CN101751181B - How to make a touch panel - Google Patents
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- CN101751181B CN101751181B CN2009102627825A CN200910262782A CN101751181B CN 101751181 B CN101751181 B CN 101751181B CN 2009102627825 A CN2009102627825 A CN 2009102627825A CN 200910262782 A CN200910262782 A CN 200910262782A CN 101751181 B CN101751181 B CN 101751181B
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Abstract
Description
技术领域 technical field
本发明是关于一种制作触控面板的方法,尤指一种利用网印制造工艺形成触控面板的感测垫图案层、图案化绝缘层与桥接线图案层的方法。The invention relates to a method for manufacturing a touch panel, in particular to a method for forming a sensing pad pattern layer, a patterned insulating layer and a bridge line pattern layer of a touch panel by using a screen printing process.
背景技术 Background technique
在现今各式消费性电子产品的市场中,行动电话(mobile phone)、卫星导航系统(GPS)与数字影音播放器等可携式电子产品已广泛的使用触控面板(touch panel)作为人机数据沟通接口。由于目前消费性电子产品的设计讲求轻薄短小,在产品设计上希望能节省占空间的按键与鼠标等传统输入装置,故采用触控方式输入,因此触控面板已成为关键的零组件之一。In today's market of various consumer electronic products, portable electronic products such as mobile phones, satellite navigation systems (GPS) and digital audio-visual players have widely used touch panels as man-machine Data communication interface. Since the current design of consumer electronic products emphasizes thinness and compactness, traditional input devices such as buttons and mice are expected to save space in product design, so touch input is adopted, so touch panels have become one of the key components.
以触控原理来作区分,现行触控面板主要可区分为电阻/接触式触控面板(resistance/contact touch panel)与电容式触控面板(capacitive touch panel)两种类型,而其中电容式触控面板为目前市场上的主流产品。现有的电容式触控面板的感测垫、绝缘层与桥接线等膜层以黄光微影方式加以形成,因此使得制作成本昂贵而影响了电容式触控面板的普及度。Based on the principle of touch control, current touch panels can be divided into two types: resistance/contact touch panel and capacitive touch panel. The control panel is the mainstream product on the market at present. In the existing capacitive touch panel, layers such as sensing pads, insulating layers, and bridging wires are formed by photolithography, which makes the production cost expensive and affects the popularity of the capacitive touch panel.
发明内容 Contents of the invention
本发明的目的之一在于提供一种制作触控面板的方法,以节省触控面板的制作成本。One of the objectives of the present invention is to provide a method for manufacturing a touch panel, so as to save the manufacturing cost of the touch panel.
本发明的一较佳实施例提供一种制作触控面板的方法,包括下列步骤。提供一底材(base),其包括一感测区。于底材的感测区内形成一第一透明导电层,且进行一第一网印制造工艺,于第一透明导电层上形成一第一牺牲图案层,并利用第一牺牲图案层图案化第一透明导电层以形成一感测垫图案层。进行一第一回火制造工艺,对所述的感测垫图案层进行回火。进行一第二网印制造工艺,于底材的感测区内形成一图案化绝缘层,所述的图案化绝缘层包括复数个岛状绝缘结构。于底材的感测区内形成一第二透明导电层,且进行一第三网印制造工艺,于第二透明导电层上形成一第二牺牲图案层,并利用第二牺牲图案层图案化第二透明导电层,以形成一桥接线图案层,所述的桥接线图案层包括复数个桥接线,且各所述的桥接线分别对应各所述的岛状绝缘结构。A preferred embodiment of the present invention provides a method for manufacturing a touch panel, including the following steps. A base is provided, which includes a sensing area. Forming a first transparent conductive layer in the sensing area of the substrate, and performing a first screen printing manufacturing process, forming a first sacrificial pattern layer on the first transparent conductive layer, and using the first sacrificial pattern layer for patterning The first transparent conductive layer is used to form a sensing pad pattern layer. A first tempering manufacturing process is performed to temper the sensing pad pattern layer. A second screen printing process is performed to form a patterned insulating layer in the sensing area of the substrate, and the patterned insulating layer includes a plurality of island-shaped insulating structures. Forming a second transparent conductive layer in the sensing area of the substrate, and performing a third screen printing manufacturing process, forming a second sacrificial pattern layer on the second transparent conductive layer, and using the second sacrificial pattern layer for patterning The second transparent conductive layer is to form a bridge line pattern layer, the bridge line pattern layer includes a plurality of bridge lines, and each of the bridge lines corresponds to each of the island-shaped insulating structures.
