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CN107340559B - High efficiency and broad band circular polarization switching device and method based on super clever surface - Google Patents

High efficiency and broad band circular polarization switching device and method based on super clever surface Download PDF

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CN107340559B
CN107340559B CN201710537154.8A CN201710537154A CN107340559B CN 107340559 B CN107340559 B CN 107340559B CN 201710537154 A CN201710537154 A CN 201710537154A CN 107340559 B CN107340559 B CN 107340559B
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黄玲玲
张天瑶
王涌天
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Beijing Institute of Technology BIT
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    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/30Polarising elements
    • G02B5/3025Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • G02B5/3033Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state in the form of a thin sheet or foil, e.g. Polaroid
    • G02B5/3041Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state in the form of a thin sheet or foil, e.g. Polaroid comprising multiple thin layers, e.g. multilayer stacks

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Abstract

本发明公开的基于超颖表面的高效宽带圆偏振转换器件及方法,属于微纳光学应用技术领域。本发明公开的基于超颖表面的高效宽带圆偏振转换器件为复合结构,包括纳米天线层、间隔介质层和金属基底层。纳米天线层用以对入射的线偏振光产生特定的相位和振幅调制;间隔介质层用以累积光波的相位改变;金属基底层用于反射传播至金属基底层表面上的光波,提高器件的整体转换效率;纳米天线层、间隔介质层和金属基底层整体组成光学谐振腔,能够使光学谐振腔中传播的光束产生法布里‑珀罗多光束干涉效应。本发明还公开基于所述的圆偏振转换器件实现的基于超颖表面的高效宽带圆偏振转换方法。本发明能够实现对出射圆偏振光的高效和宽带的调制。

The high-efficiency broadband circular polarization conversion device and method based on metasurface disclosed in the invention belong to the technical field of micro-nano optical application. The high-efficiency broadband circular polarization conversion device based on the metasurface disclosed in the invention is a composite structure, including a nano-antenna layer, a spacer medium layer and a metal base layer. The nano-antenna layer is used to modulate the specific phase and amplitude of the incident linearly polarized light; the spacer dielectric layer is used to accumulate the phase changes of the light waves; the metal base layer is used to reflect the light waves propagating to the surface of the metal base layer, improving the overall Conversion efficiency; the nano-antenna layer, the spacer medium layer and the metal base layer form an optical resonator as a whole, which can make the light beam propagating in the optical resonator produce the Fabry-Perot multi-beam interference effect. The invention also discloses a high-efficiency broadband circular polarization conversion method based on the metasurface realized by the circular polarization conversion device. The present invention can realize high-efficiency and broadband modulation of the outgoing circularly polarized light.

Description

基于超颖表面的高效宽带圆偏振转换器件及方法Metasurface-based high-efficiency broadband circular polarization conversion device and method

技术领域technical field

本发明涉及一种基于超颖表面的高效宽带圆偏振转换器件及方法,属于微纳光学应用技术领域。The invention relates to a high-efficiency broadband circular polarization conversion device and method based on a metasurface, and belongs to the technical field of micro-nano optical applications.

背景技术Background technique

偏振态是电磁波的重要属性之一。控制电磁波的偏振态,实现不同偏振态的转换,在光学传感、成像、通信、化学分析等领域都具有广泛的应用。控制电磁波的偏振态,可以通过将入射光分解为正交的两束分量之后使其达到所需的相位延迟。调制偏振态的传统方法主要基于各向异性材料,如具有双折射性质的材料,当光线不沿主轴入射时,寻常光和非寻常光之间产生不同的相位改变积累,在出射时形成相位差,从而实现偏振态的转换。通常,自然界中的双折射材料有晶体和液晶等。这类传统方法的缺点主要包括窄带宽、大尺寸以及可材料种类少,不利于光学设备的微型化和集成化。The polarization state is one of the important properties of electromagnetic waves. Controlling the polarization state of electromagnetic waves and realizing the conversion of different polarization states has a wide range of applications in optical sensing, imaging, communication, chemical analysis and other fields. The polarization state of the electromagnetic wave can be controlled by decomposing the incident light into two orthogonal beam components and then making it achieve the desired phase delay. The traditional methods of modulating the polarization state are mainly based on anisotropic materials, such as materials with birefringence properties. When the light is not incident along the main axis, different phase changes are accumulated between ordinary light and extraordinary light, and a phase difference is formed when the light exits. , so as to realize the conversion of polarization state. Generally, birefringent materials in nature include crystals and liquid crystals. The disadvantages of such traditional methods mainly include narrow bandwidth, large size, and few types of available materials, which are not conducive to the miniaturization and integration of optical devices.

