CN107356227A - 2 D photoelectric horizontal inclination angle measuring device - Google Patents

Abstract

The present invention relates to the technical field of laser measurement. In order to propose a two-dimensional photoelectric horizontal inclination measurement technical solution, reduce the measurement cost and improve the measurement accuracy, the present invention, a two-dimensional photoelectric horizontal inclination measurement device, consists of a laser, a laser power stabilization control system, and a laser temperature Drift Compensation System, Laser Position Trim Bolt, Cube Mirror, Cube Polarizing Beamsplitter, Quarter Wave Plate, Wave Plate Rotation Mount, Oil Tank and Liquid Inside the Tank, Absorber at the Bottom of the Liquid Inside the Tank Material, lens tube, focusing lens, position sensitive sensor, height adjustment adapter, support rod, optical self-collimation system, black matte light-absorbing paper, four-way I‑V conversion circuit, four-way inverse proportional amplification circuit . The invention is mainly applied to the occasion of two-dimensional photoelectric horizontal inclination measurement.

Description

Two-dimensional photoelectric horizontal inclination measuring device

technical field

The invention relates to the technical field of laser measurement, in particular to a two-dimensional photoelectric horizontal inclination measuring device.

Background technique

The two-dimensional horizontal inclination measurement system is widely used in housing construction, bridge construction, machinery manufacturing, surveying and mapping instruments, navigation and aviation, control engineering, robotics, automation and other fields; with the development of digital electronic technology and laser technology, photoelectric measurement The method has been widely used in the field of precision measurement, and the horizontal inclination measuring device has gradually developed from the original bubble level to the photoelectric digital display level.

On the one hand, two-dimensional horizontal inclination measuring devices can be divided into bubble type, optical type, capacitive type, inductive type, electromagnetic type, mechanical type and MEMS type in principle. The bubble type horizontal inclination measuring device usually refers to the bubble level, and its resolution is determined by the radius of curvature of the inner wall of the vial. The larger the radius of curvature, the higher the resolution; the smaller the radius of curvature, the lower the resolution; High efficiency and accurate measurement, but need to design a sophisticated and complex optical structure, high cost and often requires manual intervention to complete the measurement; capacitive measurement results have poor stability and a small measurement range; inductive measurement has a large range and high accuracy. However, its complex structure requires high energy input; electromagnetic measurement has high precision and fast speed, but its required circuit is complex; mechanical cost is low, but its volume is large and its real-time measurement is poor; horizontal inclination measurement device based on MEMS sensor It has the characteristics of fast response, small size and strong environmental adaptability, but it has large drift and low measurement accuracy.

On the other hand, for the 3DFAMILY-LM400 dual-axis photoelectric level meter jointly developed by Taiwan Zhitai Group and the Precision Measurement Laboratory of National Taiwan University, its measurement range can reach ±100", the resolution is 0.1", and the repeatability is ±1". The principle of self-collimation and the principle that the light beam refracts on its surface through different media. Since the liquid is always kept horizontal by gravity on the surface of the earth, when the inclination angle of the device relative to the horizontal plane changes, the light beam will be generated on the surface of the liquid when it enters the liquid surface from the air. It is refracted and shot to the plane mirror installed on the bottom of the device to reflect and change the direction of the light path, and it is refracted again when it is injected into the air from the surface of the liquid, and the photoelectric sensor senses the change of the spot position and converts it into a two-dimensional horizontal tilt change. This device uses The principle of optical self-collimation makes the optical path relatively simple and easy to miniaturize and integrate the device; the use of four-quadrant photodetectors can achieve higher precision; When the inclination angle of the horizontal plane changes, the inclination angle change received by the four-quadrant photoelectric sensor is smaller than the actual inclination angle change of the device, thereby reducing the measurement accuracy in principle and increasing the cost and difficulty of later detection.

On the other hand, for the measurement and compensation of Abbe error in the error measurement of large machine tools in high-end equipment manufacturing, it is necessary to improve the angle measurement accuracy, and at the same time, upload the angle measurement data to the host computer for processing and calculate the angle error through the error The compensator is directly interpolated to the controllers of different types (TXYZ, XTYZ, XYTZ, XYZT) machine tools to improve their machining accuracy. At present, there are few supporting data processing software, error compensator and error compensation software for inclination measuring devices on the market.

