CN107121805B - Touch display panel and manufacturing method thereof - Google Patents
Touch display panel and manufacturing method thereof Download PDFInfo
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- CN107121805B CN107121805B CN201710224604.8A CN201710224604A CN107121805B CN 107121805 B CN107121805 B CN 107121805B CN 201710224604 A CN201710224604 A CN 201710224604A CN 107121805 B CN107121805 B CN 107121805B
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 239000010410 layer Substances 0.000 claims abstract description 89
- 239000011241 protective layer Substances 0.000 claims abstract description 44
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 8
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical group [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 25
- 230000003287 optical effect Effects 0.000 claims description 18
- 238000005530 etching Methods 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 239000003795 chemical substances by application Substances 0.000 claims description 4
- 238000000059 patterning Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 abstract description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000009471 action Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/13338—Input devices, e.g. touch panels
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0412—Digitisers structurally integrated in a display
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0416—Control or interface arrangements specially adapted for digitisers
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Human Computer Interaction (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Position Input By Displaying (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
The invention discloses a touch display panel and a manufacturing method thereof, wherein the touch display panel comprises an array substrate and a color filter which are oppositely arranged; the liquid crystal layer is arranged between the array substrate and the color filter; the touch layer is arranged on one side, away from the liquid crystal layer, of the color filter and comprises a plurality of touch electrodes which are insulated and isolated from each other and a plurality of connecting electrodes which are electrically connected with the touch electrodes respectively; and the protective layer is arranged on the touch layer, wherein the first protective layer is a semiconductor layer. Therefore, the problem that the connecting electrode in the prior art is directly exposed in air and water vapor and is easy to corrode is solved, and the implementation difficulty is low and the popularization is easy.
Description
Technical Field
The invention relates to the field of manufacturing of liquid crystal displays, in particular to a touch display panel and a manufacturing method thereof.
Background
Touch screens (also called touch screens) are the simplest, convenient and natural man-machine interaction mode at present. The multimedia interactive device gives the multimedia a brand-new appearance and is a brand-new multimedia interactive device with great attractiveness.
Specifically, the touch display panel generally includes a touch functional area and a circuit bonding area, and the touch functional area is generally provided with a plurality of touch sensing electrodes Rx and a plurality of touch driving electrodes Tx that are interlaced with each other. The touch sensing electrode Rx and the touch driving electrode Tx are respectively connected to a Flexible Printed Circuit board (PFC) and the like in a Circuit bonding area through a lead. When a finger touches the display screen, the touch sensing electrode Rx and the touch driving electrode Tx transmit a touch signal to the flexible circuit board through the lead wires to process the touch signal, thereby realizing a touch function.
However, in order to make the flexible circuit board and the leads have a better contact effect, the leads of the touch display panel at the circuit bonding area are generally exposed directly, so that the leads on the circuit bonding area are easily corroded by water, oxygen and the like in the air, and a touch function may be seriously failed.
Disclosure of Invention
The invention provides a touch display panel and a manufacturing method thereof, which can solve the problem that the exposed metal of the binding area is corroded at present.
In order to solve the above technical problem, a first aspect of the present invention provides a touch display panel, including: the array substrate and the color filter are oppositely arranged; the liquid crystal layer is arranged between the array substrate and the color filter; the touch layer is arranged on one side, away from the liquid crystal layer, of the color filter and comprises a plurality of touch electrodes which are insulated and isolated from each other and a plurality of connecting electrodes which are electrically connected with the touch electrodes respectively; and the protective layer is arranged on the touch layer, wherein the first protective layer is a semiconductor layer.
Preferably, the touch electrode includes a first electrode and a second electrode, the first electrode and the second electrode are disposed in the same layer, and the first protective layer includes a first portion covering the first electrode and the second electrode, and a second portion covering the connection electrode.
