[go: up one dir, main page]

CN101751181B - How to make a touch panel - Google Patents

How to make a touch panel Download PDF

Info

Publication number
CN101751181B
CN101751181B CN2009102627825A CN200910262782A CN101751181B CN 101751181 B CN101751181 B CN 101751181B CN 2009102627825 A CN2009102627825 A CN 2009102627825A CN 200910262782 A CN200910262782 A CN 200910262782A CN 101751181 B CN101751181 B CN 101751181B
Authority
CN
China
Prior art keywords
layer
making contact
contact panel
transparency conducting
patterned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN2009102627825A
Other languages
Chinese (zh)
Other versions
CN101751181A (en
Inventor
吕英齐
黄淑惠
周诗博
李锡烈
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AUO Corp
Original Assignee
AU Optronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AU Optronics Corp filed Critical AU Optronics Corp
Priority to CN2009102627825A priority Critical patent/CN101751181B/en
Publication of CN101751181A publication Critical patent/CN101751181A/en
Application granted granted Critical
Publication of CN101751181B publication Critical patent/CN101751181B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Position Input By Displaying (AREA)

Abstract

The invention relates to a method for manufacturing a touch panel, which comprises the following steps. A substrate is provided. A first transparent conductive layer is formed on a substrate, a first screen printing manufacturing process is performed, a first sacrificial pattern layer is formed on the first transparent conductive layer, and the first transparent conductive layer is patterned by the first sacrificial pattern layer to form a sensing pad pattern layer. And performing a second screen printing process to form a patterned insulating layer on the substrate. Forming a second transparent conductive layer on the substrate, performing a third screen printing process to form a second sacrificial pattern layer on the second transparent conductive layer, and patterning the second transparent conductive layer by using the second sacrificial pattern layer to form a bridge line pattern layer.

Description

制作触控面板的方法How to make a touch panel

技术领域 technical field

本发明是关于一种制作触控面板的方法,尤指一种利用网印制造工艺形成触控面板的感测垫图案层、图案化绝缘层与桥接线图案层的方法。The invention relates to a method for manufacturing a touch panel, in particular to a method for forming a sensing pad pattern layer, a patterned insulating layer and a bridge line pattern layer of a touch panel by using a screen printing process.

背景技术 Background technique

在现今各式消费性电子产品的市场中,行动电话(mobile phone)、卫星导航系统(GPS)与数字影音播放器等可携式电子产品已广泛的使用触控面板(touch panel)作为人机数据沟通接口。由于目前消费性电子产品的设计讲求轻薄短小,在产品设计上希望能节省占空间的按键与鼠标等传统输入装置,故采用触控方式输入,因此触控面板已成为关键的零组件之一。In today's market of various consumer electronic products, portable electronic products such as mobile phones, satellite navigation systems (GPS) and digital audio-visual players have widely used touch panels as man-machine Data communication interface. Since the current design of consumer electronic products emphasizes thinness and compactness, traditional input devices such as buttons and mice are expected to save space in product design, so touch input is adopted, so touch panels have become one of the key components.

以触控原理来作区分,现行触控面板主要可区分为电阻/接触式触控面板(resistance/contact touch panel)与电容式触控面板(capacitive touch panel)两种类型,而其中电容式触控面板为目前市场上的主流产品。现有的电容式触控面板的感测垫、绝缘层与桥接线等膜层以黄光微影方式加以形成,因此使得制作成本昂贵而影响了电容式触控面板的普及度。Based on the principle of touch control, current touch panels can be divided into two types: resistance/contact touch panel and capacitive touch panel. The control panel is the mainstream product on the market at present. In the existing capacitive touch panel, layers such as sensing pads, insulating layers, and bridging wires are formed by photolithography, which makes the production cost expensive and affects the popularity of the capacitive touch panel.

发明内容 Contents of the invention

本发明的目的之一在于提供一种制作触控面板的方法,以节省触控面板的制作成本。One of the objectives of the present invention is to provide a method for manufacturing a touch panel, so as to save the manufacturing cost of the touch panel.

本发明的一较佳实施例提供一种制作触控面板的方法,包括下列步骤。提供一底材(base),其包括一感测区。于底材的感测区内形成一第一透明导电层,且进行一第一网印制造工艺,于第一透明导电层上形成一第一牺牲图案层,并利用第一牺牲图案层图案化第一透明导电层以形成一感测垫图案层。进行一第一回火制造工艺,对所述的感测垫图案层进行回火。进行一第二网印制造工艺,于底材的感测区内形成一图案化绝缘层,所述的图案化绝缘层包括复数个岛状绝缘结构。于底材的感测区内形成一第二透明导电层,且进行一第三网印制造工艺,于第二透明导电层上形成一第二牺牲图案层,并利用第二牺牲图案层图案化第二透明导电层,以形成一桥接线图案层,所述的桥接线图案层包括复数个桥接线,且各所述的桥接线分别对应各所述的岛状绝缘结构。A preferred embodiment of the present invention provides a method for manufacturing a touch panel, including the following steps. A base is provided, which includes a sensing area. Forming a first transparent conductive layer in the sensing area of the substrate, and performing a first screen printing manufacturing process, forming a first sacrificial pattern layer on the first transparent conductive layer, and using the first sacrificial pattern layer for patterning The first transparent conductive layer is used to form a sensing pad pattern layer. A first tempering manufacturing process is performed to temper the sensing pad pattern layer. A second screen printing process is performed to form a patterned insulating layer in the sensing area of the substrate, and the patterned insulating layer includes a plurality of island-shaped insulating structures. Forming a second transparent conductive layer in the sensing area of the substrate, and performing a third screen printing manufacturing process, forming a second sacrificial pattern layer on the second transparent conductive layer, and using the second sacrificial pattern layer for patterning The second transparent conductive layer is to form a bridge line pattern layer, the bridge line pattern layer includes a plurality of bridge lines, and each of the bridge lines corresponds to each of the island-shaped insulating structures.

