CN107916922B - Downhole fish detection method and device based on flexible array pressure sensor - Google Patents
Downhole fish detection method and device based on flexible array pressure sensor Download PDFInfo
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- CN107916922B CN107916922B CN201711428539.7A CN201711428539A CN107916922B CN 107916922 B CN107916922 B CN 107916922B CN 201711428539 A CN201711428539 A CN 201711428539A CN 107916922 B CN107916922 B CN 107916922B
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Abstract
Description
技术领域Technical Field
本发明属于油田修井作业的技术领域,尤其涉及一种井下落鱼探测方法及装置,具体地说是一种基于柔性阵列式压力传感器的井下落鱼探测方法及装置。The present invention belongs to the technical field of oilfield well repair operations, and in particular relates to a method and device for detecting fish falling into a well, and specifically to a method and device for detecting fish falling into a well based on a flexible array pressure sensor.
背景技术Background Art
每年生产的油水井由于井下落鱼,或因岩石断裂造成套管错断,导致油井停产,损失严重。因此需要打捞解卡等修井作业恢复油井的生产,其中对井下的落鱼或错断套管形状位置的检测与识别是首要关键的一步,其检测精度为后续修井作业的成功率提供重要保障。Every year, oil and water wells are shut down due to fish dropping or casing misalignment caused by rock fractures, resulting in serious losses. Therefore, well repair operations such as salvaging and unstuck wells are needed to restore oil well production. Among them, the detection and identification of the shape and position of fish dropping or misaligned casing in the well is the first and most critical step, and its detection accuracy provides an important guarantee for the success rate of subsequent well repair operations.
目前用于井下落鱼探测的方法主要有接触式的传统铅模打印,超声波成像探测,井下视像系统。传统的铅模打印的方法:由于通过铅模加压与鱼顶接触发生塑形变形,因此加压打印只能打印一次,不能重复打印;铅模通过连接的钻杆柱或油管柱输送,起下的作业周期长,效率低,增加了时间人工成本。井下视像方法:由于井内介质复杂多变,原油、杂质、泥浆等混合物造成声波衰减,且影响镜头对落鱼的探测,成本较高。超声波成像探测:由于超声波探头需要不断调节探头与鱼顶的竖直距离以及旋转角度进行逐点发射接收信号,确保采集的信号覆盖鱼顶的整个外形轮廓,因此探测效率较低,设备复杂且精度要求高,成本高,受井内介质以及电磁干扰成像精度不高。At present, the methods used for downhole fish detection mainly include contact traditional lead mold printing, ultrasonic imaging detection, and downhole video system. Traditional lead mold printing method: Since the lead mold is pressurized to contact with the fish top to cause plastic deformation, the pressurized printing can only be printed once and cannot be repeated; the lead mold is transported through the connected drill pipe column or oil pipe column, and the operation cycle of lifting and lowering is long, the efficiency is low, and the time and labor costs are increased. Downhole video method: Due to the complex and changeable media in the well, the mixture of crude oil, impurities, mud, etc. causes sound wave attenuation and affects the lens' detection of fallen fish, and the cost is high. Ultrasonic imaging detection: Since the ultrasonic probe needs to continuously adjust the vertical distance between the probe and the fish top and the rotation angle to transmit and receive signals point by point to ensure that the collected signal covers the entire shape of the fish top, the detection efficiency is low, the equipment is complex and the precision requirements are high, the cost is high, and the imaging accuracy is not high due to the well medium and electromagnetic interference.
综上所述目前应用于井下落鱼检测的技术方法与设备在检测精准度,作业效率,操作难度以及成本上都存在局限和不足。In summary, the technical methods and equipment currently used for downhole fish detection have limitations and shortcomings in detection accuracy, operation efficiency, operating difficulty and cost.
