CN107983429B - Wideband type surface acoustic wave sorting chip based on bionic substrate - Google Patents
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Abstract
Description
技术领域：Technical field:
本发明涉及一种粒子分选芯片，特别涉及一种新型的具有仿生基底的宽频带式声表面波分选芯片。The invention relates to a particle sorting chip, in particular to a novel broadband surface acoustic wave sorting chip with a bionic base.
背景技术：Background technique:
基于声表面波的粒子分选芯片具有结构简单、紧凑，易于制作，适于批量生产，集成化、对生物粒子(如细胞)无损伤，分选精度高等优点，在药物合成与成分筛选，细胞、无机粒子分选和治疗诊断学等领域有着广泛的应用。Particle sorting chips based on surface acoustic waves have the advantages of simple structure, compactness, easy fabrication, suitable for mass production, integration, no damage to biological particles (such as cells), and high sorting accuracy. , inorganic particle sorting and therapeutic diagnostics and other fields have a wide range of applications.
近几十年来，微流控技在化学、生物和制药等领域发展迅速。而近几年内，在微流控研究领域，人们又对使用声表面波驱动微流体展开了卓有成效的研究，在粒子分选技术上也取得了很大进步。目前已有很多的研究团队致力于微流控粒子分选技术的研究，其应用的技术包括利用微结构、流体动力学等的被动分选技术和利用声、光、电、磁等外力场的主动分选技术。被动分选技术一般需要依赖流道的微型结构，这不仅需要对流道的尺寸和流速进行比较严格的控制，而且流道易堵塞且分选精度低。在主动分选技术中，光分选芯片结构复杂、设备也相对昂贵，而依据电场和磁场进行分选时，需要粒子带有特殊的电、磁特性，不具有一般性。In recent decades, microfluidic technology has developed rapidly in the fields of chemistry, biology and pharmaceuticals. In recent years, in the field of microfluidic research, people have carried out fruitful research on the use of surface acoustic waves to drive microfluidics, and great progress has been made in particle sorting technology. At present, many research teams have devoted themselves to the research of microfluidic particle sorting technology. The applied technologies include passive sorting technology using microstructure, fluid dynamics, etc., and external force fields such as sound, light, electricity, and magnetism. Active sorting technology. Passive sorting technology generally needs to rely on the microstructure of the flow channel, which not only requires strict control of the size and flow rate of the flow channel, but also the flow channel is easy to block and the sorting accuracy is low. In the active sorting technology, the structure of the optical sorting chip is complex and the equipment is relatively expensive, while sorting based on electric and magnetic fields requires particles to have special electrical and magnetic properties, which is not general.
基于声表面波(SAW)的微流控粒子分选技术是近些年新兴的一种分选技术。声表面波是一种在固体表面传播的的弹性声波。在压电基底表面的叉指换能器上施加正弦电压，由于压电逆效应基底表面产生变形进而在其表面产生声表面波，且声表面波的振幅随着基底深度的增加迅速衰减,机械能集中在压电基底的表面一个波长的深度范围内。因此,声表面波系统具有很高的能量密度。Microfluidic particle sorting technology based on surface acoustic wave (SAW) is an emerging sorting technology in recent years. A surface acoustic wave is an elastic sound wave that propagates on a solid surface. A sinusoidal voltage is applied to the interdigital transducer on the surface of the piezoelectric substrate, and the surface of the substrate is deformed due to the piezoelectric inverse effect, thereby generating a surface acoustic wave on the surface, and the amplitude of the surface acoustic wave attenuates rapidly with the increase of the substrate depth, and the mechanical energy Concentrated within the depth range of one wavelength on the surface of the piezoelectric substrate. Therefore, the SAW system has a high energy density.
根据作用原理的不同,声表面波在粒子分选中的应用主要分为两类。一类是行波声表面波分选，其分选原理是声表面波单方向作用微流道中的流体时，不同属性(密度，直径，可压缩率)的粒子受到的声辐射力大小不同，因此侧向迁移距离也不同，进而实现分选。另一类是驻波声表面波分选，其分选原理是驻波作用微流道中的流体时，由于声流效应会在流道内形成周期分布的压力节点和反压力节点，粒子在声辐射力的作用下会迁移至压力节点或反压力节点，进而实现分选。相对行波声表面波分选，驻波声表面波分选在器件的设计上需要在微流道两侧对称布置两组叉指换能器，并且微流道与叉指换能器的对准精度要求很高。According to the principle of action, the application of SAW in particle sorting is mainly divided into two categories. One is traveling wave surface acoustic wave sorting. The sorting principle is that when the surface acoustic wave acts on the fluid in the microchannel in one direction, the particles with different properties (density, diameter, compressibility) receive different acoustic radiation forces. Therefore, the lateral migration distance is also different, and then the sorting is realized. The other is standing wave surface acoustic wave sorting. The sorting principle is that when standing waves act on the fluid in the microchannel, due to the acoustic flow effect, periodic distribution of pressure nodes and counterpressure nodes will be formed in the channel, and the particles will be separated by acoustic radiation. Under the action of force, it will migrate to the pressure node or counter pressure node, and then realize the sorting. Compared with traveling wave surface acoustic wave sorting, standing wave surface acoustic wave sorting requires two sets of interdigital transducers to be arranged symmetrically on both sides of the microchannel in terms of device design, and the alignment between the microchannel and the interdigital transducers Accuracy requirements are very high.
