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CN107256877B
CN107256877B CN201710456417.2A CN201710456417A CN107256877B CN 107256877 B CN107256877 B CN 107256877B CN 201710456417 A CN201710456417 A CN 201710456417A CN 107256877 B CN107256877 B CN 107256877B
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light emitting
layer
emitting unit
semiconductor layer
transparent electrode
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CN107256877A (en
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吴世熙
金每恞
李剡劤
梁明学
尹馀镇
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Seoul Viosys Co Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H29/00Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
    • H10H29/10Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
    • H10H29/14Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00 comprising multiple light-emitting semiconductor components
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/83Electrodes
    • H10H20/832Electrodes characterised by their material
    • H10H20/833Transparent materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/857Interconnections, e.g. lead-frames, bond wires or solder balls
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/83Electrodes
    • H10H20/831Electrodes characterised by their shape
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/84Coatings, e.g. passivation layers or antireflective coatings
    • H10H20/841Reflective coatings, e.g. dielectric Bragg reflectors

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Abstract

在此公开了一种发光二极管。所述发光二极管包括多个发光单元和使发光单元彼此连接的互连件,其中,互连件中的至少一个包括公共地电连接到两个发光单元的公共阴极;每个发光单元包括第一导电型半导体层、第二导电型半导体层以及设置在第一导电型半导体层和第二导电型半导体层之间的活性层;所述两个发光单元共用第一导电型半导体层;透明电极层连续地设置在所述两个发光单元之间,并且公共阴极通过透明电极层电连接到所述两个发光单元。

Figure 201710456417

A light emitting diode is disclosed herein. The light emitting diode includes a plurality of light emitting units and interconnects connecting the light emitting units to each other, wherein at least one of the interconnects includes a common cathode electrically connected to the two light emitting units in common; each light emitting unit includes a first A conductive type semiconductor layer, a second conductive type semiconductor layer, and an active layer disposed between the first conductive type semiconductor layer and the second conductive type semiconductor layer; the two light-emitting units share the first conductive type semiconductor layer; a transparent electrode layer is continuously disposed between the two light emitting units, and a common cathode is electrically connected to the two light emitting units through a transparent electrode layer.

Figure 201710456417

Description

发光二极管led

技术领域technical field

本发明涉及一种发光二极管,更具体地讲,涉及一种包括在单个基底上通过互连件彼此连接的多个发光单元的发光二极管。The present invention relates to a light emitting diode, and more particularly, to a light emitting diode including a plurality of light emitting cells connected to each other by interconnects on a single substrate.

背景技术Background technique

氮化镓(GaN)基发光二极管(LED)已经用在包括全彩色LED显示器、LED交通信号灯板、白色LED等的广泛的应用产品中。近年来,具有比现有荧光灯的发光效率更高的发光效率的白色发光二极管在普通照明领域有望超越现有荧光灯。Gallium Nitride (GaN)-based Light Emitting Diodes (LEDs) have been used in a wide range of applications including full-color LED displays, LED traffic light panels, white LEDs, and the like. In recent years, white light-emitting diodes with higher luminous efficiency than existing fluorescent lamps are expected to surpass existing fluorescent lamps in the field of general lighting.

发光二极管可以在大约2V至大约4V的低正向电压下并且需要供应直流电流的情况下被驱动以发射光。因此,当发光二极管直接连接到交流(AC)电源时,发光二极管根据电流的方向而重复开/关操作,所以不能持续地发射光,并且可能易于被反向电流损坏。Light emitting diodes can be driven to emit light at a low forward voltage of about 2V to about 4V and need to supply a direct current. Therefore, when the light emitting diode is directly connected to an alternating current (AC) power source, the light emitting diode repeats on/off operations according to the direction of the current, so it cannot continuously emit light and may be easily damaged by reverse current.

为了解决发光二极管的这样的问题,Sakai等人的WO 2004/023568(A1)(名称为“LIGHT-EMITTING DEVICE HAVING LIGHT-EMITTINGELEMENTS”)公开了一种可以通过直接连接到高压AC电源而被使用的发光二极管。To address such problems with light emitting diodes, WO 2004/023568(A1) by Sakai et al. (titled "LIGHT-EMITTING DEVICE HAVING LIGHT-EMITTINGELEMENTS") discloses a device that can be used by connecting directly to a high voltage AC power supply led.

WO 2004/023568(A1)的AC发光二极管包括通过空气桥互连件彼此连接以被AC电源驱动的多个发光元件。这样的空气桥互连件会容易被外力损坏并且会因外力变形而引起短路。The AC light emitting diode of WO 2004/023568 (A1 ) comprises a plurality of light emitting elements connected to each other by air bridge interconnects to be driven by an AC power source. Such air bridge interconnects can be easily damaged by external forces and can be deformed by external forces to cause short circuits.

为了解决空气桥互连件的这样的缺点,例如,在韩国专利第10-069023号和第10-1186684号中公开了AC发光二极管。In order to solve such a disadvantage of the air bridge interconnect, for example, AC light emitting diodes are disclosed in Korean Patent Nos. 10-069023 and 10-1186684.

图1是包括多个发光单元的典型的发光二极管的示意性平面图,图2和图3是沿着图1的线A-A截取的剖视图。1 is a schematic plan view of a typical light emitting diode including a plurality of light emitting units, and FIGS. 2 and 3 are cross-sectional views taken along line A-A of FIG. 1 .

参照图1和图2,发光二极管包括基底21、包括S1、S2的多个发光单元26、透明电极层31、绝缘层33和互连件35。另外,发光单元26中的每个包括下半导体层25、活性层27和上半导体层29,并且缓冲层23可以设置在基底21和发光单元26之间。1 and 2 , the light emitting diode includes a substrate 21 , a plurality of light emitting cells 26 including S1 and S2 , a transparent electrode layer 31 , an insulating layer 33 and interconnects 35 . In addition, each of the light emitting units 26 includes a lower semiconductor layer 25 , an active layer 27 and an upper semiconductor layer 29 , and a buffer layer 23 may be disposed between the substrate 21 and the light emitting unit 26 .

发光单元26通过使生长在基底21上的下半导体层25、活性层27和上半导体层29图案化来形成,透明电极层31形成在发光单元S1、S2中的每个上。在每个发光单元26中,下半导体层25的上表面通过部分地去除活性层27和上半导体层29而被部分地暴露,以连接到互连件35。The light emitting unit 26 is formed by patterning the lower semiconductor layer 25, the active layer 27, and the upper semiconductor layer 29 grown on the substrate 21, and the transparent electrode layer 31 is formed on each of the light emitting units S1, S2. In each light emitting cell 26 , the upper surface of the lower semiconductor layer 25 is partially exposed by partially removing the active layer 27 and the upper semiconductor layer 29 to be connected to the interconnection 35 .

接着,绝缘层33形成为覆盖发光单元26。绝缘层33包括覆盖发光单元26的侧表面的侧绝缘层33a和覆盖透明电极层31的绝缘保护层33b。绝缘层33形成有通过其暴露透明电极层31的一部分的开口和通过其暴露下半导体层25的开口。然后,互连件35形成在绝缘层33上,其中,互连件35的第一互连部分35p通过绝缘层33的开口连接到一个发光单元S1的透明电极层31,互连件35的第二互连部分35n通过绝缘层33的另一开口连接到与所述一个发光单元S1相邻的另一发光单元S2的下半导体层25。第二互连部分35n连接到下半导体层25的通过部分地去除活性层27和上半导体层29而暴露的上表面。Next, the insulating layer 33 is formed to cover the light emitting unit 26 . The insulating layer 33 includes a side insulating layer 33 a covering the side surface of the light emitting unit 26 and an insulating protective layer 33 b covering the transparent electrode layer 31 . The insulating layer 33 is formed with an opening through which a portion of the transparent electrode layer 31 is exposed and an opening through which the lower semiconductor layer 25 is exposed. Then, the interconnection member 35 is formed on the insulating layer 33, wherein the first interconnection portion 35p of the interconnection member 35 is connected to the transparent electrode layer 31 of one light emitting cell S1 through the opening of the insulating layer 33, The two interconnection portions 35n are connected to the lower semiconductor layer 25 of the other light emitting cell S2 adjacent to the one light emitting cell S1 through another opening of the insulating layer 33 . The second interconnection portion 35 n is connected to the upper surface of the lower semiconductor layer 25 exposed by partially removing the active layer 27 and the upper semiconductor layer 29 .

在传统技术中,互连件35形成在绝缘层33上,因此可以防止由于外力引起变形。另外,由于互连件35通过侧绝缘层33a与发光单元26分开,所以能够防止因互连件35导致发光单元26短路。In the conventional technology, the interconnection 35 is formed on the insulating layer 33, and thus deformation due to external force can be prevented. In addition, since the interconnection 35 is separated from the light emitting unit 26 by the side insulating layer 33a, the light emitting unit 26 can be prevented from being short-circuited due to the interconnection 35.

然而,在发光单元26的区域中的电流扩散方面,这样的传统发光二极管可能具有局限性。具体地讲,电流可能聚集在互连件35的连接到透明电极层31的一端下面,而并非均匀地在发光单元26的区域中扩散。电流拥挤可能随着电流密度增大而变得严重。However, such conventional light emitting diodes may have limitations in terms of current spreading in the area of the light emitting unit 26 . Specifically, the current may be concentrated under the end of the interconnect 35 connected to the transparent electrode layer 31 , and not spread uniformly in the area of the light emitting unit 26 . Current crowding may become severe as the current density increases.