Solutions for overcoming this technical problem are known from the prior art.

Therefore, a two-dimensional photoelectric horizontal inclination measurement device is shown, which can sense the change of the horizontal inclination angle to be measured by a photoelectric sensor after being amplified by the optical self-collimation system by 2 times by combining the principle of optical self-collimation and the principle of liquid surface reflection The position of the light spot changes to improve the measurement accuracy of the device, and for different types (TXYZ, XTYZ, XYTZ, XYZT) large-scale machine tools, it provides an integrated inclination data storage, data processing and can be directly connected to the CNC machine tool controller for large-scale machine tools. Error compensator for error compensation and error compensation software.

Contents of the invention

For overcoming the deficiencies in the prior art, the present invention aims to:

(1) Provide an overall scheme design of a two-dimensional photoelectric horizontal inclination measuring device based on the principle of optical self-collimation and the principle of liquid surface reflection, which overcomes the shortcomings of existing horizontal inclination detection devices such as complex structure, high cost, large drift, and low precision .

(2) Provide a method of replacing refraction by liquid surface reflection, so as to improve the detection accuracy of the liquid horizontal inclination measuring device.

(3) A mechanical structure is provided to ensure that the inclination angle of the entire horizontal inclination measuring device relative to the horizontal plane is the inclination angle to be measured.

(4) Provide an error compensator that integrates data storage and data processing and can be directly connected to a CNC machine tool controller for Abbe error compensation of large machine tools and a supporting error compensation software application system, thereby improving the machining accuracy of the machine tool.

In order to achieve the object of the present invention, the technical solution adopted in the present invention is that the two-dimensional photoelectric horizontal inclination measuring device is composed of a laser, a laser power stabilization control system, a laser temperature drift compensation system, a laser position fine-tuning bolt, a cube reflector, and a cube polarization beam splitter , quarter-wavelength wave plate, wave plate rotation mount, oil tank and liquid inside the tank, light-absorbing material at the bottom of the liquid inside the tank, lens tube, focusing lens, position sensitive sensor, height adjustment adapter Components, rods, optical self-collimation system, black matte light-absorbing paper, four-way I-V conversion circuit, four-way reverse proportional amplification circuit, of which:

Laser power stabilization control system and laser temperature drift compensation system automatically control the laser to improve laser stability and spot quality;

The laser emitted by the laser passes through the cube reflector to change the direction of the light path so that it shoots vertically to the bottom oil tank. And the cubic polarization beam splitter installed directly under the cube mirror splits the laser light into two beams of light whose polarization directions are perpendicular to each other, and the polarized light with the polarization direction S is reflected on the beam splitting surface of the cube polarization beam splitter as useless light, and shoots to The inner wall of the device is absorbed by the black matte light-absorbing paper pasted on the inner wall of the device;

The position of the laser can be adjusted by the laser position fine-tuning bolt, so as to ensure that the center of the light spot is irradiated to the center of the position-sensitive sensor as much as possible, and increase the measurement range of the horizontal inclination angle;

The polarized light with the polarization direction P passes through the cubic polarizing beam splitter to the quarter-wavelength wave plate directly below the cubic polarizing beam splitter and passes through the quarter-wavelength wave plate. A part of the light is reflected on the liquid surface as a measuring beam. After 2 times the inclination change. Pass it again through a quarter-wavelength wave plate to make it 90 out of phase. Migration, after the polarization direction changes from P to S. Return to the cubic polarizing beam splitter, after reflection on its splitting surface; shoot to the focusing lens located between the position sensitive sensor and the cubic polarizing beam splitting mirror, after the measuring beam is focused by the focusing lens, it is placed on the focal plane of the focusing lens Received by position sensitive sensor;

The focusing lens is fixed in the lens sleeve, and the lens sleeve is mounted on the cubic polarizing beam splitter on the right side by screw fixing;

The other part of the light is refracted on the surface of the liquid, and the liquid injected into the tank is absorbed by the light-absorbing material at the bottom of the liquid inside the tank to prevent it from being reflected at the bottom of the tank and refracted back into the air to be received by the position sensitive sensor;

The light-absorbing material at the bottom of the liquid inside the tank absorbs, weakens, and eliminates the beam of refracted light to prevent it from interfering with the measurement beam;

The oil tank is fixed on the device base by fastening bolts;

The height adjustment adapter and the pole are used to connect the cubic polarizing beam splitter, the quarter-wavelength wave plate and the base of the device, and play the role of adjusting the spot size on the oil surface. The pole is perpendicular to the base of the device, and the height can be adjusted The adapter is installed on the pole, and the height can be adjusted on the pole through the locking structure;

The position-sensitive sensor can output four-way photocurrent signals through four-way I-V conversion circuits and four-way inverse proportional amplification circuits according to the position of the center of gravity of the light spot.