由于本发明制作触控面板的方法利用网印制造工艺形成用以定义感测垫图案层与桥接线图案层的牺牲图案层,因此相较于现有使用黄光微影制造工艺的方法,本发明制作触控面板的方法可大幅节省成本。Since the method for manufacturing a touch panel of the present invention utilizes a screen printing manufacturing process to form a sacrificial pattern layer for defining a sensing pad pattern layer and a bridging line pattern layer, compared with the existing method using a yellow light lithography manufacturing process, the present invention produces The touch panel approach offers significant cost savings.
附图说明 Description of drawings
图1至图9绘示了本发明的第一较佳实施例的制作触控面板的方法的示意图。1 to 9 are schematic diagrams illustrating a method for manufacturing a touch panel according to a first preferred embodiment of the present invention.
图10至图13绘示了本发明的第一较佳实施例的图案化第一透明导电层与图案化第二透明导电层的步骤的另一实施样态。10 to 13 illustrate another implementation of the steps of patterning the first transparent conductive layer and patterning the second transparent conductive layer according to the first preferred embodiment of the present invention.
图14至图20绘示了本发明的第二较佳实施例的制作触控面板的方法的示意图。14 to 20 are schematic diagrams illustrating a method for manufacturing a touch panel according to a second preferred embodiment of the present invention.
图21与图22绘示了本发明制作触控面板的方法的另两较佳实施例的示意图。FIG. 21 and FIG. 22 are schematic diagrams of other two preferred embodiments of the method for manufacturing a touch panel of the present invention.
附图标号:Figure number:
10 底材 10S 感测区10
10P 周边区 12 第一透明导电层10P
14 第一牺牲图案层 16 感测垫图案层14 The first
161 第一感测垫 162 第二感测垫161
163 连接线 18 图案化绝缘层163
181 岛状绝缘结构 20 第二透明导电层181
22 第二牺牲图案层 24 桥接线图案层22 Second
241 桥接线 26 连接导线241 Bridge wire 26 Connecting wire
27 保护层 28 第一牺牲图案层27
30 第二牺牲图案层 50 底材30 Second
50S 感测区 50P 周边区
52 第二透明导电层 54 第二牺牲图案层52 Second transparent
56 桥接线图案层 561 桥接线56 Bridge
58 图案化绝缘层 581 岛状绝缘结构58 Patterned
60 第一透明导电层 62 第一牺牲图案层60 The first transparent
64 感测垫图案层 641 第一感测垫64 Sensing
642 第二感测垫 643 连接线642
66 连接导线 67 保护层66 Connecting
80 显示面板80 display panel
具体实施方式 Detailed ways
为使熟悉本发明所属技术领域的一般技术者能更进一步了解本发明,下文特列举本发明的较佳实施例,并配合所附图式,详细说明本发明的构成内容及所欲达成的功效。另外,在下文中,”第一”、”第二”、”第三”与”第四”等用语是用以区分不同的元件或制造工艺,并不表示对其顺序的限制。In order to enable those who are familiar with the technical field of the present invention to further understand the present invention, the preferred embodiments of the present invention are listed below, together with the attached drawings, to describe in detail the composition of the present invention and the desired effects . In addition, in the following, terms such as "first", "second", "third" and "fourth" are used to distinguish different components or manufacturing processes, and do not represent a limitation on the order thereof.