由于本发明制作触控面板的方法利用网印制造工艺形成用以定义感测垫图案层与桥接线图案层的牺牲图案层,因此相较于现有使用黄光微影制造工艺的方法,本发明制作触控面板的方法可大幅节省成本。Since the method for manufacturing a touch panel of the present invention utilizes a screen printing manufacturing process to form a sacrificial pattern layer for defining a sensing pad pattern layer and a bridging line pattern layer, compared with the existing method using a yellow light lithography manufacturing process, the present invention produces The touch panel approach offers significant cost savings.

附图说明 Description of drawings

图1至图9绘示了本发明的第一较佳实施例的制作触控面板的方法的示意图。1 to 9 are schematic diagrams illustrating a method for manufacturing a touch panel according to a first preferred embodiment of the present invention.

图10至图13绘示了本发明的第一较佳实施例的图案化第一透明导电层与图案化第二透明导电层的步骤的另一实施样态。10 to 13 illustrate another implementation of the steps of patterning the first transparent conductive layer and patterning the second transparent conductive layer according to the first preferred embodiment of the present invention.

图14至图20绘示了本发明的第二较佳实施例的制作触控面板的方法的示意图。14 to 20 are schematic diagrams illustrating a method for manufacturing a touch panel according to a second preferred embodiment of the present invention.

图21与图22绘示了本发明制作触控面板的方法的另两较佳实施例的示意图。FIG. 21 and FIG. 22 are schematic diagrams of other two preferred embodiments of the method for manufacturing a touch panel of the present invention.

附图标号:Figure number:

10         底材              10S    感测区10 Substrate 10S Sensing area

10P        周边区            12     第一透明导电层10P Peripheral area 12 First transparent conductive layer

14         第一牺牲图案层    16     感测垫图案层14 The first sacrificial pattern layer 16 The sensing pad pattern layer

161        第一感测垫        162    第二感测垫161 First Sensing Pad 162 Second Sensing Pad

163        连接线            18     图案化绝缘层163 Connection wire 18 Patterned insulating layer

181        岛状绝缘结构      20     第二透明导电层181 Island insulation structure 20 Second transparent conductive layer

22     第二牺牲图案层        24     桥接线图案层22 Second sacrificial pattern layer 24 Bridge line pattern layer

241    桥接线                26     连接导线241 Bridge wire 26 Connecting wire

27     保护层                28     第一牺牲图案层27 Protective layer 28 First sacrificial pattern layer

30     第二牺牲图案层        50     底材30 Second sacrificial pattern layer 50 Substrate

50S    感测区                50P    周边区50S Sensing area 50P Surrounding area

52     第二透明导电层        54     第二牺牲图案层52 Second transparent conductive layer 54 Second sacrificial pattern layer

56     桥接线图案层          561    桥接线56 Bridge line pattern layer 561 Bridge line

58     图案化绝缘层          581    岛状绝缘结构58 Patterned insulating layer 581 Island-shaped insulating structure

60     第一透明导电层        62     第一牺牲图案层60 The first transparent conductive layer 62 The first sacrificial pattern layer

64     感测垫图案层          641    第一感测垫64 Sensing pad pattern layer 641 The first sensing pad

642    第二感测垫            643    连接线642 Second sensing pad 643 Connection wire

66     连接导线              67     保护层66 Connecting wires 67 Protective layer

80     显示面板80 display panel

具体实施方式 Detailed ways

为使熟悉本发明所属技术领域的一般技术者能更进一步了解本发明,下文特列举本发明的较佳实施例,并配合所附图式,详细说明本发明的构成内容及所欲达成的功效。另外,在下文中,”第一”、”第二”、”第三”与”第四”等用语是用以区分不同的元件或制造工艺,并不表示对其顺序的限制。In order to enable those who are familiar with the technical field of the present invention to further understand the present invention, the preferred embodiments of the present invention are listed below, together with the attached drawings, to describe in detail the composition of the present invention and the desired effects . In addition, in the following, terms such as "first", "second", "third" and "fourth" are used to distinguish different components or manufacturing processes, and do not represent a limitation on the order thereof.

请参考图1至图9。图1至图9绘示了本发明的第一较佳实施例的制作触控面板的方法的示意图,其中为清楚显示本发明的特征,图3与图8为上视示意图,图1、图2、图4至图7以及图9是沿图3的剖线A-A’方向绘示的剖面示意图。如图1所示,首先提供一底材10,且底材10至少包括一感测区10S用以设置感测元件,以及一周边区10P用以设置连接导线。接着,于底材10的感测区10S内形成一第一透明导电层12。第一透明导电层12可为各式透明导电材料构成,并利用各式薄膜技术例如物理气相沉积或化学气相沉积加以形成。举例而言,在本实施例中,第一透明导电层12是选用非晶氧化铟锡(amorphous ITO),并利用溅镀方式形成,但不以此为限。Please refer to Figure 1 to Figure 9. Fig. 1 to Fig. 9 have shown the schematic diagram of the method for making touch panel of the first preferred embodiment of the present invention, wherein in order to clearly show the feature of the present invention, Fig. 3 and Fig. 8 are top view diagrams, Fig. 1, Fig. 2. FIGS. 4 to 7 and FIG. 9 are schematic cross-sectional views along the line AA' of FIG. 3 . As shown in FIG. 1 , firstly, a substrate 10 is provided, and the substrate 10 at least includes a sensing region 10S for disposing sensing elements, and a peripheral region 10P for disposing connecting wires. Next, a first transparent conductive layer 12 is formed in the sensing region 10S of the substrate 10 . The first transparent conductive layer 12 can be made of various transparent conductive materials, and is formed by various thin film techniques such as physical vapor deposition or chemical vapor deposition. For example, in this embodiment, the first transparent conductive layer 12 is made of amorphous indium tin oxide (amorphous ITO) and formed by sputtering, but it is not limited thereto.