另外,透明电极层31限制性地放置在上半导体层29的区域中。结果,透明电极层31具有相对窄的面积并增加了发光二极管的电阻,从而引起发光二极管的正向电压(Vf)增加。随着发光单元26的数量增加,透明电极层31的电阻变得相当大。In addition, the transparent electrode layer 31 is restrictively placed in the region of the upper semiconductor layer 29 . As a result, the transparent electrode layer 31 has a relatively narrow area and increases the resistance of the light emitting diode, thereby causing the forward voltage (Vf) of the light emitting diode to increase. As the number of light emitting cells 26 increases, the resistance of the transparent electrode layer 31 becomes considerably large.

另一方面,为了防止电流拥挤,电流阻挡层30可以设置在透明电极层31和发光单元26之间以防止在互连件35的第一互连部分35p下面的电流拥挤。On the other hand, in order to prevent current crowding, the current blocking layer 30 may be provided between the transparent electrode layer 31 and the light emitting unit 26 to prevent current crowding under the first interconnection portion 35p of the interconnection member 35 .

图3是在现有技术中包括电流阻挡层30的发光二极管的剖视图。FIG. 3 is a cross-sectional view of a light emitting diode including a current blocking layer 30 in the prior art.

参照图1和图3,电流阻挡层30放置在互连件35的第一互连部分35p的下面。电流阻挡层30阻挡电流从第一互连部分35p流动到位于第一互连部分35p正下方的上半导体层29。因此,电流阻挡层30可以防止在互连件35的第一互连部分35p下面的电流拥挤。另外,电流阻挡层30可以形成为诸如分布式布拉格反射器(distributed Bragg reflector)的反射器以防止活性层27中产生的光被吸收到互连件35的第一互连部分35p中。Referring to FIGS. 1 and 3 , the current blocking layer 30 is placed under the first interconnection portion 35p of the interconnection member 35 . The current blocking layer 30 blocks current from flowing from the first interconnection portion 35p to the upper semiconductor layer 29 located directly under the first interconnection portion 35p. Therefore, the current blocking layer 30 can prevent current crowding under the first interconnection portion 35p of the interconnection 35. FIG. In addition, the current blocking layer 30 may be formed as a reflector such as a distributed Bragg reflector to prevent light generated in the active layer 27 from being absorbed into the first interconnection portion 35p of the interconnection 35 .

然而,当发光二极管还包括电流阻挡层30时,如在图3中所示,则需要通过光刻和蚀刻来形成电流阻挡层30的额外的工艺,从而难以确保工艺稳定性,同时提高了制造成本。具体地讲,当电流阻挡层30暴露在透明电极层31外部时,电流阻挡层30可能在后续工艺中由于BOE等而被损坏。因此,在现有技术中,为了防止在后续工艺中对电流阻挡层30造成损坏,电流阻挡层30被透明电极层31覆盖,如在图3中所示。However, when the light emitting diode further includes the current blocking layer 30 , as shown in FIG. 3 , an additional process of forming the current blocking layer 30 by photolithography and etching is required, making it difficult to ensure process stability while improving manufacturing cost. Specifically, when the current blocking layer 30 is exposed outside the transparent electrode layer 31, the current blocking layer 30 may be damaged due to BOE or the like in a subsequent process. Therefore, in the related art, in order to prevent damage to the current blocking layer 30 in subsequent processes, the current blocking layer 30 is covered by the transparent electrode layer 31 as shown in FIG. 3 .

此外,由于透明电极层31限制性地放置在上半导体层29的区域中,所以难以在整个上半导体层29上实现均匀的电流扩散,并且发光二极管由于透明电极层31的小面积而仍然具有电阻过大的问题。Furthermore, since the transparent electrode layer 31 is restrictively placed in the area of the upper semiconductor layer 29 , it is difficult to achieve uniform current spreading over the entire upper semiconductor layer 29 , and the light emitting diode still has resistance due to the small area of the transparent electrode layer 31 too big a problem.

发明内容SUMMARY OF THE INVENTION

本发明的一个目的在于提供一种发光二极管。An object of the present invention is to provide a light emitting diode.

本发明的另一目的在于提供一种能够解决上述技术问题中的至少一个的发光二极管。Another object of the present invention is to provide a light emitting diode capable of solving at least one of the above technical problems.

本发明提供了一种发光二极管,所述发光二极管包括:多个发光单元;以及互连件,使发光单元彼此连接,其中,互连件中的至少一个可以包括共同电连接到两个发光单元的共阴极;每个发光单元可以包括第一导电型半导体层、第二导电型半导体层以及设置在第一导电型半导体层和第二导电型半导体层之间的活性层;所述两个发光单元可以共用第一导电型半导体层;其中,透明电极层可以连续地设置在所述两个发光单元之间,并且共阴极可以通过透明电极层电连接到所述两个发光单元。The present invention provides a light emitting diode comprising: a plurality of light emitting units; and interconnects to connect the light emitting units to each other, wherein at least one of the interconnects may include a common electrical connection to the two light emitting units the common cathode; each light-emitting unit may include a first conductive type semiconductor layer, a second conductive type semiconductor layer, and an active layer disposed between the first conductive type semiconductor layer and the second conductive type semiconductor layer; the two light-emitting The cells may share the first conductive type semiconductor layer; wherein a transparent electrode layer may be continuously disposed between the two light-emitting cells, and a common cathode may be electrically connected to the two light-emitting cells through the transparent electrode layer.

本发明还提供了一种发光二极管,所述发光二极管包括:第一发光单元和第二发光单元,在基底上彼此分开;第一透明电极层,电连接到第一发光单元;互连件,使第一发光单元电连接到第二发光单元;以及第一绝缘层,其中,第一透明电极层可以设置在第一发光单元的上表面上以连接到第一发光单元,同时至少部分地覆盖第一发光单元的侧表面,第一绝缘层可以使第一透明电极层与第一发光单元的侧表面分开。The present invention also provides a light emitting diode, the light emitting diode comprises: a first light emitting unit and a second light emitting unit, which are separated from each other on a substrate; a first transparent electrode layer, which is electrically connected to the first light emitting unit; an interconnection member, electrically connecting the first light emitting unit to the second light emitting unit; and a first insulating layer, wherein a first transparent electrode layer may be disposed on the upper surface of the first light emitting unit to be connected to the first light emitting unit while at least partially covering The side surface of the first light emitting unit, and the first insulating layer may separate the first transparent electrode layer from the side surface of the first light emitting unit.

附图说明Description of drawings

包括附图以提供对本发明的进一步理解,附图并入到本说明书中,并构成本说明书的一部分,附图示出了本发明的实施例,并且与描述一起用于解释本发明的原理。The accompanying drawings, which are included to provide a further understanding of the invention, are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the principles of the invention.

图1是在现有技术中的发光二极管的示意性平面图。FIG. 1 is a schematic plan view of a light emitting diode in the related art.

图2是沿着图1的A-A线截取的剖视图。FIG. 2 is a cross-sectional view taken along line A-A of FIG. 1 .

图3是在现有技术中包括电流阻挡层30的发光二极管的剖视图。FIG. 3 is a cross-sectional view of a light emitting diode including a current blocking layer 30 in the prior art.

图4是根据本发明的示例性实施例的发光二极管的示意性平面图,图5是沿着图4的B-B线截取的示意性剖视图。4 is a schematic plan view of a light emitting diode according to an exemplary embodiment of the present invention, and FIG. 5 is a schematic cross-sectional view taken along line B-B of FIG. 4 .

图6至图10是示出制造根据图4的示例性实施例的发光二极管的方法的示意性剖视图。6 to 10 are schematic cross-sectional views illustrating a method of manufacturing the light emitting diode according to the exemplary embodiment of FIG. 4 .

图11是根据本发明的另一示例性实施例的发光二极管的示意性平面图,图12是沿着图11的线B-B截取的剖视图。11 is a schematic plan view of a light emitting diode according to another exemplary embodiment of the present invention, and FIG. 12 is a cross-sectional view taken along line B-B of FIG. 11 .

图13是根据本发明的示例性实施例的发光二极管的示意性平面图。13 is a schematic plan view of a light emitting diode according to an exemplary embodiment of the present invention.

图14中的(a)和(b)分别是沿着图13的线A-A和线B-B截取的剖视图。(a) and (b) in FIG. 14 are cross-sectional views taken along line A-A and line B-B of FIG. 13 , respectively.

图15是图13的发光二极管的示意性电路图。FIG. 15 is a schematic circuit diagram of the light emitting diode of FIG. 13 .

图16是示出根据本发明的又一实施例的发光二极管的示意性电路图。FIG. 16 is a schematic circuit diagram illustrating a light emitting diode according to yet another embodiment of the present invention.

具体实施方式Detailed ways

在下文中参照附图更充分地描述本发明,在附图中示出了本发明的实施例。然而,本发明可以以许多不同的形式来实施,并且不应该被解释为局限于在此阐述的实施例。而是,提供这些实施例使得本公开是彻底的,并将把本发明的范围充分地传达给本领域的技术人员。在附图中,为了清楚起见,可能夸大了层和区域的尺寸和相对尺寸。同样的附图标记在附图中指示同样的元件。The present invention is described more fully hereinafter with reference to the accompanying drawings, in which embodiments of the invention are shown. However, the present invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the size and relative sizes of layers and regions may be exaggerated for clarity. The same reference numbers refer to the same elements in the figures.