近年来科研人员对超颖材料进行了大量的研究工作。超颖材料是一类人工设计的亚波长尺寸的结构,具有不存在于自然界材料中的新颖物理特性。多种基于超颖材料的光电功能应用已被提出和证明,例如负折射现象、超透镜和“隐形斗篷”等。各向异性超颖材料、手性超颖材料等已应用在微波至可见光波段的各类偏振转换器件中。然而,三维超颖材料存在加工工艺困难和大体积不便性,解决这类困难的一个可行途径是利用超颖表面。超颖表面由精密设计的亚波长尺寸金属或者介质单元二维阵列构成,其厚度远小于波长。通过合理的结构设计,可在其平面内逐点改变每个像素的散射场,从而控制相应的相位、振幅和偏振态,最终实现对波前的任意所需调制。In recent years, researchers have carried out a lot of research work on metamaterials. Metamaterials are a class of artificially engineered subwavelength-sized structures with novel physical properties that do not exist in materials in nature. A variety of optoelectronic functional applications based on metamaterials have been proposed and demonstrated, such as negative refraction phenomena, metalens, and "invisibility cloaks". Anisotropic metamaterials and chiral metamaterials have been used in various polarization conversion devices from microwave to visible light. However, three-dimensional metamaterials have the inconvenience of processing technology and large volume, and a feasible way to solve such difficulties is to use metasurfaces. Metasurfaces are composed of precisely designed two-dimensional arrays of subwavelength-sized metal or dielectric elements whose thicknesses are much smaller than the wavelength. Through reasonable structural design, the scattered field of each pixel can be changed point by point in its plane, thereby controlling the corresponding phase, amplitude and polarization state, and finally realizing any desired modulation of the wavefront.

超颖表面能够拓宽工作带宽,具有较好的鲁棒性并消耗较低的加工成本,被越来越多地应用在集成纳米光子设备中。利用超颖表面对电磁波的偏振态进行调控吸引了大量科研人员的研究兴趣。通过精密设计单层或多层超颖表面的单元结构,可以获得多种偏振态的调控方案,例如:利用金属天线-介质层-金属层的结构设置,可以实现在685nm处的效率为96%的线偏振转换(Phys.Rev.Applied.80,023807,2009);利用级联的四层金属线栅薄板,可以在波长2μm处将聚焦的光波从线偏振态转换为圆偏振态(Appl.Phys.Lett.102,231116,2013);利用双F型金属孔单层超颖表面,可实现在太赫兹波段的宽带线偏振转换效果,其传输效率不超过40%(Opt.Lett.13,3185-8,2015);基于金属棒结构的单层超颖表面的偏振转换器,可以在近红外波段进行宽带的线-圆偏振相互转换,效率不超过40%(Sci.Rep.5,18106,2015);通过结合石墨烯材料,可实现在太赫兹波段宽带工作的线-圆偏振转换和线-线偏振转换,其传输效率不高于50%(Opt.Lett.23,5592-55952016)。可见,在已报道的超颖表面偏振转换器件中,在近红外波段同时具有高转换效率并且宽带工作的器件较难实现,这限制了其应用场合。Metasurfaces can broaden the working bandwidth, have better robustness and consume lower processing costs, and are increasingly used in integrated nanophotonic devices. The use of metasurfaces to control the polarization state of electromagnetic waves has attracted a large number of researchers' research interests. By precisely designing the unit structure of single-layer or multi-layer metasurfaces, a variety of polarization state control schemes can be obtained. For example, the efficiency of 96% at 685 nm can be achieved by using the structure of metal antenna-dielectric layer-metal layer. The linear polarization conversion of (Phys.Rev.Applied.80, 023807, 2009); using cascaded four-layer metal wire grid sheets, the focused light wave can be converted from a linear polarization state to a circular polarization state at a wavelength of 2 μm (Appl. Phys.Lett.102, 231116, 2013); Using a single-layer metasurface with double F-type metal holes, the broadband linear polarization conversion effect in the terahertz band can be realized, and the transmission efficiency is not more than 40% (Opt.Lett.13, 3185-8, 2015); a polarization converter based on a single-layer metasurface with a metal rod structure, which can perform broadband line-circular polarization interconversion in the near-infrared band with an efficiency not exceeding 40% (Sci.Rep.5,18106 , 2015); by combining graphene materials, linear-circular polarization conversion and linear-linear polarization conversion can be realized in broadband operation in the terahertz band, and the transmission efficiency is not higher than 50% (Opt.Lett.23, 5592-55952016) . It can be seen that among the reported metasurface polarization conversion devices, it is difficult to realize the devices with high conversion efficiency and broadband operation in the near-infrared band, which limits its application.

发明内容SUMMARY OF THE INVENTION

为了解决当前基于超颖表面的偏振器件难以实现高效宽带调控的问题,本发明的目的是提供一种基于二重镜像对称结构天线的超颖表面圆偏振转换器件,还提供基于所述的圆偏振转换器件的基于超颖表面的高效宽带圆偏振转换方法,实现对出射圆偏振光的高效和宽带的调制。In order to solve the problem that it is difficult to achieve high-efficiency broadband control in the current metasurface-based polarization device, the purpose of the present invention is to provide a metasurface circular polarization conversion device based on a double mirror symmetric structure antenna, and also to provide a circular polarization conversion device based on the circular polarization The high-efficiency broadband circular polarization conversion method based on the metasurface of the conversion device realizes the high-efficiency and broadband modulation of the outgoing circularly polarized light.

