CN107269701A - A kind of plane air-bearing with air drain - Google Patents

Abstract

The invention provides a plane air bearing with air grooves, belonging to the technical field of plane air bearings with air grooves. The top surface of the air-floating part of the bearing is set as a high-pressure gas film forming surface and a damping surface, and the damping surface is the center part and the outer ring part of the top surface of the air-floating part of the bearing, and the high-pressure gas film forming surface is arranged at the center part and the outer ring part, an inner ring groove is provided between the high-pressure gas film forming surface and the center part, an outer ring groove is provided between the high-pressure gas film forming surface and the outer ring part, and the inner end of the linear groove is connected to the inner ring part. The grooves are connected, the middle section of the linear groove is connected with the outer ring groove, the outer end of the linear groove leads to the edge of the bearing air-floating part, and upward air holes are arranged on the forming surface of the high-pressure gas film. The present invention is applied to the occasion of planar air bearings, especially to the application fields requiring larger air bearing capacity, such as large single-axis air bearings. The invention can provide a damping effect in the planar air bearing, thereby suppressing the occurrence of the "air hammer" phenomenon.

Description

A Plane Air Bearing with Air Grooves

technical field

The invention relates to a plane air bearing with air grooves, belonging to the technical field of plane air bearings.

Background technique

The main structure of the planar air bearing proposed at home and abroad is shown in Figure 1. The air outlet from the upward air hole provides the air buoyancy in the direction of gravity to make the bearing float, and the air outlet from the side air hole provides the air buoyancy in the horizontal direction to limit the lateral movement of the bearing. The top view of the air flotation part is shown in Figure 2. In Figure 2, four holes are taken as an example for illustration, and the actual number of holes needs to be obtained according to the calculation results. In Fig. 2, the air outlet directions of the four holes are uniformly air outlet as shown by the arrows to form an air film on the entire circular bearing plane. The disadvantage of this structure is that the entire air film is integrated. Once the weight carried by the bearing is too large, it is easy to form the air buoyancy oscillation of the air film, which is the so-called "air hammer" phenomenon, and it cannot work normally. The reason is that the air Too much buoyancy stiffness cannot effectively form damping.

Contents of the invention

The object of the present invention is to solve the above-mentioned problems in the prior art, and further provide a planar air bearing with air grooves.

The purpose of the present invention is achieved through the following technical solutions:

A plane air bearing with air grooves, comprising: a bearing air bearing part, the top surface of the bearing air bearing part is set as a high-pressure gas film forming surface and a damping surface, and the damping surface is the top surface of the bearing air bearing part The center part and the outer ring part of the circle, the high-pressure gas film forming surface is set between the center part and the outer ring part, the inner ring groove is arranged between the high-pressure gas film forming surface and the center part, and the high-pressure gas film forming surface is connected with the outer ring part. There is an outer ring groove between the ring parts, the inner end of the linear groove is connected with the inner ring groove, the middle section of the linear groove is connected with the outer ring groove, the outer end of the linear groove leads to the edge of the bearing air bearing part, and the high pressure gas Upward air holes are provided on the film forming surface.

The working principle of the present invention is as follows:

When the load of the air bearing becomes heavier, the internal space of the entire bearing will rapidly become smaller, the air on the damping surface will be compressed, and the compressed air will be discharged from the bearing through the air groove to prevent the internal space of the bearing from becoming smaller; when the air When the load of the floating bearing becomes lighter, the internal space of the entire bearing will rapidly become larger, and the air on the damping surface will be stretched, and the stretched air will prevent the internal space of the bearing from becoming larger when the air is sucked into the bearing through the air groove.

Beneficial effects of the present invention:

The invention overcomes the shortcomings and deficiencies of the prior art. The present invention can be applied to the application occasions of planar air bearings, especially to the application fields requiring larger air bearing capacity, such as large single-axis air bearings. The invention can provide effective damping effect in the planar air bearing, thereby suppressing the occurrence of "air hammer" phenomenon.