Preferably, the touch electrode includes a first electrode and a second electrode, the second electrode is disposed above the first electrode, an insulating layer is disposed between the first electrode and the second electrode, and the first protective layer includes a first portion covering the second electrode and a second portion covering the connection electrode.
Preferably, an optical layer is further included, the optical layer covering the first portion of the first protective layer.
Preferably, the material of the semiconductor is indium tin oxide.
Preferably, the refractive index of the optical layer is 1.5 or more and 2.0 or less.
A second aspect of the present invention provides a method for manufacturing a touch display panel, including: forming a touch layer on one side of the color filter, which is far away from the liquid crystal layer, wherein the touch layer comprises a plurality of touch electrodes insulated and isolated from each other and a plurality of connecting electrodes electrically connected with the touch electrodes respectively; and forming a protective layer on the touch layer, wherein the protective layer is a semiconductor layer.
Preferably, the touch electrode includes a first electrode and a second electrode, the first electrode and the second electrode are formed in the same layer, and the step of forming the protective layer on the touch layer includes: forming an indium tin oxide film on the surfaces of the first electrode, the second electrode and the connecting electrode, forming an anti-etching agent mask on the indium tin oxide film, and performing patterning treatment on the indium tin oxide film to obtain a patterned indium tin oxide film, wherein the patterned indium tin oxide film corresponds to the protective layer, and the protective layer comprises a first part covering the first electrode and the second electrode and a second part covering the connecting electrode.
Preferably, the touch electrode includes a first electrode and a second electrode, the second electrode is formed above the first electrode, an insulating layer is formed between the first electrode and the second electrode, and the step of forming a protective layer on the touch layer includes: forming an indium tin oxide film on the surfaces of the second electrode and the connecting electrode, forming an anti-etching agent mask on the indium tin oxide film, and performing patterning treatment on the indium tin oxide film to obtain a patterned indium tin oxide film, wherein the patterned indium tin oxide film corresponds to the protective layer, and the protective layer comprises a first part covering the second electrode and a second part covering the connecting electrode.
Preferably, further comprising forming an optical layer on the first portion of the protective layer.
By adopting the technical scheme of the invention, the following beneficial effects can be obtained:
the originally exposed connecting electrode is covered by the first part of the protective layer, so that the connecting electrode is prevented from being corroded due to exposure in air and water vapor, the optical layer is arranged on the surface of the first part of the protective layer, the difference of the refractive indexes between the first part of the protective layer and the color filter can be effectively reduced, and the situation that clear and visible etching marks exist on the surface due to overlarge difference of the refractive indexes is avoided.
Drawings
Fig. 1a and fig. 1b are cross-sectional views respectively illustrating areas where touch electrodes and connection electrodes are located in a touch display panel according to a first embodiment of the invention.
Fig. 2a and 2b are cross-sectional views respectively illustrating areas where touch electrodes and connecting electrodes are located in a touch display panel according to a second embodiment of the invention.
Fig. 3a to 3f are schematic diagrams illustrating different stages of a manufacturing method of a touch display panel according to a third embodiment of the invention.
Fig. 4a to 4f are schematic diagrams illustrating different stages of a manufacturing method of a touch display panel according to a fourth embodiment of the invention.
Fig. 5a to 5e are schematic diagrams illustrating different stages of a manufacturing method of a touch display panel according to a fifth embodiment of the invention.
Detailed Description
The present invention will be described below based on examples, but the present invention is not limited to only these examples. In the following detailed description of embodiments of the invention, certain specific details are set forth in order to provide a thorough understanding of the invention without having to describe such specific details. Well-known methods, procedures, and procedures have not been described in detail so as not to obscure the present invention.
