的取值范围为10°~80°，本实施方式中的夹角α为15°，斜槽9-4-40的个数X为5。所述柔性铰链机构9-4设置有驱动足9-4-1和加厚横梁9-4-41，所述驱动足9-4-1位于加厚横梁9-4-41的中间位置处，锯齿波电信号激励压电叠堆9-3产生输出力，通过斜槽9-4-40传递到驱动足9-4-1上，所述斜槽9-4-40与驱动足9-4-1沿轴向刚度分布不均而产生侧向位移。增大缓慢变形驱动阶段时摩擦驱动力，减小快速变形驱动阶段时摩擦阻力，可实现对摩擦力的综合调控。所述驱动足9-4-1端面相应涂有陶瓷类或玻璃纤维类摩擦材料，所述驱动足9-4-1的厚度为N，齿条7的厚度为M，其中N≤M可以保证有效接触面积，提高传动效率，其中M=（N+1）mm，本实施方式中M=8mm，N=7mm。Or it is a high-precision piezoelectric stick-slip rotary table that realizes a chute-type stator assembly. The flexible hinge mechanism 9-4 is made of 5052 aluminum alloy, 6061 aluminum alloy, 7075 aluminum alloy, Ti-35A titanium alloy or Ti-13 titanium alloy, and the flexible hinge mechanism 9-4 adopts a chute type frame structure hinge. The flexible hinge mechanism 9-4 is provided with a stator mounting hole 9-4-4, and the flexible hinge mechanism 9-4 is fixed to the stator threaded hole 1-9 of the casing 1 through the stator fixing bolt 9-5. The flexible hinge mechanism 9-4 is provided with a rigid straight beam Ⅺ 9-4-42 and a rigid straight beam Ⅻ 9-4-43, and the flexible hinge mechanism 9-4 is provided with a straight circular hinge Ⅱ 9-4-13, Straight round hinge III 9-4-14, straight round hinge V 9-4-16 and straight round hinge VI 9-4-17, the straight round hinge II 9-4-13 and straight round hinge Ⅲ 9-4-14 is rigidly connected by rigid straight beam Ⅻ 9-4-43, and the straight circular hinge Ⅴ 9-4-16 and straight circular hinge Ⅵ 9-4-17 are connected by rigid straight beam Ⅺ 9-4 -42 rigid connection, the distance between the rigid straight beam Ⅺ 9-4-42 and the rigid straight beam Ⅻ 9-4-43 is L, the rigid straight beam Ⅺ 9-4-42 and the rigid straight beam Ⅻ 9-4- The width of 43 is L1 and the thickness is B, wherein the value range of L1/L is 1/6~1/2, and the value range of B/L is 0.5~1, which can ensure that the flexible hinge mechanism 9-4 has the ability of displacement amplification, In this embodiment, L=13mm, L 1 =2.5mm, and B=7mm. The straight round hinge II 9-4-13, straight round hinge III 9-4-14, straight round hinge V 9-4-16 and straight round hinge VI 9-4-17 have the same fillet Radius value R1, where R1/L ranges from 1/60 to 1/12. The flexible hinge mechanism 9-4 is provided with a chute 9-4-40, the number of the chute 9-4-40 is X, the height is L2, the width is C, and the angle with the vertical direction is α , where X≥1, the value range of L2/C is 1~8, the value range of C/L is 0.01~0.1, the value range of the included angle α is 10°~80°, the included angle α in this embodiment is 15°, and the number X of the chute 9-4-40 is 5. The flexible hinge mechanism 9-4 is provided with a driving foot 9-4-1 and a thickened beam 9-4-41, and the driving foot 9-4-1 is located at the middle position of the thickened beam 9-4-41, The sawtooth wave electric signal excites the piezoelectric stack 9-3 to generate an output force, which is transmitted to the driving foot 9-4-1 through the chute 9-4-40, and the chute 9-4-40 is connected to the driving foot 9-4 -1 Lateral displacement due to uneven distribution of stiffness along the axial direction. Increasing the friction driving force in the slow deformation driving stage and reducing the friction resistance in the rapid deformation driving stage can realize the comprehensive regulation of the friction force. The end surface of the driving foot 9-4-1 is correspondingly coated with ceramic or glass fiber friction material, the thickness of the driving foot 9-4-1 is N, and the thickness of the rack 7 is M, where N≤M can ensure The effective contact area improves the transmission efficiency, where M=(N+1)mm, in this embodiment, M=8mm and N=7mm.
