CN107813436A - Topping machanism - Google Patents

Abstract

A cutting device is provided having a non-contact setting mechanism. The cutting device has: a chuck table that holds a workpiece; a cutting unit that cuts the workpiece with a cutting tool; a detection member that detects the position of the tip of the cutting tool; and a control member that controls the chuck table, the cutting unit, and the The detection component is controlled, and the detection component includes: a tool intrusion part; a light emitting part arranged on one side of the tool intrusion part; a light receiving part arranged on the other side of the tool intrusion part, which receives light from the light emitting part; washing water Nozzles for supplying cleaning water to the end surfaces of the light-emitting part and light-receiving part to prevent chips from adhering to the end surfaces; and air supply nozzles for supplying air to the end surfaces, and the control member stops cleaning from The water supply nozzle and the air supply nozzle supply cleaning water and air, and intermittently supply cleaning water and air to the end surface to remove chips adhering to the end surface during standby other than the detection operation.

Description

cutting device

technical field

The present invention relates to a cutting device, and more particularly, to a cutting device capable of preventing contamination of the optical sensor while suppressing supply of washing water to an optical sensor of a non-contact installation mechanism.

Background technique

Various electronic components requiring precise cutting such as semiconductor wafers, ceramics, and glass are divided into individual chips by using a cutting device called a dicing machine. In the processing of these electronic components, precise dicing in the order of microns is required, and not only the size of the chip but also the depth of incision is important for this dicing.

For example, the semiconductor wafer is fixed on the dicing tape, and the cutting tool is cut into the dicing tape by about 10 to 30 μm to completely cut the semiconductor wafer. However, if the cutting amount for the dicing tape is insufficient, the wafer cannot be completely cut. , it becomes a jagged state in which the cut piece on the lower side is missing.

In addition, the cutting tool used for cutting has the property of being worn as the cutting process is continued, and it is necessary to correct the fluctuation of the depth of cut due to the wear of the cutting tool at any time.

Such a change in the position of the edge of the cutting tool is detected at any time by a non-contact setting mechanism using an optical sensor, and the height position of the cutting tool is corrected (origin position correction) based on the detection result (for example, refer to Japanese Patent Application Laid-Open No. 11- 214334). According to this technique, the height position of the cutting tool can be easily detected without cutting off the chuck table holding the workpiece or the workpiece, and without damaging the cutting tool.

Since it is important for the optical sensor to detect the edge position (tip position) of the cutting tool to avoid misrecognition by the optical sensor, it is necessary to keep the optical sensor composed of a light emitting part and a light receiving part clean. However, since the optical sensor is in the gas of the processing chamber, there is a problem that cutting chips in the gas adhere to the optical sensor and easily induce false recognition.

Therefore, a method of supplying cleaning water to the optical sensor other than the detection operation of the tip position of the cutting tool has been proposed, but there is a problem that a large amount of cleaning water is consumed. In order to avoid this problem, Japanese Patent Application Laid-Open No. 2003-211354 proposes a method of accommodating the optical sensor with an openable cover to prevent the optical sensor from being exposed to the gas in the processing chamber.

Patent Document 1: Japanese Patent Application Laid-Open No. 11-214334

Patent Document 2: Japanese Patent Laid-Open No. 2003-211354

However, in the mechanism disclosed in Patent Document 2, when a large amount of cutting chips is contained in the gas in the processing chamber, there is still a small gap in which the opening and closing cover remains, which may cause contamination of the optical sensor and cause erroneous detection. possibility.

Contents of the invention

The present invention has been made in view of the above points, and an object of the present invention is to provide a cutting device having a non-contact installation mechanism capable of suppressing the amount of washing water used and preventing contamination from adhering to an optical sensor.

According to the present invention, there is provided a cutting device including: a chuck table that holds a workpiece; a cutting unit that cuts the workpiece held by the chuck table with a cutting tool; and a detection member that It detects the front end position of the cutting tool; and a control member controls at least the chuck table, the cutting unit and the detection member, the cutting device is characterized in that the detection member includes: a U-shaped tool an intrusion part; a light emitting part arranged on one side of the cutter intrusion part; a light receiving part arranged on the other side of the cutter intrusion part to receive light from the light emitter; and a cleaning water nozzle for the Cleaning water is supplied to the end faces of the light emitting part and the light receiving part to prevent chips from adhering to the end faces. During the detection operation for detecting the position of the tip of the cutting tool, the control means stops the supply of cleaning water from the cleaning water supply nozzle. During standby other than the detection operation, the control means intermittently supplies cleaning water to the end surface to remove cutting chips adhering to the end surface.