Fig. 1a and fig. 1b are cross-sectional views respectively illustrating areas where touch electrodes and connection electrodes are located in a touch display panel according to a first embodiment of the invention. As shown in fig. 1a and fig. 1b, a touch display panel according to a first embodiment of the present invention includes an array substrate (not shown) and a color filter 110, which are disposed opposite to each other; a liquid crystal layer (not shown) disposed between the array substrate and the color filter 110; the touch layer is arranged on one side of the color filter 110, which is far away from the liquid crystal layer, and comprises touch electrodes 120 insulated and isolated from each other and connecting electrodes 150 electrically connected with the touch electrodes 120 respectively; and the protective layer is arranged on the touch layer and is a semiconductor layer, and the material of the semiconductor layer is indium tin oxide for example.
The touch electrode 120 includes a first electrode 121 and a second electrode 122 disposed in the same layer and insulated and isolated from each other, wherein the first electrode 121 is a sensing electrode, the second electrode 122 is a driving electrode or the first electrode 121 is a driving electrode, and the second electrode 122 is a sensing electrode, but not limited thereto. The protective layer includes a first portion 131 covering the first electrode 121 and the second electrode 122, and a second portion 132 covering the connection electrode 150. As shown in fig. 1b, the two exposed side surfaces and the upper surface of the connection electrode 150 are completely covered by the second portion 132 of the protection layer, and the second portion 132 of the protection layer can reduce the risk of corrosion of the connection electrode 150, so that the connection electrode 150 and the flexible circuit board can be electrically connected with each other with a better connection effect.
Preferably, the touch display panel provided in this embodiment further includes an optical layer 140, a refractive index of the optical layer 140 is greater than or equal to 1.5 and less than or equal to 2.0, and the optical layer 140 is disposed on the first portion 131 of the protection layer, so as to improve a problem of display quality reduction caused by an excessively large difference in refractive index between the first portion 131 of the protection layer and the color filter 110.
Fig. 2a and 2b are cross-sectional views respectively illustrating areas where touch electrodes and connecting electrodes are located in a touch display panel according to a second embodiment of the invention. As shown in fig. 2a and 2b, compared with the touch display panel provided by the first embodiment of the present invention, the touch display panel provided by the present embodiment is different in that the second electrode 122 is disposed above the first electrode 121, and an insulating layer 160 is disposed between the first electrode 121 and the second electrode 122, where the insulating layer 160 is used to insulate and isolate the first electrode 121 from the second electrode 122.
Since the first electrode 121 is covered by the insulating layer 160, in this embodiment, the first portion 131 of the protection layer only covers the second electrode 122 located on the upper layer, and the second portion 132 of the protection layer covers the connection electrode 150, as shown in fig. 2b, the two exposed side surfaces and the upper surface of the connection electrode 150 are completely covered by the second portion 132 of the protection layer, and the second portion 132 of the protection layer reduces the risk of corrosion of the connection electrode 150, so that the connection electrode 150 has a better connection effect when electrically connected with a flexible circuit board.
Preferably, the touch display panel provided in this embodiment further includes an optical layer 140, a refractive index of the optical layer 140 is greater than or equal to 1.5 and less than or equal to 2.0, and the optical layer 140 is disposed on the first portion 131 of the protection layer, so as to improve a problem of display quality reduction caused by an excessively large difference in refractive index between the first portion 131 of the protection layer and the color filter 110.
Fig. 3a to 3f are schematic diagrams illustrating different stages of a manufacturing method of a touch display panel according to a third embodiment of the invention. The method for manufacturing a touch display panel according to the third embodiment of the present invention is based on the touch display panel according to the first embodiment of the present invention.
As shown in fig. 3a, a metal layer 160 is formed on the color filter 110 on a side away from the liquid crystal layer by using a physical vapor deposition method, a first resist mask 170 is formed on the metal layer 160, and the metal layer 160 is patterned by using a photoresist etching method to form a first electrode 121, a second electrode 122, and connection electrodes (not shown) electrically connected to the first electrode 121 and the second electrode 122, respectively, as shown in fig. 3 b.
As shown in fig. 3c, an indium tin oxide film 180 is formed on the surfaces of the first electrode 121, the second electrode 122 and the connecting electrode.