将理解的是,当元件或层被称作“在”另一元件或层“上”或“连接到”另一元件或层时,该元件或层可以直接在所述另一元件或层上或直接连接到所述另一元件或层,或者可以存在中间元件或中间层。相反,当元件被称作“直接在”另一元件或层“上”或“直接连接到”另一元件或层时,不存在中间元件或中间层。将理解的是,出于本公开的目的,“X、Y和Z中的至少一个(种)”可以被解释为只有X、只有Y、只有Z或X、Y和Z中的两项或更多个项的任意组合(例如,XYZ、XYY、YZ、ZZ)。It will be understood that when an element or layer is referred to as being "on" or "connected to" another element or layer, the element or layer can be directly on the other element or layer or directly connected to the other element or layer, or intervening elements or layers may be present. In contrast, when an element is referred to as being "directly on" or "directly connected to" another element or layer, there are no intervening elements or layers present. It will be understood that, for the purposes of this disclosure, "at least one (species) of X, Y, and Z" can be construed to mean only X, only Y, only Z, or two or more of X, Y, and Z Any combination of terms (eg, XYZ, XYY, YZ, ZZ).

为了便于描述,在这里可使用空间相对术语,如“在……之下”、“在……下方”、“下面的”、“在……上方”和“上面的”等来描述如在图中示出的一个元件或特征与另一元件或特征的关系。将理解的是,空间相对术语意在包含除了在图中描述的方位之外的装置在使用或操作中的不同方位。例如,如果在图中的装置被翻转,则描述为“在”其它元件或特征“下方”或“之下”的元件将被定位为“在”其它元件或特征“上方”。因此,示例性术语“在…下方”可包括“在…上方”和“在…下方”两种方位。所述装置可以被另外定位(旋转90度或者在其它方位),并相应地解释这里使用的空间相对描述语。For ease of description, spatially relative terms such as "below", "below", "below", "above", and "above" may be used herein to describe the figures as shown in the figures. The relationship of one element or feature to another element or feature is shown in . It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation other than the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary term "below" can include both an orientation of "above" and "below". The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

图4是根据本发明的示例性实施例的发光二极管的示意性平面图,图5是沿着图4的B-B线截取的示意性剖视图。4 is a schematic plan view of a light emitting diode according to an exemplary embodiment of the present invention, and FIG. 5 is a schematic cross-sectional view taken along line B-B of FIG. 4 .

参照图4和图5,发光二极管包括基底151、发光单元S1、发光单元S2、第一绝缘层160a、第二绝缘层160b、透明电极层161和互连件165。发光二极管还可以包括缓冲层153。4 and 5 , the light emitting diode includes a substrate 151 , a light emitting cell S1 , a light emitting cell S2 , a first insulating layer 160 a , a second insulating layer 160 b , a transparent electrode layer 161 , and interconnects 165 . The light emitting diode may further include a buffer layer 153 .

基底151可以是绝缘基底或导电基底。例如,基底151可以是蓝宝石基底、氮化镓基底、碳化硅(SiC)基底或硅基底。另外,基底151可以是在其上表面上具有凹凸图案(未示出)的基底,例如,图案化的蓝宝石基底。The substrate 151 may be an insulating substrate or a conductive substrate. For example, the substrate 151 may be a sapphire substrate, a gallium nitride substrate, a silicon carbide (SiC) substrate, or a silicon substrate. In addition, the substrate 151 may be a substrate having a concavo-convex pattern (not shown) on its upper surface, for example, a patterned sapphire substrate.

在单个基底151上,第一发光单元S1和第二发光单元S2彼此分开。第一发光单元S1和第二发光单元S2可以由氮化镓半导体构成。第一发光单元S1和第二发光单元S2中的每个具有堆叠结构156,堆叠结构156包括下半导体层155、设置在下半导体层155的一个区域上的上半导体层159以及设置在下半导体层155和上半导体层159之间的活性层157。这里,下半导体层155和上半导体层159可以分别是p型半导体层和n型半导体层,反之亦可。On the single substrate 151, the first light emitting unit S1 and the second light emitting unit S2 are separated from each other. The first light emitting unit S1 and the second light emitting unit S2 may be formed of a gallium nitride semiconductor. Each of the first light emitting unit S1 and the second light emitting unit S2 has a stack structure 156 including a lower semiconductor layer 155, an upper semiconductor layer 159 disposed on one region of the lower semiconductor layer 155, and an upper semiconductor layer 159 disposed on the lower semiconductor layer 155 and The active layer 157 between the upper semiconductor layers 159 . Here, the lower semiconductor layer 155 and the upper semiconductor layer 159 may be a p-type semiconductor layer and an n-type semiconductor layer, respectively, or vice versa.

下半导体层155、活性层157和上半导体层159中的每个可以由氮化镓基材料(例如,(Al,In,Ga)N)形成。活性层157可以由具有能够发射期望波长范围内的光(例如,UV光或蓝光)的组成的材料形成,下半导体层155和上半导体层159由具有比活性层157的带隙更宽的带隙的材料形成。Each of the lower semiconductor layer 155, the active layer 157, and the upper semiconductor layer 159 may be formed of a gallium nitride-based material (eg, (Al,In,Ga)N). The active layer 157 may be formed of a material having a composition capable of emitting light in a desired wavelength range (eg, UV light or blue light), and the lower semiconductor layer 155 and the upper semiconductor layer 159 may be formed of a material having a wider band gap than that of the active layer 157 . The material of the gap is formed.

如图所示,下半导体层155和/或上半导体层159可以由单层或多层形成。另外,活性层157可以具有单量子阱结构或多量子阱结构。As shown, the lower semiconductor layer 155 and/or the upper semiconductor layer 159 may be formed of a single layer or multiple layers. In addition, the active layer 157 may have a single quantum well structure or a multiple quantum well structure.

第一发光单元S1和第二发光单元S2中的每个可以具有倾斜的侧表面,其相对于基底151的上表面的倾角范围为15°至80°。Each of the first light emitting unit S1 and the second light emitting unit S2 may have an inclined side surface whose inclination angle with respect to the upper surface of the substrate 151 ranges from 15° to 80°.

如在图5中所示,活性层157和上半导体层159可以放置在下半导体层155的一些区域上,下半导体层155的其它区域可以被暴露。可选择地,下半导体层155的上表面可以被活性层157完全覆盖,从而下半导体层155的侧表面被暴露。As shown in FIG. 5, the active layer 157 and the upper semiconductor layer 159 may be placed on some regions of the lower semiconductor layer 155, and other regions of the lower semiconductor layer 155 may be exposed. Alternatively, the upper surface of the lower semiconductor layer 155 may be completely covered by the active layer 157 so that side surfaces of the lower semiconductor layer 155 are exposed.

在图5中,部分地示出了第一发光单元S1和第二发光单元S2。然而,应该注意的是,第一发光单元S1和第二发光单元S2可以具有相似或相同的结构,如在图4中所示。具体地讲,第一发光单元S1和第二发光单元S2可以具有相同的氮化镓基半导体堆叠结构,并且可以具有相同结构的倾斜侧表面。In FIG. 5 , the first light emitting unit S1 and the second light emitting unit S2 are partially shown. However, it should be noted that the first light emitting unit S1 and the second light emitting unit S2 may have similar or identical structures, as shown in FIG. 4 . Specifically, the first light emitting unit S1 and the second light emitting unit S2 may have the same gallium nitride-based semiconductor stack structure, and may have inclined side surfaces of the same structure.

缓冲层153可以设置在发光单元S1、S2与基底151之间。当基底151为生长基底时,缓冲层153被用于缓解基底151和形成在其上的下半导体层155之间的晶格失配。The buffer layer 153 may be disposed between the light emitting cells S1 , S2 and the substrate 151 . When the substrate 151 is a growth substrate, the buffer layer 153 is used to relieve lattice mismatch between the substrate 151 and the lower semiconductor layer 155 formed thereon.

透明电极层161设置在发光单元S1、S2中的每个上。具体地讲,第一透明电极层161设置在第一发光单元S1上,第二透明电极层161设置在第二发光单元S2上。透明电极层161可以设置在上半导体层159的上表面上以被连接到上半导体层159。The transparent electrode layer 161 is provided on each of the light emitting cells S1, S2. Specifically, the first transparent electrode layer 161 is disposed on the first light emitting unit S1, and the second transparent electrode layer 161 is disposed on the second light emitting unit S2. The transparent electrode layer 161 may be disposed on the upper surface of the upper semiconductor layer 159 to be connected to the upper semiconductor layer 159 .

第一透明电极层161和/或第二透明电极层161可以覆盖第一发光单元S1和/或第二发光单元S2的侧表面的一部分,并且可以覆盖第一发光单元S1和/或第二发光单元S2的至少三个表面。在图4中示出的实施例中,第一透明电极层161和第二透明电极层161中的每个覆盖第一发光单元S1或第二发光单元S2的四个侧表面。The first transparent electrode layer 161 and/or the second transparent electrode layer 161 may cover a part of the side surface of the first light emitting unit S1 and/or the second light emitting unit S2, and may cover the first light emitting unit S1 and/or the second light emitting unit S1 At least three surfaces of cell S2. In the embodiment shown in FIG. 4 , each of the first transparent electrode layer 161 and the second transparent electrode layer 161 covers four side surfaces of the first light emitting unit S1 or the second light emitting unit S2.