Preferably, the detecting member further includes an air supply nozzle, which supplies air to the end surfaces of the light-emitting part and the light-receiving part, and the control member intermittently supplies air from the air supply nozzle to the end surface during the standby state, and passes water And the air will remove the cutting chips attached to the end face.

According to the cutting device of the present invention, by intermittently supplying washing water to the optical sensor of the non-contact installation mechanism, it is possible to suppress the amount of washing water used and prevent contamination from adhering to the optical sensor.

Description of drawings

Fig. 1 is a perspective view of a cutting device having a non-contact setting mechanism of the present invention.

Fig. 2 is a cross-sectional view of the machining chamber casing in a state where the chuck table has moved to the cutting machining position.

Fig. 3 is a longitudinal sectional view of a processing chamber casing.

Fig. 4 is a block diagram of a non-contact setting mechanism.

5 is a graph showing changes in the output voltage of the non-contact setting mechanism corresponding to the position in the cutting direction of the cutting tool.

Fig. 6 is a perspective view of a non-contact setting mechanism.

Fig. 7 is a side view of the non-contact setting mechanism.

FIG. 8 is an explanatory diagram illustrating transitions in the method of supplying washing water.

Label description

2: Cutting device; 6: Chuck table; 32: Cutting unit; 38: Cutting tool; 42: Processing room shell; 44: Processing room; 46: Non-contact setting mechanism (tool end detection mechanism); 62: Mounting part; 63: Tool entry part; 64: Light emitting part; 65: Optical sensor; 66: Light receiving part; 68: Cleaning water supply nozzle; 70: Air supply nozzle; 84: Light source; 86: Photoelectric conversion part; 88: Reference Voltage setting unit; 90: voltage comparison unit; 92: end position detection unit.

Detailed ways

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Referring to FIG. 1 , there is shown a perspective view of a cutting device 2 having a non-contact setting mechanism (tool end detection mechanism) according to an embodiment of the present invention.

4 is a base of the cutting device 2, and the chuck table 6 is arranged on the base 4, and the chuck table 6 is rotatable and can reciprocate in the X-axis direction by a machining feed member not shown. A waterproof cover 8 is disposed around the chuck table 6 , and a bellows 10 for protecting the shaft of the machining feed mechanism is connected between the waterproof cover 8 and the base 4 .

A door-shaped post 12 is erected behind the base 4 . A pair of guide rails 14 extending in the Y-axis direction are fixed to the column 12 . A Y-axis moving block 16 is mounted on the column 12, and the Y-axis moving block 16 can move along the guide rail 14 by a Y-axis moving mechanism (index feed mechanism) 20 composed of a ball screw 18 and a pulse motor (not shown). Move in the Y-axis direction.

A pair of guide rails 22 extending in the Z-axis direction are fixed to the Y-axis moving block 16 . The Z-axis moving block 24 is mounted on the Y-axis moving block 16, and the Z-axis moving block 24 can move in the Z-axis direction by being guided by the guide rail 22 through a Z-axis moving mechanism 30 composed of a ball screw 26 and a pulse motor 28. .

A cutting unit 32 is attached to the Z-axis moving block 24, a main shaft 36 shown in FIG. Cutting tool 38. An imaging unit 40 including a microscope and a camera is also mounted on the Z-axis moving block 24 .

42 is a processing chamber casing constituting the processing chamber 44, which is formed of transparent resin such as polycarbonate. The machining chamber case 42 accommodates the chuck table 6 and the cutting tool 38 . An exhaust port 50 is formed in the processing chamber casing 42 .

Reference numeral 46 denotes a non-contact setting mechanism (tool end detection mechanism) according to an embodiment of the present invention, and its detailed structure is shown in FIGS. 4 and 5 . By pulling the handle 48 , the door 49 of the processing chamber casing 42 can be opened, and the workpiece can be loaded onto the chuck table 6 or unloaded from the chuck table 6 .

Referring to FIG. 2 , it shows a cross-sectional view of the machining chamber housing 42 in a state where the chuck table 6 is moved to the cutting machining position. 3 is a longitudinal sectional view of the machining chamber housing 42. During the cutting of the workpiece held on the chuck table 6, cutting water is supplied from the cutting water nozzle 54 toward the front end of the tool, and from the cooling water nozzle 52 toward the cutting tool. The machining point 38 provides cooling water to cut the workpiece.