Description of drawings

Fig. 1 is a schematic structural diagram of an existing planar air bearing.

Fig. 2 is a top view of the air bearing part of the existing planar air bearing.

Fig. 3 is a top view of the air bearing part of the air bearing of the present invention.

Fig. 4 is a perspective view of the air bearing part of the air bearing of the present invention.

In the figure, 1 is the bearing air bearing part, 2 is the center part, 3 is the outer ring part, 4 is the inner ring groove, 5 is the outer ring groove, 6 is the linear groove, 7 is the upward air hole, A is High-pressure gas film forming surface, B is the damping surface.

detailed description

The present invention will be described in further detail below in conjunction with the accompanying drawings: the present embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation is provided, but the protection scope of the present invention is not limited to the following embodiments.

As shown in Figure 3 and Figure 4, a plane air bearing with air grooves involved in this embodiment includes: a bearing air bearing part 1, and the top surface of the bearing air bearing part 1 is set as a high-pressure gas film Forming surface A and damping surface B, the damping surface B is the center part 2 and the outer ring part 3 of the top surface of the bearing air bearing part 1, and the high-pressure gas film forming surface A is arranged between the center part 2 and the outer ring part 3 , the inner ring groove 4 is arranged between the high-pressure gas film forming surface A and the center part 2, the outer ring groove 5 is arranged between the high-pressure gas film forming surface A and the outer ring part 3, and the inner end of the linear groove 6 is connected with the inner ring groove 4. The ring groove 4 is connected, the middle section of the straight groove 6 is connected with the outer ring groove 5, the outer end of the straight groove 6 leads to the edge of the bearing air-floating part 1, and an upward air hole 7 is provided on the high-pressure gas film forming surface A.

The inner ring groove 4 and the outer ring groove 5 are concentric circles.

There are four linear grooves 6, and the four linear grooves 6 are evenly distributed on the high-pressure gas film forming surface A and the outer ring part 3.

Four upward air holes 7 are evenly distributed on the high-pressure gas film forming surface A.

The above are only preferred specific implementations of the present invention. These specific implementations are all based on different implementations under the overall concept of the present invention, and the scope of protection of the present invention is not limited thereto. Anyone familiar with the technical field Within the technical scope disclosed in the present invention, any changes or substitutions that can be easily conceived by a skilled person shall fall within the protection scope of the present invention. Therefore, the protection scope of the present invention should be determined by the protection scope of the claims.

Claims (4)

1. A planar air bearing with an air groove, comprising: a bearing air bearing part (1), characterized in that the top surface of the bearing air bearing part (1) is set as a high-pressure gas gas film forming surface (A) and the damping surface (B), the damping surface (B) is the center part (2) and the outer ring part (3) of the top surface of the bearing air bearing part (1), and the high-pressure gas film forming surface (A) is arranged at the center of the circle Between the part (2) and the outer ring part (3), an inner ring groove (4) is provided between the high-pressure gas film forming surface (A) and the center part (2), and the high-pressure gas film forming surface (A) and An outer ring groove (5) is arranged between the outer ring parts (3), the inner end of the straight groove (6) is connected with the inner ring groove (4), and the middle section of the straight groove (6) is connected with the outer ring groove (5) The outer end of the linear groove (6) leads to the edge of the bearing air-floating part (1), and upward air holes (7) are arranged on the high-pressure gas film forming surface (A). 2. The planar air bearing with air grooves according to claim 1, characterized in that, the inner ring groove (4) and the outer ring groove (5) are concentric circles. 3. The planar air bearing with air grooves according to claim 1, characterized in that, there are four linear grooves (6), and the four linear grooves (6) are evenly distributed on the high-pressure gas film forming surface ( A) and on the outer ring part (3). 4. The planar air bearing with air grooves according to claim 1, characterized in that four upward air holes (7) are uniformly distributed on the high-pressure gas film forming surface (A).