It also includes A/D conversion circuit, ARM processor, host computer software, and error compensator; the signal output by the four-way inverse proportional amplification circuit is amplified, collected, and processed by the A/D conversion circuit and ARM microprocessor. Processing: The upper computer software processes the angle data, and the Abbe error compensator communicates with the machine tool controller to interpolate the angle error to the machine tool controller to compensate the error of the machine tool.

In ARM, the spot position is calculated by the following double-sided PSD spot position calculation formula, and converted into horizontal inclination information;

Among them, I _x1 , I _x2 , I _y1 , and I _y2 are four PSD output current signals, L _x , _Ly are the side lengths of the PSD photosensitive surface in two directions, and x, y are the positions of the center of gravity of the light spot.

Features and beneficial effects of the present invention are:

(1) To overcome the shortcomings of the existing bubble level that the resolution is determined by the radius of curvature of the inner wall of the vial, the radius of curvature is small, and the measurement resolution is low; to overcome the need to design a sophisticated optical structure and high cost in the precision optical horizontal inclination measurement method And it often needs manual intervention to complete the measurement; overcome the shortcomings of the capacitive horizontal inclination measurement method, which has poor measurement stability and small measurement range; overcome the inductive horizontal inclination measurement method. The shortcomings of the complex circuit structure required by the electromagnetic horizontal inclination measurement method; overcome the shortcomings of the mechanical horizontal inclination measurement method, which is bulky and poor in real-time measurement; overcome the shortcomings of large drift and low measurement accuracy of the horizontal inclination measurement device based on MEMS sensors, and provide a A two-dimensional horizontal inclination measuring device combining the principle of optical self-collimation and the principle of liquid surface reflection.

(2) To overcome the principle problem that the sensing angle change of the photoelectric sensor is smaller than the actual measured angle change based on the principle of liquid refraction, which increases the difficulty of detection and reduces the detection accuracy, and provides a measurement method by using liquid surface reflection instead of refraction.

(3) To overcome the defects in the application of most existing horizontal inclination measuring devices, provide an error compensator and supporting software system that integrates data storage, data processing and can be directly connected to the CNC machine tool controller for Abbe error compensation of large machine tools .

Description of drawings:

Fig. 1 shows the overall topological diagram of the two-dimensional photoelectric horizontal inclination measuring device of the present invention.

Fig. 2 shows the mechanical structure diagram of the two-dimensional photoelectric horizontal inclination measuring device of the present invention.

In the figure: 1 is the laser, 2 is the laser power stability control system, 3 is the laser temperature drift compensation system, 4 is the laser position fine-tuning bolt, 5 is the cube mirror, 6 is the cubic polarization beam splitter (PBS), 7 is the quarter One wavelength (1/4λ) wave plate, 8 is the wave plate rotation mount, 9 is the oil tank, 10 is the bottom light-absorbing material, 11 is the lens sleeve, 12 is the focusing lens, 13 is the position sensitive sensor (PSD), 14 is a height adjustment adapter, 15 is a support rod, 16 is an outer wall, 17 is an optical self-collimation system, 18 is a black matte light-absorbing paper, 19 is a four-way I-V conversion circuit, and 20 is a four-way reverse proportional amplification circuit , 21 is an A/D conversion circuit, 22 is an ARM microprocessor, 23 is an upper computer software, 24 is an Abbe error compensator, and 25 is a machine tool controller.

detailed description

In order to overcome the deficiencies of traditional inclination detection methods, the main purpose of the present invention is to provide a two-dimensional photoelectric horizontal inclination measurement device based on the principle of optical self-collimation and the principle of liquid surface reflection. The main technical problems to be solved are:

(1) To overcome the shortcomings of the existing bubble level that the resolution is determined by the radius of curvature of the inner wall of the vial, the radius of curvature is small, and the measurement resolution is low; to overcome the need to design a sophisticated optical structure and high cost in the precision optical horizontal inclination measurement method And it often needs manual intervention to complete the measurement; overcome the shortcomings of the capacitive horizontal inclination measurement method, which has poor measurement stability and small measurement range; overcome the inductive horizontal inclination measurement method. The shortcomings of the complex circuit structure required by the electromagnetic horizontal inclination measurement method; overcome the shortcomings of the mechanical horizontal inclination measurement method, which is bulky and poor in real-time measurement; overcome the shortcomings of large drift and low measurement accuracy of the horizontal inclination measurement device based on MEMS sensors, and provide a A two-dimensional horizontal inclination measuring device combining the principle of optical self-collimation and the principle of liquid surface reflection.

(2) To overcome the principle problem that the sensing angle change of the photoelectric sensor is smaller than the actual measured angle change based on the principle of liquid refraction, which increases the difficulty of detection and reduces the detection accuracy, and provides a measurement method by using liquid surface reflection instead of refraction.

(3) To overcome the defects in the application of most existing horizontal inclination measuring devices, provide an error compensator and supporting software application that integrates data storage and data processing and can be directly connected to the CNC machine tool controller for Abbe error compensation of large machine tools system.

In order to achieve the above goals, the technical solution adopted by the present invention is a two-dimensional photoelectric horizontal inclination measuring device based on the combination of the principle of optical self-collimation and the principle of liquid surface reflection. As shown in Figure 1, the device includes:

Laser 1, Laser Power Stability Control System 2, Laser Temperature Drift Compensation System 3, Laser Position Fine Adjustment Bolt 4, Cube Mirror 5, Cube Polarizing Beamsplitter (PBS) 6, Quarter Wavelength (1/4λ) Wave Plate 7 , wave plate rotation mount 8, oil tank 9, bottom absorbing material 10, lens sleeve 11, focusing lens 12, position sensitive sensor (PSD) 13, height adjustment adapter 14, pole 15, outer wall 16, optical self- Collimation system 17, black matte light-absorbing paper 18, four-way I-V conversion circuit 19, four-way inverse proportional amplification circuit 20, A/D conversion circuit 21, ARM microprocessor 22, host computer software 23, Abbe error compensation device 24 and machine tool controller 25.

Further, the laser 1 is automatically controlled by the laser power stabilization control system 2 and the laser temperature drift compensation system 3 installed on the side wall of the device to improve the laser stability and spot quality;

Further, the laser light emitted by the laser 1 passes through the optical self-collimation system 17, and the position change is sensed by the position sensitive sensor (PSD) 13 through the reflection of the liquid surface inside the oil tank 9;

Further, the light beam is refracted while being reflected on the surface of the silicone oil, and the reflected light is retained as the measuring beam, and the refracted light is absorbed by the light-absorbing material 10 at the bottom of the silicone oil in the oil tank 9, so as to avoid the refracted part of the light beam being reflected by the bottom surface of the oil tank 9 and ejected from the liquid surface. The reception of the position sensitive sensor (PSD) 13 causes the aliasing of light spots to form signal interference, which reduces the accuracy of the instrument, thereby improving the signal-to-noise ratio of the instrument;

Further, the position sensitive sensor (PSD) 13 is fixed on the central axis of the outer wall 16, and adjusted by the laser position fine-tuning bolt 4 and the height adjustment adapter 14, so that the center of the light spot falls on the center position of the position sensitive sensor (PSD) 13 as much as possible, To expand the measurement range;

Further, the position sensitive sensor (PSD) 13 is a photoelectric sensitive device, and the inner wall of the device is subjected to light absorption treatment through the black matte light-absorbing paper 18, so as to reduce the influence of ambient light on the output noise current of the position sensitive sensor (PSD) 13;

Further, the position sensitive sensor (PSD) 13 output current signal is carried out current- Voltage conversion, amplification, acquisition and other processing to convert it into digital signal;

Further, the host computer software 23 can realize functions such as display, storage, data processing, and calculation of errors to be compensated for inclination measurement;

Further, the Abbe error compensator 24 compensates the error to be compensated to the machine tool controller 25 through interpolation, so as to improve the machining accuracy of the large machine tool.