目前，在声表面波粒子分选领域所应用的叉指换能器多是只能在一个频率下产生最大能量，其在应用行波声表面波分选粒子时，难以实现较宽范围内的粒子分选。At present, most of the interdigital transducers used in the field of surface acoustic wave particle separation can only generate maximum energy at one frequency, and it is difficult to achieve a wide range of energy when using traveling wave surface acoustic wave particle separation particle sorting.
发明内容：Invention content:
本发明的目的是为了解决上述问题，而提供一种新型的基于仿生基底的宽频带式声表面波分选芯片，利用宽频带式叉指换能器产生的声表面波与具有仿簸箕筛动面结构基底在分选流道内共同作用实现粒子较大范围的多级分选。The purpose of the present invention is to solve the above problems, and to provide a new type of broadband surface acoustic wave sorting chip based on bionic substrate, which utilizes the surface acoustic wave produced by the broadband interdigital transducer and has the function of dustpan sieving The surface structure substrate works together in the sorting flow channel to realize the multi-stage sorting of particles in a large range.
本发明采用的技术方案是：The technical scheme adopted in the present invention is:
利用光刻技术在洁净的压电基底(1)表面绘制一层带有双梯形叉指换能器图案的光刻胶，且叉指换能器与分选流道呈一定角度放置，采用溅射+剥离工艺在压电基底表面制作双梯形叉指换能器(2)。A layer of photoresist with a double-trapezoidal interdigital transducer pattern is drawn on the surface of a clean piezoelectric substrate (1) by photolithography technology, and the interdigital transducer and the sorting flow channel are placed at a certain angle. A double-trapezoidal interdigital transducer (2) is fabricated on the surface of a piezoelectric substrate by the irradiation+lift-off process.
利用光刻技术在洁净的压电基底(1)表面形成流道处绘制一层带有类似于簸箕筛动面凹凸有致结构的光刻胶，采用溅射+剥离工艺在压电基底分选流道底部制作仿簸箕筛选面的仿生基底(10)。Use photolithography technology to draw a layer of photoresist with a concave-convex structure similar to the moving surface of a dustpan screen on the clean piezoelectric substrate (1) where the flow channel is formed, and use sputtering + lift-off technology to sort the flow on the piezoelectric substrate A bionic base (10) for imitating the dustpan screening surface is made at the bottom of the road.
利用精雕机雕刻微流道系统的模具，利用模具选取材质(如PDMS)制作微流道系统(5)，并进行出入口接口处理。A micro-channel system mold is engraved by a fine engraving machine, and a material (such as PDMS) is selected from the mold to manufacture the micro-channel system (5), and the inlet and outlet interfaces are processed.
将经过清洗的微流道系统(5)键合在压电基底(1)的表面。The cleaned micro-channel system (5) is bonded on the surface of the piezoelectric substrate (1).
本发明的优势在于：可根据不同尺寸的粒子在不同频率下所受的声辐射力不同，通过调整叉指换能器的输入频率，从而能较大范围高效率的实现粒子的多级分选。且在宽频带式叉指换能器产生的声表面波与流道底部仿簸箕筛动面结构基底的共同作用下，能实现对粒子的高纯度多级分选。除此之外，本发明还具有结构简单，易于制作，成本低廉等特点。The advantage of the present invention is that according to the different acoustic radiation forces received by particles of different sizes at different frequencies, by adjusting the input frequency of the interdigital transducer, the multi-stage sorting of particles can be realized in a wide range and high efficiency . And under the joint action of the surface acoustic wave generated by the broadband interdigital transducer and the structure base of the dustpan sieving surface at the bottom of the flow channel, high-purity multi-stage separation of particles can be realized. In addition, the present invention also has the characteristics of simple structure, easy fabrication and low cost.
附图说明：Description of drawings:
图1为本发明的微流控芯片的等轴侧视图Fig. 1 is the isometric side view of the microfluidic chip of the present invention
图2为本发明的微流控芯片的分选流道主视图Fig. 2 is the front view of the sorting channel of the microfluidic chip of the present invention
图3为本发明的微流控芯片进行粒子分选的原理示意图。Fig. 3 is a schematic diagram of the principle of particle sorting performed by the microfluidic chip of the present invention.
具体实施方式：Detailed ways:
参照图1、图2和图3对本发明的结构特点和工作原理进行详细叙述。Referring to Fig. 1, Fig. 2 and Fig. 3, the structural features and working principle of the present invention are described in detail.
本发明提出一种新型的基于仿生基底的宽频带式声表面波分选芯片。该芯片主要由压电基底(1)、宽频带式叉指换能器(2)和微流道系统(5)组成，其中微流道系统(5)包括去离子水流入接口(13)和(16)、粒子流入接口(14)、去离子水流入流道(12)和(17)、粒子流入流道(15)、分选流道(11)、大粒子流出流道(9)、中等粒子流出流道(6)、小粒子流出流道(3)、大粒子流出出口(8)、中等粒子流出出口(7)、小粒子流出出口(4)。The invention proposes a novel broadband surface acoustic wave sorting chip based on a bionic substrate. The chip is mainly composed of a piezoelectric substrate (1), a broadband interdigital transducer (2) and a microchannel system (5), wherein the microchannel system (5) includes a deionized water inflow interface (13) and (16), particle inflow interface (14), deionized water inflow channel (12) and (17), particle inflow channel (15), sorting channel (11), large particle outflow channel (9), medium Particle outflow channel (6), small particle outflow channel (3), large particle outflow outlet (8), medium particle outflow outlet (7), small particle outflow outlet (4).
在粒子分选时需要将芯片整体与水平面呈一定角度放置，其角度大小需根据所分选粒子的尺寸等特性来调整。When sorting particles, it is necessary to place the whole chip at a certain angle to the horizontal plane, and the angle needs to be adjusted according to the size and other characteristics of the sorted particles.
将信号发生器的输出信号的+/-两极分别与叉指换能器的两极相连，然后输出连续的正弦信号。Connect the +/- poles of the output signal of the signal generator to the two poles of the interdigital transducer respectively, and then output a continuous sinusoidal signal.
将混有不同尺寸粒子的液体以一定的流量通过流入接口(14)注入分选流道系统中。将去离子水以一定的流量分别通过流入接口(13)和(16)注入分选流道系统中，其中接口(13)的流量大于接口(16)的流量。参照图2，不同尺寸的粒子在流入分选流道(11)后受到流道底部类似于簸箕筛动面凹凸有致结构(10)的作用，大粒子会比小粒子运动的速度更快。The liquid mixed with particles of different sizes is injected into the sorting channel system through the inflow port (14) at a certain flow rate. The deionized water is injected into the sorting channel system through the inlet ports (13) and (16) at a certain flow rate, wherein the flow rate of the port (13) is greater than the flow rate of the port (16). Referring to Fig. 2, particles of different sizes flow into the sorting channel (11) and are affected by the uneven structure (10) at the bottom of the channel similar to the moving surface of the dustpan, and the large particles move faster than the small particles.
参照图3，不同尺寸的粒子进入分选流道(11)后，由于流入接口(13)和(16)注入去离子水的流量不同，进而确保混合粒子集中于分选流道的设定区域。在流体、仿簸箕结构和声辐射力的共同作用下，粒子的运动轨迹呈抛物线状，且大粒子运动的相对较快、偏转角度也相对较大，从而使得尺寸大的粒子能够较快的从流出流道(9)流出，而中等粒子从流出流道(6)流出，小粒子则从流出流道(3)流出。Referring to Fig. 3, after particles of different sizes enter the sorting flow channel (11), due to the different flow rates of deionized water injected into the inflow ports (13) and (16), it is ensured that the mixed particles are concentrated in the set area of the sorting flow channel . Under the joint action of fluid, dustpan imitation structure and acoustic radiation force, the trajectory of particles is parabolic, and the large particles move relatively fast and the deflection angle is relatively large, so that the large particles can move from the The outflow channel (9) flows out, while the medium particles flow out from the outflow channel (6), and the small particles flow out from the outflow channel (3).
本发明采用的宽频带式叉指换能器不同与传统的叉指换能器只能在一个频率下产生最大的能量，宽频带式叉指换能器在一定的频率范围内均可产生很大能量。因此，可根据不同尺寸的粒子在不同频率下所受的声辐射力不同，通过调整叉指换能器的输入频率，从而能较大范围高效率的实现粒子的多级分选。The broadband IDT adopted in the present invention is different from the traditional IDT which can only generate the maximum energy at one frequency, and the broadband IDT can generate a large amount of energy within a certain frequency range. big energy. Therefore, by adjusting the input frequency of the interdigital transducer according to the different acoustic radiation forces experienced by particles of different sizes at different frequencies, multi-stage sorting of particles can be realized in a wide range and high efficiency.
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| CN109174426B (en) * | 2018-08-01 | 2020-10-30 | 哈尔滨工业大学（深圳） | Particle sorting device and method for sorting particles in liquid |
| CN110918140A (en) * | 2018-09-20 | 2020-03-27 | 北京怡天佳瑞科技有限公司 | Microfluidic chip, device containing same and method for separating particles |
| CN109865543B (en) * | 2019-04-02 | 2020-06-23 | 武汉大学 | A high-throughput microfluidic bulk wave sorting chip and preparation method thereof |
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