发明内容Summary of the invention
本发明提供一种基于柔性阵列式压力传感器的井下落鱼探测方法及其装置,以解决目前存在的落鱼识别准确度不高,探测作业效率低,操作工程量大的问题。The present invention provides a method and device for detecting fallen fish in a well based on a flexible array pressure sensor, so as to solve the existing problems of low accuracy in identifying fallen fish, low efficiency in detecting operation and large amount of operation engineering.
本发明采取的技术方案是,一种基于柔性阵列式压力传感器的井下落鱼探测方法,包括下列步骤:The technical solution adopted by the present invention is a method for detecting fish falling in a well based on a flexible array pressure sensor, comprising the following steps:
步骤一:通过测井电缆下放柔性阵列式压力传感探头至落鱼上方;Step 1: Lower the flexible array pressure sensor probe to the top of the fish through the logging cable;
步骤二:驱动步进电机带动盘形凸轮传动机构,控制水平面内周向均布的从动杆径向运动至套管内壁,完成探测装置的导向及固定;Step 2: drive the stepper motor to drive the disc cam transmission mechanism to control the follower rods uniformly distributed in the horizontal plane to move radially to the inner wall of the casing to complete the guidance and fixation of the detection device;
步骤三:驱动直线电机带动传动杆,控制柔性阵列式压力传感探头的轴向运动,完成传力保护触头与鱼顶的接触,利用引油通道和空腔结构实现井下传力保护触头的内外静压自平衡,并通过压阻式悬臂梁传感阵列获取鱼顶接触位移信息;Step 3: Drive the linear motor to drive the transmission rod, control the axial movement of the flexible array pressure sensing probe, complete the contact between the force transmission protection contact and the fish top, use the oil inlet channel and cavity structure to achieve the internal and external static pressure self-balancing of the downhole force transmission protection contact, and obtain the fish top contact displacement information through the piezoresistive cantilever beam sensor array;
步骤四:将压阻薄膜采集的电阻变化信号进行调理转换,通过电缆传输至上位机,实现落鱼位置和轮廓的高精度成像与识别。Step 4: Condition and convert the resistance change signal collected by the piezoresistive film, and transmit it to the host computer via a cable to achieve high-precision imaging and recognition of the position and contour of the fallen fish.
本发明所述步骤一中下放压力传感探测装置过程中,当柔性阵列式压力传感探头接触到鱼顶,接触状态可通过传输至上位机的压力成像数据突然增大以及电缆下放遇阻进行判断,停止电缆下放作业,然后上提探测装置10~20cm。During the process of lowering the pressure sensing detection device in step one of the present invention, when the flexible array pressure sensing probe contacts the top of the fish, the contact state can be judged by the sudden increase in pressure imaging data transmitted to the host computer and the resistance encountered in the lowering of the cable. The cable lowering operation is stopped, and then the detection device is lifted up 10 to 20 cm.
本发明所述步骤二中通过步进电机控制周向均布从动杆的径向行程,扶正壳体,并将其固定在套管内壁;其中从动杆端部为半球状耐高温耐腐蚀的橡胶,半球的曲率与套管内壁曲率一致,以增大从动杆端部与套管内壁的接触面积,增加端部与套管内壁的摩擦。In
本发明所述步骤四中:由井上上位机通过软件对井下落鱼探测实时成像,为获取更高精准度的鱼顶成像信息,可提起探测装置,调整柔性阵列式压力传感探头与鱼顶的接触速度,进行二次接触成像,重复上述操作,直至连续三次获得的落鱼位置与轮廓的误差在允许的范围以内,然后与现有的修井作业相关技术资料进行比对,完成井下落鱼的识别。In step four of the present invention: the upper computer on the well uses software to perform real-time imaging of the fish falling downhole. In order to obtain higher-precision imaging information of the fish top, the detection device can be lifted, and the contact speed between the flexible array pressure sensor probe and the fish top can be adjusted to perform secondary contact imaging. The above operation is repeated until the errors of the fish falling position and contour obtained three times in a row are within the allowable range, and then compared with the existing technical data related to the well repair operation to complete the identification of the fish falling downhole.