或为一种双堆叠单驱动足定子组件实现方式的高精度压电粘滑旋转台，所述定子9的柔性铰链机构9-4设置有驱动足9-4-1、横梁9-4-2、定子安装孔9-4-4、预紧螺钉安装孔9-4-6、刚性直梁9-4-8、直圆型铰链Ⅰ9-4-9、刚性横梁9-4-10、直圆型铰链Ⅱ9-4-13、直圆型铰链Ⅲ9-4-14、直圆型铰链Ⅳ9-4-15、直圆型铰链Ⅴ9-4-16和直圆型铰链Ⅵ9-4-17；所述驱动足9-4-1位于横梁9-4-2的中间位置，驱动足9-4-1与齿条7的摩擦接触面7-4滑动接触，所述定子安装孔9-4-4通过与定子固定螺栓9-5进行螺纹连接将定子9固定在壳体1的定子螺纹孔1-9上，所述预紧螺钉安装孔9-4-6与预紧螺钉9-1螺纹连接将压电叠堆9-3预紧，所述直圆型铰链Ⅰ9-4-9和直圆型铰链Ⅳ9-4-15通过刚性横梁9-4-10刚性连接，所述直圆型铰链Ⅱ9-4-13和直圆型铰链Ⅲ9-4-14通过刚性直梁9-4-8刚性连接，所述直圆型铰链Ⅴ9-4-16和直圆型铰链Ⅵ9-4-17通过刚性直梁9-4-8刚性连接；所述直圆型铰链Ⅱ9-4-13、直圆型铰链Ⅲ9-4-14、直圆型铰链Ⅴ9-4-16和直圆型铰链Ⅵ9-4-17具有相同的圆角半径为R1，所述直圆型铰链Ⅰ9-4-9和直圆型铰链Ⅳ9-4-15具有相同的圆角半径为R2，R1和R2的比值为D，D的取值范围为1.5~4.5。Or it is a high-precision piezoelectric stick-slip rotary table with double-stacked single-drive foot stator assembly, the flexible hinge mechanism 9-4 of the stator 9 is provided with a drive foot 9-4-1 and a beam 9-4-2 , stator mounting hole 9-4-4, pre-tightening screw mounting hole 9-4-6, rigid straight beam 9-4-8, straight round hinge Ⅰ 9-4-9, rigid beam 9-4-10, straight round Type hinge Ⅱ9-4-13, straight round hinge Ⅲ9-4-14, straight round hinge Ⅳ9-4-15, straight round hinge Ⅴ9-4-16 and straight round hinge Ⅵ9-4-17; The driving foot 9-4-1 is located in the middle of the beam 9-4-2, and the driving foot 9-4-1 is in sliding contact with the friction contact surface 7-4 of the rack 7, and the stator mounting hole 9-4-4 passes through Threaded connection with the stator fixing bolt 9-5 fixes the stator 9 on the stator threaded hole 1-9 of the casing 1, and the pre-tightening screw installation hole 9-4-6 is threaded with the pre-tightening screw 9-1 to press the The electrical stack 9-3 is preloaded, the straight circular hinge I 9-4-9 and the straight circular hinge IV 9-4-15 are rigidly connected by a rigid beam 9-4-10, and the straight circular hinge II 9-4 -13 and the straight circular hinge III9-4-14 are rigidly connected by a rigid straight beam 9-4-8, and the straight circular hinge V9-4-16 and the straight circular hinge VI9-4-17 are rigidly connected by a rigid straight beam 9 -4-8 rigid connection; the straight round hinge II9-4-13, straight round hinge III9-4-14, straight round hinge V9-4-16 and straight round hinge VI9-4-17 have the same The fillet radius is R1, the straight round hinge I9-4-9 and the straight round hinge IV9-4-15 have the same fillet radius R2, the ratio of R1 and R2 is D, and the value range of D 1.5~4.5.