Therefore, the mist 56 of machining chips, cutting water, and cooling water is scattered in the gas of the machining chamber 44, and the non-contact setting mechanism 46 is exposed to such gas.

Next, the non-contact setting mechanism (tool end detection mechanism) 46 according to the embodiment of the present invention will be described in detail with reference to FIGS. 4 to 6 . As shown in FIG. 6 , a cylindrical bracket 60 protrudes from the base 4 , and a mounting member 62 of the non-contact installation mechanism 46 is fixed to the bracket 60 . The attachment member 62 has a horizontal part 62a, a vertical part 62b and an inclined part 62c constituting the U-shaped tool entry part 63 .

An optical sensor 65 including a light emitting unit 64 and a light receiving unit 66 that receives light from the light emitting unit 64 is disposed across the tool entry portion 63 (see FIG. 7 ). As shown in FIG. 4 , the light emitting unit 64 is connected to a light source 84 via an optical fiber 83 , and the light receiving unit 66 is connected to a photoelectric conversion unit 86 via an optical fiber 85 .

On the inclined portion 62c of the mounting member 62, there are disposed: a cleaning water supply nozzle 68 for supplying constant-temperature-adjusted cleaning water to the end surfaces of the light emitting portion 64 and the light receiving portion 66; and an air supply nozzle 70 for supplying the light emitting portion 64 and the Air is supplied to the end surface of the light receiving unit 66 .

As shown in FIG. 4 , washing water supply nozzle 68 is selectively connected to washing water supply source 78 via electromagnetic switching valve 76 , and air supply nozzle 70 is selectively connected to air supply source 82 via electromagnetic switching valve 80 .

When setting the cutting tool 38 using the non-contact setting mechanism 46, the pulse motor 28 of the Z-axis feed mechanism 30 is driven so that the front end (edge) of the cutting tool 38 enters the non-contact setting mechanism from above. 46 of the tool intrusion into the portion 63 .

At this time, when the cutting tool 38 does not block the space between the light-emitting part 64 and the light-receiving part 66 of the optical sensor 65 at all, the amount of light received by the light-receiving part 66 is the largest, and the light corresponding to the amount of light comes from the photoelectric conversion part 86. The output of is set to 5V, for example, as shown in FIG. 5 .

As the cutting tool 38 enters the tool intrusion portion 63, the cutting tool 38 gradually increases the blocking amount of the light beam emitted from the light emitting portion 64, so the amount of light received by the light receiving portion 66 gradually decreases, and the output voltage from the photoelectric conversion portion 86 is at The taper is shown at 87 in FIG. 5 .

Then, when the cutting blade 38 reaches a predetermined position between the light emitting unit 64 and the light receiving unit 66 , the output voltage from the photoelectric conversion unit 86 is set to, for example, 3V which is a reference voltage. Therefore, when the output voltage of the photoelectric conversion unit 86 is 3V, the voltage comparison unit 90 outputs a signal indicating that the output voltage of the photoelectric conversion unit 86 has reached the reference voltage to the end position detection unit 92 .

The end position detection unit 92 sends a signal indicating that the reference position has been detected to the pulse motor 28 to stop the drive of the pulse motor 28 . At this time, the end position detector 92 detects the position of the cutting tool 38 in the cutting direction (Z-axis direction) by counting the number of pulses of the pulse motor 28 of the Z-axis feed mechanism 30 . The reference position as the lowest point end position of the cutting tool 38 is stored in the memory of the cutting device 2 .

According to the non-contact setting method of the present embodiment, after the workpiece is properly cut with the cutting tool 38, the wear amount calculation step is performed, and the lowest point end detection step is performed to compare the value of the cutting tool 38 calculated and stored last time. The position of the end portion of the lowest point is compared, and the wear amount (consumption amount) of the cutting tool 38 is calculated by the calculation unit 94 .

Then, the position of the origin of the cutting tool 38 in the Z-axis direction is corrected by the position correction unit 96 based on the wear amount of the cutting tool 38 calculated in the wear amount calculating step. By correcting the origin position, the edge of the cutting tool 38 can be placed at the origin position where it contacts the upper surface of the frame of the chuck table 6 .

As described above, the non-contact setting mechanism 46 is always exposed to the gas in the processing chamber 44 . Therefore, the end surfaces of the light emitting unit 64 and the light receiving unit 66 of the optical sensor 65 are contaminated with mist, cutting chips, and the like contained in the gas.