一种基于柔性阵列式压力传感器的井下落鱼探测装置:加重块下部通过连接装置与井下竖直传动机构连接,井下水平传动机构与井下竖直传动机构的壳体内部固定连接,井下竖直传动机构下部与柔性阵列式压力传感探头连接,测井电缆与加重块上部连接、并穿过井下竖直传动机构与柔性阵列式压力传感探头连接。A downhole fish detection device based on a flexible array pressure sensor: the lower part of the weight block is connected to the downhole vertical transmission mechanism through a connecting device, the downhole horizontal transmission mechanism is fixedly connected to the inside of the shell of the downhole vertical transmission mechanism, the lower part of the downhole vertical transmission mechanism is connected to the flexible array pressure sensing probe, the logging cable is connected to the upper part of the weight block, and passes through the downhole vertical transmission mechanism to connect to the flexible array pressure sensing probe.
本发明所述井下竖直传动机构的结构是:直线电机固定在壳体里,直线电机输出轴与传动杆通过螺纹连接,传动杆的端部与柔性阵列式压力传感探头焊接。The structure of the underground vertical transmission mechanism of the present invention is as follows: the linear motor is fixed in the housing, the output shaft of the linear motor is connected to the transmission rod through threads, and the end of the transmission rod is welded to the flexible array pressure sensing probe.
本发明所述井下水平传动机构的结构是:步进电机通过螺栓一固定在壳体上,步进电机的输出轴通过键一与主动齿轮上的齿轮轴连接,主动齿轮与从动齿轮构成齿轮副,套筒对从动齿轮进行轴向定位,从动齿轮通过键二与传动轴固定连接,带有凹槽的盘形凸轮通过键三固定在传动轴上,传动轴由轴承支承在壳体内,盘形凸轮凹槽中布置周向均布的从动杆。The structure of the underground horizontal transmission mechanism described in the present invention is: the stepper motor is fixed to the housing by
本发明所述柔性阵列式压力传感探头的结构是:基体与隔温罩焊接,电路板固定在隔温罩顶部,导线分别与电路板和聚酰亚胺薄膜连接,基体环形侧壁加工有引油孔,引油孔端口处有过滤塞,每个传力保护触头的上端加工有环形斜面、通过密封橡胶圈与基体连接,引油孔与每一个传力保护触头的上表面相通,且传力保护触头上、下表面的油液作用面积相等,隔压板粘接在基体上表面的凹槽中,聚酰亚胺薄膜与隔压板上方粘接,将压阻式悬臂梁传感阵列嵌入到柔性聚酰亚胺薄膜中,弹性传力柱下端与传力保护触头的上端粘接、上端穿过隔压板的孔壁、顶部与聚酰亚胺薄膜顶接。The structure of the flexible array pressure sensing probe described in the present invention is: the substrate is welded to the thermal insulation cover, the circuit board is fixed on the top of the thermal insulation cover, the wires are respectively connected to the circuit board and the polyimide film, the annular side wall of the substrate is processed with an oil inlet hole, and a filter plug is provided at the port of the oil inlet hole. The upper end of each force transmission protection contact is processed with an annular inclined surface and is connected to the substrate through a sealing rubber ring. The oil inlet hole is communicated with the upper surface of each force transmission protection contact, and the oil action area on the upper and lower surfaces of the force transmission protection contact is equal. The pressure isolation plate is bonded to the groove on the upper surface of the substrate, the polyimide film is bonded to the top of the pressure isolation plate, the piezoresistive cantilever beam sensing array is embedded in the flexible polyimide film, the lower end of the elastic force transmission column is bonded to the upper end of the force transmission protection contact, the upper end passes through the hole wall of the pressure isolation plate, and the top is connected to the polyimide film.