因此,透明电极层161可以具有比对应的发光单元S1或S2的上部区域宽的区域。另外,透明电极层161可以覆盖上半导体层159的整个上表面。透明电极层161具有比对应的发光单元S1或S2的区域(或面积)宽的区域(或面积),从而能够减小透明电极层161的电阻。放置在第二发光单元S2上的透明电极层161与第二发光单元S2的上半导体层159邻接,并且通过第一绝缘层160a与第二发光单元S2的下半导体层155绝缘。即,透明电极层161可以与上半导体层159的暴露区域邻接并且可以放置在覆盖下半导体层155的暴露区域的第一绝缘层160a上。Therefore, the transparent electrode layer 161 may have a wider area than the upper area of the corresponding light emitting cell S1 or S2. In addition, the transparent electrode layer 161 may cover the entire upper surface of the upper semiconductor layer 159 . The transparent electrode layer 161 has a wider area (or area) than the area (or area) of the corresponding light emitting unit S1 or S2, so that the resistance of the transparent electrode layer 161 can be reduced. The transparent electrode layer 161 placed on the second light emitting unit S2 adjoins the upper semiconductor layer 159 of the second light emitting unit S2 and is insulated from the lower semiconductor layer 155 of the second light emitting unit S2 by the first insulating layer 160a. That is, the transparent electrode layer 161 may adjoin the exposed area of the upper semiconductor layer 159 and may be placed on the first insulating layer 160 a covering the exposed area of the lower semiconductor layer 155 .

第一绝缘层160a使透明电极层161与对应的发光单元S1或S2的侧表面分开,以防止发光单元S1或S2与透明电极层161电连接。第一绝缘层160a可以沿着对应的发光单元的边缘覆盖对应的发光单元S1或S2的侧表面。另外,第一绝缘层160a可以围绕发光单元S1、S2覆盖基底151的上表面。另一方面,第一绝缘层160a具有暴露下半导体层155的开口160hn和暴露上半导体层159的开口160hp。透明电极层161通过形成在发光单元S1、S2中的每个的上表面上的开口160hp连接到上半导体层159。由于第一绝缘层160a沿着上半导体层159的上表面的边缘形成,所以透明电极层161可以从上半导体层159的边缘凹进以连接到上半导体层159。因此,根据本实施例的发光二极管能够通过发光单元S1、S2的侧壁来防止在上半导体层159的边缘处的电流拥挤。The first insulating layer 160 a separates the transparent electrode layer 161 from the side surface of the corresponding light emitting cell S1 or S2 to prevent the light emitting cell S1 or S2 from being electrically connected to the transparent electrode layer 161 . The first insulating layer 160a may cover the side surface of the corresponding light emitting unit S1 or S2 along the edge of the corresponding light emitting unit. In addition, the first insulating layer 160a may cover the upper surface of the substrate 151 around the light emitting cells S1, S2. On the other hand, the first insulating layer 160a has an opening 160hn exposing the lower semiconductor layer 155 and an opening 160hp exposing the upper semiconductor layer 159 . The transparent electrode layer 161 is connected to the upper semiconductor layer 159 through the opening 160hp formed on the upper surface of each of the light emitting cells S1, S2. Since the first insulating layer 160 a is formed along the edge of the upper surface of the upper semiconductor layer 159 , the transparent electrode layer 161 may be recessed from the edge of the upper semiconductor layer 159 to be connected to the upper semiconductor layer 159 . Therefore, the light emitting diode according to the present embodiment can prevent current crowding at the edge of the upper semiconductor layer 159 through the sidewalls of the light emitting cells S1, S2.

第二绝缘层160b可以形成在发光单元S1、S2中的每个上以使它被放置在透明电极层161和发光单元S1、S2之间。透明电极层161的一部分放置在第二绝缘层160b上。第二绝缘层160b可以被设置成靠近发光单元S1、S2中的每个的边缘,而不限于此。可选择地,第二绝缘层160b可以设置在发光单元S1、S2中的每个的中心区域处。第二绝缘层160b可以由与第一绝缘层160a的材料相同的材料(例如,氧化硅或氮化硅)形成。The second insulating layer 160b may be formed on each of the light emitting cells S1, S2 so as to be interposed between the transparent electrode layer 161 and the light emitting cells S1, S2. A portion of the transparent electrode layer 161 is placed on the second insulating layer 160b. The second insulating layer 160b may be disposed close to the edge of each of the light emitting cells S1, S2, without being limited thereto. Alternatively, the second insulating layer 160b may be disposed at the central region of each of the light emitting cells S1, S2. The second insulating layer 160b may be formed of the same material as that of the first insulating layer 160a (eg, silicon oxide or silicon nitride).

互连件165使第一发光单元S1电连接到第二发光单元S2。互连件165包括第一连接部分(一端)165p和第二连接部分(另一端)165n。第一连接部分165p电连接到在第一发光单元S1上的透明电极层161,第二连接部分165n电连接到第二发光单元S2的下半导体层155。具体地讲,第二连接部分165n可以通过第一绝缘层160a的开口160hn连接到下半导体层155。第一发光单元S1通过互连件165的第一连接部分165p和第二连接部分165n串联连接到第二发光单元S2。The interconnect 165 electrically connects the first light emitting cell S1 to the second light emitting cell S2. The interconnect 165 includes a first connection portion (one end) 165p and a second connection portion (the other end) 165n. The first connection part 165p is electrically connected to the transparent electrode layer 161 on the first light emitting unit S1, and the second connection part 165n is electrically connected to the lower semiconductor layer 155 of the second light emitting unit S2. Specifically, the second connection part 165n may be connected to the lower semiconductor layer 155 through the opening 160hn of the first insulating layer 160a. The first light emitting cell S1 is connected in series to the second light emitting cell S2 through the first connection portion 165p and the second connection portion 165n of the interconnection member 165 .

另一方面,第一连接部分165p可以被设置成靠近第一发光单元S1的一个边缘,而不限于此。可选择地,第一连接部分165p可以设置在第一发光单元S1的中心区域处。On the other hand, the first connection part 165p may be disposed close to one edge of the first light emitting unit S1, without being limited thereto. Alternatively, the first connection part 165p may be disposed at the central area of the first light emitting unit S1.

互连件165可以在互连件165和透明电极层161之间的整个叠置区域上与透明电极层161接触。在现有技术中,绝缘层33的一部分设置在透明电极层31和互连件35之间。然而,在该实施例中,互连件165与透明电极层161直接接触而没有在它们之间设置任何绝缘材料。The interconnection 165 may be in contact with the transparent electrode layer 161 over the entire overlapping area between the interconnection 165 and the transparent electrode layer 161 . In the related art, a part of the insulating layer 33 is provided between the transparent electrode layer 31 and the interconnection member 35 . However, in this embodiment, the interconnection 165 is in direct contact with the transparent electrode layer 161 without interposing any insulating material therebetween.

另外,第二绝缘层160b可以设置在第一发光单元S1上的互连件165和透明电极层161之间的整个叠置区域上。In addition, the second insulating layer 160b may be disposed on the entire overlapping area between the interconnect 165 and the transparent electrode layer 161 on the first light emitting cell S1.

在该实施例中,第二连接部分165n连接到下半导体层155的暴露的上侧。可选择地,第二连接部分165n可以连接到第二发光单元S2的倾斜的侧表面,具体地讲,连接到第二发光单元S2的下半导体层155的倾斜的侧表面。在这种情况下,不必暴露下半导体层155的上表面,并且第一绝缘层160a形成为暴露下半导体层155的倾斜的侧表面。In this embodiment, the second connection portion 165n is connected to the exposed upper side of the lower semiconductor layer 155 . Alternatively, the second connection part 165n may be connected to the inclined side surface of the second light emitting cell S2, in particular, to the inclined side surface of the lower semiconductor layer 155 of the second light emitting cell S2. In this case, it is not necessary to expose the upper surface of the lower semiconductor layer 155 , and the first insulating layer 160 a is formed to expose the inclined side surface of the lower semiconductor layer 155 .

在该实施例中,发光二极管被示出为包括两个发光单元,即,第一发光单元S1和第二发光单元S2。然而,本发明不限于此,更多个发光单元可以通过互连件165彼此电连接。例如,互连件165可以使相邻的发光单元的下半导体层155电连接到它们的透明电极层161以形成发光单元的串联阵列。虽然发光二极管可以具有形成在单个基底151上的单个串联阵列,但是本发明不限于此。可选择地,发光二极管可以包括彼此并联或反并联连接的多个串联阵列。另外,发光二极管可以设置有连接到发光单元的串联阵列的桥式整流器(未示出),从而使发光单元可以被AC电源驱动。桥式整流器可以利用互连件165连接具有与发光单元S1、S2的结构相同的结构的发光单元来形成。In this embodiment, the light emitting diode is shown to include two light emitting cells, namely, a first light emitting cell S1 and a second light emitting cell S2. However, the present invention is not limited thereto, and more light emitting cells may be electrically connected to each other through the interconnection 165 . For example, the interconnects 165 may electrically connect the lower semiconductor layers 155 of adjacent light emitting cells to their transparent electrode layers 161 to form a series array of light emitting cells. Although the light emitting diodes may have a single series array formed on a single substrate 151, the present invention is not limited thereto. Alternatively, the light emitting diodes may comprise multiple series arrays connected in parallel or anti-parallel to each other. Additionally, the light emitting diodes may be provided with bridge rectifiers (not shown) connected to the series array of light emitting units, so that the light emitting units may be driven by AC power. The bridge rectifier may be formed by connecting light emitting cells having the same structure as that of the light emitting cells S1 , S2 using the interconnect 165 .

图6至图10是示出制造根据图4的示例性实施例的发光二极管的方法的剖视图。6 to 10 are cross-sectional views illustrating a method of manufacturing the light emitting diode according to the exemplary embodiment of FIG. 4 .