The present invention will be further described in detail below in conjunction with the accompanying drawings and specific examples.

In order to overcome the deficiencies in the prior art, the present invention provides a two-dimensional photoelectric horizontal inclination measuring device based on the principle of optical self-collimation and the principle of liquid surface reflection. The main technical problems to be solved are:

(1) To overcome the shortcomings of the existing bubble level that the resolution is determined by the radius of curvature of the inner wall of the vial, the radius of curvature is small, and the measurement resolution is low; to overcome the need to design a sophisticated optical structure and high cost in the precision optical horizontal inclination measurement method And it often needs manual intervention to complete the measurement; overcome the shortcomings of the capacitive horizontal inclination measurement method, which has poor measurement stability and small measurement range; overcome the inductive horizontal inclination measurement method. The shortcomings of the complex circuit structure required by the electromagnetic horizontal inclination measurement method; overcome the shortcomings of the mechanical horizontal inclination measurement method, which is bulky and poor in real-time measurement; overcome the shortcomings of large drift and low measurement accuracy of the horizontal inclination measurement device based on MEMS sensors, and provide a A two-dimensional horizontal inclination measuring device combining the principle of optical self-collimation and the principle of liquid surface reflection.

(2) To overcome the principle problem that the sensing angle change of the photoelectric sensor is smaller than the actual measured angle change based on the principle of liquid refraction, which increases the difficulty of detection and reduces the detection accuracy, and provides a measurement method by using liquid surface reflection instead of refraction.

(3) To overcome the defects in the application of most existing horizontal inclination measuring devices, provide an integrated data storage, data processing and can be directly connected to the CNC machine tool controller to be applied to the Abbe error compensation related error compensator and supporting software system of large machine tools .

The present invention is achieved like this:

In the present invention, the DL16-7 double-sided PSD of First Sensor Company is used as the photoelectric receiving sensor to sense the change of the measured signal and calculate the angle.

The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

In the present invention, the two-dimensional photoelectric horizontal inclination measuring device based on the principle of optical self-collimation and the principle of liquid surface reflection is mainly composed of a laser 1, a laser power stabilization control system 2, a laser temperature drift compensation system 3, and a laser position Fine-tuning screw 4, cube mirror 5, cube polarizing beam splitter (PBS) 6, quarter-wavelength (1/4λ) wave plate 7, wave plate rotation mount 8, oil tank 9, bottom absorbing material 10, lens housing Barrel 11, focusing lens 12, position sensitive sensor (PSD) 13, height adjustment adapter 14, support rod 15, outer wall 16, optical self-collimation system 17, black matte light-absorbing paper 18, four-way I-V conversion circuit 19, The four-way inverse proportional amplification circuit 20, the A/D conversion circuit 21, the ARM microprocessor 22, the upper computer software 23, the Abbe error compensator 24, and the machine tool controller 25 are composed.

Further, the liquid is placed in the oil tank 9 at the bottom of the device using optical silicone oil. The optical silicone oil has relatively high kinematic viscosity, no moisture absorption, no corrosion, strong physiological inertia, and good chemical stability;

Further, the power stability of the laser 1 is automatically controlled by the laser power stabilization control system 2, and the temperature drift of the laser 1 is controlled by the laser temperature drift compensation system 3, so as to improve the laser emission power stability and spot quality;

Further, the laser 1 is perpendicular to the outer wall of the device, and emits a laser with a wavelength of 633nm through the cube mirror 5 to change the direction of the optical path so that it is perpendicular to the bottom of the device;

Further, the cubic polarization beam splitter (PBS) 6 installed directly below the cube reflector 5 splits the laser light into two beams of light whose polarization directions are perpendicular to each other, wherein the polarized light whose polarization direction is S passes through the cubic polarization beam splitter (PBS) 6 The spectroscopic surface is reflected and shoots to the black matte light-absorbing paper 18 pasted on the inner wall of the device, which is absorbed by the black matte light-absorbing paper 18 to prevent it from generating ambient light inside the closed device and causing interference to the PSD output signal;

Further, another part of the polarized light whose polarization direction is P passes through the cubic polarization beam splitter (PBS) 6, and is directed to a quarter-wavelength (1/4λ) wave plate 7;