本发明所述压阻式悬臂梁传感阵列的结构是:Si基底上方是SiO2绝缘基底,压阻式悬臂梁一端与绝缘基底连接,压阻薄膜位于悬臂梁上方。The structure of the piezoresistive cantilever beam sensor array of the present invention is as follows: a SiO2 insulating substrate is disposed above a Si substrate, one end of the piezoresistive cantilever beam is connected to the insulating substrate, and a piezoresistive film is disposed above the cantilever beam.
本发明压阻式悬臂梁的受力长度为L2,弹性传力柱的直径为d,当L2≈0.3d,此时灵敏度达到最大。The force-bearing length of the piezoresistive cantilever beam of the present invention is L 2 , and the diameter of the elastic force-transmitting column is d. When L 2 ≈0.3d, the sensitivity reaches the maximum.
本发明的有益效果是:The beneficial effects of the present invention are:
(1)本发明的压力传感探测装置的下放与上提是通过电缆实现的,相对传统铅模通过钻杆柱或油管柱运送的方式,具有井下作业周期短、效率高、节省时间与人工成本等优点。(1) The lowering and lifting of the pressure sensing detection device of the present invention is achieved through cables. Compared with the traditional method of transporting lead molds through drill pipe strings or oil pipe strings, it has the advantages of short downhole operation cycle, high efficiency, saving time and labor costs, etc.
(2)本发明的落鱼探测装置实时反馈井下落鱼位置及形状,并可通过上位机控制探测装置与鱼顶的接触状态,能够提高落鱼检测的精准度,与传统铅模相比,柔性阵列式压力传感器与鱼顶的接触为弹性变形,可实现多次打印,即重复使用。(2) The fish-falling detection device of the present invention can provide real-time feedback on the position and shape of the fish falling downhole, and can control the contact state between the detection device and the top of the fish through the host computer, thereby improving the accuracy of fish-falling detection. Compared with the traditional lead mold, the contact between the flexible array pressure sensor and the top of the fish is elastic deformation, which can be printed multiple times, that is, reused.
(3)本发明通过柔性阵列式压力传感探头与鱼顶进行接触式检测,利用压阻式悬臂梁传感阵列,并将其嵌入到聚酰亚胺的绝缘弹性薄膜中,相对井下非接触式电视、超声波成像来说,抗环境介质和电磁干扰强,具有高的信噪比,能实现高精准度的落鱼检测,可靠性高,且相对超声波探头逐点探测来说效率更高,结构紧凑,操作简单,成本低。(3) The present invention uses a flexible array pressure sensor probe to perform contact detection with the fish top, utilizes a piezoresistive cantilever beam sensor array, and embeds it into an insulating elastic film of polyimide. Compared with downhole non-contact television and ultrasonic imaging, the present invention has strong resistance to environmental media and electromagnetic interference, has a high signal-to-noise ratio, can achieve high-precision fish detection, has high reliability, and is more efficient than point-by-point detection by ultrasonic probes. It has a compact structure, is simple to operate, and has low cost.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1是本发明的结构示意图;Fig. 1 is a schematic structural diagram of the present invention;