所述挡板10设置有挡板安装孔10-1。所述挡板安装孔10-1与挡板安装螺纹孔1-10通过螺栓连接，使挡板10固定安装在壳体1上。所述挡板10可从壳体1上拆卸下来，便于调节预紧螺钉9-1，可随时实现对驱动元件正压力大小的调节。The baffle 10 is provided with a baffle installation hole 10-1. The baffle installation hole 10 - 1 is connected with the baffle installation threaded hole 1 - 10 by bolts, so that the baffle 10 is fixedly installed on the housing 1 . The baffle 10 can be disassembled from the housing 1, which is convenient for adjusting the pre-tightening screw 9-1, and can realize the adjustment of the positive pressure of the driving element at any time.
所述封装壳11包括封装壳安装孔11-1、外接通线孔11-2和导线放置腔11-3。所述封装壳安装孔11-1与封装壳螺纹孔1-12通过螺栓连接，将封装壳11固定安装在壳体1上，所述外接通线孔11-2可将外界的导线通入导线放置腔11-3内，进而通过内置通线孔1-11通入到壳体1内，所述导线放置腔11-3可用于放置并储存一定长度的导线。The package case 11 includes a package case installation hole 11-1, an external wiring hole 11-2 and a wire placement cavity 11-3. The mounting hole 11-1 of the package shell is connected with the threaded hole 1-12 of the package shell by bolts, so that the package shell 11 is fixedly installed on the shell 1, and the external wiring hole 11-2 can lead the external wire into the wire The wire is placed in the chamber 11-3, and then enters into the housing 1 through the built-in wire hole 1-11. The wire placement chamber 11-3 can be used to place and store a certain length of wire.
所述的一种双堆叠双驱动足定子组件实现方式的高精度压电粘滑旋转台，其特征在于所述齿条7的长度为a，所述限位装置Ⅰ2与限位装置Ⅱ8的宽度为b，限位装置Ⅰ2与限位装置Ⅱ8之间的距离为c，其中a>b+c。本具体实施方式中a=80mm，b=20mm，c=55mm。The above-mentioned high-precision piezoelectric stick-slip rotary table with dual-stacked double-drive foot stator assembly is characterized in that the length of the rack 7 is a, and the width of the limiting device I2 and the limiting device II8 is b, and the distance between the limiting device I2 and the limiting device II8 is c, where a>b+c. In this specific embodiment, a=80mm, b=20mm, c=55mm.
具体实施方式二：所述驱动方法采用的复合激励电信号实现，复合激励电信号包括摩擦调控波和驱动波，通过将摩擦调控波复合叠加于驱动波的快速通电阶段，激发定子在快速变形阶段处于微副高频共振状态，基于超声减摩效应降低快速变形阶段定子与齿条间的摩擦阻力；所述驱动波为锯齿波，所述摩擦调控波为正弦波；其中锯齿波的周期为T1，激励电压幅值为V1，对称性为S，正弦波周期为T2，激励电压幅值为V2，锯齿波与正弦波的周期比为T1/T2=100~20000，激励电压幅值比为V1/V2=2~6。Specific embodiment 2: The driving method adopts the composite excitation electric signal to realize, the composite excitation electric signal includes the friction control wave and the driving wave, by superimposing the friction control wave on the fast energization stage of the driving wave, the stator is excited in the rapid deformation stage In the state of micro-secondary high-frequency resonance, the frictional resistance between the stator and the rack in the rapid deformation stage is reduced based on the ultrasonic anti-friction effect; the driving wave is a sawtooth wave, and the friction control wave is a sine wave; the period of the sawtooth wave is T 1. The amplitude of the excitation voltage is V 1 , the symmetry is S, the period of the sine wave is T 2 , the amplitude of the excitation voltage is V 2 , the cycle ratio of the sawtooth wave and the sine wave is T 1 /T 2 =100~20000, the excitation The voltage amplitude ratio is V 1 /V 2 =2~6.