本发明公开的基于超颖表面的高效宽带圆偏振转换器件为复合结构,包括纳米天线层、间隔介质层和金属基底层。纳米天线层用以对入射的线偏振光产生特定的相位和振幅调制,由具有二重镜像对称的纳米天线排布成阵列所组成,每个纳米天线单元包括一个纳米天线,所述的纳米天线单元单元尺寸远小于波长。间隔介质层用以累积光波的相位改变,材料选用电介质。金属基底层用于反射传播至金属基底层表面上的光波,提高器件的整体转换效率。间隔介质层位于纳米天线层和金属基底层之间,纳米天线层和间隔介质层的厚度满足在亚波长范围内。纳米天线层、间隔介质层和金属基底层整体组成光学谐振腔,能够使光学谐振腔中传播的光束产生法布里-珀罗多光束干涉效应。The high-efficiency broadband circular polarization conversion device based on the metasurface disclosed in the invention is a composite structure, including a nano-antenna layer, a spacer medium layer and a metal base layer. The nano-antenna layer is used to generate specific phase and amplitude modulation for the incident linearly polarized light, and is composed of nano-antennas with double mirror symmetry arranged in an array. Each nano-antenna unit includes a nano-antenna. The unit cell size is much smaller than the wavelength. The spacer dielectric layer is used to accumulate the phase change of the light wave, and the material is a dielectric. The metal base layer is used for reflecting light waves propagating on the surface of the metal base layer, thereby improving the overall conversion efficiency of the device. The spacer medium layer is located between the nano-antenna layer and the metal base layer, and the thicknesses of the nano-antenna layer and the spacer medium layer satisfy the sub-wavelength range. The nano-antenna layer, the spacer medium layer and the metal base layer as a whole constitute an optical resonant cavity, which can make the light beam propagating in the optical resonant cavity produce the Fabry-Perot multi-beam interference effect.

所述的纳米天线层设计方法为:The design method of the nano-antenna layer is as follows:

电磁波的偏振态可用琼斯矩阵表征,平面光学器件对光的调制用散射矩阵表征。超颖表面所在的平面为无衍射的散射阵列,其散射矩阵表示为:The polarization state of electromagnetic waves can be characterized by Jones matrix, and the modulation of light by planar optics is characterized by scattering matrix. The plane where the metasurface is located is a diffraction-free scattering array, and its scattering matrix is expressed as:

其中,θ为入射角,a、b、c、d是复系数。超颖表面能够耦合切向的电场和法向的磁场,当入射光的切向的电场和法向的磁场分量相同时,对超颖表面的激发作用也是相同的。同时,在没有附加磁场的条件下,洛伦兹互易定理成立。根据矩阵分析,当超颖表面接收到正入射的光激发时,在无损的条件下,其散射矩阵中的矩阵元素满足关系:a=d,|b|=|c|。进一步的,针对二维非手性单元结构,通过面内的旋转操作能够与其镜像结构重合。因此,当光正入射到由非手性天线结构构成的超颖表面时,正向入射与反向入射的光将与一对镜像结构相互作用,也即是与旋转某角度前后的单元结构相互作用。通过定义散射矩阵中的非对角元,得非对角元b、c的相位项中的参数对应于散射矩阵的正向传播本征态的方位角,同时亦对应于正入射条件下非手性结构的镜像对称线的方向角。因此,将二维非手性单元构成的超颖表面进行某角度的旋转,即导致其散射矩阵本征态的相应角度的旋转。由于二维非手性单元结构的结构对称性,经旋转后可与原结构重合,也即是对应于旋转前后的散射矩阵相等。通过旋转前后散射矩阵相等的关系,解出非对角元b、c之间的相位关系,得到在正入射条件下由非手性天线结构组成的超颖表面的散射矩阵的表达式:where θ is the angle of incidence, and a, b, c, and d are complex coefficients. The metasurface can couple the tangential electric field and the normal magnetic field. When the tangential electric field and normal magnetic field components of the incident light are the same, the excitation effect on the metasurface is also the same. At the same time, in the absence of an additional magnetic field, the Lorentz reciprocity theorem holds. According to the matrix analysis, when the metasurface receives normal incident light excitation, the matrix elements in its scattering matrix satisfy the relationship: a=d, |b|=|c| under the condition of lossless. Further, for the two-dimensional achiral unit structure, the mirror structure can be coincident with the in-plane rotation operation. Therefore, when light is normally incident on a metasurface composed of an achiral antenna structure, the normally incident and reversely incident light will interact with a pair of mirrored structures, that is, with the unit structure before and after a certain angle of rotation . By defining the off-diagonal elements in the scattering matrix, the parameters in the phase terms of the off-diagonal elements b and c are obtained Corresponds to the azimuthal angle of the forward-propagating eigenstate of the scattering matrix, and also corresponds to the azimuthal angle of the mirror symmetry line of the achiral structure under normal incidence. Therefore, rotating the metasurface composed of two-dimensional achiral units by a certain angle will lead to the rotation of the corresponding angle of the eigenstate of its scattering matrix. Due to the structural symmetry of the two-dimensional achiral unit structure, it can overlap with the original structure after rotation, that is, the scattering matrices corresponding to before and after rotation are equal. The phase relationship between the off-diagonal elements b and c is solved by rotating the relationship that the scattering matrices are equal before and after, and the expression of the scattering matrix of the metasurface composed of achiral antenna structures under normal incidence is obtained:

其中κ和是非对角元b、c的相位项中的参数。对于无损条件下的具有双折射性质的超颖表面,通过求解能量守恒约束条件下的参数关系,得到一组具体的解:进一步写出约束后的散射矩阵的表达式:where κ and are the parameters in the phase terms of the off-diagonal elements b, c. For metasurfaces with birefringence properties under non-destructive conditions, a set of specific solutions are obtained by solving the parameter relationship under the constraint of energy conservation: Further write the expression of the constrained scattering matrix:

为了获得圆偏振的本征态,选择其中n为整数。代入到公式(3)中,即可获得圆偏振本征态的散射矩阵:To obtain circularly polarized eigenstates, choose where n is an integer. Substituting into formula (3), the scattering matrix of the circularly polarized eigenstate can be obtained:

因此,选用具有二重镜像对称性的纳米天线,通过合适的单元周期设定,以及设置入射线偏振光的偏振方向与非手性结构的镜像对称轴夹角为45°或135°,使纳米天线层具有如公式(4)所示的散射矩阵。需要注意的是,对于偏振的调控,通常先将入射光分解为互相垂直的偏振分量,通过控制分量之间的相位差,达到最终叠加的偏振转换效果。因此,对纳米天线层的几何参数进行设定时,需要满足纳米天线层对于x和y方向的线偏振光具有不同的谐振频率,从而能够保证器件具有较宽的工作波段范围。Therefore, the nano-antenna with double mirror symmetry is selected, and the angle between the polarization direction of the incident ray polarized light and the mirror symmetry axis of the achiral structure is set to be 45° or 135° by setting the appropriate unit period, so that the nanometer The antenna layer has a scattering matrix as shown in equation (4). It should be noted that, for the regulation of polarization, the incident light is usually decomposed into mutually perpendicular polarization components, and the final superposed polarization conversion effect is achieved by controlling the phase difference between the components. Therefore, when setting the geometric parameters of the nano-antenna layer, it is necessary to satisfy that the nano-antenna layer has different resonance frequencies for the linearly polarized light in the x and y directions, so as to ensure that the device has a wide operating band range.

所述的间隔介质层设计方法为:The design method of the spacer dielectric layer is as follows:

为了实现累积相位的效果,采用间隔介质层,间隔介质层对于电磁波是透明介质。间隔介质层厚度可调,通过调节间隔介质层厚度,能够获得不同频率范围内的偏振转换和不同旋向的圆偏振转换效果。In order to achieve the effect of accumulating phase, a spacer dielectric layer is used, and the spacer dielectric layer is a transparent medium for electromagnetic waves. The thickness of the spacer medium layer is adjustable, and by adjusting the thickness of the spacer medium layer, polarization conversion in different frequency ranges and circular polarization conversion effects in different rotation directions can be obtained.

所述的纳米天线层优选Ω型纳米天线层。Ω型纳米天线对于x和y方向的线偏振光具有不同的谐振频率,从而能够保证器件具有较宽的工作波段范围。The nano-antenna layer is preferably an Ω-type nano-antenna layer. The Ω-type nanoantenna has different resonance frequencies for the linearly polarized light in the x and y directions, thus ensuring the device has a wide operating band range.

所述的Ω型金纳米天线单元尺寸在亚波长范围。The size of the Ω-type gold nano-antenna unit is in the sub-wavelength range.

所述的间隔介质层材料优选MgF2The material of the spacer dielectric layer is preferably MgF 2 .

所述的金属基底层材料优选金。The material of the metal base layer is preferably gold.

本发明还公开基于超颖表面的高效宽带圆偏振转换器件实现的基于超颖表面的高效宽带圆偏振转换方法,入射至基于超颖表面的高效宽带圆偏振转换器件表面的光束为将被调制的激光,经起偏器将入射光偏振方向调制为与器件表面的天线镜像对称轴成45°或135°角的线偏振光,沿着圆偏振转换器件表面的法线方向入射到器件表面上。线偏振入射光与圆偏振转换器件相互作用后,累积足够的相位改变,并具有接近于无损的反射,反射光的偏振态为圆偏振,从而实现对出射圆偏振光的高效和宽带的调制。The invention also discloses a metasurface-based high-efficiency broadband circular polarization conversion method realized by a metasurface-based high-efficiency broadband circular polarization conversion device. The light beam incident on the surface of the metasurface-based high-efficiency broadband circular polarization conversion device is a Laser, the polarization direction of the incident light is modulated by the polarizer into linearly polarized light with an angle of 45° or 135° to the mirror symmetry axis of the device surface, and is incident on the device surface along the normal direction of the surface of the circular polarization conversion device. After the linearly polarized incident light interacts with the circular polarization conversion device, sufficient phase changes are accumulated, and the reflection is close to lossless, and the polarization state of the reflected light is circularly polarized, thereby realizing efficient and broadband modulation of the outgoing circularly polarized light.

本发明公开的基于超颖表面的高效宽带圆偏振转换器件及方法,工作波段在通信光波段内,具有较强的应用性。The high-efficiency broadband circular polarization conversion device and method based on the metasurface disclosed by the invention has strong applicability in the working band in the communication optical band.