图2a是本发明井下水平传动机构的结构示意图;FIG2a is a schematic structural diagram of a downhole horizontal transmission mechanism of the present invention;
图2b是本发明从动杆的初始状态示意图;FIG2 b is a schematic diagram of the initial state of the driven rod of the present invention;
图2c是本发明从动杆的导向固定状态示意图;FIG2c is a schematic diagram of the guide fixing state of the driven rod of the present invention;
图3是本发明柔性阵列式压力传感探头的结构示意图;FIG3 is a schematic diagram of the structure of a flexible array pressure sensing probe according to the present invention;
图4是本发明压阻式悬臂梁传感阵列的分布示意图;FIG4 is a schematic diagram of the distribution of the piezoresistive cantilever beam sensor array of the present invention;
图5是本发明压阻式悬臂梁传感单元的结构受力示意图;FIG5 is a schematic diagram of the structural force of the piezoresistive cantilever beam sensing unit of the present invention;
图6是本发明灵敏度与悬臂梁受力长度比的关系曲线图;FIG6 is a curve diagram showing the relationship between the sensitivity of the present invention and the ratio of the cantilever beam force length;
图中:1、柔性阵列式压力传感探头,101、传力保护触头,102、密封橡胶圈,103、基体,104、过滤塞,105、引油口,106、弹性传力柱,107、隔压板,108、聚酰亚胺薄膜,109、电路板,110、压阻式悬臂梁传感阵列,1101、压阻薄膜,1102、压阻式悬臂梁,1103、SiO2绝缘基底,1104、Si基底,111、导线,112、隔温罩,2、井下竖直传动机构,201、传动杆,202、直线电机203、壳体,204、线路,3、井下水平传动机构,301、步进电机,302、螺栓一,303、键一,304、主动齿轮,305、套筒,306、从动齿轮,307、键二,308、从动杆,309、盘形凸轮,310、键三,311、传动轴,312、轴承,4、连接装置,401、螺栓二,402、螺栓三,403、密封橡胶,5、加重块,6、测井电缆,7、上位机,8、井下落鱼,9、套管。In the figure: 1, flexible array pressure sensor probe, 101, force transmission protection contact, 102, sealing rubber ring, 103, substrate, 104, filter plug, 105, oil inlet, 106, elastic force transmission column, 107, pressure isolation plate, 108, polyimide film, 109, circuit board, 110, piezoresistive cantilever beam sensor array, 1101, piezoresistive film, 1102, piezoresistive cantilever beam, 1103, SiO 2. Insulating substrate, 1104. Si substrate, 111. Wire, 112. Thermal insulation cover, 2. Downhole vertical transmission mechanism, 201. Transmission rod, 202.
具体实施方式DETAILED DESCRIPTION
如图1和图2a~2c所示,一种基于柔性阵列式压力传感器的井下落鱼探测方法,包括下列步骤:As shown in FIG. 1 and FIG. 2a to FIG. 2c, a method for detecting fish in a well based on a flexible array pressure sensor comprises the following steps:
步骤一:通过测井电缆6下放柔性阵列式压力传感探头1至落鱼8上方;Step 1: lowering the flexible array
