CN107121073B - A high-precision three-degree-of-freedom real-time measurement method and device based on a laser interferometer - Google Patents
A high-precision three-degree-of-freedom real-time measurement method and device based on a laser interferometer Download PDFInfo
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Abstract
本发明提供了一种基于激光干涉仪的高精度三自由度实时测量方法及装置，解决了运动物体的俯仰角、滚动角以及轴向位移三个自由度的实时测量问题。该装置包含高精度激光干涉测距仪、外反射角锥棱镜、平面反射镜、快门和控制及数据处理系统。利用激光干涉测距仪、外反射角锥棱镜和快门测量运动物体不同坐标的三个点，再利用测量得到的三个距离信息及三个坐标的位置信息算出运动物体上三个点的坐标变化，最后利用本发明提供的构造理想平面的方法解算出目标的俯仰、滚动角和轴向位移量。本发明此方法具有精度高、结构简单、数据处理量小和实时性好的特点。
The invention provides a high-precision three-degree-of-freedom real-time measurement method and device based on a laser interferometer, which solves the real-time measurement problem of the pitch angle, roll angle and axial displacement of a moving object. The device includes a high-precision laser interferometric rangefinder, external reflection corner prism, flat mirror, shutter and control and data processing systems. Use the laser interferometric rangefinder, external reflection corner prism and shutter to measure three points of different coordinates of the moving object, and then use the measured three distance information and the position information of the three coordinates to calculate the coordinate changes of the three points on the moving object , and finally use the method for constructing an ideal plane provided by the present invention to calculate the pitch, roll angle and axial displacement of the target. The method of the invention has the characteristics of high precision, simple structure, small data processing amount and good real-time performance.
Description
技术领域technical field
本发明属于精密测量领域，具体涉及一种基于激光干涉仪的高精度三自由度实时测量的方法及装置。The invention belongs to the field of precision measurement, and in particular relates to a method and a device for high-precision three-degree-of-freedom real-time measurement based on a laser interferometer.
背景技术Background technique
测量是一切科学研究和工业生产的基础，在测量领域中，距离、位移、角度和角位移是基本测量物理量。随着技术的发展，出现了各种各样的测量方法，在高精度测量方面，光学方法具有可溯源和非接触的优势，飞行时间法和激光干涉测距是常用的长度测量手段，自准直法、激光干涉法、环形激光法和内反射法是常用的测角方法，这些方法一般使用在单一物理量的测量。随着技术的发展，单一物理量测量已经不能满足科学研究和工业生产的需求，这就要求测量仪器具有多自由度同时测量的能力。Measurement is the basis of all scientific research and industrial production. In the field of measurement, distance, displacement, angle and angular displacement are the basic measurement physical quantities. With the development of technology, various measurement methods have appeared. In terms of high-precision measurement, optical methods have the advantages of traceability and non-contact. Time-of-flight method and laser interferometric ranging are commonly used length measurement methods. Straight method, laser interferometry, ring laser method and internal reflection method are commonly used angle measurement methods, which are generally used in the measurement of a single physical quantity. With the development of technology, the measurement of a single physical quantity can no longer meet the needs of scientific research and industrial production, which requires the measuring instrument to have the ability to measure multiple degrees of freedom at the same time.
多自由度的测量方法中，一般采用多种传感器和测量方法结合实现多维度测量，这样的测量系统很复杂且由于增加测量设备而对测量目标产生不利影响，导致测量结果误差源增加。随着计算机的发展，激光散斑干涉测量、数字全息测量及计算机视觉在多自由度测量领域开始出现，但是这种基于图像处理的方法需要处理大量的图像信息而不能高速实时测量，并且其测量精度受限于图像传感器的像元大小。In the multi-degree-of-freedom measurement method, a combination of various sensors and measurement methods is generally used to achieve multi-dimensional measurement. Such a measurement system is very complex and has an adverse impact on the measurement target due to the addition of measurement equipment, resulting in an increase in the error source of the measurement result. With the development of computers, laser speckle interferometry, digital holographic measurement and computer vision have begun to appear in the field of multi-degree-of-freedom measurement, but this method based on image processing needs to process a large amount of image information and cannot measure in high-speed real-time, and its measurement Accuracy is limited by the pixel size of the image sensor.
针对现有技术的不足，采用激光干涉测量的方法能获得高精度距离信息，从而获得更加准确的坐标点信息，采用多反射面棱镜实现一个干涉仪用于多点测量的目的；结合理想平面构造法，把目标的运动信息转换为平面法向量之间的转动和平面的平移，从而获得高精度的三自由度运动信息。这方法具有结构简单和数据运算量小的优势，但在其他文献中尚未采用过此方法。In view of the shortcomings of the existing technology, the method of laser interferometry can obtain high-precision distance information, so as to obtain more accurate coordinate point information, and a multi-reflection prism is used to realize the purpose of an interferometer for multi-point measurement; combined with the ideal plane structure The method converts the motion information of the target into the rotation between the plane normal vectors and the translation of the plane, so as to obtain high-precision three-degree-of-freedom motion information. This method has the advantages of simple structure and small amount of data operation, but it has not been adopted in other literatures.