As shown in fig. 3d, a second resist mask 171 is formed on the surface of the ito film 180, and the ito film 180 is patterned by a photoresist etching method to obtain a patterned ito film, where the patterned ito film is a protection layer, and the protection layer includes a first portion 131 covering the first and second electrodes 121 and 122 and a second portion (not shown) covering the connection electrode, as shown in fig. 3 e.
As shown in fig. 3f, an optical layer 140 is formed on the first portion 131 of the protective layer, the optical layer 140 covering the first portion 131 of the protective layer and the first and second electrodes 121 and 122.
Fig. 4a to 4f are schematic diagrams illustrating different stages of a manufacturing method of a touch display panel according to a fourth embodiment of the invention. The method for manufacturing a touch display panel according to the fourth embodiment of the present invention is based on the touch display panel according to the first embodiment of the present invention.
As shown in fig. 4a, a metal layer 160 is formed on the side of the color filter 110 away from the liquid crystal layer by physical vapor deposition, and an indium tin oxide film 180 is formed on the metal layer 160.
As shown in fig. 4b, a first etch resist mask 170 is formed on the indium tin oxide film 180.
As shown in fig. 4c, the ito layer 180 is patterned by a photoresist etching method to obtain a patterned ito film, which corresponds to the passivation layer.
As shown in fig. 4d, the metal layer 160 is patterned by a photoresist etching method to form a first electrode 121 and a second electrode 122 insulated and isolated from each other, the protective layer formed in the step shown in fig. 4c includes a first portion 131 covering the first electrode 121 and the second electrode 122, and further includes a second portion (not shown) covering the connection electrode, and the first resist mask 170 on the first portion 131 and the second portion of the protective layer is removed, as shown in fig. 4 e.
As shown in fig. 4f, an optical layer 140 is formed on the first portion 131 of the protective layer, the optical layer 140 covering the first portion 131 of the protective layer and the first and second electrodes 121 and 122.
Fig. 5a to 5e are schematic diagrams illustrating different stages of a manufacturing method of a touch display panel according to a fifth embodiment of the invention. The method for manufacturing a touch display panel according to the fifth embodiment of the present invention is based on the touch display panel according to the first embodiment of the present invention.
Compared with the method for manufacturing a touch display panel according to the fourth embodiment of the present invention, the method for manufacturing a touch display panel according to the fifth embodiment of the present invention is different in that, as shown in fig. 5b and 5c, the first electrode 121, the second electrode 122, and the protective layer (including the first portion 131 disposed on the first electrode 121 and the second electrode 122, and further including the second portion disposed on the connection electrode) are formed in one photoresist etching process.
In another alternative embodiment, the manufacturing method of the touch display panel may also be based on the touch display panel provided in the second embodiment of the present invention, and the specific steps are similar to those of the touch display panel provided in the third to fifth embodiments of the present invention, and are not described in detail herein.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
While embodiments in accordance with the invention have been described above, these embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments described. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention and various embodiments with various modifications as are suited to the particular use contemplated. The invention is limited only by the claims and their full scope and equivalents.
Claims (7)
1. A touch display panel, comprising:
the array substrate and the color filter are oppositely arranged;
the liquid crystal layer is arranged between the array substrate and the color filter;
the touch layer is arranged on one side, away from the liquid crystal layer, of the color filter and comprises a plurality of touch electrodes and a plurality of connecting electrodes, wherein the touch electrodes and the connecting electrodes are located in a touch functional area and are insulated and isolated from each other; and
the protective layer is arranged on the touch layer and comprises a first part and a second part, the first part covers the touch electrodes and the second part covers the connecting electrodes, the first part of the protective layer is covered by the optical layer, the two side surfaces and the upper surface of the connecting electrodes, which are exposed outside, are completely covered by the second part of the protective layer,
The protective layer is an indium tin oxide film, and the touch electrode and the connecting electrode are patterned metal layers.