步骤二:驱动步进电机301带动盘形凸轮传动机构,控制水平面内周向均布的从动杆308径向运动至套管9内壁,完成探测装置的导向及固定;Step 2: Drive the
步骤三:驱动直线电机202带动传动杆201,控制柔性阵列式压力传感探头1的轴向运动,完成传力保护触头101与落鱼顶的接触,利用引油通道和空腔结构实现井下传力保护触头的内外静压自平衡,并通过压阻式悬臂梁传感阵列110获取落鱼顶接触位移信息;Step 3: Drive the
步骤四:将压阻薄膜1101采集的电阻变化信号进行调理转换,通过电缆传输至上位机7,实现落鱼位置和轮廓的高精度成像与识别;Step 4: Condition and convert the resistance change signal collected by the
所述步骤一中下放压力传感探测装置过程中,当柔性阵列式压力传感探头1接触到落鱼顶,接触状态可通过传输至上位机的压力成像数据突然增大以及电缆下放遇阻进行判断,停止电缆下放作业,然后上提探测装置10~20cm;During the process of lowering the pressure sensing detection device in
所述步骤二中通过步进电机控制周向均布从动杆的径向行程,扶正壳体,并将其固定在套管9内壁;其中从动杆端部为半球状耐高温耐腐蚀的橡胶,半球的曲率与套管内壁曲率一致,以增大从动杆端部与套管内壁的接触面积,增加端部与套管内壁的摩擦;In the
所述步骤四中:由井上上位机7通过软件对井下落鱼探测实时成像,为获取更高精准度的鱼顶成像信息,可提起探测装置,调整柔性阵列式压力传感探头与鱼顶的接触速度,进行二次接触成像,重复上述操作,直至连续三次获得的落鱼位置与轮廓的误差在允许的范围以内,然后与现有的修井作业相关技术资料进行比对,完成井下落鱼的识别;In the step 4, the upper computer 7 on the well performs real-time imaging of the downhole fish detection through software. To obtain higher-precision imaging information of the fish top, the detection device can be lifted, and the contact speed between the flexible array pressure sensing probe and the fish top can be adjusted to perform secondary contact imaging. The above operation is repeated until the error of the fish position and contour obtained three times in a row is within the allowable range, and then compared with the existing technical data related to the well repair operation to complete the identification of the downhole fish;
采集压阻式悬臂梁的输出信号,信号经过调理电路的滤波,放大处理后,进行A/D转换电路模块,然后通信接口模块将信号通过测井电缆6传输至井上,进行滤波放大,最后通过通信接口传至上位机7,在Labview软件中通过算法进行滤波,标定,插值拟合成像。The output signal of the piezoresistive cantilever beam is collected, filtered and amplified by the conditioning circuit, and then the A/D conversion circuit module is performed. Then the communication interface module transmits the signal to the well through the logging cable 6, filters and amplifies it, and finally transmits it to the host computer 7 through the communication interface. The algorithm is used in the Labview software to filter, calibrate, interpolate and fit the image.
如图1所示,一种基于柔性阵列式压力传感器的井下落鱼探测装置,加重块5下部通过连接装置4与井下竖直传动机构2连接,井下水平传动机构3与井下竖直传动机构2的壳体203内部固定连接,井下竖直传动机构2下部与柔性阵列式压力传感探头1连接;测井电缆6与加重块5上部连接、并穿过井下竖直传动机构2与柔性阵列式压力传感探头1连接。As shown in Figure 1, a downhole fish detection device based on a flexible array pressure sensor is provided, wherein the lower portion of the
所述井下竖直传动机构2的结构是:直线电机202固定在壳体203里,直线电机202输出轴与传动杆201通过螺纹连接,传动杆201的端部与柔性阵列式压力传感探头1焊接,实现传感探头的轴向运动;The structure of the downhole