发明内容SUMMARY OF THE INVENTION
本发明针对现有技术中结构复杂和测量精度不高的不足，设计了一种基于激光干涉仪的高精度三自由度测量方法和装置，具有精度高、结构简单、数据处理量小和实时性好的特点。Aiming at the shortcomings of complex structure and low measurement accuracy in the prior art, the present invention designs a high-precision three-degree-of-freedom measurement method and device based on a laser interferometer, which has the advantages of high precision, simple structure, small data processing capacity and real-time performance. good feature.
本发明采用的技术方案为：一种基于激光干涉仪的高精度三自由度实时测量的装置，包括：高精度激光测距仪、外反射角锥棱镜、直角屋脊棱镜、快门、控制及数据处理系统、光的传输方向控制、快门控制信号接口、信号传输系统和机构外壳；测量装置中高精度激光测距仪和外反射角锥棱镜为同轴安装，其中外反射角锥棱镜的镜面依次与直角屋脊棱镜的脊线平行并使直角屋脊棱镜的入射光与反射光互相垂直；处于同一平面内的三个直角屋脊棱镜之间以两两相距120°的位置固定在机构外壳上；控制及处理系统接收由高精度激光测距仪所测的距离信息d1、d2和d3，对其进行运算得到三自由度运动信息，同时控制及处理系统发出控制指令控制快门状态完成测量。The technical scheme adopted by the present invention is: a high-precision three-degree-of-freedom real-time measurement device based on a laser interferometer, comprising: a high-precision laser rangefinder, an external reflection corner prism, a right-angle roof prism, a shutter, control and data processing System, light transmission direction control, shutter control signal interface, signal transmission system and mechanism casing; in the measuring device, the high-precision laser rangefinder and the external reflection corner prism are installed coaxially, and the mirror surface of the external reflection corner prism is in turn with the right angle The ridge lines of the roof prism are parallel and the incident light and reflected light of the right-angle roof prism are perpendicular to each other; the three right-angle roof prisms in the same plane are fixed on the mechanism shell at a distance of 120° in pairs; control and processing system The distance information d 1 , d 2 and d 3 measured by the high-precision laser rangefinder is received, and the three-degree-of-freedom motion information is obtained by calculating them. At the same time, the control and processing system sends out control commands to control the shutter state to complete the measurement.
其中，外反射角锥棱镜将沿轴线的平行光束分成沿不同方向传播的三束光，这三束光的传播方向互为120°且垂直于轴线；外反射角锥棱镜结合三个位置互为120°的直角屋脊棱镜实现三个不同位置点距离d1、d2和d3的测量。Among them, the external reflection corner prism divides the parallel beam along the axis into three beams propagating in different directions, and the propagation directions of these three beams are 120° from each other and perpendicular to the axis; the external reflection corner prism combines three positions with each other The 120° right angle roof prism enables the measurement of distances d 1 , d 2 and d 3 at three different positions.
另外采用构造理想平面的方法实现俯仰、滚转的角位移和轴向活塞位移同时测量，具体测量方法包括以下步骤：In addition, the method of constructing an ideal plane is used to realize the simultaneous measurement of the angular displacement of pitch and roll and the displacement of the axial piston. The specific measurement method includes the following steps:
1、根据三个平面反射镜的位置确定参考平面的法线；1. Determine the normal of the reference plane according to the positions of the three plane mirrors;
2、根据测量的距离信息计算待测物体反射面的法线；2. Calculate the normal of the reflecting surface of the object to be measured according to the measured distance information;
3、利用坐标转换关系解出运动物体在俯仰角、滚转角和轴向位移的运动量。3. Use the coordinate transformation relationship to solve the motion amount of the moving object at the pitch angle, roll angle and axial displacement.
本发明相比于现有技术的优点在于：Compared with the prior art, the present invention has the following advantages:
1.本发明提出了采用多面反射型棱镜(如外反射角锥棱镜)实现光束方向的控制，解决了现有技术中需要多个干涉仪进行多点测量的问题，使得测量装置的结构简单紧凑。1. The present invention proposes the use of a multi-faceted reflection prism (such as an external reflection corner cube prism) to realize the control of the beam direction, which solves the problem that multiple interferometers are required for multi-point measurement in the prior art, so that the structure of the measurement device is simple and compact. .