Further, the polarized light passing through the quarter-wavelength (1/4λ) waveplate 7 is directed to the oil tank 9 directly below the quarter-wavelength (1/4λ) waveplate 7, where a part of the light Reflection occurs on the surface of the silicone oil, and the other part is refracted through the silicone oil;

Further, the reflected light beam produces a 2-fold inclination change on the surface of the silicone oil, and passes through the quarter-wavelength (1/4λ) wave plate 7 again, causing its phase to shift by 90°, and the polarization direction changes from P to S;

Further, when returning to the cubic polarizing beam splitter (PBS) 6, after reflection occurs on the beam splitting surface, it is directed to the focusing lens 12, and after converging, the light spot is focused on the position sensitive sensor (PSD) 13 placed on the focal plane of the focusing lens 12, Received as a measurement spot;

Further, the focusing lens 12 is fixed in the lens sleeve 11, and the lens sleeve 11 is horizontally installed on the cubic polarizing beam splitter (PBS) 6 by means of threaded fixing;

Further, another part of the light beam refracted on the surface of the silicone oil enters the silicone oil and is absorbed by the light-absorbing material 10 at the bottom of the silicone oil inside the oil tank 9 to prevent it from being reflected by the bottom surface of the oil tank 9 and refracted into the air by the position sensitive sensor (PSD). 13 reception, so as to avoid the influence of spot aliasing on the measurement accuracy;

Further, the position of the laser can be adjusted according to the fine-tuning bolt 4 of the laser position, so as to ensure that the center of the light spot is irradiated to the center of the position sensitive sensor (PSD) 13 as far as possible, and increase the measurement range of the horizontal inclination angle;

Further, the height adjustment adapter 14 and the pole 15 are used to connect the cubic polarization beam splitter (PBS) 6, the quarter wavelength (1/4λ) wave plate 7 and the device base, and play a role in adjusting the height of the light spot. The pole 15 is vertically installed on the base of the device, and the height adjustment adapter 14 is installed on the pole 15, and the height can be adjusted on the pole 15 through the locking structure;

Further, the position sensitive sensor (PSD) 13 outputs four photocurrents, which are converted into voltage signals by four I-V conversion circuits 19;

Further, the four-way voltage signal is further amplified by the four-way inverse proportional amplification circuit 20;

Further, the A/D conversion circuit 21 is controlled by the ARM microprocessor 22 to collect the four voltage signals;

Further, the spot position is calculated by the following double-sided PSD spot position calculation formula, and converted into horizontal inclination information;

Among them, I _x1 , I _x2 , I _y1 , and I _y2 are the PSD four-way output current signals, L _x , L _y are the side lengths in two directions of the PSD photosensitive surface, and x, y are the positions of the center of gravity of the light spot;

Further, the host computer software 23 can realize functions such as display, storage, data processing, and calculation of errors to be compensated for inclination measurement;

Further, the Abbe error compensator 24 compensates the error to be compensated to the machine tool controller 25 by means of interpolation, so as to improve the machining accuracy of the large machine tool.

Claims (3)