有益效果:Beneficial effects:

1、本发明公开的基于超颖表面的高效宽带圆偏振转换器件及方法,利用基于具有二重镜像对称性的纳米天线阵列的超颖表面,结合间隔介质层和金属基底层,提供一种在近红外波段工作的高效、宽带的对反射光偏振态进行线-圆转换的方法,能够在±45°方向线偏振态垂直入射情况下生成圆偏振态的反射光,所得反射圆偏振光具有超宽带的效果,并且具有超高的转换效率,解决当前超颖表面偏振器件难以实现高效宽带偏振调控的问题。特别地,本发明工作波段在通信光波段内,具有较强的应用性。1. The high-efficiency broadband circular polarization conversion device and method based on a metasurface disclosed in the present invention utilizes a metasurface based on a nano-antenna array with double mirror symmetry, combined with a spacer medium layer and a metal base layer, to provide a An efficient and broadband method for linear-circular conversion of the polarization state of reflected light, which works in the near-infrared band, can generate reflected light with a circularly polarized state under the vertical incidence of the linearly polarized state in the ±45° direction, and the obtained reflected circularly polarized light has super Broadband effect and ultra-high conversion efficiency, solving the problem that current metasurface polarizers are difficult to achieve high-efficiency broadband polarization control. In particular, the working band of the present invention is within the communication optical band, and has strong applicability.

2、本发明公开的基于超颖表面的高效宽带圆偏振转换器件是一种全固态、超薄、平面光学元器件,不需要任何机械拉伸,旋转等操作,因此,本发明公开的基于超颖表面的高效宽带圆偏振转换器件及方法,可广泛适用于小型化、微型化、集成化光电应用之中,特别是激光通信系统,偏振探测系统之中,有效减轻其体积与重量,并能够为集成光学的片上应用提供一种高效和宽带的调制方法。2. The high-efficiency broadband circular polarization conversion device based on metasurface disclosed in the present invention is an all-solid-state, ultra-thin, planar optical component that does not require any mechanical stretching, rotation, etc. The high-efficiency broadband circular polarization conversion device and method of the bright surface can be widely used in miniaturized, miniaturized and integrated optoelectronic applications, especially in laser communication systems and polarization detection systems, which can effectively reduce its volume and weight, and can Provides an efficient and broadband modulation method for on-chip applications of integrated optics.

附图说明Description of drawings

图1为基于超颖表面的高效宽带圆偏振转换器件的结构示意图;(a)三层结构示意图,(b)Ω型天线单元结构示意图;其中:1—纳米天线阵列、2—间隔介质层、3—金属基底层;Figure 1 is a schematic structural diagram of a high-efficiency broadband circular polarization conversion device based on metasurface; (a) a schematic diagram of a three-layer structure, (b) a schematic structural diagram of an Ω-type antenna unit; wherein: 1—nano-antenna array, 2—spacer dielectric layer, 3—metal base layer;

图2为二维非手性单元结构及其镜像结构示意图;2 is a schematic diagram of a two-dimensional achiral unit structure and its mirror image structure;

图3为偏振角为45°的线偏振光正入射到基于超颖表面的高效宽带圆偏振转换器件的反射率图。(a)反射光x分量和y分量的振幅,(b)反射光x分量和y分量的相位;Fig. 3 is a reflectance diagram of the normal incidence of linearly polarized light with a polarization angle of 45° on a metasurface-based high-efficiency broadband circular polarization conversion device. (a) the amplitudes of the x and y components of the reflected light, (b) the phases of the x and y components of the reflected light;

图4为反射光斯托克斯参量。(a)偏振角为45°和-45°的线偏振光垂直入射至器件表面的反射光的斯托克斯参量,(b)偏振角为45°的线偏振光倾斜入射到基于超颖表面的高效宽带圆偏振转换器件表面得到的反射光的斯托克斯参量,其中入射角分别为15°、30°和45°;Figure 4 shows the Stokes parameter of reflected light. (a) Stokes parameters of the reflected light of the linearly polarized light with polarization angles of 45° and -45° incident on the surface of the device perpendicularly, (b) the linearly polarized light with a polarization angle of 45° incident obliquely on the metasurface-based The Stokes parameters of the reflected light obtained from the surface of the high-efficiency broadband circular polarization conversion device, where the incident angles are 15°, 30° and 45°, respectively;

图5为入射光偏振角在0°~360°范围内变化时反射光的斯托克斯参量绝对值。Figure 5 shows the absolute value of the Stokes parameter of the reflected light when the polarization angle of the incident light varies in the range of 0° to 360°.

具体实施方式Detailed ways

下面结合附图和实施例对本发明进行描述。此处所描述的具体实施仅用以解释本发明,并不用于限定本发明。The present invention will be described below with reference to the accompanying drawings and embodiments. The specific implementations described herein are only used to explain the present invention, and are not intended to limit the present invention.

实施例1:Example 1:

为验证本发明公开的基于超颖表面的高效宽带圆偏振转换器件及方法可行性和有益效果,以下以工作波长为λ=1.2μm~1.6μm的超颖表面为例。In order to verify the feasibility and beneficial effects of the efficient broadband circular polarization conversion device and method based on metasurface disclosed in the present invention, a metasurface with an operating wavelength of λ=1.2 μm-1.6 μm is used as an example.