所述连接装置4包括螺栓二401、螺栓三402和密封橡胶403,壳体203用螺栓二401进行连接,并用耐高温耐腐蚀的密封橡胶403进行密封,加重块5通过螺栓三402固定在壳体203上,通过设计加重块5的几何形状使压力传感探测装置的重心处于套管9内壁回转中心轴上,实现探测装置顺利下放;The connecting device 4 includes a
所述井下水平传动机构3的结构是:步进电机301通过螺栓一302固定在壳体203上,步进电机301的输出轴通过键一303与主动齿轮304上的齿轮轴连接,主动齿轮304与从动齿轮306构成齿轮副,套筒305对从动齿轮进行轴向定位,从动齿轮306通过键二307与传动轴311固定连接,带有凹槽的盘形凸轮309通过键三310固定在传动轴311上,传动轴311由轴承312支承在壳体内,盘形凸轮309凹槽中布置周向均布的从动杆308;The structure of the underground horizontal transmission mechanism 3 is as follows: the
如图2a所示,井下水平传动机构3中,步进电机301通过齿轮副驱动带凹槽的盘形凸轮309,进而带动周向均布的从动杆308径向运动,从动杆308的一端卡在盘形凸轮309的凹槽中,另一端包裹有耐高温耐腐蚀的橡胶;如图2b和2c所示,通过步进电机301控制从动杆308的两种位置状态,当从动杆308从初始状态运动到导向固定状态(凸轮的回转中心最远处),完成传感探测装置的扶正固定。As shown in FIG2a, in the downhole horizontal transmission mechanism 3, the
如图3所示,柔性阵列式压力传感探头1的结构是:基体103与隔温罩112焊接,电路板109固定在隔温罩112顶部,导线111分别与电路板109和聚酰亚胺薄膜108连接,基体103环形侧壁加工有引油孔105,引油孔105端口处有过滤塞104,滤掉油井内油液的悬浮杂质,避免内部通道堵塞,每个传力保护触头101的上端加工有环形斜面,通过密封橡胶圈102与基体103连接,保证传力保护触头101在腔体内壁竖直方向运动且不脱落,引油孔105与每一个传力保护触头101的上表面相通,且传力保护触头101上、下表面的油液作用面积相等,实现在下放过程中柔性阵列式压力传感探头1的内外始终保持静油压力的自平衡,避免井下油液的静油压对传感器测量结果带来的影响,使得探测装置稳定工作,检测数据可靠;隔压板107粘接在基体103上表面的凹槽中,聚酰亚胺薄膜108与隔压板107上方粘接,隔压板107一方面可防止油液压力传递到压阻式悬臂梁传感阵列110上,另一方面可使得作用于传力保护触头101的过载力通过隔压板107传递到基体,以实现传感器的防过载功能,使传感器工作可靠;将压阻式悬臂梁传感阵列110嵌入到柔性聚酰亚胺薄膜108中,以优化传感器的柔弹性与机械性能;弹性传力柱106下端与传力保护触头101的上端粘接、上端穿过隔压板107的孔壁、顶部与聚酰亚胺薄膜108顶接,实现井下鱼顶与压阻式悬臂梁传感阵列110的力传递,弹性传力柱106不仅能够起到一定的缓冲作用,还能实现传感器的柔性以适应鱼顶的非平整表面,As shown in FIG3 , the structure of the flexible array
所述压阻式悬臂梁传感阵列110的结构是:Si基底1104上方是SiO2绝缘基底1103,压阻式悬臂梁1102一端与绝缘基底1103连接,压阻薄膜1101位于悬臂梁1102上方,The structure of the piezoresistive cantilever
如图4所示,压阻式悬臂梁传感阵列110利用微系统加工工艺MEMS在耐高温的绝缘体硅(SOI)基板上加工而成,使传感阵列具备好的机械电学特性,且每个压阻式悬臂梁1102中轴线与引油口105的回转中心线呈45度夹角,以增加传感阵列的空间分辨率,同时,本发明根据井下落鱼的现有技术资料,在确保小物件落鱼同样有高检测精确度的前提下,设计压阻式悬臂梁传感阵列的空间分辨率为5mm;As shown in FIG4 , the piezoresistive cantilever
所述压阻式悬臂梁1102的受力(弹性传力柱106作用)长度为L2,弹性传力柱106的直径为d,当L2≈0.3d,此时传感的灵敏度性能达到最大。The force-bearing length of the piezoresistive cantilever beam 1102 (acted by the elastic force transmission column 106 ) is L 2 , and the diameter of the elastic
如图5所示,传力保护触头101接触鱼顶后,首先弹性传力柱106压缩变形,其次弹性传力柱106将力传到压阻式悬臂梁结构的端部,压阻式悬臂梁1102通过SiO2绝缘基底1103和Si基底1104固定在隔压板107上,最后通过压阻式悬臂梁上压阻薄膜1101的阻值变化率获取落鱼形状与位置信息,建立传力保护触头101的竖直位移(由于与落鱼表面接触带来的)与压阻薄膜1101输出的电阻变化率的关系式,具体的计算公式有:As shown in FIG5 , after the force transmission protection contact 101 contacts the top of the fish, the elastic
由于E2>>E3,E2为压阻式悬臂梁1102的杨氏模量(200Gpa),E3为聚酰亚胺薄膜108的杨氏模量(3-4Gpa),因此可看作将弹性传力柱106的作用力F以均布载荷q全作用到压阻式悬臂梁1102端部;式中,h,△z1,d,E1分别为弹性传力柱106的高度,形变量,直径,杨氏模量;L2为悬臂梁结构1102受力长度;Since E 2 >> E 3 , E 2 is the Young's modulus (200 Gpa) of the