参照图6,在基底151上形成半导体堆叠结构156,半导体堆叠结构156包括下半导体层155、活性层157和上半导体层159。另外,在形成下半导体层155之前,可以在基底151上形成缓冲层153。6 , a semiconductor stack structure 156 is formed on the substrate 151 , and the semiconductor stack structure 156 includes a lower semiconductor layer 155 , an active layer 157 and an upper semiconductor layer 159 . In addition, before forming the lower semiconductor layer 155, a buffer layer 153 may be formed on the substrate 151.

基底151可以是蓝宝石(Al2O3)基底、碳化硅(SiC)基底、氧化锌(ZnO)基底、硅(Si)基底、砷化镓(GaAs)基底、磷化镓(GaP)基底、氧化锂铝(LiAl2O3)基底、氮化硼(BN)基底、氮化铝(AlN)基底或氮化镓(GaN)基底,而不限于此。即,基底151可以由根据将要形成在基底151上的半导体层的材料而从各种材料中选择的材料形成。另外,基底151可以是在其上表面上具有凹凸图案的基底,例如,图案化的蓝宝石基底。The substrate 151 may be a sapphire (Al 2 O 3 ) substrate, a silicon carbide (SiC) substrate, a zinc oxide (ZnO) substrate, a silicon (Si) substrate, a gallium arsenide (GaAs) substrate, a gallium phosphide (GaP) substrate, an oxide A lithium aluminum (LiAl 2 O 3 ) substrate, a boron nitride (BN) substrate, an aluminum nitride (AlN) substrate, or a gallium nitride (GaN) substrate, but not limited thereto. That is, the substrate 151 may be formed of a material selected from various materials according to the material of the semiconductor layer to be formed on the substrate 151 . In addition, the substrate 151 may be a substrate having a concavo-convex pattern on its upper surface, for example, a patterned sapphire substrate.

缓冲层153形成为缓解基底151和形成在其上的下半导体层155之间的晶格失配,并且缓冲层153可以由例如氮化镓(GaN)或氮化铝(AlN)形成。当基底151为导电基底时,缓冲层153可以形成为绝缘层或半绝缘层,例如,AlN或半绝缘GaN。The buffer layer 153 is formed to relieve lattice mismatch between the substrate 151 and the lower semiconductor layer 155 formed thereon, and may be formed of, for example, gallium nitride (GaN) or aluminum nitride (AlN). When the substrate 151 is a conductive substrate, the buffer layer 153 may be formed as an insulating layer or a semi-insulating layer, eg, AlN or semi-insulating GaN.

下半导体层155、活性层157和上半导体层159中的每个可以由例如(Al,In,Ga)N的氮化镓基半导体材料形成。可以通过金属有机化学气相沉积(MOCVD)、分子束外延和氢化物气相外延(HVPE)等间断地或连续地形成下半导体层155、上半导体层159和活性层157。Each of the lower semiconductor layer 155, the active layer 157, and the upper semiconductor layer 159 may be formed of a gallium nitride-based semiconductor material such as (Al,In,Ga)N. The lower semiconductor layer 155, the upper semiconductor layer 159 and the active layer 157 may be intermittently or continuously formed by metal organic chemical vapor deposition (MOCVD), molecular beam epitaxy, hydride vapor phase epitaxy (HVPE), or the like.

这里,下半导体层155和上半导体层159可以分别是n型半导体层和p型半导体层,反之亦可。n型半导体层可以通过用例如硅(Si)杂质对氮化镓基化合物半导体层进行掺杂来形成,p型半导体层可以通过用例如镁(Mg)杂质对氮化镓基化合物半导体层进行掺杂来形成。Here, the lower semiconductor layer 155 and the upper semiconductor layer 159 may be an n-type semiconductor layer and a p-type semiconductor layer, respectively, or vice versa. The n-type semiconductor layer may be formed by doping the gallium nitride-based compound semiconductor layer with, for example, silicon (Si) impurities, and the p-type semiconductor layer may be formed by doping the gallium nitride-based compound semiconductor layer with, for example, magnesium (Mg) impurities mixed to form.

参照图7,多个发光单元S1、S2形成为通过光刻和蚀刻彼此分开。发光单元S1、S2中的每个可以形成为具有倾斜的侧表面,并且发光单元S1、S2中的每个的下半导体层155的上表面被部分地暴露。Referring to FIG. 7, a plurality of light emitting cells S1, S2 are formed to be separated from each other by photolithography and etching. Each of the light emitting cells S1, S2 may be formed to have inclined side surfaces, and the upper surface of the lower semiconductor layer 155 of each of the light emitting cells S1, S2 is partially exposed.

在发光单元S1、S2中的每个中,通过台面蚀刻首先暴露下半导体层155,通过单元隔离工艺使发光单元彼此分开。可选择地,可以通过单元隔离工艺首先使发光单元S1、S2彼此分开,然后经过台面蚀刻以暴露发光单元S1、S2的下半导体层155。In each of the light emitting cells S1, S2, the lower semiconductor layer 155 is first exposed by mesa etching, and the light emitting cells are separated from each other by a cell isolation process. Alternatively, the light emitting cells S1, S2 may be first separated from each other through a cell isolation process, and then subjected to mesa etching to expose the lower semiconductor layers 155 of the light emitting cells S1, S2.

当互连件连接到倾斜的侧表面时,可以省略用于暴露下半导体层155的上表面的台面蚀刻。When the interconnect is connected to the inclined side surface, the mesa etching for exposing the upper surface of the lower semiconductor layer 155 may be omitted.

参照图8,覆盖第一发光单元S1的一些区域的第二绝缘层160b与覆盖第一发光单元S1的侧表面的第二绝缘层160b一起形成。第一绝缘层160a可以延伸以覆盖第一发光单元S1和第二发光单元S2之间的区域。第一绝缘层160a具有暴露上半导体层159的开口160hp和暴露下半导体层155的开口160hn。另一方面,第一绝缘层160a可以连接到第二绝缘层160b,但是本发明不限于此。在一些实施例中,第一绝缘层160a可以与第二绝缘层160b分开。8, a second insulating layer 160b covering some regions of the first light emitting unit S1 is formed together with the second insulating layer 160b covering a side surface of the first light emitting unit S1. The first insulating layer 160a may extend to cover a region between the first light emitting unit S1 and the second light emitting unit S2. The first insulating layer 160a has openings 160hp exposing the upper semiconductor layer 159 and openings 160hn exposing the lower semiconductor layer 155 . On the other hand, the first insulating layer 160a may be connected to the second insulating layer 160b, but the present invention is not limited thereto. In some embodiments, the first insulating layer 160a may be separated from the second insulating layer 160b.

第一绝缘层160a和第二绝缘层160b可以通过同一工艺由氧化硅或氮化硅同时形成。例如,第一绝缘层160a和第二绝缘层160b可以通过沉积绝缘材料,然后通过光刻和蚀刻进行图案化来形成。The first insulating layer 160a and the second insulating layer 160b may be simultaneously formed of silicon oxide or silicon nitride through the same process. For example, the first insulating layer 160a and the second insulating layer 160b may be formed by depositing insulating materials and then patterning by photolithography and etching.

接下来,参照图9,在第一发光单元S1和第二发光单元S2上形成透明电极层161。透明电极层161由诸如氧化铟锡(ITO)或氧化锌的导电氧化物或诸如Ni/Au的金属层来形成。透明电极层161通过开口160hp连接到上半导体层159并且透明电极层161覆盖第二绝缘层160b。Next, referring to FIG. 9 , a transparent electrode layer 161 is formed on the first light emitting unit S1 and the second light emitting unit S2. The transparent electrode layer 161 is formed of a conductive oxide such as indium tin oxide (ITO) or zinc oxide, or a metal layer such as Ni/Au. The transparent electrode layer 161 is connected to the upper semiconductor layer 159 through the opening 160hp and the transparent electrode layer 161 covers the second insulating layer 160b.

另外,透明电极层161覆盖发光单元S1、S2的侧表面。透明电极层161也可以覆盖对应的发光单元S1或S2的至少三个侧表面。这里,透明电极层161形成在开口160hn的外侧,使得下半导体层155被暴露。In addition, the transparent electrode layer 161 covers the side surfaces of the light emitting cells S1, S2. The transparent electrode layer 161 may also cover at least three side surfaces of the corresponding light emitting unit S1 or S2. Here, the transparent electrode layer 161 is formed on the outer side of the opening 160hn so that the lower semiconductor layer 155 is exposed.

另一方面,透明电极层161通过第一绝缘层160a与发光单元S1或S2的侧表面分开。另外,位于第一发光单元S1上的第一透明电极层161与位于第二发光单元S2上的第二透明电极层161分开,并且位于第一发光单元S1上的第一透明电极层161可以与第二发光单元S2分开。On the other hand, the transparent electrode layer 161 is separated from the side surface of the light emitting cell S1 or S2 by the first insulating layer 160a. In addition, the first transparent electrode layer 161 on the first light emitting unit S1 is separated from the second transparent electrode layer 161 on the second light emitting unit S2, and the first transparent electrode layer 161 on the first light emitting unit S1 may be separated from the second transparent electrode layer 161 on the second light emitting unit S2. The second light emitting unit S2 is separated.

可以通过剥离(lift-off)工艺形成透明电极层161,而不限于此。可选择地,可以通过光刻和蚀刻形成透明电极层161。The transparent electrode layer 161 may be formed through a lift-off process, without being limited thereto. Alternatively, the transparent electrode layer 161 may be formed by photolithography and etching.