如图1所示,本实施例公开的基于超颖表面的高效宽带的圆偏振转换器件为复合结构,包括Ω型纳米天线层1、间隔介质层2和金属基底层3构成。Ω型纳米天线层1用以对入射的线偏振光产生特定的相位和振幅调制,由具有二重镜像对称的Ω型纳米天线排布成阵列所组成,每个Ω型纳米天线单元包括一个Ω型纳米天线,所述的Ω型纳米天线单元单元尺寸远小于波长。间隔介质层2用以累积光波的相位改变,材料选用电介质。金属基底层3用于反射传播至金属基底层表面上的光波,提高器件的整体转换效率。间隔介质层2位于纳米天线层和金属基底层3之间,Ω型纳米天线层1和间隔介质层2的厚度满足在亚波长范围内。Ω型纳米天线层1,间隔介质层2和金属基底层3整体组成光学谐振腔,能够使光学谐振腔中传播的光束产生法布里-珀罗多光束干涉效应。As shown in FIG. 1 , the metasurface-based high-efficiency broadband circular polarization conversion device disclosed in this embodiment is a composite structure, including an Ω-type nano-antenna layer 1 , a spacer medium layer 2 and a metal base layer 3 . The Ω-type nano-antenna layer 1 is used to generate specific phase and amplitude modulation for the incident linearly polarized light, and is composed of Ω-type nano-antennas with double mirror symmetry arranged in an array, and each Ω-type nano-antenna unit includes an Ω-type nano-antenna unit. The size of the Ω-type nano-antenna unit is much smaller than the wavelength. The spacer dielectric layer 2 is used for accumulating the phase change of the light wave, and the material is a dielectric material. The metal base layer 3 is used to reflect the light waves propagating to the surface of the metal base layer, so as to improve the overall conversion efficiency of the device. The spacer medium layer 2 is located between the nano-antenna layer and the metal base layer 3, and the thicknesses of the Ω-type nano-antenna layer 1 and the spacer medium layer 2 satisfy the sub-wavelength range. The Ω-type nano-antenna layer 1, the spacer medium layer 2 and the metal base layer 3 form an optical resonant cavity as a whole, which can make the light beam propagating in the optical resonant cavity produce the Fabry-Perot multi-beam interference effect.

Ω型纳米天线对于x和y方向的线偏振光具有不同的谐振频率,从而能够保证器件具有较宽的工作波段范围。The Ω-type nanoantenna has different resonance frequencies for the linearly polarized light in the x and y directions, thus ensuring the device has a wide operating band range.

所述的Ω型金纳米天线单元尺寸在亚波长范围。The size of the Ω-type gold nano-antenna unit is in the subwavelength range.

所述的间隔介质层材料选MgF2The material of the spacer dielectric layer is MgF 2 .

所述的金属基底层材料选金。The material of the metal base layer is gold.

所述的纳米天线层设计方法为:The design method of the nano-antenna layer is as follows:

基于Ω型纳米天线阵列的超颖表面的单个单元周期中包含一个Ω型金属结构,整个阵列由多个单元周期性结构排布成平面层,如图1所示。Ω型纳米天线是二维非手性二重镜像对称结构,如图2所示,散射矩阵满足公式(3)。精密设计Ω型纳米天线的结构尺寸参数如图1所示,Ω型结构的圆环部分的外半径为100nm,两条边及开口处的长度为80nm,宽度为50nm,周期为320nm,此类结构尺寸参数能够调制近红外波段的入射光。当入射光的线偏振角为π/4或-π/4时,获得最佳的圆偏振转换效果,即满足公式(4)的散射矩阵。通过Ω型纳米天线层1的设置,获得圆偏振的透射光和反射光,并且二者旋向相反,振幅相等,但效率在理论上各为50%,仍需进行进一步设计而提高反射光的转换效率。A single unit period of a metasurface based on an Ω-type nanoantenna array contains an Ω-type metal structure, and the entire array is composed of multiple unit periodic structures arranged into a planar layer, as shown in Figure 1. The Ω-type nanoantenna is a two-dimensional achiral double mirror-symmetric structure, as shown in Fig. 2, and the scattering matrix satisfies the formula (3). The structure and size parameters of the precisely designed Ω-type nano-antenna are shown in Figure 1. The outer radius of the ring part of the Ω-type structure is 100nm, the length of the two sides and the opening is 80nm, the width is 50nm, and the period is 320nm. The structure size parameter can modulate the incident light in the near-infrared band. When the linear polarization angle of the incident light is π/4 or -π/4, the best circular polarization conversion effect is obtained, that is, the scattering matrix that satisfies the formula (4). Through the setting of the Ω-type nano-antenna layer 1, circularly polarized transmitted light and reflected light are obtained, and the two have opposite rotation directions and equal amplitudes, but the efficiencies are theoretically 50% each, and further design is needed to improve the reflected light. conversion efficiency.

所述的间隔介质层设计方法为:The design method of the spacer dielectric layer is as follows:

间隔介质层2主要用以改变入射光的累积相位差,通过设计其厚度尺寸,能够在不同频段内获得的圆偏振反射光。不同的厚度条件下,获得不同旋向的圆偏振光。这里选择厚度为50nm进行举例。The spacer dielectric layer 2 is mainly used to change the cumulative phase difference of the incident light, and by designing its thickness dimension, circularly polarized reflected light can be obtained in different frequency bands. Under different thickness conditions, circularly polarized light with different rotation directions is obtained. Here, a thickness of 50 nm is chosen as an example.