In order to prevent this contamination, in the embodiment of the present invention, in addition to the detection operation of detecting the position of the tip of the cutting tool 38, cleaning water is intermittently supplied from the cleaning water supply nozzle 68 to the end surface of the light emitting part 64 and the end surface of the light receiving part 66. , more preferably from the cleaning water supply nozzle 68 and the air supply nozzle 70 to the end surface of the light emitting part 64 and the end surface of the light receiving part 66 intermittently supply cleaning water and air, the pollution attached to the end surface of the light emitting part 64 and the light receiving part 66 is removed .

Hereinafter, this end surface cleaning method will be described in detail with reference to FIG. 8 . Reference numeral A in FIG. 8 is during edge detection of the cutting tool 38 , at which time the supply of washing water from the washing water supply nozzle 68 and the supply of air from the air supply nozzle 70 are stopped.

In addition, when detecting the position of the tool end, of course, the detection is performed after opening the opening and closing cover 72 attached to the mounting member 62 via the hinge 74 . When the detection operation is completed, the opening and closing cover 72 is closed to prevent the light emitting unit 64 and the light receiving unit 66 from being exposed to the gas in the processing chamber 44 .

In FIG. 8 , cleaning water and air are intermittently supplied toward the end surfaces of the light-emitting portion 64 and the light-receiving portion 66 during cutting of the workpiece indicated by reference numeral B after the detection of the cutting edge of the cutting tool 38 is completed.

As shown in the second row of FIG. 8 , C indicated by a dotted line is a supply stop period, and D is a supply period. Therefore, in the cutting of the workpiece shown in B, the supply stop period C and the supply period D are alternately repeated. For example, after the supply stop period C is implemented for 1 to 5 seconds, the supply period D is implemented for about 0.1 to 2 seconds.

In addition, as shown in the third line of FIG. 8 , in the supply period D, after the simultaneous supply period E in which the washing water is supplied from the washing water supply nozzle 68 and the air is supplied from the air supply nozzle 70 is simultaneously performed, the water supply shown in F is set. During the period when only the cleaning water is supplied, the end surface becomes dry during the supply stop period indicated by C, and chips are prevented from easily adhering to the end surface.

Here, the supply of air from the air supply nozzle 70 serves to remove contamination adhering to the end surfaces of the light emitting portion 64 and the light receiving portion 66 together with the washing water. The flow rate of the air is adjusted so that the end surface does not dry out.

In order to make the air and the cleaning water mix into two fluids and improve the cleaning effect of the end face, the cleaning water supply nozzle 68 and the air supply nozzle 70 can be made close to the nozzles of the air supply nozzle 70 and mixed after spraying, or the nozzles can be integrated to form Cleaning water and air are mixed inside and sprayed out.

According to the above-mentioned embodiment, by intermittently supplying cleansing water and air to the end faces of the light emitting unit 64 and the light receiving unit 66 of the non-contact installation mechanism 46, it is possible to suppress the amount of washing water used and prevent contamination from adhering to the optical sensor 65. .

In addition to this embodiment, it is also possible to supply only water during the supply period D to prevent adhesion of contamination and dryness. In addition, air may be supplied from the air supply nozzle 70 immediately before the tool end position detection to remove the cleaning water adhering to the end surface.

Claims (2)

1. a kind of topping machanism, the topping machanism has：Chuck table, it keeps to machined object；Cutting unit, its The machined object kept using cutting tool to the chuck table is cut；Detection means, it is to the cutting tool Front position is detected；And control member, it is at least carried out to the chuck table, the cutting unit and the detection means Controlling, the topping machanism is characterised by,

The detection means include：

The cutter intrusion portion of U-shape；

Illuminating part, it is disposed in the side in the cutter intrusion portion；

Light accepting part, it is disposed in the opposite side in the cutter intrusion portion, receives the light from the illuminating part；And

(operating) water nozzle is cleaned, it provides rinse water to the end face of the illuminating part and the light accepting part, prevents cutting swarf from adhering to the end face,

In the detection operation that the front position to the cutting tool is detected, the control member stops providing from the rinse water Nozzle provides rinse water, and in standby beyond the detection operation, rinse water is supplied intermittently to the end face in the control member, will The cutting swarf being attached on the end face removes.

2. topping machanism according to claim 1, it is characterised in that

The detection means also provide nozzle comprising air, and the air provides nozzle and the end face of the illuminating part and the light accepting part is carried For air,

The control member provides nozzle from the air when this is standby and air is supplied intermittently to the end face, will by water and air The cutting swarf being attached on the end face removes.