请参考图1至图9。图1至图9绘示了本发明的第一较佳实施例的制作触控面板的方法的示意图,其中为清楚显示本发明的特征,图3与图8为上视示意图,图1、图2、图4至图7以及图9是沿图3的剖线A-A’方向绘示的剖面示意图。如图1所示,首先提供一底材10,且底材10至少包括一感测区10S用以设置感测元件,以及一周边区10P用以设置连接导线。接着,于底材10的感测区10S内形成一第一透明导电层12。第一透明导电层12可为各式透明导电材料构成,并利用各式薄膜技术例如物理气相沉积或化学气相沉积加以形成。举例而言,在本实施例中,第一透明导电层12是选用非晶氧化铟锡(amorphous ITO),并利用溅镀方式形成,但不以此为限。Please refer to Figure 1 to Figure 9. Fig. 1 to Fig. 9 have shown the schematic diagram of the method for making touch panel of the first preferred embodiment of the present invention, wherein in order to clearly show the feature of the present invention, Fig. 3 and Fig. 8 are top view diagrams, Fig. 1, Fig. 2. FIGS. 4 to 7 and FIG. 9 are schematic cross-sectional views along the line AA' of FIG. 3 . As shown in FIG. 1 , firstly, a
如图2所示,随后进行一第一网印制造工艺,于第一透明导电层12上形成一第一牺牲图案层14,并利用第一牺牲图案层14图案化第一透明导电层12,以形成一感测垫图案层16。在本实施例中,第一牺牲图案层14包括一图案化蚀刻阻障层(etching resistance),因此图案化第一透明导电层12的步骤包括利用图案化蚀刻阻障层作为蚀刻屏蔽进行一第一蚀刻制造工艺,以去除未被图案化蚀刻阻障层覆盖的第一透明导电层12而形成感测垫图案层16。第一蚀刻制造工艺可为例如使用草酸作为蚀刻液的湿式蚀刻制造工艺,但不以此为限,而可视第一透明导电层12的材料选择不同而选用其它蚀刻溶液,或使用干式蚀刻制造工艺。此外,为了避免感测垫图案层16于后续的蚀刻制造工艺中受损,于形成感测垫图案层16后,可选择性地进行一改质制造工艺,例如一第一回火制造工艺,以改变感测垫图案层16的型态。举例而言,本实施例的感测垫图案层16的材料原本为非晶氧化铟锡,而透过第一回火制造工艺可将感测垫图案层16的材料改质为多晶氧化铟锡(poly ITO)。As shown in FIG. 2, a first screen printing manufacturing process is then performed to form a first
如图3与图4所示,接着移除第一牺牲图案层14,以曝露出感测垫图案层16。感测垫图案层16包括复数个感测垫,例如复数个第一感测垫161与复数个第二感测垫162,以及复数个连接线163,其中第一感测垫161沿一第一方向(例如图3的垂直方向)排列,且位于同一行的两相邻第一感测垫161通过连接线163而彼此连接,而第二感测垫162沿一第二方向(例如图3的水平方向)排列,且位于同一列的第二感测垫162彼此未连接。此外,在本实施例中,相邻的两感测垫,例如相邻的第一感测垫161与第二感测垫162具有一间隙G,且间隙G大体上介于30微米与500微米之间,但不以此为限。As shown in FIGS. 3 and 4 , the first
如图5所示,随后进行一第二网印制造工艺,以于底材10的感测区10S内形成一图案化绝缘层18,其中图案化绝缘层18包括复数个岛状绝缘结构(insulating island)181,大体上分别对应于位于同一列的两相邻第二感测垫162之间的位置,并且包覆对应的连接线163。As shown in FIG. 5 , a second screen printing process is then performed to form a patterned
如图6所示,接着于底材10的感测区10S内形成一第二透明导电层20。第二透明导电层20可为各式透明导电材料构成,并利用各式薄膜技术例如物理气相沉积或化学气相沉积加以形成。举例而言,在本实施例中,第一透明导电层12是选用非晶氧化铟锡,并利用溅镀方式形成,但不以此为限。As shown in FIG. 6 , a second transparent
如图7所示,随后进行一第三网印制造工艺,于第二透明导电层20上形成一第二牺牲图案层22,并利用第二牺牲图案层22图案化第二透明导电层20,以形成一桥接线图案层24。在本实施例中,第二牺牲图案层22包括一图案化蚀刻阻障层,因此图案化第二透明导电层20的步骤包括利用图案化蚀刻阻障层作为蚀刻屏蔽进行一第二蚀刻制造工艺,以去除未被图案化蚀刻阻障层覆盖的第二透明导电层20而形成桥接线图案层24。值得说明的是,由于本实施例的感测垫图案层16在经历了第一回火制造工艺后,其材料已转变为多晶氧化铟锡,因此第二蚀刻制造工艺仅会针对由非晶氧化铟锡构成的第二透明导电层20进行蚀刻,而不会对由多晶氧化铟锡构成的第一透明导电层16进行蚀刻,故可有效避免第一透明导电层16于第二蚀刻制造工艺的过程中受到损伤。As shown in FIG. 7, a third screen printing manufacturing process is then performed to form a second
如图8与图9所示,接着移除第二牺牲图案层22,以曝露出桥接线图案层24,其中桥接线图案层24包括复数个桥接线241,分别对应各岛状绝缘结构181并突出于岛状绝缘结构181而与两相邻第二感测垫162接触,藉此两相邻第二感测垫162可经由桥接线241电性连接。在本实施例中,各桥接线241的线宽大体上介于50微米与500微米之间,但不以此为限。另外,各岛状绝缘结构181的侧边与相对应的桥接线241的对应的侧边的距离D大体上介于50微米与500微米之间,但不以此为限。此外,于形成桥接线图案层24之后,可选择性地进行一第二回火制造工艺,以改变桥接线图案层24的型态,例如将桥接线图案层24的材料由非晶氧化铟锡改质为多晶氧化铟锡。随后,进行一第四网印制造工艺,以于底材10的周边区10P内形成复数条与感测垫图案层16电性连接的连接导线26,藉此将感测垫图案层16所感测到的输入信号传递至感测电路(图未示)。在本实施例中,连接导线26可为例如银导线,且连接导线26的线宽大体上介于10微米与300微米之间,而厚度大体上介于1微米与10微米之间,但不以此为限。连接导线26亦可为其它导电材质构成的单层或复合层导线,且其宽度与厚度亦可作适度调整。之后,于底材10上形成一保护层27(图7未示)。As shown in FIG. 8 and FIG. 9 , the second
在本发明制作触控面板的方法中,图案化第一透明导电层12与图案化第二透明导电层20的步骤并不限定于使用图案化蚀刻阻障层,而可有其它实施样态。请参考图10至图13,并请一并参考图1至图9。图10至图13绘示了本发明的第一较佳实施例的图案化第一透明导电层与图案化第二透明导电层的步骤的另一实施样态。图案化第一透明导电层的制造工艺可依下列步骤进行。如图10所示,于形成第一透明导电层12之后,进行第一网印制造工艺,于第一透明导电层12上形成一第一牺牲图案层28。不同于图2的第一牺牲图案层14,本实施样态的第一牺牲图案层28是选用一图案化蚀刻浆料层(etching paste)。如图11所示,接着利用图案化蚀刻浆料层蚀刻位于图案化蚀刻浆料层下方的第一透明导电层12,以定义出第一感测垫161、第二感测垫162与连接线163。随后再去除第一牺牲图案层28。另外,图案化第二透明导电层的制造工艺可依下列步骤进行。如图12所示,于形成第二透明导电层20之后,进行第三网印制造工艺,于第二透明导电层20上形成一第二牺牲图案层30。不同于图7的第二牺牲图案层22,本实施样态的第二牺牲图案层30是选用图案化蚀刻浆料层。如图13所示,接着利用图案化蚀刻浆料层蚀刻位于图案化蚀刻浆料层下方的第二透明导电层20,以定义出桥接线图案层24。随后再去除第二牺牲图案层30。In the method for manufacturing a touch panel of the present invention, the steps of patterning the first transparent
请参考图14至图20。图14至图20绘示了本发明的第二较佳实施例的制作触控面板的方法的示意图。为了简化说明,对于第二实施例与第一实施例的相同部分不再作重复赘述,且为清楚显示本发明的特征,图15与图19为上视示意图,图14、图16至图18,以及图20是沿图15的剖线B-B’方向绘示的剖面示意图。如图14所示,首先提供一底材50,且底材50至少包括一感测区50S用以设置感测元件,以及一周边区50P用以设置连接导线。接着,于底材50的感测区50S内形成一第二透明导电层52。随后,进行一第三网印制造工艺,于第二透明导电层52上形成一第二牺牲图案层54,并利用第二牺牲图案层54图案化第二透明导电层52,以形成一桥接线图案层56。在本实施例中,第二牺牲图案层54是选用图案化蚀刻阻障层,并利用图案化蚀刻阻障层作为蚀刻屏蔽进行一第二蚀刻制造工艺,以去除未被图案化蚀刻阻障层覆盖的第二透明导电层52而形成桥接线图案层56。然而第二牺牲图案层54不限于选用图案化蚀刻阻障层,亦可选用图案化蚀刻浆料层。Please refer to Figure 14 to Figure 20. 14 to 20 are schematic diagrams illustrating a method for manufacturing a touch panel according to a second preferred embodiment of the present invention. In order to simplify the description, the same parts of the second embodiment and the first embodiment will not be repeated, and in order to clearly show the features of the present invention, Fig. 15 and Fig. 19 are schematic top views, Fig. 14, Fig. 16 to Fig. 18 , and FIG. 20 is a schematic cross-sectional view drawn along the section line BB' in FIG. 15 . As shown in FIG. 14 , firstly, a
如图15与图16所示,接着移除第二牺牲图案层54,以曝露出桥接线图案层56,其中桥接线图案层56包括复数个桥接线561。另外,于形成桥接线图案层56之后,可选择性地进行一第二回火制造工艺。随后,进行一第二网印制造工艺,以于底材50的感测区50S内形成一图案化绝缘层58,其中图案化绝缘层58包括复数个岛状绝缘结构581,大体上分别对应各桥接线561,且岛状绝缘结构581的长度小于桥接线561的长度,因此桥接线561的两端会曝露于岛状绝缘结构581之外。As shown in FIGS. 15 and 16 , the second
如图17所示,接着于底材50的感测区50S内形成一第一透明导电层60。如图18所示,随后进行一第一网印制造工艺,于第一透明导电层60上形成一第一牺牲图案层62,并利用第一牺牲图案层62图案化第一透明导电层60。在本实施例中,第一牺牲图案层62是选用图案化蚀刻阻障层,并利用图案化蚀刻阻障层作为蚀刻屏蔽进行一第一蚀刻制造工艺,以去除未被图案化蚀刻阻障层覆盖的第一透明导电层60而形成感测垫图案层64。第一牺牲图案层62不限于选用图案化蚀刻阻障层,亦可选用图案化蚀刻浆料层。As shown in FIG. 17 , a first transparent
如图19与图20所示,接着移除第一牺牲图案层62,以曝露出一感测垫图案层64。感测垫图案层64包括复数个感测垫,例如复数个第一感测垫641与复数个第二感测垫642,以及复数个连接线643,其中第一感测垫641是沿一第一方向(例如图19的垂直方向)排列,且位于同一行的两相邻第一感测垫641通过连接线643而彼此连接,而第二感测垫642是沿一第二方向(例如图19的水平方向)排列,且位于同一列的两相邻第二感测垫642通过相对应的桥接线561而彼此连接。桥接线561被感测垫图案层64所完全包覆,藉此可避免桥接线561在蚀刻感测垫图案层64时被蚀刻到。此外,于形成感测垫图案层64之后,可选择性地进行一第一回火制造工艺。随后,进行一第四网印制造工艺,以于底材50的周边区50P内形成复数条与感测垫图案层64电性连接的连接导线66。之后,于底材50上形成一保护层67(图17未示)。As shown in FIGS. 19 and 20 , the first
本发明制作触控面板的方法所使用的底材可为各式软质基板,或硬质基板例如玻璃基板、塑料基板或石英基板等。另外,本发明制作触控面板的方法亦可与显示面板整合以制作出触控显示面板。请参考图21与图22。图21与图22绘示了本发明制作触控面板的方法的另两较佳实施例的示意图。如图21所示,触控面板的底材50可为一辅助基板,并于触控面板制作完成后贴附至一显示面板80(例如一液晶显示面板)上。在另一实施例中,如第22图所示,触控面板可与显示面板80共享同一底材(基板),亦即触控面板的底材50即为显示面板80的基板,例如一彩色滤光玻璃基板。于触控面板制作完成后,再将玻璃基板与其它元件组装成一触控显示面板。The substrate used in the method of manufacturing the touch panel of the present invention can be various soft substrates, or hard substrates such as glass substrates, plastic substrates or quartz substrates. In addition, the method for manufacturing a touch panel of the present invention can also be integrated with a display panel to manufacture a touch display panel. Please refer to Figure 21 and Figure 22. FIG. 21 and FIG. 22 are schematic diagrams of other two preferred embodiments of the method for manufacturing a touch panel of the present invention. As shown in FIG. 21 , the
综上所述,本发明制作触控面板的方法利用网印制造工艺形成用以定义感测垫图案层与桥接线图案层的牺牲图案层,因此相较于现有使用黄光微影制造工艺的方法,本发明制作触控面板的方法可大幅节省成本。In summary, the method for manufacturing a touch panel of the present invention uses a screen printing manufacturing process to form a sacrificial pattern layer for defining a sensing pad pattern layer and a bridge line pattern layer, so compared with the existing method using a yellow light lithography manufacturing process , The method for manufacturing the touch panel of the present invention can greatly save costs.
以上所述仅为本发明的较佳实施例,凡依本发明权利要求范围所做的均等变化与修饰,皆应属本发明的涵盖范围。The above descriptions are only preferred embodiments of the present invention, and all equivalent changes and modifications made according to the claims of the present invention shall fall within the scope of the present invention.
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