2. The touch display panel according to claim 1, wherein the touch electrodes include a first electrode and a second electrode, the first electrode, the second electrode, and the connection electrode are provided in the same layer, and the protective layer further includes a first portion covering the first electrode and the second electrode.
3. The touch display panel according to claim 1, wherein the touch electrode comprises a first electrode and a second electrode, the second electrode is disposed above the first electrode, an insulating layer is disposed between the first electrode and the second electrode, and the protective layer further comprises a first portion covering the second electrode.
4. The touch display panel according to claim 1, wherein the refractive index of the optical layer is 1.5 or more and 2.0 or less.
5. A method for manufacturing a touch display panel includes:
forming a touch layer on one side of the color filter, which is far away from the liquid crystal layer, wherein the touch layer comprises a plurality of touch electrodes and a plurality of connecting electrodes, which are positioned in a touch functional area and are insulated and isolated from each other, the touch electrodes and the connecting electrodes are arranged on the same layer, and the touch electrodes are electrically connected with the flexible circuit board through the connecting electrodes respectively; and
Forming a protective layer on the touch layer, wherein the protective layer comprises a first part and a second part, the first part is formed synchronously and covers the touch electrode, the second part covers the connecting electrode, an optical layer is formed on the first part of the protective layer, the second part of the protective layer completely covers two side surfaces and the upper surface of the connecting electrode, which are exposed outside,
the protective layer is an indium tin oxide film, and the touch electrode and the connecting electrode are patterned metal layers.
6. The method according to claim 5, wherein the touch electrodes include a first electrode and a second electrode, the first electrode, the second electrode, and the connection electrode are formed in the same layer, and the step of forming the protective layer on the touch layer includes:
forming an indium tin oxide film on the surfaces of the first electrode, the second electrode and the connecting electrode, forming an anti-etching agent mask on the indium tin oxide film, and carrying out patterning treatment on the indium tin oxide film to obtain a patterned indium tin oxide film, wherein the protective layer further comprises a first part covering the first electrode and the second electrode.
7. The method according to claim 5, wherein the touch electrode comprises a first electrode and a second electrode, the second electrode is formed over the first electrode, an insulating layer is formed between the first electrode and the second electrode, and the step of forming the protective layer on the touch layer comprises: forming an indium tin oxide film on the surfaces of the second electrode and the connecting electrode, forming an anti-etching agent mask on the indium tin oxide film, and carrying out patterning treatment on the indium tin oxide film to obtain a patterned indium tin oxide film, wherein the patterned indium tin oxide film corresponds to the protective layer, and the protective layer further comprises a first part covering the second electrode.
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CN113391476A (en) * | 2021-04-19 | 2021-09-14 | 深圳市华星光电半导体显示技术有限公司 | Display panel, display panel preparation method and display device |
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TW201508574A (en) * | 2013-08-22 | 2015-03-01 | Henghao Technology Co Ltd | Touch electrode device |
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CN104461149B (en) * | 2014-12-16 | 2018-06-15 | 合肥鑫晟光电科技有限公司 | A kind of touch panel and display device |
CN104699309B (en) * | 2015-03-31 | 2017-06-13 | 合肥京东方光电科技有限公司 | A kind of touch-screen, its preparation method and display device |
CN105892755B (en) * | 2016-06-21 | 2019-02-22 | 京东方科技集团股份有限公司 | Touch panel and preparation method thereof, touch-control display panel and device |
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CN103294291A (en) * | 2012-03-05 | 2013-09-11 | 联胜(中国)科技有限公司 | Touch control board |
CN203786689U (en) * | 2013-10-18 | 2014-08-20 | 胜华科技股份有限公司 | touch panel |
CN106201138A (en) * | 2016-06-30 | 2016-12-07 | 京东方科技集团股份有限公司 | Touch screen and display device |
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