如图2所示,随后进行一第一网印制造工艺,于第一透明导电层12上形成一第一牺牲图案层14,并利用第一牺牲图案层14图案化第一透明导电层12,以形成一感测垫图案层16。在本实施例中,第一牺牲图案层14包括一图案化蚀刻阻障层(etching resistance),因此图案化第一透明导电层12的步骤包括利用图案化蚀刻阻障层作为蚀刻屏蔽进行一第一蚀刻制造工艺,以去除未被图案化蚀刻阻障层覆盖的第一透明导电层12而形成感测垫图案层16。第一蚀刻制造工艺可为例如使用草酸作为蚀刻液的湿式蚀刻制造工艺,但不以此为限,而可视第一透明导电层12的材料选择不同而选用其它蚀刻溶液,或使用干式蚀刻制造工艺。此外,为了避免感测垫图案层16于后续的蚀刻制造工艺中受损,于形成感测垫图案层16后,可选择性地进行一改质制造工艺,例如一第一回火制造工艺,以改变感测垫图案层16的型态。举例而言,本实施例的感测垫图案层16的材料原本为非晶氧化铟锡,而透过第一回火制造工艺可将感测垫图案层16的材料改质为多晶氧化铟锡(poly ITO)。As shown in FIG. 2, a first screen printing manufacturing process is then performed to form a first sacrificial pattern layer 14 on the first transparent conductive layer 12, and utilize the first sacrificial pattern layer 14 to pattern the first transparent conductive layer 12, To form a sensing pad pattern layer 16 . In this embodiment, the first sacrificial pattern layer 14 includes a patterned etching barrier layer (etching resistance), so the step of patterning the first transparent conductive layer 12 includes using the patterned etching barrier layer as an etching mask to perform a first An etching process to remove the first transparent conductive layer 12 not covered by the patterned etch barrier layer to form the sensing pad pattern layer 16 . The first etching manufacturing process can be, for example, a wet etching manufacturing process using oxalic acid as an etching solution, but it is not limited thereto, and depending on the material selection of the first transparent conductive layer 12, other etching solutions can be selected, or dry etching can be used. manufacturing process. In addition, in order to prevent the sensing pad pattern layer 16 from being damaged in the subsequent etching process, after the sensing pad pattern layer 16 is formed, a modification process, such as a first tempering process, can be selectively performed, To change the type of the sensing pad pattern layer 16 . For example, the material of the sensing pad pattern layer 16 in this embodiment is originally amorphous indium tin oxide, but the material of the sensing pad pattern layer 16 can be modified to polycrystalline indium oxide through the first tempering manufacturing process Tin (poly ITO).

如图3与图4所示,接着移除第一牺牲图案层14,以曝露出感测垫图案层16。感测垫图案层16包括复数个感测垫,例如复数个第一感测垫161与复数个第二感测垫162,以及复数个连接线163,其中第一感测垫161沿一第一方向(例如图3的垂直方向)排列,且位于同一行的两相邻第一感测垫161通过连接线163而彼此连接,而第二感测垫162沿一第二方向(例如图3的水平方向)排列,且位于同一列的第二感测垫162彼此未连接。此外,在本实施例中,相邻的两感测垫,例如相邻的第一感测垫161与第二感测垫162具有一间隙G,且间隙G大体上介于30微米与500微米之间,但不以此为限。As shown in FIGS. 3 and 4 , the first sacrificial pattern layer 14 is then removed to expose the sensing pad pattern layer 16 . The sensing pad pattern layer 16 includes a plurality of sensing pads, such as a plurality of first sensing pads 161 and a plurality of second sensing pads 162, and a plurality of connection lines 163, wherein the first sensing pads 161 are along a first direction (such as the vertical direction in FIG. 3 ), and two adjacent first sensing pads 161 in the same row are connected to each other by connecting wires 163, and the second sensing pads 162 are along a second direction (such as the vertical direction in FIG. 3 ). horizontal direction), and the second sensing pads 162 in the same row are not connected to each other. In addition, in this embodiment, two adjacent sensing pads, for example, the adjacent first sensing pad 161 and the second sensing pad 162 have a gap G, and the gap G is generally between 30 microns and 500 microns between, but not limited to.

如图5所示,随后进行一第二网印制造工艺,以于底材10的感测区10S内形成一图案化绝缘层18,其中图案化绝缘层18包括复数个岛状绝缘结构(insulating island)181,大体上分别对应于位于同一列的两相邻第二感测垫162之间的位置,并且包覆对应的连接线163。As shown in FIG. 5 , a second screen printing process is then performed to form a patterned insulating layer 18 in the sensing region 10S of the substrate 10, wherein the patterned insulating layer 18 includes a plurality of insulating island structures (insulating island) 181 generally correspond to positions between two adjacent second sensing pads 162 in the same row, and cover the corresponding connection lines 163 .

如图6所示,接着于底材10的感测区10S内形成一第二透明导电层20。第二透明导电层20可为各式透明导电材料构成,并利用各式薄膜技术例如物理气相沉积或化学气相沉积加以形成。举例而言,在本实施例中,第一透明导电层12是选用非晶氧化铟锡,并利用溅镀方式形成,但不以此为限。As shown in FIG. 6 , a second transparent conductive layer 20 is then formed in the sensing region 10S of the substrate 10 . The second transparent conductive layer 20 can be made of various transparent conductive materials, and is formed by various thin film techniques such as physical vapor deposition or chemical vapor deposition. For example, in this embodiment, the first transparent conductive layer 12 is made of amorphous indium tin oxide and formed by sputtering, but it is not limited thereto.