参照图10,在透明电极层161上形成互连件165。互连件165包括第一连接部分165p和第二连接部分165n,其中,第一连接部分165p连接到第一发光单元S1的第一透明电极层161,第二连接部分165n连接到第二发光单元S2的下半导体层155。可以通过剥离(lift-off)工艺形成互连件165。Referring to FIG. 10 , interconnects 165 are formed on the transparent electrode layer 161 . The interconnection 165 includes a first connection part 165p and a second connection part 165n, wherein the first connection part 165p is connected to the first transparent electrode layer 161 of the first light emitting unit S1, and the second connection part 165n is connected to the second light emitting unit The lower semiconductor layer 155 of S2. The interconnect 165 may be formed through a lift-off process.

根据该实施例,第一绝缘层160a和第二绝缘层160b可以同时形成,从而简化制造工艺。此外,根据本实施例的方法不包括在形成第一绝缘层160a和第二绝缘层160b之后利用BOE的蚀刻工艺,从而防止了在利用BOE等的后续工艺中对第一绝缘层160a和第二绝缘层160b的损坏。According to this embodiment, the first insulating layer 160a and the second insulating layer 160b may be simultaneously formed, thereby simplifying the manufacturing process. In addition, the method according to the present embodiment does not include an etching process using BOE after forming the first insulating layer 160a and the second insulating layer 160b, thereby preventing the first insulating layer 160a and the second insulating layer 160a and the second insulating layer 160a and the second insulating layer Damage to the insulating layer 160b.

图11是根据本发明的另一示例性实施例的发光二极管的平面图,图12是沿着图11的线B-B截取的剖视图。11 is a plan view of a light emitting diode according to another exemplary embodiment of the present invention, and FIG. 12 is a cross-sectional view taken along line B-B of FIG. 11 .

参照图11和图12,除了透明电极层161的位置以外,根据该实施例的发光二极管与参照图4和图5说明的发光二极管大体相似。Referring to FIGS. 11 and 12 , the light emitting diode according to this embodiment is substantially similar to the light emitting diode explained with reference to FIGS. 4 and 5 except for the position of the transparent electrode layer 161 .

即,在图4和图5中示出的实施例中,透明电极层161形成为覆盖对应的发光单元S1或S2的四个侧表面,并且与相邻的发光单元分开。相反,在该实施例中,第一透明电极层161覆盖第一发光单元S1的三个侧表面,同时延伸以覆盖第二发光单元S2的侧表面的一部分。That is, in the embodiments shown in FIGS. 4 and 5 , the transparent electrode layer 161 is formed to cover the four side surfaces of the corresponding light emitting cell S1 or S2 and to be separated from the adjacent light emitting cells. In contrast, in this embodiment, the first transparent electrode layer 161 covers the three side surfaces of the first light emitting unit S1 while extending to cover a portion of the side surface of the second light emitting unit S2.

第一透明电极层161可以连接到第二发光单元S2的下半导体层155。然而,第一透明电极层161与第二透明电极层分开并且也与第二发光单元S2的上半导体层159分开。The first transparent electrode layer 161 may be connected to the lower semiconductor layer 155 of the second light emitting unit S2. However, the first transparent electrode layer 161 is separated from the second transparent electrode layer and is also separated from the upper semiconductor layer 159 of the second light emitting unit S2.

根据本实施例,在相邻的发光单元S1、S2之间可以利用透明电极层161来供应电流,从而进一步减小发光二极管的正向电压。According to this embodiment, the transparent electrode layer 161 can be used to supply current between the adjacent light-emitting units S1 and S2, thereby further reducing the forward voltage of the light-emitting diode.

为避免重复,将省略制造根据本发明的该实施例的发光二极管的方法的描述。To avoid repetition, the description of the method of manufacturing the light emitting diode according to this embodiment of the present invention will be omitted.

虽然以上已经描述了各种实施例,但是本发明不限于此,并且在不脱离本发明的范围的情况下,可以进行各种修改、改变和替换。Although various embodiments have been described above, the present invention is not limited thereto, and various modifications, changes, and substitutions may be made without departing from the scope of the present invention.

图13是根据本发明的示例性实施例的发光二极管的示意性平面图,图14中的(a)和(b)分别是沿着图13的线A-A和线B-B截取的剖视图,图15是图13的发光二极管的示意性电路图。13 is a schematic plan view of a light emitting diode according to an exemplary embodiment of the present invention, (a) and (b) of FIG. 14 are cross-sectional views taken along line A-A and line B-B of FIG. 13 , respectively, and FIG. 15 is a view of 13. Schematic circuit diagram of the light-emitting diode.

参照图13至图15,发光二极管包括基底221、多个发光单元LEC、电流阻挡层229、透明电极层231、绝缘保护层233、第一互连件235、第二互连件237、第一电极焊盘239a和第二电极焊盘239b。13 to 15 , the light emitting diode includes a substrate 221, a plurality of light emitting cells LEC, a current blocking layer 229, a transparent electrode layer 231, an insulating protection layer 233, a first interconnection 235, a second interconnection 237, a first interconnection The electrode pad 239a and the second electrode pad 239b.

基底221用于支撑发光单元LEC,并且可以是用来生长氮化物半导体层的生长基底,例如蓝宝石基底、硅基底、GaN基底,而不限于此。基底221通常指在发光二极管芯片中的基底。The substrate 221 is used to support the light emitting cell LEC, and may be a growth substrate for growing a nitride semiconductor layer, such as a sapphire substrate, a silicon substrate, a GaN substrate, without limitation. The substrate 221 generally refers to the substrate in the light emitting diode chip.

多个发光单元LEC布置在基底221上。如在图14中的(a)和(b)中所示,每个发光单元LEC包括第一导电型半导体层223、活性层225和第二导电型半导体层227。这里,第一导电型半导体层223和第二导电型半导体层227可以分别是n型半导体层和p型半导体层,反之亦可。活性层225放置在第一导电型半导体层223和第二导电型半导体层227之间,并且可以具有单量子阱结构或多量子阱结构。根据期望波长的光来确定活性层225的材料和组成。例如,活性层225可以由AlInGaN基化合物半导体(例如,InGaN)形成。第一导电型半导体层223和第二导电型半导体层227由具有比活性层225的带隙宽的带隙的AlInGaN基化合物半导体(例如,GaN)构成。另一方面,缓冲层(未示出)可以设置在第一导电型半导体层223和基底221之间。A plurality of light emitting cells LEC are arranged on the substrate 221 . As shown in (a) and (b) of FIG. 14 , each light emitting cell LEC includes a first conductive type semiconductor layer 223 , an active layer 225 and a second conductive type semiconductor layer 227 . Here, the first conductive type semiconductor layer 223 and the second conductive type semiconductor layer 227 may be an n-type semiconductor layer and a p-type semiconductor layer, respectively, or vice versa. The active layer 225 is placed between the first conductive type semiconductor layer 223 and the second conductive type semiconductor layer 227, and may have a single quantum well structure or a multiple quantum well structure. The material and composition of the active layer 225 are determined according to the desired wavelength of light. For example, the active layer 225 may be formed of an AlInGaN-based compound semiconductor (eg, InGaN). The first conductive type semiconductor layer 223 and the second conductive type semiconductor layer 227 are composed of an AlInGaN-based compound semiconductor (eg, GaN) having a wider band gap than that of the active layer 225 . On the other hand, a buffer layer (not shown) may be disposed between the first conductive type semiconductor layer 223 and the substrate 221 .

第一导电型半导体层223、活性层225和第二导电型半导体层227可以通过金属有机化学气相沉积在基底221上生长,然后通过光刻和蚀刻进行图案化。The first conductive type semiconductor layer 223, the active layer 225 and the second conductive type semiconductor layer 227 may be grown on the substrate 221 by metal organic chemical vapor deposition, and then patterned by photolithography and etching.

如在图13和图14中的(a)中所示,活性层225和第二导电型半导体层227可以在单个第一导电型半导体层223上彼此划分开。即,两个发光单元LEC可以共用第一导电型半导体层223。As shown in FIGS. 13 and 14( a ), the active layer 225 and the second conductive type semiconductor layer 227 may be divided from each other on a single first conductive type semiconductor layer 223 . That is, the two light emitting cells LEC may share the first conductive type semiconductor layer 223 .

互连件(即,第一互连件235和第二互连件237)使发光单元LEC彼此电连接。第一互连件235和第二互连件237使放置在不同的第一导电型半导体层223上的发光单元LEC彼此串联连接。第一互连件235使一个发光单元的第一导电型半导体层223电连接到相邻的发光单元LEC的第二导电型半导体层227。The interconnects (ie, the first interconnect 235 and the second interconnect 237 ) electrically connect the light emitting cells LEC to each other. The first interconnection 235 and the second interconnection 237 connect the light emitting cells LEC placed on the different first conductive type semiconductor layers 223 to each other in series. The first interconnect 235 electrically connects the first conductive type semiconductor layer 223 of one light emitting cell to the second conductive type semiconductor layer 227 of the adjacent light emitting cell LEC.

第一互连件235包括:第一连接部分235a(阳极),连接到第一导电型半导体层223;第二连接部分235b(阴极),放置在第二导电型半导体层227上以电连接到第二导电型半导体层227;以及互连部分235c,使第一连接部分235a和第二连接部分235b互连。The first interconnect 235 includes: a first connection part 235a (anode) connected to the first conductive type semiconductor layer 223; and a second connection part 235b (cathode) placed on the second conductive type semiconductor layer 227 to be electrically connected to The second conductive type semiconductor layer 227; and the interconnection portion 235c interconnecting the first connection portion 235a and the second connection portion 235b.