2.本发明提出的采用构造理想平面的方法实现俯仰、滚转的角位移和轴向活塞位移同时测量。2. The method of constructing an ideal plane proposed by the present invention realizes simultaneous measurement of pitch, roll angular displacement and axial piston displacement.
3.本发明此方法具有精度高、结构简单、数据处理量小和实时性好的特点。3. The method of the present invention has the characteristics of high precision, simple structure, small data processing amount and good real-time performance.
附图说明Description of drawings
图1为本发明装置结构图；Fig. 1 is the structure diagram of the device of the present invention;
图2为本发明测量方法流程图；Fig. 2 is the flow chart of the measuring method of the present invention;
图3为角位移测量误差曲线图；Fig. 3 is a graph of angular displacement measurement error;
图4为活塞位移测量误差曲线图；Fig. 4 is a curve diagram of piston displacement measurement error;
图中附图标记含义为：1为高精度激光干涉测距仪，2为外反射角锥棱镜，3为直角屋脊棱镜，4为快门，5为控制及数据处理系统，6为光的传输方向控制，7为快门控制信号接口，8为信号传输系统，9为机构外壳。The meanings of the reference symbols in the figure are: 1 is a high-precision laser interferometric rangefinder, 2 is an external reflection corner cube prism, 3 is a right-angle roof prism, 4 is a shutter, 5 is a control and data processing system, and 6 is the transmission direction of light Control, 7 is the shutter control signal interface, 8 is the signal transmission system, and 9 is the mechanism shell.
具体实施方式Detailed ways
为使本发明的目的、技术方案和优点更加清晰明了，一下结合具体实施实例，结合附图对本发明进一步说明。In order to make the objectives, technical solutions and advantages of the present invention clearer and clearer, the present invention will be further described with reference to specific implementation examples and accompanying drawings.
首先结合图1介绍基于激光干涉仪的高精度三自由度测量装置。测量装置的主要部件有高精度激光干涉测距仪1、外反射角锥棱镜2、直角屋脊棱镜3、快门4、控制及数据处理系统5、光的传输方向控制6、快门控制信号接口7、信号传输系统8和机构外壳9；测量装置中高精度激光测距仪1和外反射角锥棱镜2为同轴安装，其中外反射角锥棱镜的镜面依次与直角屋脊棱镜3的脊线平行并使直角屋脊棱镜的入射光与反射光互相垂直；处于同一平面内的三个直角屋脊棱镜3之间以两两相距120°的位置固定在机构外壳上；外反射角锥棱镜轴线与反射镜之间的距离设为81.65mm；控制及数据处理系统5接收由高精度激光测距仪1所测的距离信息d1、d2和d3，对其进行运算得到三自由度运动信息，同时控制及数据处理系统5发出控制指令控制快门状态完成测量。First, a high-precision three-degree-of-freedom measurement device based on a laser interferometer is introduced with reference to Figure 1. The main components of the measuring device are a high-precision laser interferometric rangefinder 1, an external reflection corner prism 2, a right-angle roof prism 3, a shutter 4, a control and data processing system 5, light transmission direction control 6, shutter control signal interface 7, The signal transmission system 8 and the mechanism housing 9; the high-precision laser rangefinder 1 and the external reflection corner cube prism 2 in the measuring device are installed coaxially, wherein the mirror surface of the external reflection corner cube prism is in turn parallel to the ridge line of the right angle roof prism 3 and makes the The incident light and the reflected light of the right-angle roof prism are perpendicular to each other; the three right-angle roof prisms 3 in the same plane are fixed on the mechanism shell at a distance of 120° in pairs; The distance is set to 81.65mm; the control and data processing system 5 receives the distance information d 1 , d 2 and d 3 measured by the high-precision laser range finder 1, and performs operations on them to obtain the three-degree-of-freedom motion information, and simultaneously controls and The data processing system 5 issues a control instruction to control the shutter state to complete the measurement.
结合图2，本发明基于激光干涉仪的三自由度测量方法步骤如下：In conjunction with Fig. 2, the three-degree-of-freedom measurement method steps of the present invention based on a laser interferometer are as follows:
步骤1)、根据测量装置的具体尺寸，计算出三个平面反射镜的中心位置坐标A0(x1,y1,z1)、B0(x2,y2,z2)、C0(x3,y3,z3)，并将其保存作为参考基准。根据装置具体参数并假设测量装置在三维笛卡尔坐标系的第一象限正方向，得到平面反射镜中心的特殊坐标为A0(100,0,0)、B0(0,100,0)、C0(0,0,100)，别对准三个次反射镜以测量距离信息d1、d2和d3。Step 1), according to the specific size of the measuring device, calculate the center position coordinates of the three plane mirrors A 0 (x 1 , y 1 , z 1 ), B 0 (x 2 , y 2 , z 2 ), C 0 (x 3 , y 3 , z 3 ) and save it as a reference datum. According to the specific parameters of the device and assuming that the measuring device is in the positive direction of the first quadrant of the three-dimensional Cartesian coordinate system, the special coordinates of the center of the plane mirror are obtained as A 0 (100,0,0), B 0 (0,100, 0), C 0 (0, 0, 100), and align the three sub-mirrors to measure distance information d 1 , d 2 and d 3 .