如图7所示,随后进行一第三网印制造工艺,于第二透明导电层20上形成一第二牺牲图案层22,并利用第二牺牲图案层22图案化第二透明导电层20,以形成一桥接线图案层24。在本实施例中,第二牺牲图案层22包括一图案化蚀刻阻障层,因此图案化第二透明导电层20的步骤包括利用图案化蚀刻阻障层作为蚀刻屏蔽进行一第二蚀刻制造工艺,以去除未被图案化蚀刻阻障层覆盖的第二透明导电层20而形成桥接线图案层24。值得说明的是,由于本实施例的感测垫图案层16在经历了第一回火制造工艺后,其材料已转变为多晶氧化铟锡,因此第二蚀刻制造工艺仅会针对由非晶氧化铟锡构成的第二透明导电层20进行蚀刻,而不会对由多晶氧化铟锡构成的第一透明导电层16进行蚀刻,故可有效避免第一透明导电层16于第二蚀刻制造工艺的过程中受到损伤。As shown in FIG. 7, a third screen printing manufacturing process is then performed to form a second sacrificial pattern layer 22 on the second transparent conductive layer 20, and use the second sacrificial pattern layer 22 to pattern the second transparent conductive layer 20, To form a bridge line pattern layer 24 . In this embodiment, the second sacrificial pattern layer 22 includes a patterned etching barrier layer, so the step of patterning the second transparent conductive layer 20 includes performing a second etching process using the patterned etching barrier layer as an etching mask , to remove the second transparent conductive layer 20 not covered by the patterned etch barrier layer to form the bridging line pattern layer 24 . It is worth noting that since the material of the sensing pad pattern layer 16 of this embodiment has undergone the first tempering manufacturing process, its material has been transformed into polycrystalline indium tin oxide, so the second etching manufacturing process will only target The second transparent conductive layer 20 made of indium tin oxide is etched without etching the first transparent conductive layer 16 made of polycrystalline indium tin oxide, so it can effectively prevent the first transparent conductive layer 16 from being produced during the second etching process. Damaged during the process.

如图8与图9所示,接着移除第二牺牲图案层22,以曝露出桥接线图案层24,其中桥接线图案层24包括复数个桥接线241,分别对应各岛状绝缘结构181并突出于岛状绝缘结构181而与两相邻第二感测垫162接触,藉此两相邻第二感测垫162可经由桥接线241电性连接。在本实施例中,各桥接线241的线宽大体上介于50微米与500微米之间,但不以此为限。另外,各岛状绝缘结构181的侧边与相对应的桥接线241的对应的侧边的距离D大体上介于50微米与500微米之间,但不以此为限。此外,于形成桥接线图案层24之后,可选择性地进行一第二回火制造工艺,以改变桥接线图案层24的型态,例如将桥接线图案层24的材料由非晶氧化铟锡改质为多晶氧化铟锡。随后,进行一第四网印制造工艺,以于底材10的周边区10P内形成复数条与感测垫图案层16电性连接的连接导线26,藉此将感测垫图案层16所感测到的输入信号传递至感测电路(图未示)。在本实施例中,连接导线26可为例如银导线,且连接导线26的线宽大体上介于10微米与300微米之间,而厚度大体上介于1微米与10微米之间,但不以此为限。连接导线26亦可为其它导电材质构成的单层或复合层导线,且其宽度与厚度亦可作适度调整。之后,于底材10上形成一保护层27(图7未示)。As shown in FIG. 8 and FIG. 9 , the second sacrificial pattern layer 22 is then removed to expose the bridge line pattern layer 24, wherein the bridge line pattern layer 24 includes a plurality of bridge lines 241 corresponding to each island-shaped insulating structure 181 and It protrudes from the island-shaped insulating structure 181 to contact with two adjacent second sensing pads 162 , so that the two adjacent second sensing pads 162 can be electrically connected through the bridge line 241 . In this embodiment, the line width of each bridging line 241 is generally between 50 microns and 500 microns, but not limited thereto. In addition, the distance D between the side of each island-shaped insulating structure 181 and the corresponding side of the corresponding bridge line 241 is generally between 50 microns and 500 microns, but not limited thereto. In addition, after forming the bridge line pattern layer 24, a second tempering process can be optionally performed to change the type of the bridge line pattern layer 24, for example, the material of the bridge line pattern layer 24 is changed from amorphous indium tin oxide Modified to polycrystalline indium tin oxide. Subsequently, a fourth screen printing manufacturing process is carried out to form a plurality of connecting wires 26 electrically connected to the sensing pad pattern layer 16 in the peripheral region 10P of the substrate 10, so as to sense the sensing pad pattern layer 16. The received input signal is transmitted to the sensing circuit (not shown). In this embodiment, the connecting wire 26 can be, for example, a silver wire, and the width of the connecting wire 26 is generally between 10 microns and 300 microns, and the thickness is generally between 1 micron and 10 microns, but not This is the limit. The connecting wire 26 can also be a single-layer or composite-layer wire made of other conductive materials, and its width and thickness can also be appropriately adjusted. After that, a protection layer 27 (not shown in FIG. 7 ) is formed on the substrate 10 .