1. A two-dimensional photoelectric horizontal inclination measuring device, characterized in that, consists of a laser, a laser power stabilization control system, a laser temperature drift compensation system, a laser position fine-tuning bolt, a cube reflector, a cube polarization beam splitter, and a quarter wavelength Waveplates, waveplate swivel mounts, tanks and liquid inside tanks, light absorbing material at the bottom of liquid inside tanks, lens tubes, focusing lenses, position sensitive sensors, height adjustment adapters, struts, optics Self-collimation system, black matte light-absorbing paper, four-way I-V conversion circuit, four-way reverse proportional amplification circuit, of which: Laser power stabilization control system and laser temperature drift compensation system automatically control the laser to improve laser stability and spot quality; The laser emitted by the laser passes through the cube reflector to change the direction of the light path so that it shoots vertically to the bottom oil tank. And the cubic polarization beam splitter installed directly under the cube mirror splits the laser light into two beams of light whose polarization directions are perpendicular to each other, and the polarized light with the polarization direction S is reflected on the beam splitting surface of the cube polarization beam splitter as useless light, and shoots to The inner wall of the device is absorbed by the black matte light-absorbing paper pasted on the inner wall of the device; The position of the laser can be adjusted by the laser position fine-tuning bolt, so as to ensure that the center of the light spot is irradiated to the center of the position-sensitive sensor as much as possible, and increase the measurement range of the horizontal inclination angle; The polarized light with the polarization direction P passes through the cubic polarizing beam splitter to the quarter-wavelength wave plate directly below the cubic polarizing beam splitter and passes through the quarter-wavelength wave plate. A part of the light is reflected on the liquid surface as a measuring beam. After producing 2 times the inclination change. Pass it again through a quarter-wave plate to phase it at 90° ^. Migration, after the polarization direction changes from P to S. Return to the cubic polarizing beam splitter, after reflection on its splitting surface; shoot to the focusing lens located between the position sensitive sensor and the cubic polarizing beam splitting mirror, after the measuring beam is focused by the focusing lens, it is placed on the focal plane of the focusing lens Received by position sensitive sensor; The focusing lens is fixed in the lens sleeve, and the lens sleeve is mounted on the cubic polarizing beam splitter on its right side by means of screw fixing; Another part of the light is refracted on the surface of the liquid, and the liquid injected into the oil tank is absorbed by the light-absorbing material at the bottom of the liquid inside the oil tank to prevent it from being reflected at the bottom of the oil tank and refracted back into the air to be received by the position sensitive sensor; The light-absorbing material at the bottom of the liquid inside the tank absorbs, weakens, and eliminates the beam of refracted light to prevent it from interfering with the measurement beam; The oil tank is fixed on the device base by fastening bolts; The height adjustment adapter and the pole are used to connect the cubic polarizing beam splitter, the quarter-wavelength wave plate and the base of the device, and play the role of adjusting the spot size on the oil surface. The pole is perpendicular to the base of the device, and the height can be adjusted The adapter is installed on the pole, and the height can be adjusted on the pole through the locking structure; The position-sensitive sensor can output four-way photocurrent signals through four-way I-V conversion circuits and four-way inverse proportional amplification circuits according to the position of the center of gravity of the light spot. 2. two-dimensional photoelectric horizontal inclination measuring device as claimed in claim 1, is characterized in that, also comprises A/D conversion circuit, ARM processor, host computer software, error compensator; The signal is amplified, collected and processed by the A/D conversion circuit and the ARM microprocessor; the upper computer software processes the angle data, and the Abbe error compensator communicates with the machine tool controller to interpolate the angle error to the machine tool The controller performs error compensation on the machine tool. 3. two-dimensional photoelectric horizontal inclination measuring device as claimed in claim 1, is characterized in that, in ARM, calculates spot position by following double-sided type PSD spot position calculation formula, and converts into horizontal inclination information; <mrow><mfrac><mrow><msub><mi>I</mi><mrow><mi>x</mi><mn>2</mn></mrow></msub><mo>-</mo><msub><mi>I</mi><mrow><mi>x</mi><mn>1</mn></mrow></msub></mrow><mrow><msub><mi>I</mi><mrow><mi>x</mi><mn>2</mn></mrow></msub><mo>+</mo><msub><mi>I</mi><mrow><mi>x</mi><mn>1</mn></mrow></msub></mrow></mfrac><mo>=</mo><mfrac><mrow><mn>2</mn><mi>x</mi></mrow><msub><mi>L</mi><mi>x</mi></msub></mfrac></mrow> 1 <mrow><mfrac><mrow><msub><mi>I</mi><mrow><mi>y</mi><mn>2</mn></mrow></msub><mo>-</mo><msub><mi>I</mi><mrow><mi>y</mi><mn>1</mn></mrow></msub></mrow><mrow><msub><mi>I</mi><mrow><mi>y</mi><mn>2</mn></mrow></msub><mo>+</mo><msub><mi>I</mi><mrow><mi>y</mi><mn>1</mn></mrow></msub></mrow></mfrac><mo>=</mo><mfrac><mrow><mn>2</mn><mi>y</mi></mrow><msub><mi>L</mi><mi>y</mi></msub></mfrac></mrow> Among them, Ix1, Ix2, Iy1, and Iy2 are four PSD output current signals, Lx, Ly are the side lengths in two directions of the PSD photosensitive surface, and x, y are the positions of the center of gravity of the light spot.