第二互连件237包括:第一连接部分237a(公共阳极),连接到第一导电型半导体层223;第二连接部分237b(公共阴极),放置在第二导电型半导体层227上以电连接到第二导电型半导体层227;以及互连部分237c,使第一连接部分237a和第二连接部分237b互连。The second interconnection 237 includes: a first connection part 237a (common anode) connected to the first conductive type semiconductor layer 223; and a second connection part 237b (common cathode) placed on the second conductive type semiconductor layer 227 to electrically connected to the second conductive type semiconductor layer 227; and an interconnection portion 237c, interconnecting the first connection portion 237a and the second connection portion 237b.

公共阳极237a公共地连接到两个发光单元LEC。例如,公共阳极237a电连接到例如由两个发光单元LEC共用的第一导电型半导体层223。另一方面,公共阴极237b公共地连接到两个发光单元2LEC。例如,公共阴极237b电连接到放置在共用的第一导电型半导体层223上的第二导电型半导体层227。公共阴极237b放置在两个发光单元2LEC之间的区域上。The common anode 237a is commonly connected to the two light emitting cells LEC. For example, the common anode 237a is electrically connected to, for example, the first conductive type semiconductor layer 223 shared by the two light emitting cells LEC. On the other hand, the common cathode 237b is commonly connected to the two light emitting cells 2LEC. For example, the common cathode 237b is electrically connected to the second conductive type semiconductor layer 227 placed on the common first conductive type semiconductor layer 223 . The common cathode 237b is placed on the area between the two light emitting cells 2LEC.

虽然上面已经描述了第一互连件235和第二互连件237,但是应该理解的是,发光单元LEC可以通过各种类型的互连件彼此连接。例如,与在图13中的使第一发光单元连接到与第一发光单元相邻的两个发光单元的互连件相似,连接到一个发光单元LEC的第一连接部分235a可以通过互连部分连接到公共阴极237b,公共阴极237b公共地连接到两个发光单元LEC。另外,公共阳极237a可以连接到两个第二连接部分235b,并且两个第一连接部分235a可以连接到公共阴极237b。Although the first interconnection member 235 and the second interconnection member 237 have been described above, it should be understood that the light emitting cells LEC may be connected to each other through various types of interconnection members. For example, similar to the interconnect in FIG. 13 that connects the first light emitting cell to two light emitting cells adjacent to the first light emitting cell, the first connection portion 235a connected to one light emitting cell LEC may pass through the interconnection portion Connected to the common cathode 237b, the common cathode 237b is commonly connected to the two light emitting cells LEC. In addition, the common anode 237a may be connected to the two second connection parts 235b, and the two first connection parts 235a may be connected to the common cathode 237b.

多个串联阵列通过互连件235、237形成,并且多个串联阵列彼此并联连接。A plurality of series arrays are formed by interconnects 235, 237, and the plurality of series arrays are connected in parallel with each other.

另一方面,透明电极层231连接到发光单元LEC的第二导电型半导体层227。虽然一些透明电极层231限制性地放置在对应的发光单元上,但是其它透明电极层231可以连续放置在两个发光单元LEC上。On the other hand, the transparent electrode layer 231 is connected to the second conductive type semiconductor layer 227 of the light emitting cell LEC. Although some transparent electrode layers 231 are limitedly placed on the corresponding light emitting cells, other transparent electrode layers 231 may be continuously placed on two light emitting cells LEC.

阴极235b、237b可以通过透明电极层231电连接到第二导电型半导体层227。具体地讲,公共阴极237b可以通过连续地放置在两个发光单元上的透明电极层231同时电连接到两个发光单元LEC。The cathodes 235b, 237b may be electrically connected to the second conductive type semiconductor layer 227 through the transparent electrode layer 231. Specifically, the common cathode 237b may be electrically connected to the two light emitting cells LEC at the same time through the transparent electrode layer 231 continuously placed on the two light emitting cells.

电流阻挡层229放置在公共阴极237b下方。具体地讲,电流阻挡层229放置在透明电极层231下面以使透明电极层231与发光单元2LEC的侧表面分开,尤其是与第一导电型半导体层223分开。电流阻挡层229可以具有比公共阴极237b的宽度大的宽度。此外,电流阻挡层229可以部分地覆盖发光单元LEC的上部区域。另外,电流阻挡层(未示出)可以放置在阴极235b下面。A current blocking layer 229 is placed under the common cathode 237b. Specifically, the current blocking layer 229 is placed under the transparent electrode layer 231 to separate the transparent electrode layer 231 from the side surface of the light emitting cell 2LEC, especially from the first conductive type semiconductor layer 223 . The current blocking layer 229 may have a width greater than that of the common cathode 237b. Also, the current blocking layer 229 may partially cover the upper region of the light emitting cell LEC. Additionally, a current blocking layer (not shown) may be placed under the cathode 235b.

电流阻挡层229由绝缘层形成以防止在阴极235b、237b下面的电流拥挤。此外,电流阻挡层229可以包括分布式布拉格反射器。反射从活性层225发射的光的分布式布拉格反射器可以通过重复地堆叠具有不同折射率的层(例如,TiO2/SiO2)来形成。由于电流阻挡层229包括分布式布拉格反射器,所以能够防止从活性层225产生的光被吸收到互连件235、237中。The current blocking layer 229 is formed of an insulating layer to prevent current crowding under the cathodes 235b, 237b. Additionally, the current blocking layer 229 may include a distributed Bragg reflector. A distributed Bragg reflector that reflects light emitted from the active layer 225 may be formed by repeatedly stacking layers having different refractive indices (eg, TiO 2 /SiO 2 ). Since the current blocking layer 229 includes the distributed Bragg reflector, light generated from the active layer 225 can be prevented from being absorbed into the interconnects 235 , 237 .

如在图13中所示,电流阻挡层229的一部分可以延伸到第一导电型半导体层223的外侧。互连部分237c的一部分可以放置在电流阻挡层229的延伸部分上,因此,该延伸部分将反射朝互连部分237c行进的光。另一方面,透明电极层231可以延伸以覆盖电流阻挡层229的延伸部分。另外,透明电极层231还可以延伸以覆盖相邻的第一导电型半导体层223的一部分。As shown in FIG. 13 , a portion of the current blocking layer 229 may extend to the outside of the first conductive type semiconductor layer 223 . A portion of the interconnection portion 237c may be placed on an extension of the current blocking layer 229, so the extension will reflect light traveling toward the interconnection portion 237c. On the other hand, the transparent electrode layer 231 may extend to cover the extended portion of the current blocking layer 229 . In addition, the transparent electrode layer 231 may also extend to cover a part of the adjacent first conductive type semiconductor layer 223 .

第一电极焊盘239a和第二电极焊盘239b放置在串联阵列的相对的端部处。第一电极焊盘239a和第二电极焊盘239b可以分别放置在串联阵列的相对侧处的发光单元LEC上。The first electrode pads 239a and the second electrode pads 239b are placed at opposite ends of the series array. The first electrode pad 239a and the second electrode pad 239b may be placed on the light emitting cells LEC at opposite sides of the series array, respectively.

除了将要形成互连件235、237和电极焊盘239a、239b的区域之外,绝缘保护层233可以基本覆盖整个发光二极管。绝缘保护层233可以形成为保护发光二极管免受外部湿气或外力的影响。The insulating protection layer 233 may substantially cover the entire light emitting diode except for the regions where the interconnects 235, 237 and the electrode pads 239a, 239b are to be formed. The insulating protective layer 233 may be formed to protect the light emitting diode from external moisture or external force.

根据该实施例,如在图15中所示,发光单元LEC的两个串联阵列可以形成在第一电极焊盘239a和第二电极焊盘239b之间。在图15中,一个发光单元放置在串联阵列的放置有第二电极焊盘239b的一端处,两个发光单元放置在串联阵列的放置有第一电极焊盘239a的另一端处。然而,本发明不限于发光单元LEC的这种布置。例如,一个或两个发光单元可以放置在这些阵列的任一端处。According to this embodiment, as shown in FIG. 15 , two series arrays of light emitting cells LEC may be formed between the first electrode pad 239a and the second electrode pad 239b. In FIG. 15, one light emitting unit is placed at one end of the series array where the second electrode pad 239b is placed, and two light emitting units are placed at the other end of the series array where the first electrode pad 239a is placed. However, the present invention is not limited to this arrangement of the light emitting cells LEC. For example, one or two light emitting cells can be placed at either end of these arrays.

另外,根据该实施例,如在图15中用虚线所指示的,公共阴极237b或包括公共阴极237b的互连件237被设置到彼此并联连接的互连阵列。结果,连接到公共阴极237b的发光单元具有相同的电位,从而减轻了在特定阵列上的电流拥挤。In addition, according to this embodiment, as indicated by a dotted line in FIG. 15 , the common cathode 237b or the interconnects 237 including the common cathode 237b are provided to an interconnection array connected in parallel with each other. As a result, the light emitting cells connected to the common cathode 237b have the same potential, thereby alleviating current crowding on a particular array.

虽然该实施例已经示出为在串联阵列中具有四个发光单元,但是在串联阵列中的发光单元的数量没有具体限制,只要串联阵列包括一个或更多个发光单元即可。另外,发光单元的数量可以以各种方式根据需要或考虑到可用电压来确定。Although this embodiment has been shown as having four light emitting cells in the tandem array, the number of light emitting cells in the tandem array is not particularly limited as long as the tandem array includes one or more light emitting cells. In addition, the number of light emitting cells may be determined in various ways as needed or in consideration of the available voltage.