在本发明制作触控面板的方法中,图案化第一透明导电层12与图案化第二透明导电层20的步骤并不限定于使用图案化蚀刻阻障层,而可有其它实施样态。请参考图10至图13,并请一并参考图1至图9。图10至图13绘示了本发明的第一较佳实施例的图案化第一透明导电层与图案化第二透明导电层的步骤的另一实施样态。图案化第一透明导电层的制造工艺可依下列步骤进行。如图10所示,于形成第一透明导电层12之后,进行第一网印制造工艺,于第一透明导电层12上形成一第一牺牲图案层28。不同于图2的第一牺牲图案层14,本实施样态的第一牺牲图案层28是选用一图案化蚀刻浆料层(etching paste)。如图11所示,接着利用图案化蚀刻浆料层蚀刻位于图案化蚀刻浆料层下方的第一透明导电层12,以定义出第一感测垫161、第二感测垫162与连接线163。随后再去除第一牺牲图案层28。另外,图案化第二透明导电层的制造工艺可依下列步骤进行。如图12所示,于形成第二透明导电层20之后,进行第三网印制造工艺,于第二透明导电层20上形成一第二牺牲图案层30。不同于图7的第二牺牲图案层22,本实施样态的第二牺牲图案层30是选用图案化蚀刻浆料层。如图13所示,接着利用图案化蚀刻浆料层蚀刻位于图案化蚀刻浆料层下方的第二透明导电层20,以定义出桥接线图案层24。随后再去除第二牺牲图案层30。In the method for manufacturing a touch panel of the present invention, the steps of patterning the first transparent conductive layer 12 and patterning the second transparent conductive layer 20 are not limited to using a patterned etching barrier layer, and there are other implementations. Please refer to FIG. 10 to FIG. 13 , and please also refer to FIG. 1 to FIG. 9 . 10 to 13 illustrate another implementation of the steps of patterning the first transparent conductive layer and patterning the second transparent conductive layer according to the first preferred embodiment of the present invention. The manufacturing process of patterning the first transparent conductive layer can be performed according to the following steps. As shown in FIG. 10 , after the first transparent conductive layer 12 is formed, a first screen printing process is performed to form a first sacrificial pattern layer 28 on the first transparent conductive layer 12 . Different from the first sacrificial pattern layer 14 in FIG. 2 , the first sacrificial pattern layer 28 of this embodiment is a patterned etching paste layer. As shown in FIG. 11 , the first transparent conductive layer 12 located under the patterned etching slurry layer is then etched with the patterned etching slurry layer to define the first sensing pad 161, the second sensing pad 162 and the connection lines. 163. Then the first sacrificial pattern layer 28 is removed. In addition, the manufacturing process of patterning the second transparent conductive layer can be performed according to the following steps. As shown in FIG. 12 , after forming the second transparent conductive layer 20 , a third screen printing process is performed to form a second sacrificial pattern layer 30 on the second transparent conductive layer 20 . Different from the second sacrificial pattern layer 22 in FIG. 7 , the second sacrificial pattern layer 30 of this embodiment is a patterned etching slurry layer. As shown in FIG. 13 , the second transparent conductive layer 20 located under the patterned etching slurry layer is then etched by using the patterned etching slurry layer to define the bridging line pattern layer 24 . Then the second sacrificial pattern layer 30 is removed.

请参考图14至图20。图14至图20绘示了本发明的第二较佳实施例的制作触控面板的方法的示意图。为了简化说明,对于第二实施例与第一实施例的相同部分不再作重复赘述,且为清楚显示本发明的特征,图15与图19为上视示意图,图14、图16至图18,以及图20是沿图15的剖线B-B’方向绘示的剖面示意图。如图14所示,首先提供一底材50,且底材50至少包括一感测区50S用以设置感测元件,以及一周边区50P用以设置连接导线。接着,于底材50的感测区50S内形成一第二透明导电层52。随后,进行一第三网印制造工艺,于第二透明导电层52上形成一第二牺牲图案层54,并利用第二牺牲图案层54图案化第二透明导电层52,以形成一桥接线图案层56。在本实施例中,第二牺牲图案层54是选用图案化蚀刻阻障层,并利用图案化蚀刻阻障层作为蚀刻屏蔽进行一第二蚀刻制造工艺,以去除未被图案化蚀刻阻障层覆盖的第二透明导电层52而形成桥接线图案层56。然而第二牺牲图案层54不限于选用图案化蚀刻阻障层,亦可选用图案化蚀刻浆料层。Please refer to Figure 14 to Figure 20. 14 to 20 are schematic diagrams illustrating a method for manufacturing a touch panel according to a second preferred embodiment of the present invention. In order to simplify the description, the same parts of the second embodiment and the first embodiment will not be repeated, and in order to clearly show the features of the present invention, Fig. 15 and Fig. 19 are schematic top views, Fig. 14, Fig. 16 to Fig. 18 , and FIG. 20 is a schematic cross-sectional view drawn along the section line BB' in FIG. 15 . As shown in FIG. 14 , firstly, a substrate 50 is provided, and the substrate 50 at least includes a sensing area 50S for disposing sensing elements, and a peripheral area 50P for disposing connecting wires. Next, a second transparent conductive layer 52 is formed in the sensing region 50S of the substrate 50 . Subsequently, a third screen printing process is performed to form a second sacrificial pattern layer 54 on the second transparent conductive layer 52, and use the second sacrificial pattern layer 54 to pattern the second transparent conductive layer 52 to form a bridging line Pattern layer 56 . In this embodiment, the second sacrificial pattern layer 54 is a patterned etching barrier layer, and a second etching process is performed using the patterned etching barrier layer as an etching mask to remove the unpatterned etching barrier layer. Covering the second transparent conductive layer 52 to form a bridge line pattern layer 56 . However, the second sacrificial pattern layer 54 is not limited to use a patterned etching barrier layer, and a patterned etching slurry layer can also be used.

如图15与图16所示,接着移除第二牺牲图案层54,以曝露出桥接线图案层56,其中桥接线图案层56包括复数个桥接线561。另外,于形成桥接线图案层56之后,可选择性地进行一第二回火制造工艺。随后,进行一第二网印制造工艺,以于底材50的感测区50S内形成一图案化绝缘层58,其中图案化绝缘层58包括复数个岛状绝缘结构581,大体上分别对应各桥接线561,且岛状绝缘结构581的长度小于桥接线561的长度,因此桥接线561的两端会曝露于岛状绝缘结构581之外。As shown in FIGS. 15 and 16 , the second sacrificial pattern layer 54 is then removed to expose the bridge line pattern layer 56 , wherein the bridge line pattern layer 56 includes a plurality of bridge lines 561 . In addition, after forming the bridging line pattern layer 56, a second tempering process can be optionally performed. Subsequently, a second screen printing manufacturing process is performed to form a patterned insulating layer 58 in the sensing region 50S of the substrate 50, wherein the patterned insulating layer 58 includes a plurality of island-shaped insulating structures 581, generally corresponding to each The bridge line 561 , and the length of the island-shaped insulating structure 581 is shorter than the length of the bridge line 561 , so both ends of the bridge line 561 are exposed outside the island-shaped insulating structure 581 .