入射光与Ω型纳米天线层1相互作用,获得圆偏振的本征态透射和反射,其中透射的一部分通过间隔介质层2和金属基底层3的无限次反射和透射,自Ω型纳米天线层1出射,与前一部分反射光叠加,最终形成圆偏振态反射光。将电磁波分解为x和y方向分量时,其反射的电场分量在185THz~250THz频段(对应波长1.2μm~1.6μm)内振幅相等,相位差约为90°,即为圆偏振态,如图3所示。进一步采用斯托克斯参量表征反射光的偏振态,斯托克斯参量的计算公式如下:The incident light interacts with the Ω-type nano-antenna layer 1 to obtain circularly polarized eigenstate transmission and reflection, in which part of the transmission passes through the infinite reflection and transmission of the spacer dielectric layer 2 and the metal base layer 3, from the Ω-type nano-antenna layer 1 exits, superimposed with the previous part of the reflected light, and finally forms the circularly polarized reflected light. When the electromagnetic wave is decomposed into components in the x and y directions, the reflected electric field components have the same amplitude in the frequency band of 185THz ~ 250THz (corresponding to wavelengths of 1.2μm ~ 1.6μm), and the phase difference is about 90°, which is the circular polarization state, as shown in Figure 3 shown. The Stokes parameter is further used to characterize the polarization state of the reflected light. The calculation formula of the Stokes parameter is as follows:

如图4所示。当斯托克斯参量的S0接近于1时,表示总光强百分比接近于100%,具有高转换效率。斯托克斯参量的S3等于1或-1时,表示其为左旋或右旋圆偏振态。由图4可知,当入射线偏振光的偏振角为45°和-45°时,通过该器件的调制,在187THz~250THz的宽频带范围(对应波长1.2μm~1.6μm)内可获得旋向相反的圆偏振反射光,且转换效率高于92%。基于超颖表面的高效宽带圆偏振转换器件具有一定的灵活性和可调性,当入射光倾斜入射时,能够获得椭圆偏振光或近似圆偏光,入射角的倾斜范围可达到±45°,如图4所示。反射光的偏振态和正入射时偏振角的关系如图5所示。图中纬度表示斯托克斯参量的绝对值,经度表示偏振角的大小。在正入射的情况下,入射光偏振角不等于45°时,基于超颖表面的高效宽带圆偏振转换器件能够对其进行椭圆偏振转换。As shown in Figure 4. When the S 0 of the Stokes parameter is close to 1, it means that the percentage of total light intensity is close to 100%, and it has high conversion efficiency. When S 3 of the Stokes parameter is equal to 1 or -1, it indicates that it is left-handed or right-handed circularly polarized. It can be seen from Figure 4 that when the polarization angles of the incident polarized light are 45° and -45°, through the modulation of the device, the handedness can be obtained in a wide frequency range of 187THz ~ 250THz (corresponding to wavelengths of 1.2μm ~ 1.6μm) The opposite circular polarization reflects light and the conversion efficiency is higher than 92%. The high-efficiency broadband circular polarization conversion device based on metasurface has certain flexibility and tunability. When the incident light is incident obliquely, it can obtain elliptically polarized light or approximately circularly polarized light, and the inclination range of the incident angle can reach ±45°, such as shown in Figure 4. The relationship between the polarization state of the reflected light and the polarization angle at normal incidence is shown in Figure 5. The latitude in the figure represents the absolute value of the Stokes parameter, and the longitude represents the magnitude of the polarization angle. In the case of normal incidence, when the polarization angle of incident light is not equal to 45°, the efficient broadband circular polarization conversion device based on metasurface can perform elliptical polarization conversion.

本实施例公开的基于超颖表面的高效宽带圆偏振转换器件是一种全固态、超薄、平面光学元器件,不需要任何机械拉伸,旋转等操作,因此,本实施例公开的基于超颖表面的高效宽带圆偏振转换器件及方法,可广泛适用于小型化、微型化、集成化光电应用之中,特别是激光通信系统,偏振探测系统之中,有效减轻其体积与重量,并能够为集成光学的片上应用提供一种高效和宽带的调制方法。The high-efficiency broadband circular polarization conversion device based on metasurface disclosed in this embodiment is an all-solid-state, ultra-thin, planar optical component that does not require any mechanical stretching, rotation, etc. The high-efficiency broadband circular polarization conversion device and method of the bright surface can be widely used in miniaturized, miniaturized and integrated optoelectronic applications, especially in laser communication systems and polarization detection systems, which can effectively reduce its volume and weight, and can Provides an efficient and broadband modulation method for on-chip applications of integrated optics.

以上所述的具体描述,对发明的目的、技术方案和有益效果进行了进一步详细说明,所应理解的是,以上所述仅为本发明的具体实施例而已,并不用于限定本发明的保护范围,凡在本发明的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above-mentioned specific descriptions further describe the purpose, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above-mentioned descriptions are only specific embodiments of the present invention, and are not intended to limit the protection of the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims (5)