另外,该实施例已经示出为具有串并联结构,在该串并联结构中两个串联阵列通过互连件形成在基底221上并且所述两个串联阵列彼此并联连接。然而,应该理解的是,形成在基底221上的串联阵列的数量不限于此,并且可以有更多个串联阵列形成在基底221上。In addition, this embodiment has been shown to have a series-parallel structure in which two series arrays are formed on the substrate 221 through interconnects and connected in parallel with each other. However, it should be understood that the number of tandem arrays formed on the substrate 221 is not limited thereto, and more tandem arrays may be formed on the substrate 221 .

图16是示出根据本发明的又一实施例的其中形成有四个串联阵列的发光二极管的示意性电路图。16 is a schematic circuit diagram illustrating a light emitting diode in which four series arrays are formed according to yet another embodiment of the present invention.

参照图16,发光单元LEC通过互连件彼此连接以形成四个串联阵列,所述四个串联阵列在第一电极焊盘239a和第二电极焊盘239b之间彼此并联连接。具有比在串联阵列内的发光单元的面积大的面积的发光单元可以设置在串联阵列的相对的端部处。在该实施例中,两个发光单元被设置到第一电极焊盘239a,一个发光单元被设置到第二电极焊盘239b。然而,应该理解的是,本发明不限于此,并且各种数量的发光单元可以被设置到串联阵列的相对的端部。16 , the light emitting cells LEC are connected to each other by interconnects to form four series arrays, which are connected in parallel to each other between the first electrode pad 239a and the second electrode pad 239b. Light emitting cells having a larger area than the light emitting cells within the tandem array may be provided at opposite ends of the tandem array. In this embodiment, two light emitting cells are provided to the first electrode pad 239a, and one light emitting cell is provided to the second electrode pad 239b. However, it should be understood that the present invention is not limited thereto and that various numbers of light emitting cells may be provided to opposite ends of the series array.

另一方面,在相邻的串联阵列内的发光单元LEC中的一些发光单元通过公共阴极237b彼此连接,并且发光单元中的一些发光单元通过公共阳极237a彼此连接。另外,包括公共阴极237b和公共阳极237a的互连件237可以使相邻的发光单元彼此连接。用虚线来指示公共阴极237b和公共阳极237a的位置。如参照图13所描述,包括公共阴极237b或公共阳极237a的发光单元2LEC可以共用第一导电型半导体层223。此外,在各个串联阵列之间的所有相邻的发光单元可以共用第一导电型半导体层223。例如,在该实施例中,在各个串联阵列中的第一发光单元、第二发光单元和第三发光单元可以共用第一导电型半导体层223。On the other hand, some of the light emitting cells LEC in adjacent series arrays are connected to each other through a common cathode 237b, and some of the light emitting cells are connected to each other through a common anode 237a. In addition, the interconnect 237 including the common cathode 237b and the common anode 237a may connect adjacent light emitting cells to each other. The positions of the common cathode 237b and the common anode 237a are indicated by dashed lines. As described with reference to FIG. 13 , the light emitting cells 2LEC including the common cathode 237b or the common anode 237a may share the first conductive type semiconductor layer 223 . In addition, all adjacent light emitting cells between the respective series arrays may share the first conductive type semiconductor layer 223 . For example, in this embodiment, the first light emitting unit, the second light emitting unit and the third light emitting unit in each series array may share the first conductive type semiconductor layer 223 .

虽然该实施例已经示出为具有布置在每个串联阵列中的三个发光单元,但是在串联阵列中的发光单元的数量没有具体限制,只要串联阵列包括一个或更多个发光单元即可。Although this embodiment has been shown with three light emitting cells arranged in each series array, the number of light emitting cells in the series array is not particularly limited as long as the series array includes one or more light emitting cells.

虽然已经结合附图参照一些实施例示出了本发明,但是对本领域技术人员来说将明显的是,在不脱离本发明的精神和范围的情况下,可以对本发明进行各种修改和改变。另外,应该理解的是,特定实施例的一些特征也可以应用到其它实施例而不脱离本发明的精神和范围。因此,应该理解的是,实施例仅通过举例说明的方式来提供,并且给出实施例以提供本发明的完整的公开,并且为本领域技术人员提供对本发明的透彻的理解。因此,其意在使本发明覆盖修改和变化,只要它们落入权利要求和它们的等同物的范围内。While the present invention has been shown with reference to some embodiments in conjunction with the accompanying drawings, it will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention. Additionally, it should be understood that some of the features of a particular embodiment may also be applied to other embodiments without departing from the spirit and scope of the invention. Therefore, it is to be understood that the embodiments are provided by way of illustration only and are given to provide a complete disclosure of the present invention and to provide those skilled in the art with a thorough understanding of the present invention. Therefore, it is intended that this invention cover modifications and variations provided they come within the scope of the claims and their equivalents.

Claims (10)

1.一种发光二极管,所述发光二极管包括:1. A light-emitting diode comprising: 第一发光单元和第二发光单元,在基底上彼此分开,第一发光单元包括与第二发光单元相对的侧表面;the first light-emitting unit and the second light-emitting unit are separated from each other on the substrate, and the first light-emitting unit includes a side surface opposite to the second light-emitting unit; 第一透明电极层,电连接到第一发光单元;a first transparent electrode layer, electrically connected to the first light-emitting unit; 互连件,使第一发光单元电连接到第二发光单元;以及an interconnect to electrically connect the first light emitting unit to the second light emitting unit; and 第一绝缘层,first insulating layer, 其中,第一透明电极层设置在第一发光单元的上表面上以电连接到第一发光单元,同时至少部分地覆盖第一发光单元的所述侧表面,wherein the first transparent electrode layer is disposed on the upper surface of the first light-emitting unit to be electrically connected to the first light-emitting unit while at least partially covering the side surface of the first light-emitting unit, 第一绝缘层使第一透明电极层与第一发光单元的所述侧表面分开,其中,第一绝缘层包括构造为邻近于第二发光单元暴露第一发光单元的下半导体层的开口,a first insulating layer separates the first transparent electrode layer from the side surface of the first light emitting unit, wherein the first insulating layer includes an opening configured to expose a lower semiconductor layer of the first light emitting unit adjacent to the second light emitting unit, 其中,所述开口设置在第一发光单元的被覆盖的所述侧表面与第一发光单元的下半导体层的端部之间,Wherein, the opening is disposed between the covered side surface of the first light-emitting unit and the end of the lower semiconductor layer of the first light-emitting unit, 其中,互连件通过所述开口直接连接到所述下半导体层。Wherein, the interconnect is directly connected to the lower semiconductor layer through the opening. 2.根据权利要求1所述的发光二极管,所述发光二极管还包括:2. The light emitting diode of claim 1, further comprising: 第二绝缘层,在第一发光单元的上表面上设置在互连件和第一发光单元之间以阻挡电流。A second insulating layer is disposed between the interconnect and the first light emitting unit on the upper surface of the first light emitting unit to block current. 3.根据权利要求2所述的发光二极管,其中,第二绝缘层由与第一绝缘层的材料相同的材料形成。3. The light emitting diode of claim 2, wherein the second insulating layer is formed of the same material as that of the first insulating layer. 4.根据权利要求2所述的发光二极管,其中,第二绝缘层设置在第一透明电极层下面,互连件连接到第一透明电极层。4. The light emitting diode of claim 2, wherein the second insulating layer is disposed under the first transparent electrode layer, and the interconnect is connected to the first transparent electrode layer. 5.根据权利要求1所述的发光二极管,其中,第一透明电极层覆盖第一发光单元的至少三个侧表面。5. The light emitting diode of claim 1, wherein the first transparent electrode layer covers at least three side surfaces of the first light emitting unit. 6.根据权利要求5所述的发光二极管,其中,第一透明电极层的一部分部分地覆盖第二发光单元的侧表面。6. The light emitting diode of claim 5, wherein a portion of the first transparent electrode layer partially covers the side surface of the second light emitting unit. 7.根据权利要求1所述的发光二极管,其中,第一发光单元和第二发光单元中的每个包括下半导体层、上半导体层以及设置在下半导体层和上半导体层之间的活性层;7. The light emitting diode of claim 1, wherein each of the first light emitting unit and the second light emitting unit comprises a lower semiconductor layer, an upper semiconductor layer, and an active layer disposed between the lower semiconductor layer and the upper semiconductor layer; 第一透明电极层电连接到上半导体层;以及the first transparent electrode layer is electrically connected to the upper semiconductor layer; and 互连件在其一端处电连接到第一透明电极层,并且在其另一端处电连接到第二发光单元的下半导体层。The interconnect is electrically connected to the first transparent electrode layer at one end thereof, and is electrically connected to the lower semiconductor layer of the second light emitting unit at the other end thereof. 8.根据权利要求7所述的发光二极管,其中,互连件直接连接到第一透明电极层而不包括设置在它们之间的整个叠置区域上的绝缘材料。8. The light emitting diode of claim 7, wherein the interconnect is directly connected to the first transparent electrode layer without including insulating material disposed on the entire overlapping area therebetween. 9.根据权利要求8所述的发光二极管,所述发光二极管还包括:9. The light emitting diode of claim 8, further comprising: 第二绝缘层,设置在第一发光单元的上半导体层上,a second insulating layer disposed on the upper semiconductor layer of the first light-emitting unit, 其中,第二绝缘层设置在第一透明电极层和互连件所连接的区域下方。Wherein, the second insulating layer is disposed under the region where the first transparent electrode layer and the interconnection are connected. 10.根据权利要求7所述的发光二极管,其中,第一发光单元和第二发光单元具有相同的结构。10. The light emitting diode of claim 7, wherein the first light emitting unit and the second light emitting unit have the same structure.
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DE102014011893B4 (en) 2020-10-01
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CN104377218B (en) 2017-07-11

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