步骤2)、代入d1、d2和d3计算出目标面上三个点的坐标A(x1,y1,z1)、B(x2,y2,z2)、C(x3,y3,z3)，根据A、B、C三点坐标确定目标面内的两个不共线的向量和由以下的表达式得到当前目标平面法线 Step 2), substitute d 1 , d 2 and d 3 to calculate the coordinates of three points on the target surface A(x 1 , y 1 , z 1 ), B(x 2 , y 2 , z 2 ), C(x 3 , y 3 , z 3 ), according to the coordinates of the three points A, B, and C to determine two non-collinear vectors in the target surface and by the following The expression to get the current target plane normal
步骤3)、重复步骤1和步骤2，获得运动后的目标平面法线 Step 3), repeat steps 1 and 2 to obtain the normal of the target plane after the movement
步骤4)、根据坐标变换关系两个方向的旋转角分别P和R，则两个方向都存在旋转时，变换矩阵T为：Step 4), according to the coordinate transformation relationship The rotation angles of the two directions are P and R respectively, then when there is rotation in both directions, the transformation matrix T is:
计算得到：Calculated:
其中， in,
步骤5)、根据求出的角位移P和R，代入到原坐标数据中获得只经过转动而没有活塞移动的目标状态坐标A1(x1,y1,z1)、B1(x2,y2,z2)、C1(x3,y3,z3)，并计算对应前后坐标点距离|A1-A|、|B1-B|和|C1-C|及它们的均值，用三个点的距离差近似代替活塞移动d。Step 5), substitute the obtained angular displacements P and R into the original coordinate data to obtain the target state coordinates A1 (x 1 , y 1 , z 1 ), B1 (x 2 , y only after rotation without piston movement) 2 , z 2 ), C1 (x 3 , y 3 , z 3 ), and calculate the distances |A1-A|, |B1-B| and |C1-C| The distance difference of the points approximates the displacement d of the piston.
步骤6)、将A(x1,y1,z1)、B(x2,y2,z2)、C(x3,y3,z3)存起来作为下一轮测量的原平面数据，按照步骤1)中顺序测量d1、d2和d3,并重复步骤2)步骤6)行测量。Step 6), save A(x 1 , y 1 , z 1 ), B(x 2 , y 2 , z 2 ), C(x 3 , y 3 , z 3 ) as the original plane of the next round of measurement Data, measure d 1 , d 2 and d 3 in order in step 1), and repeat step 2) and step 6) to measure.
当然在本实例中，对外反射角锥棱镜、干涉仪及平面反射镜的安装要求严格，如果安装中存在角度误差的情况下会对测量结果造成影响，因此要控制安装误差在一定的范围内以保证测量精度。图3和图4的计算机仿真计算可以看出，在工作距离为800mm的配置下0.01°的角位移测量误差和活塞位移误差分别为10-6°和10-14mm。Of course, in this example, the installation requirements of the external reflection corner cube prism, interferometer and plane reflector are strict. If there is an angular error in the installation, it will affect the measurement results. Therefore, the installation error should be controlled within a certain range. Guaranteed measurement accuracy. It can be seen from the computer simulation calculations in Figures 3 and 4 that the angular displacement measurement error of 0.01° and the piston displacement error are 10 -6 ° and 10 -14 mm, respectively, under the configuration with a working distance of 800 mm.
尽管上面对本发明说明性的具体实施方式进行了描述，以便于本技术领的技术人员理解本发明，但应该清楚，本发明的保护范围并不局限于此，尤其是外反射型棱锥、算法流程和光路通断装置快门，任何熟悉该技术的人在本发明所揭示的技术范围内，可理解想到的变换或替换均涵盖在本发明包含的范围之内。Although the illustrative specific embodiments of the present invention have been described above to facilitate those skilled in the art to understand the present invention, it should be clear that the protection scope of the present invention is not limited thereto, especially the external reflection pyramid, algorithm flow With regard to the shutter of the optical path on-off device, any person familiar with the technology can understand that changes or substitutions that are conceivable within the technical scope disclosed by the present invention are all included in the scope of the present invention.
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| CN110455277B (en) * | 2019-08-19 | 2023-04-07 | 哈尔滨工业大学 | High-precision attitude measurement device and method based on data fusion of Internet of things |
| CN113028987A (en) * | 2021-03-03 | 2021-06-25 | 中国科学院光电技术研究所 | High-precision six-degree-of-freedom measuring method and device based on laser range finder |
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