1. the high efficiency and broad band circular polarization switching device based on super clever surface, it is characterised in that: be composite construction, including nano-antenna Layer (1), spacer dielectric layer (2) and metallic substrate layer (3);Nano-antenna layer (1) is specific to generate to incident linearly polarized light Phase and amplitude modulation, formed by being arranged into array with the symmetrical nano-antenna of double mirror image, each nano-antenna list Member includes a nano-antenna, and the nano-antenna unit unit size is much smaller than wavelength;Spacer dielectric layer (2) is to accumulate The phase change of light wave, material selection dielectric;Metallic substrate layer (3) propagates to metallic substrate layer (3) surface for reflecting Light wave, improve the overall conversion efficiency of device;Spacer dielectric layer (2) be located at nano-antenna layer (1) and metallic substrate layer (3) it Between, the thickness of nano-antenna layer (1) and spacer dielectric layer (2) meets within the scope of sub-wavelength;Nano-antenna layer (1), interval are situated between Matter layer (2) and metallic substrate layer (3) integrally form optical resonator, and the light beam propagated in optical resonator is made to generate Fabry- Perot multiple-beam interference effect;
Described nano-antenna layer (1) design method are as follows:
The polarization state of electromagnetic wave can be characterized with Jones matrix, and planar optical device characterizes the modulation of light with collision matrix;It is super clever Plane where surface is the scattering array of salt free ligands, and collision matrix indicates are as follows:
Wherein, θ is incidence angle, and a, b, c, d are complex coefficients;Super clever surface can couple the magnetic field of tangential electric field and normal direction, when When the tangential electric field of incident light is identical with the magnetic-field component of normal direction, the excitation to super clever surface is also identical;Meanwhile Under conditions of no complementary field, Lorentz reciprocal theorem is set up;According to matrix analysis, when super clever surface receives normal incidence Light excitation when, under conditions of lossless, the matrix element in collision matrix meets relationship: a=d, | b |=| c |;Further , for two-dimentional achirality cellular construction, can be overlapped with its mirror-image structure by the rotation process in face;Therefore, when light just When being incident on the super clever surface being made of achirality antenna structure, forward entrance and reversed incident light will be with a pair of of mirror-image structures Interaction that is to say and interact with the cellular construction before and after certain angle of rotation;By defining the non-diagonal in collision matrix Member obtains the parameter in the phase term of nondiagonal element b, cThe azimuth of forward-propagating eigenstate corresponding to collision matrix, simultaneously Also correspond to the deflection of the mirror symmetry of achirality structure under the conditions of normal incidence;Therefore, two-dimentional achirality unit is constituted Super clever surface carry out the rotation of certain angle, that is, lead to the rotation of the respective angles of its collision matrix eigenstate;Since two dimension is non- The structural symmetry of chiral unit structure can be overlapped after rotating with original structure, that is to say the scattering square for corresponding to rotation front and back Battle array is equal;By the equal relationship of rotation front and back collision matrix, the phase relation between nondiagonal element b, c is solved, is obtained just The expression formula of the collision matrix on the super clever surface being made of under the conditions of incidence achirality antenna structure:
Wherein κ andIt is the parameter in the phase term of nondiagonal element b, c;For super with birefringence under the conditions of lossless Clever surface is obtained one group and is specifically solved by the parameters relationship under solution conservation of energy constraint condition:The expression formula of collision matrix after further writing out constraint:
In order to obtain the eigenstate of circular polarization, selectWherein n is integer;It is updated in formula (3), can obtain Obtain the collision matrix of circular polarization eigenstate:
Therefore, the nano-antenna with double mirror symmetry is selected, it is incident by suitable unit cycle set, and setting The polarization direction of linearly polarized light and the mirror axis angle of achirality structure are 45 ° or 135 °, have nano-antenna layer (1) The collision matrix as shown in formula (4);It should be noted that incident light, is usually first decomposed into mutually by the regulation for polarization Vertical polarized component reaches the polarization conversion effect being finally superimposed by the phase difference between control component;Therefore, to receiving When the geometric parameter of rice antenna stack (1) is set, needs to meet nano-antenna layer (1) and have for the linearly polarized light in the direction x and y There is different resonance frequencies, so as to guarantee that device has wider service band range.
2. as described in claim 1 based on the high efficiency and broad band circular polarization switching device on super clever surface, it is characterised in that: described Spacer dielectric layer (2) design method are as follows:
In order to realize the effect of accumulated phase, using spacer dielectric layer (2), spacer dielectric layer (2) is transparent Jie for electromagnetic wave Matter;Spacer dielectric layer (2) thickness is adjustable, by control interval dielectric layer (2) thickness, can obtain inclined in different frequency scope The circular polarization conversion effect of vibration conversion and different rotation directions.
3. as claimed in claim 2 based on the high efficiency and broad band circular polarization switching device on super clever surface, it is characterised in that: described Nano-antenna layer (1) preferably Ω type nano-antenna layer (1);Ω type nano-antenna has difference for the linearly polarized light in the direction x and y Resonance frequency, so as to guarantee device have wider service band range.
4. as claimed in claim 3 based on the high efficiency and broad band circular polarization switching device on super clever surface, it is characterised in that:
The Ω type gold nano antenna element size is in sub-wavelength range;
Described spacer dielectric layer (2) material selects MgF2
Metallic substrate layer (3) material selects gold.
5. the high efficiency and broad band circular polarization conversion method based on super clever surface, it is characterised in that: based on such as claim 1,2,3,4 High efficiency and broad band circular polarization switching device described in one based on super clever surface is realized, the efficient width based on super clever surface is incident to Light beam with circular polarization switching device surface is the laser that will be modulated, and is modulated to incident light polarization direction and device through the polarizer The antenna mirror axis on part surface is at 45 ° or the linearly polarized light at 135 ° of angles, along circular polarization switching device normal to a surface side To being incident on device surface;After linear polarization incident light and the interaction of circular polarization switching device, enough phase changes are accumulated, And have close to lossless reflection, the polarization state of reflected light is circular polarization, thus realize to the efficient of outgoing circularly polarized light and The modulation in broadband.
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