如图17所示,接着于底材50的感测区50S内形成一第一透明导电层60。如图18所示,随后进行一第一网印制造工艺,于第一透明导电层60上形成一第一牺牲图案层62,并利用第一牺牲图案层62图案化第一透明导电层60。在本实施例中,第一牺牲图案层62是选用图案化蚀刻阻障层,并利用图案化蚀刻阻障层作为蚀刻屏蔽进行一第一蚀刻制造工艺,以去除未被图案化蚀刻阻障层覆盖的第一透明导电层60而形成感测垫图案层64。第一牺牲图案层62不限于选用图案化蚀刻阻障层,亦可选用图案化蚀刻浆料层。As shown in FIG. 17 , a first transparent conductive layer 60 is then formed in the sensing region 50S of the substrate 50 . As shown in FIG. 18 , a first screen printing process is then performed to form a first sacrificial pattern layer 62 on the first transparent conductive layer 60 , and use the first sacrificial pattern layer 62 to pattern the first transparent conductive layer 60 . In this embodiment, the first sacrificial pattern layer 62 is a patterned etching barrier layer, and a first etching process is performed using the patterned etching barrier layer as an etching mask to remove the unpatterned etching barrier layer. The sensing pad pattern layer 64 is formed by covering the first transparent conductive layer 60 . The first sacrificial pattern layer 62 is not limited to a patterned etching barrier layer, and a patterned etching slurry layer can also be used.

如图19与图20所示,接着移除第一牺牲图案层62,以曝露出一感测垫图案层64。感测垫图案层64包括复数个感测垫,例如复数个第一感测垫641与复数个第二感测垫642,以及复数个连接线643,其中第一感测垫641是沿一第一方向(例如图19的垂直方向)排列,且位于同一行的两相邻第一感测垫641通过连接线643而彼此连接,而第二感测垫642是沿一第二方向(例如图19的水平方向)排列,且位于同一列的两相邻第二感测垫642通过相对应的桥接线561而彼此连接。桥接线561被感测垫图案层64所完全包覆,藉此可避免桥接线561在蚀刻感测垫图案层64时被蚀刻到。此外,于形成感测垫图案层64之后,可选择性地进行一第一回火制造工艺。随后,进行一第四网印制造工艺,以于底材50的周边区50P内形成复数条与感测垫图案层64电性连接的连接导线66。之后,于底材50上形成一保护层67(图17未示)。As shown in FIGS. 19 and 20 , the first sacrificial pattern layer 62 is then removed to expose a sensing pad pattern layer 64 . The sensing pad pattern layer 64 includes a plurality of sensing pads, such as a plurality of first sensing pads 641 and a plurality of second sensing pads 642, and a plurality of connecting lines 643, wherein the first sensing pads 641 are along a first sensing pad. One direction (such as the vertical direction of FIG. 19 ) is arranged, and two adjacent first sensing pads 641 in the same row are connected to each other by connecting lines 643, and the second sensing pads 642 are along a second direction (such as FIG. 19 ), and two adjacent second sensing pads 642 in the same column are connected to each other through corresponding bridge lines 561 . The bridge lines 561 are completely covered by the sensing pad pattern layer 64 , thereby preventing the bridge lines 561 from being etched when the sensing pad pattern layer 64 is etched. In addition, after the sensing pad pattern layer 64 is formed, a first tempering process can be optionally performed. Subsequently, a fourth screen printing process is performed to form a plurality of connecting wires 66 electrically connected to the sensing pad pattern layer 64 in the peripheral region 50P of the substrate 50 . Afterwards, a protection layer 67 (not shown in FIG. 17 ) is formed on the substrate 50 .

本发明制作触控面板的方法所使用的底材可为各式软质基板,或硬质基板例如玻璃基板、塑料基板或石英基板等。另外,本发明制作触控面板的方法亦可与显示面板整合以制作出触控显示面板。请参考图21与图22。图21与图22绘示了本发明制作触控面板的方法的另两较佳实施例的示意图。如图21所示,触控面板的底材50可为一辅助基板,并于触控面板制作完成后贴附至一显示面板80(例如一液晶显示面板)上。在另一实施例中,如第22图所示,触控面板可与显示面板80共享同一底材(基板),亦即触控面板的底材50即为显示面板80的基板,例如一彩色滤光玻璃基板。于触控面板制作完成后,再将玻璃基板与其它元件组装成一触控显示面板。The substrate used in the method of manufacturing the touch panel of the present invention can be various soft substrates, or hard substrates such as glass substrates, plastic substrates or quartz substrates. In addition, the method for manufacturing a touch panel of the present invention can also be integrated with a display panel to manufacture a touch display panel. Please refer to Figure 21 and Figure 22. FIG. 21 and FIG. 22 are schematic diagrams of other two preferred embodiments of the method for manufacturing a touch panel of the present invention. As shown in FIG. 21 , the base material 50 of the touch panel can be an auxiliary substrate, and is attached to a display panel 80 (such as a liquid crystal display panel) after the touch panel is fabricated. In another embodiment, as shown in FIG. 22, the touch panel can share the same substrate (substrate) with the display panel 80, that is, the substrate 50 of the touch panel is the substrate of the display panel 80, such as a color Filter glass substrate. After the touch panel is manufactured, the glass substrate and other components are assembled into a touch display panel.