工作原理：高精度压电粘滑旋转台主要是在非对称电信号的激励下，利用定子一个压电叠堆通电变形产生的不对称，使驱动足带动齿条产生直线位移，又通过齿轮直齿与齿条直齿的啮合，将齿条的直线运动转换为齿轮的旋转运动。本发明中限位装置Ⅰ和限位装置Ⅱ起到了对齿条的限位作用，即可保持齿条直齿与齿轮直齿更好的啮合，又可以通过限位块Ⅰ和限位块Ⅱ的作用，保持齿条稳定工作，本发明中定子的一个压电叠堆在非对称电信号的激励下产生缓慢变形和快速变形两个阶段，由于压电叠堆两端的铰链的不对称性，激发驱动足产生侧向位移，在缓慢变形阶段，齿条在驱动足的摩擦力作用下带动齿条侧向位移，在快速变形阶段减少了驱动足和齿条之间的正压力，从而产生“滑”运动。本发明的齿条一面与驱动足接触，另一面与齿轮直齿啮合，从而将直线运动转换为旋转运动，相比于驱动足直接作用到旋转轴上，齿的啮合无相对滑动，显著提升了旋转平台的输出特性，非对称电信号激励另一个压电叠堆，可实现反向。Working principle: The high-precision piezoelectric stick-slip rotary table is mainly under the excitation of asymmetrical electrical signals, using the asymmetry generated by the deformation of a piezoelectric stack of the stator, so that the driving foot drives the rack to produce a linear displacement, and through the gear straight The meshing of the teeth and the straight teeth of the rack converts the linear motion of the rack into the rotational motion of the gear. In the present invention, the limiting device I and the limiting device II play a role in limiting the rack, which can keep the straight teeth of the rack and the gear teeth in better mesh, and can also pass through the limiting block I and the limiting block II. The role of the rack keeps the stable work. In the present invention, a piezoelectric stack of the stator produces two stages of slow deformation and rapid deformation under the excitation of an asymmetrical electric signal. Due to the asymmetry of the hinges at both ends of the piezoelectric stack, The driving foot is excited to produce lateral displacement. In the slow deformation stage, the rack drives the rack to laterally displace under the friction of the driving foot. In the rapid deformation stage, the positive pressure between the driving foot and the rack is reduced, thereby generating " slippery" movement. One side of the rack of the invention is in contact with the driving foot, and the other side is meshed with the straight teeth of the gear, thereby converting linear motion into rotary motion. Compared with the driving foot directly acting on the rotating shaft, the meshing of the teeth has no relative sliding, which significantly improves Due to the output characteristics of the rotating platform, an asymmetric electrical signal excites another piezoelectric stack, which can be reversed.
综合以上所述内容，本发明由于采用直齿圆柱齿轮与直齿齿条的啮合传动，提升了旋转平台的输出推力和运动速度；通过齿轮的旋转带动旋转台运动，相比于直接驱动微动旋转平台，减少了驱动元件与旋转轴之间由于快速摩擦产生的损耗；在不同工况下，平台可随时实现对驱动元件正压力大小的调节，有效的提升了旋转台的输出精度及环境适应性，在精密光学仪器、生物微操作和微纳精密驱动与定位技术领域能够得到广泛应用。Based on the above, the present invention improves the output thrust and motion speed of the rotary platform due to the use of the meshing transmission of the spur gear and the spur rack; the rotation of the gear drives the movement of the rotary platform, compared to directly driving the micro-motion The rotating platform reduces the loss caused by rapid friction between the driving element and the rotating shaft; under different working conditions, the platform can adjust the positive pressure of the driving element at any time, effectively improving the output accuracy and environmental adaptability of the rotating platform It can be widely used in the fields of precision optical instruments, biological micromanipulation and micro-nano precision driving and positioning technology.
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