压阻式悬臂梁1102受到均布载荷弯矩方程M(x)为:The bending moment equation M(x) of the
作用于压阻薄膜1101的等效弯矩Me:The equivalent bending moment Me acting on the
压阻薄膜1101的表面应力σ: The surface stress σ of the
式中,L,w,t分别为悬臂梁结构1102的长度,宽度,厚度;L1为压阻薄膜1101的长度,其中L=L1+L2,I为悬臂梁结构1102的惯性矩, Wherein, L, w, t are the length, width, and thickness of the
由梁结构的挠曲线近似方程:The deflection curve approximation equation of the beam structure is:
当0≤x≤L-L2时,压阻式悬臂梁1102转角方程θ1(x),挠度方程v1(x):When 0≤x≤LL 2 , the rotation angle equation θ 1 (x) and the deflection equation v 1 (x) of the
当L-L2≤x≤L时,压阻式悬臂梁1102转角方程θ1(x),挠度方程v1(x):When LL 2 ≤x≤L, the rotation angle equation θ 1 (x) and the deflection equation v 1 (x) of the
式中,E2为压阻式悬臂梁1102的杨氏模量,x为离悬臂梁固定端的距离;Where, E 2 is the Young's modulus of the
由边界条件:By the boundary conditions:
v1(0)=0,θ1(0)=0,v1(L-L2)=v2(L-L2),θ1(L-L2)=θ2(L-L2);v 1 (0) = 0, θ 1 (0) = 0, v 1 (LL 2 ) = v 2 (LL 2 ), θ 1 (LL 2 ) = θ 2 (LL 2 );
可得常数C1,D1,C2,D2:We can get the constants C 1 , D 1 , C 2 , D 2 :
C1=0,D1=0;C 1 = 0, D 1 = 0;
式中,△z2为压阻式悬臂梁1102端部的挠度,kl为压阻式悬臂梁1102右端部的等效刚度,因为有:Wherein, Δz 2 is the deflection of the end of the
式中,△z为鱼顶形状引起的传感器竖直方向的整体位移;Where △z is the overall displacement of the sensor in the vertical direction caused by the fish top shape;
可得到该传感器的灵敏度s为:The sensitivity s of the sensor can be obtained as:
式中,μ,ε,λ分别为压阻薄膜的横向泊松比,纵向应变,压阻系数;△R,R分别为压阻薄膜1101由鱼顶形状带来的电阻变化量,电阻初始值。Wherein, μ, ε, λ are respectively the transverse Poisson's ratio, longitudinal strain, and piezoresistance coefficient of the piezoresistive film; △R and R are respectively the resistance change amount and initial resistance value of the
可通过传感器灵敏度S表达式中的参数进行优化实现传感器灵敏度最大化;其中,The sensor sensitivity can be maximized by optimizing the parameters in the sensor sensitivity S expression;
本实施例中,定参数取值:In this embodiment, the fixed parameter values are:
E1=2GPa,E2=200GPa,d=5mm,t=0.8mm,L1=1mm,E 1 =2GPa, E 2 =200GPa, d =5mm, t =0.8mm, L 1 =1mm,
w=2mm,h=12mm;w = 2 mm, h = 12 mm;
优化参数L2,得到如图6所示的曲线,图中横坐标为纵坐标为传感器的灵敏度S,传感器的灵敏度呈现先增大后减小的趋势,可得到时,传感器的灵敏度达到最大,因此取压阻式悬臂梁1102受弹性传力柱的载荷长度为弹性传力柱直径的0.3倍。By optimizing the parameter L 2 , we get the curve shown in Figure 6 , where the horizontal axis is The ordinate is the sensitivity S of the sensor. The sensitivity of the sensor increases first and then decreases. When , the sensitivity of the sensor reaches the maximum, so the load length of the
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