综上所述,本发明制作触控面板的方法利用网印制造工艺形成用以定义感测垫图案层与桥接线图案层的牺牲图案层,因此相较于现有使用黄光微影制造工艺的方法,本发明制作触控面板的方法可大幅节省成本。In summary, the method for manufacturing a touch panel of the present invention uses a screen printing manufacturing process to form a sacrificial pattern layer for defining a sensing pad pattern layer and a bridge line pattern layer, so compared with the existing method using a yellow light lithography manufacturing process , The method for manufacturing the touch panel of the present invention can greatly save costs.

以上所述仅为本发明的较佳实施例,凡依本发明权利要求范围所做的均等变化与修饰,皆应属本发明的涵盖范围。The above descriptions are only preferred embodiments of the present invention, and all equivalent changes and modifications made according to the claims of the present invention shall fall within the scope of the present invention.

Claims (18)

1. a method of making contact panel is characterized in that, described method comprises:
One ground is provided, and described ground comprises a sensing area;
In the described sensing area of described ground, form one first transparency conducting layer;
Carry out one first wire mark manufacturing process, on described first transparency conducting layer, form one first sacrificial pattern layer, and utilize described first transparency conducting layer of the described first sacrificial pattern patterned, to form a sensor pad patterned layer;
Carry out one first tempering manufacturing process, described sensor pad patterned layer is carried out tempering;
Carry out one second wire mark manufacturing process, in the described sensing area of described ground, form a patterned insulation layer, described patterned insulation layer comprises a plurality of island insulation systems;
In the described sensing area of described ground, form one second transparency conducting layer; And
Carry out one the 3rd wire mark manufacturing process; On described second transparency conducting layer, form one second sacrificial pattern layer; And utilize described second transparency conducting layer of the described second sacrificial pattern patterned; To form a bridging line patterned layer, described bridging line patterned layer comprises a plurality of bridging lines, and respectively corresponding each the described island insulation system of each described bridging line.
2. the method for making contact panel as claimed in claim 1; It is characterized in that; The wherein said first sacrificial pattern layer comprises a pattern etched barrier layer; And the step of described first transparency conducting layer of patterning comprises carries out one first etching manufacturing process, removes described first transparency conducting layer that is not covered by described pattern etched barrier layer.
3. the method for making contact panel as claimed in claim 1; It is characterized in that; The wherein said first sacrificial pattern layer comprises a pattern etched pulp layer, and the step of described first transparency conducting layer of patterning comprises described first transparency conducting layer that utilizes described pattern etched pulp layer to remove to be positioned at described pattern etched pulp layer below.
4. the method for making contact panel as claimed in claim 1; It is characterized in that; The wherein said second sacrificial pattern layer comprises a pattern etched barrier layer; And the step of described second transparency conducting layer of patterning comprises carries out one second etching manufacturing process, removes described second transparency conducting layer that is not covered by described pattern etched barrier layer.
5. the method for making contact panel as claimed in claim 1; It is characterized in that; The wherein said second sacrificial pattern layer comprises a pattern etched pulp layer, and the step of described second transparency conducting layer of patterning comprises described second transparency conducting layer that utilizes described pattern etched pulp layer to remove to be positioned at described pattern etched pulp layer below.
6. the method for making contact panel as claimed in claim 1 is characterized in that, wherein said sensor pad patterned layer comprises a plurality of first sensor pads, a plurality of second sensor pad and a plurality of connecting line.
7. the method for making contact panel as claimed in claim 1 is characterized in that, the material of wherein said sensor pad patterned layer comprises the polycrystalline tin indium oxide.
8. the method for making contact panel as claimed in claim 1 is characterized in that, described method is included in addition and forms after the described bridging line patterned layer, carries out one second tempering manufacturing process.
9. the method for making contact panel as claimed in claim 1 is characterized in that, wherein said sensor pad patterned layer comprises a plurality of sensor pads, and two adjacent sensor pads have a gap, and described gap is substantially between 30 microns and 500 microns.
10. the method for making contact panel as claimed in claim 1 is characterized in that, wherein a live width of each described bridging line is substantially between 50 microns and 500 microns.
11. the method for making contact panel as claimed in claim 1; It is characterized in that; Wherein each described island insulation system has a side; And each described bridging line has a side, and a distance of the corresponding described side of the described side of each described island insulation system and corresponding described bridging line is substantially between 50 microns and 500 microns.
12. the method for making contact panel as claimed in claim 1; It is characterized in that; Wherein said ground comprises a surrounding zone in addition; And described method comprises in addition carries out one the 4th wire mark manufacturing process, in the described surrounding zone of described ground, to form a plurality of and the lead that is connected of described sensor pad patterned layer electric connection.
13. the method for making contact panel as claimed in claim 12; It is characterized in that; Wherein a live width of each described connection lead is substantially between 10 microns and 300 microns, and a thickness of each described connection lead is substantially between 1 micron and 10 microns.
14. the method for making contact panel as claimed in claim 1 is characterized in that, wherein said ground comprises an assisting base plate.
15. the method for making contact panel as claimed in claim 14 is characterized in that, described method comprises in addition described assisting base plate is pasted on the display panel.
16. the method for making contact panel as claimed in claim 1 is characterized in that, wherein said ground comprises a display panel.
17. the method for making contact panel as claimed in claim 1 is characterized in that, wherein said ground comprises a glass substrate.
18. the method for making contact panel as claimed in claim 17 is characterized in that, described method comprises in addition described glass substrate is assembled into a touch-control display panel.
CN2009102627825A 2009-12-28 2009-12-28 How to make a touch panel Active CN101751181B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009102627825A CN101751181B (en) 2009-12-28 2009-12-28 How to make a touch panel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2009102627825A CN101751181B (en) 2009-12-28 2009-12-28 How to make a touch panel

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201110294137.9A Division CN102566811B (en) 2009-12-28 2009-12-28 How to make a touch panel

Publications (2)

Publication Number Publication Date
CN101751181A CN101751181A (en) 2010-06-23
CN101751181B true CN101751181B (en) 2012-03-28

Family

ID=42478219

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009102627825A Active CN101751181B (en) 2009-12-28 2009-12-28 How to make a touch panel

Country Status (1)

Country Link
CN (1) CN101751181B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI616792B (en) * 2017-05-03 2018-03-01 友達光電股份有限公司 Touch display device manufacturing method

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102654800B (en) * 2011-03-04 2014-09-24 瀚宇彩晶股份有限公司 Forming method of touch structure
CN102682875A (en) * 2011-03-16 2012-09-19 智盛全球股份有限公司 Transparent conductive structure applied to touch panel and manufacturing method thereof
CN102902446A (en) * 2012-10-26 2013-01-30 信利光电(汕尾)有限公司 Capacitive type touch screen and manufacturing method thereof
CN103500036B (en) 2013-08-30 2015-04-29 京东方科技集团股份有限公司 Manufacturing method for touch screen
CN103455203A (en) * 2013-08-30 2013-12-18 京东方科技集团股份有限公司 Touch screen, manufacturing method of touch screen and display device
US9433102B2 (en) 2013-08-30 2016-08-30 Boe Technology Group Co., Ltd. Touch screen panel and method for manufacturing the same, and display device
US9430109B2 (en) 2013-08-30 2016-08-30 Boe Technology Group Co., Ltd. Touch screen panel and method for manufacturing the same, and display device
CN104166492B (en) * 2014-08-18 2018-04-17 深圳莱宝高科技股份有限公司 A kind of capacitive touch screen
CN104252278A (en) 2014-09-23 2014-12-31 京东方科技集团股份有限公司 OGS (one-glass solution) touch screen substrate, manufacturing method of OGS touch screen substrate and related equipment
CN109239815A (en) * 2017-07-10 2019-01-18 上海箩箕技术有限公司 Cover board and forming method thereof, cover board motherboard, electronic equipment
CN108415602A (en) * 2018-03-12 2018-08-17 武汉华星光电半导体显示技术有限公司 A kind of preparation method of touch-control structure, OLED touch control display apparatus

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101051256A (en) * 2007-04-25 2007-10-10 信利半导体有限公司 Touching display screen and its making method
CN101059736A (en) * 2006-04-20 2007-10-24 铼宝科技股份有限公司 Light-transmitting touch panel and manufacturing method thereof
CN101261379A (en) * 2008-02-01 2008-09-10 信利半导体有限公司 Capacitance type touch screen and touch display devices containing the touch screen
CN101303635A (en) * 2008-07-01 2008-11-12 友达光电股份有限公司 Capacitive touch panel and manufacturing method thereof
CN101452362A (en) * 2007-12-07 2009-06-10 台达电子工业股份有限公司 Touch screen, panel thereof and manufacturing method
CN101576790A (en) * 2008-05-09 2009-11-11 群康科技(深圳)有限公司 Manufacturing process for touch-control panel
CN101609379A (en) * 2008-06-17 2009-12-23 洋华光电股份有限公司 Method for manufacturing touch pad

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101059736A (en) * 2006-04-20 2007-10-24 铼宝科技股份有限公司 Light-transmitting touch panel and manufacturing method thereof
CN101051256A (en) * 2007-04-25 2007-10-10 信利半导体有限公司 Touching display screen and its making method
CN101452362A (en) * 2007-12-07 2009-06-10 台达电子工业股份有限公司 Touch screen, panel thereof and manufacturing method
CN101261379A (en) * 2008-02-01 2008-09-10 信利半导体有限公司 Capacitance type touch screen and touch display devices containing the touch screen
CN101576790A (en) * 2008-05-09 2009-11-11 群康科技(深圳)有限公司 Manufacturing process for touch-control panel
CN101609379A (en) * 2008-06-17 2009-12-23 洋华光电股份有限公司 Method for manufacturing touch pad
CN101303635A (en) * 2008-07-01 2008-11-12 友达光电股份有限公司 Capacitive touch panel and manufacturing method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI616792B (en) * 2017-05-03 2018-03-01 友達光電股份有限公司 Touch display device manufacturing method

Also Published As

Publication number Publication date
CN101751181A (en) 2010-06-23

Similar Documents

Publication Publication Date Title
CN101751181B (en) How to make a touch panel
TWI396901B (en) Method of fabricating touch panel
US9665230B2 (en) Touch device and fabrication method thereof
US9153385B2 (en) Electrode structure of the touch panel, method thereof and touch panel
US9229555B2 (en) Touch screen panel and method of manufacturing the same
CN102213852B (en) Touch display device and method of manufacturing the same
WO2018028161A1 (en) Touch substrate, manufacturing method thereof, display panel and display device
CN102722276B (en) Touch sensor and preparation method thereof and touch screen LCD
WO2017008450A1 (en) In-plane switching array substrate and fabrication method thereof, and display device
CN103455203A (en) Touch screen, manufacturing method of touch screen and display device
CN103792711A (en) Touch display panel and manufacturing method thereof
US9300288B2 (en) Touch sensor panel and method for manufacturing the same
TW201340181A (en) Touch panel and method for manufacturing a touch sensor of the touch panel
CN103500036A (en) Touch screen, manufacturing method thereof and displaying device
US9645688B2 (en) OGS touch screen substrate and method of manufacturing the same, and related apparatus
CN103455204B (en) Touch screen, its manufacture method and display device
CN102446019B (en) Manufacturing method of touch panel
US10768764B2 (en) Touch structure and manufacturing method thereof, and touch device
CN203480463U (en) Touch screen and display device
WO2014015618A1 (en) Touch control panel and manufacturing method therefor, and touch control device
TWI498948B (en) Input device and manufacturing method thereof
CN106855669A (en) Array base palte and its manufacture method, display panel and display device
CN102566811B (en) How to make a touch panel
CN102479008B (en) Touch panel, its forming method and touch display device
KR101390991B1 (en) Method for Manufacturing Touch Screen Panel

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant